Exposure apparatus and exposure method

Abstract

To provide an exposure apparatus and an exposure method in which the conveyance speed of a body to be exposed and the actual travel speed of a pattern object can be accurately synchronized.SOLUTION: An exposure apparatus 10, when a detection part 40 passes a projection region A1 at a first travel speed in a state where still images of two objects apart from each other are projected on the projection region A1 by an energy beam, calculates a distance between the objects on the basis of a time difference at which the detection part 40 detects an energy beam of each object and the first travel speed. Further, when two objects with the distance between the objects move in the projection region A1 at a predetermined speed in a state where the detection part 40 remains stationary in the projection region A1, the apparatus calculates the actual second travel speed of the projected objects on the basis of a time difference at which the detection part 40 detects an energy beam of each object and the distance between the objects. The conveyance speed of a body to be exposed 11 and the actual travel speed of a pattern object are synchronized on the basis of the calculated second travel speed.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to an exposure apparatus and an exposure method. [Background technology]

[0002] As an example of a technique for forming a pattern on a thin film, lithography is known in which a photosensitive film made of a photosensitive material formed on a thin film is exposed to active energy rays such as ultraviolet rays or electron beams (for example, Patent Document 1).

[0003] As an example of a thin film manufacturing technology using lithography, a technology has been considered in which a photosensitive film is exposed to light while a substrate comprising a thin film and a photosensitive film is being transported. In this manufacturing technology, a moving image of a patterned object is projected onto the substrate using active energy rays in accordance with the transport speed of the substrate. This allows the patterned active energy rays to be continuously projected onto any region of the photosensitive film of the transported substrate, thereby ensuring the integrated light amount required for patterning the photosensitive film while the substrate is being transported. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent Publication No. 2021-9920 Summary of the Invention [Problem to be solved by the invention]

[0005] In the above manufacturing techniques, the integrated light amount may be adjusted depending on the thickness of the photosensitive film and the type of photosensitive material that makes up the photosensitive film. Furthermore, the distance between the pattern object projection device and the exposed object may be adjusted to change the resolution of the pattern object or the intensity of the active energy rays. When making these adjustments, it is necessary to synchronize the actual movement speed of the pattern object with the transport speed of the exposed object.

[0006] In the past, the actual movement speed of the pattern object and the transport speed were synchronized while visually checking them by adjusting the set speed at which the pattern object moves in the video or by adjusting the transport speed of the exposed object. As a result, a speed discrepancy occurred between the movement speed of the pattern object and the transport speed of the exposed object, which could cause the pattern shape formed on the photosensitive film to be elongated or the edge shape of the pattern formed on the photosensitive film to become unclear. [Means for solving the problem]

[0007] An exposure apparatus for solving the above problem includes a projection unit that projects an image onto a projection area using active energy rays, a transport unit that transports an object to be exposed along a specific transport direction so that the object passes through the projection area, a detection unit that detects the active energy rays, and a calculation unit, wherein the calculation unit uses the projection unit to project onto the projection area a still image in which a first test object and a second test object are lined up at a set distance in the transport direction, and when the detection unit moves through the projection area along the transport direction at a first movement speed, calculates an actual inter-object distance between the first test object and the second test object projected onto the projection area based on the first movement speed and the time difference between when the detection unit detects the active energy rays of one of the first test object and the second test object and when it detects the active energy rays of the other test object; and When a test video in which the first test object and the second test object, which are lined up with the set distance in the transport direction, move at a test set speed in the transport direction, is projected onto the projection area using the above calculation, a second moving speed at which the first test object and the second test object projected onto the projection area actually move in the projection area is calculated based on the time difference between when the detection unit detects the active energy rays of one of the first test object and the second test object and when the detection unit detects the active energy rays of the other of the first test object and the second test object, and the calculated inter-object distance; and in the exposure apparatus, when an exposure video in which a pattern object moves at an exposure set speed in the transport direction is projected onto the exposed object while transporting the exposed object using the transport unit, the transport speed of the exposed object and the actual moving speed at which the pattern object projected on the exposed object moves in the transport direction are synchronized based on the second moving speed calculated by the calculation unit.

[0008] An exposure method for solving the above problem includes an exposure method in which, when an object to be exposed transported along a specific transport direction passes through a projection area of ​​a projection unit that projects an image using active energy rays, the object to be exposed is transported at a specific transport speed, and an exposure moving image is projected in the transport direction relative to the object to be exposed. The exposure method projects a still image in which a first test object and a second test object are lined up at a set distance in the transport direction onto the projection area using the projection unit. When a detection unit that detects the active energy rays moves through the projection area along the transport direction at a first moving speed, the first test object and the second test object projected onto the projection area are projected based on the first moving speed and the time difference between when the detection unit detects the active energy rays of one of the first test object and the second test object and when the detection unit detects the active energy rays of the other of the first test object and the second test object. and, when the detection unit is kept stationary in the projection area and the projection unit is used to project a test video onto the projection area, in which the first test object and the second test object, which are lined up with the set distance apart in the transport direction, move at a test set speed in the transport direction, the detection unit calculates a second moving speed at which the first test object and the second test object projected onto the projection area actually move in the projection area based on the time difference between when the detection unit detects the active energy ray of one of the first test object and the second test object and when the detection unit detects the active energy ray of the other of the first test object and the second test object, and the calculated inter-object distance, and synchronizes the transport speed at which the exposed object is transported with the actual moving speed at which the pattern object projected onto the exposed object moves in the transport direction based on the calculated second moving speed.

