Jig

Abstract

To provide a jig capable of holding two or more kinds of articles.SOLUTION: A jig 30 for holding an article to be deposited includes: a first holding part 33 for holding a first article 50 having an open hole 51 and including a rod 331 inserted into the open hole 51; and a second holding part 35 for holding a second article having a shape different from that of the first article 50 and including an upper lid 351 mounted on the upper part of the first holding part 33 and a magnet 352 provided in the upper lid 351.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a jig for holding an article on which a film is to be formed. [Background technology]

[0002] Patent Document 1 discloses an example of a jig for holding an article on which a film is to be formed. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2010 / 050374 Summary of the Invention [Problem to be solved by the invention]

[0004] In a film forming apparatus using the above-described jig, it is desirable to simultaneously form films on a plurality of types of articles having different shapes. [Means for solving the problem]

[0005] A jig for solving the above problem is a jig for holding articles to be subjected to film formation, the jig including: a holding part for holding a first article having a through hole formed therein, the first holding part having a rod that can be inserted through the through hole; and a second holding part for holding a second article having a shape different from that of the first article, the second holding part having an upper lid mounted on top of the first holding part and a magnet provided on the upper lid. [Effects of the Invention]

[0006] The jig has the advantage of being able to hold a variety of items. [Brief explanation of the drawings]

[0007] [Figure 1]FIG. 1 is a perspective view showing a jig according to an embodiment and a turntable provided in a film forming apparatus. [Figure 2] FIG. 2 is a perspective view showing the jig and the tower. [Figure 3] In FIG. 3, (A) to (C) are plan views showing the jig. DETAILED DESCRIPTION OF THE INVENTION

[0008] An embodiment of a jig that can be used in a film forming apparatus will be described below with reference to FIGS. FIG. 1 shows a turntable 10, a tower 20, and a jig 30 of this embodiment, which constitute the film forming apparatus.

[0009] The turntable 10 includes a rotatable disk 11 and a plurality of support rods 12 provided on the disk 11. The plurality of support rods 12 are arranged along the circumferential direction. 1 and 2, the tower 20 is provided with an insertion hole 21 through which the support rod 12 is inserted. The tower 20 is attached to the turntable 10 with the support rod 12 inserted through the insertion hole 21.

[0010] <Jig configuration> 2 and 3, the jig 30 is detachably attached to the tower 20. The jig 30 includes a base portion 31, a first holding portion 33 installed on the top of the base portion 31, and a second holding portion 35 installed on the top of the first holding portion 33. The base portion 31 is attached to the tower 20.

[0011] 3(A) to 3(C) has a three-tiered structure. The first holding section 33 is configured to be able to hold a first article 50 among the articles to be film-formed by the film-forming device. A through-hole 51 is formed in the first article 50.

[0012] The first holding section 33 includes a plurality of pillar members 332 extending in the vertical direction, and a plurality of plate members 333. Each of the plurality of plate members 333 is supported by the plurality of pillar members 332. The plurality of plate members 333 are lined up in the vertical direction. The plurality of plate members 333 each support a plurality of rods 331. These plurality of rods 331 can be inserted through the through holes 51 of the first article 50. Therefore, the first holding section 33 can hold a plurality of first articles 50.

[0013] The second holding unit 35 has an upper cover 351 mounted on top of the first holding unit 33, and a plurality of magnets 352 provided on the upper cover 351. This allows the second holding unit 35 to hold a second item that has a different shape from the first item 50. However, the second item is one that is attracted to the magnets.

[0014] <Actions and Effects of This Embodiment> In the jig 30 of this embodiment, the first holding portion 33 can hold a first article 50. Furthermore, the second holding portion 35 can hold a second article having a shape different from that of the first article 50. Therefore, the jig 30 can hold multiple types of articles.

[0015] This allows the film forming apparatus to simultaneously form films on a plurality of types of articles with different shapes. [Explanation of symbols]

[0016] 30...jig, 33...first holding portion, 331...rod, 35...second holding portion, 351...upper cover, 352...magnet, 50...first item, 51...through hole.

Claims

[Claim 1] A jig for holding an article to be film-formed, a holding portion for holding a first article having a through hole formed therein, the first holding portion having a rod that can be inserted through the through hole; a holder for holding a second item of the items, the second item having a shape different from that of the first item, the second holder having an upper lid mounted on an upper portion of the first holder and a magnet provided on the upper lid; jig.

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