Flat panel manufacturing system and robot control device used therein

Abstract

To provide a flat panel manufacturing system and a robot control device used therein that can prevent a holding portion of a transport robot that holds a workpiece from colliding with obstacles (support pins and protrusions) inside a chamber when taking out the workpiece that has been placed at a predetermined position, and when transporting the workpiece to the predetermined position and placing it there.SOLUTION: A flat panel manufacturing system 1 includes: sensing means 120 configured to, while operating holding portions 22 of a transport robot 20 to advance from a first chamber TC toward a second chamber PC, sense, by a sensor device 30 held at the tips of respective holding portions 22, a downward direction of the multiple holding members 22; and monitoring means 130 configured to determine whether or not an obstacle 90 is present in the downward direction of at least any of the multiple holding members 22 on the basis of a status of the sensing.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The present invention relates to a flat panel manufacturing system and a robot controller used therein. [Background technology]

[0002] In recent years, industrial robots have become widespread in the industrial world, including large-scale manufacturing systems for processing glass substrates for large flat panels, including flat panel displays (FPDs) such as liquid crystal displays and organic electroluminescence (EL) displays.

[0003] In such large-scale manufacturing systems, multiple process chambers are arranged to perform various processes on workpieces such as glass substrates. Furthermore, a transfer robot (transfer device) is arranged in the transfer chamber, and the transfer robot (transfer device) transports the workpiece to a desired position in each process chamber.

[0004] In Patent Document 1, the transfer device is equipped with an optical sensor at the tip of a support pick, and by moving the support pick upward in the transfer chamber and irradiating light toward the tip, the transfer device identifies the upper end position of the opening between the transfer chamber and the load lock chamber. Furthermore, in the load lock chamber, the support pick is moved upward and rotated while irradiating light toward the tip and downward, thereby identifying the upper end position / side wall position of the buffer (groove). Then, the operation of the transfer device is corrected based on the identified upper end position of the opening and the upper end position / side wall position of the buffer (groove). In this way, Patent Document 1 automatically adjusts the operating position of the transfer device. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 2019-220588 Summary of the Invention [Problem to be solved by the invention]

[0006] However, in Patent Document 1, in order to identify the upper end position / sidewall position of the buffer (groove), light is irradiated toward the tip / downward while the support pick is moved upward / rotated in the load lock chamber. As a result, the transfer device including the support pick may collide with obstacles (support pins or protrusions) inside the chamber.

[0007] Furthermore, in such a conveying device, for example, when removing a workpiece that has been placed at a predetermined position, or when transporting the workpiece to a predetermined position and placing it there, the holding part that holds the workpiece is raised and lowered, and at this time there is a risk that the holding part will collide with an obstacle (a support pin or a protrusion).

[0008] Therefore, the present invention aims to provide a flat panel manufacturing system and a robot control device used therein that can prevent the holding part of a transport robot holding a workpiece from colliding with obstacles (support pins or protrusions) inside a chamber when removing a workpiece placed at a predetermined position, and when transporting the workpiece to a predetermined position and placing it therein. [Means for solving the problem]

[0009] A flat panel manufacturing system according to one embodiment of the present invention is a flat panel manufacturing system that manufactures flat panels and includes a transport robot that transports workpieces, a first chamber in which the transport robot is located, and a second chamber that is located adjacent to the first chamber and faces the opening of the first chamber. The system also includes a sensor device that is located at the tip of the holding portion of the transport robot that is configured to be able to hold the workpiece with multiple holding members, a robot control means that controls the operation of the transport robot, a sensing means that senses the downward direction of the multiple holding members with the sensor device while the robot control means operates the holding portion of the transport robot to advance from the first chamber toward the second chamber, and a determination means that determines whether an obstacle is present downward of at least one of the multiple holding members based on the sensing status by the sensing means.

