Sample inspection system and sample inspection method

Abstract

To apply a wavelength converter in a sample inspection system.SOLUTION: Ellipsometer, polarimeter, reflectometer and spectrophotometer systems includes one or more wavelength converters positioned before a stage of a sample inspection system to convert a wavelength provided by a source of electromagnetic radiation to a different wavelength used to inspect a sample and / or applied after a stage of the sample inspection system to convert the wavelength to a different wavelength that can be detected by a detector. For example, the range of IR and THZ systems can be extended to the visible region.SELECTED DRAWING: Figure 9

Description

[Technical Field]

[0001] This application is a continuation of provisional applications 63 / 143,187 and 63 / 143,202, filed on January 29, 2021. Claiming benefit of 63 / 259,830 filed 1 / 8 / 17.

[0002] ellipsometers, polarimeters, reflectometers, which include one or more wavelength converters for converting wavelengths; and spectrophotometer systems provide electromagnetic radiation sources with different wavelengths for use in examining samples. Thus, the detector can provide and / or detect. [Background technology]

[0003] The use of electromagnetic radiation to examine samples is well known. For example, reflectometers, spectrophotometers, ellipsometers, polarimeter systems, and systems that interact with the sample (in reflection and / or transmission) A beam of electromagnetic radiation is directed so that it is incident on a detector. The result of said interaction is intensity (in reflectometer and spectrophotometer systems) and area (in reflectometer and spectrophotometer systems). The detected change in the polarization state (in the polarimeter and polarimeter systems) Provides insight into the properties of the absorption constant, ellipsometric psi and delta, etc. The properties of a sample are typically determined by performing a mathematical regression of the accumulated data on a mathematical model. It is evaluated by:

[0004] A source of electromagnetic radiation containing the desired wavelength is provided and the beam is directed to interact with the sample. It has been conventional practice to direct the beam and then allow it to enter the detector. If the wavelength to be detected is, for example, in the infrared (IR) or terahertz (THZ) range, They require special detector systems (e.g., Golay cells or bolometers). Detectors for IR and THZ wavelengths are suitable for detecting wavelengths in the visible range, e.g. These detectors are much more difficult to utilize than solid-state detectors. The present invention recognizes this and uses, for example, IR or 100 MHz wavelengths and provides, for example, IR and visible wavelengths derived from the 100 MHz wavelengths. Furthermore, a wavelength converter is provided for detecting light using a system that provides IR or THZ wavelengths. Inspectors may wish to easily extend the inspection to include, for example, visible wavelengths. In such cases, a wavelength converter can be applied before the sample. An example of a currently available wavelength converter that converts to near-visible wavelengths is the one developed by the Danish company NLIR. Therefore, a data sheet is provided in the information disclosure.

[0005] The present invention is protected for patentability by the provisions of the ellipsometer, polarimeter, reflectometer, and spectrophotometer systems. Although this paper focuses on the use of wavelength converters in systems, it also covers other fields, such as electromagnetic radiation sources and their detectors. There is also the topic of ancillary issues. Regarding upconversion, wavelength converters Apparently, this is achieved by exploiting the properties of surface states in semiconductors. Nona, Department of Computer and Electrical Engineering, UCLA Jarrahi explains that when struck by incoming light, electrons in the semiconductor lattice jump around the lattice. The electric field also increases the energy When electrons lose energy through photon emission, they become a different wavelength .

[0006] Subsequently, multiple angles of incidence of the beam on the sample surface are used to measure as many wavelengths as possible. In this document (for use with wavelength converters), it is always beneficial to inspect the sample. No preferred light source has been identified (other than that determined to be suitable), but The latter point is addressed by using a beamed source of electromagnetic radiation called a nuclear laser. For more information on supercontinuum sources, see Van Derslice See Patent No. 11 / 035,729. Supercontinuum Laser Spectroscopy The formation of the superconducting sphere is the result of many complex nonlinear effects. Regardless of how the ion is generated, it can be measured by reflectometers, spectrophotometers, ellipsometers, This need not be of concern with respect to the present invention, which can be applied to a polarimeter, a polarimeter, or the like. Again, the present invention relates to the use of wavelength converters in such sample inspection systems.

[0007] Application of wavelength converters in ellipsometer, polarimeter, reflectometer, and spectrophotometer systems A search for patents for this purpose turns up nothing. However, the closely related field In our previous patents in For example, see Patent Document 1 by Knight et al., Patent Document 2 by Clowes et al. Patent Document 2 by Clowes et al., Patent Document 3 by Liphardt et al. Patent Document 4 and Patent Document 5 by LeVan are disclosed. Further patent documents identified include (Supercontinuum Laser and A search for the Ellipsometer revealed five patents (see Patent Documents 6 to 10) and six Patent documents 11 to 16 are cited in the following publications: &Laser and Ellipsometer and Speckle) Search There are only four publications (see Patent Documents 17 to 20). Known patents and publications relating to reduction include U.S. Pat. No. 5,629,499 to Jacob et al., Lapchuk et al., U.S. Pat. No. 5,629,999, Moussa, U.S. Pat. No. 5,629,999, Lizotte et al. and U.S. Patent No. 5,949,999 to Curtis.

[0008] Furthermore, in the prosecution of parent application 14 / 757,280, the examiner stated that Hilfiker et al. Patent Document 26 of Herzinger, Patent Document 27 of Pandev, Patent Document 28 of O Patent Document 29 of Stermeyer, Patent Document 30 of Johs, Patent Document 4 of Moriva et al. Patent Document 31, Patent Document 32 to Grejeda, and Patent Document 33 to Yamaguchi et al. Ta.

[0009] It also uses three laterally stacked subgratings to generate three wavelength ranges. There is a paper known that discloses a special grating with a slit (see Non-Patent Document 1). see).

[0010] The wavelength converter is applied after the stage of the sample inspection system and provides the The wavelength provided can be changed to a wavelength that the detector can detect after interaction with the sample. It should be understood that wavelength converters can also shift the wavelengths used in sample testing. It should also be understood that the sample may be placed in front of the stage of the sample inspection system to allow for The latter effect can be used to extend the range of, for example, IR and THZ systems into the visible range.

[0011] Considering the known prior art, ellipsometers, polarimeters, reflectometers, and spectrophotometers In a sample inspection system, either the detector side of the system stage or its light source side There remains a need for the benefits provided by using wavelength converters in [Prior art documents] [Patent documents]

[0012] [Patent Document 1] U.S. Patent No. 8,442,519 [Patent Document 2] U.S. Patent No. 8,718,104 [Patent Document 3] U.S. Patent Publication 2014 / 0233091 [Patent Document 4] U.S. Patent No. 7,345,762 [Patent Document 5] U.S. Patent No. 6,104,488 [Patent Document 6] U.S. Patent No. 9,080,971 [Patent Document 7] U.S. Patent No. 8,873,054 [Patent Document 8] U.S. Patent No. 8,841,639 [Patent Document 9] U.S. Patent No. 8,031,337 [Patent Document 10] U.S. Patent No. 7,570,358 [Patent Document 11] U.S. Patent Publication 2015 / 0323316 [Patent Document 12] U.S. Patent Publication 2015 / 0036142 [Patent Document 13] U.S. Patent Publication 2013 / 0222795 [Patent Document 14] U.S. Patent Publication 2011 / 0069312 [Patent Document 15] U.S. Patent Publication 2009 / 0262366 [Patent Document 16] U.S. Patent Publication 2008 / 0239265 [Patent Document 17] U.S. Patent Publication 2015 / 0058813 [Patent Document 18] U.S. Patent Publication 2015 / 0046121 [Patent Document 19] U.S. Patent Publication 2015 / 0046118 [Patent Document 20] U.S. Patent Publication 2015 / 0330770 [Patent Document 21] U.S. Patent No. 6,895,149 [Patent Document 22] U.S. Patent No. 7,522,331 [Patent Document 23] U.S. Patent Publication 2013 / 0027673 [Patent Document 24] U.S. Patent Publication 2006 / 0238743 [Patent Document 25] U.S. Patent Publication 2013 / 0010365 [Patent Document 26] U.S. Patent Publication 2012 / 0057158 [Patent Document 27] U.S. Patent Publication 2013 / 0026368 [Patent Document 28] U.S. Patent Publication 2013 / 0304408 [Patent Document 29] U.S. Patent Publication 2013 / 0268336 [Patent Document 30] U.S. Patent Publication 2015 / 0219497 [Patent Document 31] U.S. Patent Publication 2009 / 0267003 [Patent Document 32] U.S. Patent Publication 2014 / 0304963 [Patent Document 33] U.S. Patent Publication 2013 / 0063700 [Patent Document 34] U.S. Patent No. 8,169,611 [Non-patent literature]

[0013] [Non-Patent Document 1] “A New Speccrometer Using Multiple Gratings With A Two-Dimensional Charge-Coupled Diode Array Detector”, Han et al.,Vol.74,No.6,June 2003 Summary of the Invention

[0014] First, as in co-pending application Ser. No. 16 / 602,088, the sample testing system of the present invention The systems and methods of use are various combinations of at least three different sub-inventive areas: It should be understood that these are constructed from and can be derived from a combination of in combinations that can be optimized for use in various ranges of electromagnetic radiation wavelengths Application of detector systems; A small amount of electromagnetic radiation, possibly in combination with other sources over an extended wavelength range. Provides a beam of coherent electromagnetic radiation over a wavelength range of at least 400-4400 nm Use of a supercontinuum laser to Supercontinuity in systems such as ellipsometers, reflectometers, and spectrophotometers More consistent intensity versus position within the beam of electromagnetic radiation derived from the microwave laser output. of speckle reducer with supercontinuum laser source for efficient delivery is.