[0009] According to the exposure apparatus and exposure method described above, the transport speed of the exposed object and the actual moving speed of the projected pattern object can be synchronized more accurately than in the conventional method of synchronizing speeds by visual inspection.

[0010] In the above exposure apparatus, the first test object and the second test object may be configured to have a straight line portion perpendicular to the transport direction. According to this configuration, when the detection unit is moved with a test still image projected onto the projection area, the test objects are reliably positioned on the movement path of the detection unit. Similarly, when a test moving image is projected onto the projection area, the detection unit is reliably positioned on the movement paths of the first test object and the second test object. Therefore, the detection unit can more reliably detect active energy rays.

[0011] In the above exposure apparatus, the exposure set speed in the exposure moving image may be equal to the test set speed in the test moving image, and the transport unit may be configured to transport the exposure object so that the transport speed matches the second movement speed calculated by the calculation unit. According to the above configuration, the transport speed of the exposure object by the transport unit can be synchronized with the actual second movement speed of the pattern object. In this case, by setting the test set speed to the same speed as the exposure set speed in advance, synchronization can be completed simply by matching the transport speed of the exposure object by the transport unit with the actual second movement speed of the test object calculated by the calculation unit.

[0012] In the exposure apparatus, the transport speed of the transport unit may be set to an arbitrary speed, and the set exposure speed in the exposure moving image may be set to a value obtained by multiplying the set test speed in the test moving image by the ratio of the transport speed to the second moving speed calculated by the calculation unit. According to the above configuration, the transport speed of the exposure object by the transport unit can be synchronized with the actual moving speed of the pattern object while setting the transport speed to an arbitrary speed.

[0013] In the above exposure apparatus, the transport unit may be a first transport unit for transporting the object to be exposed by a roll-to-roll method, and the exposure apparatus may be configured to further include a second transport unit that transports the detection unit so that the detection unit moves through the projection area along the transport direction at the first movement speed. According to the above configuration, by including the second transport unit that transports the detection unit, it is possible to calculate the actual second movement speed of the test object even when the object to be exposed is transported by a roll-to-roll method.

[0014] In the exposure apparatus, the transport unit may be configured to transport the object by transporting a stage on which the object is placed, and to transport the detection unit so that the detection unit moves through the projection area along the transport direction at the first moving speed. According to the configuration, the detection unit can be transported using the transport unit for transporting the object. [Effects of the Invention]

[0015] According to the present disclosure, the transport speed of the exposure object and the actual movement speed of the pattern object can be accurately synchronized. [Brief explanation of the drawings]

[0016] [Figure 1] FIG. 1 is a schematic diagram showing an exposure apparatus. [Figure 2] FIG. 2 is a top view illustrating the arrangement of the detection unit and the second transport unit relative to the projection area. [Figure 3] FIG. 3 is a top view showing a state in which an exposure moving image including a pattern object is projected onto an object to be exposed. [Figure 4] FIG. 4 is a top view illustrating a test still image projected onto the projection area and a state of the detection unit passing through the projection area in the first calculation step. [Figure 5] Figure 5 is a graph showing the intensity of the active energy rays detected by the detection unit and the intensity of the signal output by the detection unit to the calculation unit when the detection unit passes through the projection area with a test still image projected onto the projection area in the first calculation step. [Figure 6] FIG. 6 is a top view illustrating a test moving image projected onto the projection area and a state of a detection unit arranged on the projection area in the second calculation step. [Figure 7] FIG. 7 is a graph showing the intensity of the active energy rays detected by the detection unit and the intensity of the signal output by the detection unit to the calculation unit when a test moving image is projected onto the projection area in the second calculation step. [Figure 8] FIG. 8 is a schematic diagram showing a modified example of the exposure apparatus. DETAILED DESCRIPTION OF THE INVENTION

[0017] An embodiment of an exposure apparatus and an exposure method will be described below with reference to FIGS. (Exposure equipment) 1, the exposure apparatus 10 includes a first transport unit 20 and a projection unit 30. The first transport unit 20 transports the object 11 along a specific transport direction D1. The projection unit 30 projects active energy rays onto the object 11 transported by the first transport unit 20, thereby exposing the object 11.

[0018] The object to be exposed 11 is, for example, a thin film in the form of a sheet. The object to be exposed 11 includes a substrate 12 and a photosensitive film 13 formed on the substrate 12. The substrate 12 is, for example, made of a resin film or sheet. The photosensitive film 13 is made of any photosensitive material. The photosensitive material is a resin material that undergoes a photochemical reaction such as photocrosslinking, photodecomposition, or photopolymerization when irradiated with active energy rays such as electron beams or ultraviolet rays. An example of the photosensitive material is a photoresist material.

