System for teaching transfer robot and method for teaching transfer robot

Abstract

To provide a system for teaching a transfer robot that is suitable for efficiently performing a teaching work.SOLUTION: A system for teaching a transfer robot includes: a vertical arm mechanism; a rotation member that rotates around an axis extending in x-direction; a horizontal arm mechanism supported by the rotation member; a hand section 4 that is supported by the horizontal arm mechanism and is provided with a sensor 5; and a control device that detects a target 93 with the sensor 5 and teaches the position of the hand section 4 using the detection result. The target 93 is formed of an optical component to divide incident light and has first surface 931 and a second surface facing a y-direction y1 side and a y-direction y2 side and a third surface 933 facing an x-direction x1 side. The sensor 5 has a light projecting section 51 and light receiving sections 52, 53. The control device moves the hand section 4 in the y-direction from a state in which the light receiving section 52 receives transmitted light exiting from a fourth surface and adjusts the position of the hand section 4 in the y-direction on the basis of a moving distance of the hand section 4 until an amount of received light at the light receiving section 53 becomes maximum.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present disclosure relates to a teaching system for a transport robot and a teaching method for a transport robot. [Background technology]

[0002] In manufacturing processes for semiconductor substrates, liquid crystal substrates, and the like, multiple substrates are stored in multiple layers in substrate transport containers called cassettes, and the cassettes are transported to process equipment or inspection equipment, where the substrates in the cassettes are processed or inspected. In the process equipment or inspection equipment, transport robots are used as industrial robots that load substrates into the transported cassettes and remove substrates from the cassettes. Operators must teach the transport robots the operations required to load and remove substrates from the cassettes in advance through a teaching process.

[0003] The problem with this teaching process is that it takes a very long time. The slots in the cassette for storing each substrate are very narrow, with not much extra space. Also, the inside of the cassette may not be visible from anywhere other than the opening. In such cases, the transfer robot is positioned in front of the opening, making it very difficult to see inside the cassette. The operator must manually teach the transfer robot how to insert and remove substrates from this narrow slot, relying on their own eyes and intuition.

[0004] Patent Document 1 discloses a configuration in which an object detection sensor provided on a hand detects a protrusion on a jig and performs teaching based on the detection results. This configuration eliminates the need for manual teaching by an operator, thereby reducing the time required for teaching. However, depending on the configuration of the transport robot, it can be difficult to efficiently perform teaching using the teaching method described in Patent Document 1. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2015-153809 Summary of the Invention [Problem to be solved by the invention]

[0006] The present disclosure has been conceived under these circumstances, and its main object is to provide a teaching system for a transport robot that is suitable for efficiently carrying out teaching work. [Means for solving the problem]

[0007] In order to solve the above problems, the present disclosure employs the following technical means.

[0008] A teaching system for a transport robot provided by a first aspect of the present disclosure includes a vertical articulated vertical arm mechanism that moves along an in-plane direction perpendicular to a horizontal first direction, a first rotation member that is supported rotatably about a first rotation axis extending in the first direction relative to the vertical arm mechanism, a horizontal articulated horizontal arm mechanism supported by the first rotation member, a hand unit that is supported by the horizontal arm mechanism and is provided with an object detection sensor, and a control device that detects a detection target with the object detection sensor while moving the hand unit and teaches a position of the hand unit using the detection result, the detection target being made of an optical component that splits incident light, and has a first surface facing one side of a horizontal second direction perpendicular to the first direction, and a second surface facing the other side of the second direction and parallel to the first surface. The object detection sensor has two surfaces, and a third surface facing one side of the first direction, and the object detection sensor includes a light-projecting unit, and first and second light-receiving units for receiving light from the light-projecting unit, wherein light from the light-projecting unit enters through the first surface and passes through the inside of the detection target, transmitted light exits from the second surface and reflected light exits from the third surface, the first light-receiving unit is capable of receiving the transmitted light exiting from the second surface, and the second light-receiving unit is capable of receiving the reflected light exiting from the third surface, and the control device moves the hand unit in the second direction from a first state in which the first light-receiving unit receives the transmitted light, and adjusts the position of the hand unit in the second direction based on the movement distance of the hand unit to a second state in which the amount of light received by the second light-receiving unit is maximum.

[0009] In a preferred embodiment, the control device rotates the hand unit about a central axis extending in the first direction and about a vertical axis extending in a third direction perpendicular to the central axis and perpendicular to the first and second directions from a third state in which the light from the light-projecting unit passes through the first surface and the second surface, and adjusts the angle of the hand unit about the central axis and the angle of the hand unit about the vertical axis based on the rotation angle of the hand unit about the central axis and the rotation angle of the hand unit about the vertical axis, up to a fourth state in which the amount of light received by the first light-receiving unit is maximized.

[0010] In a preferred embodiment, the central axis and the vertical axis each intersect with an optical axis connecting the light projecting unit and the first light receiving unit at a center position of the optical axis.

[0011] A second aspect of the present disclosure provides a teaching method for a transport robot, the teaching method comprising: a vertical multi-joint vertical arm mechanism that moves along an in-plane direction perpendicular to a horizontal first direction; a first rotation member supported rotatably about a first rotation axis extending in the first direction relative to the vertical arm mechanism; a horizontal multi-joint horizontal arm mechanism supported by the first rotation member; and a hand unit supported by the horizontal arm mechanism and equipped with an object detection sensor, the teaching method detecting a detection target with the object detection sensor while moving the hand unit, and teaching the position of the hand unit using the detection result, wherein the detection target is made of an optical component that splits incident light, and has a first surface facing one side of a horizontal second direction perpendicular to the first direction, and a second surface facing the other side of the second direction, the object detection sensor has a light-projecting unit, and a first light-receiving unit and a second light-receiving unit for receiving light from the light-projecting unit, and includes the steps of: recording, as a first position, a position of the hand unit in a first state in which light from the light-projecting unit enters the detection target from the first surface and passes through the inside of the detection target, transmitted light exits the second surface and reflected light exits the third surface, and the first light-receiving unit receives the transmitted light; moving the hand unit in the second direction and recording, as a second position, a position of the hand unit in a second state in which the amount of light received by the second light-receiving unit is maximum; and adjusting the position of the hand unit in the second direction based on the distance moved of the hand unit from the first position to the second position.

[0012] In a preferred embodiment, the method further includes the steps of: recording the position of the hand part in a third state in which light from the light projecting part passes through the first surface and the second surface as a third position, each of the steps being performed before the step of adjusting the position of the hand part in the second direction; rotating the hand part from the third position around a central axis extending in the first direction, and around a vertical axis extending in a third direction that is perpendicular to the central axis and perpendicular to the first and second directions, to record the position of the hand part in a fourth state in which the amount of light received by the first light receiving part is maximum as a fourth position; and adjusting the angle of the hand part about the central axis and the angle of the hand part about the vertical axis based on the third position and the fourth position. [Effects of the Invention]

[0013] According to the teaching system for a transport robot disclosed herein, in a transport robot configured with a vertical arm mechanism, a first rotating member, and a horizontal arm mechanism, it is possible to efficiently adjust the hand portion in a horizontal second direction.

