Flat panel manufacturing system and robot control device used therein

Abstract

To provide a flat panel manufacturing system and a robot control device used therein that can appropriately grasp the approach angle at which a transfer robot approaches a chamber.SOLUTION: A flat panel manufacturing system 1 includes: sensing means 120 configured to, while causing robot control means 110 to operate holding portions 22 of a transport robot 20 to move from a first chamber TC toward a second chamber PC, sense, by a sensor device 30, a distance to a wall surface inside the second chamber PC; and approach angle calculation means 130 configured to calculate an approach angle at which the transport robot 20 moves into the second chamber PC on the basis of information about at least two distances obtained by sensing by the sensing means 120.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The present invention relates to a flat panel manufacturing system and a robot controller used therein. [Background technology]

[0002] In recent years, industrial robots have become widespread in the industrial world, including large-scale manufacturing systems for processing glass substrates for large flat panels, including flat panel displays (FPDs) such as liquid crystal displays and organic electroluminescence (EL) displays.

[0003] In such large-scale manufacturing systems, multiple process chambers are arranged to perform various processes on workpieces such as glass substrates. Furthermore, a transfer robot (transfer device) is arranged in the transfer chamber, and the transfer robot (transfer device) transports the workpiece to a desired position in each process chamber.

[0004] In Patent Document 1, the transfer device is equipped with an optical sensor at the tip of a support pick, and by moving the support pick upward in the transfer chamber and irradiating light toward the tip, the transfer device identifies the upper end position of the opening between the transfer chamber and the load lock chamber. Furthermore, in the load lock chamber, the support pick is moved upward and rotated while irradiating light toward the tip and downward, thereby identifying the upper end position / side wall position of the buffer (groove). Then, the operation of the transfer device is corrected based on the identified upper end position of the opening and the upper end position / side wall position of the buffer (groove). In this way, Patent Document 1 automatically adjusts the operating position of the transfer device. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 2019-220588 Summary of the Invention [Problem to be solved by the invention]

[0006] However, there is a possibility that the transfer chamber and the process chamber are not installed straight and with high accuracy. For example, if the process chamber is installed at an angle to the transfer chamber, even if the transfer device installed in the transfer chamber advances toward the process chamber, it will proceed inside the process chamber at an angle.

[0007] SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a flat panel manufacturing system that can appropriately grasp the approach angle at which a transfer robot approaches a chamber, and a robot control device used therein. [Means for solving the problem]

[0008] A flat panel manufacturing system according to one embodiment of the present invention is a flat panel manufacturing system that manufactures flat panels, comprising a transport robot that transports a workpiece, a first chamber in which the transport robot is located, and a second chamber that is located adjacent to the first chamber so as to face the opening of the first chamber, and further comprising a sensor device that is located at the tip of the holding part of the transport robot that holds the workpiece, a robot control means that controls the operation of the transport robot, a sensing means that senses the distance to the wall surface inside the second chamber using the sensor device while the robot control means operates the holding part of the transport robot to enter from the first chamber toward the second chamber, and an approach angle calculation means that calculates the approach angle at which the transport robot enters the second chamber based on information about at least two distances obtained by sensing by the sensing means.

[0009] According to this aspect, the sensor device is disposed at the tip of the holder of the transport robot, and the sensing means senses the distance to the wall surface inside the second chamber using the sensor device while operating the holder of the transport robot to advance from the first chamber toward the second chamber. The approach angle calculation means calculates the approach angle based on information about at least two distances acquired by sensing by the sensing means. This makes it possible to appropriately determine the approach angle at which the holder holding the workpiece advances toward the second chamber.

[0010] In the above aspect, the sensor device may include a distance measuring sensor capable of sensing the distance to the wall surface inside the second chamber in at least one direction that is perpendicular to the direction of travel of the holder of the transfer robot and is also horizontal.

[0011] According to this aspect, the sensor device includes a distance measuring sensor that can appropriately sense the direction lateral to the direction of movement of the holder of the transport robot, and therefore the distance to the side wall surface inside the second chamber can be appropriately grasped.

[0012] In the above aspect, the entry angle calculation means may calculate the entry angle at which the transport robot enters the second chamber based on information regarding the distance at which the change in distance obtained by sensing by the sensing means is less than or equal to a threshold value during the first period.

[0013] According to this aspect, even if the sidewall surface inside the second chamber is uneven, the approach angle calculation means calculates the approach angle by using the distance to the sidewall surface in a region where the sidewall surface is smooth, thereby making it possible to appropriately calculate the inclination (approach angle) of the holder relative to the sidewall surface.

