Memory device

Abstract

To provide a memory device with high data read performance.SOLUTION: A memory device according to one embodiment includes a memory cell, a first wiring, a second wiring, a first switch, a current mirror circuit, and a sense amplifier circuit. The memory cell has a first end and a second end. The first wiring is connected to the first end. The second wiring is connected to the second end. The first switch is connected between the second wiring and a third wiring that receives a first voltage. The current mirror circuit has a third end and a fourth end, is connected to the first wiring at the third end, and outputs an output current that uses a first current flowing to the first wiring at the fourth end as a reference current. The sense amplifier circuit is connected to the fourth end.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] FIELD Embodiments generally relate to storage devices. [Background technology]

[0002] Examples of storage devices include magnetic storage devices, which use the magnetoresistive effect to store data. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] US Patent Application Publication No. 2022 / 0084575 Summary of the Invention [Problem to be solved by the invention]

[0004] A storage device having high data read performance is provided. [Means for solving the problem]

[0005] A memory device according to one embodiment includes a memory cell, a first wiring, a second wiring, a first switch, a current mirror circuit, and a sense amplifier circuit. The memory cell has a first end and a second end. The first wiring is connected to the first end. The second wiring is connected to the second end. The first switch is connected between the second wiring and a third wiring that receives a first voltage. The current mirror circuit has a third end and a fourth end, is connected to the first wiring at the third end, and outputs an output current at the fourth end that uses a first current flowing through the first wiring as a reference current. The sense amplifier circuit is connected to the fourth end. [Brief explanation of the drawings]

[0006] [Figure 1] FIG. 1 shows functional blocks of a storage device according to the first embodiment. [Figure 2] FIG. 2 is a circuit diagram of a memory cell array of the memory device of the first embodiment. [Figure 3] FIG. 3 is a perspective view of a part of the memory cell array of the memory device of the first embodiment. [Figure 4] FIG. 4 shows a cross section of an example of the structure of a memory cell in the memory device of the first embodiment. [Figure 5] FIG. 5 shows an example of a curve of the voltage and current characteristics of a memory cell of the storage device of the first embodiment. [Figure 6] FIG. 6 shows an example of components and connections of the components in the readout circuit of the storage device of the first embodiment. [Figure 7] FIG. 7 shows the states of some signals over time during data reading from the storage device of the first embodiment. [Figure 8] FIG. 8 shows an example of components and connections of the components in a readout circuit of a reference storage device. [Figure 9] FIG. 9 shows an example of components and connections of the components in a read circuit of a memory device according to a modification of the first embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, embodiments will be described with reference to the drawings. In some embodiments or different embodiments, a plurality of components having substantially the same functions and configurations may be distinguished from each other by adding an additional number or letter to the end of the reference numeral.

[0008] In this specification and claims, when a first element is "connected" to another second element, it includes the first element being connected to the second element directly or via an element that is always or selectively conductive.

[0009] 1. First embodiment FIG. 1 shows functional blocks of a storage device according to a first embodiment. The storage device 1 is a device for storing data. The storage device 1 is a magnetic storage device that stores data using a stack of magnetic materials exhibiting dynamically variable resistance. As shown in FIG. 1, the storage device 1 includes a memory cell array 11, an input / output circuit 12, a control circuit 13, a row selection circuit 14, a column selection circuit 15, a write circuit 16, a read circuit 17, and a voltage generation circuit 18.

[0010] The memory cell array 11 is a collection of a plurality of arranged memory cells MC. The memory cells MC can store data non-volatilely. A plurality of first-type wirings and a plurality of second-type wirings are located in the memory cell array 11. In the following description, one of the first-type wirings and the second-type wirings is referred to as a word line WL, and the other is referred to as a bit line BL. The following description is based on an example in which the word line WL is associated with a row and the bit line BL is associated with a column. Each memory cell MC is connected to one word line WL and one bit line BL. Selecting one row and one column selects one memory cell MC.

[0011] The input / output circuit 12 is a circuit that inputs and outputs data and signals. The input / output circuit 12 receives a control signal CNT, a command CMD, address information ADD, and data DAT from outside the memory device 1, for example, from a memory controller. The input / output circuit 12 outputs the data DAT.

[0012] The voltage generation circuit 18 is a circuit that generates voltages of various magnitudes from voltages received from outside the storage device 1. The voltage generation circuit 18 outputs one or more voltages of a fixed magnitude used for reading data. The voltage generation circuit 18 outputs a voltage of a fixed magnitude and a voltage of a dynamically variable magnitude used for writing data.

[0013] The write circuit 16 is a circuit that controls writing of data to the memory cells MC. It receives write data DAT from the input / output circuit 12 and a voltage for data writing from the voltage generation circuit 18. The write circuit 16 outputs a voltage and current used for data writing based on the control of the control circuit 13 and the write data DAT.

[0014] The read circuit 17 is a circuit that controls the reading of data from the memory cells MC. The read circuit 17 receives a voltage used for data reading from the voltage generating circuit 18. Under the control of the control circuit 13, the read circuit 17 determines the data stored in the memory cells MC using the voltage used for data reading. The read circuit 17 includes a plurality of sense amplifier circuits SAC (not shown).

[0015] The row selection circuit 14 is a circuit that selects a row of memory cells MC. The row selection circuit 14 receives address information ADD from the input / output circuit 12. The row selection circuit 14 receives a voltage for data writing from the write circuit 16. The row selection circuit 14 receives a voltage for data reading from the read circuit 17. During data writing, the row selection circuit 14 uses the voltage for data writing to select one or more word lines WL associated with the row specified by the received address information ADD. During data reading, the row selection circuit 14 uses the voltage for data reading to select one or more word lines WL associated with the row specified by the received address information ADD.

