Semiconductor power device having a plurality of gate trench and method for forming such device

Abstract

To provide a semiconductor device comprising a semiconductor layer structure and a gate formed within a gate trench in the semiconductor layer structure.SOLUTION: In a semiconductor device, a gate trench has a bottom surface comprising a first portion at a first level and a second portion at a second level different from the first level.SELECTED DRAWING: Figure 2A

Description

[Technical Field]

[0001] This application claims priority from U.S. Patent Application No. 17 / 097,617, filed November 13, 2020, the disclosure of which is incorporated herein by reference in its entirety.

[0002] The present invention relates to semiconductor devices, and more particularly to power semiconductor switching devices. [Background technology]

[0003] A metal-insulating semiconductor field-effect transistor (MISFET) is a well-known type of semiconductor transistor that can be used as a switching device. A MISFET is a three-terminal device having a gate, drain, and source terminals, and a semiconductor body. The source and drain regions are formed in the semiconductor body separated by a channel region, and a gate electrode (which can serve as the gate terminal or be electrically connected to the gate terminal) is disposed adjacent to the channel region. A MISFET can be turned on or off by applying a bias voltage to the gate electrode. When a MISFET is turned on (i.e., the MISFET is in its "on-state"), current is conducted through the channel region of the MISFET between the source and drain regions. When the bias voltage is removed from the gate electrode (or reduced below a threshold level), current stops conducting through the channel region. By way of example, an n-type MISFET has n-type source and drain regions and a p-type channel. Therefore, an n-type MISFET has an "npn" design. An n-type MISFET turns on when a gate bias voltage is applied to the gate electrode that is sufficient to create a conductive n-type inversion layer in the p-type channel region that electrically connects the n-type source and drain regions, thereby allowing majority carrier conduction between the source and drain regions.

[0004] The gate electrode of a power MISFET is typically separated from the channel region by a thin gate dielectric layer. In most cases, the gate dielectric layer is an oxide layer (e.g., a silicon oxide layer). MISFETs with an oxide gate dielectric layer are called metal oxide semiconductor field effect transistors (MOSFETs). Because oxide gate dielectric layers are often used due to their superior properties, the discussion herein will focus on MOSFETs as opposed to MISFETs, although it will be recognized that the techniques according to embodiments of the invention described herein are equally applicable to devices having gate dielectric layers formed of materials other than oxide.

[0005] Because the gate electrode of a MOSFET is insulated from the channel region by a gate dielectric layer, a minimum gate current is required to maintain the MOSFET in its on state or to switch the MOSFET between its on and off states. The gate current is kept small during switching because the gate forms a capacitor with the channel region. As a result, only minimal charge and discharge currents are required during switching, allowing for less complex gate drive circuitry and faster switching speeds. MOSFETs can be standalone devices or combined with other circuit devices. For example, an insulated gate bipolar transistor (IGBT) is a semiconductor device that includes both a MOSFET and a bipolar junction transistor (BJT), where the BJT combines the high-impedance gate electrode of a MOSFET with the low on-state conduction losses that a BJT can offer. An IGBT can be implemented, for example, as a Darlington pair including a high-voltage n-channel MOSFET at the input and a BJT at the output. The base current of the BJT is supplied through the channel of the MOSFET, thereby allowing for a simplified external drive circuit (since the drive circuit only charges and discharges the gate electrode of the MOSFET).

[0006] There is an increasing demand for high-power semiconductor switching devices that can pass large currents in their "on" state and block high voltages (e.g., thousands of volts) in their reverse-blocking state. To support high current densities and block such high voltages, power MOSFETs and IGBTs typically have vertical structures with source and drain regions on opposite sides of a thick semiconductor layer structure to block higher voltage levels. In very high-power applications, semiconductor switching devices are typically formed from wide-bandgap semiconductor material systems, such as silicon carbide ("SiC"). (Herein, the term "wide-bandgap semiconductor" encompasses any semiconductor with a bandgap of at least 1.4 eV.) Silicon carbide has many advantageous properties, including high electric field breakdown strength, high thermal conductivity, a high melting point, and a high saturated electron drift velocity. For example, relative to devices formed using other semiconductor materials such as silicon, electronic devices formed using silicon carbide may have the ability to operate at higher temperatures, higher power densities, higher speeds, higher power levels, and / or under high radiation densities.

[0007] A conventional power semiconductor device typically includes a semiconductor substrate, such as a silicon carbide substrate (e.g., an n-type substrate), having a first conductivity type, on which an epitaxial layer structure having the first conductivity type (e.g., n-type) is formed. A portion of the epitaxial layer structure (which may comprise one or more separate layers) serves as the drift region of the power semiconductor device. The device typically includes an "active region" that includes one or more power semiconductor devices having junctions, such as p-n junctions. The active region may be formed on and / or within the drift region. The active region serves as a primary junction for blocking voltage in a reverse bias direction and providing current in a forward bias direction. The power semiconductor devices may also have edge terminations in a termination region adjacent to the active region. One or more power semiconductor devices may be formed on the substrate, with each power semiconductor device typically having its own edge termination. After the substrate is fully processed, the resulting structure may be diced to separate the individual edge-terminated power semiconductor devices. The power semiconductor devices may have a unit cell structure, in which the active area of ​​each power semiconductor device includes a plurality of individual "unit cell" devices arranged parallel to one another and together functioning as a single power semiconductor device.

[0008] Power semiconductor devices are designed to block (in forward or reverse blocking states) or pass (in forward operating states) high voltages and / or currents. For example, in blocking states, power semiconductor devices may be designed to maintain a potential of hundreds or thousands of volts. However, when an applied voltage approaches or exceeds the voltage level the device is designed to block, a significant level of current may begin to flow through the power semiconductor device. Such current, typically referred to as "leakage current," can be highly undesirable. Leakage current can begin to flow when the voltage increases beyond the device's designed voltage blocking capability, which can be a function of, among other things, the doping and thickness of the drift region. Leakage current may also occur for other reasons, such as failure of the device's edge termination and / or primary junction. When the voltage applied to a device increases beyond its breakdown voltage and reaches a critical level, the increased electric field can result in uncontrolled and undesirable runaway generation of charge carriers within the semiconductor device, leading to a condition known as avalanche breakdown.

[0009] Power semiconductor devices may also begin to allow significant amounts of leakage current to flow at voltage levels below the device's designed breakdown voltage. In particular, leakage current may begin to flow at the edges of the active region, where high electric fields may occur due to electric field crowding effects. To reduce this electric field crowding (and the resulting increase in leakage current), the above-mentioned edge terminations may be provided that surround some or all of the active region of the power semiconductor device. These edge terminations can spread the electric field over a wider area, thereby reducing the electric field crowding.

[0010] Vertical power semiconductor devices, including MOSFET transistors, can have a standard gate electrode design, in which the transistor's gate electrode is formed on top of the semiconductor layer structure, or alternatively, can have the gate electrode recessed in a trench within the semiconductor layer structure. MOSFETs with recessed gate electrodes are typically referred to as gate-trench MOSFETs. With a standard gate electrode design, the channel region of each unit cell transistor is disposed horizontally beneath the gate electrode. In contrast, in a gate-trench MOSFET design, the channel is disposed vertically. Gate-trench MOSFETs can offer improved performance but typically utilize more complex manufacturing processes. Summary of the Invention [Means for solving the problem]

[0011] In accordance with an embodiment of the present invention, a semiconductor device is provided having an improved gate trench structure that incorporates a recess in a lower surface of the gate trench and a doped well adjacent to the recess to improve blocking and / or conduction performance of the device.

[0012] According to some embodiments of the present invention, a semiconductor device includes a semiconductor layer structure and a gate formed in a gate trench in the semiconductor layer structure, the gate trench having a lower surface with a first portion at a first level and a second portion at a second level different from the first level.

[0013] In some embodiments, the semiconductor layer structure comprises a substrate, and the second level is closer to the substrate than the first level.

[0014] In some embodiments, the substrate comprises silicon carbide.

[0015] In some embodiments, the semiconductor layer structure comprises a drift region having a first conductivity type, a well region having a second conductivity type over the drift region, and a deep shield pattern having the second conductivity type below at least a portion of a lower surface of the gate trench.

[0016] In some embodiments, the deep shield pattern extends to contact at least a portion of the well region.

[0017] In some embodiments, the gate trench further comprises a first corner between a sidewall of the gate trench and a first portion of a lower surface of the gate trench, and a second corner between the first portion of the lower surface of the gate trench and a second portion of the lower surface of the gate trench.

[0018] In some embodiments, the second radius of curvature of the second corner is greater than the first radius of curvature of the first corner.

[0019] In some embodiments, the deep shield pattern is between the second corner and the drift region.

[0020] In some embodiments, the lower surface of the gate trench further comprises a third portion of a third level, the third portion of the lower surface of the gate trench being on an opposite side of the second portion of the gate trench from the first portion of the gate trench.

[0021] In some embodiments, the first level and the third level are at approximately the same level.

[0022] According to some embodiments of the present invention, a semiconductor device includes a substrate having a first conductivity type, a drift region having the first conductivity type on the substrate, a well region having a second conductivity type on the drift region, and a gate trench extending into the well region and the drift region, the gate trench having a nonlinear lower surface with a recess extending into the substrate.

[0023] In some embodiments, the semiconductor device further includes a deep shield pattern having the second conductivity type below at least a portion of the lower surface of the gate trench.

[0024] In some embodiments, the deep shield pattern extends to contact at least a portion of the well region.

[0025] In some embodiments, the deep shield pattern extends over a recess in the lower surface of the gate trench.

[0026] In some embodiments, a first portion of the lower surface of the gate trench is at a first level and a second portion of the lower surface of the gate trench is at a second level different from the first level.

[0027] In some embodiments, a second portion of the lower surface of the gate trench is within the recess.

[0028] In some embodiments, the lower surface of the gate trench further comprises a third portion of a third level, the third portion of the lower surface of the gate trench being on an opposite side of the second portion of the gate trench from the first portion of the gate trench.

[0029] In some embodiments, the first level and the third level are at approximately the same level.

[0030] In some embodiments, the gate trench further comprises a first corner between a sidewall of the gate trench and a first portion of the lower surface of the gate trench, and a second corner between the first portion of the lower surface of the gate trench and the recess.

[0031] In some embodiments, the recess is in a central portion of the lower surface of the gate trench and the predetermined portions of the lower surface are on opposite sides of the recess.

[0032] According to some embodiments of the present invention, a method of forming a semiconductor device includes providing a semiconductor layer structure, etching a first gate trench in the semiconductor layer structure, etching a second gate trench in the semiconductor layer structure, and performing ion implantation into a lower surface of the second gate trench, the second gate trench being deeper than the first gate trench, and at least a portion of the second gate trench being connected to the first gate trench.

