Movable device, projection device, mobile body, head-mounted display, head-up display, laser headlamp, object recognition device, and position detection device

Abstract

To enable efficient driving of a movable part.SOLUTION: A movable device 13 is provided, comprising a movable part, a drive unit connected to the movable part and provided with a piezoelectric unit, a first connection beam overhanging in a direction intersecting a center line of the movable part from the movable part, a second connection beam overhanging in a direction intersecting the center line from the drive unit, and an intermediate connection part extending in a direction in which the center line extends to connect the first connection beam to the second connection beam.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The present invention relates to a movable device, a projection device, a moving body, a head-mounted display, a head-up display, a laser headlamp, an object recognition device, and a position detection device. [Background technology]

[0002] Known technology in this field includes a mirror structure consisting of (A) a mirror having a mirror body and a light-reflecting layer provided on the surface of the mirror body, (B) a plurality of support pillars having upper ends fixed to the back surface of the mirror body, (C) displacement members having one end fixed to the lower end of each of the support pillars, and (D) a support member that fixes the other end of the displacement member (see, for example, Patent Document 1). Summary of the Invention [Problem to be solved by the invention]

[0003] In the prior art described in Patent Document 1, the mirror 20 is positioned at a position that protrudes from the placement surface of the drive unit (displacement member 40). This prior art has a structure in which the mirror 20 is tilted via multiple support columns 30. In the prior art, the mirror 20 is highly rigid to prevent distortion of the reflective surface. As a result, in the prior art, the reaction force acting on the mirror is not attenuated, which results in suppressing displacement of the mirror in the direction of its center line, causing a decrease in the oscillation angle.

[0004] An object of the present invention is to provide a movable device capable of efficiently driving a movable part. [Means for solving the problem]

[0005] A movable device according to one embodiment of the present invention comprises a movable part, a drive part that drives the movable part, a first connecting beam that extends from the movable part in a direction that intersects with the center line of the movable part, a second connecting beam that extends from the drive part in a direction that intersects with the center line, and an intermediate connecting part that extends in a direction along the center line and connects the first connecting beam and the second connecting beam. [Effects of the Invention]

[0006] According to the present invention, it is possible to provide a movable device capable of efficiently driving a movable part. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 2 is a plan view illustrating the movable device according to the first embodiment. [Figure 2] 2 is a cross-sectional view illustrating a cross section taken along a second axis L12 in FIG. 1. FIG. [Figure 3] 1. FIG. 4 is a cross-sectional view illustrating a part of the support portion, the drive portion, and the connection portion, taken along a second axis L12 in FIG. [Figure 4] FIG. 2 is a cross-sectional view illustrating a mirror portion and a part of a connecting portion. [Figure 5] FIG. 5(a) is a schematic diagram illustrating a movable device according to a comparative example, showing a state when not driven, and FIG. 5(b) is a diagram showing a state when driven. [Figure 6] 10 is a schematic diagram illustrating a mirror portion, a connecting portion, and a driving portion, showing a state in which a reflecting surface is inclined. FIG. [Figure 7] FIG. 10 is a plan view illustrating a movable device according to a second embodiment. [Figure 8] FIG. 10 is a cross-sectional view illustrating a movable device according to a third embodiment. [Figure 9] FIG. 10 is a cross-sectional view illustrating a movable device according to a fourth embodiment, showing a cross section taken along a second axis L12. [Figure 10] FIG. 2 is a plan view illustrating a mirror portion, a connection portion, and a part of a driving portion. [Figure 11] 10 is a cross-sectional view illustrating a connection portion and a part of a drive portion. FIG. [Figure 12] FIG. 10 is a cross-sectional view illustrating a movable device according to a fifth embodiment. [Figure 13] FIG. 13 is a schematic view illustrating a movable device according to a sixth embodiment. [Figure 14] FIG. 1 is a schematic diagram of an example optical scanning system. [Figure 15]FIG. 1 is a diagram illustrating a hardware configuration of an example of an optical scanning system. [Figure 16] FIG. 2 is a functional block diagram of an example of a control device. [Figure 17] 10 is a flowchart of an example of processing related to the optical scanning system. [Figure 18] FIG. 1 is a schematic diagram of an example of an automobile equipped with a head-up display device. [Figure 19] FIG. 1 is a schematic diagram of an example of a head-up display device. [Figure 20] FIG. 1 is a schematic diagram of an example of an image forming apparatus equipped with an optical writing device. [Figure 21] FIG. 1 is a schematic diagram of an example of an optical writing device. [Figure 22] FIG. 1 is a schematic diagram of an example of an automobile equipped with a laser radar device. [Figure 23] FIG. 1 is a schematic diagram of an example of an automobile equipped with a laser radar device. [Figure 24] FIG. 1 is a schematic diagram of an example of a laser radar device. [Figure 25] 1 is a schematic diagram of an example of a laser headlamp. [Figure 26] FIG. 1 is a perspective view of an example of the appearance of a head-mounted display. [Figure 27] FIG. 1 is a diagram illustrating a partial configuration of a head-mounted display. [Figure 28] FIG. 1 is a schematic diagram illustrating an example of a pupil or cornea position detection device. [Figure 29] FIG. 1 is a schematic diagram illustrating an example of a pupil or cornea position detection device. DETAILED DESCRIPTION OF THE INVENTION

[0008] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The following describes the preferred embodiments of the present invention with reference to the accompanying drawings. In the drawings, the same components are designated by the same reference numerals, and redundant explanations may be omitted.

[0009] In the following description of the embodiments, rotation, swinging, and movement are synonymous. In each drawing, mutually orthogonal X-axis, Y-axis, and Z-axis directions may be shown. The Z-axis direction is along the stacking direction of each layer in the piezoelectric drive unit, etc. The view from the Z-axis direction may be referred to as a "plan view." In addition, in each drawing, parallel diagonal lines may be applied to parts that are not cross-sections.

[0010] The X-axis direction includes the direction indicated by the arrow and its opposite direction. The direction of the arrow in the X-axis direction may be referred to as the +X direction, and the opposite direction of the +X direction may be referred to as the -X direction. The Y-axis direction includes the direction indicated by the arrow and its opposite direction. The direction of the arrow in the Y-axis direction may be referred to as the +Y direction, and the opposite direction of the +Y direction may be referred to as the -Y direction. The Z-axis direction includes the direction indicated by the arrow and its opposite direction. The direction of the arrow in the Z-axis direction may be referred to as the +Z direction, and the opposite direction of the +Z direction may be referred to as the -Z direction. The terms "up" and "down" may also be used. "Up" may be the "+Z direction," and "down" may be the "-Z direction." These directions do not limit the orientation of the movable device 13, and the orientation of the movable device 13 is arbitrary. The movable device may also be called an "optical deflector."

[0011] [Movable device 13 according to the first embodiment] A movable device 13 according to a first embodiment will be described with reference to Figures 1 and 2. Figure 1 is a plan view illustrating the movable device 13 according to the first embodiment. Figure 2 is a cross-sectional view illustrating a cut surface along the second axis L12 in Figure 1. Figure 3 is a cross-sectional view illustrating a portion of the support unit 140, the drive units 110A and 110B, and the connection units 120A and 120B, taken along the second axis L12 in Figure 1.

[0012] As shown in FIG. 1, the movable device 13 includes a mirror unit 101, driving units 110A, 110B, 110C, and 110D, connecting units 120A, 120B, 120C, and 120D, and a support unit 140.

[0013] [Mirror section 101] The mirror section 101 has a reflecting surface 14 that reflects incident light. The mirror section 101 is an example of a movable section. The mirror section 101 has, for example, a disk-shaped mirror section base (movable section base) 102 and a reflecting surface 14 formed on the mirror section base 102. The reflecting surface 14 is formed on the +Z side surface of the mirror section base 102. The mirror section base 102 is, for example, disk-shaped.

[0014] [Support part 140] The support section 140 forms a rectangular frame when viewed in the Z-axis direction. The mirror section 101 is disposed at the center of the support section 140 when viewed in the Z-axis direction. The support section 140 supports the mirror section 101 via a plurality of drive sections 110A, 110B, 110C, and 110D and connection sections 120A, 120B, 120C, and 120D.

[0015] [Electrode connection part 150] The movable device 13 includes an electrode connection part 150 electrically connected to the driving parts 110A, 110B, 110C, and 110D. The electrode connection part 150 has a plurality of pads.

[0016] [Driver units 110A, 110B, 110C, 110D] The driving units 110A, 110B, 110C, and 110D are supported by a support unit 140. When viewed in the Z-axis direction, the driving units 110A, 110B, 110C, and 110D protrude inward from each side of the rectangular support unit 140. Here, the side closer to the mirror unit 101 is referred to as the inside, and the side farther from the mirror unit 101 is referred to as the outside.

[0017] The driving units 110A and 110B are arranged opposite each other in the X-axis direction. The driving units 110C and 110D are arranged opposite each other in the Y-axis direction. The mirror unit 101 is arranged between the driving units 110A and 110B in the X-axis direction. The mirror unit 101 is arranged between the driving units 110C and 110D in the Y-axis direction.

[0018] The driving units 110A, 110B, 110C, and 110D are connected to the mirror unit 101 via the connection unit 120. The driving units 110A and 110B oscillate the mirror unit 101 around a first axis L11 parallel to the Y axis. The driving units 110C and 110D oscillate the mirror unit 101 around a second axis L12 parallel to the X axis.

[0019] The driving unit 110A has a piezoelectric element 111A and a base 112A. The piezoelectric element 111A is mounted on an upper surface 112a of the base 112A. The driving unit 110B has a piezoelectric element 111B and a base 112B. The piezoelectric element 111B is mounted on an upper surface 112a of the base 112B. The driving unit 110C has a piezoelectric element 111C and a base 112C. The piezoelectric element 111C is mounted on the base 112C. The driving unit 110D has a piezoelectric element 111D and a base 112D. The piezoelectric element 111D is mounted on the base 112D. The upper surface 112a is an example of one of a pair of surfaces that face each other in the direction in which the center line O of the bases 112A and 112B extends. The lower surface 112b is a surface that faces the upper surface 112a. The driving sections 110A, 110B, 110C, and 110D drive the mirror sections (movable sections).

