Pressurization device

Abstract

To provide a pressurization device which can control pressure distribution of a pressed surface.SOLUTION: Pressurization devices 1, 1A include first pressurization members 4, 14, second pressurization members 6, 16 arranged in a lower direction than the first pressurization members, intermediate members 5, 15, 5B to 5E which are between the first pressurization members and the second pressurization members and are arranged adjacent to the first pressurization members and the second pressurization members, and planar metal upper press surfaces 71a and 171a. The intermediate members include contact regions R1, R11 which are brought into contact with the second pressurization members, and non-contact regions R2, R12 which are not brought into contact with the second pressurization members. The upper press surfaces include press surface regions R3, R13 which are brought into contact with workpiece. The contact regions are arranged adjacent to the non-contact regions when being viewed from a vertical direction, and are arranged inside a first outer peripheral line Lo1 shown by the outer peripheral line of the press surface regions.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a pressure device. [Background technology]

[0002] A pressure device is used to pressurize a laminate formed by stacking multiple sheet-like substrates (e.g., green sheets for multilayer ceramic capacitors, printed wiring boards, etc.). The pressure device sandwiches the laminate (object to be pressed) from above and below using a pair of pressure units, and presses the laminate with a predetermined pressure. The press surfaces of the molds in the pressure units that come into contact with the laminate are formed in parallel planes so that, when the laminate is pressed, uniform pressure is applied from the press surfaces to the entire upper and lower surfaces of the laminate.

[0003] In such a pressurizing device, when a workpiece is pressed, the pressure applied to the pressed surface of the workpiece is significantly higher at the outer edge and decreases from the outer edge to the center (the outer edge of the pressed surface is subjected to stronger pressure) is a well-known phenomenon (see, for example, Patent Document 1). When this phenomenon occurs, the pressed surface of the workpiece is not uniformly pressurized, which can result in deformation of the workpiece (such that the center of the workpiece bulges more than the outer edge of the workpiece). Possible causes of this phenomenon include deflection of the pressurizing unit (mold) that occurs when pressurizing. This phenomenon is particularly likely to occur when the workpiece size is small compared to the press surface size, as the edge of the workpiece acts like a "fulcrum of a lever." [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 2020-146703 Summary of the Invention [Problem to be solved by the invention]

[0005] To suppress this phenomenon, a design is generally adopted that increases the thickness of the mold that includes the press surface, thereby increasing the rigidity of the mold itself. However, this design results in an increase in the size and weight of the mold. This, in turn, reduces the workability during the manufacture and maintenance of the pressurizing device. Furthermore, machining the mold (especially the press surface) becomes more difficult, limiting the materials that can be used for the mold. Furthermore, even with this design, the tendency for the aforementioned phenomenon remains. Therefore, there is a need for a technology that improves the phenomenon of the outer edge of the pressed surface being strongly compressed, rather than a technology that increases the thickness of the mold. As such, it is difficult to control the pressure distribution on the pressed surface using a mold that includes a flat press surface.

[0006] An object of the present invention is to provide a pressure device capable of controlling the pressure distribution on the surface to be pressed. [Means for solving the problem]

[0007] In one embodiment of the present invention, a pressure application device is a pressure application device that clamps and applies pressure to a workpiece in the vertical direction, and includes an upper pressure application unit arranged above the workpiece, wherein the upper pressure application unit includes a first pressure application member, a second pressure application member arranged below the first pressure application member, an intermediate member arranged between the first and second pressure application members and adjacent to the first and second pressure application members, and a planar upper press surface made of metal that contacts the workpiece when the workpiece is pressed, wherein the intermediate member includes a contact region that contacts the second pressure application member and a non-contact region that does not contact the second pressure application member, and wherein the upper press surface includes a press surface region that contacts the workpiece when the workpiece is pressed, and the contact region is arranged adjacent to the non-contact region when viewed in the vertical direction, and is arranged inside a first outer periphery line indicated by the outer periphery line of the press surface region. [Effects of the Invention]

[0008] According to the present invention, a pressure device capable of controlling the pressure distribution on the surface to be pressed is provided. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a schematic cross-sectional view of a pressure device showing an embodiment of the pressure device according to the present invention. [Figure 2] 2 is a schematic bottom view of an upper pressurizing unit of the pressurizing device of FIG. 1. FIG. [Figure 3] 2 is a schematic diagram showing the positional relationship of each area defined in the pressure device of FIG. 1 as viewed from above and below. FIG. [Figure 4] FIG. 2 is a schematic diagram showing test conditions and test results of an example of the present invention. [Figure 5] FIG. 10 is a pressure distribution diagram showing test results of the above example. [Figure 6] 2A to 2D are schematic bottom views of intermediate members of the pressurizing device of FIG. 1 used in the above examples, where (a) is a schematic bottom view of a first type, (b) is a schematic bottom view of a second type, (c) is a schematic bottom view of a third type, and (d) is a schematic bottom view of a fourth type. [Figure 7] The diagram shows the stress transmission state measured by the simulator, where (a) shows the transmission state when pressure is applied to a workpiece smaller than the area of ​​the placement area, and (b) shows the transmission state when pressure is applied to a workpiece larger than the area of ​​the placement area. [Figure 8] FIG. 10 is a schematic diagram illustrating factors that improve uneven pressure distribution. [Figure 9] FIG. 1 is a schematic cross-sectional view of a pressure device, showing a first modified example of the pressure device according to the present invention. [Figure 10] 10A and 10B are schematic bottom views of intermediate members in the second to fifth modified examples of the pressure device according to the present invention, where (a) shows the intermediate member in the second modified example, (b) shows the intermediate member in the third modified example, (c) shows the intermediate member in the fourth modified example, and (d) shows the intermediate member in the fifth modified example. DETAILED DESCRIPTION OF THE INVENTION

[0010] An embodiment of a pressure device (hereinafter referred to as "the device") according to the present invention will be described below. In the following description, reference will be made to the drawings as appropriate. In the drawings, the same members and elements are designated by the same reference numerals, and duplicate explanations will be omitted. Furthermore, the dimensional proportions of the elements may be exaggerated for the sake of convenience, and are not limited to the proportions shown in the drawings.

[0011] In the following explanations and drawings, unless otherwise specified, when the three mutually orthogonal axes in space are the X-axis, Y-axis, and Z-axis, the X-axis and Y-axis are parallel to the horizontal direction, and the Z-axis is parallel to the up-down direction. The "X-axis direction" is the direction along the X-axis, the "+X-direction" is one direction along the X-axis, and the "-X-direction" is the other direction along the X-axis. The "Y-axis direction" is the direction along the Y-axis, the "+Y-direction" is one direction along the Y-axis, and the "-Y-direction" is the other direction along the Y-axis. The "Z-axis direction" is the direction along the Z-axis and is the up-down direction. The "+Z-direction" is the upward direction, and the "-Z-direction" is the downward direction. The "XY-direction" is the direction along the X-axis and Y-axis directions, and the "XY-plane" is an imaginary plane parallel to the XY-direction (horizontal direction). The "XZ-direction" is the direction along the X-axis and Z-axis directions, and the "XZ-plane" is an imaginary plane parallel to the XZ-direction (vertical direction).

[0012] In the following description, the lower surface is a surface that faces downward and is parallel to the X and Y directions. The upper surface is a surface that faces upward and is parallel to the X and Y directions. In other words, the lower and upper surfaces are flat. The thickness of each member is the length of the member in the vertical direction.

[0013] In a pressurizing device that applies pressure to a workpiece from above and below using a flat press surface, the present invention can improve the phenomenon of the outer edge of the workpiece's pressed surface being strongly pressed by adjusting the stress transmission within each member up to the press surface.Furthermore, the present invention can control the pressure distribution on the workpiece's pressed surface by controlling the stress transmitted to the press surface.

[0014] The "phenomenon of the outer edge of the pressed surface of the workpiece being strongly compressed" refers to the phenomenon in which, when the workpiece is pressed by a flat press surface, the pressure applied to the outer edge of the pressed surface of the workpiece is significantly higher at the outer edge and decreases from the outer edge to the center. This phenomenon will be simply referred to as the "phenomenon of strong compression at the outer edge" hereinafter.

[0015] The "workpiece" is the object (object to be pressed) that is pressed by this device, such as a sheet-like substrate (such as a ceramic green sheet), or a substrate on which electronic components and circuits are mounted. The workpiece has a surface to be pressed. The surface to be pressed is the upper surface that is pressed from above by this device.

[0016] ●Pressure device● ●Configuration of pressure device FIG. 1 is a schematic cross-sectional view of the present device, showing an embodiment of the present device. This figure shows a cross section of the device 1 along the XZ plane, cut at the center in the Y-axis direction (the same as in Figure 9). In this figure, a press surface region R3, which will be described later, is indicated by a thick dashed line.

[0017] This device 1 applies pressure to the workpiece W by sandwiching it in the vertical direction. This device 1 comprises a base member 2, a frame member 3, a first buffer member 4, an intermediate member 5, a second buffer member 6, an upper press plate 7, a loading plate 8, a lower press plate 9, a lifting device 10, and a control device 11. The base member 2, frame member 3, first buffer member 4, intermediate member 5, second buffer member 6, and upper press plate 7 are positioned above the workpiece W and function as an upper pressure unit UP that applies pressure to the workpiece W from above. The loading plate 8 and lower press plate 9 are positioned below the workpiece W and function as a lower pressure unit DP that applies pressure to the workpiece W from below.

[0018] The base member 2 supports the first buffer member 4, the intermediate member 5, the second buffer member 6, and the upper press plate 7 via the frame member 3. The base member 2 is made of, for example, a metal having high rigidity (for example, carbon steel). The base member 2 has a rectangular shape (a square shape in this embodiment) extending along the XY direction when viewed from the top down, and is a rectangular parallelepiped. The base member 2 is supported by the lifting device 10 so as to be movable (liftable) in the top down direction. The base member 2 has a lower surface 2a.

[0019] The frame member 3 houses the first buffer member 4, the intermediate member 5, the second buffer member 6, and a portion of the upper press plate 7. The frame member 3 is made of metal (e.g., stainless steel). The frame member 3 is attached to the lower surface 2a of the base member 2, for example, with a plurality of bolts (not shown; the same applies below). Therefore, the frame member 3 can be easily attached and detached from the base member 2 by attaching and detaching the bolts. The frame member 3 includes a main body portion 31 and an inner flange portion 32.

