Repair method of mount flange and cutting device

Abstract

To provide a repair method of a mount flange which can repair an end surface of the mount flange properly without depending on worker's experience.SOLUTION: A repair method of a mount flange includes: a holding step in which a tool including a grinding member is held by a holding surface of a holding table; an adjustment step in which a positional relationship between the grinding member and the mount flange in a direction parallel to an axis of a spindle is adjusted; a monitoring start step in which monitoring of a current value of an electric current flowing through a motor for rotating the spindle is started; a moving start step in which relative movement between the spindle being rotated by the motor and the holding table along a direction intersecting with the axis is started; a moving end step in which the relative movement between the spindle and the holding table along the direction intersecting with the axis is ended; and a contact determination step in which whether or not the grinding member contacts with the mount flange is determined based on the current value after the monitoring start step.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a method for modifying a mount flange that is used when modifying an end face of a mount flange that supports a cutting blade, and to a cutting device that uses the same. [Background technology]

[0002] In cutting machines that cut plate-shaped workpieces, such as semiconductor wafers, a cutting blade, which is a processing tool, is attached to the tip of a spindle, which serves as a rotation axis, via a support called a mount flange. In this case, the end face of the mount flange that comes into contact with the cutting blade becomes scratched as the cutting process progresses, gradually reducing the flatness of the end face.

[0003] Furthermore, immediately after the mount flange is attached to the spindle, the end face of the mount flange is not necessarily perpendicular to the axis of the spindle, the holding surface (top surface) of the holding table that holds the workpiece during cutting, etc. Therefore, the shape of the end face of the mount flange is modified as necessary so that it is perpendicular and flat to the axis of the spindle, etc. (See, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2011-11299 Summary of the Invention [Problem to be solved by the invention]

[0005] When modifying the end face of the mount flange, for example, a tool including a grinding member called a grinding wheel is held by the holding surface of the holding table, and their positional relationship is adjusted so that the grinding wheel is positioned appropriately relative to the mount flange. Then, when the rotating spindle and the holding table are moved relative to each other in a direction intersecting the axis of the spindle, the grinding wheel comes into contact with the mount flange, and the end face of the mount flange is modified.

[0006] However, the positional relationship between the mount flange and the grinding wheel is adjusted by the operator's visual inspection, and if the operator is inexperienced, this positional relationship may not be adjusted properly. If the spindle and holding table are moved relative to each other when the positional relationship between the mount flange and the grinding wheel is not adjusted properly, the grinding wheel will not make sufficient contact with the mount flange, and the end face of the mount flange will not be adjusted to the desired state.

[0007] Therefore, an object of the present invention is to provide a method for repairing a mount flange and a cutting device that can appropriately repair the end face of a mount flange without relying on the experience of the worker, etc. [Means for solving the problem]

[0008] According to one aspect of the present invention, there is provided a method for correcting an end face of a mount flange that is attached to the tip of a spindle and supports a cutting blade, the method comprising: a holding step for holding a tool including a grinding member on a holding surface of a holding table; an adjustment step for adjusting the positional relationship between the grinding member and the mount flange in a direction parallel to the axis of the spindle; a monitoring start step for starting to monitor the current value of a current flowing through a motor that rotates the spindle; a movement start step for starting relative movement between the spindle and the holding table in a direction intersecting the axis while the spindle is being rotated by the motor, after the holding step, the adjustment step, and the monitoring start step; a movement end step for ending the relative movement between the spindle and the holding table in a direction intersecting the axis, after the movement start step; and a contact determination step for determining whether the grinding member has come into contact with the mount flange, based on the current value, after the monitoring start step.

[0009] Preferably, the method further comprises a notification step of notifying a result obtained by the determination in the contact determination step.

[0010] Preferably, the method further includes a readjustment step after the movement end step, in which the positional relationship between the grinding member and the mounting flange in a direction parallel to the axis is readjusted based on the result obtained by determining in the contact determination step, and the movement start step and the movement end step are performed again after the readjustment step.

[0011] Preferably, the method further includes a setting step, before the movement start step, of setting a target number of relative movements, and repeats the readjustment step, the movement start step, and the movement end step in this order until the number of relative movements at which it is determined that the grinding member has come into contact with the mount flange reaches the target number set in the setting step.

[0012] Preferably, the contact determination step is repeated before the movement termination step, and the movement termination step is performed when it is determined in the contact determination step that the grinding member is in contact with the mount flange and then determined that the grinding member is not in contact.

[0013] According to another aspect of the present invention, there is provided a cutting device comprising: a cutting unit having a spindle having a mount flange attached to a tip end thereof, the mount flange supporting a cutting blade at an end surface thereof; and a motor for rotating the spindle; a sensor for measuring a current value flowing through the motor; a holding table having a holding surface capable of selectively holding a tool including a grinding member and a workpiece; a movement mechanism for relatively moving the cutting unit and the holding table; and a controller for receiving information relating to the current value measured by the sensor, wherein the controller rotates the spindle with the motor while the tool including the grinding member is held by the holding table, and begins monitoring the current value. After starting to monitor the current value, the controller causes the movement mechanism to move the spindle and the holding table relatively in a direction intersecting an axis of the spindle, and then stops the spindle and the holding table relative to each other. After starting to monitor the current value, the controller determines whether the grinding member has come into contact with the mount flange based on the current value.

