Processing device, processing system, management device, display method, program, and semiconductor device manufacturing method

Abstract

To provide a technique that can notify a user of the state of a component in a substrate processing device and a time to replace the component.SOLUTION: A processing device includes a control unit that displays, on a display unit, time information indicating information about the usage time of at least operable components out of processing components used in a processing portion that processes substrates, flow rate control components including a gas supply system or a gas exhaust system and used in an atmosphere control portion that can control the atmosphere in the processing portion, and transport control components used in a transport portion that transports substrates, and quality information that determines that the components are in a predetermined level of quality state, linked to the time information for each timing of determination of the quality information.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to a processing device, a processing system, a management device, a display method, a program, and a method for manufacturing a semiconductor device. [Background technology]

[0002] Conventionally, as described in Patent Documents 1 and 2, there have been cases where the timing of replacing parts is displayed. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2017 / 158682 [Patent Document 2] Japanese Patent Application Publication No. 5-243111 Summary of the Invention [Problem to be solved by the invention]

[0004] However, simply displaying the replacement timing of a part does not allow the user to know the condition of the part, and may not be able to grasp the appropriate time to replace the part.

[0005] The present disclosure provides a technique capable of notifying a user of the state of a component in a substrate processing apparatus and the timing for replacing the component. [Means for solving the problem]

[0006] According to one aspect of the present disclosure, there is provided a technology having a control unit that displays, on a display unit, time information indicating information regarding the usage time of at least operable components out of processing components used in a processing unit that processes substrates, flow rate control components used in an atmosphere control unit that has a gas supply system or a gas exhaust system and is capable of controlling the atmosphere in the processing unit, and transport control components used in a transport unit that transports substrates, and quality information that determines that the components are in a predetermined level of quality state, linked to the time information for each timing at which the quality information is determined. [Effects of the Invention]

[0007] According to the present disclosure, it is possible to notify a user of the status of a part in a processing device and the time to replace the part. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a diagram schematically illustrating an example of a processing system according to a first embodiment. [Figure 2] 1 is a perspective view schematically showing a substrate processing apparatus according to a first embodiment. [Figure 3] 1 is a side cross-sectional view schematically showing a substrate processing apparatus according to a first embodiment. [Figure 4] 1 is a side cross-sectional view schematically illustrating a processing furnace according to a first embodiment. [Figure 5] 2 is a block diagram showing an example of a functional configuration of a control device and a management device included in the substrate processing apparatus according to the first embodiment. FIG. [Figure 6] FIG. 3 is a diagram illustrating an example of a schematic of part data according to the first embodiment. [Figure 7] FIG. 2 is a diagram illustrating an example of a functional configuration of a control device according to the first embodiment. [Figure 8] FIG. 4 is an explanatory diagram for shortening the useful life of components according to the first embodiment. [Figure 9] FIG. 2 is a diagram schematically illustrating an example of a display screen of a display unit according to the first embodiment. [Figure 10]FIG. 4 is a diagram schematically showing a modified example of the display screen of the display unit according to the first embodiment. [Figure 11] FIG. 4 is a diagram schematically showing a modified example of the display screen of the display unit according to the first embodiment. [Figure 12] FIG. 4 is a diagram schematically showing a modified example of the display screen of the display unit according to the first embodiment. [Figure 13] 10 is a flowchart showing an example of the flow of a storage process according to the first embodiment. [Figure 14] 10 is a flowchart showing an example of the flow of a display process according to the first embodiment. [Figure 15] 10 is a flowchart showing an example of the flow of a storage process according to the second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. Note that each drawing is merely a schematic diagram, and the size of each part shown in the drawing and the size ratio between each part do not necessarily reflect the actual device. Furthermore, symbols that appear in common among the drawings indicate common configurations even if not mentioned in the description of each drawing. Furthermore, the present disclosure is not limited to the following embodiments, and can be implemented with appropriate modifications within the scope of the present disclosure.

[0010] [First embodiment] (Processing System) FIG. 1 is a diagram schematically illustrating an example of a processing system 90 according to the first embodiment.

[0011] 1, a processing system 90 of this embodiment includes a management device 70 and a plurality of substrate processing apparatuses 1. The management device 70 and the plurality of substrate processing apparatuses 1 each have a control device 100 as a control unit. The control device 100 controls each of the management device 70 and the substrate processing apparatus 1.

[0012] A plurality of substrate processing apparatuses 1, such as deposition apparatuses for CVD (Chemical Vapor Deposition) or the like and diffusion apparatuses, are connected to the management apparatus 70 via a communication line. The management apparatus 70 has a function of collecting apparatus data transmitted from the substrate processing apparatuses 1. It is sufficient that at least one substrate processing apparatus 1 is connected.

[0013] (Substrate processing equipment) Next, the configuration of a substrate processing apparatus 1 as a processing apparatus of this embodiment will be described with reference to Fig. 2 to Fig. 4. As shown in Figs. 2 and 3, the substrate processing apparatus 1 is provided with a control device 100. The control device 100 is electrically connected to each component in the substrate processing apparatus 1. Each component, at least an operable part, operates according to instructions from the control device 100.

[0014] The substrate processing apparatus 1 has a housing 2, and a front maintenance opening 4 is provided at the bottom of the front wall 3 of the housing 2 as an opening for maintenance, and the front maintenance opening 4 is opened and closed by a front maintenance door 5.

[0015] A pod loading / unloading opening 6 is opened in the front wall 3 of the housing 2 so as to connect the inside and outside of the housing 2, and the pod loading / unloading opening 6 is opened and closed by a front shutter (loading / unloading opening / closing mechanism) 7, and a load port (substrate transport container transfer table) 8 is installed in front of the pod loading / unloading opening 6, and the load port 8 is configured to align a pod 9 placed thereon.

[0016] The pod 9 is a sealed substrate transport container, and is designed to be carried onto the load port 8 and to be carried out from the load port 8 by an in-process transport device (not shown).

[0017] A rotating pod shelf (substrate transport container storage shelf) 11 is installed at the top of the housing 2, approximately in the center in the front-to-back direction, and the rotating pod shelf 11 is configured to store multiple pods 9.

[0018] The rotating pod shelf 11 comprises a vertically erected support pillar 12 that rotates intermittently, and multiple shelves (substrate transport container loading shelves) 13 supported radially on the support pillar 12 at upper, middle and lower positions, and the shelves 13 are configured to store multiple pods 9 stacked one on top of the other.

[0019] A pod opener (substrate transport container lid opening / closing mechanism) 14 is provided below the rotary pod shelf 11, and the pod opener 14 has a structure capable of placing a pod 9 thereon and opening and closing the lid of the pod 9.

[0020] A pod transport mechanism (container transport mechanism) 15 is installed between the load port 8 and the rotating pod shelf 11 and pod opener 14. The pod transport mechanism 15 is capable of holding a pod 9 and moving up and down, and moving back and forth horizontally, and is configured to transport the pod 9 between the load port 8, the rotating pod shelf 11, and the pod opener 14.

[0021] A sub-housing 16 is provided extending to the rear end at the bottom of the housing 2, approximately in the center in the front-to-rear direction. A pair of substrate loading / unloading openings 19 for loading / unloading substrates 18 into / out of the sub-housing 16 are opened in a front wall 17 of the sub-housing 16, arranged vertically in two tiers, one above the other, and a pod opener 14 is provided for each of the upper and lower substrate loading / unloading openings 19.

[0022] The pod opener 14 includes a mounting table 21 on which the pod 9 is mounted, and an opening / closing mechanism 22 that opens and closes the lid of the pod 9. The pod opener 14 is configured to open and close the substrate entrance / exit of the pod 9 by opening and closing the lid of the pod 9 mounted on the mounting table 21 using the opening / closing mechanism 22.

[0023] The sub-housing 16 forms a transfer chamber 23 that is airtight from the space (pod transfer space) in which the pod transfer mechanism 15 and the rotary pod shelf 11 are disposed. A substrate transfer mechanism 24 serving as a transfer robot is installed in the front region of the transfer chamber 23. The substrate transfer mechanism 24 is equipped with multiple shafts (not shown) as a drive unit and a required number of substrate placement plates 25 (five in the figure) on which substrates 18 are placed. The substrate placement plates 25 are movable in a horizontal direction, rotatable in a horizontal direction, and can be raised and lowered. The substrate transfer mechanism 24 is configured to load and unload substrates 18 onto a boat (substrate holder) 26.

[0024] A standby section 27 for storing and waiting the boat 26 is configured in the rear region of the transfer chamber 23, and a vertical processing furnace 28 is provided above the standby section 27. The processing furnace 28 has a processing chamber 29 formed therein, and the lower end of the processing chamber 29 is a furnace opening section that is opened and closed by a furnace opening shutter (furnace opening opening / closing mechanism) 31. The processing furnace 28 will be described in detail later with reference to FIG.