[0015] However, the invention disclosed herein also has additional sub-inventive areas: Chi, For example, electromagnetic radiation of relatively long wavelengths that cannot be detected by solid-state detector elements (e.g., infrared radiation) (IR) and terahertz (THZ) ranges), e.g., solid-state (or other types ) application of a wavelength converter to provide electromagnetic radiation of a relatively short wavelength that can be detected by the detector element; Golay cells, bolometers, microbolometers, thermocouples; photoconductive materials; deuterated sulfur Triglycine trioxide (DTGS);HgCdTe(MCT);LiTaO3;PbSe;Pb Electromagnetic radiation of relatively long wavelengths that can be detected by detectors such as S; and InSb. Application of wavelength converters to receive relatively short wavelength electromagnetic radiation, which has the problem of providing ; is.

[0016] Further sub-areas of invention are: Application of supercontinuum laser sources providing wavelengths up to approximately 18,000 nm; Superconducting ion beams to extend the wavelength range over which the sample inspection system of the present invention can be used Additional types of electromagnetic radiation sources in combination with or instead of continuum lasers application (e.g., wavelengths from 14000 nm to 50000 nm, respectively, Nernst-Glower and Globar and other light sources or other light sources including DTHS Possible light sources: laser stabilized arc lamp, Hg arc lamp, fixed or tunable quantum Cascade lasers, QTH and Xe lamps, laser stabilized arc lamps, and other laser drivers source); Systems such as ellipsometers, reflectometers, and spectrophotometers in combination with other discriminators that are not previously disclosed in the context of their application in the Superconversion in Fourier transform infrared sources by combining with a Wilson interferometer Application of niuon laser; is.

[0017] The subcategories of the invention, in various combinations, are novel, innovative, and non-obvious samples. and a novel, non-obvious, and useful method for using the same. .

[0018] The invention claimed in this application is used to inspect a sample using electromagnetic radiation. of, ellipsometer; Polarimeter; reflectometer; and spectrophotometer The present invention focuses on a sample testing system selected from the group consisting of: Electromagnetic Light Source (LS); a stage (STG) for supporting the sample; and a detector (PA) comprising detector elements (DE); Equipped with.

[0019] In an important embodiment, the light source (LS) of the system is a long wavelength electromagnetic radiation in the IR and THZ range. The detector is a solid-state element (DE) that is incapable of detecting the IR and THZ wavelengths. However, the system includes a detector (PA) before the detector (PA). and receiving electromagnetic radiation of wavelengths outside the range of the detector element (DE) of the detector element ( at least one wave form for providing output electromagnetic radiation of a wavelength that can be detected by the detector (DE); It is characterized by the presence of a long transducer (WM).

[0020] The system includes a polarization state generator (PSG) and a stage generator (STG) before and after the stage (STG). The system may further comprise elements of an optical fiber and a polarization state analyzer (PSA), in which case the system It is a lipometer.

[0021] The system includes at least one wavelength converter (WM) for converting wavelengths in the IR and THZ regions. and outputting electromagnetic radiation having a wavelength in the visible wavelength range. It is possible.

[0022] The system includes at least one wavelength converter (WM) that converts light into electricity having wavelengths in the far infrared region. receiving electromagnetic radiation and outputting electromagnetic radiation having a wavelength in the visible wavelength range; can be done.

[0023] The system includes at least one wavelength converter (WM) for converting light having wavelengths in the mid-infrared region. receiving electromagnetic radiation and outputting electromagnetic radiation having a wavelength in the visible wavelength range; can be done.

[0024] The system includes at least one wavelength converter (WM) for converting light having wavelengths in the near infrared region. receiving electromagnetic radiation and outputting electromagnetic radiation having a wavelength in the visible wavelength range; can be done.

[0025] The system uses different wavelengths to present to multiple elements (DE) of a detector (PA). and a dispersive optical system (DO) between the stage and the detector for providing a sufficient separation between the detector and the stage. It is possible.

[0026] The wavelength converter comprises: Between the light source (LS) and the stage (STG); Between the stage (STG) and the dispersion optical system (DO); Between the dispersive optics (DO) and the detector (PA); The distance between the first and second electrodes can be selected from the group consisting of:

[0027] The present invention also provides ellipsometer; Polarimeter; reflectometer; and spectrophotometer; A sample inspection system for inspecting a sample using electromagnetic radiation, selected from the group consisting of: The system comprises: Electromagnetic Light Source (LS); a stage (STG) for supporting the sample; and a detector (PA); Equipped with.

[0028] The light source (LS) of the system is longer than the detector elements (DE) can detect, or The system can provide electromagnetic radiation in the short wavelength range, and the system can provide a Electromagnetic waves of wavelengths outside the range of the detector (PA) that the state elements (DE's) can detect. and receiving radiation and providing output electromagnetic radiation of a wavelength that can be detected by said solid-state element (DE). The wavelength converter (WM) is a wavelength converter for converting wavelengths of light emitted from a laser beam into light having wavelengths of 1000 MHz or less.

[0029] The system comprises a light source (LS): UV rays; visible light; Far infrared rays; Mid-infrared; Terahertz waves; and providing electromagnetic radiation having a wavelength in a range selected from: UV rays; visible light; Far infrared rays; Mid-infrared; Terahertz waves; and detecting wavelengths in a range selected from the range of: The long range is different from that provided by the light source (LS).

[0030] The system includes a light source: Far infrared rays; Mid-infrared; Near infrared; and Terahertz waves; and wherein the wavelength converter provides a wavelength in a range selected from: ultraviolet light; and visible light providing a range of wavelengths selected from the group consisting of:

[0031] The present invention also provides a) For use in testing samples using electromagnetic radiation, ellipsometer; Polarimeter; reflectometer; and spectrophotometer; 1. A method of testing a sample, comprising providing a system comprising: Source of electromagnetic radiation (LS); a stage (STG) for supporting the sample; and a detector (PA) comprising detector elements (DE); The light source (LS) of the system is configured to emit more light than the detector elements (DE) can detect. The system can provide electromagnetic radiation in the long or short wavelength range, and the detector (P A) before the state element (DE's) can detect the wave outside the range of the detector (PA) The solid-state element (DE) receives electromagnetic radiation of a wavelength that can be detected by the solid-state element (DE). characterized by the presence of at least one wavelength converter (WM) for providing It can be done.

[0032] The method comprises the following steps:

[0033] b) placing the sample to be inspected on the stage (STG); c) providing said light source (LS) with electromagnetic radiation containing wavelengths that cannot be detected by said detector elements (DE); providing a beam of radiation and directing the beam towards the sample; d) connecting the wavelength converter to the light source (LS) from the sample. The detector element (DE) receives magnetic radiation wavelengths and converts them to wavelengths that the detector element (DE) can detect. to make; e) causing said detector elements to detect the converted electromagnetic radiation and provide output data. ru; f) analyzing the output data to determine sample characteristics;

[0034] The method further comprises the step of: the system includes a dispersive optics (DO) that spatially separates different electromagnetic wavelengths; It may be provided that it further comprises:

[0035] The wavelength converter (WM) is disposed between the light source (LS) and the stage or between the stage and the between the STG and the dispersion optical system (DO), or between the dispersion optical system (DO) and the detection It can be placed between the power amplifier (PA).

[0036] Inspecting a sample with electromagnetic radiation of a different wavelength than that provided by the electromagnetic radiation source Another method for doing this comprises the following steps:

[0037] a) For use in testing samples using electromagnetic radiation, ellipsometer; Polarimeter; reflectometer; and spectrophotometer; The system comprises: Source of electromagnetic radiation (LS); a stage (STG) for supporting the sample; and Detector (PA) with detector element (DE) Equipped with.

[0038] The light source (LS) of the system is longer than the detector elements (DE) can detect, or It provides electromagnetic radiation in the short wavelength range.

[0039] The system has a wavelength converter (WM) before the stage (STG). It can be characterized thus.

[0040] The method comprises the following steps:

[0041] b) placing the sample to be inspected on the stage (STG); c) causing the light source (LS) to provide electromagnetic radiation and direct the beam toward the sample; Orienting the FM; d) providing the wavelength converter with the light provided from the sample provided by the light source (LS); and outputting wavelengths in a converted region. ru; e) the detector element (DE) converts the converted light after interacting with the sample (MS) Detecting electromagnetic radiation; f) analyzing the output data to determine sample characteristics;

[0042] The method further comprises, between step c) and step d), adding the stage (STG) and the detection A second wavelength converter (WM) is disposed between the detector (PA) and the detector element ( a step of placing the wavelength from the sample (MS) within a range that can be detected by the detector (DE) ( c') may further be included.