[0010] According to this aspect, the sensor device is disposed at the tip of the holder of the transport robot, and the sensing means senses the downward direction of the multiple holding members using the sensor device while operating the holder of the transport robot to advance from the first chamber toward the second chamber. The determination means then determines whether an obstacle is present below at least one of the multiple holding members based on the sensing status. This makes it possible to determine whether an obstacle is present below the multiple holding members before actually operating the transport robot to remove a workpiece placed at a predetermined position within the chamber or to transport and install the workpiece to the predetermined position. As a result, it is possible to prevent the holder of the transport robot holding the workpiece from colliding with an obstacle (such as a support pin or a protrusion) within the chamber when removing the workpiece from the predetermined position or when transporting the workpiece to the predetermined position and installing it.

[0011] In the above aspect, a sensor device may be disposed at the tip of the holding unit of the transport robot using an attachment mechanism that can be attached so as to be able to sense the downward direction of each of the plurality of holding members.

[0012] According to this aspect, the sensor device is attached to the tip of the holder of the transport robot using the attachment mechanism, so that the sensor device is attached to a predetermined position. As a result, the position of the sensor device can be accurately determined without calibration, and the position of an obstacle detected by the sensor device can be more accurately determined.

[0013] In the above aspect, the sensor device may be disposed so as to protrude from the tip of the holding part of the transport robot in the direction of travel of the transport robot.

[0014] According to this aspect, when the sensor device is held by the holding portion of the transport robot, the possibility of the sensor device being blocked by the holding portion can be reduced, and the sensor device can more appropriately sense the downward direction of multiple holding members.

[0015] In the above aspect, the sensor device may be held at the tip of a holder of the transport robot as a sensor unit composed of a plurality of sensors.

[0016] According to this aspect, the sensor device is a sensor unit made up of a plurality of sensors, and therefore can be easily disposed at the tip of the holder of the transport robot.

[0017] A robot control device according to one embodiment of the present invention is a robot control device that controls the operation of a transport robot used in a flat panel manufacturing system that manufactures flat panels, and includes: a robot control means that controls the operation of the transport robot; a sensing means that uses a sensor device located at the tip of the holding means of the transport robot to sense the downward direction of multiple holding members that make up the holding means while the robot control means operates the holding means of the transport robot to move from a first chamber in which the transport robot is located toward a second chamber that is located adjacent to the first chamber and faces the opening of the first chamber; and a determination means that determines whether or not an obstacle is present downward of at least one of the multiple holding members based on the sensing status by the sensing means.

[0018] According to this aspect, the sensing means senses the downward direction of the multiple holding members using the sensor device while operating the holding unit of the transfer robot to advance from the first chamber toward the second chamber. The determination means then determines whether an obstacle is present below at least one of the multiple holding members based on the sensing status. This makes it possible to determine whether an obstacle is present below the multiple holding members before actually operating the transfer robot to remove a workpiece placed at a predetermined position within the chamber or to transport and place the workpiece at the predetermined position. As a result, it is possible to prevent the holding unit of the transfer robot holding the workpiece from colliding with an obstacle (such as a support pin or a protrusion) within the chamber when removing the workpiece from the predetermined position or when transporting the workpiece to the predetermined position and placing it there. [Effects of the Invention]

[0019] According to the present invention, it is possible to provide a flat panel manufacturing system and a robot control device used therein that can prevent the holding part of a transport robot that holds a workpiece from colliding with obstacles (support pins or protrusions) inside a chamber when removing a workpiece that has been placed at a predetermined position, and when transporting the workpiece to a predetermined position and placing it therein. [Brief explanation of the drawings]

