Inspection device, inspection method and program

Abstract

To easily inspect seal strength of a sealed body.SOLUTION: An inspection device 10 has an air pressure control part 2 that controls an inspection part 1, on which a sealed body 200 with a seal part 201 filled with certain gas and having a weaker peeling force than other parts, to be in a negative pressure state or a pressurized state, and measures air pressure when the seal part 201 is opened based on the detection of change in air pressure inside the inspection part 1 that is controlled to be in a negative pressure state or a pressurized state.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an inspection device, an inspection method, and a program. [Background technology]

[0002] There are known methods for testing the strength of a seal sealed in a sealed body using heat, ultrasound, etc. For example, there is the deadweight method, in which a weight is placed directly on the sealed body, and the tensile test method, in which the sealed body is cut to a specified size and both ends are grabbed and pulled. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-066479 Summary of the Invention [Problem to be solved by the invention]

[0004] The peel force (the force required to peel off a sample adhered to a seal, film, etc.) of the sealed part of a sealed body varies depending on the shape of the product. Furthermore, the strength of the entire sealed product may not be uniform depending on the performance of the sealing machine that seals the sealed portion of the sealed body or differences between individual sealing machines.

[0005] In addition, if there is no difference in the peel strength of the opening of the sealed body and the peel strength of the other parts, it may not be possible to open it manually, or the strength may be insufficient and random parts may open, causing the sealed body to lose its properties. In one aspect, the present invention aims to easily inspect the seal strength of a sealing body. [Means for solving the problem]

[0006] In order to achieve the above object, the disclosed inspection device has an air pressure control unit that controls an inspection chamber in which a sealed object containing a predetermined gas and having a tear-open portion with a weaker peeling force than other portions is placed to a negative or pressurized state, and measures the air pressure at which the tear-open portion is opened based on detection of a change in air pressure within the inspection chamber controlled to a negative or pressurized state. [Effects of the Invention]

[0007] In one embodiment, the seal strength of the enclosure can be easily inspected. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a diagram illustrating an inspection device according to an embodiment. [Figure 2] FIG. 2 is a diagram illustrating a hardware configuration for realizing a control function of a control unit according to an embodiment. [Figure 3] FIG. 1 is a diagram illustrating a seal strength confirmation test. [Figure 4] 10A and 10B are diagrams illustrating an example of a pressure reduction pattern in the seal strength confirmation process. [Figure 5] 10A and 10B are diagrams illustrating the sealed body when the air pressure in the testing space is lowered. [Figure 6] 10A and 10B are diagrams illustrating an example of a pressure reduction pattern in a leak inspection process. [Figure 7] 10A and 10B are diagrams illustrating an example of a pressure reduction pattern in a burst inspection process. [Figure 8] 10A and 10B are diagrams illustrating other sealing bodies. [Figure 9] FIG. 10 is a diagram illustrating a sealed body during a pressure test. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, an inspection device according to an embodiment will be described in detail with reference to the drawings.

[0010] In order to facilitate understanding of the invention, the position, size, shape, range, etc. of each component shown in the following drawings may not represent the actual position, size, shape, range, etc. Therefore, the present invention is not necessarily limited to the position, size, shape, range, etc. disclosed in the drawings, etc. In the embodiments, elements expressed in the singular include the plural unless otherwise clearly indicated in the context. <Embodiment> FIG. 1 is a diagram showing an inspection device according to an embodiment.

[0011] The inspection device 10 of the embodiment is a device that inspects whether or not there is a gas leak from a sealed object 200 that is the inspection target. The sealed object 200 is not particularly limited as long as it contains a predetermined gas and has an opening portion with a weaker peel strength than other portions (for example, a sealed structure formed by closing a portion of an opening). Examples include a container with sealed ends, such as a snack food container, or a container with a sealed gap between a plastic container and a paper lid, such as a cup noodle container. In FIG. 1, sealed object 200 is provided with seal portions 201 at both ends to keep the inside of the sealed object 200 airtight. The seal portions 201 have a weaker peel strength than other portions of the sealed object 200. The inspection device 10 includes an inspection unit 1, an air pressure control unit 2, a pressure increase / decrease unit 3, a leak inspection unit 4, a pipe 5, and a pressure sensor 6.

[0012] The inspection unit 1 has a seal plate 11 and a lid-shaped container 12. A sealed object 200 to be inspected is placed on the seal plate 11. Although one sealed object 200 is placed in Fig. 1, a plurality of sealed objects 200 may be inspected.