[0014] In the above aspect, if the distance obtained by sensing by the sensing means during the second period is greater than the distance obtained during a predetermined period before or after the second period, the entry angle calculation means may calculate the entry angle at which the transport robot enters the second chamber based on information regarding the distance obtained by sensing by the sensing means during the second period.

[0015] According to this aspect, even if there is an obstacle between the sensor device and the side wall surface inside the second chamber, the approach angle calculation means uses the distance to the side wall surface obtained by sensing the distance when there is no obstacle between the sensor device and the side wall surface to calculate the approach angle, thereby making it possible to appropriately calculate the inclination (approach angle) of the holder relative to the side wall surface.

[0016] In the above aspect, the sensor device may include a ranging sensor capable of sensing the distance to the wall surface inside the second chamber in one direction and the opposite direction, and may further include an entry position calculation means for calculating the position at which the transport robot enters the second chamber based on information regarding the distance to the wall surface inside the second chamber in one direction and the opposite direction obtained by sensing by the sensing means.

[0017] According to this aspect, the entry position calculation means calculates the position at which the transport robot enters the second chamber based on information regarding the distance to the wall surface inside the second chamber in one direction and the opposite direction, so that in addition to the entry angle, the entry position can be appropriately determined, for example, whether it is in the center of the second chamber.

[0018] In the above aspect, the apparatus may further comprise a target position estimation means for estimating a target position within the second chamber to be reached by the transfer robot based on the approach angle calculated by the approach angle calculation means.

[0019] According to this aspect, the target position estimation means estimates the target position to be reached by the transport robot within the second chamber based on the entry angle calculated by the entry angle calculation means. Therefore, for example, after the holding part of the transport robot enters the second chamber, it is possible to estimate the target position to be reached by the holding part without actually moving the holding part to the target position within the second chamber.

[0020] In the above aspect, the sensor device may include a distance measuring sensor capable of sensing the distance to the wall surface inside the second chamber at at least two locations in the horizontal direction and in the direction along the moving direction of the holding part of the transport robot.

[0021] According to this aspect, the sensing means acquires the distance to the inner wall surface of the second chamber at at least two locations, and the approach angle calculation means calculates the approach angle based on information about the at least two distances. This makes it possible to appropriately determine the approach angle at which the holder that holds the workpiece approaches the second chamber.

[0022] A robot control device according to one embodiment of the present invention is a robot control device that controls the operation of a transport robot used in a flat panel manufacturing system that manufactures flat panels, and includes: a robot control means that controls the operation of the transport robot; a sensing means that operates the holding part of the transport robot using the robot control means to cause the transport robot to enter from a first chamber in which the transport robot is located toward a second chamber that is located adjacent to the first chamber so as to face the opening of the first chamber, while sensing the distance to the wall surface inside the second chamber using a sensor device that is located at the tip of the holding part of the transport robot; and an approach angle calculation means that calculates the approach angle at which the transport robot enters the second chamber based on information about at least two distances obtained by sensing using the sensing means.

[0023] According to this aspect, the sensing means operates the holder of the transfer robot to advance from the first chamber toward the second chamber, while sensing the distance to the wall surface inside the second chamber using the sensor device. The approach angle calculation means calculates the approach angle based on information about at least two distances acquired by sensing by the sensing means. This makes it possible to appropriately determine the approach angle at which the holder holding the workpiece advances toward the second chamber. [Effects of the Invention]

[0024] According to the present invention, it is possible to provide a flat panel manufacturing system and a robot control device used therein that can appropriately grasp the approach angle at which a transfer robot approaches a chamber. [Brief explanation of the drawings]

[0025] [Figure 1] 1 is an external perspective view showing an overview of a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 2] 1 is a plan view showing the internal structure of a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 3] 1 is a schematic diagram showing the configuration of a transfer robot system 10 used in a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 4] 1 is a schematic diagram showing a state in which a sensor device 30 is arranged on a transfer robot 20 used in a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 5] 1 is a functional block diagram showing each function of a robot control device 100 that controls the operation of a transfer robot 20 used in a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 6] 10 is a schematic diagram showing how the transfer robot 20 senses the sidewall surface while moving from the transfer chamber TC toward the process chamber PC. FIG. [Figure 7]1 is a flowchart showing the flow of processing in a robot control method M100 executed by a robot control device 100 that controls the operation of a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. [Figure 8] 10 is an enlarged view showing the state in which the transfer robot 20 senses the side wall surface having an uneven surface while advancing from the transfer chamber TC toward the process chamber PC. FIG. [Figure 9] 10 is a schematic diagram showing a state in which the transfer robot 20 senses the inner wall surface while advancing from the transfer chamber TC toward the process chamber PC. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0026] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. Note that the embodiment described below is merely a specific example for carrying out the present invention and is not intended to limit the present invention. Furthermore, to facilitate understanding of the description, the same components in each drawing will be assigned the same reference numerals as much as possible, and duplicate descriptions may be omitted.