[0025] A boat elevator (substrate holder lifting mechanism) 32 for raising and lowering the boat 26 is installed between the right end of the housing 2 and the right end of the waiting section 27 of the sub-housing 16. A seal cap 34 serving as a lid is attached horizontally to an arm 33 connected to the lifting platform of the boat elevator 32. The seal cap 34 supports the boat 26 vertically and can airtightly close the furnace opening when the boat 26 is loaded into the processing chamber 29.

[0026] The boat 26 is configured to hold a plurality of substrates 18 (for example, about 50 to 125 substrates) in multiple stages in a horizontal position with their centers aligned.

[0027] A clean unit 35 is disposed opposite the boat elevator 32, and the clean unit 35 is composed of a supply fan and a dust filter to supply clean air 36, which is a purified atmosphere or an inert gas. Between the substrate transfer mechanism 24 and the clean unit 35, a notch alignment device (not shown) is installed as a substrate alignment device that aligns the circumferential position of the substrate 18.

[0028] The clean air 36 blown out from the clean unit 35 is circulated to a notch alignment device (not shown), the substrate transfer mechanism 24, and the boat 26, and then sucked in by a duct (not shown) and exhausted to the outside of the housing 2, or is blown out into the transfer chamber 23 by the clean unit 35.

[0029] (processing furnace) 4, the processing furnace 28 includes a reaction tube 50. The reaction tube 50 is made of a heat-resistant non-metallic material such as quartz (SiO2) or silicon carbide (SiC), and has a cylindrical shape with a closed upper end and an open lower end.

[0030] A processing chamber 29 capable of processing substrates 18 is formed inside the reaction tube 50, for example. In other words, the substrate processing apparatus 1 has the processing chamber 29. A boat 26 serving as a substrate holder is inserted into the processing chamber 29 from below, and the substrates 18 held in a horizontal position by the boat 26 are accommodated in a vertically aligned state in multiple stages. The boat 26 accommodated in the processing chamber 29 is configured to be rotatable with a plurality of substrates 18 loaded thereon while maintaining the processing chamber 29 airtight by rotating a rotation shaft 44 using a rotation mechanism 43.

[0031] A manifold 45 is disposed concentrically with the reaction tube 50 below the reaction tube 50. The manifold 45 is made of a metal material such as stainless steel and has a cylindrical shape with open upper and lower ends. The manifold 45 supports the reaction tube 50 vertically from the lower end side. In other words, the reaction tube 50 forming the processing chamber 29 is vertically supported by the manifold 45 to form the processing furnace 28. The lower end of the manifold 45 is configured to be airtightly sealed by a seal cap 34 serving as a sealing part when the boat elevator 32 is raised. A sealing member 46a such as an O-ring is provided between the lower end of the manifold 45 and the seal cap 34 to airtightly seal the processing chamber 29.

[0032] The manifold 45 is also connected to a gas inlet pipe 47 for introducing source gas, purge gas, etc. into the processing chamber 29, and an exhaust pipe 48 for exhausting gas from the processing chamber 29. The pressure in the processing chamber 29 is controlled by adjusting the APC valve 41 based on the detection results of a pressure sensor (not shown). The gas inlet pipe 47 is also provided with, from upstream to downstream, mass flow controllers (MFCs) and valves (on-off valves) as flow rate control components. The MFCs provided in the gas inlet pipe 47 of this embodiment include MFCs 51, 53, 55, and 57, and the valves include valves 52, 54, 56, and 58. The gas inlet pipe 47 of this embodiment is composed of two gas inlet pipes, each formed by two of four upstream pipes joining together. One gas inlet pipe is configured to join two of the four upstream pipes, and the other gas inlet pipe is configured to join the remaining two pipes. One gas introduction pipe is configured so that, for example, a pipe in which, from upstream, an MFC 51 and a valve 52 are provided and a pipe in which, from upstream, an MFC 53 and a valve 54 are provided, merge together. The other gas introduction pipe is configured so that, for example, a pipe in which, from upstream, an MFC 55 and a valve 56 are provided and a pipe in which, from upstream, an MFC 57 and a valve 58 are provided and merge together.

[0033] A heater unit 49 (heating mechanism) is disposed around the outer periphery of the reaction tube 50 concentrically with the reaction tube 50. The heater unit 49 is configured to heat the processing chamber 29 so that the processing chamber 29 has a uniform or predetermined temperature distribution throughout.

[0034] Next, the operation of the substrate processing apparatus 1 will be described.

[0035] (Operation of substrate processing apparatus) When the pod 9 is supplied to the load port 8, the pod loading / unloading opening 6 is opened by the front shutter 7. The pod 9 on the load port 8 is carried into the housing 2 through the pod loading / unloading opening 6 by the pod transport mechanism 15 and placed on a designated shelf 13 of the rotating pod shelf 11. After being temporarily stored on the rotating pod shelf 11, the pod 9 is transported by the pod transport mechanism 15 from the shelf 13 to one of the pod openers 14 and transferred to the placement table 21, or is transferred directly from the load port 8 to the placement table 21.

[0036] At this time, the substrate loading / unloading port 19 is closed by the opening / closing mechanism 22, and clean air 36 is circulated and filled in the transfer chamber 23. For example, by filling the transfer chamber 23 with nitrogen gas as the clean air 36, the oxygen concentration is set to 20 ppm or less, which is much lower than the oxygen concentration inside the housing 2 (air atmosphere).

[0037] The open end face of the pod 9 placed on the mounting table 21 is pressed against the edge of the opening of the substrate loading / unloading opening 19 in the front wall 17 of the sub-housing 16, and the lid is removed by the opening / closing mechanism 22, opening the substrate entrance / exit.

[0038] When the pod 9 is opened by the pod opener 14, the substrates 18 are removed from the pod 9 by the substrate transfer mechanism 24 and transferred to a notch alignment device (not shown). After the notch alignment device aligns the substrates 18, the substrate transfer mechanism 24 transports the substrates 18 into the waiting section 27 at the rear of the transfer chamber 23 and charges them into the boat 26.

[0039] After transferring the substrate 18 to the boat 26 , the substrate transfer mechanism 24 returns to the pod 9 and loads the next substrate 18 into the boat 26 .

[0040] While the substrate transfer mechanism 24 in one (upper or lower) pod opener 14 is loading substrates 18 into the boat 26, another pod 9 is transported from the rotating pod shelf 11 and transferred to the other (lower or upper) pod opener 14 by the pod transport mechanism 15, and the other pod opener 14 simultaneously begins opening the pod 9.

[0041] When a predetermined number of substrates 18 are loaded into the boat 26, the furnace opening of the processing furnace 28, which has been closed by the furnace opening shutter 31, is opened by the furnace opening shutter 31. Then, the boat 26 is raised by the boat elevator 32 and loaded into the processing chamber 29.

[0042] After loading, the furnace throat is airtightly closed by the seal cap 34. At this timing (after loading), the present embodiment includes a purging step (pre-purging step) in which the gas in the processing chamber 29 is replaced with an inert gas.

[0043] The processing chamber 29 is evacuated to a desired pressure (vacuum level) by the APC valve 41. The processing chamber 29 is also heated to a predetermined temperature by the heater unit 49 so as to achieve a desired temperature distribution.

[0044] Furthermore, a process gas is supplied by the gas supply mechanism at a controlled flow rate, and as the process gas flows through the process chamber 29, it comes into contact with the surface of the substrate 18, and a predetermined process is performed on the surface of the substrate 18. Furthermore, the process gas after reaction is exhausted from the process chamber 29 by the gas exhaust mechanism.

[0045] After a preset processing time has elapsed, the gas supply mechanism supplies an inert gas from an inert gas supply source (not shown), and the processing chamber 29 is purged with the inert gas, and the pressure in the processing chamber 29 is returned to normal pressure (after-purge process). Then, the boat elevator 32 lowers the boat 26 via the seal cap 34.

[0046] To remove the processed substrates 18, the above-described procedure is reversed, and the substrates 18 and pod 9 are discharged to the outside of the housing 2. Unprocessed substrates 18 are further loaded into the boat 26, and the batch processing of substrates 18 is repeated.