[0014] Preferably, the apparatus further comprises an output device capable of outputting information to the outside, and the controller causes the output device to output the result obtained by the determination. [Effects of the Invention]

[0015] According to a method for repairing a mount flange according to one aspect of the present invention and a cutting device according to another aspect, it is possible to reliably determine whether a grinding member for repairing the end face has come into contact with the mount flange based on the current value of the current flowing through the motor that rotates the spindle. Therefore, by using the result of this determination, it is possible to appropriately repair the end face of the mount flange without relying on the experience of the operator. [Brief explanation of the drawings]

[0016] [Figure 1] FIG. 1 is a perspective view schematically showing a cutting device. [Figure 2] FIG. 2 is an exploded perspective view schematically showing the structure of the cutting unit. [Figure 3] FIG. 3 is a perspective view schematically showing a tool used when modifying the shape of the mount flange. [Figure 4] FIG. 4 is a flowchart showing the flow of the mounting flange repair method according to this embodiment. [Figure 5] FIG. 5 is a front view schematically showing a state in which the tool is held by the chuck table. [Figure 6] FIG. 6 is a side view schematically showing the state in which the grindstone moves relatively to the mount flange in the X1 direction along the X axis. [Figure 7] FIG. 7 is a side view schematically showing the state in which the grindstone moves relatively to the mount flange in the X2 direction along the X axis. [Figure 8] FIG. 8 is a flowchart showing part of the flow of a method for repairing a mount flange according to a modified example. [Figure 9] FIG. 9 is a side view schematically showing how the grindstone moves relative to the mount flange in the X1 direction along the X axis in a method for correcting a mount flange according to a modified example. [Figure 10] FIG. 10 is a side view schematically showing how the grindstone moves relative to the mount flange in the X2 direction along the X axis in a method for adjusting a mount flange according to a modified example. DETAILED DESCRIPTION OF THE INVENTION

[0017] Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. Fig. 1 is a perspective view showing a cutting device 2 according to this embodiment. Note that in Fig. 1, some elements are expressed as functional blocks. Furthermore, the X-axis (front-rear axis), Y-axis (left-right axis), and Z-axis (vertical axis) used in the following description are perpendicular to one another.

[0018] As shown in Fig. 1, the cutting device 2 includes a base 4 that supports various elements. An opening 4a is formed in a corner of the upper surface of the base 4, and a cassette table 6 that is raised and lowered by a lifting mechanism (not shown) is disposed within this opening 4a. A cassette 8 that can accommodate a plate-shaped workpiece 11 is placed on the upper surface of the cassette table 6. For ease of explanation, only the outline of the cassette 8 is shown in Fig. 1.

[0019] The workpiece 11 is typically a disk-shaped wafer made of a semiconductor such as silicon (Si), and has a circular front surface and a circular back surface opposite the front surface. The front surface of the workpiece 11 is partitioned into a plurality of small regions by a plurality of linear processing lines (streets) that intersect with each other, and a device such as an IC (Integrated Circuit) is formed in each small region.

[0020] A tape (dicing tape) 13 having a diameter larger than that of the workpiece 11 is attached to the back side of the workpiece 11. A ring-shaped frame 15 is fixed to the outer edge of the tape 13 so as to surround the workpiece 11. In this way, the workpiece 11 is accommodated in the cassette 8 while being supported by the frame 15 via the tape 13.

[0021] In this embodiment, a disk-shaped wafer made of a semiconductor such as silicon is exemplified as the workpiece 11, but the material, shape, structure, size, etc. of the workpiece 11 are not limited to this embodiment. For example, a substrate made of other semiconductors, ceramics, resin, metal, etc. may be used as the workpiece 11. Similarly, the type, number, shape, structure, size, arrangement, etc. of the devices are not limited to the above embodiment. The workpiece 11 does not necessarily have to have any devices formed thereon.

[0022] An opening 4b that is long in the direction along the X-axis is formed at a position adjacent to the cassette table 6 along the Y-axis. A ball screw type chuck table moving mechanism (processing feed mechanism) 10 is disposed within the opening 4b. The chuck table moving mechanism 10 includes a rotational drive source (not shown) such as a motor connected to the end of a ball screw, and an X-axis moving table (not shown) having a nut portion coupled to the ball screw, and moves the X-axis moving table along the X-axis.

[0023] The top of the X-axis moving table is covered by a table cover 10a. In addition, accordion-shaped dustproof and drip-proof covers 10b that expand and contract in accordance with the movement of the X-axis moving table and table cover 10a are attached to both ends of the table cover 10a in the direction along the X-axis. A chuck table (holding table) 12 for holding a workpiece 11 is arranged above the X-axis moving table in a manner that it is exposed from the table cover 10a.

[0024] The chuck table 12 is connected to a rotary drive source (not shown) such as a motor, and rotates around a rotation axis that is roughly parallel to the Z axis. The chuck table 12 is also moved along the X axis together with the X axis moving table by the above-mentioned chuck table moving mechanism 10 (processing feed).

[0025] The chuck table 12 includes a disk-shaped frame 14 made of a metal such as stainless steel. A recess with a circular opening at the top end is formed on the top surface of the frame 14. A disk-shaped holding plate 16 that matches the shape of the recess is fitted into the recess of the frame 14. Four clamps 18 are arranged around the periphery of the frame 14 to secure an annular frame 15 that supports the workpiece 11.

[0026] The holding plate 16 is made of a porous plate-like material such as ceramics, and holds the workpiece 11 on its upper surface (holding surface) 16a. The upper surface 16a of the holding plate 16 is configured to be generally parallel to the X-axis and Y-axis when the holding plate 16 is fitted into the recess of the frame 14. In other words, the chuck table 12 rotates around a rotation axis that is generally perpendicular to the upper surface 16a of the holding plate 16.

[0027] A suction source (not shown) is connected to the bottom of the recess in the frame 14 via a flow path (not shown), a valve (not shown), etc. Therefore, when the valve is opened, negative pressure from the suction source acts on the upper surface 16a of the holding plate 16 through the flow path, etc. As the suction source, for example, a vacuum pump or the like that combines an air supply source and an ejector is used. However, a rotary pump or the like may also be used as the suction source.

[0028] Above the opening 4b, one or more transport mechanisms (not shown) are arranged that can transport the above-mentioned workpiece 11 (frame 15) to the chuck table 12, etc. The workpiece 11 transported by the transport mechanism is placed on the upper surface 16a of the chuck table 12 so that the front surface side is exposed upward, for example.