[0027] <One embodiment> [Flat panel manufacturing system configuration] Fig. 1 is an external perspective view showing an overview of a flat panel manufacturing system 1 according to one embodiment of the present invention, and Fig. 2 is a plan view showing the internal structure of the flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in Fig. 1 and Fig. 2, the flat panel manufacturing system 1 is a large multi-chamber system that includes a transfer chamber TC in the center and multiple process chambers PC and load lock chambers LLC arranged to surround the transfer chamber TC.

[0028] The flat panel manufacturing system 1 is a vacuum processing system for processing glass substrates for large flat panels including flat panel displays (FPDs) such as liquid crystal displays and organic EL displays.

[0029] The load lock chamber LLC is a chamber for transferring workpieces W (such as glass substrates) between the outside and the process chambers PC before and after processing in the process chambers PC, allowing the process chambers PC to maintain a vacuum state without being exposed to the outside atmosphere. The transfer chamber TC can also maintain a vacuum state.

[0030] The transfer chamber TC is configured to be able to maintain a vacuum state as described above, and is equipped with a transfer robot 20. The transfer robot 20 has a transfer mechanism (hand holders and fingers) that transfers the workpiece W between each process chamber PC and the load lock chamber LLC.

[0031] The multiple process chambers PC are configured to be able to maintain a vacuum state as described above, and are equipped with a mounting table on which the workpiece W transferred by the transfer robot 20 arranged in the transfer chamber TC is placed. The mounting table may be configured, for example, to be provided with multiple support pins so that the workpiece W is supported by the support pins. Then, in each process chamber PC, with the workpiece W placed thereon, plasma processing such as CVD (Chemical Vapor Deposition), etching, ashing, or film formation under vacuum conditions may be performed on the workpiece W. Note that the same type of processing may be performed in each process chamber PC, or different types of processing may be performed in each process chamber.

[0032] [Transport robot system configuration] 3 is a schematic diagram showing the configuration of a transfer robot system 10 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 3, the transfer robot system 10 includes a transfer robot 20, a robot control device 100, and a teaching pendant TP.

[0033] As described with reference to FIGS. 1 and 2 , the transfer robot 20 is disposed in the transfer chamber TC in the flat panel manufacturing system 1 and transfers a workpiece W between each process chamber PC and the load lock chamber LLC. The transfer robot 20 is, for example, a horizontal articulated robot intended to transfer glass substrates, and is a clean transfer robot used for transfers in clean environments in the manufacturing of semiconductor devices and flat panel displays, the medical and food industries, and the like. In this embodiment, the transfer robot 20 is, for example, a two-axis or three-axis cylindrical coordinate system, and has a hand holder 21 and fingers (holding portions) 22 as end effectors. The transfer of the workpiece W (e.g., a glass substrate) while held by the fingers 22 will be described as an example.

[0034] The robot control device 100 is a device that controls the operation of the transfer robot 20. For example, the robot control device 100 is connected to an operating device such as a teaching pendant TP and can acquire operation instruction information input via the operating device. Based on the operation instruction information, the robot control device 100 starts and stops the transfer robot 20, and operates each axis, arm, and hand holder 21 (fingers 22) of the transfer robot 20 to take out, transport, and place a workpiece W in each process chamber PC and load lock chamber LLC.

[0035] The teaching pendant TP is an operating device operated by an operator, and receives input from the operator regarding operation instruction information for the transport robot 20, such as the transport work of transporting the workpiece W. Typically, the operator uses an operating device such as the teaching pendant TP to input appropriate instruction information, for example, for starting and stopping the transport robot 20, as well as for setting the transport robot 20, operating the arm and hand holder 21 (fingers 22), and registering teaching points.

[0036] Furthermore, regarding the registration of teaching points, an operator may sequentially register teaching points on the movement path of the transfer robot 20 using an operating device such as a teaching pendant TP while operating the transfer robot 20, or teaching points may be automatically registered by automatic teaching. Automatic teaching is effective in environments or situations where an operator cannot enter the interior and cannot grasp the state inside each chamber from the outside, such as the flat panel manufacturing system 1.

[0037] Here, there is a situation in which the transfer robot 20 installed in the transfer chamber TC inserts its fingers 22 into the load lock chamber LLC, removes the workpiece W placed there using the fingers 22, and transfers it to a mounting table in the process chamber PC while it is held by the fingers 22. The transfer robot 20 operates the arm and hand holder 21 (fingers 22) based on operation instruction information from the robot control device 100, removes the workpiece W from the load lock chamber LLC, and transfers it to the process chamber PC as the transfer destination.

