Flow rate adjustment device

Abstract

To provide a flow rate adjustment device that can be manufactured at a relatively low manufacturing cost and can maintain fluid at a certain flow rate in a range of relatively small flow rates.SOLUTION: A flow rate adjustment device 100 includes: a first member 10 having a valve body part 11; and a second member 20 having a housing hole 21 with a circular cross-section. The first member 10 is rotationally housed in the second member 20. The second member 20 has an outflow flow path 23 for guiding fluid from an inner peripheral surface 21a of the housing hole 21 toward an outflow pipe 2 connected to the second member 20. The valve body part 11 includes: an inflow hole 11b; an outflow hole 11c; and an outflow groove 11e formed in an outer peripheral surface 11a along a circumferential direction about a first axis AX1. The outflow groove 11e forms a flow rate adjustment flow path extending along the circumferential direction to the inner peripheral surface 21a of the storage hole 21 and connecting the outflow hole 11c with the outflow flow path 23. A cross-sectional area of the flow rate adjustment flow path decreases gradually with a distance along the circumferential direction from one end 11e1 of the outflow groove 11e.SELECTED DRAWING: Figure 8

Description

[Technical Field]

[0001] The present invention relates to a flow rate control device. [Background technology]

[0002] Conventionally, a flow control device has been known that includes a body provided with a valve hole and a valve body portion having a needle portion inserted into the valve hole (see, for example, Patent Document 1). The flow control device disclosed in Patent Document 1 is a device that controls the flow rate of a fluid by transmitting the driving force of a motor to the needle portion inserted into the valve hole to change the position of the needle portion and adjusting the gap formed between the inner peripheral surface of the valve hole and the outer peripheral surface of the needle portion. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 5144880 Summary of the Invention [Problem to be solved by the invention]

[0004] The flow control device disclosed in Patent Document 1 is capable of dynamically adjusting the flow rate of a fluid to a desired flow rate by controlling a motor. However, when used in applications such as maintaining a constant flow rate of a fluid, the flow control device disclosed in Patent Document 1 requires a large number of parts, such as a motor and a mechanism for transmitting the motor's driving force to a needle valve, resulting in high manufacturing costs. Furthermore, the method of adjusting the flow rate of a fluid by the insertion amount of a needle valve into a valve hole has a relatively large fluctuation in the flow rate of the fluid in response to changes in the insertion amount of the needle valve, making it difficult to appropriately adjust the flow rate to a desired value within a small flow rate range (for example, a range of 30 mL / min or less).

[0005] The present invention has been made in consideration of the above circumstances, and aims to provide a flow control device that can be manufactured at relatively low manufacturing costs and is capable of maintaining a fluid at an arbitrary flow rate within a relatively small flow rate range. [Means for solving the problem]

[0006] In order to solve the above problems, the present invention employs the following means. A flow control device according to one aspect of the present invention includes a first member having a valve body portion formed in a cylindrical shape so as to extend along a first axis, and a second member formed to extend along the first axis and having an accommodation hole formed with a circular cross section perpendicular to the first axis, wherein the first member is accommodated in the second member so as to be rotatable about the first axis with an outer peripheral surface of the valve body portion and an inner peripheral surface of the accommodation hole in contact with each other, and the second member is formed to extend along a second axis perpendicular to the first axis and extends from the inner peripheral surface of the accommodation hole toward an outflow pipe connected to the second member. the valve body portion has an inlet hole through which the fluid flows, an outlet hole through which the fluid that has flowed in from the inlet hole flows out along a third axis perpendicular to the first axis, and an outlet groove formed on the outer peripheral surface along a circumferential direction about the first axis from one end connected to the outlet hole, the outlet groove forming a flow rate adjustment flow rate that extends along the circumferential direction from the one end to the other end between the inner peripheral surface of the accommodation hole and the outlet hole, and the cross-sectional area of ​​the flow rate adjustment flow rate gradually decreases according to the distance along the circumferential direction from the one end of the outlet groove.

[0007] According to one aspect of the flow control device of the present invention, fluid that flows into the valve body through the inlet hole is guided to the outlet hole along a third axis perpendicular to the first axis along which the valve body extends. When the third axis along which the fluid is guided to the outlet hole coincides with the second axis along which the outlet flow path of the second member extends, a circulating state is achieved in which the fluid flows out from the outlet hole to the outlet flow path. On the other hand, when the third axis along which the fluid is guided to the outlet hole does not coincide with the second axis along which the outlet flow path of the second member extends and the outer peripheral surface of the valve body and the outlet flow path of the second member are positioned opposite each other, a fully closed state is achieved in which no fluid flows out from the outlet hole to the outlet flow path.

[0008] Furthermore, when the third axis along which the fluid is guided to the outflow hole does not coincide with the second axis along which the outflow flow path of the second member extends, and the outflow groove formed in the valve body portion and the outflow flow path of the second member are arranged opposite each other, a flow rate adjustment state is achieved in which the fluid flows out of the outflow hole into the outflow flow path via the flow rate adjustment flow path.

