Substrate processing apparatus

Abstract

To enable an implementation of a uniform processing to one or a plurality of substrates by using a plurality of pieces of liquid supply means.SOLUTION: Each of a plurality of processing units 2 has a configuration in which a nozzle 111 and an electric valve 113 are provided. The nozzle 111 supplies a processing liquid to a substrate W. The electric valve 113 adjusts a flow rate of the processing liquid flowing through the nozzle 111. The electric valve 113 has a valve body movable in a closing direction and an opening direction with respect to a valve seat. The electric valve 113 of one of the plurality of processing units 2 shifts from the closed state to the processing state in which the flow rate of the processing liquid is adjusted in response to the supply command. A time required from when the electric valve 113 receives the supply command to when it enters the processing state is set as a reference transition time. A position at which a valve body is to be disposed at a standby time is determined for the electric valve 113 of the other processing units 2 so that the reference transition time matches among the electric valve 113.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a substrate processing apparatus for performing liquid processing on a substrate using a processing liquid. [Background technology]

[0002] BACKGROUND ART Substrate processing apparatuses have conventionally been used to perform various processes on various substrates, such as substrates for FPDs (Flat Panel Displays) used in liquid crystal displays or organic EL (Electro Luminescence) display devices, semiconductor substrates, substrates for optical disks, substrates for magnetic disks, substrates for magneto-optical disks, substrates for photomasks, ceramic substrates, or substrates for solar cells.

[0003] In a substrate processing apparatus, a processing liquid is supplied to a substrate from, for example, a processing liquid supply source through a pipe and a nozzle. The pipe is provided with, for example, an electric valve. Patent Document 1 describes an example of an electric valve used in a substrate processing apparatus. The electric valve is configured to be able to adjust the flow rate of the processing liquid supplied to the processing liquid nozzle. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2016-134390 Summary of the Invention [Problem to be solved by the invention]

[0005] The motor-operated valve includes a valve seat and a valve element. The valve seat is formed in an annular shape so as to surround an opening that constitutes part of the flow path of the processing liquid. The valve element is movable between a closed position in which it contacts the valve seat to close the opening, and an open position in which it is separated from the valve seat. The valve element has a cone portion. By inserting and moving a part of the cone portion into the opening, the amount (flow rate) of processing liquid flowing through the motor-operated valve can be adjusted.

[0006] Among multiple motor-operated valves manufactured to the same specifications, there are variations in the shapes of the valve seats, valve bodies, and other components. Therefore, variations in the shapes of the components tend to cause variations in the operating characteristics among multiple motor-operated valves. One example of such variations in operating characteristics is the variation in the response performance to operating commands.

[0007] As described above, the motorized valve is provided in a pipe that supplies a processing liquid to a substrate. In this case, variations in response performance cause variations in the timing at which the processing liquid starts to be supplied to the substrate. If the variations in the timing at which the processing liquid starts to be supplied to the substrates are large, uniform processing cannot be achieved among the substrates when multiple motorized valves are used to supply the processing liquid to each of the substrates.

[0008] An object of the present invention is to provide a substrate processing apparatus that enables uniform processing of one or more substrates using a plurality of liquid supply means. [Means for solving the problem]

[0009] A substrate processing apparatus according to one aspect of the present invention includes a plurality of processing units that perform liquid processing on a substrate using a processing liquid, and a control unit that issues a first supply command to each of the plurality of processing units during the liquid processing to supply the processing liquid to the substrate at a flow rate that conforms to a first condition, wherein each of the plurality of processing units includes a nozzle connected to a liquid flow path and that discharges the processing liquid flowing through the liquid flow path onto the substrate, and an electric valve that is provided in the liquid flow path and that adjusts the flow rate of the processing liquid flowing through the liquid flow path, wherein the electric valve includes a valve seat, a valve element that is provided on a predetermined movement path that passes through the valve seat so as to be movable in a closing direction approaching the valve seat and in an opening direction away from the valve seat, and an electric actuator that moves the valve element in the opening direction on the movement path in response to the first supply command issued to the electric valve, When the motor-operated valve of one of the processing units receives the first supply command while in a stopped state in which the valve body is designed to contact the valve seat, the motor-operated valve transitions to a first processing state in which the processing liquid flows through the motor-operated valve at a flow rate that conforms to the first condition, and the time required for the motor-operated valve of the one processing unit to transition to the first processing state after receiving the first supply command is defined as a first reference transition time, and before the liquid processing, the control unit determines, as a first standby position, a position on the movement path where the valve body of the motor-operated valve of the other processing unit should be located when the other processing unit is waiting, so that the motor-operated valve of the other processing unit among the plurality of processing units transitions to the first processing state when the first reference transition time has elapsed after receiving the first supply command.

[0010] A substrate processing apparatus according to another aspect of the present invention is a substrate processing apparatus for performing liquid processing on a substrate using a processing liquid, the substrate processing apparatus including: a plurality of nozzles connected to a plurality of liquid flow paths and discharging the processing liquid flowing through the plurality of liquid flow paths onto the substrate; a plurality of electric valves provided in the plurality of liquid flow paths and adjusting the flow rate of the processing liquid flowing through the liquid flow paths; and a control unit that issues a supply command to each of the plurality of electric valves to supply the processing liquid to the substrate at a predetermined flow rate during the liquid processing, wherein each electric valve has a valve seat and a valve element provided on a predetermined movement path passing through the valve seat so as to be movable in a closing direction approaching the valve seat and in an opening direction away from the valve seat; and a control unit that moves the valve element on the movement path in response to the supply command issued to the electric valve. and an electric actuator that moves the valve body in an opening direction, wherein one of the plurality of electric valves receives the supply command while in a stopped state in which the valve body is designed to contact the valve seat, thereby transitioning the valve to a processing state in which the processing liquid flows through the valve at the predetermined flow rate, and the time required for the one electric valve to transition to the processing state after receiving the supply command is defined as a reference transition time, and before the liquid processing, the control unit determines, as a standby position, a position on the movement path where the valve body of the other electric valve should be located when on standby, so that the other electric valve among the plurality of electric valves will enter the processing state when the reference transition time has elapsed after receiving the supply command. [Effects of the Invention]

[0011] According to the present invention, it is possible to uniformly process one or more substrates using a plurality of liquid supply means. [Brief explanation of the drawings]

[0012] [Figure 1] 1 is a block diagram showing a configuration of a substrate processing apparatus according to a first embodiment. [Figure 2] FIG. 2 is a schematic cross-sectional view for explaining one configuration example of the motor-operated valve of FIG. 1. [Figure 3] 10 is a diagram for explaining variations in response characteristics among a plurality of motorized valves of a plurality of processing units. FIG. [Figure 4] 2 is a block diagram showing the configuration of a control system of the substrate processing apparatus of FIG. 1. FIG. [Figure 5] FIG. 10 is a diagram illustrating an example of standby position information. [Figure 6] 10 is a flowchart illustrating an example of a reference measurement process. [Figure 7] 10 is a flowchart illustrating an example of a standby position determination process. [Figure 8] FIG. 10 is a diagram illustrating an example of standby position information according to the second embodiment. [Figure 9] FIG. 10 is a block diagram showing a configuration of a substrate processing apparatus according to a third embodiment. [Figure 10] FIG. 13 is a diagram illustrating an example of standby position information according to the third embodiment. [Figure 11] FIG. 10 is a block diagram illustrating a substrate processing apparatus according to a fourth embodiment. [Figure 12] FIG. 10 is a diagram illustrating an example of a substrate processing apparatus according to a fifth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0013] A substrate processing apparatus according to an embodiment of the present invention will be described below with reference to the drawings. In the following description, the term "substrate" refers to a substrate for an FPD (Flat Panel Display) used in a liquid crystal display device or an organic EL (Electroluminescence) display device, a semiconductor substrate, an optical disk substrate, a magnetic disk substrate, a magneto-optical disk substrate, a photomask substrate, a ceramic substrate, or a solar cell substrate. The upper surface of the substrate refers to the surface of the substrate facing upward, and the lower surface of the substrate refers to the surface of the substrate facing downward. The upper surface of the substrate may be the surface on which a circuit is formed (front surface) or the surface opposite the surface on which a circuit is formed (rear surface). The substrate has a circular shape in a plan view excluding the notch.

[0014] 1. First embodiment <1> Configuration of substrate processing equipment Fig. 1 is a block diagram showing the configuration of a substrate processing apparatus according to the first embodiment. As shown in Fig. 1, the substrate processing apparatus 1 according to the present embodiment has a configuration in which a single apparatus casing CA accommodates a plurality of (e.g., 12) processing units 2, a first liquid supply system 210, a second liquid supply system 220, a third liquid supply system 230, a transfer apparatus 800, and a control apparatus 900.

[0015] The processing units 2 have a common configuration, and perform processing (liquid processing) by supplying a plurality of processing liquids to the loaded substrate W. Specifically, each processing unit 2 has a configuration in which a substrate holding device 3, a first nozzle 111, a second nozzle 121, and a third nozzle 131 are housed in a chamber (not shown).

[0016] The substrate holding device 3 includes a spin base 3a, multiple holding pins 3b, and a rotation drive unit 3c. The rotation drive unit 3c is, for example, a motor, and is fixed to the bottom of the chamber. The rotation drive unit 3c has a rotation shaft that extends upward. The spin base 3a is connected to the upper end of the rotation shaft. The spin base 3a has a disk shape and is rotatably supported in a horizontal position by the rotation shaft.

[0017] The plurality of holding pins 3b are arranged spaced apart from one another on the periphery of the upper surface of the spin base 3a. At least some of the plurality of holding pins 3b are rotary holding pins that rotate around a vertical axis. The spin base 3a and the plurality of holding pins 3b form a so-called mechanical spin chuck that holds the outer peripheral edge of the substrate W.

[0018] In the substrate holding device 3, the peripheral edge and outer circumferential edge of the lower surface of the substrate W placed on the spin base 3a are held by a plurality of holding pins 3b. In this state, the rotation drive unit 3c operates to rotate the substrate W in a horizontal position. A first liquid, a second liquid, and a third liquid are supplied from a first nozzle 111, a second nozzle 121, and a third nozzle 131, respectively, onto the upper surface of the substrate W held and rotated by the substrate holding device 3.

