Light source device

Abstract

To provide a light source device capable of suppressing variance in temperatures of a plurality of LED elements.SOLUTION: A light source device comprises: a plurality of LED elements mounted on a substrate; a light emission window disposed separately from the substance in a first direction, which is orthogonal to a principal surface of the substrate, and emitting light emitted by the plurality of LED elements to the outside; a housing which includes the light emission window and in which the plurality of LED elements are stored; and a plurality of flow ports formed while penetrating the housing and introducing or discharging a liquid for cooling the plurality of LED elements in contact with the plurality of LED elements to / from the inside of the housing. The plurality of flow ports includes: at least a pair of flow ports formed at positions mutually holding a mounting region in which the plurality of LED elements are mounted with respect to a second direction that is orthogonal to the first direction; and a flow port formed at a position which is held between the pair of flow ports with respect to the second direction in a view in the first direction and at least a portion of which overlaps the mounting region.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a light source device, and more particularly to a light source device that emits light for heating (hereinafter referred to as "heating light" for convenience) toward an object to be processed. [Background technology]

[0002] In semiconductor manufacturing processes, various processes such as film formation, oxidation / diffusion, modification, and annealing are performed on processing objects such as semiconductor wafers. In these processes, a heating method in which heating light is irradiated onto the processing object is often adopted because it allows for non-contact processing.

[0003] In this heating method, it is expected that the heating light is irradiated as uniformly as possible over the entire surface (particularly the main surface) of the object to be treated so that the entire object to be treated is treated uniformly.

[0004] In recent years, light-emitting diode (LED) elements have been increasingly adopted as a light source for heating light because they are capable of rapidly raising the temperature of the object to be processed. In this case, multiple LED elements are installed in the light source device to irradiate the object with the heating light required for processing.

[0005] It is known that the luminous efficiency of LED elements decreases with increasing temperature. For this reason, cooling LED elements in a light source device is one of the important issues. For example, Patent Document 1 below discloses a structure for cooling multiple LED elements by bringing a fluid into contact with the LED elements and performing heat exchange between each LED element and the fluid. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] US Patent Application Publication No. 2015 / 0060932 Summary of the Invention [Problem to be solved by the invention]

[0007] In Patent Document 1, a liquid such as silicone oil is passed through a space housing multiple LED elements, bringing the liquid into contact with the LED elements and cooling each of the LED elements. In the configuration disclosed in Patent Document 1, an inlet for introducing the liquid into the space and an outlet for discharging the liquid from the space are formed at positions that sandwich the LED elements.

[0008] In this case, the liquid first comes into contact with the LED elements located upstream, and then with the LED elements located downstream, so the temperature of the liquid is higher downstream than upstream. As a result, the LED elements located downstream cannot be cooled sufficiently compared to the LED elements located upstream, resulting in large temperature variations among the LED elements.

[0009] When the temperature of the LED elements varies widely, the light-emitting efficiency of each LED element differs, resulting in differences in the illuminance of the heating light emitted by each LED element on the upstream and downstream sides, making it difficult to uniformly irradiate the entire object with the heating light.

[0010] Furthermore, since the downstream LED elements cannot be cooled sufficiently, they are likely to deteriorate earlier than the upstream LED elements, which can lead to differences in the illuminance of the heating light emitted by each LED element.

[0011] In view of the above, an object of the present invention is to provide a light source device that can suppress variations in temperature among a plurality of LED elements. [Means for solving the problem]

[0012] The light source device according to the present invention comprises: A plurality of LED elements mounted on a substrate; a light exit window that is disposed apart from the substrate in a first direction perpendicular to a main surface of the substrate and that allows light emitted by the plurality of LED elements to exit to the outside; a housing including the light exit window and accommodating the plurality of LED elements; a plurality of flow ports formed through the housing for introducing or discharging a liquid that comes into contact with the plurality of LED elements and cools the plurality of LED elements; The plurality of flow ports are At least one pair of flow holes are formed at positions sandwiching the mounting area where the plurality of LED elements are mounted in a second direction perpendicular to the first direction; When viewed from the first direction, the air passage includes a flow passage formed at a position sandwiched between the pair of flow passages in the second direction and at least a portion of which overlaps with the placement area.

[0013] In this specification, the term "mounting area" refers to a virtual area formed by connecting the outer edges of the LED elements located on the outside when viewing the LED elements from a first direction. Also, the term "main surface" refers to a surface of each component that is much larger in area than the other surfaces.

[0014] The LED elements can be cooled by passing a liquid through a housing that houses the LED elements and bringing the liquid into contact with the LED elements to perform heat exchange. The liquid is passed through the housing via a flow port.

[0015] Here, if a pair of inlets were formed only at positions sandwiching the LED element mounting area, and liquid was introduced through one inlet and discharged through the other in order to flow through the housing, the liquid would come into contact with all LED elements in the flow direction from one inlet to the other. As a result, the temperature of the liquid downstream would be higher than that of the upstream inlet. In other words, in such a case, the LED elements located downstream would not be sufficiently cooled, and temperature variations would likely occur between the LED elements located upstream and downstream.

[0016] In contrast, with the above configuration, in addition to the pair of inflow ports, another inflow port is formed at a position overlapping the mounting area when viewed from the first direction. Therefore, it is possible to allow liquid to flow into the housing through one of the pair of inflow ports formed on either side of the mounting area and the inflow port overlapping the mounting area, and to discharge the liquid that has flowed through the housing through the other. This reduces the number of LED elements that come into contact with the liquid after it flows into the housing and before it is discharged from the housing. Reducing the number of LED elements that come into contact with the liquid before it is discharged from the housing makes it less likely for the liquid's temperature to rise. In other words, with the above configuration, the temperature rise of the liquid in the direction of the liquid flow is suppressed, thereby suppressing temperature variations among the multiple LED elements cooled by the liquid.

[0017] In the light source device, The LED elements and the flow holes may be symmetrical in the second direction with respect to the center of the placement area.

[0018] Here, if the mounting area is substantially circular, the center of the area may be taken as the "center of the mounting area." Also, if the mounting area is polygonal, the intersection of the diagonals may be taken as the "center of the mounting area."

[0019] According to the above configuration, for example, when the inside of the housing is virtually divided into two spaces in the second direction based on the center of the mounting area, the liquid can be caused to flow in one space and the other space so that the number of LED elements that come into contact with the liquid in the second direction is equal. Therefore, the above configuration is preferable because by causing the liquid to flow in the second direction, it becomes easier to suppress temperature variations in the multiple LED elements based on the center of the mounting area.

[0020] In the light source device, The plurality of LED elements may be connected to each other by wires in the second direction.