[0047] (Control device configuration) Next, a control device 100 that controls the processing furnace 28 as a processing section, the transfer mechanism as a transfer section, the gas supply mechanism as a gas supply system provided in the atmosphere control section, the gas exhaust mechanism as a gas exhaust system provided in the atmosphere control section, and the heating mechanism as a processing section will be described with reference to FIGS. 5 to 7 . Here, the transfer mechanism includes at least a pod transfer mechanism 15 as a mechanism for transferring substrates, a substrate transfer mechanism 24, a boat elevator 32, a rotation mechanism 43, and a rotation shaft 44 as a transfer control component. The gas supply mechanism includes a gas inlet pipe 47 as a flow rate control component for supplying processing gases and the like to the processing furnace 28. The gas exhaust mechanism includes an exhaust pipe 48, an APC valve 41, a vacuum pump (not shown), and the like as flow rate control components for exhausting the inside of the processing furnace 28. The heating mechanism includes a heater unit 49 as a processing component for heating the processing furnace 28.

[0048] 5 is a block diagram showing an example of the functional configuration of the control device 100 provided in the substrate processing apparatus 1 and the management apparatus 70 according to the first embodiment. Since the control device 100 of the substrate processing apparatus 1 and the control device 100 of the management apparatus 70 according to this embodiment have the same configuration, the control device 100 of the substrate processing apparatus 1 will be described as a representative.

[0049] As shown in FIG. 5, the substrate processing apparatus 1 includes a control device 100 as a main controller, an external communication unit 201, an external memory unit 210, an operation unit 212, a display unit 204, a process control unit 205, a transport control unit 206, and a sensor unit 207 as a detection unit.

[0050] The control device 100 includes a device control unit 101, a storage unit 104, and an I / O (also called an I / O port) 105.

[0051] The device control unit 101 includes a CPU (Central Processing Unit) 102 and a RAM (Random Access Memory) 103.

[0052] The CPU 102 is a central processing unit that executes various programs and controls each part. The RAM 103 temporarily stores programs or data as a working area. The storage unit 104 stores various programs and data. That is, the CPU 102 of the control device 100 according to this embodiment functions as the device control unit 101 by writing the programs stored in the storage unit 104 to the RAM 103 and executing them.

[0053] The storage unit 104 may be, for example, a hard disk drive (HDD), a solid state drive (SSD), or a flash memory. The storage unit 104 stores recipe files, such as recipes defining processing conditions and processing procedures, control program files for executing these recipe files, parameter data (setting value files) for setting processing conditions and processing procedures, error processing program files and parameter data for error processing, various screen files including input screens for inputting process parameters, various icon files, and the like (none of which are shown). In this embodiment, the storage unit 104 stores a component management program 104A, component data 104B, sensor standard data 104C, and sensor actual measurement data 104D for managing components of the substrate processing apparatus 1.

[0054] The component management program 104A is a program for executing processes including storage processing and display processing, which will be described later. The program may be pre-installed in the substrate processing apparatus 1, for example. The program may be realized by recording it on a non-volatile recording medium or distributing it via a network and installing it appropriately in the substrate processing apparatus 1. Examples of non-volatile recording media include CD-ROMs, magneto-optical disks, HDDs, DVD-ROMs, flash memories, memory cards, and USBs.

[0055] FIG. 6 is a diagram showing an example of the outline of the part data 104B according to the first embodiment.

[0056] 6, the part data 104B is data that aggregates information about the component parts. The part data 104B is configured to include items such as item number, part name, type, detection method, location, relationship, standard useful life, and predicted useful life. The part data 104B also includes a warning level, which is a predetermined level indicating the quality state of the component part determined by the data determination unit 100B described below, and the timing of the determination (hereinafter also referred to as warning timing) (not shown).

[0057] The item number column indicates the order in which the component management program (described later) reads the items, and in principle, the items are displayed in this order in a list on the display unit 204 (described later). The component name column indicates the name of the component that is subject to maintenance management. The type column indicates the type of component. The detection method column indicates which sensor in the sensor unit 207 (described later) detected the abnormality. The location column indicates the location of each component. The association column indicates the type of gas used, the mechanism used, etc. The standard service life column indicates the standard service life of each component, such as a service life set appropriately based on the component manufacturer's recommended value or the component's specification value. The predicted service life column indicates the service life of each component as an expected period of use calculated by the data calculation unit 100C (see FIG. 7) (described later). Note that FIG. 6 is merely one example, and items can be added or deleted as desired.

[0058] The sensor standard data 104C in FIG. 5 stores standard data (hereinafter also referred to as standard data) of each component as comparison information. The standard data is data to be compared with detection data acquired by the sensor unit 207 when each component is operating. The standard data and detection data include sound data, image data, temperature data, odor data, and pressure data. The standard data and detection data are represented by time-series data such as waveforms, physical quantities such as averages and extreme values, and image information such as pixel data and color depth. The standard data is, for example, detection data stored when each component is operated according to a component manufacturer's recommended value or component specification value during a standard service life. The standard data may be an average value of the detection data of each component while the substrate processing apparatus 1 is operating normally. The sensor actual measurement data 104D stores detection data (hereinafter also referred to as actual measurement data) of each component as status information actually detected by the sensor unit 207 (described later).

[0059] The control device 100 is connected to an operation unit 212, and is also connected to a process control unit 205, a transport control unit 206, and a sensor unit 207 via an I / O 105. The control device 100 is electrically connected to each of the process control unit 205, the transport control unit 206, and the sensor unit 207 via the I / O 105, and is therefore configured to be able to send and receive each piece of data, download and upload each file, and so on.

[0060] The control device 100 is connected to a management device 70, an external host computer (not shown), and the like via an external communication unit 201. The control device 100 is connected to a network, such as the Internet, a local area network (LAN), or a wide area network (WAN), using the external communication unit 201, and is capable of communicating with external devices via the network. Therefore, even if the substrate processing apparatus 1 is installed in a clean room, the management device 70, the host computer, and the like can be located in an office or the like outside the clean room. In addition, an external storage unit 210 is connected to the control device 100 as an attachment unit into which a USB (Universal Serial Bus) memory, an example of a recording medium, can be inserted and removed.

[0061] The operation unit 212 is a so-called touch panel that is either integrated with the display unit 204 or connected to the display unit 204 via a video cable or the like. The operation unit 212 displays information generated in the substrate processing apparatus 1 on the display unit 204 via an operation screen. The operation unit 212 also outputs the information displayed on the display unit 204 to a device such as a USB memory inserted into the external storage unit 210, for example. The operation unit 212 accepts input data (input instructions) from the operation screen displayed on the display unit 204 and transmits the input data to the control device 100.

[0062] The display unit 204 is configured to display information about the components of the substrate processing apparatus 1. The display unit 204 is also configured to display various operation screens for operating the substrate processing apparatus 1. The operation screens have screens for checking the status of the substrate process system controlled by the process control unit 205 and the substrate transport system controlled by the transport control unit 206. The display unit 204 can also be provided with various operation buttons as an input unit for inputting operation instructions to the substrate process system and the substrate transport system. Here, the operation unit 212 and the display unit 204 are provided separately from the control device 100, but they may also be configured to be included integrally in the control device 100.

[0063] Although not shown here, the process control unit 205 includes a temperature control unit, a gas flow rate control unit as an atmosphere control unit, a pressure control unit, and a sequencer. Each of these temperature control unit, gas flow rate control unit, pressure control unit, and sequencer constitutes a sub-controller, and is electrically connected to the process control unit 205, enabling transmission and reception of each data, downloading and uploading of each file, etc. The process control unit 205 and each sub-controller (i.e., the temperature control unit, gas flow rate control unit, pressure control unit, and sequencer) may be configured separately or integrally.

[0064] The temperature control unit is connected to a heating mechanism mainly composed of a temperature sensor, a heater unit 49, etc. At this time, the state of power supply to the heater unit 49 is feedback-controlled based on temperature information detected by the temperature sensor serving as a temperature detector so that the temperature inside the processing chamber 29 becomes a predetermined temperature (film formation temperature).

[0065] The pressure control unit is connected to a gas exhaust mechanism mainly composed of a pressure sensor, an APC valve 41 as a pressure valve, and a vacuum pump. The pressure controller is configured to control the aperture of the APC valve 41 and the switching (on / off) of the vacuum pump based on the pressure value detected by the pressure sensor so that the pressure inside the processing chamber 29 becomes the desired pressure at the desired timing.

[0066] The gas flow control unit is composed of MFCs (MFCs 51, 53, 55, 57, etc.) as flow control components. The sequencer is configured to control the supply and stop of gas from the gas inlet pipe 47 by opening and closing valves (valves 52, 54, 56, 58, etc.). Furthermore, the process control unit 205 is configured to control the MFCs and sequencers so that the flow rate of the gas supplied into the processing chamber 29 is a desired flow rate at a desired timing.

[0067] The transfer control unit 206 includes a mechanism control unit (not shown). This mechanism control unit is configured to control each of the drive system, rotation system, and lifting system of the substrate processing apparatus 1. The transfer control unit 206 is configured to control the transfer operations of the transfer mechanisms including, for example, the pod transfer mechanism 15, the substrate transfer mechanism 24, the boat elevator 32, the rotation mechanism 43, the rotation shaft 44, etc.