[0033] In some embodiments, etching the second gate trench is preceded by forming a mask over at least a portion of the first gate trench.

[0034] In some embodiments, the method further includes forming a gate insulating layer over the first gate trench and the second gate trench, and forming a gate electrode over the gate insulating layer.

[0035] In some embodiments, etching the second gate trench is performed before etching the first gate trench.

[0036] In some embodiments, etching the first gate trench is preceded by forming a mask over at least a portion of the second gate trench.

[0037] In some embodiments, the second gate trench extends through a central portion of the lower surface of the first gate trench, and a predetermined portion of the lower surface of the first gate trench is on an opposing side of the second gate trench.

[0038] In some embodiments, the semiconductor layer structure comprises a drift region having a first conductivity type, and the method further comprises treating a corner of the drift region at an interface between the first gate trench and the second gate trench, thereby increasing a radius of curvature of the corner.

[0039] In some embodiments, performing ion implantation into the lower surface of the second gate trench includes performing an angled ion implant.

[0040] In some embodiments, the semiconductor layer structure comprises a drift region having a first conductivity type and a well region having a second conductivity type, and performing ion implantation into the lower surface of the second gate trench includes performing ion implantation of a deep shield pattern having the second conductivity type into the sidewalls and lower surface of the second gate trench.

[0041] In some embodiments, the deep shield pattern extends to contact at least a portion of the well region.

[0042] According to some embodiments of the present invention, a semiconductor device includes a substrate having a first conductivity type, a drift region on the substrate having the first conductivity type, a well region on the drift region having a second conductivity type, and a gate trench extending into the well region and the drift region, the gate trench having a lower surface with a first portion and a second portion, the second portion being closer to the substrate than the first portion.

[0043] In some embodiments, the semiconductor device further includes a deep shield pattern having a second conductivity type on a second portion of the lower surface of the gate trench.

[0044] In some embodiments, the deep shield pattern extends to contact at least a portion of the well region.

[0045] In some embodiments, the lower surface of the gate trench further comprises a third portion, the third portion of the lower surface of the gate trench being on an opposite side of the second portion of the gate trench from the first portion of the gate trench.

[0046] In some embodiments, the gate trench further comprises a first corner between the first sidewall of the gate trench and a first portion of the lower surface of the gate trench, and a second corner between the first portion of the lower surface of the gate trench and a second sidewall of the gate trench, the second sidewall extending between the first and second portions of the lower surface of the gate trench.

[0047] In some embodiments, the second radius of curvature of the second corner is greater than the first radius of curvature of the first corner.

[0048] In some embodiments, the semiconductor device further includes a deep shield pattern having a second conductivity type, the deep shield pattern being between a second corner of the gate trench and the drift region.

[0049] In some embodiments, at least a portion of the first corner of the gate trench directly contacts the drift region without a deep shield pattern between that portion of the first corner and the drift region.

[0050] In some embodiments, the ratio of the first depth of the first sidewall to the second depth of the second sidewall is between 1-10.

[0051] Other devices, apparatus, and / or methods according to some embodiments will become apparent to one of ordinary skill in the art upon examination of the accompanying drawings and detailed description. All such additional embodiments, in addition to any and all combinations of the above embodiments, are intended to be included within this description, be within the scope of the invention, and be protected by the accompanying claims. [Brief explanation of the drawings]

[0052] [Figure 1A] FIG. 1 illustrates a conventional mechanism used to shield the gate oxide of a MOSFET device from electric field crowding. [Figure 1B] FIG. 1 illustrates a conventional mechanism used to shield the gate oxide of a MOSFET device from electric field crowding. [Figure 2A] 1 is a schematic cross-sectional view of a MOSFET device according to some embodiments of the present disclosure. [Figure 2B] 1 is a schematic cross-sectional view of a MOSFET device according to some embodiments of the present disclosure. [Figure 3A] 2C are schematic cross-sectional views illustrating methods of fabricating the power switching device of FIGS. 2A and 2B according to some embodiments of the present disclosure. [Figure 3B] 2C are schematic cross-sectional views illustrating methods of fabricating the power switching device of FIGS. 2A and 2B according to some embodiments of the present disclosure. [Figure 3C] 2C are schematic cross-sectional views illustrating methods of fabricating the power switching device of FIGS. 2A and 2B according to some embodiments of the present disclosure. [Figure 3D] 2C are schematic cross-sectional views illustrating methods of fabricating the power switching device of FIGS. 2A and 2B according to some embodiments of the present disclosure. [Figure 3E] 2C are schematic cross-sectional views illustrating methods of fabricating the power switching device of FIGS. 2A and 2B according to some embodiments of the present disclosure. [Figure 3F] 2C are schematic cross-sectional views illustrating methods of fabricating the power switching device of FIGS. 2A and 2B according to some embodiments of the present disclosure. [Figure 3G] 2C are schematic cross-sectional views illustrating methods of fabricating the power switching device of FIGS. 2A and 2B according to some embodiments of the present disclosure. [Figure 3H] 2C are schematic cross-sectional views illustrating methods of fabricating the power switching device of FIGS. 2A and 2B according to some embodiments of the present disclosure. [Figure 4A] 2C are schematic cross-sectional views illustrating methods of fabricating the power switching device of FIGS. 2A and 2B according to some embodiments of the present disclosure. [Figure 4B] 2C are schematic cross-sectional views illustrating methods of fabricating the power switching device of FIGS. 2A and 2B according to some embodiments of the present disclosure. [Figure 4C]2C are schematic cross-sectional views illustrating methods of fabricating the power switching device of FIGS. 2A and 2B according to some embodiments of the present disclosure. [Figure 4D] 2C are schematic cross-sectional views illustrating methods of fabricating the power switching device of FIGS. 2A and 2B according to some embodiments of the present disclosure. [Figure 5A] 1 is a schematic cross-sectional view of a MOSFET device according to some embodiments of the present disclosure. [Figure 5B] 1 is a schematic cross-sectional view of a MOSFET device according to some embodiments of the present disclosure. [Figure 6A] 5C are schematic cross-sectional views illustrating methods of fabricating the power switching device of FIGS. 5A and 5B according to some embodiments of the present disclosure. [Figure 6B] 5C are schematic cross-sectional views illustrating methods of fabricating the power switching device of FIGS. 5A and 5B according to some embodiments of the present disclosure. [Figure 6C] 5C are schematic cross-sectional views illustrating methods of fabricating the power switching device of FIGS. 5A and 5B according to some embodiments of the present disclosure. [Figure 6D] 5C are schematic cross-sectional views illustrating methods of fabricating the power switching device of FIGS. 5A and 5B according to some embodiments of the present disclosure. [Figure 6E] 5C are schematic cross-sectional views illustrating methods of fabricating the power switching device of FIGS. 5A and 5B according to some embodiments of the present disclosure. [Figure 6F] 5C are schematic cross-sectional views illustrating methods of fabricating the power switching device of FIGS. 5A and 5B according to some embodiments of the present disclosure. [Figure 7A] 5C are schematic cross-sectional views illustrating methods of fabricating the power switching device of FIGS. 5A and 5B according to some embodiments of the present disclosure. [Figure 7B] 5C are schematic cross-sectional views illustrating methods of fabricating the power switching device of FIGS. 5A and 5B according to some embodiments of the present disclosure. [Figure 7C]5C are schematic cross-sectional views illustrating methods of fabricating the power switching device of FIGS. 5A and 5B according to some embodiments of the present disclosure. [Figure 7D] 5C are schematic cross-sectional views illustrating methods of fabricating the power switching device of FIGS. 5A and 5B according to some embodiments of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0053] In the following detailed description, numerous specific details are set forth to provide a thorough understanding of the embodiments of the present disclosure. However, it will be understood by those skilled in the art that the present disclosure may be practiced without these specific details. In some instances, well-known methods, procedures, components, and circuits have not been described in detail so as not to obscure the present disclosure. It is contemplated that all embodiments disclosed herein may be implemented separately or combined in any manner and / or combination. Aspects described with respect to one embodiment may be incorporated into a different embodiment without being specifically described therefor. That is, all embodiments and / or features of any embodiment may be combined in any manner and / or combination.

[0054] Embodiments described herein provide devices and methods for fabricating such devices that improve the performance of gate trench semiconductor devices. Embodiments described herein can provide improved gate trench structures that incorporate a recess in the lower surface of the gate trench and a doped well adjacent to the recess to improve the blocking and / or conduction performance of the device.

[0055] SiC-gate trench MOSFET vertical power devices are attractive due to their inherently low specific on-resistance, which can lead to more efficient operation for power switching operations requiring low-to-moderate reverse blocking voltage levels (e.g., 650–1200 V). Trench MOSFET vertical power devices can exhibit low specific resistance during on-state operation because the channel is formed on the sidewall of the gate trench, and the trench design reduces the overall device pitch, enabling higher integration. Furthermore, the carrier mobility in the sidewall channel of a trench MOSFET has been found to be two to four times higher than the corresponding carrier mobility in the channel of a planar (e.g., lateral) device. This increased carrier mobility also increases current density. However, SiC-gate trench MOSFET vertical power devices can suffer from oxide reliability issues due to the presence of sharp, high-field corners at the bottom edge of the trench, which can cause gate oxide breakdown over time and ultimately lead to device failure. 1A and 1B illustrate a conventional mechanism used to shield the gate oxide of a MOSFET device from electric field crowding.

[0056] FIG. 1A is a schematic cross-sectional view of a first wide bandgap power MOSFET 100A. MOSFET 100A incorporates bottom gate p+ shielding. As shown in FIG. 1A, power MOSFET 100A has a heavily doped (n + ) n-type silicon carbide substrate 110. -) silicon carbide drift region 120 is provided on substrate 110. A moderately doped p-type silicon carbide well region 170 is formed on the upper surface of n-type drift region 120. Moderately doped p-type silicon carbide well region 170 may be formed, for example, by epitaxial growth. This moderately doped p-type silicon carbide well region 170 may provide a p-well 172 for device 100A. A transistor channel 178 may be formed in p-well 172, as discussed below. A heavily doped n + The silicon carbide source region 160 may be formed in the upper region of the p-type silicon carbide well region 170. + The silicon carbide source region 160 may be formed, for example, by ion implantation.

[0057] The substrate 110, the drift region 120, the moderately doped p-type well region 170, and the heavily doped n + The silicon carbide source region 160, along with various regions / patterns formed therein, constitutes the semiconductor layer structure 106 of the MOSFET 100A.

