Semiconductor devices having gate resistors with low variation in resistance values

Abstract

To provide a semiconductor device with a gate resistor.SOLUTION: A semiconductor device includes: a semiconductor layer structure comprising an active area with a plurality of unit cell transistors and an inactive gate pad area; a gate resistor layer on an upper side of the semiconductor layer structure; an inner contact that is directly on the upper side of the gate resistor layer; and an outer contact that is directly on the upper side of the gate resistor layer. In a horizontal cross section of the semiconductor device, the outer contact encloses the inner contact within the inactive gate pad area of the semiconductor device.SELECTED DRAWING: Figure 2B

Description

[Technical Field]

[0001] The present invention relates to semiconductor devices, and more particularly to semiconductor devices having gate resistors. [Background technology]

[0002] A wide variety of power semiconductor devices are known in the art, including, for example, power metal oxide semiconductor field effect transistors ("MOSFETs"), insulated gate bipolar transistors ("IGBTs"), and various other devices. These power semiconductor devices are generally fabricated from wide bandgap semiconductor materials, such as silicon carbide or gallium nitride-based materials (as used herein, the term "wide bandgap semiconductor" encompasses any semiconductor with a bandgap of at least 1.4 eV). Power semiconductor devices are designed to selectively block or pass large voltages and / or currents. For example, in the blocking state, a power semiconductor device may be designed to maintain a potential of hundreds or thousands of volts.

[0003] A power semiconductor device such as a power MOSFET can have a lateral structure or a vertical structure. A power MOSFET with a lateral structure has both its source region and drain region on the same major surface (i.e., the top or bottom) of the device's semiconductor layer structure. In contrast, a power MOSFET with a vertical structure has its source region on one major surface and its drain region on the other (opposite) major surface of the semiconductor layer structure. Because a vertical structure allows for a thick semiconductor drift layer that can support high current densities and block high voltages, vertical device structures are typically used for very high-power applications. As used herein, the term "semiconductor layer structure" refers to a structure including one or more semiconductor layers, such as a semiconductor substrate and / or a semiconductor epitaxial layer.

[0004] A conventional vertical silicon carbide power MOSFET includes a silicon carbide drift region formed on a silicon carbide substrate, such as a silicon carbide wafer. The MOSFET has an active region, where one or more semiconductor devices are formed, and one or more inactive regions, such as termination regions and / or gate bond pad regions, that may surround the active region. The active region functions as the main junction for blocking voltage during reverse-bias operation and providing current flow during forward-bias operation. Power MOSFETs typically have a unit cell structure. That is, the active region contains many individual "unit cell" MOSFETs that are electrically connected in parallel to function as a single power MOSFET. In high-power applications, such devices may include thousands or tens of thousands of unit cells.

[0005] Many power semiconductor devices, such as power MOSFETs and IGBTs, have gate structures. These devices can be turned on and off by applying different bias voltages to their gate structures. The gate structures have a distributed gate resistance, which is a function of the length of the electrical path from the gate bond pad (or other gate terminal) of each individual unit cell to the gate fingers and the sheet resistance of the material forming the gate structure. The gate structure may include, for example, a gate bond pad, multiple gate fingers in the active region of the device, a gate pad, one or more gate buses extending between the gate pad and the gate fingers, and optional gate runners that may be positioned between the gate bus(es) and the gate fingers. In many applications, it may be desirable to increase the amount of gate resistance, for example, by adding a discrete or "lumped" gate resistor somewhere within the gate structure. The increased gate resistance may be used, for example, to limit the switching speed of the device or to reduce electrical ringing and / or noise. Summary of the Invention [Means for solving the problem]

[0006] According to an embodiment of the present invention, a semiconductor device is provided that includes a semiconductor layer structure having an active area with a plurality of unit cell transistors and an inactive gate pad area, a gate resistor layer overlying the semiconductor layer structure, an inner contact overlying the direct gate resistor layer, and an outer contact overlying the direct gate resistor layer, wherein in a horizontal cross section of the device, the outer contact surrounds the inner contact within the inactive gate pad area of ​​the semiconductor device.

[0007] In some embodiments, these semiconductor devices may further include an inner dielectric pattern directly overlying the gate resistor layer, between the inner contact and the outer contact.

[0008] In some embodiments, a lumped gate resistor may be defined in a gate resistor layer directly below the inner dielectric pattern.

[0009] In some embodiments, a horizontal cross section of the lumped gate resistor may define at least a portion of an elliptical ring. In some embodiments, a horizontal cross section of the inner dielectric pattern may have the shape of an elliptical ring.

[0010] In some embodiments, the gate resistor layer may include a first material having a first sheet resistance, and the inner contact and the outer contact may each include a material having a sheet resistance less than the first sheet resistance.

[0011] In some embodiments, the gate structure may further include a gate pad, one or more gate buses, and a plurality of gate fingers, and a lumped gate resistor may be electrically interposed between the gate pad and the gate fingers.

[0012] In some embodiments, the spacing between the outer sidewall of the inner contact and the inner sidewall of the outer contact may be a fixed distance, while in other embodiments, this distance may be a variable distance.

[0013] In some embodiments, the shape of the inner dielectric pattern may define the shape of a lumped gate resistor.

[0014] In some embodiments, the inner contact may be configured to send a gate signal to a first edge of the lumped gate resistor, and the outer contact may be configured to receive a gate signal from a second edge of the lumped gate resistor opposite the first edge.

[0015] In some embodiments, the outer contact may surround the inner contact, or the outer contact and at least one edge of the semiconductor device may surround the inner contact.

[0016] According to a further embodiment of the present invention, there is provided a semiconductor device comprising a semiconductor layer structure and a gate structure comprising a lumped gate resistor overlying the semiconductor layer structure, wherein a horizontal cross section of the lumped gate resistor defines a closed shape.

[0017] In some embodiments, the closed shape may be an elliptical ring.

[0018] In some embodiments, the closed shape may be a first closed shape, and a dielectric pattern having a horizontal cross section defining a second closed shape may be positioned directly over the lumped gate resistor, hi some embodiments, the second closed shape may be an elliptical ring.

[0019] In some embodiments, the dielectric pattern may be a first dielectric pattern, and the gate structure may further comprise a second dielectric pattern and an inner contact, the inner contact separating the first dielectric pattern from the second dielectric pattern.

[0020] In some embodiments, the gate structure further comprises an outer contact, the outer contact surrounding the inner contact when the inner contact and the outer contact are viewed from above.

[0021] In some embodiments, the lumped gate resistor may include a first material having a first sheet resistance, and the inner contact and the outer contact may each include a material having a sheet resistance less than the first sheet resistance.

[0022] In some embodiments, the closed shape may be an annular ring.

[0023] In some embodiments, the resistance of the lumped gate resistor may be a function of the sheet resistance of the material of the lumped gate resistor and the spacing between the first inner contact and the outer contact.

[0024] In some embodiments, the gate structure may further include a gate pad, one or more gate buses, and a plurality of gate fingers, and a lumped gate resistor may be electrically interposed between the gate pad and the gate fingers.

[0025] In some embodiments, the spacing between the inner edge of the closed shape and the outer edge of the closed shape may be a fixed distance or a variable distance.

[0026] According to yet another embodiment of the present invention, there is provided a semiconductor device including a gate structure comprising a lumped gate resistor overlying a semiconductor layer structure, wherein a first end and an opposing second end of the lumped gate resistor each extend to a periphery of the semiconductor device.

[0027] In some embodiments, the first end may extend to a first edge of the semiconductor device and the second end may also extend to a first edge of the semiconductor device. In some embodiments, the first end may extend to a first edge of the semiconductor device and the second end may extend to a second edge of the semiconductor device, and the second edge may be adjacent to the first edge.

[0028] In some embodiments, the lumped gate resistor may have a horizontal cross section that defines approximately one-half of an elliptical ring or approximately one-quarter of an elliptical ring.

[0029] In some embodiments, the dielectric pattern defining a portion of the elliptical ring may be positioned directly above the lumped gate resistor.

[0030] In some embodiments, the gate structure may further comprise an outer contact connecting to an outer edge of the lumped gate resistor and an inner contact connecting to an inner edge of the lumped gate resistor.

[0031] In some embodiments, the lumped gate resistor may include a first material having a first sheet resistance, and the inner contact and the outer contact may each include a material having a sheet resistance less than the first sheet resistance.

[0032] In some embodiments, the spacing between the outer edge of the inner contact and the inner edge of the outer contact may be constant along the length of the lumped gate resistor, while in other embodiments, the spacing between the outer edge of the inner contact and the inner edge of the outer contact may vary along the length of the lumped gate resistor.

[0033] In some embodiments, the gate structure may further include a gate pad, one or more gate buses, and a plurality of gate fingers, and a lumped gate resistor may be electrically interposed between the gate pad and the gate fingers.

[0034] According to additional embodiments of the present invention, there are provided semiconductor devices including a semiconductor layer structure and a gate structure overlying the semiconductor layer structure, the gate structure comprising a lumped gate resistor formed of a first material, an inner contact, and an outer contact, wherein at least one of the inner contact and the outer contact has curved sidewalls substantially aligned with sidewalls of the lumped gate resistor, and wherein the resistance of the lumped gate resistor is a function of the sheet resistance of the first material layer and a spacing between the inner contact and the outer contact.

[0035] In some embodiments, both the outer edge of the inner contact and the inner edge of the outer contact may have curved sidewalls.

[0036] In some embodiments, the spacing between the outer edge of the inner contact and the inner edge of the outer contact may be constant along the length of the lumped gate resistor or may vary along the length of the lumped gate resistor. In some embodiments, the inner contact and the outer contact may each comprise a second material, and the sheet resistance of the first material may be greater than the sheet resistance of the second material.

[0037] In some embodiments, the gate structure may further comprise a gate pad and a plurality of gate fingers, wherein the inner contact electrically connects the gate pad to the lumped gate resistor and the outer contact electrically connects the lumped gate resistor to the gate fingers.

[0038] In some embodiments, at least a portion of the lumped gate resistor may have a horizontal cross-section that defines at least a portion of an elliptical ring. In some embodiments, the horizontal cross-section of the lumped gate resistor may define a semi-elliptical ring, and the lumped gate resistor may be positioned adjacent to an edge of the semiconductor device. In some embodiments, the horizontal cross-section of the lumped gate resistor may define approximately one-quarter of an elliptical ring, and the lumped gate resistor may be positioned adjacent to a corner of the semiconductor device.