[0020] [Connections 120A, 120B, 120C, 120D] Connection portion 120A connects mirror portion 101 and driver 110A. Connection portion 120B connects mirror portion 101 and driver 110B. Connection portion 120C connects mirror portion 101 and driver 110C. Connection portion 120D connects mirror portion 101 and driver 110D. Connection portion 120A and connection portion 120B are arranged opposite each other in the X-axis direction. Connection portion 120C and connection portion 120D are arranged opposite each other in the Y-axis direction.

[0021] 2, the connecting portion 120A has a first connecting beam 121A, a second connecting beam 122A, and an intermediate connecting portion 123A. The connecting portion 120B has a first connecting beam 121B, a second connecting beam 122B, and an intermediate connecting portion 123B. Similarly, the connecting portions 120C and 120D have a first connecting beam, a second connecting beam, and an intermediate connecting portion.

[0022] [First connecting beams 121A, 121B] The first connection beams 121A and 121B protrude from the mirror section 101 in the X-axis direction. When viewed in the Z-axis direction, the first connection beam 121A protrudes toward the driver 110A. When viewed in the Z-axis direction, the first connection beam 121B protrudes toward the driver 110B. The first connection beams 121A and 121B protrude in opposite directions. The first connection beams 121A and 121B are formed integrally with the mirror section base 102. The first connection beams 121A and 121B are formed so as to protrude from the mirror section base 102. The first connection beams of the connection sections 120C and 120D have the same structure as the first connection beams 121A and 121B, and therefore will not be described here.

[0023] [Second connecting beams 122A, 122B] The second connection beam 122A protrudes in the X-axis direction from the driver 110A toward the mirror 101. The second connection beam 122A is formed integrally with the base 112A. The second connection beam 122A is formed so as to protrude from the base 112A.

[0024] The second connection beam 122B protrudes in the X-axis direction from the driver 110B toward the mirror 101. The second connection beam 122B is formed integrally with the base 112B. The second connection beam 122B is formed so as to protrude from the base 112B.

[0025] The second connection beams of the connection portions 120C and 120D have the same structure as the second connection beams 122A and 122B, and therefore a description thereof will be omitted here.

[0026] [Intermediate connection parts 123A, 123B] The intermediate connection portion 123A extends in the Z-axis direction and connects the first connection beam 121A and the second connection beam 122A. The intermediate connection portion 123A has, for example, a columnar shape. The columnar shape may be a circular columnar shape or a rectangular columnar shape. The upper end portion of the intermediate connection portion 123A may be connected to the end portion of the first connection beam 121A that is farther from the mirror portion 101. The lower end portion of the intermediate connection portion 123A may be connected to the end portion of the second connection beam 122A that is farther from the base portion 112A. The intermediate connection portion 123A protrudes in the +Z direction from the second connection beam 122A.

[0027] The intermediate connection portion 123B extends in the Z-axis direction and connects the first connection beam 121B and the second connection beam 122B. The intermediate connection portion 123B has, for example, a columnar shape. The columnar shape may be a circular columnar shape or a rectangular columnar shape. The upper end portion of the intermediate connection portion 123B may be connected to the end portion of the first connection beam 121B that is farther from the mirror portion 101. The lower end portion of the intermediate connection portion 123B may be connected to the end portion of the second connection beam 122B that is farther from the base portion 112B. The intermediate connection portion 123B protrudes in the +Z direction from the second connection beam 122A.

[0028] [Length Lz and width Wx of intermediate connection part 123A] 3, the length Lz and width Wx of the intermediate connecting portion 123A satisfy the relationship Lz / Wx>1. In other words, the length Lz of the intermediate connecting portion 123A is greater than the width Wx (Lz>Wx). The width Wx may be the length of the intermediate connecting portion 123A in the X-axis direction, or may be the diameter of the columnar intermediate connecting portion 123A.

[0029] For example, when Lz / Wx=1, the rotation of the intermediate connector 123A reduces the displacement of the mirror section 101 in the Z-axis direction, which cancels out the displacement in the Z-axis direction generated by the driver 110A. As a result, the oscillation angle θ of the mirror section 101 decreases. An example of the oscillation angle θ is shown in FIG. 5.

[0030] The intermediate connecting portions of connecting portions 120C and 120D have the same structure as intermediate connecting portions 123A and 123B, and therefore a description thereof will be omitted here.

[0031] [SOI substrate] The mirror section 101, the driving sections 110A, 110B, 110C, and 110D, the connecting sections 120A, 120B, 120C, and 120D, and the supporting section 140 are formed, for example, from an SOI (Silicon On Insulator) substrate. The mirror section 101, the driving sections 110A, 110B, 110C, and 110D, the connecting sections 120A, 120B, 120C, and 120D, and the supporting section 140 are formed by performing an etching process or the like on the SOI substrate.

[0032] The reflecting surface 14, the piezoelectric elements 111A, 111B, 111C, and 111D, the electrode connection portion 150, and the like are formed on the molded SOI substrate. The reflecting surface 14, the piezoelectric elements 111A, 111B, 111C, and 111D, the electrode connection portion 150, and the like are formed integrally with the SOI substrate. The reflecting surface 14, the piezoelectric elements 111A, 111B, 111C, and 111D, the electrode connection portion 150, and the like may be formed after molding the SOI substrate or during molding the SOI substrate.

[0033] 3 and 4, the SOI substrate includes a silicon support layer 161 made of single-crystal silicon (Si), a silicon oxide layer 162 formed on the silicon support layer 161 (on the +Z direction side), and a silicon active layer 163 made of single-crystal silicon formed on the silicon oxide layer 162. The silicon oxide layer 162 can also be referred to as a BOX (Buried Oxide) layer.

[0034] A member formed only of the silicon active layer 163 functions as an elastic part having elasticity. The support part 140 has a silicon support layer 161, a silicon oxide layer 162, and a silicon active layer 163. The base parts 112A, 112B, 112C, and 112D each have a silicon active layer 163.

[0035] The SOI substrate does not necessarily have to be flat, and may have curvature, etc. The member used to form the movable device 13 can be integrally molded by etching or the like, and may be a substrate that has partial elasticity, and is not limited to an SOI substrate.

[0036] 4, the mirror portion substrate 102 includes, for example, a silicon active layer 163. The reflecting surface 14 includes, for example, a thin metal film including aluminum, gold, silver, or the like.

[0037] A movable thick portion 103 for reinforcing the mirror portion is formed on the -Z side surface of the mirror portion base 102. The movable thick portion 103 includes, for example, a silicon support layer 161 and a silicon oxide layer 162, and can suppress distortion of the reflecting surface 14 caused by movement.

[0038] 3, the second connection beam 122A includes a silicon active layer 163. The second connection beam 122A is molded integrally with the silicon active layer 163 of the base 112A. The second connection beam 122A and the base 112A may be formed from, for example, a single SOI substrate.

[0039] 4, the first connection beams 121A and 121B include a silicon active layer 163. The first connection beams 121A and 121B are formed integrally with the silicon active layer 163 of the mirror portion base 102. The first connection beams 121A and 121B and the mirror portion base 102 may be formed from, for example, a single SOI substrate.

[0040] The intermediate connectors 123A and 123B include, for example, a silicon active layer 163. The intermediate connectors 123A and 123B may be formed separately from the first connection beams 121A and 121B and the second connection beams 122A and 122B. The intermediate connector 123A may be bonded to the first connection beam 121A and the second connection beam 122A, respectively. The intermediate connector 123B may be bonded to the first connection beam 121B and the second connection beam 122B, respectively. The intermediate connectors 123A and 123B are bonded to the first connection beams 121A and 121B and the second connection beams 122A and 122B using an adhesive such as a thermosetting resin or a photocurable resin.

[0041] The connecting portions 120A to 120D can be manufactured using other special wafers or dedicated processes. For example, two wafers may be bonded together to form a structure having two active layers.

[0042] [Layer structure of piezoelectric elements 111A to 111D] As shown in FIG. 3, the piezoelectric elements (piezoelectric portions) 111A to 111D each have a lower electrode 201, a piezoelectric layer 202, and an upper electrode 203. The lower electrode 201 is stacked on the base portions 112A, 112B, 112C, and 112D. The piezoelectric layer 202 is stacked on the lower electrode 201. The upper electrode 203 is stacked on the piezoelectric layer 202. The piezoelectric layer 202 is sandwiched between the lower electrode 201 and the upper electrode 203 in the Z-axis direction. The upper electrode 303 and the lower electrode 301 contain, for example, gold (Au) or platinum (Pt). The piezoelectric layer 302 contains, for example, PZT (lead zirconate titanate), which is a piezoelectric material.

[0043] [Electrode connection part 150] The electrode connection part 150 is formed on the upper surface of the support part 140. The electrode connection part 150 is electrically connected to the lower electrodes 201 and upper electrodes 203 of the piezoelectric elements 111A to 111D. Electrode wiring is formed on the upper surface of the support part 140, connecting the lower electrodes 201 and upper electrodes 203 to the electrode connection part 150. The electrode wiring is made of, for example, aluminum (Al). The lower electrodes 201 and upper electrodes 203 are electrically connected to the control device 11 via the electrode wiring and the electrode connection part 150. The control device 11 applies a signal voltage to the lower electrode 201. The upper electrode 203 is grounded (GND).

[0044] Furthermore, an insulating layer made of a silicon oxide film may be formed on at least one of the surface of the upper electrode 203 on the +Z side and the surface of the support portion 140 on the +Z side.

[0045] When electrode wiring is formed on the insulating layer, the insulating layer is not formed in the portion where the upper electrode 203 and the electrode wiring are connected and in the portion where the lower electrode 201 and the electrode wiring are connected. By providing such an insulating layer, the degree of freedom in designing the driving units 110A, 110B, 110C, and 110D and the electrode wiring can be increased. By providing such an insulating layer, short circuits due to contact between electrodes can be suppressed. The silicon oxide film also functions as an anti-reflection material.

[0046] The movable device 13 may include a piezoelectric element for detecting elastic deformation of the driving portions 110A, 110B, 110C, and 110D.

[0047] [Operation of piezoelectric elements 111A to 111D] Piezoelectric element 111A deforms base 112A in response to an applied drive voltage. Similarly, piezoelectric element 111B deforms base 112B in response to an applied drive voltage. Piezoelectric element 111C deforms base 112C in response to an applied drive voltage. Piezoelectric element 111D deforms base 112D in response to an applied drive voltage.