[0068] Although not shown here, the sensor unit 207 includes various sensors that detect the state of each component used in the substrate processing apparatus 1. The sensor unit 207 includes, for example, a sound sensor (e.g., a microphone) that detects the operating sound of each component while the substrate processing apparatus 1 is operating, an image sensor (e.g., a camera) that detects the color, expansion, etc. of each component, a temperature sensor that detects the temperature of each component, an odor sensor that detects the odor of each component, a pressure sensor that detects the pressure applied to each component, etc.

[0069] The functions of the device control unit 71, CPU 72, RAM 73, storage unit 74, and I / O 75 of the management device 70 are similar to the functions of the device control unit 101, CPU 102, RAM 103, storage unit 104, and I / O 105 of the control device 100 described above. Also, the functions of the external communication unit 81, external storage unit 80, operation unit 82, and display unit 84 electrically connected to the management device 70 are similar to the functions of the external communication unit 201, external storage unit 210, operation unit 212, and display unit 204 described above.

[0070] (Controller function) 7 is a diagram schematically illustrating an example of the functional configuration of the control device 100 according to the first embodiment. The control device 100 of this embodiment functions as a data acquisition unit 100A, a data determination unit 100B, a data calculation unit 100C, a data update unit 100D, a data display unit 100E, and a data transmission unit 100F when the CPU 102 executes a component management program 104A.

[0071] The data acquisition unit 100A has a function of acquiring data related to the components. For example, the data acquisition unit 100A acquires detection data of each component detected by the sensor unit 207, and stores the data in the sensor measurement data 104D (see FIG. 5) in the storage unit 104. The data acquisition unit 100A also acquires a warning level and a warning timing as a judgment timing determined by the data judgment unit 100B, which will be described later.

[0072] The data determination unit 100B has a function of determining the quality state of the component. Specifically, the data determination unit 100B determines the warning level indicating the quality state of the component by comparing actual measurement data with standard data. The data determination unit 100B determines the sound level (i.e., warning level) of the sound detected from the component by, for example, comparing the sound data acquired by the data acquisition unit 100A and stored in sensor actual measurement data 104D (see FIG. 5) with the sound data stored in sensor standard data 104C (see FIG. 5) in the storage unit 104. More specifically, the data determination unit 100B compares the waveform of the sound detected from the component with the standard data and determines the sound level based on the shift in peak time axis, the shift in peak magnitude, etc. Note that determination based on sound data is merely one example, and the data determination unit 100B may determine the quality state of the component using other types of detection data. The data determining unit 100B determines the quality state of the component from the types of detection data detected by the sensor unit 207, such as odor, discoloration, change in shape, and surface temperature of the component.

[0073] The data determination unit 100B may also determine a warning level indicating the quality state of a component based on the number of times it has been determined that the component may be worn out.The data determination unit 100B may then determine a warning level indicating the quality state of the component by comparing the actual measurement data.

[0074] The data calculation unit 100C has a function of calculating the predicted useful life of each component part from the quality state of each component part. For example, the data calculation unit 100C calculates the predicted useful life of each component part by shortening the standard useful life by an amount corresponding to the sound level determined by the data determination unit 100B.

[0075] FIG. 8 is an explanatory diagram of a case where the useful life of a component part according to the first embodiment is shortened. As shown in FIG. 8, in this embodiment, sound levels (i.e., warning levels) are set from 0 to 3. As the sound level progresses from 0 to 3, it indicates a greater difference between the sound waveform of the actual measurement data and the sound waveform of the standard data. Furthermore, as the sound level progresses from 0 to 3, it indicates a higher possibility that the component part is worn out, and indicates a higher degree of recommendation for replacement of the component part. As the sound level progresses from 0 to 3, the period for shortening the predicted useful life of the component part is set to a longer period. Here, the data acquisition unit 100A acquires, for example, the timing at which the sound level is determined to be between 1 and 3.

[0076] For example, if the sound level is determined to be 0, the difference in the peak of the sound waveform of the actual data compared to the standard data is very small (e.g., between 0% and 10%), and the expected useful life of the component will not be shortened. If the sound level is determined to be 1, the difference in the peak of the sound waveform of the actual data compared to the standard data is small but noticeable (e.g., between 10% and 30%), and the expected useful life of the component will be shortened by two weeks from the standard useful life. If the sound level is determined to be 2, the difference in the peak of the sound waveform of the actual data compared to the standard data is high (e.g., between 30% and 50%), and the expected useful life of the component will be shortened by four weeks from the standard useful life. If the sound level is determined to be 3, the difference in the peak of the sound waveform of the actual data compared to the standard data is very high (e.g., greater than 50%), and the expected useful life of the component will be shortened by ten weeks from the standard useful life. In other words, when the warning level as a difference level in the actual measurement data of a component is determined to be equal to or greater than a predetermined value of 1, the predicted useful life of the component is calculated by shortening the standard useful life by the period corresponding to the warning level.

[0077] Each time a warning level is determined, the predicted useful life of the component may be shortened by the period corresponding to the warning level. Alternatively, the predicted useful life of the component may be set to a predicted useful life set according to the warning level. For example, if the warning level indicating the quality of a component is determined to be 1, the predicted useful life of the component is set to 40 weeks. If the warning level indicating the quality of a component is determined to be 2, the predicted useful life of the component is set to 30 weeks. If the warning level indicating the quality of a component is determined to be 3, the predicted useful life of the component is set to 20 weeks.

[0078] The data updating unit 100D in FIG. 7 has a function of updating the component data of each component. Specifically, the data updating unit 100D updates the predicted useful life, determined warning level, and warning timing of the component. For example, the data updating unit 100D updates the value in the predicted useful life column of the component data 104B in the storage unit 104 (see FIG. 6) to the predicted useful life calculated by the data calculation unit 100C. The data updating unit 100D also stores the warning level and warning timing acquired by the data acquisition unit 100A in the component data 104B.

[0079] The data display unit 100E has a function of displaying the service life, warning level, and warning timing of each component. For example, the data display unit 100E links the warning level determined by the data determination unit 100B and the warning timing acquired by the data acquisition unit 100A to the predicted service life calculated by the data calculation unit 100C and displays them on the display unit 204. The data display unit 100E may also simultaneously display the predicted service life before and after updating by the data update unit 100D.

[0080] The data display unit 100E also has a function of changing the color of the image displayed, for example, changing the color of the image indicating the warning timing according to the warning level determined by the data determination unit 100B.

[0081] The data transmission unit 100F has a function of transmitting part data of each component part to the management device 70, an external host computer, etc. via the external communication unit 201. The data transmission unit 100F transmits the part data of each component part to the management device 70, an external host computer, etc. on a display screen (FIGS. 9 to 12) to be described later. The management device 70 may transmit data for displaying a display screen (see below) on the display unit 84 based on the data received via the external communication unit 81, for example.

[0082] (display screen) Next, the display screen of the display unit 204 according to this embodiment will be described with reference to FIG.

[0083] FIG. 9 is a diagram schematically illustrating an example of a display screen of the display unit 204 according to the first embodiment. As shown in FIG. 9, the display unit 204 displays a service life image 600 as a bar image and time information indicating the service life of each component, a warning image 602 as quality information indicating the warning level and warning timing, a scale image 604 showing a time scale as a time axis, and a date / time marker 606 indicating the current date and time. The service life image 600 according to this embodiment includes a service life image 600A indicating the predicted service life after updating by the data updating unit 100D and a service life image 600B indicating the predicted service life before updating by the data updating unit 100D. Furthermore, the warning image 602 according to this embodiment includes a warning image 602Y corresponding to a warning level of 1, a warning image 602O corresponding to a warning level of 2, and a warning image 602R corresponding to a warning level of 3. The quality information indicates the quality level of the component. The time information indicates the expected service life of the component.

[0084] Here, the service life image 600 is displayed superimposed on the scale image 604. For example, the service life image 600A is displayed as a blue rectangle with rounded corners, and is displayed superimposed on the service life image 600B. Furthermore, the service life image 600B is displayed transparently as a dashed rectangle with rounded corners. The service life image 600 corresponding to each component is displayed in the row corresponding to that component. The service life is indicated by the horizontal length of the service life image 600. Here, the "left direction" and "right direction" in the explanation of the display screen correspond to the left direction and right direction of the display unit 204.

[0085] The warning image 602 is superimposed on the service life image 600 and displayed at a position indicating each warning timing. For example, the warning image 602Y is displayed as a yellow rectangle at a position indicating the timing when the warning level is determined to be 1. The warning image 602O is displayed as an orange rectangle at a position indicating the timing when the warning level is determined to be 2. The warning image 602R is displayed as a red rectangle at a position indicating the timing when the warning level is determined to be 3.