[0039] In some embodiments, the dielectric pattern defining at least a portion of the elliptical ring may be positioned directly above the lumped gate resistor.

[0040] In accordance with another embodiment of the present invention, a semiconductor device is provided that includes a semiconductor layer structure and a gate structure overlying the semiconductor layer structure, the gate structure comprising a dielectric pattern having a curved inner sidewall and a curved outer sidewall.

[0041] In some embodiments, the gate structure may further comprise a lumped gate resistor directly below the dielectric pattern.

[0042] In some embodiments, the lumped gate resistor may be a portion of the semiconductor layer directly underlying the dielectric pattern, and first and second opposing sidewalls of the lumped gate resistor may be substantially aligned with first and second opposing sidewalls of the dielectric pattern.

[0043] In some embodiments, the gate structure may further comprise a gate pad, one or more gate buses, and a plurality of gate fingers, and the lumped gate resistor may be electrically interposed between the gate pad and the one or more gate buses. In some embodiments, the gate pad and the one or more gate buses may each comprise metal.

[0044] In some embodiments, the curved inner sidewall and the curved outer sidewall may define at least a portion of an elliptical ring (eg, an annular ring).

[0045] In some embodiments, the curved inner sidewall and the curved outer sidewall may define approximately one-half of an annular ring.

[0046] In some embodiments, a first end of the annular ring may extend to a first edge of the semiconductor device, and an opposing second end of the annular ring may also extend to the first edge of the semiconductor device.

[0047] In some embodiments, the curved inner sidewall and the curved outer sidewall may define approximately one-quarter of an annular ring.

[0048] In some embodiments, a first end of the annular ring may extend to a first edge of the semiconductor device, and an opposing second end of the annular ring may extend to a second edge of the semiconductor device.

[0049] In some embodiments, the second edge of the semiconductor device may be adjacent to the first edge of the semiconductor device.

[0050] In some embodiments, the semiconductor layer structure may comprise a plurality of wide bandgap semiconductor layers, and the lumped gate resistor may be above the wide bandgap semiconductor layers and at least partially below the gate pad.

[0051] In some embodiments, the gate structure may further comprise a plurality of gate runners, each gate runner associated with a respective one of the gate fingers, and a lumped gate resistor may be electrically interposed between the gate pad and each of the gate runners.

[0052] In some embodiments, the lumped gate resistor may be on top of the field oxide layer.

[0053] In some embodiments, the horizontal cross section of the dielectric pattern may define a semi-elliptical ring, and the lumped gate resistor may be positioned adjacent the edge of the semiconductor device.

[0054] In some embodiments, the horizontal cross section of the dielectric pattern may define approximately one-quarter of an elliptical ring, and the lumped gate resistor may be positioned adjacent a corner of the semiconductor device.

[0055] In some embodiments, at least a portion of the dielectric pattern may underlie the gate pad.

[0056] In some embodiments, the gate structure may further comprise an inner contact abutting the curved inner sidewall of the dielectric pattern and an outer contact abutting the curved outer sidewall of the dielectric pattern.

[0057] According to yet a further embodiment of the present invention, there is provided a semiconductor device including a semiconductor layer structure comprising a plurality of semiconductor layers stacked along a vertical direction, and a gate structure overlying the semiconductor layer structure, the gate structure comprising a lumped gate resistor, wherein a horizontal cross section of the lumped gate resistor has a curved inner surface and a curved outer surface.

[0058] In some embodiments, the curved inner surface and the curved outer surface may define at least a portion of an elliptical ring.

[0059] In some embodiments, the gate structure may further include a gate pad, one or more gate buses, and a plurality of gate fingers, and a lumped gate resistor may be electrically interposed between the gate pad and the gate fingers. In some embodiments, the gate pad and the one or more gate buses may each include metal, and the gate fingers may include a semiconductor material.

[0060] In some embodiments, the lumped gate resistor may be in the semiconductor layer.

[0061] In some embodiments, the horizontal cross section of the lumped gate resistor may define at least a portion of an annular ring (eg, approximately 1 / 2 of an annular ring or approximately 1 / 4 of an annular ring).

[0062] In some embodiments, the semiconductor layer structure may comprise a plurality of wide bandgap semiconductor layers, and the lumped gate resistor may be above the wide bandgap semiconductor layer structure and at least partially below the gate pad.

[0063] In some embodiments, a horizontal cross section of the lumped gate resistor may define a semi-elliptical ring, and the lumped gate resistor may be positioned adjacent an edge of the semiconductor device.

[0064] In some embodiments, the horizontal cross section of the lumped gate resistor may define approximately one-quarter of an elliptical ring, and the lumped gate resistor may be positioned adjacent a corner of the semiconductor device.

[0065] In some embodiments, a dielectric layer having a horizontal cross section that defines at least a portion of an elliptical ring may be positioned directly above the lumped gate resistor.

[0066] In some embodiments, a lumped gate resistor may be formed in the polysilicon layer.

[0067] In accordance with yet another embodiment of the present invention, there is provided a semiconductor device including a semiconductor layer structure, a gate resistor layer overlying the semiconductor layer structure, an inner contact overlying the direct gate resistor layer, an outer contact overlying the direct gate resistor layer, and an outer dielectric pattern overlying the direct gate resistor layer between the inner and outer contacts, wherein the distance between the outer sidewall of the inner contact and the inner sidewall of the outer contact varies.

[0068] In some embodiments, these semiconductor devices may further include an inner dielectric pattern directly overlying the gate resistor layer, with the inner contact being between the inner and outer dielectric patterns. [Brief explanation of the drawings]

[0069] [Figure 1A] FIG. 1 is a schematic plan view of a conventional power MOSFET. [Figure 1B] 1B is a schematic plan view of the power MOSFET of FIG. 1A with its upper layer removed. [Figure 1C] FIG. 1C is a schematic vertical cross-sectional view taken along line 1C-1C of FIG. 1A. [Figure 2A] 1B is a schematic horizontal cross-sectional view of region "A" of the conventional power MOSFET of FIG. 1A with its passivation layer and gate bond pad removed. [Figure 2B] 2B is a schematic vertical cross-sectional view taken along line 2B-2B of FIG. 2A. [Figure 2C] 1B is a schematic horizontal cross-sectional view of region "A" of the power MOSFET of FIG. 1A, the cross-section being taken at the level of the gate bus in the device structure. [Figure 2D] 2D is a schematic vertical cross-sectional view taken along line 2D-2D of FIG. 2C. [Figure 2E] 1B is a schematic horizontal cross-sectional view of region "A" of the power MOSFET of FIG. 1A, the cross-section being taken at the level of the semiconductor layers formed below the gate pad in the device structure. [Figure 2F] FIG. 2F is a schematic vertical cross-sectional view taken along line 2F-2F of FIG. 2E. [Figure 2G] 2G is a schematic vertical cross-sectional view taken along line 2G-2G of FIG. 2E. [Figure 2H] 2H is a schematic vertical cross-sectional view taken along line 2H-2H of FIG. 2E. [Figure 3A] 1 is a schematic plan view of a power MOSFET according to an embodiment of the present invention; [Figure 3B] FIG. 3B is an enlarged schematic horizontal cross-sectional view of region "B" of the power MOSFET of FIG. 3A, the cross-section taken directly beneath the gate bond pad. [Figure 3C] FIG. 3C is a schematic vertical cross-sectional view taken along line 3C-3C of FIG. 3B. [Figure 3D] 3B is a schematic horizontal cross-sectional view of region "B" of the power MOSFET of FIG. 3A, the cross-section being taken at the level of the intermetal dielectric layer underlying the gate pad. [Figure 3E] FIG. 3E is a schematic vertical cross-sectional view taken along line 3E-3E of FIG. 3D. [Figure 3F] FIG. 3B is a schematic perspective view of some of the layers of the MOSFET of FIG. 3A. [Figure 4A] FIG. 2 is a schematic plan view of a power MOSFET according to a further embodiment of the present invention. [Figure 4B] 4B is a schematic horizontal cross-sectional view of region "C" of the power MOSFET of FIG. 4A, the cross-section being taken at the level of the intermetal dielectric layer underlying the gate pad. [Figure 4C] FIG. 4C is a schematic vertical cross-sectional view taken along line 4C-4C of FIG. 4B. [Figure 5A] FIG. 2 is a schematic plan view of a power MOSFET according to a further embodiment of the present invention. [Figure 5B] FIG. 5B is a schematic horizontal cross-section of region "D" of the power MOSFET of FIG. 5A, the cross-section being taken at the level of the intermetal dielectric layer underlying the gate pad. [Figure 5C] 5C is a schematic vertical cross-sectional view taken along line 5C-5C of FIG. 5B. [Figure 6A] 2 is a schematic cross-sectional side view of a power MOSFET according to an embodiment of the present invention having a lumped gate resistor with a non-circular elliptical ring shape; [Figure 6B] FIG. 6B is a vertical cross-sectional view taken along line 6B-6B of FIG. 6A. [Figure 7A] 10 is a horizontal cross-sectional view of a MOSFET according to a further embodiment of the present invention having a lumped gate resistor with a fully linear shape; [Figure 7B] 10 is a top cross-sectional view of a MOSFET according to a further embodiment of the present invention having a lumped gate resistor with a partially linear shape; [Figure 7C] 10 is a horizontal cross-sectional view of a MOSFET according to a further embodiment of the present invention having a lumped gate resistor with a fully linear shape; [Figure 8] FIG. 10 is a schematic cross-sectional side view of a power MOSFET according to an additional embodiment of the present invention, illustrating how the gap between the inner and outer contacts to the lumped gate resistor need not be constant. [Figure 9A] 3D is a schematic cross-sectional view corresponding to FIG. 3D showing an alternative design for the inner contact to the lumped gate resistor. [Figure 9B]3E and 3F are schematic cross-sectional views showing alternative designs for inner contacts to lumped gate resistors; [Figure 10] 1 is a schematic vertical cross-sectional view of a gated trench MOSFET that may include a lumped gate resistor, according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0070] Power semiconductor devices such as MOSFETs, IGBTs, and gate-controlled thyristors may include lumped gate resistors designed to increase gate resistance to a desired value. While these lumped gate resistors can improve device performance, it can be important to keep the variation in the resistance value of the lumped gate resistors due to manufacturing tolerances as small as possible, because even slight variations from the ideal resistance value can adversely affect the performance of the power semiconductor device. Traditionally, lumped gate resistors are implemented by routing the current path for the gate signal through a high-resistivity material. The resistance of a conventional lumped gate resistor is a function of the length of the resistor, the width of the resistor, and the sheet resistance of the material from which the resistor is formed. Due to manufacturing tolerances, the length and width of the resistor can vary from their ideal values, and this variation can be large enough to affect the performance of the device.