[0048] The detecting piezoelectric element outputs a detection signal due to the piezoelectric effect in response to deformation of the base portion, and outputs the detection signal to the control device 11 via the electrode connection portion 150.

[0049] [Movable device 1 according to comparative example] FIG. 5(a) is a schematic diagram illustrating a movable device 1 according to a comparative example, showing a state when not driven, and FIG. 5(b) is a diagram showing a state when driven. The movable device 1 according to the comparative example includes a mirror section 101, driving sections 110A and 110B, and connecting beams 2A and 2B. The connecting beam 2A extends in the X-axis direction and connects the mirror section 101 and the driving section 110A. The connecting beam 2B extends in the X-axis direction and connects the mirror section 101 and the driving section 110B. The connecting beams 2A and 2B do not include a first connecting beam, a second connecting beam, or an intermediate connecting section.

[0050] As shown in Fig. 5(a), in the non-driven state, the center line O, which is perpendicular to the reflecting surface 14, is aligned with the Z-axis direction. As shown in Fig. 5(b), in the driven state, the center line O is inclined with respect to the Z-axis. In such a movable device 1, the oscillation angle θ of the mirror section 101 can be displaced by driving the driving sections 110A and 110B to bend and deform the connecting beams 2A and 2B into an arch shape.

[0051] [Problems with the movable device 1 according to the comparative example] In the movable device 1 according to the comparative example, there is a demand for improved energy efficiency when oscillating the mirror unit 101. In the movable device 1, if a large voltage is applied to the driving units 110A and 110B to drive the driving units 110A and 110B, it is possible to naturally increase the oscillation angle θ. However, in the movable device 1, as the displacement of the driving units 110A and 110B increases, energy loss increases, and therefore there is a demand for improved energy efficiency.

[0052] Furthermore, in order to reduce loss due to bending deformation in the connection beams 2A and 2B, it is possible to manufacture the connection beams 2A and 2B from a soft material. However, in the technical field of movable devices (optical deflectors) 1 using micromachining technology, it is common to manufacture the entire movable device 1 from a hard material such as silicon. Therefore, it is very difficult to manufacture only the connection beams 2A and 2B from a soft material.

[0053] [Function of connecting parts 120A and 120B] FIG. 6 is a schematic diagram illustrating the mirror section, connecting section, and driving section, showing a state in which the reflecting surface is tilted. The connecting sections 120A and 120B of the movable device 13 include first connecting beams 121A and 121B, second connecting beams 122A and 122B, and intermediate connecting sections 123A and 123B. In the movable device 1, the mirror section 101 is displaced to the oscillation angle by bending the connecting beams 2A and 2B. In the movable device 13, the bending of the connecting beams 2A and 2B can be partially substituted by the rotation of the intermediate connecting sections 123A and 123B. Therefore, the movable device 13 can reduce the bending of a hard member, which requires a large amount of energy. This allows the movable device 13 to efficiently oscillate the mirror section 101. The movable device 13 can oscillate the mirror section 101 with less energy than the movable device 1.

[0054] [Control by control device 11] Next, a description will be given of the control by the control device 11. The control device 11 may have a control section 30 that applies a drive voltage to the piezoelectric elements 111A to 111D of the movable device 13.

[0055] When a positive or negative voltage is applied to the piezoelectric elements 111A to 111D in the polarization direction, the piezoelectric elements 111A to 111D deform (for example, expand and contract) in proportion to the potential of the applied voltage. The piezoelectric elements 111A to 111D exhibit the so-called inverse piezoelectric effect. The driving unit 110 moves the mirror unit 101 by utilizing the inverse piezoelectric effect.

[0056] In this case, the angle formed by the XY plane and the reflecting surface 14 when the reflecting surface 14 of the mirror section 101 is tilted in the +Z direction or the -Z direction with respect to the XY plane is called the deflection angle. The +Z direction is a positive deflection angle, and the -Z direction is a negative deflection angle.

[0057] In the driving units 110A and 110B, when a driving voltage is applied in parallel to the piezoelectric layer 202 via the upper electrode 303 and the lower electrode 301, each piezoelectric layer 202 is deformed. The deformation of the piezoelectric layer 202 causes the bases 112A and 112B to bend and deform. As a result, a driving force about the first axis L11 acts on the mirror unit 101 via the twisting of the two connecting units 120A and 120B, causing the mirror unit 101 to oscillate about the first axis L11. The driving voltages applied to the driving units 110A and 110B are controlled by the control device 11.

[0058] The control device 11 applies drive voltages of a predetermined sinusoidal waveform to the piezoelectric elements 111A and 111B in parallel, thereby moving the mirror portion 101 around the first axis L11 at the period of the drive voltage of the predetermined sinusoidal waveform.

[0059] For example, when the frequency of the drive voltage is set to approximately 20 kHz, which is similar to the resonant frequency of the connecting portions 120A and 120B, the mirror portion 101 can be made to resonate and vibrate at approximately 20 kHz by utilizing the mechanical resonance caused by the twisting of the connecting portions 120A and 120B.

[0060] The movable device 13 according to the first embodiment may be of a cantilever type in which the base 112A and the connection portion 120A extend in the X-axis direction from the support portion 140. The movable device 13 is not limited to this. The movable device 13 may be any type that can oscillate the mirror portion 101 by the piezoelectric layer 202A to which a drive voltage is applied. The movable device 13 may be of a double-end supported type, for example.

[0061] [Movable device 13B according to the second embodiment] Next, a movable device 13B according to a second embodiment will be described. Fig. 7 is a plan view illustrating the movable device 13B according to the second embodiment. The movable device 13B of the second embodiment shown in Fig. 7 differs from the movable device 13 according to the first embodiment shown in Fig. 1 in that the arrangements of the driving sections 110A to 110D and the connecting sections 120A to 120D are different. Note that in the description of the second embodiment, the same description as in the first embodiment will be omitted.

[0062] The multiple driving units 110A to 110D are arranged at positions corresponding to the corners of the rectangular support unit 140. In Fig. 7, a third axis L13 and a fourth axis L14 are shown, which intersect the first axis L11 and the second axis L12 at a 45-degree angle. The third axis L13 and the fourth axis L14 are perpendicular to each other. The third axis L13 and the fourth axis L14 may be diagonal lines of the rectangular support unit 140.

[0063] The driving units 110A and 110B face each other in the direction in which the third axis L13 extends. The driving units 110C and 110D face each other in the direction in which the fourth axis L14 extends. The connecting units 120A and 120B extend from the mirror unit 101 in the direction in which the third axis L13 extends. The connecting units 120C and 120D extend from the mirror unit 101 in the direction in which the fourth axis L14 extends.

[0064] The movable device 13B according to the second embodiment has the same effects as the movable device 13 according to the first embodiment. The multiple driving portions 110A to 110D and connecting portions 120A to 120D may be arranged along the third axis L13 or the fourth axis L14.

[0065] [Movable device 13C according to the third embodiment] Next, a movable device 13C according to a third embodiment will be described. Fig. 8 is a cross-sectional view illustrating the movable device 13C according to the third embodiment. The movable device 13C according to the third embodiment shown in Fig. 8 differs from the movable device 13 according to the first embodiment shown in Fig. 2 in that the arrangement of the mirror section 101 and the intermediate connectors 123E and 123F is different. Note that in the description of the third embodiment, explanations similar to those of the first embodiment will be omitted.

[0066] [Mirror section 101] The mirror section 101 of the movable device 13C is disposed inside the support section 140 in the Z-axis direction. The support section 140 has a predetermined length in the Z-axis direction. For example, when viewed in the Y-axis direction, the mirror section 101 is disposed at a position overlapping the support section 140. The mirror section 101 is disposed on the opposite side of the piezoelectric elements 111A and 111B with respect to the bases 112A and 112B in the Z-axis direction. The mirror section 101 is disposed in the -Z direction from the lower surfaces 112b of the bases 112A and 112B. The mirror section 101 does not protrude in the +Z direction from the upper surfaces 112a of the bases 112A and 112B. The reflecting surface 14 is formed on the surface 102b of the mirror section base 102 in the -Z direction. The reflecting surface 14 is formed on the surface 102b of the mirror section base 102 opposite the intermediate connectors 123E and 123F with respect to the mirror section base 102 in the Z-axis direction.

[0067] [Connections 120E, 120F] Movable device 13C includes connecting portions 120E and 120F. Connecting portion 120E connects mirror portion 101 and driving portion 110A. Connecting portion 120F connects mirror portion 101 and driving portion 110B. Movable device 13C similarly includes connecting portions connected to driving portions 110C and 110D. The connecting portions connected to driving portions 110C and 110D have the same configuration as connecting portions 120E and 120F connected to driving portions 110A and 110B, and therefore will not be described here.

[0068] The connecting portion 120E has a first connecting beam 121A, a second connecting beam 122A, and an intermediate connecting portion 123E. The connecting portion 120F has a first connecting beam 121B, a second connecting beam 122B, and an intermediate connecting portion 123B.

[0069] [Intermediate connection parts 123E, 123F] The intermediate connector 123E extends in the Z-axis direction and connects the first connection beam 121A and the second connection beam 122A. The intermediate connector 123E has, for example, a columnar shape. The columnar shape may be a circular columnar shape or a rectangular columnar shape. The lower end of the intermediate connector 123E may be connected to the end of the first connection beam 121A that is farther from the mirror section 101. The upper end of the intermediate connector 123E may be connected to the end of the second connection beam 122A that is farther from the base 112A. The intermediate connector 123E protrudes in the -Z direction from the second connection beam 122A.

[0070] The intermediate connection portion 123F extends in the Z-axis direction and connects the first connection beam 121B and the second connection beam 122B. The intermediate connection portion 123F has, for example, a columnar shape. The columnar shape may be a circular columnar shape or a rectangular columnar shape. The lower end of the intermediate connection portion 123F may be connected to the end of the first connection beam 121B that is farther from the mirror portion 101. The upper end of the intermediate connection portion 123F may be connected to the end of the second connection beam 122B that is farther from the base 112B. The intermediate connection portion 123F protrudes in the -Z direction from the second connection beam 122B.