[0019] The first liquid, second liquid, and third liquid are different types of processing liquids and are determined depending on the processing content of the substrate W. In this embodiment, the processing liquid used for the liquid processing may be a cleaning liquid. In this case, the cleaning liquid may be, for example, an aqueous solution of hydrofluoric acid, buffered hydrofluoric acid (BHF), dilute hydrofluoric acid (DHF), hydrofluoric acid (hydrofluoric acid water: HF), hydrochloric acid, sulfuric acid, nitric acid, acetic acid, oxalic acid, or ammonia water, or a mixed solution thereof. Furthermore, the mixed solution may be, for example, a mixed solution (SPM) of sulfuric acid and hydrogen peroxide water heated to a high temperature, a mixed solution (SC1) of ammonia and hydrogen peroxide water, or a mixed solution (SC2) of hydrochloric acid (HCl) and hydrogen peroxide water.

[0020] The treatment liquid used in the liquid treatment in this embodiment may be a rinse liquid. Examples of rinse liquids that can be used include pure water, carbonated water, ozone water, hydrogen water, and electrolytic ion water. Furthermore, the treatment liquid used in the liquid treatment in this embodiment may be an organic solvent such as HFE (hydrofluoroether) or IPA (isopropyl alcohol), a developer, or a coating liquid such as a resist liquid.

[0021] Similar to the types of processing liquids, the flow rates (target flow rates) of the first, second, and third liquids supplied to the substrate W are determined according to the processing content of the substrate W. Furthermore, the timing of supplying the first, second, and third liquids to the substrate W is also determined according to the processing content of the substrate W. The period during which the first liquid is supplied to the substrate W, the period during which the second liquid is supplied to the substrate W, and the period during which the third liquid is supplied to the substrate W may be different from one another, or the supply periods of at least two of the processing liquids may overlap.

[0022] In one processing unit 2, a first nozzle 111 is connected to the tip (downstream end) of a first pipe 110. The first pipe 110 extends from a first liquid supply system 210 outside the processing unit 2 into the processing unit 2. A first liquid is supplied to the first pipe 110 from the first liquid supply system 210. In addition, an open / close valve 112, an electric valve 113, and a flow rate detector 114 are provided in this order on the first pipe 110 from the first nozzle 111 toward the upstream side.

[0023] The opening / closing valve 112 is provided to correspond to the electric valve 113 and is configured to be able to transition between an open state that allows the flow of the processing liquid in the first pipe 110 and a closed state that blocks the flow of the processing liquid in the first pipe 110.

[0024] The flow rate detection unit 114 is a flow meter and detects the amount of processing liquid flowing through the first pipe 110 per unit time as a flow rate. The electric valve 113 is a motor needle valve and adjusts the flow rate of the processing liquid flowing through the first pipe 110 based on the detection result of the flow rate detection unit 114 when the corresponding on-off valve 112 is in an open state. The configuration and operation of the electric valve 113 will be described in detail later.

[0025] In one processing unit 2, the second nozzle 121 is connected to the tip (downstream end) of the second pipe 120. The second pipe 120 extends from a second liquid supply system 220 outside the processing unit 2 into the processing unit 2. The second pipe 120 is supplied with the second liquid from the second liquid supply system 220. In addition, the second pipe 120 is provided with an open / close valve 122, an electric valve 123, and a flow rate detection unit 124 in this order from the second nozzle 121 toward the upstream side.

[0026] The on-off valve 122, the motor-operated valve 123, and the flow rate detection unit 124 have basically the same configurations as the on-off valve 112, the motor-operated valve 113, and the flow rate detection unit 114 provided in the first pipe 110. That is, the on-off valve 122 is provided corresponding to the motor-operated valve 123, and is configured to be able to switch between an open state and a closed state. The flow rate detection unit 124 is a flow meter, and detects the amount of the treatment liquid flowing through the second pipe 120 as a flow rate. The motor-operated valve 123 is a motor needle valve, and adjusts the flow rate of the treatment liquid flowing through the second pipe 120 based on the detection result of the flow rate detection unit 124 when the corresponding on-off valve 122 is in the open state.

[0027] In one processing unit 2, the third nozzle 131 is connected to the tip (downstream end) of the third pipe 130. The third pipe 130 extends from a third liquid supply system 230 outside the processing unit 2 into the processing unit 2. The third pipe 130 is supplied with the third liquid from the third liquid supply system 230. In addition, the third pipe 130 is provided with an open / close valve 132, an electric valve 133, and a flow rate detection unit 134 in this order from the third nozzle 131 toward the upstream side.

[0028] The on-off valve 132, the motor-operated valve 133, and the flow rate detection unit 134 have basically the same configurations as the on-off valve 112, the motor-operated valve 113, and the flow rate detection unit 114 provided in the first pipe 110. That is, the on-off valve 132 is provided corresponding to the motor-operated valve 133, and is configured to be able to switch between an open state and a closed state. The flow rate detection unit 134 is a flow meter, and detects the amount of the treatment liquid flowing through the third pipe 130 as a flow rate. The motor-operated valve 133 is a motor needle valve, and adjusts the flow rate of the treatment liquid flowing through the third pipe 130 based on the detection result of the flow rate detection unit 134 when the corresponding on-off valve 132 is in the open state.

[0029] The first liquid supply system 210 includes one or more fluid-related devices such as pipes, joints, valves, pumps, tanks, etc., and is connected to a first liquid supply source such as a utility facility, a first liquid production facility, or a first liquid storage facility provided in the factory. The first liquid supply system 210 supplies the first liquid to the first pipes 110 of the multiple processing units 2 under the control of the control device 900.

[0030] The second liquid supply system 220 includes one or more fluid-related devices such as pipes, joints, valves, pumps, tanks, etc., and is connected to a second liquid supply source such as a utility facility, a second liquid production facility, or a second liquid storage facility provided in the factory. The second liquid supply system 220 supplies the second liquid to the second pipes 120 of the multiple processing units 2 under the control of the control device 900.

[0031] The third liquid supply system 230 includes one or more fluid-related devices such as pipes, joints, valves, pumps, tanks, etc., and is connected to a third liquid supply source such as a utility facility, a third liquid production facility, or a third liquid storage facility provided in the factory. The third liquid supply system 230 supplies the third liquid to the third pipes 130 of the multiple processing units 2 under the control of the control device 900.

[0032] The transfer apparatus 800 has a transfer robot that transfers the substrate W. The transfer robot of the transfer apparatus 800 transfers the substrate W between another transfer robot provided outside the substrate processing apparatus 1 and the plurality of processing units 2 under the control of a control device 900. The control device 900 controls the operations of the plurality of processing units 2, the first liquid supply system 210, the second liquid supply system 220, the third liquid supply system 230, and each part of the transfer apparatus 800. The control device 900 will be described in detail later.

[0033] <2> Configuration of electric valves 113, 123, and 133 The motorized valves 113, 123, and 133 in Fig. 1 are motor needle valves having the same configuration. A specific example of the configuration of the motorized valve 113 will be described below, representing the three motorized valves 113, 123, and 133. Fig. 2 is a schematic cross-sectional view for explaining one example of the configuration of the motorized valve 113 in Fig. 1.

[0034] 2, the motor-operated valve 113 includes a main body 21, a valve element 26, an electric motor 27, a conversion mechanism 28, and a rotation detection unit 29. The main body 21 is a valve box and has an inlet port 22 and an outlet port 23. A first pipe 110 is connected to the inlet port 22 and the outlet port 23.

[0035] A flow path space connecting the inlet port 22 and the outlet port 23 is formed inside the main body 21. A valve seat 25 forming part of the flow path space is also provided inside the main body 21. The valve seat 25 has an annular shape and surrounds a circular opening 24 for guiding the treatment liquid flowing from the inlet port 22 to the outlet port 23. A valve element 26 is also provided inside the main body 21. The valve element 26 is provided inside the main body 21 so as to be movable in a closing direction approaching the valve seat 25 and in an opening direction moving away from the valve seat 25, as indicated by the white arrows in FIG. 2 .

[0036] Valve element 26 has edge portion 26f and conical portion 26c. Edge portion 26f corresponds to valve seat 25 and has the same annular shape as valve seat 25. Conical portion 26c has a conical shape and is formed to protrude in one direction from edge portion 26f on line VL that passes through the center of valve seat 25 (the center of opening 24). Valve element 26 is arranged so that at least a portion of conical portion 26c is located within opening 24.

[0037] When the valve element 26 is spaced from the valve seat 25, the valve element 26 moves in the closing direction, causing the edge 26f of the valve element 26 to come into contact with the valve seat 25. In this case, the opening 24 is closed, blocking communication between the inlet port 22 and the outlet port 23. This causes the motor-operated valve 113 to be in a closed state.

[0038] On the other hand, when the valve element 26 is in contact with the valve seat 25, the valve element 26 moves in the opening direction, and the edge 26f of the valve element 26 moves away from the valve seat 25. In this case, at least a portion of the opening 24 is opened, thereby ensuring communication between the inlet port 22 and the outlet port 23. This puts the motor-operated valve 113 in an open state.

[0039] In the motor-operated valve 113, the area occupied by the cone portion 26c in the opening 24 changes depending on the position of the valve element 26. That is, the cross section of the flow path of the treatment liquid inside the main body 21 changes. The motor-operated valve 113 adjusts the position of the valve element 26 with respect to the valve seat 25. This makes it possible to adjust the flow rate of the treatment liquid flowing from the inlet port 22 to the outlet port 23.

[0040] In this embodiment, the electric motor 27 is, for example, a stepping motor that operates in response to an input of a drive pulse. The electric motor 27 is used as a power source for adjusting the open / closed state of the motor-operated valve 113 by moving the valve element 26 via a valve stem (not shown).

[0041] The conversion mechanism 28 includes, for example, a rack and pinion mechanism, and converts the rotational force generated in the electric motor 27 into a force that moves the valve element 26 in the closing or opening direction. The conversion mechanism 28 also converts a force acting on the valve element 26 in the closing or opening direction into a force that rotates the rotary shaft of the electric motor 27 in one direction or the opposite direction.

[0042] Drive pulses are input to the electric motor 27 from a drive unit (not shown) under the control of the control device 900 in Fig. 1. In this case, the rotary shaft of the electric motor 27 rotates in one direction or the opposite direction by an angle corresponding to the number of input drive pulses.

[0043] The rotation detection unit 29 is, for example, a rotary encoder, which detects the amount of rotation of a rotor (not shown) of the electric motor 27 and outputs a signal indicating the amount of rotation. In this case, the amount of movement of the valve element 26 relative to the valve seat 25 can be determined based on the amount of rotation detected by the rotation detection unit 29. This makes it possible to adjust the opening of the electric valve 113.

[0044] In this embodiment, the closing direction and the opening direction of the valve element 26 are opposite directions on a common straight line VL. In the following description, when there is no need to distinguish between the closing direction of the valve element 26 and the opening direction of the valve element 26, the closing direction and the opening direction of the valve element 26 will be collectively referred to simply as the opening / closing direction.