[0043] The first invention claimed in this specification (electronic inspection at a point in a sample inspection system) Considering the use of a wavelength converter (WM) to change the wavelength of a magnetic wave, the present invention It will be appreciated that any electromagnetic wave source may be utilized to provide electromagnetic waves of the desired wavelength. For example, Ar, Xe, and He discharge lamps in the UV range; tungsten fill lamps in the visible range. lament lamps; and blackbody radiators in the infrared range, such as Nernst and Globar sources. Continuous light sources can be applied. Hg and Na lamps in the UV and visible range, as well as Line sources such as lasers in the visible and IR range can also be applied. The intensity of the beam of electromagnetic radiation from a -continuum laser is typically measured for applications such as ellipsometry. over a wider range of wavelengths than from other conventionally used electromagnetic radiation sources. The detector system of the present invention can benefit from the fact that the detection wavelengths around the wavelength range (usually from longer wavelengths, including converted wavelengths produced by wavelength converters) Electromagnetic radiation in wavelengths from 1000 to 20 ... The present invention can be used to provide optimized detection of various electromagnetic radiation sources and detectors. Easily sample over a wide range of wavelengths without the need to reconfigure the system with a detector It provides utility in the form of allowing users to test their stool. , other known light sources produce longer wavelengths than can currently be produced by supercontinuum lasers. It offers a wide wavelength range, but this will be ensured by improved supercontinuum lasers in the future. Therefore, the present invention provides an improved supercontinuum laser. To allow for sample inspection at longer / shorter wavelengths until a new wavelength is available The increase in the wavelength range of about 400 to 2500 nm about five years ago Currently available supercontinuum lasers have wavelengths up to at least 4400 nm. For example, NP Photonics SpectraC hrome 1000 Mid-IR Supercontinuum Lasers. Super-powered lasers provide wavelengths up to about 18,000 nm, although the intensity of the wavelengths decreases at the longest wavelengths. Note that continuum lasers are also available. IPG Photon The light source from ics (CLPF-2500-SC IDFG Series) is e.g. The plot is shown up to 18 microns. However, many such sources have The present invention is directed to any such possible superconducting It should be considered to encompass the continuum laser wavelength range.

[0044] (Sample inspection system) With the above in mind, the present invention first provides a method for manufacturing a semiconductor device comprising: reflectometer; spectrophotometer; ellipsometer; and Polarimeter;

[0023] The sample inspection system may be described as a sample inspection system selected from the group consisting of: a) a source of a spectral beam of electromagnetic radiation; b) a stage for supporting the sample; and c) an inspection system for monitoring electromagnetic radiation provided by a single sample; Equipped with.

[0045] The system may include a source of a spectral beam of electromagnetic radiation having a wavelength of from 400 to at least 4400 nm. provides a high-intensity, highly directional coherent spectrum of electromagnetic radiation wavelengths in the nm range, Interaction of pulsed lasers with nonlinear processes to broaden the spectrum , a supercontinuum laser, and the sample inspection system is a primary selection and characterized by at least one selection from the group, wherein the primary selection group is Given: (Primary Selection Group) In use, the source of said branched beam of electromagnetic radiation may be The sample is placed on the stage for supporting the sample, and the sample is then tilted at an angle relative to the stage. The beam is directed through a beam splitter and objective lens combination in that order. Does not include passing by; In use, fluorescence caused by an illuminating beam of electromagnetic radiation is emitted by the specimen. an illumination light path between the illumination means and the object, which is not detected by a detector for resolving the illumination light; A detection optical path between the object and a detector generates a light sheet of illumination light that traverses the illumination optical path. The axis of the detection optical path is the axis between the light sheet and the object to be detected. an illumination light path between the illumination means and the subject, the illumination light path being oriented substantially perpendicular to a cross-section of the body; A detection light path between the object and the detector generates a light sheet of illumination light transverse to the axis of the illumination light path. The detection optical path does not include an illumination optical system designed to The specimen is not oriented at an angle diverging θ degrees with respect to the cross section; and In use, the system is substantially made from chalcogenide glass. It consists of a pulsed laser adapted to pump a photonic crystal fiber. The supercontinuum light source is not used, or the second harmonic pulse is generated and the supercontinuum light source is used. Generates percontinuum terahertz radiation, AlClxBr(1-x), NaCl and ZnSe. Pumping CO2 lasers adapted for injection into a fiber or in a gas containment cell A method for transmitting femtosecond pulses through a nonlinear optical element disposed in an inert gas is provided. Systems containing integrated titanium:sapphire lasers are not utilized.

[0046] Note that two or all three choices can be made.

[0047] The sample inspection system may further include a speckle reducer, The interference reducer reduces interference between different coherent wavelengths in the broad spectrum. Strong fluctuations in the intensity of electromagnetic radiation as a function of time and position within the beam due to interference effects It works to reduce.

[0048] The sample inspection system includes a source of the electromagnetic radiation beam and a stage for supporting the sample. a polarization state generator between the stage supporting the sample and the detector; and a polarization state analyzer between the two, a photometer, optionally including a compensator in the polarization state generator and / or the polarization state detector; Prepare for this.

[0049] The sample inspection system includes a speckle reducer in the form of a multimode fiber. It is possible.

[0050] The sample inspection system includes a speckle reducer in the form of a beam diffuser. It is possible.

[0051] The sample inspection system includes speckle reduction in the form of a fly's eye beam homogenizer. It can be equipped with a device.

[0052] The sample inspection system includes a speckle reducer in the form of a rotating beam diffuser. can.

[0053] The sample inspection system includes a spectrometer in the form of a piezoelectric crystal-driven beam diffuser. A filter reducer may be provided.

[0054] The sample inspection system may include a form of electrical means for reducing the temporal coherence length. The speckle reducer may include:

[0055] The sample inspection system may further comprise one selected from the group consisting of:

[0056] The system further comprises a Michelson interferometer, a laser radiation source operatively associated therewith, said source being an FTIR light source; The system accepts relatively long (short) wavelength electromagnetic waves and a wavelength converter for providing a long output; the detector system comprises a single element; The detector system detects the wavelength of the signal coming from the wavelength converter when a relatively long (shorter) wavelength is input. a plurality of detector elements capable of detecting wavelengths emitted by the detector, the detectable wavelengths being: At least one beam splitter; at least one combined dichroic mirror and prism; and At least one grating; and the detector element is guided through at least one selection from the group consisting of: is a range longer or shorter than the wavelength provided by the supercontinuum laser The optical fiber further includes a second light source providing a wavelength within the wavelength range of 1000 .mu.m.

[0057] The method of the present invention for testing a sample comprises: a) Reflectometer; spectrophotometer; ellipsometer; and Polarimeter; providing a sample inspection system selected from the group consisting of: The inspection system is a´) a source of a spectral beam of electromagnetic radiation; b') a stage for supporting the sample; and c') a detector system for monitoring electromagnetic radiation provided by a single sample; Includes.

[0058] The system uses a spectroscopic beam source of high-intensity, highly directional electromagnetic radiation, a pulsed laser, and a nonlinear pulsed laser. Electromagnetic waves in the range from 400 to at least 4400 nm resulting from interactions with the process Provides a coherent spectrum of emitted wavelengths and interacts with pulsed lasers and nonlinear processes It is a supercontinuum laser that causes a wide spectrum expansion from the The stem may have a range longer or shorter than that provided by the supercontinuum laser. and a second light source providing a wavelength within the range of 1000 .mu.m, and the system further includes a second light source providing a wavelength within the range of 1000 .mu.m, and both light sources are within the range of 1000 .mu.m. configured to provide electromagnetic radiation at substantially the same location on the sample as the continuum source. It is characterized by being made.

[0059] The system comprises: Multimode fiber; Beam diffuser; Fly-eye beam homogenizer; Rotating beam diffuser; Piezoelectric crystal-driven beam diffuser; Electrical means to reduce the time coherence length; and a speckle reducer in a form selected from the group consisting of: , due to interference effects between different coherent wavelengths in the broad spectrum. The beam serves to reduce the large variations in intensity of the electromagnetic radiation as a function of position within the beam.

[0060] The sample inspection system is characterized by at least one selection from the group consisting of: R: (Primary Selection Group) The method comprises the following steps:

[0061] b) provided by the supercontinuum laser and speckle reducer A speckle-reducing beam of electromagnetic radiation is allowed to interact with the sample on the stage, and then and / or the electromagnetic radiation provided by the second light source is incident on the detector system. allowing radiation to interact with a sample on the stage and incident on the detector; c) analyzing the data provided by said detector to characterize said sample;

[0062] The detector includes at least two detectors and a detector for separating the portions of the spectral beam into two or more detectors based on wavelength. The system may include a means for distributing the components to each other.

[0063] According to other accounts, reflectometer; spectrophotometer; ellipsometer; and Polarimeter; A sample inspection system selected from the group consisting of: a) a source of a spectral beam of electromagnetic radiation; b) a stage for supporting the sample; and c) a detector system for monitoring electromagnetic radiation; Includes.