[0020] The main body 31 has a rectangular (square in this embodiment) cylindrical (rectangular cylindrical) shape extending along the X and Y directions when viewed from above and below. The inner peripheral surface 31a of the main body 31 faces the X and Y directions. In the horizontal direction, the main body 31 is disposed so as to surround the entire periphery of the first buffer member 4, the intermediate member 5, the second buffer member 6, and the upper press plate 7. The lower end of the inner peripheral surface 31a protrudes evenly inward along the entire periphery, forming an inner flange 32. That is, in the horizontal direction, the inner flange 32 protrudes inward from the main body 31 and is formed integrally with the main body 31.

[0021] The inner flange portion 32 supports the first buffer member 4, the intermediate member 5, the second buffer member 6, and the upper press plate 7, and restricts downward movement of the first buffer member 4, the intermediate member 5, the second buffer member 6, and the upper press plate 7. When viewed from the vertical direction, the inner flange portion 32 has a frame-like (rectangular frame-like) shape. The inner flange portion 32 has an upper surface 32a and an inner peripheral surface 32b. The inner peripheral surface 32b is a surface parallel to the vertical direction and faces the XY direction.

[0022] In the present invention, the shape of the inner flange portion 32 is not limited to a rectangular frame shape. That is, for example, the inner flange portion 32 may protrude only in the X-axis direction or the Y-axis direction from the main body portion 31. Also, for example, each of a plurality of rod-shaped portions protruding at equal distances from the main body portion 31 in the X-axis direction and / or the Y-axis direction may function as the inner flange portion 32.

[0023] The first buffer member 4 diffuses and equalizes the pressure applied to the workpiece W when it is pressed. The first buffer member 4 also suppresses axial misalignment (horizontal movement) of the intermediate member 5 when it is pressed. The first buffer member 4 is made of an elastic material (e.g., a known press buffer material) that is compressed vertically when the workpiece W is pressed and can restore its original state when the pressing of the workpiece W is completed. The first buffer member 4 has a rectangular (square in this embodiment) sheet-like shape extending along the XY direction when viewed from the top and bottom. The first buffer member 4 is housed in the frame member 3. The first buffer member 4 is disposed adjacent to the base member 2 below the base member 2. The first buffer member 4 has a lower surface 4a and an upper surface 4b. The first buffer member 4 is an example of a first pressing member according to the present invention.

[0024] When the workpiece W is pressed, the intermediate member 5 concentrates the pressure applied to the intermediate member 5, thereby controlling the pressure distribution on the pressed surface Wa. The intermediate member 5 is made of, for example, a metal having high rigidity (e.g., carbon steel). The shape of the intermediate member 5 is a rectangular plate (square in this embodiment) extending along the XY direction when viewed from the top and bottom. The intermediate member 5 is housed in the frame member 3. The intermediate member 5 is disposed adjacent to the first buffer member 4 below the first buffer member 4. The intermediate member 5 has a lower surface 5a, an upper surface 5b, a non-contact surface 5c, and a contact surface 5d.

[0025] The outer edge of the lower surface 5a is recessed upward along the entire periphery, forming a non-contact surface 5c. The central portion of the lower surface 5a, excluding the non-contact surface 5c, forms a contact surface 5d. In the vertical direction, the non-contact surface 5c is disposed higher than the contact surface 5d. The shape of the non-contact surface 5c is a rectangular shape (a square shape in this embodiment) extending along the XY directions when viewed in the vertical direction, and is a frame shape (rectangular frame shape). The shape of the contact surface 5d is a rectangular shape (a square shape in this embodiment) extending along the XY directions when viewed in the vertical direction. The non-contact surface 5c and the contact surface 5d face downward and are surfaces parallel to the XY directions.

[0026] The second buffer member 6 diffuses and equalizes the pressure applied to the second buffer member 6 when the workpiece W is pressurized. The second buffer member 6 also suppresses axial misalignment of the intermediate member 5 when the workpiece W is pressurized. The second buffer member 6 is, for example, a known press buffer material. In this embodiment, the shape of the second buffer member 6 is the same as the shape of the first buffer member 4. The second buffer member 6 has a lower surface 6a and an upper surface 6b. The second buffer member 6 is housed in the frame member 3. The second buffer member 6 is disposed adjacent to the intermediate member 5 below the intermediate member 5. The second buffer member 6 is an example of a second pressure member in the present invention.

[0027] When the workpiece W is pressed, the upper press plate 7 presses the workpiece W downward. The upper press plate 7 is made of, for example, a metal having high rigidity (e.g., carbon steel). The upper press plate 7 has an inverted hat shape when viewed from the side. The upper press plate 7 has an upper surface 7a, a main body portion 71, and an outer flange portion 72. The upper press plate 7 is an example of a third pressing member in the present invention.

[0028] The main body 71 has a rectangular (square in this embodiment) plate-like shape extending along the XY direction when viewed from the top-bottom direction. The main body 71 has a bottom surface 71a and an outer peripheral surface 71b. The bottom surface 71a is disposed opposite the workpiece W and is the surface that abuts against the pressed surface Wa of the workpiece W when the workpiece W is pressed. In other words, when viewed from the top-bottom direction, a portion of the bottom surface 71a is the region that abuts against the pressed surface Wa (hereinafter referred to as the "press surface region R3"). In other words, the bottom surface 71a has the press surface region R3. The bottom surface 71a is an example of an upper press surface in the present invention.

[0029] The upper half of the outer peripheral surface 71b protrudes outward evenly around the entire circumference, forming an outer flange portion 72. That is, in the horizontal direction, the outer flange portion 72 protrudes outward from the main body portion 71 and is formed integrally with the main body portion 71. Therefore, the upper surface 7a of the upper press plate 7 is formed by the upper surfaces of the main body portion 71 and the outer flange portion 72. The outer flange portion 72 has a frame-like (rectangular frame-like) shape. The outer flange portion 72 has a lower surface 72a.

[0030] It should be noted that, in the present invention, the shape of the outer flange portion 72 is not limited to a rectangular frame shape. That is, for example, the outer flange portion 72 may protrude only in the X-axis direction or the Y-axis direction from the outer peripheral surface 71c. That is, the outer flange portion 72 may protrude only from the outer peripheral surface 71b parallel to the X-axis direction or the Y-axis direction. Furthermore, for example, each of multiple rod-shaped portions protruding at equal distances from the main body portion 71 in the X-axis direction and / or the Y-axis direction may function as the outer flange portion 72.

[0031] The upper press plate 7 is housed in the frame member 3, except for the lower part of the main body portion 71. That is, in the vertical direction, the lower part (lower surface 71a) of the main body portion 71 is located lower than the frame member 3. The upper press plate 7 is disposed adjacent to and below the second buffer member 6. The lower surface 72a of the outer flange portion 72 abuts against the upper surface 32a of the inner flange portion 32. As a result, the inner flange portion 32 restricts the downward movement of the first buffer member 4, the intermediate member 5, the second buffer member 6, and the upper press plate 7, and supports them.

[0032] The upper surface 4b of the first buffer member 4 abuts against the lower surface 2a of the base member 2, and the lower surface 4a abuts against the upper surface 5b of the intermediate member 5. The abutment surface 5d of the intermediate member 5 abuts against a portion of the upper surface 6b of the second buffer member 6. The non-abutment surface 5c is disposed above the upper surface 6b and faces the upper surface 6b. In other words, the non-abutment surface 5c does not abut against the upper surface 6b. Therefore, in a vertical view, the abutment surface 5d of the intermediate member 5 forms a region in abutment with the second buffer member 6 (hereinafter referred to as the "abutment region R1"), and the non-abutment surface 5c forms a region not in abutment with the second buffer member 6 (hereinafter referred to as the "non-abutment region R2"). In other words, in a vertical view, the abutment region R1 is the region where the abutment surface 5d is disposed, and the non-abutment region R2 is the region where the non-abutment surface 5c is disposed. The lower surface 6 a of the second buffer member 6 abuts against the upper surface 7 a of the upper press plate 7 .

[0033] FIG. 2 is a schematic bottom view of the upper pressure unit UP. For ease of explanation, in this figure, the inner circumferential surface 31a, the first buffer member 4, the intermediate member 5, and the second buffer member 6 are indicated by thick two-dot chain lines, and the workpiece W and the press surface region R3 are indicated by thin two-dot chain lines. In the following explanation, Figure 1 will be referred to as well as Figure 2 as appropriate.

[0034] The relationship between the lengths of the components of the upper pressurizing unit UP in the X-axis direction and the Y-axis direction, i.e., the XY direction, will now be described. The length L2 of the base member 2 is greater than the length L3 of the frame member 3. The distance L31 between the inner circumferential surfaces 31a of the main body portions 31 is the same as (slightly greater than) the length L4 of the first buffer member 4, the length L5 of the intermediate member 5, the length L6 of the second buffer member 6, and the length L72 of the outer flange portion 72 of the upper press plate 7. The length L4 of the first buffer member 4 is the same as the length L5 of the intermediate member 5, the length L6 of the second buffer member 6, and the length L72 of the outer flange portion 72 of the upper press plate 7. The length L71 of the main body portions 71 (i.e., the lower surfaces 71a) is smaller than the distance L32 between the inner circumferential surfaces 32b of the inner flange portions 32.

[0035] The length Lw of the pressed surface Wa of the workpiece W is smaller than the length L71 of the lower surface 71a. That is, the length LR3 of the press surface region R3 is smaller than the length L71 of the lower surface 71a. In other words, the workpiece size is smaller than the upper press surface size. The length L51 of the contact surface 5d of the intermediate member 5 is smaller than the length L71 of the lower surface 71a and the length Lw of the pressed surface Wa. That is, the length LR1 of the contact region R1 is smaller than the length LR3 of the press surface region R3.

[0036] FIG. 3 is a schematic diagram showing the positional relationship of each area defined in the device 1 when viewed from above and below. For ease of explanation, in this figure, the intermediate member 5 is shown by a thick solid line, the non-contact region R2 (non-contact surface 5c) is shown by a gray region, the lower surface 71a is shown by a thin two-dot chain line, and the press surface region R3 is shown by a thick two-dot chain line. In the following description, Figures 1 and 2 will be referred to together with Figure 3 as appropriate.

[0037] When viewed in the vertical direction, the contact region R1 is located inside a first outer periphery line Lo1, which is the outer periphery line of the press surface region R3. When viewed in the vertical direction, the contact region R1 is located adjacent to the non-contact region R2 so that the contact region R1 is completely surrounded by the non-contact region R2. In other words, when viewed in the vertical direction, the first outer periphery line Lo1 does not overlap with the contact region R1, but does overlap with the non-contact region R2.