[0071] The movable device 13C according to the third embodiment also achieves the same effects as the movable device 13 according to the first embodiment. The mirror section 101 may be arranged in the -Z direction with respect to the actuators 110A and 110B. The intermediate connectors 123E and 123F may protrude in the -Z direction from the second connector beams 122A and 122B. Note that in 13B according to the second embodiment, the mirror section 101 may be arranged in the -Z direction with respect to the actuators 110A and 110B.

[0072] [Movable device 13D according to the fourth embodiment] Next, a movable device 13D according to a fourth embodiment will be described. FIG. 9 is a cross-sectional view illustrating a movable device 13D according to the fourth embodiment, showing a cross section along the second axis L12. FIG. 10 is a cross-sectional view illustrating a portion of the mirror unit 101, connecting units 120G and 20H, and driving units 110A and 110B. FIG. 11 is a cross-sectional view illustrating a portion of the connecting unit 120G and driving unit 110A. The movable device 13D according to the fourth embodiment differs from the movable device 13 according to the first embodiment in that it includes connecting units 120G and 120H instead of connecting units 120A and 120B. Note that in the description of the fourth embodiment, descriptions similar to those of the first embodiment will be omitted.

[0073] [Connections 120G, 120H] 9, movable device 13D includes connecting portions 120G and 120H. Connecting portion 120G connects mirror portion 101 and driving portion 110A. Connecting portion 120H connects mirror portion 101 and driving portion 110B. Movable device 13D also includes connecting portions connected to driving portions 110C and 110D. The connecting portions connected to driving portions 110C and 110D have the same configuration as connecting portions 120G and 120H connected to driving portions 110A and 110B, and therefore will not be described.

[0074] The connecting portion 120G has a first connecting beam 121G, a second connecting beam 122G, and an intermediate connecting portion 123G. The connecting portion 120H has a first connecting beam 121H, a second connecting beam 122H, and an intermediate connecting portion 123H.

[0075] [First connecting beam 121G] 10, the first connecting beam 121G has a pair of first beams 131, a pair of first support beams 132, and a first support plate 133. The pair of first beams 131 extend in the X-axis direction and are spaced apart in the Y-axis direction. The end of each first beam 131 closer to the mirror section 101 is connected to the mirror section 101.

[0076] The pair of first support beams 132 protrude inward from each other from the pair of first beams 131. The pair of first support beams 132 extend in the Y-axis direction so as to approach each other. The pair of first support beams 132 are connected to the ends of the pair of first beams 131 that are farther from the mirror section 101. The width of the first support beams 132 intersecting the longitudinal direction is narrower than the width of the first beams 131 intersecting the longitudinal direction.

[0077] The first support plate 133 is supported by a pair of first support beams 132. The first support plate 133 is disposed between the pair of first support beams 132 in the Y-axis direction. The first support plate 133 has a disk shape. An intermediate connector 123G is connected to the first support plate 133.

[0078] [Second connecting beam 122G] 11, the second connection beam 122G has a pair of second beams 134, a pair of second support beams 135, and a second support plate 136. The pair of second beams 134 extend in the X-axis direction and are spaced apart in the Y-axis direction. The end of each second beam 134 closer to the driver 110A is connected to the driver 110A.

[0079] The pair of second support beams 135 protrude inward from each other from the pair of second beams 134. The pair of second support beams 135 extend in the Y-axis direction so as to approach each other. The pair of second support beams 135 are connected to the ends of the pair of second beams 134 that are farther from the drive unit 110A. The width of the second support beams 135 intersecting the longitudinal direction is narrower than the width of the second beams 134 intersecting the longitudinal direction.

[0080] The second support plate 136 is supported by a pair of second support beams 135. The second support plate 136 is disposed between the pair of second support beams 135 in the Y-axis direction. The second support plate 136 has a disk shape. The second support plate 136 is connected to the intermediate connector 123G.

[0081] [Intermediate connection part 123G] The intermediate connection portion 123G extends in the Z-axis direction and connects the first connection beam 121G and the second connection beam 122G. The intermediate connection portion 123G has, for example, a columnar shape. The columnar shape may be a circular columnar shape or a rectangular columnar shape. The upper end of the intermediate connection portion 123G may be connected to the first support plate 133 of the first connection beam 121G. The lower end of the intermediate connection portion 123G may be connected to the second support plate 136 of the second connection beam 122G. The intermediate connection portion 123G protrudes in the +Z direction from the second support plate 136 of the second connection beam 122G.

[0082] The first connection beam 121H, the second connection beam 122H, and the intermediate connection portion 123H of the connection portion 120H have the same configuration as the first connection beam 121G, the second connection beam 122G, and the intermediate connection portion 123G of the connection portion 120G, and therefore description thereof will be omitted.

[0083] The movable device 13D according to the fourth embodiment also achieves the same effects as the movable device 13 according to the first embodiment. The first connecting beam 121G may be configured to include a pair of first beams 131 spaced apart in the Y-axis direction. The second connecting beam 122G may be configured to include a pair of second beams 134 spaced apart in the Y-axis direction. Note that the movable device 13B and 13C according to the second and third embodiments may also be configured to include a pair of first beams 131 and a pair of second beams 134.

[0084] [Movable device 13E according to the fifth embodiment] Next, a movable device 13E according to a fifth embodiment will be described. Fig. 12 is a cross-sectional view illustrating the movable device 13E according to the fifth embodiment. The movable device 13E shown in Fig. 12 differs from the movable device 13 according to the first embodiment in that it includes connecting portions 120I and 120J instead of connecting portions 120A and 120B. Note that in the description of the fifth embodiment, descriptions similar to those of the first embodiment will be omitted.

[0085] [Connections 120I, 120J] 12, movable device 13D includes connecting portions 120I and 120J. Connecting portion 120I connects mirror portion 101 and driving portion 110A. Connecting portion 120J connects mirror portion 101 and driving portion 110B. Movable device 13D also includes connecting portions connected to driving portions 110C and 110D. The connecting portions connected to driving portions 110C and 110D have the same configuration as connecting portions 120I and 120J connected to driving portions 110A and 110B, and therefore will not be described.

[0086] The connecting portion 120I has a first connecting beam 121A, a second connecting beam 122A, an intermediate connecting portion (first intermediate connecting portion) 123A, a third connecting beam 124A, and an intermediate connecting portion (second intermediate connecting portion) 125A. The connecting portion 120J has a first connecting beam 121B, a second connecting beam 122B, an intermediate connecting portion (first intermediate connecting portion) 123B, a third connecting beam 124B, and an intermediate connecting portion (second intermediate connecting portion) 125B. Similarly, the connecting portions 120C and 120D have a first connecting beam, a second connecting beam, an intermediate connecting portion (first intermediate connecting portion), a third connecting beam, and an intermediate connecting portion (second intermediate connecting portion).

[0087] [Intermediate connector 123A] The intermediate connector 123A extends in the Z-axis direction and connects the first connection beam 121A and the third connection beam 124A. The intermediate connector 123A has, for example, a columnar shape. The columnar shape may be a circular columnar shape or a rectangular columnar shape. The upper end of the intermediate connector 123A may be connected to the end of the first connection beam 121A that is farther from the mirror section 101. The lower end of the intermediate connector 123A may be connected to the third connection beam 124A. The intermediate connector 123A protrudes in the -Z direction from the first connection beam 121A.

[0088] [Third connecting beam 124A] The third connection beam 124A protrudes in the X-axis direction from the lower end of the intermediate connection portion 123A. The third connection beam 124A protrudes in the X-axis direction so as to approach the driver 110A. The third connection beam 124A connects the intermediate connection portion 123A and the intermediate connection portion 125A.

[0089] [Intermediate connector 125A] The intermediate connection portion 125A extends in the Z-axis direction and connects the second connection beam 122A and the third connection beam 124A. The intermediate connection portion 125A has, for example, a columnar shape. The columnar shape may be a circular columnar shape or a rectangular columnar shape. The upper end portion of the intermediate connection portion 125A may be connected to the end portion of the third connection beam 124A that is farther from the intermediate connection portion 123A. The lower end portion of the intermediate connection portion 125A may be connected to the end portion of the second connection beam 122A that is farther from the driver 110A. The intermediate connection portion 125A protrudes in the +Z direction from the second connection beam 122A.

[0090] The intermediate connecting portion 123B, third connecting beam 124B, and intermediate connecting portion 125B of the connecting portion 120J have the same configuration as the intermediate connecting portion 123A, third connecting beam 124A, and intermediate connecting portion 125A of the connecting portion 120I, and therefore description thereof will be omitted.

[0091] The movable device 13E according to the fifth embodiment has the same effects as the movable device 13 according to the first embodiment. The movable device 13E may be configured to include third connection beams 124A and 124B and intermediate connectors 125A and 125B. Note that the movable device 13B, 13C, and 13D according to the second to fourth embodiments may also be configured to include third connection beams 124A and 124B and intermediate connectors 125A and 125B.

[0092] [Movable device 13F according to the sixth embodiment] Next, a movable device 13F according to a sixth embodiment will be described. Fig. 13 is a schematic diagram illustrating a movable device 13F according to the sixth embodiment. The movable device 13F shown in Fig. 13 differs from the movable device 13 according to the first embodiment in that the mirror unit 101, which is the movable unit, has a rear projection 104 and a rear connection unit 105. Note that in the description of the sixth embodiment, explanations similar to those of the first embodiment will be omitted.

[0093] [Mirror section 101] The mirror section 101 has a mirror section base (movable section base) 102 , a rear side protruding section 104 , and a rear side connecting section 105 .

[0094] [Rear side protrusion 104] The rear-side protrusion 104 protrudes in a direction along the center line O from the rear surface 102b, which is the surface opposite the reflecting surface 14. The rear-side protrusion 104 has, for example, a columnar shape. The columnar shape may be a cylindrical shape or a rectangular columnar shape. The rear-side protrusion 104 may have a shape other than a columnar shape. The diameter of the rear-side protrusion 104 may be smaller than the diameter of the reflecting surface 14, for example. In other words, the diameter of the reflecting surface 14 may be larger than the diameter of the rear-side protrusion 104.