[0013] An O-ring 12a is placed on the edge of the container 12, and by placing the container 12 over the seal plate 11, the space surrounded by the seal plate 11 and the container 12 is kept airtight. In the following explanation, the space inside the testing unit 1 that is kept airtight is referred to as the "testing space." The testing space is connected to an air pressure control unit 2, a pressure / pressure control unit 3, and a leak testing unit 4 by piping 5, respectively.

[0014] The air pressure control unit 2 executes a process (seal strength confirmation process) to confirm the strength of the seal portion 201. The air pressure control unit 2 also executes a leak inspection process, which will be described later. During the leak inspection process, the air pressure control unit 2 receives the inspection results from the leak inspection unit 4 and determines whether or not there is a leak in the inspected sealed body 200. The air pressure control unit 2 also executes a rupture inspection process for any sealed body 200, to confirm whether or not the seal portion 201 will rupture at an air pressure set based on the strength confirmed in the seal strength confirmation process.

[0015] This air pressure control unit 2 is realized by a CPU 101, which will be described later, etc. The air pressure control unit 2 controls the entire inspection device 10, such as starting and stopping the operation of the pressurization / depressurization unit 3 and the leak inspection unit 4, and opening and closing the valves 51 and 52. The air pressure control unit 2 also controls the air pressure in the inspection space set by the pressure sensor 6 through the piping 5 so as to maintain the air pressure at a desired level for a fixed period of time (for example, in minutes). The air pressure control unit 2 also controls the air pressure in the inspection space to return to the predetermined air pressure if the air pressure changes due to deformation of the sealed body 200 or a temperature change. In other words, the air pressure control unit 2 has the function of maintaining the air pressure in the inspection space at a desired level and the function of setting the air pressure in the inspection space to a desired level.

[0016] The piping 5 serves as a gas flow path when the testing space is maintained at a desired atmospheric pressure or when the gas in the testing space is sucked out to reduce the pressure in the testing space. The inner diameter of the piping 5 is, for example, about 6 mm to 8 mm.

[0017] A valve 51 is arranged at the outlet of the pressurizing / depressurizing unit 3 in the piping 5. A valve 52 is also arranged on the inspection unit 1 side of the valve 51. The valve 51 opens or closes the gas flow path in the piping 5 arranged between the pressurizing / depressurizing unit 3 and the inspection unit 1. The valve 52 is used to release the air pressure inside the piping 5. In other words, the valve 52 is an example of a release unit that returns the air pressure inside the inspection unit 1 to atmospheric pressure.

[0018] The pressurizing / depressurizing unit 3 is equipped with a vacuum pump and a compressor. When gas is to be sucked from the testing space, the air pressure control unit 2 opens the valve 51. The pressurizing / depressurizing unit 3 then operates the vacuum pump to suck gas from the testing space through the piping 5, thereby reducing the pressure in the testing space. The valve 51 is then closed, thereby maintaining a vacuum in the testing space. When pressurizing the testing space, the air pressure control unit 2 opens the valve 51. The pressurizing / depressurizing unit 3 then operates the compressor to pressurize the gas in the testing space through the piping 5, thereby pressurizing the testing space. The valve 51 is then closed, thereby maintaining a pressurized state in the testing space.

[0019] The leak inspection unit 4 of the embodiment performs a direct pressure leak inspection. Specifically, the leak inspection unit 4 sucks in gas from the inspection space. When sucking, the air pressure control unit 2 opens the valve 51. The leak inspection unit 4 then sucks in the gas from the inspection space via the piping 5. Based on the detection by the pressure sensor 6, the leak inspection unit 4 detects a pressure change in the inspection space in Pascal units that occurs when a small amount of gas leaks from the sealed body 200 (hereinafter, also simply referred to as the detection process). The detection unit of the leak inspection unit 4 of the embodiment is, for example, approximately 1 / 100,000 atmosphere units. This inspection can be performed, for example, by using the PLT-3000 series manufactured and sold by Takachiho Seiki Co., Ltd. The pressure sensor 6 detects the pressure inside the pipe 5 . FIG. 2 is a diagram illustrating a hardware configuration for realizing the control function of the control unit according to the embodiment.

[0020] The atmospheric pressure control unit 2 is entirely controlled by a CPU (Central Processing Unit) 101. A RAM (Random Access Memory) 102 and a plurality of peripheral devices are connected to the CPU 101 via a bus 106.