[0038] In this embodiment, the intermediate member 5 has one contact surface 5d. When viewed from the top-bottom direction, the region where the contact surface 5d is arranged (hereinafter referred to as the "arrangement region Rx") is limited within the range of the press surface region R3 (i.e., the region defined by the first outer periphery line Lo1). In other words, the second outer periphery line Lo2 indicated by the outer periphery line of the arrangement region Rx is arranged more inward than the first outer periphery line Lo1 and does not overlap with the first outer periphery line Lo1. When viewed from the top-bottom direction, the second outer periphery line Lo2 has the same shape as the first outer periphery line Lo1 (a square shape in this embodiment) and is a similar shape.

[0039] In the following description, reference will be made primarily to FIG. The mounting plate 8 is a member on which the workpiece W is placed. The mounting plate 8 is made of, for example, a metal (e.g., a copper alloy) having high thermal conductivity. The mounting plate 8 has a square plate shape extending along the XY direction when viewed from above and below. The mounting plate 8 is placed on the lower press plate 9. The mounting plate 8 has a mounting surface 8a, which is its upper surface.

[0040] When the workpiece W is pressed, the lower press plate 9 presses the workpiece W upward in response to the pressure from the upper press unit UP. The lower press plate 9 is made of, for example, a metal having high rigidity (e.g., carbon steel). The lower press plate 9 has a square plate shape extending along the X and Y directions when viewed from above and below.

[0041] The lifting device 10 lifts and lowers the base member 2. The lifting device 10 is, for example, a known hydraulic cylinder.

[0042] The control device 11 controls the overall operation of the device 1 .

[0043] In the device 1 configured as described above, the frame member 3 can be attached to and detached from the base member 2 by attaching and detaching bolts. Therefore, by removing the frame member 3, the first buffer member 4, the intermediate member 5, and the second buffer member 6 can be easily replaced.

[0044] In the present invention, the shapes of the base member 2, frame member 3, first buffer member 4, intermediate member 5, second buffer member 6, upper press plate 7, loading plate 8, and lower press plate 9 when viewed from the top to bottom are not limited to square shapes.

[0045] ●Operation of pressure device Next, the operation of the device 1 will be described below. In the following description, reference will be made to FIGS.

[0046] First, the workpiece W is placed on the placement surface 8 a of the placement plate 8 .

[0047] Next, the control device 11 controls the operation of the lifting device 10 to lower the upper pressurizing unit UP to a predetermined position. At this time, the lower surface 71a of the upper press plate 7 is in contact with the workpiece W. That is, the press surface region R3 is in contact with the surface to be pressed Wa.

[0048] Next, the control device 11 controls the operation of the lifting device 10 to further lower the upper pressurizing unit UP, thereby pressing the workpiece W between the upper pressurizing unit UP and the lower pressurizing unit DP. At this time, as described below, the pressure applied from the first buffer member 4 to the intermediate member 5 is diffused and uniformed. The pressure applied from the intermediate member 5 to the second buffer member 6 is concentrated on the portion abutting the contact surface 5d. The pressure applied from the second buffer member 6 to the upper press plate 7 is diffused and uniformed. The pressure applied from the upper press plate 7 to the workpiece W is concentrated on the portion abutting the press surface region R3 (the pressed surface Wa). As a result of the pressure applied within each member in this way, the edge portion of the workpiece W does not function as a "fulcrum of a lever," and the phenomenon of strong pressure on the outer edge does not occur. As a result, the pressure distribution on the pressed surface Wa is uniformed.

[0049] Furthermore, when the workpiece W is pressed, a pressure of several MPa to several tens of MPa is applied to the intermediate member 5. Generally, when two flat metal surfaces are in contact with each other and pressed, if the axis of pressure on the pressing side is misaligned with the normal direction of the metal surface on the pressed side (so-called axial misalignment), the pressed side will not be pressed evenly. Axial misalignment can occur due to various factors, even if each component of the present device 1 is precisely manufactured. Therefore, if the intermediate member 5 directly contacts the base member 2 and the upper press plate 7, axial misalignment may occur between the intermediate member 5 and the base member 2 and the upper press plate 7. In this embodiment, the first buffer member 4 is disposed between the base member 2 and the intermediate member 5, and the second buffer member 6 is disposed between the intermediate member 5 and the upper press plate 7. As described above, the first buffer member 4 and the second buffer member 6 are made of an elastic material and act to align the axes of the two members. Therefore, axial misalignment of the intermediate member 5 relative to the base member 2 and the upper press plate 7 is suppressed.

[0050] ●Example● Next, the test results of a pressure test using an existing pressure device (testing device) incorporating the first buffer member 4, intermediate member 5, and second buffer member 6 will be described as examples and reference examples of the present invention. In the following description of the examples, a "Prescale (registered trademark: hereinafter simply referred to as "scale")" manufactured by Fujifilm Corporation was used to measure the pressure. The pressure was 5 MPa. For the sake of convenience, the first buffer member 4 was not used except for some reference examples. In each reference example and some comparative examples, only the scale was pressurized. Under all test conditions, the upper press plate 7 had a rectangular parallelepiped shape measuring 160 mm x 164 mm x 15 mm.

[0051] In the following description of the examples, reference will be made as appropriate to Figures 1 to 3. In the following description, elements having functions common to those of the previously described embodiment (hereinafter referred to as "first embodiment") are given the same names and symbols for the sake of convenience.

[0052] FIG. 4 is a schematic diagram showing the test conditions and test results of an example of the present invention. FIG. 5 is a pressure distribution diagram showing the test results. FIG. 6 is a schematic bottom view of the intermediate member 5 used in each example, where (a) is a schematic bottom view of the first type, (b) is a schematic bottom view of the second type, (c) is a schematic bottom view of the third type, and (d) is a schematic bottom view of the fourth type. In Fig. 5, the shade of color on each scale indicates the magnitude of pressure, with the darker the color, the greater the pressure. In Fig. 6, the thick two-dot chain line indicates the second outer periphery Lo2. The gray areas indicate non-contact surfaces 5c, 5c1, and 5c2, which will be described later.

[0053] (Test conditions) First, the test conditions shown in Figure 4 will be explained. "Type" indicates the type of intermediate member 5. Details of each type are shown in Figure 6 and will be described later. In the "First Cushioning Member" and "Second Cushioning Member" sections, "-" indicates unused material, "A" indicates Shibata Industrial Co., Ltd.'s "Accordion Sheet: EPT1.0," and "B" indicates Sanfuku Industrial Co., Ltd.'s "Hot Press Cushioning Member: MF-20S." In the "Other" section, "*1" indicates that PGX insulation material was used between the second cushioning member 6 and the upper press plate 7. "*2" indicates that 30 mm workpieces were evenly arranged in a 3-row x 3-column pattern within the 110 mm x 110 mm square first outer perimeter line Lo1. The workpieces were spaced 5 mm apart. "*3" indicates that an upper press plate 7 with a thickness T1 of 10 mm was used. The "area ratio" indicates the ratio (Ax / A3) of the area "Ax" of the placement area Rx to the area "A3" of the press surface area R3. The shape of the workpiece W is square. In the "Results" section, "◎" indicates that no strong pressure phenomenon occurs at the outer edge and that the pressure distribution on the pressed surface Wa is controlled to be relatively uniform. "◯" indicates that the pressure uniformity is inferior to that of ◎, but that no strong pressure phenomenon occurs at the outer edge and that the pressure distribution on the pressed surface Wa is controlled to correspond to the shape of the intermediate part 5. "△" indicates that a tendency for strong pressure phenomenon at the outer edge remains, but that this phenomenon is suppressed in the pressure distribution on the pressed surface Wa. "X" indicates that strong pressure phenomenon occurs at the outer edge. In other words, "X" indicates that the pressure distribution on the pressed surface Wa can be controlled to decrease from the outer edge to the center.

[0054] (Type 1) The first type intermediate member 5 has one non-contact surface 5c and one contact surface 5d. When viewed from the top-bottom direction, the contact surface 5d has a square shape measuring 115 mm x 115 mm. When viewed from the top-bottom direction, the non-contact surface 5c has a rectangular frame shape measuring 160 mm x 164 mm that surrounds the entire periphery of the contact surface 5d. The thickness of the contact surface 5d is 5 mm. Note that, when viewed from the top-bottom direction, the shape of the contact surface 5d is a square shape measuring 95 mm x 95 mm only in Example 17.

[0055] (Type 2) The second type intermediate member 5 has two non-contact surfaces 5c1 and 5c2 and one contact surface 5d. When viewed from the top-bottom direction, the non-contact surface 5c1 has a square shape of 45 mm x 45 mm. When viewed from the top-bottom direction, the contact surface 5d has a rectangular frame shape of 95 mm x 95 mm that surrounds the entire periphery of the non-contact surface 5c1. The non-contact surface 5c2 has a rectangular frame shape of 160 mm x 164 mm that surrounds the entire periphery of the contact surface 5d. The thickness of the contact surface 5d is 5 mm.

[0056] (Third Type) The third type intermediate member 5 has one non-contact surface 5c and nine contact surfaces 5d1 to 5d9. When viewed in the vertical direction, the contact surfaces 5d1 to 5d9 have a square shape of 25 mm x 25 mm. The contact surfaces 5d1 to 5d9 are evenly arranged in a 3-row x 3-column pattern within the second outer periphery line Lo2, which has a square shape of 95 mm x 95 mm. The contact surfaces 5d1 to 5d9 are spaced 10 mm apart. The non-contact surface 5c has a 10 mm-wide grid-like portion arranged inside the second outer periphery line Lo2 and a rectangular frame-like portion arranged outside the second outer periphery line Lo2. In other words, when viewed in the vertical direction, the non-contact surface 5c has a grid-like shape. The contact surfaces 5d1 to 5d9 have a thickness of 5 mm.

[0057] (Type 4) The fourth type intermediate member 5 has one non-contact surface 5c and four contact surfaces 5d1 to 5d4. When viewed in the vertical direction, the contact surfaces 5d1 to 5d4 have a square shape of 45 mm x 45 mm. The contact surfaces 5d1 to 5d4 are evenly arranged in a 2-row x 2-column pattern within the second outer periphery line Lo2, which has a square shape of 115 mm x 115 mm. The contact surfaces 5d1 to 5d4 are spaced 25 mm apart. The non-contact surface 5c has a 15 mm-wide grid-like portion arranged inside the second outer periphery line Lo2 and a rectangular frame-like portion arranged outside the second outer periphery line Lo2. In other words, when viewed in the vertical direction, the non-contact surface 5c has a grid-like shape. The contact surfaces 5d1 to 5d4 have a thickness of 5 mm.