[0021] According to the above configuration, by flowing the liquid in the second direction, the pressure of the liquid acting on the wires connecting the LED elements can be reduced, thereby suppressing malfunctions of the LED elements caused by breakage of the wires.

[0022] In the light source device, The plurality of flow ports may have a shape extending in a third direction perpendicular to the first direction and the second direction.

[0023] According to the above configuration, when a liquid is introduced into the housing so as to flow in the second direction, the liquid tends to flow evenly in the third direction. In other words, the above configuration is advantageous in that it is easy to suppress temperature variations in multiple LED elements even when multiple LED elements are arranged in the third direction. Note that "extending in the third direction" may also mean that the length in the third direction is three or more times the width in the second direction.

[0024] The light source device is a liquid supply unit having a discharge port for discharging the liquid introduced into the housing and a recovery port for recovering the liquid discharged from the housing; The plurality of flow ports may be configured such that the cross-sectional area of ​​the first flow port connected to the discharge port in the direction of flow of the liquid is equal to the cross-sectional area of ​​the second flow port connected to the recovery port in the direction of flow of the liquid.

[0025] This configuration reduces resistance to the liquid flowing through the housing, and suppresses local increases in the liquid pressure within the housing, which is advantageous in preventing damage to the LED elements due to the pressure.

[0026] Details will be described in the section "Embodiments of the Invention," but the light source device is a liquid supply unit having a discharge port for discharging the liquid introduced into the housing and a recovery port for recovering the liquid discharged from the housing; the plurality of flow ports include a plurality of first flow ports connected to the discharge port and a plurality of second flow ports connected to the recovery port, the first flow port farthest from the center of the placement area has a cross-sectional area in the flow direction of the liquid that is larger than the other first flow ports; The second flow opening farthest from the center of the placement area may have the largest cross-sectional area in the direction of flow of the liquid compared to the other second flow openings.

[0027] In the light source device, The distance between the substrate and the light exit window in the first direction may be 10 mm or less.

[0028] As will be described in more detail in the "Embodiment of the Invention" section below, the above configuration prevents the liquid introduced into the housing from accumulating near the light exit window. In other words, because the liquid can be efficiently circulated through the housing, the above configuration is advantageous in that it makes it easy to lower the temperature of the LED elements while suppressing temperature variations among the multiple LED elements.

[0029] Furthermore, the distance between the substrate and the light exit window in the first direction may be 1.5 mm or less. By reducing this distance, liquid introduced into the housing is more efficiently discharged from the housing, and retention of liquid within the housing is more significantly suppressed.

[0030] The light source device may include a spacer portion that abuts both the substrate and the light exit window. For example, if the distance between the substrate and the light exit window is small, such as 1.5 mm or less, there is a high possibility that the LED element mounted on the substrate will collide with the light exit window during the process of installing the light exit window. In contrast, in the above configuration, the thickness of the spacer portion corresponds to the distance between the substrate and the light exit window. Therefore, with the above configuration, by abutting the light exit window against the spacer portion, it is possible to easily install the light exit window while preventing the LED element from colliding with the light exit window. [Effects of the Invention]

[0031] According to the present invention, a light source device is provided that can suppress variations in temperature among a plurality of LED elements. [Brief explanation of the drawings]

[0032] [Figure 1] 1 is a cross-sectional view showing a configuration of an embodiment of a light source device. [Figure 2] 2 is a diagram of the light source device according to FIG. 1 as viewed from the X direction. [Figure 3] This is a diagram showing the LED element and the air flow port extracted from Figure 2. [Figure 4] 1 is a diagram schematically showing simulation conditions according to Comparative Example 1. [Figure 5] 10 is a graph showing the results of Case 1 and Case 2 of Verification 2. [Figure 6] 10 is a graph showing the results of Case 3 and Case 4 of Verification 2. [Figure 7] FIG. 2 is a cross-sectional view showing an example of the configuration of a light source device according to a second embodiment, following FIG. [Figure 8] 8 is a diagram of the light source device according to FIG. 7 as seen from the X direction, following FIG. 2. [Figure 9] 10 is a diagram of the light source device according to the third embodiment as seen from the X direction, following FIG. 2. [Figure 10] This is a diagram showing the LED element and the air flow port extracted from FIG. 9, following the example of FIG. [Figure 11] 3 is a diagram showing a modified example of the light source device, following FIG. 2. [Figure 12] FIG. 10 is a cross-sectional view showing a modified example of the light source device. [Figure 13] FIG. 10 is a cross-sectional view showing another modified example of the light source device. [Figure 14] FIG. 10 is a cross-sectional view showing yet another modified example of the light source device. [Figure 15] 10 is a diagram showing a modified example of the light source device. [Figure 16] 16 is a diagram of the light source device 1 according to FIG. 15 as seen from the X direction, following FIG. DETAILED DESCRIPTION OF THE INVENTION

[0033] Hereinafter, embodiments of the light source device according to the present invention will be described with reference to the accompanying drawings. Note that the drawings are all schematic illustrations, and the actual dimensional ratios do not necessarily match the dimensional ratios shown in the drawings.

[0034] Fig. 1 is a cross-sectional view showing the configuration of one embodiment of a light source device. As shown in Fig. 1, the light source device 1 includes a plurality of LED elements 2, 2, ..., a substrate 3 on which the LED elements 2 are mounted, a housing 4, a light exit window 6, flow ports (10a, 12a, 12b) formed in the housing 4, and a liquid supply unit 15.

[0035] The light source device 1 is a device that heats a workpiece W1 to be heated by emitting heating light L1 emitted from a plurality of LED elements 2 to the outside through a light exit window 6. For example, the workpiece W1 to be heated may be a semiconductor wafer such as a silicon substrate.

[0036] 1, the housing 4 includes a light exit window 6 and houses a plurality of LED elements 2. The light exit window 6 is disposed opposite the substrate 3. As an example, the housing 4 is made of a metal material such as copper, aluminum, or stainless steel. However, the configuration of the housing 4 is arbitrary as long as it can house the LED elements 2 and allow a liquid S1 (described later) to flow therethrough.

[0037] In the following description, an XYZ coordinate system will be referred to where appropriate, in which the direction in which the substrate 3 and the light exit window 6 are separated from each other is defined as the X direction, and the plane perpendicular to the X direction is defined as the YZ plane. In this embodiment, the X direction corresponds to the "first direction," the Y direction corresponds to the "second direction," and the Z direction corresponds to the "third direction."

[0038] Furthermore, when expressing a direction, if a distinction is made between positive and negative directions, the direction is written with a positive or negative sign, such as "+X direction" and "-X direction." When expressing a direction without distinguishing between positive and negative directions, the direction is simply written as "X direction." In other words, in this specification, the direction is simply written as "X direction." When the X axis is listed, it includes both the "+X direction" and the "-X direction." The same applies to the Y and Z directions.

