Sheet fixing device and method for manufacturing adherend to which sheet is fixed

Abstract

To provide a sheet fixing device capable of preventing a sheet from being fixed to an adherence surface of an adherend such as a wafer while foreign matter is adhering to the adherence surface.SOLUTION: The sheet fixing device includes an imaging unit having a first camera for imaging an adherence surface of an adherend in a state where no sheet is fixed, and a controller for controlling the imaging unit. The controller determines whether foreign matter is adhering to the adherence surface on the basis of a first image formed by controlling the imaging unit to image the adherence surface in the state where no sheet is fixed.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The present invention relates to a sheet fastening device for fastening a sheet having a shape corresponding to a surface to be fastened to an object to be fastened. [Background technology]

[0002] Chips for devices such as integrated circuits (ICs) are essential components in various electronic devices such as mobile phones and personal computers. These chips are manufactured, for example, by thinning a wafer on which multiple devices are formed on its surface and then dividing it into regions containing individual devices.

[0003] The wafer is thinned by grinding the backside with a grinding device, for example, and divided into pieces by removing the boundaries between the devices with a cutting device or a laser processing device, for example.

[0004] However, when thinning a wafer, the surface side may be pressed hard, potentially damaging multiple devices, and when dividing the wafer, the resulting chips may become separated and difficult to handle.

[0005] In consideration of these points, it is common to bond a sheet to a wafer in a sheet bonding device before processing the wafer (see, for example, Patent Document 1). In this sheet bonding device, a desired portion is pulled out and cut out from a wound sheet (raw sheet roll), and then the cut-out portion (individual sheet) can be bonded to a wafer. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Laid-Open No. 2016-8104 Summary of the Invention [Problem to be solved by the invention]

[0007] If a wafer has fine particles of dust or other foreign matter attached to it, the sheet may adhere to the wafer in a way that pinches the foreign matter, which can cause large localized stresses during wafer processing and lead to wafer damage.

[0008] In view of this, the object of the present invention is to provide a sheet fixing device that can prevent a sheet from being fixed to a surface of an object to be fixed, such as a wafer, when foreign matter is attached to the surface. [Means for solving the problem]

[0009] According to the present invention, there is provided a sheet fixing device for fixing a sheet having a shape corresponding to the fixing surface to a fixing surface of an object, the sheet fixing device comprising: an imaging unit having a first camera for imaging the fixing surface when the sheet is not fixed; and a controller for controlling the imaging unit, wherein the controller determines whether or not a foreign object is attached to the fixing surface based on a first image formed by controlling the imaging unit to image the fixing surface when the sheet is not fixed.

[0010] It is preferable that the sheet fixing device of the present invention further includes a foreign matter removal unit for removing foreign matter from the fixing surface, and that the controller controls the foreign matter removal unit to remove the foreign matter from the fixing surface when it determines that foreign matter is attached to the fixing surface.

[0011] In the sheet bonding device of the present invention, the imaging unit may further include a second camera for imaging the sheet while it is bonded to the bonded surface, and the controller may determine whether or not a foreign substance is attached to the sheet based on a second image formed by controlling the imaging unit to image the sheet while it is bonded to the bonded surface. In this case, it is preferable that the sheet bonding device of the present invention further includes a foreign substance removal unit for removing foreign substances from the bonded surface and / or the sheet, and the controller controls the foreign substance removal unit to remove the foreign substance from the bonded surface when it is determined that a foreign substance is attached to the bonded surface, and controls the foreign substance removal unit to remove the foreign substance from the sheet when it is determined that a foreign substance is attached to the sheet.

[0012] Alternatively, in the sheet bonding device of the present invention, the first camera may be capable of capturing an image of the sheet while it is bonded to the bonded surface, and the controller may determine whether or not a foreign substance is attached to the sheet based on a second image formed by controlling the imaging unit to capture an image of the sheet while it is bonded to the bonded surface. In this case, it is preferable that the sheet bonding device of the present invention further includes a foreign substance removal unit for removing foreign substances from the bonded surface and / or the sheet, and the controller controls the foreign substance removal unit to remove the foreign substance from the bonded surface when it is determined that a foreign substance is attached to the bonded surface, and controls the foreign substance removal unit to remove the foreign substance from the sheet when it is determined that a foreign substance is attached to the sheet.

[0013] In addition, in the sheet bonding device of the present invention, the object to be bonded is a wafer having a notch or orientation flat formed on its outer edge, and the controller may identify the position of the notch or orientation flat based on a third image formed by controlling the imaging unit to image the surface to be bonded when the sheet is not bonded while irradiating the object with light from the opposite side to the surface to be bonded. In this case, the sheet fixing device of the present invention has a cassette table for supporting a cassette containing the object to be fixed, a holding section for holding the object to be fixed, and a light-emitting section for irradiating light toward the object to be fixed held by the holding section, and further includes a carry-in / out robot for transporting the object to be fixed from the cassette supported by the cassette table in a state where the sheet is not fixed to the surface to be fixed, and / or for transporting the object to the cassette in a state where the sheet is fixed to the surface to be fixed, and the controller preferably controls the imaging unit to image the surface to be fixed in a state where the sheet is not fixed, while controlling the carry-in / out robot so that the holding section holds the object to be fixed in a state where the surface to be fixed is exposed, and the light-emitting section irradiates light onto the object from the opposite side to the surface to be fixed, so that the third image is formed.

[0014] Furthermore, the sheet bonding device of the present invention further comprises a preparation unit for preparing an individual sheet including a bonding area having a shape corresponding to the bonding surface and an excess area surrounding the bonding area, a bonding unit for bonding the bonding area of ​​the individual sheet prepared by the preparation unit to the bonding surface of the object to be bonded, and a removal unit for removing the excess area from the individual sheet having the bonding area bonded to the bonding surface by the bonding unit, and the bonding unit further comprises a first unit for holding the object to be bonded. It is preferable that the fixing unit has a first holding portion, a second holding portion for holding the individual sheet, and a pressing portion for pressing the fixing area of ​​the individual sheet toward the fixing surface of the object to be fixed, and that the controller controls the fixing unit so that the first holding portion holds the object to be fixed with the fixing surface exposed, and the second holding portion holds the individual sheet with the fixing area exposed and facing the fixing surface, while pressing the fixing area toward the fixing surface with the pressing portion.

[0015] In this case, it is preferable that the pressing unit includes a roller positioned to sandwich the object held by the first holding unit and the individual sheet held by the second holding unit, and that the controller controls the pressing unit of the fixing unit so that the roller is rolled to press the fixing region toward the fixing surface.Furthermore, in this case, it is preferable that the fixing unit further has a decompression unit for fixing the fixing region to the fixing surface in a space reduced in pressure below atmospheric pressure, the decompression unit including a chamber for accommodating the first holding unit that holds the object, the second holding unit that holds the individual sheet, and the roller, and a pump for decompressing the internal space of the chamber, and that the controller controls the pressing unit and the decompression unit of the fixing unit so that the fixing region is pressed toward the fixing surface while the internal space of the chamber is decompressed by the pump.

[0016] In addition, the sheet fixing device of the present invention preferably further comprises a housing for accommodating the preparation unit, the fixing unit and the removal unit, a fan for generating a downflow within the housing, and a counter for measuring the number of particles within the housing, and the controller controls the fan to change its operating conditions according to the number of particles measured by the counter. [Effects of the Invention]

[0017] In the sheet fastening device of the present invention, it is determined whether or not a foreign object is attached to the surface of the object to be fastened when no sheet is fastened to the surface, and therefore, in this sheet fastening device, it is possible to prevent the sheet from being fastened to the surface of the object to be fastened when a foreign object is attached to the surface of the object to be fastened. [Brief explanation of the drawings]

[0018] [Figure 1] FIG. 1 is a perspective view schematically showing an example of an object to be fixed. [Figure 2] FIG. 2 is a block diagram schematically illustrating an example of a sheet fastening device. [Figure 3] FIG. 3 is a perspective view that schematically shows a cassette table that supports a cassette containing an object to be fixed. [Figure 4] FIG. 4 is a perspective view schematically showing a carry-in / out robot. [Figure 5] FIG. 5 is a perspective view schematically showing the imaging unit. [Figure 6] FIG. 6 is a side view that schematically shows how an image of an object to be fixed is captured by the imaging unit. [Figure 7] FIG. 7 is a perspective view schematically showing the foreign matter removal unit. [Figure 8] FIG. 8 is a perspective view schematically showing the preparation unit. [Figure 9] FIG. 9 is a perspective view schematically showing a raw roll. [Figure 10]FIG. 10 is a side view that schematically shows some of the components of the preparation unit when cutting out the area to be peeled from the protective sheet. [Figure 11] 11(A) and 11(B) are side views each showing a schematic view of some of the components of the preparation unit when peeling the peeled area of ​​the protection sheet from the individual sheet. [Figure 12] 12(A) and 12(B) are side views each showing a schematic view of some of the components of the preparation unit when peeling the peeled area of ​​the protection sheet from the individual sheet. [Figure 13] 13(A) and 13(B) are side views each showing a schematic view of some of the components of the preparation unit when peeling the peeled area of ​​the protection sheet from the individual sheet. [Figure 14] FIG. 14 is a perspective view schematically showing the fastening unit. [Figure 15] FIG. 15 is a perspective view schematically showing the removal unit. [Figure 16] FIG. 16 is a perspective view schematically showing the appearance of the sheet fastening device. [Figure 17] FIG. 17(A) is a block diagram that schematically shows an example of hardware that constitutes a controller, and FIG. 17(B) is a block diagram that schematically shows functional units realized by the controller. DETAILED DESCRIPTION OF THE INVENTION

[0019] <1 Object to be fixed> An embodiment of the present invention will be described with reference to the accompanying drawings. Fig. 1 is a perspective view showing a typical example of an object to be fixed. The object to be fixed 11 shown in Fig. 1 is, for example, a wafer having a circular front surface 11a and a back surface 11b, and made of a semiconductor such as silicon (Si).

[0020] Also, notches 11c for indicating the crystal orientation of the material are formed on the outer edge of the object 11. Furthermore, the object 11 is divided into a plurality of regions by a plurality of planned division lines 13 set in a lattice pattern, and a device 15 such as an IC is formed in each region.

[0021] There are no limitations on the material, shape, structure, size, etc. of the object 11. For example, the material of the object 11 is not limited to a semiconductor, but may be ceramic, resin, or metal. Also, an orientation flat may be formed on the outer edge of the object 11 instead of the notch 11c.

[0022] <2 Seat fixing device> Fig. 2 is a block diagram that schematically shows an example of a sheet fixing device for fixing a sheet to a fixing target 11. In Fig. 2, the movement path of a single fixing target 11 is indicated by a dashed arrow, the movement path of the sheet is indicated by a dashed arrow, and the movement path of the fixing target 11 to which the sheet is fixed is indicated by a solid arrow.

[0023] <(1) Cassette Table> The sheet fixing device 2 includes a cassette table 4 for supporting a cassette containing an object to be fixed 11. Fig. 3 is a perspective view showing a schematic view of the cassette table 4 supporting the cassette containing the object to be fixed 11. The cassette table 4 has a rectangular upper surface 4a that is substantially perpendicular to the vertical direction, and the cassette 6 is placed on this upper surface 4a.

[0024] The cassette 6 has a flat top panel 6a. The top panel 6a has a rectangular shape with a pair of adjacent corners chamfered and the remaining pair of corners remaining unchamfered. The upper ends of side panels (not shown) extending in a direction perpendicular to the top panel 6a (height direction) are fixed to the underside of the end (rear end) of the top panel 6a located between the pair of chamfered corners.

[0025] The upper ends of side plates 6b and 6c extending in the height direction are fixed to the lower sides of the two ends (left and right ends) of the tabletop 6a that are located between the chamfered portion and the non-chamfered corner. On the other hand, there is no side plate below the end (front end) of the tabletop 6a that is located between the pair of non-chamfered corners. In other words, the lower side of the front end of the tabletop 6a is open.

[0026] Furthermore, a plurality of grooves 6d extending in the front-rear direction are formed on the inner surfaces of the side plates 6b and 6c at approximately equal intervals in the height direction. Specifically, each of the plurality of grooves 6d formed on the inner surface of the side plate 6b is arranged to face one of the plurality of grooves 6d formed on the inner surface of the side plate 6c.

[0027] The cross-sectional shape of the groove 6d is generally rectangular. In other words, the groove 6d has a pair of side surfaces that are generally perpendicular to the height direction and a bottom surface that is generally parallel to the height direction. The object 11 is accommodated in the cassette 6 by placing the outer edge of the object 11 on the side surface of each of the pair of side surfaces of the plurality of grooves 6d that is farther from the top plate 6a. In other words, the object 11 is supported on the inner surface of the pair of opposing grooves 6d that is farther from the top plate 6a.

[0028] There is no limit to the number of grooves 6d formed on the inner surfaces of side plate 6b and side plate 6c. For example, cassette 6 may be formed with grooves 6d in the number corresponding to one lot (approximately 25 pieces) of objects 11 to be fixed. The lower part of side plate 6b and the lower part of side plate 6c are connected via a long, thin, plate-like connecting member 6e.

[0029] <(2) Loading and unloading robot> The object 11 stored in the cassette 6 is carried out by a carry-in / out robot 8 (see FIG. 2). FIG. 4 is a perspective view showing the carry-in / out robot 8. The carry-in / out robot 8 has a cylindrical first drive unit 10 that extends vertically. The first drive unit 10 is, for example, an actuator (not shown) such as an air cylinder that can raise and lower a rod.

[0030] An opening through which the rod passes is formed on the top surface of the first driving unit 10. A transfer arm 12 is connected to the upper end of the rod. Therefore, the transfer arm 12 is movable in the vertical direction. That is, when the first driving unit 10 is operated, the transfer arm 12 moves (rises and falls) in the vertical direction.

[0031] The transfer arm 12 has multiple joints. Specifically, the transfer arm 12 has a plate-shaped first arm 12a extending in a direction perpendicular to the vertical direction. The lower side of one end of this first arm 12a is connected to the upper end of the rod so as to move and rotate together with the rod. In addition, the lower side of a cylindrical first joint (not shown) is connected to the upper side of the other end of the first arm 12a.

[0032] A plate-shaped second arm 12b extending in a direction perpendicular to the vertical direction is connected to the upper side of the first joint. The lower side of one end of this second arm 12b is connected to the upper side of the other end of first arm 12a via the first joint in a manner that allows rotation around a straight line along the vertical direction as a rotation axis. Furthermore, the lower side of a cylindrical second joint 12c is connected to the upper side of the other end of second arm 12b.

[0033] A rotation mechanism 14 is connected to the upper side of the second joint portion 12c. This rotation mechanism 14 has a rectangular parallelepiped case 14a extending in a direction perpendicular to the vertical direction, and a spindle 14b inserted into the case 14a through an opening formed in a side plate located at one end of the case 14a.

[0034] The lower side of one end of the case 14a is connected to the upper side of the other end of the second arm 12b via the second joint 12c in a manner that allows rotation around a straight line along the vertical direction as a rotation axis. The case 14a also houses a motor (not shown) connected to the base end of the spindle 14b. When the motor is operated, the spindle 14b rotates around a straight line perpendicular to the vertical direction as a rotation axis.

[0035] Furthermore, a light emitting unit 16 is connected to the tip of the spindle 14b. The light emitting unit 16 has a plate-shaped case 16a fixed to the tip of the spindle 14b and a light source (not shown) such as a light emitting diode (LED) built into the case 16a. An opening is formed in the side plate of the case 16a on the side farther from the spindle 14b.

[0036] When a light source built into case 16a is operated, light such as visible light passes through this opening and is emitted from light-emitting unit 16. Furthermore, U-shaped holding unit 18 is connected to case 16a. Specifically, holding unit 18 has its base end, i.e., its center, fixed to case 16a (specifically, the side plate on the side farther from spindle 14b) so as to be symmetrical about the straight line that is the rotation axis of spindle 14b.