[0058] Examples 1 to 5 In Examples 1 to 5, a first-type intermediate member 5 was used, and the workpiece sizes were set to three: 150 mm, 130 mm, and 120 mm. The area ratios were 0.59, 0.78, and 0.92. In Example 4, a heat insulating material was used. In Examples 1 to 4, a 1 mm-thick "A" second buffer member 6 was used, while in Example 5, a 2 mm-thick "A" second buffer member 6 was used. Under all conditions, the strong pressure phenomenon at the outer edge did not occur. In particular, in Examples 2, 3, and 5, the pressure distribution on the pressed surface Wa was controlled to be uniform. As the workpiece size increased, the pressure applied to the workpiece W tended to increase more at the center than at the outer edge. This indicates that the pressure distribution on the pressed surface Wa can be controlled by adjusting the area ratio. In Example 4, a slight bias in the pressure distribution occurred. This is presumably due to the heat insulating material increasing the distance from the contact surface 5d to the lower surface 71a. It is also assumed that the influence of the arrangement of each member and the workpiece W during the test (the influence of axial misalignment) is also a factor in this slight deviation. This influence can be alleviated by increasing the thickness of the second buffer member 6, as in Example 5.

[0059] Examples 6 and 7 In Examples 6 and 7, a second-type intermediate member 5 was used, and the workpiece size was set to 120 mm. The area ratio was 0.63. In Example 6, "A" was used for the second buffer member 6, and in Example 7, "B" was used for the second buffer member 6. Under all conditions, the strong pressure phenomenon at the outer edge did not occur, and the pressure distribution on the pressed surface Wa was controlled to be uniform. In Example 6, the pressure applied to the workpiece W was greater at the outer edge than at the center. In Example 7, compared to Example 6, the pressure applied to the workpiece W was greater at the center than at the outer edge. This indicates that changing the configuration of the second buffer member 6 changes the effect of the intermediate member 5 on the pressure distribution on the pressed surface Wa. That is, "A" tends to distribute stress more uniformly than "B," while "B" tends to concentrate stress more centrally than "A." Thus, the configuration of the second buffer member 6 can be a factor that affects the control of the pressure distribution on the pressed surface Wa by the intermediate member 5.

[0060] Examples 8 to 13 In Examples 8 to 13, a third-type intermediate member 5 was used, and the workpiece sizes were set to four types: 150 mm, 130 mm, 120 mm, and 100 mm. The area ratios were 0.40, 0.53, 0.63, and 0.90, respectively. In Examples 8 to 11, a 1 mm thick "A" second buffer member 6 was used. In Example 12, a 2 mm thick "A" second buffer member 6 was used. In Example 13, a 2 mm thick "B" second buffer member 6 was used. In Examples 8 to 10, 12, and 13, the strong pressure phenomenon at the outer edge did not occur. In particular, in Examples 9, 10, and 12, the pressure distribution on the pressed surface Wa was controlled to be uniform. In Example 11, a slight tendency for this phenomenon occurred, but the center of the workpiece W was also pressurized, thereby improving this phenomenon. Comparing Examples 10, 12, and 13, in Example 13, the pressure applied to the workpiece W was greater at the center than at the outer edge. The same was true for Example 8. This result shows that the pressure distribution on the pressed surface Wa can be controlled to a distribution that depends on the shape of the contact area R1 (contact surface 5d) by adjusting the material of the second buffer member 6 and the size of the contact area R1.

[0061] Examples 14 and 15 In Examples 15 and 16, a fourth-type intermediate member 5 was used, the workpiece size was set to 120 mm, and the thickness T1 of the upper press plate 7 was set to two values: 15 mm and 10 mm. In Example 15, the strong compression phenomenon at the outer edge did not occur, and the pressure distribution on the pressed surface Wa was controlled to be uniform. On the other hand, in Example 16, a pressure distribution was obtained in which pressure was concentrated at four locations centered on the contact region R1 (contact surfaces 5d1-5d4) (i.e., a pressure distribution dependent on the shape of the intermediate member 5). This result indicates that the degree of stress diffusion within the upper press plate 7 depends on the thickness T1. Therefore, in Example 16, where the thickness T1 is smaller, a pressure distribution dependent on the shape of the intermediate member 5 was obtained more significantly than in Example 15. In other words, this result indicates that the pressure distribution can be controlled based on the thickness T1.

[0062] Examples 16 and 17 In Example 16, a first type (95 mm x 95 mm) intermediate member 5 is used, and in Example 17, a third type intermediate member 5 is used. In Examples 16 and 17, nine workpieces W with a workpiece size of 30 mm are simultaneously pressed. In Example 16, when viewed from the top and bottom, one contact surface 5d (contact region R1) corresponds to each workpiece W (one contact surface 5d is arranged above each workpiece W). The area ratios are "0.75 (95 mm x 95 mm / 110 mm x 110 mm)" and "0.69 (30 mm x 30 mm)," respectively. In Example 16, the workpiece size of each workpiece W is smaller than the contact surface 5d, but no strong pressure phenomenon occurs at the outer edge of each workpiece W. This result shows that nine workpieces W can be pressed as one workpiece W (workpiece W with a workpiece size of 110 mm), that the area of ​​the lower surface 71a including the area where each workpiece W abuts functions as the press surface area R3, and that the present invention can be implemented even when multiple workpieces W are pressed at once. However, in Example 16, the workpieces W arranged on the outer edge of the press surface area R3 (particularly the portion near the outer edge of the press surface area R3) were pressed somewhat strongly. On the other hand, in Example 17, even when multiple workpieces W were pressed simultaneously, all of the workpieces W were pressed evenly. These results show that the geometric shape of the intermediate part 5 also has a local effect, that the individual areas of the lower surface 71a that come into contact with each work W (work size 30 mm) function as press surface areas R3, that the individual areas where each contact surface 5d1 to 5d9 is located function as placement areas Rx when viewed from the top to bottom, and that because the individual area ratios are less than "1", the pressure distribution on the press surface Wa of each work W can be controlled to be uniform.

[0063] ●Reference examples 1~7 In Reference Examples 1 to 4, a first type of intermediate member 5 was used, in Reference Examples 5 and 6, a second type of intermediate member 5 was used, and in Reference Example 7, a third type of intermediate member 5 was used. As described above, in Reference Examples 1 to 7, only the scale was pressurized. In Reference Example 1, the first buffer member 4 and the second buffer member 6 were not used. In Reference Example 2, a 1 mm thick "A" was used for the first buffer member 4, and a 1 mm thick "A" was used for the second buffer member 6. In Reference Example 4, a 1 mm thick "A" was used for the first buffer member 4 and the second buffer member 6. In Reference Example 6, the first buffer member 4 was not used, and a 2 mm thick "B" was used for the second buffer member 6. Under all conditions, the strong compression phenomenon at the outer edge did not occur, and a pressure distribution dependent on the shape of the intermediate member 5 was obtained for each condition. In Reference Example 1, a pressure distribution was obtained in which the pressure near the corners of the contact region R1 (contact surface 5d) was high when viewed in the vertical direction. In Reference Example 2, a pressure distribution was obtained in which the pressure in Reference Example 1 was slightly diffused. In Reference Examples 3 to 5 and 7, a pressure distribution was obtained in which the pressure in the part where the contact region R1 was located was high when viewed in the vertical direction. In Reference Example 4, a pressure distribution was obtained in which the pressure in Reference Example 3 was slightly diffused. In Reference Example 5, a rectangular frame-shaped pressure distribution corresponding to the shape of the contact region R1 (contact surface 5d) was obtained. In Reference Example 6, a pressure distribution in which the pressure in the center of the contact region R1 was high was obtained. These results indicate that the intermediate member 5 contributes to improving the strong pressure phenomenon at the outer edge. The results also indicate that stress (pressure) is concentrated in the contact region R1 of the intermediate member 5. The results also indicate that the second buffer member 6 diffuses the pressure concentrated by the intermediate member 5. Furthermore, the results show that the pressure distribution on the pressed surface Wa can be controlled to a distribution that depends on the shape of the contact area R1 (contact surface 5d) depending on the presence or absence and material of the first buffer member 4 and the second buffer member 6, respectively.

[0064] Comparative Examples 1 to 9 In Comparative Examples 1 to 4, no intermediate member 5 was used. In Comparative Examples 5 to 7, a first type of intermediate member 5 was used, in Comparative Example 8, a second type of intermediate member 5 was used, and in Comparative Example 9, a third type of intermediate member 5 was used. In Comparative Examples 1 and 2, only the scale was pressurized. In Comparative Examples 5 to 9, the work size was set to be smaller than the area "Ax" of the placement region Rx. In Comparative Examples 1, 3 to 9, a typical pressure distribution exhibiting a strong pressure phenomenon at the outer edge was obtained. On the other hand, in Comparative Example 2, a pressure distribution in which the pressure in Comparative Example 1 was diffused was obtained due to the second buffer member 6. According to this result, the second buffer member 6 suppresses the strong pressure phenomenon at the outer edge when no workpiece W is placed. However, the intermediate member 5 and the second buffer member 6 do not suppress this phenomenon when a workpiece W smaller than the area "Ax" of the placement region Rx is pressurized.

[0065] ●Improvement of the phenomenon where the outer edge of the pressed surface of the workpiece is strongly pressed As can be seen from the above-described embodiment and reference example, the phenomenon in which the outer edge of the pressed surface Wa of the workpiece W is strongly pressed is improved by the intermediate member 5. The findings of the inventors of the present invention regarding the cause of this will be explained below.

[0066] Figure 7 shows the stress transmission state measured by the simulator, where (a) shows the transmission state when pressure is applied to a workpiece W that is smaller than the area "Ax" of the placement area Rx, and (b) shows the transmission state when pressure is applied to a workpiece W that is larger than the area "Ax" of the placement area Rx. FIG. 8 is a schematic diagram illustrating factors that improve uneven pressure distribution.

[0067] In Figure 7, the first buffer member 4 and the second buffer member 6 are not used. In Figure 7(a), the size of the placement area Rx is 115 mm x 115 mm, and the work size is 80 mm x 80 mm. In Figure 7(b), the size of the placement area Rx is 115 mm x 115 mm, and the work size is 140 mm x 140 mm. For ease of explanation, Figure 8 shows the magnitude of stress with black arrows, and the way the stress concentrates or diffuses is shown with dashed lines.