[0021] The RAM 102 is used as the main storage device of the atmospheric pressure control unit 2. The RAM 102 temporarily stores at least a portion of the OS (Operating System) programs and application programs executed by the CPU 101. The RAM 102 also stores various data used in processing by the CPU 101. A ROM (Read Only Memory) 103, a graphics processing unit 104, and an input interface 105 are connected to the bus 106.

[0022] The ROM 103 magnetically writes and reads data and is used as a secondary storage device for the inspection device 1. The ROM 103 stores an OS program, application programs, and various data.

[0023] The touch panel 3a is connected to the graphics processing unit 104. The graphics processing unit 104 displays an image on the screen of the touch panel 3a in accordance with an instruction from the CPU 101.

[0024] The touch panel 3a and signal lines for each button and switch are connected to the input interface 105. The input interface 105 transmits signals sent from the touch panel 3a and buttons to the CPU 101. Note that the touch panel 3a is an example of a pointing device, and other pointing devices can also be used. Examples of other pointing devices include a tablet, a touchpad, and a trackball. The control functions of this embodiment can be realized by the hardware configuration described above.

[0025] Next, the operation of the inspection device 10 will be described. The operation will be described in order below, but the operation is an example, and other operations can be added. Furthermore, some steps may be automated or performed manually. <Seal strength verification process>

[0026] The seal strength confirmation process is a process for confirming the desired seal strength of the seal portion 201 using the inspection device 10. This seal strength confirmation process is a process that is performed on a sample of the sealed body 200 to be shipped in the future, for example.

[0027] Figure 3 is a diagram illustrating the seal strength confirmation test. In the graph of Figure 3, the vertical axis represents the degree of vacuum (lower pressure at the bottom) and the horizontal axis represents time. In the following explanation, it is assumed that the consumer will manually open the sealed portion 201.

[0028] Point a is a pressure value determined in advance by the designer. Point a is a pressure value set by the designer at which the sealed body 200 should not burst even if the pressure is lowered to this level (bursting would be problematic). Point b is a pressure value with a margin around point a. Point b is less likely to burst than point a. Point b requires a greater force to open the sealed portion 201, but is a value that the designer considers to be within an appropriate range for the strength of the sealed portion 201.

[0029] Point c is the pressure value at which the designer judges that the strength of seal portion 201 is too high. In other words, if sealed body 200 does not leak at seal portion 201 even when the air pressure is lowered to point c, it is difficult for the consumer to open seal portion 201, which indicates that seal portion 201 is too strong and is not desirable. The designer determines these points b and c through a seal strength confirmation process. An example of the determination method will be explained below.

[0030] One sealing body 200 is placed on the seal plate 11. The container 12 with the O-ring 12a is placed over the seal plate 11 to define the test space. This operation may be performed by a machine or a human (tester). FIG. 4 is a diagram illustrating an example of a pressure reduction pattern in the seal strength confirmation process.

[0031] The air pressure control unit 2 opens valve 51 and closes valve 52. Then, the air pressure control unit 2 operates the vacuum pump of the pressurizing / depressurizing unit 3 to gradually reduce the air pressure inside the testing space to point a (between times t0 and t1). A peeling force is generated in the seal portion 201 of the sealing body 200 due to the difference in air pressure between the inside of the sealed body 200 and the inside of the testing space. At time t1, the valve 51 is closed.

[0032] Figure 5 is a diagram illustrating the sealed body when the air pressure in the testing space is lowered. Figure 5(a) is a diagram of the sealed body 200 seen from the side, and Figure 5(b) is a diagram of the sealed body 200 seen from above.

[0033] When the air pressure in the testing space drops, pressure is generated from inside the sealed body 200 to expand, and a force acts to peel off the seal portion 201. Returning to FIG.

[0034] At time t2, a certain amount of time after time t1, atmospheric pressure control unit 2 again operates the vacuum pump of pressurizing / depressurizing unit 3 and opens valve 51 to further depressurize the testing space (between times t2 and t3). Here, it is assumed that a leak occurs at point p at time t3. Based on the value of pressure sensor 6, atmospheric pressure control unit 2 detects that a leak has occurred in seal unit 201 (seal unit 201 has opened), and stores the value of atmospheric pressure at point p at which the leak occurred. At time t4, atmospheric pressure control unit 2 stops pressurizing / depressurizing unit 3, closes valve 51, and opens valve 52, returning the testing space to atmospheric pressure, and removes sealed body 200 from the testing space. A new sealed body 200 is prepared, placed on the seal plate 11, and the above-described process is carried out to store the air pressure value at which the leak occurred (point p1, not shown).