[0020] [Figure 1] 1 is an external perspective view showing an overview of a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 2] 1 is a plan view showing the internal structure of a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 3] 1 is a schematic diagram showing the configuration of a transfer robot system 10 used in a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 4] 1 is a schematic diagram showing a state in which a sensor device 30 is arranged on a transfer robot 20 used in a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 5] 1 is a functional block diagram showing each function of a robot control device 100 that controls the operation of a transfer robot 20 used in a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 6] FIG. 10 is a schematic diagram showing the state in which the transfer robot 20 advances from the transfer chamber TC toward the process chamber PC. [Figure 7] FIG. 10 is a schematic diagram showing four fingers 22 passing through the space above a support pin 90 arranged in a process chamber PC. [Figure 8] 1 is a flowchart showing the flow of processing in a robot control method M100 executed by a robot control device 100 that controls the operation of a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0021] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. Note that the embodiment described below is merely a specific example for carrying out the present invention and is not intended to limit the present invention. Furthermore, to facilitate understanding of the description, the same components in each drawing will be assigned the same reference numerals as much as possible, and duplicate descriptions may be omitted.

[0022] <One embodiment> [Flat panel manufacturing system configuration] Fig. 1 is an external perspective view showing an overview of a flat panel manufacturing system 1 according to one embodiment of the present invention, and Fig. 2 is a plan view showing the internal structure of the flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in Fig. 1 and Fig. 2, the flat panel manufacturing system 1 is a large multi-chamber system that includes a transfer chamber TC in the center and multiple process chambers PC and load lock chambers LLC arranged to surround the transfer chamber TC.

[0023] The flat panel manufacturing system 1 is a vacuum processing system for processing glass substrates for large flat panels including flat panel displays (FPDs) such as liquid crystal displays and organic EL displays.

[0024] The load lock chamber LLC is a chamber for transferring workpieces W (such as glass substrates) between the outside and the process chambers PC before and after processing in the process chambers PC, allowing the process chambers PC to maintain a vacuum state without being exposed to the outside atmosphere. The transfer chamber TC can also maintain a vacuum state.

[0025] The transfer chamber TC is configured to be able to maintain a vacuum state as described above, and is equipped with a transfer robot 20. The transfer robot 20 has a transfer mechanism (hand holders and fingers) that transfers the workpiece W between each process chamber PC and the load lock chamber LLC.

[0026] The multiple process chambers PC are configured to be able to maintain a vacuum state as described above, and are equipped with a mounting table on which the workpiece W transferred by the transfer robot 20 arranged in the transfer chamber TC is placed. The mounting table may be configured, for example, to be provided with multiple support pins so that the workpiece W is supported by the support pins. Then, in each process chamber PC, with the workpiece W placed thereon, plasma processing such as CVD (Chemical Vapor Deposition), etching, ashing, or film formation under vacuum conditions may be performed on the workpiece W. Note that the same type of processing may be performed in each process chamber PC, or different types of processing may be performed in each process chamber.

[0027] [Transport robot system configuration] 3 is a schematic diagram showing the configuration of a transfer robot system 10 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 3, the transfer robot system 10 includes a transfer robot 20, a robot control device 100, and a teaching pendant TP.

[0028] As described with reference to FIGS. 1 and 2 , the transfer robot 20 is disposed in the transfer chamber TC in the flat panel manufacturing system 1 and transfers a workpiece W between each process chamber PC and the load lock chamber LLC. The transfer robot 20 is, for example, a horizontal articulated robot intended to transfer glass substrates, and is a clean transfer robot used for transfers in clean environments in the manufacturing of semiconductor devices and flat panel displays, the medical and food industries, and the like. In this embodiment, the transfer robot 20 is, for example, a two-axis or three-axis cylindrical coordinate system, and has a hand holder 21 and fingers (holding portions, holding members) 22 as end effectors. The transfer of the workpiece W (e.g., a glass substrate) while held by the fingers 22 will be described as an example.

[0029] The robot control device 100 is a device that controls the operation of the transfer robot 20. For example, the robot control device 100 is connected to an operating device such as a teaching pendant TP and can acquire operation instruction information input via the operating device. Based on the operation instruction information, the robot control device 100 starts and stops the transfer robot 20, and operates each axis, arm, and hand holder 21 (fingers 22) of the transfer robot 20 to take out, transport, and place a workpiece W in each process chamber PC and load lock chamber LLC.