[0019] The first transport unit 20 transports the object 11 using a roll-to-roll method, for example. As an example, the first transport unit 20 unwinds the object 11 from a first roll R1 on which the object 11 is wound, and winds up the object 11, on which the photosensitive film 13 has been exposed by the projection unit 30, into a second roll R2. The first transport unit 20 transports the object 11 so that the photosensitive film 13 faces the projection unit 30. The first transport unit 20 includes a first transport control device 21 for controlling the transport speed of the object 11.

[0020] The projection unit 30 includes a projector 31 and a playback device 32. The projector 31 is a projector capable of projecting active energy rays such as ultraviolet rays and electron beams. The projector 31 projects a moving image onto the projection area A1 using the active energy rays. The playback device 32 plays back the moving image projected by the projector 31.

[0021] The projection area A1 refers to the range in which the projector 31 can project a clear moving image. The projection area A1 has a size corresponding to the projection distance, which refers to the distance between the projection target and the projector 31, in a plane direction perpendicular to the projection direction. The projection area A1 also has a depth corresponding to the depth of field of the projector 31 in the projection direction.

[0022] The projector 31 is configured to be adjustable in distance from the object 11 in order to change the resolution of an object included in a moving image projected onto the object 11 and the intensity of the active energy rays. For example, the projector 31 is configured to be movable in the vertical direction.

[0023] The exposure apparatus 10 includes a detection unit 40, a second transport unit 41, and a calculation unit 50. The detection unit 40 is a sensor capable of detecting active energy rays. When the detection unit 40 detects active energy rays, it outputs a signal to the calculation unit 50 to notify that active energy rays have been detected.

[0024] The second transport unit 41 moves the detection unit 40 along the transport direction D1. The detection unit 40 is disposed on the second transport unit 41 so as to be positioned near the object 11 in the height direction. The second transport unit 41 includes a second transport control device 42 for controlling the movement speed of the detection unit 40.

[0025] Each of the first transport control device 21, the reproduction device 32, and the second transport control device 42 is a computer terminal that includes, for example, a control unit such as a CPU or MPU, a storage unit such as a non-volatile memory, and an input unit that accepts input from an operator.

[0026] The calculation unit 50 is, for example, a programmable logic controller (PLC) that includes a control unit such as a CPU, a storage unit such as a nonvolatile memory, and a signal input unit that receives input from the detection unit 40. The operation of the calculation unit 50 will be described in detail later.

[0027] 2, the second transport section 41 is disposed parallel to the transport direction D1. The second transport section 41 moves the detection section 40 at a first moving speed V D The detecting unit 40 is transported so as to move in the projection area A1 along the transport direction D1.

[0028] The second transport unit 41 preferably transports the detection unit 40 along the transport direction D1 so that the detection unit 40 passes through the projection area A1 from one end to the other. The second transport unit 41 is configured to be able to stop the detection unit 40 at any position on the transport track. For convenience, the exposed object 11 is not shown in FIG. 2.

[0029] When the vertical position of the projector 31 changes, the position (range) of the projection area A1 also changes accordingly. The second transport unit 41 is configured so that the detection unit 40 can pass through the projection area A1 from outside one end of the projection area A1 to outside the other end of the projection area A1 when the projection area A1 is maximized by adjusting the vertical position of the projector 31.

[0030] (Exposure method) An exposure method using exposure apparatus 10 will be described with reference to FIG. As shown in Figure 3, in an exposure method using an exposure apparatus 10, when the exposed object 11 passes through a projection area A1, the exposed object 11 is transported at a specific transport speed and an exposure video including a pattern object PO1 is projected onto the exposed object 11.

[0031] That is, the projector 31 projects an exposure moving image including a pattern object PO1 onto the photosensitive film 13 of the object 11 passing through the projection area A1 among the objects 11 transported by the first transport unit 20. Note that although the pattern object PO1 is shown as a dot pattern with three rows in the horizontal direction and five rows in the vertical direction in Fig. 3, the shape of the pattern object PO1 can be any shape.

[0032] The exposure moving image is stored in a storage unit of the playback device 32. In the exposure moving image, a plurality of images are continuously projected in the projection area A1, in which the position of the pattern object PO1 gradually moves along the transport direction D1.

[0033] In the exposure video, the pattern object PO1 moves at a predetermined exposure setting speed V P1 The exposure setting speed V P1 is defined by the virtual moving speed of the pattern object PO1 set on the moving image file of the exposure moving image and the playback speed of the exposure moving image.

[0034] The virtual movement speed of the pattern object PO1 in the exposure moving image on the moving image file is determined, for example, by the number of frames required for the pattern object PO1 to move a unit distance in the image. The playback speed of the exposure moving image is determined, for example, by the number of frames projected per second. The playback device 32 adjusts at least one parameter of the virtual movement speed of the exposure moving image on the moving image file and the playback speed of the exposure moving image, thereby adjusting the exposure set speed V P1 is configured to be adjustable.

