Flat panel manufacturing system and robot control device used therein

Abstract

To provide a flat panel manufacturing system and a robot control device used therein that can prevent a robot from colliding with a wall surface inside a chamber when the robot advances in the chamber.SOLUTION: A flat panel manufacturing system 1 includes: sensing means 120 configured to, while causing robot control means 110 to operate a holding portion 22 of a transport robot 20 to move from a first chamber TC toward a second chamber PC, sense, by a sensor device 30, a distance to a wall surface inside the second chamber PC; and monitoring means 130 configured to monitor a state of sensing being performed by the sensing means 120.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The present invention relates to a flat panel manufacturing system and a robot controller used therein. [Background technology]

[0002] In recent years, industrial robots have become widespread in the industrial world, including large-scale manufacturing systems for processing glass substrates for large flat panels, including flat panel displays (FPDs) such as liquid crystal displays and organic electroluminescence (EL) displays.

[0003] In such large-scale manufacturing systems, multiple process chambers are arranged to perform various processes on workpieces such as glass substrates. Furthermore, a transfer robot (transfer device) is arranged in the transfer chamber, and the transfer robot (transfer device) transports the workpiece to a desired position in each process chamber.

[0004] In Patent Document 1, the transfer device is equipped with an optical sensor at the tip of a support pick, and by moving the support pick upward in the transfer chamber and irradiating light toward the tip, the transfer device identifies the upper end position of the opening between the transfer chamber and the load lock chamber. Furthermore, in the load lock chamber, the support pick is moved upward and rotated while irradiating light toward the tip and downward, thereby identifying the upper end position / side wall position of the buffer (groove). Then, the operation of the transfer device is corrected based on the identified upper end position of the opening and the upper end position / side wall position of the buffer (groove). In this way, Patent Document 1 automatically adjusts the operating position of the transfer device. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 2019-220588 Summary of the Invention [Problem to be solved by the invention]

[0006] However, there is a possibility that the transfer chamber and the process chamber are not installed straight and with high accuracy. For example, if the process chamber is installed at an angle to the transfer chamber, the transfer device installed in the transfer chamber may enter the process chamber and collide with the wall (inner wall) of the process chamber as it moves further inside the process chamber.

[0007] Therefore, an object of the present invention is to provide a flat panel manufacturing system and a robot control device used therein that can prevent a robot from colliding with the wall surface inside a chamber when moving through the chamber. [Means for solving the problem]

[0008] A flat panel manufacturing system according to one embodiment of the present invention is a flat panel manufacturing system that manufactures flat panels and includes a transport robot that transports workpieces, a first chamber in which the transport robot is located, and a second chamber that is located adjacent to the first chamber so as to face the opening of the first chamber.The system also includes a sensor device located at the tip of the holding part of the transport robot that holds the workpiece, a robot control means that controls the operation of the transport robot, a sensing means that senses the distance to the wall surface inside the second chamber using the sensor device while the robot control means operates the holding part of the transport robot to advance from the first chamber toward the second chamber, and a monitoring means that monitors the sensing status by the sensing means.

[0009] According to this aspect, the sensor device is disposed at the tip of the holder of the transport robot, and the sensing means senses the distance to the wall surface inside the second chamber using the sensor device while operating the holder of the transport robot to advance from the first chamber toward the second chamber. The monitoring means monitors the sensing status. This makes it possible to determine whether there is a risk of the tip of the holder colliding with the wall surface and prevent a collision before actually operating the transport robot to remove a workpiece placed at a predetermined position inside the chamber and to transport and place the workpiece at the predetermined position.

[0010] In the above aspect, a sensor device may be disposed at the tip of the holder of the transfer robot using an attachment mechanism that is capable of sensing the distance to the wall surface inside the second chamber.

[0011] According to this aspect, the sensor device is attached to the tip of the holder of the transport robot using the attachment mechanism, so that the sensor device is attached to a predetermined position. As a result, the position of the sensor device can be accurately determined without calibration, and the distance to the wall surface sensed by the sensor device can be more accurately determined.

[0012] In the above aspect, the sensor device may include a distance measuring sensor capable of sensing the distance to the wall surface inside the second chamber in at least one direction that is perpendicular to the direction of travel of the holder of the transfer robot and is also horizontal.

[0013] According to this aspect, the sensor device includes a distance measuring sensor that can appropriately sense the direction lateral to the direction of movement of the holding part of the transport robot, so that the distance to the side wall surface inside the second chamber can be more appropriately grasped.