[0009] The flow rate adjustment passage is a passage that extends circumferentially from one end to the other end between the outflow groove and the inner circumferential surface of the accommodation hole and connects the outflow hole and the outflow passage. The cross-sectional area of ​​the flow rate adjustment passage gradually decreases according to the distance along the circumferential direction from one end of the outflow groove. Therefore, by rotating the valve body portion about the first axis to adjust the position of the outflow groove that is arranged opposite the outflow passage, it is possible to adjust the flow rate of the fluid flowing from the outflow hole to the outflow passage via the flow rate adjustment passage to a desired value.

[0010] According to one aspect of the present invention, the flow rate control device can adjust the flow rate of a fluid to a desired flow rate without using a motor or a transmission mechanism that transmits the driving force of the motor to the valve body, and therefore can be manufactured at a relatively low cost. Furthermore, by rotating the valve body about the first axis and adjusting the position of the outflow groove that is arranged opposite the outflow channel, the flow rate can be maintained at a desired flow rate within a relatively small range.

[0011] In a flow control device according to one aspect of the present invention, the second member has an inlet flow path that is formed to extend along the second axis and that guides fluid from an inlet pipe connected to the second member toward the inner surface of the accommodating hole, and the valve body portion has the inlet hole through which fluid flows along the third axis, and an inlet groove that is formed on the outer surface along the circumferential direction from one end connected to the inlet hole, and the inlet groove is preferably configured to form a connecting flow path that extends along the circumferential direction from the one end to the other end between the inner surface of the accommodating hole and the inlet flow path, connecting the inlet flow path and the inlet hole.

[0012] According to the flow control device having the above configuration, the fluid flowing in from the inlet pipe is guided to the valve body portion via the inlet passage of the second member extending along the second axis. When the third axis along which the fluid is guided to the outlet hole and the second axis along which the inlet passage of the second member extends are aligned, a circulating state is achieved in which the fluid flows from the inlet passage to the inlet hole of the valve body portion. On the other hand, when the third axis along which the fluid is guided to the outlet hole and the second axis along which the inlet passage of the second member extends do not match and the outer peripheral surface of the valve body portion and the outlet passage of the second member are positioned opposite each other, a fully closed state is achieved in which the fluid flows into the inlet hole but does not flow out from the outlet hole to the outlet passage.

[0013] Furthermore, when the third axis along which the fluid is guided to the outlet hole does not coincide with the second axis along which the inlet flow path of the second member extends, and the outlet groove formed in the valve body portion and the outlet flow path of the second member are arranged opposite each other, a flow rate adjustment state is achieved in which the fluid flowing from the inlet flow path through the connecting flow path into the inlet hole flows out from the outlet hole to the outlet flow path through the flow rate adjustment flow path.

[0014] According to the flow control device having the above configuration, in a configuration in which the fluid flows linearly from the inlet flow path to the outlet flow path along the second axis, it can be manufactured at a relatively low manufacturing cost, and it is possible to maintain the fluid at a constant flow rate of any desired value within a relatively small flow rate range.

[0015] In the flow rate control device having the above configuration, it is preferable that the cross-sectional area of ​​the connecting flow path gradually decreases according to the distance along the circumferential direction from the one end of the inlet groove.

[0016] According to the flow control device of the above aspect, the cross-sectional area of ​​the connecting flow path gradually decreases according to the circumferential distance from one end of the inlet groove. Therefore, by rotating the valve body about the first axis to adjust the position of the inlet groove opposite the inlet flow path, the flow rate of the fluid flowing into the valve body from the inlet hole via the connecting flow path can be adjusted to a desired value.

[0017] In a flow control device having the above configuration, it is preferable that the valve body portion has a pair of outlet grooves formed on the outer peripheral surface from the outlet hole to one side and the other side along the circumferential direction, and a pair of inlet grooves formed on the outer peripheral surface from the inlet hole to one side and the other side along the circumferential direction, respectively.

[0018] According to the flow rate control device of the above aspect, the flow rate of the fluid flowing out of the outflow channel can be controlled by rotating the valve body portion in either one direction or the other in the circumferential direction about the first axis.

[0019] In a flow control device according to one embodiment of the present invention, the second member may have an inlet flow path formed to extend along the first axis and directing fluid from an inlet pipe connected to the second member toward the valve body portion, and the valve body portion may have the inlet hole through which fluid flows along the first axis.

[0020] According to the flow control device having the above configuration, the fluid flowing from the inlet flow path to the valve body portion along the first axis is circulated along the second axis toward the outlet flow path, and the device can be manufactured at a relatively low manufacturing cost, and can maintain the fluid at a constant flow rate within a relatively small range. [Effects of the Invention]

[0021] According to the present invention, it is possible to provide a flow rate adjusting device that can be manufactured at a relatively low manufacturing cost and that can maintain a fluid at an arbitrary flow rate within a relatively small flow rate range. [Brief explanation of the drawings]