[0016] The column selection circuit 15 is a circuit that selects a column of memory cells MC. The column selection circuit 15 receives address information ADD from the input / output circuit 12. The column selection circuit 15 receives a voltage for data writing from the write circuit 16. The column selection circuit 15 receives a voltage for data reading from the read circuit 17. During data writing, the column selection circuit 15 uses the voltage for data writing to select one or more bit lines BL associated with the column identified by the received address information ADD. During data reading, the column selection circuit 15 uses the voltage for data reading to select one or more bit lines BL associated with the column identified by the received address information ADD.

[0017] The control circuit 13 is a circuit that controls the operation of the memory device 1. The control circuit 13 receives a control signal CNT and a command CMD from the input / output circuit 12. The control circuit 13 controls the write circuit 16 and the read circuit 17 based on the control indicated by the control signal CNT and the command CMD. Specifically, the control circuit 13 controls the write circuit 16 to supply the voltage received by the write circuit 16 from the voltage generation circuit 18 to the row selection circuit 14 and the column selection circuit 15 while writing data to the memory cell MC. The control circuit 13 controls the read circuit 17 to supply the voltage received by the read circuit 17 from the voltage generation circuit 18 to the row selection circuit 14 and the column selection circuit 15 while reading data from the memory cell MC.

[0018] 1.1.2.Memory Cell Array Circuit Configuration 2 is a circuit diagram of a memory cell array of the memory device of the first embodiment. As shown in FIG. 2, M+1 word lines WL (i.e., WL_0, WL_1, ..., and WL_M) and N+1 bit lines BL (i.e., BL_0, BL_1, ..., and BL_N) are located in the memory cell array 11. M and N are both positive numbers.

[0019] Each memory cell MC is connected to one word line WL and one bit line BL. Each memory cell MC includes one MTJ element MTJ and one switching element SE. In each memory cell MC, the MTJ element MTJ and the switching element SE are connected in series. The switching element SE of each memory cell MC is connected to one word line WL. The MTJ element MTJ of each memory cell MC is connected to one bit line BL.

[0020] The MTJ element MTJ is an element that exhibits a tunnel magnetoresistance effect and includes, for example, a magnetic tunnel junction (MTJ). The MTJ element MTJ is also called a magnetoresistance effect element MTJ. The MTJ element MTJ is a variable resistance element that can be switched between a low resistance state and a high resistance state. The MTJ element MTJ can store one bit of data by utilizing the difference between the two resistance states. In one example, the MTJ element MTJ stores data "0" in a low resistance state and data "1" in a high resistance state.

[0021] The switching element SE has two terminals and is an element that electrically connects or disconnects the two terminals. When a voltage applied in a first direction between the two terminals is less than a certain threshold voltage, the switching element SE is in a high-resistance state, e.g., an electrically non-conductive state (or an OFF state). When the voltage applied between the two terminals increases and becomes equal to or greater than the threshold voltage, the switching element SE changes to a low-resistance state, e.g., an electrically conductive state (or an ON state). When the voltage applied between the two terminals of the switching element SE in the low-resistance state decreases and becomes less than the threshold voltage, the switching element SE changes to a high-resistance state. The switching element SE has the same function of switching between the high-resistance state and the low-resistance state based on the magnitude of the voltage applied in the first direction, but also in a second direction opposite to the first direction. In other words, the switching element SE is a bidirectional switching element. By turning the switching element SE on or off, it is possible to control whether or not a current is supplied to the MTJ element MTJ connected to the switching element SE, i.e., to select or deselect the MTJ element MTJ.

[0022] 1.1.3.Memory Cell Array Structure 3 is a perspective view of a portion of the memory cell array of the memory device of Embodiment 1. As shown in FIG. 3, a plurality of conductors 21 and a plurality of conductors 22 are provided.

[0023] The conductors 21 have a linear shape and extend along the x-axis. The conductors 21 are aligned along the y-axis, which is perpendicular to the x-axis. Each conductor 21 functions as one word line WL.

[0024] The conductors 22 are located above the conductors 21 on the z-axis. The z-axis is perpendicular to the x-axis and y-axis. The conductors 22 have a linear shape, extend along the y-axis, and are aligned along the x-axis. Each conductor 22 functions as one bit line BL.

[0025] One memory cell MC is provided at each intersection of the conductor 21 and the conductor 22. Each memory cell MC includes a structure that functions as a switching element SE and a structure that functions as an MTJ element MTJ. The structure that functions as the switching element SE and the structure that functions as the MTJ element MTJ each include one or more layers. In one example, the structure that functions as the MTJ element MTJ is located on the upper surface of the structure that functions as the switching element SE. The lower surface of the memory cell MC is in contact with the upper surface of one of the conductors 21. The upper surface of the memory cell MC is in contact with the lower surface of one of the conductors 22.

[0026] Memory Cell FIG. 4 shows a cross section of an example of the structure of a memory cell in the memory device of the first embodiment.