[0039] The light exit window 6 is made of a glass material such as quartz glass and is transparent to the heating light L1 emitted by the LED element 2. "Transmitting the heating light L1" may mean that the transmittance to the heating light L1 is 40% or more. FIG. 1 shows the distance D1 in the X direction between the light exit window 6 and the substrate 3. More specifically, the distance D1 corresponds to the distance between the main surface on the -X side of the light exit window 6 and a main surface 3a of the substrate 3, which will be described later. The distance D1 is, for example, 0.5 mm to 30 mm.

[0040] Fig. 2 is a diagram of the light source device 1 in Fig. 1 as seen from the X direction. The light exit window 6 and the liquid supply unit 15 are omitted from Fig. 2. As shown in Figs. 1 and 2, a plurality of LED elements 2 are arranged on a substrate 3.

[0041] As shown in FIG. 1, the substrate 3 is disposed on the inner wall surface 4a on the -X side of the housing 4, and supports the LED elements 2. The substrate 3 is preferably made of an insulating material. As an example, the substrate 3 is made of aluminum nitride. Typically, about 100 to 5,000 LED elements 2 are housed in the housing 4. Some of the LED elements 2 are not shown in FIGS. 1 and 2.

[0042] 2, multiple substrates 3 are arranged in the Y direction, and the same number of LED elements 2 are mounted on the main surface 3a of each substrate 3. As an example, the LED elements 2 are rectangular, each measuring 1 mm square. Note that the above is merely an example, and the shape and number of the LED elements 2 are not limited.

[0043] 2, the LED elements 2 are connected to adjacent LED elements 2 in the Z direction by conductive patterns 21 formed on the main surface 3a of the substrate 3, constituting a plurality of LED element groups 20. The conductive patterns 21 are formed of, for example, copper foil or the like.

[0044] 2, the LED element groups 20 are connected to adjacent LED element groups 20 in the Y direction by wires 22. As a result, for example, by connecting the high-potential side of a power supply mechanism (not shown) to the LED element group 20 located furthest on the -Y side and connecting the low-potential side of the power supply mechanism to the LED element group 20 located furthest on the +Y side, it is possible to supply power to the multiple LED elements 2. The wires 22 are made of a metal material such as copper, gold, or aluminum.

[0045] The method of connecting the LED elements 2 and the method of supplying power to the LED elements 2 are arbitrary and are not limited to the present embodiment.

[0046] As an example, the peak wavelength of the LED element 2 is set to be in the range of 430 nm to 900 nm.

[0047] 1, the plurality of flow holes (10a, 12a, 12b) are formed to penetrate the housing 4 and allow the liquid S1 to flow through the housing 4. In this embodiment, the flow holes (10a, 12a, 12b) are all formed on the inner wall surface 4a. Note that the flow holes (10a, 12a, 12b) may also be formed to penetrate the substrate 3.

[0048] When the liquid S1 is caused to flow inside the housing 4, the liquid S1 comes into contact with the LED elements 2, and heat exchange occurs between the liquid S1 and the LED elements 2. This allows the plurality of LED elements 2 to be cooled.

[0049] FIG. 3 is a diagram showing the LED elements 2 and the flow holes (10a, 12a, 12b) extracted from FIG. 2. In FIG. 3, the mounting area 2a for the LED elements 2 is shown by a dashed line. The mounting area 2a may refer to a virtual area formed by connecting the outer edges of the LED elements 2 located on the outside when viewing the multiple LED elements 2 from the X direction. In this embodiment, the mounting area 2a is rectangular, but the shape of the mounting area 2a is arbitrary.

[0050] 3 also shows the center P1 of the mounting area 2a. When the mounting area 2a has a rectangular shape, the center P1 may be the intersection of diagonal lines (not shown) of the mounting area 2a.

[0051] As shown in Fig. 3, the flow passage opening 10a is formed at a position overlapping with the mounting area 2a of the LED element 2 when viewed from the X direction. Also, the flow passage opening 12a and the flow passage opening 12b are formed at positions sandwiching the mounting area 2a in the Y direction, as shown in Fig. 3. The flow passage opening 10a is formed in a region sandwiched between the flow passage opening 12a and the flow passage opening 12b in the Y direction.

[0052] As an example, the flow opening 10a and the flow openings (12a, 12b) have a rectangular shape extending in the Z direction. Note that "extending in the Z direction" may mean that the length in the Z direction is three or more times the width in the Y direction.

[0053] In this embodiment, the liquid S1 is introduced into the housing 4 from the liquid supply unit 15. As shown in FIG. 1, the liquid supply unit 15 has a discharge port 15a that discharges the liquid S1 and a recovery port 15b that recovers the liquid S1 that has flowed through the housing 4.

[0054] As shown in FIG. 1, the flow port 10a is connected to the discharge port 15a by a pipe 13a. Furthermore, the flow ports (12a, 12b) are connected to the recovery port 15b by a pipe 13b. More specifically, the pipe 13b connected to the recovery port 15b branches into two directions, which are connected to the flow port 12a and the flow port 12b, respectively. The flow port 10a functions as an inlet for introducing the liquid S1 into the housing 4. Furthermore, the flow ports (12a, 12b) function as outlets for discharging the liquid S1 from the housing 4. In other words, in this embodiment, the flow port 10a corresponds to the "first flow path," and the flow ports (12a, 12b) correspond to the "second flow path."

[0055] The flow of liquid S1 is shown schematically in Fig. 1. After being introduced into housing 4 through flow port 10a, liquid S1 is divided into two portions and flows through the +Y side and the -Y side, and after coming into contact with LED elements 2 located on the +Y side of flow port 10a and LED elements 2 located on the -Y side of flow port 10a, is discharged from flow ports 12a and 12b.

[0056] This makes it possible to reduce the number of LED elements 2 that come into contact with the liquid S1 from when it is introduced into the housing 4 until when it is discharged, compared to, for example, when only the flow openings 12a and 12b are formed in the housing 4 and the liquid S1 is introduced through the flow openings 12a and discharged through the flow openings 12b. In other words, according to this embodiment, it is possible to suppress the temperature rise of the liquid S1 in the Y direction and suppress the variation in the temperatures of the plurality of LED elements 2 cooled by the liquid S1.

[0057] As described above, the LED elements 2 are connected by wires 22 in the Y direction (see FIG. 2). As described above, by causing the liquid S1 to flow in the Y direction within the housing 4, the pressure of the liquid S1 acting on the wires 22 can be reduced. In other words, from the viewpoint of suppressing malfunctions of the LED elements 2 due to breakage of the wires 22, it is preferable that the direction in which the LED elements 2 are connected by the wires 22 be the same as the flow direction of the liquid S1.

