Flat panel manufacturing system and robot control device used therein

Abstract

To provide a flat panel manufacturing system and a robot control device used therein that can appropriately grasp the approach angle at which a transfer robot approaches a chamber.SOLUTION: A flat panel manufacturing system 1 includes sensing means 120 configured to, while causing robot control means 110 to operate holding portions 22 of a transport robot 20 to move from a first chamber TC toward a second chamber PC, sense, by a sensor device 30, markers inside the second chamber PC; marker position calculation means 130 configured to calculates the positions of at least two markers detected by sensing performed by the sensing means 120; and approach angle calculation means 140 configured to calculate an approach angle at which the transport robot 20 moves into the second chamber PC based on the positions of the at least two markers.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The present invention relates to a flat panel manufacturing system and a robot controller used therein. [Background technology]

[0002] In recent years, industrial robots have become widespread in the industrial world, including large-scale manufacturing systems for processing glass substrates for large flat panels, including flat panel displays (FPDs) such as liquid crystal displays and organic electroluminescence (EL) displays.

[0003] In such large-scale manufacturing systems, multiple process chambers are arranged to perform various processes on workpieces such as glass substrates. Furthermore, a transfer robot (transfer device) is arranged in the transfer chamber, and the transfer robot (transfer device) transports the workpiece to a desired position in each process chamber.

[0004] In Patent Document 1, the transfer device is equipped with an optical sensor at the tip of a support pick, and by moving the support pick upward in the transfer chamber and irradiating light toward the tip, the transfer device identifies the upper end position of the opening between the transfer chamber and the load lock chamber. Furthermore, in the load lock chamber, the support pick is moved upward and rotated while irradiating light toward the tip and downward, thereby identifying the upper end position / side wall position of the buffer (groove). Then, the operation of the transfer device is corrected based on the identified upper end position of the opening and the upper end position / side wall position of the buffer (groove). In this way, Patent Document 1 automatically adjusts the operating position of the transfer device. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 2019-220588 Summary of the Invention [Problem to be solved by the invention]

[0006] However, there is a possibility that the transfer chamber and the process chamber are not installed straight and with high accuracy. For example, if the process chamber is installed at an angle to the transfer chamber, even if the transfer device installed in the transfer chamber advances toward the process chamber, it will proceed inside the process chamber at an angle.

[0007] SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a flat panel manufacturing system that can appropriately grasp the approach angle at which a transfer robot approaches a chamber, and a robot control device used therein. [Means for solving the problem]

[0008] A flat panel manufacturing system according to one embodiment of the present invention is a flat panel manufacturing system that manufactures flat panels and includes a transport robot that transports workpieces, a first chamber in which the transport robot is located, and a second chamber that is located adjacent to the first chamber and faces the opening of the first chamber. The system also includes a sensor device located at the tip of the holding part of the transport robot that holds the workpiece, a robot control means for controlling the operation of the transport robot, a sensing means that senses markers inside the second chamber using the sensor device while the robot control means operates the holding part of the transport robot to enter from the first chamber toward the second chamber, a marker position calculation means that calculates the positions of at least two markers detected by sensing using the sensing means, and an approach angle calculation means that calculates the approach angle at which the transport robot enters the second chamber based on the positions of the at least two markers.

[0009] According to this aspect, the sensor device is disposed at the tip of the holder of the transfer robot, and the sensing means senses the mark inside the second chamber with the sensor device while operating the holder of the transfer robot to advance from the first chamber toward the second chamber. The approach angle calculation means calculates the approach angle based on the positions of at least two of the markings calculated by the mark position calculation means. This makes it possible to appropriately grasp the approach angle at which the holder holding the workpiece advances toward the second chamber.

[0010] In the above aspect, a sensor device may be arranged at the tip of the holding part of the transport robot using an attachment mechanism that is capable of sensing the direction of travel of the holding part of the transport robot and the downward direction inside the second chamber.

[0011] According to this aspect, the sensor device is attached to the tip of the holding part of the transport robot using the attachment mechanism, so that the sensor device is attached to a predetermined position. As a result, the position of the sensor device can be properly determined without calibration, and the position of the marker sensed by the sensor device can be more properly determined.

[0012] In the above aspect, the at least two marks may be members provided inside the second chamber as part of a table on which the workpiece is placed.