[0058] A gate trench 180 is formed in the semiconductor layer structure 106. The gate trench 180 is formed by a heavily doped n + The silicon carbide source region 160 may extend through the moderately doped p-type well region 170 and into the drift region 120. A gate insulating layer 186 may be formed on the lower surface and sidewalls of each gate trench 180. A gate electrode 184 may be formed on each gate insulating layer 186 to fill the respective gate trench 180. A vertical channel region 178 is provided in the p-well 172 adjacent to the gate insulating layer 186.

[0059] A source contact 162 may be formed on the heavily doped n-type source region 160. An interconnect layer 165 may connect the various contacts of the source contacts 162. A drain contact 164 may be formed on the lower surface of the substrate 110. A gate contact (not shown) may be formed on the gate electrode 184.

[0060] If the gate insulating layer 186, which is typically implemented as a silicon oxide layer, is subjected to excessively high electric fields, the gate insulating layer 186 may degrade over time and eventually fail to insulate the gate electrode 184 from the semiconductor layer structure, which may result in device failure. Corners of the gate insulating layer 186 (e.g., areas where the gate insulating layer 186 transitions from a vertical surface to a lateral surface) are particularly susceptible to such high electric fields. To improve the reliability of the gate insulating layer 186, the power MOSFET 100A includes a deep shield pattern 140 below the gate trench 180. The deep shield pattern 140 is formed by ion implantation into a heavily doped (p + ) silicon carbide pattern.

[0061] The deep shield pattern 140 can be used to protect the corners of the gate insulating layer 186 from high electric fields during reverse blocking operation. The deep shield pattern 140 can provide shielding for the gate insulating layer 186 and can provide additional device performance due to the utilization of two sidewall surfaces for current conduction.

[0062] However, to block the electric field, the deep shield pattern 140 should be electrically connected to the p-well 172. In the MOSFET 100A of FIG. 1A, this electrical connection is typically provided outside the cross-sectional view and may require significant extra processing steps. Furthermore, when forming the device of FIG. 1A, protecting the sidewalls of the gate trench 180 during the formation of the deep shield pattern 140 can be difficult due to the lateral “straggle” of p-type ions that bounce off the lower surface of the gate trench 180 and implant into the sidewalls. As a result, the sidewalls of the gate trench 180 may be damaged by the ion implantation. Furthermore, because the portion of the n-type drift region 120 that forms the lower wall of the gate trench 180 is only lightly doped, and the p-type deep shield pattern is heavily doped, if a sufficiently large number of p-type ions are implanted into the lower wall of the gate trench 180, the n-type region below the channel 178 may be converted to p-type material. If this occurs, device 100A may be rendered inoperable.

[0063] FIG. 1B is a schematic cross-sectional view of a second wide bandgap power MOSFET 100B. MOSFET 100B incorporates an asymmetric p+ shield. In FIG. 1B, descriptions of structures similar to those described with respect to FIG. 1A are not repeated for brevity. As shown in FIG. 1B, power MOSFET 100B incorporates an electrical connection between p-well 172 and deep shield pattern 140 along one sidewall of each gate trench 180. For example, the p-type material of MOSFET 100B can extend continuously from deep shield pattern 140 below gate trench 180 to p-well 172 along one sidewall of gate trench 180. The electrical connection between p-well 172 and deep shield pattern 140 can provide robust protection for the right corner of gate trench 180. However, as can be seen in Figure 1B, deep shield pattern 140 and / or p-well 172 cover one side of gate trench 180, eliminating the channel from that side of gate trench 180. As a result, in the embodiment shown in Figure 1B, only one channel 178 (to the left of gate trench 180 in Figure 1B) may be available during on-state operation of the device.

[0064] 1A and 1B. The present disclosure provides semiconductor devices having gate trenches that incorporate dual trenches that can provide a recess at the bottom of the gate trench. The use of dual trenches allows for more precise control of the placement of deep shield patterns and increased protection of the device during reverse blocking operation.

[0065] 2A and 2B are schematic cross-sectional views of MOSFET devices 200A, 200B according to some embodiments of the present disclosure. Referring to FIG. 2A, the power MOSFET 200A can include an n-type wide bandgap semiconductor substrate 110. The substrate 110 can comprise, for example, a 4H-SiC or 6H-SiC substrate. In other embodiments, the substrate 110 can be or include a different semiconductor material (e.g., III-nitride based materials, Si, GaAs, ZnO, InP) or a non-semiconductor material (e.g., sapphire). The substrate 110 can be heavily doped with n-type impurities (i.e., n + The impurities may include, for example, nitrogen or phosphorus. The doping concentration of the substrate 110 may be, for example, 1×10 18 atoms / cm 3 and 1×10 21 atoms / cm 3 Although other doping concentrations can be used, the substrate can be relatively thick (e.g., 20-100 microns or more) in some embodiments, but is shown as a thin layer in Figures 2A and 2B (and other figures) to allow for expansion of other layers and regions of the device.

[0066] A lightly doped n-type (n-) drift region 120 (e.g., silicon carbide) may be provided on the substrate 110. The n-type drift region 120 may be formed, for example, by epitaxial growth on the substrate 110. The n-type drift region 120 may have a doping density of, for example, 1×10 16 ~5×10 17 dopant / cm 3 The n-type drift region 120 may have a doping concentration of 0.01 to 0.01 μm. The n-type drift region 120 may be a thick region having a vertical height above the substrate 110 of, for example, 3 to 100 microns. In some embodiments, the upper portion of the n-type drift region 120 may include an n-type current spreading layer (not shown) that is more heavily doped than the lower portion of the n-type drift region 120.

[0067] A moderately doped p-type well region 170 (e.g., silicon carbide) may be formed on the upper surface of n-type drift region 120. The moderately doped p-type well region 170 may be formed, for example, by epitaxial growth. This moderately doped p-type well region 170 may provide a p-well 272 for device 200A. In some embodiments, p-well 272 may have a doping density of 5×10 16 / cm 3 and 5×10 19 / cm 3 A transistor channel 278 may be formed in the p-well 272, as discussed below.

[0068] Heavily doped n + The source region 160 (e.g., silicon carbide) may be formed in the upper region of the p-type well region 170. + The source region 160 may be formed, for example, by ion implantation.

[0069] The substrate 110, the drift region 120, the moderately doped p-type well region 170, and the heavily doped n + The source region 160, together with various regions / patterns formed therein, constitutes a semiconductor layer structure 206 of the MOSFET 200A. As used herein, the term "semiconductor layer structure" refers to a structure that includes one or more semiconductor layers, such as a semiconductor substrate and / or a semiconductor epitaxial layer.

[0070] A gate trench 280 may be formed in the semiconductor layer structure 206. The gate trench 280 may be formed by a heavily doped n +The gate trench 280 may extend through the source region 160 and the moderately doped p-type well region 170 and into the drift region 120. The gate trench 280 may include a first trench 281 (also referred to as a first gate trench) and a second trench 282 (also referred to as a second gate trench). The first trench 281 may be shallower than the second trench 282. In some embodiments, the second trench 282 is connected to the first trench 281. For example, in some embodiments, the sidewall of the second trench 282 may be connected to the bottom or sidewall of the first trench 281. In some embodiments, the second trench 282 may be located on one side of the first trench 281. In FIG. 2A , the second trench 282 is located to the right of the first trench 281, but it will be understood that the present disclosure is not limited thereto.

[0071] The configuration of the first trench 281 and the second trench 282 can result in a gate trench having a nonlinear bottom surface 287. The bottom surface 287 can have a first portion 287a at a first level and a second portion 287b at a second level different from the first level. In some embodiments, the second level of the second portion 287b can be deeper (e.g., closer to the substrate 110) than the first level of the first portion 287a. In some embodiments, the difference between the first level of the first trench 281 and the second level of the second trench 282 can be 0.1 to 40 μm. In some embodiments, the difference between the first level of the first trench 281 and the second level of the second trench 282 can be 0.5 to 20 μm. In some embodiments, the difference between the first level of the first trench 281 and the second level of the second trench 282 can be 1 to 10 μm. Both the first portion 287a and the second portion 287b may be relatively flat, and as a result, the gate trench 280 may have two or more bottom corners.

[0072] The first portion 287a of the lower surface 287 can correspond to the lower surface of the first trench 281, and the second portion 287b of the lower surface 287 can correspond to the lower surface of the second trench 282. A first level of the first portion 287a of the lower surface 287 can be a first distance D1 from the bottom of the p-well 272. In other words, the first portion 287a of the lower surface 287 can extend into the drift region 120 farther than the p-well 272 by the first distance D1. The distance D1 can depend on the pitch of the unit cell of the device. In some embodiments, the distance D1 can be greater than 0.1 μm to 5 μm, although the present disclosure is not limited thereto. The first and second levels of the lower surface 287 can result in a recess in the lower surface 287 of the gate trench 280 that protrudes toward the substrate 110.

[0073] The deep shield pattern 240 may be formed on the lower surface 287 of the gate trench 280. The deep shield pattern 240 may be formed by ion implantation into the upper surface of the n-type drift region 120. + ) pattern (e.g., silicon carbide). In some embodiments, the deep shield pattern 240 may be, for example, 1×10 17 / cm 3 and 1×10 21 / cm 3In some embodiments, the deep shield pattern 240 may be on the first portion 287a and / or the second portion 287b of the lower surface 287 of the gate trench 280. In some embodiments, the deep shield pattern 240 may extend along the entire lower surface 287b of the second trench 282. In some embodiments, the deep shield pattern 240 may be between the lower surface 287b and sidewalls of the second trench 282 and the drift region 120. In some embodiments, the deep shield pattern 240 may not cover all of the sidewalls or lower surface of the first trench 281. That is, that portion of the first trench 281 may directly abut the drift region 120 without any portion of the deep shield pattern 240 over that portion.

[0074] The use of the first trench 281 and the second trench 282 results in the formation of two corners 290a, 290b of the first gate trench 281. The first corner 290a may be a corner between a lower surface (e.g., first portion 287a) of the first trench 281 and a sidewall of the first trench 281. The second corner 290b may be a corner between a lower surface (e.g., first portion 287a) of the first trench 281 and a sidewall of the second trench 282. In some embodiments, the radius of curvature of the second corner 290b may be greater than the radius of curvature of the first corner 290a. In some embodiments, at least a portion of the first corner 290a may directly abut the drift region 120 without any portion of the deep shield pattern 240 thereon. In some embodiments, the deep shield pattern 240 is on the second corner 290b, and in some embodiments may cover it.