[0014] In the above aspect, the monitoring means may notify the user when the distance to the wall surface inside the second chamber becomes equal to or less than a threshold value based on the state of sensing by the sensing means.

[0015] According to this aspect, the monitoring means notifies the operator when the distance to the wall surface inside the second chamber falls below a threshold, thereby appropriately informing the operator that there is a risk of colliding with the wall surface.

[0016] In the above aspect, the monitoring means may output information relating to the distance to the wall surface inside the second chamber based on the state of sensing by the sensing means.

[0017] According to this aspect, the monitoring means outputs information relating to the distance to the wall surface inside the second chamber, and therefore, it is possible to more appropriately notify the operator of the risk (degree) of colliding with the wall surface.

[0018] A robot control device according to one embodiment of the present invention is a robot control device that controls the operation of a transport robot used in a flat panel manufacturing system that manufactures flat panels, and includes: a robot control means that controls the operation of the transport robot; a sensing means that uses the robot control means to operate the holding part of the transport robot to move from a first chamber in which the transport robot is located toward a second chamber located adjacent to the first chamber so as to face the opening of the first chamber, and senses the distance to the wall surface inside the second chamber using a sensor device located at the tip of the holding part of the transport robot; and a monitoring means that monitors the sensing status by the sensing means.

[0019] According to this aspect, the sensing means operates the holder of the transport robot to move from the first chamber toward the second chamber, while sensing the distance to the wall surface inside the second chamber using the sensor device. The monitoring means monitors the sensing status. This makes it possible to determine whether there is a risk of the tip of the holder colliding with the wall surface and prevent a collision before actually operating the transport robot to remove a workpiece placed at a predetermined position inside the chamber and to transport the workpiece to the predetermined position and place it there. [Effects of the Invention]

[0020] According to the present invention, it is possible to provide a flat panel manufacturing system and a robot control device used therein that can prevent a robot from colliding with the wall surface inside a chamber when moving through the chamber. [Brief explanation of the drawings]

[0021] [Figure 1] 1 is an external perspective view showing an overview of a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 2] 1 is a plan view showing the internal structure of a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 3] 1 is a schematic diagram showing the configuration of a transfer robot system 10 used in a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 4] 1 is a schematic diagram showing a state in which a sensor device 30 is arranged on a transfer robot 20 used in a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 5] 1 is a functional block diagram showing each function of a robot control device 100 that controls the operation of a transfer robot 20 used in a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 6] FIG. 10 is a schematic diagram showing the state in which the transfer robot 20 advances from the transfer chamber TC toward the process chamber PC. [Figure 7] 1 is a flowchart showing the flow of processing in a robot control method M100 executed by a robot control device 100 that controls the operation of a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0022] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. Note that the embodiment described below is merely a specific example for carrying out the present invention and is not intended to limit the present invention. Furthermore, to facilitate understanding of the description, the same components in each drawing will be assigned the same reference numerals as much as possible, and duplicate descriptions may be omitted.

[0023] <One embodiment> [Flat panel manufacturing system configuration] Fig. 1 is an external perspective view showing an overview of a flat panel manufacturing system 1 according to one embodiment of the present invention, and Fig. 2 is a plan view showing the internal structure of the flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in Fig. 1 and Fig. 2, the flat panel manufacturing system 1 is a large multi-chamber system that includes a transfer chamber TC in the center and multiple process chambers PC and load lock chambers LLC arranged to surround the transfer chamber TC.

[0024] The flat panel manufacturing system 1 is a vacuum processing system for processing glass substrates for large flat panels including flat panel displays (FPDs) such as liquid crystal displays and organic EL displays.

[0025] The load lock chamber LLC is a chamber for transferring workpieces W (such as glass substrates) between the outside and the process chambers PC before and after processing in the process chambers PC, allowing the process chambers PC to maintain a vacuum state without being exposed to the outside atmosphere. The transfer chamber TC can also maintain a vacuum state.

[0026] The transfer chamber TC is configured to be able to maintain a vacuum state as described above, and is equipped with a transfer robot 20. The transfer robot 20 has a transfer mechanism (hand holders and fingers) that transfers the workpiece W between each process chamber PC and the load lock chamber LLC.

