Sensor and electronic apparatus

Abstract

To provide a sensor capable of improving detection accuracy, and an electronic apparatus.SOLUTION: A sensor comprises a first element part and a first circuit part. The first element part includes: a first substrate; a first fixed part fixed on the first substrate; a first movable part supported by the first fixed part and including first to fourth movable electrodes; and first to fourth fixed electrodes fixed on the first substrate. The first circuit part includes a control part. The control part is configured to execute a first operation. The first operation includes, on the basis of a first signal obtained from the first fixed electrode and a second signal obtained from the second fixed electrode: deriving a first value corresponding to vibration direction of the first movable part; and synchronously detecting a first function value of the first value and a second function value of the first value.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD OF THE INVENTION Embodiments of the present invention relate to sensors and electronic devices. [Background technology]

[0002] For example, there are sensors that use MEMS (Micro Electro Mechanical Systems) elements, etc. Improvement of accuracy in sensors is desired. [Prior art documents] [Non-patent literature]

[0003] [Non-Patent Document 1] F. Miyazaki, et al., Transducers 2021 Virtual Conference 20-24, June 2021. Summary of the Invention [Problem to be solved by the invention]

[0004] The embodiments provide sensors and electronic devices that allow for improved detection accuracy. [Means for solving the problem]

[0005] According to an embodiment, the sensor includes a first element unit and a first circuit unit. The first element unit includes a first base, a first fixed unit fixed to the first base, and a first movable unit supported by the first fixed unit, with a first gap between the first base and the first movable unit. The first movable unit includes a first movable electrode, a second movable electrode, a third movable electrode, and a fourth movable electrode. The first fixed electrode is fixed to the first base and faces the first movable electrode, a second fixed electrode is fixed to the first base and faces the second movable electrode, a third fixed electrode is fixed to the first base and faces the third movable electrode, and a fourth fixed electrode is fixed to the first base and faces the fourth movable electrode. A second direction from the first fixed electrode to the first fixed unit intersects with a first direction from the first base to the first fixed unit. A third direction from the second fixed electrode to the first fixed unit intersects with both the first direction and the second direction. The direction from the first fixed portion to the third fixed electrode is along the second direction. The direction from the first fixed portion to the fourth fixed electrode is along the third direction. The first circuit portion includes a control portion. The control portion is configured to perform a first operation. The first operation includes deriving a first value corresponding to the vibration direction of the first movable portion based on a first signal obtained from the first fixed electrode and a second signal obtained from the second fixed electrode, and synchronously detecting a first function value of the first value and a second function value of the first value. [Brief explanation of the drawings]

[0006] [Figure 1] FIG. 1 is a schematic view illustrating the sensor according to the first embodiment. [Figure 2] 2A and 2B are schematic cross-sectional views illustrating a part of the sensor according to the first embodiment. [Figure 3] FIG. 3 is a schematic view illustrating a part of the sensor according to the first embodiment. [Figure 4] 4(a) and 4(b) are graphs illustrating the operation of the sensor according to the first embodiment. [Figure 5] FIG. 5 is a schematic view illustrating a part of the sensor according to the first embodiment. [Figure 6] FIG. 6 is a schematic plan view illustrating a part of the sensor according to the first embodiment. [Figure 7] FIG. 7 is a schematic view illustrating an electronic device according to the second embodiment. [Figure 8] 8(a) to 8(h) are schematic views illustrating applications of the electronic device according to the embodiment. [Figure 9] 9(a) and 9(b) are schematic diagrams illustrating applications of the sensor according to the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios may be different depending on the drawing. In this specification and in each drawing, elements similar to those previously described with reference to the previous drawings are designated by the same reference numerals, and detailed descriptions thereof will be omitted where appropriate.

[0008] (First embodiment) FIG. 1 is a schematic view illustrating the sensor according to the first embodiment. 2A and 2B are schematic cross-sectional views illustrating a part of the sensor according to the first embodiment. FIG. 3 is a schematic view illustrating a part of the sensor according to the first embodiment. As shown in FIG. 1, the sensor 110 according to the embodiment includes a first element portion 10E and a first circuit portion 70C. As shown in Figures 1, 2(a) and 2(b), the first element portion 10E includes a first base 10s, a first fixed portion 10F, a first movable portion 10M, a first fixed electrode 51, a second fixed electrode 52, a third fixed electrode 53 and a fourth fixed electrode 54.