[0075] The deep shield pattern 240 may extend along the sidewall of the second trench 282 to physically and / or electrically connect to the p-well 272. The connection between the deep shield pattern 240 and the p-well 272 may provide improved protection for one sidewall of the gate trench 280. The opposing sidewall of the gate trench 280 may form a channel 278 for the MOSFET 200A. As with the device of FIG. 1B, the MOSFET 200A may have one channel conducting on one side of the gate trench 280 during operation. However, in contrast to the embodiment of FIG. 1B, the use of first and second trenches 281, 282 in the MOSFET 200A may enable improved protection for a first corner 290a of the gate trench 280. In MOSFET 200A, deep shield pattern 240 is formed deeper (e.g., closer to substrate 110) than in related devices (such as MOSFET 100B of FIG. 1B). Having deep shield pattern 240 deeper into drift region 120 provides first corner 290a with better protection from the electric field generated in drift region 120 during reverse blocking operation. The use of deeper second trench 282 allows deep shield pattern 240 to be formed without excessive implant energy.

[0076] Forming the first gate trench 281 and the second gate trench 282 may result in the formation of a first sidewall of the first gate trench 281 having a first depth 281s and a second sidewall of the second gate trench 282 having a second depth 282s. The first depth 281s of the first sidewall may be the depth (e.g., the dimension perpendicular to the upper surface of the substrate) of a portion of the sidewall of the first gate trench 281 extending from the upper surface of the semiconductor layer structure 206 to the first corner 290a. The second depth 282s of the second sidewall may be the depth of a portion of the sidewall of the second gate trench 282 extending from the second corner 290b to the lower surface of the second gate trench 282. In some embodiments, the ratio of the first sidewall depth 281s to the second sidewall 282s (e.g., 281s / 282s) can be greater than or equal to 1. In some embodiments, the ratio of the first sidewall depth 281s to the second sidewall 282s can be between 1 and 20. In some embodiments, the ratio of the first sidewall depth 281s to the second sidewall 282s can be between 1 and 10. In some embodiments, the ratio of the first sidewall depth 281s to the second sidewall 282s can be between 1 and 5. In some embodiments, the ratio of the first sidewall depth 281s to the second sidewall 282s can be between 2 and 10. The first depth 281s of the first sidewall may also refer to the distance between the top surface of the semiconductor layer structure 206 and the first portion 287a of the lower surface 287 of the gate trench 280. The second depth 282s of the second sidewall may also refer to the distance between the first portion 287a and the second portion 287b of the lower surface 287 of the gate trench 280.

[0077] 2A, a gate insulating layer 286 may be formed on the lower surface and sidewalls of gate trench 280, including first trench 281 and second trench 282. A gate electrode 284 may be formed on gate insulating layer 286 within and / or to fill gate trench 280.

[0078] A source contact 162 may be formed on the heavily doped n-type source region 160. An interconnect layer 165 may connect the various contacts of the source contacts 162. A drain contact 164 may be formed on the lower surface of the substrate 110. A gate contact (not shown) may be formed on the gate electrode 284.

[0079] While FIG. 2A illustrates first trench 281 separated from p-well 272 by a first distance D1, it will be understood that the present disclosure is not limited thereto. In some embodiments, the distance between p-well 272 and lower surface 287a of first trench 281 may vary. For example, FIG. 2B illustrates an example embodiment of MOSFET 200B of the present disclosure in which first trench 281 is separated from p-well 272 by a second distance D2, where second distance D2 is less than first distance D1. In some embodiments, distance D2 may be less than 0.1 μm to 5 μm, although the present disclosure is not limited thereto. Elements of FIG. 2B that are substantially similar to elements of FIG. 2A are not described for the sake of brevity.

[0080] Referring to FIG. 2B, the depth of the first trench 281′ can be made shallower than the embodiment shown in FIG. 2A. For example, the first portion 287a′ of the lower surface 287′ of the gate trench 280 can be formed closer to the surface of the semiconductor layer structure 206. As a result, the distance between the first portion 287a′ and the second portion 287b of the lower surface 287′ can be increased. The shallower first trench 281′ can result in the first corner 290a′ and / or the second corner 290b′ being positioned closer to the p-well 272. The embodiment of FIG. 2B can provide better protection for the first corner 290a′ during reverse blocking, while the embodiment of FIG. 2A can provide a larger width for the JFET region, resulting in improved current flow relative to the embodiment of FIG. 2B.

[0081] 2B , forming the first gate trench 281′ and the second gate trench 282 may result in forming a first sidewall of the first gate trench 281′ having a first depth 281s′ and a second sidewall of the second gate trench 282 having a second depth 282s′. The first depth 281s′ of the first sidewall may be the depth of a portion of the sidewall of the first gate trench 281′ that extends from the top surface of the semiconductor layer structure 206 to the first corner 290a′. The second depth 282s′ of the second sidewall may be the depth of a portion of the sidewall of the second gate trench 282 that extends from the second corner 290b′ to the bottom surface of the second gate trench 282. In some embodiments, the ratio of the first sidewall depth 281s' to the second sidewall 282s' (e.g., 281s' / 282s') can be less than or equal to 1. In some embodiments, the ratio of the first sidewall depth 281s' to the second sidewall 282s' can be between 0.1 and 1. In some embodiments, the ratio of the first sidewall depth 281s' to the second sidewall 282s' can be between 0.05 and 1. In some embodiments, the ratio of the first sidewall depth 281s' to the second sidewall 282s' can be between 0.2 and 1. In some embodiments, the ratio of the first sidewall depth 281s' to the second sidewall 282s' can be between 0.1 and 0.5. The first depth 281s' of the first sidewall may also refer to the distance between the upper surface of the semiconductor layer structure 206 and the first portion 287a' of the lower surface 287' of the gate trench 280. The second depth 282s' of the second sidewall may also refer to the distance between the first portion 287a' and the second portion 287b of the lower surface 287' of the gate trench 280.

[0082] 3A-3H are schematic cross-sectional views illustrating methods of fabricating the power switching devices 200A, 200B of FIGS. 2A and 2B, according to some embodiments of the present disclosure.

[0083] Descriptions of elements in Figures 3A-3H that are the same as or similar to elements in Figures 2A and 2B are omitted for the sake of brevity, and therefore the description of Figures 3A-3H will focus on differences from previously described figures.

[0084] 3A, a substrate 110 is provided and a drift region 120 is formed on the substrate 110 by epitaxial growth. In some embodiments, the substrate 110 is a heavily doped (n + ) n-type silicon carbide, and the drift region 120 is lightly doped (n - ) silicon carbide drift region 120. In some embodiments, an n-type silicon carbide current spreading layer may be formed comprising the upper portion of drift region 120.

[0085] A moderately doped p-type well region 170 (e.g., silicon carbide) may be formed on the upper surface of n-type drift region 120, and a heavily doped (n+) n-type source region 160 (e.g., silicon carbide) may be formed in an upper portion of p-type well region 170. In some embodiments, p-type well region 170 may be formed by epitaxial growth. In some embodiments, p-type well region 170 may be formed by ion implantation. In some embodiments, the doping concentration of p-type well region 170 may be non-uniform. For example, in some embodiments, an upper portion of p-type well region 170 may have a higher doping concentration than a lower portion of p-type well region 170. In some embodiments, ion implantation may be used to form source region 160 in p-type well region 170. The n-type source region 160 , the p-type well region 170 , the drift region 120 , and the substrate 110 may form a semiconductor layer structure 206 .

[0086] 3B, a first mask 310 may be formed on the upper surface of the semiconductor layer structure 206. The first mask 310 may have an opening 310H that exposes the upper surface of the p-type well region 170 adjacent to the n-type source region 160.

[0087] Referring to FIG. 3C , an etching process can be performed through the hole 310H in the first mask 310. The etching process can be an anisotropic etch that removes predetermined portions of the p-type well region 170 and the drift region 120 to form the first trench 281. The lower surface 287a of the first trench 281 can be formed at a first level within the drift region 120. The etching process can be configured to control a depth D from the lower surface of the p-type well region 170 to which the lower surface 287a of the first trench 281 is formed. In some embodiments, the depth D can be configured to be similar to the first depth D1 shown in FIG. 2A . In some embodiments, the depth D can be configured to be similar to the second depth D2 shown in FIG. 2B . That is, the height of the first corner 290a, 290a′ (see FIGS. 2A and 2B ) above the substrate 110 can be controlled by controlling the etching depth D of the first trench 281.

[0088] 3D , a second mask 320 may be formed on the upper surface of the semiconductor layer structure 206 and in the first trench 281. The second mask 320 may have a hole 320H that exposes a portion of the lower surface of the first trench 281. The second mask 320 may cover a first sidewall of the first trench 281 while exposing a second sidewall of the first trench 281. In some embodiments, the second mask 320 may be formed after removing the first mask 310. In some embodiments, the second mask 320 may be formed by adding an additional mask structure to the first mask 310.

[0089] Referring to FIG. 3E , an etching process can be performed through the holes 320H in the second mask 320. The etching process can be an anisotropic etch that removes predetermined portions of the p-type well region 170 and / or drift region 120 to form the second trench 282. The etching process can be configured to control the second level at which the lower surface 287b of the second trench 282 is formed. The lower surface 287b of the second trench 282 can be deeper than the first level at which the lower surface 287a of the first trench 281 is formed. In some embodiments, the second trench 282 is connected to the first trench 281. For example, in some embodiments, the sidewalls of the second trench 282 can be connected to the bottom or sidewalls of the first trench 281. In some embodiments, the second trench 282 can be located on one side of the first trench 281. 3E, second trench 282 is located to the right of first trench 281, although it will be understood that the present disclosure is not limited thereto. First trench 281 and second trench 282 may form gate trench 280.

[0090] Referring to FIG. 3F, an ion implantation process 325 may be performed to form the p+ deep shield pattern 240. In some embodiments, the ion implantation process 325 may include one or more angled ion implantation processes. In the figure, the ion implantation process is shown as being angled to implant into the right sidewall of the gate trench 280. An additional “straight” (i.e., perpendicular to the substrate) ion implantation process may be performed, and / or an additional angled ion implantation process may be optionally performed to implant ions into the left sidewall. Note that in some embodiments, an angled ion implant is not necessary to implant into the left sidewall of the gate trench 280, because the left sidewall of the gate trench 280 may be implanted with ions reflecting from the bottom surface and right sidewall of the gate trench 280. The ion implantation process 325 may result in a relatively deep ion implantation into the second trench 282. The ion implantation process 325 can result in the formation of a deep shield pattern 240 on a predetermined portion of the sidewalls and lower surface of the second trench 282. In some embodiments, additional p-type ions can be implanted into a predetermined portion of the p-type well region 170. The second mask can protect at least one sidewall of the first trench 281 from the ion implantation. For example, the sidewall of the first trench 281 adjacent to the n-type source region 160 can be left unimplanted by the ion implantation process 325. This can ensure that the portion of the n-type drift region 120 below the p-well 272 to the left of the gate trench 280 is not implanted with p-type ions.