[0045] <3> Variation and uniformity of response performance among multiple electric valves As explained in the summary of the invention, there is variation in the shapes of the valve seats, valve bodies, and other components of multiple motorized valves (e.g., multiple motorized valves 113 in multiple processing units 2) manufactured to common specifications. As a result, there is variation in the response performance to operation commands among multiple motorized valves that share a common role in multiple processing units 2.

[0046] FIG. 3 is a diagram illustrating variations in response characteristics among multiple motor-operated valves 113 in multiple processing units 2. For example, the motor-operated valve 113 is designed to have a predetermined initial position in the opening / closing direction of the valve disc 26, at which the valve disc 26 is in contact with the valve seat 25. Therefore, in the motor-operated valve 113 of each processing unit 2, ideally, the valve disc 26 should close the opening 24 of the valve seat 25 when the valve disc 26 is in the initial position. Furthermore, in each motor-operated valve 113, when input of a drive pulse begins with the valve disc 26 in the initial position, ideally, the opening 24 of the valve seat 25 should be opened from the moment input of the drive pulse begins. Note that information about the initial position is stored in the control device 900 of FIG. 1 by, for example, a user.

[0047] The ideal response characteristics of the motor-operated valve 113 are shown in a graph in the upper part of Fig. 3. In the graph in the upper part of Fig. 3, the vertical axis represents the flow rate of the processing liquid (first liquid) flowing through the motor-operated valve 113, and the horizontal axis represents time. Furthermore, as the ideal response characteristics of the motor-operated valve 113, the change in the flow rate flowing through the motor-operated valve 113 is shown by a thick solid line. In this example, it is assumed that the valve disc 26 of the motor-operated valve 113 is in its initial position from time t0 to time t1. In this case, ideally, the valve disc 26 closes the opening 24 of the valve seat 25. As a result, the flow rate of the processing liquid flowing through the motor-operated valve 113 is zero during the period from time t0 to time t1.

[0048] It is assumed that drive pulses are input to the motor-operated valve 113 at a constant cycle from time t1. In this case, the valve element 26 of the motor-operated valve 113 moves in the opening direction every time a drive pulse is input. As a result, the flow rate of the treatment liquid flowing through the motor-operated valve 113 increases at a substantially constant rate from time t1, and reaches a predetermined target flow rate α at time t2.

[0049] In the following description, the period from when the input of drive pulses to the motor-operated valve 113 begins until the flow rate of the treatment liquid flowing through the motor-operated valve 113 reaches the target flow rate α is referred to as the flow rate response period fp. In other words, the period from when the motor-operated valve 113 receives an operation command until the flow rate of the treatment liquid flowing through the motor-operated valve 113 reaches the target flow rate α is referred to as the flow rate response period fp.

[0050] Here, in the motor-operated valve 113, there are cases where the valve element 26 in the initial position does not close the opening 24 of the valve seat 25 due to variations in the shapes of the various parts of the motor-operated valve 113. An example of the variation in the response characteristics of the motor-operated valve 113 is shown in the graph in the middle of Fig. 3. In the graph in the middle of Fig. 3, similar to the graph in the top of Fig. 3, the vertical axis represents the flow rate of the processing liquid flowing through the motor-operated valve 113, and the horizontal axis represents time. Furthermore, as an example of the variation in the response characteristics of the motor-operated valve 113, the change in the flow rate of the processing liquid flowing through the motor-operated valve 113 is shown by a thick solid line. Furthermore, the ideal response characteristics of the motor-operated valve 113 are shown by a dotted line.

[0051] When the valve body 26 is in the initial position and does not block the opening 24 of the valve seat 25, the treatment liquid flows through the electric valve 113 at a flow rate β due to shape variations during the period from time t0 to time t1.

[0052] 3, when drive pulses are sequentially input to the motor-operated valve 113 at a constant cycle from time t1, the valve element 26 moves in the opening direction with each input of a drive pulse, causing the flow rate of the treatment liquid flowing through the motor-operated valve 113 to increase at a substantially constant rate from time t1, and reach the target flow rate α at time t11, which is before time t2.

[0053] In this example, as described above, when the valve element 26 is in the initial position, the treatment liquid at the flow rate β is already flowing through the motor-operated valve 113. Therefore, the flow rate response period fp is shorter by the period dt1 than in the example of ideal response characteristics.

[0054] On the other hand, in the motor-operated valve 113, due to variations in the shapes of the various parts, even if a drive pulse is applied to the motor-operated valve 113 when the valve element 26 is in the initial position, the opening 24 of the valve seat 25 may not be opened for a predetermined period of time. The lower part of Fig. 3 shows a graph illustrating another example of the variation in the response characteristics of the motor-operated valve 113. In the graph in the lower part of Fig. 3, as in the graph in the upper part of Fig. 3, the vertical axis represents the flow rate of the treatment liquid flowing through the motor-operated valve 113, and the horizontal axis represents time. Furthermore, as another example of the variation in the response characteristics of the motor-operated valve 113, the change in the flow rate of the treatment liquid flowing through the motor-operated valve 113 is shown by a thick solid line. Furthermore, the ideal response characteristics of the motor-operated valve 113 are shown by a dotted line.

[0055] In this example, the valve element 26 in the initial position closes the opening 24 of the valve seat 25. As a result, the flow rate of the processing liquid flowing through the electric valve 113 is 0 between time t0 and time t1.

[0056] 3, drive pulses are then input to the motor-operated valve 113 at regular intervals from time t1. In the motor-operated valve 113 of this example, even if drive pulses are input, the valve element 26 does not open the opening 24 of the valve seat 25 during the period from time t1 to time t12, which is before time t2. In this case, the flow rate of the processing liquid flowing through the motor-operated valve 113 is maintained at 0 during the period from time t1 to time t12.

[0057] At time t12, the valve element 26 opens the opening 24 of the valve seat 25. In this case, the flow rate of the treatment liquid flowing through the motor-operated valve 113 increases at a substantially constant rate from time t12, and reaches the predetermined target flow rate α at time t21, which is after time t2.

[0058] In this example, as described above, even if drive pulses are sequentially applied to the motor-operated valve 113 with the valve element 26 in the initial position, the treatment liquid does not flow through the motor-operated valve 113 for a predetermined period. Therefore, the flow rate response period fp is longer by the period dt2 than in the example of ideal response characteristics.

[0059] As described above, if there is variation in response characteristics among the multiple motor-operated valves 113 in the multiple processing units 2, variation will occur in the timing at which the first liquid starts to be supplied to the substrate W even when the first liquid is supplied to the substrate W under common conditions. In this case, variation will also occur in the period during which the first liquid is supplied to the substrate W. Therefore, in this embodiment, in order to match the flow rate response periods fp of the multiple motor-operated valves 113 that play the same role in the multiple processing units 2, for example, one motor-operated valve 113 is used as a reference to determine the positions (standby positions) at which the valve bodies 26 of the other motor-operated valves 113 should be placed during standby.

[0060] For example, as described above, the flow rate response period fp of the motor-operated valve 113 corresponding to the middle section of Fig. 3 is shorter by the period dt1 than the flow rate response period fp of the ideal motor-operated valve 113 corresponding to the upper section of Fig. 3. Therefore, for the motor-operated valve 113 corresponding to the middle section of Fig. 3, the standby position is determined to be a position shifted in the closing direction from the initial position by a distance corresponding to the period dt1.

[0061] The amount of movement of the valve disc 26 in the opening / closing direction per drive pulse is determined according to the specifications of the conversion mechanism 28 and is known. Therefore, the distance corresponding to the above-mentioned period dt1 can be calculated based on the amount of movement of the valve disc 26 in the opening / closing direction per drive pulse and the number of drive pulses applied to the motor-operated valve 113 during the period dt1. In this case, the response characteristic of the motor-operated valve 113 corresponding to the middle section of Figure 3 can be advanced by the period dt1. This allows the flow rate response period fp of the motor-operated valve 113 corresponding to the middle section of Figure 3 to coincide with the flow rate response period fp of the motor-operated valve 113 corresponding to the upper section of Figure 3.

[0062] As described above, the flow rate response period fp of the motor-operated valve 113 corresponding to the lower part of Fig. 3 is longer by the period dt2 than the flow rate response period fp of the ideal motor-operated valve 113 corresponding to the upper part of Fig. 3. Therefore, in the motor-operated valve 113 corresponding to the lower part of Fig. 3, the position in the opening / closing direction where the valve element 26 should wait (waiting position) is determined to be a position shifted in the opening direction by a distance corresponding to the period dt2 from the initial position.

[0063] The distance corresponding to the above-mentioned period dt2 can be calculated based on the amount of movement of the valve element 26 in the opening / closing direction per drive pulse and the number of drive pulses applied to the motor-operated valve 113 during period dt2. In this case, the response characteristic of the motor-operated valve 113 corresponding to the lower part of Fig. 3 can be delayed by the period dt2. This allows the flow rate response period fp of the motor-operated valve 113 corresponding to the lower part of Fig. 3 to coincide with the flow rate response period fp of the motor-operated valve 113 corresponding to the upper part of Fig. 3.

[0064] In the above description, the response characteristics of the motor-operated valve 113 corresponding to the middle section of FIG. 3 and the motor-operated valve 113 corresponding to the lower section of FIG. 3 are matched to the response characteristics (ideal response characteristics) of the motor-operated valve 113 corresponding to the upper section of FIG. 3. However, in the substrate processing apparatus 1 according to this embodiment, it is sufficient that the flow rate response periods fp of multiple motor-operated valves that perform the same role in multiple processing units 2 are matched. Therefore, the response characteristics of the motor-operated valve 113 corresponding to the upper section of FIG. 3 and the motor-operated valve 113 corresponding to the lower section of FIG. 3 may be matched to the response characteristics of the motor-operated valve 113 corresponding to the middle section of FIG. 3. Alternatively, the response characteristics of the motor-operated valve 113 corresponding to the upper section of FIG. 3 and the motor-operated valve 113 corresponding to the middle section of FIG. 3 may be matched to the response characteristics of the motor-operated valve 113 corresponding to the lower section of FIG. 3.

[0065] In this embodiment, one processing unit 2 is selected from the multiple processing units 2 as a reference processing unit 2G in order to match the response characteristics of the three motor-operated valves 113, 123, and 133 among the multiple processing units 2. Then, the response characteristics of the motor-operated valves 113, 123, and 133 of the processing units 2 other than the reference processing unit 2G are matched to the response characteristics of the corresponding motor-operated valves 113, 123, and 133 of the reference processing unit 2G. In other words, the standby positions of the valve bodies 26 are determined for the motor-operated valves 113, 123, and 133 of the processing units 2 other than the reference processing unit 2G.