[0071] According to embodiments of the present invention, a power semiconductor device is provided having a lumped gate resistor connected to both an inner contact and an outer contact. The resistor is designed so that gate current flows across the resistor from the inner contact to the outer contact. In these devices, the outer contact can “surround” the inner contact within the inactive area of ​​the device. “Surrounded” by the outer contact means that in a horizontal cross section through the device (i.e., a two-dimensional cross section through the device taken along a plane parallel to the major surface of the semiconductor layer structure), the outer contact surrounds the inner contact, either by itself or in combination with one or more outer edges of the device. Thus, the lumped gate resistor may have a resistance that depends only on the width of the gap between the inner and outer contacts and the sheet resistance of the material from which the resistor is formed. Because lumped gate resistors according to embodiments of the present invention may depend only on one parameter affected by manufacturing tolerances (i.e., the width of the gap), resistance variations due to manufacturing tolerances may be reduced. In some embodiments, these lumped gate resistors may be formed below the gate pad, since this allows for the implementation of gate resistors without increasing the size of the device or reducing the size of the active area.

[0072] In some embodiments of the present invention, the inner contact may have a curved outer surface and the outer contact may have a curved inner surface. Such a design may form a lumped gate resistor with curved inner and outer surfaces. In some embodiments, the lumped gate resistor may have a horizontal cross-section that defines an elliptical ring. The elliptical ring is formed by starting with a first (outer) ellipse and then removing a second (inner) smaller ellipse from the center of the first ellipse. The difference between the semimajor and semiminor axes of both ellipses is the same, so that the distance from any point on the inner ellipse to the nearest corresponding point on the outer ellipse is constant. An annular ring (also called a circular ring) is a special case of an elliptical ring in which each ellipse has a constant radius.

[0073] In some embodiments, the lumped gate resistor may have a horizontal cross-section that is a complete elliptical ring. For example, if a gate pad is formed on an upper central region of a device's semiconductor layer structure, the lumped gate resistor may be formed to have the shape of an elliptical ring (e.g., an annular lumped gate resistor). In other embodiments, the lumped gate resistor may have a horizontal cross-section that is only a portion of an elliptical ring. For example, if a gate pad is formed along a first edge of the upper side of a device's semiconductor layer structure, the lumped gate resistor may have the shape of a semi-elliptical ring, with the flat side of the semi-elliptical ring parallel to the first edge of the device. As another example, if a gate pad is provided on an upper corner of a device's semiconductor layer structure, the lumped gate resistor may have the shape of one-quarter of an elliptical ring. In each of the above cases, the elliptical ring may be, but need not be, a circular ring.

[0074] In some embodiments, the horizontal cross section of the lumped gate resistor may define an elliptical ring, but it will be appreciated that embodiments of the present invention are not so limited. For example, other embodiments provide lumped gate resistors having horizontal cross sections of other closed shapes, such as square rings, hexagonal rings, rings with varying widths, etc. These rings may be complete rings or partial rings having first and second ends that extend to the periphery of the semiconductor device. The "periphery" of a semiconductor device may be the edge of the semiconductor device or a structure extending parallel to the edge of the semiconductor device that defines the outer edge of the device's active region.

[0075] Because semiconductor materials have a higher sheet resistance than the metal used to form the gate pad and possibly other portions of the gate structure (e.g., gate bus, gate runners, etc.), in some embodiments, a lumped gate resistor according to embodiments of the present invention may be formed within a semiconductor layer. For example, an electrical path connecting the gate pad to the gate fingers may be routed through a portion of the semiconductor layer, with this portion of the electrical path acting as a lumped gate resistor that increases the total gate resistance. The semiconductor layer may comprise, for example, a polysilicon layer, and in some embodiments, may be the portion of the polysilicon layer where the gate fingers are formed in the active region of the device.

[0076] The gate current will tend to follow the path of least resistance between the gate pad and the gate finger. Typically, the semiconductor layer in which the lumped gate resistor is formed (also more generally referred to herein as the gate resistor layer) is a layer "below" the device relative to the gate pad. In other words, the semiconductor layer in which the lumped gate resistor is formed may be closer to the wide-bandgap semiconductor layer structure of the device than the gate pad. The lumped gate resistor may be formed by forming a dielectric pattern in a metal layer formed over the semiconductor layer. The dielectric pattern prevents the gate current from flowing directly from the first metal region of the gate structure to the second metal region of the gate structure, instead forcing the gate current to flow from the first metal region to the semiconductor layer and from the semiconductor layer to the second metal region. The first metal region inside the dielectric pattern may serve as a first contact to the lumped gate resistor, and the second metal region outside the dielectric pattern may serve as a second contact to the lumped gate resistor. The gate current flows from the gate pad through the gate metal to the first contact, then through a portion of the semiconductor layer underlying the dielectric pattern (e.g., having the shape of at least a portion of an elliptical dielectric ring) to the second contact, where the current flows back to the gate metal. Thus, in the interest of seeking the lowest resistance path for the gate current, it will be appreciated that a lumped gate resistor having a full or partial elliptical ring shape may be formed by forming a dielectric pattern having a full or partial elliptical ring shape in a metal layer on top of the gate resistor layer.

[0077] In some embodiments, a semiconductor device is provided that includes a semiconductor layer structure having an active area with a plurality of unit cell transistors and an inactive gate pad area. A gate resistor layer is provided above the semiconductor layer structure. An inner contact and an outer contact are formed directly above the gate resistor layer. The outer contact surrounds the inner contact within the inactive gate pad area of ​​the semiconductor device. As described above, "surrounded" by the outer contact means that in a horizontal cross section through the device (i.e., a two-dimensional cross section through the device taken along a plane parallel to a major surface of the semiconductor layer structure), the outer contact surrounds the inner contact, either by itself or in combination with one or more outer edges of the device. A dielectric pattern may be provided directly between the inner contact and the outer contact above the gate resistor layer. A lumped gate resistor may be defined in the gate resistor layer directly below the inner dielectric pattern.

[0078] In another embodiment, a semiconductor device is provided that includes a gate structure including a lumped gate resistor overlying a semiconductor layer structure. A horizontal cross section of the lumped gate resistor defines a closed shape, such as an elliptical ring. A dielectric pattern having a horizontal cross section defining a second closed shape may be positioned directly above the lumped gate resistor. The second closed shape may have the same shape as the first closed shape.

[0079] In yet another embodiment, a semiconductor device is provided that includes a gate structure including a lumped gate resistor overlying a semiconductor layer structure. A first end and an opposing second end of the lumped gate resistor may each extend to a periphery of the semiconductor device. In some embodiments, the first and second ends of the lumped gate resistor may extend to a first edge of the semiconductor device. In other embodiments, the first end may extend to a first edge of the semiconductor device and the second end may extend to a second edge of the semiconductor device.

[0080] In yet another embodiment, a semiconductor device is provided that includes a gate structure overlying a semiconductor layer structure. The gate structure includes a lumped gate resistor, an inner contact, and an outer contact. At least one of the inner contact and the outer contact has curved sidewalls that are substantially aligned with an edge of the lumped gate resistor. In these devices, the resistance of the lumped gate resistor is a function of the sheet resistance of the material forming the lumped gate resistor and the spacing between the inner and outer contacts.

[0081] In yet another embodiment, a semiconductor device is provided that includes a gate structure overlying a semiconductor layer structure, the gate structure including a dielectric pattern having curved inner sidewalls and curved outer sidewalls, and a lumped gate resistor may be provided directly below the dielectric pattern.

[0082] In yet another embodiment, there is provided a semiconductor device comprising: a semiconductor layer structure comprising a plurality of semiconductor layers stacked along a vertical direction; and a gate structure overlying the semiconductor layer structure, the gate structure comprising a lumped gate resistor, wherein a horizontal cross section of the lumped gate resistor has a curved inner surface and a curved outer surface.

[0083] In yet another embodiment, a semiconductor device is provided that includes a gate resistor layer overlying a semiconductor layer structure, an inner contact overlying the direct gate resistor layer, an outer contact overlying the direct gate resistor layer, and an outer dielectric pattern overlying the direct gate resistor layer between the inner and outer contacts. The distance between the outer sidewall of the inner contact and the inner sidewall of the outer contact varies. The semiconductor device may further include an inner dielectric pattern overlying the direct gate resistor layer, the inner contact being between the inner and outer dielectric patterns.

[0084] Before describing specific examples of semiconductor devices according to embodiments of the present invention, the structure and operation of a conventional power MOSFET 1 will be described in detail with reference to FIGS. 1A-1C. In particular, FIG. 1A is a schematic plan view of a conventional power MOSFET 1, and FIG. 1B is a schematic plan view of the power MOSFET 1 with its passivation layer, top-side source metallization structure, gate bond pad, and inter-metal dielectric pattern omitted. FIG. 1C is a schematic cross-sectional view taken along line 1C-1C in FIG. 1A, showing one complete unit cell of MOSFET 1 and portions of two additional cells.

[0085] Power MOSFET 1 includes a semiconductor layer structure 20 (FIG. 1C) and multiple metal layers formed on either side of semiconductor layer structure 20. Referring first to FIG. 1A, a gate bond pad 10 and one or more source bond pads 12-1, 12-2 are formed on the top side of semiconductor layer structure 20 (FIG. 1C), and a drain pad 14 (shown by a dotted-line box in FIG. 1A) is provided on the bottom side of MOSFET 1. Each of gate and source pads 10, 12 may be formed of a metal, such as aluminum, to which bond wires can be readily attached via conventional techniques such as thermocompression bonding or soldering. Drain pad 14 may be formed of a metal that can be connected to an underlying submount, such as a lead frame, heat sink, or power substrate, via soldering, brazing, direct compression bonding, or the like.