[0091] In some embodiments, a spacer dielectric, such as silicon oxide or silicon nitride, may be deposited in the second trench 282 prior to performing the ion implantation process 325. The addition of the spacer dielectric may allow for adjustment of the implantation depth and allow for more precise control of the lateral dissipation of the implanted ions. In some embodiments, the ion implantation process may then be followed by activation of the implanted ions.

[0092] 3G, the second mask 320 may be removed, and a gate insulating layer 386 may be formed on the upper surface of the semiconductor layer structure 206 and within the gate trenches 280 (including the first trench 281 and the second trench 282). The gate insulating layer 386 may comprise, for example, a silicon dioxide (SiO2) layer. x N y , Si x N y Other insulating materials such as Al2O3 and / or high dielectric constant materials such as hafnium oxide and the like may be used.

[0093] In some embodiments, prior to forming the gate insulating layer 386, further processing (e.g., etching and / or oxidation) may be performed on the second corners 290b, 290b' (see FIGS. 2A and 2B) formed at the interface between the first trench 281 and the second trench 282. The further processing may be performed to increase the radius of curvature of the second corners 290b, 290b'. By increasing the radius of curvature (e.g., making the second corners 290b, 290b' less steep), the corners may be better protected from electric field crowding. Further processing to alter the second corners 290b, 290b' is optional, however. In some embodiments, etching the second trench 282 after forming the first trench 281 may naturally increase the radius of curvature of the second corners 290b, 290b'.

[0094] An electrode layer 384 may be formed on the gate insulating layer 386. The electrode layer 384 may be formed within, and in some embodiments fill, the gate trench 280 (including the first trench 281 and the second trench 282). The electrode layer 384 may include, for example, a silicide, doped polycrystalline silicon (poly-Si or poly), and / or a stable conductor.

[0095] 3H , the electrode layer 384 and the gate insulating layer 386 may be etched to form the gate electrode 284 and the gate insulating layer 286. In some embodiments, the upper surfaces of the gate electrode 284 and the gate insulating layer 286 may be formed to be flush with the upper surface of the semiconductor layer structure 206, although embodiments of the present disclosure are not limited thereto. In some embodiments, at least a portion of the gate insulating layer 286 may extend over the upper surface of the semiconductor layer structure 206. In some embodiments, the level of the upper surface of the gate electrode 284 may be above the level of the upper surface of the semiconductor layer structure 206.

[0096] 2A and 2B, a source contact 162 may be formed on the heavily doped n-type source region 160. An interconnect layer 165 may be formed to connect the various contacts of the source contact 162. A drain contact 164 may be formed on the lower surface of the substrate 110. A gate contact (not shown) may be formed on the gate electrode 284.

[0097] 3A-3H, the first trench 281 is formed before the second trench 282, but embodiments of the present disclosure are not limited thereto. In some embodiments, the second trench 282 may be formed before the first trench 281.

[0098] 4A-4D are schematic cross-sectional views illustrating a method of fabricating the power switching devices 200A, 200B of FIGS. 2A and 2B, according to some embodiments of the present disclosure. Descriptions of elements in FIGS. 4A-4D that are the same as or similar to previously described figures are omitted for brevity. Therefore, the description of FIGS. 4A-4D will focus on differences from previously described figures.

[0099] FIG. 4A illustrates a process step after the formation of the semiconductor layer structure 206 described with respect to FIG. 3A. Referring to FIG. 4A, a first mask 410 may be formed on the upper surface of the semiconductor layer structure 206. The first mask 410 may have a hole 410H that exposes the upper surface of the p-type well region 170. In some embodiments, the hole 410H exposes the upper surface of the p-type well region 170 remote from the n-type source region 160. An etching process may be performed through the hole 410H in the first mask 410. The etching process may be an anisotropic etch that removes predetermined portions of the p-type well region 170 and the drift region 120 to form a second trench 282. A lower surface 287b of the second trench 282 may be formed at a second level within the drift region 120.

[0100] 4B , an ion implantation process 425 can be performed to form p+ deep shield pattern 240. In some embodiments, ion implantation process 425 can include one or more angled and / or straight ion implantation processes, as discussed above. Ion implantation process 425 can result in relatively deep ion implantation within second trench 282. Ion implantation process 425 can result in the formation of deep shield pattern 240 on predetermined portions of the sidewalls and lower surface of second trench 282. In some embodiments, additional p-type ions can be implanted within predetermined portions of p-type well region 170.

[0101] In some embodiments, a spacer dielectric, such as silicon oxide or silicon nitride, may be deposited in the second trench 282 prior to performing the ion implantation process 425. The addition of the spacer dielectric may allow for tuning of the implantation depth and allow for more precise control of the lateral dissipation of the implanted ions.

[0102] 4C , a second mask 420 may be formed on the upper surface of semiconductor layer structure 206 and in second trench 282. Second mask 420 may have holes 420H that expose the upper surface of p-type well region 170 adjacent n-type source region 160. In some embodiments, second mask 420 may completely fill second trench 282.

[0103] Referring to FIG. 4D , an etching process can be performed through the holes 420H in the second mask 420. The etching process can be an anisotropic etch that removes predetermined portions of the p-type well region 170 and / or the drift region 120 to form the first trenches 281. The etching process can be configured to control the level at which the lower surfaces 287a of the first trenches 281 are formed. The lower surfaces 287a of the first trenches 281 can be formed at a first level within the drift region 120. The etching process can be configured to control the depth D from the lower surface of the p-type well region 170 at which the lower surfaces 287a of the first trenches 281 are formed. In some embodiments, the depth D can be configured to be similar to the first depth D1 shown in FIG. 2A . In some embodiments, the depth D can be configured to be similar to the second depth D2 shown in FIG. 2B . That is, the position of the first corners 290a, 290a' (see FIGS. 2A and 2B) can be controlled by controlling the etching depth of the first trench 281.

[0104] In some embodiments, etching the first trench 281 can remove a predetermined portion of one sidewall of the second trench 282. As a result, a predetermined portion of the sidewall of the second trench 282 that may have been implanted and / or damaged by ion implantation can be removed. The lower surface 287b of the second trench 282 can be deeper than the first level of the lower surface 287a of the first trench 281. In some embodiments, the second trench 282 is connected to the first trench 281. For example, in some embodiments, the sidewall of the second trench 282 can be connected to the bottom and side of the first trench 281. In some embodiments, the second trench 282 can be located on one side of the first trench 281. In FIG. 4D , the second trench 282 is located to the right of the first trench 281, but it will be understood that the present disclosure is not limited thereto. The first trench 281 and the second trench 282 may form a gate trench 280 .

[0105] 4D, second mask 420 may be removed, and device processing may continue similar to the process described with respect to FIGS. 3G and 3H to form MOSFETs 200A and 200B shown in FIGS. 2A and 2B. In some embodiments, activation of the implanted ions in deep shield pattern 240 may be performed after ion implantation process 425. In some embodiments, activation may be performed before formation of first trench 281, while in some embodiments, activation may be performed after formation of first trench 281.

[0106] In some embodiments, prior to forming the gate insulating layer, further processing (e.g., etching and / or oxidation) may be performed on the second corners 290b, 290b' formed at the interface between the first trench 281 and the second trench 282. The further processing may be performed to increase the radius of curvature of the second corners 290b, 290b'. By increasing the radius of curvature (e.g., making the second corners 290b, 290b' less steep), the corners may be better protected from electric field crowding. Further processing to alter the second corners 290b, 290b' is optional, however. In some embodiments, etching the first trench 281 after forming the second trench 282 can naturally increase the radius of curvature of the second corners 290b, 290b'.

[0107] While the previous examples described MOSFET devices with asymmetric p+ shielding, the present disclosure is not limited thereto. In some examples, improved gate trench MOSFET devices can include configurations in which channels are provided on both sides of the gate trench. FIGS. 5A and 5B are schematic cross-sectional views of MOSFET devices 500A, 500B according to some examples of the present disclosure. FIGS. 5A and 5B include references to elements that are the same as or similar to elements described herein with respect to FIGS. 2A and 2B. Accordingly, the description of FIGS. 5A and 5B will focus on differences between MOSFET devices 500A, 500B and MOSFET devices 200A, 200B.

[0108] Referring to FIG. 5A , a power MOSFET device 500A can include a heavily doped n-type (n+) wide-bandgap semiconductor substrate 110 (e.g., silicon carbide). A lightly doped n-type (n−) drift region 120 (e.g., silicon carbide) can be provided on the substrate 110. In some embodiments, an upper portion of the n-type drift region 120 can include an n-type current spreading layer (not shown) that is more heavily doped than a lower portion of the n-type drift region 120. A moderately doped p-type well region 170 (e.g., silicon carbide) can be formed on an upper surface of the n-type drift region 120. This moderately doped p-type well region 170 can provide a p-well 572 for the MOSFET device 500A. The heavily doped n + The source region 160 (e.g., silicon carbide) may be formed in a region above the p-type well region 170. The substrate 110, drift region 120, moderately doped p-type well region 170, and heavily doped n + The source region 160, along with various regions / patterns formed therein, constitutes the semiconductor layer structure 506 of the MOSFET 500A.

[0109] A gate trench 580 may be formed in the semiconductor layer structure 506. The gate trench 580 may be formed by a heavily doped n + The gate trench 580 may extend through the source region 160 and the moderately doped p-type well region 170 and into the drift region 120. The gate trench 580 may include a first trench 581 and a second trench 582. The first trench 581 may be shallower than the second trench 582. In some embodiments, the second trench 582 is connected to the first trench 581. For example, in some embodiments, both sidewalls of the second trench 582 may be connected to the bottom of the first trench 581. In some embodiments, the second trench 582 may be located in a central portion of the first trench 581. For example, the second trench 582 may provide a recess extending from the bottom of the first trench 581.