[0095] Z [Back connection part 105] The rear connecting portion 105 is connected to the rear-side protrusion 104. The rear connecting portion 105 is, for example, disk-shaped. The rear connecting portion 105 may have a shape other than disk-shaped. The first connecting beam 121A and the first connecting beam 121B are connected to the rear-side protrusion 104. The first connecting beam 121A and the first connecting beam 121B may be connected to the side surface of the rear-side protrusion 104, or may be connected to another position. The diameter of the rear connecting portion 105 may be smaller than the diameter of the reflecting surface 14, for example. In other words, the diameter of the reflecting surface 14 may be larger than the diameter of the rear connecting portion 105.

[0096] The movable device 13F according to the sixth embodiment has the same effects as the movable device 13 according to the first embodiment. The mirror section 101 may include a rear-side protruding section 104 that protrudes from the rear surface 102b of the mirror section base 102, and a rear-side connecting section 105 that is connected to the rear-side protruding section 104.

[0097] The movable device 13F having such a configuration has the rear projection 104, which allows it to further project in the +Z direction of the reflecting surface 14. This prevents the mirror portion 101, which is the movable portion, from coming into contact with the connecting portions 120A and 120B and the driving portions 110A and 110B during oscillation when the mirror portion 101 is driven.

[0098] Furthermore, in the movable device 13F, the diameter of the reflecting surface 14 is larger than the diameter of the back connector 105, which allows the reflecting surface 14 to oscillate more efficiently. This is based on the fact that, when the displacement Z1 in the Z-axis direction generated by the driving units 110A and 110B is the same, the oscillation angle θ becomes larger when the diameter R1 of the movable unit (back connector 105) to which the connecting units 120A and 120B are directly connected is smaller than when the diameter R1 is larger (see formula (1) below).

[0099] (θ=sin -1 (Z1 / R1)) (1)

[0100] In the movable device 13F, the rear side protrusion 104 and the rear side connecting portion 105 may be formed as separate members or as an integrated member. The movable device 13F may include the rear side protrusion 104 but may not include the rear side connecting portion 105. The connecting portions 120A and 120B may be connected to the rear side protrusion 104.

[0101] [Optical scanning system] Next, an optical scanning system 10 to which the movable device 13 is applied will be described. Fig. 14 is a schematic diagram of an example of the optical scanning system 10. The optical scanning system 10 is a system that deflects light emitted from a light source device 12 by a reflecting surface 14 of a movable device 13 under the control of a control device 11, thereby optically scanning a surface 15 to be scanned.

[0102] The optical scanning system 10 includes a movable device 13. The movable device 13 includes a control device 11, a light source device 12, and a reflecting surface .

[0103] The control device 11 is, for example, an electronic circuit unit including a CPU (Central Processing Unit) and an FPGA (Field-Programmable Gate Array), etc. The movable device 13 is, for example, an MEMS device having a reflective surface 14 that is movable.

[0104] The light source device 12 is, for example, a laser device that emits a laser beam. The scanned surface 15 is, for example, a screen.

[0105] The control device 11 generates control commands for the light source device 12 and the movable device 13 based on the acquired optical scanning information. The control device 11 outputs drive signals to the light source device 12 and the movable device 13 based on the control commands. The light source device 12 emits light from the light source based on the input drive signal. The movable device 13 can oscillate the reflective surface 14 around the X axis based on the input drive signal. The movable device 13 can oscillate the reflective surface 14 around the Y axis based on the input drive signal. The movable device 13 may also oscillate the reflective surface 14 around an axis extending in another direction.

[0106] The optical scanning system 10 can perform optical scanning by oscillating the reflecting surface 14 and projecting the light reflected by the reflecting surface 14 onto the scanned surface 15. The optical scanning system 10 can project any image onto the scanned surface 15.

[0107] [Hardware configuration of optical scanning system 10] Next, a description will be given of a hardware configuration of an example of the optical scanning system 10. Fig. 15 is a hardware configuration diagram of an example of the optical scanning system 10. The control device 11, the light source device 12, and the movable device 13 are electrically connected to each other. The control device 11 includes a CPU 20, a RAM 21 (Random Access Memory), a ROM 22 (Read Only Memory), an FPGA 23, an external I / F 24, a light source device driver 25, and a movable device driver 26.

[0108] The CPU 20 is a computing device that reads programs and data from storage devices such as the ROM 22 onto the RAM 21, executes processing, and realizes the overall control and functions of the control device 11. The RAM 21 is a volatile storage device that temporarily stores programs and data. The ROM 22 is a non-volatile storage device that can store programs and data even when the power is turned off. The ROM 22 stores processing programs and data that the CPU 20 executes to control each function of the optical scanning system 10.

[0109] The FPGA 23 is a circuit that outputs control signals suitable for the light source device driver 25 and the movable device driver 26 in accordance with processing by the CPU 20. The external I / F 24 is an interface with, for example, an external device or a network. Examples of external devices include higher-level devices such as a PC (Personal Computer), and storage devices such as a USB memory, an SD card, a CD, a DVD, a HDD, and an SSD. Examples of networks include a CAN (Controller Area Network) or LAN (Local Area Network) in an automobile, the Internet, etc. The external I / F 24 may have any configuration as long as it enables connection or communication with an external device, and an external I / F 24 may be provided for each external device.

[0110] The light source device driver 25 is an electric circuit that outputs a drive signal such as a drive voltage to the light source device 12 in accordance with an input control signal. The movable device driver 26 is an electric circuit that outputs a drive signal such as a drive voltage to the movable device 13 in accordance with an input control signal.

[0111] In the control device 11, the CPU 20 acquires optical scanning information from an external device or a network via the external I / F 24. Note that any configuration may be used as long as the CPU 20 can acquire the optical scanning information, and the optical scanning information may be stored in the ROM 22 or FPGA 23 in the control device 11, or a new storage device such as an SSD may be provided in the control device 11 and the optical scanning information may be stored in the storage device.

[0112] The optical scanning information is information that indicates how to optically scan the scanned surface 15. For example, when an image is displayed by optical scanning, the optical scanning information may be image data. Also, when optical writing is performed by optical scanning, the optical scanning information is writing data that indicates the writing order and writing locations. For example, when object recognition is performed by optical scanning, the optical scanning information is irradiation data that indicates the timing and irradiation range of the light for object recognition.

[0113] The control device 11 can realize the functional configuration described below by instructions from the CPU 20 and the hardware configuration.

[0114] [Functional configuration of control device 11] Next, the functional configuration of the control device 11 of the optical scanning system 10 will be described. FIG. 16 is a functional block diagram of an example of the control device 11. The control device 11 has a control unit 30 and a drive signal output unit 31. The control unit 30 is realized by, for example, a CPU 20, an FPGA 23, etc. The control unit 30 acquires optical scanning information from an external device, converts the optical scanning information into a control signal, and outputs the control signal to the drive signal output unit 31. For example, the control unit 30 acquires image data from an external device, etc. as optical scanning information, generates a control signal from the image data through predetermined processing, and outputs the control signal to the drive signal output unit 31. The drive signal output unit 31 is realized by, for example, a light source device driver 25, a movable device driver 26, etc. The drive signal output unit 31 outputs a drive signal to the light source device 12 or the movable device 13 based on the input control signal.

[0115] The drive signal is a signal for controlling the drive of the light source device 12 or the movable device 13. For example, the drive signal output to the light source device 12 is a drive voltage that controls the irradiation timing and irradiation intensity of the light source. The drive signal output to the movable device 13 is a drive voltage that controls the timing and movable range of moving the reflective surface 14. The drive signal output to the movable device 13 may be the drive signal according to the first embodiment described above, or may be the drive signal according to the second embodiment.

[0116] [Light scanning process] Next, a description will be given of a process in which the optical scanning system 10 optically scans the surface 15. Fig. 17 is a flowchart showing an example of a process performed by the optical scanning system 10.

[0117] In step S11, the control unit 30 acquires optical scanning information from an external device or the like. In step S12, the control unit 30 generates a control signal from the acquired optical scanning information and outputs the control signal to the drive signal output unit 31. In step S13, the drive signal output unit 31 outputs a drive signal to the light source device 12 and the drive units 110a to 110d of the movable device 13 based on the input control signal. In step S14, the light source device 12 emits light based on the input drive signal. Furthermore, the drive units 110a to 110d of the movable device 13 oscillate the reflective surface 14 based on the input drive signal. According to the optical scanning system 10, light is deflected in any direction by driving the light source device 12 and the movable device 13, and optical scanning is performed.

[0118] The optical scanning system 10 may include a control device 11 that controls the driving units 110a to 110d of the movable device 13 and a control device that controls the light source device 12, separately.

[0119] The optical scanning system 10 can suppress a decrease in the resonance frequency that occurs when the size of the mirror part 101, which is the movable part, is increased. The optical scanning system 10 can perform optical scanning with high accuracy.

[0120] [Head-up display device] Next, the head-up display device 500 will be described. Fig. 18 is a schematic diagram of an example of an automobile 400 equipped with the head-up display device 500. The automobile 400 is equipped with the head-up display device 500. The head-up display device 500 is an image projection device that projects an image by optical scanning. The automobile 400 is an example of a moving object.

[0121] As shown in Fig. 18, the head-up display device 500 is installed near the windshield (windshield 401 or the like) of an automobile 400, for example. Projection light L emitted from the head-up display device 500 is reflected by the windshield 401 and directed toward an observer (driver 402) who is a user. This allows the driver 402 to visually recognize an image or the like projected by the head-up display device 500 as a virtual image. Note that a combiner may be installed on the inner wall surface of the windshield, and the user may visually recognize a virtual image by the projection light reflected by the combiner.

[0122] 19 is a schematic diagram of an example of a head-up display device 500. The head-up display device 500 includes laser light sources 501R, 501G, and 501B. The laser light source 501R emits a red laser light. The laser light source 501G emits a green laser light. The laser light source 501B emits a blue laser light.

[0123] The head-up display device 500 includes an incident optical system. The incident optical system includes collimator lenses 502, 503, and 504, two dichroic mirrors 505 and 506, and a light amount adjuster 507. The collimator lenses 502 to 504 are provided for the laser light sources 501R, 501G, and 501B. The laser light emitted from the laser light sources 501R, 501G, and 501B passes through the incident optical system and enters the movable device 13. The laser light that has entered the movable device 13 is reflected by the reflecting surface 14. The laser light is deflected by the movable device 13.