[0086] The scale image 604 is an image showing a time scale for displaying the useful life of a component. For example, the scale image 604M is an image showing a time scale displayed in months, with a number indicating the month displayed in each square at the top. The name of each component is displayed on one line at the left end. The scale image 604 may also be an image showing a time scale in units such as minutes, hours, days, weeks, months, quarters, half years, or years.

[0087] The date and time marker 606 is displayed at a position corresponding to the current date and time, superimposed on the service life image 600 and the warning image 602. For example, the date and time marker 606 is displayed as a black vertical solid line spanning multiple lines.

[0088] In this embodiment, as an example, as shown in FIG. 9, the predicted useful life, warning level, warning timing, etc. of parts A and B are displayed. In FIG. 9, a scale image 604M is displayed, and a date and time marker 606 is displayed at a position indicating around the end of June. Note that displaying information about parts A and B is merely one example, and the displayed components can be added or deleted as desired. Furthermore, the components may be displayed by categorized group. For example, the components may be displayed categorized by items included in the component data 104B (e.g., type, detection method, location, association, etc.). The display of the rows corresponding to parts A and B will be described below.

[0089] In the row corresponding to part A, service life image 600A is displayed from a position indicating around early January to a position indicating around late July. Service life image 600B is displayed from a position indicating around early January to a position indicating around early September, but is displayed superimposed on service life image 600A. As a result, service life image 600B is displayed from a position indicating around late July to a position indicating around early September without being obscured by service life image 600A. Warning image 602Y is displayed at positions indicating around late February, mid-March, and early April. Warning image 602O is displayed at positions indicating around late April and mid-May. Warning image 602R is displayed at a position indicating around early June.

[0090] In the row corresponding to part B, the useful life image 600A is displayed from a position indicating around mid-December to a position indicating around early September, and the warning image 602 is not displayed.

[0091] In this way, by displaying warning images 602Y, 602O, and 602R superimposed on the useful life image 600A of the row corresponding to part A, the timing at which it was determined that part A may be worn out and the warning level at that timing are displayed. Furthermore, by displaying useful life image 600B of the row corresponding to part A, it is displayed that the predicted useful life of part A has been shortened by six weeks. That is, since there are times when part A was determined to have a warning level of 2 and times when it was determined to have a warning level of 3, it is displayed that the predicted useful life of part A, which was shortened by four weeks from the standard useful life, has now been shortened by another six weeks (i.e., 10 weeks from the standard useful life). On the other hand, the warning image 602 is not displayed in the useful life image 600A of the row corresponding to part B. Furthermore, the useful life image 600B of the row corresponding to part B is not displayed. That is, there are no times when part B was determined to have a warning level of 1 or higher, and it is displayed that the predicted useful life of part B has not been shortened.

[0092] The information indicated by the useful life image 600 and the information indicated by the warning image 602 may be displayed in text. For example, the information indicated by the useful life image 600 may be displayed as "January 1 to December 1," and the information indicated by the warning image 602 may be displayed as "Warning Level 1: February 1, Warning Level 2: October 1, October 5, Warning Level 3: October 10." If a component is being used beyond its predicted useful life, a message such as "The predicted useful life has expired. It is strongly recommended that you replace the component" may be displayed. Furthermore, the number of times each component has been determined to be possibly worn out may be displayed using a radar chart. For example, the radar chart may display the number of alarms issued up to the present time for parts A to F.

[0093] Next, modifications of the display screen of the display unit 204 according to this embodiment will be described with reference to Figures 10 to 12, with differences from Figure 9. Other than that, the display screen is configured in the same way as the display screen shown in Figure 9, and elements that are substantially the same as the elements described in Figure 9 are assigned the same reference numerals, and descriptions thereof will be omitted.

[0094] (Display screen variation 1) 10 is a diagram schematically illustrating a modified example (modification 1) of the display screen of the display unit 204 according to the first embodiment. As shown in FIG. 10, the display unit 204 displays a service life image 600, a scale image 604, a date and time marker 606, and a prediction marker 608 as a life flag indicating the end of the predicted service life of each component. A service life image 600B according to this modification includes a service life image 600BY corresponding to the case where the last detected warning level is 1, and a service life image 600BO corresponding to the case where the last detected warning level is 2. For example, the service life image 600BY is displayed in yellow, and the service life image 600BO is displayed in orange.

[0095] Here, the prediction marker 608 is displayed at a position indicating the end of the predicted useful life of each component, superimposed on the useful life image 600. The prediction marker 608 is displayed, for example, as a star-shaped image.

[0096] In this embodiment, as an example, the predicted useful life and warning level of parts A and B are displayed as shown in Fig. 10. The display of the rows corresponding to parts A and B will be described below.

[0097] In the row corresponding to part A, the orange useful life image 600BO is displayed from a position indicating around early January to a position indicating around early October, and the prediction marker 608 is displayed at a position indicating around early September.

[0098] In the row corresponding to part B, yellow useful life image 600BY is displayed from a position indicating around mid-December to a position indicating around early September, and prediction marker 608 is displayed at a position indicating around late August.

[0099] In this way, by displaying an orange life span image 600BO in the row corresponding to part A, it is displayed that the latest warning level determined for part A is 2. Furthermore, by displaying a prediction marker 608 superimposed on the life span image 600BO in the row corresponding to part A, it is displayed that the predicted life span of part A has been shortened by four weeks from the standard life span. In other words, since there was a time when part A was determined to have a warning level of 2, it is displayed that the predicted life span of part A has been shortened by four weeks. Meanwhile, by displaying a yellow life span image 600BY in the row corresponding to part B, it is displayed that the latest warning level determined for part B is 1. Furthermore, by displaying a prediction marker 608 superimposed on the life span image 600BY in the row corresponding to part B, it is displayed that the predicted life span of part A has been shortened by two weeks. In other words, since there was a time when part B was determined to have a warning level of 1, it is displayed that the predicted life span of part B has been shortened by two weeks from the standard life span. The life span image 600 may include a life span image 600 indicating that the latest determined warning level is 3. In addition to changing the color of the life span image 600, the control device 100 of this embodiment may also blink the life span image 600 or display a message (for example, a message urging part replacement, part inventory, replacement part code, etc.).

[0100] (Display screen variation 2) 11 is a diagram schematically illustrating a modified example (modification 2) of the display screen of the display unit 204 according to the first embodiment. As shown in Fig. 11, a service life image 600, a scale image 604, and a date and time marker 606 are displayed on the display unit 204. The service life image 600A according to this modification is displayed in a color that changes from a light skin color corresponding to the warning level 1 to a red color corresponding to the warning level 2 from a position corresponding to each warning timing.

[0101] In this embodiment, as an example, the predicted useful life, warning timing, warning level, etc. of parts A and B are displayed as shown in Fig. 11. The display of the row corresponding to part A will be described below. Note that the row corresponding to part B is the same as in Fig. 9, so its description will be omitted.

[0102] In the row corresponding to part A, the useful life image 600A is displayed in blue from the position indicating around early January to the position indicating around mid-February. The useful life image A is also displayed in a light skin color from the position indicating around mid-February to the position indicating around mid-April. The useful life image 600A is also displayed in red from the position indicating around mid-April to the position indicating around late July.

[0103] In this way, by displaying the service life image 600A in the row corresponding to part A while changing color along the way, it is indicated that there was a time when the warning level for part A was determined to be a first level of 1 or a second level of 2. Furthermore, around mid-February, when the service life image 600A changed to a light skin color, it is indicated that there was a time when the warning level was determined to be 1. And around mid-April, when the service life image 600A changed to red, it is indicated that there was a time when the warning level was determined to be 2. If there is no warning timing for a predetermined period after the service life image 600A changed to a light skin color, the color of the service life image 600 may be returned to blue. By returning the color of the service life image 600 to blue, it is possible to notify the user that it was determined that an abnormal sound was detected by chance. Furthermore, the service life image 600 may be displayed in a color corresponding to the warning level being 3, starting from a position corresponding to the time when the warning level was determined to be 3.

[0104] (Display screen variation 3) 12 is a diagram schematically illustrating a modified example (modification example 3) of the display screen of the display unit 204 according to the first embodiment. As shown in FIG. 12, a service life image 600, a warning image 602, a scale image 604, and a date and time marker 606 are displayed on the display unit 204.

[0105] The warning image 602 according to the modified example is displayed with its width changing according to the warning level and the frequency of the warning timing. The scale image 604 is a scale image 604W showing a weekly time scale, with the date indicating the start of the week displayed in each square at the top. The date and time marker 606 is displayed at a position indicating the current date. In addition to changing the width, the color intensity of the warning image 602 may also be changed.