[0014] Other features and advantages of the present disclosure will become more apparent from the following detailed description taken in conjunction with the accompanying drawings. [Brief explanation of the drawings]

[0015] [Figure 1] 1 is a schematic front view showing an example of a transport robot constituting a teaching system for a transport robot according to the present disclosure. [Figure 2] FIG. 2 is a perspective view of the transport robot shown in FIG. [Figure 3] FIG. 10 is a perspective view showing an example of an arrangement of detection targets. [Figure 4] FIG. 2 is a perspective view showing the positional relationship between a detection target and a hand unit. [Figure 5] FIG. 2 is an enlarged perspective view showing a detection target. [Figure 6] FIG. 2 is a block diagram showing control of the transport robot. [Figure 7]10 is a flowchart illustrating a teaching process. [Figure 8] FIG. 10 is a diagram for explaining an example of an x-direction adjustment process. [Figure 9] 10A and 10B are diagrams for explaining an example of z-direction adjustment processing. [Figure 10] 10A and 10B are diagrams for explaining an example of an x-axis rotation direction and z-axis rotation direction adjustment process. [Figure 11] 10A and 10B are diagrams for explaining an example of an x-axis rotation direction and z-axis rotation direction adjustment process. [Figure 12] 10 is a flowchart showing an example of an x-axis rotation direction and z-axis rotation direction adjustment process. [Figure 13] 10 is a diagram illustrating an example of a method for determining the rotation angles in the x-axis rotation direction and the z-axis rotation direction when the amount of light received by the first light receiving section is at a maximum. FIG. [Figure 14] 10A and 10B are diagrams for explaining an example of a y-direction adjustment process. [Figure 15] 10 is a flowchart illustrating an example of a y-direction adjustment process. DETAILED DESCRIPTION OF THE INVENTION

[0016] Hereinafter, preferred embodiments of the present disclosure will be described in detail with reference to the drawings.

[0017] Terms such as "first," "second," etc. in this disclosure are used merely as labels and are not necessarily intended to dictate any ordering of their objects.

[0018] Fig. 1 is a schematic front view showing an example of a transfer robot constituting a transfer robot teaching system according to the present disclosure. The transfer robot A1 shown in Fig. 1 performs tasks such as removing substrates stored in multiple stages in a cassette 8 (see Fig. 3) arranged on a load port and transferring them to a load lock chamber arranged on the opposite side of the cassette 8, and discharging substrates that have completed processing in a processing chamber via the load lock chamber and returning them to the cassette 8.

[0019] The transfer robot A1 includes a vertical arm mechanism 1, a first rotating member 2, a horizontal arm mechanism 3, a hand unit 4, a control device 6, a drive mechanism 71, and an input unit 72.

[0020] In the illustrated example of this embodiment, the x direction corresponds to the "first direction" in this disclosure, and the y direction corresponds to the "second direction" in this disclosure. The x direction and the y direction are perpendicular to each other and are both directions along a horizontal plane. The z direction is perpendicular to the x direction and the y direction and corresponds to the vertical direction when the transfer robot A1 is placed in a predetermined transfer chamber (not shown), etc., and corresponds to the "third direction" in this disclosure. In the following description, the upper side in the z direction will be referred to as the "z1 side of the z direction" as appropriate, and the lower side in the z direction will be referred to as the "z2 side of the z direction" as appropriate. The z1 side of the z direction corresponds to "one side of the third direction" in this disclosure, and the z2 side of the z direction corresponds to "the other side of the third direction" in this disclosure. Furthermore, one side in the x direction will be referred to as the "x1 side of the x direction" as appropriate, and the other side in the x direction will be referred to as the "x2 side of the x direction" as appropriate. One side in the y direction will be referred to as the "y1 side of the y direction" as appropriate, and the other side in the y direction will be referred to as the "y2 side of the y direction" as appropriate. The y1 side of the y direction corresponds to "one side of the second direction" in this disclosure, and the y2 side of the y direction corresponds to "the other side of the second direction" in this disclosure. Furthermore, in this disclosure, "a surface A faces (one side or the other side of) direction B" is not limited to the case where the angle of surface A with respect to direction B is 90°, but also includes the case where surface A is tilted with respect to direction B.

[0021] The vertical arm mechanism 1 is a vertical articulated arm mechanism that moves in a plane perpendicular to the horizontal x-direction, and is composed of, for example, multiple rotatably connected arms. In the illustrated example, the vertical arm mechanism 1 includes a first vertical arm 11 and a second vertical arm 12. The first vertical arm 11 extends in a plane formed by the y- and z-directions and is supported by a fixed base 10. Specifically, the base end of the first vertical arm 11 is supported rotatably around a first horizontal axis O1 extending in the x-direction relative to the fixed base 10. The second vertical arm 12 extends in a plane formed by the y- and z-directions and is supported by the first vertical arm 11. Specifically, the base end of the second vertical arm 12 is supported rotatably at the tip of the first vertical arm 11 around a second horizontal axis O2 extending in the x-direction. Note that the configuration of the vertical arm mechanism 1 is not limited to the illustrated example.

[0022] The first rotating member 2 is supported by a second vertical arm 12 (vertical arm mechanism 1). Specifically, the first rotating member 2 is supported at the tip of the second vertical arm 12 so as to be rotatable around a first rotating axis Ox extending in the x direction.

[0023] Although detailed illustrations are omitted, the first vertical arm 11 and the second vertical arm 12 are rotated about a first horizontal axis O1 and a second horizontal axis O2 using, for example, a motor as a drive source and a power transmission means (drive mechanism) such as a belt mechanism or a reducer. By driving and controlling the motor, the horizontal arm mechanism 3 supported by the vertical arm mechanism 1 via the first rotating member 2 can be moved to the front of the cassette or the load lock chamber. The first rotating member 2 is also rotated appropriately about the first rotating axis Ox by a drive mechanism (not shown). This allows the horizontal arm mechanism 3 (first horizontal arm 31 and second horizontal arm 32 described below) supported by the first rotating member 2 to maintain a horizontal posture.

[0024] The horizontal arm mechanism 3 is a horizontally articulated arm mechanism supported by the first rotating member 2 and moves along a horizontal plane perpendicular to the z direction (vertical direction). The horizontal arm mechanism 3 is composed of, for example, a plurality of rotatably connected arms. In the illustrated example, the horizontal arm mechanism 3 includes a first horizontal arm 31 and a second horizontal arm 32. The base end of the first horizontal arm 31 is supported rotatably around a first vertical axis V1 extending in the z direction relative to the first rotating member 2. The base end of the second horizontal arm 32 is supported rotatably around a second vertical axis V2 extending in the z direction at the tip end of the first horizontal arm 31. In this embodiment, the second horizontal arm 32 includes two second horizontal arms 32A and 32B arranged in two tiers, one above the other. The configuration of the horizontal arm mechanism 3 is not limited to the illustrated example.