[0027] The multiple process chambers PC are configured to be able to maintain a vacuum state as described above, and are equipped with a mounting table on which the workpiece W transferred by the transfer robot 20 arranged in the transfer chamber TC is placed. The mounting table may be configured, for example, to be provided with multiple support pins so that the workpiece W is supported by the support pins. Then, in each process chamber PC, with the workpiece W placed thereon, plasma processing such as CVD (Chemical Vapor Deposition), etching, ashing, or film formation under vacuum conditions may be performed on the workpiece W. Note that the same type of processing may be performed in each process chamber PC, or different types of processing may be performed in each process chamber.

[0028] [Transport robot system configuration] 3 is a schematic diagram showing the configuration of a transfer robot system 10 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 3, the transfer robot system 10 includes a transfer robot 20, a robot control device 100, and a teaching pendant TP.

[0029] As described with reference to FIGS. 1 and 2 , the transfer robot 20 is disposed in the transfer chamber TC in the flat panel manufacturing system 1 and transfers a workpiece W between each process chamber PC and the load lock chamber LLC. The transfer robot 20 is, for example, a horizontal articulated robot intended to transfer glass substrates, and is a clean transfer robot used for transfers in clean environments in the manufacturing of semiconductor devices and flat panel displays, the medical and food industries, and the like. In this embodiment, the transfer robot 20 is, for example, a two-axis or three-axis cylindrical coordinate system, and has a hand holder 21 and fingers (holding portions) 22 as end effectors. The transfer of the workpiece W (e.g., a glass substrate) while held by the fingers 22 will be described as an example.

[0030] The robot control device 100 is a device that controls the operation of the transfer robot 20. For example, the robot control device 100 is connected to an operating device such as a teaching pendant TP and can acquire operation instruction information input via the operating device. Based on the operation instruction information, the robot control device 100 starts and stops the transfer robot 20, and operates each axis, arm, and hand holder 21 (fingers 22) of the transfer robot 20 to take out, transport, and place a workpiece W in each process chamber PC and load lock chamber LLC.

[0031] The teaching pendant TP is an operating device operated by an operator, and receives input from the operator regarding operation instruction information for the transport robot 20, such as the transport work of transporting the workpiece W. Typically, the operator uses an operating device such as the teaching pendant TP to input appropriate instruction information, for example, for starting and stopping the transport robot 20, as well as for setting the transport robot 20, operating the arm and hand holder 21 (fingers 22), and registering teaching points.

[0032] Furthermore, regarding the registration of teaching points, an operator may sequentially register teaching points on the movement path of the transfer robot 20 using an operating device such as a teaching pendant TP while operating the transfer robot 20, or teaching points may be automatically registered by automatic teaching. Automatic teaching is effective in environments or situations where an operator cannot enter the interior and cannot grasp the state inside each chamber from the outside, such as the flat panel manufacturing system 1.

[0033] Here, there is a situation in which the transfer robot 20 installed in the transfer chamber TC inserts its fingers 22 into the load lock chamber LLC, removes the workpiece W placed there using the fingers 22, and transfers it to a mounting table in the process chamber PC while it is held by the fingers 22. The transfer robot 20 operates the arm and hand holder 21 (fingers 22) based on operation instruction information from the robot control device 100, removes the workpiece W from the load lock chamber LLC, and transfers it to the process chamber PC as the transfer destination.

[0034] At this time, the finger 22 holding the workpiece W advances from the transfer chamber TC toward the load lock chamber LLC or the process chamber PC and proceeds inside the load lock chamber LLC or the process chamber PC. For example, if the load lock chamber LLC or the process chamber PC is installed at an angle with respect to the transfer chamber TC, or if the gate (opening) serving as the entrance / exit of the transfer chamber TC and the gate (opening) serving as the entrance / exit of the load lock chamber LLC or the process chamber PC are misaligned, the finger 22 holding the workpiece W may advance toward the side wall surface inside the load lock chamber LLC or the process chamber PC after entering the load lock chamber LLC or the process chamber PC.

[0035] The robot control device 100 needs to properly grasp the wall surfaces of the load lock chamber LLC and the process chamber PC to prevent the finger 22 from colliding with the wall surfaces. In other words, it is important to properly grasp the wall surfaces of the load lock chamber LLC and the process chamber PC, and a method for using a sensor device to grasp the wall surfaces of the load lock chamber LLC and the process chamber PC and prevent the finger 22 from colliding with the wall surfaces will be described below.