[0058] In addition, from the viewpoint of preventing damage to the wire 22, when adjacent LED elements 2 are connected by the wire 22 across the airflow opening 10a as shown in Figure 2, it is more preferable that the wire 22 bypasses the airflow opening 10a so that the wire 22 and the airflow opening 10a do not overlap when viewed from the X direction.

[0059] Liquid supply unit 15 may be equipped with a cooling mechanism (not shown) and configured to be able to cool the collected liquid S1. This allows the collected liquid S1 to be cooled and then discharged again from discharge port 15a toward housing 4, thereby improving the cooling function of liquid S1 for LED elements 2.

[0060] From the viewpoint of easily suppressing temperature variations among the plurality of LED elements 2, it is preferable that the number of LED elements 2 that come into contact with the liquid S1 in the Y direction be equal on the +Y side and the -Y side of the flow opening 10a. In view of this, it is preferable that the plurality of LED elements 2 and the plurality of flow openings (10a, 12a, 12b) are arranged symmetrically in the Y direction with respect to the center P1 of the mounting area 2a. Note that the plurality of LED elements 2 and the plurality of flow openings (10a, 12a, 12b) may also be arranged point-symmetrically with respect to the center P1 of the mounting area 2a. This example will be described later with reference to a third embodiment.

[0061] In the above description, the flow passage 10a functions as an inlet for the liquid S1, and the flow passages (12a, 12b) function as an outlet for the liquid S1. However, the functions of the flow passage 10a and the flow passages (12a, 12b) may be reversed. For example, the flow passages (12a, 12b) may serve as an inlet for the liquid S1, and the flow passage 10a may serve as an outlet for the liquid S1.

[0062] As the liquid S1, for example, a fluorine-based liquid such as perfluoropolyether (PFPE), perfluorocarbon (PFC), hydrofluoroether (HFE), etc. More specifically, as the liquid S1, for example, Fluorinert (registered trademark) from 3M, Novec (registered trademark) from 3M, Galden (registered trademark) from Solvay, etc. can be used.

[0063] [Verification 1] In addition to the flow passages on both sides of the mounting area 2a, the effect of providing a flow passage at a position overlapping the mounting area 2a when viewed from the X direction was verified by simulation, and will be described below.

[0064] Example 1 A simulation was performed based on the configuration described with reference to the first embodiment. In this simulation, a predetermined amount of power was supplied to the LED elements 2, causing the LED elements 2 to emit light, and the temperature of the LED elements 2 was measured when liquid S1 was passed through the housing 4 at a predetermined flow rate. Note that the temperature of the LED elements 2 in this verification refers to the surface temperature of the LED elements 2.

[0065] In Example 1, 42 1 mm square surface-emitting LED elements 2 were accommodated in the housing 4. The number of LED elements 2 arranged in the Y direction was 6, and the number of LED elements 2 arranged in the Z direction was 7. More specifically, 21 LED elements 2 were mounted on each of the +Y side and the -Y side of the flow port 10a. The height of the LED elements 2 in the X direction was 0.1 mm.

[0066] In each LED element group 20 (see FIG. 1), the spacing between the LED elements 2 in the Z direction was 2 mm, and the spacing between the LED elements 2 in the Y direction was 4 mm. The arrangement and power supply method of the LED elements 2 were the same as in the first embodiment. Each LED element 2 was assumed to emit 2.9 W of heat.

[0067] The thermal conductivity of the LED element 2 was set to 100 W / m·K, and the thermal conductivity of the substrate 3 was set to 170 W / m·K. Additionally, the thermal conductivity of the substrate 3 is assumed to be that of aluminum nitride.

[0068] In Example 1, the distance D1 in the X direction between the substrate 3 and the light exit window 6 (see FIG. 1) was set to 0.5 mm. The internal dimensions of the housing 4 were set to a length of 25 mm in the Y direction and a width of 20 mm in the Z direction.

[0069] The width of the flow ports (10a, 12a, 12b) in the Y direction was 1 mm, and the length in the Z direction was 15 mm.

[0070] Liquid S1 was introduced into the housing 4 through the inlet 10a and discharged through the inlet 12a and the inlet 12b. The thermal conductivity of liquid S1 was set to 0.07 W / m·K. Additionally, liquid S1 was assumed to be Novec (registered trademark) 7200 from 3M, and parameters such as the thermal conductivity of liquid S1 were set based on physical property values ​​provided by 3M. Furthermore, the temperature of liquid S1 when introduced through the inlet 10a was set to 20°C.

[0071] Regarding the thermal conductivity, in this verification, the configuration other than the LED element 2, the substrate 3, and the liquid S1 was assumed to be in adiabatic.

[0072] Under the above conditions, the temperature ranges exhibited by the plurality of LED elements 2 were calculated by simulation.

[0073] Example 2 The experiment was carried out under the same conditions as in Example 1, except that the flow rate of liquid S1 was doubled.

[0074] (Comparative Example 1) Fig. 4 is a diagram schematically showing the simulation conditions for Comparative Example 1. Note that in Fig. 4, the conductive pattern 21 and the wire 22 are omitted from the illustration.

[0075] As shown in Fig. 4, in the light source device 51 of Comparative Example 1, only the flow passage 50a and the flow passage 50b are formed at positions sandwiching the mounting area 2a of the LED element 2 in the Y direction. The liquid S1 is introduced into the housing 4 through the flow passage 50a and discharged from the flow passage 50b. The dimensions of the flow passages (50a, 50b) are set to be equal to the flow passages (12a, 12b) of Example 1. In other words, except that the flow passage 10a is not formed, the other conditions are the same as those of Example 1.

[0076] (Comparative Example 2) The experiment was carried out under the same conditions as Comparative Example 1, except that the flow rate of the liquid S1 was doubled.

[0077] [Results of Verification 1] The results of Verification 1 are shown in Table 1 below. Table 1 shows the temperature ranges exhibited by the multiple LED elements 2. Table 1 also shows the maximum temperature difference among the multiple LED elements 2. This temperature difference can be calculated by dividing the difference between the minimum and maximum temperatures among the multiple LED elements 2 by the minimum temperature. [Table 1]

[0078] According to Table 1, when the liquid S1 was caused to flow through the housing 4 via the flow ports 50a and 50b (Comparative Example 1), the temperature difference among the LED elements 2 exceeded 10% of the minimum temperature. Furthermore, according to Comparative Example 2, it was found that the same result was obtained even if the flow rate of the liquid S1 was doubled.