[0030] The teaching pendant TP is an operating device operated by an operator, and receives input from the operator regarding operation instruction information for the transport robot 20, such as the transport work of transporting the workpiece W. Typically, the operator uses an operating device such as the teaching pendant TP to input appropriate instruction information, for example, for starting and stopping the transport robot 20, as well as for setting the transport robot 20, operating the arm and hand holder 21 (fingers 22), and registering teaching points.

[0031] Furthermore, regarding the registration of teaching points, an operator may sequentially register teaching points on the movement path of the transfer robot 20 using an operating device such as a teaching pendant TP while operating the transfer robot 20, or teaching points may be automatically registered by automatic teaching. Automatic teaching is effective in environments or situations where an operator cannot enter the interior and cannot grasp the state inside each chamber from the outside, such as the flat panel manufacturing system 1.

[0032] Here, there is a situation in which the transfer robot 20 installed in the transfer chamber TC inserts its fingers 22 into the load lock chamber LLC, removes the workpiece W placed there using the fingers 22, and transfers it to a mounting table in the process chamber PC while it is held by the fingers 22. The transfer robot 20 operates the arm and hand holder 21 (fingers 22) based on operation instruction information from the robot control device 100, removes the workpiece W from the load lock chamber LLC, and transfers it to the process chamber PC as the transfer destination.

[0033] More specifically, the transfer robot 20, based on operation instruction information from the robot control device 100, positions the fingers 22 below the workpiece W placed on the mounting table of the load lock chamber LLC, and then moves the fingers 22 upward to place and hold the workpiece W on the fingers 22. Then, with the workpiece W held by the fingers 22, the fingers 22 are moved in the horizontal direction (for example, forward and backward) and the hand holder 21 is rotated to enter the process chamber PC.

[0034] While holding the workpiece W with the finger 22, the transport robot 20 transports the workpiece W to the mounting table in the process chamber PC based on operation instruction information from the robot control device 100, and then moves the finger 22 downward to place the workpiece W placed on the finger 22 on the mounting table.

[0035] Here, the mounting table may be composed of, for example, a plurality of support pins or a plurality of protrusions, and the workpiece W is placed by being supported by the plurality of support pins or the plurality of protrusions. Furthermore, in the load lock chamber LLC and the process chamber PC, there is space above and between the plurality of support pins or the plurality of protrusions, and the fingers 22 are configured to be able to enter the space. When the fingers 22 remove the workpiece W that has been placed in a predetermined position by being supported by the plurality of support pins or the plurality of protrusions, or when the fingers 22 place the workpiece W held by the fingers 22 in a predetermined position constituted by the plurality of support pins or the plurality of protrusions, they must move while avoiding collision with the plurality of support pins or the plurality of protrusions.

[0036] As the robot control device 100, if it can properly grasp the multiple support pins or multiple protrusions arranged in the load lock chamber LLC and the process chamber PC, it can allow the finger 22 to pass properly when removing, transporting, and placing the workpiece W. In other words, it is important to properly grasp the multiple support pins or multiple protrusions arranged in the load lock chamber LLC and the process chamber PC, and below, a method will be described in which the sensor device is used to properly grasp the multiple support pins or multiple protrusions arranged there while the finger 22 is entering the load lock chamber LLC and the process chamber PC.

[0037] 4 is a schematic diagram showing a state in which a sensor device 30 is disposed on a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 4, the sensor device 30 is disposed at the tip of a finger 22 attached to a hand holder 21 in the transfer robot 20. The sensor device 30 includes four sensors 31 to 34, and the sensors 31 to 34 are disposed so as to correspond to the four fingers 22, respectively.

[0038] The sensor device 30 disposed at the tip of the finger 22 is calibrated, and the robot control device 100 knows the position of the sensor device 30 (the positions of the four sensors 31 to 34), and can also know the position of the support pin or protrusion detected by the sensor device 30 (robot coordinate system). The detection of the support pin or protrusion will be described in detail later.