[0035] By projecting the exposure moving image onto the projection area A1, the pattern object PO1 moves within the projection area A1 along the transport direction D1 at a moving speed V P2 The projected pattern object PO1 moves at a speed V P2 The speed of movement of the pattern object PO1 in the real space as it moves within the projection area A1.

[0036] In the exposure apparatus 10, the actual moving speed V of the pattern object PO1 projected onto the exposure object 11 is P2 The transport speed of the object 11 is synchronized with the exposure setting speed V in the exposure moving image so that the transport speed of the object 11 is synchronized with the exposure setting speed V P1 are set by the method described below.

[0037] The actual moving speed V of the pattern object PO1 projected onto the exposure object 11 P2 and the transport speed of the exposed object 11 are synchronized, so that the pattern object PO1 is projected so as to run parallel to the exposed object 11 moving within the projection area A1. This makes it possible to ensure the integrated amount of light required for patterning the photosensitive film 13 while transporting the exposed object 11.

[0038] (speed synchronization method) For example, even when the same exposure video is projected, the actual moving speed V of the projected pattern object PO1 P2 changes depending on the distance between the object 11 and the projector 31. Therefore, in the exposure apparatus 10, when the distance between the object 11 and the projector 31 is changed, the transport speed of the object 11 by the first transport unit 20 and the actual moving speed V of the projected pattern object PO1 change. P2 It is necessary to synchronize the

[0039] 4 to 7, the conveying speed of the exposure object 11 by the first conveying unit 20 and the actual moving speed V of the projected pattern object PO1 are P2The following describes a speed synchronization method for synchronizing the above. The following speed synchronization method is executed, for example, before the first transport unit 20 starts transporting the exposure object 11. The speed synchronization method includes a first calculation step and a second calculation step.

[0040] First, the first calculation step will be described with reference to Fig. 4 and Fig. 5. As shown in Fig. 4, in the first calculation step, a test still image is first projected onto the projection area A1 using the projection unit 30. The test still image is stored in the storage unit of the playback device 32.

[0041] The test still image includes a first test object TO1 and a second test object TO2. In the test still image, the first test object TO1 and the second test object TO2 are arranged side by side in the conveyance direction D1 with a set distance between them. In the conveyance direction D1, the first test object TO1 is located upstream of the second test object TO2. The set distance refers to a virtual distance set in the image. In the following description, when there is no need to distinguish between the first test object TO1 and the second test object TO2, they will simply be referred to as test objects.

[0042] The first test object TO1 and the second test object TO2 have, for example, the same shape, and the shape of the test object has, for example, a straight line portion that is perpendicular to the conveyance direction D1.

[0043] The first test object TO1 and the second test object TO2 projected onto the projection area A1 are aligned along the transport direction D1 with an inter-object distance L1 between them. The inter-object distance L1 is the actual distance in real space between the first test object TO1 and the second test object TO2 projected onto the projection area A1. As an example, the inter-object distance L1 is the distance between the centers of the first test object TO1 and the second test object TO2 in real space.

[0044] The inter-object distance L1 varies depending on the set distance in the test still image and the distance from the projector 31 to the projection area A1. For example, the greater the set distance in the test still image, the greater the inter-object distance L1. Also, the greater the distance from the projector 31 to the projection area A1, the greater the inter-object distance L1.

[0045] With the test still image projected onto the projection area A1, the detection unit 40 moves at a first moving speed V D The detection unit 40 is moved so that the detection unit 40 passes through the projection area A1 at a first moving speed V. Then, the detection unit 40 outputs a signal indicating that the active energy rays have been detected to the calculation unit 50 at the timing when the detection unit 40 passes through each of the first test object TO1 and the second test object TO2 projected onto the projection area A1. D is stored in the storage unit of the calculation unit 50.

[0046] As shown in FIG. 5, a waveform 101 of a graph 100 is obtained by projecting a test still image onto a projection area A1 in a conveying direction D1 at a first moving speed V D The waveform 102 of the graph 100 represents the change over time in the intensity of the active energy ray detected by the detection unit 40 moving at a first moving speed V along the conveying direction D1 when the test still image is projected onto the projection area A1 in the first calculation step. D 4 represents the change over time in the intensity of the signal output to the calculation unit 50 by the moving detection unit 40.

[0047] As represented by waveforms 101 and 102, the detection unit 40 outputs a signal to the calculation unit 50 at time T1 when it detects active energy rays of a predetermined intensity or greater as they pass through the first test object TO1 located upstream. The detection unit 40 also outputs a signal to the calculation unit 50 at time T2 when it detects active energy rays of a predetermined intensity or greater as they pass through the second test object TO2 located downstream.

[0048] In the first calculation step, the calculation unit 50 calculates the time difference ΔT1 between the time T1 and the time T2 at which the peak rises in the waveform 102. Then, the calculation unit 50 compares the calculated time difference ΔT1 with the first moving speed V stored in the storage unit. D Based on the above, an actual inter-object distance L1 between the first test object TO1 and the second test object TO2 projected as the test still image is calculated.