[0027] The switching element SE includes a variable resistance material 32. The variable resistance material 32 is a material that exhibits dynamically variable resistance and, in one example, has the shape of a layer. The variable resistance material 32 is a two-terminal switching element, with a first terminal being one of the upper and lower surfaces of the variable resistance material 32 and a second terminal being the other of the upper and lower surfaces of the variable resistance material 32. When the voltage applied between the two terminals is less than a certain threshold voltage, the variable resistance material 32 is in a high resistance state, e.g., an electrically non-conductive state. When the voltage applied between the two terminals increases and becomes equal to or greater than the threshold voltage, the variable resistance material 32 enters a low resistance state, e.g., an electrically conductive state. When the voltage applied between the two terminals of the variable resistance material 32 in the low resistance state decreases and becomes less than the threshold voltage, the variable resistance material 32 enters a high resistance state.

[0028] In one example, the variable resistance material 32 includes an insulator and a dopant introduced into the insulator by ion implantation. The insulator includes, for example, an oxide, such as a material made of SiO2 or a material made essentially of SiO2. In one example, the dopant includes arsenic (As) or germanium (Ge). The phrase "consisting essentially of" and similar phrases means that the "consisting essentially of" component may contain unintentional impurities.

[0029] The switching element SE may further include a lower electrode 31 and an upper electrode 33. Figure 4 shows such an example. The variable resistance material 32 is located on the upper surface of the lower electrode 31, and the upper electrode 33 is located on the upper surface of the variable resistance material 32.

[0030] The MTJ element MTJ includes a ferromagnetic layer 35, an insulating layer 36, and a ferromagnetic layer 37. For example, as shown in FIG. 4, the insulating layer 36 is located on the upper surface of the ferromagnetic layer 35, and the ferromagnetic layer 37 is located on the upper surface of the insulating layer 36.

[0031] The ferromagnetic layer 35 is a layer of a material exhibiting ferromagnetism. The ferromagnetic layer 35 has an easy axis of magnetization that runs through the interfaces between the ferromagnetic layer 35, the insulating layer 36, and the ferromagnetic layer 37. The magnetization direction of the ferromagnetic layer 35 is intended to remain unchanged even when data is read or written to the memory cell MC. The ferromagnetic layer 35 functions as a so-called reference layer. The ferromagnetic layer 35 may include multiple layers. Hereinafter, the ferromagnetic layer 35 may be referred to as a reference layer RL.

[0032] The insulating layer 36 is a layer of an insulator. The insulating layer 36 contains, for example, magnesium oxide (MgO) or is substantially made of MgO, and functions as a so-called tunnel barrier (TB).

[0033] The ferromagnetic layer 37 is a layer of a material exhibiting ferromagnetism. The ferromagnetic layer 37 includes, for example, cobalt iron boron (CoFeB) or iron boride (FeB), or is substantially composed of CoFeB or FeB. The ferromagnetic layer 37 has an easy axis of magnetization that runs through the interfaces of the ferromagnetic layer 35, the insulating layer 36, and the ferromagnetic layer 37. The magnetization direction of the ferromagnetic layer 37 is changeable by writing data to the memory cell MC, and the ferromagnetic layer 37 functions as a so-called memory layer (SL). Hereinafter, the ferromagnetic layer 37 may also be referred to as the memory layer SL.

[0034] When the magnetization direction of the memory layer SL is parallel to the magnetization direction of the reference layer RL, the MTJ element MTJ has a low resistance, and when the magnetization direction of the memory layer SL is antiparallel to the magnetization direction of the reference layer RL, the MTJ element MTJ has a resistance higher than the resistance when the magnetization directions of the memory layer SL and the reference layer RL are antiparallel.

[0035] When a current of a certain magnitude or more flows from the memory layer SL to the reference layer RL, the magnetization direction of the memory layer SL becomes parallel to the magnetization direction of the reference layer RL, and when a current of a certain magnitude or more flows from the reference layer RL to the memory layer SL, the magnetization direction of the memory layer SL becomes antiparallel to the magnetization direction of the reference layer RL.

[0036] The MTJ element MTJ may include further layers.

[0037] FIG. 5 shows an example of a curve of the voltage and current characteristics of a memory cell of the memory device of the first embodiment. The horizontal axis of the graph indicates the magnitude of the terminal voltage of the memory cell MC (i.e., the difference in potential between both ends). The vertical axis of the graph indicates the magnitude of the current flowing through the memory cell MC on a logarithmic scale. FIG. 5 shows hypothetical characteristics that do not actually appear using dashed lines. FIG. 5 shows the cases when the memory cell MC is in a low resistance state and a high resistance state.

[0038] When the voltage is increased from 0, the current continues to increase until it reaches the threshold voltage Vth. Until the voltage reaches the threshold voltage Vth, the switching element SE of the memory cell MC is off, that is, non-conductive.

[0039] When the voltage is further increased and reaches the threshold voltage Vth, i.e., point A, the relationship between voltage and current shows a discontinuous change, exhibiting the characteristics shown at points B1 and B2. The magnitude of the current at points B1 and B2 is significantly larger than the magnitude of the current at point A. This sudden change in current is due to the switching element SE of the memory cell MC being turned on. The magnitude of the current at points B1 and B2 depends on the resistance state of the MTJ element MTJ of the memory cell MC.

[0040] When the voltage is reduced from a state in which the switching element SE is on, for example, a state in which the voltage and current show the relationship shown at point B1 or point B2 and points with higher voltages than these, the current continues to decrease.