[0039] Furthermore, the transport robot 20 may be provided with an attachment mechanism at the tips of the fingers 22 that can be attached to sense the downward direction of each of the four fingers 22. For example, the attachment mechanism may be configured so that the sensor device 30 is fitted to the tips of the fingers 22, and by fitting the sensor device 30 to the tips of the fingers 22 using the attachment mechanism, the sensor device 30 (four sensors 31 to 34) can sense the downward direction of each of the four fingers 22.

[0040] The robot control device 100 knows in advance the position of the sensor device 30 (the positions of the four sensors 31 to 34) when the sensor device 30 is placed at the tip of the finger 22 using the attachment mechanism, and can also know the position of the support pin or protrusion detected by the sensor device 30 (robot coordinate system). In this case, the above-mentioned calibration may not be necessary.

[0041] The four sensors 31 to 34 included in the sensor device 30 are attached to the rear surface of the sensor device 30 so as to be arranged corresponding to the four fingers 22, respectively. The sensor device 30 is placed and held on the tip of the finger 22 of the transfer robot 20, so that the sensors 31 to 34 can sense the downward direction of each of the four fingers 22.

[0042] For example, the four sensors 31 to 34 may be optical sensors such as cameras, LiDAR, and distance sensors, and can detect support pins or protrusions arranged in the load lock chamber LLC and the process chamber PC.

[0043] The attachment positions of the four sensors 31 to 34 in the sensor device 30 are not limited to the back surface of the sensor device 30, and other attachment positions or attachment methods may be used as long as they are capable of sensing the downward direction of each of the four fingers 22. For example, the four sensors 31 to 34 may be fixed to the sensor device 30 facing downward using attachments or the like that are arranged to protrude from the tips of the fingers 22 in the direction of movement of the fingers 22.

[0044] Furthermore, the sensor device 30 may also include a control unit and a communication unit, and notifies the robot control device 100 of information detected (acquired) by the four sensors 31 to 34, for example.

[0045] [Robot control device configuration] 5 is a functional block diagram showing the functions of a robot control device 100 that controls the operation of a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 5, the robot control device 100 includes a robot control means 110, a sensing means 120, and a determination means 130, and controls the operation of the transfer robot 20.

[0046] The robot control device 100 moves the hand holder 21 (fingers 22) from the transfer chamber TC toward the load lock chamber LLC (process chamber PC) with the sensor device 30 held at the tip of the finger 22, and senses the downward direction of each of the four fingers 22 using the four sensors 31 to 34 of the sensor device 30. Then, based on the sensing status, the robot control device 100 determines whether or not an obstacle such as a support pin or a protrusion is present below the fingers 22 of the transfer robot 20.

[0047] 3, the robot control device 100 is connected to the transport robot 20, and further has many functions for performing various controls and processes based on operation instruction information from an operating device such as a teaching pendant TP, or automatic control (automatic teaching). Here, the robot control device 100 is mainly shown to have a function for determining whether or not an obstacle such as a support pin or a protrusion exists below each of the four fingers 22 of the transport robot 20, but it also has other configurations and functions.

[0048] The robot control means 110 operates the transfer robot 20. For example, the transfer robot 20 is in a state where the sensor device 30 is held by four fingers 22, and the robot control means 110 operates each axis, arm, and hand holder 21 (fingers 22) of the transfer robot 20. Four sensors 31 to 34 attached to the sensor device 30 are configured to sense the downward direction of each of the four fingers 22 and to be able to detect obstacles such as support pins or protrusions arranged in the load lock chamber LLC (process chamber PC).

[0049] The support pins or protrusions arranged in the load lock chamber LLC (process chamber PC) support the workpiece W from below, on which the workpiece W is placed, and the support pins or protrusions are lower than the height position through which the fingers 22 pass. In other words, in the load lock chamber LLC (process chamber PC), the fingers 22 can pass through the space above the support pins or protrusions.