[0013] According to this aspect, a part of the mounting table provided inside the second chamber is used as a marker, so there is no need to provide a separate marker inside the second chamber.

[0014] In the above embodiment, the at least two marks may be provided at positions parallel or perpendicular to the opening of the second chamber.

[0015] According to this aspect, a mark located parallel or perpendicular to the opening of the second chamber is used as the mark, so that the entry angle of the transport robot's direction of travel can be appropriately determined from the inclination relative to the mark.

[0016] In the above aspect, the sensor device may include a two-dimensional sensor capable of sensing a predetermined range in a direction perpendicular to the moving direction of the holder of the transport robot and also in a downward direction inside the second chamber.

[0017] According to this aspect, the sensor device includes a two-dimensional sensor that can sense the downward direction inside the second chamber, which is the direction of travel of the holding part of the transport robot, within a predetermined range in a direction perpendicular to the direction of travel, thereby making it possible to more appropriately grasp the markers provided inside the second chamber.

[0018] In the above aspect, the apparatus further includes a target position estimation means for estimating a target position to be reached by the transfer robot within the second chamber based on the approach angle calculated by the approach angle calculation means.

[0019] According to this aspect, the target position estimation means estimates the target position to be reached by the transport robot within the second chamber based on the approach angle calculated by the approach angle calculation means, so that, for example, it is possible to estimate the target position to be reached by the holding part of the transport robot without actually moving the holding part to the target position within the second chamber.

[0020] A robot control device according to one embodiment of the present invention is a robot control device that controls the operation of a transport robot used in a flat panel manufacturing system that manufactures flat panels, and includes: a robot control means that controls the operation of the transport robot; a sensing means that uses the robot control means to operate the holding part of the transport robot to enter from a first chamber in which the transport robot is located toward a second chamber that is located adjacent to the first chamber so as to face the opening of the first chamber, while sensing markers inside the second chamber using a sensor device that is located at the tip of the holding part of the transport robot; a marker position calculation means that calculates the positions of at least two markers detected by sensing using the sensing means; and an approach angle calculation means that calculates the approach angle at which the transport robot enters the second chamber based on the positions of the at least two markers.

[0021] According to this aspect, the sensing means senses the mark inside the second chamber using the sensor device while operating the holder of the transfer robot to advance from the first chamber toward the second chamber. The approach angle calculation means calculates the approach angle based on the positions of at least two of the mark calculated by the mark position calculation means. This makes it possible to appropriately grasp the approach angle at which the holder holding the workpiece advances toward the second chamber. [Effects of the Invention]

[0022] According to the present invention, it is possible to provide a flat panel manufacturing system and a robot control device used therein that can appropriately grasp the approach angle at which a transfer robot approaches a chamber. [Brief explanation of the drawings]

[0023] [Figure 1] 1 is an external perspective view showing an overview of a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 2] 1 is a plan view showing the internal structure of a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 3] 1 is a schematic diagram showing the configuration of a transfer robot system 10 used in a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 4] 1 is a schematic diagram showing a state in which a sensor device 30 is arranged on a transfer robot 20 used in a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 5] 1 is a functional block diagram showing each function of a robot control device 100 that controls the operation of a transfer robot 20 used in a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 6] FIG. 10 is a schematic diagram showing how the transfer robot 20 senses the two support pins in the front row from the gate of the process chamber PC while advancing from the transfer chamber TC toward the process chamber PC. [Figure 7] 1 is a flowchart showing the flow of processing in a robot control method M100 executed by a robot control device 100 that controls the operation of a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. [Figure 8] FIG. 10 is a schematic diagram showing how the transfer robot 20 senses two support pins provided at positions perpendicular to the gate of the process chamber PC while advancing from the transfer chamber TC toward the process chamber PC. DETAILED DESCRIPTION OF THE INVENTION

[0024] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. Note that the embodiment described below is merely a specific example for carrying out the present invention and is not intended to limit the present invention. Furthermore, to facilitate understanding of the description, the same components in each drawing will be assigned the same reference numerals as much as possible, and duplicate descriptions may be omitted.

[0025] <One embodiment> [Flat panel manufacturing system configuration] Fig. 1 is an external perspective view showing an overview of a flat panel manufacturing system 1 according to one embodiment of the present invention, and Fig. 2 is a plan view showing the internal structure of the flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in Fig. 1 and Fig. 2, the flat panel manufacturing system 1 is a large multi-chamber system that includes a transfer chamber TC in the center and multiple process chambers PC and load lock chambers LLC arranged to surround the transfer chamber TC.