[0041] When the voltage is further reduced and reaches a certain magnitude, the voltage-current relationship shows a discontinuous change. The voltage at which the voltage-current relationship begins to show a discontinuity depends on the terminal voltage of the MTJ element MTJ of the memory cell MC, i.e., on whether the MTJ element MTJ is in a high-resistance state or a low-resistance state. When the MTJ element MTJ is in a low-resistance state, the voltage-current relationship shows a discontinuity from point C1. When the MTJ element MTJ is in a high-resistance state, the voltage-current relationship shows a discontinuity from point C2. When the voltage-current relationship reaches points C1 and C2, it begins to show the characteristics shown by points D1 and D2, respectively. The magnitudes of the current at points D1 and D2 are significantly smaller than the magnitudes of the current at points C1 and C2, respectively. This sudden change in current is due to the switching element SE of the memory cell MC being turned off.

[0042] The terminal voltage at point D1 of the memory cell MC including the MTJ element MTJ in the low resistance state is referred to as a low hold voltage VhdL, and the terminal voltage at point D2 of the memory cell MC including the MTJ element MTJ in the high resistance state is referred to as a high hold voltage VhdH.

[0043] 1.1.5.Readout Circuit FIG. 6 shows an example of the components and connections of the read circuit of the memory device of the first embodiment. FIG. 6 representatively shows one sense amplifier circuit SAC and shows a state in which one memory cell MC is selected. That is, as described above with reference to FIG. 1, one word line WL is selected by the row selection circuit 14, and one bit line BL is selected by the column selection circuit 15. One memory cell MC connected to one selected word line WL and one selected bit line BL is selected, and data is read from the selected memory cell MC. The word line WL, bit line BL, and memory cell MC shown in FIG. 6 are in a selected state. Hereinafter, a selected word line WL may be referred to as a selected word line WL. A selected bit line BL may be referred to as a selected bit line BL. A selected memory cell MC may be referred to as a selected memory cell MC.

[0044] As shown in FIG. 6 , the read circuit 17 is connected to the word line WL via a switch SW1 in the row selection circuit 14 that is turned on. In one example, the switch SW1 is a p-type or n-type MOSFET (Metal Oxide Semiconductor Field Effect Transistor). Alternatively, the switch SW1 is a pair of a p-type MOSFET and an n-type MOSFET that are connected in parallel and receive opposite logic (or complementary) signals at their gates. The switch SW1 receives a signal S1. While receiving a high (or “H”) level signal S1, the switch SW1 is turned on, maintaining a state in which one end of the switch SW1 and the other end are electrically connected. While receiving a low (or “L”) level signal S1, the switch SW1 is turned off, maintaining a state in which one end of the switch SW1 and the other end are electrically disconnected.

[0045] The same applies to switches SWn and signals Sn described below, where n is an integer equal to or greater than 2. That is, for switch SWn, a description of switch SW1 is replaced with switch SWn, and a description of signal S1 is replaced with signal Sn.

[0046] The read circuit 17 is also connected to the bit line BL via the switch SW2 in the column selection circuit 15 that is turned on.

[0047] The read circuit 17 includes a sense amplifier circuit SAC, switches SW3 to SW5, a current mirror circuit CM, an n-type MOSFET (transistor) TN1, lines L1 to L3 and DL, and a read control circuit RCC.

[0048] The line L1 is connected to one end of a switch SW1, the other end of which is connected to a word line WL.

[0049] The line L2 is connected to one end of a switch SW2, the other end of which is connected to a bit line BL.

[0050] The switch SW3 is connected between the line L1 and a node that receives the non-selection voltage VUSEL. The node that receives the non-selection voltage VUSEL functions as a node that supplies the non-selection voltage VUSEL. In one example, the non-selection voltage VUSEL is supplied from a voltage generation circuit 18. In one example, the non-selection voltage VUSEL has a constant magnitude. The non-selection voltage VUSEL has a magnitude between the magnitude of the ground voltage VSS and the magnitude of the voltage VHH. The voltage VHH is an internal power supply voltage and has a positive magnitude. In one example, the non-selection voltage VUSEL has a magnitude half that of the voltage VHH. In one example, the voltage VHH is supplied from the voltage generation circuit 18.

[0051] The switch SW4 is connected between the line L2 and a node that receives the non-selection voltage VUSEL.

[0052] The switch SW5 is connected between the line L2 and the line L3.

[0053] Transistor TN1 is connected between line L3 and a node receiving ground voltage VSS. Transistor TN1 receives voltage VCLAMP at its gate. Voltage VCLAMP has a certain magnitude. Transistor TN1 causes line L3 to receive voltage VCALMP.

[0054] The current mirror circuit CM includes terminals E1, E2, E3, and E4, and receives a current and a voltage at the terminals E1 and E2.

[0055] The current mirror circuit CM outputs a current at a terminal E3. The current flowing through the terminal E3 functions as a reference current for the current mirror circuit CM. The terminal E3 is connected to the line L1.

[0056] The current mirror circuit CM outputs an output current at terminal E4. The output current is based on a reference current and has substantially the same magnitude as the reference current. In this specification and claims, "substantially the same" means that two or more elements that are "substantially the same" are intended to be identical, but may not be completely identical due to limitations in manufacturing and / or measurement techniques. Terminal E4 is connected to wiring DL.

[0057] In one example, the current mirror circuit CM includes p-type MOSFETs (transistors) TP1 and TP2. The transistor TP1 is connected between a terminal E1 and a terminal E3, and has a gate connected to a line L1.

[0058] Transistor TP2 is connected between terminals E2 and E4, and its gate is connected to line L1 and the gate of transistor TP1. In one example, transistors TP1 and TP2 pass substantially the same drain current when they receive the same terminal voltage and the same gate voltage. In one example, transistor TP2 has substantially the same characteristics as transistor TP1. Examples of the characteristics include the transistor gate width and the transistor gate length.