[0049] Next, the second calculation step will be described with reference to Fig. 6 and Fig. 7. As shown in Fig. 6, in the second calculation step, the detection unit 40 is made stationary in the projection area A1. In this state, the projection unit 30 is used to project a test video onto the projection area A1. The test video is stored in the storage unit of the playback device 32.

[0050] The test video includes a first test object TO1 and a second test object TO2 included in the test still image. In the test video, the first test object TO1 and the second test object TO2 move within the projection area A1 along the conveying direction D1, with a set distance between them. The set distance for the test video is equal to the set distance for the test still image. In other words, in the projection area A1 onto which the test video is projected, the first test object TO1 and the second test object TO2 move along the conveying direction D1, with a set distance L1 between them.

[0051] In the test video, multiple images are continuously projected in which the positions of the first test object TO1 and the second test object TO2 gradually move along the transport direction D1, so that each test object moves in the transport direction D1.

[0052] In the test video, the first test object TO1 and the second test object TO2 move at a predetermined test set speed V T1 The test set speed V T1is defined by the virtual moving speed of the test object set in the video file of the test video and the playback speed of the test video.

[0053] The virtual moving speed of the test object set in the video file of the test video is determined by the number of frames required to move a unit distance in the image. The playback speed of the test video is determined by the number of frames projected per second. The playback device 32 adjusts at least one parameter of the virtual moving speed in the video file of the test video and the playback speed of the test video, thereby adjusting the set test speed V T1 is configured to be adjustable.

[0054] By projecting the test video onto the projection area A1, the first test object TO1 and the second test object TO2 move within the projection area A1 along the transport direction D1 at a second moving speed V T2 The second movement speed V T2 The speed of movement refers to the actual movement speed in real space of the first test object TO1 and the second test object TO2 that move within the projection area A1 when a test moving image is projected onto the projection area A1.

[0055] In the test video, first, the second test object TO2 moves from the upstream end of the projection area A1 to the downstream end at a test set speed V T1 At the timing when the second test object TO2 has moved a set distance from the upstream end of the projection area A1, the first test object TO1 moves from the upstream end of the projection area A1 at the test set speed V T1 In this way, in the projection area A1, the first test object TO1 and the second test object TO2 are set to move along the conveying direction D1 at an actual second moving speed V T2The test still image in the first calculation step may be an image included in the test moving image projected as a still image.

[0056] When the test video is projected onto the projection area A1, the second test object TO2 passes through the detection unit 40 arranged in the projection area A1, and then the first test object TO1 passes through the detection unit 40. The detection unit 40 outputs a signal indicating that active energy rays have been detected to the calculation unit 50 at the timing when the first test object TO1 and the second test object TO2 projected onto the projection area A1 pass through each other.

[0057] 7, waveform 201 of graph 200 represents the change over time in the intensity of the active energy rays detected by detection unit 40 when the test moving image is projected onto projection area A1 in the second calculation step. Waveform 202 of graph 200 represents the change over time in the intensity of the signal output by detection unit 40 to calculation unit 50 when the test moving image is projected onto projection area A1 in the second calculation step.

[0058] As represented by waveforms 201 and 202, the detection unit 40 outputs a signal to the calculation unit 50 at time T3 when it detects active energy rays of a predetermined intensity or greater as the second test object TO2 located downstream passes by. The detection unit 40 also outputs a signal to the calculation unit 50 at time T4 when it detects active energy rays of a predetermined intensity or greater as the first test object TO1 located upstream passes by.

[0059] In the second calculation step, the calculation unit 50 calculates the time difference ΔT2 between the time T3 and the time T4 at which the peaks rise in the waveform 202. Then, based on the calculated time difference ΔT2 and the inter-object distance L1 calculated in the first calculation step, the calculation unit 50 calculates the actual second moving speed V of the first test object TO1 and the second test object TO2 projected as the test moving image. T2 Calculate.

[0060] In the exposure apparatus 10, the second movement speed V calculated by the calculation unit 50 T2Based on this, the transport speed of the object 11 by the first transport unit 20 and the actual moving speed V of the pattern object PO1 projected onto the object 11 are calculated. P2 Specifically, the actual second moving speed V of the test object calculated by the calculation unit 50 is synchronized with the T2 Based on this, the transport speed of the object 11 by the first transport unit 20 and the exposure set speed V in the exposure moving image are determined by the following first synchronization method or second synchronization method. P1 and are set.

[0061] It should be noted that under the condition that the distance between the object 11 and the projector 31 is constant, the exposure setting speed V P1 Test setting speed V T1 The ratio of the actual moving speed V of the pattern object PO1 P2 The actual second moving speed V of the test object relative to T2 It is equal to the ratio of V T1 / V P1 =V T2 / V P2 For example, if the distance between the object 11 and the projector 31 is constant and the exposure setting speed V P1 and test setting speed V T1 Under the condition that and are equal, the actual moving speed V of the pattern object PO1 P2 and the actual second moving speed of the test object, V T2 and are equal.