[0026] The flat panel manufacturing system 1 is a vacuum processing system for processing glass substrates for large flat panels including flat panel displays (FPDs) such as liquid crystal displays and organic EL displays.

[0027] The load lock chamber LLC is a chamber for transferring workpieces W (such as glass substrates) between the outside and the process chambers PC before and after processing in the process chambers PC, allowing the process chambers PC to maintain a vacuum state without being exposed to the outside atmosphere. The transfer chamber TC can also maintain a vacuum state.

[0028] The transfer chamber TC is configured to be able to maintain a vacuum state as described above, and is equipped with a transfer robot 20. The transfer robot 20 has a transfer mechanism (hand holders and fingers) that transfers the workpiece W between each process chamber PC and the load lock chamber LLC.

[0029] The multiple process chambers PC are configured to be able to maintain a vacuum state as described above, and are equipped with a mounting table on which the workpiece W transferred by the transfer robot 20 arranged in the transfer chamber TC is placed. The mounting table may be configured, for example, to be provided with multiple support pins so that the workpiece W is supported by the support pins. Then, in each process chamber PC, with the workpiece W placed thereon, plasma processing such as CVD (Chemical Vapor Deposition), etching, ashing, or film formation under vacuum conditions may be performed on the workpiece W. Note that the same type of processing may be performed in each process chamber PC, or different types of processing may be performed in each process chamber.

[0030] [Transport robot system configuration] 3 is a schematic diagram showing the configuration of a transfer robot system 10 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 3, the transfer robot system 10 includes a transfer robot 20, a robot control device 100, and a teaching pendant TP.

[0031] As described with reference to FIGS. 1 and 2 , the transfer robot 20 is disposed in the transfer chamber TC in the flat panel manufacturing system 1 and transfers a workpiece W between each process chamber PC and the load lock chamber LLC. The transfer robot 20 is, for example, a horizontal articulated robot intended to transfer glass substrates, and is a clean transfer robot used for transfers in clean environments in the manufacturing of semiconductor devices and flat panel displays, the medical and food industries, and the like. In this embodiment, the transfer robot 20 is, for example, a two-axis or three-axis cylindrical coordinate system, and has a hand holder 21 and fingers (holding portions) 22 as end effectors. The transfer of the workpiece W (e.g., a glass substrate) while held by the fingers 22 will be described as an example.

[0032] The robot control device 100 is a device that controls the operation of the transfer robot 20. For example, the robot control device 100 is connected to an operating device such as a teaching pendant TP and can acquire operation instruction information input via the operating device. Based on the operation instruction information, the robot control device 100 starts and stops the transfer robot 20, and operates each axis, arm, and hand holder 21 (fingers 22) of the transfer robot 20 to take out, transport, and place a workpiece W in each process chamber PC and load lock chamber LLC.

[0033] The teaching pendant TP is an operating device operated by an operator, and receives input from the operator regarding operation instruction information for the transport robot 20, such as the transport work of transporting the workpiece W. Typically, the operator uses an operating device such as the teaching pendant TP to input appropriate instruction information, for example, for starting and stopping the transport robot 20, as well as for setting the transport robot 20, operating the arm and hand holder 21 (fingers 22), and registering teaching points.

[0034] Furthermore, regarding the registration of teaching points, an operator may sequentially register teaching points on the movement path of the transfer robot 20 using an operating device such as a teaching pendant TP while operating the transfer robot 20, or teaching points may be automatically registered by automatic teaching. Automatic teaching is effective in environments or situations where an operator cannot enter the interior and cannot grasp the state inside each chamber from the outside, such as the flat panel manufacturing system 1.

[0035] Here, there is a situation in which the transfer robot 20 installed in the transfer chamber TC inserts its fingers 22 into the load lock chamber LLC, removes the workpiece W placed there using the fingers 22, and transfers it to a mounting table in the process chamber PC while it is held by the fingers 22. The transfer robot 20 operates the arm and hand holder 21 (fingers 22) based on operation instruction information from the robot control device 100, removes the workpiece W from the load lock chamber LLC, and transfers it to the process chamber PC as the transfer destination.