[0106] In this embodiment, as an example, the predicted useful life, warning timing, warning level, etc. of parts A and B are displayed as shown in Fig. 12. The display of the row corresponding to part A will be described below. Note that the row corresponding to part B is the same as in Fig. 9, so its description will be omitted.

[0107] In the row corresponding to part A, useful life image 600A is displayed from the left edge, which indicates the start of the week of March 1st, to the right edge, which indicates the end of the week of April 26th. Also, warning image 602Y is displayed from the position indicating March 11th to the position indicating March 14th and at the position indicating March 12th. Warning image 602O is displayed from the position indicating March 27th to the position indicating March 31st. Warning image 602R is displayed from the position indicating April 6th to the position indicating April 7th.

[0108] In this way, by superimposing warning image 602 on useful life image 600A in the row corresponding to part A and displaying warning images 602Y, 602O, and 602R, the timing at which it is determined that part A may be worn out and the warning level at that timing are displayed. Also, by changing the width of warning image 602Y and displaying it, it is displayed that the timing at which it is determined that the warning level is 1 occurs frequently during the period indicated by that width. Then, by changing the width of warning image 602O and displaying it, it is displayed that the timing at which it is determined that the warning level is 2 occurs frequently during the period indicated by that width. Furthermore, by changing the width of warning image 602R and displaying it, it is displayed that the timing at which it is determined that the warning level is 3 occurs frequently during the period indicated by that width.

[0109] The results of a detailed analysis of the abnormal condition may also be displayed on the display unit 204. For example, when sound is detected as an abnormal condition, the result may be displayed as a scatter plot with the volume on the vertical axis and the frequency on the horizontal axis. In this case, a marker corresponding to the warning level may be plotted on the scatter plot at the time when the abnormality is detected. By plotting a marker for each time when an abnormality is detected, the distribution and density of the volume and frequency can be displayed, making it possible to determine which component is abnormal or the abnormal level of the component. For example, if the frequency of the abnormal sound differs between the elevator shaft and the rotation shaft, the frequency of the abnormal sound can be used as a reference to determine the abnormal condition of each component. For example, if a new marker appears at a frequency away from a group of markers distributed in a specific frequency band, it can be determined that the abnormal condition is in a component other than the component that is the target of monitoring that specific frequency band.

[0110] (flowchart) Fig. 13 is a flowchart showing an example of the flow of the storage process according to the first embodiment. This storage process is performed by the CPU 102 of the control device 100 reading a program from the storage unit 104 and executing it in the RAM 103 (see Fig. 5). As an example, the storage process shown in Fig. 13 is repeatedly performed while the substrate processing apparatus 1 is in operation.

[0111] 13, the CPU 102 acquires the detected actual measurement data. Specifically, the CPU 102 acquires the actual measurement data from the sensor actual measurement data 104D (see FIG. 5).

[0112] In step S101, the CPU 102 compares the acquired actual measurement data with the standard data. Specifically, the CPU 102 compares the actual measurement data acquired in step S100 with the standard data of the sensor standard data 104C (see FIG. 5) corresponding to the actual measurement data.

[0113] In step S102, CPU 102 determines whether the difference between the measured data and the standard data exceeds a predetermined range. CPU 102 determines, for example, whether the ratio of the difference in the peak of the sound waveform of the measured data to the standard data is 10% or more. If CPU 102 determines that the difference exceeds the predetermined range (step S102: YES), it proceeds to step S103. If CPU 102 determines that the difference does not exceed the predetermined range (step S102: NO), it returns to step S100.

[0114] In step S103, the CPU 102 acquires the warning timing, which is the timing at which the predetermined range is exceeded. Specifically, the CPU 102 acquires the timing at which it is determined in step S102 that the difference has exceeded the predetermined range.

[0115] In step S104, the CPU 102 determines the warning level of the component based on the difference between the measured data and the standard data. For example, the CPU 102 determines the warning level based on the ratio of the difference between the peaks of the sound waveforms of the measured data and the standard data.

[0116] In step S105, CPU 102 stores the warning timing and the warning level of the component. Specifically, CPU 102 stores the warning timing acquired in step S103 and the warning level of the component determined in step S104 in component data 104B (see FIG. 5). Then, CPU 102 ends the storage process.

[0117] Fig. 14 is a flowchart showing an example of the flow of display processing according to the first embodiment. This display processing is executed by the CPU 102 of the control device 100 reading a program from the storage unit 104 and executing it in the RAM 103. As an example, the display processing shown in Fig. 14 is executed when the user operates the operation unit 212.

[0118] 14, CPU 102 acquires the standard life span, predicted life span, warning level, and warning timing of the component part. Specifically, CPU 102 acquires the standard life span, predicted life span, warning level, and warning timing from component data 104B.

[0119] In step S201, the CPU 102 calculates the predicted useful life of the component part from the acquired standard useful life and warning level.

[0120] In step S202, CPU 102 updates the predicted useful life of the component part. Specifically, CPU 102 updates the predicted useful life stored in component data 104B to the predicted useful life calculated in step S201.

[0121] In step S203, CPU 102 displays life span image 600 indicating the predicted life span of the component part before the update. CPU 102 displays, for example, life span image 600B indicating the predicted life span acquired in step S200 on display unit 204.

[0122] In step S204, CPU 102 displays life span image 600 indicating the updated predicted life span of the component part. CPU 102 displays, for example, life span image 600A indicating the predicted life span calculated in step S201 on display unit 204.

[0123] In step S205, CPU 102 displays warning image 602 indicating the warning timing in a color corresponding to the warning level, superimposed on life span image 600. CPU 102 displays warning images 602Y, 602O, 602R corresponding to the warning level on display unit 204, for example, at the position indicating the warning timing acquired in step S200. Then, CPU 102 ends the display process. Note that the images may be displayed together on display unit 204.

[0124] (Summary of the first embodiment) According to this aspect, one or more of the following effects can be obtained.

[0125] The substrate processing apparatus 1 according to the first embodiment displays a service life image 600 indicating the predicted service life of at least operable components among processing components used in a processing furnace, flow rate control components used in a gas supply mechanism or a gas exhaust mechanism, and transport control components used in a transport mechanism, and a warning image 602 indicating that the quality condition of the component has been determined to be at a predetermined warning level, linked to the predicted service life for each warning timing at which the warning level is determined. Therefore, the substrate processing apparatus 1 according to this embodiment can notify the user of the component status and the replacement timing of the component. Furthermore, the substrate processing apparatus 1 according to this embodiment can continuously notify the user of the deterioration status of the component over time by displaying multiple times when the component exceeds a predetermined level linked to the predicted service life. Furthermore, the timing of an abnormality can be inferred by reviewing component replacement. Furthermore, when multiple warning images are displayed within a certain period of time, the user's awareness of component replacement can be enhanced.

[0126] In the substrate processing apparatus 1 according to the first embodiment, the warning level indicates the degree to which component replacement is recommended. Therefore, according to the substrate processing apparatus 1 of this embodiment, by displaying component quality information in association with the timing of determination, it is possible to further raise user awareness regarding component replacement.

[0127] In the substrate processing apparatus 1 according to the first embodiment, the transport mechanism has a substrate transfer mechanism 24 capable of transporting the substrate 18 and a plurality of shafts, and the transport control components include the plurality of shafts. Therefore, according to the substrate processing apparatus 1 of this embodiment, an abnormality can be detected by abnormal noise from the shafts.

[0128] In the substrate processing apparatus 1 according to the first embodiment, the flow rate control components include at least one of valves (valves 52, 54, 56, 58, APC valve 41, etc.) provided in the gas supply mechanism or gas exhaust mechanism, MFCs (MFCs 51, 53, 55, 57, etc.), and vacuum pumps. Therefore, according to the substrate processing apparatus 1 of this embodiment, the state of the valves, which are switched at high speed, can be constantly detected.

[0129] In the substrate processing apparatus 1 according to the first embodiment, the processing furnace 28 has a processing chamber 29 in which the substrates 18 are stored and a seal cap 34 adjacent to the processing chamber 29, and the processing parts include the seal cap 34. Therefore, according to the substrate processing apparatus 1 of this embodiment, the quality state of the component parts can be determined by the sound emitted from the seal cap 34.

[0130] In the substrate processing apparatus 1 according to the first embodiment, the quality state of a component is determined from at least one of actual measurement data of sound data, image data, temperature data, and odor data detected from the component. Therefore, according to the substrate processing apparatus 1 of this embodiment, the quality state is determined based on at least one of the detectable operating sound, image, video, heat, and odor of the component, so that the quality state can be determined with high accuracy.

