Laser radiation device

Abstract

To provide a laser radiation device which can prevent a removed object from adhering to cover glass for protecting a condensing lens in a reliable manner.SOLUTION: In a laser radiation device, a focus lens 1 which causes a laser beam P to converge and be focused on a surface of an object is provided. The laser radiation device which removes an object Q to be removed on an object surface with the laser beam is formed. Cover glass 2 is disposed on the front surface side of the focus lens 1. The laser radiation device includes suction means which suctions the removed object Q and jetting means which jets compressed air R to a surface of the cover glass 2. The compressed air R jetted from the jetting means is suctioned by the suction means.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a laser irradiation device that uses laser light to remove rust, coatings, etc. from the surface of a structure while suctioning and recovering the removed material, and more particularly to a laser irradiation device that protects a cover glass that protects a condenser lens from the removed material. [Background technology]

[0002] Patent Document 1 describes a laser irradiation device that uses laser irradiation to remove coating from the surface of a structure while suctioning and recovering the removed material. This device is equipped with a laser head 3 that focuses laser light output from a laser oscillator and irradiates the surface of the structure.

[0003] The laser head 3 includes a scanning optical system 4 such as a condenser lens that condenses and irradiates the laser light, and a suction means 31 that sucks up the material removed by the laser light. The material removed by removing the coating, rust, etc. from the surface of the structure with the laser light is sucked up by the suction means 31.

[0004] However, if part of the material being removed by the suction means 31 adheres to the scanning optical system 4, the power of the laser light is reduced, causing the inconvenience of being unable to remove the coating film from the surface of the structure.

[0005] On the other hand, Patent Document 2 describes a laser processing device that can remove debris adhering to a cover glass that protects a condenser lens.

[0006] This device is equipped with a cover glass 66 that protects the condenser lens 65 from debris that flies off when the workpiece is laser processed, and an air injection nozzle 80 that injects air toward the cover glass 66 to remove the debris.

[0007] This air injection nozzle 80 is composed of a main nozzle and a sub-nozzle, and the main nozzle injects air toward the cover glass 66. On the other hand, the sub-nozzle is configured to adjust the injection direction of the air injected from the main nozzle by injecting air toward the air injected from the main nozzle. [Prior art documents] [Patent documents]

[0008] [Patent Document 1] Patent No. 6059182 [Patent Document 2] Japanese Patent Publication No. 2022-46068 Summary of the Invention [Problem to be solved by the invention]

[0009] In a structure such as the laser irradiation device of Patent Document 1, in which coating, rust, etc. are removed with laser light and the removed material is sucked up by the suction means 31, it is difficult to suck up all of the removed material with the suction means 31. That is, when the laser light P is irradiated to remove rust or coating from the surface of the target object, the rust or coating vaporizes or breaks down into fine particles. As a result, the problem of some of the removed material adhering to the periphery of the scanning optical system 4 and reducing the power of the laser light remains.

[0010] On the other hand, the laser processing apparatus of Patent Document 2 is an apparatus that mainly performs laser processing by irradiating a semiconductor wafer with a laser beam. When a laser beam is irradiated onto a wafer, molten material called debris scatters and contaminates the condenser lens, so the apparatus is provided with a cover glass 66 that protects the condenser lens 65, and an air injection nozzle 80 that injects air toward the cover glass 66.

[0011] Air is sprayed from the main nozzle of the air spray nozzle 80 toward the cover glass 66, and air is sprayed from the sub-nozzle toward the air sprayed from the main nozzle, thereby adjusting the spray direction of the air sprayed from the main nozzle.

[0012] However, while the amount of debris generated when a semiconductor wafer is irradiated with a laser beam is extremely small, when a structural surface is irradiated with a laser beam to remove rust, coating, etc., an extremely large amount of material is generated. Therefore, with the air injection nozzle 80 used in the laser processing device of Patent Document 2, it is difficult to protect the cover glass of the condenser lens from the removed material.

[0013] Moreover, because the air injection nozzle 80 is configured to inject air directly toward the cover glass 66, any debris generated on the front surface of the cover glass 66 will collide with the cover glass 66 along with the air. In this case, there is a risk that the cover glass 66 will be damaged if powerful air is used to remove fine particles such as rust or paint, leaving aside the minute amount of debris generated from the semiconductor.

[0014] The present invention has been devised to solve the above-mentioned problems, and aims to provide a laser irradiation device that removes rust and paint films while suctioning and recovering the removed material, and that can prevent the removed material from adhering to the cover glass. [Means for solving the problem]

[0015] In order to achieve the above-mentioned object, the first means of the present invention is a laser irradiation device that has a focusing lens 1 that converges laser light P to focus on the surface of an object, and that uses a laser to remove rust or paint film removal material Q from the surface of the object, and that has a cover glass 2 placed in front of the focusing lens 1, and is equipped with a suction means that sucks in the removed material Q, and an injection means that injects compressed air R along the surface of the cover glass 2, and is configured so that the compressed air R is sucked in by the suction means while being injected in a direction parallel to the front surface of the cover glass 2.