[0036] At this time, the finger 22 holding the workpiece W advances from the transfer chamber TC toward the load lock chamber LLC or the process chamber PC and proceeds inside the load lock chamber LLC or the process chamber PC. For example, if the load lock chamber LLC or the process chamber PC is installed at an angle with respect to the transfer chamber TC, or if the gate (opening) serving as the entrance / exit of the transfer chamber TC and the gate (opening) serving as the entrance / exit of the load lock chamber LLC or the process chamber PC are misaligned, it is conceivable that the finger 22 holding the workpiece W will advance in an inclined direction inside the load lock chamber LLC or the process chamber PC after entering the load lock chamber LLC or the process chamber PC.

[0037] It is important for the robot control device 100 to grasp the approach angle at which the transfer robot 20 approaches the load lock chamber LLC and the process chamber PC. Below, a method will be described in which a sensor device is used to sense support pins or the like provided inside the load lock chamber LLC and the process chamber PC as markers, and the approach angle is appropriately grasped based on the positions of the support pins.

[0038] The support pins provided inside the load lock chamber LLC and the process chamber PC are components provided inside the load lock chamber LLC and the process chamber PC as a mounting table for placing the workpiece W, and these components, or parts of these components, are used as markers.

[0039] 4 is a schematic diagram showing a state in which a sensor device 30 is disposed on a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 4, the sensor device 30 is disposed on the tip of a finger 22 attached to a hand holder 21 in the transfer robot 20.

[0040] The sensor device 30 located at the tip of the finger 22 is calibrated, and the robot control device 100 is aware of the position of the sensor device 30 (the positions of the two sensors 31 described below), and is also able to determine the positions of landmarks such as support pins sensed by the sensor device 30 from the position of the finger 22 (robot coordinate system).

[0041] The sensor device 30 includes a sensor 31. For example, the sensor 31 may be a two-dimensional laser sensor that is attached to the front surface, back surface, or side surface of the sensor device 30 in the traveling direction and is capable of sensing only a predetermined range in a direction perpendicular to the traveling direction of the finger 22 of the transfer robot 20.

[0042] The sensor device 30 equipped with the sensor 31 is placed and held at the tip of the finger 22 of the transport robot 20, and the sensor 31 is configured to be able to sense the direction of movement of the finger 22 of the transport robot 20 and the downward direction inside the load lock chamber LLC and the process chamber PC.

[0043] As a result, as the finger 22 advances toward the load lock chamber LLC and the process chamber PC, the sensor 31 can sequentially sense the downward direction inside the load lock chamber LLC and the process chamber PC within the above-mentioned specified range (sensing range) of the two-dimensional laser sensor, and detect markers such as support pins.

[0044] Although one sensor 31 is disposed in the center of the sensor device 30, this is not limiting. For example, if it is possible to detect and grasp the positions of marks such as support pins disposed inside the load lock chamber LLC and the process chamber PC, the sensor may be disposed at the end of the sensor device 30, or two or more sensors may be disposed.

[0045] Furthermore, the sensor disposed in the sensor device 30 is not limited to a two-dimensional laser sensor, but may be, for example, a stereo camera, a LiDAR, or the like.

[0046] Furthermore, the transfer robot 20 may be provided with an attachment mechanism for attaching the sensor device 30 to the tip of the finger 22 so as to be able to sense the direction of movement of the finger 22 and the downward direction inside the load lock chamber LLC and the process chamber PC. For example, the attachment mechanism may be configured so that the sensor device 30 is fitted to the tip of the finger 22, and by fitting the sensor device 30 to the tip of the finger 22 using the attachment mechanism, the sensor 31 installed in the sensor device 30 may be configured to be able to detect marks such as support pins provided in the load lock chamber LLC and the process chamber PC.

[0047] The robot control device 100 knows in advance the position of the sensor device 30 (position of the sensor 31) when the sensor device 30 is placed at the tip of the finger 22 using the attachment mechanism, and can also know the positions of marks such as support pins detected by the sensor device 30 (robot coordinate system). In this case, the above-mentioned calibration is not necessary.

[0048] Furthermore, the sensor device 30 may include a control unit and a communication unit, and may notify the robot control device 100 of information detected (acquired) by the sensor 31, for example.

[0049] [Robot control device configuration] 5 is a functional block diagram showing the functions of a robot control device 100 that controls the operation of a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 5, the robot control device 100 includes a robot control means 110, a sensing means 120, a mark position calculation means 130, and an approach angle calculation means 140, and controls the operation of the transfer robot 20.