[0035] The air pressure control unit 2 repeatedly executes the above process for multiple sealed bodies 200, and calculates the average of the stored air pressure values ​​(point p, point p1, ...), i.e., the average of the air pressure values ​​of each sealed body 200 where leakage occurred. The tester determines an air pressure (with a margin) slightly lower than the obtained average as point c. Furthermore, an air pressure value even higher than point c, i.e., an air pressure value with less air pressure change from atmospheric pressure than point c, as point b.

[0036] The method for determining point c is not limited to the above. For example, point c may be set based on the pressure point p at which leakage occurs in one sealed body 200, without taking the average value. Alternatively, point c may be set to the pressure point p itself. <Leak inspection process>

[0037] The leak inspection process is a process for checking whether or not a leak occurs in the sealed body 200 to be inspected at points a and b determined in the seal strength confirmation process. This leak inspection process is a process that is executed, for example, on all sealed bodies 200 to be shipped. <Step S1>

[0038] One sealing body 200 is placed on the seal plate 11. The container 12 with the O-ring 12a is placed over the seal plate 11 to define the test space. This operation may be performed by a machine or a human (tester). <Step S2> The air pressure control unit 2 opens the valve 51 and closes the valve 52. Then, the air pressure control unit 2 operates the vacuum pump of the pressurizing / depressurizing unit 3 to reduce the pressure inside the testing space to point b. FIG. 6 is a diagram illustrating an example of a pressure reduction pattern for the leak check process.

[0039] The difference in air pressure between the inside of the sealed body 200 and the inside of the test space generates a peeling force in the seal portion 201 of the sealed body 200. Thereafter, when the air pressure controller 2 determines that the air pressure inside the pipe 5 has reached a preset point b (for example, −50,000 Pa to −60,000 Pa) based on the detection of the air pressure inside the pipe 5 by the pressure sensor 6, the air pressure controller 2 closes the valve 51 (time t5).

[0040] At time t6, a certain time after time t5, the air pressure control unit 2 drives the leak detection unit 4. The leak detection unit 4 detects pressure changes in the test space in Pascal units by passing the gas inside the test space through the piping 5 (between times t6 and t7). Specifically, as mentioned above, if there is a leak in the sealed body, the test pressure will change, so whether or not a leak has occurred is determined based on the output of the pressure sensor 6, and a judgment is made as to whether the test is good (no leak) or bad (leak).

[0041] After time t7 has passed, the air pressure control unit 2 opens the valve 52. This causes the air pressure inside the pipe 5 to return to atmospheric pressure. At this time, the tester may visually check the sealed state of the sealed body 200. The period between time t0 and time t5 is, for example, 2 seconds, the period between time t5 and time t6 is, for example, 1 second, and the period between time t6 and time t7 is, for example, 2 seconds. Next, the burst test will be described. <Burst inspection process> The burst test process is a process for checking whether the point c determined in the seal strength confirmation process is appropriate. The timing for performing this burst test process is arbitrary. FIG. 7 is a diagram illustrating an example of a pressure reduction pattern in the burst inspection process.

[0042] The burst test process is performed on the sealed body 200 that has been judged to be good (no leaks) after the leak test process has been completed. Specifically, the air pressure control unit 2 operates the vacuum pump of the pressurizing / depressurizing unit 3 to reduce the pressure inside the test space to point c (between times t7 and t8). Thereafter, the air pressure control unit 2 operates the compressor of the pressurizing / depressurizing unit 3 to increase the pressure inside the test space to point b (between times t8 and t9).

[0043] At time t9, the air pressure control unit 2 drives the leak detection unit 4. The leak detection unit 4 detects pressure changes in the test space in Pascal units by passing the gas inside the test space through the piping 5 (between times t9 and t10). The leak detection unit 4 then determines whether a leak has occurred based on the output of the pressure sensor 6, and makes a judgment as to whether the result is good (no leak) or bad (a leak has occurred).

[0044] The air pressure control unit 2 determines that the sealed body 200 that was determined to be defective is acceptable. In other words, the sealed body 200 that leaks when the air pressure is lowered to point c is determined to be acceptable because the strength of the seal portion 201 is not too high. Conversely, the sealed body 200 that does not leak even when the air pressure is lowered to point c is determined to be unacceptable because the strength of the seal portion 201 is too high. <Variation 1>

[0045] In the above description, the sealed body 200 is provided with the seal portions 201 at both ends to keep the inside of the sealed body 200 airtight, but as mentioned above, the sealed body to be inspected is not limited to this. FIG. 8 is a diagram illustrating another sealing body.