[0029] A cantilevered support structure 20 is disposed at a position adjacent to the opening 4b along the Y axis. A cutting unit movement mechanism (indexing feed mechanism, cutting feed mechanism) 22 is disposed above the support structure 20. This cutting unit movement mechanism 22 has a pair of Y-axis guide rails 24 that are fixed to the front (surface) of the support structure 20 and are generally parallel to the Y axis.

[0030] A Y-axis moving plate 26 that constitutes the cutting unit moving mechanism 22 is attached to the Y-axis guide rail 24 in a manner that allows it to slide along the Y-axis. A nut portion (not shown) that constitutes a ball screw is provided on the rear side (back surface side) of the Y-axis moving plate 26, and a screw shaft 28 that is generally parallel to the Y-axis guide rail 24 is rotatably connected to the nut portion.

[0031] A rotary drive source (not shown), such as a motor, is connected to one end of the screw shaft 28. By rotating the screw shaft 28 with the rotary drive source, the Y-axis moving plate 26 moves along the Y-axis guide rail 24. A pair of Z-axis guide rails 30, which are generally parallel to the Z-axis, are fixed to the front (surface) of the Y-axis moving plate 26. A Z-axis moving plate 32 is attached to the pair of Z-axis guide rails 30 in a manner that allows it to slide along the Z-axis.

[0032] A nut portion (not shown) constituting a ball screw is provided on the rear side (back surface side) of Z-axis moving plate 32, and a screw shaft 34 that is generally parallel to Z-axis guide rail 30 is rotatably connected to the nut portion. A rotation drive source 36 such as a motor is connected to one end of screw shaft 34. By rotating screw shaft 34 with rotation drive source 36, Z-axis moving plate 32 moves along Z-axis guide rail 30.

[0033] A cutting unit 38 is fixed to the lower part of the Z-axis moving plate 32. Figure 2 is an exploded perspective view showing a schematic structure of the cutting unit 38. The cutting unit 38 includes a cylindrical spindle housing 40. The spindle housing 40 accommodates a cylindrical spindle 42 that serves as a rotation axis along the Y-axis.

[0034] The tip (one end) of the spindle 42 is exposed to the outside of the spindle housing 40. A threaded hole 42a is formed in the tip surface of the tip of the spindle 42. A base end (the other end) of the spindle 42 is connected to a rotation drive source (not shown) such as a motor.

[0035] An annular cutting blade 46 is attached to the tip of the spindle 42 via a blade mounter 44. The blade mounter 44 includes a mount flange 48 that is attached to the tip of the spindle 42 and supports the cutting blade 46. The mount flange 48 includes a disk-shaped flange portion 50 and a cylindrical boss portion 52 that protrudes from the center of a circular first surface 50a of the flange portion 50.

[0036] A hole 48a is formed in the mount flange 48, which penetrates the center of the flange portion 50 from the first surface 50a side to the second surface 50b side, and penetrates the center of the boss portion 52 from the tip 52a side to the base end side (flange portion 50 side). The tip portion of the spindle 42 is inserted into the hole 48a from the second surface 50b side of the flange portion 50, and the mount flange 48 is attached to the spindle 42 from the second surface 50b side of the flange portion 50.

[0037] An annular receiving portion is provided inside the hole 48a to receive the tip end of the spindle 42 and the head of the screw 54. Therefore, by inserting the screw 54 into the hole 48a from the tip 52a side of the boss portion 52 and tightening the screw 54 into the screw hole 42a of the spindle 42 through this hole 48a, the mount flange 48 is fixed to the tip end of the spindle 42.

[0038] An annular protrusion 50c is provided on the outer periphery of the flange 50 on the first surface 50a side, protruding slightly in a direction intersecting the first surface 50a (typically, a direction perpendicular to the first surface 50a). A tip end surface 50d of the protrusion 50c is formed to be generally flat. A screw thread is provided in the region of the outer periphery 52b of the boss 52 on the tip end 52a side.

[0039] The cutting blade 46 is a so-called hub-type cutting blade that integrally includes a truncated cone-shaped blade base 56 made of metal or the like and an annular cutting edge 58 provided along the outer periphery of the blade base 56. The blade base 56 has a curved surface (first surface) 56a that corresponds to the side surface of the truncated cone, and a flat surface (second surface) (not shown) that corresponds to the bottom surface of the truncated cone and faces generally opposite the curved surface 56a.

[0040] A hole 56b is provided in the center of the blade base 56 (the center of the cutting blade 46), penetrating the blade base 56 from the curved surface 56a to the flat surface. The cutting blade 58 has a structure in which abrasive grains made of, for example, diamond or the like are fixed with a binder containing metal, ceramic, resin or the like, and is fixed to the outer edge of the flat surface of the blade base 56.

[0041] When attaching the cutting blade 46 to the mount flange 48, the boss portion 52 is inserted into the hole 56b of the blade base 56 so that the flat surface of the blade base 56 contacts the tip surface 50d of the flange portion 50. Thereafter, when fixing the cutting blade 46 to the mount flange 48, the boss portion 52 is inserted into the hole 60a of the annular nut 60.

[0042] A surface 60b defining the hole 60a of the nut 60 is formed with threads that correspond to the threads of the boss portion 52. Therefore, when the boss portion 52 and the nut 60 are rotated relative to each other with part of the boss portion 52 inserted into the hole 60a of the nut 60, the nut 60 is tightened onto the boss portion 52. Then, the nut 60 comes into contact with the curved surface 56a of the blade base 56, and the cutting blade 46 is sandwiched between the mount flange 48 and the nut 60. In other words, the cutting blade 46 is fixed by being sandwiched between the flange portion 50 and the nut 60.

[0043] In this embodiment, a so-called hub-type cutting blade 46 in which the cutting edge 58 is fixed to the blade base 56 is attached to the spindle 42, but a so-called washer-type cutting blade consisting only of a cutting edge may also be attached to the spindle. In this case, the cutting blade is fixed by being sandwiched between a mount flange (fixing flange) having a structure similar to that of the mount flange 48 and a press flange (and a nut).