[0050] The sensing means 120 is, for example, four sensors 31 to 34 in the sensor device 30, and senses the downward direction of each of the four fingers 22 while the robot control means 110 causes the hand holder 21 (fingers 22: holding parts) of the transport robot 20 to enter from the transfer chamber TC (first chamber) toward the load lock chamber LLC (process chamber PC) (second chamber).

[0051] The determining means 130 determines whether or not an obstacle such as a support pin or a protrusion is present below at least one of the four fingers 22 based on the state of sensing by the sensing means 120 .

[0052] For example, if the sensors 31 to 34 are cameras, the determination means 130 may determine whether or not an obstacle such as a support pin or a protrusion is present based on the acquired image by pattern matching, etc. Alternatively, if the sensors 31 to 34 are optical sensors such as distance measuring sensors, the determination means 130 may determine whether or not an obstacle such as a support pin or a protrusion is present based on the distance (displacement) from the sensors 31 to 34 to the bottom surface inside the load lock chamber LLC (process chamber PC).

[0053] If the determination means 130 determines that an obstacle such as a support pin or a protrusion is present, it may notify the user of this, and the robot control means 110 may also stop the operation of the transport robot 20 or cause the fingers 22 to retract and exit the load lock chamber LLC (process chamber PC).

[0054] Furthermore, the robot control device 100 may acquire position information of the detected support pins or protrusions. When the robot control device 100 again advances the hand holder 21 (fingers 22) from the transfer chamber TC toward the load lock chamber LLC (process chamber PC), the robot control device 100 may, based on the position information, cause the hand holder 21 (fingers 22) to advance while avoiding the area above where the support pins or protrusions are present.

[0055] [About the operation of the transport robot] Fig. 6 is a schematic diagram showing the transfer robot 20 moving from the transfer chamber TC toward the process chamber PC, and Fig. 7 is a schematic diagram showing the four fingers 22 passing through the space above the support pins 90 arranged in the process chamber PC. As shown in Fig. 6, a plurality of support pins 90 are arranged in the process chamber PC, and as shown in Fig. 7, the four fingers 22 move through the process chamber PC at a position higher than the height of the plurality of support pins 90.

[0056] A sensor device 30 is disposed at the tip of the finger 22 of the transfer robot 20, and four sensors 31 to 34 included in the sensor device 30 are disposed so as to correspond to the four fingers, respectively.

[0057] The finger 22, holding the sensor device 30 at its tip, enters the process chamber PC from the transfer chamber TC and moves inside the process chamber PC to the removal or installation position of the workpiece W to be placed in the process chamber PC.

[0058] The four fingers 22 pass through the space above the support pins 90 arranged in the process chamber PC, and therefore, as they enter the process chamber PC without colliding with the support pins 90, the downward direction is sensed by four sensors 31 to 34 arranged at the tips of the four fingers 22, respectively.

[0059] Specifically, from the time when the tips of the four fingers 22 enter the process chamber PC until they reach the workpiece W removal or installation position in the process chamber PC, sensing is performed to determine whether or not a support pin 90 is present below the four fingers 22.

[0060] When the four sensors 31 to 34 detect the support pin 90 below at least one of the four fingers 22, for example, the fact may be notified to an operation terminal such as a teaching pendant TP.

[0061] On the other hand, if the support pin 90 is not detected from the time the tips of the four fingers 22 enter the process chamber PC until they reach the workpiece W removal or installation position in the process chamber PC, it can be said that even if the four fingers 22 are moved downward at the workpiece W removal or installation position in the process chamber PC, they will not collide with the support pin 90.

[0062] In other words, when removing a workpiece W that is placed at a predetermined position in the process chamber PC by being supported by a plurality of support pins 90, or when placing a workpiece W held by a finger 22 at a predetermined position formed by a plurality of support pins 90, the finger 22 will not collide with the plurality of support pins 90 even if it is moved up and down.