[0131] The substrate processing apparatus 1 according to the first embodiment is provided with standard data to be compared with actual measurement data, and compares the actual measurement data with the standard data, and when the warning level is 1 or higher (for example, the rate of difference between the peaks of the sound waveform is 10% or higher), displays a warning image 602. Therefore, according to the substrate processing apparatus 1 of this embodiment, the detected actual measurement data can be compared with the standard data, thereby making it possible to stably determine the warning level.

[0132] In the substrate processing apparatus 1 according to the first embodiment, the warning image 602 is displayed in different colors depending on the warning level. For example, status information with an extremely high warning level (i.e., status information indicating an extremely high degree of recommendation for part replacement) is displayed in red. Status information with a high warning level (i.e., status information indicating a high degree of recommendation for part replacement) is displayed in orange. Status information with a low warning level (i.e., status information indicating a low degree of recommendation for part replacement) is displayed in yellow. Therefore, according to the substrate processing apparatus 1 of this embodiment, the degree of recommendation for part replacement can be presented to the user by an image indicating the warning level.

[0133] In the substrate processing apparatus 1 according to the first embodiment, the warning image 602 has a configuration in which multiple warning levels are displayed according to the quality states of the components, and the display of the service life image 600 is changed according to the multiple warning levels. Therefore, according to the substrate processing apparatus 1 of this embodiment, the degree of recommendation for part replacement can be presented to the user by an image indicating the predicted service life of the component.

[0134] In the substrate processing apparatus 1 according to the first embodiment, the service life image 600 is displayed superimposed on the scale image 604, and when it is determined that the warning level indicating the quality state of a component is 1, the service life image 600 from the determined time onwards is displayed in a light skin tone. Also, when it is determined that the warning level indicating the quality state of a component is 2, the service life image 600 from the determined time onwards is displayed in red. Therefore, according to the substrate processing apparatus 1 of this embodiment, the degree of recommendation for part replacement can be presented to the user by an image indicating the predicted service life of the component.

[0135] In the substrate processing apparatus 1 according to the first embodiment, the service life image 600 indicates the predicted service life of a component, and the substrate processing apparatus 1 calculates the predicted service life of the component in accordance with the quality state of the component and displays the calculation result on the display unit 204. Therefore, according to the substrate processing apparatus 1 of this embodiment, the service life is recalculated each time in accordance with the quality state and flexibly displayed, thereby encouraging the user to replace the component.

[0136] In the substrate processing apparatus 1 according to the first embodiment, the predicted useful life of a component is shortened and displayed on the display unit 204 in accordance with a warning level indicating the quality state of the component, or a predicted marker 608 is superimposed on the useful life image 600 and displayed on the display unit 204. Therefore, according to the substrate processing apparatus 1 of this embodiment, the predicted useful life of the component can be presented to the user.

[0137] In the substrate processing apparatus 1 according to the first embodiment, a service life image 600A indicating the predicted service life after being updated by the data updating unit 100D and a service life image 600B indicating the predicted service life before being updated by the data updating unit 100D are both displayed on the display unit 204. Therefore, according to the substrate processing apparatus 1 of this embodiment, the user can visually understand that the predicted service life of the component has been shortened.

[0138] The substrate processing apparatus 1 according to the first embodiment has a sensor unit 207 that detects actual measurement data of at least one of the processing components, the flow rate control components, and the transport control components, and determines the quality state of the components based on the detected actual measurement data. Therefore, the substrate processing apparatus 1 according to this embodiment can determine the quality state with high accuracy.

[0139] [Second embodiment] The substrate processing apparatus 1 of the first embodiment determines a warning level by comparing actual measurement data and standard data for the quality state of a component, and displays a warning image 602 indicating the determined warning level. However, the present invention is not limited to this. The substrate processing apparatus 1 of the present embodiment may display the warning image 602 when the number of times that actual measurement data within a unit time (e.g., 24 hours) is determined to be at a predetermined warning level exceeds a predetermined number of times per unit time. Furthermore, the substrate processing apparatus 1 of the present embodiment may display the warning image 602 when the difference in actual measurement data of a component detected within a unit time is greater than a predetermined difference.

[0140] (flowchart) Fig. 15 is a flowchart showing an example of the flow of the storage process according to the second embodiment. As an example, the storage process shown in Fig. 15 is executed every time a set unit time elapses.

[0141] 15, the CPU 102 acquires actual measurement data of components per unit time. For example, the CPU 102 acquires actual measurement data for the most recent 24 hours from the sensor actual measurement data 104D (see FIG. 5).

[0142] In step S301, CPU 102 determines whether the number of times it has been determined that the predetermined warning level has been reached exceeds a predetermined number. CPU 102 determines, for example, whether the number of times it has been determined that the warning level is 1 exceeds five times. If CPU 102 determines that the number of times it has been determined that the predetermined warning level has been reached exceeds the predetermined number of times (step S301: YES), the process proceeds to step S302. On the other hand, if CPU 102 determines that the number of times it has been determined that the predetermined warning level has been reached does not exceed the predetermined number of times (step S301: NO), the process proceeds to step S305.

[0143] In step S302, the CPU 102 acquires a warning timing, which is the timing when the predetermined number of times has been exceeded. For example, the CPU 102 acquires the most recent 24 hours, which is a period divided into unit times, as the warning timing.

[0144] In step S303, CPU 102 determines the warning level of the component based on the number of times it has been determined that the component is at a predetermined warning level. For example, if the number of times it has been determined that the component is at warning level 1 is 5 or more but less than 10, CPU 102 determines that the component is at warning level 1. If the number of times it has been determined that the component is at warning level 1 is 10 or more, CPU 102 determines that the component is at warning level 2.

[0145] In step S304, CPU 102 stores the warning timing and the warning level of the component. Specifically, CPU 102 stores the warning timing acquired in step S302 and the warning level of the component determined in step S303 in component data 104B.

[0146] In step S305, CPU 102 determines whether the difference between the actual measurement data within the unit time exceeds a predetermined difference. For example, CPU 102 determines whether a certain peak in the waveform of sound data from the most recent 24 hours is used as a reference and another peak has a difference of 10% or more, which is a predetermined difference. If CPU 102 determines that the difference between the actual measurement data within the unit time exceeds the predetermined difference (step S305: YES), CPU 102 proceeds to step S306. On the other hand, if CPU 102 determines that the difference between the actual measurement data within the unit time does not exceed the predetermined difference (step S305: NO), CPU 102 ends the storage process.

[0147] In step S306, the CPU 102 acquires a warning timing, which is the timing at which the predetermined difference is exceeded. For example, the CPU 102 acquires the timing of another peak in the waveform of the sound data as the warning timing. Note that the CPU 102 may also acquire a period divided into unit times (for example, the most recent 24 hours) as the warning timing.

[0148] In step S307, the CPU 102 determines the warning level of the component based on the difference in the actual measurement data. For example, the CPU 102 determines that the warning level is 1 when the peak difference in the waveform of the sound data within a unit time is 10% or more and less than 30%.

[0149] In step S308, CPU 102 stores the warning timing and the warning level of the component. Specifically, CPU 102 stores the warning timing acquired in step S306 and the warning level of the component determined in step S307 in component data 104B. Then, CPU 102 ends the storage process.

[0150] (Summary of the second embodiment) The second embodiment also provides the same effects as the above-described aspect. Furthermore, the second embodiment also provides one or more of the following effects.

[0151] The substrate processing apparatus 1 according to the second embodiment determines a warning level when a predetermined condition regarding the quality state of a component is met in detection within a unit time while the component is in operation, and displays a warning image 602 on the display unit 204. Therefore, according to the substrate processing apparatus 1 of this embodiment, the quality state of the component can be comprehensively determined from detection data within a unit time.

[0152] In the substrate processing apparatus 1 according to the second embodiment, when the number of times that the warning level indicating the quality state of a component is determined to be 1 or higher during detection within a unit time exceeds a predetermined number, a warning image 602 is displayed. Therefore, according to the substrate processing apparatus 1 of this embodiment, when the warning level indicating the quality state of a component is determined to be 1 or higher frequently, the user can be prompted to replace the component.

[0153] In the substrate processing apparatus 1 according to the second embodiment, when a difference in actual measurement data of a component exceeds a predetermined difference during detection within a unit time, a warning image 602 is displayed. Therefore, according to the substrate processing apparatus 1 of this embodiment, the quality state of the component can be determined based only on the actual measurement data of the component, and the user can be prompted to replace the component.

[0154] [Other embodiments] The substrate processing apparatus 1 of the first embodiment displays the service life image 600 and the warning image 602 on the display unit 204. However, the present invention is not limited to this, and the management device 70 of the present embodiment may display the service life image 600 and the warning image 602 on the display unit 84 of the management device 70. Note that, in other embodiments as well, the same effects as those of the above-mentioned aspects can be obtained.