[0044] 1, the cutting unit 38 is provided with a blade cover 62 that partially covers the outer periphery of the cutting blade 46. This blade cover 62 is provided with a nozzle 64 that can supply a cutting liquid (cutting fluid) such as water to the outer periphery of the cutting blade 46 when processing the workpiece 11 or the like.

[0045] A camera (imaging unit) 66 for capturing images of the workpiece 11 held by the chuck table 12 is fixed to a position adjacent to the cutting unit 38 below the Z-axis moving plate 32. Therefore, when the Y-axis moving plate 26 is moved along the Y-axis by the cutting unit moving mechanism 22, the cutting unit 38 and camera 66 also move along the Y-axis (indexing feed). Also, when the Z-axis moving plate 32 is moved along the Z-axis by the cutting unit moving mechanism 22, the cutting unit 38 and camera 66 also move along the Z-axis (cutting feed).

[0046] An opening 4c is formed at a position opposite to opening 4a with respect to opening 4b. A cleaning unit 68 is disposed within opening 4c for cleaning workpiece 11 and the like after cutting. A controller (control unit) 70 is connected to elements such as chuck table moving mechanism 10, transport mechanism, cutting unit moving mechanism 22, cutting unit 38, camera 66, and cleaning unit 68.

[0047] The controller 70 is configured by, for example, a computer including a processing device 72 and a storage device 74, and controls the operation of each element of the above-mentioned cutting device 2 so that the workpiece 11 is properly cut. The processing device 72 is typically a CPU (Central Processing Unit) and performs various processes required to control the above-mentioned elements.

[0048] The storage device 74 includes, for example, a main storage device such as a DRAM (Dynamic Random Access Memory) and an auxiliary storage device such as a hard disk drive, a flash memory, etc. The functions of the controller 70 are realized, for example, by the processing device 72 operating in accordance with software (programs, etc.) stored in the storage device 74.

[0049] An input / output device (input device, output device) 76 that serves as a user interface is connected to the controller 70. The input / output device 76 is, for example, a touch screen, and inputs instructions from an operator to the controller 70. Furthermore, the input / output device 76 outputs (displays, in the case of a touch screen) information related to the cutting device 2 based on instructions from the controller 70 in a format that can be recognized by the operator.

[0050] In this embodiment, an input / output device 76 having both an input function and an output function is shown, but an input device having an input function and an output device having an output function may each be connected to the controller 70. Examples of input devices that can be used include a keyboard and a mouse. Examples of output devices that can be used include a display device such as a liquid crystal display, a speaker that can communicate information by sound, and an indicator light that can communicate information by the color of light or the state of light emission (on, blinking, off, etc.).

[0051] Furthermore, a sensor 78 that can measure the magnitude of the current flowing through the motor or the like that constitutes the rotational drive source of the cutting unit 38 is connected to the controller 70. The magnitude of the current measured by the sensor 78, i.e., the current value of the current flowing through the motor or the like, is sent to the controller 70 and used in the processing described below. The sensor 78 may be configured integrally with the rotational drive source of the cutting unit 38, or may be provided external to the rotational drive source.

[0052] When cutting the workpiece 11 with the cutting device 2 configured in this manner, the workpiece 11 is held by the chuck table 12 described above, and then the relative positions and orientations of the chuck table 12 and the cutting unit 38 are adjusted. Then, the cutting blade 46 is rotated at high speed, and the chuck table 12 and the cutting unit 38 are moved relatively by the chuck table moving mechanism 10 and the cutting unit moving mechanism 22, whereby the cutting blade 46 cuts into the workpiece 11, and the workpiece 11 is cut.

[0053] However, immediately after the mount flange 48 is attached to the spindle 42, the tip surface 50d of the mount flange 48 is not necessarily perpendicular to the axis of the spindle 42 or the upper surface 16a of the chuck table 12. Furthermore, the tip surface 50d of the mount flange 48 may become scratched as the cutting process progresses, and the flatness of the tip surface 50d may be impaired.

[0054] If the tip surface 50d is tilted relative to the axis of the spindle 42 or if the tip surface 50d is insufficiently flat, the cutting blade 46 will be tilted relative to the intended cutting line, or the outer periphery of the cutting blade 46 will vibrate. In this case, a sufficiently high cutting accuracy cannot be obtained. Therefore, the shape of the tip surface 50d of the mount flange 48 is modified as necessary.

[0055] 3 is a perspective view that schematically shows a tool 80 used when modifying the shape of the mount flange 48. As shown in FIG. 3, the tool 80 includes a disk-shaped tool base 82 that is sized to correspond to the upper surface 16a of the chuck table 12. The tool base 82 is made of a material such as stainless steel, and has a circular first surface 82a and a circular second surface 82b that faces the opposite side to the first surface 82a.

[0056] The second surface 82b of the tool base 82 is configured, for example, so that its diameter (radius or diameter) is larger than the diameter of the upper surface 16a of the chuck table 12. Therefore, when the tool base 82 is placed on the chuck table 12 so that the second surface 82b of the tool base 82 contacts the upper surface 16a of the chuck table 12, the upper surface 16a is covered with the second surface 82b.

[0057] A rectangular parallelepiped grindstone fixture 84 is disposed on the first surface 82a side of the tool base 82. This grindstone fixture 84 includes a first fixing member 86 and a second fixing member 88 formed of a material such as stainless steel. The first fixing member 86 is fixed to the first surface 82a such that one end thereof protrudes outward beyond the first surface 82a in the radial direction of the first surface 82a.

[0058] A second fixing member 88 is disposed on the opposite side of the tool base 82 with respect to the first fixing member 86, i.e., above the first fixing member 86. The second fixing member 88 is fixed to the first fixing member 86 by a fastener 90 such as a screw. A grinding stone (member for grinding) 92 for processing the tip surface 50d of the mount flange 48 is fixed by the grinding stone fixture 84 configured in this manner.