[0066] The reference processing unit 2G can be selected, for example, as follows: A common substrate processing is performed on a plurality of substrates W in a plurality of processing units 2 of the substrate processing apparatus 1. Then, the processing states of the plurality of substrates W are confirmed, and the processing unit 2 corresponding to the substrate W in the most suitable processing state is designated as the reference processing unit 2G. In other words, of the plurality of processing units 2, the processing unit 2 with the highest substrate processing performance is designated as the reference processing unit 2G. Alternatively, the reference processing unit 2G may be determined according to a predetermined method. The predetermined method may be to designate a processing unit 2 located at a predetermined location within the equipment casing CA of the substrate processing apparatus 1 as the reference processing unit 2G.

[0067] <4> Control system of substrate processing apparatus 1 The control system of the substrate processing apparatus 1 will be described together with the configuration of the control device 900 in FIG. 1. FIG. 4 is a block diagram showing the configuration of the control system of the substrate processing apparatus 1 in FIG. 1. As shown in FIG. 4, the control device 900 includes a CPU (Central Processing Unit) 901, a RAM (Random Access Memory) 902, a ROM (Read Only Memory) 903, and a storage device 904. The RAM 902 is used as a work area for the CPU 901. The ROM 903 stores a system program. The storage device 904 includes a storage medium such as a hard disk or semiconductor memory, and stores a liquid processing program. The liquid processing program is a program for supplying first, second, and third liquids to the substrate W at predetermined flow rates in each processing unit 2.

[0068] The storage device 904 also stores a reference measurement program and a standby position determination program. The reference measurement program is a program for a reference measurement process that measures the flow rate response period fp for each of the motor-operated valves 113, 123, and 133 of the reference processing unit 2G when the reference processing unit 2G has been determined in advance from among the plurality of processing units 2. The standby position determination program is a program for a standby position determination process that determines the standby position of the valve element 26 for each of the motor-operated valves 113, 123, and 133 of the processing units 2 other than the reference processing unit 2G. Details of the reference measurement process and the standby position determination process will be described later.

[0069] Furthermore, the storage device 904 stores reference unit information, initial position information, reference information, and standby position information. The reference unit information is information (identification information) for identifying the processing unit 2 determined as the reference processing unit 2G among the multiple processing units 2 in the substrate processing apparatus 1 from the other processing units 2. The reference unit information is generated, for example, by a user operating the operation unit 600, which will be described later. The initial position information is information indicating the initial positions of the valve bodies 26 of the motor-operated valves 113, 123, and 133 of each processing unit 2.

[0070] The reference information is information on the flow rate response periods fp of the motor-operated valves 113, 123, and 133 of the reference processing unit 2G. The reference information is generated by performing a reference measurement process. The standby position information is information indicating the standby positions of the valve bodies 26 of the motor-operated valves included in the processing units 2 other than the reference processing unit 2G. The standby position information is generated by performing a standby position determination process.

[0071] Fig. 5 is a diagram showing an example of standby position information. In this example, it is assumed that a unit number is assigned to each of the multiple processing units 2 in Fig. 1. Fig. 5 shows standby position information for processing units 2 with unit numbers "1" and "2."

[0072] In the following description, when distinguishing between the three motor-operated valves 113, 123, and 133 provided in one processing unit 2, the motor-operated valves 113, 123, and 133 will be referred to as a first motor-operated valve, a second motor-operated valve, and a third motor-operated valve, as appropriate.

[0073] 5, for the processing unit 2 with unit number "1," the standby positions of the valve elements 26 of the first motorized valve, the second motorized valve, and the third motorized valve are determined as "p11," "p12," and "p13." Also, for the processing unit 2 with unit number "2," the standby positions of the valve elements 26 of the first motorized valve, the second motorized valve, and the third motorized valve are determined as "p21," "p22," and "p23."

[0074] As will be described later, the standby positions of the valve discs 26 of the motor-operated valves 113, 123, and 133 are determined only for the processing units 2 other than the reference processing unit 2G. Therefore, the standby position information does not include information on the standby position corresponding to the reference processing unit 2G. In the example of FIG. 5, as indicated by the outlined arrow, the processing unit 2 with unit number "3" is assumed to be the reference processing unit 2G. Therefore, for the processing unit 2 with unit number "3," the standby positions of the valve discs 26 of the first motor-operated valve, the second motor-operated valve, and the third motor-operated valve are left blank.

[0075] 4 may be provided in a state stored on a recording medium such as CD-ROM 909 and installed in ROM 903 or storage device 904. Alternatively, the liquid processing program, reference measurement program, and standby position determination program may be distributed from a server external to substrate processing apparatus 1 via a communication network and installed in ROM 903 or storage device 904.

[0076] The CPU 901 executes any one of the liquid processing program, the reference measurement program, and the standby position determination program to control the operation of each part of the substrate processing apparatus 1. Specifically, the control device 900 controls the first liquid supply system 210. This causes a first liquid to be supplied to the first pipe 110 of one or more of the processing units 2. The control device 900 also controls the second liquid supply system 220. This causes a second liquid to be supplied to the second pipe 120 of one or more of the processing units 2. The control device 900 also controls the third liquid supply system 230. This causes a third liquid to be supplied to the third pipe 130 of one or more of the processing units 2.

[0077] Furthermore, the control device 900 controls the operation of each part of the multiple processing units 2. For example, the control device 900 causes the substrate holding device 3 to hold the substrate W that is being loaded into each processing unit 2. The control device 900 also causes the substrate holding device 3 of each processing unit 2 to release the substrate W from its holding state in order to unload the substrate W from the substrate processing apparatus 1. The control device 900 also rotates the substrate W held by the substrate holding device 3 at a preset speed.

[0078] Furthermore, the control device 900 controls the on-off valves 112, 122, 132 and the electric valves 113, 123, 133 when supplying various processing liquids (first liquid, second liquid, and third liquid) to the substrate W in each processing unit 2. Furthermore, when adjusting the flow rates of the various processing liquids supplied to the substrate W in each processing unit 2, the control device 900 adjusts the opening degrees of the electric valves 113, 123, 133 based on the flow rate detection results by the flow rate detection units 114, 124, 134.

[0079] 4, the substrate processing apparatus 1 further includes an operation unit 600. The operation unit 600 includes a keyboard and a pointing device, and is configured to be operable by a user. By operating the operation unit 600, the user can designate one of the multiple processing units 2 as a reference processing unit 2G. In this case, the control device 900 generates identification information of the designated processing unit 2 as reference unit information and stores it in the storage device 904.

[0080] In addition to the above, the user can also set, as processing conditions, target flow rates of the first liquid, the second liquid, and the third liquid to be supplied to the substrate W during liquid processing, by operating the operation unit 600.

[0081] <5> Reference Measurement Processing 6 is a flowchart showing an example of the reference measurement process. As described above, the reference measurement process is a process for measuring the flow rate response period fp for each of the motor-operated valves 113, 123, and 133 of the reference processing unit 2G. This process is performed, for example, by the CPU 901 of the control device 900 executing a reference measurement program stored in the storage device 904 in response to an execution command from the operation unit 600.

[0082] In the initial state, it is assumed that reference unit information is set in advance in the substrate processing apparatus 1. That is, it is assumed that the reference processing unit 2G has been determined. It is also assumed that in the reference processing unit 2G, the valve bodies 26 of the motorized valves 113, 123, and 133 are placed in predetermined initial positions. It is also assumed that in the reference processing unit 2G, all the on-off valves 112, 122, and 132 are in a closed state. It is also assumed that the control device 900 has a built-in timer.

[0083] First, the control device 900 selects one motor-operated valve, of the plurality of motor-operated valves 113, 123, 133 of the reference processing unit 2G, for which the flow rate response period fp has not been measured (step S11).

[0084] Next, the control device 900 issues a command to the motor-operated valve selected in step S11 to move the valve element 26 in the opening direction (step S12). As a result, in the motor-operated valve that has received the command, drive pulses are input to the electric motor 27 at a constant cycle. The control device 900 also transitions the on-off valve corresponding to the motor-operated valve selected in step S11 from a closed state to an open state (step S13). Furthermore, the control device 900 resets the timer and starts measuring time with the timer at the same or approximately the same timing as the processing of steps S12 and S13 (step S14).

[0085] Next, the control device 900 determines whether the flow rate of the processing liquid flowing through the motorized valve selected in step S11 has reached a predetermined target flow rate α based on the detection result of the flow rate detection unit corresponding to the motorized valve (step S15).

[0086] In step S15, if the flow rate of the processing liquid flowing through the motor-operated valve has not reached the target flow rate α, the process of step S15 is repeated. On the other hand, if the flow rate of the processing liquid flowing through the motor-operated valve reaches the target flow rate α, the control device 900 stops measuring time and stores the elapsed time from the start of measurement to the present time in the memory device 904 as the flow rate response period fp of the selected motor-operated valve (step S16). The information stored in the memory device 904 in step S16 becomes the above-mentioned reference information.

[0087] Next, the control device 900 moves the valve element 26 of the motor-operated valve selected in step S11 in the closing direction to the initial position (step S17). Also, the control device 900 transitions the on-off valve corresponding to the motor-operated valve selected in step S11 from the open state to the closed state (step S18).

[0088] Thereafter, the control device 900 determines whether or not the flow rate response period fp has been measured for all the motor-operated valves 113, 123, and 133 of the reference processing unit 2G (step S19). This determination can be made, for example, by reading the reference information stored in the storage device 904.

[0089] In step S19, if the flow rate response period fp has not been measured for all the motor-operated valves 113, 123, and 133 of the reference processing unit 2G, the process returns to step S11. On the other hand, if the flow rate response period fp has been measured for all the motor-operated valves 113, 123, and 133 of the reference processing unit 2G, the reference measurement process ends.

[0090] <6> Waiting position determination process 7 is a flowchart showing an example of the standby position determination process. As described above, the standby position determination process is a process for determining the standby position of the valve element 26 for each of the motor-operated valves 113, 123, and 133 of the processing units 2 other than the reference processing unit 2G. This process is performed by the CPU 901 of the control device 900 executing a standby position determination program stored in the storage device 904 in response to an execution command from the operation unit 600. Furthermore, the standby position determination process of this example is assumed to be executed sequentially and individually for the processing units 2 other than the reference processing unit 2G.