[0037] The holding portion 18 has a pair of tips, and the distance I between the pair of tips is smaller than the diameter of the object 11, for example, equal to the radius thereof. Furthermore, the holding portion 18 has a built-in light guide plate (not shown) made of, for example, a resin or the like that transmits the light emitted from the light-emitting portion 16. When light is emitted from the light-emitting portion 16, the light is irradiated from one surface 18a of the holding portion 18, that is, one surface 18a of the holding portion 18 emits light.

[0038] Additionally, a plurality of suction holes (not shown) are formed on each of the one surface 18a and the other surface 18b of the holding portion 18. The plurality of suction holes formed on the one surface 18a of the holding portion 18 can be selectively connected to a first suction source (not shown) or a first air supply source (not shown). The plurality of suction holes formed on the other surface 18b of the holding portion 18 can be selectively connected to a second suction source (not shown) separate from the first suction source or a second air supply source (not shown) separate from the first air supply source.

[0039] Each of the first suction source and the second suction source includes, for example, an ejector, etc. Each of the first air supply source and the second air supply source includes, for example, a tank for storing air, a filter for removing foreign matter mixed in the air supplied from the tank, and a regulator for adjusting the pressure of the air supplied from the tank.

[0040] When the first suction source communicating with the plurality of suction holes formed on one surface 18a of the holding portion 18 is operated, the pressure in the plurality of suction holes becomes negative, and a suction force acts on the space near one surface 18a of the holding portion 18. In addition, by applying this suction force to the object to be conveyed (specifically, the object 11 to be fixed or the object 11 to which the sheet is fixed), the object to be conveyed can be held on one surface 18a of the holding portion 18.

[0041] Furthermore, when the operation of the first suction source is stopped and the first air supply source communicating with the plurality of suction holes is operated while the object to be transferred is held in this manner, the pressure in the plurality of suction holes returns to atmospheric pressure, and the object to be transferred is no longer sucked toward one surface 18a of holder 18. Furthermore, since this suction force no longer acts on the object to be transferred, it becomes easier to separate the object to be transferred from one surface 18a of holder 18.

[0042] Similarly, when a second suction source communicating with a plurality of suction holes formed on the other surface 18b of the holder 18 is operated, the pressure in the plurality of suction holes becomes negative, and a suction force acts on the space near the other surface 18b of the holder 18. In addition, by applying this suction force to the object to be conveyed, the object can be held on the other surface 18b of the holder 18.

[0043] Furthermore, when the operation of the second suction source is stopped and the second air supply source communicating with the plurality of suction holes is operated while the object to be transferred is held in this manner, the pressure in the plurality of suction holes returns to atmospheric pressure, and the object to be transferred is no longer sucked toward the other surface 18b of the holder 18. Furthermore, since this suction force no longer acts on the object to be transferred, it becomes easier to separate the object to be transferred from the other surface 18b of the holder 18.

[0044] Furthermore, one surface 18a of holder 18 is used, for example, when transporting the object before foreign matter is removed in foreign matter removal unit 26, which will be described later, and the other surface 18b is used when transporting the object after foreign matter has been removed in foreign matter removal unit 26, which will be described later. In this case, other surface 18b of holder 18 is more likely to be kept clean than one surface 18a, and foreign matter is prevented from adhering to the object from other surface 18b.

[0045] Furthermore, when the motor built into the case 14a of the rotation mechanism 14 is operated while the object to be transported is held on one surface 18a or the other surface 18b of the holder 18, the light emitting unit 16, the holder 18, and the object to be transported rotate together with the spindle 14b, around a rotation axis that is a straight line perpendicular to the vertical direction. Therefore, by rotating the spindle 14b by, for example, 180°, it is possible to turn the object to be transported upside down.

[0046] In addition, the carry-in / out robot 8 is connected to a horizontal movement mechanism (not shown). This horizontal movement mechanism includes, for example, a support plate that supports the carry-in / out robot 8, a ball screw for moving the support plate in the horizontal direction, and a motor for rotating the screw shaft of the ball screw. When this motor is operated, the carry-in / out robot 8 moves in the horizontal direction together with the support plate.

[0047] <(3) Imaging unit> Prior to fixing a sheet to the fixing surface (here, surface 11a) of the fixing object 11, the carry-in / out robot 8 transports the fixing object 11 to the imaging unit 19 (see FIG. 2). The imaging unit 19 then forms an image that is used to determine whether or not a foreign substance is attached to the surface 11a of the fixing object 11. Furthermore, the imaging unit 19 may form an image that is used to determine the position of the notch 11c or orientation flat in the fixing object 11.

[0048] 5 is a perspective view schematically illustrating the imaging unit 19. The imaging unit 19 has a backlight 20. The backlight 20 includes a support plate 20a that is rectangular in plan view and a plurality of light sources (e.g., LEDs) 20b that are arranged in a matrix on the upper surface of the support plate 20a and each have a circular shape in plan view. When the light sources 20b are operated, light such as visible light is emitted upward from the backlight 20.

[0049] Furthermore, a pair of oblique illuminators 22 are provided above the backlight 20 so as to face each other across the backlight 20 in a plan view. Each oblique illuminator 22 includes a support plate 22a whose length is approximately equal to that of the backlight 20, and a plurality of light sources (e.g., LEDs) 22b that are arranged in a matrix on the surface of the support plate 22a facing the backlight 20 and each have a circular shape in a front view. When the plurality of light sources 22b are operated, light such as visible light is emitted from each oblique illuminator 22 obliquely downward, for example, toward the backlight 20.

[0050] Furthermore, a camera 24 is provided directly above the backlight 20 and diagonally above each oblique light illuminator 22. This camera 24 includes an objective lens and a light receiving element such as a CCD (Charge Coupled Device) image sensor or a CMOS (Complementary Metal Oxide Semiconductor) image sensor, and is capable of capturing images of the area below the camera 24.

[0051] 6 is a side view that schematically shows how the object 11 is imaged by the imaging unit 19. When imaging, the object 11 is first held on one surface 18a of the holder 18 so that the front surface 11a is exposed and facing upward, and the carry-in / out robot 8 is operated so that the object 11 is positioned slightly above the backlight 20 and between the pair of oblique lights 22.

[0052] When forming an image to be used for determining whether or not a foreign substance is attached to the surface 11a, the object 11 is imaged by the camera 24 while operating the multiple light sources 22b of the oblique lighting 22. That is, this image is taken in a state where the object 11 is irradiated with light from obliquely above.

[0053] In this case, the intensity of light received by the light receiving element of camera 24 is likely to change significantly depending on the presence or absence of foreign matter on surface 11a of object 11. Therefore, in this case, camera 24 can form an image that makes it easy to determine whether or not foreign matter is attached to surface 11a.

[0054] Furthermore, when forming an image used to grasp the position of the notch 11c or the orientation flat in the object 11, the object 11 is imaged by the camera 24 while operating the light sources of the light-emitting unit 16 of the carry-in / out robot 8 in addition to the multiple light sources 20b of the backlight 20. That is, this image is taken in a state where the object 11 is irradiated with light from the back surface 11b side.

[0055] In this case, light is irradiated onto the entire outer edge of the object to be fixed 11. That is, the light from the light emitting unit 16 is irradiated onto the portion of the outer edge of the object to be fixed 11 that overlaps with the holding unit 18, and the light from the backlight 20 is irradiated onto the other portion. Therefore, in this case, an image can be formed that makes it easy to grasp the position of the notch 11c or the orientation flat on the object to be fixed 11.

[0056] Additionally, this image may be used to ascertain the deviation in plan view between a reference point when the object 11 is transported by the transport robot 8 and the center of the object 11 with its surface 11a facing upward (hereinafter also referred to as "deviation during transport"). Note that this reference point is, for example, the point at which the object 11 can be most stably held by the holding unit 18 when it coincides with the center of the object 11 in plan view.

[0057] Specifically, based on this image, it is possible to identify the positions (coordinates on a plane perpendicular to the vertical direction) of at least three points included in the outer edge of the object 11. Then, by referring to the positions of these points, it is possible to calculate the position of the center of the object 11 (coordinates on a plane perpendicular to the vertical direction). Therefore, based on this image, it is possible to grasp the deviation during transport.

[0058] <(4) Foreign object removal unit> If it is determined that a foreign substance is attached to the surface 11a of the object 11 based on the image formed by imaging by the imaging unit 19, the carry-in / out robot 8 transports the object 11 to the foreign substance removal unit 26 (see FIG. 2) before the sheet is fixed to the surface 11a. Then, in the foreign substance removal unit 26, the foreign substance attached to the surface 11a of the object 11 is removed.

[0059] 7 is a perspective view that schematically shows foreign matter removal unit 26. Foreign matter removal unit 26 has cover 28. A circular opening 28a having a diameter larger than that of object 11 is formed in the center of the upper surface of cover 28, and a disk-shaped spinner table 30 is provided in opening 28a. Spinner table 30 has a disk-shaped frame 30a made of, for example, ceramics or the like.

[0060] The frame 30a includes a disk-shaped bottom wall and a cylindrical side wall extending from the outer edge of the bottom wall. A recess is formed on the top surface of the frame 30a. A disk-shaped porous plate 30b made of porous ceramics or the like is fixed in the recess. The outer diameter of the side wall of the frame 30a, i.e., the diameter of the top surface of the spinner table 30, is smaller than the distance I between the pair of tips of the holders 18 of the carry-in / out robot 8.

[0061] Furthermore, a flow path is formed in the frame 30a, and this flow path can be selectively connected to a suction source (not shown), an air supply source (not shown), or a liquid supply source (not shown). The suction source includes, for example, an ejector. The air supply source includes, for example, a tank for storing air, a filter for removing foreign matter mixed in the air supplied from the tank, and a regulator for adjusting the pressure of the air supplied from the tank. The liquid supply source includes, for example, a tank for storing liquid such as water, and a pump for delivering this liquid.

[0062] When a suction source communicating with a flow path formed in the frame body 30a is operated, the pressure in this flow path becomes negative, and a suction force acts on the space near the upper surface of the porous plate 30b. In addition, by applying this suction force to the object to be removed (specifically, the object 11 to be fixed or the object 11 to which the sheet is fixed), the object to be removed can be held using the upper surface of the spinner table 30 as a holding surface.

[0063] Furthermore, when the operation of the suction source is stopped and the air supply source communicating with this flow path is operated while the object to be removed is held in this manner, the pressure in this flow path returns to atmospheric pressure, and the object to be removed is no longer sucked toward the holding surface of spinner table 30. In addition, since this suction force no longer acts on the object to be removed, it becomes easier to separate the object to be removed from the holding surface of spinner table 30.

[0064] Furthermore, after the object to be removed from the holding surface of the spinner table 30 has been separated, operating the liquid supply source that is in communication with this flow path will supply liquid to the holding surface of the spinner table 30 via this flow path, thereby making it possible to clean the holding surface of the spinner table 30.

[0065] In addition, the spinner table 30 is connected to a rotation mechanism 32. The rotation mechanism 32 includes, for example, a shaft 32a that supports the spinner table 30, a pulley (not shown) connected to the shaft 32a, and a motor (not shown) for rotating the pulley.

[0066] The spinner table 30 and the rotation mechanism 32 are connected to a lifting mechanism (not shown). This lifting mechanism is, for example, an actuator such as an air cylinder that can raise and lower the spinner table 30 and the rotation mechanism 32. By operating this lifting mechanism, the spinner table 30 can be positioned above or below the upper surface of the cover 28.

[0067] A fluid ejection mechanism 34 is provided near the spinner table 30. This fluid ejection mechanism 34 includes a downward-facing nozzle 34a. The nozzle 34a is connected to the tip of a pipe 34b that extends in a direction perpendicular to the vertical direction. The base end of the pipe 34b is connected to the upper end of a pipe 34c that extends in the vertical direction.

[0068] The pipe 34c is provided to penetrate the cover 28 and is connected to a fluid supply source (not shown) capable of supplying a fluid including a gas such as air and / or a liquid such as water. The fluid supply source includes, for example, a tank for storing a gas such as air, a filter for removing foreign matter mixed in the gas supplied from the tank, and a regulator for adjusting the pressure of the gas supplied from the tank. Furthermore, the fluid supply source may include, in addition to or instead of these, a tank for storing a liquid such as water and a pump for feeding this liquid.

[0069] The pipe 34c is connected to a motor (not shown) for rotating the pipe 34c around a vertical line as a rotation axis. By operating this motor, the nozzle 34a can be positioned so that it either overlaps with or does not overlap the opening 28a of the cover 28 in a plan view.

[0070] Furthermore, foreign matter removal unit 26 may be provided with a brushing mechanism for brushing the object to be removed that is held on the holding surface of spinner table 30. This brushing mechanism has a brush, such as a pen brush, and removes foreign matter adhering to the object to be removed by bringing this brush into contact with the object to be removed.

[0071] When removing foreign matter adhering to the surface 11a of the object 11 in the foreign matter removal unit 26, first, the motor connected to the fluid ejection mechanism 34 is operated so as to position the nozzle 34a of the fluid ejection mechanism 34 at a position that does not overlap with the opening 28a of the cover 28 in a plan view. Next, the lifting mechanism is operated so as to position the spinner table 30 above the upper surface of the cover 28.

[0072] Next, the object 11 is held on one surface 18a of the holder 18 so that the surface 11a is exposed and facing upward, and the carry-in / out robot 8 is operated to position the object 11 on the spinner table 30. If the deviation during transport described above is known, it is preferable to operate the carry-in / out robot 8 so that the center of the object 11 is positioned directly above the center of the spinner table 30 by taking the deviation during transport into account.

[0073] Next, the carry-in / out robot 8 is operated to lower the object 11 until the back surface 11b contacts the holding surface of the spinner table 30. Next, the carry-in / out robot 8 is operated to separate the object 11 from the holder 18. Next, the suction source communicating with the flow path formed in the frame 30a of the spinner table 30 is operated so that the object 11 is held on the holding surface of the spinner table 30.

[0074] Next, the carry-in / out robot 8 is operated so that the holder 18 is positioned so as not to overlap the opening 28a of the cover 28. Next, the lifting mechanism is operated so that the spinner table 30 is positioned below the upper surface of the cover 28. Next, the motor connected to the fluid ejection mechanism 34 is operated so that the nozzle 34a of the fluid ejection mechanism 34 is positioned so as to overlap the object 11 in a plan view.

[0075] Next, the motor connected to the fluid injection mechanism 34, the fluid supply source of the fluid injection mechanism 34, and the motor of the rotation mechanism 32 are operated so as to inject a fluid (e.g., gas) from the nozzle 34a toward the surface 11a of the object 11 while swinging the nozzle 34a and rotate the spinner table 30.

[0076] This causes the fluid to be supplied to the entire surface 11a of the object 11 so as to remove foreign matter adhering to the surface 11a. If the foreign matter removal unit 26 is provided with a brushing mechanism, the entire surface 11a may be brushed to remove foreign matter adhering to the surface 11a of the object 11 before or after the fluid is sprayed onto the surface 11a of the object 11 using the fluid spraying mechanism 34.

[0077] Once the foreign matter has been removed from the surface 11a of the object 11 in the foreign matter removal unit 26, the motor connected to the fluid ejection mechanism 34 is operated to position the nozzle 34a of the fluid ejection mechanism 34 at a position that does not overlap the opening 28a of the cover 28 in a plan view. Next, the lifting mechanism is operated to position the spinner table 30 above the upper surface of the cover 28.

[0078] Next, the operation of the suction source communicating with the flow path formed in frame 30a of spinner table 30 is stopped, and the air supply source communicating with this flow path is operated, so that object 11 is simply placed on the holding surface of spinner table 30. Next, other surface 18b of holding part 18 is brought into contact with surface 11a of object 11, and object 11 is held by other surface 18b, and then carry-in / out robot 8 is operated to carry object 11 out of foreign matter removal unit 26.