[0124] The head-up display device 500 includes a projection optical system. The projection optical system has a free-form surface mirror 509, an intermediate screen 510, and a projection mirror 511. The laser light deflected by the movable device 13 passes through the projection optical system and is projected onto the windshield 401. The head-up display device 500 may project the laser light onto the screen. The head-up display device 500 may include a unitized light source unit 530 having an optical housing. The optical housing accommodates, for example, laser light sources 501R, 501G, and 501B, collimator lenses 502, 503, and 504, and dichroic mirrors 505 and 506.

[0125] The head-up display device 500 can project an intermediate image displayed on an intermediate screen 510 onto the windshield 401. The head-up display device 500 allows the driver 402 to visually recognize the intermediate image projected onto the windshield 401 as a virtual image.

[0126] The color laser beams emitted from the laser light sources 501R, 501G, and 501B are converted into approximately parallel beams by collimator lenses 502, 503, and 504, respectively, and then combined by two dichroic mirrors 505 and 506. The dichroic mirrors 505 and 506 may each be an example of a combining unit. The combined laser beams have their light intensity adjusted by a light intensity adjusting unit 507, and are then two-dimensionally scanned by a movable device 13. The projection light L two-dimensionally scanned by the movable device 13 is reflected by a free-form surface mirror 509, where distortion is corrected, and then the light is focused on an intermediate screen 510. The intermediate screen 510 displays an intermediate image. The intermediate screen 510 is composed of a microlens array in which microlenses are arranged two-dimensionally. The intermediate screen 510 magnifies the incident projection light L in microlens units.

[0127] The movable device 13 swings (reciprocates) the reflecting surface 14 in two axial directions. The movable device 13 two-dimensionally scans the projection light L incident on the reflecting surface 14. The drive control of the movable device 13 is performed in synchronization with the light emission timing of the laser light sources 501R, 501G, and 501B.

[0128] The image projection device can project an image by performing optical scanning using a movable device 13 having a reflective surface 14. The image projection device may be, for example, a projector placed on a desk or the like and projecting an image onto a display screen. The image projection device may also be a head-mounted display device mounted on a mounting member worn on the observer's head or the like and projecting an image onto a reflective / transmissive screen included in the mounting member, or projecting an image using the observer's eyes as a screen.

[0129] The image projection device is not limited to one mounted on a vehicle or a mounting member. The image projection device may be mounted on a mobile body such as an aircraft, a ship, a mobile robot, etc. The image projection device may be mounted on a non-mobile body such as a work robot that operates a drive object such as a manipulator without moving from its location.

[0130] The image projection device including the movable device 13 can suppress the decrease in resonance frequency that occurs when the movable part is enlarged, and can perform optical scanning with high precision. The image projection device including the movable device 13 can improve the resolution of the light trajectory near the center O of the angle of view.

[0131] [Optical writing device 600] Next, an optical writing device 600 including a movable device 13 will be described. FIG. 20 is a schematic diagram of an example of an image forming device equipped with the optical writing device 600. The image forming device may be a laser printer 650. The laser printer 650 has a printer function using laser light. The laser printer 650 includes the optical writing device 600. The optical writing device 600 optically scans a photosensitive drum, which is the scanned surface 15, with one or more laser beams. The optical writing device 600 performs optical writing on the photosensitive drum by optical scanning. The optical writing device 600 includes the movable device 13.

[0132] 21 is a schematic diagram of an example of an optical writing device. In the optical writing device 600, laser light emitted from a light source device 12 such as a laser element passes through an imaging optical system 601 such as a collimator lens, and is then deflected in one or two axial directions by a movable device 13.

[0133] The optical writing device 600 includes a scanning optical system 602. The scanning optical system has a first lens 602a, a second lens 602b, and a reflecting mirror unit 602c. The laser light deflected by the movable device 13 passes through the scanning optical system 602 and is irradiated onto the scanned surface 15 (for example, a photosensitive drum or photosensitive paper). In this way, the optical writing device 600 performs optical writing on the scanned surface 15. The scanning optical system 602 forms an image of the light beam in the form of a spot on the scanned surface 15. As described above, the control device 11 applies drive signals to the drive units 110a to 110d of the movable device 13 to oscillate the reflecting surface 14.

[0134] In this way, the optical writing device 600 can be applied to an image forming device having a laser light printer function. The image forming device equipped with the optical writing device 600 may be a laser label device. The optical writing device 600 may be equipped in an image forming device such as a laser label device that has a scanning optical system capable of optical scanning in two axial directions and that prints by deflecting a laser light onto a thermal medium and optically scanning and heating it.

[0135] The movable device 13 having the reflective surface 14 consumes less power to drive than a rotating polygon mirror using a polygon mirror or the like. An optical writing device 600 including the movable device 13 can achieve power savings. The wind noise generated when the movable device 13 vibrates is smaller than that of a rotating polygon mirror. Therefore, the optical writing device 600 including the movable device 13 can improve quietness. The installation space for the movable device 13 is far less than that of a rotating polygon mirror. The amount of heat generated by the movable device 13 is far less than that of a rotating polygon mirror. An image forming device including the optical writing device 600 can easily be made smaller overall.

[0136] In this way, by applying the movable device 13 of the embodiment to the optical writing device 600, it is possible to suppress the decrease in resonance frequency that occurs when the movable part is enlarged, and to provide an optical writing device that can perform optical scanning with high precision. The optical writing device 600 including the movable device 13 can improve the resolution of the light trajectory near the center O of the angle of view.

[0137] [Laser radar device] Next, the laser radar device 700 will be described. FIGS. 22 and 23 are schematic diagrams of an example of an automobile equipped with the laser radar device 700. FIG. 24 is a schematic diagram of an example of the laser radar device 700. The laser radar device 700 is a distance measurement device that measures the distance to an object in a target direction. A distance measurement device is an example of an object recognition device. The laser radar device 700 has a movable device 13. The laser radar device 700 is mounted on, for example, an automobile 701, and measures the distance to the target object 702 by optically scanning the target direction and receiving reflected light from the target object 702 present in the target direction. The automobile 701 is an example of a moving body.

[0138] 24, the laser radar device 700 includes an incident optical system. The incident optical system has a collimator lens 703 and a plane mirror 704. The collimator lens 703 is an optical system that converts divergent light into approximately parallel light. The laser light emitted from the light source device 12 passes through the incident optical system and is scanned in one or two axial directions by the movable device 13.

[0139] The laser radar device 700 is equipped with a light projection optical system having a light projection lens 705. Light reflected by the reflecting surface 14 of the movable device 13 passes through the light projection lens 705 and is irradiated onto an object 702 in front. The control device 11 drives and controls the light source device 12 and the movable device 13. The light reflected by the object 702 is detected by a photodetector 709. The reflected light passes through a condenser lens 706, which is an incident light detection and light receiving optical system, and is received by an image sensor 707. The image sensor 707 outputs a detection signal to a signal processing device 708. The signal processing device 708 performs predetermined processing such as binarization and noise processing on the input detection signal and outputs the result to a distance measurement circuit 710.

[0140] The distance measurement circuit 710 recognizes the presence or absence of the target object 702 based on the time difference between when the light source device 12 emits laser light and when the laser light is received by the photodetector 709, or the phase difference between each pixel of the image sensor 707 that receives the light, and calculates distance information to the target object 702.

[0141] The movable device 13 with the reflective surface 14 is less likely to break than a polygonal mirror and is small, making it possible to provide a highly durable and compact radar device. Such a laser radar device can be attached to, for example, a vehicle, an aircraft, a ship, a robot, etc., and can optically scan a predetermined area to determine the presence or absence of obstacles and the distance to the obstacles.

[0142] The distance measurement device performs optical scanning by controlling a movable device 13 having a reflective surface 14 with a control device 11, and measures the distance to the target object 702 by receiving reflected light with a photodetector. The object recognition device is not limited to a distance measurement device. Any object recognition device may be used as long as it has a movable device 13, performs optical scanning, and can detect the target object 702 by receiving reflected light with a photodetector.

[0143] The object recognition device may be, for example, a biometric authentication device that calculates object information such as shape from distance information obtained by optically scanning a hand or face and recognizes the target by referring to the record.The object recognition device may be a security sensor that recognizes an intruder by optically scanning a target range.The object recognition device may be a 3D scanner that calculates object information such as shape from distance information obtained by optical scanning, recognizes the object, and outputs it as 3D data.

[0144] By including the movable device 13, such a distance measurement device can suppress a decrease in resonance frequency that occurs when the movable part is made larger, and can perform optical scanning with high accuracy. A distance measurement device including the movable device 13 can improve the resolution of the light trajectory near the center O of the angle of view.

[0145] [Laser headlamp] Next, a laser headlamp 50 equipped with a movable device 13 will be described. FIG. 25 is a schematic diagram of an example of the laser headlamp 50. The laser headlamp 50 may be a headlight for an automobile. The laser headlamp 50 has a light source device 12b, a movable device 13, a mirror 51, and a transparent plate 52. The movable device 13 may include a control device 11 which is a control unit.

[0146] Light source device 12b is a light source that emits blue laser light. The light emitted from light source device 12b enters movable device 13 and is reflected by reflective surface 14. Driving units 110a to 110d of movable device 13 oscillate reflective surface 14 based on a signal from control device 11. Movable device 13 oscillates reflective surface 14 to perform two-dimensional scanning of the laser light in the X and Y directions.

[0147] The scanning light from the movable device 13 is reflected by the mirror 51 and enters the transparent plate 52. The front or back surface of the transparent plate 52 is coated with a yellow phosphor. When the blue laser light reflected by the mirror 51 passes through the yellow phosphor coating on the transparent plate 52, it changes to white, which is within the legal range for headlight colors. As a result, the front of the automobile equipped with the laser headlamp 50 is illuminated with white light.

[0148] The scanning light from the movable device 13 is scattered in a predetermined manner when passing through the phosphor of the transparent plate 52. This reduces glare on the illuminated object in front of the automobile.