[0063] Although the four fingers 22 are assumed to advance through the process chamber PC at a position higher than the height of the support pins 90, this may be confirmed, for example, by sensing the direction of advancement before the tips of the fingers 22 enter the process chamber PC. Specifically, the sensor device 30 may further include a sensor capable of sensing the direction of advancement, and the height of the support pins 90 may be confirmed before the tips of the fingers 22 enter the process chamber PC.

[0064] [Robot control method] Next, we will explain in detail the method for controlling the operation of the transport robot 20 when the hand holder 21 (finger 22) of the transport robot 20 is moved from the transfer chamber TC toward the process chamber PC and the downward direction of the finger 22 is sensed by the sensor device 30 held at the tip of the finger 22.

[0065] 8 is a flowchart showing the processing flow of a robot control method M100 executed by a robot control device 100 that controls the operation of a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 8, the robot control method M100 includes steps S110 to S150, and each step is executed by a processor included in the robot control device 100.

[0066] In step S110, the robot control device 100 moves the hand holder 21 (fingers 22) of the transfer robot 20, with the sensor device 30 held at the tip of the finger 22, from the transfer chamber TC toward the process chamber PC.

[0067] In step S120, while the fingers 22 are advanced from the transfer chamber TC toward the process chamber PC, the downward direction of the fingers 22 is sensed by the sensor device 30 held at the tip of the fingers 22. Specifically, the downward direction of each of the four fingers 22 is sensed by four sensors 31 to 34 of the sensor device 30 arranged so as to correspond to the four fingers 22, respectively.

[0068] In step S130, it is determined whether or not a support pin has been detected based on the sensing status of the downward direction of the finger 22 by the sensor device 30 in step S120.If a support pin has been detected ("Yes" in step S130), processing proceeds to step S150; if a support pin has not been detected ("No" in step S130), processing proceeds to step S140.

[0069] In step S140, it is determined whether sensing inside the process chamber PC has been successful. Specifically, it is determined whether the tips of the four fingers 22 have entered the process chamber PC and then reached the removal position or installation position of the workpiece W in that process chamber PC. If it is determined that the removal position or installation position of the workpiece W has been reached ("Yes" in step S140), the process ends. If it is determined that the removal position or installation position of the workpiece W has not been reached ("No" in step S140), the process returns to step S120. That is, sensing (steps S120 and S130) continues from the time the tips of the four fingers 22 enter the process chamber PC until they reach the removal position or installation position of the workpiece W in that process chamber PC.

[0070] In step S150, it is notified that the support pin 90 has been detected below at least one of the four fingers 22.

[0071] As described above, in the flat panel manufacturing system 1, transfer robot system 10, robot control device 100, and robot control method M100 according to one embodiment of the present invention, the four fingers 22 are held at their tips by the sensor device 30, which includes four sensors 31-34. While the fingers 22 are advanced from the transfer chamber TC toward the load lock chamber LLC (process chamber PC), the four sensors 31-34 sense the downward direction of the four fingers 22. If an obstacle such as a support pin 90 is detected below the four fingers 22 based on the sensing status, a notification to that effect is sent to an operation terminal such as a teaching pendant TP. This makes it possible to know that the support pin 90 is positioned below the fingers 22 before operating the transfer robot 20 to actually remove the workpiece W placed at a predetermined position in the load lock chamber LLC (process chamber PC) and to transport and place the workpiece W at the predetermined position. As a result, when removing a workpiece W placed at a predetermined position in the load lock chamber LLC (process chamber PC), or when transporting and placing the workpiece W to a predetermined position, the fingers 22 of the transport robot 20 holding the workpiece W can be prevented from colliding with obstacles (support pins or protrusions) placed inside the load lock chamber LLC (process chamber PC).

[0072] In this embodiment, the four sensors 31 to 34 included in the sensor device 30 sense the downward direction of the four fingers 22, respectively, but the direction sensed by the sensors 31 to 34 is not limited to just directly below (vertical direction) the four fingers 22. For example, it may include a diagonally downward direction on the moving direction (extension direction) side of the four fingers 22.