[0091] In an initial state, it is assumed that reference unit information and reference information are set in advance in the substrate processing apparatus 1. That is, it is assumed that the reference processing unit 2G is determined and the flow rate response periods fp are measured for the multiple motorized valves 113, 123, and 133 of the reference processing unit 2G.

[0092] In addition, in the processing units 2 other than the reference processing unit 2G, the valve bodies 26 of the motor-operated valves 113, 123, and 133 are assumed to be placed in predetermined initial positions. In addition, in the other processing units 2, all the on-off valves 112, 122, and 132 are assumed to be in a closed state. Furthermore, the control device 900 is assumed to have a built-in timer.

[0093] First, the control device 900 selects one motorized valve, the standby position of which has not been determined, from among the plurality of motorized valves 113, 123, 133 of the other processing units 2 (step S21).

[0094] Next, the control device 900 performs the same processes as steps S12 to S15 of the reference measurement process in Fig. 6. Specifically, the control device 900 issues a command to the motorized valve selected in step S21 to move the valve element 26 in the opening direction (step S22). As a result, in the motorized valve that received the command, drive pulses are input to the electric motor 27 at a constant interval. The control device 900 also transitions the on-off valve corresponding to the motorized valve selected in step S21 from a closed state to an open state (step S23). Furthermore, the control device 900 resets the timer and starts measuring time with the timer at the same or approximately the same timing as the processes of steps S22 and S23 (step S24).

[0095] Next, the control device 900 determines whether the flow rate of the processing liquid flowing through the motorized valve selected in step S21 has reached a predetermined target flow rate α based on the detection result of the flow rate detection unit corresponding to the motorized valve (step S25).

[0096] In step S25, if the flow rate of the processing liquid flowing through the motor-operated valve has not reached the target flow rate α, the process of step S25 is repeated. On the other hand, when the flow rate of the processing liquid flowing through the motor-operated valve reaches the target flow rate α, the control device 900 stops measuring the time (step S26).

[0097] Next, the control device 900 determines the elapsed time from the start of measurement to the present time as the flow rate response period fp of the selected motorized valve, and calculates the difference between the flow rate response period fp obtained by this measurement and the corresponding reference information (step S27). More specifically, the control device 900 calculates the difference between the flow rate response period fp of the selected motorized valve and the flow rate response period fp of the corresponding motorized valve in the reference information. This difference corresponds to, for example, periods dt1 and dt2 in FIG. 3.

[0098] Next, the control device 900 determines the standby position of the valve element 26 based on the calculated difference so that the flow rate response period fp of the selected motorized valve coincides with the flow rate response period fp of the corresponding motorized valve of the reference processing unit 2G (step S28). The control device 900 also stores the determined standby position in the storage device 904 as the standby position of the valve element 26 of the selected motorized valve (step S29). The information stored in the storage device 904 in step S29 becomes the above-mentioned standby position information.

[0099] Next, the control device 900 moves the valve element 26 of the motor-operated valve selected in step S21 in the closing direction to the determined standby position (step S30). Also, the control device 900 transitions the on-off valve corresponding to the motor-operated valve selected in step S21 from the open state to the closed state (step S31).

[0100] Thereafter, the control device 900 determines whether or not the standby positions of the valve bodies 26 have been determined for all the motor-operated valves 113, 123, and 133 of the other processing units 2 that are currently being processed (step S32). This determination can be made, for example, by reading the standby position information stored in the storage device 904.

[0101] In step S32, if the standby positions of the valve elements 26 have not been determined for all the motor-operated valves 113, 123, and 133 of the other processing units 2, the process returns to step S21. On the other hand, if the standby positions of the valve elements 26 have been determined for all the motor-operated valves 113, 123, and 133 of the other processing units 2, the standby position determination process for the other processing units 2 ends. Thereafter, the above standby position determination process is repeated until the standby position information for all the other processing units 2 except for the reference processing unit 2G is generated.

[0102] After the above-described reference measurement process and standby position determination process are performed, the control device 900 performs liquid processing on the substrate W by executing a liquid processing program in accordance with a processing command for the substrate W from the operation unit 600 or a predetermined schedule. In this case, in each of the motorized valves 113, 123, and 133 of the reference processing unit 2G, the valve element 26 is held in its initial position during standby. In addition, in each of the motorized valves 113, 123, and 133 of the other processing units 2, the valve element 26 is held in its standby position during standby. Then, when the processing liquid is supplied to the substrate W, feedback control is performed based on the target flow rate α and the detection results of the flow rate detectors 114, 124, and 134.

[0103] <7> effect (a) In the substrate processing apparatus 1, for example, before liquid processing is performed on a substrate W, one of the processing units 2 is determined as a reference processing unit 2G. Then, a reference measurement process is performed. In the reference measurement process, a flow rate response period fp is measured for each of the motor-operated valves 113, 123, and 133 of the reference processing unit 2G. The measured flow rate response period fp of each of the motor-operated valves 113, 123, and 133 is stored in the storage device 904 as reference information.

[0104] Thereafter, a standby position determination process is performed. In the standby position determination process, the flow rate response period fp is measured for each of the motor-operated valves 113, 123, and 133 of the other processing units 2. The difference between the flow rate response periods fp of the corresponding motor-operated valves between the other processing units 2 and the reference processing unit 2G is calculated. Based on the calculated difference, the standby positions of the valve bodies 26 of the motor-operated valves 113, 123, and 133 of the other processing units are determined so that the flow rate response periods fp are the same.

[0105] As described above, after the standby position determination process is performed, in the reference processing unit 2G, the valve disc 26 of each of the motor-operated valves 113, 123, and 133 is placed at the initial position during standby when no liquid processing is being performed on a substrate W. Meanwhile, in the other processing units 2, the valve disc 26 of each of the motor-operated valves 113, 123, and 133 is placed at a predetermined standby position during standby when no liquid processing is being performed on a substrate W. This uniformizes the flow rate response period fp for multiple motor-operated valves that play a common role in multiple processing units 2. As a result, it becomes possible to supply processing liquid to multiple substrates W under uniform conditions using multiple motor-operated valves.

[0106] When multiple processing units 2 are used, non-uniformity in liquid processing may occur among the multiple processing units 2 due to layout factors such as differences in environmental temperature or supply pressure of the processing liquid. With the above configuration, the supply of processing liquid from the multiple nozzles to the multiple substrates W is accurately made uniform. Therefore, non-uniformity in liquid processing caused by the layout of the multiple processing units 2 can also be eliminated.

[0107] (b) In the reference processing unit 2G, even when the valve element 26 of each of the motor-operated valves 113, 123, and 133 is in the initial position, the motor-operated valve is not necessarily in a closed state. Similarly, in the other processing units 2, even when the valve element 26 of each of the motor-operated valves 113, 123, and 133 is in the standby position, the motor-operated valve is not necessarily in a closed state. Therefore, in the substrate processing apparatus 1, the on-off valves 112, 122, and 132 corresponding to the motor-operated valves 113, 123, and 133 of each processing unit 2 are provided downstream of the motor-operated valves 113, 123, and 133.

[0108] According to this configuration, by closing the corresponding on-off valves 112, 122, 132 while the motor-operated valves 113, 123, 133 are on standby, it is possible to prevent the processing liquid from flowing through the motor-operated valves at unintended timing. Furthermore, by opening the corresponding on-off valves 112, 122, 132 while the motor-operated valves 113, 123, 133 are operating to the open state, it is possible to supply the processing liquid to the substrate W through the motor-operated valves with high accuracy.

[0109] (c) In the reference measurement process, the motor-operated valves 113, 123, and 133 of the reference processing unit 2G actually operate. As a result, the flow rate response period fp is measured as reference information and stored in the storage device 904. Therefore, highly reliable reference information can be obtained without requiring the user to perform complicated setting operations.

[0110] (d) Furthermore, in the standby position determination process, each of the motorized valves 113, 123, and 133 of the processing units 2 other than the reference processing unit 2G actually operates. This measures the flow rate response period fp corresponding to the motorized valve when the valve element 26 is located at the initial position. The standby position is determined based on the difference between the measurement result and the flow rate response period fp of the corresponding reference information. Therefore, the standby position of each of the motorized valves 113, 123, and 133 is appropriately determined without requiring the user to perform complicated setting work.

[0111] 2. Second embodiment The substrate processing apparatus 1 according to the second embodiment will be described below in terms of differences from the substrate processing apparatus 1 according to the first embodiment. The response performance of an electric valve attached to one pipe to an operation command tends to differ depending on the flow rate of the processing liquid flowing through the electric valve. Therefore, in the substrate processing apparatus 1 according to this embodiment, standby position information stored in the storage device 904 is determined for each target flow rate.

[0112] Fig. 8 is a diagram showing an example of standby position information according to the second embodiment. In this example, similar to the example of Fig. 5, it is assumed that a unit number is assigned to each of the multiple processing units 2. Furthermore, Fig. 8 shows standby position information for processing units 2 with unit numbers "1" and "2."

[0113] 8, for the processing unit 2 with unit number "1," the standby positions of the valve disc 26 of each motor-operated valve are determined to correspond to three target flow rates "fr1," "fr2," and "fr3," respectively. Also, for the processing unit 2 with unit number "2," the standby positions of the valve disc 26 of each motor-operated valve are determined to correspond to three target flow rates "fr1," "fr2," and "fr3," respectively. Note that in this example, the standby positions of the valve disc 26 of each motor-operated valve are determined to correspond to three target flow rates, but four or more standby positions may be determined for the valve disc 26 of each motor-operated valve to correspond to four or more target flow rates.

[0114] In this embodiment, for each of a plurality of types of target flow rates, a standby position of the valve disc 26 of each of the motor-operated valves 113, 123, 133 of the other processing units 2 is determined. Therefore, in the reference measurement process, the flow rate response period fp of each of the motor-operated valves 113, 123, 133 in the reference processing unit 2G is measured so as to correspond to each of a plurality of types of target flow rates. Furthermore, in the standby position determination process, the standby position of the valve disc 26 of each of the motor-operated valves 113, 123, 133 in the other processing units 2 is determined so as to correspond to each of a plurality of types of target flow rates.

[0115] 8 is stored in the storage device 904, the control device 900 adjusts the standby positions of the valve elements 26 of the motor-operated valves 113, 123, and 133 based on the standby position information and the target flow rate. This makes it possible to perform more uniform liquid processing among the multiple processing units 2 for each target flow rate.