[0025] Although detailed illustrations are omitted, the first horizontal arm 31 and the second horizontal arm 32 are driven by, for example, a motor, and are rotated about the first vertical axis V1 and the second vertical axis V2 by using a power transmission means (drive mechanism) such as a belt mechanism or a reducer. By controlling the driving of the motor, the hand unit 4 (hand units 4A and 4B) described below, which is supported by the second horizontal arm 32 (second horizontal arms 32A and 32B), can be moved linearly along the horizontal x direction.

[0026] The hand unit 4 is supported by a second horizontal arm 32 (horizontal arm mechanism 3). Specifically, the hand unit 4 is attached to the second horizontal arm 32. In this embodiment, the hand unit 4 includes two hand units 4A and 4B arranged in two tiers, one above the other, and these hand units 4A and 4B are attached to two second horizontal arms 32A and 32B, respectively.

[0027] The hand unit 4 (hand units 4A and 4B) is a plate member having a base unit 41 connected to the second horizontal arm 32 (second horizontal arms 32A and 32B) and two holders 42 extending from the base unit 41. In the hand unit 4 in the position shown in FIG. 4, the two holders 42 are spaced apart in the y direction. A thin plate-shaped substrate (not shown) is supported by the hand unit 4. Note that the configuration of the hand unit 4 is not limited to the example shown in the figures.

[0028] The transport robot A1 supports a substrate by holding the hand unit 4 horizontally, and in this state raises and lowers the hand unit 4, rotates and moves it in the xy plane, etc., to place the substrate in a slot 81 in the cassette 8 (storing the substrate in the cassette 8), or receives the substrate placed in the slot 81 with the hand unit 4 and removes it from the cassette 8 (removing the substrate from the cassette 8).

[0029] An object detection sensor 5 is provided at the tip of the holding portion 42 of the hand unit 4. Details of the object detection sensor 5 will be described later.

[0030] The cassette 8 is a rectangular box, and at least the side facing the transport robot A1 is open as a surface for inserting and removing substrates. A plurality of slots 81 for storing substrates in multiple tiers are protruded inward on both sides of the cassette 8. A substrate is placed on the upper surface of a pair of slots 81 at the same height, and is stored in the tier at that height. The gap between a pair of opposing slots 81 in the cassette 8 is set longer than the horizontal length of the hand unit 4 (the width of the hand unit 4) so ​​that the hand unit 4 can move up and down within the cassette 8 without interfering with the slots 81.

[0031] The object detection sensor 5 may be, for example, a fiber sensor, which is a type of optical sensor. The object detection sensor 5 of this embodiment includes a light-projecting unit 51, a first light-receiving unit 52, and a second light-receiving unit 53. The object detection sensor 5 detects whether or not there is an object between the light-projecting unit 51 and the first light-receiving unit 52 (second light-receiving unit 53) based on whether or not the first light-receiving unit 52 (second light-receiving unit 53) receives light from the light-projecting unit 51. In the fiber sensor, the light emitted from the light-projecting unit 51 is, for example, red light (visible light). Of course, the object detection sensor 5 is not limited to a fiber sensor, and may be any sensor that can detect whether or not the first light-receiving unit 52 (second light-receiving unit 53) receives light from the light-projecting unit 51. Furthermore, the light emitted from the light-projecting unit 51 is not limited to visible light, and may be infrared light, for example. In the following description, the object detection sensor 5 is assumed to be a fiber sensor. As shown in Fig. 4, the light-projecting unit 51 of the object detection sensor 5 is provided at the tip of one of the holding units 42 of the hand unit 4. The first light-receiving unit 52 of the object detection sensor 5 is provided at the tip of the other holding unit 42 of the hand unit 4. The second light-receiving unit 53 of the object detection sensor 5 is provided on the base 41 of the hand unit 4. The second light-receiving unit 53 is located at the center of the optical axis connecting the light-projecting unit 51 and the first light-receiving unit 52, in a direction perpendicular to the optical axis (the x direction in Fig. 4).

[0032] The object detection sensor 5 (light-projecting unit 51 and first light-receiving unit 52) ​​is provided to detect in which slot 81 of the cassette 8 a substrate is placed. Specifically, the transfer robot A1 moves the hand unit 4 in the vertical direction (the z direction shown in FIG. 4 ) while emitting light from the light-projecting unit 51 of the object detection sensor 5 toward the first light-receiving unit 52. At this time, the hand unit 4 is moved so that the edge of the substrate can block the optical axis of the object detection sensor 5 (light-projecting unit 51 and first light-receiving unit 52) ​​and so that the hand unit 4 does not come into contact with the substrate. When a substrate is not placed in the slot 81, the first light-receiving unit 52 receives the light from the light-projecting unit 51. When a substrate is placed in the slot 81, the light emitted by the light-projecting unit 51 is blocked by the substrate and is not received by the first light-receiving unit 52. Therefore, it is possible to detect in which slot 81 a substrate is placed based on the detection result of the object detection sensor 5 (first light-receiving unit 52). It should be noted that when there is nothing between the light-projecting unit 51 and the first light-receiving unit 52, the optical axis of the object detection sensor 5 is not blocked. This is the "on" state, in which the first light-receiving unit 52 receives light from the light-projecting unit 51. When the optical axis of the object detection sensor 5 is not blocked, the amount of light received (light intensity) by the first light-receiving unit 52 is at its maximum. On the other hand, when there is something (such as the edge of the circuit board) between the light-projecting unit 51 and the first light-receiving unit 52 that blocks the optical axis as described above, this is the "off" state, in which the first light-receiving unit 52 does not receive light from the light-projecting unit 51. The "on" state and the "off" state will be used similarly in the following description.

[0033] The control device 6 controls the operation of the vertical arm mechanism 1, the first rotating member 2, and the horizontal arm mechanism 3, and also teaches the position of the hand unit 4. As shown in FIG. 6, the control device 6 includes a control unit 61 and a memory unit 62. The control unit 61 controls the driving of the drive mechanism 71 based on teaching information stored in the memory unit 62. The drive mechanism 71 imparts predetermined movements to the vertical arm mechanism 1, the first rotating member 2, and the horizontal arm mechanism 3. The control unit 61 also controls the driving of the drive mechanism 71 based on information input from an input unit 72. The input unit 72 is a device (e.g., a teach pendant) through which an operator performs teaching work or manual operation. Furthermore, the control unit 61 assists in the teaching work and automatically performs the teaching work based on a teaching process described below. The teaching process will be described later. The memory unit 62 stores teaching information for indicating the movement trajectory of the hand unit 4. Information previously acquired by the teaching process is recorded in the memory unit 62 and used as teaching information.

[0034] 3 and 4, in this embodiment, the teaching operation is performed automatically using the object detection sensor 5 provided in the hand unit 4 and the jig 9 placed on the upper surface of the pair of slots 81 of the cassette 8. In this automatic teaching operation, the position of the hand unit 4 is taught so that the hand unit 4 is adjusted to a predetermined position.