[0064] The system includes a pulsed laser and a nonlinear process. Electromagnetic radiation wavelengths in the range from 400 to at least 4400 nm, resulting from the interaction of Supercontinuum laser providing high intensity, highly directional coherent spectrum of , which results in a wide spectral spread, and the system A second light source providing wavelengths within a range longer or shorter than that provided by the microwave laser. and wherein the system further includes a supercontinuum light source and a subcontinuum light source. and a sample inspection system configured to provide electromagnetic radiation to substantially the same location on the sample. The stem is characterized by a primary selection group.

[0065] The system comprises: Multimode fiber; Beam diffuser; Fly-eye beam homogenizer; Rotating beam diffuser; Piezoelectric crystal-driven beam diffuser; Electrical means to reduce the time coherence length; and a speckle reducer in a form selected from the group consisting of: , due to interference effects between different coherent wavelengths in the broad spectrum. and serves to reduce the strong fluctuations in the intensity of electromagnetic radiation as a function of time and position within the beam. do.

[0066] The system also includes a source of the electromagnetic radiation beam and a stage supporting a sample. and a polarization state generator between the stage supporting the sample and the detector. and a polarization state analyzer, the system being an ellipsometer or polarimeter. and the system optionally comprises in a polarization state generator and / or in the polarization state detector The compensator is further provided.

[0067] The sample inspection system includes a speckle reducer in the form of a multimode fiber, a beam Beam diffuser, fly's eye beam homogenizer, rotating beam diffuser, piezoelectric electrolytic Crystal-driven beam diffuser or electrical means for shortening the temporal coherence length It is possible.

[0068] Where applicable, the detector system in any embodiment includes: Golaysel; bolometer; Thermocouple; Photoconductive materials; photovoltaic materials; deuterated triglycine sulfate (DTGS); HgCdTe(MCT); LiTaO3; PbSe; PbS; and InSb wherein the detector system further comprises a selection from the group consisting of: At least one beam splitter; at least one combined dichroic mirror and prism; and At least one grating; A plurality of wavelengths can be detected by at least one selected from the group consisting of The present invention includes a configuration including a number of detector elements.

[0069] Detect samples over a wavelength range that includes 400 nm to at least 50,000 nm In another description of the sample inspection system, the sample inspection system: reflectometer; spectrophotometer; ellipsometer; and Polarimeter is selected from the group consisting of a) a source of a spectral beam of electromagnetic radiation; b) a stage for supporting the sample; c) at least one detector system for monitoring electromagnetic radiation; Includes.

[0070] a source of said spectral beam of electromagnetic radiation, Supercontinuum laser; Nernst Glower; Globar; Laser stabilized arc lamp; HG arc lamp; and fixed or tunable quantum cascade lasers; and providing wavelengths in the infrared and / or terahertz range.

[0071] The at least one detector system may include at least one detector in the infrared range and the terahertz range. It is possible to have detector elements that are partially incapable of detecting long electromagnetic radiation wavelengths. In this case, the sample inspection system, in use, Accepts electromagnetic radiation of relatively long (short) wavelengths that cannot be detected by elements in the system. providing as an output a shorter (longer) wavelength than the detector element is capable of detecting; The at least one element capable of detecting electromagnetic radiation of a shorter (longer) wavelength is at least one wavelength converter for inputting the detectable wavelengths into another detector system; It further comprises:

[0072] Another description of a method for testing a sample comprises the following steps.

[0073] a) Samples over a wavelength range from 400 nm to at least 50,000 nm inclusive The sample inspection system includes: reflectometer; spectrophotometer; ellipsometer; and Polarimeter; is selected from the group consisting of a´) a source of a spectral beam of electromagnetic radiation; b') a stage for supporting the sample; and c´) at least one detector system for monitoring electromagnetic radiation; The source of said spectral beam of electromagnetic radiation comprises: Supercontinuum laser; Nernst Glower; Globar; Laser stabilized arc lamp; HG arc lamp; and fixed or tunable quantum cascade lasers; and providing wavelengths in the infrared and / or terahertz range.

[0074] The at least one detector system may include at least one detector in the infrared range and the terahertz range. It is possible to have detector elements that are partially incapable of detecting long electromagnetic radiation wavelengths. and wherein the sample inspection system, in use, The element accepts electromagnetic radiation of a relatively long (short) wavelength that it cannot detect, and the detection element The detector element provides as output a shorter (longer) wavelength that can be detected, said at least one detector consisting of an element capable of detecting (long) wavelength electromagnetic radiation; and at least one wavelength converter for inputting the detectable wavelength into the detector system. can.

[0075] The method comprises the following steps:

[0076] b) selecting a supercontinuum laser source; and Multimode fiber; Beam diffuser; Fly-eye beam homogenizer; Rotating beam diffuser; Piezoelectric crystal-driven beam diffuser; and Electrical means for shortening the temporal coherence length. providing a speckle reducer selected from the group consisting of: c) placing the sample to be inspected on said stage for supporting the sample; ; d) generating a beam of electromagnetic radiation by said supercontinuum laser source; , interacting with the sample and then monitoring the electromagnetic radiation. into the detector system; said beam of electromagnetic radiation being coupled to said supercontinuum laser source and to a laser source in the infrared range and Inability to detect long electromagnetic radiation wavelengths over at least part of the terahertz range The speckle reduction system and the wave between the at least one detector system. and a wavelength of electromagnetic radiation that can be detected by at least one detector element. is incident on at least one of the detectors; and e) analyzing the output from said at least one detector for a property of said sample. Provides insight into

[0077] Another method for testing a sample comprises the following steps.

[0078] a) sampling over a wavelength range from 400 nm to at least 50,000 nm inclusive The sample inspection system includes: reflectometer; spectrophotometer; ellipsometer; and Polarimeter; is selected from the group consisting of a´) a source of a spectral beam of electromagnetic radiation; b') a stage for supporting the sample; and c´) at least one detector system for monitoring electromagnetic radiation; Includes.

[0079] a source of said spectral beam of electromagnetic radiation, Supercontinuum laser; Nernst Glower; Globar; Laser stabilized arc lamp; HG arc lamp; and Fixed or tunable quantum cascade lasers and providing wavelengths in the infrared and / or terahertz range.

[0080] The at least one detector system may include at least one detector in the infrared range and the terahertz range. It is possible to have detector elements that are partially incapable of detecting long electromagnetic radiation wavelengths. and wherein the sample inspection system, in use, The element accepts electromagnetic radiation of a relatively long (short) wavelength that it cannot detect, and the detection element The detector element provides as output a shorter (longer) wavelength that can be detected, said at least one detector consisting of an element capable of detecting (long) wavelength electromagnetic radiation; and at least one wavelength converter for inputting the detectable wavelength into the detector system. It can be done.

[0081] The method comprises the following steps:

[0082] b) Select a source other than a supercontinuum laser; c) placing the sample to be inspected on said stage for supporting the sample; ; d) causing a beam of electromagnetic radiation to be generated by said light source and to interact with said sample. and then incident on said at least one detector system for monitoring electromagnetic radiation. ; The beam of electromagnetic radiation is transmitted from the light source to at least one of the infrared range and the terahertz range. The at least one detector system is incapable of detecting long electromagnetic radiation wavelengths over a portion thereof. and a detector element for detecting the wavelength converter between the detector element and the stem. Electromagnetic radiation of a wavelength that can be detected is incident on at least one of said detectors; and e) analyzing the output from said at least one detector for a characteristic of said sample; Provide insight.

[0083] In any of the above examples, where appropriate, the sample inspection system may A percontinuum laser source is operatively coupled to a Michelson interferometer, and the detector The device is Golaysel; bolometer; Thermocouple; deuterated triglycine sulfate (DTGS); HgCdTe(MCT); LiTaO3; PbSe; PbS; InSb; and InGaAs a detector comprising a material selected from the group consisting of: It can be provided that the compound is selected from the group consisting of:

[0084] Another sample inspection system of the present invention is used to inspect a sample over a range of wavelengths. The system is a sample inspection system that reflectometer; spectrophotometer; ellipsometer; and Polarimeter; and wherein the system is selected from the group consisting of: a) a supercontinuum laser, and a light source for providing a wavelength longer or shorter than that provided by A source of spectral beam of electromagnetic radiation; b) a stage for supporting the sample; c) a detector system for monitoring electromagnetic radiation provided by a single sample; Equipped with.

[0085] The at least one detector system detects at least a portion of the wavelength range provided by the light source. It is possible to have a detector element that is unable to detect long (short) electromagnetic radiation wavelengths over a wide range. can.

[0086] The system comprises at least one wavelength converter and a speckle reducer. The user may further require at least one selection to be selected from the following:

[0087] The wavelength converter, in use, is configured to detect elements in the at least one detector system. and the detector element receives electromagnetic radiation of a relatively long (short) wavelength that can be detected. provides output at shorter (longer) wavelengths that can be detected as The detector elements of the detector system are input.

[0088] The speckle reducer is configured to reduce the amount of light emitted from the speckle reducer between different coherent wavelengths within the broad spectrum. The intensity of electromagnetic radiation as a function of time and position within the beam is due to interference effects of It serves to reduce fluctuations.