[0050] The robot control device 100 moves the hand holder 21 (fingers 22) from the transfer chamber TC toward the load lock chamber LLC (process chamber PC) with the sensor 31 of the sensor device 30 while holding the sensor device 30 at the tip of the finger 22. Then, the robot control device 100 calculates an approach angle at which the finger 22 of the transfer robot 20 approaches the load lock chamber LLC (process chamber PC) based on at least two or more positions acquired by the sensing.

[0051] 3, the robot control device 100 is connected to the transfer robot 20, and further has many functions for performing various controls and processes based on operation instruction information from an operating device such as a teaching pendant TP, or automatic control (automatic teaching). Here, the robot control device 100 is mainly shown to have a function for grasping the approach angle of the transfer robot 20 at which it approaches the load lock chamber LLC (process chamber PC), but it also has other configurations and functions.

[0052] The robot control means 110 operates the transfer robot 20. For example, the transfer robot 20 is in a state where the sensor device 30 is held by the fingers 22, and the robot control means 110 operates each axis, arm, and hand holder 21 (fingers 22) of the transfer robot 20. The sensor 31 attached to the sensor device 30 is configured to be capable of sensing the direction of movement of the fingers 22 and the downward direction inside the load lock chamber LLC (process chamber PC).

[0053] The sensing means 120 includes, for example, a sensor 31 in the sensor device 30, and senses the direction of movement of the finger 22 and the downward direction inside the load lock chamber LLC (process chamber PC) while the hand holder 21 (finger 22: holding part) of the transport robot 20 is advanced from the transfer chamber TC (first chamber) toward the load lock chamber LLC (process chamber PC) (second chamber) by the robot control means 110.

[0054] Specifically, the sensing means 120 detects marks such as support pins provided inside the load lock chamber LLC (process chamber PC) by the sensor 31. The marks detected here are provided in regular alignment with the gate (opening) which is the entrance and exit of the load lock chamber LLC (process chamber PC), and may be provided, for example, parallel and / or perpendicular to the gate.

[0055] The landmark position calculation means 130 calculates the positions of at least two landmarks detected by sensing by the sensing means 120. As described above, the position of the sensor device 30 (sensor 31) disposed at the tip of the finger 22 is known in advance. As a result, for example, the landmark position calculation means 130 may calculate the position (robot coordinates) of the landmark detected by the sensor device 30 (sensor 31) based on the position (robot coordinates) of the sensor device 30 (sensor 31).

[0056] The approach angle calculation means 140 calculates the approach angle at which the finger 22 of the transfer robot 20 approaches the load lock chamber LLC (process chamber PC) based on the positions of at least two marks calculated by the mark position calculation means 130.

[0057] For example, two support pins that are arranged parallel to the gate (opening) of the load lock chamber LLC (process chamber PC) among a plurality of support pins arranged inside the load lock chamber LLC (process chamber PC) are detected by the sensing means 120, and the positions of the two support pins are calculated by the mark position calculation means 130. The approach angle calculation means 140 may calculate, as the approach angle, the direction of travel of the finger 22 of the transfer robot 20 relative to a line connecting the positions of the two support pins.

[0058] More specifically, when the finger 22 of the transfer robot 20 advances toward the load lock chamber LLC (process chamber PC), the sensor device 30 (sensor 31) disposed at the tip of the finger 22 detects the support pin in the front row that is closest to the gate of the load lock chamber LLC (process chamber PC). The approach angle calculation means 140 may calculate the moving direction (inclination) of the finger 22 of the transfer robot 20 with respect to a line connecting the positions of the two support pins. For example, when the moving direction of the finger 22 is perpendicular to the line connecting the positions of the two support pins, the approach angle calculation means 140 may determine that the finger 22 has advanced straight into the load lock chamber LLC (process chamber PC) and calculate an approach angle of 0 degrees.

[0059] The robot control device 100 may also notify the operator of the approach angle calculated by the approach angle calculation means 140 via an operating device such as a teaching pendant TP. Furthermore, instead of or in addition to the above notification, if the approach angle is equal to or greater than a threshold value, the robot control device 100 may notify the operator that the approach angle is inappropriate and warn or alert the operator, and in addition, the robot control means 110 may stop the operation of the transfer robot 20, reduce the operating speed, or retract the fingers 22 to exit the load lock chamber LLC (process chamber PC).