[0046] The sealed body 300 shown in FIG. 8 is a sealed body (a sealed body in which separate members are sealed together) in which a plastic container such as a cup noodle container and a paper lid are sealed.

[0047] The sealed body 300 has a plastic container body 301 and a paper lid 302. A seal 303 that keeps the container body 301 airtight is provided between the container body 301 and the lid 302. The peel strength of this seal 303 is weaker than that of other parts of the sealed body 300.

[0048] Also, although not shown, sealed bodies formed by bonding the edges of two rectangular sheet-shaped plastic products together (sealed bodies in which the entire periphery of a rectangle or circle is sealed) are also included as objects to be inspected.

[0049] By gradually lowering the air pressure in the testing space, it is possible to generate a uniform peeling force throughout the entire seal portion 201. Therefore, if there is a location where the sealing force is weak, there is a high possibility that peeling will occur from that location. <Variation 2> In the above embodiment, the test is performed by reducing the pressure in the test space, but the test may be performed by pressurizing the test space. FIG. 9 is a diagram illustrating the sealed body during the pressure test.

[0050] The air pressure control unit 2 operates the compressor of the pressurization / depressurization unit 3 to pressurize the test space. Pressure is applied from outside the sealed body 200 due to the difference between the air pressure inside the sealed body 200 and the air pressure inside the test space, compressing the gas inside the sealed body 200 and generating a peeling force in the seal portion 201. In this pressurization test, the average air pressure value of each sealed body 200 where a leak occurred is calculated, and a pressure slightly lower than the obtained average (with a margin) can be determined as point c. Furthermore, an air pressure value even lower than point c, i.e., an air pressure value with a smaller air pressure change from atmospheric pressure than point c, can be determined as point b.

[0051] As described above, the inspection device 10 controls the inspection unit 1, on which the sealed object 200 containing a predetermined gas and having an opening portion with a weaker peeling force than other portions, to a negative or pressurized state, and has an air pressure control unit 2 that measures the air pressure at which the sealed portion 201 is opened based on detection of changes in air pressure within the inspection unit 1 controlled to a negative or pressurized state. Therefore, the strength of the seal portion 201 of the sealed object 200 can be easily inspected. Specifically, by evacuating the inspection space, a pressure difference is generated inside the sealed object 200, which is approximately the same as when a dead weight is placed on it.

[0052] In the case of a deadweight test, the sealed body needs to be inflated, and if there is not enough gas inside, it is necessary to add gas. When the test space is evacuated, if there is a small amount of gas inside the sealed body, a pressure difference occurs and the sealed body itself expands, making it easy to apply uniform pressure to the sealed body 200.

[0053] Furthermore, by gradually changing the air pressure, an even peeling force is generated across the entire sealed portion, allowing peeling to begin from the sealed portion 201 (the portion with the weakest sealing strength), enabling improvements and adjustments to the sealing machine (not shown) to be quantified. For example, if it is known that the degree to which peeling of the sealed portion 201 begins at a predetermined air pressure (e.g., the aforementioned -50,000 Pa to -60,000 Pa) is the degree to which it is easy to open (this differs depending on the size and shape of the sealed body 200), the numerical values ​​of the sealing machine can be set to seal the sealed portion 201 so that peeling of the sealed portion 201 begins at that air pressure. In this way, the seal strength determined by the company's standards can be easily confirmed.

[0054] Furthermore, if no peeling of the seal portion 201 is observed at a predetermined air pressure (for example, the above-mentioned -50,000 Pa to -60,000 Pa), it can be confirmed that the strength is equal to or greater than the specified value without performing a destructive test.

[0055] Furthermore, after the seal strength test, the leak inspection unit 4 performs a direct pressure leak inspection, which makes it possible to check whether there is any leakage (damage) from the sealed body 200 after the seal strength test. This allows for in-house evaluation testing and product guarantee. In addition, by numerically controlling the opening of the seal portion 201 with ideal seal strength, it is possible to test the creation of products that are easy to open even for people with poor grip strength, such as the elderly and children.

[0056] Although the processing performed by the inspection device 10 is distributed among multiple parts, several functions may be combined into one part, or all functions may be integrated into one part. For example, in this embodiment, the air pressure control unit 2 and the pressure increase / decrease unit 3 are described as separate parts, but this is not limiting, and the air pressure control unit 2 and the pressure increase / decrease unit 3 may be integrated. The air pressure control unit 2 and the leak inspection unit 4 may also be integrated.