[0116] 3. Third Embodiment The substrate processing apparatus 1 according to the third embodiment will be described below in terms of differences from the substrate processing apparatus 1 according to the first embodiment. The response performance of an electric valve attached to one pipe to an operation command tends to differ depending on the pressure (supply pressure) of the processing liquid supplied to the electric valve. Therefore, in the substrate processing apparatus 1 according to this embodiment, the standby position information stored in the storage device 904 is determined for each supply pressure. Furthermore, the substrate processing apparatus 1 according to this embodiment is provided with a configuration for detecting the supply pressure corresponding to each electric valve.

[0117] 9 is a block diagram showing the configuration of a substrate processing apparatus according to a third embodiment. As shown in FIG. 9, in the substrate processing apparatus 1 according to this embodiment, a pressure detection unit 115 is provided in the first pipe 110 of each processing unit 2. The pressure detection unit 115 is located upstream of the flow rate detection unit 114. A pressure detection unit 125 is provided in the second pipe 120. The pressure detection unit 125 is located upstream of the flow rate detection unit 124. A pressure detection unit 135 is provided in the third pipe 130. The pressure detection unit 135 is located upstream of the flow rate detection unit 134. Each of the pressure detection units 115, 125, and 135 is a pressure gauge that detects the pressure of the processing liquid in the pipe in which the pressure detection unit is provided.

[0118] Fig. 10 is a diagram showing an example of standby position information according to the third embodiment. In this example, similar to the example of Fig. 5, it is assumed that a unit number is assigned to each of the multiple processing units 2. Furthermore, Fig. 10 shows standby position information for the processing unit 2 with unit number "1".

[0119] 10, for the processing unit 2 with unit number "1," the standby position of the valve element 26 of each motor-operated valve is determined for each combination of three target flow rates "fr1," "fr2," and "fr3" and two supply pressure levels "high" and "low." In this example, the supply pressure level "high" represents a range of pressure equal to or greater than a predetermined reference pressure value, and the supply pressure level "low" represents a range of pressure lower than the predetermined reference pressure value.

[0120] As described above, in the example of Fig. 10, the standby position of the valve element 26 of each motor-operated valve is determined according to a combination of three target flow rates and two supply pressure levels. However, the standby position of the valve element 26 of each motor-operated valve may be determined according to a combination of four or more target flow rates and three or more supply pressure levels.

[0121] In this embodiment, for each of a plurality of combinations between target flow rates and supply pressure levels, a standby position of the valve disc 26 of each of the motor-operated valves 113, 123, 133 of the other processing units 2 is determined. Therefore, in the reference measurement process, the flow rate response period fp of each of the motor-operated valves 113, 123, 133 in the reference processing unit 2G is measured so as to correspond to each of a plurality of combinations between target flow rates and supply pressure levels. Furthermore, in the standby position determination process, the standby position of the valve disc 26 of each of the motor-operated valves 113, 123, 133 in the other processing units 2 is determined so as to correspond to each of a plurality of combinations between target flow rates and supply pressure levels.

[0122] There is a certain degree of correlation between the response performance of an electric valve to an operation command and the supply pressure of the electric valve. This correlation can be derived, for example, by simulation or experiment. If the correlation is known, the flow rate response period fp may be measured for only some of the multiple combinations of target flow rates and supply pressure levels during the reference measurement process. Furthermore, in the standby position determination process, the standby positions of the valve bodies 26 of the electric valves 113, 123, and 133 in the other processing units 2 may be determined for only these some combinations. This makes it possible to calculate standby position information for other combinations based on the known correlation information and the standby position information determined for the some of the combinations.

[0123] 10 is stored in the storage device 904, the control device 900 adjusts the standby positions of the valve elements 26 of the motor-operated valves 113, 123, and 133 based on the standby position information, the target flow rate, and the detection results of the pressure detection units 115, 125, and 135. This makes it possible to perform more uniform liquid processing among the multiple processing units 2 for each combination of the target flow rate and supply pressure level.

[0124] In this embodiment, it is sufficient that standby positions corresponding to a plurality of supply pressure levels are determined for each of the motor-operated valves 113, 123, and 133. In other words, in this example, it is not necessary to determine standby positions for each of the motor-operated valves 113, 123, and 133 for each target flow rate.

[0125] 4. Fourth Embodiment The substrate processing apparatus 1 according to the fourth embodiment will be described below with respect to differences from the substrate processing apparatus 1 according to the first embodiment. Fig. 11 is a block diagram for explaining the substrate processing apparatus 1 according to the fourth embodiment.

[0126] As shown in Fig. 11, the substrate processing apparatus 1 according to this embodiment has basically the same configuration as the substrate processing apparatus 1 according to the first embodiment shown in Fig. 1. Specifically, the substrate processing apparatus 1 has a configuration in which a single apparatus casing CA accommodates a plurality of processing units 2, a first liquid supply system 210, a second liquid supply system 220, a third liquid supply system 230, a transfer apparatus 800, and a control apparatus 900.

[0127] Here, for example, it is assumed that there is another substrate processing apparatus 1x having the same configuration as the substrate processing apparatus 1 of Fig. 1. As shown in Fig. 11, the substrate processing apparatus 1x has a configuration in which a single apparatus casing CA accommodates multiple processing units 2x, a first liquid supply system 210x, a second liquid supply system 220x, a third liquid supply system 230x, a transfer apparatus 800x, and a control apparatus 900x. The configuration of each part of the substrate processing apparatus 1x is the same as the corresponding configuration of the substrate processing apparatus 1. In the following description, the multiple processing units 2x will be referred to as external processing units 2x.

[0128] In the substrate processing apparatus 1 according to this embodiment, similarly to the example of the first embodiment, one processing unit 2 is determined as a reference processing unit 2G from among all processing units 2 in the substrate processing apparatus 1. Then, during the reference measurement process, the control device 900 acquires, as reference information, the flow rate response periods fp of the motor-operated valves 113, 123, and 133 of the reference processing unit 2G, as indicated by the thick solid arrows in FIG.

[0129] 11, the control device 900 generates standby position information for each of the motorized valves 113, 123, and 133 for the processing units 2 other than the reference processing unit 2G in the substrate processing apparatus 1 by using the acquired reference information. Furthermore, as described above, when there is an external processing unit 2x having the same configuration as the plurality of processing units 2, the control device 900 according to this embodiment also performs standby position determination processing for the external processing units 2x of the other substrate processing apparatus 1x based on the reference information of the reference processing unit 2G. As a result, in the substrate processing apparatus 1x, standby position information for the motorized valves 113, 123, and 133 of each external processing unit 2x is generated without being controlled by the control device 900x.

[0130] As described above, in the substrate processing apparatus 1 according to this embodiment, when another substrate processing apparatus 1x equipped with an external processing unit 2x is present, the standby positions of the motorized valves of the other external processing unit 2x can be determined based on the flow rate response period fp of the motorized valves of the reference processing unit 2G of the substrate processing apparatus 1. This eliminates the need for a setting operation or process for individually setting the standby positions of the motorized valves for the plurality of substrate processing apparatuses 1, 1x. As a result, it becomes possible to supply processing liquid to substrates W under uniform conditions in the plurality of processing units 2 and the external processing unit 2x of the plurality of substrate processing apparatuses 1, 1x, without requiring any complicated setting operation or process.

[0131] 5. Fifth Embodiment The substrate processing apparatus 1 according to the fifth embodiment will be described below in terms of differences from the substrate processing apparatus 1 according to the first embodiment. Fig. 12 is a diagram showing an example of the substrate processing apparatus 1 according to the fifth embodiment.

[0132] As shown in Figure 12, the substrate processing apparatus 1 of this embodiment has a configuration in which the configuration of one processing unit 2 of Figure 1, a first liquid supply system 210, a second liquid supply system 220, a third liquid supply system 230, a transport device 800, and a control device 900 are housed within one apparatus casing CA.

[0133] In this embodiment, one of the multiple motor-operated valves 113, 123, 133 is set as a reference motor-operated valve. Then, the flow rate response period fp of the reference motor-operated valve is measured by a process similar to the reference measurement process according to the above-described embodiment, and reference information is generated. Specifically, the reference information is generated by performing the processes of steps S12 to S18 in FIG. 6 on the reference motor-operated valve.

[0134] Thereafter, by performing a process similar to the reference measurement process according to the above embodiment, the standby positions of the valve bodies 26 are determined and standby position information is generated for the other two motor-operated valves other than the reference motor-operated valve among the plurality of motor-operated valves 113, 123, 133. Specifically, the processes of steps S22 to S31 in Fig. 7 are performed for each of the other two motor-operated valves, thereby determining the standby positions and generating the standby position information.

[0135] As described above, after the standby position information is generated, the valve element 26 of the reference motorized valve is placed at the initial position during standby when liquid processing of the substrate W is not being performed. On the other hand, the valve elements 26 of the other two motorized valves are placed at predetermined standby positions during standby when liquid processing of the substrate W is not being performed. This makes the flow rate response periods fp uniform among the multiple motorized valves 113, 123, and 133. As a result, it becomes possible to supply processing liquid to the substrate W under uniform conditions using the multiple motorized valves.

[0136] 6. Other Embodiments (a) In the substrate processing apparatus 1 according to the above embodiment, the control device 900 controls the operation of each of the multiple motor-operated valves 113, 123, and 133 in the multiple processing units 2 to obtain a difference for calculating the flow rate response period fp and the standby position. However, the present invention is not limited to this. Each of the motor-operated valves 113, 123, and 133 may include a control board capable of executing various processes for obtaining the flow rate response period fp and the difference corresponding to that motor-operated valve.

[0137] In this case, the control board of each of the motor-operated valves 113, 123, 133 may execute part of the reference measurement process of Fig. 6 (for example, the process of steps S12 to S17) in response to a command from the control device 900. Furthermore, the control board may execute part of the standby position determination process of Fig. 7 (for example, the process of steps S22 to S30) in response to a command from the control device 900.

[0138] (b) Although each processing unit 2 according to the above embodiment is configured to be capable of supplying three types of processing liquid to the substrate W, the present invention is not limited to this. Each processing unit 2 may be configured to be capable of supplying only one type of processing liquid to the substrate W, or may be configured to be capable of supplying only two types of processing liquid. Furthermore, each processing unit 2 may be configured to be capable of supplying four or more types of processing liquid to the substrate W. In these cases, each processing unit 2 is provided with nozzles and motorized valves corresponding to the number of types of processing liquid that it can supply.

[0139] (c) Although the motor-operated valves 113, 123, and 133 in the above-described embodiments are each a stepping motor, the present invention is not limited to this. Instead of a stepping motor, the motor-operated valves 113, 123, and 133 may be configured with a DC motor or an AC motor. In these cases, when the motor-operated valves 113, 123, and 133 are operating, the electric motor 27 is supplied with a DC or AC current instead of a drive pulse.