[0068] As shown in FIG. 7(a), when a workpiece W smaller than the placement area Rx is pressed, the stress generated inside the upper press plate 7 by the pressure applied from the intermediate member 5 is transmitted to the entire lower surface 71a of the upper press plate 7 (outside the press surface area R3). The pressure transmitted from the workpiece W to the mounting plate 8 is greatest at the edge of the workpiece W. When pressure is applied to the workpiece W from the entire lower surface 71a, there is no object that receives the external force (pressure) from the area outside the press surface area R3. Therefore, this area functions as the "force point of the lever," and the edge of the workpiece W functions as the "fulcrum of the lever." At this time, the stress transmitted outside the press surface area R3 is concentrated on the outer edge of the press surface area R3. As a result, excessive pressure from the lower surface 71a is applied to the edge of the workpiece W, resulting in a strong compression phenomenon at the outer edge.

[0069] On the other hand, as shown in Figure 7(b), when a workpiece W larger than the placement area Rx is pressed, the stress generated inside the upper press plate 7 by the pressure applied from the intermediate member 5 is diffused within the upper press plate 7 and transmitted toward the press surface area R3. The pressure applied from the workpiece W to the mounting plate 8 is not greatest at the edge of the workpiece W, but is diffused downward toward the workpiece W. This indicates that the edge of the workpiece W does not function like a "fulcrum of a lever," i.e., the strong pressure phenomenon at the outer edge is suppressed.

[0070] As shown in FIG. 8, when pressure is applied from the base member 2, the stress generated inside the first buffer member 4 is diffused and uniformed inside the first buffer member 4. Therefore, the pressure applied from the first buffer member 4 to the intermediate member 5 is diffused and uniformed. That is, the pressure distribution on the upper surface 5b of the intermediate member 5 is uniformed. Next, when pressure is applied from the first buffer member 4, the stress generated inside the intermediate member 5 is concentrated and transmitted to the contact surface 5d (contact region R1) inside the intermediate member 5. Therefore, the pressure applied from the intermediate member 5 to the second buffer member 6 is concentrated on the portion that is in contact with the contact surface 5d. At this time, the stress transmitted to the non-contact surface 5c (non-contact region R2) is concentrated on the outer edge side of the contact surface 5d (contact region R1). Therefore, the pressure applied to the second buffer member 6 from the contact surface 5d is higher at the outer edge than at the center. Next, when pressure is applied from the intermediate member 5, the stress generated in the second buffer member 6 is diffused and uniformed within the second buffer member 6. Therefore, the pressure applied from the second buffer member 6 to the upper press plate 7 is diffused and uniformed. In other words, the pressure distribution on the upper surface 7a of the upper press plate 7 is uniformed. Next, when pressure is applied from the second buffer member 6, the stress generated within the upper press plate 7 is somewhat diffused within the upper press plate 7 and transmitted to the lower surface 71a, mainly within the press surface region R3. In other words, the stress transmitted within the upper press plate 7 is concentrated within the press surface region R3 rather than outside the press surface region R3. Therefore, the pressure applied from the upper press plate 7 to the workpiece W is concentrated on the portion abutting the press surface region R3 (the pressed surface Wa). As a result, the edge portion of the workpiece W does not function as a "fulcrum of a lever," and strong compression of the outer edge does not occur.

[0071] Here, as indicated by Saint-Venant's principle, the degree of stress diffusion within the upper press plate 7 increases as the thickness T1 of the upper press plate 7 increases. That is, the region of the lower surface 71a where stress is concentrated and transmitted (hereinafter referred to as the "concentration region") increases as the thickness T1 of the upper press plate 7 increases and decreases as the thickness T1 decreases. Therefore, the size of the concentration region can be controlled by the thickness T1 of the upper press plate 7 and the area of ​​the contact surface 5d (contact region R1) (i.e., the area "Ax" of the arrangement region Rx). In other words, to maintain the size of the concentration region within a predetermined range (the range of the press surface region R3), the area "Ax" of the arrangement region Rx is designed to decrease as the distance from the contact surface 5d of the intermediate member 5 to the lower surface 71a increases and increase as this distance decreases.

[0072] Thus, when viewed from the top-bottom direction, the ratio of the area "Ax" of the placement region Rx to the area "A3" of the press surface region R3 (area ratio: Ax / A3) depends on various parameters such as the thickness T1 of the upper press plate 7, the material, and the pressure applied to the upper press plate 7, but is designed to be at least less than "1." In the case of the conditions shown in the above-mentioned embodiment, for example, the area ratio is preferably designed to be "0.32" or more, more preferably "0.40" or more and "0.92" or less, and even more preferably "0.53" or more and "0.92" or less. The area "A3" is an example of the first area in the present invention, and the area "Ax" is an example of the second area in the present invention.

[0073] Summary According to the embodiment described above, the upper pressurizing unit UP includes a first buffer member 4, an intermediate member 5, a second buffer member 6, and a lower surface 71a. The second buffer member 6 is disposed below the first buffer member 4. The intermediate member 5 is disposed between the first buffer member 4 and the second buffer member 6 and adjacent to the first buffer member 4 and the second buffer member 6. The lower surface 71a is made of metal and contacts the workpiece W when pressure is applied to the workpiece W. The lower surface 71a is flat and parallel to the X and Y directions. The intermediate member 5 includes a non-contact surface 5c (non-contact region R2) and a contact surface 5d (contact region R1). The lower surface 71a includes a press surface region R3 that contacts the workpiece W when pressure is applied to the workpiece W. When viewed from the top-bottom direction, the contact region R1 is disposed inside a first outer periphery line Lo1, which is indicated by the outer periphery line of the press surface region R3. According to this configuration, stress is concentrated in the contact region R1 (contact surface 5d) inside the intermediate member 5. Then, inside the upper press plate 7, the stress is transmitted toward the press surface region R3 while being diffused in the process of being transmitted to the lower surface 71a. In other words, the stress is concentrated in the press surface region R3. As a result, excessive pressure is not applied to the edge portion of the workpiece W, and the strong compression phenomenon at the outer edge is improved. In other words, the present device 1 can control the pressure distribution on the pressed surface Wa so that the strong compression phenomenon at the outer edge does not occur.

[0074] As described above, the present invention does not adopt the conventional design of increasing the thickness T1 of the upper press plate 7 to increase the rigidity of the upper press plate 7. Therefore, in the present invention, the thickness T1 of the upper press plate 7 can be made thinner than in the conventional design. This reduces the burden on workers involved in replacing the first buffer member 4, intermediate member 5, and second buffer member 6. Furthermore, the present device 1 can control the amount of stress diffusion inside the upper press plate 7 by adjusting the thickness T1 of the upper press plate 7, thereby controlling the pressure distribution on the pressed surface Wa.

[0075] Furthermore, according to the embodiment described above, the upper press unit UP includes an upper press plate 7 with a lower surface 71a. The upper press plate 7 is positioned adjacent to and below the second buffer member 6. The second buffer member 6 is made of an elastic material that is compressed vertically when the workpiece W is pressed and can restore its original state when the pressing of the workpiece W is completed. With this configuration, even if stress inside the intermediate member 5 is concentrated in the contact region R1 (contact surface 5d), the stress generated inside the second buffer member 6 is diffused and homogenized within the second buffer member 6. As a result, the pressure applied to the upper press plate 7 from the second buffer member 6 is homogenized. Therefore, the stress generated inside the upper press plate 7 is homogenized. Therefore, the distribution of stress transmitted to the press surface region R3 is more homogenized than if the second buffer member 6 were not present. As a result, the present apparatus 1 can control the pressure distribution on the pressed surface Wa to be homogenized. Furthermore, since the second buffer member 6 made of an elastic material is disposed between the intermediate member 5 and the upper press plate 7, axial misalignment of the intermediate member 5 with respect to the upper press plate 7 is suppressed.

[0076] Furthermore, according to the embodiment described above, the first buffer member 4 is made of an elastic material that is compressed in the vertical direction when pressure is applied to the workpiece W and that can restore the state it was in before pressure was applied when pressure was applied to the workpiece W. With this configuration, the pressure applied from the first buffer member 4 to the intermediate member 5 is made uniform. Also, since the first buffer member 4, which is made of an elastic material, is disposed between the base member 2 and the intermediate member 5, axial misalignment of the intermediate member 5 with respect to the base member 2 is suppressed.

[0077] Furthermore, according to the embodiment described above, the intermediate member 5 includes a non-contact surface 5c and a contact surface 5d. The contact surface 5d contacts the second buffer member 6. The non-contact surface 5c is positioned above the contact surface 5d in the vertical direction and does not contact the second buffer member 6. When viewed from the vertical direction, the contact region R1 is the region where the contact surface 5d is located, and the non-contact region R2 is the region where the non-contact surface 5c is located. With this configuration, the intermediate member 5 can be easily formed simply by forming a recess in the underside of the plate-like member. Furthermore, the position and shape of the contact surface 5d can be designed arbitrarily depending on the position and shape of the recess. Therefore, the present apparatus 1 can control the pressure distribution on the pressed surface Wa to be a distribution dependent on the shape of the intermediate member 5 or to be uniform.

[0078] Furthermore, according to the embodiment described above, the shape of the first outer periphery Lo1, which is the outer periphery of the press surface region R3, is square when viewed in the vertical direction. The shape of the arrangement region Rx, in which the contact surface 5d is arranged, is square when viewed in the vertical direction. When viewed in the vertical direction, the arrangement region Rx is arranged inside the first outer periphery Lo1. That is, the shape of the second outer periphery Lo2 is similar to the shape of the first outer periphery Lo1. When viewed in the vertical direction, the ratio of the area "Ax" of the arrangement region Rx to the area "A3" of the press surface region R3 is equal to or greater than "0.40" and equal to or less than "0.92." With this configuration, the device 1 can reliably improve the strong compression phenomenon at the outer edge and control the pressure distribution on the pressed surface Wa.

[0079] Furthermore, according to the embodiment described above, the placement area Rx is designed to become smaller as the distance from the contact surface 5d of the intermediate member 5 that contacts the second buffer member 6 to the lower surface 71a increases, and to become larger as this distance decreases. With this configuration, an intermediate member 5 that has a contact surface 5d (having a placement area Rx) that corresponds to the workpiece W can be easily designed based on the length of the pressed surface Wa of the workpiece W (workpiece size) and the thickness T1 of the upper press plate 7.