[0057] Furthermore, the inspection method is not limited to that of the embodiment, and a gas may be sealed in the sealed body. In this case, the type of gas to be sealed is not particularly limited, but may be, for example, helium gas. The inspection device may then analyze whether or not the gas sucked from the pipe 5 contains gas (e.g., helium gas) inside the sealed body. This inspection method may be a conventionally known method (e.g., the method described in JP 2015-42948 A).

[0058] While the inspection device, inspection method, and program of the present invention have been described above based on the illustrated embodiments, the present invention is not limited to these, and the configuration of each part can be replaced with any configuration having a similar function. Furthermore, any other components or processes may be added to the present invention. Furthermore, in this embodiment, the atmospheric pressure control unit 2 starts and stops all processing, but some of the processing may be started and stopped manually by a human being using a switch.

[0059] The above processing functions can be realized by a computer. In this case, a program is provided that describes the processing contents of the functions possessed by the atmospheric pressure control unit 2. By executing the program on a computer, the above processing functions are realized on the computer. The program describing the processing contents can be recorded on a computer-readable recording medium. Examples of computer-readable recording media include magnetic storage devices, optical disks, magneto-optical recording media, and semiconductor memories. Examples of magnetic storage devices include hard disk drives, flexible disks (FDs), and magnetic tapes. Examples of optical disks include DVDs, DVD-RAMs, and CD-ROM / RWs. Examples of magneto-optical recording media include MOs (Magneto-Optical disks).

[0060] When distributing a program, for example, the program is recorded on a portable recording medium such as a DVD or CD-ROM and sold. Alternatively, the program can be stored in a storage device of a server computer and transferred from the server computer to other computers via a network.

[0061] A computer that executes a program stores, for example, a program recorded on a portable recording medium or a program transferred from a server computer in its own storage device. The computer then reads the program from its own storage device and executes processing in accordance with the program. Note that the computer can also read the program directly from a portable recording medium and execute processing in accordance with that program. The computer can also execute processing in accordance with the program received each time a program is transferred from a server computer connected via a network.

[0062] At least a part of the above processing functions can also be realized by electronic circuits such as a DSP (Digital Signal Processor), an ASIC (Application Specific Integrated Circuit), or a PLD (Programmable Logic Device). [Explanation of symbols]

[0063] 1. Inspection Department 11 Seal plate 12 containers 12a O-ring 2. Air pressure control unit 3 Pressure adjustment section 4. Leak inspection section 5 Piping 51, 52 valves 6 Pressure Sensors 10 Inspection equipment 200, 300 sealed body 201, 303 Seal part 301 Container body 302 Lid

Claims

1. An inspection device characterized by having an air pressure control unit that controls an inspection chamber in which a sealed object is placed, which is filled with a specified gas and has an opening part with a weaker peeling force than other parts, to a negative pressure state or a pressurized state, and measures the air pressure at which the opening part is opened based on detection of changes in air pressure within the inspection chamber controlled to a negative pressure state or a pressurized state.

2. 2. The inspection device according to claim 1, wherein the air pressure control unit sets the interior of the inspection chamber to an air pressure that has a smaller change in air pressure from atmospheric pressure than the air pressure at which the unsealing unit is opened, and includes a leak inspection unit that detects gas leaking from the sealed body that has a defect based on the pressure difference between the inside and outside of the sealed body within the set inspection chamber.

3. 3. The inspection device according to claim 2, wherein the air pressure control unit reduces the pressure inside the inspection chamber to a pressure set based on the air pressure at which the opening portion is opened, and determines whether the opening portion of the sealed object placed in the inspection chamber and determined to be free of defects has been opened.

4. 4. The inspection device according to claim 3, wherein the air pressure control unit determines that a sealed product whose opening portion has been opened is acceptable, and determines that a sealed product whose opening portion has not been opened is unacceptable.

5. The computer A test chamber in which a sealed object having a tear-open portion filled with a predetermined gas and having a weaker peeling force than other portions is placed is controlled to a negative pressure state or a pressurized state; The pressure at which the opening part is opened is measured based on the detection of a change in the air pressure in the inspection chamber controlled to a negative pressure state or a pressurized state. An inspection method characterized by:

6. On the computer, A test chamber in which a sealed object having a tear-open portion filled with a predetermined gas and having a weaker peeling force than other portions is placed is controlled to a negative pressure state or a pressurized state; The pressure at which the opening part is opened is measured based on the detection of a change in the air pressure in the inspection chamber controlled to a negative pressure state or a pressurized state. A program characterized by executing a process.

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