[0140] (d) Although the reference measurement process and standby position determination process according to the above embodiment are performed in response to an execution command from the operation unit 600, the present invention is not limited to this. Schedule information indicating the timing at which the reference measurement process and standby position determination process should be performed may be stored in the storage device 904. Furthermore, the control device 900 may perform the reference measurement process and standby position determination process in accordance with the schedule information stored in the storage device 904.

[0141] In this case, the schedule information may include, for example, information indicating that each of the above processes should be performed at regular intervals, or information indicating that each of the above processes should be performed each time a specified number of lots of substrates W are processed.

[0142] (e) In the reference measurement process according to the above embodiment, the "flow rate response period fp," i.e., information on time representing the period, is generated as reference information. In addition, in the standby position determination process, the standby positions of the valve bodies 26 of the motor-operated valves 113, 123, and 133 of the other processing units 2 are determined based on the difference in the "flow rate response period fp." However, the present invention is not limited to this.

[0143] The rotary encoder of the rotation detection unit 29 outputs, for example, detection pulses as a signal indicating the amount of rotation of the rotor (not shown) of the electric motor 27. Therefore, in the reference measurement process, instead of the "flow rate response period fp", the "number of detection pulses" output during the flow rate response period fp may be generated as reference information.

[0144] In this case, the standby position determination process acquires the "number of detection pulses" output during the flow rate response period fp for each of the motor-operated valves 113, 123, and 133. This allows the standby positions of the valve bodies 26 of the motor-operated valves 113, 123, and 133 of the other processing units 2 to be determined based on the difference between the "number of detection pulses."

[0145] 7. Correspondence between each part of the embodiment and each component of the claims The following describes examples of correspondence between the elements of the claims and the elements of the embodiments. Various other elements having the configurations or functions described in the claims may also be used as the elements of the claims.

[0146] In the above embodiment, the multiple processing units 2 are an example of multiple processing units 2, the control device 900 is an example of a control unit, the first pipe 110, the second pipe 120 and the third pipe 130 are examples of liquid flow paths, the first nozzle 111, the second nozzle 121 and the third nozzle 131 are examples of nozzles, and the electric valves 113, 123 and 133 are examples of electric valves.

[0147] Furthermore, the valve seat 25 is an example of a valve seat, the valve element 26 is an example of a valve element, the movement path of the valve element 26 along the straight line VL in Figure 2 is an example of a movement path, the electric motor 27 is an example of an electric actuator, the flow rate response period fp of the electric valves 113, 123, and 133 of the reference processing unit 2G is an example of a first reference transition time, the substrate processing apparatus 1, 1x are examples of the substrate processing apparatus 1, the opening and closing valves 112, 122, and 132 are examples of opening and closing valves, and the memory device 904 is an example of a memory unit.

[0148] Furthermore, pressure detection units 115, 125, and 135 are examples of pressure detection units, device casing CA is an example of a device casing, external processing unit 2x in Figure 11 is an example of an external processing unit, and flow rate response period fp of one of electric valves 113, 123, and 133 provided in one processing unit 2 in Figure 12 is an example of a reference transition time.

[0149] 8. Summary of the embodiment (Item 1) The substrate processing apparatus according to item 1 comprises: a plurality of processing units for performing liquid processing on a substrate using a processing liquid; a control unit that issues a first supply command to each of the plurality of processing units to supply the processing liquid to the substrate at a flow rate that complies with a first condition during the liquid processing; Each of the plurality of processing units a nozzle connected to the liquid flow path and configured to discharge the processing liquid flowing through the liquid flow path onto the substrate; an electric valve provided in the liquid flow path to adjust the flow rate of the treatment liquid flowing through the liquid flow path, The electric valve is A valve seat; a valve element provided to be movable along a predetermined movement path passing through the valve seat in a closing direction approaching the valve seat and in an opening direction moving away from the valve seat; an electric actuator that moves the valve element in the opening direction along the movement path in response to the first supply command given to the electric valve, When the motor-operated valve of one of the plurality of processing units receives the first supply command while in a stopped state in which the valve element is designed to contact the valve seat, the motor-operated valve transitions to a first processing state in which the processing liquid flows through the motor-operated valve at a flow rate that complies with the first condition; a time required for the motor-operated valve of the one processing unit to enter the first processing state after receiving the first supply command is defined as a first reference transition time; Before the liquid processing, the control unit determines a position on the movement path where the valve body of the electric valve of the other processing unit among the plurality of processing units should be placed when the other processing unit is waiting, as a first waiting position, so that the electric valve of the other processing unit among the plurality of processing units will be in the first processing state when the first reference transition time has elapsed since receiving the first supply command.

[0150] In the substrate processing apparatus, a first supply command is given to each of a plurality of processing units to supply a processing liquid to a substrate at a flow rate that conforms to a first condition. When the first supply command is given while the processing unit is in standby mode, the motorized valve of each processing unit transitions to a first processing state. As a result, the processing liquid is ejected from the nozzle of each processing unit onto the substrate at a flow rate that conforms to the first condition.

[0151] In the substrate processing apparatus, the time required for the motorized valve of one processing unit to transition from a stopped state to a first processing state after receiving a first supply command is set as the first reference transition time.

[0152] Then, the first standby positions of the valve elements of the motor-operated valves of the other processing units are determined so that the time from when the motor-operated valves of the other processing units receive the first supply command to when they transition to the first processing state is equal to the first reference transition time. Therefore, the motor-operated valves of the other processing units are placed in the first standby positions during standby. This makes it possible to standardize the time from when the first supply command is received to when they transition to the first processing state for the multiple motor-operated valves of the multiple processing units. As a result, it becomes possible to supply processing liquid to multiple substrates under uniform conditions using multiple liquid supply means.

[0153] (Item 2) In the substrate processing apparatus according to item 1, Each processing unit is Further provided with an on-off valve, The on-off valve is a valve provided in the liquid flow path so as to be located downstream of the electric valve; the liquid flow path is configured to be capable of transitioning between an open state in which the treatment liquid is allowed to flow through the liquid flow path and a closed state in which the treatment liquid is blocked from flowing through the liquid flow path; The control unit may transition the on-off valve from the closed state to the open state when giving the first supply command to each motor-operated valve.

[0154] The motorized valve of one processing unit is stopped during standby. At this time, the valve disc of the motorized valve is not necessarily in contact with the valve seat. Meanwhile, the motorized valve of another processing unit has the valve disc placed in a first standby position during standby. The first standby position is not necessarily a position where the valve disc is in contact with the valve seat. Therefore, there is a possibility that the processing liquid may flow through the motorized valve of each processing unit during standby.

[0155] According to the above configuration, by closing the on-off valve located downstream of each motorized valve when the motorized valve is on standby, the processing liquid is prevented from flowing through the motorized valve at an unintended timing. Furthermore, when a first supply command is given to each motorized valve, the on-off valve located downstream of the motorized valve transitions from the closed state to the open state. As a result, the processing liquid can be flowed through each motorized valve with high temporal precision.

[0156] (Item 3) In the substrate processing apparatus according to item 1 or 2, The substrate processing apparatus includes: a storage unit configured to store the first reference transition time of each electrically operated valve of the one processing unit; When determining the first standby position, the control unit: by issuing the first supply command to the motor-operated valve of the other processing unit, the other processing unit is shifted from the stopped state to the first processing state; detecting a time required for the electric valve of the other processing unit to change from the stopped state to the first processing state as an actual transition time; calculating a difference between the detected actual transition time and the first reference transition time stored in the memory unit for the motor-operated valve of the other processing unit; The first standby position of the motorized valve of the other processing unit may be determined so as to cancel out the calculated difference.

[0157] In this case, before liquid processing of a substrate, an actual transition time is detected by actually operating the motorized valve of the other processing unit. The first standby position is determined based on the difference between the actual transition time and the first reference transition time. Therefore, the first standby position of the valve element of the motorized valve of the other processing unit is appropriately determined without requiring a user to perform complicated setting work.

[0158] (Item 4) In the substrate processing apparatus according to item 3, Before determining the first standby position, the control unit by issuing the first supply command to the motor-operated valve of the one processing unit, the one processing unit is shifted from the stopped state to the first processing state; The time required for the motor-operated valve of the one processing unit to transition from the stopped state to the first processing state may be detected as the first reference transition time.

[0159] In this case, the first reference transition time is detected by actually operating the motor-operated valve of the one processing unit before determining the first standby position. The detected first reference transition time is stored in the memory. Therefore, the first reference transition time of the motor-operated valve of the one processing unit can be appropriately obtained without requiring the user to perform complicated setting operations.

[0160] (Item 5) In the substrate processing apparatus according to any one of Items 1 to 4, the control unit is capable of issuing a second supply command to each of the plurality of processing units during the liquid processing to supply the processing liquid to the substrate at a flow rate complying with a second condition different from the first condition, the motor-operated valve of the one processing unit receives the second supply command while in the stopped state, thereby transitioning to a second processing state in which the processing liquid flows through the motor-operated valve at a flow rate that complies with the second condition; a time required for the motor-operated valve of the one processing unit to enter the second processing state after receiving the second supply command is defined as a second reference transition time; Before the liquid processing, the control unit may determine as a second standby position a position on the movement path where the valve body of the electric valve of the other processing unit among the plurality of processing units should be placed when the other processing unit is waiting, so that the electric valve of the other processing unit among the plurality of processing units will enter the second processing state when the second reference transition time has elapsed since receiving the second supply command.

[0161] The flow state of the processing liquid in the multiple motorized valves changes depending on the amount of processing liquid to be circulated through those motorized valves, and therefore, in each processing unit, the time required from receiving a command to supply the processing liquid until the processing liquid flows through the motorized valve at a predetermined flow rate may change depending on the magnitude of the flow rate.

[0162] As described above, the first condition and the second condition are different. Therefore, the flow rate according to the first condition and the flow rate according to the second condition are different. According to the above configuration, the motorized valve of the other processing unit is set with multiple standby positions (in this example, a first standby position and a second standby position) according to the magnitude of the flow rate of the liquid to be flowed through the motorized valve. This makes it possible to supply processing liquid to each of multiple substrates under more uniform conditions.

[0163] (Item 6) In the substrate processing apparatus according to any one of Items 1 to 5, The substrate processing apparatus includes: a pressure detection unit for detecting the pressure of the treatment liquid upstream of each electric valve; The first standby position may be determined to be one of a plurality of predetermined positions depending on the detection result of the pressure detection unit.