[0035] The jig 9 is, for example, a thin dummy substrate similar to the substrates actually stored in the cassette 8. The material of the jig 9 is not particularly limited and may be the same material as the actual substrate, or a different material. The jig 9 is placed in a slot 81 of the cassette 8 (see FIG. 3). In this embodiment, the shape of the jig 9 is rectangular, substantially matching the shape of the inner surface of the cassette 8, so that the placement position of the jig 9 in the cassette 8 (position in the x-y plane) does not change. That is, by making the length of the jig 9 in the width direction (y direction in FIG. 3) approximately the same as but slightly smaller than the width direction length of the inner surface of the cassette 8, the jig 9 can be placed in the slot 81, and the placement position of the jig 9 in the cassette 8 does not shift in the width direction (y direction). Furthermore, by placing the jig 9 at the innermost position of the slot 81, the placement position of the jig 9 in the cassette 8 does not shift in the depth direction (x direction). This allows the position of the detection target 93 (described later) on the xy plane to be a specific position. Note that the shape of the jig 9 is not limited to this, and it is sufficient if the position of the detection target 93 on the xy plane can be specified.

[0036] The jig 9 has two notches 91 and 92 at an end that faces the opening of the cassette 8 (the x1 side in the x direction shown in FIG. 3 ) when placed in the slot 81 of the cassette 8. The notches 91 and 92 are provided to prevent the holding unit 42 of the hand unit 4 from coming into contact with the jig 9. Therefore, the shapes of the notches 91 and 92 are not limited as long as they fulfill this purpose. In addition, a detection target 93 is provided on the upper surface of the portion of the jig 9 between the notches 91 and 92.

[0037] As shown in FIGS. 4 and 5, in this embodiment, the detection target 93 is an optical component that splits incident light, and has, for example, a rectangular parallelepiped or cubic shape. In the illustrated example, the detection target 93 is a cube with six faces and is configured as a cube beam splitter. The detection target 93 is configured by joining the 45° inclined surfaces of two right-angle prisms. These joined inclined surfaces form a semi-transparent internal reflecting mirror 939. The material of the detection target 93 is, for example, an optical glass material such as quartz glass, and a material with excellent light transmittance is selected.

[0038] As shown in FIG. 5 , the detection target 93 has a first surface 931, a second surface 932, a third surface 933, a fourth surface 934, a fifth surface 935, and a sixth surface 936. The first surface 931 and the second surface 932 face opposite each other in the y direction and are parallel to each other. The first surface 931 faces the y1 side in the y direction, and the second surface 932 faces the y2 side in the y direction. The third surface 933 and the fourth surface 934 face opposite each other in the x direction. The third surface 933 faces the x1 side in the x direction, and the fourth surface 934 faces the x2 side in the x direction. The fifth surface 935 and the sixth surface 936 face opposite each other in the z direction. The fifth surface 935 is an upper surface facing the z1 side in the z direction. The sixth surface 936 is a lower surface facing the z2 side in the z direction. Each of the four corners of the lower surface (sixth surface 936) of the detection target 93 is supported by a leg 94. The detection target 93 is supported and fixed to the jig 9 via these leg 94. The length L1 of one side of the detection target 93 is not particularly limited, but is, for example, about 30 mm. The shape of the detection target 93 is not limited to a cube.

[0039] The first surface 931 is an incident surface for light from the light projecting unit 51. The second surface 932 is an exit surface for light that has passed through the internal reflecting mirror 939. The third surface 933 is an exit surface for light that has been reflected by the internal reflecting mirror 939.

[0040] When the optical axis of the object detection sensor 5 (light-projecting unit 51 and first light-receiving unit 52) ​​is perpendicular to the first surface 931 and second surface 932 of the detection target 93, the light emitted from the light-projecting unit 51 travels straight without being refracted at the first surface 931, which is the incident surface of the detection target 93. The light is split by the internal reflecting mirror 939, and the light that passes through the internal reflecting mirror 939 travels straight without being refracted at the second surface 932, which is the exit surface. In this case, the first light-receiving unit 52 receives the light from the light-projecting unit 51 (the transmitted light split by the internal reflecting mirror 939), and detection by the first light-receiving unit 52 is in the "on" state. When the optical axis of the object detection sensor 5 (light-projecting unit 51 and first light-receiving unit 52) ​​is not perpendicular to the incident surface of the detection target 93 but is inclined with respect to the normal to the incident surface, the light emitted from the light-projecting unit 51 is refracted at the incident surface of the detection target 93 and travels inside the detection target 93. When the inclination angle of the optical axis with respect to the normal to the incident surface is small, the amount of light received (light intensity) by the first light receiving unit 52 decreases, but the first light receiving unit 52 can receive light from the light projecting unit 51. At this time, detection by the first light receiving unit 52 is in the "on" state. When the inclination angle of the optical axis with respect to the normal to the incident surface exceeds a certain value, the first light receiving unit 52 no longer receives light from the light projecting unit 51, and detection by the first light receiving unit 52 is in the "off" state. Therefore, when the optical axis of the object detection sensor 5 (light projecting unit 51 and first light receiving unit 52) ​​is perpendicular to the incident surface of the detection target 93, detection by the first light receiving unit 52 is in the "on" state, and the amount of light received (light intensity) by the first light receiving unit 52 is at its maximum.

[0041] Furthermore, when the optical axis of the object detection sensor 5 (light-projecting unit 51 and first light-receiving unit 52) ​​is perpendicular to the first surface 931 and the second surface 932 of the detection target 93 and the center position of the optical axis coincides with the center position of the detection target 93, the light emitted from the light-projecting unit 51 is split by the internal reflecting mirror 939. The light that is reflected by the internal reflecting mirror 939 without passing through the internal reflecting mirror 939 travels straight toward the x1 side in the x direction without being refracted by the third surface 933, which is the emission surface. In this case, the second light-receiving unit 53 receives the light from the light-projecting unit 51 (the reflected light split by the internal reflecting mirror 939), and detection by the second light-receiving unit 53 is in the "on" state.

[0042] Next, the teaching process for automatically performing the teaching operation in the present embodiment will be described.

[0043] FIG. 7 is a flowchart for explaining the teaching process performed by the control device 6. The control device 6 (control unit 61) starts the teaching process, for example, when an operator instructs to perform the teaching process from the input unit 72. In the teaching operation, adjustments are made for each of the positions in the x, y, and z directions and the rotations in the x-axis rotation direction and the z-axis rotation direction. The teaching process includes an x-direction and z-direction adjustment process (S1), an x-axis rotation direction and z-axis rotation direction adjustment process (S2), and a y-direction adjustment process (S3).

[0044] <x-direction and z-direction adjustment process> FIG. 8 is a diagram for explaining an example of the x-direction adjustment process, and is a schematic diagram showing the positional relationship between the optical axis Op of the object detection sensor 5 provided on the hand portion 4 and the detection target 93 when viewed along the z direction from the z1 side in the z direction toward the z2 side in the z direction. The optical axis Op of the object detection sensor 5 is a straight line connecting the centers of the light projecting portion 51 and the first light receiving portion 52. In the illustrated example, the detection target 93 is inclined in the clockwise direction in the z-axis rotation direction with respect to the hand portion 4. The deviation angle of the detection target 93 in the z-axis rotation direction with respect to the hand portion 4 is, for example, about 2 degrees or less. In FIG. 8, for ease of understanding, the deviation angle of the detection target 93 in the z-axis rotation direction with respect to the hand portion 4 is exaggerated. The unit of the angle is expressed in degrees (degree), and the same applies in the following description.