[0022] [Figure 1] 1 is a cross-sectional view showing a flow control device according to a first embodiment of the present invention, in a fully open state. [Figure 2] FIG. 2 is a plan view of the flow control device shown in FIG. 1 as viewed from above. [Figure 3] 2 is a cross-sectional view of the flow rate control device shown in FIG. 1 taken along the line AA. [Figure 4]4 is a view of the first member shown in FIG. 3 as viewed from direction B. FIG. [Figure 5] 1 is a cross-sectional view showing a flow rate control device according to a first embodiment of the present invention, illustrating a fully closed state. [Figure 6] 6 is a cross-sectional view of the flow rate control device shown in FIG. 5 taken along the arrow CC. [Figure 7] 7 is a view of the first member shown in FIG. 6 as viewed from direction D. FIG. [Figure 8] 1 is a cross-sectional view showing a flow rate control device according to a first embodiment of the present invention, illustrating a flow rate control state. [Figure 9] FIG. 6 is a cross-sectional view showing a flow control device according to a second embodiment of the present invention, in a fully open state. [Figure 10] FIG. 6 is a cross-sectional view showing a flow rate control device according to a second embodiment of the present invention, showing a fully closed state. [Figure 11] FIG. 6 is a cross-sectional view showing a flow rate control device according to a second embodiment of the present invention, illustrating a flow rate control state. [Figure 12] 11 is a view of the first member shown in FIG. 10 as viewed from the E direction. [Figure 13] FIG. 10 is a cross-sectional view showing a flow control device according to a third embodiment of the present invention, in a fully open state. [Figure 14] FIG. 14 is a plan view of the flow rate control device shown in FIG. 13 as viewed from above. [Figure 15] 14 is a cross-sectional view of the flow control device shown in FIG. 13 taken along the arrow FF. [Figure 16] FIG. 10 is a cross-sectional view showing a flow rate control device according to a third embodiment of the present invention, in a fully closed state. [Figure 17] FIG. 10 is a cross-sectional view showing a flow rate control device according to a third embodiment of the present invention, illustrating a flow rate control state. [Figure 18] FIG. 10 is a cross-sectional view showing a flow rate control device according to a fourth embodiment of the present invention, illustrating a flow rate control state. [Figure 19] FIG. 10 is a diagram showing a state in which a flow rate control device according to another embodiment of the present invention is attached as a cock of a burette. DETAILED DESCRIPTION OF THE INVENTION

[0023] [First embodiment] A flow control device 100 according to a first embodiment of the present invention will be described below with reference to the drawings. The flow control device 100 of this embodiment is a fluid device installed in a pipe through which a fluid (liquid such as a chemical solution or pure water) used in, for example, a semiconductor manufacturing device flows. When a fluid flowing in from an inlet pipe 1 flows out from an outlet pipe 2, the flow control device 100 of this embodiment adjusts the fluid introduced into the outlet pipe 2 to a desired flow rate (for example, a flow rate of 30 mL / min or less).

[0024] Fig. 1 is a cross-sectional view showing a flow control device 100 according to a first embodiment of the present invention, showing a fully open state. Fig. 2 is a plan view of the flow control device 100 shown in Fig. 1 as seen from above. Fig. 3 is a cross-sectional view of the flow control device 100 shown in Fig. 1, taken along the line AA. Arrows shown in Figs. 1 and 3 indicate the direction of fluid flow. The same applies to the other figures.

[0025] As shown in FIG. 1, the flow control device 100 includes a first member 10, a second member 20, an inlet side nut 30, a front ferrule 31, a back ferrule 32, an outlet side nut 40, a front ferrule 41, and a back ferrule 42.

[0026] The first member 10 has a valve body portion 11, a main body portion 12, and a pair of knob portions 13 connected to the main body portion 12, and is a member formed integrally from a fluororesin material (e.g., PTFE, PFA). The valve body portion 11 is formed in a cylindrical shape extending along a first axis AX1. The valve body portion 11 is disposed so that a portion having an outer diameter D1 contacts the accommodation hole 21 of the second member 20, and a portion having an outer diameter D2 larger than the outer diameter D1 is connected to the portion having the outer diameter D1. The first member 10 is accommodated in the second member 20 so as to be rotatable about the first axis AX1 with the outer peripheral surface 11a of the valve body portion 11 in contact with the inner peripheral surface 21a of the accommodation hole 21.

[0027] The valve body portion 11 has an inlet hole 11b, an outlet hole 11c, an internal flow path 11d, and an outlet groove 11e. The inlet hole 11b is a hole through which fluid flows in along a third axis AX3 that is perpendicular to the first axis AX1. The outlet hole 11c is a hole through which the fluid that flows in from the inlet hole 11b flows out along the third axis AX3. The internal flow path 11d is a flow path that guides the fluid that flows in from the inlet hole 11b to the outlet hole 11c.

[0028] The outflow groove 11e is a groove portion formed in the outer peripheral surface 11a along the circumferential direction about the first axis AX1 from one end 11e1 connected to the outflow hole 11c to the other end 11e2. The outflow groove 11e extends along the circumferential direction from one end 11e1 to the other end 11e2 between the inner peripheral surface 21a of the accommodation hole 21 and forms a flow rate adjustment flow path that connects the outflow hole 11c and the outflow flow path 23. The outflow groove 11e is formed so that the cross-sectional area of ​​the flow rate adjustment flow path gradually decreases according to the distance along the circumferential direction from the one end 11e1 of the outflow groove 11e.

[0029] Fig. 4 is a view of the first member 10 shown in Fig. 3 as viewed from direction B. As shown in Fig. 4, an outflow groove 11e is formed in the outer peripheral surface 11a of the valve body portion 11 of the first member 10 along the circumferential direction about the first axis AX1 from one end 11e1 connected to the outflow hole 11c to the other end 11e2. The outflow groove 11e is formed such that the width W in the direction along the first axis AX1 gradually narrows from the one end 11e1 toward the other end 11e2.