[0079] <(5) Preparation Unit> The sheet to be fixed to the surface 11a of the object 11 is prepared in a preparation unit 36 ​​(see FIG. 2). Specifically, in the preparation unit 36, an individual sheet including a fixing region having a shape corresponding to the surface 11a of the object 11 and an excess region surrounding the fixing region is prepared by pulling out and cutting out a desired portion from an original roll. Note that in this specification, the shape corresponding to the surface 11a of the object 11 means, for example, a circle that overlaps with the outer edge of the object 11 excluding the notch 11c or orientation, or a concentric circle of the circle whose radius is obtained by adding a predetermined offset amount to the radius of this circle.

[0080] Fig. 8 is a perspective view schematically showing the preparation unit 36. In Fig. 8, the direction indicated by arrow X (X direction) and the direction indicated by arrow Y (Y direction) are directions perpendicular to each other on a horizontal plane. In Fig. 8, the direction indicated by arrow Z (Z direction) is a direction perpendicular to both the X direction and the Y direction (vertical direction). In the preparation unit 36, the raw web roll 21 is arranged along the Y direction, and a desired portion is pulled out from its lower end along the X direction.

[0081] <A. Raw material roll> 9 is a perspective view schematically showing the raw fabric roll 21. The raw fabric roll 21 has a rectangular strip sheet 23 whose length is significantly longer than its width (length along the Y direction), and a protective sheet 25 that has the same shape as the strip sheet 23 and is laminated on the strip sheet 23 so as to be located more inward than the strip sheet 23 on the raw fabric roll 21.

[0082] The strip-shaped sheet 23 has a film-like base layer and an adhesive layer provided on the inner side of the base layer. The base layer contains a resin such as polypropylene (PP), polyethylene (PE), polyethylene terephthalate (PET), polyvinyl chloride (PVC), or polystyrene (PS). The adhesive layer contains a UV-curable silicone material, an acrylic material, or an epoxy material.

[0083] The protective sheet 25 is a so-called release film, and includes a film-like base layer and a release layer provided on the base layer facing the strip sheet 23. The base layer contains a resin such as PP, PE, or PET. The release layer contains, for example, a silicone-based material such as a fluorine-containing silicone-based material or a non-silicone-based material.

[0084] The strip-shaped sheet 23 includes a portion 23a that will become an individual sheet when it is pulled out from the raw sheet roll 21 and cut out in the preparation unit 36. The portion 23a that will become an individual sheet includes a fixing region 27a located in the center thereof and having a shape corresponding to the surface 11a of the object 11, and an excess region 27b that surrounds the fixing region 27a.

[0085] If the surface 11a of the object 11 is, for example, circular and 300 mm in diameter, the portion 23a that will become the individual sheet has, for example, a square shape with each side measuring 320 mm to 380 mm (typically 350 mm). That is, in this case, the fixing region 27a has a circular shape with a diameter of 300 mm, and the excess region 27b has a shape that includes a circular inner periphery with a diameter of 300 mm and a square outer periphery with each side measuring 320 mm to 380 mm.

[0086] <A. Pull-out section and foreign object removal section> The preparation unit 36 ​​has a pull-out section 38 for pulling out the portion 23a from the raw roll 21 including the portion 23a to be formed into individual sheets (see FIG. 8). The pull-out section 38 has a fixed member 40 and a movable member 42, each of which has a width (length along the Y direction) greater than the width of the raw roll 21.

[0087] The fixing member 40 has an upper surface parallel to both the X and Y directions, and supports the laminate of the strip sheet 23 and the protective sheet 25 pulled out from the raw fabric roll 21 on this upper surface. A groove 40a is formed on the upper surface of the fixing member 40. This groove 40a extends along the Y direction, and its length is greater than the width of the raw fabric roll 21.

[0088] The movable member 42 is located above the fixed member 40 by a distance approximately equal to the thickness of the laminate of the strip-shaped sheet 23 and the protective sheet 25, and has a lower surface parallel to both the X and Y directions. The movable member 42 also has a through passage 42a formed therein that penetrates the movable member 42 in the Z direction. The through passage 42a extends along the Y direction, and its length is approximately equal to the length of the groove 40a.

[0089] Furthermore, the movable member 42 is connected to an X-direction movement mechanism (not shown). This X-direction movement mechanism includes, for example, a support plate fixed to one end of the movable member 42, a ball screw for moving the support plate along the X direction, and a motor for rotating the screw shaft of the ball screw. When this motor is operated, the movable member 42 moves along the X direction between a position close to (proximal position) and a position far from (distal position) the original web roll 21.

[0090] Specifically, the proximal position is a position where the groove 40a formed on the upper surface of the fixed member 40 and the through passage 42a formed in the movable member 42 overlap in the Z direction. The distal position is a position that is separated from the proximal position in the X direction by a predetermined distance that is greater than the length of the portion 23a that will become the individual sheet.

[0091] 8 shows the movable member 42 positioned at the distal position. When the movable member 42 is positioned at the proximal position, the laminate of the strip-shaped sheet 23 and the protective sheet 25 supported by the fixed member 40 is sandwiched between the fixed member 40 and the movable member 42.

[0092] In addition, a plurality of suction holes (not shown) are formed on the underside of the movable member 42 on a side closer to the raw fabric roll 21 than the through passage 42a. The plurality of suction holes can be selectively connected to a suction source (not shown) or an air supply source (not shown). The suction source includes, for example, an ejector. The air supply source includes, for example, a tank for storing air, a filter for removing foreign matter mixed in the air supplied from the tank, and a regulator for adjusting the pressure of the air supplied from the tank.

[0093] When the suction source communicating with the plurality of suction holes is operated, the pressure in the plurality of suction holes becomes negative, and a suction force acts on the space near the side of the underside of the movable member 42 that is closer to the raw fabric roll 21 than the through passage 42a. When the operation of the suction source is stopped and then the air supply source communicating with the plurality of suction holes is operated, the pressure in the plurality of suction holes returns to atmospheric pressure, and the suction force disappears.

[0094] In plan view, a foreign matter removal unit 44 for removing foreign matter adhering to the portion 23a to be formed into individual sheets is provided between the fixed member 40 of the drawer 38 and the raw roll 21. This foreign matter removal unit 44 has a rectangular parallelepiped case 46 located below the stack of the strip-shaped sheet 23 and the protective sheet 25, and a static eliminator (not shown) and a suction device (not shown) built into this case 46.

[0095] To eliminate static electricity from the underside (specifically, the side of the strip sheet 23) of the laminate of the strip sheet 23 and the protective sheet 25, the static eliminator irradiates ions upward together with air through a first through passage 46a formed in the top plate of the case 46. The first through passage 46a extends in the Y direction, and its length is greater than the width of the raw fabric roll 21.

[0096] The suction device is formed on the top plate of the case 46 and applies suction force to the space above the case 46 via a second through passage 46b located farther from the raw fabric roll 21 than the first through passage 46a in order to remove foreign matter adhering to the underside of the laminate of the strip sheet 23 and the protective sheet 25. The second through passage 46b extends along the Y direction and has a length approximately equal to that of the first through passage 46a.

[0097] Furthermore, in the preparation unit 36, another foreign matter removal unit having a structure similar to that of the foreign matter removal unit 44 may be provided so as to face the foreign matter removal unit 44 via the stack of the strip-shaped sheet 23 and the protective sheet 25. That is, in the preparation unit 36, a foreign matter removal unit may be provided that can neutralize the upper surface side of this stack (specifically, the protective sheet 25 side) and remove foreign matter adhering to the upper surface side.

[0098] When pulling out the portion 23a that will become the individual sheet from the raw roll 21, first, the X-direction movement mechanism is operated so that the stack of the strip-shaped sheet 23 and the protective sheet 25 supported by the fixed member 40 is clamped between the fixed member 40 and the movable member 42, i.e., so that the movable member 42 is positioned in a proximal position.

[0099] Next, a suction source communicating with the plurality of suction holes formed on the lower surface of the movable member 42 is operated to apply a suction force to the stack of the strip-shaped sheet 23 and the protective sheet 25. As a result, the stack of the strip-shaped sheet 23 and the protective sheet 25 is sucked toward the lower surface of the movable member 42.

[0100] Next, while operating at least one foreign matter removal unit 44 (specifically, its static eliminator and suction unit), the X-direction movement mechanism is operated to position the movable member 42 at the distal position. As a result, portions 23a that will become individual sheets with a reduced amount of adhering foreign matter are pulled out from the raw web roll 21 between the proximal and distal positions.

[0101] <C Holding part> A holding unit 48 for holding the portion 23a that will become the individual sheet is provided below the portion 23a that will become the individual sheet pulled out by the pull-out unit 38. The holding unit 48 has a holding plate 50, the length of each side of which is approximately equal to the width of the raw roll 21, and which includes one surface 50a and another surface 50b that are parallel to each other.

[0102] Suction holes 50c are formed in each of the four corners of one surface 50a of the holding plate 50. Each suction hole 50c can be selectively connected to a suction source (not shown) or an air supply source (not shown). The suction source includes, for example, an ejector. The air supply source includes, for example, a tank for storing air, a filter for removing foreign matter mixed in the air supplied from the tank, and a regulator for adjusting the pressure of the air supplied from the tank.

[0103] When the suction source communicating with each suction hole 50c is operated, the pressure in each suction hole 50c becomes negative, and a suction force acts on the space near the four corners of one surface 50a of the holding plate 50. When the operation of this suction source is stopped and then the air supply source communicating with each suction hole 50c is operated, the pressure in each suction hole 50c returns to atmospheric pressure, and the suction force disappears.

[0104] The holding plate 50 is connected to a rotation mechanism 52. The rotation mechanism 52 has a cylindrical shaft 52a that extends along the X direction and is fixed to the center of the other surface 50b of the holding plate 50 in the Y direction, and a motor 52b for rotating the shaft 52a. Therefore, by operating the motor 52b, the holding plate 50 can be turned upside down.

[0105] Furthermore, the rotation mechanism 52 is connected to a Z-direction movement mechanism 54. This Z-direction movement mechanism 54 is, for example, an actuator such as an air cylinder that can raise and lower a rod whose upper end is fixed to a motor 52b. Therefore, by operating this Z-direction movement mechanism 54, it is possible to raise and lower the holding plate 50 together with the rotation mechanism 52.

[0106] Then, as described above, when the portion 23a to become the individual sheet is pulled out from the raw roll 21 by the pull-out unit 38, the portion 23a to become the individual sheet is held by the holding unit 48. Specifically, first, the rotation mechanism 52 is operated so that one surface 50a of the holding plate 50 faces upward. Next, the Z-direction movement mechanism 54 is operated so as to raise the holding plate 50 until the one surface 50a comes into contact with the portion 23a to become the individual sheet.

[0107] Next, a suction source communicating with suction holes 50c formed in each of the four corners of one surface 50a of the holding plate 50 is operated to apply a suction force to the portions 23a that will become individual sheets. As a result, the portions 23a that will become individual sheets are held on the one surface 50a of the holding plate 50.

[0108] <D. Cut-out section> A cutting section 56 is provided directly above the fixing member 40 to cut out the portions 23a that will become individual sheets from the raw roll 21. The cutting section 56 is located directly above the grooves 40a and has a cutter 58 with its tip facing downward. The tip of a support member 60 is fixed above the cutter 58.

[0109] The support member 60 is connected to a Y-direction and Z-direction movement mechanism (not shown). This Y-direction and Z-direction movement mechanism includes, for example, a Y-direction support plate fixed to the base end of the support member 60, a Y-direction ball screw for moving this Y-direction support plate along the Y direction, and a Y-direction motor for rotating the screw shaft of this Y-direction ball screw. When this Y-direction motor is operated, the support member 60 and cutter 58 move along the Y direction together with the Y-direction support plate.

[0110] The Y- and Z-direction movement mechanism further includes, for example, a Z-direction support plate fixed to a Y-direction ball screw and a Y-direction motor, a Z-direction ball screw for moving the Z-direction support plate along the Z direction, and a Z-direction motor for rotating the screw shaft of the Z-direction ball screw. When the Z-direction motor is operated, the Y-direction support plate, the Y-direction ball screw, the Y-direction motor, the support member 60, and the cutter 58 move along the Z direction together with the Z-direction support plate.

[0111] Then, once the portions 23a that will become individual sheets are held by the holding portion 48 as described above, first, the operation of the suction source that communicates with the plurality of suction holes formed in the underside of the movable member 42 is stopped, and the air supply source that communicates with the plurality of suction holes is operated. As a result, the pressure in the plurality of suction holes returns to atmospheric pressure, and the portions 23a that will become individual sheets are no longer sucked toward the underside of the movable member 42, and gravity acts on the portions 23a that will become individual sheets, causing them to be separated from the movable member 42.

[0112] Next, the X-direction movement mechanism is operated so that the through passage 42a formed in the movable member 42 and the groove 40a formed in the upper surface of the fixed member 40 overlap in the Z direction, i.e., so that the movable member 42 is positioned at a proximal position. Next, the Y-direction and Z-direction movement mechanisms are operated so that the cutting edge of the cutter 58 is positioned at one end of the groove 40a in the Y direction.

[0113] Next, the Y-direction and Z-direction movement mechanism is operated so that the cutting edge of the cutter 58 passes from one end to the other in the Y direction of the stack of the strip-shaped sheet 23 and the protective sheet 25. As a result, the stack is cut along the Y direction, and individual sheets are cut out from the raw sheet roll 21.

[0114] <E Cutout section> A cutout portion 62 is provided in the X direction as viewed from the cutout portion 56 to cut out an area (peeled area) of the protective sheet 25 that overlaps with the fixed area 27a of the individual sheet. The cutout portion 62 has a support member 64 that is cross-shaped in a plan view. A through hole is formed in the center of the support member 64, and a shaft 68 is provided in the through hole via a bearing 66.

[0115] The upper end of the shaft 68 is connected to a motor (not shown) for rotating the shaft 68, and the lower end thereof is connected to the upper side of one end of a plate-shaped connecting member 70 that extends in a direction perpendicular to the Z direction. Furthermore, a cutting tool 72 is provided below the other end of the connecting member 70.

[0116] The cutting tool 72 has a rectangular cylindrical cover 72a and a circular blade cutter 72b that is partially housed in the cover 72a so that its cutting edge (lower end) is exposed. The cover 72a also houses a motor (not shown) for rotating the circular blade cutter 72b around a rotation axis that is a straight line perpendicular to the Z direction.

[0117] The distance between the straight line that serves as the rotation axis of the shaft 68 and the lower end of the circular blade cutter 72b in a plan view is set to be slightly larger than the radius of the surface 11a of the object 11. For example, if this radius is 150 mm, then this distance is set to 150.5 mm to 155 mm (typically 152.5 mm).

[0118] Additionally, the upper ends of cylindrical rods 74 extending along the Z direction are fixed to the lower sides of the four ends of the support member 64. Furthermore, elastic members 76 made of resin or the like and having circular lower surfaces roughly parallel to both the X and Y directions are provided at the lower ends of the rods 74.

[0119] As described above, when the individual sheets are cut out from the raw sheet roll 21 by the cutting unit 56, each elastic member 76 is positioned directly above one of the four suction holes 50c formed on one surface 50a of the holding plate 50. The lower surface of each elastic member 76 is positioned at approximately the same height as the lower end of the circular blade cutter 72b.

[0120] Additionally, the support member 64 is connected to a Z-direction movement mechanism (not shown). This Z-direction movement mechanism includes, for example, a support plate fixed to the support member 64, a ball screw for moving the support plate along the Z direction, and a motor for rotating the screw shaft of the ball screw. When this motor is operated, the cutting tool 72, the elastic member 76, etc. move along the Z direction together with the support plate.