[0089] The present invention provides Application of detector systems; Use of supercontinuum lasers; Applying speckle reducers; Application of additional sources of electromagnetic radiation; Application of supercontinuum lasers in Fourier transform infrared sources; Wavelength converter applications This is found in the use of a combination of

[0090] (Detector System) The present invention includes the use of both single element and multi-element detectors. If the beam is analyzed as a whole, Golaysel; bolometer; Thermocouple; or a single element detector such as Photoconductive materials; photovoltaic materials; deuterated triglycine sulfate (DTGS); HgCdTe(MCT); LiTaO3; PbSe; PbS; or InSb The detector may be a detector including, for example, a Michelson interferometer. This is often the case when combined with

[0091] Alternatively, the detector system of the present invention may extract a plurality of distinct spectral components from the spectroscopic beam incident thereon. The system may include means for generating wavelength ranges, each of which may include at least two The element sequence includes a grating and a combined dichroic beam splitter. rhythm.

[0092] The grating, when illuminated with an incident spectral beam of electromagnetic radiation, It produces a spectrum of wavelengths and at the same time reflects the change in the spectral content of electromagnetic radiation. Generates a projectile beam.

[0093] The combining dichroic beam splitter prism splits the incident beams of electromagnetic radiation into When the wavelength of the light is 100 nm or less, a spectrum of dispersed wavelengths is generated and output through the prism. It sometimes produces a reflected beam of electromagnetic radiation with a varied spectral content.

[0094] In use, the spectral beam of electromagnetic radiation from the source is directed onto a sample placed on the stage. The light is then allowed to interact with the laser, generating a spectrum of dispersed wavelengths that are then directed to a first detector. The light is incident on a first selected element so as to be reflected by the first selected element and simultaneously directed to a second detector. The light is directed to be incident on a second selected element which also produces a spectrum of dispersed wavelengths. The reflected spectral change of the electromagnetic radiation involves the generation of a reflected beam of spectral components.

[0095] The reflected altered spectral component reflected beam of electromagnetic radiation is directed to a third detector. and dispersing at least one of said beams to a third selected element to generate a spectrum of dispersed wavelengths. A portion can be directed to be incident on a beam splitter, while a modified At least a portion of the spectral component beams are dispersed in a wavelength-limited manner. The second selected element continues to direct a spectrum of the range to the second detector. can.

[0096] The detector system may be configured such that at least one of the first and second selected elements: designed to optimally configure the range of wavelengths emitted from it; At least one of the first and second detectors detects the first and second selected elements. Each is designed to optimally detect the input wavelength range; The method may comprise at least one selection from the group consisting of:

[0097] The detector system may further comprise two or more selected elements, The reflected electromagnetic beam generated by the selected element of a dichroic beam splitter, and then from there to a third selected element. Being shot; Direct irradiation onto a third selected element; at least one reflector, then a dichroic beam splitter, then and from there irradiating a third selected element; and irradiating at least one reflector and then a third selected element; The present invention is directed to at least one selection from the group consisting of:

[0098] The detector system includes a third selected element that receives the reflected beam of electromagnetic radiation. generating a spectrum of dispersed wavelengths that is directed to a third detector. can.

[0099] The detector system comprises: The third selected element is designed to optimally configure the range of wavelengths emitted therefrom. be; the third detector receives input thereto by the first and second selected elements, respectively; designed to optimally detect the range of wavelengths to be measured; It may be provided that at least one selection from the group consisting of:

[0100] The detector system may further comprise a selected fourth element, and the third selected element a dichroic image generated by the selected element or in association with the second selected element The reflected electromagnetic beam emitted by the light beam splitter is a dichroic beam splitter, and then from there to a fourth selected element. Being shot; Direct irradiation of the fourth selected element; at least one reflector, then a dichroic beam splitter, then and from there irradiating a fourth selected element; and illuminates at least one reflector and then a fourth selected element; The present invention is directed to at least one selected from the group consisting of:

[0101] The detector system includes a fourth selected element that receives the reflected beam of electromagnetic radiation. generating a spectrum of dispersed wavelengths that is directed to a fourth detector. can.

[0102] The detector system comprises: The fourth selected element is designed to optimally configure the range of wavelengths emitted therefrom. be; The fourth detector receives input thereto by the first and second selected elements, respectively. designed to optimally detect the range of wavelengths to be measured; It may be possible to provide that at least one selection from the group consisting of: .

[0103] The detector is configured to detect the spectrum of dispersed wavelengths that are directed to be incident on the detector. The beam enters a grating or a combining dichroic beam splitter prism that generates a vector. The beam of spectral electromagnetic radiation from the sample may be incident on the sample, and simultaneously Spectral component change reflection, directed to interact with the chromatic beam splitter generating a reflected beam of varying spectral content of said electromagnetic radiation that splits the beam into two beams; Both beams are then coupled through a grating and a combined dichroic beam splitter. Rhythm.

[0104] The grating, when illuminated with an incident spectral beam of electromagnetic radiation, It produces a spectrum of wavelengths and at the same time reflects the change in the spectral content of electromagnetic radiation. Generates a projectile beam.

[0105] The combining dichroic beam splitter prism splits the incident beams of electromagnetic radiation into and at the same time generating a spectrum of wavelengths that are output through the prism when the It produces a reflected beam of electromagnetic radiation with a varied spectral content.

[0106] This results in a beam splitter prism or grating. The spectra of the dispersed wavelengths are each input to a separate detector.

[0107] The detector system generates a spectrum of dispersed wavelengths and directs the spectrum to a first detector. a spectrum of electromagnetic radiation from the sample incident on a first selected element such that the spectrum of electromagnetic radiation from the sample is ... The beam is then directed to a second detector, which produces a spectrum of dispersed wavelengths that are also directed to a second detector. modified spectral component reflection of electromagnetic radiation directed to be incident on selected elements of The output beam of an ellipsometer or polarimeter exits the analyzer upon beam generation. This can be provided.

[0108] The detector system specifically includes a beam of spectral electromagnetic radiation from the sample. The beam can be reflected by a series of elements including a first grating and a first detector. The reflected beam exiting the first grating is the zeroth order beam, and the second The beam is directed onto a grating and a second detector.

[0109] The detector system specifically includes a beam of spectral electromagnetic radiation from the sample. The beam can be reflected by a series of elements including a first grating and a first detector. The reflected beam exiting the first grating is the zeroth order beam, and the first and directed to a dichroic beam splitter prism combination and a second detector; The detector system specifically includes a beam of spectral electromagnetic radiation from the sample. and the beam interacts with a series of elements including a dichroic beam splitter. I am forced to do so.

[0110] The dichroic beam splitter transmits the first and second ranges of dispersion wavelengths, are each substantially above or below a certain wavelength, and The exiting reflected beam is the zero-order beam and is directed onto a second grating and a second detector. a first grating and a first detector, and a reflected beam exiting the first grating. The beam is the zero-order beam, which passes through the first dichroic beam splitter prism and the second detector. a first grating and a first detector; .

[0111] The detector system specifically includes a beam of spectral electromagnetic radiation from the sample. and the beam is passed through a first dichroic beam splitter combination and a first detector. The first dichroic beam splitter interacts with a series of elements including a The reflected beam reflected from the combination is directed towards a first grating and a second detector.

[0112] The detector system specifically includes a beam of spectral electromagnetic radiation from the sample. the beam interacts with a series of elements including a first grating and a first detector. The reflected beam produced by the first grating is the zero-order beam. The light generated by the second grating is directed to a second detector. The resulting reflected beam is the zeroth order beam and is directed onto a third grating and a third detector. can be.

[0113] The detector system specifically includes a beam of spectral electromagnetic radiation from the sample. the beam interacts with a series of elements including a first grating and a first detector. The reflected beam produced by the first grating is the zero-order beam. , directed to a first dichroic beam splitter combination and a second detector. The reflected beam from the dichroic beam splitter combination is It is directed through a beam splitter onto a third grating and a third detector.

[0114] The detector system specifically includes a beam of spectral electromagnetic radiation from the sample. the beam interacts with a series of elements including a first grating and a first detector. The reflected beam produced by the first grating is the zero-order beam. , directed to a second grating and a second detector. The reflected beam is the zero-order beam, and is the result of the first dichroic beam splitter combination and It is directed to a third detector.

[0115] The detector system specifically includes a beam of spectral electromagnetic radiation from the sample. the beam interacts with a series of elements including a first grating and a first detector. The reflected beam produced by the first grating is the zero-order beam. , directed to a first dichroic beam splitter combination and a second detector. The reflected beam from the chromatic beam splitter combination passes through the beam splitter. The light is then directed through a second dichroic beam splitter combination and onto a third detector.

[0116] The detector system specifically includes a beam of spectral electromagnetic radiation from the sample. and the beam is directed through a first dichroic beam splitter and a first detector. The first dichroic beam splitter combination reflects the The reflected beam is directed onto a second grating and a second detector. The reflected beam generated by the grating is the zeroth order beam, which is reflected by the third grating and the third detector. It is directed towards the emitter.