[0045] In the x-direction adjustment process, the hand unit 4 is moved toward the x2 side in the x direction while the object detection sensor 5 performs detection. In this process, the height position (position in the z direction) of the hand unit 4 is set so that the detection target 93 can be detected when the hand unit 4 is moved in the x direction. Here, the hand unit 4 is disposed so that the optical axis Op of the object detection sensor 5 is located on the x1 side in the x direction with respect to the detection target 93. At this time, the detection target 93 is not between the light-projecting unit 51 and the first light-receiving unit 52, and the detection of the first light-receiving unit 52 is "ON." When the hand unit 4 is moved toward the x2 side in the x direction, the optical axis Op of the object detection sensor 5 is blocked by the edge of the detection target 93. In the illustrated example, the optical axis Op of the object detection sensor 5 is blocked by the edge where the first surface 931 and the third surface 933 intersect. The position of the optical axis Op when the optical axis Op reaches this edge is designated as optical axis Op1.

[0046] When the hand unit 4 is further moved toward the x2 side in the x direction, the light from the light-projecting unit 51 passes through the first surface 931, the interior of the detection target 93, and the second surface 932. Here, the light from the light-projecting unit 51 is refracted as it passes through the first surface 931 and the second surface 932, and the first light-receiving unit 52 no longer receives the light from the light-projecting unit 51, and detection by the first light-receiving unit 52 turns "off." When the hand unit 4 is further moved toward the x2 side in the x direction, the light from the light-projecting unit 51 is reflected by the fourth surface 934, and the first light-receiving unit 52 no longer receives the light from the light-projecting unit 51, and detection by the first light-receiving unit 52 remains "off." When the hand unit 4 is further moved toward the x2 side in the x direction, the optical axis Op of the object detection sensor 5 reaches the edge where the fourth surface 934 and the second surface 932 intersect. The position of the optical axis Op at the time when it reaches the edge is defined as the optical axis Op2. When the optical axis Op of the object detection sensor 5 passes over the edge where the fourth surface 934 and the second surface 932 intersect and is positioned on the x2 side of the edge in the x direction, there is no detection target 93 between the light-projecting unit 51 and the first light-receiving unit 52, and the detection of the first light-receiving unit 52 is "on."

[0047] Based on this change in detection by the first light receiving unit 52, the x-direction positions (x-coordinates) of the optical axes Op1 and Op2 are recorded in the memory unit 62. If the x-coordinate of the optical axis Op1 is xa and the x-coordinate of the optical axis Op2 is xb, the x-coordinate of the center position Cp of the detection target 93 can be expressed as (xa + xb) / 2, and the x-coordinate of this center position Cp can be calculated. Then, the x-direction position of the hand unit 4 is adjusted based on the x-coordinate of the center position Cp of the detection target 93. The x-direction position of the hand unit 4 can be adjusted based on the x-coordinate of this center position Cp. Here, the x-direction position of the hand unit 4 is adjusted so that the optical axis Op of the object detection sensor 5 overlaps with the center position Cp of the detection target 93 when viewed along the z-direction.

[0048] In the example shown in FIG. 8 , when the hand unit 4 is moved toward the x2 side in the x direction, the detection by the object detection sensor 5 changes from ON to OFF to ON, and the detection by the object detection sensor 5 turns OFF only when the optical axis Op of the object detection sensor 5 intersects with the detection target 93. If the deviation angle of the detection target 93 in the z-axis rotation direction relative to the hand unit 4 is smaller than in the example shown in FIG. 8 , the first light receiving unit 52 may be able to receive the light from the light projecting unit 51 even if the light from the light projecting unit 51 is refracted as it passes through the detection target 93. In this case, when the optical axis Op of the object detection sensor 5 intersects with the detection target 93, a change such as a decrease in the amount of light received (light intensity) by the first light receiving unit 52 occurs. Even in this case, as in the case of FIG. 8 , the positions in the x direction (x coordinates) of the optical axes Op1 and Op2 can be recorded based on the change in the amount of light received (light intensity) by the first light receiving unit 52. Then, the x coordinate of the center position Cp of the detection target 93 can be calculated from the x coordinate of the optical axis Op1 and the x coordinate of the optical axis Op2.

[0049] FIG. 9 is a diagram for explaining an example of the z-direction adjustment process, and is a schematic diagram showing the positional relationship between the optical axis Op of the object detection sensor 5 provided in the hand unit 4 and the detection target 93 when viewed along the x direction from the x1 side in the x direction toward the x2 side in the x direction. In the example shown, the detection target 93 is tilted counterclockwise in the x-axis rotation direction with respect to the hand unit 4. Note that the deviation angle of the detection target 93 in the x-axis rotation direction with respect to the hand unit 4 is, for example, approximately 2 degrees or less. In FIG. 9, the deviation angle of the detection target 93 in the x-axis rotation direction with respect to the hand unit 4 is exaggerated for ease of understanding.

[0050] In the z-direction adjustment process, the hand unit 4 is moved toward the z2 side in the z direction while the object detection sensor 5 performs detection. In this process, the position of the hand unit 4 in the x direction is set so that the detection target 93 can be detected when the hand unit 4 is moved in the z direction. Here, the hand unit 4 is positioned so that the optical axis Op of the object detection sensor 5 is located on the z1 side in the z direction relative to the detection target 93. At this time, the detection target 93 is not between the light-projecting unit 51 and the first light-receiving unit 52, and detection by the first light-receiving unit 52 is "ON." When the hand unit 4 is moved toward the z2 side in the z direction, the optical axis Op of the object detection sensor 5 is blocked by the edge of the detection target 93. In the illustrated example, the optical axis Op of the object detection sensor 5 is blocked by the edge where the first surface 931 and the fifth surface 935 intersect. The position of the optical axis Op when the optical axis Op reaches this edge is designated as optical axis Op3.

[0051] When the hand unit 4 is further moved toward the z2 side in the z direction, the light from the light-projecting unit 51 passes through the first surface 931, the interior of the detection target 93, and the second surface 932. Here, the light from the light-projecting unit 51 is refracted as it passes through the first surface 931 and the second surface 932, and the first light-receiving unit 52 no longer receives the light from the light-projecting unit 51, and detection by the first light-receiving unit 52 turns "off." When the hand unit 4 is further moved toward the z2 side in the z direction, the light from the light-projecting unit 51 is reflected by the sixth surface 936, and the first light-receiving unit 52 no longer receives the light from the light-projecting unit 51, and detection by the first light-receiving unit 52 remains "off." When the hand unit 4 is further moved toward the z2 side in the z direction, the optical axis Op of the object detection sensor 5 reaches the edge where the sixth surface 936 and the second surface 932 intersect. The position of the optical axis Op at the time when it reaches the edge is designated as optical axis Op4. When the optical axis Op of the object detection sensor 5 passes over the edge where the sixth surface 936 and the second surface 932 intersect and is positioned on the z2 side of the edge in the z direction, there is no detection target 93 between the light-projecting unit 51 and the first light-receiving unit 52, and the detection of the first light-receiving unit 52 is "on."