[0086] MOSFET 1 includes a source metallization structure 60 that electrically connects the source region 28 in the semiconductor layer structure 20 of MOSFET 1 to an external device or voltage source, which is electrically connected to source bond pads 12-1 and 12-2. The source metallization structure 60 is illustrated by the dashed box in FIG. 1A as having a majority of the topside metallization structure 60 covered by a protective layer 16, such as a polyimide layer. In some embodiments, the source bond pads 12-1 and 12-2 may be portions of the source metallization structure 60 exposed through openings in the protective layer 16. Also shown in FIG. 1A are bond wires 18 that may be used to connect the gate bond pad 10 and the source bond pads 12-1 and 12-2 to external circuitry, etc. The drain pad 14 may be connected to external circuitry through an underlying submount (not shown) on which MOSFET 1 is mounted.

[0087] 1B-1C, a gate structure 30 is provided that includes a plurality of gate insulation fingers 32 (FIG. 1C), a plurality of gate fingers 34 (FIGS. 1B-1C), a gate pad 36 (FIG. 1B), and one or more gate buses 38 (FIG. 1B) electrically connecting the gate fingers 34 to the gate pad 36. Optionally, gate runners (not shown) may be provided. These gate runners may, for example, extend over the gate fingers 34 and electrically connect the gate fingers 34 to the gate bus 38. The electrical connections between the gate fingers 34, any gate runners, and the gate bus 38 may be conventional and therefore not described herein. The gate insulation fingers 32 may comprise, for example, silicon oxide and may insulate the gate fingers 34 from the underlying semiconductor layer structure 20. In some embodiments, the gate fingers 34 may comprise, for example, a polysilicon pattern, although other conductive patterns may alternatively be used. The gate fingers 34 may extend horizontally across the device (as shown in FIG. 1B ), or alternatively, may comprise a planar layer extending across the top surface of the semiconductor layer structure 20, with openings therein through which the top-side source metallization structure 60 (described below) connects to the source regions 28 in the semiconductor layer structure 20. Other configurations may be used (e.g., if the unit cell has a hexagonal configuration, if the gate fingers 34 extend vertically rather than horizontally, etc.). In some embodiments, the gate fingers 34 may be formed in trenches in the top surface of the semiconductor layer structure 20. This is because forming the gate fingers 34 in such trenches may, for example, improve carrier mobility in the MOSFET 1. The gate pad 36 may be directly below and electrically connected to the gate bond pad 10. In some embodiments, the gate pad 36 and the gate bond pad 10 may comprise a single monolithic structure. In an exemplary embodiment, the gate pad 36 and the gate bus 38 may comprise metal structures.

[0088] Referring to Figure 1C, the unit cell transistor is heavily doped with n-type impurities (e.g., 1 x 10 18 atoms / cm 3 ~1×10 21 atoms / cm 3 1C , may be formed on an n-type silicon carbide semiconductor substrate 22, such as a single crystal 4H silicon carbide semiconductor substrate. Substrate 22 may have any suitable thickness (e.g., a thickness of 100-500 microns) and, in some embodiments, may be partially or completely removed. It will be appreciated that the thicknesses of substrate 22 and the other layers are not drawn to scale in FIG. 1C .

[0089] A drain pad 14 may be formed on the underside of semiconductor device 22. Drain pad 14 may function as an ohmic contact to semiconductor substrate 22 and as a pad that provides an electrical connection between the drain terminal of MOSFET 1 and an external device. Drain pad 14 may include, for example, a metal such as nickel, titanium, tungsten, and / or aluminum, and / or alloys and / or thin layer stacks of these and / or similar materials.

[0090] Lightly doped n-type (n - An n-type silicon carbide drift region 24 is provided on the upper surface of the substrate 22. The n-type silicon carbide drift region 24 may be formed, for example, by epitaxial growth on the silicon carbide substrate 22. The n-type silicon carbide drift region 24 may have a density of, for example, 1×10 14 ~5×10 16 dopants / cm 3 The n-type silicon carbide drift region 24 may have a doping concentration of 1×10 or more. The n-type silicon carbide drift region 24 may be a thick region having a vertical height above the substrate 22 of, for example, 3 to 100 microns. It will be appreciated that the thickness of the drift region 24 is not drawn to scale in FIG. 1C. Although not shown in FIG. 1C, in some embodiments, the upper portion of the n-type silicon carbide drift region 24 may be more highly doped than the lower portion thereof (e.g., 1×10 or more).16 ~1×10 17 dopants / cm 3 doping concentration).

[0091] A P-type well region 26 is formed in the upper portion of the n-type drift region 24. A heavily doped (n + ) An n-type silicon carbide source region 28 may be formed in an upper portion of well region 26, for example, by ion implantation. A channel region 27 is defined on a side of well region 26. Substrate 22, drift region 24, well region 26, and source region 28 may together comprise semiconductor layer structure 20 of MOSFET 1. Semiconductor layer structure 20 may be a wide bandgap semiconductor layer structure 20 (i.e., a semiconductor layer structure 20 formed of a wide bandgap semiconductor material).

[0092] After the n-type source regions 28 are formed, a plurality of gate insulating fingers 32 (collectively comprising a gate insulating pattern) may be formed on the top surface of the semiconductor layer structure 20. Each gate insulating finger 32 may comprise an elongated strip of dielectric material, such as silicon oxide, silicon nitride, or silicon oxynitride. A gate finger 34, such as a polysilicon gate finger 34, is formed on each gate insulating finger 32. The gate fingers 34 and gate insulating fingers 32, along with the gate bond pad 110, gate pad 36, gate bus(es) 38, and any gate runners, may collectively comprise the gate structure 30. As mentioned above, the vertically extending portions of the well region 26 between the source regions 28 and the portion of the drift region 24 directly below each gate finger 34 comprise the channel region 27. When a sufficient bias voltage is applied to the gate fingers 34, the channel region 27 electrically connects the n-type source regions 28 to the drift region 24. When a bias voltage is applied to gate finger 34 , current may flow from n-type source region 28 through channel region 27 to drift region 24 and then to drain pad 14 .

[0093] As shown in FIG. 1C , an inter-metal dielectric pattern 50 is formed over the top and side surfaces of the gate insulation fingers 32 and gate fingers 34 to electrically isolate the gate fingers 34 from the source metallization structure 60. Although not shown in FIG. 1C , the inter-metal dielectric pattern 50 may also electrically isolate the gate pad 36 and / or gate bus(es) 38 from the source metallization structure 60. The inter-metal dielectric pattern 50 may include multiple individual dielectric fingers 52 covering each gate finger 34, as well as additional dielectric structures in the gate pad region of the device. The inter-metal dielectric pattern 50 may include one or more of a silicon oxide pattern, a silicon nitride pattern, aluminum oxide, magnesium oxide, or a mixture of these or other oxides and nitrides with silicon dioxide to form, for example, a silicate or oxynitride alloy dielectric. As mentioned above, the gate fingers 34 of the electrode structure 30 may be polysilicon gate fingers. Thus, in some embodiments, the "inter-metal" dielectric pattern 50 may be a pattern formed to insulate a semiconductor pattern from a metal pattern, as opposed to insulating two metal patterns from each other.

[0094] A source metallization structure 60 may be formed on the intermetal dielectric pattern 50. The source metallization structure 60 may include one or more layers, such as, for example, a diffusion barrier layer and a bulk metal layer.

[0095] 2A-2H show how a lumped gate resistor can be included in the conventional power MOSFET 1 of FIGS. 1A-1C.

[0096] 2A is a schematic horizontal cross-sectional view of the region labeled "A" of power MOSFET 1 of FIG. 1A with its passivation layer 16 and gate bond pad 10 removed. As shown in FIG. 2A, gate pad 36 is formed underneath gate bond pad 10 (FIG. 2B). Intermetal dielectric layer 50 electrically isolates gate pad 36 from source metallization 60.

[0097] FIG. 2B is a schematic vertical cross-sectional view taken along line 2B-2B in FIG. 2A. As shown in FIG. 2B, a field oxide layer 40 (e.g., a thick silicon oxide layer) is formed on the semiconductor layer structure 20 below the gate pad 36. A polysilicon layer 70 is formed on top of the field oxide layer 40. The polysilicon layer 70 may extend into the active region of the device (as shown at the side edges in FIG. 2B) and may be patterned to form gate fingers 34 on top of each gate insulation finger 32. A gate pad 36 is formed on top of the polysilicon layer 70, and a gate bond pad 10 is formed on top of the gate pad 36. The gate pad 36 and the gate bond pad 10 may comprise a monolithic structure or two or more separate layers. One or more gate buses 38 are formed on top of the polysilicon layer 70. Two gate buses 38 are visible in the cross-section of FIG. 2B. Because the gate buses 38 do not extend to the level of the gate pads 36 on the semiconductor layer structure 20, an intermetal dielectric layer 50 covers the top surface of each gate bus 38. The intermetal dielectric layer 50 electrically isolates the gate pads 36 and gate buses 38 from the source metallization structure 60. Line 2A-2A in Figure 2B indicates the height of MOSFET 1 at which the horizontal cross section of Figure 2A was taken.

[0098] FIG. 2C is a schematic horizontal cross-sectional view of region "A" of power MOSFET 1, taken at the level of gate bus 38 in the device structure. As shown in FIG. 2C, an inner portion 52 of inter-metal dielectric pattern 50 separates gate pad 36 from gate bus 38. Gate bus 38 may surround gate pad 36 and may extend across MOSFET 1 to carry gate signals applied to gate bond pad 10 to gate fingers 34. An outer portion 54 of inter-metal dielectric pattern 50 separates gate bus 38 from source metallization 60. As shown in FIG. 2D, in some embodiments, inner and outer portions 52, 54 of inter-metal dielectric layer 50 may be monolithic structures.

[0099] FIG. 2D is a schematic vertical cross-section taken along line 2D-2D in FIG. 2C. As can be seen, the cross-section in FIG. 2D is similar to that in FIG. 2B, except that the cross-section in FIG. 2D is taken through inter-metal dielectric pattern 50 rather than through gate pad 36. Together, FIGS. 2A-2D show how inter-metal dielectric pattern 50 separates gate pad 36 from gate bus 38, so that gate current cannot flow directly from gate pad 36 to gate bus 38. Line 2C-2C in FIG. 2D indicates the height of MOSFET 1 at which the horizontal cross-section in FIG. 2C was taken.