[0149] In the laser headlamp 50, the colors of the light source device 12b and the phosphor are not limited to blue and yellow, respectively. The laser headlamp 50 may also include a light source device 12b that emits near-ultraviolet light. In the laser headlamp 50, the transparent plate 52 may be coated with a uniform mixture of phosphors of the three primary colors of light: blue, green, and red. With the laser headlamp 50 configured in this way, the light passing through the transparent plate 52 can be converted to white light, and the area ahead of the vehicle can be illuminated with white light.

[0150] The laser headlamp 50, equipped with the movable device 13, can suppress the decrease in resonance frequency that occurs when the movable part is enlarged, and can perform optical scanning with high precision. The laser headlamp 50 equipped with the movable device 13 can improve the resolution of the light trajectory near the center O of the angle of view.

[0151] [Head-mounted display] Next, the head mounted display 60 will be described. FIG. 26 is a perspective view of the appearance of an example of the head mounted display 60. FIG. 27 is a diagram illustrating a portion of the configuration of the head mounted display 60. The head mounted display 60 is a head-mounted display that can be worn on a human head. The head mounted display 60 can have a shape similar to glasses, for example. Hereinafter, the head mounted display may be abbreviated as HMD. The HMD 60 includes a movable device 13.

[0152] The HMD 60 includes a front 60a and temples 60b, which are provided substantially symmetrically on the left and right sides. The front 60a includes, for example, a light guide plate 61. The temples 60b can incorporate an optical system, a control device 11, and the like.

[0153] 27 illustrates a portion of the HMD 60 for the left eye. The portion of the HMD 60 for the right eye has the same configuration as the portion for the left eye. The HMD 60 has a light source unit 530, a light amount adjustment section 507, a movable device 13, a light guide plate 61, and a half mirror 62. The movable device 13 may include a control device 11 as a control section.

[0154] As described above, the light source unit 530 is unitized by the optical housing. The optical housing accommodates the laser light sources 501R, 501G, and 501B, the collimator lenses 502, 503, and 504, and the dichroic mirrors 505 and 506. In the light source unit 530, the three-color laser light emitted from the laser light sources 501R, 501G, and 501B is combined by the dichroic mirrors 505 and 506. The light source unit 530 emits the combined parallel light.

[0155] The light emitted from the light source unit 530 is adjusted in intensity by the light intensity adjustment section 507 and then enters the movable device 13. The movable device 13 oscillates the reflective surface 14 based on a drive signal input from the control device 11. The movable device 13 performs two-dimensional scanning with the light incident from the light source unit 530. The control device 11 drives and controls the drive sections 110a to 110d of the movable device 13 in synchronization with the light emission timing of the laser light sources 501R, 501G, and 501B. The HMD 60 forms a color image using the scanned light.

[0156] The scanning light from the movable device 13 is incident on the light guide plate 61. The light guide plate 61 reflects the scanning light on its inner wall surface and guides the light to the half mirror 62. The light guide plate 61 is made of a resin or the like that is transparent to the wavelength of the scanning light.

[0157] The half mirror 62 reflects the light from the light guide plate 61 towards the back side of the HMD 60 and emits it in the direction of the eyes of a wearer 63 of the HMD 60. The half mirror 62 has, for example, a free-form surface shape. An image formed by the scanning light is formed on the retina of the wearer 63 by reflection on the half mirror 62. Alternatively, the HMD 60 forms an image on the retina of the wearer 63 by reflection on the half mirror 62 and the lens effect of the crystalline lens in the eyeball. In the HMD 60, spatial distortion in the image is corrected by reflection on the half mirror 62. The wearer 63 can observe an image formed by the light scanned in the X and Y directions.

[0158] By providing the HMD 60 with the half mirror 62, the wearer 63 can observe an image in which an image created by light from the outside world and an image created by the scanning light are superimposed. The HMD 60 may be provided with a mirror instead of the half mirror 62. With the HMD 60 configured in this way, by eliminating light from the outside world, the wearer 63 can observe only the image created by the scanning light.

[0159] In this way, by applying the movable device 13 of the embodiment to a head-mounted display, it is possible to suppress the decrease in resonance frequency that occurs when the movable part is made larger, and to provide a head-mounted display that is capable of optical scanning with high precision.

[0160] By including the movable device 13, the HMD 60 can suppress a decrease in resonance frequency that occurs when the movable part is enlarged, and can perform optical scanning with high precision. The HMD 60 including the movable device 13 can improve the resolution of the light trajectory near the center O of the angle of view.

[0161] [Eyeball tilt position detection device (pupil or cornea position detection device 80)] Next, an eyeball tilt position detection device 80 equipped with a movable device 13 will be described. The eyeball tilt position detection device is a pupil or cornea position detection device 80 that detects the position of the pupil or cornea. Figure 28 is a schematic diagram showing an example of pupil or cornea position detection device 80.

[0162] In this embodiment, the "eyeball tilt position" refers to the position of the pupil or cornea of ​​the eyeball, or the direction of the user's gaze. In the following, the "eyeball tilt position" refers to the position of the pupil or cornea, and the "eyeball tilt position detection device" refers to the "pupil or cornea position detection device." The pupil or cornea position detection device described below is synonymous with a gaze direction tracking device (eye tracking device) that detects or tracks the user's gaze direction continuously or at time intervals.

[0163] The pupil or cornea position detection device 80 shown in FIG. 29 includes a light source 82, a first light deflection unit 83, a movable device 13, a second light deflection unit 85, and a light receiving unit 86.

[0164] The light source 82 includes, for example, laser light sources 82r, 82g, and 82b that emit red, green, and blue laser beams, and an infrared laser light source 82ir that emits infrared laser beams. The laser light sources 82r, 82g, and 82b may be any one of them or a combination of two of them. The laser light sources 82r, 82g, and 82b emit light for drawing an image using the movable device 13.

[0165] The infrared laser light source 82ir emits light for detecting the position of the pupil or cornea. The light for detecting the position of the pupil or cornea is not limited to infrared light and may be visible light. From the viewpoint of improving the visibility of the drawn image, it is preferable that the light for detecting the position of the pupil or cornea be invisible light.

[0166] The first light deflection unit 83 is, for example, a dichroic mirror, and deflects the light emitted from the light source 82 toward the reflecting surface 14 of the movable device 13 while combining the light. The pupil or cornea position detection device 80 may be provided with a plurality of first light deflection units 83-1, 83-2, 83-3, 83-4, and 83-5 depending on the number of laser light sources 82r, 82g, and 82b and infrared laser light source 82ir. The first light deflection unit 83 includes a plurality of first light deflection units 83-1, 83-2, 83-3, 83-4, and 83-5. The plurality of first light deflection units 83-1, 83-2, 83-3, 83-4, and 83-5 deflect the respective light while combining the light.

[0167] The movable device 13 includes a reflecting surface 14, and scans the light deflected by the first light deflection unit 83 in a two-dimensional direction toward the second light deflection unit 85. At this time, the movable device 13 scans the light deflected by the first light deflection unit 83 by, for example, raster scanning or vector scanning, to form an image. The movable device 13 can scan the light deflected by the first light deflection unit 83 by spiral scanning.

[0168] The second light deflection unit 85 is, for example, a holographic optical element, and deflects the light L1 scanned by the movable device 13 toward the user's eyeball 87. At least a portion of the light L2 deflected by the second light deflection unit 85 is incident on the user's eyeball 87 as display image light. The second light deflection unit 85 may also include multiple light deflection members. For example, multiple types of light deflection members that reflect specific light from the light source 82 may be used, and a different reflective surface may be used for each light emitted from the light source 82. A specific example is a configuration in which, in order of proximity to the eyeball 87, light deflection members that reflect light emitted from the laser light sources 82r, 82g, and 82b and a light deflection member that reflects light emitted from the infrared laser light source 82ir are stacked.

[0169] The light receiving unit 86 receives light L3 reflected by the user's eyeball 87 from the light L2 deflected by the second light deflection unit 85 and outputs a detection signal SD corresponding to the received light. The light receiving unit 86 is, for example, an imaging element capable of detecting infrared light. Furthermore, multiple light receiving units 86 may be provided at positions where they can receive light L3 reflected by the user's eyeball 87. The intensity of the light received by the light receiving unit 86 changes depending on changes in the position of the eyeball (pupil, cornea, etc.), i.e., changes in the line of sight. Therefore, the pupil or cornea position detection device 80 in this embodiment detects or estimates the pupil or cornea position based on the intensity of light received by the light receiving unit 86. Furthermore, the light receiving unit 86 may be configured to capture an image of the eyeball 87 illuminated with light L2 deflected by the second light deflection unit 85. In this case, the pupil or cornea position detection device 80 detects or estimates the tilt position of the eyeball based on the position of the pupil or cornea contained in the captured image (detection signal SD) and the position at which the light L2 deflected by the second light deflection unit 85 is reflected on the eyeball 87.

[0170] As described above, the pupil or corneal position detection device 80 according to this embodiment can detect the position of the pupil or cornea while forming an image with the movable device 13. Furthermore, the movable device 13 is configured to scan light more efficiently, so image formation and pupil or corneal position detection can be achieved with lower power consumption. Furthermore, the movable device 13 can achieve the above-described effects without changing the area required for installation in the pupil or corneal position detection device 80 compared to the configuration of the conventional technology. This allows the pupil or corneal position detection device 80 to be configured without increasing in size.

[0171] Furthermore, the pupil or cornea position detection device 80 can be mounted on a head-mounted display as, for example, an eye tracking device to detect or track the direction of the user's gaze. In this case, for example, by lowering the resolution of images displayed in the area near the user's gaze direction compared to images displayed in other areas (foveal rendering), image processing can be speeded up compared to when high-resolution images are displayed across the entire area.

[0172] 29 is a schematic diagram showing an example of pupil or cornea position detection device 80. As shown in Fig. 29, pupil or cornea position detection device 80 includes a light source 82, first light deflection units 83-1 to 83-4, a lens 92, a lens 93, a scanning mirror 94, a deflection mirror 95, a second light deflection unit 85, a light receiving unit 86, and a control unit 96.

[0173] The lens 92 is an optical system that converts the light emitted by the light source 82 into approximately parallel light. The lens 93 is an optical system that shapes the light converted into approximately parallel light by the lens 92 into a desired laser beam state. In this embodiment, a configuration including the lens 92 and the lens 93 is shown, but the lenses 92 and 93 are not necessarily required to be provided.