[0080] ●Other embodiments● In the present invention, the apparatus 1 does not necessarily have to include the first buffer member 4. That is, the intermediate member 5 may be disposed adjacent to the base member 2 below the base member 2. In this case, the base member 2 functions as the first pressure member in the present invention. With this configuration, as shown in the above-described Examples 1 to 12, the apparatus 1 can improve the strong pressure phenomenon at the outer edge and can control the pressure distribution on the pressed surface Wa to be uniform.

[0081] Furthermore, in the present invention, the apparatus 1 does not necessarily have to include the second buffer member 6. That is, the upper press plate 7 is disposed adjacent to the intermediate member 5 below the intermediate member 5. In this case, the upper press plate 7 functions as the second pressure member in the present invention. In this configuration, the distribution of stress transmitted inside the upper press plate 7 is more uneven than in the first embodiment, but as shown in the above-mentioned Reference Example 2, the phenomenon of strong pressure on the outer edge is improved.

[0082] Furthermore, in the present invention, the apparatus 1 does not necessarily have to include the first buffer member 4 and the second buffer member 6. That is, the intermediate member 5 may be disposed adjacent to the base member 2 below the base member 2. Furthermore, the upper press plate 7 may be disposed adjacent to the intermediate member 5 below the intermediate member 5. In this case, the base member 2 functions as the first pressure member in the present invention, and the upper press plate 7 functions as the second pressure member in the present invention. In this configuration, the distribution of stress transmitted inside the upper press plate 7 becomes even more uneven than in the first embodiment, but as shown in the above-mentioned Reference Example 1, the strong pressure phenomenon at the outer edge is improved.

[0083] Furthermore, in the present invention, the material of the intermediate member 5 is not limited to a metal having high rigidity, as long as the shape (area) of the contact region R1 remains substantially unchanged when pressure is applied. That is, for example, the present device 1 may include, instead of the intermediate member 5, a first buffer member 4 or a second buffer member 6 having the same shape as the intermediate member 5 as the intermediate member of the present invention. Also, for example, the intermediate member 5 may be made of a hard insulating material.

[0084] Furthermore, in the present invention, the intermediate member 5 only needs to have the contact region R1 and the non-contact region R2, and the shape of the intermediate member 5 is not limited to the shape of the first embodiment. That is, for example, the intermediate member 5 may be formed into the shapes of intermediate members 5B to 5E in second to fifth modified examples described later.

[0085] Furthermore, in the present invention, the thickness T1 of the upper press plate 7 may be designed to be large enough (i.e., thin enough) that the portion located below the contact region R1 can elastically deform when the workpiece W is pressed. In this case, the contact region R1 is positioned above the area of ​​the pressed surface Wa of the workpiece W that requires localized pressure, depending on the shape or composition of the pressed surface Wa. In this configuration, the upper press plate 7 elastically deforms locally. Therefore, the present apparatus 1 can locally press only the portion of the pressed surface Wa that protrudes after pressing due to differences in composition. Furthermore, for example, the present apparatus 1 can simultaneously press multiple workpieces W, allowing for localized pressure on workpieces W with complex shapes. Furthermore, for example, when the thickness T1 is thin, the present apparatus 1 can uniformly control the pressure distribution on the pressed surface Wa by setting the area ratio close to 1, and can control the pressure distribution on the pressed surface Wa to a distribution dependent on the shape of the intermediate member 5 by setting the area ratio small. Such a design for the thickness T1 is a design that cannot be adopted in conventional designs that increase the rigidity of the upper press plate 7.

[0086] Furthermore, in the present invention, the lower pressure unit DP may be provided with a heating unit for heating the workpiece W.

[0087] Furthermore, in the present invention, the intermediate member 5 may have a plurality of contact surfaces 5d. In this case, the shapes of the contact surfaces 5d may be the same as those of contact surfaces 5d1 to 5d9 in a third modified example described later, or may be different from each other.

[0088] Furthermore, in the present invention, the shape of the contact surface 5d as viewed in the vertical direction is not limited to a rectangular shape. For example, the shape of the contact surface 5d as viewed in the vertical direction may be arbitrarily designed by solving an inverse problem to obtain an optimal shape for a purpose using a known analytical method such as the finite element method, depending on the shape of the distribution of stress transmitted to the lower surface 71a.

[0089] Furthermore, in the present invention, the length L5 of the intermediate member 5 in the XY directions may be shorter than the length L72 of the outer flange portion 72 of the upper press plate 7. That is, for example, the length L5 may be shorter than the length LR3 of the press surface region R3. In other words, when viewed in the up-down direction, the intermediate member 5 may be disposed only inside the first outer periphery line Lo1.

[0090] Furthermore, in the present invention, the present apparatus 1 may include three or more upper pressurizing units UP and three or more lower pressurizing units DP, that is, the present apparatus 1 may be a pressurizing apparatus with three or more stages.

[0091] Furthermore, in the present invention, the apparatus 1 may include an insulating member made of an insulating material and disposed between the intermediate member 5 and the second buffer member 6. In this case, the shape of the insulating member may be the same as that of the second buffer member 6 when viewed from the top-bottom direction. When the apparatus 1 does not include the second buffer member 6, the insulating member can function as the second pressurizing member in the present invention. In this configuration, even if the lower pressurizing unit DP includes a thermal unit that heats the workpiece W, the heat from the thermal unit is blocked by the insulating member and is not transmitted to the second buffer member 6, the first buffer member 4, and the base member 2.

[0092] Furthermore, in the present invention, as shown in the above-described seventeenth embodiment, when multiple workpieces W are pressed collectively and one contact surface 5d corresponds to all of the workpieces W in the vertical view, the press surface region R3 may be a region of the lower surface 71a that includes the regions where each workpiece W is in contact. In other words, the press surface region R3 may include multiple regions where each workpiece W is in contact. In this case, the first outer periphery line Lo1 is indicated by the outer periphery line of this region.

[0093] Furthermore, in the present invention, as shown in the above-mentioned Example 14, when multiple workpieces W are pressed collectively and each of the contact surfaces 5d1 to 5d9 corresponds to each workpiece W in the up-down view, the press surface region R3 may be each of the regions of the lower surface 71a that are in contact with each of the workpieces W. In other words, the lower surface 71a may have multiple press surface regions R3. In this case, the first outer periphery Lo1 is indicated by the outer periphery of each region.

[0094] Furthermore, in the present invention, a protective sheet may be placed on top of the workpiece W to protect the lower surface 71a and prevent the workpiece W from sticking. The thickness of the protective sheet is thin enough that uniformity of stress is hardly generated inside the protective sheet. Therefore, the presence or absence of the protective sheet does not affect the effect of the present invention.

[0095] ●Variations● Next, modified examples of the device 1 will be described below, focusing on the differences from the previously described embodiment (hereinafter referred to as the "first embodiment"). In the following modified examples, for the sake of convenience, the same components as in the first embodiment and components having the same functions as in the first embodiment are given the same reference numerals as in the first embodiment, and detailed descriptions thereof will be omitted. In the following modified examples, reference will be made to Figures 1 and 2 as appropriate.

[0096] First modified example FIG. 9 is a schematic cross-sectional view of the present device, showing a first modified example of the present device.

[0097] This device 1A vertically sandwiches and presses two workpieces W1 and W2. This device 1A includes a base member 2, a frame member 3, a first buffer member 4, an intermediate member 5, a second buffer member 6, an upper press plate 7, a mounting plate 8, a lower press plate 9, a lifting device 10, a control device 11, a second base member 12, a second frame member 13, a third buffer member 14, a second intermediate member 15, a fourth buffer member 16, a second upper press plate 17, and a second mounting plate 18. The base member 2, the frame member 3, the first buffer member 4, the intermediate member 5, the second buffer member 6, and the upper press plate 7 are positioned above the workpiece W1 and function as an upper press unit UP, which applies pressure to the workpiece W1 from above. The mounting plate 8 and the second base member 12 are positioned below the workpiece W1 and function as a lower press unit DP, which applies pressure to the workpiece W1 from below. Similarly, the second base member 12, second frame member 13, third buffer member 14, second intermediate member 15, fourth buffer member 16, and second upper press plate 17 are positioned above the workpiece W2 in the vertical direction and function as a second upper pressure unit UP2 that pressurizes the workpiece W2 from above. The second mounting plate 18 and second lower press plate 19 are positioned below the workpiece W2 in the vertical direction and function as a second lower pressure unit DP2 that pressurizes the workpiece W2 from below. In other words, the apparatus 1A is a two-stage pressure device in which, from top to bottom, the upper pressure unit UP, the lower pressure unit DP, the second upper pressure unit UP2, and the second lower pressure unit UD2 are arranged.

[0098] The second base member 12 supports the third buffer member 14, the second intermediate member 15, the fourth buffer member 16, and the second upper press plate 17 via the second frame member 13. The configuration of the second base member 12 is the same as that of the base member 2. The second base member 12 is supported by the lifting device 10 so that it can move (lift) in the vertical direction. A mounting plate 8 is placed on the second base member 12. The second base member 12 also functions as the lower press plate of the lower pressure unit DP. The size (thickness) of the second base member 12 in the vertical direction is set to a size that allows stress generated inside the second base member 12 by pressure transmitted to the second base member 12 via the mounting plate 8 to be sufficiently diffused inside the second base member 12.

[0099] The second frame member 13 houses the third buffer member 14, the second intermediate member 15, the fourth buffer member 16, and a portion of the second upper press plate 17. The configuration of the second frame member 13 is the same as the configuration of the frame member 3. The second frame member 13 includes a main body portion 131 and an inner flange portion 132. The main body portion 131 includes an inner circumferential surface 131a. The inner flange portion 132 includes an upper surface 132a and an inner circumferential surface 132b.

[0100] When the workpiece W2 is pressurized, the third buffer member 14 diffuses and equalizes the pressure applied to the third buffer member 14. Furthermore, when the workpiece W2 is pressurized, the third buffer member 14 suppresses axial misalignment of the second intermediate member 15. The configuration of the third buffer member 14 is the same as the configuration of the first buffer member 4. The third buffer member 14 has a lower surface 14a and an upper surface 14b. The third buffer member 14 is an example of a first pressure member according to the present invention.

[0101] The second intermediate member 15 concentrates the pressure applied to the workpiece W2 when it is pressed. The configuration of the second intermediate member 15 is the same as that of the intermediate member 5. The second intermediate member 15 has a lower surface 15a, an upper surface 15b, a non-contact surface 15c, and a contact surface 15d. The second intermediate member 15 is an example of an intermediate member in the present invention. When viewed from the top-bottom direction, the area of ​​the second intermediate member 15 where the contact surface 15d is located is the contact region R11, and the area where the non-contact surface 15c is located is the non-contact region R12.