[0100] 2E is a schematic horizontal cross-sectional view of region "A" of power MOSFET 1, taken at the level of polysilicon semiconductor layer 70 in the device structure. As shown in FIG. 2E, inter-metal dielectric pattern 50 also extends into polysilicon layer 70 underlying gate pad 36 and gate bus 38. Inter-metal dielectric pattern 50 separates polysilicon pattern 70 into an inner region 72 and an outer region 74. Inter-metal dielectric pattern 50 includes opening 58 that allows current to flow from inner portion 72 of polysilicon pattern 70 to outer portion 74 of polysilicon pattern 70. As described below, portion 76 of polysilicon layer 70 that lies within opening 52 in inter-metal dielectric pattern 50 forms a lumped gate resistor 76 that can be used to increase the resistance of gate structure 30.

[0101] Figure 2F is a schematic vertical cross-sectional view taken along line 2F-2F in Figure 2E. As shown in Figure 2F, opening 58 in intermetal dielectric pattern 50 causes polysilicon pattern 70 to include portion 76 connecting inner portion 72 to outer portion 74. Thus, a current path is provided in polysilicon pattern 70 that allows gate current applied to gate bond pad 10 to flow through gate pad 36 and then through the portion of polysilicon pattern 70 that is below opening 58 in intermetal dielectric pattern 50 to outer portion 74 of polysilicon pattern 70, where the gate current can enter gate bus 38. Line 2E-2E in Figure 2F indicates the height of MOSFET 1 from which the horizontal cross-section of Figure 2E was taken.

[0102] 2G and 2H are vertical cross-sections taken through MOSFET 1 at lines 2G-2G and 2H-2H, respectively, of FIG. 2E.

[0103] 2G, when a bias voltage is applied to the gate bond pad 10, current flows downward to the gate pad 36 and into the inner portion 72 of the polysilicon layer 70. The current flows through the portion of the polysilicon layer 70 between the inner portion 72 and the outer portion 74, and then follows the path of least resistance into the gate bus 38. The gate current flows primarily at or near the top surface of the portion 76 of the polysilicon layer 70 between the inner portion 72 and the outer portion 74, and exits the polysilicon layer 70 shortly after it may flow into the gate bus 38. Because the polysilicon layer 70 has a significantly higher resistance than the metals used to form the gate bond pad 10, the gate pad 36, and the gate bus 38, the portion of the gate current path that flows through the polysilicon layer 70 can function as a lumped gate resistor 78 interposed in the gate current path between the gate pad 36 and the gate bus 38.

[0104] 2H, it can be seen that the intermetal dielectric layer 50 extends throughout the polysilicon pattern 70 to the underlying field oxide layer 40. As a result, in the portion of the device shown in cross section in FIG. 2H, current cannot flow from the inner portion 72 to the outer portion 74 of the polysilicon layer 70. In other words, gate current can only flow from the inner portion 72 to the outer portion 74 of the polysilicon layer 70 in the region of the opening 58 in the intermetal dielectric pattern 50 shown in FIG. 2E; therefore, the portion 76 of the polysilicon layer 70 within the opening 58 functions as a lumped gate resistor 78.

[0105] Referring again to FIG. 2E , it can be seen that the resistance of the gate resistor 78 is a function of the width W of the opening 58, the length L of the opening 58, and the sheet resistance of the polysilicon material (or other material of the gate resistor layer). The dimensions of the portion of the inter-metal dielectric pattern 50 defining the opening 58 may be varied to enable the lumped gate resistor 78 to have a desired resistance value. Specifically, the length L and / or the width W may be increased to provide more resistance or decreased to provide less resistance. As mentioned above, due to manufacturing tolerances, the length L and width W of the resistor 78 may vary between MOSFETs 1 formed on different wafers and, in some cases, between MOSFETs 1 formed on the same wafer. Purchasers of power semiconductor devices often specify very tight ranges for the cumulative gate resistance of power semiconductor devices, such as the power MOSFET 1. For example, a customer may specify a gate resistance value with a tolerance of ±5% or less. These tight tolerances may be necessary because the cumulative gate resistance can directly affect the switching speed of the device, and if the device does not exhibit an appropriate switching speed for the application in which it is used, undesirable oscillations or other undesirable behavior can occur that can adversely affect system performance. The manufacturing tolerances in controlling the L and W dimensions in Figure 2E may be large enough that it may be difficult to ensure that devices have cumulative gate resistances within the ranges specified by some customers and / or for some applications.

[0106] In accordance with an embodiment of the present invention, a semiconductor device is provided having a lumped gate resistor with reduced resistance variation. FIGS. 3A-3F illustrate a MOSFET 100A according to an embodiment of the present invention, including such a lumped gate resistor. In particular, FIG. 3A is a schematic plan view of the power MOSFET 100A. FIG. 3B is an enlarged, schematic horizontal cross-sectional view of the power MOSFET in a region labeled "B" in FIG. 3A, taken at a cross-section directly below the gate bond pad 110. FIG. 3C is a schematic vertical cross-sectional view of the power MOSFET 100A of FIG. 3B, taken at the cross-section along line 3C-3C in FIG. 3B. FIG. 3D is a schematic horizontal cross-sectional view of region "B" of the power MOSFET of FIG. 3A, taken at the level of the inter-metal dielectric layer underlying the gate pad. FIG. 3E is a schematic vertical cross-sectional view of the power MOSFET 100A of FIG. 3D, taken at the cross-section along line 3E-3E in FIG. 3D. FIG. 3F is a schematic perspective view of some of the layers above region "B" of MOSFET 100A of FIG. 3A.

[0107] As shown in FIG. 3A, power MOSFET 100A includes gate bond pad 110 and a pair of source bond pads 112-1, 112-2 exposed on the top surface of the device. An intermetal dielectric pattern 150 (FIGS. 3B-3F) is interposed between gate bond pad 110 and source bond pads 112-1, 112-2 to provide electrical isolation therebetween. A passivation layer 116 covers intermetal dielectric pattern 150 and the remaining portions of the gate and source metal on the top side of MOSFET 100A.

[0108] FIG. 3B is a schematic horizontal cross-sectional view of the portion labeled "B" in FIG. 3A, taken directly below gate bond pad 110. As shown in FIG. 3B, gate pad 136 is provided below gate bond pad 110. Gate pad 136 may be formed of metal. In some embodiments, gate pad 136 and gate bond pad 110 may comprise a monolithic metal layer. A circular gate bus 138 surrounds gate pad 136. An inner ring 152 of inter-metal dielectric pattern 150 separates gate pad 136 from circular gate bus 138. Additional gate buses 138 extend radially from circular gate bus 138 to carry gate signals throughout the active area of ​​MOSFET 100A. In the illustrated embodiment, four such additional gate buses 138 are visible, spaced apart from one another by approximately 90 degrees. 3B, only a small portion of each additional gate bus 138 is visible. An outer ring 154 of the intermetal dielectric pattern 150 separates the circular gate bus 138 from the source metallization 160. The outer ring 154 includes openings 158 that allow each additional gate bus 138 to be physically and electrically connected to the circular gate bus 138.

[0109] Figure 3C is a schematic vertical cross-sectional view taken along line 3C-3C of Figure 3B. Line 3B-3B in Figure 3C indicates the height of MOSFET 100A at which the horizontal cross-section of Figure 3B is taken in Figure 3C.

[0110] As shown in FIG. 3C , the MOSFET 100A includes a semiconductor layer structure 120. The semiconductor layer structure 120 includes a substrate 122 (e.g., a silicon carbide semiconductor substrate 122), a drift region 124 formed on the upper surface of the substrate 122, and a well region 126 provided in an upper portion of the drift region 124. The substrate 122, the drift region 124, and the well region 126 are stacked vertically. A drain pad (not shown) may be provided on the lower surface of the substrate 122. Although not shown in FIG. 3C , the semiconductor layer structure 120 may further include a channel region 127 defined on a side of the well region 126 and a source region 128 formed in an upper portion of the well region 126. Because the cross section of Figure 3C shows the "inactive" portion of the device below gate pad 136, which does not include unit cell transistors, channel region 127 and source region 128 are not visible in Figure 3C because these regions may be formed only in the active area of ​​MOSFET 100A. The active area of ​​MOSFET 100A may have the conventional design shown in the cross section of Figure 1C. Furthermore, substrate 122, drift region 124, and well region 126 may comprise the same materials as the corresponding substrate 22, drift region 24, and well region 26 of Figure 1C.

[0111] As further shown in FIG. 3C, a field oxide layer 140, such as a thick silicon oxide layer, is formed on the top surface of semiconductor layer substrate 120. A polysilicon layer 170 is formed on field oxide layer 140. Polysilicon layer 170 may be part of a monolithic layer used to form gate fingers (not shown, but corresponding to gate fingers 34 in FIG. 1C) of MOSFET 100A. Because a gate resistor may be formed in polysilicon layer 170, polysilicon layer 170 may also be referred to herein as a gate resistor layer.

[0112] The polysilicon layer 170 may be a doped polysilicon layer 170. The doped polysilicon layer 170 may be formed in any suitable manner. For example, in some embodiments, it may be formed by deposition (e.g., in a low-pressure chemical vapor deposition reactor, as known in the art). In other embodiments, the polysilicon layer 170 may be deposited as an undoped polysilicon layer 170 and then doped via ion implantation. In still other embodiments, the polysilicon layer 170 may be deposited as an undoped polysilicon layer 170 and then doped via diffusion. Doping the polysilicon layer 170 during deposition may provide the simplest manufacturing process and may be preferred in some applications. Doping the polysilicon layer 170 by ion implantation may act to break down silicon crystals into smaller crystalline units. This may improve the uniformity of the doping profile and result in the most uniform resistance for any gate resistor formed within the polysilicon layer 170. To ensure that the implantation process breaks down the polycrystalline structure into smaller crystalline units, a relatively high concentration of a dopant, such as boron trifluoride, may be implanted into polysilicon layer 170. To further increase the uniformity of the doping profile, additional implants of other dopant species (e.g., nitrogen) may be performed as well, which helps ensure more consistent resistance values.