[0038] At this time, the finger 22 holding the workpiece W advances from the transfer chamber TC toward the load lock chamber LLC or the process chamber PC and proceeds inside the load lock chamber LLC or the process chamber PC. For example, if the load lock chamber LLC or the process chamber PC is installed at an angle with respect to the transfer chamber TC, or if the gate (opening) serving as the entrance / exit of the transfer chamber TC and the gate (opening) serving as the entrance / exit of the load lock chamber LLC or the process chamber PC are misaligned, it is conceivable that the finger 22 holding the workpiece W will advance in an inclined direction inside the load lock chamber LLC or the process chamber PC after entering the load lock chamber LLC or the process chamber PC.

[0039] It is important for the robot control device 100 to grasp the approach angle at which the transfer robot 20 approaches the load lock chamber LLC and the process chamber PC. Below, we will explain a method for appropriately grasping the approach angle by using a sensor device to sense the wall surfaces of the load lock chamber LLC and the process chamber PC.

[0040] 4 is a schematic diagram showing a state in which a sensor device 30 is disposed on a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 4, the sensor device 30 is disposed on the tip of a finger 22 attached to a hand holder 21 in the transfer robot 20.

[0041] The sensor device 30 includes a sensor 31. For example, the sensor 31 may be attached to the front surface, the back surface, the side surface facing the traveling direction, the side surface facing the hand holder 21, or the outer side surface of the sensor device 30.

[0042] The sensor device 30 equipped with the sensor 31 is placed and held on the tip of the finger 22 of the transfer robot 20, and is capable of sensing the outward direction by the sensor 31. Specifically, the sensor 31 may be a distance measuring sensor capable of sensing the distance from the tip of the outermost finger 22 of the four fingers 22 to the wall surface in the outward direction, in a direction perpendicular to the moving direction of the fingers 22 and in a horizontal direction.

[0043] In this case, the sensor 31 is attached to an end of the sensor device 30, and senses the distance to the wall surface from a position of the sensor device 30 that is closest to the wall surface. This allows the distance to the wall surface to be sensed with higher accuracy.

[0044] The mounting position of the sensor 31 is not limited to the end of the sensor device 30. For example, the sensor 31 may be mounted in the center of the sensor device 30, as long as there are no obstacles, including parts of the sensor device 30 and dust adhering to the surface of the sensor device 30, between the sensor 31 mounted on the sensor device 30 and the wall surface, and the distance from the sensor 31 to the wall surface can be properly sensed.

[0045] The sensor device 30 disposed at the tip of the finger 22 may be calibrated. The robot control device 100 may be able to grasp the position of the sensor device 30 (the position of the sensor 31) and also appropriately grasp the distance from the position of the finger 22 to the wall surface sensed by the sensor device 30 (robot coordinate system).

[0046] Furthermore, the tip of the finger 22 of the transport robot 20 may be provided with an attachment mechanism for attaching the sensor device 30 so as to be able to sense the distance from the end of the tip of the finger 22 to a wall surface in the outward direction. For example, the attachment mechanism may be configured so that the sensor device 30 is fitted to the tip of the finger 22, and by fitting the sensor device 30 to the tip of the finger 22 using the attachment mechanism, the sensor 31 installed in the sensor device 30 may be configured to be able to sense the distance to the wall surface.

[0047] If the robot control device 100 knows in advance the position of the sensor device 30 (position of the sensor 31) when the sensor device 30 is placed at the tip of the finger 22 using the mounting mechanism, it will be able to know the distance to the wall surface sensed by the sensor device 30 (robot coordinate system) without the need for calibration.

[0048] The sensor installed in the sensor device 30 is not limited to a distance measurement sensor, but may be, for example, a camera, a LiDAR, or another optical sensor.

[0049] Furthermore, the sensor device 30 may include a control unit and a communication unit, and may notify the robot control device 100 of information detected (acquired) by the sensor 31, for example.

[0050] [Robot control device configuration] 5 is a functional block diagram showing the functions of a robot control device 100 that controls the operation of a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 5, the robot control device 100 includes a robot control means 110, a sensing means 120, and an approach angle calculation means 130, and controls the operation of the transfer robot 20.

[0051] The robot control device 100 moves the hand holder 21 (fingers 22) from the transfer chamber TC toward the load lock chamber LLC (process chamber PC) with the sensor 31 of the sensor device 30 held at the tip of the finger 22, and senses the distance to the wall surface inside the load lock chamber LLC (process chamber PC).The robot control device 100 then calculates the angle at which the finger 22 of the transfer robot 20 moves into the load lock chamber LLC (process chamber PC) based on information about two or more distances that may not be acquired by the sensing.