[0052] Based on this change in detection by the first light receiving unit 52, the z-direction positions (z coordinates) of the optical axes Op3 and Op4 are recorded in the memory unit 62. If the z-coordinate of the optical axis Op3 is za and the x-coordinate of the optical axis Op4 is zb, the z-coordinate of the center position Cp of the detection target 93 can be expressed as (za + zb) / 2, and the z-coordinate of this center position Cp can be calculated. Then, the position of the hand unit 4 in the z direction is adjusted based on the z-coordinate of the center position Cp of the detection target 93. The position of the hand unit 4 in the z direction can be adjusted based on the z-coordinate of this center position Cp. Here, the position of the hand unit 4 in the z direction is adjusted so that the optical axis Op of the object detection sensor 5 overlaps with the center position Cp of the detection target 93 when viewed along the x direction.

[0053] In the example shown in FIG. 9 described above, when the hand portion 4 is moved to the z2 side in the z direction, the detection by the object detection sensor 5 changes from on → off → on, and the detection of the object detection sensor 5 turns off only when the optical axis Op of the object detection sensor 5 intersects the detection target 93. When the deviation angle in the x-axis rotation direction of the detection target 93 with respect to the hand portion 4 is smaller than the example shown in FIG. 9 described above, even if the light from the light projecting portion 51 is refracted by passing through the detection target 93, the first light receiving portion 52 may be able to receive the light from the light projecting portion 51. In this case, when the optical axis Op of the object detection sensor 5 intersects the detection target 93, changes such as a decrease in the light reception amount (light intensity) of the first light receiving portion 52 appear. Even in this case, similar to the case of FIG. 9, based on the change in the light reception amount (light intensity) in the first light receiving portion 52, the positions (z coordinates) in the z direction of the optical axis Op3 and the optical axis Op4 can be recorded. Then, the z coordinate of the center position Cp of the detection target 93 can be calculated from the x coordinate of the optical axis Op3 and the z coordinate of the optical axis Op4.

[0054] <x-axis rotation direction and z-axis rotation direction adjustment process> FIGS. 10 and 11 are diagrams for explaining an example of the x-axis rotation direction and z-axis rotation direction adjustment process. FIG. 10 is a schematic diagram showing the positional relationship between the object detection sensor 5 provided on the hand portion 4 and the detection target 93 when viewed along the x direction from the x1 side in the x direction toward the x2 side in the x direction. FIG. 11 is a schematic diagram showing the positional relationship between the object detection sensor 5 provided on the hand portion 4 and the detection target 93 when viewed along the z direction from the z₁ side in the z direction toward the z₂ side in the z direction. FIG. 12 is a flowchart showing an example of the x-axis rotation direction and z-axis rotation direction adjustment process.

[0055] In the x-axis rotation direction and z-axis rotation direction adjustment process, first, the position of the hand unit 4 in the z direction is adjusted so that the optical axis Op of the object detection sensor 5 coincides with the center position Cp of the detection target 93 when viewed along the x direction (see FIG. 10(a)). Simultaneously, the position of the hand unit 4 in the x direction is adjusted so that the optical axis Op of the object detection sensor 5 coincides with the center position Cp of the detection target 93 when viewed along the z direction (see FIG. 11(a)). At this time, the light from the light projecting unit 51 is in a state (third state) where it passes through the first surface 931, the interior of the detection target 93, and the second surface 932. This position of the hand unit 4 is recorded in the storage unit 62 as the third position (step S21 in FIG. 12). In the illustrated example, as shown in FIG. 10, the detection target 93 is tilted counterclockwise in the x-axis rotation direction relative to the hand unit 4. Furthermore, as shown in FIG. 11, the detection target 93 is tilted clockwise in the z-axis rotation direction relative to the hand unit 4. When the hand unit 4 is in the third position, the light from the light-emitting unit 51 is refracted as it passes through the first surface 931 and the second surface 932, and the first light-receiving unit 52 does not receive the light from the light-emitting unit 51, so detection by the first light-receiving unit 52 is "off."

[0056] Next, while performing detection using the first light receiving unit 52, the hand unit 4 is rotated around the central axis Cx (see FIGS. 10(b) and 10(c)). The central axis Cx extends along the x direction and intersects with the optical axis Op of the object detection sensor 5 at the center of the optical axis Op. The operation of rotating the hand unit 4 around the central axis Cx is performed by appropriately driving the vertical arm mechanism 1 and the first rotating member 2 using the drive mechanism 71. Furthermore, while performing detection using the first light receiving unit 52, the hand unit 4 is rotated around the vertical axis Cz (see FIGS. 11(b) and 11(c)). The vertical axis Cz extends along the z direction and intersects with the optical axis Op of the object detection sensor 5 at the center of the optical axis Op. The operation of rotating the hand unit 4 around the vertical axis Cz is performed by appropriately driving the vertical arm mechanism 1, the first rotating member 2, and the horizontal arm mechanism 3 using the drive mechanism 71.

[0057] In this embodiment, the hand unit 4 is rotated around the central axis Cx by a constant first angle α0 from the third position within a range of a predetermined first scanning angle (step S22 in FIG. 12). Furthermore, the hand unit 4 is rotated around the vertical axis Cz by the first angle α0 within a range of a predetermined second scanning angle (step S23 in FIG. 12).

[0058] The first scanning angle at which the hand unit 4 is rotated about the central axis Cx is not particularly limited. In this embodiment, as described above, the deviation angle of the detection target 93 in the x-axis rotation direction relative to the hand unit 4 is approximately 2 degrees or less. In this case, the first scanning angle is, for example, approximately 5 degrees or more and 8 degrees or less. The second scanning angle at which the hand unit 4 is rotated about the vertical axis Cz is not particularly limited. In this embodiment, as described above, the deviation angle of the detection target 93 in the z-axis rotation direction relative to the hand unit 4 is approximately 2 degrees or less. In this case, the second scanning angle is, for example, approximately 5 degrees or more and 8 degrees or less. Furthermore, the constant first angle α0 at which the hand unit 4 is intermittently rotated about the central axis Cx is not particularly limited. The smaller the first angle α0, the higher the detection accuracy of the amount of received light by the object detection sensor 5 (first light receiving unit 52). The first angle α0 is, for example, 0.1 degrees.

[0059] 10(b) and 11(b) show a state in which the optical axis Op of the object detection sensor 5 is perpendicular to the first surface 931. At this time, the light emitted from the light-projecting unit 51 travels straight without being refracted at the first surface 931 and the second surface 932 of the detection target 93, and reaches the first light-receiving unit 52 along the optical axis Op. The hand unit 4 shown in FIGS. 10(b) and 11(b) is in a state (fourth state) in which the amount of light received (light intensity) by the first light-receiving unit 52 is at its maximum. This position of the hand unit 4 is recorded in the memory unit 62 as the fourth position (step S24 in FIG. 12).