[0009] The first fixed portion 10F is fixed to the first base 10s. The first movable portion 10M is supported by the first fixed portion 10F. A first gap g1 is provided between the first base 10s and the first movable portion 10M.

[0010] The first movable portion 10M may include a first movable electrode 11, a second movable electrode 12, a third movable electrode 13, and a fourth movable electrode .

[0011] The first fixed electrode 51 is fixed to the first base 10s and faces the first movable electrode 11. The second fixed electrode 52 is fixed to the first base 10s and faces the second movable electrode 12. The third fixed electrode 53 is fixed to the first base 10s and faces the third movable electrode 13. The fourth fixed electrode 54 is fixed to the first base 10s and faces the fourth movable electrode 14.

[0012] A second direction D2 from the first fixed electrode 51 to the first fixed portion 10F intersects with the first direction D1 from the first base 10s to the first fixed portion 10F. A third direction D3 from the second fixed electrode 52 to the first fixed portion 10F intersects with the first direction D1 and the second direction D2.

[0013] The first direction D1 is the Z-axis direction. One direction perpendicular to the Z-axis direction is the X-axis direction. The direction perpendicular to the Z-axis direction and the X-axis direction is the Y-axis direction. The second direction D2 may be, for example, the X-axis direction. In one example, the third direction D3 may be substantially perpendicular to the second direction D2. For example, the third direction D3 may be the Y-axis direction.

[0014] The direction from first fixed portion 10F to third fixed electrode 53 is along second direction D2. The direction from first fixed portion 10F to fourth fixed electrode 54 is along third direction D3.

[0015] 1, the first element portion 10E may further include a first connecting portion 11c, a second connecting portion 12c, a third connecting portion 13c, and a fourth connecting portion 14c. The first connecting portion 11c is supported by the first fixed portion 10F and supports the first movable portion 10M. The second connecting portion 12c is supported by the first fixed portion 10F and supports the first movable portion 10M. The third connecting portion 13c is supported by the first fixed portion 10F and supports the first movable portion 10M. The fourth connecting portion 14c is supported by the first fixed portion 10F and supports the first movable portion 10M.

[0016] The first connecting portion 11c is located between the first fixed portion 10F and the first movable portion 10M in the second direction D2. The second connecting portion 12c is located between the first fixed portion 10F and the first movable portion 10M in the third direction D3. The third connecting portion 13c is located between the first fixed portion 10F and the first movable portion 10M in the second direction D2. The fourth connecting portion 14c is located between the first fixed portion 10F and the first movable portion 10M in the third direction D3.

[0017] The first connecting portion 11c, the second connecting portion 12c, the third connecting portion 13c, and the fourth connecting portion 14c may have, for example, a meandering structure, which makes the first movable portion 10M prone to vibration.

[0018] 1, for example, the first circuit unit 70C may include a first drive circuit 76a and a second drive circuit 76b. The first drive circuit 76a is configured to supply a first drive signal Sv1 to the third fixed electrode 53. The second drive circuit 76b is configured to supply a second drive signal Sv2 to the fourth fixed electrode 54.

[0019] The first movable portion 10M is configured to vibrate in response to a first drive signal Sv1 and a second drive signal Sv2.

[0020] 1, the first circuit unit 70C may include a first detection circuit 75a and a second detection circuit 75b. The first detection circuit 75a is electrically connected to the first fixed electrode 51. The first detection circuit 75a is configured to output a first signal Sg1. The second detection circuit 75b is electrically connected to the second fixed electrode 52. The second detection circuit 75b is configured to output a second signal Sg2.

[0021] The first signal Sg1 corresponds to a component of the vibration of the first movable part 10M along the second direction D2, and the second signal Sg2 corresponds to a component of the signal of the first movable part 10M along the third direction D3.

[0022] In the embodiment, for example, the vibration state of the first movable part 10M changes due to the influence of an external angular velocity that the first movable part 10M receives. For example, the external angular velocity can be detected by detecting the vibration state of the first movable part 10M. The first element part 10E is, for example, an angular velocity sensor. The first element part 10E is, for example, a gyro sensor.