[0102] The fourth buffer member 16 diffuses and equalizes the pressure applied to the fourth buffer member 16 when pressure is applied to the workpiece W2. The fourth buffer member 16 also suppresses axial misalignment of the second intermediate member 15 when pressure is applied to the workpiece W2. The configuration of the fourth buffer member 16 is the same as the configuration of the second buffer member 6. The fourth buffer member 16 has a lower surface 16a and an upper surface 16b. The fourth buffer member 16 is an example of a second pressure member according to the present invention.

[0103] When the workpiece W2 is pressed, the second upper press plate 17 presses the workpiece W2 downward. The configuration of the second upper press plate 17 is the same as the configuration of the upper press plate 7. The second upper press plate 17 has an upper surface 17a, a main body portion 171, and an outer flange portion 172. The main body portion 171 has a lower surface 171a. The lower surface 171a has a press surface region R13. The second upper press plate 17 is an example of a third press member in the present invention. The lower surface 171a is an example of an upper press surface in the present invention. The outer flange portion 172 has a lower surface 172a.

[0104] The second mounting plate 18 is a member on which the workpiece W2 is placed. The configuration of the second mounting plate 18 is the same as the configuration of the mounting plate 8. The second mounting plate 18 is placed on a second lower press plate 19. The second mounting plate 18 has a mounting surface 18a, which is its upper surface.

[0105] When the workpiece W2 is pressed, the second lower press plate 19 presses the workpiece W2 upward in response to the pressure from the second upper press unit UP2. The configuration of the second lower press plate 19 is the same as the configuration of the lower press plate 9.

[0106] The positional relationships and size relationships of the second base member 12, second frame member 13, third buffer member 14, second intermediate member 15, fourth buffer member 16, and second upper press plate 17 are the same as the positional relationships and size relationships of the base member 2, frame member 3, first buffer member 4, intermediate member 5, second buffer member 6, and upper press plate 7, respectively.

[0107] In the first modified example, the pressure distribution on the upper surface 5b of the intermediate member 5 may differ from the pressure distribution on the upper surface 15b of the second intermediate member 15 due to dimensional tolerances of each member, etc. Furthermore, if the thickness of the second base member 12 is thin, the workpiece W1 itself may function as the intermediate member of the present invention, and the pressure transmitted from the second base member 12 to the second intermediate member 15 may be affected by this. In this case, it is preferable that the length LR1 of the contact region R1 of the intermediate member 5 is set according to the pressure applied to the workpiece W1, and the length LR11 of the contact region R11 of the second intermediate member 15 is set according to the pressure applied to the workpiece W2. In other words, the length LR11 may be different from the length LR1.

[0108] Furthermore, in the first modified example, the device 1A may not include the third buffer member 14. That is, the second intermediate member 15 may be disposed adjacent to the second base member 12 below the second base member 12. In this case, the second base member 12 functions as the first pressure member in the present invention.

[0109] Furthermore, in the first modified example, the apparatus 1A does not necessarily have to include the fourth buffer member 16. That is, the second upper press plate 17 is disposed below the second intermediate member 15 and adjacent to the second intermediate member 15. In this case, the second upper press plate 17 functions as the second pressure member of the present invention.

[0110] Furthermore, in the first modified example, the apparatus 1A does not have to include the third buffer member 14 and the fourth buffer member 16. That is, the second intermediate member 15 may be disposed adjacent to and below the second base member 12. Furthermore, the second upper press plate 17 is disposed adjacent to and below the second intermediate member 15. In this case, the second base member 12 functions as the first pressure member of the present invention, and the second upper press plate 17 functions as the second pressure member of the present invention.

[0111] Second Modification to Fifth Modification In the second to fifth modified examples of the present device, the configuration of the intermediate member differs from that of the first embodiment, so only the intermediate member will be described below.

[0112] Figure 10 is a schematic bottom view of the intermediate members in the second to fifth modified examples of this device, where (a) shows the intermediate member in the second modified example, (b) shows the intermediate member in the third modified example, (c) shows the intermediate member in the fourth modified example, and (d) shows the intermediate member in the fifth modified example. In the figure, the second outer periphery Lo2 of the arrangement region Rx is indicated by a thick dashed line, and the press surface region R3 (pressed surface Wa) is indicated by a two-dot chain line.

[0113] The intermediate member 5B in the second modified example has two non-contact surfaces 5c1 and 5c2 and one contact surface 5d. When viewed from the top-bottom direction, the non-contact surface 5c1 has a rectangular shape, the contact surface 5d has a rectangular frame shape surrounding the entire periphery of the non-contact surface 5c1, and the non-contact surface 5c2 has a rectangular frame shape surrounding the entire periphery of the contact surface 5d. The second outer periphery Lo2 is the same as the outer periphery of the contact surface 5d. When viewed from the top-bottom direction, the contact region R1 is the region where the contact surface 5d is located, and the non-contact region R2 is the region where the non-contact surfaces 5c1 and 5c2 are located. With this configuration, as shown in Examples 6 and 7 and Reference Examples 5 and 6, the present apparatus 1 can improve the strong compression phenomenon at the outer edge. Furthermore, the present apparatus 1 can control the pressure distribution on the pressed surface Wa to a distribution that depends on the shape of the intermediate member 5.

[0114] The intermediate member 5C in the third modified example has one non-contact surface 5c and nine contact surfaces 5d1 to 5d9. When viewed in the vertical direction, the contact surfaces 5d1 to 5d9 all have the same rectangular shape. The contact surfaces 5d1 to 5d9 are evenly arranged in a 3-row by 3-column arrangement pattern. When viewed in the vertical direction, the arrangement region Rx is an area in which all the contact surfaces 5d1 to 5d9 are arranged and has a shape (rectangular in the third modified example) that is the smallest. The non-contact surface 5c1 has a lattice-shaped portion arranged inside the arrangement region Rx and a rectangular frame-shaped portion arranged outside the arrangement region Rx. When viewed in the vertical direction, the contact region R1 is the area where the contact surfaces 5d1 to 5d9 are arranged, and the non-contact region R2 is the area where the non-contact surface 5c is arranged. With this configuration, the apparatus 1 can improve the strong pressure phenomenon at the outer edge, as shown in Examples 8 to 12 and Reference Example 7. Furthermore, the apparatus 1 can control the pressure distribution on the pressed surface Wa to a distribution that depends on the shape of the intermediate member 5.

[0115] The intermediate member 5D in the fourth modified example has 12 non-contact surfaces 5c1 to 5c12, nine contact surfaces 5d1 to 5d9, and four through-holes 5e1 to 5e4. When viewed in the vertical direction, the contact surfaces 5d1 to 5d9 have the same rectangular shape. The contact surfaces 5d1 to 5d9 are evenly arranged in a 3-row by 3-column pattern. When viewed in the vertical direction, adjacent contact surfaces 5d1 to 5d9 are connected by bridge-shaped portions. The non-contact surfaces 5c1 to 5c12 are arranged in the bridge-shaped portions. The through-holes 5e1 to 5e4 are through holes that pass through the intermediate member 5D in the vertical direction. When viewed in the vertical direction, the through-holes 5e1 to 5e4 have a cross-like shape. The through-holes 5e1 to 5e4 are arranged between the contact surfaces 5d1 to 5d9 so as to separate the contact surfaces 5d1 to 5d9. In a vertical view, the arrangement region Rx is the region where all the contact surfaces 5d1-5d9 are arranged and where the area is the smallest. In a vertical view, the contact region R1 is the region where the contact surfaces 5d1-5d9 are arranged, and the non-contact region R2 is the region where the non-contact surfaces 5c1-5c12 and the through-holes 5e1-5e4 are arranged. In the fourth modification, the length L5 of the intermediate member 5D is shorter than the length L4 of the first buffer member 4 and the length L6 of the second buffer member 6. Therefore, a rectangular frame-shaped space is formed around the intermediate member 5D. The outer edge of the first buffer member 4 faces the outer edge of the second buffer member 6 through this space. In this configuration, the intermediate member 5D can be easily formed by simply forming a through-hole that functions as the non-contact region R2 in a plate-shaped member and forming the non-contact surfaces 5c1-5c12 in the bridge-shaped portion. The position and shape of the contact surface 5d can be designed arbitrarily according to the position and shape of the through-hole.

[0116] In the fourth modified example, the bridge-shaped portion does not necessarily have to have the non-contact surfaces 5c1-5c12. In this case, the bridge-shaped portion functions as the contact surface. With this configuration, the non-contact surfaces 5c1-5c12 do not need to be formed, and the intermediate member 5D can be easily formed simply by forming through holes in the plate-shaped member that function as the non-contact regions R2.

[0117] In the fourth modification, the shape of the through portions 5e1 to 5e4 is not limited to a cross shape, and the number of the through portions 5e1 to 5e4 is not limited to four.

[0118] The intermediate member 5E in the fifth modified example includes one non-contact surface 5c and one contact surface 5d. When viewed in the vertical direction, the contact surface 5d has a rectangular shape. When viewed in the vertical direction, the contact surface 5d is located inside the press surface region R3 and is biased toward one corner of the intermediate member 5E. When viewed in the vertical direction, the non-contact surface 5c has a rectangular frame shape that surrounds the entire periphery of the contact surface 5d. When viewed in the vertical direction, the contact region R1 is the region where the contact surface 5d is located, and the non-contact region R2 is the region where the non-contact surface 5c is located. By forming the intermediate member 5E in this manner, a predetermined region of the press surface region R3 (the hatched region in FIG. 10(d)) that includes the contact region R1 and is centered on the contact region R1 when viewed in the vertical direction is an uneven pressure region R3a that presses the workpiece W with a greater pressure than the other regions R3b. When viewed from the top to bottom, the contact area R1 is located within the biased pressurization area R3a and corresponds to the biased pressurization area R3a. In other words, the contact area R1 includes an area corresponding to the biased pressurization area R3a (hereinafter referred to as the "specific area R1a"). With this configuration, the present apparatus 1 can control the pressure in a specific area (the area contacting the biased pressurization area R3a) of the pressed surface Wa to be higher than the pressure in other areas. The position and length of the biased pressurization area R3a are arbitrarily designed according to the position and length of the specific area R1a (contact surface 5d) relative to the press surface area R3. In other words, by using the intermediate member 5E instead of the intermediate member 5, the present apparatus 1 can bias pressurize any area of ​​the pressed surface Wa, which was not possible with conventional pressurization devices (hereinafter referred to as the "conventional device") that pressurize the workpiece directly with a flat press surface (or indirectly via a protective sheet). In addition, by forming multiple specific areas R1a (contact surfaces 5d) so that multiple biased pressure areas R3a are formed, the present device 1 can also perform simultaneous pressure application to multiple workpieces W, which was not possible with conventional devices.