[0110] The configuration of the first trench 581 and the second trench 582 can result in the gate trench 580 having a nonlinear bottom surface 587. The bottom surface 587 can have a first portion 587a at a first level, a second portion 587b at a second level, and a third portion 587c at a third level. In some embodiments, the first level and the third level can be the same level. In some embodiments, the second level is different from the first level and the third level. The first portion 587a and the third portion 587c of the bottom surface 587 can correspond to the bottom surface of the first trench 581. The second portion 587b of the bottom surface 587 can correspond to the bottom surface of the second trench 582. In some embodiments, the second level of the second portion 587b can be deeper (e.g., closer to the substrate 110) than the first level of the first portion 587a and the third level of the third portion 587c. The first level of the first portion 587a and the third level of the third portion 587c of the lower surface 587 can be a third distance D3 from the bottom of the p-well 572. In other words, the first level of the first portion 587a and the third level of the third portion 587c can extend into the drift region 120 further than the p-well 572 by the third distance D3. The first, second, and third levels of the lower surface 587 can result in a recess in the lower surface 587 of the gate trench 580 that protrudes toward the substrate 110. The recess in the gate trench 580 can extend from a central portion of the gate trench 580. As such, the lower surface 587 can have a central portion (e.g., portion 587b) that extends deeper into the drift region 120 than the edge portions (e.g., portions 587a and 587c).

[0111] The deep shield pattern 540 may be formed on the lower surface 587 of the gate trench 580. The deep shield pattern 540 may be formed by ion implantation of a heavily doped (p + ) (e.g., silicon carbide) pattern. In some embodiments, the deep shield pattern 540 may be, for example, 1×1017 / cm 3 and 1×10 21 / cm 3 In some embodiments, deep shield pattern 540 may be on first portion 587a, second portion 587b, and / or third portion 587c of lower surface 587 of gate trench 580. In some embodiments, deep shield pattern 540 may extend along substantially the entire lower surface of second trench 582. In some embodiments, deep shield pattern 540 may be between the bottom and sidewalls of second trench 582 and drift region 120. In some embodiments, deep shield pattern 540 may not cover all of the sidewalls or lower surface of first trench 581. That is, that portion of first trench 581 may directly abut drift region 120 without any portion of deep shield pattern 540 over it.

[0112] The use of the first trench 581 and the second trench 582 results in the formation of two outer corners 590a and two inner corners 590b of the gate trench 580. The two outer corners 590a may be corners between a lower surface of the first trench 581 (e.g., first portion 587a and third portion 587c) and a respective sidewall of the first trench 581. The inner corners 590b may be corners between a lower surface of the first trench 581 (e.g., first portion 587a and third portion 587c) and a respective sidewall of the second trench 582. In some embodiments, the radius of curvature of the inner corners 590b may be greater than the radius of curvature of the outer corners 590a. In some embodiments, at least a portion of the outer corner 590a may directly abut the drift region 120 without a portion of the deep shield pattern 540 thereon. In some embodiments, the inner corner 590b may be covered by a deep shielding pattern 540.

[0113] Deep shield pattern 540 may extend along the sidewalls and bottom surface of second trench 582. The deep shield pattern may expose (or not extend to) at least a predetermined portion of the sidewalls of first trench 581. The sidewalls of gate trench 580 may form channels 578 on both sides of gate trench 580 for MOSFET 500A. Similar to the device of FIG. 1A, MOSFET 500A may have conducting channels 578 on both sides of gate trench 580 during operation. However, in contrast to the embodiment of FIG. 1A, the use of first and second trenches 581, 582 in MOSFET 500A may enable improved protection for outer corners 590a of gate trench 580. In MOSFET 500A, deep shield pattern 540 is formed deeper (e.g., closer to substrate 110) than in a related device (such as MOSFET 100A of FIG. 1A). Having deep shield pattern 540 deeper into drift layer 120 provides better electric field protection for outer corners 590a during blocking operation. The use of deeper second trench 582 allows deep shield pattern 540 to be formed without excessive implant energy.

[0114] Formation of the first gate trench 581 and the second gate trench 582 may result in the formation of a first sidewall of the first gate trench 581 having a first depth 581s and a second sidewall 582s of the second gate trench 582 having a second depth 582s. The first depth 581s of the first sidewall may be the depth (e.g., the dimension perpendicular to the upper surface of the substrate) of a portion of the sidewall of the first gate trench 581 extending from the upper surface of the semiconductor layer structure 506 to one of the outer corners 590a. The second depth 582s of the second sidewall may be the depth of a portion of the sidewall of the second gate trench 582 extending from one of the inner corners 590b to the lower surface of the second gate trench 582. In some embodiments, the ratio of the first sidewall depth 581s to the second sidewall 582s (e.g., 581s / 582s) can be greater than or equal to 1. In some embodiments, the ratio of the first sidewall depth 581s to the second sidewall 582s can be between 1 and 20. In some embodiments, the ratio of the first sidewall depth 581s to the second sidewall 582s can be between 1 and 10. In some embodiments, the ratio of the first sidewall depth 581s to the second sidewall 582s can be between 1 and 5. In some embodiments, the ratio of the first sidewall depth 581s to the second sidewall 582s can be between 2 and 10. The first depth 581s of the first sidewall may also refer to the distance between the top surface of the semiconductor layer structure 506 and the first portion 587a of the lower surface 587 of the gate trench 580. The second depth 582s of the second sidewall may also refer to the distance between the first portion 587a and the second portion 587b of the lower surface 587 of the gate trench 580.

[0115] 5A, a gate insulating layer 586 may be formed on the lower surface and sidewalls of gate trench 580, including first trench 581 and second trench 582. A gate electrode 584 may be formed on gate insulating layer 586 to fill gate trench 580.

[0116] A source contact 162 may be formed on the heavily doped n-type source region 160. An interconnect layer 165 may connect the various contacts of the source contacts 162. A drain contact 164 may be formed on the lower surface of the substrate 110. A gate contact (not shown) may be formed on the gate electrode 584.

[0117] While FIG. 5A illustrates first trench 581 having a lower surface separated from p-well 572 by a third distance D3, it will be understood that the present disclosure is not limited thereto. In some embodiments, the distance between lower surfaces 587a, 587c of first trench 581 may vary. For example, FIG. 5B illustrates an example embodiment of MOSFET 500B of the present disclosure in which first trench 581 is separated from p-well 572 by a fourth distance D4, where fourth distance D4 is less than third distance D3. Elements of FIG. 5B that are substantially similar to elements of FIG. 5A will not be described for the sake of brevity.

[0118] Referring to FIG. 5B, the depth of the first trench 581′ can be made shallower than the embodiment shown in FIG. 5A. For example, the first portion 587a′ and the third portion 587b′ of the lower surface 587′ of the gate trench 580 can be formed closer to the surface of the semiconductor layer structure 506. As a result, the distance separating the first portion 587a′ and the third portion 587c′ of the lower surface 587′ from the second portion 587b can be increased. The shallower first trench 581′ can result in the outer corner 590a′ being positioned closer to the p-well 572. The embodiment of FIG. 5B can provide better protection for the outer corner 590a′ during reverse blocking, while the embodiment of FIG. 5A can provide a larger width for the JFET region, resulting in improved current flow relative to the embodiment of FIG. 5B.

[0119] 5B , forming the first gate trench 581′ and the second gate trench 582 may result in forming a first sidewall of the first gate trench 581′ having a first depth 581s′ and a second sidewall of the second gate trench 582 having a second depth 582s′. The first depth 581s′ of the first sidewall may be the depth of a portion of the sidewall of the first gate trench 581′ that extends from the top surface of the semiconductor layer structure 506 to one of the outer corners 590a′. The second depth 582s′ of the second sidewall may be the depth of a portion of the sidewall of the second gate trench 582 that extends from one of the inner corners 590b′ to the bottom surface of the second gate trench 582. In some embodiments, the ratio of the first sidewall depth 581s' to the second sidewall 582s' (e.g., 581s' / 582s') can be less than or equal to 1. In some embodiments, the ratio of the first sidewall depth 581s' to the second sidewall 582s' can be between 0.1 and 1. In some embodiments, the ratio of the first sidewall depth 581s' to the second sidewall 582s' can be between 0.05 and 1. In some embodiments, the ratio of the first sidewall depth 581s' to the second sidewall 582s' can be between 0.2 and 1. In some embodiments, the ratio of the first sidewall depth 581s' to the second sidewall 582s' can be between 0.1 and 0.5. The first depth 581s' of the first sidewall may also refer to the distance between the top surface of the semiconductor layer structure 506 and the first portion 587a' of the lower surface 587' of the gate trench 580. The second depth 582s' of the second sidewall may also refer to the distance between the first portion 587a' and the second portion 587b of the lower surface 587' of the gate trench 580.

[0120] 6A-6F are schematic cross-sectional views illustrating a method of fabricating the power switching devices 500A, 500B of FIGS. 5A and 5B, according to some embodiments of the present disclosure. Descriptions of elements in FIGS. 6A-6F that are the same as or similar to elements in FIGS. 2A and 2B are omitted for brevity. Accordingly, the description of FIGS. 6A-6F will focus on differences from previously described figures.

[0121] 6A, a substrate 110 is provided and a drift region 120 is formed on the substrate 110 by epitaxial growth. In some embodiments, the substrate 110 is a heavily doped (n + ) n-type silicon carbide, and the drift region 120 is lightly doped (n - ) silicon carbide drift region 120. In some embodiments, an n-type silicon carbide current spreading layer may be formed comprising the upper portion of drift region 120.

[0122] A moderately doped p-type well region 170 may be formed on the upper surface of the n-type drift region 120, and a heavily doped (n + ) N-type source region 160 may be formed in an upper portion of p-type well region 170. In some embodiments, p-type well region 170 may be formed by epitaxial growth. In some embodiments, p-type well region 170 may be formed by ion implantation. In some embodiments, the doping concentration of p-type well region 170 may be non-uniform. For example, in some embodiments, an upper portion of p-type well region 170 may have a higher doping concentration than a lower portion of p-type well region 170. In some embodiments, ion implantation may be used to form source region 160 in p-type well region 170. N-type source region 160, p-type well region 170, drift region 120, and substrate 110 may form semiconductor layer structure 506.

[0123] 6B, a first mask 610 may be formed on the upper surface of the semiconductor layer structure 506. The first mask 610 may have a hole 610H that exposes the upper surface of the p-type well region 170 between two adjacent n-type source regions 160.

[0124] The etching process may be performed through the holes 610H in the first mask 610. The etching process may be an anisotropic etch that removes predetermined portions of the p-type well region 170 and the drift region 120 to form the first trench 581. The lower surface 587a of the first trench 581 may be formed at a first level in the drift region 120. The etching process may be configured to control a depth D from the lower surface of the p-type well region 170 to which the lower surface 587a of the first trench 581 is formed. In some embodiments, the depth D may be configured to be similar to the third depth D3 shown in FIG. 5A . In some embodiments, the depth D may be configured to be similar to the fourth depth D4 shown in FIG. 5B . That is, the location of the outer corners 590a, 590a′ (see FIGS. 5A and 5B ) may be controlled by controlling the etching depth D of the first trench 581.