[0016] The cover glass 2 of the second means is detachably disposed in front of the focusing lens 1.

[0017] The injection means of the third means includes an injection path 6 that sends the compressed air R to the front side of the focusing lens 1, and an injection port 7 that injects the compressed air R from the injection path 6 along the surface of the cover glass 2.

[0018] The suction means of the fourth means has a suction nozzle 3 arranged on the focal side of the laser light P, and is equipped with a suction port 3A opening at the tip of the suction nozzle 3 and a discharge path 4 for discharging the removed material Q from the suction port 3A, and a part of the discharge path 4 is opened on the front side of the cover glass 2, and an inlet 5 is formed for introducing the compressed air R into the discharge path 4.

[0019] The injection means of the fifth means includes an injection path 6 that sends the compressed air R to the tip side of the suction nozzle 3, and an injection port 7 at the tip of the suction nozzle 3 that injects the compressed air R toward the suction side of the suction nozzle 3.

[0020] The ejection path 6 of the sixth means is formed by continuously forming a plurality of ejection ports 7 from the cover glass 2 side toward the tip end. [Effects of the Invention]

[0021] As in the present invention, compressed air R is blown along the surface of the cover glass 2 and this compressed air R is sucked in by the suction means, so that the compressed air R acts as an air barrier on the surface side of the cover glass 2. As a result, the removed matter generated in front of the cover glass 2 does not come into contact with the cover glass, and adhesion of the removed matter Q to the cover glass 2 can be prevented.

[0022] Furthermore, by disposing the cover glass 2 detachably on the front side of the focusing lens 1, maintenance and replacement of the cover glass 2 becomes easy. [Brief explanation of the drawings]

[0023] [Figure 1] 1 is a side view showing an embodiment of the present invention. [Figure 2] 1 is a front view showing an embodiment of the present invention. [Figure 3] FIG. 1 is a plan view showing an embodiment of the present invention. [Figure 4] 1 is a side cross-sectional view showing an embodiment of the present invention. [Figure 5] 1 is an enlarged cross-sectional view showing a main part of an embodiment of the present invention. [Figure 6] FIG. 1 is a perspective view showing a cover glass of the present invention. [Figure 7] FIG. 10 is an enlarged side cross-sectional view of a main portion showing another embodiment of the injection passage. [Figure 8] FIG. 8 is a front view of the injection passage shown in FIG. 7. [Figure 9] FIG. 10 is a side cross-sectional view showing another embodiment of the injection passage. [Figure 10] FIG. 10 is an enlarged cross-sectional view of a main part showing another embodiment of the injection passage. [Figure 11] 1 is an explanatory diagram illustrating the principle of removal of a removed substance according to the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0024] The present invention is a laser irradiation device that focuses laser light P to remove rust or paint film on the surface of an object with a laser (see FIG. 1). The device is equipped with suction means that sucks up the removed matter Q when removing rust or paint film from the surface of the object with a laser. The suction means shown in the figure sucks up the removed matter Q using a suction machine via a suction hose 8.

[0025] The laser irradiation device is equipped with a body 10 that is carried and operated by an operator, a focusing lens 1 that focuses on the surface of an object, and a cover glass 2 that protects the focusing lens 1 (see FIG. 4).

[0026] The illustrated cover glass 2 is fitted with a pull ring 2A, which allows the cover glass 2 to be slid into the irradiation port 3B and detachably attached (see FIG. 6), making it easy to replace and clean the cover glass 2.

[0027] To use the laser irradiation device, press the trigger 11 twice, and the removed material Q is sucked up by the suction nozzle 3 at the tip of the body 10 while emitting laser light P (see Figure 4). This suction nozzle 3 is located on the focal side of the laser light P. The tip of the suction nozzle 3 is open and has an irradiation port 3B on the bottom that irradiates the laser light P, and a suction port 3A on the top that sucks up the removed material to prevent it from scattering (see Figure 2). The suction nozzle 3 shown in the figure is formed integrally with the body 10, but it is also possible to configure the suction nozzle 3 to be detachable.

[0028] When laser light P is irradiated to remove rust or paint from the surface of an object, the rust or paint vaporizes or breaks down into fine particles, becoming the removed matter Q (see Figure 11). Therefore, the suction port 3A formed at the tip of the suction nozzle 3 can be positioned above the position where the laser light P is irradiated, enabling efficient suction (see Figure 2). Furthermore, by irradiating the laser light P over a wide area onto the surface of the object, rust and paint can be removed efficiently (see Figure 3).

[0029] Furthermore, it is provided with a suction means for sucking the removed matter Q, as well as a spray means for spraying compressed air R onto the front side of the cover glass 2. This spray means supplies compressed air R by an air compressor via an air hose 9.

[0030] In the present invention, the cover glass 2 is protected from the removed matter Q by sucking the compressed air R with the suction means while ejecting the compressed air R in a direction parallel to the front surface of the cover glass 2.

[0031] 4 and 5, the suction means comprises a suction port 3A that opens at the tip of the suction nozzle 3, and a discharge path 4 that discharges the removed material Q from the suction port 3A (see FIG. 4). This discharge path 4 runs from the tip of the suction nozzle 3 through the inside of the body 10 and reaches the suction hose 8 at the rear end of the body 10.