[0119] In the fifth modified example, the intermediate member 5E may have a plurality of contact surfaces 5d corresponding to a plurality of contact regions R1 including the specific region R1a.

[0120] ●Embodiments of the present invention● Next, the embodiments of the present invention that can be understood from the above-described embodiments will be described below, using the terms and symbols used in the embodiments.

[0121] A first embodiment of the present invention is a pressure device (for example, pressure device 1, 1A) that applies pressure to a workpiece (for example, workpiece W, W1, W2) by sandwiching it in the vertical direction, and includes an upper pressure unit (for example, upper pressure unit UP, second upper pressure unit UP2) arranged above the workpiece, and the upper pressure unit includes a first pressure member (for example, base member 2, first buffer member 4, third buffer member 14), a second pressure member (for example, second buffer member 6, upper press plate 7, fourth buffer member 16, second upper press plate 17) arranged below the first pressure member, and an intermediate member (for example, intermediate member 1) arranged adjacent to the first pressure member and the second pressure member between the first pressure member and the second pressure member. 5 to 5E), and a flat upper press surface made of metal (e.g., lower surface 71a, 171a) that comes into contact with the workpiece when pressure is applied to the workpiece, the intermediate member has a contact region (e.g., contact region R1, R11) that comes into contact with the second pressure member, and a non-contact region (e.g., non-contact region R2, R12) that does not come into contact with the second pressure member, the upper press surface has a press surface region (e.g., press surface region R3, R13) that comes into contact with the workpiece when pressure is applied to the workpiece, and the contact region is located adjacent to the non-contact region and inside a first outer periphery line (e.g., first outer periphery line Lo1) that is indicated by the outer periphery line of the press surface region when viewed in the vertical direction. With this configuration, the device can control the pressure distribution on the surface to be pressed so that the phenomenon of strong pressure on the outer edge does not occur.

[0122] A second embodiment of the present invention is a pressure device in which, in the first embodiment, the upper pressure unit includes a third pressure member (e.g., upper press plate 7, second upper press plate 17) having the upper press surface, the third pressure member is arranged adjacent to the second pressure member (e.g., second buffer member 6, fourth buffer member 16) and below the second pressure member, and the second pressure member is made of an elastic material that is compressed in the vertical direction when the workpiece is pressed and can restore to its state before pressing when pressing of the workpiece is completed. With this configuration, the press surface of the workpiece is uniformly pressed, and axial misalignment of the intermediate member relative to the upper press plate is suppressed.

[0123] A third embodiment of the present invention is a pressing device in which, in the first embodiment, the second pressing member (for example, upper press plate 7, second upper press plate 17) includes the upper press surface. With this configuration, the device can control the pressure distribution on the surface to be pressed at each stage so that the phenomenon of strong pressure on the outer edge does not occur.

[0124] A fourth embodiment of the present invention is a pressure application device in which, in the second or third embodiment, the first pressure application member (e.g., first buffer member 4, third buffer member 14) is made of an elastic material that is compressed in the vertical direction when the workpiece is pressurized and can restore to its pre-pressure state when the pressurization of the workpiece is completed. According to this configuration, the pressure applied to the intermediate member from the first buffer member is made uniform, and axial misalignment of the intermediate member with respect to the base member is suppressed.

[0125] A fifth embodiment of the present invention is a pressure application device in any one of the first to third embodiments, wherein the intermediate member has a contact surface (e.g., contact surface 5d, 5d1 to 5d9) that contacts the second pressure application member, and a non-contact surface (e.g., non-contact surface 5c, 5c1 to 5c12) that is arranged above the contact surface in the vertical direction and does not contact the second pressure application member, and when viewed in the vertical direction, the contact area is the area where the contact surface is arranged, and when viewed in the vertical direction, the non-contact area is the area where the non-contact surface is arranged. According to this configuration, the intermediate member can be easily formed by simply forming a recess in the lower surface of the plate-like member.

[0126] A sixth embodiment of the present invention is a pressure application device in which, in any one of the first to third embodiments, the intermediate member (e.g., intermediate member 5D) has a contact surface (e.g., contact surfaces 5d1 to 5d9) that contacts the second pressure application member and a through hole (e.g., through portion 5e1 to 5e4) that penetrates the intermediate member in the vertical direction, and when viewed in the vertical direction, the contact area is the area where the contact surface is arranged, and when viewed in the vertical direction, the non-contact area is the area where the through hole is arranged. According to this configuration, the intermediate member can be easily formed by simply forming a through hole that functions as a non-contact area in the plate-shaped member.

[0127] A seventh embodiment of the present invention is a pressure applying device in which, in the first embodiment, when viewed in the vertical direction, the shape of a second outer periphery (e.g., second outer periphery Lo2) indicated by the outer periphery of the placement area (e.g., placement area Rx) in which the abutment area is placed is similar to the shape of the first outer periphery, and when viewed in the vertical direction, the ratio of the second area (e.g., area "Ax") of the placement area defined by the second outer periphery to the first area (e.g., area "A3") of the press surface area defined by the first outer periphery is 0.40 or more and 0.92 or less. With this configuration, the device can reliably improve the strong pressure phenomenon at the outer edge and can control the pressure distribution on the pressed surface.

[0128] An eighth embodiment of the present invention is a pressure application device in which, in the first embodiment, the placement area in which the contact area is placed, when viewed from the top to bottom, is designed to become smaller as the distance (e.g., thickness "T1") from the contact surface of the intermediate member that contacts the second pressure application member to the upper press surface increases, and becomes larger as the distance decreases. According to this configuration, an intermediate member having a contact surface (having a placement area) suited to the workpiece can be easily designed.

[0129] A ninth embodiment of the present invention is a pressure device in which, in the first embodiment, the press surface area includes, when viewed in the vertical direction, an uneven pressure area (e.g., uneven pressure area R3a) that presses a specified area of ​​the workpiece with a greater pressure force than other areas of the workpiece when the workpiece is pressed, and the contact area includes a specific area (e.g., specific area R1a) corresponding to the uneven pressure area, and when viewed in the vertical direction, the specific area is positioned within the range of the uneven pressure area. According to this configuration, the device can control the pressure distribution on the surface to be pressed so that any desired area of ​​the surface to be pressed is strongly pressed. [Explanation of symbols]

[0130] 1. Pressure device 2 base member (first pressure member) 4. First buffer member (first pressure member) 5 Intermediate parts 5c,5c1~5c12 Non-contact surface 5d,5d1~5d9 Contact surface 6 Second buffer member (second pressure member) 7 Upper press plate (second pressure member, third pressure member) 71a Lower surface (upper press surface) 12 second base member (first pressure member) 14 Third buffer member (first pressure member) 15 Second intermediate member (intermediate member) 15c Non-contact surface 15d Contact surface 16 Fourth buffer member (second pressure member) 17 Upper press plate (second pressure member, third pressure member) 171a Bottom surface (upper press surface) R1 contact area R2 Non-contact area R11 Contact area R12 Non-contact area Rx placement area R3a Uneven pressure area R3b Other areas

Claims

1. A pressure device that clamps and presses a workpiece in the vertical direction, an upper pressure unit disposed above the workpiece; and The upper pressurizing unit is A first pressure member; a second pressure member disposed below the first pressure member; an intermediate member disposed between the first pressure member and the second pressure member and adjacent to the first pressure member and the second pressure member; a flat upper press surface made of metal that contacts the workpiece when pressure is applied to the workpiece; With The intermediate member is a contact area that contacts the second pressure member; a non-contact region that does not contact the second pressure member; With The upper press surface is a press surface area that contacts the workpiece when the workpiece is pressed; With The contact area, when viewed in the up-down direction, disposed adjacent to the non-contact region, The press surface region is positioned inside a first outer periphery line indicated by the outer periphery line of the press surface region. Pressure device.

2. The upper pressurizing unit is a third pressing member having the upper pressing surface; With the third pressure member is disposed adjacent to the second pressure member and below the second pressure member, The second pressure member is made of an elastic material that is compressed in the vertical direction when pressure is applied to the workpiece and can restore to its original state before pressure is applied when pressure is applied to the workpiece. The pressure device according to claim 1 .

3. The second pressure member is the upper press surface; Equipped with The pressure device according to claim 1 .

4. The first pressure member is made of an elastic material that is compressed in the vertical direction when pressure is applied to the workpiece and that can restore to its original state before pressure is applied when pressure is applied to the workpiece. The pressure device according to claim 2 or 3.

5. The intermediate member is a contact surface that contacts the second pressure member; a non-contact surface that is disposed above the contact surface in the vertical direction and does not contact the second pressure member; With When viewed in the up-down direction, the contact area is an area where the contact surface is arranged, When viewed in the up-down direction, the non-contact region is a region where the non-contact surface is arranged. The pressure device according to any one of claims 1 to 3.

6. The intermediate member is a contact surface that contacts the second pressure member; a through hole that passes through the intermediate member in the vertical direction; With When viewed in the up-down direction, the contact area is an area where the contact surface is arranged, When viewed in the up-down direction, the non-contact region is a region in which the through hole is arranged. The pressure device according to any one of claims 1 to 3.

7. a second outer periphery indicated by an outer periphery of a placement area in which the contact area is placed is similar in shape to the first outer periphery when viewed in the up-down direction; When viewed in the up-down direction, a ratio of a second area of ​​the arrangement area defined by the second outer circumferential line to a first area of ​​the press surface area defined by the first outer circumferential line is 0.40 or more and 0.92 or less. The pressure device according to claim 1 .

8. When viewed in the vertical direction, the arrangement area in which the contact area is arranged is designed to become smaller as the distance between the contact surface of the intermediate member that contacts the second pressure member and the upper press surface increases, and to become larger as the distance decreases. The pressure device according to claim 1 .

9. The press surface area is When viewed in the vertical direction, a biased pressure region applies pressure to a predetermined region of the workpiece with a greater pressure than other regions of the workpiece when the workpiece is pressed; Including, The contact area is a specific area corresponding to the unevenly pressurized area; Including, When viewed in the up-down direction, the specific area is disposed within the range of the uneven pressure area. The pressure device according to claim 1 .

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