[0060] [About the operation of the transport robot] 6 is a schematic diagram showing how the transfer robot 20 senses the two support pins in the front row from the gate of the process chamber PC while advancing from the transfer chamber TC toward the process chamber PC. As shown in FIG. 6, the process chamber PC has a gate (opening) which is an entrance and exit to the transfer chamber TC, side walls on both sides of the gate, and a back wall on the back side, and inside the gate are provided a plurality of support pins aligned vertically and horizontally.

[0061] The robot control device 100 operates the hand holder 21 (finger 22) of the transport robot 20 arranged in the transfer chamber TC, causing the finger 22 to enter from the transfer chamber TC through the gate (opening) toward the process chamber PC, and then proceed inside the process chamber PC.

[0062] The finger 22, holding the sensor device 30 at its tip, enters the process chamber PC from the transfer chamber TC and moves inside the process chamber PC to the removal or installation position of the workpiece W to be placed in the process chamber PC.

[0063] A sensor 31 is attached to the center of the sensor device 30 located at the tip of the finger 22 of the transport robot 20, and the sensor 31 senses the direction of movement and downward direction of the finger 22 inside the process chamber PC and detects the support pin.

[0064] Specifically, as the finger 22 advances toward the process chamber PC, the sensor device 30 (sensor 31) sequentially senses the downward direction inside the process chamber PC, thereby detecting the support pins P1 and P2 located in the front row from the gate.

[0065] Then, the positions of the support pins P1 and P2 are calculated, and the direction of travel of the fingers 22 of the transfer robot 20 relative to the line connecting the support pins P1 and P2 is calculated as the approach angle.

[0066] [Robot control method] Next, we will explain in detail a method for controlling the operation of the transport robot 20 by detecting a support pin (marker) provided inside the process chamber PC using a sensor device 30 held at the tip of the hand holder 21 (finger 22) of the transport robot 20 while the finger 22 is being advanced from the transfer chamber TC toward the process chamber PC, thereby determining the advancement angle of the finger 22.

[0067] 7 is a flowchart showing the processing flow of a robot control method M100 executed by a robot control device 100 that controls the operation of a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 7, the robot control method M100 includes steps S110 to S150, and each step is executed by a processor included in the robot control device 100.

[0068] In step S110, the robot control device 100 advances the hand holder 21 (fingers 22) of the transfer robot 20, with the sensor device 30 held at the tip of the finger 22, from the transfer chamber TC toward the process chamber PC.

[0069] In step S120, while the finger 22 is advanced from the transfer chamber TC toward the process chamber PC, the inside of the process chamber PC is sensed by the sensor device 30 held at the tip of the finger 22. Specifically, the support pins provided inside the process chamber PC are detected by sensing the downward direction inside the process chamber PC, which is the direction in which the finger 22 advances.

[0070] In step S130, it is determined whether two support pins have been detected based on the sensing status in step S120. Here, the two support pins are those of the multiple support pins aligned inside the process chamber PC that are used as reference marks for calculating the entry angle of the finger 22. The two support pins may be, for example, the support pin provided in the front row from the gate that the finger 22 first detects when it enters the process chamber PC, and the support pin provided next to that support pin (on the right or left side of the direction of travel). Which support pin among the multiple support pins is used as the mark may be set in advance as a target.

[0071] If it is determined in step S130 that two support pins have been detected ("Yes" in step S130), the process proceeds to step S140. On the other hand, if it is not determined in step S130 that two support pins have been detected ("No" in step S130), the process returns to step S110, and the finger 22 is advanced to continue sensing the inside of the process chamber PC.

[0072] In step S140, the positions of the two support pins detected in step S130 are calculated. For example, based on the position (robot coordinates) of the sensor device 30 (sensor 31) arranged at the tip of the finger 22, the positions (robot coordinates) of the two support pins detected by the sensor 31 are calculated.

[0073] In step S150, the approach angle of the finger 22 is calculated based on the positions of the two support pins calculated in step S140. For example, the approach angle is calculated as the direction of travel of the finger 22 of the transport robot 20 with respect to a line connecting the positions of the two support pins. Here, it is assumed that the two support pins are aligned parallel to the gate, and if the direction of travel of the finger 22 of the transport robot 20 is perpendicular to the line connecting the positions of the two support pins, the approach angle is calculated as 0 degrees. If the direction of travel of the finger 22 of the transport robot 20 deviates from the perpendicular line, the inclination of the deviation is calculated as the approach angle.