[0113] It will also be appreciated that the gate resistor layer may be formed of materials other than polysilicon. Note that semiconductor layer structure 120 and field oxide layer 140 are present in all of the vertical cross-sections included in this application. To simplify the remaining drawings, these layers of MOSFET 100A (and other MOSFETs shown herein) are not shown, but it will be appreciated that these layers may be present. It will also be appreciated that the thicknesses of the various layers and patterns in FIG. 3C (and the other vertical cross-sections) are not drawn to scale.

[0114] 3C , the inter-metal dielectric pattern 150 is formed on the polysilicon layer 170. The gate pad 136 includes a downwardly extending inner contact 137 that penetrates the inter-metal dielectric pattern 150 and contacts the polysilicon layer 170. The downwardly extending contact portion 137 separates a central portion 156 of the inter-metal dielectric pattern 150 from the portion of the inter-metal dielectric pattern 150 that includes the inner ring 152. The central portion 156 of the inter-metal dielectric pattern 150 is vertically interposed between the gate pad 136 and the polysilicon layer 170. The central portion 156 of the inter-metal dielectric pattern 150 may have a circular shape when viewed from above (in plan view). In some embodiments, the inner contact 137 of the gate pad 136 may be ring-shaped (i.e., have a circular horizontal cross section). Inter-metal dielectric pattern 150 extends to the top surface of MOSFET 100A to physically and electrically isolate gate pad 136 and gate bond pad 110 from source metallization structure 160 and source bond pad 112 (the portion of inter-metal dielectric pattern 150 that extends to the top surface of the device is not visible in FIG. 3A because it is covered by passivation layer 116).

[0115] FIG. 3D is another schematic horizontal cross-sectional view of region "B" of power MOSFET 100A of FIG. 3A. The cross-section is taken at a lower elevation than the horizontal cross-section of MOSFET 100A of FIG. 3B. That is, the horizontal cross-section of FIG. 3D is taken just above polysilicon layer 170. FIG. 3E is a schematic vertical cross-sectional view taken along line 3E-3E of FIG. 3D. Because the cross-sections are taken along the same "cut" line of region B of MOSFET 100A, the vertical cross-section of FIG. 3E is identical to the vertical cross-section of FIG. 3C. The dotted line extending between FIG. 3D and FIG. 3E is provided to help visualize the correspondence between the regions in the horizontal and vertical cross-sectional views.

[0116] 3B-3E, it can be seen that the lower portion of the inner ring 152 of the inter-metal dielectric pattern 150 shown in FIG. 3D is wider than the upper portion of the inner ring 152 of the inter-metal dielectric pattern 150 shown in FIG. 3B. The lower portion of the inner ring 152 of the inter-metal dielectric pattern 150 defines a lumped gate resistor 178 in the polysilicon layer 170. The width of the lower portion of the inner ring 152 of the inter-metal dielectric pattern 150 may be selected such that the lumped gate resistor 178 may have a desired resistance value.

[0117] As shown in FIGS. 3C and 3E , the lumped gate resistor 178 includes the portion of the polysilicon layer 170 directly below the lower portion of the inner ring 152 of the inter-metal dielectric pattern 150, as shown in FIGS. 3D-3E . Because the lower portion of the inner ring 152 of the inter-metal dielectric pattern 150 has a ring shape, the lumped gate resistor similarly has a ring shape. The inner contact 137 of the gate pad 136 serves as the inner contact 180, which physically and electrically connects to the lumped gate resistor 178. The lower portion of the circular gate bus 138 serves as the outer contact 182, which physically and electrically connects to the lumped gate resistor 178. In the embodiment of FIGS. 3A-3F , the inner contact 180 has a circular shape and therefore has a curved outer sidewall with a constant radius. Similarly, the outer contact 182 also has a circular shape and therefore has a curved inner sidewall with a constant radius. The curved outer sidewalls of the inner contact 180 and the curved inner sidewalls of the outer contact 182 also define the portion of the polysilicon layer 170 that functions as the lumped gate resistor 178. Thus, the lumped gate resistor 178 similarly includes curved inner and outer sidewalls that are substantially aligned with the curved outer sidewalls of the inner contact 180 and the curved inner sidewalls of the outer contact 182, respectively. The inner ring 152 of the inter-metal dielectric pattern 150 similarly has curved inner and outer sidewalls. The inner contact 137 and the outer contact 182 may be formed of a material that makes ohmic contact to the lumped gate resistor 178, for example. For example, in an exemplary embodiment, if the lumped gate resistor 178 includes doped polysilicon, the inner and outer contacts 137, 182 may include aluminum, titanium, or titanium nitride.

[0118] 3C and 3E , when a gate signal is applied to the gate bond pad 110, the gate signal travels to the gate pad 136 and then through the inner contacts 137 / 180 to the polysilicon layer 170. Because the wider lower portion of the inner ring 152 of the inter-metal dielectric pattern 150 is interposed between the gate pad 136 and the circular gate bus 138, the only current path between the gate pad 136 and the circular gate bus 138 is through the portion of the polysilicon layer 170 that functions as the lumped gate resistor 178. Because the metal gate pad 136 and metal gate bus 138 have a much lower resistance than the lumped gate resistor 178 (formed from polysilicon), the gate signal tends to flow only through the portion of the polysilicon layer 170 that is directly below the inner ring 152 of the inter-metal dielectric pattern 150. The gate current will flow primarily at or near the top surface of polysilicon layer 170, exiting polysilicon layer 170 as soon as the current may flow into outer contact / gate bus 138 / 180. In other words, the gate current enters polysilicon layer 170 immediately adjacent the lower edge of the inner sidewall of inner ring 152 of inter-metal dielectric pattern 150, and exits polysilicon layer 170 immediately adjacent the lower edge of the outer sidewall of inner ring 152 of inter-metal dielectric pattern 150 into circular gate bus 138. This is shown schematically in Figures 3C and 3E by the arrows labeled "Current Path."

[0119] The lower portion of the inner ring 152 of the inter-metal dielectric pattern 150 defines the shape of a lumped gate resistor. In other words, the lumped gate resistor has substantially the same horizontal cross section as the lower portion of the inner ring 152 of the inter-metal dielectric pattern 150. As shown in FIG. 3E, in some embodiments, this closed shape may be an annular ring (or, more generally, an elliptical ring).

[0120] FIG. 3F is a schematic perspective view of some of the upper layers of MOSFET 100A of FIG. 3A. FIG. 3F shows how the wider lower portion of inner ring 152 of inter-metal dielectric pattern 150 defines gate resistor 178 in polysilicon layer 170. As shown in FIG. 3F, the lower portion of inner ring 152 of inter-metal dielectric pattern 150 blocks the direct current path between gate pad 136 and circular gate bus 138, thereby forcing the gate current to flow through polysilicon layer 170 to reach circular gate bus 138. The shape of the lower portion of inner ring 152 of inter-metal dielectric pattern 150 defines a lumped gate resistor 178 in polysilicon layer 170 that has a shape (in this case, annular) corresponding to the lower portion of inner ring 152 of inter-metal dielectric pattern 150. The resistance value of lumped gate resistor 178 may be set by varying the width of the lower portion of inner ring 152 of inter-metal dielectric pattern 150.

[0121] Referring again to FIG. 3A , the MOSFET 100 has an active area 102 and an inactive area 104 defined in a semiconductor layer structure 120. The active area 102 includes the portion of the semiconductor layer structure 120 where the unit cell transistors are defined. The inactive area 104 may include the remainder of the semiconductor layer structure 120, such as the portion of the semiconductor layer structure 120 underlying the gate bond pad 110, as well as other regions of the device, such as a termination region (not shown), which may surround the active area 102. As can be seen in FIG. 3F , a polysilicon layer 170 is provided on top of the semiconductor layer structure 120, and both an inner contact 180 and an outer contact 182 are formed directly on top of the polysilicon layer 170. The outer contact 182 surrounds the inner contact 180 within the inactive gate pad area of ​​the MOSFET 100A. An inner dielectric pattern 152 may be provided directly on top of the polysilicon layer 170, between the inner contact 180 and the outer contact 182. A lumped gate resistor 178 is defined in the polysilicon layer 170 directly beneath the inner dielectric pattern 152 .

[0122] An outer contact 182 surrounds the inner contact 180 within the active area of ​​the MOSFET 100A (here, within the gate pad region of the device). The resistance of the lumped gate resistor 178 may depend only on the width of the gap between the inner contact 180 and the outer contact 182 and the sheet resistance of the material from which the lumped gate resistor 178 is formed (in this example, polysilicon, although other materials may be used). In particular, the resistance R of the lumped gate resistor 178 may be determined as follows: R=Rsh / [2π * ln(R2 / R1)]

[0123] In the above equation, Rsh is the sheet resistance of the material used to form the lumped gate resistor 178, R1 is the outer radius of the inner contact 180, and R2 is the inner radius of the outer contact 182. The resistance of the lumped gate resistor 178 depends on only one parameter (i.e., the width of the gap R2 / R1) that is affected by manufacturing tolerances, and the resistor 178 may exhibit less variation in resistance due to manufacturing tolerances.

[0124] Additional embodiments of the present invention are described below with reference to Figures 4-10. In these figures and the accompanying description, the same reference numerals are used to discuss the same elements as described above with reference to Figures 3A-3F, although in the embodiments of Figures 4A-10, the shape and / or configuration of some of these elements will differ from that shown in Figures 3A-3F.

[0125] Figures 4A-4C schematically illustrate a power MOSFET 100B according to a further embodiment of the present invention. In particular, Figure 4A is a schematic plan view of power MOSFET 100B, Figure 4B is a schematic horizontal cross-section of a region of the power MOSFET labeled "C" in Figure 4A, the cross-section being taken at a level within the device just above the polysilicon layer underlying the gate pad, and Figure 4C is a schematic vertical cross-section taken along line 4C-4C in Figure 4B. The cross-sections in Figures 4B and 4C correspond to the cross-sections in Figures 3D and 3E for MOSFET 100A.