[0121] Then, as described above, once the individual sheets are cut out from the raw sheet roll 21 by the cutting unit 56, the area to be peeled off of the protective sheet 25 is cut out. Fig. 10 is a side view schematically showing some of the components of the preparation unit 36 ​​during this cutting out. Fig. 10 also shows a cross section of the stack of the individual sheets 27 and the protective sheet 25.

[0122] When cutting out the area to be peeled of the protective sheet 25, first, the Z-direction movement mechanism connected to the support member 64 is operated to lower the circular blade cutter 72b until its lower end penetrates the protective sheet 25 and reaches the inside of the individual sheet 27. Next, the motor connected to the upper end of the shaft 68 is operated to rotate the circular blade cutter 72b at least one revolution. This cuts out the area to be peeled of the protective sheet 25.

[0123] This cutting is performed in a state where the stack of individual sheet pieces 27 and protective sheet 25 near the four corners of one surface 50a of holding plate 50 is elastically deformed by being pressed by elastic member 76 and pressed toward one surface 50a. Therefore, during cutting, it is possible to reduce the likelihood of misalignment of the stack of individual sheet pieces 27 and protective sheet 25.

[0124] This cutting may be performed while rotating the circular blade cutter 72b itself using a motor housed in the cover 72a, or may be performed without rotating the circular blade cutter 72b itself. However, if cutting is performed without rotating the circular blade cutter 72b itself, only the portion near the bottom end of the circular blade cutter 72b is likely to wear out and lose its sharpness.

[0125] Therefore, when performing n (n is a natural number of 2 or more) cutouts without rotating the circular blade cutter 72b itself, it is preferable to change the portion of the circular blade cutter 72b used for cutting each time one or m (m is a natural number of 2 or more and less than n) cutouts are performed. That is, in such a case, after the first cutout has been performed and before the second cutout has been performed, or after the mth cutout has been performed and before the (m+1)th cutout has been performed, the motor housed in the cover 72a may be operated to rotate the circular blade cutter 72b by a predetermined angle (e.g., 12°).

[0126] <F Peeling part> A peeling section 78 for peeling the peeled region of protective sheet 25 from individual sheet 27 is provided directly below cutout section 62 (see FIG. 8 ). This peeling section 78 is broadly divided into a pre-processing section 80 for peeling a portion of the peeled region of protective sheet 25 that will serve as a peeling starting point from individual sheet 27, and a post-processing section 84 for peeling the remainder of the peeled region from individual sheet 27.

[0127] Pre-treatment unit 80 is, for example, an actuator such as an air cylinder that has a rectangular rod 82 extending along the Z direction and is capable of raising and lowering rod 82. Note that rod 82 is located directly below a point slightly inside one end of the peeled region in the Y direction when the peeled region of protective sheet 25 is cut out by cutout unit 62 as described above.

[0128] The rod 82 also includes an upper end (suction end) 82a that can be attached to the contact point. The suction end 82a is made of, for example, an adhesive gel. Alternatively, the suction end 82a may be a structure (a so-called suction pad) that can lower the pressure in the space on the contact interface side below the ambient pressure.

[0129] Note that pre-treatment unit 80 may have any structure as long as it is capable of peeling a portion of protective sheet 25 that serves as a peeling starting point from individual sheet 27. For example, pre-treatment unit 80 may include, instead of the above-described actuator, a claw- or needle-shaped member and an entry mechanism for causing this member to enter the interface between the peeled region of protective sheet 25 and individual sheet 27. Alternatively, pre-treatment unit 80 may include, instead of the above-described actuator, an injection mechanism capable of injecting air into the interface between the peeled region of protective sheet 25 and individual sheet 27.

[0130] Furthermore, to facilitate this peeling, pre-processing unit 80 may include a clamping mechanism (not shown) for gripping the stack of individual sheet 27 and a region other than the region to be peeled of protective sheet 25. Specifically, when peeling a portion of the region to be peeled of protective sheet 25 that will be the starting point of peeling from individual sheet 27, this clamping mechanism grips, for example, a location of this stack that is close to the portion that will be the starting point of peeling.

[0131] The post-processing section 84 has a feeding mechanism 86. The feeding mechanism 86 includes a rectangular parallelepiped case 88 extending along the Y direction, and openings 88a extending along the Y direction are formed in side plates of the case 88 that are parallel to the X and Y directions. The case 88 supports a drive roller 90 and a driven roller 92 in a rotatable manner.

[0132] The drive roller 90 and the driven roller 92 each extend along the X direction, and their base ends are inserted into openings 88a formed in the side plates of the case 88. The drive roller 90 is also provided to pass through the case 88, and a motor 94 is connected to its base end.

[0133] The motor 94 is fixed to a side plate located on the opposite side to the side plate where the opening 88a of the case 88 is formed. When the motor 94 is operated, the drive roller 90 rotates, for example, clockwise in a side view, around a rotation axis that is a straight line along the X direction.

[0134] Furthermore, an actuator (not shown) for adjusting the distance in the Y direction between the drive roller 90 and the driven roller 92 is built into the case 88. This actuator can move the drive roller 90 and the driven roller 92 apart until the distance between them becomes larger than the length of the rod 82 in the Y direction, and can move the drive roller 90 and the driven roller 92 relatively so as to bring them closer together until they come into contact.

[0135] Furthermore, when the motor 94 is operated while the drive roller 90 and the driven roller 92 are in contact with each other, the torque of the drive roller 90 is transmitted to the driven roller 92, causing the driven roller 92 to rotate in the opposite direction to the drive roller 90, for example, counterclockwise when viewed from the side.

[0136] In addition, the case 88 is connected to a Y-direction movement mechanism 96. For convenience of explanation, the Y-direction movement mechanism 96 is shown in Fig. 8 as a rectangular parallelepiped extending along the Y direction. The Y-direction movement mechanism 96 includes, for example, a support plate fixed to the underside of the case 88, a ball screw for moving the support plate along the Y direction, and a motor for rotating the screw shaft of the ball screw.

[0137] When the Y-direction movement mechanism 96 is operated, the drive roller 90 and the driven roller 92 move in the Y direction between the initial position and the final position. Specifically, the initial position is a position below one end of the peeled region in the Y direction when the peeled region of the protective sheet 25 is cut out by the cutout portion 62 as described above.

[0138] When the actuator built into the case 88 is operated to separate the drive roller 90 and the driven roller 92 positioned at the initial position, the rod 82 is positioned between the drive roller 90 and the driven roller 92 in a plan view. The final position is the position below the other end of the peeled region in the Y direction at this time.

[0139] Then, once the area to be peeled of protective sheet 25 has been cut out by cutout portion 62 as described above, the area to be peeled of protective sheet 25 is peeled off from sheet piece 27. Figures 11(A), 11(B), 12(A), 12(B), 13(A), and 13(B) are side views each showing a schematic representation of some of the components of preparation unit 36 ​​during this peeling. These figures also show a cross section of the stack of sheet piece 27 and protective sheet 25.

[0140] During this peeling, first, the Y-direction movement mechanism 96 is operated to position the drive roller 90 and the driven roller 92 in their initial positions, and then the actuator built into the case 88 is operated so that the distance between them becomes greater than the length of the rod 82 along the Y direction.

[0141] Next, the rotation mechanism 52 is operated so that the stack of the individual sheet 27 and the protective sheet 25 held on one surface 50a of the holding plate 50 faces downward (see FIG. 11(A)). As a result, the suction end 82a of the rod 82 faces a location slightly inward in the Y direction from one end of the peeled region 25a of the protective sheet 25 in the Z direction.

[0142] At this time, the stack of individual sheets 27 and protective sheets 25 does not fall because it is sucked toward the holding plate 50 through suction holes 50c formed in the four corners of one surface 50a of the holding plate 50. However, the portions of this stack that are positioned outside the suction holes 50c in bottom view sag.

[0143] Next, the pre-processing unit 80 is operated to raise the rod 82 until the suction end 82a passes between the drive roller 90 and the driven roller 92 and is pressed against a location slightly inside one end of the peeled region 25a of the protective sheet 25 in the Y direction (see FIG. 11(B)). This causes the suction end 82a of the rod 82 to be adsorbed to that location. Note that if the above-mentioned clamping mechanism is provided in the pre-processing unit 80, the pre-processing unit 80 may be operated so that the sagging portion of the stack of the individual sheet 27 and the protective sheet 25 is gripped by the clamping mechanism before the rod 82 is raised.

[0144] Next, pre-processing unit 80 is operated to lower rod 82 until suction end 82a passes between drive roller 90 and driven roller 92 and is positioned below both of them (see FIG. 12(A)). As a result, a portion of peeled region 25a of protective sheet 25 that will be the starting point of peeling is peeled off from individual sheet 27 and positioned between drive roller 90 and driven roller 92.

[0145] Next, the actuator built into the case 88 is operated to bring the drive roller 90 and the driven roller 92 closer to each other (see FIG. 12(B)). As a result, the portion of the peeled region 25a of the protective sheet 25 that will be the starting point for peeling is sandwiched between the drive roller 90 and the driven roller 92.

[0146] Next, the motor 94 is operated to rotate both the drive roller 90 and the driven roller 92 to which the torque of the drive roller 90 is transmitted via the peeled region 25a of the protective sheet 25, while the Y-direction movement mechanism 96 is operated to move both of them from the initial position toward the final position (see FIG. 13(A)). As a result, the peeled region 25a of the protective sheet 25 is unwound by the rotating drive roller 90 and driven roller 92, and a force that promotes the peeling is applied to the peeled region 25a of the protective sheet 25. As a result, the peeled region 25a of the protective sheet 25 is further peeled off from the individual sheet 27.

[0147] Furthermore, during this peeling, it is preferable that the portion of peeled region 25a of protective sheet 25 that is attracted to suction end 82a of rod 82 be separated from suction end 82a. Therefore, during this peeling, it is preferable to set the movement speed of drive roller 90 and driven roller 92 along the Y direction to be high so that the portion is pulled.

[0148] Specifically, during this peeling, it is preferable that the movement speed of the drive roller 90 and the driven roller 92 along the Y direction be greater than the speed at which the peeled area 25a of the protective sheet 25 is peeled off (peeling speed) (specifically, the speed obtained by dividing the length along the Y direction of the peeled area 25a peeled off in a specified time by the specified time), more preferably 1.5 times this peeling speed, and most preferably twice this peeling speed.

[0149] Then, when the drive roller 90 and the driven roller 92 reach their final positions and the entire peeled region 25a of the protective sheet 25 is peeled off from the individual sheet 27, the actuator built into the case 88 is operated to separate the drive roller 90 from the driven roller 92 (see FIG. 13(B)). As a result, the peeled region 25a of the protective sheet 25 peeled off from the individual sheet 27 is discarded, for example, in a trash can (not shown) provided directly below the final positions of the drive roller 90 and the driven roller 92.

[0150] <G. Transport unit and imaging unit> The holding unit 48 is connected to a transport unit 98 (see FIG. 8). For convenience of explanation, the transport unit 98 is shown in FIG. 8 as a rectangular parallelepiped extending along the Y direction. The transport unit 98 includes, for example, a support plate fixed to the underside of the Z-direction movement mechanism 54, a ball screw for moving the support plate along the Y direction, and a motor for rotating the screw shaft of the ball screw.

[0151] When the transport unit 98 is operated, the holding plate 50 moves in the Y direction between the processing position and the transfer position. Specifically, the processing position is a position on the holding plate 50 where the above-described peeling unit 78 performs processing such as peeling the peeled region 25a of the protective sheet 25 from the individual sheet 27. The transfer position is a position on the holding plate 50 where the individual sheet 27 held on one surface 50a is transferred from the preparation unit 36 ​​to the fixing unit 102, which will be described later.

[0152] An imaging unit 100 is provided below the path of the holding plate 50 from the processing position to the transfer position. For convenience, the imaging unit 100 is shown as a cylinder in Fig. 8. The imaging unit 100 is a camera that includes, for example, an objective lens and a light receiving element such as a CCD image sensor or a CMOS image sensor, and is capable of capturing images above itself.

[0153] Furthermore, in addition to the camera, the imaging unit 100 may also include an oblique light source arranged around the camera and capable of emitting light such as visible light diagonally upward toward the portion of the path of the holding plate 50 from the processing position to the transfer position located directly above the camera.

[0154] Then, as described above, once the peeling unit 78 has peeled the peeled area 25a of the protective sheet 25 from the individual sheet 27, it is determined whether or not a foreign substance is attached to the fixed area 27a of the individual sheet 27. Specifically, first, the fixed area 27a is exposed, and the conveying unit 98 is operated so that the holding plate 50, which holds the individual sheet 27 on one surface 50a in a downward facing state, is positioned directly above the imaging unit 100.

[0155] Next, for example, while operating the oblique lighting included in the imaging unit 100, i.e., while irradiating the fixing area 27a of the individual sheet 27 from below at an angle, the camera captures an image of the fixing area 27a. In this case, the intensity of light received by the light receiving element of the camera is likely to change significantly depending on the presence or absence of foreign matter in the fixing area 27a of the individual sheet 27. Therefore, in this case, the camera can form an image that makes it easy to determine whether or not foreign matter is attached to the fixing area 27a of the individual sheet 27.

[0156] If it is determined based on this image that no foreign matter is attached to the fixing area 27a of the pieced sheet 27, the conveying unit 98 is operated to position the holding plate 50, which holds the pieced sheet 27 on one side 50a, at the delivery position. On the other hand, if it is determined based on this image that foreign matter is attached to the fixing area 27a of the pieced sheet 27, the pieced sheet 27 is discarded.

[0157] Specifically, when discarding the individual sheet 27, first, the conveying unit 98 is operated to position the holding plate 50, which holds the individual sheet 27 and the protective sheet 25 on one surface 50a, at a discarding position located between the processing position and the transfer position, for example. Then, the operation of the suction sources communicating with the suction holes 50c formed in the four corners of the one surface 50a of the holding plate 50 is stopped, and then the air supply sources communicating with the suction holes 50c are operated.

[0158] As a result, the pressure in each suction hole 50c returns to atmospheric pressure, and the stack of individual sheet pieces 27 and protective sheet 25 is no longer sucked toward one surface 50a of the holding plate 50, and gravity acts on this stack, causing it to separate from the holding plate 50. As a result, the individual sheet pieces 27 are discarded, for example, in a trash can (not shown) provided directly below the disposal position of the holding plate 50.

[0159] <(6) Fixing unit> Once the object 11 and the piece-shaped sheet 27, each suitable for bonding, are prepared, the object 11 and the piece-shaped sheet 27 are carried into the bonding unit 102 (see FIG. 2). That is, the object 11 is carried into the bonding unit 102 after it has been determined that no foreign matter is attached to the surface 11a of the object 11 based on an image formed by imaging in the imaging unit 19. Also, the piece-shaped sheet 27 is carried into the bonding unit 102 after it has been determined that no foreign matter is attached to the bonding region 27a based on an image formed by imaging in the imaging section 100 of the preparation unit 36.

[0160] If it is determined that a foreign substance is attached to the surface 11a of the object 11, for example, the foreign substance is removed from the surface 11a by the foreign substance removal unit 26, and then the imaging unit 19 again captures an image of the surface 11a of the object 11. If the determination is changed based on the image formed by this imaging, that is, if it is determined that no foreign substance is attached to the surface 11a, the object 11 is carried into the fixing unit 102.

[0161] On the other hand, if the judgment is not changed based on this image, that is, if it is again judged that foreign matter is attached to the surface 11a of the object to be fixed 11, for example, the removal of foreign matter from the surface 11a by the foreign matter removal unit 26 and judgment based on the image formed by imaging the surface 11a of the object to be fixed 11 by the imaging unit 19 are repeated alternately a predetermined number of times.