[0052] 3, the robot control device 100 is connected to the transfer robot 20, and further has many functions for performing various controls and processes based on operation instruction information from an operating device such as a teaching pendant TP, or automatic control (automatic teaching). Here, the robot control device 100 is mainly shown to have a function for grasping the approach angle of the transfer robot 20 at which it approaches the load lock chamber LLC (process chamber PC), but it also has other configurations and functions.

[0053] The robot control means 110 operates the transfer robot 20. For example, the transfer robot 20 is in a state where the sensor device 30 is held by the fingers 22, and the robot control means 110 operates each axis, arm, and hand holder 21 (fingers 22) of the transfer robot 20. The sensor 31 attached to the sensor device 30 is configured to be able to sense the distance to the wall surface inside the load lock chamber LLC (process chamber PC).

[0054] The sensing means 120 includes, for example, the sensor 31 in the sensor device 30, and senses the distance to the wall surface while the hand holder 21 (fingers 22: holding portion) of the transfer robot 20 advances from the transfer chamber TC (first chamber) toward the load lock chamber LLC (process chamber PC) (second chamber) under the control of the robot control means 110. Specifically, the sensing means 120 acquires information relating to the distance to the wall surface sensed by the sensor 31.

[0055] The approach angle calculation means 130 calculates the approach angle based on information relating to the distance to the wall surface acquired by sensing by the sensing means 120. For example, the approach angle calculation means 130 calculates the approach angle from a change in the distance to the wall surface based on at least two or more pieces of information relating to the distance to the wall surface that are continuously sensed by the sensing means 120.

[0056] More specifically, the approach angle calculation means 130 may calculate the moving direction (inclination) of the finger 22 with respect to the side wall surface based on the distance to the side wall surface at two timings (times) and the moving distance in the moving direction of the hand holder 21 (fingers 22) of the transfer robot 20 during the two timing (time) periods. For example, when the side wall surface and the moving direction of the finger 22 are parallel, the approach angle calculation means 130 may calculate an approach angle of 0 degrees, assuming that the finger 22 has entered the load lock chamber LLC (process chamber PC) straight.

[0057] The robot control device 100 may also notify the operator of the approach angle calculated by the approach angle calculation means 130 via an operating device such as a teaching pendant TP. Furthermore, instead of or in addition to the above notification, if the approach angle is equal to or greater than a threshold value, the robot control device 100 may notify the operator that the approach angle is inappropriate and warn or alert the operator, and in addition, the robot control means 110 may stop the operation of the transfer robot 20, reduce the operating speed, or retract the fingers 22 to exit the load lock chamber LLC (process chamber PC).

[0058] [About the operation of the transport robot] 6 is a schematic diagram showing how the transfer robot 20 senses the sidewall surface while advancing from the transfer chamber TC toward the process chamber PC. As shown in Fig. 6, the process chamber PC has a gate (opening) which is an entrance and exit to the transfer chamber TC, sidewall surfaces on both sides of the gate, and a back wall surface on the back side.

[0059] The robot control device 100 operates the hand holder 21 (finger 22) of the transport robot 20 arranged in the transfer chamber TC, causing the finger 22 to enter from the transfer chamber TC through the gate (opening) toward the process chamber PC, and then proceed inside the process chamber PC.

[0060] The finger 22, holding the sensor device 30 at its tip, enters the process chamber PC from the transfer chamber TC and moves inside the process chamber PC to the removal or installation position of the workpiece W to be placed in the process chamber PC.

[0061] A sensor 31 is attached to the end of a sensor device 30 disposed at the tip of a finger 22 of the transfer robot 20, and the sensor 31 senses the distance to the side wall surface inside the process chamber PC.

[0062] Specifically, from the time the tip of the finger 22 enters the process chamber PC until it reaches the removal position or installation position of the work W in the process chamber PC, the sensor 31 continuously senses the distance to the side wall surface inside the process chamber PC.

[0063] Here, while the finger 22 is advanced by the robot control means 110, the distance to the side wall surface is sensed by the sensing means 120, and, for example, a distance dw1 to the side wall surface at time t1 is obtained, and a distance dw2 to the side wall surface at time t2 is obtained. Then, the approach angle calculation means 130 calculates the approach angle of the finger 22 based on the distances dw1 and dw2 and the movement distance df of the finger 22 in the advancing direction during that period (times t1 to t2).

[0064] The robot control device 100 can appropriately calculate the approach angle of the finger 22 without acquiring a highly accurate distance to the wall surface to be sensed in the robot coordinate system. In other words, to calculate the approach angle of the finger 22, the robot control device 100 does not need to know the position of the sensor device 30 (position of the sensor 31) (robot coordinate system) with high accuracy through calibration or an attachment mechanism.