[0023] In the embodiment, the first circuit unit 70C may vibrate the first movable unit 10M so that the vibration direction of the first movable unit 10M changes over time. The angle θ of the vibration direction of the first movable unit 10M may change linearly with time, for example. For example, a "virtual rotation mode operation" may be performed.

[0024] For example, the first drive circuit 76a and the second drive circuit 76b may apply a rotational force to the first movable part 10M to supply the first drive signal Sv1 and the second drive signal Sv2 so as to rotate the vibration direction (to change the angle θ). Such operations of the first drive circuit 76a and the second drive circuit 76b may be controlled by the control part 70 (see FIG. 1) provided in the first circuit part 70C.

[0025] For example, the first circuit portion 70C includes a control portion 70. The control portion 70 is configured to perform a first operation OP1. Fig. 3 illustrates the first operation OP1 in the sensor 110. Fig. 3 corresponds to, for example, a block diagram of the control portion 70.

[0026] 3, the first operation OP1 includes deriving a first value v1 (angle θ) corresponding to the vibration direction of the first movable part 10M based on a first signal Sg1 obtained from the first fixed electrode 51 and a second signal Sg2 obtained from the second fixed electrode 52. The first signal Sg1 is obtained from, for example, the first detection circuit 75a. The second signal Sg2 is obtained from, for example, the second detection circuit 75b.

[0027] For example, the first value v1 (angle θ) is obtained by synchronously detecting the first signal Sg1 and the second signal Sg2.

[0028] 3, the first operation OP1 may include synchronously detecting a first function value of a first value v1 (angle θ) and a second function value of the first value v1. The first function value may include, for example, the sine of the first value v1. The second function value may include, for example, the cosine of the first value v1. For example, the first operation OP1 may include synchronously detecting sin θ and cos θ.

[0029] 3, the control unit 70 may include a first processing unit 71 and a second processing unit 72. The first processing unit 71 is configured to derive a first value v1 (angle θ) based on the first signal Sg1 and the second signal Sg2. The second processing unit 72 is configured to synchronously detect a first function value (e.g., sin θ) and a second function value (e.g., cos θ).

[0030] As shown in FIG. 3, the first operation OP1 is performed at a reference frequency f PLL The reference frequency f PLL is obtained based on the difference between a first detected value obtained by synchronous detection of a first function value (e.g., sinθ) and a reference phase Φr, and a second detected value obtained by synchronous detection of a second function value (e.g., cosθ) and a reference phase Φr.

[0031] 3, for example, the control unit 70 includes a third processing unit 73. The third processing unit 73 is, for example, a PLL controller. The third processing unit 73 (PLL controller) calculates a reference frequency f PLL The third processing unit 73 may be configured to output the reference phase Φr. That is, the first operation OP1 may further include generating the reference phase Φr.

[0032] For example, synchronous detection of the first function value (for example, sin θ) and the second function value (for example, cos θ) is performed using a reference phase Φr.

[0033] The first function value (for example, sin θ) and the second function value (for example, cos θ) are calculated with sin Φr and cos Φr, and the calculation results are low-pass filtered.

[0034] For example, the phase of the angle θ of the vibration direction of the first movable part 10M is defined as phase Φ. The difference between the phase Φ and the reference phase Φr is defined as phase difference δφ. This is obtained as a result of the above-mentioned low-pass filter processing. The phase difference δφ is input to the third processing part 73 (for example, a PLL controller). The third processing part 73 calculates the reference frequency f based on the phase difference δφ. PLL The method is configured to derive

[0035] The first operation OP1 is performed at a reference frequency f PLL For example, the control unit 70 may further include a fourth processing unit 74. The fourth processing unit 74 is configured to output the angular velocity Av1. For example, the fourth processing unit 74 may further include a fourth processing unit 74. The fourth processing unit 74 is configured to output the angular velocity Av1 based on the reference frequency f PLL For example, the fourth processing unit 74 may adjust the gain of the reference frequency f PLL can be adjusted to obtain the angular velocity Av1.