[0062] The first synchronization method will be described below. In the first synchronization method, first, the exposure set speed V P1 is the test setting speed V of the test object in the test video. T1 As a result, the actual moving speed V of the pattern object PO1 projected onto the exposure object 11 is P2 is the actual second moving speed V of the test object calculated by the calculation unit 50. T2 is equal to

[0063] The first transport unit 20 then calculates the transport speed of the object 11 and the actual second moving speed V of the test object calculated by the calculation unit 50. T2 The object 11 is transported so that the transport speed of the object 11 by the first transport unit 20 and the actual moving speed V of the pattern object PO1 projected onto the object 11 are equal to each other. P2 is the actual second moving speed V of the test object calculated by the calculation unit 50. T2 will be synchronized.

[0064] In the first synchronization method, the transport speed of the object 11 by the first transport unit 20 and the exposure set speed V P1 The setting of the second moving speed V of the test object calculated by the calculation unit 50 may be performed by an operator or may be performed by the processing of the calculation unit 50. In the latter case, the calculation unit 50 sets the second moving speed V of the test object calculated by the calculation unit 50 as T2 Based on this, the conveying speed and the actual moving speed V of the pattern object PO1 P2 It functions as a speed adjustment unit that synchronizes the

[0065] The calculation unit 50 as a speed adjustment unit is connected to, for example, the first transport control device 21 and the reproducing device 32 so as to be able to communicate with each other. The calculation unit 50 adjusts the transport speed of the exposure object 11 by the first transport unit 20 by comparing the actual second moving speed V of the test object calculated by the calculation unit 50 with the actual second moving speed V of the test object. T2 Then, the calculation unit 50 executes a process of transmitting a command to the first transport control device 21 to make the exposure set speed V P1 is the test setting speed V of the test object in the test video. T1 The playback device 32 executes a process of transmitting a command to the playback device 32 to make the exposure set speed V equal to the exposure set speed V by adjusting at least one of the movement speed of the pattern object PO1 set on the moving image file of the exposure moving image and the playback speed of the exposure moving image. P1 The test speed setting V for the test video T1 Equal to.

[0066] In the first synchronization method, a test set speed V of the test object in the test video is set in advance. T1 , the exposure setting speed V of the pattern object PO1 in the exposure video. P1 In this case, the transport speed of the object 11 by the first transport unit 20 may be set to be equal to the actual second moving speed V of the test object calculated by the calculation unit 50. T2 The conveying speed and the actual moving speed V of the pattern object PO1 are matched only by the operation (processing) P2 You can synchronize with.

[0067] The second synchronization method will be described below. In the second synchronization method, the transport speed of the object 11 by the first transport unit 20 is set to an arbitrary speed (here, V F In the second synchronization method, first, the actual second moving speed V of the test object calculated by the calculation unit 50 is set to T2 The conveying speed (here, speed V F ) is the ratio of V F / V T2 Then, calculate the test speed V T1 The calculated ratio (V F / V T2 ) is multiplied by the exposure setting speed V P1 =V T1 ×(V F / V T2 ) is set as follows. In this way, the actual moving speed V of the pattern object PO1 is adjusted to match the conveying speed of the exposure object 11 by the first conveying unit 20. P2 can be adjusted.

[0068] In the second synchronization method, the exposure setting speed V of the pattern object PO1 in the exposure moving image is P1 The setting may be performed by an operator or may be performed by the processing of the calculation unit 50. In the latter case, similarly to the first synchronization method, the calculation unit 50 functions as a speed adjustment unit.

[0069] The calculation unit 50 as a speed adjustment unit is connected to, for example, the first transport control device 21 and the reproducing device 32 so as to be able to communicate with each other. The calculation unit 50 calculates the transport speed (here, speed V F ) of the pattern object PO1 in the exposure moving image. P1 ,V P1 =V T1 ×(V F / V T2 ) to the playback device 32. The playback device 32 adjusts at least one of the movement speed of the pattern object PO1 set in the moving image file of the exposure moving image and the playback speed of the exposure moving image, thereby adjusting the exposure set speed V P1 V calculated using the above procedure T1 ×(V F / V T2 ) value.

[0070] (Effects of the embodiment) (1) In the exposure apparatus 10, the actual second moving velocity V of the test object calculated by the calculation unit 50 T2 Based on this, the transport speed of the exposure object 11 by the first transport unit 20 and the actual moving speed V of the pattern object PO1 are calculated. P2 This allows the transport speed of the exposure object 11 and the actual moving speed V of the projected pattern object PO1 to be synchronized to a specific speed, compared to the conventional speed synchronization based on visual observation. P2 This allows for more accurate synchronization.

[0071] (2) Since the test object has a straight portion perpendicular to the transport direction D1, when the detection unit 40 is moved with a test still image projected onto the projection area A1, the test object is reliably positioned on the movement path of the detection unit 40. Similarly, when a test moving image is projected onto the projection area A1, the detection unit 40 is reliably positioned on the movement path of the test object. Therefore, the detection unit 40 can more reliably detect active energy rays.