[0162] In addition, when the removal of foreign matter from the surface 11a in the foreign matter removal unit 26 is repeated multiple times in this manner, the operating conditions of the foreign matter removal unit 26 may be changed each time. Specifically, the operating conditions in the subsequent times may be set to conditions that make it easier to remove foreign matter from the surface 11a compared to the operating conditions in the preceding times (for example, conditions under which the flow rate and / or pressure of the fluid ejected from the nozzle 34a of the fluid ejection mechanism 34 is higher). If the determination is changed during this repetition, the object 11 to be fixed is carried into the fixing unit 102.

[0163] Furthermore, when the imaging unit 19 images the surface 11a of the object 11 after the foreign matter removal unit 26 removes foreign matter from the surface 11a, the object 11 that has been separated from the holder 18 of the carry-in / out robot 8 is again held by the holder 18. In this case, the relative positional relationship between the notch 11c or orientation flat of the object 11 and the holder 18 of the carry-in / out robot 8 may change between before separation and after the object 11 is again held.

[0164] Therefore, during this imaging, not only an image used to determine whether or not a foreign substance is attached to the surface 11a of the object to be fixed 11 may be formed, but also an image used to grasp the position of the notch 11c or the orientation flat on the object to be fixed 11. Furthermore, when an image used to grasp the position of the notch 11c or the orientation flat on the object to be fixed 11 is formed, the above-mentioned deviation during transport may be grasped based on this image.

[0165] Fig. 14 is a perspective view schematically showing the fixing unit 102. The X direction, Y direction, and Z direction shown in Fig. 14 are the same as the X direction, Y direction, and Z direction shown in Fig. 8 and other figures. The fixing unit 102 is located in the Y direction when viewed from the imaging section 100 of the preparation unit 36.

[0166] <A. First holding part> The fixing unit 102 has a first holding portion 104 for holding the object 11. The first holding portion 104 includes a disk-shaped chuck table 106. Specifically, the chuck table 106 has a disk-shaped frame 106a made of, for example, ceramics. The frame 106a includes a disk-shaped bottom wall and a cylindrical side wall extending from the outer edge of the bottom wall.

[0167] That is, a recess is formed on the upper surface of frame 106a. A disk-shaped porous plate 106b made of porous ceramics or the like is fixed in this recess. The inner diameter of the side wall of frame 106a is slightly smaller than the diameter of surface 11a of object 11. The outer diameter of the side wall of frame 106a is slightly larger than the diameter of surface 11a of object 11 and smaller than the lengths of sheet piece 27 in the X and Y directions.

[0168] Furthermore, a flow path is formed in the frame 106a, and this flow path can be selectively connected to a suction source (not shown) or an air supply source (not shown). The suction source includes, for example, an ejector. The air supply source includes, for example, a tank for storing air, a filter for removing foreign matter mixed in the air supplied from the tank, and a regulator for adjusting the pressure of the air supplied from the tank.

[0169] When the suction source communicating with the flow path formed in the frame 106a is operated, the pressure in this flow path becomes negative, and a suction force acts on the space near the upper surface of the porous plate 106b. Furthermore, when the operation of this suction source is stopped and the air supply source communicating with this flow path is operated, the internal pressure of the flow path returns to atmospheric pressure, and the suction force disappears.

[0170] In addition, the chuck table 106 is connected to a rotation mechanism 108. The rotation mechanism 108 includes, for example, a shaft 108a that supports the chuck table 106, a pulley (not shown) that is connected to the shaft 108a, and a motor (not shown) that rotates the pulley.

[0171] When carrying the object 11 into the fixing unit 102, first, the object 11 is held on the other surface 18b of the holder 18 so that the back surface 11b is exposed and the front surface 11a faces upward, and the carry-in / out robot 8 is operated to position the object 11 on the chuck table 106. If the deviation during transport described above is known, it is preferable to operate the carry-in / out robot 8 so that the center of the object 11 is positioned directly above the center of the chuck table 106 by taking the deviation during transport into account.

[0172] Next, the carry-in / out robot 8 is operated to lower the object 11 until the back surface 11b contacts the upper surface (holding surface) of the chuck table 106. Next, the carry-in / out robot 8 is operated to separate the object 11 from the holder 18.

[0173] Next, a suction source communicating with a flow path formed in the frame 106a of the chuck table 106 is operated so that the object 11 is held on the holding surface of the chuck table 106. Next, the carry-in / out robot 8 is operated so that the holding part 18 is positioned so as not to overlap with the chuck table 106.

[0174] As described above, the imaging unit 19 may capture an image to form an image used to determine the position of the notch 11c or the orientation flat in the object 11. In this case, the orientation of the object 11 held on the holding surface of the chuck table 106 may be adjusted based on this image.

[0175] That is, in this case, the rotation mechanism 108 may be operated to rotate the chuck table 106. This allows the notch 11c or the orientation flat to be positioned in a predetermined direction when viewed from the center of the object 11 in a plan view.

[0176] <A. Second holding part> A second holding unit 110 for holding the individual sheet 27 is provided above the chuck table 106. This second holding unit 110 extends along the Y direction and includes a pair of clamps 110a, 110b, each of which has a length approximately equal to the length of the individual sheet 27 along the Y direction.

[0177] The pair of clamps 110a, 110b are spaced apart in the X direction by a distance slightly shorter than the length of the individual sheet 27 along the X direction so as to face each other across the chuck table 106 in a plan view. Clamp 110a is provided at a position slightly lower than clamp 110b. That is, clamp 110a is positioned diagonally below clamp 110b.

[0178] When carrying the individual sheet 27 into the fixing unit 102, first, the conveying section 98 of the preparation unit 36 ​​is operated to position the holding plate 50, which holds the individual sheet 27 at one surface 50a with the fixing area 27a exposed and facing downward, at the transfer position. The transfer position is located slightly above the pair of clamps 110a, 110b. When positioning the holding plate 50 at the transfer position, the Z-direction movement mechanism 54 of the preparation unit 36 ​​may be operated, as necessary, to adjust the position of the holding plate 50 in the Z direction.

[0179] Next, clamp 110a is operated to grip one end in the X direction of excess region 27b of individual sheet 27 and the stack of protective sheet 25 hanging down from one surface 50a of holding plate 50, and clamp 110b is operated to grip the other end. Next, the operation of the suction source communicating with each of suction holes 50c formed in the four corners of one surface 50a of holding plate 50 is stopped, and then the air supply source communicating with each of suction holes 50c is operated.

[0180] As a result, the pressure in each suction hole 50c returns to atmospheric pressure, and the stack of excess regions 27b of individual sheet 27 and protective sheet 25 is no longer sucked toward one surface 50a of holding plate 50, and gravity acts on this stack, causing it to separate from holding plate 50. As a result, this stack is transferred from holding plate 50 to the pair of clamps 110a, 110b. Furthermore, once this transfer is complete, by operating conveying section 98 of preparation unit 36, holding plate 50 is positioned, for example, at a processing position.

[0181] <C. Pressurizing section and decompressing section> A pressing unit 112 is provided above the chuck table 106 and the pair of clamps 110a, 110b to press the fixing region 27a of the sheet piece 27 toward the surface 11a of the object 11. The pressing unit 112 extends along the Y direction and has a roller 114 whose length is approximately equal to the length of the excess region 27b of the sheet piece 27 and the laminate of the protective sheet 25 along the Y direction.

[0182] The rollers 114 are supported by supports 116 in a rollable manner with their lower ends exposed. The supports 116 are connected to an X-direction and Z-direction movement mechanism 118. For convenience of explanation, the X-direction and Z-direction movement mechanism 118 is shown in FIG. 14 as a rectangular parallelepiped extending along the X direction.

[0183] This X-direction and Z-direction movement mechanism 118 includes, for example, an actuator such as an air cylinder that can raise and lower the rollers 114 and the support 116, a support plate fixed to the upper side of the actuator, a ball screw for moving the support plate along the X direction, and a motor for rotating the screw shaft of the ball screw.

[0184] When this motor is operated, the actuator, roller 114, and support 116 move in the X direction together with the X-direction support plate. Furthermore, when this actuator is operated with the roller 114 positioned above the chuck table 106 in the X direction, for example, the roller 114 and support 116 move down so that the roller 114 is pressed against the chuck table 106.

[0185] Furthermore, the fixing unit 102 has a decompression section 120 for fixing the fixing area 27a of the individual sheet 27 to the surface 11a of the object 11 in a space decompressed below atmospheric pressure. The decompression section 120 has a chamber 122 that can accommodate the chuck table 106, the pair of clamps 110a, 110b, the roller 114, the support 116, and the X-direction and Z-direction movement mechanism 118.

[0186] The chamber 122 includes a lower chamber 122a in the shape of a square tube having a rectangular lower bottom wall. The lower chamber 122a includes a sidewall that extends from the outer edge of the lower bottom wall and has an upper end located below the holding surface of the chuck table 106. An opening is formed in the center of the lower bottom wall of the lower chamber 122a. The shaft 108a is connected to this opening via a bearing (not shown).

[0187] Furthermore, a pipe 124a is connected to a corner of the lower bottom wall of the lower chamber 122a. This pipe 124a communicates with a lower chamber pump (not shown) via a lower chamber first valve (not shown) and the like, and also communicates with the space outside the chamber 122, i.e., a space maintained at atmospheric pressure, via a lower chamber second valve (not shown) and the like. Note that in Figure 14, the pipe 124a is shown as a cylinder for convenience.

[0188] Above the lower chamber 122a, a rectangular cylindrical upper chamber 122b including an upper bottom wall is provided. The upper chamber 122b includes a sidewall that hangs down from the outer periphery of the upper bottom wall and whose lower surface faces the upper surface of the sidewall of the lower chamber 122a.

[0189] Furthermore, a pipe 124b is connected to a corner of the upper wall of the upper chamber 122b. This pipe 124b communicates with an upper chamber pump (not shown) via an upper chamber first valve (not shown) and the like, and also communicates with the space outside the chamber 122 via an upper chamber second valve (not shown) and the like. For convenience, the pipe 124b is shown as a cylinder in Figure 14.

[0190] Furthermore, the upper chamber 122b is connected to a Z-direction movement mechanism (not shown). This Z-direction movement mechanism has an actuator such as an air cylinder that can move the upper chamber 122b along the Z direction. By operating this actuator, the upper chamber 122b moves along the Z direction between the stored position and the exposed position.

[0191] Specifically, the accommodation position is a position of the upper chamber 122b where its side plates are in close contact with the side plates of the lower chamber 122a so that the chuck table 106, the pair of clamps 110a and 110b, the roller 114, the support 116, and the X- and Z-direction movement mechanism 118 are accommodated in the chamber 122. The exposure position is a position of the upper chamber 120b where its side plates are separated from the side plates of the lower chamber 120a so that the chuck table 106, the pair of clamps 110a and 110b, the roller 114, the support 116, and the X- and Z-direction movement mechanism 118 are open without being accommodated in the chamber 122.

[0192] When using the pressing unit 112 to bond the fixing area 27a of the sheet piece 27 to the surface 11a of the object 11, first, the Z-direction movement mechanism connected to the upper chamber 122b is operated to position the upper chamber 122b at the accommodation position. As a result, the object 11, which is held on the holding surface of the chuck table 106 with its surface 11a exposed and facing upward, and the sheet piece 27, which is held by the pair of clamps 110a, 110b with its fixing area 27a exposed and facing downward, are accommodated in the chamber 122.

[0193] Next, the first lower chamber valve and the first upper chamber valve are each opened, and the second lower chamber valve and the second upper chamber valve are each closed, so as to define the internal space of chamber 122. Next, the lower chamber pump, which communicates with pipe 124a via the first lower chamber valve, is operated, and the upper chamber pump, which communicates with pipe 124b via the first upper chamber valve, is operated, so that the internal space of chamber 122 is reduced in pressure below atmospheric pressure.

[0194] Next, the X-direction and Z-direction movement mechanism 118 is operated so that the roller 114 is positioned directly above the center in the X direction of the object 11 held by the chuck table 106 via the piece sheet 27. Next, the X-direction and Z-direction movement mechanism 118 is operated so as to lower the roller 114 until the piece sheet 27 is sandwiched between the object 11 and the roller 114. This causes the piece sheet 27 to be pressed against the object 11 held on the holding surface of the chuck table 106.

[0195] Next, while pressing the piece-of-sheet 27 against the object 11, the X-direction and Z-direction movement mechanism 118 is operated to move the roller 114 until it overlaps with one end of the chuck table 106 that is closest to the clamp 110a. As a result, a portion (one side portion) of the fixing region 27a of the piece-of-sheet 27 located from the center to one end in the X direction is attached to the surface 11a of the object 11.

[0196] Next, while pressing the piece-of sheet 27 against the object 11, the X-direction and Z-direction movement mechanism 118 is operated to move the roller 114 until it overlaps with the other end of the chuck table 106 that is closest to the clamp 110b. As a result, the portion (other side portion) of the fixing region 27a of the piece-of sheet 27 located from the center to the other end in the X direction is attached to the surface 11a of the object 11.

[0197] Then, when the adhesion (fixing) of the fixing area 27a of the sheet piece 27 to the surface 11a of the object 11 is completed, the pressing unit 112 and the decompression unit 120 are returned to their original states. Specifically, first, the X-direction and Z-direction movement mechanisms are operated to move the roller 114 away from the sheet piece 27. Next, the pressure in the internal space of the chamber 122 is returned to atmospheric pressure.

[0198] Specifically, the operation of the lower chamber pump and the upper chamber pump is stopped, and the first lower chamber valve and the first upper chamber valve are closed, and then the second lower chamber valve and the second upper chamber valve are opened. Next, the Z-direction movement mechanism connected to the upper chamber 122b is operated to position the upper chamber 122b at the exposed position.

[0199] Here, the fixing of the fixing areas 27a of the sheet pieces 27 to the surface 11a of the object 11 in the fixing unit 102 is performed in a chamber 122 whose internal space is reduced in pressure below atmospheric pressure. In this case, it is possible to reduce the likelihood of air bubbles being trapped between the fixing areas 27a of the sheet pieces 27 and the surface 11a of the object 11.

[0200] Furthermore, in the fixing unit 102, the clamp 110a of the second holding part 110 is provided at a position slightly lower than the clamp 110b. In this case, when one side portion of the fixing region 27a of the piece of sheet 27 is fixed to the surface 11a of the object 11, it is possible to reduce the likelihood that a portion included in the other side portion will be fixed to the surface 11a of the object 11. That is, in this case, it is possible to reduce the likelihood that the fixing region 27a of the piece of sheet 27 will be fixed to the surface 11a of the object 11 in a bent state.

[0201] <(7) Removal Unit> The object 11 to which the adhesive region 27a of the piece sheet 27 is adhered to the surface 11a (hereinafter also referred to as "object 11 to which the piece sheet 27 is adhered to the edge") is transported to a removal unit 126 for removing the excess region 27b from the piece sheet 27 (see Figure 2).

[0202] Fig. 15 is a perspective view schematically showing the removing unit 126. The X, Y, and Z directions shown in Fig. 15 are the same as the X, Y, and Z directions shown in Fig. 8 and other figures. A major portion of the removing unit 126 is located in the opposite direction to the X direction when viewed from the fixing unit 102.

[0203] <A. First conveying section> The removing unit 126 has a first conveying section 128 for carrying out the object 11 to which the sheet piece 27 is adhered from the adhering unit 102. The first conveying section 128 includes a support plate 130 that is H-shaped in a plan view.

[0204] The length of the support plate 130 in the X direction is smaller than the distance in the X direction between the pair of clamps 110a and 110b provided in the fixing unit 102. The length of the support plate 130 in the Y direction is slightly smaller than the length of the individual sheet 27 in the Y direction.

[0205] Furthermore, communication members 132 are inserted into the four ends of the support plate 130, and a suction pad 134 is provided at the lower end of each communication member 132. Each suction pad 134 can be selectively connected to a suction source (not shown) or an air supply source (not shown) via the communication member 132 and piping (not shown), etc.