[0065] [Robot control method] Next, we will explain in detail a method for controlling the operation of the transport robot 20 by detecting the angle of entry of the finger 22 by sensing the distance to the wall surface using the sensor device 30 held at the tip of the finger 22 while the hand holder 21 (finger 22) of the transport robot 20 enters from the transfer chamber TC toward the process chamber PC.

[0066] 7 is a flowchart showing the processing flow of a robot control method M100 executed by a robot control device 100 that controls the operation of a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 7, the robot control method M100 includes steps S110 to S140, and each step is executed by a processor included in the robot control device 100.

[0067] In step S110, the robot control device 100 moves the hand holder 21 (fingers 22) of the transfer robot 20, with the sensor device 30 held at the tip of the finger 22, from the transfer chamber TC toward the process chamber PC.

[0068] In step S120, while the finger 22 is advanced from the transfer chamber TC toward the process chamber PC, the sensor device 30 held at the tip of the finger 22 senses the lateral direction (outward direction) relative to the direction of advancement. Specifically, the sensor 31 attached to the end of the sensor device 30 installed at the tip of the finger 22 senses the lateral direction (outward direction) relative to the direction of advancement.

[0069] In step S130, the distance to the sidewall surface is acquired based on the sensing status in the lateral direction (outward direction) relative to the moving direction by the sensor device 30 in step S120. By sensing the lateral direction while moving inside the process chamber PC, information regarding the distance to the sidewall surface is continuously acquired.

[0070] In step S140, based on the information regarding the distance to the side wall surface acquired in step S130, the robot control device 100 calculates the approach angle of the finger 22. For example, the robot control device 100 calculates the approach angle of the finger 22 based on the distance dw1 to the side wall surface at time t1, the distance dw2 to the side wall surface at time t2, and the movement distance df of the finger 22 in the advancing direction during that period (times t1 to t2).

[0071] The finger 22 moves linearly (moves linearly) from the time it enters the process chamber PC until it reaches the removal position or installation position of the workpiece W in the process chamber PC. At least two pieces of information about the distance to the side wall surface are required to calculate the entry angle, but the entry angle may be calculated using two pieces of information about the distance to the side wall surface obtained by sensing immediately after the finger 22 enters the process chamber PC. This allows the operator to grasp the entry angle early, immediately after the finger 22 enters the process chamber PC.

[0072] For example, if the distance (movement distance in the direction of travel of finger 22) from the gate (opening) that is the entrance and exit of process chamber PC to the removal or installation position of workpiece W in process chamber PC is known in advance, the target position that finger 22 will reach inside process chamber PC can be estimated by calculating the entry angle immediately after finger 22 enters process chamber PC (target position estimation means).

[0073] In other words, the robot control device 100 can estimate the target position to which the finger 22 will reach by taking into account the entry angle calculated immediately after entering the process chamber PC, without actually moving the transport robot 20 (finger 22) to the target position inside the process chamber PC.

[0074] Furthermore, although the sensor device 30 senses the distance to one sidewall surface inside the process chamber PC here, it may also include a distance measuring sensor that senses the distance to the other sidewall surface in the opposite direction. Alternatively, the size of the process chamber PC may be determined in advance, the distance to one sidewall surface may be sensed, and the distance to the other sidewall surface may be calculated.

[0075] This makes it possible to calculate the position at which the finger 22 enters the process chamber PC based on the distance from the finger 22 to the sidewall surfaces in both directions (entry position calculation means). Specifically, it is possible to determine whether the finger 22 has entered the process chamber PC at the center position in the lateral direction, and further to estimate the target position with higher accuracy based on the entry position.

[0076] As described above, in the flat panel manufacturing system 1, transfer robot system 10, robot control device 100, and robot control method M100 according to one embodiment of the present invention, the sensor device 30, to which the sensor 31 is attached, is held at the tip of the finger 22. While the finger 22 advances from the transfer chamber TC toward the load lock chamber LLC (process chamber PC), the sensor 31 senses the distance to the wall surface inside the load lock chamber LLC (process chamber PC). The advance angle of the finger 22 is then calculated based on the distance dw1 to the side wall surface at time t1, the distance dw2 to the side wall surface at time t2, and the movement distance df of the finger 22 in the advancing direction during that period (from time t1 to t2). This allows the advance angle at which the finger 22 holding the workpiece W advances toward the load lock chamber LLC (process chamber PC) to be properly determined.