[0030] The outflow groove 11e is formed so that its depth in the radial direction perpendicular to the first axis AX1 gradually decreases from one end 11e1 to the other end 11e2. The shape of the outflow groove 11e taken along a plane that passes through the first axis AX1 and is parallel to the first axis AX1 is V-shaped.

[0031] The second member 20 has an accommodation hole 21 that accommodates the valve body portion 11, an inlet flow path 22, an outlet flow path 23, an insertion hole 24 into which the inlet pipe 1 is inserted, an insertion hole 25 into which the outlet pipe 2 is inserted, a male thread 26 into which the female thread 30a of the inlet-side nut 30 is fastened, and a male thread 27 into which the female thread 40a of the outlet-side nut 40 is fastened. The second member 20 is a member in which each part is integrally formed from a fluororesin material (e.g., PCTFE, PTFE, PFA) or polycarbonate. The accommodation hole 21 is formed to extend along the first axis AX1 and has a circular cross section perpendicular to the first axis AX1.

[0032] The inflow passage 22 is a passage formed to extend along a second axis AX2 perpendicular to the first axis AX1. The inflow passage 22 guides the fluid from the inflow pipe 1 connected to the second member 20 toward the inner circumferential surface 21a of the accommodation hole 21. The outflow passage 23 is a passage formed to extend along a second axis AX2 that is perpendicular to the first axis AX1. The outflow passage 23 guides the fluid from the inner circumferential surface 21 a of the accommodation hole 21 of the second member 20 toward the outflow pipe 2 connected to the second member 20.

[0033] As shown in Figure 1, when the flow control device 100 is arranged so that the third axis AX3 along which the fluid is guided to the outlet hole 11c of the valve body portion 11 coincides with the second axis AX2 along which the inlet flow path 22 and the outlet flow path 23 of the second member 20 extend, the flow control device 100 is in a fully open state in which the fluid flows from the inlet flow path 22 to the inlet hole 11b of the valve body portion 11 and flows out from the outlet hole 11c to the outlet flow path 23.

[0034] 2, when the flow control device 100 is in a fully open state, the operator adjusts the rotational position of the first member 10 about the first axis AX1 so that the pair of knob portions 13 are disposed along the second axis AX2. On the other hand, when the flow control device 100 is in a fully closed state, the operator adjusts the rotational position of the first member 10 about the first axis AX1 so that the pair of knob portions 13 are disposed along a fourth axis AX4 that is perpendicular to the first axis AX1 and the second axis AX2.

[0035] As shown in Fig. 2, when switching the flow control device 100 from a fully open state to a fully closed state, the operator rotates the knob portion 13 by an angle θ1 (for example, 90°) around the first axis AX1. Fig. 5 is a cross-sectional view showing the flow control device 100 according to the first embodiment of the present invention, showing the fully closed state. Fig. 6 is a cross-sectional view of the flow control device 100 shown in Fig. 5, taken along the arrow CC.

[0036] As shown in Figures 5 and 6, when the third axis AX3 along which the fluid is guided to the outflow hole 11c of the valve body portion 11 does not coincide with the second axis AX2 along which the outflow flow path 23 of the second member 20 extends, and the outer surface 11a of the valve body portion 11 and the outflow flow path 23 of the second member 20 are arranged opposite each other, a fully closed state is reached in which no fluid flows out from the outflow hole 11c to the outflow flow path 23.

[0037] As shown in Fig. 6, an inlet groove 11f is formed in the outer peripheral surface 11a of the valve body portion 11 of the first member 10, extending in the circumferential direction about the first axis AX1 from one end 11f1 connected to the inlet hole 11b to the other end 11f2. The inlet groove 11f is formed so that its width W in the direction along the first axis AX1 is constant from the one end 11f1 to the other end 11f2. The inlet groove 11f is also formed so that its depth in the radial direction perpendicular to the first axis AX1 is constant from the one end 11f1 to the other end 11f2. The shape of the inlet groove 11f when cut by a plane that passes through the first axis AX1 and is parallel to the first axis AX1 is V-shaped.

[0038] Fig. 7 is a view of the first member 10 shown in Fig. 6 as viewed from direction D. As shown in Fig. 7, an outflow groove 11e is formed in the outer peripheral surface 11a of the valve body portion 11 of the first member 10 along the circumferential direction about the first axis AX1 from one end 11e1 connected to the outflow hole 11c to the other end 11e2.

[0039] When the operator sets the flow control device 100 to a flow rate adjustment state between the fully open state and the fully closed state, the operator moves the knob portion 13 to a desired rotational position between the fully open state position shown by the solid line in Fig. 2 and the fully closed state position shown by the dotted line in Fig. 2. Fig. 8 is a cross-sectional view showing the flow control device 100 according to the first embodiment of the present invention, illustrating the flow rate adjustment state. Fig. 8 shows an example in which the operator adjusts the rotational position of the knob portion 13 so that the angle θ1 shown in Fig. 2 is 45°.