[0036] As described above, in the embodiment, the angle θ of the vibration direction of the first movable part 10M changes over time. For example, a "virtual rotation mode operation" is performed. At this time, the angle θ may change non-uniformly due to, for example, non-uniformity in the manufacturing process of the first element part 10E. For example, there may be a case where the vibration direction of the first movable part 10M tends to be in a specific direction and is difficult to change to another direction. For example, an "angle-dependent bias" may occur. In such a case, the effect of non-uniformity in the angle θ can be suppressed by performing the first operation OP1 described above. According to the embodiment, a sensor capable of improving detection accuracy can be provided.

[0037] For example, in an operation in which the angle θ is changed over time, the influence of non-uniformity of the angle θ can be suppressed by combining synchronous detection of the angle θ of the vibration direction with PLL control. For example, the influence of non-uniformity of the angle θ can be suppressed in real time.

[0038] For example, in a "virtual rotation mode operation," a reference example can be considered in which the measured value of the angle-dependent bias is corrected by curve fitting to suppress the influence of the angle-dependent bias. In the embodiment, the influence of the angle-dependent bias can be suppressed with higher accuracy than in the reference example. Furthermore, in the embodiment, the influence of the angle-dependent bias can be suppressed more effectively by processing in real time.

[0039] 4(a) and 4(b) are graphs illustrating the operation of the sensor according to the first embodiment. These figures illustrate a first characteristic CH1 and a second characteristic CH2. In the first characteristic CH1, the precision of the first element unit 10E is very high. In the first characteristic CH1, angle-dependent bias does not substantially occur. On the other hand, in the second characteristic CH2, the precision of the first element unit 10E is not high. In the second characteristic CH2, angle-dependent bias occurs. The horizontal axis of these figures is time tm. The vertical axis of FIG. 4(a) is angle θ. The vertical axis of FIG. 4(b) is sin θ.

[0040] As shown in FIG. 4(a), in the first characteristic CH1 where the accuracy of the first element unit 10E is very high, the angle θ varies linearly with time tm. On the other hand, in the second characteristic CH2 where the accuracy of the first element unit 10E is not high, the angle θ shifts from the linear characteristic with the characteristic period. As shown in FIG. 4(b), in the first characteristic CH1, sin θ varies sinusoidally. On the other hand, in the second characteristic CH2, harmonic components are generated in sin θ.

[0041] In such a case, by performing the first operation OP1 described above, the influence of non-uniformity of the angle θ can be suppressed. For example, the angle θ changes (rotates) at a specific speed. By changing the angle θ using sine and cosine functions, the angle θ can be converted into a periodic signal. The frequency of the fundamental wave of this signal corresponds to the angular velocity Av1 of the detection target. The harmonics of the signal correspond to the angle-dependent bias. In the embodiment, synchronous detection and PLL control can be used to suppress the influence of non-uniformity of the angle θ and obtain the angular velocity Av1. According to the embodiment, a sensor capable of improving detection accuracy can be provided.

[0042] For example, the difference in the temporal change in the angle θ of the vibration direction of the first movable part 10M caused by the first drive signal Sv1 and the second drive signal Sv2 is corrected by the first operation OP1.

[0043] FIG. 5 is a schematic view illustrating a part of the sensor according to the first embodiment. 5, in the sensor 111 according to this embodiment, the control unit 70 of the first circuit section 70C includes a notch filter 78. The remaining configuration of the sensor 111 may be the same as that of the sensor 110.

[0044] The notch filter 78 operates at a reference frequency f PLL For example, the third processing unit 73 (for example, a PLL controller) is configured to filter a first detected value obtained by synchronous detection of a first function value (for example, sin θ) and a second detected value obtained by synchronous detection of a second function value (for example, cos θ) based on the reference frequency f PLLis supplied to the notch filter 78. The notch filter 78 detects, for example, the reference frequency f PLL The notch filter 78 attenuates the component of the reference frequency f PLL Attenuates the component of

[0045] For example, the reference frequency f PLL is fed back to the attenuation frequency of the notch filter 78. This more effectively suppresses the influence of non-uniformity in the angle θ.