[0206] The suction source includes, for example, an ejector, etc. The air supply source includes, for example, a tank for storing air, a filter for removing foreign matter mixed in the air supplied from the tank, and a regulator for adjusting the pressure of the air supplied from the tank.

[0207] When the suction source communicating with each suction pad 134 is operated, the internal pressure of each communicating member 132 becomes negative, and a suction force acts on the space near the bottom surface of each suction pad 134. When the operation of the suction source is stopped and then the air supply source communicating with each suction pad 134 is operated, the internal pressure of each communicating member 132 returns to atmospheric pressure, and the suction force disappears.

[0208] Furthermore, the tip of a support arm 136 extending along the Y direction is fixed to the center of the support plate 130. The base end of the support arm 136 is connected to a Z-direction movement mechanism 138. This Z-direction movement mechanism 138 is, for example, an actuator such as an air cylinder that can raise and lower the support arm 136.

[0209] Therefore, by operating the Z-direction movement mechanism 138, it is possible to raise and lower the four suction pads 134 together with the support arm 136. The Z-direction movement mechanism 138 is also connected to an X-direction movement mechanism 140. For the sake of convenience, the X-direction movement mechanism 140 is shown in FIG. 15 as a rectangular parallelepiped extending along the X direction.

[0210] The X-direction movement mechanism 140 includes, for example, a support plate fixed to the underside of the Z-direction movement mechanism 138, a ball screw for moving the support plate along the X direction, and a motor for rotating the screw shaft of the ball screw. When the X-direction movement mechanism 140 is operated, the four suction pads 134 move along the X direction between the carry-out position and the carry-in position.

[0211] Specifically, the carry-out position is a position of the four suction pads 134 that all overlap in the Z direction with the individual sheet 27, both ends of which in the X direction are held by a pair of clamps 110a, 110b provided in the fixing unit 102. The carry-in position is a position of the four suction pads 134 that all overlap in the Z direction with a holding plate 148 of a holding section 142, which will be described later.

[0212] When the object 11 to which the piece sheet 27 is adhered is carried out from the adhering unit 102, first, the Z-direction movement mechanism 138 is operated so that the lower surfaces of the four suction pads 134 are positioned above the piece sheet 27. Next, the X-direction movement mechanism 140 is operated so that the four suction pads 134 are positioned at the carry-out position.

[0213] Next, the suction source communicating with each suction pad 134 is operated so that the sheet piece 27 is held on the lower surface of each suction pad 134. Next, the fixing unit 102 is operated so that both ends of the sheet piece 27 in the X direction are released from the pair of clamps 110a, 110b and the object 11 is released from the chuck table 106.

[0214] Next, the Z-direction movement mechanism 138 is operated to raise the object 11 and the piece-of-sheet 27 together with the four suction pads 134 until both the object 11 and the piece-of-sheet 27 are positioned above the pair of clamps 110a, 110b. Next, the X-direction movement mechanism 140 is operated to position the four suction pads 134 at the carry-in position. As a result, the object 11 to which the piece-of-sheet 27 is fixed is carried out of the fixing unit 102.

[0215] <A. Holding part> A holding section 142 for holding the object 11 to which the individual sheet 27 is fixed is provided in the opposite direction from the fixing unit 102 to the X direction. The holding section 142 has a disk-shaped chuck table 144. Specifically, the chuck table 144 includes a disk-shaped frame 144a made of, for example, ceramics or the like.

[0216] The frame 144a includes a disk-shaped bottom wall and a cylindrical side wall extending from the outer edge of the bottom wall. Specifically, a recess is formed on the top surface of the frame 144a. The outer diameter of the side wall of the frame 144a is smaller than the diameters of the front surface 11a and the back surface 11b of the object 11.

[0217] A disk-shaped porous plate 144b made of porous ceramics or the like is fixed in this recess. Furthermore, a circular through-hole is formed in the center of each of the frame 144a and the porous plate 144b in a plan view, and an elevating mechanism 146 is provided in these through-holes.

[0218] The lifting mechanism 146 is, for example, an actuator (not shown) such as an air cylinder that can raise and lower a cylindrical rod 146a. When the lifting mechanism 146 is operated, the rod 146a moves in the Z direction between the protruding position and the flush position. The diameter of the rod 146a in a plan view is smaller than the distance I (see FIG. 4) between the pair of tips of the holders 18 included in the carry-in / out robot 8.

[0219] Specifically, the protruding position is a position of the rod 146a whose upper surface protrudes above the upper surface (holding surface) of the chuck table 144, specifically above the upper surface of the side wall of the frame 144a and the upper surface of the porous plate 144b. The flush position is a position of the rod 146a whose upper surface is flush with the holding surface of the chuck table 144. As described above, when the first transport section 128 transports the object 11 to which the individual sheet 27 has been fixed out of the fixing unit 102, the rod 146a is positioned at the flush position.

[0220] A holding plate 148 is provided around the chuck table 144. A circular through-hole having a diameter larger than the diameters of the front surface 11a and the back surface 11b of the object 11 in a plan view is formed in the center of this holding plate 148, and the chuck table 144 is positioned inside this through-hole with a predetermined gap G therebetween.

[0221] Furthermore, four suction holes 148a are formed on the upper surface of holding plate 148 at approximately equal angular intervals with respect to the center of rod 146a of lifting mechanism 146 in plan view. The number of suction holes 148a is not limited to four. For example, (4×k) (m is a natural number greater than or equal to 2) suction holes may be formed on the upper surface of holding plate 148 at approximately equal angular intervals with respect to the center of rod 146a of lifting mechanism 146 in plan view.

[0222] Furthermore, a flow path is formed in the frame 144a in addition to the through-hole in which the lifting mechanism 146 is provided. This flow path and each suction hole 148a formed in the upper surface of the holding plate 148 can be selectively connected to a suction source (not shown) or an air supply source (not shown). The suction source includes, for example, an ejector. The air supply source includes, for example, a tank for storing air, a filter for removing foreign matter mixed in the air supplied from the tank, and a regulator for adjusting the pressure of the air supplied from the tank.

[0223] When a suction source communicating with this flow path and each suction hole 148a is operated, the pressure in this flow path and each suction hole 148a becomes negative, and a suction force acts on the space near the upper surface of the porous plate 144b of the chuck table 144 and near each suction hole 148a formed in the upper surface of the holding plate 148. When the operation of this suction source is stopped and then an air supply source communicating with this flow path and each suction hole 148a is operated, the pressure in this flow path and each suction hole 148a returns to atmospheric pressure, and the suction force disappears.

[0224] The flow path and each suction hole 148a may be able to communicate with different suction sources and air supply sources. That is, the flow path may be able to selectively communicate with a first suction source or a first air supply source, and each suction hole 148a may be able to selectively communicate with a second suction source different from the first suction source or a second air supply source different from the first air supply source. In this case, a suction force can be selectively applied to the space near the upper surface of the porous plate 144b or the space near each suction hole 148a, and this suction force can be selectively eliminated.

[0225] In addition, the chuck table 144, the lifting mechanism 146, and the holding plate 148 are connected to an X-direction and Y-direction movement mechanism (not shown). The X-direction and Y-direction movement mechanism includes, for example, an X-direction support plate fixed to the underside of each of the chuck table 144, the lifting mechanism 146, and the holding plate 148, an X-direction ball screw for moving the X-direction support plate along the X direction, and an X-direction motor for rotating the screw shaft of the X-direction ball screw. When the X-direction motor is operated, the chuck table 144, the lifting mechanism 146, and the holding plate 148 move along the X direction together with the X-direction support plate.

[0226] The X- and Y-direction movement mechanism further includes, for example, a Y-direction support plate fixed to the X-direction ball screw and X-direction motor, a Y-direction ball screw for moving the Y-direction support plate along the Y direction, and a Y-direction motor for rotating the screw shaft of the Y-direction ball screw. When the Y-direction motor is operated, the X-direction support plate, the X-direction ball screw, the X-direction motor, the chuck table 144, the lifting mechanism 146, and the holding plate 148 move along the X direction together with the Y-direction support plate.

[0227] Then, as described above, when the object 11 to which the pieced sheet 27 is adhered is carried out from the adhering unit 102 by the first conveying section 128, the object 11 and the pieced sheet 27 are held by the holding section 142. Specifically, first, the Z-direction moving mechanism 138 is operated to lower the four suction pads 134 positioned at the carry-in position until the object 11 comes into contact with the holding surface of the chuck table 144.

[0228] Next, the operation of the suction source communicating with each suction pad 134 is stopped, and then the air supply source communicating with each suction pad 134 is operated. As a result, the internal pressure of each communicating member 132 returns to atmospheric pressure, and the stack of excess region 27b of individual sheet 27 and protective sheet 25 is no longer sucked toward each suction pad 134, and gravity acts on this stack, causing it to separate from each suction pad 134. As a result, this stack is placed on the holding plate 148.

[0229] Next, a suction source is operated which is connected to the flow path formed in the frame 144a of the chuck table 144 and to each suction hole 148a formed in the upper surface of the holding plate 148. As a result, the object 11 and the fixing region 27a of the individual sheet 27 are mainly held on the holding surface of the chuck table 144, and the excess region 27b of the individual sheet 27 and the stack of the protective sheet 25 are mainly held on the upper surface of the holding plate 148.

[0230] <C Cutting part> A cutting unit 150 is provided above the holding unit 142 to cut the sheet piece 27 to separate the fixed region 27a and the excess region 27b. The cutting unit 150 includes a shaft 152 whose center is located directly above the center of the rod 146a of the lifting mechanism 146.

[0231] A motor (not shown) is connected to the upper end of shaft 152 for rotating shaft 152 using a straight line along the Z direction as the rotation axis, and its lower end is connected to a radial movement mechanism 154 that extends along a direction perpendicular to the Z direction (hereinafter referred to as the "radial direction" in this section).

[0232] This radial movement mechanism 154 includes, for example, a case 154a to whose upper surface on the base end side the lower end of the shaft 152 is fixed, a ball screw (not shown) housed in the case 154a and a motor (not shown) for rotating the screw shaft of the ball screw, and a support plate 154b to whose upper surface on the base end side the nut of the ball screw is fixed.

[0233] In addition, at the tip side of the support plate 154b, there are provided a cutter 156 with its tip facing downward so that they are adjacent to each other in the radial direction, and a camera 158 that can capture images of the area below it using light of a wavelength (e.g., infrared light) that passes through the individual sheet 27.

[0234] When the motor housed in the case 154a is operated, the cutter 156 and the camera 158 move radially together with the support plate 154b in a range where the tip of the cutter 156 is located directly above the gap G between the chuck table 144 and the holding plate 148 in a plan view.

[0235] Furthermore, the shaft 152 is connected to a Z-direction movement mechanism (not shown). This Z-direction movement mechanism is, for example, an actuator (not shown) such as an air cylinder that can raise and lower the shaft 152. When the Z-direction movement mechanism is operated, the cutter 156 moves in the Z direction between the cutting position and the standby position.

[0236] Specifically, the cutting position is a position of the cutter 156 where the tip is located in the gap G between the chuck table 144 and the holding plate 148. The standby position is a position of the cutter 156 where the tip is located above the support plate 130 when the four suction pads 134 provided on the first transport section 128 are positioned at the carry-out position. As described above, when the object 11 to which the individual sheet 27 is fixed is carried out of the fixing unit 102 by the first transport section 128, the cutter 156 is positioned at the standby position.

[0237] Then, once the sheet piece 27 and the object 11 are held by the holder 142 as described above, the sheet piece 27 is cut so as to separate the fixing region 27a and the excess region 27b. Specifically, first, the camera 158 is operated to capture an image of the outer edge of the object 11. For example, while the camera 158 is operated to capture an image of the object 11, the motor connected to the upper end of the shaft 152 is operated to rotate the camera 158 at least one revolution.

[0238] Next, the position of the outer edge of object 11, specifically, the point where it overlaps with the rotation axis of shaft 152 is set as the origin (0,0), and the coordinates on a coordinate plane (XY plane) parallel to both the X and Y directions are identified based on the image captured by camera 158. Next, the coordinates (Xc, Yc) of the center of object 11 on the XY plane are calculated by referring to the coordinates on the XY plane of at least three points included in this outer edge.

[0239] Next, the X-direction and Y-direction movement mechanisms provided in the holding part 142 are operated so that the center of the workpiece 11 coincides with the rotation axis of the shaft 152. That is, the X-direction and Y-direction movement mechanisms are operated so that the chuck table 144 and the holding plate 148 are moved by −Xc along the X direction and by −Yc along the Y direction.

[0240] Next, the radial movement mechanism 154 is operated so that the distance between the rotation axis of the shaft 152 and the lower end of the cutter 156 in the XY plane coincides with the radius of the fixing region 27a of the individual sheet 27. The radius of the fixing region 27a of the individual sheet 27 coincides with, for example, the radius of a circle that overlaps with the outer edge of the object 11 excluding the notch 11c or the orientation, or a value obtained by adding a predetermined offset amount to the radius of this circle.

[0241] Next, the Z-direction movement mechanism connected to the shaft 152 is operated to position the cutter 156 at the cutting position. Next, the motor connected to the upper end of the shaft 152 is operated to rotate the cutter 156 at least one revolution. This causes the individual sheet 27 to be cut along the boundary between the fixed region 27a and the excess region 27b.

[0242] That is, the object 11 and the fixed region 27a of the piece of sheet 27 (hereinafter also referred to as "object 11 to which the sheet is fixed") held on the holding surface of the chuck table 106 are separated from the excess region 27b of the piece of sheet 27 and the stack of protective sheet 25 (hereinafter also referred to as "unnecessary sheet") held on the upper surface of the holding plate 148. Then, once this separation is complete, the holding unit 142 and the cutting unit 150 are returned to their original states.

[0243] Specifically, first, the Z-direction movement mechanism connected to the shaft 152 is operated to position the cutter 156 at the standby position. Next, the operation of the suction source communicating with the flow path formed in the frame 144a of the chuck table 144 and the suction holes 148a formed in the upper surface of the holding plate 148 is stopped, and then the air supply source communicating with this flow path and the suction holes 148a is operated. As a result, the object 11 to which the sheet has been fixed is simply placed on the holding surface of the chuck table 144, and the unwanted sheet is simply placed on the upper surface of the holding plate 148.

[0244] Here, cutting to separate the fixing region 27a and the excess region 27b of the sheet piece 27 is performed after identifying the position of the outer edge of the object 11 based on the image formed by the image capture by the camera 158. In this case, even if the position of the object 11 held by the holder 142 is shifted from the desired position (for example, even if the center of the object 11 in the XY plane is shifted from the rotation axis of the shaft 152), the sheet piece 27 can be cut accurately along the boundary between the fixing region 27a and the excess region 27b.

[0245] <D. Second conveying section and collection section> A second conveying section 160 is provided near the holding section 142 to convey unwanted sheets from the holding section 142. The second conveying section 160 has a structure similar to that of the first conveying section 128, except that the orientation in a plan view is different. Specifically, the second conveying section 160 includes a support plate 162 having a shape similar to that of the support plate 130.

[0246] Furthermore, communication members 164 are inserted into the four ends of the support plate 162, and a suction pad 166 is provided at the lower end of each communication member 164. Each suction pad 166 can be selectively connected to a suction source (not shown) or an air supply source (not shown) via the communication member 164 and piping (not shown), etc.

[0247] The suction source includes, for example, an ejector, etc. The air supply source includes, for example, a tank for storing air, a filter for removing foreign matter mixed in the air supplied from the tank, and a regulator for adjusting the pressure of the air supplied from the tank.

[0248] When the suction source communicating with each suction pad 166 is operated, the internal pressure of each communicating member 164 becomes negative, and a suction force acts on the space near the bottom surface of each suction pad 166. When the operation of the suction source is stopped and then the air supply source communicating with each suction pad 166 is operated, the internal pressure of each communicating member 164 returns to atmospheric pressure, and the suction force disappears.