[0059] The grindstone 92 is, for example, a rectangular parallelepiped member made of a material suitable for grinding the tip surface 50d of the mount flange 48, and is also referred to as a grindstone tip or the like. The grindstone 92 is fixed to the grindstone fixture 84 so that it is sandwiched between the upper surface of one end of the first fixed member 86 and the corresponding lower surface of the second fixed member 88. For example, while the mount flange 48 is rotating, the tip 92a of the grindstone 92 comes into contact with the tip surface 50d of the mount flange 48, thereby modifying the shape of the tip surface 50d.

[0060] Next, a method for correcting a mount flange according to this embodiment and the operation of the cutting device 2 related to this correction method will be described. Fig. 4 is a flowchart that schematically shows the flow of the method for correcting a mount flange according to this embodiment. As shown in Fig. 4, in the method for correcting a mount flange according to this embodiment, first, the above-mentioned tool 80 is held by the chuck table 12 (holding step ST101).

[0061] 5 is a side view schematically showing a state in which the tool 80 is held by the chuck table 12. In this holding step ST101, for example, an operator of the cutting device 2, who is an operator, places the tool 80 on the chuck table 12 so that the second surface 82b of the tool base 82 contacts the upper surface 16a of the chuck table 12. At this time, it is preferable that the operator roughly adjust the orientation relationship between the grindstone 92 and the mount flange 48 so that the tip 92a of the grindstone 92 faces the mount flange 48, as shown in FIG.

[0062] Thereafter, under the instruction of the operator, when the valve is opened with the suction source operating, the tool 80 is held on the chuck table 12 by the negative pressure of the suction source acting on the upper surface 16a of the chuck table 12. In this manner, the chuck table 12 provided in the cutting device 2 of this embodiment is configured to be able to selectively hold the above-mentioned workpiece 11 and the tool 80 including the grinding wheel 92 on its upper surface 16a.

[0063] After the holding step ST101, the positional and directional relationship between the grindstone 92 and the mount flange 48 is adjusted (adjusting step ST102). Specifically, for example, the operator or the controller 70 rotates the chuck table 12 so that the tip 92a of the grindstone 92 and the first surface 50a of the mount flange 48 face each other. This adjusts the directional relationship between the grindstone 92 and the mount flange 48.

[0064] Furthermore, for example, the operator or the controller 70 moves the chuck table 12 and the cutting unit 38 relatively along the Y axis so that the position of the tip 92a of the grindstone 92 in the direction along the Y axis (the direction parallel to the axis of the spindle 42) coincides with the position of the tip surface 50d of the mount flange 48. In other words, the positional relationship between the grindstone 92 and the mount flange 48 in the direction parallel to the axis of the spindle 42 is adjusted.

[0065] Then, the operator or the controller 70 moves the chuck table 12 and the cutting unit 38 relatively along the X-axis and / or Z-axis so that the grinding wheel 92 is positioned at a first standby position where it does not come into contact with the tip surface 50d. In other words, the positional relationship between the grinding wheel 92 and the mount flange 48 is adjusted in a direction perpendicular to the axis of the spindle 42.

[0066] In this embodiment, the adjusting step ST102 is performed after the holding step ST101, but there are no limitations on the order or timing of these steps. For example, the valve that applies negative pressure from the suction source may be opened after the tool 80 is placed on the chuck table 12 and the positional and directional relationship between the grinding wheel 92 and the mount flange 48 is adjusted. In other words, the holding step ST101 and the adjusting step ST102 may be performed substantially in parallel.

[0067] The shape of the tip surface 50d of the mount flange 48 is corrected by relatively moving the grinding stone 92 and the mount flange 48 in a direction intersecting the axis of the spindle 42 so that the tip 92a of the grinding stone 92 crosses the tip surface 50d, and bringing the tip 92a into contact with the tip surface 50d. There is a close relationship between the resulting shape of the tip surface 50d and the time of contact between the grinding stone 92 and the mount flange 48, that is, the number of times this relative movement occurs.

[0068] Therefore, after the holding step ST101 and the adjusting step ST102 are performed, a target number of relative movements between the chuck table 12 and the cutting unit 38 along a direction intersecting the axis of the spindle 42 is set (setting step ST103). Specifically, the operator sets the number of relative movements necessary to realize the target shape of the tip end surface 50d as the target number (n) in the controller 70.

[0069] In this embodiment, a direction parallel to the X-axis is adopted as the direction of this relative movement. That is, the operator sets the number of relative movements along the X-axis necessary to achieve the target shape of the tip end surface 50d as a target number (n) in the controller 70. However, other directions intersecting the axis of the spindle 42 may also be adopted as the direction of relative movement.

[0070] After setting step ST103, under the instruction of the operator, the controller 70 rotates the spindle 42 together with the mount flange 48 at a preset speed. The rotation speed of the spindle 42 (the number of rotations of the spindle 42 per unit time) is set to, for example, 10,000 rpm or more and 50,000 rpm or less.

[0071] At the same time, the controller 70 starts monitoring the current value of the current flowing through the motor or the like that constitutes the rotation drive source for rotating the spindle 42 (monitoring start step ST104). That is, the controller 70 starts monitoring the change in the current value included in the information received from the sensor 78.

[0072] In this embodiment, the monitoring start step ST104 is performed after the setting step ST103, but there are no limitations on the order or timing of these steps. For example, the monitoring start step ST104 may be performed after the holding step ST101 and the adjusting step ST102 are performed and before the setting step ST103 is performed.

[0073] Furthermore, the monitoring start step ST104 may be performed before the holding step ST101 or the adjusting step ST102. In this case, however, the controller 70 starts monitoring the current value without rotating the spindle 42, and rotates the spindle 42 after the holding step ST101 and the adjusting step ST102 are performed.

[0074] After performing monitoring start step ST104, the controller 70 starts relative movement between the chuck table 12 and the cutting unit 38 in a direction intersecting the axis of the spindle 42 while the spindle 42 is rotating (movement start step ST105). As described above, in this embodiment, the direction of this relative movement is a direction parallel to the X-axis. Figure 6 is a side view schematically showing the grinding wheel 92 moving relative to the mount flange 48 in the X1 direction along the X-axis.