[0040] 8, the inlet groove 11f extends circumferentially from one end 11f1 to the other end 11f2 between the inner circumferential surface 21a of the accommodation hole 21 and forms a connecting flow path that connects the inlet flow path 22 and the inlet hole 11b. When the flow control device 100 is in a flow control state, the fluid flows from the inlet flow path 22 through the connecting flow path into the inlet hole 11b of the valve body portion 11, and is guided from the outlet hole 11c to the outlet flow path 23 through the flow control flow path.

[0041] The flow rate of the fluid guided from the outlet hole 11c to the outflow passage 23 varies depending on the angle θ1 of the rotational position about the first axis AX1 relative to the rotational position of the knob portion 13 in the fully open state. The larger the angle θ1, the smaller the flow rate of the fluid guided from the outlet hole 11c to the outflow passage 23, and the smaller the angle θ1, the greater the flow rate of the fluid guided from the outlet hole 11c to the outflow passage 23.

[0042] The flow control device 100 of the present embodiment described above provides the following functions and effects. According to the flow control device 100 of this embodiment, the fluid that has flowed into the valve body portion 11 from the inlet hole 11b is guided to the outlet hole 11c along the third axis AX3 that is perpendicular to the first axis AX1 along which the valve body portion 11 extends. When the second member 20 is disposed so that the third axis AX3 along which the fluid is guided to the outlet hole 11c coincides with the second axis AX2 along which the outlet flow path 23 of the second member 20 extends, a circulating state is achieved in which the fluid flows out from the outlet hole 11c to the outlet flow path 23.

[0043] On the other hand, when the third axis AX3 along which the fluid is guided to the outflow hole 11c does not coincide with the second axis AX2 along which the outflow flow path 23 of the second member 20 extends, and the outer surface 11a of the valve body portion 11 and the outflow flow path 23 of the second member 20 are arranged opposite each other, a fully closed state is reached in which no fluid flows out from the outflow hole 11c to the outflow flow path 23.

[0044] Furthermore, when the third axis AX3 along which the fluid is guided to the outflow hole 11c does not coincide with the second axis AX2 along which the outflow flow path 23 of the second member 20 extends, and the outflow groove 11e formed in the valve body portion 11 and the outflow flow path 23 of the second member 20 are arranged opposite each other, a flow rate adjustment state is achieved in which the fluid flows out from the outflow hole 11c to the outflow flow path 23 via the flow rate adjustment flow path.

[0045] The flow rate adjustment passage is a passage that extends circumferentially from one end 11e1 to the other end 11e2 between the outflow groove 11e and the inner circumferential surface 21a of the accommodation hole 21, and connects the outflow hole 11c and the outflow passage 23. The cross-sectional area of ​​the flow rate adjustment passage gradually decreases according to the distance in the circumferential direction from the one end 11e1 of the outflow groove 11e. Therefore, by rotating the valve body portion 11 about the first axis AX1 to adjust the position of the outflow groove 11e that is arranged opposite the outflow passage 23, it is possible to adjust the flow rate of the fluid flowing from the outflow hole 11c to the outflow passage 23 via the flow rate adjustment passage to a desired value.

[0046] The flow control device 100 of this embodiment can adjust the flow rate of the fluid to a desired flow rate without using a motor or a transmission mechanism that transmits the driving force of the motor to the valve body portion, and therefore can be manufactured at a relatively low cost. Also, by rotating the valve body portion 11 about the first axis AX1 and adjusting the position of the outflow groove 11e that is arranged opposite the outflow flow path 23, the flow rate can be maintained at a desired value within a relatively small flow rate range.

[0047] According to the flow control device 100 of this embodiment, the fluid flowing in from the inlet pipe 1 is guided to the valve body portion 11 via the inlet flow path 22 of the second member 20 extending along the second axis AX2. When the second member 20 is arranged so that the third axis AX3 along which the fluid is guided to the outlet hole 11c coincides with the second axis AX2 along which the inlet flow path 22 of the second member 20 extends, a circulating state is achieved in which the fluid flows from the inlet flow path 22 into the inlet hole 11b of the valve body portion 11.

[0048] On the other hand, when the third axis AX3 along which the fluid is guided to the outlet hole 11c does not coincide with the second axis AX2 along which the inlet flow path 22 of the second member 20 extends, and the outer surface 11a of the valve body portion 11 and the outlet flow path 23 of the second member 20 are arranged opposite each other, a fully closed state is achieved in which fluid flows into the inlet hole 11b but does not flow out from the outlet hole 11c to the outlet flow path 23.

[0049] Furthermore, when the third axis AX3 along which the fluid is guided to the outlet hole 11c does not coincide with the second axis AX2 along which the inlet flow path 22 of the second member 20 extends, and the outlet groove 11e formed in the valve body portion 11 and the outlet flow path 23 of the second member 20 are arranged opposite each other, a flow rate adjustment state is achieved in which the fluid flowing from the inlet flow path 22 into the inlet hole 11b via the connecting flow path flows out from the outlet hole 11c to the outlet flow path 23 via the flow rate adjustment flow path.

[0050] According to the flow control device 100 of this embodiment, in a configuration in which the fluid flows linearly from the inlet flow path 22 to the outlet flow path 23 along the second axis AX2, it can be manufactured at a relatively low manufacturing cost and can maintain the fluid at a constant flow rate of any desired value within a relatively small flow rate range.