[0126] MOSFET 100B may be substantially identical to MOSFET 100A of FIGS. 3A-3F , with the primary difference that gate bond pad 110 is formed at or near the edge of the device, rather than in the central region of the device (i.e., away from the edge) as in MOSFET 100A. When gate bond pad 136 is formed near the edge of the device, circular gate resistor 178 of MOSFET 100A may be replaced by gate resistor 178 having, for example, a semicircular ring shape. In particular, as shown in FIGS. 4B and 4C , to define gate resistor 178 having a semicircular ring shape in polysilicon layer 170, the lower portion of inner ring 152 of inter-metal dielectric pattern 150 has a semicircular ring shape (as viewed from above). Gate pad 136, inner contact 180, outer contact 182 (which is the lower portion of gate bus 138), and gate bus 138 also each have a semicircular ring shape (as viewed from above).

[0127] The resistance of the lumped gate resistor 178 depends on the width of the gap between the inner contact 180 and the outer contact 182 and the sheet resistance of the material from which the lumped gate resistor 178 is formed. In particular, the resistance R of the lumped gate resistor 178 can be determined as follows: R=[2 * Rsh] / [2π * ln(R2 / R1)]

[0128] Thus, gate resistor 178 may be less susceptible to variations due to manufacturing tolerances than the conventional lumped gate resistor 78 described above with reference to Figures 2A-2H.

[0129] As described above, the lower portion of the inner ring 152 of the inter-metal dielectric pattern 150 defines the shape of the upper surface of the lumped gate resistor 178. As shown in FIG. 4B , a first end of the lower portion of the inner ring 152 of the inter-metal dielectric pattern 150 extends to an edge of the MOSFET 100B, and an opposing second end of the lower portion of the inner ring 152 of the inter-metal dielectric pattern 150 also extends to the same edge of the MOSFET 100B. As a result, the first end and the opposing second end of the lumped gate resistor 178 each extend to the periphery of the MOSFET 100B, more specifically, to a common edge of the MOSFET 100B. Also, as can be seen in FIGS. 4B and 4C , the outer contact 182 surrounds the inner contact 180 within the inactive gate pad region of the MOSFET 100B. In this embodiment, the outer contact 182 does not completely surround the inner contact 180 as in MOSFET 100A; instead, the outer contact 182 extends to the edge of the device, thereby surrounding the inner contact 180 within the inactive gate pad area, such that the outer contact 182 and the edge of the device surround the inner contact 180. As noted above, the term "surrounded" means that the outer contact (possibly in combination with the edge of the device) surrounds the inner contact in a horizontal cross section through the device. Thus, it will be appreciated that references to the outer contact surrounding or encircling the inner contact mean surrounding or encircling the inner contact in two dimensions, as opposed to surrounding or encircling the inner contact in all three dimensions.

[0130] Figures 5A-5C schematically illustrate a power MOSFET 100C according to yet another embodiment of the present invention. In particular, Figure 5A is a schematic plan view of power MOSFET 100C, Figure 5B is a schematic horizontal cross-sectional view of a region of the power MOSFET labeled "D" in Figure 5A, with the cross-section taken at the level of the intermetal dielectric layer underlying the gate pad, and Figure 5C is a schematic vertical cross-sectional view taken along line 5C-5C in Figure 5B. The cross-sections in Figures 5B and 5C correspond to the cross-sections in Figures 3D and 3E for MOSFET 100A.

[0131] MOSFET 100C may be substantially identical to MOSFET 100A of FIGS. 3A-3F , with the primary difference that gate bond pad 110 is formed at a corner of the device, rather than in a central region of the device (i.e., away from the edge) as in MOSFET 100A. When the gate bond pad is formed at a corner of the device, circular gate resistor 178 of MOSFET 100A may be replaced by a gate resistor 178 having the shape of a quarter-circular ring in a top view. In particular, as shown in FIGS. 5B and 5C , the lower portion of inner ring 152 of inter-metal dielectric pattern 150 extends through approximately one-quarter of a circle to define gate resistor 178 in polysilicon layer 170, comprising approximately one-quarter of an annular ring. Gate pad 136, inner contact 180, outer contact 182 (which is the lower portion of gate bus 138), and gate bus 138 also each have the shape of one-quarter of a circular ring in a top view (plan view).

[0132] The resistance of the lumped gate resistor 178 depends on the width of the gap between the inner contact 180 and the outer contact 182 and the sheet resistance of the material from which the lumped gate resistor 178 is formed, and therefore can be less susceptible to manufacturing tolerance variations than conventional lumped gate resistors. In particular, the resistance R of the lumped gate resistor 178 can be determined as follows: R=[4 * Rsh] / [2π * ln(R2 / R1)]

[0133] A first end of the lower portion of the inner ring 152 of the inter-metal dielectric pattern 150 extends to a first edge of the MOSFET 100C, and a second end of the lower portion of the inner ring 152 of the inter-metal dielectric pattern 150 extends to a second edge of the MOSFET 100B. The second edge is adjacent to the first edge. Thus, the first and second ends of the lumped gate resistor 178 each extend to the periphery of the MOSFET 100C. An outer contact 182 again surrounds the inner contact 180 within the inactive gate pad region of the MOSFET 100C.

[0134] It will be appreciated that lumped gate resistors according to the present invention may have shapes other than that of a circular ring. For example, as discussed above, in some embodiments, the lumped gate resistor may have the shape of an elliptical ring when viewed from above. FIGS. 6A-6B illustrate a MOSFET 100D that is similar to MOSFET 100A of FIGS. 3A-3F except that, unlike the annular ring shape of resistor 178 of MOSFET 100A, lumped gate resistor 178 has a non-circular elliptical ring shape. FIG. 6A is a schematic horizontal cross-sectional view of power MOSFET 100D corresponding to the horizontal cross-section of FIG. 3D of MOSFET 100A. FIG. 6B is a vertical cross-sectional view taken along line 6B-6B of FIG. 6A.

[0135] 6A-6B, it can be seen that MOSFET 100D can be identical to MOSFET 100A, except that gate bus 138 (including its lower portion which functions as outer contact 182), inner ring 152 of inter-metal dielectric pattern 150, inner contact 137 of gate pad 136 (which functions as inner contact 180), and lumped gate resistor 178 are all formed to have the shape of elliptical rings when viewed from above (or in horizontal cross section), and the major and minor axes of these ellipses are not equal (i.e., the elliptical rings are not annular rings). In MOSFET 100D, the width of the lower surface of inner ring 152 of inter-metal dielectric pattern 150 is constant. Note that for simplicity of the drawings, only a circular gate bus 138 is shown in FIGS. 6A-6B. It will be appreciated that an additional gate bus may extend from circular gate bus 138 through the entire active area of ​​MOSFET 100D in a similar manner as such an additional gate bus 138 is included in MOSFET 100A of Figures 3A-3F.

[0136] 6A-6B show MOSFETs having a lumped gate resistor 178 extending through a complete elliptical ring (where the major and minor axes of the ellipse defining the ring are not equal), it will be appreciated that embodiments of the invention are not so limited. For example, corresponding MOSFETs may be provided having a lumped gate resistor in the shape of a semicircular ring (corresponding to MOSFET 100B where the major and minor axes of the ellipse defining the ring are not equal), or a lumped gate resistor in the shape of a quarter-circular ring (corresponding to MOSFET 100C where the major and minor axes of the ellipse defining the ring are not equal).

[0137] In yet another embodiment of the present invention, the lumped gate resistor may have a partially or completely linear shape. FIGS. 7A-7C are horizontal cross-sectional views of MOSFETs according to further embodiments of the present invention, each having a lumped gate resistor with such a shape. The horizontal cross-sectional views in FIGS. 7A-7C are each taken through a lower portion of inner ring 152 of inter-metal dielectric layer 150 (or a partial ring of a device where the gate pad is formed along the edge or at a corner of the device). The cross-sections in FIGS. 7A-7C thus correspond to the horizontal cross-sections in FIGS. 3D, 4B, 5B, and 6A above. The MOSFETs of FIGS. 7A-7C may be identical to their counterparts in MOSFETs 100A, 100B, or 100C (depending on where the gate pad is formed) except with respect to the design of their lumped gate resistors (as well as the designs of inner contact 180, the lower portion of inner ring 152 of inter-metal dielectric pattern 150, and outer contact 182) that define lumped gate resistor 178.

[0138] Referring to FIG. 7A , a MOSFET 100E is shown in which the lumped gate resistor 178 has a rectangular shape. It will be appreciated that the lumped gate resistor 178 is not visible in the cross section of FIG. 7A because it is located below the inner ring 152 of the inter-metal dielectric pattern 150. The shape of the lumped gate resistor 178 of the MOSFET 100E is identical to the shape of the lower portion of the inner ring 152 of the inter-metal dielectric pattern 150. Notably, the lumped gate resistor 178 of the MOSFET 100E does not have curved sidewalls. Because the width of the gap between the inner contact 180 and the outer contact 182 is a constant distance W, the width of the lumped gate resistor 178 is also constant. The embodiment of FIG. 7A may be particularly suitable for MOSFETs in which the gate pad 136 is located at a corner of the device.

[0139] Referring to FIG. 7B , a MOSFET 100F is shown in which the lumped gate resistor 178 has a generally “L” shape, but the inner and outer corners of the “L” are rounded. It will be appreciated that the lumped gate resistor 178 is not visible in the cross section of FIG. 7B because it is located below the inner ring 152 of the inter-metal dielectric pattern 150. The width of the gap between the inner contact 180 and the outer contact 182 is again a constant distance W, and therefore the width of the lumped gate resistor 178 is also constant. The embodiment of FIG. 7B illustrates that the inner contact 180, the outer contact 182, the inner ring 152 of the inter-metal dielectric pattern 150, and the lumped gate resistor 178 can have sidewalls that are a combination of straight and curved surfaces. The embodiment of FIG. 7B may be particularly suitable for MOSFETs in which the gate pad 136 is located at a corner of the device.

[0140] Referring to Figure 7C, a MOSFET 100G is shown in which the inner ring 152 of the inter-metal dielectric pattern 150 (and therefore the underlying lumped gate resistor 178) has the shape of a hexagonal ring in top view. The width of the gap between the inner contact 180 and the outer contact 182 is again a constant distance W, and therefore the width of the lumped gate resistor 178 is also constant. The embodiment of Figure 7C may be particularly suitable for MOSFETs in which the gate pad 136 is located in a central region of the device.