[0249] Furthermore, the tip of a support arm 168 extending along the X direction is fixed to the center of the support plate 162. The base end of the support arm 168 is connected to a Z-direction movement mechanism 170. This Z-direction movement mechanism 170 is, for example, an actuator such as an air cylinder that can raise and lower the support arm 168.

[0250] Therefore, by operating this Z-direction movement mechanism 170, it is possible to raise and lower the four suction pads 166 together with the support arm 168. In addition, the Z-direction movement mechanism 170 is connected to a Y-direction movement mechanism 172. For convenience of explanation, in Figure 15, the Y-direction movement mechanism 172 is shown as a rectangular parallelepiped extending along the Y direction.

[0251] The Y-direction movement mechanism 172 includes, for example, a support plate fixed to the underside of the Z-direction movement mechanism 170, a ball screw for moving the support plate along the Y direction, and a motor for rotating the screw shaft of the ball screw. When the Y-direction movement mechanism 172 is operated, the four suction pads 166 move along the Y direction between the collection position and the dumping position.

[0252] Specifically, the collection position is the position of the four suction pads 166 that all overlap in the Z direction with the unwanted sheets placed on the upper surface of the holding plate 148. The disposal position is the position of the four suction pads 166 that all overlap in the Z direction with the collection table 176 of the collection unit 174 that collects the unwanted sheets.

[0253] The recovery unit 174 is located in the opposite direction to the Y direction when viewed from the holder 142. The recovery unit 174 includes a recovery table 176 that has a rectangular shape in plan view, each side of which is longer than each side of the individual sheet 27. The recovery table 176 is connected to a Z-direction movement mechanism 178.

[0254] The Z-direction movement mechanism 178 includes a ball screw 180 for moving the collection table 176 along the Z direction, and a motor 182 for rotating a screw shaft 180a of the ball screw 180. When the motor 182 is operated, the collection table 176 moves along the Z direction.

[0255] Then, once the unwanted sheet is separated from the object 11 to which the sheet is adhered as described above, the unwanted sheet is collected. Specifically, first, the Y-direction movement mechanism 172 is operated to position the four suction pads 166 at the collection position. Next, the Z-direction movement mechanism 170 is operated to lower the four suction pads 166 until they come into contact with the unwanted sheet placed on the upper surface of the holding plate 148.

[0256] Next, the suction source communicating with each suction pad 166 is operated so that the waste sheets are held on the lower surface of each suction pad 166. Next, the Z-direction movement mechanism 170 is operated so that the waste sheets are lifted. Next, the Y-direction movement mechanism 172 is operated so that the four suction pads 166 are positioned at the discard position.

[0257] Next, the Z-direction movement mechanism 178 is operated to position the collection table 176 slightly below the unwanted sheets. Next, the operation of the suction sources communicating with each suction pad 166 is stopped, and then the air supply sources communicating with each suction pad 166 are operated.

[0258] As a result, the internal pressure of each communicating member 164 returns to atmospheric pressure, and the unwanted sheets are no longer sucked toward each suction pad 166, and gravity acts on the unwanted sheets, causing them to separate from each suction pad 166. As a result, the unwanted sheets are placed on the collection table 176, i.e., the unwanted sheets are collected in the collection unit 174.

[0259] <(8) Object to which the sheet is attached> The object 11 to which the sheet is fixed is carried out by the carry-in / out robot 8 (see FIG. 2). When carrying out this removal, first, the lifting mechanism 146 provided in the removing unit 126 is operated to raise the rod 146a and position it at the protruding position. As a result, the object 11 to which the sheet is fixed is lifted from the holding surface of the chuck table 144.

[0260] Next, the carry-in / out robot 8 is operated to position the holding unit 18 with one surface 18a facing upward, below the object 11 to which the sheet is fixed and on the chuck table 144. Next, the lifting mechanism 146 is operated to lower the rod 146a to position it in a flush position. As a result, the object 11 to which the sheet is fixed is transferred from the rod 146a to the holding unit 18.

[0261] Next, the carry-in / out robot 8 is operated so as to hold the object 11 to which the sheet is fixed on one surface 18a of the holder 18. Next, the carry-in / out robot 8 is operated so as to transport the object 11 to which the sheet is fixed to the image capturing unit 19. Next, the image capturing unit 19 is operated so as to form an image (second image) that is used to determine whether or not a foreign substance is attached to the sheet that is fixed to the surface 11a of the object 11.

[0262] The second image is formed, for example, by operating the imaging unit 19 in the same manner as when forming an image used to determine whether or not a foreign substance is attached to the surface 11a of the object 11. Alternatively, the second image may be formed using a camera (second camera) separate from the camera 24. That is, the imaging unit 19 may be provided with a camera (first camera) 24 for capturing an image of the surface 11a of the object 11, and a second camera for capturing an image of the sheet in a state where it is adhered to the surface 11a of the object 11, separately.

[0263] The second camera has a structure similar to that of camera 24. Furthermore, imaging unit 19 may be provided with a movement mechanism for moving a pair of oblique illuminators 22 between a position facing each other across camera 24 in a plan view and a position facing each other across the second camera in a plan view. In this case, the second image may be formed by imaging the sheet with the second camera while operating multiple light sources 22b of oblique illuminators 22.

[0264] Then, if it is determined based on the second image that no foreign matter is attached to the sheet, the carry-in / out robot 8 is operated to transport the object 11 to which the sheet is fixed to the cassette 6. In this case, the process in the sheet fixing device 2 for fixing a sheet having a shape corresponding to the surface 11a of the object 11 to the surface 11a of the object 11 is completed.

[0265] On the other hand, if it is determined based on the second image that foreign matter is attached to the sheet, the carry-in / out robot 8 is operated to transport the object 11 to which the sheet is attached to the foreign matter removal unit 26. Next, the foreign matter removal unit 26 is operated to remove the foreign matter from the sheet that is attached to the surface 11a of the object 11. Note that the foreign matter attached to the sheet is removed, for example, by operating the foreign matter removal unit 26 in the same manner as when removing foreign matter attached to the surface 11a of the object 11.

[0266] Next, the carry-in / out robot 8 is operated to transport the object 11 to which the sheet is fixed again to the imaging unit 19. Next, the imaging unit 19 is operated to again form an image that is used to determine whether or not a foreign substance is attached to the sheet that is fixed to the surface 11a of the object 11.

[0267] Then, if the determination is changed based on this image, that is, if it is determined that no foreign matter is attached to the sheet, the carry-in / out robot 8 is operated to transport the object 11 to which the sheet is fixed to the cassette 6. In this case, the process in the sheet fixing device 2 for fixing a sheet having a shape corresponding to the surface 11a of the object 11 to the surface 11a of the object 11 is completed.

[0268] On the other hand, if the judgment is not changed based on this image, that is, if it is again judged that foreign matter is attached to the sheet, the transport robot 8, the imaging unit 19 and the foreign matter removal unit 26 are operated, for example, to alternately repeat the removal of foreign matter from the sheet and the judgment of whether or not foreign matter is attached to the sheet a predetermined number of times.

[0269] In addition, when the removal of foreign matter from the sheet is repeated multiple times in this manner, the operating conditions of the foreign matter removal unit 26 may be changed each time. Specifically, the operating conditions in the subsequent times may be set to conditions that make it easier to remove foreign matter from the sheet compared to the operating conditions in the preceding times (for example, conditions under which the flow rate and / or pressure of the fluid ejected from the nozzle 34a of the fluid ejection mechanism 34 is high).

[0270] If the determination is changed during this repetition, the carry-in / out robot 8 is operated to transport the object 11 to which the sheet has been fixed to the cassette 6. As a result, the process in the sheet fixing device 2 for fixing a sheet having a shape corresponding to the surface 11a of the object 11 to the surface 11a of the object 11 is completed.

[0271] <(9) Other components> Fig. 16 is a perspective view schematically showing the appearance of the sheet fastening device 2. The X direction, Y direction, and Z direction shown in Fig. 16 are the same as the X direction, Y direction, and Z direction shown in Fig. 8 and other figures.

[0272] The sheet fastening device 2 has a housing 184 for accommodating all of the components of the sheet fastening device 2 described above except the cassette table 4. The housing 184 is provided with two cassette tables 4 that protrude from a portion located at one end in the Y direction. The housing 184 defines three spaces 184a, 184b, and 184c that are aligned along the Y direction and communicate with each other.

[0273] Of the three spaces 184a, 184b, and 184c, the space 184a which is closest to the cassette table 4 is provided with, for example, a carry-in / out robot 8, an imaging unit 19, and a foreign body removal unit 26. Of the three spaces 184a, 184b, and 184c, the space 184c which is farthest from the cassette table 4 is provided with, for example, a preparation unit 36. Furthermore, the space 184b between the spaces 184a and 184c is provided with, for example, a fixing unit 102 and a removal unit 126.

[0274] A handle 186 is provided in a portion of the housing 184 that is located in the opposite direction from the X direction as viewed from the space 184c. The handle 186 is used to partially open the housing 184 when replenishing or replacing the raw fabric roll 21 provided in the preparation unit 36.

[0275] A fan unit 188 is provided at the top of the housing 184 to generate a downflow within the housing 184. This fan unit 188 has three filters (for example, HEPA (High Efficiency Particulate Air) filters or ULPA (Ultra Low Penetration Air) filters) 190a, 190b, and 190c, and three sets of pairs of fans 192a, 192b, and 192c provided above the filters 190a, 190b, and 190c.

[0276] Specifically, a filter 190a and a pair of fans 192a are provided above the space 184a, a filter 190b and a pair of fans 192b are provided above the space 184b, and a filter 190c and a pair of fans 192c are provided above the space 184c.

[0277] When the fans 192a, 192b, and 192c are operated, a downflow is generated through the filters 190a, 190b, and 190c into the spaces 184a, 184b, and 184c located directly below the filters 190a, 190b, and 190c, causing foreign matter floating in the spaces 184a, 184b, and 184c to fall, thereby reducing the likelihood of foreign matter adhering to the object 11 or the sheet pieces 27, etc.

[0278] In the sheet fixing device 2, there is a risk that foreign matter may get into the inside of the housing 184 (particularly, the space 184c) when the raw web roll 21 is replenished or replaced. In consideration of this, the three sets of pairs of fans 192a, 192b, and 192c may be operated to generate a gas flow from the space 184a toward the space 184c.

[0279] That is, three pairs of fans 192a, 192b, and 192c may be operated so that the downflow generated in space 184a is strongest and the downflow generated in space 184c is weakest. In this case, even if a foreign object gets into space 184c, the likelihood that the foreign object will flow into space 184a and adhere to object 11 can be reduced.

[0280] Furthermore, a counter 194 for counting the number of particles is provided inside the housing 184 (for example, in the space 184c). These particles can become foreign matter that adheres to the object 11 or the individual sheet 27, and the number of particles serves as an index for evaluating the so-called cleanliness. In the sheet fixing device 2, the operating conditions of the fans 192a, 192b, and 192c are changed according to the number of particles counted by the counter 194.

[0281] Specifically, if the number of particles measured by counter 194 exceeds a threshold, i.e., if the desired cleanliness level has not been achieved, the operating conditions of fans 192a, 192b, and 192c are changed to increase the downflow, making it easier to maintain the interior of housing 184 at the desired cleanliness level.

[0282] Furthermore, a plurality of counters 194 may be provided within the housing 184. For example, a counter 194 may be provided in each of the three spaces 184a, 184b, and 184c. In this case, a particle count threshold (i.e., a particle count threshold (first threshold) in the space 184a, a particle count threshold (second threshold) in the space 184b, and a particle count threshold (third threshold) in the space 184c) may be set for each of the three spaces 184a, 184b, and 184c, and the operating conditions of the pair of fans 192a, 192b, and 192c in each set may be changed according to the particle count measured by the corresponding counter 194.

[0283] Specifically, when the number of particles measured by the counter provided in space 184a exceeds a first threshold, the operating conditions of the pair of fans 192a may be changed to strengthen the downflow in space 184a. When the number of particles measured by the counter provided in space 184b exceeds a second threshold, the operating conditions of the pair of fans 192b may be changed to strengthen the downflow in space 184b. When the number of particles measured by the counter 194 provided in space 184c exceeds a third threshold, the operating conditions of the pair of fans 192c may be changed to strengthen the downflow in space 184c.

[0284] Furthermore, a touch panel (not shown) serving as a user interface is provided on the outer surface of the housing 184. This touch panel is configured by, for example, an input device such as a capacitive touch sensor or a resistive touch sensor, and a display device such as a liquid crystal display or an organic EL (Electro Luminescence) display.

[0285] <(10) Controller> The operations of the above-described components of the sheet fastening device 2 are controlled by a controller 196. Fig. 17(A) is a block diagram schematically showing an example of hardware constituting the controller 196. The controller 196 includes a processor 196a and a memory 196b.

[0286] The processor 196a is configured, for example, by a CPU (Central Processing Unit), etc. The memory 196b is configured, for example, by a volatile memory such as a DRAM (Dynamic Random Access Memory) or an SRAM (Static Random Access Memory), and a non-volatile memory such as an SSD (Solid State Drive) (NAND flash memory) or an HDD (Hard Disk Drive) (magnetic storage device).

[0287] The processor 196a can read from the memory 196b and execute, for example, a program for adhering a sheet having a shape corresponding to the surface 11a to the surface 11a of the object 11. In addition to this program, the memory 196b can also store data (for example, a threshold value to be compared with the number of particles measured by the counter 194) that is used when this program is being executed by the processor 196a.

[0288] 17(B) is a block diagram schematically showing functional units realized by the controller 196 when a sheet having a shape corresponding to the surface 11a of the object 11 is adhered to the surface 11a of the object 11. Specifically, during this adhesion, the controller 196 implements an object preparation unit 198a, an individual sheet preparation unit 198b, a main processing unit 198c, and a quality control unit 198d.

[0289] The object preparation unit 198a controls the carry-in / out robot 8 and the imaging unit 19, or in addition to these, the foreign matter removal unit 26, to prepare the object 11 suitable for adhesion to the individual sheet 27. Specifically, the object preparation unit 198a first controls the carry-in / out robot 8 and the imaging unit 19 to form an image used to determine whether or not a foreign matter is attached to the surface 11a, and then determines whether or not a foreign matter is attached to the surface 11a based on this image.

[0290] If it is determined that no foreign matter is attached, the object preparation section 198a controls the carry-in / out robot 8 to carry the object 11 to the fixing unit 102. On the other hand, if it is determined that a foreign matter is attached, the object preparation section 198a controls the carry-in / out robot 8 and the foreign matter removal unit 26 to remove the foreign matter attached to the surface 11a, and then determines again whether or not a foreign matter is attached to the surface 11a as described above.

[0291] If this determination is changed, that is, if it is determined that no foreign matter is attached, the object preparation unit 198a controls the carry-in / out robot 8 to carry the object 11 to the fixing unit 102. On the other hand, if this determination is not changed, that is, if it is determined again that a foreign matter is attached, the object preparation unit 198a controls the carry-in / out robot 8, the imaging unit 19, and the foreign matter removal unit 26 so that the removal of the foreign matter from the surface 11a and the determination of whether or not a foreign matter is attached to the surface 11a are alternately repeated a predetermined number of times.

[0292] When the removal of foreign matter from the surface 11a is repeated multiple times in this manner, the operating conditions of the foreign matter removal unit 26 may be changed each time. Specifically, the operating conditions in the subsequent times may be set to conditions that make it easier to remove foreign matter from the surface 11a compared to the operating conditions in the preceding times (for example, conditions under which the flow rate and / or pressure of the fluid ejected from the nozzle 34a of the fluid ejection mechanism 34 is higher).

[0293] If the determination is changed during this repetition, the object preparation unit 198a controls the carry-in / out robot 8 to carry the object 11 into the fixing unit 102. On the other hand, if the repetition is completed without changing the determination, the object preparation unit 198a controls the touch panel provided on the outer surface of the housing 184 to notify the operator that the object 11 is unsuitable for fixing to the sheet, and also controls the carry-in / out robot 8 to return the object 11 to the cassette 6.