[0051] Second Embodiment Next, a flow control device 100A according to a second embodiment of the present invention will be described with reference to the drawings. The second embodiment is a modified example of the first embodiment, and is the same as the first embodiment except where specifically described below, and therefore will not be described below.

[0052] In the flow control device 100 according to the first embodiment, the inlet groove 11f is formed so that its width W in the direction along the first axis AX1 and its depth in the radial direction are constant from one end 11f1 to the other end 11f2. The inlet groove 11f is formed in the outer peripheral surface 11a of the valve body portion 11 from the inlet hole 11b toward one side in the circumferential direction, and the outlet groove 11e is formed in the outer peripheral surface 11a of the valve body portion 11 from the outlet hole 11c toward one side in the circumferential direction.

[0053] In contrast, in the flow control device 100A according to this embodiment, the inlet groove 11f has a width W along the first axis AX1 that gradually narrows from one end connected to the inlet hole 11b to the other end, and a radial depth that gradually shallows. The inlet groove 11f is formed in a curved shape on the outer peripheral surface 11a of the valve body portion 11 from the inlet hole 11b toward one side and the other side in the circumferential direction, and the outlet groove 11e is formed in a curved shape on the outer peripheral surface 11a of the valve body portion 11 from the outlet hole 11c toward one side and the other side in the circumferential direction.

[0054] Fig. 9 is a cross-sectional view showing a flow control device 100A according to a second embodiment of the present invention, illustrating a fully open state. Fig. 10 is a cross-sectional view showing a flow control device 100A according to a second embodiment of the present invention, illustrating a fully closed state. Fig. 11 is a cross-sectional view showing a flow control device 100A according to a second embodiment of the present invention, illustrating a flow control state.

[0055] As shown in Figure 9, when the flow control device 100A is positioned so that the third axis AX3 along which the fluid is guided to the outlet hole 11c of the valve body portion 11 coincides with the second axis AX2 along which the inlet flow path 22 and the outlet flow path 23 of the second member 20 extend, the flow control device 100A is in a fully open state in which the fluid flows from the inlet flow path 22 to the inlet hole 11b of the valve body portion 11 and flows out from the outlet hole 11c to the outlet flow path 23.

[0056] As shown in Figure 10, when the third axis AX3 along which the fluid is guided to the outflow hole 11c of the valve body portion 11 does not coincide with the second axis AX2 along which the outflow flow path 23 of the second member 20 extends, and the outer surface 11a of the valve body portion 11 and the outflow flow path 23 of the second member 20 are arranged opposite each other, a fully closed state is reached in which no fluid flows out from the outflow hole 11c to the outflow flow path 23.

[0057] As shown in Figure 11, when the third axis AX3 along which the fluid is guided to the outflow hole 11c does not coincide with the second axis AX2 along which the outflow flow path 23 of the second member 20 extends, and the outflow groove 11e formed in the valve body portion 11 and the outflow flow path 23 of the second member 20 are arranged opposite each other, a flow rate adjustment state is achieved in which the fluid flows out from the outflow hole 11c to the outflow flow path 23 via the flow rate adjustment flow path.

[0058] FIG. 12 is a view of the first member 10 shown in FIG. 10 as viewed from direction E. As shown in FIGS. 9 to 12, the valve body portion 11 has a pair of outlet grooves 11e formed in the outer peripheral surface 11a from the outlet hole 11c toward one side and the other side in the circumferential direction. The valve body portion 11 also has a pair of inlet grooves 11f formed in the outer peripheral surface 11a from the inlet hole 11b toward one side and the other side in the circumferential direction. As shown in FIGS. 9 to 12, in the flow control device 100A according to this embodiment, the width W of the inlet grooves 11f in the direction along the first axis AX1 gradually narrows from one end connected to the inlet hole 11b toward the other end, and the radial depth gradually decreases.

[0059] In the flow control device 100A according to this embodiment, the inflow groove 11f has a width W along the first axis AX1 that gradually narrows from one end connected to the inflow hole 11b to the other end, and a radial depth that gradually shallows. As a result, the cross-sectional area of ​​the connecting flow passage formed by the inflow groove 11f and the inner circumferential surface 21a gradually decreases according to the distance along the circumferential direction from one end of the inflow groove 11f.

[0060] Furthermore, the width W of the outflow groove 11e along the first axis AX1 gradually narrows from one end connected to the outflow hole 11c to the other end, and the radial depth gradually decreases, so that the cross-sectional area of ​​the flow rate adjustment flow path formed by the outflow groove 11e and the inner circumferential surface 21a gradually decreases according to the distance from one end of the outflow groove 11e along the circumferential direction.

[0061] According to the flow control device 100A of this embodiment, the cross-sectional area of ​​the connecting flow path gradually decreases according to the distance in the circumferential direction from one end of the inlet groove 11 f. Therefore, by rotating the valve body portion 11 about the first axis AX1 to adjust the position of the inlet groove 11 f arranged opposite the inlet flow path 22, it is possible to adjust the flow rate of the fluid flowing from the inlet hole 11 b into the valve body portion 11 via the connecting flow path to a desired value.

[0062] Third Embodiment Next, a flow control device 100B according to a third embodiment of the present invention will be described with reference to the drawings. The third embodiment is a modification of the first embodiment, and is the same as the first embodiment except where specifically described below, and therefore will not be described below.