[0072] (3) In the first synchronization method, the exposure setting speed V P1 , the test setting speed V T1 and the transport speed of the exposure object 11 by the first transport unit 20 is set equal to the actual second moving speed V of the test object calculated by the calculation unit 50. T2 As a result, the transport speed of the exposure object 11 by the first transport unit 20 and the actual moving speed V of the pattern object PO1 are made to coincide with each other. P2 and the actual second moving speed V of the test object calculated by the calculation unit 50. T2 In this case, the test speed V T1 The exposure speed V P1 , the transport speed of the object 11 by the first transport unit 20 is set to the same speed as the second transport speed V T2 The synchronization can be completed by simply matching the

[0073] (4) In the second synchronization method, the conveying speed is V F When the exposure setting speed V P1 The test speed V T1 In contrast, the actual second moving speed V of the test object calculated by the calculation unit 50 T2 Ratio of conveying speed to F / V T2 ) is set to the value multiplied by the exposure setting speed V P1 But V P1 =V T1 ×(V F / V T2 In the second synchronization method, the transport speed is set to an arbitrary speed, and the transport speed of the exposure object 11 by the first transport unit 20 and the actual moving speed V of the pattern object PO1 are synchronized. P2 can be synchronized to any speed.

[0074] (5) The exposure apparatus 10 includes a first transport unit 20 for transporting the object 11 to be exposed by a roll-to-roll method, and a detection unit 40 for detecting the object 11 at a first moving speed V Dand a second transport unit 41 that transports the detection unit 40 so that the detection unit 40 moves in the projection area A1 along the transport direction D1 at a speed of 1 / 2 m / s. By providing the second transport unit 41 that transports the detection unit 40, even when the first transport unit 20 transports the exposure object 11 in a roll-to-roll manner, the actual second moving speed V T2 can be calculated.

[0075] (6) In the exposure apparatus 10, the calculation unit 50 functions as a speed adjustment unit, so that the transport speed of the exposure object 11 by the first transport unit 20 and the actual moving speed V of the pattern object PO1 are adjusted. P2 The process of synchronizing can be automated.

[0076] (Example of change) The above embodiment can be modified as follows: The modifications can be combined within the scope of technical compatibility.

[0077] The transport form of the object 11 in the exposure apparatus 10 is not limited to the roll-to-roll method. For example, as shown in FIG. 8, the exposure apparatus 10 may include a stage 60 that transports the object 11 (not shown in FIG. 8). In this case, the exposure apparatus 10 includes a transport unit 61 that moves the stage 60 at a predetermined transport speed along the transport direction D1. The transport unit 61 transports the object 11 by transporting the stage 60 on which the object 11 is placed. In this case, the object 11 is, for example, in a sheet-like form, but may be in any form other than a sheet-like form.

[0078] Furthermore, the transport unit 61 can transport the detection unit 40 by transporting the stage 60 on which the detection unit 40 is attached or the stage 60 on which the detection unit 40 is placed. The transport unit 61 can move the detection unit 40 at a first moving speed V DThe stage 60 to which the detection unit 40 is attached is transported so that the detection unit 40 moves through the projection area A1 along the transport direction D1. At this time, the height of the detection unit 40 is adjusted to be equal to the height of the object 11 placed on the stage 60. Note that, as long as the height of the detection unit 40 is equal to the height of the object 11 placed on the stage 60, the detection unit 40 does not necessarily have to be attached to the stage 60. In other words, the transport unit 61 may transport the detection unit 40 without using the stage 60.

[0079] The transport unit 61 controls the transport speed of the object 11 and the first moving speed V D The transport control device 62 is a computer terminal that includes, for example, a control unit such as a CPU or an MPU, a storage unit such as a nonvolatile memory, and an input unit that receives input from an operator. With the above configuration, the detection unit 40 can be transported using the transport unit 61 that transports the object 11.

[0080] The first test object TO1 and the second test object TO2 are not limited to shapes having straight lines. For example, they may have any shape that allows the detection unit 40 to pass through the test object when a test still image is projected onto the projection area A1 and the detection unit 40 is moved along the transport direction D1. Furthermore, they may have any shape that allows the test object to pass through the detection unit 40 when a test video is projected onto the projection area A1 and the test object is moved along the transport direction D1. For example, the test object may have the same shape as the pattern object PO1, or an exposure video may be used as the test video. Furthermore, the first test object TO1 and the second test object TO2 may have different shapes.

[0081] On the transport path of the first transport unit 20, devices for other processes may be arranged upstream or downstream of the projection unit 30. For example, a device for forming the photosensitive film 13 may be provided upstream of the projection unit 30. For example, a device for developing the photosensitive film 13 may be provided downstream of the projection unit 30. In such a configuration, there may be a limit to the adjustable range of the transport speed depending on processes other than the exposure process. Even in this case, with the second synchronization method described above, the actual moving speed V of the pattern object PO1 for any transport speed can be adjusted. P2 can be synchronized.