[0059] The switch SW6 is connected between the node receiving the voltage VHH and the terminal E1. The node receiving the voltage VHH functions as a node that supplies the voltage VHH.

[0060] The switch SW7 is connected between the node receiving the voltage VHH and the terminal E2.

[0061] The sense amplifier circuit SAC is a circuit that outputs data determined to be stored in the memory cell MC from which data is read, using a voltage based on the data stored in the memory cell MC from which data is read. In one example, the sense amplifier circuit SAC includes an operational amplifier OP and a resistor R1. The non-inverting input of the operational amplifier OP is connected to a line DL. The inverting input of the operational amplifier OP is connected to one end of the resistor R1. The other end of the resistor R1 is connected to a node of the ground voltage VSS. In one example, the inverting input of the operational amplifier OP has a potential between the high hold voltage VhdH and the low hold voltage VhdL. The resistor R1 has a size that allows the inverting input of the operational amplifier OP to have such a potential.

[0062] The read control circuit RCC outputs signals S1 to S7.

[0063] 1.2.Operation FIG. 7 shows the states of several signals over time during data read from the memory device of the first embodiment. FIG. 7 shows a state in which a memory cell MC from which data is to be read is selected, as shown in FIG. 6. That is, throughout the period shown in FIG. 7, the switches SW1 and SW2 connected to the selected memory cell MC shown in FIG. 6 are both on. Also, the word line WL and bit line BL shown in FIG. 6 are the selected word line WL and selected bit line BL, respectively. The operation during the period shown in FIG. 7 begins when data read begins while the memory cell MC from which data is to be read is selected.

[0064] At time t0, the signals, node voltages, and currents have the following states: signals S3 and S4 have a high level, and signals S5, S6, and S7 have a low level, so switches SW3 and SW4 are on, and switches SW4, SW5, and SW7 are off.

[0065] Because the switches SW6 and SW7 are off and the switch SW3 is on, the selected word line WL receives the unselect voltage VUSEL, and therefore the selected word line potential VWL has the unselect potential VUSEL. The selected word line potential VWL is the potential of the selected word line WL. The unselect potential VUSEL is the potential that the wiring has while receiving the unselect voltage VUSEL, and in one example, it has substantially the same magnitude as the unselect voltage VUSEL. Because the selected word line WL has the unselect potential VUSEL, the transistors TP1 and TP2 are on.

[0066] Because the switch SW5 is turned off and the switch SW4 is turned on, the selected bit line BL receives the unselected voltage VUSEL, and therefore the selected bit line potential VBL has the unselected potential VUSEL. The selected bit line potential VBL is the potential of the selected bit line BL.

[0067] Because the selected word line WL and the selected bit line BL have the non-selection potential VUSEL, the terminal voltage of the switching element SE of the selected memory cell MC is less than the threshold voltage Vth. Therefore, the switching element SE of the selected memory cell MC is turned off. Therefore, the cell current Icell does not flow. The cell current Icell is the current flowing through the selected memory cell MC.

[0068] At time t1, signal S4 is set to low level and signal S5 is set to high level. This turns switch SW4 off and switch SW5 on. Therefore, the selected bit line BL no longer receives the unselection voltage VUSEL and instead receives the voltage that line L3 receives, i.e., voltage VCLAMP. Voltage VCLAMP is lower than the unselection voltage VUSEL. Therefore, the selected bit line BL is precharged to a potential lower than the unselection voltage VUSEL.

[0069] At time t2, the signal S5 is set to low level, which turns off the switch SW5 and puts the selected bit line BL into an electrically floating state.

[0070] At time t3, signal S3 is set to low level and signal S6 is set to high level. This turns off switch SW3 and turns on switch SW6. As a result, the selected word line WL is no longer subjected to the non-selection voltage VUSEL and instead receives voltage VHH. This causes current to flow through transistor TP1. As a result, the selected word line potential VWL is precharged to potential VHH. Potential VHH has substantially the same magnitude as voltage VHH.

[0071] When the selected word line potential VWL rises and the difference between the selected word line potential VWL and the selected bit line potential VBL reaches the threshold voltage Vth, the switching element SE of the selected memory cell MC turns on. As a result, a cell current Icel begins to flow from the selected word line WL to the selected bit line BL. The cell current Icell rises sharply from time t3 and reaches a certain peak. After the switching element SE of the selected memory cell MC turns on, the current flowing through the transistor TP1 is substantially the same as the cell current Icell.

[0072] The peak magnitude of the cell current Icell depends on whether the MTJ element MTJ of the selected memory cell MC is in a low resistance state or a high resistance state. The peak magnitude of the cell current Icell when the MTJ element MTJ of the selected memory cell MC is in a low resistance state is larger than the peak magnitude of the cell current Icell when the MTJ element MTJ of the selected memory cell MC is in a high resistance state.

[0073] The cell current Icell charges the selected bit line BL. Therefore, from time t3, the selected bit line potential VBL rises. The rate at which the selected bit line potential VBL rises depends on whether the MTJ element MTJ of the selected memory cell MC is in a low resistance state or a high resistance state. When the MTJ element MTJ of the selected memory cell MC is in a low resistance state, the selected bit line potential VBL rises faster than when the MTJ element MTJ of the selected memory cell MC is in a high resistance state.