[0063] The flow control device 100 according to the first embodiment allows the fluid to flow linearly along the second axis AX2 from the inflow passage 22 toward the outflow passage 23. In contrast, the flow control device 100B according to the present embodiment changes the flow direction of the fluid flowing into the valve body portion 11 along the first axis AX1 by 90°, and allows the fluid to flow toward the outflow passage 23 along the second axis AX2.

[0064] FIG. 13 is a cross-sectional view showing a flow control device 100B according to a third embodiment of the present invention, illustrating a fully open state. FIG. 14 is a plan view of the flow control device 100B shown in FIG. 13, viewed from above. FIG. 15 is a cross-sectional view of the flow control device 100B shown in FIG. 13, taken along the arrow FF. FIG. 16 is a cross-sectional view showing a flow control device 100B according to a third embodiment of the present invention, illustrating a fully closed state. FIG. 17 is a cross-sectional view showing a flow control device 100B according to the third embodiment of the present invention, illustrating a flow control state.

[0065] 13 and 15, the second member 20 of the flow control device 100B has an inflow passage 22 that is formed to extend along the first axis AX1 and that guides fluid from the inflow pipe 1 connected to the second member 20 toward the inflow hole 11b of the valve body portion 11. The valve body portion 11 has the inflow hole 11b through which the fluid flows along the first axis AX1.

[0066] As shown in Figures 13 and 15, when the flow control device 100B is positioned so that the third axis AX3 along which the fluid is guided to the outlet hole 11c of the valve body portion 11 coincides with the second axis AX2 along which the outlet flow path 23 of the second member 20 extends, the flow control device 100B is in a fully open state in which the fluid flows from the inlet flow path 22 into the inlet hole 11b of the valve body portion 11 and flows out from the outlet hole 11c to the outlet flow path 23.

[0067] 14, when the flow control device 100B is in the fully open state, the operator adjusts the rotational position of the first member 10 about the first axis AX1 so that the pair of knob portions 13 are disposed along the second axis AX2. On the other hand, when the flow control device 100B is in the fully closed state, the operator adjusts the rotational position of the first member 10 about the first axis AX1 so that the pair of knob portions 13 are disposed along the fifth axis AX5 that is perpendicular to the first axis AX1.

[0068] As shown in Fig. 14, when switching the flow control device 100B from a fully open state to a fully closed state, the operator rotates the knob portion 13 around the first axis AX1 by an angle θ2 (for example, 225°). Fig. 16 is a cross-sectional view showing the flow control device 100B according to the third embodiment of the present invention, showing the fully closed state.

[0069] As shown in Figure 16, when the third axis AX3 along which the fluid is guided to the outflow hole 11c of the valve body portion 11 does not coincide with the second axis AX2 along which the outflow flow path 23 of the second member 20 extends, and the outer surface 11a of the valve body portion 11 and the outflow flow path 23 of the second member 20 are arranged opposite each other, a fully closed state is reached in which no fluid flows out from the outflow hole 11c to the outflow flow path 23.

[0070] As shown in FIG. 16, an outflow groove 11e is formed on the outer peripheral surface 11a of the valve body portion 11 of the first member 10 along the circumferential direction around the first axis AX1 from one end 11e1 connected to the outflow hole 11c to the other end 11e2.

[0071] When the operator sets the flow control device 100B to a flow rate adjustment state between the fully open state and the fully closed state, the operator moves the knob 13 to a desired rotational position between the fully open state position shown by the solid line in Fig. 14 and the fully closed state position shown by the dotted line in Fig. 14. Fig. 17 is a cross-sectional view showing the flow control device 100B according to the third embodiment of the present invention, illustrating the flow rate adjustment state. Fig. 17 shows an example in which the operator adjusts the rotational position of the knob 13 so that the angle θ2 shown in Fig. 14 is 45°.

[0072] 17, the outflow groove 11e extends circumferentially from one end 11e1 to the other end 11e2 between the inner circumferential surface 21a of the accommodation hole 21 and defines a flow rate adjustment flow path that connects the outflow hole 11c and the outflow flow path 23. When the flow rate adjustment device 100B is in the flow rate adjustment state, the fluid flows from the inflow flow path 22 into the inflow hole 11b of the valve body portion 11, and is guided from the outflow hole 11c to the outflow flow path 23 via the flow rate adjustment flow path.

[0073] The flow rate of the fluid guided from the outlet hole 11c to the outflow passage 23 varies depending on the angle θ2 of the rotational position about the first axis AX1 relative to the rotational position of the knob portion 13 in the fully open state. The larger the angle θ2, the smaller the flow rate of the fluid guided from the outlet hole 11c to the outflow passage 23, and the smaller the angle θ2, the greater the flow rate of the fluid guided from the outlet hole 11c to the outflow passage 23.

[0074] According to the flow control device 100B of this embodiment, in a configuration in which the fluid flowing from the inlet flow path 22 into the valve body portion 11 along the first axis AX1 is circulated along the second axis AX2 toward the outlet flow path 23, the device can be manufactured at a relatively low manufacturing cost, and the fluid can be kept constant at any flow rate within a relatively small range.