[0036] 4 is a schematic diagram showing a state in which a sensor device 30 is disposed on a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 4, the sensor device 30 is disposed on the tip of a finger 22 attached to a hand holder 21 in the transfer robot 20.

[0037] The sensor device 30 located at the tip of the finger 22 is calibrated, and the robot control device 100 is aware of the position of the sensor device 30 (the positions of the two sensors 31 and 32 described below), and is also able to understand the distance from the position of the finger 22 to the wall surface sensed by the sensor device 30 (robot coordinate system).

[0038] The sensor device 30 has two sensors 31 and 32 at both ends thereof. For example, the two sensors 31 and 32 may be attached to the front surface, the back surface, the surface facing the direction of travel, the surface facing the hand holder 21, or an outer side surface of the sensor device 30.

[0039] A sensor device 30 equipped with two sensors 31 and 32 is placed and held on the tip of a finger 22 of the transport robot 20, and the two sensors 31 and 32 are capable of sensing the outward direction. Specifically, the two sensors 31 and 32 may be distance measuring sensors capable of sensing the distance from each of the two ends to a wall surface in the outward direction, in a direction perpendicular to the moving direction of the finger 22 and in a horizontal direction.

[0040] This makes it possible to sense the distance from sensor 31 to the wall surface in the outward direction, and the distance from sensor 32 to the wall surface in the outward direction. In other words, by installing two sensors 31 and 32 at both ends of sensor device 30, it is possible to grasp the distance from each end of the tip of finger 22 to the wall surface.

[0041] The position of the sensor installed in the sensor device 30 is not limited to the end of the sensor device 30. For example, if a sensor is installed in the center of the sensor device 30 and the position of the sensor is known by the robot control device 100 through calibration, the distance from the sensor to the wall surface can be sensed, and the distance from both ends of the tip of the finger 22 to the wall surface can be known based on the sensing result.

[0042] Furthermore, the tip of the finger 22 of the transport robot 20 may be provided with an attachment mechanism that can attach the sensor device 30 so as to be able to sense the distance from each end of the tip of the finger 22 to a wall surface in the outward direction. For example, the attachment mechanism may be configured so that the sensor device 30 is fitted to the tip of the finger 22, and by fitting the sensor device 30 to the tip of the finger 22 using the attachment mechanism, sensors (for example, two sensors 31, 32) installed in the sensor device 30 may be able to sense the distance to the wall surface.

[0043] The robot control device 100 knows in advance the position of the sensor device 30 (for example, the positions of the two sensors 31, 32) when the sensor device 30 is placed at the tip of the finger 22 using the attachment mechanism, and can also know the distance to the wall surface sensed by the sensor device 30 (robot coordinate system). In this case, the above-mentioned calibration is not necessary.

[0044] The sensor installed in the sensor device 30 is not limited to a distance measurement sensor, but may be, for example, a camera, a LiDAR, or another optical sensor.

[0045] Furthermore, the sensor device 30 may also include a control unit and a communication unit, and may notify the robot control device 100 of information detected (acquired) by the two sensors 31 and 32, for example.

[0046] [Robot control device configuration] 5 is a functional block diagram showing the functions of a robot control device 100 that controls the operation of a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 5, the robot control device 100 includes a robot control means 110, a sensing means 120, and a monitoring means 130, and controls the operation of the transfer robot 20. The monitoring means 130 includes a notification means 131 and a display means 132.

[0047] The robot control device 100 moves the hand holder 21 (fingers 22) from the transfer chamber TC toward the load lock chamber LLC (process chamber PC) with the sensor device 30 held at the tip of the finger 22, and senses the distance to the wall surface inside the load lock chamber LLC (process chamber PC) using the two sensors 31 and 32 of the sensor device 30. Then, the robot control device 100 monitors the distance from the tip of the finger 22 of the transfer robot 20 to the wall surface based on the sensing status.

[0048] 3, the robot control device 100 is connected to the transport robot 20, and further has many functions for performing various controls and processes based on operation instruction information from an operating device such as a teaching pendant TP, or automatic control (automatic teaching). Here, the robot control device 100 is mainly shown to have a function for monitoring the distance from the tip of the finger 22 of the transport robot 20 to the wall surface, but it also has other configurations and functions.