[0074] The cell current Icell peaks immediately after time t3 and then drops. The rate at which the cell current Icell drops depends on whether the MTJ element MTJ of the selected memory cell MC is in a low resistance state or a high resistance state. When the MTJ element MTJ of the selected memory cell MC is in a low resistance state, the cell current Icell drops faster than when the MTJ element MTJ of the selected memory cell MC is in a high resistance state. This is because the selected bit line potential VBL rises faster when the MTJ element MTJ of the selected memory cell MC is in a low resistance state than when the selected bit line potential VBL rises when the MTJ element MTJ of the selected memory cell MC is in a high resistance state.

[0075] At time t4, signal S7 is set to high level. This turns on switch SW7. Therefore, a current (i.e., cell current Icell) of substantially the same magnitude as the current (i.e., cell current Icell) flowing through transistor TP1 flows through transistor TP2. The cell current Icell flowing through transistor TP2 charges line DL, raising potential VDL. Potential VDL is the potential of line DL.

[0076] The rate at which the potential VDL rises depends on whether the MTJ element MTJ of the selected memory cell MC is in a low resistance state or a high resistance state. When the MTJ element MTJ of the selected memory cell MC is in a low resistance state, the potential VDL rises faster than when the MTJ element MTJ of the selected memory cell MC is in a high resistance state.

[0077] At time t5, when the MTJ element MTJ of the selected memory cell MC is in a low resistance state, the difference between the selected bit line potential VBL and the selected word line potential VWL, which has been rising since time t3, reaches the low hold voltage VhdL. This turns off the switching element SE of the selected memory cell MC, and the cell current Icell becomes zero. The zero cell current Icell stops charging the line DL. As a result, the potential VDL becomes a certain magnitude of potential VDLL.

[0078] At time t6, when the MTJ element MTJ of the selected memory cell MC is in a high resistance state, the difference between the selected bit line potential VBL, which has been rising since time t3, and the selected word line potential VWL reaches the high hold voltage VhdH. This turns off the switching element SE of the selected memory cell MC, and the cell current Icell becomes zero. The zero cell current Icell stops charging the line DL. As a result, the potential VDL becomes a certain potential VDLH. The potential VDLH is higher than the potential VDL by the difference SGV.

[0079] After time t6, the sense amplifier circuit SAC outputs data determined based on the potential VDL and determined to be stored in the selected memory cell MC. In one example, when the potential VDL is the potential VDLL, i.e., when the difference between the selected word line potential VWL and the selected bit line potential VBL is the low hold voltage VhdL, the sense amplifier circuit SAC outputs a low-level signal. When the potential VDL is the potential VDLH, i.e., when the difference between the selected word line potential VWL and the selected bit line potential VBL is the high hold voltage VhdH, the sense amplifier circuit SAC outputs a high-level signal.

[0080] 1.3.Advantages (Effects) According to the first embodiment, as will be described below, it is possible to provide a storage device that can ensure a large signal difference and read data with high accuracy through simple control.

[0081] Data can be read from a memory cell MC using a voltage. In this case, the selected word line WL is connected to a sense amplifier circuit SAC. The selected word line WL is precharged by receiving a voltage higher than the unselected voltage VUSEL and then electrically floated. A voltage lower than the unselected voltage VUSEL is then continuously applied to the selected bit line BL. As a result, the selected word line potential VWL drops. When the difference between the selected word line potential VWL and the selected bit line potential VBL reaches the low hold voltage VhdL or the high hold voltage VhdH, the switching element SE turns off, and the drop in the selected word line potential VWL stops. The selected word line potential VWL when the drop stops is used as a signal, and the difference between the selected word line potential VWL in the low-resistance state and the high-resistance state corresponds to the signal difference. However, the timing at which the switching element SE turns off is slower than expected, especially in the high-resistance state. As a result, the selected word line potential VWL after the switching element SE turns off in the high-resistance state is low. As a result, the signal difference is small.

[0082] In response to this problem, it is possible to stop applying a voltage to the selected bit line BL. By doing so, the switching element SE turns off before it automatically turns off upon reaching the hold voltage (low hold voltage VhdL or high hold voltage VhdH). Therefore, in the case of a high resistance state, the selected word line potential VWL after the switching element SE turns off is high, achieving a larger signal difference. However, the voltage (clamp voltage) received by the gate of the transistor for precharging the selected word line WL may vary, which may result in variation in the potential of the precharged selected word line WL. When the switching element SE automatically turns off upon reaching the hold voltage, the switching element SE turns off depending on the hold voltage, regardless of the clamp voltage. Therefore, variation in the clamp voltage does not affect the timing of turning off the switching element SE. On the other hand, when the switching element SE is turned off by stopping the application of a voltage to the selected bit line BL, variation in the clamp voltage affects the selected word line potential VWL when the switching element SE turns off. Taking this into account, as well as the inevitable performance variation in the characteristics of the memory cells MC, it is difficult to determine the appropriate timing for applying a voltage to the selected bit line BL.

[0083] On the other hand, to obtain a large signal difference, data can be read using a current. In this case, as shown in FIG. 8, the word line WL is connected to the gate of a transistor TN12 connected between the node receiving the voltage VHH and the sense amplifier circuit SAC, unlike when a voltage is used. The cell current Icell charges the line DL connected to the sense amplifier circuit SAC, so the switch SW7 is turned on at the start of precharging the selected bit line BL. Therefore, current continues to flow through the transistor TN12 from the start of precharging the selected bit line BL. This results in a large current consumption.