[0117] The detector system specifically includes a beam of spectral electromagnetic radiation from the sample. and the beam is directed through a first dichroic beam splitter and a first detector. The beam is reflected from the first dichroic beam splitter combination. The reflected beam is directed to a second dichroic beam splitter combination and a second detector. The reflected beam from the second dichroic beam splitter combination is Through an eccentric beam splitter, it is directed to a third grating and a third detector. .

[0118] The detector system specifically includes a beam of spectral electromagnetic radiation from the sample. and the beam is directed through a first dichroic beam splitter and a first detector. The beam is reflected from the first dichroic beam splitter combination. The reflected beam is directed onto a first grating and a second detector. The reflected beam produced by the dichroic beam splitter is the zero-order beam and is The beam is directed to a splitter and a third detector.

[0119] The detector system specifically includes a beam of spectral electromagnetic radiation from the sample. and the beam is directed through a first dichroic beam splitter and a first detector. The reflected light from the first dichroic beam splitter interacts with the elements of the The incident beam is directed to a second dichroic beam splitter and a second detector. The reflected beam from the chromatic beam splitter combination passes through the beam splitter. through a third dichroic beam splitter prism combination and directed onto a third detector. can be.

[0120] The detector system detects the + or - order spectrum generated by the grating. The resulting spectrum of dispersed diffracted wavelengths can be included.

[0121] Also, relatively short wavelengths can be measured using, for example, Golay cells, bolometers, or microbolometers. It should also be understood that the wavelength may be changed to a longer wavelength, monitored by a transmitter or the like. However, because the light source in the present invention provides a relatively long wavelength, the present invention For example, longer wavelengths cannot be monitored, but shorter wavelengths, higher energy In combination with a solid-state detector element capable of monitoring wavelengths of relatively long wavelengths, More likely to include a wavelength converter to change the electromagnetic radiation to shorter wavelength electromagnetic radiation .

[0122] A typical configuration in the context of the present invention is one in which the light source emits wavelengths in the infrared and / or terahertz range. and the detector element is capable of detecting only higher energy, shorter wavelengths. However, this is because the wavelength converter is a relatively short wavelength input. and emits longer wavelengths, and the detector elements are Golay cells, bolometers, and microbolometers. When solid-state detector elements are used, the present invention provides Benefits come in the form of reduced transfer costs (e.g., cooling when longer wavelengths are detected). do.

[0123] In the claims where elements are recited, a distinction is made between detector types. That is, the claim provides that the detector comprises a single element and detects a single color or all wavelengths of the spectral beam together. should be interpreted as applying when wavelengths are monitored separately or when wavelengths are separated and monitored separately. is. [Brief explanation of the drawings]

[0124] The present invention is better understood by reference to the detailed description herein in conjunction with the drawings. It will be done. [Figure 1] The various multi-channel detectors (DET1), (DET2), (DET3) show the multiple wavelength ranges that they are designed to optimally cover. [Figure 2]Several inventive combinations of multiple gratings (G) and / or dichroic beam splitter prism combinations (DBSP) are shown (generally designated as (G / P)), each producing, by way of example, at least one + or - order wavelength spectrum and a relatively more energetic reflected beam (e.g., zero order (Z0) in the case of a grating), electromagnetic radiation beam, which is directed towards a subsequent grating (G). [Figure 3] (A) shows a grating (G) reflecting an incident electromagnetic beam (IB), providing a spectrum of wavelengths (λ) in that order (e.g., 1+ orders) along with the zeroth order (Z0). (A') shows the situation where the reflected beam (RB) is reflected from a dichroic beam splitter prism combination (DBS-PR) at a surface on which a coating is present, giving it dichroic properties. Note that at least the + or - order of the spectrum is output from the prism (P). [Figure 4] 1 shows an ellipsometer system in which the present invention finds excellent application. [Figure 5] 1 illustrates the use of a tracking grating that is sequentially illuminated with electromagnetic radiation. [Figure 6] We demonstrate the use of beam splitters to direct portions of the beam to different detectors that can be optimized to respond to different wavelength ranges. [Figure 7] (A) and (B) show typical intensity versus position in the beam for a beam of electromagnetic radiation provided by a supercontinuum laser source over a range of approximately 400-2500 nm, respectively, and show the same results when a speckle reducer is applied to the plot in (A). [Figure 8] (A)-(A´´´) show a fly's eye approach to speckle reduction. (B)-(F) show various speckle reducers. [Figure 9](A) and (B) are included to illustrate a basic reflectometer or spectrophotometer system, and a basic ellipsometer, respectively, a polarimeter system that includes one or more wavelength converters (WM). (C) illustrates a basic FTIR system that includes a source of electromagnetic radiation therein. (D) and (E) illustrate Figs. 9(A) and (B) with dispersive optics and a wavelength converter (WM). (F) illustrates a basic reflectometer or spectrophotometer system in which two wavelength converters (WM) are present. (G)-(I) illustrate additional examples of ellipsometer systems with wavelength converters (WM) present therein. [Figure 10] (A) is included to show the typical inventor-generated intensity vs. wavelength resulting from a supercontinuum laser compared to the electromagnetic radiation intensity vs. wavelength of a typical conventional light source. (B) is included to show that recent advances have extended the range of supercontinuum lasers to at least 4400 nm and even 18000 nm. DETAILED DESCRIPTION OF THE INVENTION

[0125] First, the present invention claimed herein is best shown in Figures 9(F)-(J). In the context of reflectometer, spectrophotometer, ellipsometer and polarimeter sample inspection systems It should be understood that the wavelength converter (WM) is applied in the M) can be present before or after the stage (STG) supporting the sample (SAM). However, the present invention does not require the use of a light source (L The drawings herein are inseparably related to co-pending application Ser. No. 17 / 029,669. 300,091 (relating to light sources (LS) and detectors (DET)), They are discussed in the order in which they are presented.

[0126] Referring now to FIG. 1, various multi-channel detectors (DET1) (DET2) (D The various wavelength ranges that the ET3 is designed to optimally handle are shown in Figure 2. Many additional wavelength ranges can be shown as well, such as (4).

[0127] Figure 2 shows a light source of electromagnetic wavelengths (EM) in the infrared or terahertz range, typically present in aperture, and accepts the infrared or terahertz wavelengths, and typically solid state detection Wavelengths to provide output wavelengths within the wavelength range of the detector (DET) elements (DE's) (see Figure 4) Figure 2 also shows the use of a number of wavelength converters (WMs), each of which has at least one wavelength. Multiple gratings (G) ( See Figure 3(A)) and / or a combining dichroic beam splitter prism (DBS-R P) (see Fig. 3(A') of Fig. 2), as well as the modified spectral composition of electromagnetic radiation. Partially reflected (RB / OR) beam (e.g., zero-order (O) as in the case of a grating (G) R) beam), or in the case of a combined dichroic beam splitter prism (DBS-PR) The functionally similar reflected beam (RB) in this case (both possibilities are shown as G / P- in Figure 2) The combined dichroic beam splitter prism (DBS-P) in Figure 3(A) is For the zero-order (OR) and reflected (RB) beams, see Figure 3(A'). (Note: Although the results provided are functionally similar, the grating (G) is applied, but instead a dichroic beam splitter prism combination (D In the critical sense where BSP applies, the term zeroth order (ZO) is incorrect. FIG. 2 shows a related example of a detector system of the present invention, which detects a beam of electromagnetic radiation (IB). The light source (EM) provides electromagnetic radiation through an aperture (AP) so that it is irradiated onto (G / P1). The output (G / P1) is a first range of + or -, typically The first order of wavelength travels via reflection from the mirror (M) as shown in the detector (DET1). The spectrum (λ) of the dichroic beam is also reflected from another mirror (M). The reflected beam (RB) is also shown incident on the splitter (DBS), which splits the incident beam A first quantity of the beam is dispersed into a range of wavelengths (λ) that are directed into a detector (DET3) ( The second part of the beam incident on the DBS is directed towards the detector (DET2). output towards (G / P2) which provides a dispersed range of wavelengths (λ) directed towards The reflected beam (RB´´ / OR´´) is then filtered to a detector (D 2 shows that the present invention provides a system with multiple detectors (DET's) ), each of which may contain relatively long wavelengths therein (e.g., in the IR or THZ range). When a wavelength converter (WM) is incident on the wavelength converter (WM), the wavelength output from the wavelength converter (WM) can be detected. and the wavelength converter (WM) emits the detected wave by a solid-state detector element (DE). Long beam splitter (DBS) and / or prism / dichroic beam splitter (DBS-PR) (see Figure 3(A')) and / or grating (G) (see Figure 3 (A)) to the solid-state detector element (DE). It should be understood that the term is included to indicate that the device is equipped with a plurality of DE's (see FIG. 4).

[0128] Figure 3(A) shows an input beam of electromagnetic radiation (IB) projected onto it, resulting in a small number of wavelengths. At least one + / - order spectrum is generated with the zero order (ZO) beam. The grating (G) is shown.