[0075] Specifically, the controller 70 controls the operation of the chuck table moving mechanism 10 so that the chuck table 12 moves in the X1 direction at a preset speed (for example, a constant speed). As a result, when the grinding wheel 92 crosses the tip surface 50d of the rotating mount flange 48 along the X axis, the tip portion 92a comes into contact with the tip surface 50d, and the tip surface 50d is ground. The moving speed of the chuck table 12 is typically 1 mm / s or more and 30 mm / s or less.

[0076] Thereafter, the controller 70 ends the relative movement between the chuck table 12 and the cutting unit 38 at the timing after the grinding wheel 92 has crossed the tip surface 50d (movement end step ST106). Specifically, the controller 70 controls the operation of the chuck table moving mechanism 10 to stop the chuck table 12 so that the grinding wheel 92 stops at a preset second standby position (the position indicated by the dashed line in FIG. 6).

[0077] After the movement end step ST106, the controller 70 determines whether or not the grinding wheel 92 has come into contact with the mount flange 48 based on the current value (contact determination step ST107). Here, it is determined whether or not the grinding wheel 92 has come into contact with the tip surface 50d of the mount flange 48 during the relative movement from the first standby position to the second standby position.

[0078] For example, when the grinding wheel 92 comes into contact with the mount flange 48, a frictional force acts on the contacting portion to slow down the rotation of the spindle 42. A large current is then passed through the motor or the like that constitutes the rotational drive source in order to maintain the rotational speed of the spindle 42. Therefore, the controller 70 monitors the value of the current flowing through the motor or the like that constitutes the rotational drive source, and by detecting an increase in this current, can appropriately determine whether the tip 92a of the grinding wheel 92 has come into contact with the tip surface 50d of the mount flange 48.

[0079] For example, when a current value higher than a preset threshold is measured, the controller 70 determines that the grinding wheel 92 has come into contact with the mount flange 48. Alternatively, when a change in the current value is measured such that the amount of change (slope) in the current value over time is greater than a preset amount of change (slope), the controller 70 determines that the grinding wheel 92 has come into contact with the mount flange 48. However, the controller 70 may use other criteria to determine whether the grinding wheel 92 has come into contact with the mount flange 48.

[0080] If it is determined that the grindstone 92 has not come into contact with the mount flange 48 (NO in contact determination step ST107), the controller 70 notifies the operator of this fact via the input / output device (output device) 76 (notification step ST108). That is, the controller 70 causes the input / output device 76 to output the result obtained in contact determination step ST107; for example, if the input / output device 76 is a touch screen, this fact is displayed on the touch screen.

[0081] Thereafter, the positional relationship between the grindstone 92 and the mount flange 48 is readjusted (readjustment step ST109). Specifically, upon receiving the notification, the operator or controller 70 moves the chuck table 12 and the cutting unit 38 relatively along the Y axis so as to bring the position of the tip end 92a of the grindstone 92 and the position of the tip end surface 50d of the mount flange 48 closer together in the direction along the Y axis. This brings the grindstone 92 and the mount flange 48 closer together in a direction parallel to the axis of the spindle 42. Note that this readjustment is preferably performed with the rotation of the spindle 42 stopped.

[0082] After readjustment step ST109, the controller 70 restarts the relative movement between the chuck table 12 and the cutting unit 38 along the direction intersecting the axis of the spindle 42, i.e., the X-axis, while the spindle 42 is rotating (movement start step ST105). The controller 70 also ends the relative movement between the chuck table 12 and the cutting unit 38 after the grinding wheel 92 has crossed the tip end surface 50d (movement end step ST106). The subsequent steps are as described above.

[0083] On the other hand, when it is determined that the grindstone 92 has come into contact with the mount flange 48 (YES in contact determination step ST107), the controller 70 updates the number of contacts (updating step ST110). Specifically, the controller 70 adds 1 to the previously stored number of contacts (i) to store the value (i+1) as the new updated number of contacts (i).

[0084] After the update step ST110, the controller 70 determines whether or not the number of times (i) of the updated new contact has reached the target number of times (n) (number-of-times determination step ST111). If the number of times of contact (i) has not reached the target number of times (n) (NO in the number-of-times determination step ST111, i < n), the positional relationship between the grindstone 92 and the mount flange 48 is readjusted (readjustment step ST109).

[0085] Specifically, the controller 70 or the operator relatively moves the chuck table 12 and the cutting unit 38 along the Y-axis so that the position of the tip 92a of the grindstone 92 in the direction along the Y-axis and the position of the front end face 50d of the mount flange 48 are closer to each other. Note that this readjustment is preferably performed while the spindle 42 is rotating. Also, the relative movement distance at this time is set in consideration of the wear of the grindstone 92 due to the contact between the grindstone 92 and the mount flange 48, and typically, it is 1 μm or more and 10 μm or less.

[0086] After the readjustment step ST109, the controller 70 restarts the relative movement of the chuck table 12 and the cutting unit 38 along the direction intersecting the axis of the spindle 42, that is, the X-axis, while the spindle 42 is rotating (movement start step ST105). Also, the controller 70 ends the relative movement of the chuck table 12 and the cutting unit 38 at the timing after the grindstone 92 has crossed the front end face 50d (movement end step ST106). The subsequent steps are as described above.

[0087] That is, until the number of times (i) determined that the grindstone 92 has contacted the mount flange 48 reaches the target number of times (n), the readjustment step ST109, the movement start step ST105, and the movement end step ST106 are repeated in this order. The readjustment step ST109 performed after the update step ST110 is repeated like this until the target number of times (n) is reached, so it is preferably controlled by the controller 70 without the intervention of the operator.