[0082] The photosensitive material constituting the photosensitive film 13 may contain components to which an emulsion transforming method for patterning (ET method), which uses emulsion self-organization for patterning, can be applied. A photosensitive material to which the ET method can be applied is, for example, an emulsion containing dispersed particles containing a first liquid that hardens when irradiated with active energy rays such as ultraviolet rays or electron beams, and a dispersion medium containing a second liquid that does not harden when irradiated with active energy rays.

[0083] The ET method includes the following four basic steps: Step 1: forming a photosensitive film 13 made of the emulsion on a substrate 12; Step 2: irradiating the photosensitive film 13 with active energy rays in a pattern to cure the first liquid present in the area irradiated with the active energy rays; Step 3: removing at least a portion of the second liquid from the photosensitive film 13 after irradiation with the active energy rays; Step 4: curing the uncured first liquid contained in the photosensitive film 13 from which at least a portion of the second liquid has been removed. [Explanation of symbols]

[0084] ΔT1, ΔT2...time difference A1…Projection area D1: Transport direction L1: Distance between objects PO1...Pattern object TO1: First test object TO2: Second test object V D …1st movement speed V P2 …Movement speed V T2 …Second movement speed 10...Exposure equipment 11…Exposed object 12...Base material 13…Photoresist film 20...First conveying section 30…Projection section 40...Detection unit 41...Second conveying section 50...Arithmetic section 60...Stage 61...Transport unit

Claims

1. a projection unit that projects an image onto a projection area using active energy rays; a conveying unit that conveys the object to be exposed along a specific conveying direction so that the object passes through the projection area; a detection unit that detects the active energy rays; an exposure apparatus comprising: The calculation unit using the projection unit to project onto the projection area a still image in which a first test object and a second test object are lined up at a set distance in the transport direction, and when the detection unit moves across the projection area along the transport direction at a first movement speed, calculate an actual inter-object distance between the first test object and the second test object projected onto the projection area based on a time difference between when the detection unit detects the active energy ray of one of the first test object and the second test object and when the detection unit detects the active energy ray of the other of the first test object and the second test object, and the first movement speed; and a second moving speed at which the first test object and the second test object projected onto the projection area actually move in the projection area, based on the time difference between when the detection unit detects the active energy ray of one of the first test object and the second test object and when the detection unit detects the active energy ray of the other of the first test object and the second test object, and the calculated inter-object distance; In the exposure apparatus, when an exposure moving image in which a pattern object moves at a set exposure speed in the transport direction is projected onto the exposure object while the transport unit is transporting the exposure object, the transport speed of the exposure object and the actual moving speed at which the pattern object projected onto the exposure object moves in the transport direction are synchronized based on the second moving speed calculated by the calculation unit. Exposure equipment.

2. The first test object and the second test object have a straight portion perpendicular to the transport direction.

2. The exposure apparatus according to claim 1.

3. the exposure setting speed in the exposure moving image is equal to the test setting speed in the test moving image, The transport unit transports the object so that the transport speed coincides with the second moving speed calculated by the calculation unit.

3. The exposure apparatus according to claim 1.

4. the conveying speed of the conveying unit is set to an arbitrary speed; The exposure set speed in the exposure moving image is set to a value obtained by multiplying the test set speed in the test moving image by the ratio of the transport speed to the second moving speed calculated by the calculation unit.

3. The exposure apparatus according to claim 1.

5. the transport unit is a first transport unit for transporting the object to be exposed by a roll-to-roll method, The exposure apparatus further includes a second transport unit that transports the detection unit so that the detection unit moves through the projection area along the transport direction at the first movement speed.

3. The exposure apparatus according to claim 1.

6. The transport unit transports the object by transporting a stage on which the object is placed, and transports the detection unit so that the detection unit moves in the projection area along the transport direction at the first moving speed.

3. The exposure apparatus according to claim 1.

7. An exposure method for projecting an exposure moving image in which a pattern object moves relative to an exposure object in a specific transport direction while transporting the exposure object at a specific transport speed when the exposure object is transported along a specific transport direction and passes through a projection area of ​​a projection unit that projects an image using active energy rays, the method comprising: using the projection unit, a still image in which a first test object and a second test object are lined up at a set distance in the transport direction is projected onto the projection area, and when a detection unit that detects the active energy rays moves across the projection area along the transport direction at a first movement speed, an actual inter-object distance between the first test object and the second test object projected onto the projection area is calculated based on a time difference between when the detection unit detects the active energy rays of one of the first test object and the second test object and when the detection unit detects the active energy rays of the other of the first test object and the second test object, and the first movement speed; and a second moving speed at which the first test object and the second test object projected onto the projection area actually move in the projection area, based on the time difference between when the detection unit detects the active energy ray of one of the first test object and the second test object and when the detection unit detects the active energy ray of the other of the first test object and the second test object, and the calculated inter-object distance; Based on the calculated second moving speed, the transporting speed of the exposure object is synchronized with the actual moving speed of the pattern object projected onto the exposure object in the transporting direction. Exposure method.

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