[0075] [Fourth embodiment] Next, a flow control device 100C according to a fourth embodiment of the present invention will be described with reference to the drawings. The fourth embodiment is a modification of the second embodiment, and is similar to the second embodiment unless otherwise specified below, and therefore further description will be omitted. Figure 18 is a cross-sectional view showing the flow control device 100C according to the fourth embodiment of the present invention, illustrating the flow control state.

[0076] In the second embodiment, the inlet groove 11f is formed in a curved shape on the outer peripheral surface 11a of the valve body portion 11, and the outlet groove 11e is formed in a curved shape on the outer peripheral surface 11a of the valve body portion 11. On the other hand, in the present embodiment, the inlet groove 11fC is formed in a straight shape on the outer peripheral surface 11a of the valve body portion 11 in a direction perpendicular to the internal flow path 11d, and the inlet groove 11eC is formed in a straight shape on the outer peripheral surface 11a of the valve body portion 11 in a direction perpendicular to the internal flow path 11d.

[0077] According to the flow control device 100C of the present embodiment, the inlet grooves 11fC and 11eC are formed linearly in a direction perpendicular to the internal flow path 11d. Therefore, the processing for forming the inlet grooves 11fC and 11eC in the valve body portion 11 can be easily performed by linearly moving a processing jig.

[0078] Other Embodiments In the above description, the flow control device causes a fluid flowing in from the inlet pipe 1 to flow out from the outlet pipe 2, but other embodiments are also possible. For example, it may be used as a cock of a burette fixed to a burette stand. Fig. 19 is a diagram showing a state in which a flow control device 100D according to another embodiment of the present invention is attached as a cock 310 of a burette 300.

[0079] Burette 300 is fixed to burette stand 400 and is a device that drips solution S little by little into beaker 500. Burette 300 is marked with a scale for measuring the amount of solution S dripped. In flow control device 100D shown in FIG. 18, the flow rate of solution S flowing into inlet channel 22 is adjusted by valve body 11, and solution S drips downward from outlet channel 23. An operator can adjust the amount of solution S dripped to a desired flow rate (for example, a flow rate of 30 mL / min or less) by operating a pair of knobs 13 of flow control device 100D that are used as a cock 310. [Explanation of symbols]

[0080] 1 Inlet piping 2 Outlet piping 10 First member 11 Valve body 11a Outer surface 11b Inflow hole 11c Outflow hole 11d Internal flow path 11e Outflow groove 11e1 one end 11e2 other end 11f Inflow groove 11f1 One end 11f2 other end 12 Main body 13 Knob 20 Second member 21 Storage Cave 21a Inner surface 22 Inlet channel 23 Outlet channel 24,25 Insertion holes 26,27 Male thread 30 Inlet nut 30a female thread 31,41 Front ferrule 32,42 Back ferrule 40 Outlet nut 40a female thread 100,100A,100B flow rate adjustment device D1,D2 Outer diameter θ1,θ2 angle

Claims

1. a first member having a valve body portion formed in a cylindrical shape so as to extend along a first axis; a second member formed to extend along the first axis and having an accommodating hole with a circular cross section perpendicular to the first axis, the first member is accommodated in the second member so as to be rotatable about the first axis with an outer peripheral surface of the valve body portion and an inner peripheral surface of the accommodation hole in contact with each other, the second member has an outflow flow path that is formed to extend along a second axis perpendicular to the first axis and that guides fluid from the inner circumferential surface of the accommodating hole toward an outflow pipe connected to the second member, The valve body portion is an inlet hole through which a fluid flows; an outlet hole for allowing the fluid that has flowed in from the inlet hole to flow out along a third axis perpendicular to the first axis; an outflow groove formed on the outer peripheral surface along a circumferential direction around the first axis from one end connected to the outflow hole, the outflow groove extends along the circumferential direction from one end to the other end between the inner circumferential surface of the accommodation hole and defines a flow rate adjustment flow path connecting the outflow hole and the outflow flow path, A flow rate adjusting device in which the cross-sectional area of ​​the flow rate adjusting passage gradually decreases according to the distance along the circumferential direction from the one end of the outflow groove.

2. the second member has an inlet flow path that is formed to extend along the second axis and that guides a fluid from an inlet pipe connected to the second member toward the inner circumferential surface of the accommodating hole, The valve body portion is the inlet hole through which the fluid flows along the third axis; an inlet groove formed on the outer circumferential surface along the circumferential direction from one end connected to the inlet hole, The flow control device according to claim 1, wherein the inlet groove extends along the circumferential direction from one end to the other end between the inner circumferential surface of the accommodating hole and forms a connecting flow path connecting the inlet flow path and the inlet hole.

3. The flow control device according to claim 2 , wherein a cross-sectional area of ​​the connecting flow passage gradually decreases according to a distance from the one end of the inlet groove along the circumferential direction.

4. The valve body portion is a pair of outflow grooves formed on the outer peripheral surface from the outflow hole toward one side and the other side along the circumferential direction; The flow control device according to claim 2 or 3, further comprising a pair of the inlet grooves formed on the outer circumferential surface from the inlet hole to one side and the other side along the circumferential direction, respectively.

5. the second member has an inlet flow path that is formed to extend along the first axis and that guides fluid from an inlet pipe connected to the second member toward the valve body portion, The flow rate control device according to claim 1 , wherein the valve body portion has the inlet hole through which the fluid flows along the first axis.

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