[0077] In this embodiment, the sensor device 30 is held at the tip of the finger 22 as a single unit including the sensor 31, but this is not limiting, and for example, the sensor 31 may be configured to be attached to the tip of the finger 22. Specifically, the sensor 31 may be attached to the tip of the finger 22 directly or indirectly via an attachment mechanism or the like.

[0078] [Distance to side wall] In this embodiment, the sensor 31 attached to the sensor device 30 senses the distance to the side wall surface, but it is necessary to consider cases where the side wall surface is uneven or where there is an obstacle between the sensor 31 and the side wall surface. Specifically, there may be cases where a part such as a screw protrudes from the side wall surface, dust is attached, or other parts exist between the sensor 31 and the side wall surface.

[0079] 8 is an enlarged view showing the transfer robot 20 sensing the uneven sidewall surface while moving from the transfer chamber TC to the process chamber PC. As shown in Fig. 8, the sidewall surface has curved and flat protrusions as seen from the sensor 31, and there is also an obstacle between the sensor 31 and the sidewall surface.

[0080] While the finger 22 advances in the advancement direction inside the process chamber PC, the sensor 31 senses the distance to the side wall surface. Here, the distances sensed and acquired by the sensor 31 are denoted as d1 to d11.

[0081] For distances d1 and d2, the difference (amount of change) between distance d1 and distance d2 is calculated relative to the distance traveled by finger 22 in the direction of travel, and if this difference (amount of change) is greater than a threshold, the location sensed as distances d1 and d2 is determined to be not a flat surface. In this case, it is a curved surface protruding from the side wall surface.

[0082] For distances d3 and d4, the difference (amount of change) between distances d3 and d4 is calculated relative to the distance traveled by finger 22 in the direction of travel, and if the difference (amount of change) is equal to or less than a threshold, the location sensed as distances d3 and d4 is determined to be a flat surface. Furthermore, since distances d3 and d4 are greater than distances d2 and d5 sensed before and after them, the location is determined to be a flat surface on the side wall surface (area A).

[0083] For distances d5 and d6, the difference (amount of change) between distances d5 and d6 is calculated relative to the distance traveled by finger 22 in the direction of travel, and if the difference (amount of change) is equal to or less than a threshold, the location sensed as distances d5 and d6 is determined to be a flat surface. However, because distances d5 and d6 are smaller than distances d4 and d7 sensed before and after them, they are either a flat surface protruding from the side wall surface or an obstacle existing between sensor 31 and the side wall surface.

[0084] Distances d7 and d8 are planes on the side wall surface, similar to distances d3 and d4 (area B).

[0085] Distance d9, like distances d5 and d6, is a plane projecting from the side wall surface or an obstacle existing between sensor 31 and the side wall surface.

[0086] Distances d10 and d11 are planes on the side wall surface, similar to distances d3 and d4 (area C).

[0087] In this way, the approach angle calculation means 130 calculates the approach angle by using the distance acquired by sensing the plane of the side wall surface as the distance to the side wall surface, among the distances acquired by sensing by the sensing means 120. In this case, the distances are d3 and d4 in area A, d7 and d8 in area B, and d10 and d11 in area C.

[0088] As a result, even if the sidewall surface inside the process chamber PC is uneven and / or an obstacle is present between the sensor 31 and the sidewall surface, the distance to the sidewall surface in a region of the sidewall surface that is smooth can be used to calculate the approach angle, thereby making it possible to properly determine the approach angle at which the finger 22 approaches the process chamber PC.

[0089] [Variations] 9 is a schematic diagram showing the state in which the transfer robot 20 senses the inner wall surface while advancing from the transfer chamber TC toward the process chamber PC. As shown in Fig. 9, two sensors 31 and 32 are attached to both ends of the sensor device 30 disposed at the tip of the finger 22 of the transfer robot 20, and the two sensors 31 and 32 sense the distance to the inner wall surface inside the process chamber PC.

[0090] Specifically, the two sensors 31 and 32 are distance measuring sensors that can sense the distance to the wall surface inside the process chamber PC in the direction along the moving direction of the finger 22 and in the horizontal direction.

[0091] The two sensors 31 and 32 sense the distances df1 and df2 to different points on the inner wall surface of the process chamber PC at the same time (sensing means 120).

[0092] The approach angle calculation means 130 calculates the approach angle at which the finger 22 approaches the process chamber PC based on the distances df1 and df2 to the wall surface obtained by sensing by the sensing means 120 and the distance dw between the two sensors 31 and 32.

[0093] In this way, the approach angle can be calculated by sensing the distance to the inner wall surface of the process chamber PC instead of the side wall surface.