[0174] The light formed by the lenses 92 and 93 is incident on the scanning mirror 94 (movable device 13). The scanning mirror 94 scans the incident light to form image light. The formed image light is incident on the deflection mirror 95 and is reflected in a direction toward the second light deflection unit 85. The deflection mirror 95 corresponds to the first light deflection unit 83-5 described in FIG. 34, and is preferably configured to be capable of scanning light equipped with the movable device 13. By configuring the deflection mirror 95 to be capable of optical scanning, it is possible to project an image over a wider range.

[0175] Although the above description exemplifies a configuration in which the deflection mirror 95 is disposed between the scanning mirror 94 and the second optical deflection unit 85, the pupil or cornea position detection device 80 is not limited to this. In the pupil or cornea position detection device 80, the scanning mirror 94 may be disposed between the deflection mirror 95 and the second optical deflection unit 85, and the light reflected by the deflection mirror 95 may be scanned in two axial directions by the scanning mirror 94 and made incident on the second optical deflection unit 85.

[0176] The control unit 96 detects the position of the user's pupil or cornea based on the detection signal SD output by the light receiving unit 86, and acquires information indicating the line of sight direction. Furthermore, in order to form an image to be projected onto the retina 32, the control unit 96 provides a formation drive signal SL1 to the light source 82 to control the light emission and light intensity of the light source 82, and provides a scan drive signal SS to the scanning mirror 94 to drive the scanning mirror 94. Furthermore, if the deflection mirror 95 is configured to be capable of optical scanning, the control unit 96 provides a deflection drive signal ST to the deflection mirror 95 to drive the deflection mirror 95 in order to control the projection position of the image in accordance with the acquired line of sight information.

[0177] Although examples of embodiments of the present invention have been described above, the present invention is not limited to such specific embodiments, and various modifications and changes are possible within the scope of the gist of the present invention described in the claims.

[0178] In the above-described embodiment, a configuration in which a reflective surface is provided on the movable part is exemplified, but this is not limited to this, and the movable part may be provided with other optical elements such as a diffraction grating, a photodiode, a heater (e.g., a heater using SiN), a light source (e.g., a surface-emitting laser), etc., or may be provided with both a reflective surface and other optical elements.

[0179] [Processing circuit] Each function of the above-described embodiments can be realized by one or more processing circuits. Here, the term "processing circuit" in this specification includes a processor programmed to perform each function by software, such as a processor implemented by an electronic circuit, as well as devices such as an ASIC (Application Specific Integrated Circuit), a DSP (Digital Signal Processor), an FPGA (Field Programmable Gate Array), or a conventional circuit module designed to perform each function described above.

[0180] One aspect of the present invention may be as follows.

[0181] <1> A movable part; a drive unit that drives the movable unit; a first connection beam extending from the movable portion in a direction intersecting a center line of the movable portion; a second connection beam extending from the drive portion in a direction intersecting the center line; a movable device comprising: an intermediate connecting portion extending in a direction along the center line and connecting the first connecting beam and the second connecting beam; <2> The intermediate connection portion is a columnar portion extending in a direction along the center line. <1> The movable device according to claim 1. <3> The drive unit is a piezoelectric portion; a base portion connected to the second connection beam and on which the piezoelectric portion is mounted, the piezoelectric portion is disposed on one of a pair of surfaces of the base portion that face each other in a direction along the center line, The intermediate connection portion is the above-mentioned <1> or <2> The movable device according to claim 1. <4> a support portion that is a frame body that supports the plurality of drive portions, When viewed in a direction along the center line, the movable portion is disposed inside the support portion, the base portion extends inwardly from the support portion; the support portion has a predetermined length in a direction along the center line, In the direction along the center line, the movable portion is disposed inside the support portion. <1> ~ <3> 10. A movable device according to any one of the preceding items. <5> The second connection beam is a pair of second beams extending in a longitudinal direction of the second connection beam and spaced apart from each other in a width direction intersecting the longitudinal direction of the second connection beam; a pair of second support beams extending inward from the pair of second beams; a second support plate supported by the pair of second support beams, The intermediate support portion is fixed to the second support plate. <1> ~ <4> 10. A movable device according to any one of the preceding items. <6> The first connection beam is a pair of first beams extending in a longitudinal direction of the first connection beam and spaced apart from each other in a width direction intersecting the longitudinal direction of the first connection beam; a pair of first support beams extending inward from the pair of first beams; a first support plate supported by the pair of first support beams, The intermediate support portion is fixed to the first support plate. <1> ~ <5> 10. A movable device according to any one of the preceding items. <7> the intermediate connection portion includes a first intermediate connection portion and a second intermediate connection portion, The first intermediate connection portion and the second intermediate connection portion are connected via a third connection beam. <1> ~ <6> 10. A movable device according to any one of the preceding items. <8> The movable part is A reflective surface; a movable portion base body having the reflecting surface; a back surface connecting portion that is located on a back surface side of the movable portion base opposite to the reflecting surface and that is connected to the first connecting beam, The diameter of the reflecting surface is larger than the diameter of the rear connecting portion. <1> ~ <7> 10. A movable device according to any one of the preceding items. <9> The movable part is a rear-side protruding portion protruding from the rear surface of the movable portion base body in a direction along the center line, The rear side protruding portion is connected to the first connection beam via the rear connecting portion. <8> The movable device according to claim 1. <10> The above <1> ~ <9> 10. A projection device comprising an optical scanning system including the movable device according to any one of the above. <11> The above <10> A moving object comprising the projection device according to claim 1. <12> The above <1> ~ <9> A head-mounted display comprising the movable device according to any one of the above. <13> The above <1> ~ <9> A head-up display comprising the movable device according to any one of the above. <14> The above <1> ~ <9> A laser headlamp comprising the movable device according to any one of the above. <15> The above <1> ~ <9> An object recognition device comprising the movable device according to any one of the above. <16> The above <1> ~ <9> A pupil or cornea position detection device comprising the movable device according to any one of the above. [Explanation of symbols]

[0182] 10 Optical scanning system 11 Control device (control unit) 13,13B,13C,13D,13E,13F Movable device 14 Reflective surface 50 Laser headlamp 60 Head-mounted display 101 Mirror part (movable part) 102 mirror base (movable base) 102b Back 104 Rear side protrusion 105 Rear connection part 110A, 110B, 110C, 110D drive unit 111A, 111B, 111C, 111D Piezoelectric element (piezoelectric part) 112A, 112B, 112C, 112D base 120A, 120B, 120C, 120D connection parts 120E, 120F, 120G, 120H, 120I, 120J connection part 121A, 121B First connecting beam 122A, 122B Second connecting beam 123A, 123B Intermediate joint (first intermediate joint) 124A, 124B Third connecting beam 125A, 125B Intermediate joint (second intermediate joint) 131 1st beam 132 1st support beam 133 1st support board 134 2nd beam 135 2nd support beam 136 2nd support board 400 Automobiles (mobile vehicles) 500 Head-up display device (projection device) 700 Laser radar device (object recognition device) [Prior art documents] [Patent documents]

[0183] [Patent Document 1] Japanese Patent Application Laid-Open No. 2010-286609

Claims

1. A movable part; a drive unit that drives the movable unit; a first connection beam extending from the movable portion in a direction intersecting a center line of the movable portion; a second connection beam extending from the drive portion in a direction intersecting the center line; an intermediate connecting portion extending in a direction along the center line and connecting the first connecting beam and the second connecting beam;

2. The movable device according to claim 1 , wherein the intermediate connection portion has a columnar shape and extends in a direction along the center line.

3. The drive unit is a piezoelectric portion; a base portion connected to the second connection beam and on which the piezoelectric portion is mounted, the piezoelectric portion is disposed on one of a pair of surfaces of the base portion that face each other in a direction along the center line, The movable device according to claim 2 , wherein the intermediate connection portion extends from the second connection beam to a side opposite to the piezoelectric portion.

4. a support portion that is a frame body that supports the plurality of drive portions, When viewed in a direction along the center line, the movable portion is disposed inside the support portion, the base portion extends inwardly from the support portion; the support portion has a predetermined length in a direction along the center line, The movable device according to claim 3 , wherein the movable portion is disposed inside the support portion in the direction along the center line.

5. The second connection beam is a pair of second beams extending in a longitudinal direction of the second connection beam and spaced apart from each other in a width direction intersecting the longitudinal direction of the second connection beam; a pair of second support beams extending inward from the pair of second beams; a second support plate supported by the pair of second support beams, The movable device according to claim 1 , wherein the intermediate connection portion is fixed to the second support plate.

6. The first connection beam is a pair of first beams extending in a longitudinal direction of the first connection beam and spaced apart from each other in a width direction intersecting the longitudinal direction of the first connection beam; a pair of first support beams extending inward from the pair of first beams; a first support plate supported by the pair of first support beams, The movable device according to claim 5 , wherein the intermediate connection portion is fixed to the first support plate.

7. the intermediate connection portion includes a first intermediate connection portion and a second intermediate connection portion, The movable device according to claim 1 , wherein the first intermediate connecting portion and the second intermediate connecting portion are connected via a third connecting beam.

8. The movable part is A reflective surface; a movable portion base body having the reflecting surface; a rear connecting portion located on a rear surface side of the movable portion base opposite to the reflecting surface, the rear connecting portion being connected to the first connecting beam, The movable device according to claim 1 , wherein the diameter of the reflecting surface is larger than the diameter of the rear connecting portion.

9. The movable part is a rear-side protruding portion protruding from the rear surface of the movable portion base body in a direction along the center line, The movable device according to claim 8 , wherein the rear projection is connected to the first connecting beam via the rear connecting portion.

10. A projection device comprising an optical scanning system comprising a movable device according to any one of claims 1 to 9.

11. A moving object comprising the projection device according to claim 10.

12. A head-mounted display comprising the movable device according to any one of claims 1 to 9.

13. A head-up display comprising the movable device according to any one of claims 1 to 9.

14. A laser headlamp comprising the movable device according to any one of claims 1 to 9.

15. An object recognition device comprising the movable device according to any one of claims 1 to 9.

16. A pupil or cornea position detection device comprising the movable device according to any one of claims 1 to 9.

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