[0074] The finger 22 moves linearly (moves linearly) from the time it enters the process chamber PC until it reaches the removal position or installation position of the workpiece W in that process chamber PC. At least two positions of the support pins that serve as landmarks are required to calculate the entry angle, but if the finger 22 detects the front row of support pins from the gate of the process chamber PC and calculates the entry angle based on the positions of those support pins, the operator can grasp the entry angle early on when the finger 22 is near the gate of the process chamber PC or immediately after it enters that process chamber PC.

[0075] For example, if the distance (movement distance in the direction of travel of finger 22) from the gate (opening) that is the entrance and exit of the process chamber PC to the removal or installation position of the workpiece W in the process chamber PC is known in advance, the target position that finger 22 will reach inside the process chamber PC can be estimated by calculating the entry angle near the gate of the process chamber PC or immediately after finger 22 enters the process chamber PC (target position estimation means).

[0076] In other words, the robot control device 100 can estimate the target position that the finger 22 will reach by taking into account the approach angle calculated near the gate of the process chamber PC or immediately after entering the process chamber PC, without actually moving the transport robot 20 (finger 22) to the target position inside the process chamber PC.

[0077] As described above, in the flat panel manufacturing system 1, transfer robot system 10, robot control device 100, and robot control method M100 according to one embodiment of the present invention, the sensor device 30, to which the sensor 31 is attached, is held at the tip of the finger 22. While the finger 22 advances from the transfer chamber TC toward the load lock chamber LLC (process chamber PC), the sensor 31 senses the support pins provided inside the load lock chamber LLC (process chamber PC). Then, the approach angle of the finger 22 with respect to the line connecting the two detected support pins P1 and P2 is calculated. This makes it possible to appropriately determine the approach angle at which the finger 22 holding the workpiece W advances toward the load lock chamber LLC (process chamber PC).

[0078] In this embodiment, the sensor device 30 is held at the tip of the finger 22 as a single unit including the sensor 31, but this is not limiting, and for example, the sensor 31 may be configured to be attached to the tip of the finger 22. Specifically, the sensor 31 may be attached to the tip of the finger 22 directly or indirectly via an attachment mechanism or the like.

[0079] 6, among the multiple support pins provided inside the process chamber PC, support pins P1 and P2 provided in the front row from the gate and parallel to the gate are used as reference marks for calculating the approach angle of the finger 22. However, the support pins used as marks are not limited to these. For example, instead of the two support pins adjacent to the front row, any two of the support pins provided in the front row may be used as marks, or any two of the support pins provided in the second row or later may be used as marks. Furthermore, instead of two support pins provided parallel to the gate, two support pins provided perpendicular to the gate may be used as marks.

[0080] FIG. 8 is a schematic diagram showing how the transfer robot 20 senses two support pins provided at positions perpendicular to the gate of the process chamber PC while advancing from the transfer chamber TC toward the process chamber PC.

[0081] As the finger 22 advances toward the process chamber PC, the sensor device 30 (sensor 31) sequentially senses the downward direction inside the process chamber PC to detect the support pin P1 located in the front row from the gate, and then the finger 22 advances further inside the process chamber PC to detect the support pin P3.

[0082] Then, the positions of the support pins P1 and P3 are calculated, and the direction of travel of the fingers 22 of the transfer robot 20 relative to the line connecting the support pins P1 and P3 is calculated as the approach angle.

[0083] If the direction of movement of the finger 22 is the same as (parallel to, along) the line connecting the positions of the two support pins, it can be assumed that the finger 22 has entered straight into the load lock chamber LLC (process chamber PC), and the entry angle can be calculated as 0 degrees.

[0084] 6 and 8, the support pins are not limited to being arranged in a grid pattern in directions parallel and perpendicular to the gate. For example, the number of support pins arranged in each vertical (column) direction or horizontal (row) direction may differ, or the support pins may be arranged at different positions, as long as the arrangement can avoid collision with the finger 22 moving in a direction approximately perpendicular to the gate. By knowing the arrangement of the support pins in advance, the robot control device 100 can prevent erroneous recognition of the positional relationship of the support pins to be detected among the arranged support pins, and can appropriately calculate the approach angle of the finger 22.