[0060] Based on the third position of the hand part 4 in the third state shown in FIGS. 10(a) and 11(a) and the fourth position of the hand part 4 in the fourth state shown in FIGS. 10(b) and 11(b), the rotation angle αp (see FIG. 10(b)) around the central axis Cx of the hand part 4 and the rotation angle βp around the vertical axis Cz of the hand part 4 from the third state to the fourth state are calculated (see FIG. 11(b)). Then, based on these rotation angles αp and βp, the angles in the x-axis rotation direction (around the central axis Cx) and the z-axis rotation direction (around the vertical axis Cz) of the hand part 4 are adjusted (step S25 in FIG. 12).

[0061] FIG. 13 is a schematic diagram for explaining a method of determining the rotation angles in the x-axis rotation direction and the z-axis rotation direction when the light reception amount of the first light receiving part 52 is maximized. The first determination method is as follows: First, for the rotation angle α in the range of the first scanning angle around the central axis Cx of the hand part 4 and the rotation angle β in the range of the second scanning angle around the vertical axis Cz of the hand part 4, the maximum value (light intensity I max ) of the light reception amount (light intensity) in the first light receiving part 52 is specified. Then, the rotation angles αp, βp corresponding to the maximum value of the light reception amount are calculated. The second determination method is as follows: For the rotation angle α in the range of the first scanning angle and the rotation angle β in the range of the second scanning angle, the angles α1, β1 and the angles α2, β2 when the light reception amount (light intensity) in the first light receiving part 52 is equal to or greater than a certain light intensity threshold value I0 are specified. Then, the midpoints of these are calculated as the rotation angles αp, βp.

[0062] <y-direction adjustment process> FIG. 14 is a diagram for explaining an example of the y-direction adjustment process, and is a schematic diagram showing the positional relationship between the optical axis Op of the object detection sensor 5 provided on the hand part 4 and the detection target 93 when viewed along the x-direction from the x1 side in the x-direction to the x2 side in the x-direction.

[0063] In the y-direction adjustment process, first, the x-direction position and the angle in the z-axis rotation direction of the hand unit 4 are adjusted so that, when viewed along the z direction, the optical axis Op of the object detection sensor 5 overlaps with the center position Cp of the detection target 93 and the optical axis Op is perpendicular to the first surface 931 (see FIG. 14(a)). Furthermore, although not shown, in addition to this, the z-direction position and the angle in the x-axis rotation direction of the hand unit 4 are adjusted so that, when viewed along the x direction, the optical axis Op of the object detection sensor 5 overlaps with the center position Cp of the detection target 93 and the optical axis Op is perpendicular to the first surface 931. These adjustments can be made based on the x-direction and z-direction adjustment process (S1) and the x-axis rotation direction and z-axis rotation direction adjustment process (S2) described above. As a result, the hand unit 4 shown in FIG. 14(a) is in a state where only the deviation in the y direction with respect to the detection target 93 has not been adjusted. Here, the vertical axis Cz, which is the rotation center of the hand unit 4 around the z direction, intersects with the optical axis Op of the object detection sensor 5 at the center position of the optical axis Op. When viewed along the z direction, the length in the y direction between the vertical axis Cz and the center position Cp of the detection target 93 corresponds to the deviation (Δy) of the hand unit 4 in the y direction from the detection target 93. In this embodiment, when viewed along the z direction, the hand unit 4 (vertical axis Cz) is deviated toward the y1 side in the y direction with respect to the detection target 93 (center position Cp). Note that the deviation Δy of the hand unit 4 in the y direction from the detection target 93 is, for example, approximately 5 mm or less. In FIG. 14, the deviation Δy of the hand unit 4 in the y direction from the detection target 93 is exaggerated for ease of understanding.

[0064] 14(a), the light emitted from the light-projecting unit 51 of the object detection sensor 5 travels straight without being refracted at the first surface 931, which is the incident surface of the detection target 93. The light is then split by the internal reflecting mirror 939, and the light that passes through the internal reflecting mirror 939 travels straight without being refracted at the second surface 932, which is the exit surface. This results in a state (first state) in which the first light-receiving unit 52 receives the light from the light-projecting unit 51 (transmitted light split by the internal reflecting mirror 939), and detection by the first light-receiving unit 52 is "on." This position of the hand unit 4 is recorded in the memory unit 62 as the first position (step S31 in FIG. 15). On the other hand, when the hand unit 4 is in the first position, the light emitted from the light-projecting unit 51 of the object detection sensor 5 that does not pass through the internal reflecting mirror 939 but is reflected by the internal reflecting mirror 939 travels straight toward the x1 side in the x direction without being refracted at the third surface 933, which is the emission surface. Here, the center position of the optical axis Op of the object detection sensor 5 and the center position Cp of the detection target 93 are misaligned in the y direction. For this reason, the second light-receiving unit 53 does not receive the light reflected by the internal reflecting mirror 939, and detection by the second light-receiving unit 53 is "off."

[0065] Next, while the object detection sensor 5 is performing detection, the hand unit 4 is moved toward the y2 side in the y direction (step S32 in FIG. 15). Here, as shown in FIG. 14(b), when the center position of the optical axis Op of the object detection sensor 5 coincides with the center position Cp of the detection target 93 as viewed along the z direction, the second light receiving unit 53 receives light that has not passed through the internal reflecting mirror 939 but is reflected by the internal reflecting mirror 939. At this time, detection by the second light receiving unit 53 is turned "on," and the amount of light received (light intensity) of the second light receiving unit 53 is maximized (second state). This position of the hand unit 4 is recorded in the memory unit 62 as the second position (step S33 in FIG. 15).

[0066] The position of the hand unit 4 in the y direction is adjusted based on the movement distance L2 of the hand unit 4 from the first position of the hand unit 4 in the first state shown in Fig. 14(a) to the second position of the hand unit 4 in the second state shown in Fig. 14(b) (step S34 in Fig. 15). Here, the movement distance L2 corresponds to the amount of deviation Δy of the hand unit 4 in the y direction from the detection target 93 from the first state to the second state.

[0067] Next, the operation of this embodiment will be described.

[0068] According to this embodiment, the teaching work is performed automatically by the teaching process performed by the control device 6. In this teaching process, the steps that the operator must perform manually are very few and simple. Therefore, the time required for the teaching work can be significantly reduced. In addition, since the object detection sensor provided in the hand of a general transport robot is used, there is no need to provide any other equipment to the transport robot.