[0049] The robot control means 110 operates the transfer robot 20. For example, the transfer robot 20 is in a state where the sensor device 30 is held by the fingers 22, and the robot control means 110 operates each axis, arm, and hand holder 21 (fingers 22) of the transfer robot 20. Two sensors 31 and 32 attached to the sensor device 30 are configured to be able to sense the distance to the wall surface inside the load lock chamber LLC (process chamber PC).

[0050] The sensing means 120 includes, for example, two sensors 31 and 32 in the sensor device 30, and senses the distance to each wall surface while the hand holder 21 (fingers 22: holding part) of the transport robot 20 advances from the transfer chamber TC (first chamber) toward the load lock chamber LLC (process chamber PC) (second chamber) under the control of the robot control means 110. Specifically, the sensing means 120 acquires information relating to the distance to the wall surface sensed by the two sensors 31 and 32.

[0051] The monitoring means 130 monitors the sensing status of the sensing means 120. For example, the monitoring means 130 continuously monitors information about the distance to the wall surface sensed by the sensing means 120, and when the distance becomes equal to or less than a threshold, the notification means 131 notifies the operator. Specifically, the notification means 131 may notify an operating device such as a teaching pendant TP that there is a risk of the finger 22 colliding with the wall surface, thereby issuing a warning or calling the operator's attention.

[0052] Furthermore, instead of or in addition to the above notification, the notification means 131 may notify information related to the distance. Specifically, the notification means 131 may notify the specific distance between the tip of the finger 22 and the wall surface, or may notify the degree of danger (for example, "Caution," "Danger," or "Emergency stop required") according to the distance between the tip of the finger 22 and the wall surface, with a plurality of threshold values ​​set in advance, such as ○ mm, △ mm, and □ mm.

[0053] In addition, based on the sensing status by the sensing means 120, the robot control means 110 may stop the operation of the transport robot 20, slow down the operating speed, or retract the fingers 22 to exit the load lock chamber LLC (process chamber PC).

[0054] Furthermore, the monitoring means 130 may continuously monitor the distance to the wall surface sensed by the sensing means 120, and the display means 132 may display information related to the distance. For example, the display means 132 may display the specific distance between the tip of the finger 22 and the wall surface on a display screen of an operating device such as the teaching pendant TP, either constantly or at predetermined time intervals. As a specific example, the display means 132 may display an image of the interior of the chamber, including the wall surface, on the display screen, and superimpose an image of the finger 22 according to the distance to the wall surface sensed by the sensing means 120, and may further display a scale thereon. This allows the operator to specifically grasp the state of the interior of the chamber, including the distance between the finger 22 and the wall surface, on the display screen of the operating device such as the teaching pendant TP.

[0055] [About the operation of the transport robot] 6 is a schematic diagram showing the transfer robot 20 entering the process chamber PC from the transfer chamber TC. As shown in Fig. 6, the process chamber PC has a gate (opening) which is an entrance and exit to the transfer chamber TC, side walls on both sides of the gate, and a rear wall on the rear side.

[0056] The robot control device 100 operates the hand holder 21 (finger 22) of the transport robot 20 placed in the transfer chamber TC, causing the finger 22 to enter from the transfer chamber TC through the gate (opening) toward the process chamber PC, and then proceed further within the process chamber PC.

[0057] The finger 22, holding the sensor device 30 at its tip, enters the process chamber PC from the transfer chamber TC and moves inside the process chamber PC to the removal or installation position of the workpiece W to be placed in the process chamber PC.

[0058] Sensors 31 and 32 are attached to both ends of a sensor device 30 disposed at the tip of a finger 22 of the transfer robot 20, and the two sensors 31 and 32 sense the distance to the side wall surfaces on both sides inside the process chamber PC.

[0059] Specifically, from the time the tip of the finger 22 enters the process chamber PC until it reaches the removal position or installation position of the work W in the process chamber PC, the two sensors 31, 32 each sense the distance to the side wall surfaces on both sides inside the process chamber PC.

[0060] Then, when the tip of the finger 22 is about to collide with the side wall surface, a notification to that effect is given, and further, the hand holder 21 (fingers 22) of the transport robot 20 is stopped. For example, when the distance between the tip of the finger 22 and the side wall surface becomes equal to or less than a threshold, it may be determined that a collision is about to occur (there is a risk of a collision).

[0061] [Robot control method] Next, we will explain in detail the method for controlling the operation of the transport robot 20 when the hand holder 21 (finger 22) of the transport robot 20 is advanced from the transfer chamber TC toward the process chamber PC and the distance to the wall surface is sensed using the sensor device 30 held at the tip of the finger 22.