[0079] 3, when the flow opening 10a is formed at a position overlapping the mounting area 2a of the LED element 2, the liquid S1 is introduced through the flow opening 10a, and the liquid S1 is discharged through the flow openings 12a and 12b (Example 1), it was found that the temperature difference among the multiple LED elements 2 remains within 3% of the minimum temperature. This is also true for Example 2, in which the flow rate of the liquid S1 is doubled.

[0080] That is, according to Table 1, it can be seen that the temperature variation among the plurality of LED elements 2 is suppressed by passing the liquid S1 through the flow holes 10a formed in a position overlapping with the mounting area 2a of the LED elements 2 inside the housing 4. This is thought to be because the number of LED elements 2 that come into contact with the liquid S1 from the time the liquid S1 is introduced into the housing 4 until it is discharged is smaller in Examples 1 and 2 than in Comparative Examples 1 and 2.

[0081] This point is also reflected in the results of Example 2 and Comparative Example 1. In Example 2, the liquid S1 introduced from the flow port 10a branches off and flows in the +Y direction and the -Y direction. Therefore, the flow rate of the liquid S1 when it comes into contact with the multiple LED elements 2 is half the flow rate of the liquid S1 when it passes through the flow port 10a. In other words, in Example 2 and Comparative Example 1, the flow rates of the liquid S1 when it comes into contact with the multiple LED elements 2 are approximately the same. This is consistent with the fact that the minimum temperatures of the LED elements 2 are the same in Example 2 and Comparative Example 1.

[0082] However, despite the fact that the minimum temperatures of the LED elements 2 were the same, the temperature difference in Example 2 remained within 3% of the minimum temperature of the LED elements 2, whereas the temperature difference in Comparative Example 1 exceeded 10% of the minimum temperature of the LED elements 2. Furthermore, Comparative Example 2 suggests that simply increasing the flow rate of the liquid S1 is not enough to suppress the temperature variation of the LED elements 2. In light of these facts, it can be seen that the temperature variation of the multiple LED elements 2 can be suppressed by flowing the liquid S1 through the flow ports 10a formed in a position overlapping the mounting areas 2a of the LED elements 2.

[0083] In this verification, it was assumed that 42 LED elements 2 were housed in the housing 4. However, even if the number of LED elements 2 is changed, the same discussion as above can be applied.

[0084] In Examples 1 and 2, the liquid S1 was introduced through the flow opening 10a and discharged through the flow openings (12a, 12b). However, even when the liquid S1 is introduced through the flow openings (12a, 12b) and discharged through the flow opening 10a, the number of LED elements 2 that come into contact with the liquid S1 inside the housing 4 is smaller than in Comparative Examples 1 and 2. In other words, in light of Verification 1, it can be understood that the temperature variation of the multiple LED elements 2 is suppressed even if the functions of the flow opening 10a and the flow openings (12a, 12b) are reversed.

[0085] [Verification 2] When liquid S1 is caused to flow inside the housing 4 through the flow opening 10a formed at a position overlapping with the mounting area 2a of the LED element 2, the effect of varying the distance D1 in the X direction between the substrate 3 and the light exit window 6 was examined, and the results are described below as Case 1 to Case 4.

[0086] (Case 1) In Case 1, the effect of varying the distance D1 in the X direction between the substrate 3 and the light exit window 6 within a range of 5 mm to 30 mm was examined. Also, in Case 1, three flow rates of the liquid S1 were simulated: 6 L / min, 12 L / min, and 20 L / min. The other conditions were the same as in Example 1 of Verification 1.

[0087] (Case 2) Liquid S1 was assumed to be Novec (registered trademark) 7300 from 3M, and the experiment was carried out under the same conditions as Case 1, except that the flow rate of Liquid S1 was set to three different values: 6 L / min, 13 L / min, and 19 L / min. More specifically, the thermal conductivity of Liquid S1 was set to 0.06 W / m K. As in Verification 1, the other parameters of Liquid S1 were set based on the physical properties provided by 3M.

[0088] (Case 3) The experiment was carried out under the same conditions as in Case 1, except that the distance D1 in the X direction between the substrate 3 and the light exit window 6 was varied within a range of 0.5 mm to 4 mm, and the flow rate of the liquid S1 was set to three different values: 4 L / min, 8 L / min, and 16 L / min.

[0089] (Case 4) As in Case 2, the experiment was carried out under the same conditions as Case 3, except that Novec (registered trademark) 7300 from 3M was assumed as the liquid S1.

[0090] [Results of Verification 2] Figure 5 is a graph showing the results of Case 1 and Case 2. In Figure 5, the horizontal axis represents the distance D1 in the X direction between the substrate 3 and the light exit window 6, and the vertical axis represents the maximum temperature reached by the LED element 2.

[0091] According to FIG. 5, the maximum temperature of the LED element 2 tends to increase as the distance D1 between the substrate 3 and the light exit window 6 in the X direction increases. This is thought to be because, as the distance D1 increases, the liquid S1 introduced into the housing 4 tends to remain near the light exit window 6. Because the liquid S1 in the housing 4 has already exchanged heat with the LED element 2, it is preferable that the liquid S1 in the housing 4 be discharged simultaneously with the introduction of new liquid S1 into the housing 4. However, if the liquid S1 remains near the light exit window 6, even if the liquid S1 is introduced into the housing 4, a portion of the liquid S1 in the housing 4 tends to remain in the housing 4. In other words, as the distance D1 increases, a portion of the liquid S1 that has exchanged heat with the LED element 2 tends to remain in the housing 4, which is thought to be the reason why the maximum temperature of the LED element 2 increases.

[0092] 5, in both Case 1 and Case 2, when the distance D1 exceeds 10 mm, the maximum temperature of the LED element 2 sometimes increases and sometimes decreases even when the distance D1 increases. In light of this, it is presumed that when the distance D1 exceeds 10 mm, the liquid S1 accumulates significantly near the light exit window 6. In other words, when the liquid S1 accumulates near the light exit window 6, the flow state of the liquid S1 within the housing 4 becomes irregular, and therefore, when the distance D1 exceeds 10 mm, the maximum temperature reached by the LED element 2 fluctuates regardless of the distance D1.

[0093] In view of the above, from the viewpoint of efficiently circulating the liquid S1 through the housing 4 and reducing the maximum temperature of the LED element 2 as much as possible, it can be said that it is preferable that the distance D1 be 10 mm or less.

[0094] It should be noted, just to be clear, that in both Case 1 and Case 2, the temperature difference between the LED elements 2 based on the lowest temperature of the LED elements 2 was similar to that in Example 1 of Verification 1. This is thought to be because, as in Example 1 of Verification 1, the liquid S1 was allowed to flow through the flow openings 10a formed at positions overlapping the mounting areas 2a of the LED elements 2, thereby suppressing the variation in temperature of the multiple LED elements 2.