[0094] When sensing the distance to the rear wall surface of the process chamber PC, it is preferable to place the sensor device 30 (sensors 31, 32) at the tip of the finger 22 of the transport robot 20 that is closest to the rear wall surface, but this is not limited to this.For example, if the accuracy of the measurement is guaranteed, the sensors 31, 32 may be placed on the hand holder 21, etc., taking into account the stability of the installation.

[0095] In this embodiment, the situation in which the hand holder 21 (fingers 22) of the transfer robot 20 advances from the transfer chamber TC toward the process chamber PC has been described as an example, but the present invention is not limited to this. For example, the present invention can be similarly applied to a situation in which the hand holder 21 (fingers 22) of the transfer robot 20 advances from the transfer chamber TC toward the load lock chamber LLC.

[0096] The above-described embodiments are intended to facilitate understanding of the present invention and are not intended to limit the present invention. The elements of the embodiments, as well as their arrangement, materials, conditions, shapes, sizes, etc., are not limited to those illustrated and can be modified as appropriate. Furthermore, configurations shown in different embodiments can be partially substituted or combined with each other. [Explanation of symbols]

[0097] 1...flat panel manufacturing system, 10...transport robot system, 20...transport robot, 21...hand holder, 22...finger, 30...sensor device, 31, 32...sensors, 100...robot control device, 110...robot control means, 120...sensing means, 130...approach angle calculation means, TC...transfer chamber, PC...process chamber, LLC...load lock chamber, TP...teaching pendant, W...workpiece, dw1, dw2...distance to side wall surface, df...movement distance in the direction of travel, df1, df2...distance to rear wall surface, dw...distance between sensors 31 and 32, d1 to d11...distances obtained by lateral sensing, M100...robot control method, S110 to S140...each step of robot control method M100

Claims

1. A flat panel manufacturing system for manufacturing flat panels, comprising: a transfer robot that transfers a workpiece; a first chamber in which the transfer robot is disposed; and a second chamber that is disposed adjacent to the first chamber so as to face an opening of the first chamber, a sensor device disposed at a tip of a holder of the transport robot that holds the workpiece; a robot control means for controlling the operation of the transport robot; a sensing means for sensing a distance to a wall surface inside the second chamber by the sensor device while operating a holding unit of the transfer robot by the robot control means to move the holding unit from the first chamber toward the second chamber; and an approach angle calculation means for calculating an approach angle at which the transfer robot approaches the second chamber based on information about at least two of the distances obtained by sensing by the sensing means. Flat panel manufacturing system.

2. the sensor device includes a distance measuring sensor capable of sensing a distance to a wall surface inside the second chamber in at least one direction that is a direction perpendicular to a moving direction of the holder of the transfer robot and a horizontal direction, The flat panel manufacturing system of claim 1 .

3. the entry angle calculation means calculates an entry angle at which the transfer robot enters the second chamber based on information about the distance where a change in the distance obtained by sensing by the sensing means is equal to or less than a threshold value during a first period. The flat panel manufacturing system of claim 2 .

4. the approach angle calculation means calculates an approach angle at which the transfer robot approaches the second chamber based on information about the distance obtained by sensing by the sensing means during the second period, when the distance obtained by sensing by the sensing means during the second period is greater than the distance obtained during a predetermined period before or after the second period; 4. The flat panel manufacturing system according to claim 2 or 3.

5. the sensor device includes a distance measuring sensor capable of sensing a distance to a wall surface inside the second chamber in a direction opposite to the one direction, and an entry position calculation means for calculating a position at which the transfer robot enters the second chamber based on information regarding the distance to a wall surface inside the second chamber in the one direction and the opposite direction, the information being acquired by sensing using the sensing means. The flat panel manufacturing system of claim 2 .

6. a target position estimation unit that estimates a target position within the second chamber to be reached by the transfer robot based on the approach angle calculated by the approach angle calculation unit, The flat panel manufacturing system of claim 1 .

7. the sensor device includes a distance measuring sensor capable of sensing distances to a wall surface inside the second chamber at at least two locations in a direction along the moving direction of the holder of the transfer robot and in a horizontal direction; The flat panel manufacturing system of claim 1 .

8. A robot control device for controlling the operation of a transport robot used in a flat panel manufacturing system for manufacturing flat panels, a robot control means for controlling the operation of the transport robot; a sensing means for operating a holding part of the transport robot by the robot control means to move the transport robot from a first chamber in which the transport robot is disposed toward a second chamber disposed adjacent to the first chamber so as to face an opening of the first chamber, and sensing a distance to a wall surface inside the second chamber using a sensor device disposed at a tip end of the holding part of the transport robot; and an approach angle calculation means for calculating an approach angle at which the transfer robot approaches the second chamber based on information about at least two of the distances obtained by sensing by the sensing means. Robot control device.

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