[0129] Figure 3(A´) shows the reflected (RB) beam passing through a dichroic beam splitter prism (D The light is reflected from the surface on which the coating is placed, and At least the + or - order spectrum is Note that the output is from (P). The coating (C) is the is shown as being on a surface that forms a dichroic beam splitter (DBS). For insight, dichroics have different properties, e.g., wavelength-based Indicates the reflection / transmission of electromagnetic radiation.

[0130] The name (G / P_) in Figure 2 is either the system in Figure 3(A) or 3(A´). It should be understood that the above should be interpreted as meaning that

[0131] FIG. 4 (FIG. 2 of the '461 patent) is included to demonstrate the ellipsometer system, where The invention finds very suitable application in systems such as ellipsometers and polarimeters. The beam exiting the ellipsometer polarization state analyzer (i.e., (EPCLB) in Figure 4) is When so applied, it can be usefully thought of as a beam (IB) shown in conjunction with FIG. Generally, the grating (G1) in FIG. 2 is the dispersion element (i.e., the grating Figure 4 shows the polarized light (P) due to its interaction with the polarizer (P) shown. The ellipsometer light source (LS) provides a focused ellipsometer beam (PPCLB). The beam (PPCLB) is then directed to the sample (MS) shown. The beam is reflected from the sample (MS) and interacts with the sample (MS) at which point it can be a focused beam. The reflected beam is recollimated and then passes through an analyzer (A) which collects the beam (EPCL B) and then passes through a dispersive element (e.g., a grating) (D The light is focused onto a multi-element detector (PA) which serves to disperse the wavelengths onto a multi-element detector (PA). One or two compensators (C) may also be polarization state generators or analyzers, or Each can be present in the system as shown in the accompanying polarizer and analyzer. Again, for the sake of correspondence, the dispersive element (DO) is replaced by the grating (G1) in Figure 2. ) and focusing (SSC) and recollimating (SSC) ´) It has been shown that the lens can be controlled with respect to position to optimize the intended effect. It is being done.

[0132] FIG. 5 (from FIG. 9 of Patent Document 4) shows the wavelengths of the light emitted from the spectrometer system to reach the desired wavelength. Included to demonstrate the use of successive subsequent gratings (e.g., G1 and G1´) do.

[0133] FIG. 6 (taken from FIG. 1a of US Pat. No. 5,699,499) shows the division of the beam into parts responsive to different wavelength ranges. Beam splitting to direct the beam to different detectors (D1 and D2) which can be optimized to For greater clarity, patent documents 4 and 5 are included to illustrate the use of the data (B1 and B2). See U.S. Pat. No. 5,629,393 and U.S. Pat. No. 5,629,393. However, the patents do not address the issue of reflected modified spectroscopic imaging. This does not suggest the present invention of directing a vector content beam to a subsequent beam dispersion element. Also, different beams can be optimized to respond to different wavelength ranges. 1 shows the use of a beam splitter to direct the light to the detector.

[0134] The + / - orders shown generally indicate that the grating is and produces a spectrum of diffraction-dispersed wavelengths in response to it. The altered spectral component of the reflected beam is typically generated in the zero-order beam. It can be described as a range of wavelengths.

[0135] Next, Figure 7(A) shows typical intensity vs. wavelengths from about 400 to at least 4400 nm. of electromagnetic radiation beams provided by supercontinuum laser sources over a range In particular, the effects of interactions between coherent components are very consistent. Note that speckle causes wavelength instability. It should be noted that the supercontinuum laser may be used in the present invention. The wavelengths thereby provided are detected by a solid-state detector, possibly in combination with a wavelength filter. This can be applied to change the wavelength of light that can be emitted.

[0136] Figure 7(B) shows that the application of the "speckle reducer" to the beam intensity profile of Figure 6 reduces the beam This allows a much more stable beam intensity versus position in the beam profile to be achieved. This much more stable intensity profile is demonstrated by ellipsometers, polarimeters, and reflectometers. The present invention is well suited for use in metrology systems such as emissometers and reflectometers. The use of a supercontinuum laser source and speckle reducer as described above is particularly In combination with the detector system described above, it is believed to be new and novel. As mentioned earlier in this specification, a coherent light source produces interference effects, but the present system The system effectively detects broad variations in intensity over a very small wavelength range (i.e., speckle). To remove Multimode fiber; Beam diffuser; Fly-eye beam homogenizer; Rotating beam diffuser; Piezoelectric crystal-driven beam diffuser; Electrical means for shortening the temporal coherence length. The speckle reducer includes a speckle reducer in the form of a selection from the group consisting of:

[0137] Figures 8(A)-(A´´´) show the beam homogenization approach to reduce speckle. Figure 8(A) shows a very non-uniform intensity, while Figure 8(B) shows a very uniform intensity (EM0 ) can be converted into output electromagnetic radiation, denoted as (EM1) Note that the beam expander (BE) is a beam expander that expands the electromagnetic radiation. Beam collimator (BC1), two fly-eye lenses (MF1) (MF2), collimator A second beam collimator (BC2) is applied to focus the output of the collimated beam. ), and a second beam collimator (BC2) that recollimates the beam exiting it. The energy content of (EM1) is given by (EM0) The eye lenses (MF1) and (MF2) operate to distribute the light evenly. Fig. 8(A'') shows a typical fly's eye lens structure. How can the system (BH) in A) be applied to an ellipsometer system? In "A", the incident beam from the source (LS) is (EM1) At "B", the beam energy is distributed as shown by (EM0) and the polarization The optical element (DE) is positioned (D) above the sample before the beam interacts with it. (D)) positioned to monitor the reflected beam from the sample at do.

[0138] 8(B) to 8(F) show various other speckle reducers. A beam diffuser in which a beam (BI) is incident and emerges as a divergent beam (DB0) component. Figure 8(C) shows a simple fly-eye lens (FE) through which the beam passes. It sometimes produces the same effect as the beam diffuser in Figure 8(B). Figure 8(D) shows the The beam diffuser (BD) in Figure 8(B) is attached to a motor (M) that rotates it. The input beam (B) passes through again as shown and emerges as a diverging beam (DB0). Figure 8(E) shows the beam diffuser (BD) being vibrated vertically and / or horizontally during use. A beam like that shown in Figure 8(B) is attached to a piezoelectric driver (PZ) that is applied to The diffuser (BD) plate is shown. The fly-eye lens (EF) is also shown in Figure 8(D). ) and 8(E). Figure 8(F) shows the structure of a multimodal fiber. An end-on view is shown. Note the core region 1 and outer region 2. Region 1 of a multimode fiber is a significant part of Region 2. The core of Region 1 is a single is much less noticeable in single-mode fibers.

[0139] Figure 9(A) shows a) a source of a beam of electromagnetic radiation (S); b) Stage (STG) supporting sample (SAM); c) Electromagnetic detector system (DET) It is included to illustrate a basic reflectometer or spectrophotometer system including In the present invention, the source (S) of the spectral beam of electromagnetic radiation is preferably is a supercontinuum laser that provides the output spectrum shown in Figure 7(B). That is, the main feature of the present invention is that it is The use of an intense, highly directional supercontinuum laser, as discussed above with respect to Figure 2, Thus, another aspect of the invention is to provide a detector well suited to detect said wavelengths, which includes a variety of wavelength ranges. This involves the use of a detector system that provides a length.

[0140] FIG. 9(B) shows the polarization state generator (PSG) and the polarization state analyzer (PSA) in addition to the 9(A) shows the elements of a realization of a lipometer or polarimeter system (as used in this specification and When one or more light sources (S) are mentioned in the claims, the relevant drawings (Note that the (S) designation should be interpreted as indicating in use.) .

[0141] The detector system may include multiple multi-element arrays, as shown in FIG. There may be a single array as in FIG. 4, or as shown in FIGS. 9(A) and 9(B). It should be understood that it is possible to provide a single detector so that the detector is not a single detector. 9(E) has been modified to include detector (DET) array elements (DE´s). The detector side of the system shown in Figures 9(A) and 9(B) is shown. In Figure 9(E), the wavelength Note that the transducer (WM) is moved from before the dispersion optics (DO) to after it. In any configuration, the functional element that provides the measurable electrical signal may be solid-state (e.g., CC The latter detection can be a multi-element array (D array), or a single element such as a Golay cell or a bolometer. The detector can be applied to monitor infrared and terahertz frequency electromagnetic radiation. The cell converts the temperature change resulting from the electromagnetic radiation into an electrically monitorable signal. There is a bendable diaphragm / film that reflects magnetic radiation onto one or another photocell. The curvature of the diaphragm / film shape in the chamber of the Golay cell can be The bolometer produces electromagnetic radiation that is directed at a monitoring photocell. It works by transducing the change in electrical resistance caused by electromagnetic radiation incident on the material. Additionally, the detector may include a wavelength converter, if applicable, which may be a remote It works by converting infrared light into near-infrared frequencies / wavelengths, making it cheaper and easier to use. Silicon-based elements can be used. E) identifies a wavelength converter (WM). A wavelength converter that converts a longer wavelength to a shorter wavelength. An example of a converter is an NLIR nonlinear infrared sensor that converts mid-infrared wavelengths to near-visible wavelengths. Figure 9(C) shows the electromagnetic radiation source (S) as part of a Fourier transform interferometer (FTIR) system. The light source (S), the beam splitter (BS), and In this example, two mirrors (M1) and (M2) are shown. In use, mirror M1 is This is the path length of the beam from the beam splitter (BS) to Interference at the beam splitter, beam splitter (BS) and mirror (M 1), and the beam between the beam splitter (BS) and the mirror (M2). Therefore, different wavelengths are transmitted and blocked at different positions of the mirror (M1).