[0141] It will also be appreciated that the width of the gap between the inner contact 180 and the outer contact 182 need not be a constant distance. FIG. 8 illustrates an embodiment in which the inter-metal dielectric pattern 150 (and therefore the underlying lumped gate resistor 178) has a non-constant width. The embodiment shown in FIG. 8 corresponds to the embodiment of FIG. 7B above, except that in the embodiment of FIG. 8, the distance between the inner contact 180 and the outer contact 182 is reduced in the "corner" region of the lower portion of the inner ring 152. By reducing the width of the "gap," higher current densities can be obtained through this region. It will be appreciated that all of the above embodiments can be modified to have a non-constant gap between the inner contact 180 and the outer contact 182, such that the width of the lumped gate resistor is non-constant.

[0142] 9A and 9B are schematic cross-sectional views corresponding to FIGS. 3D and 3E, respectively, showing a MOSFET 100I according to an embodiment of the present invention having an alternative design for the inner contacts for the lumped gate resistor. As shown in FIGS. 9A and 9B, MOSFET 100I may be identical to MOSFET 100A of FIGS. 3A-3F, except that the annular inner contact 137 of MOSFET 100A is replaced with a pair of spaced-apart annular inner contacts in MOSFET 100I. When the device is operating normally, all of the current flows through the outer of the two inner contacts (i.e., inner contact 137a), and MOSFET 100I operates in the same manner as MOSFET 100A. However, if outer inner contact 137a fails for any reason, second inner contact 137b will continue to provide a current path from the gate pad to the gate fingers, allowing MOSFET 100I to operate. Under these circumstances, the lumped gate resistor 178 will not have an ideal resistance (due to the longer current path through the polysilicon layer 170).

[0143] While the above discussion has focused primarily on planar MOSFETs, it will be appreciated that all of the disclosed embodiments may similarly be used in MOSFETs in which gate fingers are formed in trenches in a semiconductor layer structure. For example, FIG. 10 is a schematic cross-sectional view of a MOSFET 1' that is a modified version of the conventional MOSFET 1 shown in FIG. 1C. Rather than having planar gate fingers 34 formed on the semiconductor layer structure 20, the MOSFET 1' of FIG. 10 includes gate fingers 34' formed in trenches 21 within the semiconductor layer structure 20. As shown in FIG. 10, MOSFET 1' may be very similar to MOSFET 1 of FIG. 1C, except that multiple trenches 21 are etched (or otherwise formed) in the semiconductor layer structure 20, and then gate insulation fingers 32 and gate fingers 34' are formed in each trench 21. Additionally, p-type guard regions 29 may be formed beneath all or a portion of each trench 21 to protect the gate insulation fingers 32 during reverse bias operation, and p-type connection regions 31 may be provided to electrically connect the p-type guard regions 29 to the source metallization 60. It will thus be appreciated that gate resistors according to embodiments of the present invention may be implemented not only in devices having planar gate fingers, but also in gate-controlled devices having gate trenches, such as the device of FIG.

[0144] Similarly, while the discussion herein focuses on power MOSFET devices, it will be appreciated that the techniques disclosed herein are not limited to such devices. For example, the techniques disclosed herein may be used with IGBT devices, JFETs, thyristors, GTOs, or any other gate-controlled devices.

[0145] While the MOSFETs described above were n-type devices with source bond pads on their top side and drain pads on their bottom side, it will be appreciated that in p-type devices, these locations may be reversed. Furthermore, while the power MOSFETs and other devices described herein were silicon carbide-based semiconductor devices, it will be appreciated that embodiments of the present invention are not so limited. Alternatively, the semiconductor devices may comprise any wide bandgap semiconductor suitable for use in power semiconductor devices, including, for example, gallium nitride-based semiconductor devices and II-VI compound semiconductor devices.

[0146] As used herein, the term "horizontal cross section" refers to a cross section taken along a plane parallel to the plane defined by the bottom surface of the semiconductor layer structure.

[0147] The present invention has been described above with reference to the accompanying drawings, in which embodiments of the invention are shown. However, the present invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the sizes and relative sizes of layers and regions may be exaggerated for clarity. When an element or layer is referred to as being "on," "connected," or "coupled" to another element or layer, it will be understood that the element may be directly on, connected, or coupled to that other element or layer, or that intervening elements or layers may be present. Conversely, when an element is referred to as being "directly on," "directly connected," or "directly coupled" to another element or layer, there are no intervening elements or layers present. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items. Like numbers refer to like elements throughout.

[0148] In this specification, the terms "first" and "second" are used to describe various regions, layers, and / or elements, but it is understood that these regions, layers, and / or elements should not be limited by these terms. These terms are used only to distinguish one region, layer, or element from another region, layer, or element. Thus, without departing from the scope of the present invention, a first region, layer, or element discussed below may also be termed a second region, layer, or element, and similarly, a second region, layer, or element may also be termed a first region, layer, or element.

[0149] As used herein, relative terms such as "lower" or "bottom" and "upper" or "top" may be used to describe the relationship of one element to another, as shown in the figures. It will be understood that the relative terms are intended to encompass different orientations of the device in addition to the orientation shown in the figures. For example, if a device in the figures were inverted, elements described as being "below" other elements would then be oriented "above" the other elements. Thus, the illustrative term "lower" encompasses both an "lower" and an "upper" orientation, depending on the particular orientation of the figure. Similarly, if a device in one of the figures were inverted, elements described as being "below" or "beneath" other elements would then be oriented so that they are "above" the other elements. Thus, the illustrative terms "lower" or "lower" encompass both an above and below orientation.

[0150] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the present invention. As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. The terms "comprises," "comprising," "includes," and / or "including," as used herein, specify the presence of stated features, elements, and / or components but do not exclude the presence or addition of one or more other features, elements, components, and / or groups thereof.

[0151] Embodiments of the invention are described herein with reference to cross-sectional views that are schematic illustrations. As such, variations from the shapes depicted as a result of manufacturing techniques and / or tolerances are to be expected. Accordingly, embodiments of the invention should not be construed as limited to the particular shapes of regions illustrated herein but are intended to include, for example, deviations in shapes that result from manufacturing. For example, an implanted region illustrated as a rectangle will typically have rounded or curved features and / or implant concentration gradients at its edges rather than a binary transition from implanted to non-implanted region. Thus, the regions illustrated in the figures are schematic in nature, and their shapes are not intended to represent the actual shape of a region of a device, nor are they intended to limit the scope of the invention.

[0152] It will be understood that the embodiments disclosed herein may be combined, and thus, features depicted and / or described with respect to a first embodiment may also be included in a second embodiment, and vice versa.

[0153] While the above embodiments have been described with reference to certain figures, it should be understood that some embodiments of the invention may include additional and / or intervening layers, structures, or elements, and / or omit certain layers, structures, or elements. While several exemplary embodiments of the invention have been described, those skilled in the art will readily appreciate that many modifications can be made in the exemplary embodiments without significantly departing from the novel teachings and advantages of the present invention. Accordingly, all such modifications are intended to be included within the scope of the present invention, as defined by the claims. Accordingly, the foregoing description is illustrative of the invention and should not be construed as limited to the particular embodiments disclosed; modifications to the disclosed embodiments, as well as other embodiments, are intended to be included within the scope of the appended claims. The present invention is defined by the following claims, including equivalents of the claims.

Claims

1. a semiconductor layer structure; a gate structure overlying the semiconductor layer structure, the gate structure comprising a dielectric pattern having curved inner and outer sidewalls and a lumped gate resistor directly beneath the dielectric pattern; Equipped with Semiconductor devices.

2. 2. The semiconductor device of claim 1, wherein the lumped gate resistor is a portion of the semiconductor layer directly below the dielectric pattern, and wherein opposing first and second sidewalls of the lumped gate resistor are substantially aligned with opposing first and second sidewalls of the dielectric pattern.

3. 3. The semiconductor device of claim 2, wherein the gate structure further comprises a gate pad, one or more gate buses, and a plurality of gate fingers, and the lumped gate resistor is electrically interposed between the gate pad and the one or more gate buses.

4. 4. The semiconductor device of claim 3, wherein the gate pad and the one or more gate buses each comprise a metal.

5. 10. The semiconductor device of claim 1, wherein the lumped gate resistor is on top of a field oxide layer.

6. 4. The semiconductor device of claim 3, wherein at least a portion of the dielectric pattern underlies the gate pad.

7. 4. The semiconductor device of claim 3, wherein the gate pad is located at the center of the semiconductor device when viewed from above.

8. 2. The semiconductor device of claim 1, wherein a first end and an opposing second end of the lumped gate resistor each extend to a periphery of the semiconductor device.

9. The semiconductor device of claim 1 , wherein the dielectric pattern further comprises a linear inner wall and a linear outer wall.

10. A semiconductor device comprising: a semiconductor layer structure; a gate structure including a lumped gate resistor above the semiconductor layer structure; Equipped with A semiconductor device, wherein a first end and an opposing second end of the lumped gate resistor each extend to a periphery of the semiconductor device.

11. The semiconductor device of claim 10 , wherein the first end extends to a first edge of the semiconductor device and the second end also extends to a first edge of the semiconductor device.

12. The semiconductor device of claim 10 , wherein the first end extends to a first edge of the semiconductor device and the second end extends to a second edge of the semiconductor device.

13. The semiconductor device of claim 10 , wherein a dielectric pattern defining a portion of an elliptical ring is positioned directly above the lumped gate resistor.

14. 11. The semiconductor device of claim 10, wherein the gate structure further comprises an outer contact connecting to an outer edge of the lumped gate resistor and an inner contact connecting to an inner edge of the lumped gate resistor.

15. 15. The semiconductor device of claim 14, wherein the lumped gate resistor comprises a first material having a first sheet resistance, and the inner contact and the outer contact each comprise a material having a sheet resistance less than the first sheet resistance.

16. The semiconductor device of claim 13 , wherein the dielectric pattern has inner sidewalls that include straight and curved portions.

17. A semiconductor device comprising: a semiconductor layer structure having an active region with a plurality of unit cell transistors and an inactive gate pad area; The inner contact and Outer contact and a gate resistor layer disposed above the semiconductor layer structure and electrically connecting the inner contact and the outer contact; Equipped with A semiconductor device, wherein in a horizontal cross section of the semiconductor device, the inner contact is located at the center of the semiconductor device when viewed from above, and the outer contact surrounds the inner contact.

18. 20. The semiconductor device of claim 17, wherein the lumped gate resistor comprises an annular ring.

Images