[0125] 6C , a second mask 620 may be formed on the upper surface of the semiconductor layer structure 506 and in the first trench 581. The second mask 620 may have a hole 620H that exposes a portion of the lower surface 587a of the first trench 581. The second mask 620 may cover opposing sidewalls of the first trench 581. In some embodiments, the second mask 620 may be formed after removing the first mask 610. In some embodiments, the second mask 620 may be formed by adding an additional mask structure to the first mask 610.

[0126] Referring to FIG. 6D , an etching process can be performed through the hole 620H in the second mask 620. The etching process can be an anisotropic etch that removes predetermined portions of the drift region 120 to form the second trench 582. The etching process can be configured to control the second level at which the lower surface 587b of the second trench 582 is formed. The configuration of the first trench 581 and the second trench 582 can result in the gate trench 580 having a nonlinear lower surface 587. The lower surface 587 can have a first portion 587a of the first level, a second portion 587b of the second level, and a third portion 587c of the third level. The formation of the second trench 582 can intersect the lower surface 587a of the first trench 581 to form the first portion 587a and the third portion 587c of the lower surface of the first trench 581. The lower surface 587b of the second trench 582 can be deeper than the first portion 587a and the first level of the third portion 587c of the first trench 581. In some embodiments, the second trench 582 is connected to the first trench 581. The first level through the third level of the lower surface 587 can result in a recess in the lower surface 587 of the gate trench 580 that protrudes toward the substrate 110. The recess in the lower surface 587 of the gate trench 580 can extend from a central portion of the gate trench 580. Thus, the lower surface 587 can have a central portion (e.g., second portion 587b) that extends deeper into the drift region 120 than the edge portions (e.g., first and third portions 587a and 587c).

[0127] Referring to FIG. 6E , an ion implantation process 625 can be performed to form p+ deep shield patterns 540. In some embodiments, the ion implantation process 625 can include one or more angled and / or straight ion implantation processes. The ion implantation process 625 can result in relatively deep ion implantation within the second trench 582. The ion implantation process 625 can result in the formation of the deep shield patterns 540 on predetermined portions of the sidewalls and lower surface of the second trench 582. The second mask 620 can protect the sidewalls of the first trench 581 from the ion implantation. For example, the sidewalls of the first trench 581 adjacent to the n-type source region 160 can be unimplanted by the ion implantation process 625. In some embodiments, the ion implantation process can be followed by activation of the implanted ions.

[0128] In some embodiments, a spacer dielectric, such as silicon oxide or silicon nitride, may be deposited in the second trench 582 prior to performing the ion implantation process 625. The addition of the spacer dielectric may allow for tuning of the implantation depth and allow for more precise control of the lateral dissipation of the implanted ions.

[0129] 6F, the second mask 620 may be removed, and a gate insulating layer 686 may be formed on the upper surface of the semiconductor layer structure 506 and within the gate trenches 580 (including the first trench 581 and the second trench 582). The gate insulating layer 686 may comprise, for example, a silicon dioxide (SiO) layer. x N y , Si x N y Other insulating materials such as Al2O3 and / or high dielectric constant materials such as hafnium oxide and the like may be used.

[0130] In some embodiments, prior to forming the gate insulating layer 686, further processing (e.g., etching and / or oxidation) may be performed on the two inner corners 590b, 590b' (see FIGS. 5A and 5B) of the gate trench 580 formed at the interface between the first trench 581 and the second trench 582. The further processing may be performed to increase the radius of curvature of the inner corners 590b, 590b'. By increasing the radius of curvature (e.g., making the inner corners 590b, 590b' less steep), the corners may be better protected from electric field crowding. Further processing to alter the inner corners 590b, 590b' is optional, however. In some embodiments, etching the second trench 582 after the formation of the first trench 581 may naturally increase the radius of curvature of the inner corners 590b, 590b'.

[0131] An electrode layer 684 may be formed on the gate insulating layer 686. The electrode layer 684 may be formed within, and in some embodiments may fill, the gate trench 580 (including the first trench 581 and the second trench 582). The electrode layer 684 may include, for example, a silicide, doped polycrystalline silicon (poly-Si or poly), and / or a stable conductor.

[0132] 5A and 5B , the electrode layer 684 and the gate insulating layer 686 may be etched to form the gate electrode 584 and the gate insulating layer 586. In some embodiments, the upper surfaces of the electrode 584 and the gate insulating layer 586 may be formed to be flush with the upper surface of the semiconductor layer structure 506, although embodiments of the present disclosure are not limited thereto. In some embodiments, at least a portion of the gate insulating layer 586 may extend over the upper surface of the semiconductor layer structure 506. In some embodiments, the level of the upper surface of the gate electrode 584 may be above the level of the upper surface of the semiconductor layer structure 506.

[0133] A source contact 162 may be formed on the heavily doped n-type source region 160. An interconnect layer 165 may connect the various contacts of the source contacts 162. A drain contact 164 may be formed on the lower surface of the substrate 110. A gate contact (not shown) may be formed on the gate electrode 584.

[0134] 6A-6F, the first trench 581 is formed before the second trench 582, but embodiments of the present disclosure are not limited thereto. In some embodiments, the second trench 582 may be formed before the first trench 581.

[0135] 7A-7D are schematic cross-sectional views illustrating a method of fabricating the power switching devices 500A, 500B of FIGS. 5A and 5B, according to some embodiments of the present disclosure. Descriptions of elements in FIGS. 7A-7D that are the same as or similar to previously described figures are omitted for brevity. Therefore, the description of FIGS. 7A-7D will focus on differences from previously described figures.

[0136] FIG. 7A illustrates a process step after the formation of the semiconductor layer structure 506 described with respect to FIG. 6A . Referring to FIG. 7A , a first mask 710 may be formed on the upper surface of the semiconductor layer structure 506. The first mask 710 may have a hole 710H that exposes the upper surface of the p-type well region 170. In some embodiments, the hole 710H exposes the upper surface of the p-type well region 170 that is offset from the n-type source region 160. An etching process may be performed through the hole 710H in the first mask 710. The etching process may be an anisotropic etch that removes predetermined portions of the p-type well region 170 and the drift region 120 to form a second trench 582. A lower surface 587b of the second trench 582 may be formed at a second level in the drift region 120.

[0137] 7B , an ion implantation process 725 may be performed to form p+ deep shield pattern 540. In some embodiments, ion implantation process 725 may include one or more angled and / or straight ion implantation processes. Ion implantation process 725 may result in a relatively deep ion implantation within second trench 582. Ion implantation process 725 may result in the formation of deep shield pattern 540 on predetermined portions of the sidewalls and lower surface of second trench 582. In some embodiments, additional p-type ions may be implanted within predetermined portions of p-type well region 170. In some embodiments, the ion implantation process may be followed by activation of the implanted ions.

[0138] In some embodiments, a spacer dielectric, such as silicon oxide or silicon nitride, may be deposited in the second trench 582 prior to performing the ion implantation process 725. The addition of the spacer dielectric may allow for tuning of the implantation depth and allow for more precise control of the lateral dissipation of the implanted ions.

[0139] 7C , a second mask 720 may be formed on the upper surface of semiconductor layer structure 506 and in second trench 582. Second mask 720 may have holes 720H ​​that expose upper surfaces of p-type well region 170 adjacent n-type source region 160 on either side of second trench 582. In some embodiments, second mask 720 may not completely fill second trench 582. In some embodiments, an upper surface of portion 720a of second mask 720 in second trench 582 may be formed a distance D from a lower surface of p-type well region 170.

[0140] Referring to FIG. 7D , an etching process can be performed through hole 720H ​​in second mask 720. The etching process can be an anisotropic etch that removes predetermined portions of p-type well region 170 and / or drift region 120 to form first trench 581. The etching process can be configured to control the level at which the lower surface of first trench 581 is formed. The lower surface of first trench 281 can be formed to have first portion 587a and third portion 587c at a first level within drift region 120. The etching process can be configured to control the depth D from the lower surface of p-type well region 170 to which lower surfaces 587a, 587c of first trench 581 are formed. In some embodiments, depth D can be configured to be similar to third depth D3 shown in FIG. 5A . In some embodiments, depth D can be configured to be similar to fourth depth D4 shown in FIG. 5B . That is, the location of the outer corners 590a, 590a' (see FIGS. 5A and 5B) can be controlled by controlling the etching depth of the first trench 581.

[0141] In some embodiments, etching the first trench 581 can remove a predetermined portion of the sidewall of the second trench 582. As a result, a predetermined portion of the sidewall of the second trench 582 that may have been implanted and / or damaged by the ion implantation process 725 can be removed. The lower surface 587b of the second trench 582 can be deeper than a first level of the first and third portions 587a, 587c of the lower surface of the first trench 581. In some embodiments, the second trench 582 is connected to the first trench 581. The first level through the third level of the lower surface 587 can result in a recess in the lower surface 587 of the gate trench 580 that protrudes toward the substrate 110. The recess in the lower surface 587 of the gate trench 580 can extend from a central portion of the gate trench 580. As such, lower surface 587 can have a central portion (e.g., portion 587b) that extends deeper into drift region 120 than edge portions (e.g., portions 587a and 587c). First trench 581 and second trench 582 can form gate trench 580.

[0142] Referring to Figure 7D, the second mask 720 may be removed and device processing may continue similar to the process described with respect to Figure 6F to form the MOSFETs 500A and 500B shown in Figures 5A and 5B.

[0143] This disclosure describes an apparatus for improving the ability of transistor devices to withstand damage caused by electric field concentrations at the corners of gate trenches. By providing a dual trench structure, the embodiments described herein can enable devices with improved performance characteristics and greater ruggedness, which can be particularly useful for improving the gate region in power transistors (e.g., MOSFETs, MISFETs, or IGBTs).

[0144] While various of the embodiments discussed above illustrate the construction of an n-channel MOSFET unit cell, it will be appreciated that in accordance with further embodiments of the present invention, the polarity of each of the semiconductor layers within each device may be reversed to provide a corresponding p-channel MOSFET.

[0145] The present invention has been described above with reference to the accompanying drawings, in which embodiments of the invention are shown. However, the present invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the sizes and relative sizes of layers and regions may be exaggerated for clarity. When an element or layer is referred to as being "on," "connected to," or "coupled to" another element or layer, it will be understood that the element or layer may be directly connected or coupled to the other element or layer, or that intervening elements or layers may be present. In contrast, when an element is referred to as being "directly on," "directly connected to," or "directly coupled to" another element or layer, there are no intervening elements or layers present. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items. Like numbers refer to like elements throughout.