[0294] Furthermore, the object preparation unit 198a controls the fan unit 188 so that the preparation of the object 11 suitable for bonding to the individual sheet 27 (i.e., the process from removal from the cassette 6 to loading into the bonding unit 102) is carried out at an appropriate level of cleanliness.

[0295] The pieced sheet preparing section 198b controls the preparing unit 36 ​​to prepare the pieced sheet 27 suitable for bonding to the object 11. Specifically, the pieced sheet preparing section 198b first controls the drawing section 38 and the foreign matter removing section 44 to remove foreign matter adhering to the portion 23a corresponding to the pieced sheet from the raw roll 21.

[0296] Next, the pieced sheet preparation unit 198b controls the holding unit 48 and the cutting unit 56 to prepare the pieced sheet 27 by cutting out the portion 23a from the raw roll 21. Next, the pieced sheet preparation unit 198b controls the holding unit 48, the cutting unit 62, and the peeling unit 78 to cut out the peeled region 25a of the protective sheet 25 and then peel it from the pieced sheet 27.

[0297] Next, the individual sheet preparation unit 198b controls the holding unit 48, the conveying unit 98, and the imaging unit 100 to form an image that is used to determine whether or not foreign matter is attached to the adhesive area 27a of the individual sheet 27, and then determines whether or not foreign matter is attached to the adhesive area 27a based on this image.

[0298] If it is determined that no foreign matter is attached, the pieced sheet preparation unit 198b controls the holding unit 48 and the conveying unit 98 to carry the pieced sheet 27 into the fixing unit 102. On the other hand, if it is determined that a foreign matter is attached, the pieced sheet preparation unit 198b controls the holding unit 48 and the conveying unit 98 to discard the pieced sheet 27. Furthermore, if it is determined that a foreign matter is attached, the pieced sheet preparation unit 198b controls each component of the preparation unit 36 ​​to perform the above-mentioned operation again.

[0299] Furthermore, the individual sheet preparation unit 198b controls the fan unit 188 so that the preparation of the individual sheet 27 suitable for bonding to the object 11 (i.e., the process from pulling out the portion 23a corresponding to the individual sheet from the original roll 21 to transporting it into the bonding unit 102) is carried out at an appropriate level of cleanliness.

[0300] The processing unit 198c controls the bonding unit 102 and the removing unit 126 so as to bond the carried-in object 11 and piece-of-sheet 27 together, and then remove unnecessary portions (i.e., the unnecessary sheet) of the piece-of-sheet 27. Specifically, the processing unit 198c first controls the first holding unit 104, the second holding unit 110, the pressing unit 112, and the decompression unit 120 so as to bond the bonding regions 27a of the piece-of-sheet 27 to the surface 11a of the object 11.

[0301] Next, main processing unit 198c controls first holding unit 104, second holding unit 110, pressing unit 112, decompression unit 120, first conveying unit 128, and holding unit 142 so as to transport object 11 to which piece of sheet 27 has been adhered from fixing unit 102 to removal unit 126. Next, main processing unit 198c identifies the position of the outer edge of object 11, and then controls holding unit 142 and cutting unit 150 so as to cut piece of sheet 27 along the boundary between adhered region 27a and excess region 27b with reference to the position of the outer edge of object 11.

[0302] Next, the main processing unit 198c controls the holding unit 142, the second conveying unit 160, and the collecting unit 174 so that the unnecessary sheets are collected. Next, the main processing unit 198c controls the holding unit 142 so that the object 11 to which the sheets are fixed can be carried out of the removing unit 126 by the carry-in / out robot 8.

[0303] Furthermore, this processing unit 198c controls the fan unit 188 so that the formation of the object 11 to which the sheet is adhered (i.e., the process from the transport of the object 11 and the individual sheet 27 into the adhesion unit 102 to the time when the object 11 to which the sheet is adhered can be transported out of the removal unit 126) is carried out at an appropriate level of cleanliness.

[0304] The quality control unit 198d controls the carry-in / out robot 8 and the imaging unit 19, or in addition to these, the foreign matter removal unit 26, so as to provide the object 11 to which a sheet suitable for subsequent processing (for example, grinding the back surface 11b of the object 11 in a grinding device, or removing the boundaries between multiple devices 15 in a cutting device or laser processing device) is adhered. Specifically, the quality control unit 198d first controls the carry-in / out robot 8 and the imaging unit 19 to form an image used to determine whether or not a foreign matter is adhered to the sheet, and then determines whether or not a foreign matter is adhered to the sheet based on this image.

[0305] If it is determined that no foreign matter is attached, the quality control unit 198d controls the carry-in / out robot 8 to carry in the object 11 to which the sheet is attached into the cassette 6. On the other hand, if it is determined that a foreign matter is attached, the quality control unit 198d controls the carry-in / out robot 8 and the foreign matter removal unit 26 to remove the foreign matter attached to the sheet, and then determines again whether or not a foreign matter is attached to the sheet as described above.

[0306] If this determination is changed, that is, if it is determined that no foreign matter is attached, the quality control unit 198d controls the carry-in / out robot 8 to carry in the object 11 to which the sheet is fixed into the cassette 6. On the other hand, if this determination is not changed, that is, if it is determined again that a foreign matter is attached, the quality control unit 198d controls the carry-in / out robot 8, the imaging unit 19, and the foreign matter removal unit 26 so that the removal of the foreign matter from the sheet and the determination of whether or not a foreign matter is attached to the sheet are alternately repeated a predetermined number of times.

[0307] In addition, when the removal of foreign matter from the sheet is repeated multiple times in this manner, the operating conditions of the foreign matter removal unit 26 may be changed each time. Specifically, the operating conditions in the subsequent times may be set to conditions that make it easier to remove foreign matter from the sheet compared to the operating conditions in the preceding times (for example, conditions under which the flow rate and / or pressure of the fluid ejected from the nozzle 34a of the fluid ejection mechanism 34 is high).

[0308] If the judgment is changed during this repetition, the quality control unit 198d controls the carry-in / out robot 8 to carry the object 11 to which the sheet is fixed into the cassette 6. On the other hand, if the repetition is completed without changing the judgment, the quality control unit 198d controls the touch panel provided on the outer surface of the housing 184 to notify the operator that the object 11 to which the sheet is fixed is unsuitable for subsequent processing, and controls the carry-in / out robot 8 to carry the object 11 to which the sheet is fixed into the cassette 6.

[0309] Furthermore, the quality control section 198d controls the fan unit 188 so that the object 11 to which the sheet suitable for subsequent processing is adhered (i.e., the processing from the time of removal from the removal unit 126 to the time of transporting into the cassette 6) is provided at an appropriate level of cleanliness.

[0310] <(11) Variation> The above is one embodiment of the present invention, and the present invention is not limited to the above. For example, in the present invention, the sheet to be adhered to the surface 11a of the object 11 may not include an adhesive layer. In this case, the two are adhered to each other by, for example, thermocompression bonding the sheet to the surface 11a of the object 11. Note that this thermocompression bonding is performed, for example, by incorporating a heater in the roller 114 provided in the adhering unit 102 and operating the adhering unit 102 as described above while heating the roller 114 with the heater.

[0311] In addition, the structures and methods according to the above-described embodiments can be modified as appropriate without departing from the scope of the present invention. [Explanation of symbols]

[0312] 2: Sheet fixing device 4: Cassette table 6: Cassette (6a: top plate, 6b, 6c: side walls, 6d: groove, 6e: connecting member) 8: Loading and unloading robot 10: First drive unit 11: Object to be fixed (11a: front side, 11b: back side, 11c: notch) 12: Transfer arm (12a: first arm, 12b: second arm, 12c: second joint) 13: Planned division line 14: Rotation mechanism (14a: case, 14b: spindle) 15: Device 16: Light emitting part (16a: Case) 18: Holding part (18a: one side, 18b: other side) 19: Imaging unit 20: Backlight (20a: Support plate, 20b: Light source) 21: Raw material roll 22: Oblique lighting (22a: support plate, 22b: light source) 23: Belt-shaped sheet (23a: Part that becomes individual sheet) 24: Camera 25: Protective sheet (25a: peeled area) 26: Foreign object removal unit 27: Individual sheet (27a: fixed area, 27b: excess area) 28: Cover (28a: Opening) 30: Spinner table (30a: frame, 30b: porous plate) 32: Rotation mechanism (32a: shaft) 34: Fluid injection mechanism (34a: nozzle, 34b, 34c: pipes) 36: Preparation Unit 38: Drawer section 40: fixing member (40a: groove) 42: Movable member (42a: Through passage) 44: Foreign matter removal section 46: Case (46a: first throughway, 46b: second throughway) 48: Holding part 50: Holding plate (50a: one side, 50b: other side, 50c: suction hole) 52: Rotation mechanism (52a: shaft, 52b: motor) 54:Z direction movement mechanism 56: Cutout section 58: Cutter 60: Support member 62: Cutout section 64: Support member 66: Bearing 68: Shaft 70: Connecting member 72: Cutting tool (72a: cover, 72b: round blade cutter) 74: Rod 76: Elastic member 78: Peeling part 80: Pre-processing section 82: Rod (82a: suction end) 84: Post-processing section 86: Feeding mechanism 88: Case (88a: Opening) 90: Drive roller 92: Driven roller 94: Motor 96:Y direction movement mechanism 98:Transportation section 100: Imaging unit 102: Adhesion unit 104:First holding part 106: chuck table (106a: frame, 106b: porous plate) 108: Rotation mechanism (108a: shaft) 110:Second holding part 112: Pressing section 114: Laura 116: Support 118: X-direction and Z-direction movement mechanism 120: Pressure reduction section 122: Chamber (122a: upper chamber, 122b: lower chamber) 124a, 124b: Piping 126: Removal Unit 128: First conveyor 130: Support plate 132: Connecting member 134: Suction pad 136: Support arm 138:Z direction movement mechanism 140:X direction movement mechanism 142: Holding part 144: chuck table (144a: frame, 144b: porous plate) 146: lifting mechanism (146a: rod) 148: Holding plate (148a: Suction hole) 150: Cutting section 152: Shaft 154: Radial movement mechanism (154a: case, 154b: support plate) 156: Cutter 158: Camera 160: Second conveying section 162: Support plate 164: Connecting member 166: Suction pad 168: Support arm 170:Z direction movement mechanism 172:Y direction movement mechanism 174: Recovery Department 176: Recovery stand 178:Z direction movement mechanism 180: Ball screw (180a: Screw shaft) 182: Motor 184: Housing (184a, 184b, 184c: space) 186: Handle 188: Fan unit 190a, 190b, 190c: Filter 192a, 192b, 192c: Fan 194: Counter 196: Controller (196a: Processor, 196b: Memory) 198a: Fixed object preparation section 198b: Individual sheet preparation section 198c: This processing section 198d:Quality Control Department

Claims

1. A sheet fastening device for fastening a sheet having a shape corresponding to a surface to be fastened to an object to be fastened, an imaging unit having a first camera for imaging the surface to be fixed when the sheet is not fixed; a controller for controlling the imaging unit, The controller determines whether or not a foreign object is attached to the fixed surface based on a first image formed by controlling the imaging unit to image the fixed surface when the sheet is not fixed.

2. a foreign matter removal unit for removing foreign matter from the fixing surface; The sheet fastening device according to claim 1 , wherein the controller controls the foreign matter removal unit to remove foreign matter from the sheet fastening surface when it is determined that foreign matter is attached to the sheet fastening surface.

3. the imaging unit further includes a second camera for capturing an image of the sheet in a state where the sheet is fixed to the fixing surface; The sheet fixing device according to claim 1, wherein the controller determines whether or not a foreign substance is attached to the sheet based on a second image formed by controlling the imaging unit to image the sheet while it is fixed to the fixing surface.

4. a foreign matter removal unit for removing foreign matter from the adherend surface and / or the sheet; 4. The sheet fixing device according to claim 3, wherein the controller controls the foreign matter removal unit to remove foreign matter from the fixing surface when it is determined that foreign matter is attached to the fixing surface, and controls the foreign matter removal unit to remove foreign matter from the sheet when it is determined that foreign matter is attached to the sheet.

5. the first camera is capable of capturing an image of the sheet in a state where it is fixed to the fixing surface; The sheet fixing device according to claim 1, wherein the controller determines whether or not a foreign substance is attached to the sheet based on a second image formed by controlling the imaging unit to image the sheet while it is fixed to the fixing surface.

6. a foreign matter removal unit for removing foreign matter from the adherend surface and / or the sheet; 6. The sheet fixing device according to claim 5, wherein the controller controls the foreign matter removal unit to remove foreign matter from the fixing surface when it is determined that foreign matter is attached to the fixing surface, and controls the foreign matter removal unit to remove foreign matter from the sheet when it is determined that foreign matter is attached to the sheet.

7. the object to be fixed is a wafer having a notch or an orientation flat formed on its outer edge, The sheet fixing device according to any one of claims 1 to 6, wherein the controller identifies the position of the notch or the orientation flat based on a third image formed by controlling the imaging unit to image the surface of the object to be fixed in a state where the sheet is not fixed while irradiating light from the side opposite the surface to be fixed.

8. a cassette table for supporting a cassette containing the object to be fixed; a carry-in / out robot having a holding unit for holding the object to be fixed and a light emitting unit for irradiating light toward the object to be fixed held by the holding unit, for carrying out the object to be fixed with the sheet not fixed to the surface to be fixed from the cassette supported by the cassette table and / or for carrying in the object to be fixed with the sheet fixed to the surface to be fixed to the cassette, The controller controls the image capturing unit to capture an image of the surface to be fixed when the sheet is not fixed, while controlling the carrying-in / out robot so that the holding unit holds the object to be fixed with the surface to be fixed exposed, and the light emitting unit irradiates the object to be fixed from the opposite side to the surface to be fixed, so that the third image is formed.

9. a preparation unit for preparing an individual sheet including a fixing region having a shape corresponding to the fixing surface and an excess region surrounding the fixing region; a fixing unit for fixing the fixing region of the individual sheet prepared by the preparation unit to the fixing surface of the fixing object; a removing unit for removing the excess area from the individual sheet having the fixing area fixed to the fixing surface by the fixing unit, The fixing unit comprises: a first holding portion for holding the object to be fixed; a second holding portion for holding the individual sheet; a pressing portion for pressing the fixing region of the sheet piece toward the fixing surface of the object to be fixed, A sheet fixing device as described in any one of claims 1 to 6, wherein the controller controls the fixing unit so that the first holding portion holds the object to be fixed with the fixing surface exposed, and the second holding portion holds the individual sheet with the fixing area exposed and facing the fixing surface, while the pressing portion presses the fixing area toward the fixing surface.

10. the pressing unit includes a roller positioned to sandwich the object held by the first holding unit and the individual sheet held by the second holding unit, The sheet fixing device according to claim 9 , wherein the controller controls the pressing portion of the fixing unit so that the fixing area is pressed against the surface to be fixed by rolling the roller.

11. the fixing unit further includes a pressure reducing section for causing the fixing region to be fixed to the fixing target surface in a space whose pressure is reduced below atmospheric pressure; The pressure reducing section is a chamber for accommodating the first holding portion for holding the object to be fixed, the second holding portion for holding the individual sheet, and the roller; a pump for reducing the pressure in the interior space of the chamber; The sheet fixing device according to claim 10, wherein the controller controls the pressing portion and the decompression portion of the fixing unit so that the fixing area is pressed toward the surface to be fixed while the internal space of the chamber is decompressed by the pump.

12. a housing for accommodating the preparation unit, the fixing unit, and the removal unit; a fan for generating a downflow within the housing; a counter for measuring the number of particles in the housing; The sheet fixing device according to claim 9, wherein the controller controls the fan to change an operating condition in response to the number of particles measured by the counter.

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