[0062] 7 is a flowchart showing the processing flow of a robot control method M100 executed by a robot control device 100 that controls the operation of a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 7, the robot control method M100 includes steps S110 to S160, and each step is executed by a processor included in the robot control device 100.

[0063] In step S110, the robot control device 100 moves the hand holder 21 (fingers 22) of the transfer robot 20, with the sensor device 30 held at the tip of the finger 22, from the transfer chamber TC toward the process chamber PC.

[0064] In step S120, while the finger 22 is advanced from the transfer chamber TC toward the process chamber PC, sensing is performed in both lateral directions (both outward directions) relative to the direction of advancement by the sensor device 30 held at the tip of the finger 22. Specifically, sensing is performed in both lateral directions (both outward directions) relative to the direction of advancement by the sensors 31 and 32 attached to both ends of the sensor device 30 installed at the tip of the finger 22.

[0065] In step S130, the distances to the sidewall surfaces on both sides are calculated based on the sensing conditions in both lateral directions (both outward directions) relative to the traveling direction by the sensor device 30 in step S120.

[0066] In step S140, it is determined whether the distance to the side wall surfaces on both sides calculated in step S130 is less than or equal to a threshold value. If it is less than or equal to the threshold value ("Yes" in step S140), the process proceeds to step S160; if it is not less than or equal to the threshold value ("No" in step S140), the process proceeds to step S150.

[0067] In step S150, it is determined whether the target position in the process chamber PC has been reached. Here, the target position is, for example, a position where the workpiece W is removed or placed in the process chamber PC, and is the (planned or target) position where the finger 22 will reach in the process chamber PC.

[0068] Specifically, it is determined whether the finger 22 has entered the process chamber PC and then reached the removal position or installation position of the workpiece W in that process chamber PC, and if it is determined that the removal position or installation position of the workpiece W has been reached ("Yes" in step S150), the processing is terminated, and if it is determined that the removal position or installation position of the workpiece W has not been reached ("No" in step S150), the processing returns to step S120. In other words, sensing (steps S120 to S140) is continued from the time the finger 22 enters the process chamber PC until it reaches the removal position or installation position of the workpiece W in that process chamber PC.

[0069] In step S160, a notice (warning) is given that the distance between the tip of the finger 22 and the side wall surface is equal to or less than the threshold, and further, the hand holder 21 (fingers 22) of the transfer robot 20 is stopped.

[0070] That is, while the finger 22 holding the sensor device 30 at its tip is advanced inside the process chamber PC, the sensors 31, 32 attached to the sensor device 30 sense the distance to the side wall surface, and if the distance is equal to or less than a threshold, it is determined that there is a risk of collision and a warning is issued and the operation is stopped, but if the distance is not equal to or less than the threshold, it is determined that there is no risk of collision and the sensing continues while the finger 22 is advanced. Then, if there is no risk of collision with the side wall surface and the finger 22 can reach the target position inside the process chamber PC, the process ends.

[0071] As described above, in the flat panel manufacturing system 1, transfer robot system 10, robot control device 100, and robot control method M100 according to one embodiment of the present invention, the sensor device 30, to which the two sensors 31 and 32 are attached, is held at the tip of the finger 22. While the finger 22 advances from the transfer chamber TC toward the load lock chamber LLC (process chamber PC), the two sensors 31 and 32 sense the distance to the wall surface inside the load lock chamber LLC (process chamber PC). If a risk of collision with the wall surface is determined based on the sensing status, a notification to that effect is sent to an operating device such as a teaching pendant TP, or the finger 22 is stopped. As a result, before the transfer robot 20 is actually operated to remove a workpiece W placed at a predetermined position within the load lock chamber LLC (process chamber PC) or to transport and place the workpiece W at the predetermined position, it is possible to determine whether there is a risk of the finger 22 colliding with the wall surface and prevent the collision from occurring.

[0072] In the present embodiment, the sensor device 30 is held at the tip of the finger 22 as one unit including the two sensors 31, 32, but is not limited to this, and for example, the two sensors 31, 32 may be configured to be attached to the tip of each of the fingers 22. Specifically, the sensors 31, 32 may be attached directly or indirectly via an attachment mechanism to the tip of each of the two outermost (both sides) fingers 22 of the plurality of fingers 22.