[0069] The transport robot A1 includes a vertical arm mechanism 1, a first rotating member 2, and a horizontal arm mechanism 3. An object detection sensor 5 is provided on a hand unit 4 supported by the horizontal arm mechanism 3. A detection target 93 is detected by the object detection sensor 5 while the hand unit 4 is moving, and the position of the hand unit 4 is taught by a control device 6 using the detection result. The detection target 93 is made of an optical component that splits incident light, and has a first surface 931 facing the y1 side in the y direction, a second surface 932 facing the y2 side in the y direction, and a third surface 933 facing the x1 side in the x direction. The object detection sensor 5 includes a light-projecting unit 51, and a first light-receiving unit 52 and a second light-receiving unit 53 for receiving light from the light-projecting unit 51. Light emitted from the light-emitting unit 51 enters through the first surface 931, passes through the inside of the detection target 93, and emits transmitted light from the second surface 932 and reflected light from the third surface 933. The first light-receiving unit 52 can receive the transmitted light emitted from the second surface 932, and the second light-receiving unit 53 can receive the reflected light emitted from the third surface 933. The control device 6 moves the hand unit 4 in the y direction from a first state in which the first light-receiving unit 52 receives the transmitted light to a second state in which the amount of light received by the second light-receiving unit 53 is maximized. The control device 6 adjusts the position of the hand unit 4 in the y direction based on the movement distance L2 of the hand unit 4 from the first state to the second state. With this configuration, the hand unit 4 can be adjusted in the y direction by moving the hand unit 4 in the y direction while detecting the detection target 93. Therefore, the adjustment of the hand unit 4 in the y direction can be performed efficiently without performing complex multi-stage processing.

[0070] The control device 6 rotates the hand unit 4 about the central axis Cx extending in the x direction from a third state in which light from the light-projecting unit 51 passes through the first surface 931 and the second surface 932, and also rotates the hand unit 4 about a vertical axis Cz extending in the z direction perpendicular to the central axis Cx. Based on the rotation angle αp of the hand unit 4 about the central axis Cx and the rotation angle βp of the hand unit 4 about the vertical axis Cz from the third state to a fourth state in which the amount of light received (light intensity) of the first light-receiving unit 52 is at its maximum, the control device 6 adjusts the angle of the hand unit 4 about the central axis Cx and the angle of the hand unit 4 about the vertical axis Cz. With this configuration, the detection target 93 is detected while the hand unit 4 is rotated appropriately about the central axis Cx along the x direction and about the vertical axis Cz along the z direction, and the detection results are used to efficiently adjust the x-axis rotation direction and the z-axis rotation direction of the hand unit 4.

[0071] The transfer robot teaching system and transfer robot teaching method according to the present disclosure are not limited to the above-described embodiment. The specific configurations of the transfer robot teaching system and transfer robot teaching method according to the present disclosure can be freely designed in various ways. In the above-described embodiment, the teaching operation was performed using the detection target 93 arranged on the cassette 8 side, but the present disclosure is not limited to this. For example, the teaching operation may be performed using the detection target 93 arranged on the load lock chamber side. [Explanation of symbols]

[0072] A1: transport robot, 1: vertical arm mechanism, 2: first rotating member, 3: horizontal arm mechanism, 4, 4A, 4B: hand unit, 5: object detection sensor, 51: light projecting unit, 52: first light receiving unit, 53: second light receiving unit, 6: control device, 93: detection target, 931: first surface, 932: second surface, 933: third surface, 934: fourth surface, 935: fifth surface, 936: sixth surface, Ox: first rotating axis, Cx: central axis, Cz: vertical axis

Claims

1. a vertical articulated vertical arm mechanism that moves along an in-plane direction perpendicular to a horizontal first direction; a first rotation member supported by the vertical arm mechanism so as to be rotatable about a first rotation axis extending in the first direction; a horizontal multi-joint horizontal arm mechanism supported by the first rotating member; a hand unit supported by the horizontal arm mechanism and provided with an object detection sensor; a control device that detects a detection target with the object detection sensor while moving the hand unit, and teaches a position of the hand unit using the detection result, the detection target is made of an optical component that splits incident light, and has a first surface facing one side of a horizontal second direction perpendicular to the first direction, a second surface facing the other side of the second direction and parallel to the first surface, and a third surface facing one side of the first direction; the object detection sensor includes a light-projecting unit, and a first light-receiving unit and a second light-receiving unit for receiving light from the light-projecting unit; Light from the light projecting unit is incident on the first surface and passes through the detection target, and transmitted light is emitted from the second surface and reflected light is emitted from the third surface, the first light receiving unit is capable of receiving the transmitted light emitted from the second surface, the second light receiving unit is capable of receiving the reflected light emitted from the third surface, The control device moves the hand unit in the second direction from a first state in which the first light receiving unit receives the transmitted light, and adjusts the position of the hand unit in the second direction based on the movement distance of the hand unit to a second state in which the amount of light received by the second light receiving unit is maximum.

2. 2. The teaching system for a transport robot according to claim 1, wherein the control device rotates the hand unit about a central axis extending in the first direction and rotates the hand unit about a vertical axis extending in a third direction perpendicular to the central axis and perpendicular to the first and second directions from a third state in which light from the light projecting unit passes through the first surface and the second surface, to a fourth state in which the amount of light received by the first light receiving unit is maximized, and adjusts the angle of the hand unit about the central axis and the angle of the hand unit about the vertical axis based on the rotation angle of the hand unit about the central axis and the rotation angle of the hand unit about the vertical axis.

3. 3. The teaching system for a transfer robot according to claim 2, wherein the central axis and the vertical axis each intersect with an optical axis connecting the light projecting unit and the first light receiving unit at a center position of the optical axis.

4. a vertical articulated vertical arm mechanism that moves along an in-plane direction perpendicular to a horizontal first direction; a first rotation member supported by the vertical arm mechanism so as to be rotatable about a first rotation axis extending in the first direction; a horizontal multi-joint horizontal arm mechanism supported by the first rotating member; a hand unit supported by the horizontal arm mechanism and provided with an object detection sensor, wherein a detection target is detected by the object detection sensor while the hand unit is moved, and a position of the hand unit is taught using the detection result, the detection target is made of an optical component that splits incident light, and has a first surface facing one side of a horizontal second direction perpendicular to the first direction, a second surface facing the other side of the second direction and parallel to the first surface, and a third surface facing one side of the first direction; the object detection sensor includes a light-projecting unit, and a first light-receiving unit and a second light-receiving unit for receiving light from the light-projecting unit; Light from the light projecting unit is incident on the first surface and passes through the detection target, and transmitted light is emitted from the second surface and reflected light is emitted from the third surface, recording a position of the hand unit in a first state in which the first light receiving unit receives the transmitted light as a first position; moving the hand unit in the second direction and recording a position of the hand unit in a second state where the amount of light received by the second light receiving unit is maximum as a second position; and adjusting the position of the hand unit in the second direction based on the movement distance of the hand unit from the first position to the second position.

5. are respectively performed before the step of adjusting the position of the hand unit in the second direction, recording a position of the hand unit in a third state in which light from the light projecting unit passes through the first surface and the second surface as a third position; rotating the hand unit from the third position around a central axis extending in the first direction and around a vertical axis extending in a third direction perpendicular to the central axis and perpendicular to the first and second directions, and recording the position of the hand unit in a fourth state where the amount of light received by the first light receiving unit is maximum as a fourth position; 5. The method for teaching a transport robot according to claim 4, further comprising the step of adjusting an angle of the hand unit about the central axis and an angle of the hand unit about the vertical axis based on the third position and the fourth position.

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