[0146] Although the terms "first" and "second" are used herein to describe various regions, layers, and / or elements, it will be understood that these regions, layers, and / or elements are not limited by these terms. These terms are merely used to distinguish one region, layer, or element from another region, layer, or element. Thus, a first region, layer, or element discussed below could be referred to as a second region, layer, or element, and similarly, a second region, layer, or element could be referred to as a first region, layer, or element without departing from the scope of the present invention.

[0147] Relative terms such as "lower" or "bottom" and "upper" or "top" may be used herein to describe the relationship of one element to another element, as shown in the figures. It will be understood that the relative terms are intended to encompass different orientations of the device in addition to the orientation depicted in the figures. For example, if a device in the figures is turned upside down, an element described as being on the "lower" side of another element would be oriented on the "upper" side of the other element. Thus, the exemplary term "lower" can encompass both an orientation of "below" and "upper," depending on the particular orientation of the figure. Similarly, if a device in one of the figures is turned upside down, an element described as being "below" or "beneath" another element would be oriented "above" the other element. Thus, the exemplary terms "below" or "beneath" can encompass both an orientation of above and below.

[0148] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly dictates otherwise. It will be further understood that the terms "comprises," "comprising," "includes," and / or "including," as used herein, specify the presence of stated features, elements, and / or components, but do not exclude the presence or addition of one or more other features, elements, components, and / or groups thereof.

[0149] Embodiments of the present invention are described herein with reference to cross-sectional views, which are schematic illustrations. As such, variations from the shapes of the illustrations, as a result of, for example, manufacturing techniques and / or tolerances, are expected. As such, embodiments of the present invention should not be construed as limited to the particular shapes of regions illustrated herein and include deviations in shape due to, for example, manufacturing. For example, an implanted region illustrated as a rectangle will typically have rounded or curved features and / or a gradient of implant concentration at its edges, rather than a binary transition from implanted to unimplanted. As such, the regions illustrated in the figures are schematic in nature, and their shapes are not intended to represent the actual shape of a region of a device, nor are they intended to limit the scope of the present invention.

[0150] Some embodiments of the present invention are described with reference to semiconductor layers and / or regions characterized as having a conductivity type, such as n-type or p-type, which refers to the majority carrier concentration within the layer and / or region. Thus, n-type material has a majority equilibrium concentration of negatively charged electrons, while p-type material has a majority equilibrium concentration of positively charged holes. Some materials may be designated with a "+" or "-" (as in n+, n-, p+, p-, n++, n--, p++, p--, or the like) to indicate a relatively high ("+") or low ("-") concentration of majority carriers compared to another layer or region. However, such designations do not imply the presence of a particular concentration of majority or minority carriers within the layer or region.

[0151] It will be understood that the embodiments disclosed herein may be combined, so that a feature depicted and / or described with respect to a first embodiment may also be included in a second embodiment, and vice versa.

[0152] While the above embodiments are described with reference to certain figures, it is understood that some embodiments of the invention can include additional and / or intervening layers, structures, or elements, and / or certain layers, structures, or elements can be omitted. While a few illustrative embodiments of the invention have been described, those skilled in the art will readily recognize that many modifications are possible in the illustrative embodiments without substantially departing from the novel teachings and advantages of the present invention. Accordingly, all such modifications are intended to be included within the scope of the present invention as defined in the claims. It is therefore understood that the above is illustrative of the invention and should not be construed as limited to the particular embodiments disclosed, and that modifications to the disclosed embodiments, as well as other embodiments, are intended to be included within the scope of the appended claims. The present invention is defined by the appended claims, along with any equivalents of the claims contained herein.

Claims

1. A semiconductor device comprising: a semiconductor layer structure; a gate formed in a gate trench in the semiconductor layer structure; Equipped with The gate trench has a lower surface with a first portion at a first level and a second portion at a second level different from the first level.

2. the semiconductor layer structure comprises a substrate; The semiconductor device of claim 1 , wherein the second level is closer to the substrate than the first level.

3. The semiconductor device of claim 2 , wherein the substrate comprises silicon carbide.

4. The semiconductor layer structure comprises: a drift region having a first conductivity type; a well region having a second conductivity type on the drift region; a deep shield pattern having the second conductivity type below at least a portion of the lower surface of the gate trench; 4. The semiconductor device according to claim 1, comprising:

5. 5. The semiconductor device of claim 4, wherein said deep shield pattern extends to contact at least a portion of said well region.

6. The gate trench comprises: a first corner between a sidewall of the gate trench and the first portion of the lower surface of the gate trench; a second corner between the first portion of the lower surface of the gate trench and the second portion of the lower surface of the gate trench; The semiconductor device of claim 4 further comprising:

7. The semiconductor device of claim 6 , wherein the second radius of curvature of the second corner is greater than the first radius of curvature of the first corner.

8. The semiconductor device of claim 6 , wherein the deep shield pattern is between the second corner and the drift region.

9. the lower surface of the gate trench further comprises a third portion of a third level; 9. The semiconductor device of claim 1, wherein the third portion of the lower surface of the gate trench is on an opposite side of the second portion of the gate trench from the first portion of the gate trench.

10. 10. The semiconductor device of claim 9, wherein the first level and the third level are at approximately the same level.

11. A semiconductor device comprising: a substrate having a first conductivity type; a drift region having the first conductivity type on the substrate; a well region having a second conductivity type on the drift region; a gate trench extending into the well region and the drift region; Equipped with The gate trench has a non-linear lower surface with a recess that extends toward the substrate.

12. 12. The semiconductor device of claim 11, further comprising a deep shield pattern having the second conductivity type below at least a portion of the lower surface of the gate trench.

13. 13. The semiconductor device of claim 12, wherein the deep shield pattern extends to contact at least a portion of the well region.

14. 13. The semiconductor device of claim 12, wherein the deep shield pattern extends over the recess in the lower surface of the gate trench.

15. a first portion of the lower surface of the gate trench at a first level; 15. The semiconductor device of claim 11, wherein a second portion of the lower surface of the gate trench is at a second level different from the first level.

16. 16. The semiconductor device of claim 15, wherein the second portion of the lower surface of the gate trench is within the recess.

17. the lower surface of the gate trench further comprises a third portion of a third level; 17. The semiconductor device of claim 15 or 16, wherein the third portion of the lower surface of the gate trench is on an opposite side of the second portion of the gate trench from the first portion of the gate trench.

18. 20. The semiconductor device of claim 17, wherein the first level and the third level are at approximately the same level.

19. The gate trench comprises: a first corner between a sidewall of the gate trench and the first portion of the lower surface of the gate trench; a second corner between the first portion of the lower surface of the gate trench and the recess; 16. The semiconductor device of claim 15, further comprising:

20. the recess is within a central portion of the lower surface of the gate trench; 20. The semiconductor device of claim 11, wherein the predetermined portions of the lower surface are on opposite sides of the recess.

21. 1. A method of forming a semiconductor device, comprising: providing a semiconductor layer structure; Etching a first gate trench in the semiconductor layer structure; etching a second gate trench in the semiconductor layer structure; performing ion implantation into a lower surface of the second gate trench; Including, the second gate trench is deeper than the first gate trench; At least a portion of the second gate trench is connected to the first gate trench.

22. 22. The method of claim 21, wherein the step of etching the second gate trench is preceded by forming a mask over at least a portion of the first gate trench.

23. forming a gate insulating layer over the first gate trench and the second gate trench; forming a gate electrode on the gate insulating layer; 23. The method of claim 21 or 22, further comprising:

24. 22. The method of claim 21, wherein the step of etching the second gate trench is performed before etching the first gate trench.

25. 25. The method of claim 24, wherein the step of etching the first gate trench is preceded by forming a mask over at least a portion of the second gate trench.

26. the second gate trench extends through a central portion of a lower surface of the first gate trench; 26. The method of claim 24 or 25, wherein the predetermined portion of the lower surface of the first gate trench is on an opposite side of the second gate trench.

27. the semiconductor layer structure comprises a drift region having a first conductivity type; 27. The method of any one of claims 21 to 26, wherein the method further comprises treating a corner of the drift region at an interface between the first gate trench and the second gate trench, thereby increasing a radius of curvature of the corner.

28. 28. The method of any one of claims 21 to 27, wherein performing the ion implantation into the lower surface of the second gate trench comprises performing an angled ion implant.

29. the semiconductor layer structure includes a drift region having a first conductivity type and a well region having a second conductivity type; 27. The method of claim 21, wherein performing the ion implantation into the lower surface of the second gate trench comprises performing the ion implantation of a deep shield pattern having the second conductivity type into sidewalls and the lower surface of the second gate trench.

30. 30. The method of claim 29, wherein the deep shield pattern extends to contact at least a portion of the well region.

31. A semiconductor device comprising: a substrate having a first conductivity type; a drift region having the first conductivity type on the substrate; a well region having a second conductivity type on the drift region; a gate trench extending into the well region and the drift region; Equipped with The semiconductor device, wherein the gate trench has a lower surface with a first portion and a second portion, the second portion being closer to the substrate than the first portion.

32. 32. The semiconductor device of claim 31, further comprising a deep shield pattern having the second conductivity type on the second portion of the lower surface of the gate trench.

33. 33. The semiconductor device of claim 32, wherein the deep shield pattern extends to contact at least a portion of the well region.

34. the lower surface of the gate trench further comprises a third portion; 33. The semiconductor device of claim 31 or 32, wherein the third portion of the lower surface of the gate trench is on an opposite side of the second portion of the gate trench from the first portion of the gate trench.

35. The gate trench comprises: a first corner between a first sidewall of the gate trench and the first portion of the lower surface of the gate trench; a second corner between the first portion of the lower surface of the gate trench and a second sidewall of the gate trench; 32. The semiconductor device of claim 31, further comprising: the second sidewall extending between the first and second portions of the lower surface of the gate trench.

36. 36. The semiconductor device of claim 35, wherein the second radius of curvature of the second corner is greater than the first radius of curvature of the first corner.

37. a deep shield pattern having the second conductivity type; 36. The semiconductor device of claim 35, wherein the deep shield pattern is between the second corner of the gate trench and the drift region.

38. 38. The semiconductor device of claim 37, wherein at least a portion of the first corner of the gate trench directly contacts the drift region without the deep shield pattern between the portion of the first corner and the drift region.

39. 36. The semiconductor device of claim 35, wherein a ratio of the first depth of the first sidewall to the second depth of the second sidewall is between 1 and 10.

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