[0142] FIG. 9(F) shows a basic reflectometer or spectrophotometer system with two wavelength converters (WM). Stems are shown. Typically only one of them is present, so two are shown. should not be construed as limiting, and if only one is present, it is the stage (STG Note that there can be a wavelength converter before the stage (STG). If present, the sample inspection system detects different waves provided by a source of electromagnetic radiation (LS). It is changed to a system for inspecting long-range samples (MS). This is done by using a light source of electromagnetic radiation ( A very wide range of waves can be measured using the same sample inspection system without changing the LS. This can be useful when it is desired to test a sample having a length.

[0143] Figures 9(G) to 9(I) show wavelength converters (WM) placed at various positions after the stage (STG). Further examples of existing ellipsometer systems are shown. The system includes a source of spectral electromagnetic radiation. (LS), polarizer (P), compensator (C) (the combination of (P) and (C) includes (PSG) ), the sample (MS) on the stage (STG), the second compensator (C ´), analyzer (A) (note that the combination of (C´) and (A) includes (PSA). ), focusing element (FE), dispersion optics (DO), and multiple detector elements (DE). In FIG. 9(G), the stage (STG) ) and the dispersion optical system (DO), there is a wavelength converter (WM). It further includes a beam splitter (BS) and a mirror (M) that provide a two-detector configuration, Both of these are wavelengths existing between the stage (STG) and the dispersion optical system (DO). The converter (WM) is shown in Figure 9(I) between the dispersion optical system (DO) and the detector (PA). It differs from Figure 9(G) in the presence of a wavelength converter (WM). Any such arrangement may 9(G)-9(I) are illustrative examples of the present invention. The location of the wavelength converter (WM) in the system is demonstrated. The configuration in Figure 9(G) is similar to that in Figure 9(H). )-9(I), i.e., the system has a reflectance wavelength converters (W), whether they are photometers, spectrophotometers, ellipsometers, or polarimeters. M) can be between the light source (LS) and the stage (STG).

[0144] Polarizer (P), analyzer (A) or compensator (C) (as in Figure 6 or Figure 9 ( B) is built into a polarization state generator (PSG) or polarization state analyzer (PSA). The (included) may be stationary or may rotate in part or in whole during use. Please note that.

[0145] FIG. 10(A) shows the intensity versus wavelength of a conventional source of electromagnetic radiation generated by a representative inventor of the present invention. 0.0325% neutral density within the path of the supercontinuum laser beam compared to the Intensity,pairs resulting from supercontinuum lasers in the presence of density filters. Included to indicate wavelength. Supercontinuum laser intensity is comparable to the are much larger (about 30 times larger) than the To compare the torque characteristics, the signal is heavily attenuated by a 0.0325 neutral density filter. Note that there was a need.

[0146] Figure 10(B) shows that the development of supercontinuum laser light sources was made after the parent application. In Figure 10(B), the wavelength range is larger than that in Figure 10(A). It is expected that the wavelength range will continue to expand. The invention should be considered from that perspective, i.e., as shown in Figures 10(A) and 10(B). The wavelength ranges of the supercontinuum laser sources shown are illustrative and not limiting. For example, a supercontinuum that provides wavelengths up to 18,000 nm Vapor lasers are available, but the intensity decreases at longer wavelengths.

[0147] Although the subject matter of the present invention has been disclosed herein, many modifications, substitutions, and variations of the present invention are possible in light of the teachings. It will be apparent that the present invention may be practiced in other ways than as specifically described. The invention may be practiced in other ways and its breadth and scope should be limited only by the claims. Please understand that this is the case.

Claims

1. a) for use in examining a sample using electromagnetic radiation; Ellipsometer; Polarimeter; reflectometer; and Spectrophotometer; providing a sample testing system selected from the group consisting of: The sample inspection system includes: a source of electromagnetic radiation (LS); a stage (STG) for supporting the sample; and detector (PA); Equipped with a light source (LS) of the sample inspection system providing electromagnetic radiation in a wavelength range longer or shorter than that detectable by the detector (PA); The sample inspection system is characterized by the presence of at least one wavelength converter (WM) in front of the detector (PA), which accepts electromagnetic radiation at wavelengths outside the range that the detector (PA) can detect and provides output electromagnetic radiation to the detector (PA) at wavelengths that the detector (PA) can detect. Steps and b) placing a sample (MS) to be inspected on said stage (STG); c) causing the light source (LS) to provide electromagnetic radiation comprising wavelengths that cannot be detected by the detector (PA) and directing the beam towards the sample (MS); d) causing the wavelength converter (WM) to receive the electromagnetic radiation wavelengths provided by the light source (LS) and convert them to wavelengths detectable by the detector (PA), whereby the detector (PA) provides output data; f) analyzing the output data to determine sample characteristics; A method of inspecting a sample, comprising:

2. the sample inspection system further comprising dispersive optics (DO) for spatially separating different wavelengths; The wavelength converter (WM) is disposed between the light source (LS) and the detector (PA). The method of claim 1.

3. At least one of the wavelength converters (WM) is disposed between the light source (LS) and the stage (STG). The method of claim 2.

4. At least one of the wavelength converters (WM) is disposed between the stage (STG) and the dispersion optical system (DO). The method of claim 2.

5. At least one wavelength converter (WM) is disposed between the dispersion optics (DO) and the detector (PA). The method of claim 2.

6. For use in examining a sample using electromagnetic radiation, Ellipsometer; Polarimeter; reflectometer; and Spectrophotometer; A sample testing system selected from the group consisting of: The sample inspection system includes: a source of electromagnetic radiation (LS); a stage (STG) for supporting the sample; and detector (PA); Equipped with a light source (LS) of the sample inspection system provides long wavelength electromagnetic radiation in the infrared and terahertz ranges, and the detector (PA) is incapable of detecting infrared and terahertz wavelengths; The sample inspection system includes a polarization state generator (PSG) and a polarization state analyzer (PSA) before and after the stage (STG), respectively; The sample inspection system is further characterized by comprising at least two wavelength converters (WM) between the source (LS) of electromagnetic radiation and the detector (PA) in front of the detector (PA), the wavelength converters (WM) accepting electromagnetic radiation at wavelengths outside the range detectable by the detector (PA) and providing output electromagnetic radiation to the detector (PA) at wavelengths detectable by the detector (PA). Sample inspection system.

7. For use in examining a sample using electromagnetic radiation, Ellipsometer; Polarimeter; reflectometer; and Spectrophotometer; A sample testing system selected from the group consisting of: The sample inspection system includes: a source of electromagnetic radiation (LS); a stage (STG) for supporting the sample; and detector (PA); Equipped with a light source (LS) of the sample inspection system providing electromagnetic radiation in a wavelength range longer or shorter than that detectable by the detector (PA); The sample inspection system includes a polarization state generator (PSG) and a polarization state analyzer (PSA) before and after the stage (STG), respectively; The sample inspection system is further characterized by comprising at least two wavelength converters (WM) between the source (LS) of electromagnetic radiation and the detector (PA) in front of the detector (PA), the wavelength converters (WM) accepting electromagnetic radiation at wavelengths outside the range detectable by the detector (PA) and providing output electromagnetic radiation to the detector (PA) at wavelengths detectable by the detector (PA). Sample inspection system.

8. The sample inspection system comprises at least two wavelength converters (WM) between the source (LS) and the detector (PA) of electromagnetic radiation. The method of claim 2.

9. a) for use in examining a sample using electromagnetic radiation; Ellipsometer; Polarimeter; reflectometer; and Spectrophotometer; providing a sample testing system selected from the group consisting of: The sample inspection system includes: a source of electromagnetic radiation (LS); a stage (STG) for supporting the sample; and detector (PA); Equipped with a light source (LS) of the sample inspection system providing electromagnetic radiation in a wavelength range longer or shorter than that detectable by the detector (PA); The sample inspection system is characterized by the presence of one wavelength converter (WM) before the stage (STG). Steps and b) placing a sample (MS) to be inspected on said stage (STG); c) causing said light source (LS) to provide electromagnetic radiation and directing the beam towards said sample (MS); d) causing said wavelength converter (WM) to receive electromagnetic radiation wavelengths of a first range provided by said light source (LS) and output wavelengths of a converted range; e) causing the detector (PA) to detect the converted electromagnetic radiation wavelengths after interacting with the sample (MS) to generate output data; f) analyzing the output data to determine sample characteristics; A method of inspecting a sample, comprising:

10. A second wavelength converter (WM) is disposed between the stage (STG) and the detector (PA), and the wavelength from the sample (MS) is disposed within a region that can be detected by the detector (PA).

10. The method of claim 9.

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