[0032] On the other hand, the spraying means includes a spray path 6 that sends compressed air R to the front side of the focusing lens 1 through the inside of the body 10, and a spray nozzle 7 that sprays the compressed air R from the spray path 6 along the surface of the cover glass 2 (see FIG. 4). This spray path 6 sends compressed air R into the suction nozzle 3. Furthermore, the spray nozzle 7 is formed at the tip of this spray path 6, and is formed so as to spray the compressed air R in a direction parallel to the front surface of the cover glass 2.

[0033] Furthermore, a part of the discharge path 4 is opened on the front side of the cover glass 2 to form an inlet 5 (see FIG. 5). This inlet 5 serves as an intake port for introducing compressed air R moving along the surface of the cover glass 2 into the discharge path 4. In the illustrated example, the inlet 5 is formed in the discharge path 4 located inside the suction nozzle 3, above the front surface of the cover glass 2.

[0034] Then, compressed air R is injected from the injection port 7 along the surface of the cover glass 2, and this compressed air R is discharged from the inlet 5 to the discharge path 4. At this time, an air curtain-like barrier is always formed on the surface side of the cover glass 2 (see Figure 5). In other words, the compressed air R discharged from the injection port 7 is absorbed into the discharge path 4, so that an air barrier is always formed on the surface side of the cover glass 2. As a result, the removed matter Q generated by irradiation with the laser light P is discharged without ever coming into contact with the cover glass 2.

[0035] Furthermore, it is desirable to supply compressed air R at a pressure of 3 to 4 Bars to prevent removed matter Q, such as paint film or rust, from adhering to the surface of cover glass 2. In this way, even if removed matter Q enters suction nozzle 3 from the tip thereof without passing through discharge path 4, removed matter Q can be removed from inlet 5 into discharge path 4.

[0036] In the embodiment shown in Figures 7 and 8, the injection means comprises an injection path 6 leading to the tip side of the suction nozzle 3, and an injection port 7 at the tip of this injection path 6 that injects compressed air R toward the suction side of the suction nozzle 3 (see Figure 7).

[0037] A plurality of injection ports 7 are formed side by side at the tip end of the injection path 6, and inject compressed air R toward the upper inside tip end of the suction nozzle 3 (see Figure 8). As a result, the removed matter Q sucked into the suction nozzle 3 is forced toward the discharge path 4, preventing the removed matter Q from approaching the surface side of the cover glass 2 (see Figure 7).

[0038] 9 and 10, a plurality of injection ports 7 are continuously formed in the injection path 6 shown in Fig. 7 from the cover glass 2 side toward the tip (see Fig. 9). These injection ports 7 continuously inject compressed air R from the front surface side of the cover glass 2 toward the tip of the suction nozzle 3. As a result, the intrusion of the removed matter Q can be prevented on the front side of the cover glass 2 all the way to the tip of the suction nozzle 3 (see Fig. 10).

[0039] The configuration of the present invention is not limited to the illustrated example, and design changes such as changes to the configuration of the suction means and injection means can be freely made within the scope of the present invention without changing the gist of the present invention. [Explanation of symbols]

[0040] P laser light Q Removed items R Compressed air 1 focal lens 2 Coverslips 2A Pull Ring 3 suction nozzle 3A suction port 3B Irradiation port 4 Exhaust channel 5. Introduction 6 Injection path 7 Nozzle 8 Suction hose 9. Air Pump 10 Body 11 Trigger

Claims

1. A laser irradiation device that has a focusing lens that focuses laser light onto the surface of an object and uses a laser to remove rust or paint from the surface of the object. A cover glass is placed on the front side of the focusing lens; The apparatus includes a suction means for sucking the removed material, and a jetting means for jetting compressed air onto the front side of the cover glass, A laser irradiation device characterized in that it is configured to inject compressed air in a direction parallel to the front surface of a cover glass while sucking the compressed air with a suction means.

2. 2. The laser irradiation device according to claim 1, wherein the cover glass is detachably disposed in front of the focusing lens.

3. 3. The laser irradiation device according to claim 1, wherein the injection means comprises an injection path for sending the compressed air to the front side of the focusing lens, and an injection port for injecting the compressed air from the injection path along the surface of the cover glass.

4. 3. The laser irradiation device according to claim 1, wherein the suction means has a suction nozzle disposed on the focal side of the laser light, a suction port opened at the tip of the suction nozzle, and a discharge path for discharging the removed material from the suction port, and a portion of the discharge path is opened on the front side of the cover glass, and an inlet is formed for introducing the compressed air into the discharge path.

5. 3. The laser irradiation device according to claim 1, wherein the injection means comprises an injection path for sending the compressed air to the tip side of the suction nozzle, and an injection port at the tip of the suction nozzle for injecting the compressed air toward the suction side of the suction nozzle.

6. 6. The laser irradiation device according to claim 5, wherein the injection path has a plurality of injection ports formed continuously from the cover glass side toward the tip end.

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