[0088] If the grinding wheel 92 has stopped at the second standby position in the immediately preceding movement end step ST106, it is preferable that the next movement start step ST105 be started from a state in which the grinding wheel 92 is stopped at the second standby position. Fig. 7 is a side view schematically showing the state in which the grinding wheel 92 moves relatively to the mount flange 48 in the X2 direction along the X axis.

[0089] When the relative movement of the grinding wheel 92 is started from a state where the grinding wheel 92 is stopped at the second standby position, the controller 70 controls the operation of the chuck table moving mechanism 10 so that the chuck table 12 moves in the X2 direction opposite to the X1 direction at a preset speed (for example, a constant speed). The conditions such as the speed of movement of the chuck table 12 may be the same as when the relative movement of the grinding wheel 92 is started from a state where the grinding wheel 92 is stopped at the first standby position.

[0090] Thereafter, the controller 70 ends the relative movement between the chuck table 12 and the cutting unit 38 at the timing after the grinding wheel 92 has crossed the tip surface 50d (movement end step ST106). Specifically, the controller 70 controls the operation of the chuck table moving mechanism 10 to stop the chuck table 12 so that the grinding wheel 92 stops at a preset first standby position (the position indicated by the dashed line in FIG. 7).

[0091] As described above, the direction of relative movement when the grindstone 92 is stopped at the first standby position before the movement start step ST105 is performed (or after the immediately preceding movement end step ST106 is performed) is the X1 direction. In this way, by switching the direction of relative movement according to the position where the grindstone 92 is stopped, it is possible to efficiently repeat relative movement.

[0092] When the number of contacts (i) reaches the target number of contacts (n) (i≧n, YES in number determination step ST111), the controller 70 stops monitoring the current value (monitoring end step ST112), thereby properly correcting the shape of the tip surface 50d of the mount flange 48.

[0093] As described above, the mount flange repair method and cutting device 2 according to this embodiment reliably determine whether the grinding wheel (member for grinding) 92 for repairing the leading end surface (end surface) 50d has come into contact with the mount flange 48, based on the current value of the current flowing through the motor or the like that constitutes the rotary drive source that rotates the spindle 42. Therefore, by using the result of this determination, it becomes possible to appropriately repair the leading end surface 50d of the mount flange 48 without relying on the experience, etc., of the operator of the cutting device 2, who is the worker.

[0094] The present invention is not limited to the above-described embodiment and can be implemented with various modifications. For example, in the above-described embodiment, the relative movement between the chuck table 12 and the cutting unit 38 is repeated by setting a target number of times in setting step ST103. However, if the relative movement does not need to be repeated, setting step ST103 may be omitted. Even in this case, whether or not the grinding wheel 92 has come into contact with the mount flange 48 can be reliably determined, and the leading end surface 50d of the mount flange 48 can be appropriately corrected.

[0095] In addition, in the above-described embodiment, the contact determination step ST107, the update step ST110, and the number of times determination step ST111 are performed after the movement end step ST106 is performed, but some or all of these steps may be performed before the movement end step ST106. In other words, the determination of contact, the update of the number of times of contact, and the determination of whether the target number of times has been achieved may be performed while the chuck table 12 and the cutting unit 38 are moving relative to each other.

[0096] Furthermore, in the above-described embodiment, the relative movement between the chuck table 12 and the cutting unit 38 is controlled so that the grinding wheel 92 stops at the preset first and second standby positions, but the grinding wheel 92 may stop at a position determined by other methods. Fig. 8 is a flowchart showing part of the flow of a mount flange repair method according to a modified example. Note that parts common to Fig. 4 are omitted in Fig. 8.

[0097] In the method for correcting a mount flange according to the modified example, the controller 70 determines the position at which the grinding wheel 92 stops, using the current value measured by the sensor 78. Specifically, immediately after or simultaneously with the movement start step ST105, the controller 70 sets a parameter indicating the most recent contact state between the grinding wheel 92 and the mount flange 48 to "non-contact" (state setting step ST201).

[0098] Then, the controller 70 determines whether or not the grinding wheel 92 is in contact with the mount flange 48 at that time based on the current value of the current flowing through the motor or the like constituting the rotation drive source (contact determination step ST202). The specific method of determination may be the same as that of the contact determination step ST107 described above.

[0099] If it is determined that the grindstone 92 is not in contact with the mount flange 48 (NO in contact determination step ST202), the controller 70 determines whether the most recent parameter (state) is "in contact" (state determination step ST203). If it is determined that the most recent parameter is not "in contact" (NO in state determination step ST203), the contact determination step ST202 is performed again.

[0100] On the other hand, if it is determined in contact determination step ST202 that the grindstone 92 is in contact with the mount flange 48 (YES in contact determination step ST202), the controller 70 changes (sets) the parameter (state) to "in contact" (state change step ST204). In this case as well, the contact determination step ST202 is then performed again.

[0101] If it is determined in the contact determination step ST202 that the grinding wheel 92 is not in contact with the mount flange 48 (NO in the contact determination step ST202), and if it is determined in the state determination step ST203 that the most recent parameter is "in contact" (YES in the state determination step ST203), then the movement end step ST106 is performed immediately thereafter.

[0102] Fig. 9 is a side view schematically showing how the grindstone 92 moves relative to the mount flange 48 in the X1 direction along the X axis in a method for correcting a mount flange according to a modified example. Also, Fig. 10 is a side view schematically showing how the grindstone 92 moves relative to the mount flange 48 in the X2 direction along the X axis in a method for correcting a mount flange according to a modified example.

[0103] As described above, in the mount flange correction method according to this modified example, contact determination step ST202 is repeated before movement end step ST106 is performed, and the state of contact between the grinding wheel 92 and the mount flange 48 is immediately determined. Furthermore, in the mount flange correction method according to the modified example, if it is determined in contact determination step ST202 that the grinding wheel 92 is in contact with the mount flange 48 and then it is determined that the grinding wheel 92 is not in contact, movement end step ST106 is performed.

[0104] 9 and 10, this modification minimizes the distance of relative movement between the chuck table 12 and the cutting unit 38. In other words, compared to the case where the grinding wheel 92 is stopped at the preset first and second standby positions, the modification of the tip surface 50d of the mount flange 48 can be completed in a shorter time.