[0095] 5, it can be seen that even when the liquid S1 is different, the maximum temperature of the LED element 2 shows a similar tendency. In other words, the above discussion is not limited to the type of liquid S1.

[0096] FIG. 6 is a graph showing the results of Case 3 and Case 4, following FIG.

[0097] 6, it can be seen that even when the distance D1 in the X direction between the substrate 3 and the light exit window 6 is 4 mm or less, the maximum temperature of the LED element 2 tends to increase as the distance D1 increases. However, in FIG. 6, unlike the range where the distance D1 exceeds 10 mm (see FIG. 5), the maximum temperature reached by the LED element 2 does not fluctuate regardless of the distance D1. This is thought to be because, as described with reference to FIG. 5, the distance D1 is 10 mm or less, which prevents the liquid S1 from accumulating within the housing 4.

[0098] Furthermore, in both Case 3 and Case 4, when the distance D1 is 2 mm or less, the maximum temperature of the LED element 2 decreases as the distance D1 decreases, suggesting that the LED element 2 can be cooled more efficiently. This is thought to be because, as the distance D1 decreases, the liquid S1 present in the housing 4 is more likely to be discharged at the same time as new liquid S1 is introduced into the housing 4, thereby more significantly suppressing the accumulation of the liquid S1 within the housing 4. In other words, by setting the distance D1 to 2 mm or less, the accumulation of the liquid S1 within the housing 4 is more significantly suppressed, and the maximum temperature of the LED element 2 can be reduced. If the maximum temperature of the LED element 2 decreases, the decrease in the luminous efficiency of the LED element 2 is suppressed, and temperature variations between multiple LED elements 2 are more easily suppressed.

[0099] In view of the above, it is more preferable that the distance D1 be 2 mm or less, and particularly preferably 1.5 mm or less. If the distance D1 is less than 0.3 mm, for example, the light exit window 6 may interfere with the wire connecting the LED element 2 to another LED element 2. In view of this, it is preferable that the distance D1 be 0.3 mm or more.

[0100] In Cases 3 and 4, similarly to Cases 1 and 2, the temperature difference between the LED elements 2 with the lowest temperature of the LED elements 2 as the reference was approximately the same as in Example 1 of Verification 1.

[0101] [Second embodiment] Next, a second embodiment of the light source device 1 will be described, focusing on differences from the first embodiment. Fig. 7 is a cross-sectional view showing a configuration example of the second embodiment of the light source device 1, following Fig. 1. Fig. 8 is a view of the light source device 1 according to Fig. 7 as seen from the X direction, following Fig. 2. Note that the conductive pattern 21 and the wire 22 are omitted from Fig. 8.

[0102] In the first embodiment described above, it has been described that one flow opening 10a overlapping with the mounting area 2a when viewed from the X direction is formed in the housing 4. However, as shown in Figs. 7 and 8, flow openings overlapping with the mounting area 2a when viewed from the X direction may be formed in multiple locations.

[0103] That is, in this embodiment, as shown in FIG. 7, a plurality of flow openings (10a, 10b) are formed at positions overlapping with the placement area 2a when viewed from the X direction, with the flow opening 12a and the flow opening 12b sandwiching the placement area 2a in the Y direction.

[0104] As shown in FIG. 7, the flow port 10a is connected to the discharge port 15a by a pipe 13a. More specifically, the pipe 13a branches into two directions and is connected to the plurality of flow ports 10a, respectively. Furthermore, the pipe 13b connected to the recovery port 15b branches into three directions and is connected to the flow port 10b, the flow port 12a, and the flow port 12b, respectively. As a result, the flow port 10a functions as an inlet for introducing the liquid S1 into the housing 4. Furthermore, the flow ports (10b, 12a, 12b) function as outlets for discharging the liquid S1 from the housing 4. In this embodiment, the flow port 10a corresponds to the "first flow port," and the flow ports (10b, 12a, 12b) correspond to the "second flow port."

[0105] 8, by forming a plurality of flow holes (10a, 10b) at positions overlapping with the mounting area 2a when viewed from the X direction, it is possible to reduce the number of LED elements 2 that come into contact with the liquid S1 introduced into the housing 4 before it is discharged. In view of the above verification 1, it is clear that the second embodiment can also suppress temperature variations among the plurality of LED elements 2.

[0106] Furthermore, for example, in the inlet ports (10b, 12a, 12b) that function as outlets, the cross-sectional areas of the inlet port 10b and the inlet ports (12a, 12b) in the direction of flow of the liquid S1 may be different from each other. In particular, when the workpiece W1 is a semiconductor substrate such as a silicon substrate, the temperature of the peripheral edge of the workpiece W1 tends to decrease compared to the center, so it is expected that the arrangement density of the LED elements 2 in the mounting region 2a for the LED elements 2 will be increased in the region farther from the center P1. In this case, the temperature of the LED elements 2 in that region when lit is likely to be higher than that of the LED elements 2 closer to the center P1. Note that "arrangement density" refers to the number of LED elements 2 per unit area.

[0107] In this case, from the viewpoint of facilitating cooling of the LED elements 2 placed in an area far from the center P1, it is preferable that the cross-sectional area in the flow direction of the liquid S1 of the inlet ports (12a, 12b) farther from the center P1 be made larger than that of the inlet port 10b. In other words, it is preferable that the outlet port farthest from the center P1 be made larger in cross-sectional area than the other outlet ports. In this case, it is preferable that the cross-sectional area in the flow direction of the liquid S1 of the portions of the pipe 13b connected to the inlet ports 12a and 12b be made larger than that of the portion connected to the inlet port 10b.

[0108] The same argument can be made for the inlet for the liquid S1. That is, although not shown, when multiple inlets are formed in the housing 4, it is preferable that the inlet farthest from the center P1 has the largest cross-sectional area compared to the other inlets.

[0109] [Third embodiment] Next, a third embodiment of the light source device 1 will be described, focusing on the differences from the first embodiment. Fig. 9 is a diagram of the light source device 1 according to the third embodiment as viewed from the X direction, following Fig. 2. Fig. 10 is a diagram of the LED elements 2 and the flow holes (10a, 12a, 12b) extracted from Fig. 9, following Fig. 3. In Figs. 9 and 10, the numbers of LED elements 2 and substrates 3 are shown in a simplified manner, as in the first embodiment.

[0110] In the above description, the mounting area 2a for the LED elements 2 has a rectangular shape. However, as shown in Figures 9 and 10, the LED elements 2 may be arranged in a circular shape, and the mounting area 2a may have a circular shape.

[0111] Although the conductive pattern 21 and the wire 22 are not shown in FIG. 9, as described above, the LED element 2 may be connected and powered in any manner.