[0085] In this embodiment, the marker is a support pin provided inside the process chamber PC, but the present invention is not limited to this. For example, a part of the mounting table configured to allow the finger 22 to pass through may be used as the marker, as long as the part is provided inside the process chamber PC and its positional relationship with the gate of the process chamber PC is known in advance.

[0086] Specifically, the entry angle may be a plurality of grooves formed inside the process chamber PC so as to be perpendicular to the gate of the process chamber PC. By sensing any one of the plurality of grooves inside the process chamber PC, the uneven portion constituting the groove is detected. The direction of travel of the finger 22 of the transfer robot 20 relative to the straight line forming the groove (the corner of the uneven portion) may be calculated as the entry angle.

[0087] In this embodiment, the situation in which the hand holder 21 (fingers 22) of the transfer robot 20 advances from the transfer chamber TC toward the process chamber PC has been described as an example, but the present invention is not limited to this. For example, the present invention can be similarly applied to a situation in which the hand holder 21 (fingers 22) of the transfer robot 20 advances from the transfer chamber TC toward the load lock chamber LLC.

[0088] The above-described embodiments are intended to facilitate understanding of the present invention and are not intended to limit the present invention. The elements of the embodiments, as well as their arrangement, materials, conditions, shapes, sizes, etc., are not limited to those illustrated and can be modified as appropriate. Furthermore, configurations shown in different embodiments can be partially substituted or combined with each other. [Explanation of symbols]

[0089] 1...flat panel manufacturing system, 10...transfer robot system, 20...transfer robot, 21...hand holder, 22...finger, 30...sensor device, 31...sensor, 100...robot control device, 110...robot control means, 120...sensing means, 130...mark position calculation means, 140...approach angle calculation means, TC...transfer chamber, PC...process chamber, LLC...load lock chamber, TP...teaching pendant, W...workpiece, P1, P2, P3...support pin, M100...robot control method, S110 to S150...each step of robot control method M100

Claims

1. A flat panel manufacturing system for manufacturing flat panels, comprising: a transfer robot that transfers a workpiece; a first chamber in which the transfer robot is disposed; and a second chamber that is disposed adjacent to the first chamber so as to face an opening of the first chamber, a sensor device disposed at a tip of a holder of the transport robot that holds the workpiece; a robot control means for controlling the operation of the transport robot; a sensing means for sensing a mark inside the second chamber with the sensor device while operating a holding unit of the transfer robot with the robot control means to move the holding unit from the first chamber toward the second chamber; a landmark position calculation means for calculating the positions of at least two landmarks detected by the sensing means; and an approach angle calculation means for calculating an approach angle at which the transfer robot approaches the second chamber based on the positions of the at least two marks. Flat panel manufacturing system.

2. the sensor device is disposed at the tip of the holder of the transport robot using an attachment mechanism that is attached so as to be able to sense the direction in which the holder of the transport robot moves and the downward direction inside the second chamber; The flat panel manufacturing system of claim 1 .

3. the at least two marks are members provided inside the second chamber as part of a table on which the workpiece is placed; The flat panel manufacturing system of claim 1 .

4. The at least two marks are provided at positions parallel or perpendicular to the opening of the second chamber. The flat panel manufacturing system according to claim 3 .

5. the sensor device includes a two-dimensional sensor capable of sensing a predetermined range in a direction perpendicular to the moving direction of the holder of the transfer robot and a downward direction inside the second chamber. The flat panel manufacturing system of claim 1 .

6. a target position estimation unit that estimates a target position within the second chamber to be reached by the transfer robot based on the approach angle calculated by the approach angle calculation unit, The flat panel manufacturing system of claim 1 .

7. A robot control device for controlling the operation of a transport robot used in a flat panel manufacturing system for manufacturing flat panels, a robot control means for controlling the operation of the transport robot; a sensing means for operating a holding part of the transport robot by the robot control means to move the transport robot from a first chamber in which the transport robot is disposed toward a second chamber disposed adjacent to the first chamber so as to face an opening of the first chamber, and for sensing a mark inside the second chamber using a sensor device disposed at a tip end of the holding part of the transport robot; a landmark position calculation means for calculating the positions of at least two landmarks detected by the sensing means; and an approach angle calculation means for calculating an approach angle at which the transfer robot approaches the second chamber based on the positions of the at least two marks. Robot control device.

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