[0105] Furthermore, in the above-described embodiment, whether or not the grindstone 92 has come into contact with the mount flange 48 is determined for each of the movement in the X1 direction and the movement in the X2 direction, that is, for each of the outward and return paths, but the object of the determination is not limited to this. Whether or not the grindstone 92 has come into contact with the mount flange 48 may be determined by treating the movement in the X1 direction and the movement in the X2 direction as a whole, that is, by determining the reciprocating movement.

[0106] Furthermore, in the above-described embodiment, the positional relationship between the grindstone 92 and the mount flange 48 is readjusted after each of the forward and backward passes, but the timing of the readjustment is not limited to this. For example, the positional relationship between the grindstone 92 and the mount flange 48 may not be readjusted after the forward pass, and may be readjusted after the backward pass. In other words, the positional relationship between the grindstone 92 and the mount flange 48 may be readjusted only after the reciprocating movement.

[0107] In addition, the structures, methods, etc. according to the above-described embodiments and modifications may be modified and implemented without departing from the scope of the present invention. [Explanation of symbols]

[0108] 2:Cutting device 4: Base 4a: Opening 4b: Opening 4c: opening 6: Cassette table 8: Cassette 10: Chuck table moving mechanism (processing feed mechanism) 10a: Table cover 10b: Dustproof and water-resistant cover 12: Chuck table (holding table) 14:Frame body 16: Holding plate 16a:Top surface (holding surface) 18: Clamp 20:Support structure 22: Cutting unit movement mechanism (indexing feed mechanism, cutting feed mechanism) 24: Y-axis guide rail 26: Y-axis moving plate 28: Screw shaft 30: Z-axis guide rail 32: Z-axis moving plate 34: Screw shaft 36: Rotation drive source 38: Cutting unit 40: Spindle housing 42: Spindle 42a: screw hole 44: Blade mounter 46: Cutting blade 48: Mount flange 48a: Hole 50: Flange part 50a: Side 1 50b: 2nd side 50c: Convex part 50d: Tip face (end face) 52: Boss Department 52a: Tip 52b: Outer surface 54: Screw 56: Blade base 56a: Curved surface (first surface) 56b: Hole 58: Cutting edge 60: Nut 60a: Hole 60b: face 62: Blade cover 64: Nozzle 66: Camera (imaging unit) 68: Cleaning unit 70: Controller (control unit) 72: Processing equipment 74: Storage device 76: Input / output device (input device, output device) 78: Sensor 80:Tools 82: Tool base 82a: 1st page 82b: 2nd side 84: Grindstone fixture 86: First fixing member 88: Second fixing member 90: Fasteners 92: Grinding wheels (grinding materials) 92a:Tip 11: Workpiece 13: Tape (dicing tape) 15: Frame ST101: Holding step ST102: Adjustment step ST103: Setting step ST104: Monitoring start step ST105: Movement start step ST106: Movement end step ST107: Contact detection step ST108: Notification step ST109: Recalibration Step ST110: Update step ST111: Number of times judgment step ST112: Monitoring end step ST201: Status setting step ST202: Contact detection step ST203: State determination step ST204: State change step

Claims

1. A method for correcting a mounting flange that is applied when correcting an end face of a mounting flange that is attached to the tip of a spindle and supports a cutting blade, comprising: a holding step of holding a tool including a member for grinding by a holding surface of a holding table; an adjusting step of adjusting the positional relationship between the grinding member and the mount flange in a direction parallel to the axis of the spindle; a monitoring start step of starting to monitor the current value of the current flowing through the motor that rotates the spindle; a movement start step of starting relative movement between the spindle being rotated by the motor and the holding table along a direction intersecting the axis after the holding step, the adjusting step, and the monitoring start step; a movement ending step, which ends the relative movement between the spindle and the holding table in a direction intersecting the axis, after the movement starting step; a contact determination step of determining, after the monitoring start step, whether or not the grinding member has come into contact with the mount flange based on the current value.

2. The method for correcting a mount flange according to claim 1 , further comprising: a notification step of notifying a result obtained by the determination in the contact determination step.

3. a readjustment step of readjusting a positional relationship between the grinding member and the mount flange in a direction parallel to the axis based on a result obtained by determining in the contact determination step after the movement completion step, 3. The method for correcting a mount flange according to claim 1, wherein the movement starting step and the movement ending step are performed again after the readjustment step.

4. a setting step of setting a target number of times of the relative movement before the movement start step, 4. The method for correcting a mount flange according to claim 3, wherein the readjustment step, the movement start step, and the movement end step are repeated in this order until the number of relative movements at which it is determined that the grinding member has come into contact with the mount flange reaches the target number set in the setting step.

5. the contact determination step is repeated before the movement end step; 3. The method for correcting a mount flange according to claim 1, wherein the movement termination step is performed when it is determined in the contact determination step that the grinding member is in contact with the mount flange and then determined that the grinding member is not in contact.

6. a cutting unit having a spindle with a mount flange attached to its tip end, the mount flange supporting a cutting blade at its end face, and a motor for rotating the spindle; a sensor that measures the current value of the current flowing through the motor; a holding table having a holding surface capable of selectively holding a tool including a grinding member and a workpiece; a moving mechanism that moves the cutting unit and the holding table relative to each other; a controller that receives information about the current value measured by the sensor; The controller With the tool including the grinding member held by the holding table, the spindle is rotated by the motor, and monitoring of the current value is started; After starting to monitor the current value, the movement mechanism moves the spindle and the holding table relatively in a direction intersecting the axis of the spindle, and then stops the spindle and the holding table relatively; After starting to monitor the current value, the cutting device determines whether or not the grinding member has come into contact with the mount flange based on the current value.

7. An output device capable of outputting information to the outside, The cutting device according to claim 6 , wherein the controller causes the output device to output a result obtained by the determination.

Images