[0164] Among multiple motorized valves, variations in operating characteristics may occur depending on the pressure of the processing liquid upstream of each motorized valve. With the above configuration, the first standby position of the valve element of the motorized valve of another processing unit is determined to a position based on the detection result of the pressure detection unit. This makes it possible to supply processing liquid to each of multiple substrates under more uniform conditions.

[0165] (Item 7) In the substrate processing apparatus according to any one of items 1 to 6, The substrate processing apparatus includes: an apparatus casing that houses the plurality of processing units; When there is an external processing unit provided at a position different from the device casing and having a configuration common to the plurality of processing units, Before liquid processing by the external processing unit, the control unit may determine a position on the movement path where the valve body of the electric valve of the external processing unit should be placed when the external processing unit is waiting, so that the electric valve of the external processing unit enters the first processing state when the first standard transition time has elapsed since receiving the first supply command.

[0166] According to the above configuration, when there is another substrate processing apparatus equipped with an external processing unit in addition to the substrate processing apparatus, the standby position of the motorized valve of the external processing unit can be determined based on the first reference transition time of the motorized valve of the one processing unit. This eliminates the need to perform a setting operation or process to individually set the standby positions of the motorized valves for the plurality of substrate processing apparatuses. As a result, it is possible to supply processing liquid to substrates under uniform conditions in the plurality of processing units of the plurality of substrate processing apparatuses and the external processing unit, without requiring complicated setting operations or processes.

[0167] (Item 8) The substrate processing apparatus according to item 8 is A substrate processing apparatus that performs liquid processing on a substrate using a processing liquid, a plurality of nozzles connected to a plurality of liquid flow paths and configured to eject the processing liquid flowing through the plurality of liquid flow paths onto the substrate; a plurality of electrically operated valves provided in the plurality of liquid flow paths to adjust the flow rates of the treatment liquids flowing through the liquid flow paths; a control unit that issues a supply command to each of the plurality of electric valves to supply the processing liquid to the substrate at a predetermined flow rate during the liquid processing, Each electric valve is A valve seat; a valve element provided to be movable along a predetermined movement path passing through the valve seat in a closing direction approaching the valve seat and in an opening direction moving away from the valve seat; an electric actuator that moves the valve element in the opening direction along the movement path in response to the supply command given to the electric valve, one of the plurality of motor-operated valves receives the supply command while in a stopped state in which the valve element is designed to contact the valve seat, thereby transitioning to a processing state in which the processing liquid flows through the motor-operated valve at the predetermined flow rate; a time required for the one motor-operated valve to transition to the processing state after receiving the supply command is defined as a reference transition time; Before the liquid processing, the control unit determines a standby position on the movement path where the valve body of the other electric valve among the plurality of electric valves should be placed when on standby, so that the other electric valve will enter the processing state when the reference transition time has elapsed since receiving the supply command.

[0168] In the substrate processing apparatus, a supply command is given to each of a plurality of motorized valves to supply a processing liquid to a substrate at a predetermined flow rate. When a supply command is given to each motorized valve while the valve is in a standby state, the valve transitions to a processing state. As a result, the processing liquid is ejected from the plurality of nozzles onto the substrate at the predetermined flow rate.

[0169] In the substrate processing apparatus, the time required for one motor-operated valve to transition from a stopped state to a processing state after receiving a supply command is set as the reference transition time.

[0170] Then, the standby positions of the valve elements of the other motor-operated valves are determined so that the time from when the other motor-operated valves receive a supply command to when they transition to a processing state is the reference transition time. Therefore, the valve elements of the other motor-operated valves are placed in their standby positions when they are on standby. This standardizes the time from when the multiple motor-operated valves receive a supply command to when they transition to a processing state. As a result, it becomes possible to supply multiple processing liquids to a substrate under uniform conditions using multiple motor-operated valves. [Explanation of symbols]

[0171] 1, 1x... substrate processing apparatus, 2... processing unit, 2G... reference processing unit, 2x... external processing unit, 3... substrate holding device, 3a... spin base, 3b... holding pin, 3c... rotation drive unit, 21... main body portion, 22... inlet port, 23... outlet port, 24... opening, 25... valve seat, 26... valve body, 26c... cone portion, 26f... edge portion, 27... electric motor, 28... conversion mechanism, 29... rotation detection unit, 110... first piping, 111... first nozzle, 112, 122, 132... opening / closing valve, 113, 123, 133... electric valve, 1 14, 124, 134...flow rate detection unit, 115, 125, 135...pressure detection unit, 120...second piping, 121...second nozzle, 130...third piping, 131...third nozzle, 210, 210x...first liquid supply system, 220, 220x...second liquid supply system, 230, 230x...third liquid supply system, 600...operation unit, 800, 800x...transport device, 900, 900x...control device, 901...CPU, 902...RAM, 903...ROM, 904...storage device, 909...CD-ROM, CA...device casing, W...substrate

Claims

1. a plurality of processing units for performing liquid processing on a substrate using a processing liquid; a control unit that issues a first supply command to each of the plurality of processing units to supply the processing liquid to the substrate at a flow rate that complies with a first condition during the liquid processing; Each of the plurality of processing units a nozzle connected to the liquid flow path and configured to discharge the processing liquid flowing through the liquid flow path onto the substrate; an electric valve provided in the liquid flow path to adjust the flow rate of the treatment liquid flowing through the liquid flow path, The electric valve is A valve seat; a valve element provided to be movable along a predetermined movement path passing through the valve seat in a closing direction approaching the valve seat and in an opening direction moving away from the valve seat; an electric actuator that moves the valve element in the opening direction along the movement path in response to the first supply command given to the electric valve, When the motor-operated valve of one of the plurality of processing units receives the first supply command while in a stopped state in which the valve element is designed to contact the valve seat, the motor-operated valve transitions to a first processing state in which the processing liquid flows through the motor-operated valve at a flow rate that complies with the first condition; a time required for the motor-operated valve of the one processing unit to enter the first processing state after receiving the first supply command is defined as a first reference transition time; a control unit for determining a position on the movement path where the valve body of the electric valve of the other processing unit among the plurality of processing units should be placed when the other processing unit is waiting as a first waiting position, so that the electric valve of the other processing unit among the plurality of processing units reaches the first processing state when the first reference transition time has elapsed since receiving the first supply command.

2. Each processing unit is Further provided with an on-off valve, The on-off valve is a valve provided in the liquid flow path so as to be located downstream of the electric valve; the liquid flow path is configured to be capable of transitioning between an open state in which the treatment liquid is allowed to flow through the liquid flow path and a closed state in which the treatment liquid is blocked from flowing through the liquid flow path; The substrate processing apparatus according to claim 1 , wherein the control unit causes the on-off valves to transition from the closed state to the open state when giving the first supply command to each electric valve.

3. a storage unit configured to store the first reference transition time of each electrically operated valve of the one processing unit; When determining the first standby position, the control unit by issuing the first supply command to the motor-operated valve of the other processing unit, the other processing unit is shifted from the stopped state to the first processing state; detecting a time required for the electric valve of the other processing unit to change from the stopped state to the first processing state as an actual transition time; calculating a difference between the detected actual transition time and the first reference transition time stored in the storage unit for the motor-operated valve of the other processing unit; 3. The substrate processing apparatus according to claim 1, wherein the first standby position is determined so that the calculated difference is cancelled out for the electric valve of the other processing unit.

4. Before determining the first standby position, the control unit by issuing the first supply command to the motor-operated valve of the one processing unit, the one processing unit is shifted from the stopped state to the first processing state; 4. The substrate processing apparatus according to claim 3, wherein a time required for the electric valve of the one processing unit to change from the stopped state to the first processing state is detected as the first reference transition time.

5. the control unit is capable of issuing, during the liquid processing, a second supply command to each of the plurality of processing units to supply the processing liquid to the substrate at a flow rate in accordance with a second condition different from the first condition, the electric valve of the one processing unit transitions to a second processing state in which the processing liquid flows through the electric valve at a flow rate that complies with the second condition when the electric valve receives the second supply command while in the stopped state; a time required for the motor-operated valve of the one processing unit to enter the second processing state after receiving the second supply command is defined as a second reference transition time; 3. The substrate processing apparatus according to claim 1, wherein before the liquid processing, the control unit determines a position on the movement path where the valve body of the electric valve of the other processing unit among the plurality of processing units should be placed when the other processing unit is waiting as a second waiting position, so that the electric valve of the other processing unit among the plurality of processing units enters the second processing state when the second reference transition time has elapsed since receiving the second supply command.

6. a pressure detection unit for detecting the pressure of the treatment liquid upstream of each electric valve; 3. The substrate processing apparatus according to claim 1, wherein the first standby position is determined to be one of a plurality of predetermined positions depending on the detection result of the pressure detection unit.

7. an apparatus casing that houses the plurality of processing units; When there is an external processing unit provided at a position different from the device casing and having a configuration common to the plurality of processing units, 3. The substrate processing apparatus of claim 1, wherein before liquid processing by the external processing unit, the control unit determines a position on the movement path where the valve body of the electric valve of the external processing unit should be placed when the external processing unit is in standby mode, so that the electric valve of the external processing unit enters the first processing state when the first reference transition time has elapsed since receiving the first supply command.

8. A substrate processing apparatus that performs liquid processing on a substrate using a processing liquid, a plurality of nozzles connected to a plurality of liquid flow paths and configured to eject the processing liquid flowing through the plurality of liquid flow paths onto the substrate; a plurality of electrically operated valves provided in the plurality of liquid flow paths to adjust the flow rates of the treatment liquids flowing through the liquid flow paths; a control unit that issues a supply command to each of the plurality of electric valves to supply the processing liquid to the substrate at a predetermined flow rate during the liquid processing, Each electric valve is A valve seat; a valve element provided to be movable along a predetermined movement path passing through the valve seat in a closing direction approaching the valve seat and in an opening direction moving away from the valve seat; an electric actuator that moves the valve element in the opening direction along the movement path in response to the supply command given to the electric valve, one of the plurality of motor-operated valves receives the supply command while in a stopped state in which the valve element is designed to contact the valve seat, thereby transitioning to a processing state in which the processing liquid flows through the motor-operated valve at the predetermined flow rate; a time required for the one motor-operated valve to transition to the processing state after receiving the supply command is defined as a reference transition time; and before the liquid processing, the control unit determines a position on the movement path where the valve body of the other electric valve among the plurality of electric valves should be placed during standby as a standby position so that the other electric valve will enter the processing state when the reference transition time has elapsed since receiving the supply command.

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