[0112] 10, the flow passage 12a is formed near the center P1 of the mounting area 2a, and the flow passage 12b is formed outside the mounting area 2a. That is, the flow passage 12a and the flow passage 12b are formed at positions sandwiching the mounting area 2a in a direction parallel to the YZ plane, including the Y direction.

[0113] In addition, in this embodiment, as shown in Figure 10, in the area sandwiched between flow openings 12a and 12b in a direction parallel to the YZ plane, including the Y direction, flow opening 10a is formed at a position overlapping with placement area 2a.

[0114] Although not shown in the figures, for example, flow port 10a is connected to discharge port 15a of liquid supply unit 15 by piping. Furthermore, flow port 12a and flow port 12b are connected to recovery port 15b of liquid supply unit 15 by piping. In this case, flow port 10a functions as an inlet for liquid S1 and corresponds to the "first flow path." Furthermore, flow ports (12a, 12b) function as outlets for liquid S1 and correspond to the "second flow path."

[0115] That is, in this embodiment, the liquid S1 is introduced into the housing 4 through the flow passage 10a and discharged through the flow passage 12a and the flow passage 12b. This makes it possible to reduce the number of LED elements 2 that the liquid S1 comes into contact with before being discharged, compared to, for example, a case in which the flow passage 10a is not formed and the liquid S1 is introduced through the flow passage 12a and discharged through the flow passage 12b. In light of the above verification 1, it is clear that the temperature variation among the plurality of LED elements 2 can also be suppressed in the third embodiment.

[0116] Furthermore, when the mounting area 2a has a circular shape and the liquid S1 flows in the radial direction of the mounting area 2a, in order to easily suppress temperature variations in the multiple LED elements 2, it is preferable that the multiple LED elements 2 and the multiple flow ports (10a, 12a, 12b) are arranged point-symmetrically with respect to the center P1 of the mounting area 2a.

[0117] As in the above embodiment, the flow opening 10a may be used as an outlet for the liquid S1, and the flow openings 12a and 12b may be used as inlets for the liquid S1.

[0118] In this embodiment as well, as described with reference to the second embodiment, a plurality of flow ports may be formed at positions overlapping with the placement area 2a.

[0119] Similarly to the second embodiment, in order to facilitate cooling of the LED elements 2 mounted in an area far from the center P1 of the mounting area 2a, the cross-sectional area of ​​the exhaust port farthest from the center P1 may be made larger than the cross-sectional areas of the other exhaust ports. Furthermore, the cross-sectional area of ​​the inlet port farthest from the center P1 may be made larger than the cross-sectional areas of the other inlets.

[0120] [Another embodiment] Modifications of the light source device 1 will now be described.

[0121] <1> For example, from the viewpoint of preventing damage to the wires 22 connecting the multiple LED elements 2, it is preferable to suppress a local increase in the pressure of the liquid S1 within the housing 4. In particular, when there is a large difference between the cross-sectional area of ​​the flow opening that functions as an inlet for the liquid S1 and the cross-sectional area of ​​the flow opening that functions as an outlet for the liquid S1, it is thought that the liquid S1 is likely to become turbulent, and the pressure of the liquid S1 is likely to increase locally. In view of this, the cross-sectional area of ​​the flow opening that functions as an inlet for the liquid S1 and the cross-sectional area of ​​the flow opening that functions as an outlet for the liquid S1 may be made equal to each other.

[0122] In addition, taking into consideration dimensional errors during manufacturing, the phrase "the cross-sectional area of ​​the flow port that functions as an inlet and the cross-sectional area of ​​the flow port that functions as an outlet are equal to each other" may be taken to mean that the cross-sectional area of ​​one is in the range of 0.95 to 1.05 times the cross-sectional area of ​​the other.

[0123] For example, in the first embodiment, the cross-sectional area of ​​the flow port 10a is preferably equal to the sum of the cross-sectional areas of the flow port 12a and the flow port 12b in the flow direction of the liquid S1. Furthermore, when a plurality of flow ports function as inlets for the liquid S1, the cross-sectional area of ​​the flow port functioning as the inlet is the sum of the cross-sectional areas of the plurality of flow ports. The same applies to the flow ports functioning as outlets. For example, in the second embodiment, the sum of the cross-sectional areas of the flow port 10a located on the +Y side and the flow port 10a located on the -Y side is preferably equal to the sum of the cross-sectional areas of the flow port 10b, the flow port 12a, and the flow port 12b.

[0124] This makes it less likely that there will be a difference between the flow rate of the liquid S1 near the flow port 10a when it is introduced into the housing 4 and the flow rate of the liquid S1 near the flow port 12a when it is discharged from the housing 4, thereby preventing the pressure of the liquid S1 from increasing locally within the housing 4.

[0125] The same discussion can be made even when the functions of the flow passage 10a and the flow passages (12a, 12b) are reversed. Also, although the first embodiment has been used as an example, the same applies to the second and third embodiments.

[0126] Furthermore, from the viewpoint of facilitating cooling of the LED elements 2 placed in an area far from the center P1 of the placement area 2a, the cross-sectional area of ​​the flow openings that function as inlet ports for the liquid S1 and the cross-sectional area of ​​the flow openings that function as outlet ports for the liquid S1 are configured to be equal to each other, and as described with reference to the second embodiment, the cross-sectional area of ​​the outlet port farthest from the center P1 may be made larger than the cross-sectional area of ​​the other outlet ports, and the cross-sectional area of ​​the inlet port farthest from the center P1 may be made larger than the cross-sectional area of ​​the other inlet ports.

[0127] <2> In the above description, the multiple LED elements 2 and the multiple flow holes (10a, 10b, 12a, 12b) are described as being symmetrical at least in the Y direction with respect to the center P1 of the mounting area 2a. However, the present invention is not limited to this. For example, the arrangement of the LED elements 2 can be appropriately designed depending on the shape of the heating object to be irradiated with the heating light L1. Furthermore, the multiple flow holes (10a, 10b, 12a, 12b) can be designed depending on the arrangement of the LED elements 2.

[0128] <3> Fig. 11 is a diagram showing a modified example of the light source device 1, following Fig. 2. In the above description, the flow openings (12a, 12b) sandwiching the mounting area 2a in the Y direction are described as being formed in pairs, but the present invention is not limited to this. For example, as shown in Fig. 11, the flow openings 12a and 12b may be formed at multiple positions in the Z direction. Similarly, the flow opening 10a may be formed at multiple positions in the Z direction.

[0129] The flow openings (10a, 12a, 12b) may be circular. The flow openings (10a, 12a, 12b) may have any shape.