[0084] The memory device 1 of the first embodiment includes a current mirror circuit CM that uses the cell current Icell as a reference current and supplies an output current replica of the reference current to a line DL connected to the sense amplifier circuit SAC. Therefore, the voltage received by the sense amplifier circuit SAC is formed by integrating the replica current based on the replica current of the cell current Icell. Therefore, even if the replica current is small, the potential VDL increases in a short time. Therefore, a large signal difference SVG is obtained. This enables a high margin to be achieved in data readout, resulting in high data readout performance.

[0085] Furthermore, the output current is automatically stopped when the MTJ element MTJ is in a low-resistance state and when the MTJ element MTJ is in a high-resistance state depending on the resistance state of the MTJ element MTJ. This eliminates the need for control of the output current stop, eliminating the need to ensure a timing margin for controlling the output current stop to address inevitable variations in the characteristics of the memory cells MC, and / or reducing data read errors due to insufficient margin. Rather, by utilizing the fact that the output current is stopped based on the resistance state of the MTJ element MTJ, a large difference between the potentials VDLL and VDLH, i.e., the magnitude signal difference SGV, can be obtained by charging the line DL during the period when current flows only in the high-resistance state (time t5 to time t6 in FIG. 7). This provides a memory device 1 that is easy to control and capable of reading data with high accuracy.

[0086] Furthermore, by using the current mirror circuit CM, the line DL is formed by an output current that is a replica of the cell current Icell, rather than the cell current Icell itself. This allows the start of output of the output current from the current mirror circuit CM to be delayed from the start of data read. This eliminates the need for the current for charging the line DL to continue flowing from the start of data read. This provides a memory device 1 with low current consumption.

[0087] Note that the start of output of the output current, i.e., the turning on of the switch SW7, must be controlled. Therefore, the need for control to ensure a margin for the timing of turning on the switch SW7 may complicate the control of the memory device 1. However, as described above, when the MTJ element MTJ is in a high-resistance state, the potential of the wiring DL is generated by a longer integration period than when it is in a low-resistance state, and therefore a large signal difference SVG is easily obtained. Therefore, even if the timing of turning on the switch SW7 varies slightly, a large signal difference SVG can be ensured. Therefore, control is easy.

[0088] Furthermore, in the configuration shown in FIG. 8, the precharge circuit for the word line WL (i.e., transistor TN11 and the wiring transmitting the clamp voltage VCLAMP1) is located near the sense amplifier circuit SAC, whereas in the first embodiment, the precharge circuit (i.e., transistor TN1 and the wiring transmitting the voltage VLCAMP) is connected to the bit line BL and therefore does not need to be located near the sense amplifier circuit SAC. Wiring whose potential frequently fluctuates is located in and near the sense amplifier circuit SAC. For this reason, if the precharge circuit is located near the sense amplifier circuit SCA, the precharge circuit is likely to be affected. According to the first embodiment, transistor TN1 can be located away from the sense amplifier, thereby mitigating the impact.

[0089] 1.4. Variations The current mirror circuit CM may be configured with n-type MOSFETs. FIG. 9 illustrates such an example, showing an example of the components and connections of the readout circuit of a storage device according to a modification of the first embodiment. As shown in FIG. 9, the current mirror circuit CM of the storage device 1 according to the modification includes transistors TN3 and TN4 instead of transistors TP1 and TP2, respectively. The gate of transistor TN3 is connected to the drain of transistor TN3. In one example, when transistors TN3 and TN4 receive a terminal voltage of the same magnitude and a voltage of the same magnitude at their gates, they pass substantially the same drain current. In one example, transistor TN4 has substantially the same characteristics as transistor TN3. Examples of the characteristics include the gate width and gate length of the transistor. The use of transistors TN3 and TN4 also provides the same advantages as the use of transistors TP1 and TP2.

[0090] Transistors TP1 and TP2 may have characteristics that allow them to pass different drain currents while receiving the same terminal voltage and the same voltage at their gates. In one example, transistor TP2 passes a larger drain current than transistor TP1 while receiving the same terminal voltage and the same voltage at their gates. In one example, transistor TP2 has a gate width larger than that of transistor TP1 and / or a gate length smaller than that of transistor TP1. In one example, transistor TP2 has a gate width n times the gate width of transistor TP1 and / or a gate length n times the gate length of transistor TP1, where n is a number greater than 1. This allows faster charging of line DL and a larger signal difference SGV. When current mirror circuit CM is composed of transistors TN3 and TN4, transistors TN3 and TN4 may have the same relationship as transistors TP1 and TP2.

[0091] The memory cell MC can include an arbitrary variable resistance element instead of the MTJ element MTJ. Like the MTJ element MTJ, the variable resistance element is an element that can be dynamically switched between two resistance states. Like the MTJ element MTJ, the variable resistance element switches between the two resistance states depending on the current flowing through the variable resistance element and / or the voltage applied to the variable resistance element.