[0155] The management device 70 according to this embodiment receives the actual measurement data detected by the sensor unit 207 of the substrate processing apparatus 1 via the external communication unit 81 as a receiving unit, and causes the device control unit 71 as a control unit to display the service life image 600 and the warning image 602 on the display unit 84. Therefore, according to the management device 70 of this embodiment, it is possible to notify a user who is in a remote location from the substrate processing apparatus 1 of the status of components and the replacement timing of those components.

[0156] The management device 70 may acquire information such as the type of process used by each substrate processing apparatus 1, usage time, number of times used, and component replacement information, and display maintenance information prompting component replacement on the display unit 204 of each substrate processing apparatus 1. The management device 70 of this embodiment can collect information on the same type of components and components located in the same location from multiple substrate processing apparatuses 1, and compare the component data in the management device. In other words, the management device 70 of this embodiment makes it easy to understand the quality state of components in a specific substrate processing apparatus 1 by comparing it with a substrate processing apparatus 1 that is operating normally.

[0157] The above-described embodiments and modifications may be used in appropriate combination. The processing procedures and processing conditions may be the same as those of the above-described embodiments and modifications. The configurations of the processing system 90, management device 70, and substrate processing apparatus 1 described in the above embodiments and modifications are merely examples, and may be changed depending on the situation without departing from the spirit of the invention.

[0158] Furthermore, the processing flow of the program described in the above embodiment is also an example, and unnecessary steps may be deleted, new steps may be added, or the processing order may be rearranged within the scope of the main idea.

[0159] In the above embodiment, the processing according to the embodiment is realized by a software configuration using a computer by executing a program, but the present invention is not limited to this. The embodiment may be realized by, for example, a hardware configuration or a combination of a hardware configuration and a software configuration.

[0160] In the above embodiment, the term "CPU" refers to a processor in a broad sense, and includes general-purpose processors such as a CPU (Central Processing Unit), and dedicated processors such as a GPU (Graphics Processing Unit), an ASIC (Application Specific Integrated Circuit), an FPGA (Field Programmable Gate Array), and a programmable logic device.

[0161] Furthermore, the operations of the processors in the above embodiments may not only be performed by a single processor, but may also be performed by multiple processors located at physically separate locations working together. Furthermore, the order of the operations of the processors is not limited to the order described in the above embodiments, and may be changed as appropriate.

[0162] In the above embodiment, an example of forming a film using a batch-type substrate processing apparatus that processes multiple substrates at a time has been described. The present disclosure is not limited to the above embodiment and can be suitably applied, for example, to a case where a film is formed using a single-wafer substrate processing apparatus that processes one or several substrates at a time. Furthermore, in the above embodiment, an example of forming a film using a substrate processing apparatus having a hot-wall type processing furnace has been described. The present disclosure is not limited to the above embodiment and can be suitably applied to a case where a film is formed using a substrate processing apparatus having a cold-wall type processing furnace.

[0163] When using these substrate processing apparatuses, each process can be performed under the same process procedures and conditions as in the above embodiment, and the same effects as in the above embodiment can be obtained. [Explanation of symbols]

[0164] 1 substrate processing apparatus (processing apparatus), 28 processing furnace (processing section), 84 display section, 100 control device (control section), 600 service life image (time information), 602 warning image (quality information)

Claims

1. A processing apparatus having a control unit that is capable of displaying, on a display unit, time information indicating information regarding the usage time of at least operable components out of processing components used in a processing unit that processes substrates, flow rate control components used in an atmosphere control unit that has a gas supply system or a gas exhaust system and can control the atmosphere in the processing unit, and transport control components used in a transport unit that transports substrates, and quality information that indicates that the components are determined to be in a quality state of a predetermined level, linked to the time information for each timing of determination of the quality information.

2. The predetermined level indicates a level at which replacement of the part is recommended. The processing device of claim 1 .

3. the transport unit includes a transport robot capable of transporting the substrate and a drive unit that drives the transport robot; The transport control component is the drive unit. The processing device of claim 1 .

4. The flow rate control component is at least one of a valve, a mass flow controller, and a pump provided in the gas supply system or the gas exhaust system. The processing device of claim 1 .

5. The processing section has a processing chamber in which a substrate is stored and a sealing section adjacent to the processing chamber, and the processing component is the sealing section. The processing device of claim 1 .

6. The quality state is determined from status information indicating at least one of the operating sound, image, video, temperature, and odor of the part. The processing device of claim 1 .

7. comparison information that is compared with the status information; The control unit compares the detected state information with comparison information, and displays the quality information when the difference between the quality state is equal to or greater than a predetermined difference. The processing device of claim 6 .

8. The control unit, while the component is operating, When a predetermined condition regarding the quality state of the part is satisfied in the detection within a unit time, the quality state is determined to be at a predetermined level, and the quality information is additionally displayed on the display unit. The processing device of claim 1 .

9. When the number of times that the quality state of the part becomes a predetermined quality state during detection within a unit time exceeds a predetermined number, the quality information is additionally displayed. The processing device of claim 8 .

10. When the difference in the quality state of the part detected within a unit time exceeds a predetermined difference, the quality information is additionally displayed. The processing device of claim 8 .

11. The quality information is displayed in different colors depending on the condition of the part. The processing device of claim 1 .

12. the quality information has a plurality of levels according to quality states of the component; The time information is displayed differently depending on the level of the quality information. The processing device of claim 1 .

13. The time information is displayed as a bar image, and the display mode of the entire bar image is changed in accordance with the latest level of the quality information. The processing device of claim 12.

14. the time information is displayed on a time axis, and when the quality information is determined to be at a first level, the time information after detecting the first level is changed to be displayed in accordance with the first level; If the quality information is determined to be at a second level, the time information after the second level is detected is changed to a display that matches the second level. The processing device of claim 12.

15. The time information is an expected usage period of the part, the control unit calculates an expected usage period of the part according to a quality state of the part; The calculation results are reflected on the display. The processing device of claim 1 .

16. the time information is displayed as a bar image; The control unit adjusts the length of the bar image corresponding to the expected usage period based on the calculation result and displays the adjusted bar image on the display unit, or superimposes a life flag indicating the calculation result on the bar image and displays the life flag on the display unit. The processing device of claim 15.

17. The estimated use period of the part in which the calculation result is reflected and the estimated use period of the part before the calculation result is reflected are both displayed on the display unit. The processing device of claim 15.

18. a detection unit that detects status information indicating a status of at least one of the processing component, the flow rate control component, and the transport control component, The control unit determines quality information of the part based on the state information. The processing device of claim 1 .

19. a processing section for processing a substrate; an atmosphere control unit capable of controlling gas supply or gas exhaust to the processing unit; a transport unit that transports the substrate; a detection unit that detects status information indicating the status of at least one of a processing component used in the processing unit, a flow rate control component used in the atmosphere control unit, and a transport control component used in the transport unit; a control unit that displays, on a display unit, time information indicating information on the usage time of at least operable components among processing components, flow rate control components used in an atmosphere control unit that is equipped with a gas supply system or a gas exhaust system and can control the atmosphere in the processing unit, and transport control components used in a transport unit that transports substrates, and quality information that determines that the components are in a predetermined quality state based on the state information, in a state linked to the time information for each determination timing of the quality information; A processing system having:

20. a processing section for processing a substrate; an atmosphere control unit capable of controlling gas supply or gas exhaust to the processing unit; a transport unit that transports the substrate; a detection unit that detects status information indicating the status of at least one of a processing component used in the processing unit, a flow rate control component used in the atmosphere control unit, and a transport control component used in the transport unit; a receiving unit that receives status information detected by the detecting unit; a control unit that displays, on a display unit, time information indicating the usage time of at least operable parts selected from processing parts, flow rate control parts used in an atmosphere control unit that is equipped with a gas supply system or a gas exhaust system and can control the atmosphere within the processing unit, and transport control parts used in a transport unit that transports substrates, and quality information that indicates that the parts are in a predetermined quality state based on the state information, linked to the time information for each timing of the quality information determination.

21. A display method that displays time information indicating the usage time of at least operable parts out of processing parts used in a processing section that processes substrates, flow rate control parts used in an atmosphere control section that has a gas supply system or a gas exhaust system and can control the atmosphere in the processing section, and transport control parts used in a transport section that transports substrates, and quality information that determines that the parts are in a quality state of a predetermined level, linked to the time information for each timing of the quality state determination.

22. A program that causes a processor to execute the display method according to claim 21 by a computer.

23. 2. The processing device according to claim 1, transporting the substrate to the processing section; processing the substrate; A method for manufacturing a semiconductor device having the above structure.

Images