[0130] Note that, for example, from the viewpoint of making it easier for the liquid S1 to come into uniform contact with the multiple LED elements 2 arranged in the Z direction when introduced into the housing 4 and making it easier to suppress variations in the temperatures of these LED elements 2, it is preferable that the flow opening 10a has a shape that extends in the Z direction, as shown in Fig. 2. The same applies to the flow openings (12a, 12b).

[0131] <4> Fig. 12 is a cross-sectional view showing a modified example of the light source device 1. As shown in Fig. 12, the light source device 1 may have a support base 5 that supports the substrate 3 on which the LED elements 2 are mounted. For example, the support base 5 may be made of a heat sink made of metal such as copper, aluminum, or stainless steel, thereby improving the cooling effect of the LED elements 2.

[0132] In this case, the flow passage opening 10a may be formed so as to penetrate the support base 5, as shown in Fig. 12. Although not shown, the flow passage openings (12a, 12b) may also be formed so as to penetrate the support base 5.

[0133] 13 is a cross-sectional view showing another modified example of the light source device 1. As shown in FIG. 13, the housing 4 may be formed to include a support base 5. With the configuration shown in FIG. 13, the outer wall surface 5a of the support base 5 can be easily exposed to the outside, which makes it easier to improve the efficiency of heat dissipation from the outer wall surface 5a. Specifically, by forming the support base 5 from a metal heat sink, the cooling effect of the LED elements 2 can be further improved, which is preferable.

[0134] <5> Although the above describes an example in which the LED element group 20 is connected by wires 22, it is optional whether the LED element group 20 is connected by wires. For example, the LED element group 20 may be connected by conductive patterns 21 on the substrate 3, and the method of connecting the LED elements 2 can be designed appropriately depending on the arrangement of the LED elements 2.

[0135] <6> Fig. 14 is a cross-sectional view showing yet another modified example of the light source device 1. In the above description, the flow opening 12a and the flow opening 12b are formed on the inner wall surface 4a on the -X side of the housing 4. However, as shown in Fig. 14, the flow opening 12a and the flow opening 12b may be formed on the inner wall surfaces 4b on the +Y side and the -Y side of the housing 4, respectively.

[0136] <7> In the above description, it has been explained that the liquid S1 introduced into the housing 4 is discharged from the housing 4 and then recovered by the liquid supply unit 15. However, the present invention is not limited to this, and the liquid supply unit 15 may have any configuration as long as the liquid S1 is introduced into the housing 4 and discharged from the housing 4. For example, the liquid S1 discharged from the housing 4 may be recovered by a mechanism different from the liquid supply unit 15 that ejected the liquid S1 to introduce it into the housing 4.

[0137] <8> Fig. 15 is a diagram showing a modified example of the light source device 1, and Fig. 16 is a diagram showing the light source device 1 according to Fig. 15 as viewed from the X direction, following Fig. 2. Note that the liquid supply unit 15 and the pipes (13a, 13b) are not shown in Fig. 15.

[0138] 15 and 16, the light source device 1 may have a spacer portion 25 that abuts both the substrate 3 and the light exit window 6. As described in Verification 2 above, this modification is advantageous in that, when the distance D1 between the substrate 3 and the light exit window 6 is set to be small, for example, 1.5 mm or less, the light exit window 6 can be easily installed while preventing the LED elements 2 on the substrate 3 from colliding with the light exit window 6.

[0139] 15 , in this modification, the thickness of the spacer portion 25 in the X direction corresponds to the distance D1 between the substrate 3 and the light exit window 6. Therefore, in the process of installing the light exit window 6, the light exit window 6 is brought into contact with the spacer portion 25, thereby preventing the LED element 2 from colliding with the light exit window 6.

[0140] The installation position of the spacer portion 25 is arbitrary, but from the viewpoint of making it difficult to impede the flow of the liquid S1 in the Y direction, the spacer portion 25 may be placed in a position that does not overlap with the LED element 2 in the Y direction, as shown in Fig. 16. The spacer portion 25 is, for example, made of a metal or resin plate.

[0141] <9> The above-described configuration of the light source device 1 is merely an example, and the present invention is not limited to the illustrated configurations. The above-described configurations can be realized by combining them appropriately. [Explanation of symbols]

[0142] 1,51 : Light source device 2: LED element 2a: Placement area 3: Substrate 4: Housing 5 : Support stand 6: Light exit window 10a,10b,12a,12b: Ventilation port 13a, 13b: Piping 15: Liquid supply section 15a: Discharge port 15b: Collection port 20: LED element group 21: Conductive pattern 22: Wire 25: Plate 50a,50b: Ventilation port L1: Heating light P1: Center S1: Liquid W1: Work

Claims

1. A plurality of LED elements mounted on a substrate; a light exit window disposed at a distance from the substrate in a first direction perpendicular to a main surface of the substrate, the light exit window allowing light emitted by the plurality of LED elements to exit to the outside; a housing including the light exit window and accommodating the plurality of LED elements; a plurality of flow ports formed through the housing for introducing or discharging a liquid into or from the housing, the liquid contacting the plurality of LED elements and cooling the plurality of LED elements; The plurality of flow ports are At least one pair of flow holes are formed at positions sandwiching the mounting area where the plurality of LED elements are mounted in a second direction perpendicular to the first direction; A light source device characterized in that it includes a flow opening that is sandwiched between the pair of flow openings in the second direction when viewed from the first direction, and at least a portion of which is formed in a position overlapping with the placement area.

2. The light source device according to claim 1 , wherein the plurality of LED elements and the plurality of air flow holes are symmetrical in the second direction with respect to a center of the mounting area.

3. The light source device according to claim 1 or 2, wherein the plurality of LED elements are connected to each other by wires in the second direction.

4. The light source device according to claim 1 , wherein the plurality of flow holes extend in a third direction perpendicular to the first direction and the second direction.

5. a liquid supply unit having a discharge port for discharging the liquid introduced into the housing and a recovery port for recovering the liquid discharged from the housing; 3. The light source device according to claim 1, wherein the cross-sectional area of ​​the first flow port connected to the discharge port in the direction of flow of the liquid is equal to the cross-sectional area of ​​the second flow port connected to the recovery port in the direction of flow of the liquid.

6. a liquid supply unit having a discharge port for discharging the liquid introduced into the housing and a recovery port for recovering the liquid discharged from the housing; the plurality of flow ports include a plurality of first flow ports connected to the discharge port and a plurality of second flow ports connected to the recovery port, the first flow port farthest from the center of the placement area has a cross-sectional area in the flow direction of the liquid that is larger than the other first flow ports; 3 . The light source device according to claim 1 , wherein the second flow opening farthest from the center of the placement area has a cross-sectional area in the direction of flow of the liquid that is larger than the other second flow openings.

7. 3. The light source device according to claim 1, wherein the distance between the substrate and the light exit window in the first direction is 10 mm or less.

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