[0073] In addition, in this embodiment, the number of sensors included in the sensor device 30 is four, matching the number of fingers 22, but this is not limited to this, and as long as the sensors can sense the downward direction of each of the multiple fingers 22, the number of sensors included in the sensor device 30 does not have to match the number of fingers 22. For example, a sensor capable of sensing at a wide angle may be used, and the downward directions of the multiple fingers 22 may be sensed by one sensor.

[0074] Furthermore, in this embodiment, the sensor device 30 including four sensors 31 to 34 is arranged at the tip of the finger 22, but instead of one sensor device 30, for example, each of the four sensors 31 to 34 may be arranged at the tip of each of the four fingers 22.

[0075] In this embodiment, the situation in which the hand holder 21 (fingers 22) of the transfer robot 20 advances from the transfer chamber TC toward the process chamber PC has been described as an example, but the present invention is not limited to this. For example, the present invention can be similarly applied to a situation in which the hand holder 21 (fingers 22) of the transfer robot 20 advances from the transfer chamber TC toward the load lock chamber LLC.

[0076] The above-described embodiments are intended to facilitate understanding of the present invention and are not intended to limit the present invention. The elements of the embodiments, as well as their arrangement, materials, conditions, shapes, sizes, etc., are not limited to those illustrated and can be modified as appropriate. Furthermore, configurations shown in different embodiments can be partially substituted or combined with each other. [Explanation of symbols]

[0077] 1...flat panel manufacturing system, 10...transfer robot system, 20...transfer robot, 21...hand holder, 22...finger, 30...sensor device, 31-34...sensors, 90...support pin, 100...robot control device, 110...robot control means, 120...sensing means, 130...determination means, TC...transfer chamber, PC...process chamber, LLC...load lock chamber, TP...teaching pendant, W...workpiece, M100...robot control method, S110-S150...each step of robot control method M100

Claims

1. A flat panel manufacturing system for manufacturing flat panels, comprising: a transfer robot that transfers a workpiece; a first chamber in which the transfer robot is disposed; and a second chamber that is disposed adjacent to the first chamber so as to face an opening of the first chamber, a sensor device disposed at a tip of a holding unit of the transport robot configured to be able to hold the workpiece with a plurality of holding members; a robot control means for controlling the operation of the transport robot; a sensing means for sensing a downward direction of the plurality of holding members using the sensor device while operating a holding unit of the transfer robot using the robot control means to move the holding unit from the first chamber toward the second chamber; and a determination means for determining whether or not an obstacle is present below at least one of the plurality of holding members based on the sensing state of the sensing means. Flat panel manufacturing system.

2. the sensor device is disposed at the tip of the holding unit of the transport robot using an attachment mechanism that is capable of sensing the downward direction of each of the plurality of holding members; The flat panel manufacturing system of claim 1 .

3. the sensor device is disposed so as to protrude from a tip end of a holding portion of the transport robot in a direction in which the transport robot is moving; The flat panel manufacturing system of claim 1 .

4. the sensor device is held at a tip end of a holding part of the transport robot as a sensor unit composed of a plurality of sensors; The flat panel manufacturing system of claim 1 .

5. A robot control device for controlling the operation of a transport robot used in a flat panel manufacturing system for manufacturing flat panels, a robot control means for controlling the operation of the transport robot; a sensing means for sensing a downward direction of a plurality of holding members constituting the holding portion by a sensor device disposed at a tip end of the holding portion of the transport robot, while operating the holding portion of the transport robot by the robot control means to move the holding portion of the transport robot from a first chamber in which the transport robot is disposed toward a second chamber disposed adjacent to the first chamber so as to face an opening of the first chamber; and a determination means for determining whether or not an obstacle is present below at least one of the plurality of holding members based on the sensing state of the sensing means. Robot control device.

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