[0073] Furthermore, in this embodiment, two sensors 31 and 32 are installed in the sensor device 30, and the distance from the sensor 31 to the wall surface in the outward direction and the distance from the sensor 32 to the wall surface in the outward direction are sensed, but this is not limited to this. For example, the sensor device 30 may be configured to have only one sensor installed, and if the size of the chamber is known in advance, the distance from one sensor to the wall surface in one direction can be sensed and the distance to the wall surface in the other direction (opposite direction) can be calculated to determine the size.

[0074] Furthermore, in this embodiment, the distance between the finger 22 and the side wall surface in the load lock chamber LLC (process chamber PC) is sensed, but this is not limiting, and for example, the distance to the back wall surface in the moving direction may be sensed. Specifically, the sensor device 30 may be provided with a distance measuring sensor capable of sensing the distance to the wall surface (back wall surface) in the moving direction and horizontal direction of the finger 22, and when the distance to the back wall surface becomes equal to or less than a threshold, the sensor device 30 may notify the operation device to that effect and stop the hand holder 21 (fingers 22) of the transfer robot 20. Furthermore, information regarding the distance to the back wall surface may be displayed on a display screen of the operation device.

[0075] In this embodiment, the situation in which the hand holder 21 (fingers 22) of the transfer robot 20 advances from the transfer chamber TC toward the process chamber PC has been described as an example, but the present invention is not limited to this. For example, the present invention can be similarly applied to a situation in which the hand holder 21 (fingers 22) of the transfer robot 20 advances from the transfer chamber TC toward the load lock chamber LLC.

[0076] The above-described embodiments are intended to facilitate understanding of the present invention and are not intended to limit the present invention. The elements of the embodiments, as well as their arrangement, materials, conditions, shapes, sizes, etc., are not limited to those illustrated and can be modified as appropriate. Furthermore, configurations shown in different embodiments can be partially substituted or combined with each other. [Explanation of symbols]

[0077] 1...flat panel manufacturing system, 10...transfer robot system, 20...transfer robot, 21...hand holder, 22...finger, 30...sensor device, 31, 32...sensor, 100...robot control device, 110...robot control means, 120...sensing means, 130...monitoring means, 131...notification means, 132...display means, TC...transfer chamber, PC...process chamber, LLC...load lock chamber, TP...teaching pendant, W...work, M100...robot control method, S110 to S160...each step of robot control method M100

Claims

1. A flat panel manufacturing system for manufacturing flat panels, comprising: a transfer robot that transfers a workpiece; a first chamber in which the transfer robot is disposed; and a second chamber that is disposed adjacent to the first chamber so as to face an opening of the first chamber, a sensor device disposed at a tip of a holder of the transport robot that holds the workpiece; a robot control means for controlling the operation of the transport robot; a sensing means for sensing a distance to a wall surface inside the second chamber by the sensor device while operating a holding unit of the transfer robot by the robot control means to move the holding unit from the first chamber toward the second chamber; and a monitoring means for monitoring the sensing status of the sensing means. Flat panel manufacturing system.

2. the sensor device is disposed at the tip of a holder of the transfer robot using an attachment mechanism that is capable of sensing the distance to a wall surface inside the second chamber; The flat panel manufacturing system of claim 1 .

3. the sensor device includes a distance measuring sensor capable of sensing a distance to a wall surface inside the second chamber in at least one direction that is a direction perpendicular to a moving direction of the holder of the transfer robot and a horizontal direction, The flat panel manufacturing system of claim 1 .

4. The monitoring means notifies the user when the distance to the wall surface inside the second chamber becomes equal to or less than a threshold value based on the sensing state of the sensing means. The flat panel manufacturing system of claim 1 .

5. the monitoring means outputs information relating to the distance to the wall surface inside the second chamber based on the sensing state by the sensing means. The flat panel manufacturing system of claim 1 .

6. A robot control device for controlling the operation of a transport robot used in a flat panel manufacturing system for manufacturing flat panels, a robot control means for controlling the operation of the transport robot; a sensing means for operating a holding part of the transport robot by the robot control means to move the transport robot from a first chamber in which the transport robot is disposed toward a second chamber disposed adjacent to the first chamber so as to face an opening of the first chamber, and sensing a distance to a wall surface inside the second chamber using a sensor device disposed at a tip end of the holding part of the transport robot; and a monitoring means for monitoring the sensing status of the sensing means. Robot control device.

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