[0092] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, as well as within the scope of the invention described in the claims and their equivalents. [Explanation of symbols]

[0093] 1...Storage device, 11...Memory cell array, 12...input / output circuit, 13...control circuit, 14...row selection circuit, 15...Column selection circuit, 16...write circuit, 17...Readout circuit, 18...Voltage generating circuit, WL...word line, BL...bit line, MC...memory cell, MTJ...MTJ element, SE: switching element, 21...conductor, 22...conductor, 31...lower electrode, 32...variable resistance material, 33...upper electrode, 35...Ferromagnetic layer, 36...insulating layer, Vth: threshold voltage, VhdH: high hold voltage VhdL: Low hold voltage SAC: Sense amplifier circuit, L1...wiring, L2: Wiring, L3: Wiring, DL...wiring, VWL: Selected word line potential, VBL: Selected bit line potential RCC: control circuit,

Claims

1. a memory cell having a first end and a second end; a first wiring connected to the first end; a second wiring connected to the second end; a first switch connected between the second wiring and a third wiring that receives a first voltage; a current mirror circuit having a third end and a fourth end, connected to the first wiring at the third end, and outputting an output current at the fourth end using a first current flowing through the first wiring as a reference current; a sense amplifier circuit connected to the fourth end; A storage device comprising:

2. the current mirror circuit further includes a fifth terminal connectable to a first node receiving a second voltage higher than the first voltage, and a sixth terminal connectable to a second node receiving the second voltage; The storage device according to claim 1 .

3. a second switch connected between the first node and the fifth end; a third switch connected between the second node and the sixth end; Further provided with The storage device according to claim 2 .

4. The second switch and the third switch are turned on at different timings. The storage device according to claim 3 .

5. a fourth switch connected between the first wiring and a third node receiving a third voltage having a voltage level between the first voltage and the second voltage; a fifth switch connected between the second wiring and a fourth node receiving the third voltage; Further provided with The storage device according to claim 4 .

6. the fourth switch and the fifth switch are turned on, the fifth switch is turned off, and the first switch is turned on and then turned off; After the first switch is turned off, the fourth switch is turned off and the second switch is turned on; After the second switch is turned on, the third switch is turned on. The storage device according to claim 5 .

7. While the second switch is turned on, the third switch is maintained in an off state until it is turned on. The storage device according to claim 6.

8. the current mirror circuit outputs the output current having a magnitude different from that of the first current; The storage device according to claim 1 .

9. the memory cell includes a variable resistance material; the variable resistance material includes a seventh end and an eighth end, and has a first resistance between the seventh end and the eighth end when it receives a fourth voltage that is positive from the seventh end to the eighth end, a second resistance between the seventh end and the eighth end that is lower than the first resistance when it receives a fifth voltage that is positive and lower than the fourth voltage from the seventh end to the eighth end, a third resistance between the seventh end and the eighth end when it receives a sixth voltage that is positive from the eighth end to the seventh end, and a fourth resistance between the seventh end and the eighth end that is lower than the third resistance when it receives a seventh voltage that is positive and lower than the sixth voltage from the eighth end to the seventh end. The storage device according to any one of claims 1 to 8.

10. The memory cell a first ferromagnetic layer; a second ferromagnetic layer; and an insulating layer between the first ferromagnetic layer and the second ferromagnetic layer; further comprising: The storage device according to claim 9.

11. the current mirror circuit includes a first p-type transistor and a second p-type transistor; the first p-type transistor is connected between the fifth terminal and the third terminal and includes a first gate connected to the third terminal; the second p-type transistor is connected between the sixth terminal and the fourth terminal and includes a second gate connected to the first gate; The storage device according to any one of claims 2 to 7.

12. the second p-type transistor has a gate length or a gate width different from a gate length or a gate width of the first p-type transistor; The storage device of claim 11.

13. the memory cell includes a variable resistance material; the variable resistance material includes a seventh end and an eighth end, and has a first resistance between the seventh end and the eighth end when it receives a fourth voltage that is positive from the seventh end to the eighth end, a second resistance between the seventh end and the eighth end that is lower than the first resistance when it receives a fifth voltage that is positive and lower than the fourth voltage from the seventh end to the eighth end, a third resistance between the seventh end and the eighth end when it receives a sixth voltage that is positive from the eighth end to the seventh end, and a fourth resistance between the seventh end and the eighth end that is lower than the third resistance when it receives a seventh voltage that is positive and lower than the sixth voltage from the eighth end to the seventh end. The storage device of claim 11.

14. The memory cell a first ferromagnetic layer; a second ferromagnetic layer; and an insulating layer between the first ferromagnetic layer and the second ferromagnetic layer; further comprising: The storage device of claim 13.

15. the current mirror circuit includes a first n-type transistor and a second n-type transistor; the first n-type transistor is connected between the fifth terminal and the third terminal and includes a first gate connected to the third terminal; the second n-type transistor is connected between the sixth terminal and the fourth terminal and includes a second gate connected to the first gate; The storage device according to any one of claims 2 to 7.

16. the second n-type transistor has a gate length or a gate width different from a gate length or a gate width of the first n-type transistor; The storage device of claim 15.

17. the memory cell includes a variable resistance material; the variable resistance material includes a seventh end and an eighth end, and has a first resistance between the seventh end and the eighth end when it receives a fourth voltage that is positive from the seventh end to the eighth end, a second resistance between the seventh end and the eighth end that is lower than the first resistance when it receives a fifth voltage that is positive and lower than the fourth voltage from the seventh end to the eighth end, a third resistance between the seventh end and the eighth end when it receives a sixth voltage that is positive from the eighth end to the seventh end, and a fourth resistance between the seventh end and the eighth end that is lower than the third resistance when it receives a seventh voltage that is positive and lower than the sixth voltage from the eighth end to the seventh end. The storage device of claim 15.

18. The memory cell a first ferromagnetic layer; a second ferromagnetic layer; and an insulating layer between the first ferromagnetic layer and the second ferromagnetic layer; further comprising: The storage device of claim 17.

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