[0046] FIG. 6 is a schematic plan view illustrating a part of the sensor according to the first embodiment. 6, the sensor 120 according to the embodiment further includes a second element unit 20E in addition to the first element unit 10E and first circuit unit 70C (see FIG. 1). The configurations of the first element unit 10E and the first circuit unit 70C can be the same as those described for the sensor 110 (and the sensor 111).

[0047] As shown in FIG. 6, the second element unit 20E includes a second base 20s, a second fixed portion 20F, a second movable portion 20M, and a second element fixing electrode 62. The second fixed portion 20F is fixed to the second base 20s. The second movable portion 20M is supported by the second fixed portion 20F. A second gap g2 is provided between the second base 20s and the second movable portion 20M. The second element fixing electrode 62 is fixed to the second base 20s. A second element unit signal SD2 generated between the second movable portion 20M and the second element fixing electrode 62 changes depending on the acceleration applied to the second element unit 20E.

[0048] For example, the second movable portion 20M includes a portion facing the second element fixing electrode 62. A first capacitance C1 is formed between this portion and the second element fixing electrode 62. For example, acceleration can be detected by detecting the first capacitance C1. The second element portion 20E is, for example, an acceleration sensor.

[0049] In this example, the second element section 20E further includes a second element opposing fixed electrode 62A. The second element opposing fixed electrode 62A is fixed to the second base 20s. A second movable section 20M is provided between the second element opposing fixed electrode 62 and the second element opposing fixed electrode 62A. The second movable section 20M includes a portion facing the second element opposing fixed electrode 62A. A second capacitance C2 is formed between this portion and the second element opposing fixed electrode 62A. For example, by detecting the difference between a signal based on the first capacitance C1 and a signal based on the second capacitance C2, acceleration can be detected with higher accuracy.

[0050] A plurality of second element units 20E may be provided. The direction from the second movable unit 20M to the second element fixing electrode 62 in one of the plurality of second element units 20E may intersect with the direction from the second movable unit 20M to the second element fixing electrode 62 in another of the plurality of second element units 20E. For example, acceleration along a plurality of different directions may be detected. For example, acceleration along the X-axis direction, acceleration along the Y-axis direction, and acceleration along the Z-axis direction may be detected.

[0051] (Second embodiment) The second embodiment relates to an electronic device. FIG. 7 is a schematic view illustrating an electronic device according to the second embodiment. 7, an electronic device 310 according to the embodiment includes a sensor according to the first embodiment (e.g., sensor 110) and a circuit control unit 170. The circuit control unit 170 can control a circuit 180 based on a signal S1 obtained from the sensor. The circuit 180 is, for example, a control circuit for a driving device 185. According to the embodiment, for example, the circuit 180 for controlling the driving device 185 can be controlled with high precision.

[0052] 7, a sensor system 210 according to the embodiment includes a sensor according to the first embodiment (for example, the sensor 110) and a detection target member 81. The sensor 110 is fixed to the detection target member 81. The sensor 110 can detect a signal from the detection target member 81.

[0053] 8(a) to 8(h) are schematic views illustrating applications of the electronic device according to the embodiment. As shown in FIG. 8(a), the electronic device 310 may be at least a part of a robot. As shown in FIG. 8(b), the electronic device 310 may be at least a part of a machine robot installed in a manufacturing factory or the like. As shown in FIG. 8(c), the electronic device 310 may be at least a part of an automated guided vehicle in a factory or the like. As shown in FIG. 8(d), the electronic device 310 may be at least a part of a drone (unmanned aerial vehicle). As shown in FIG. 8(e), the electronic device 310 may be at least a part of an airplane. As shown in FIG. 8(f), the electronic device 310 may be at least a part of a ship. As shown in FIG. 8(g), the electronic device 310 may be at least a part of a submarine. As shown in FIG. 8(h), the electronic device 310 may be at least a part of an automobile. The electronic device 310 may include, for example, at least one of a robot and a moving object.

[0054] 9(a) and 9(b) are schematic diagrams illustrating applications of the sensor according to the embodiment. As shown in FIG. 9(a), a sensor 430 according to the embodiment includes the sensor according to the first embodiment and a transceiver 420. In the example of FIG. 9(a), the sensor 110 is depicted as the sensor. The transceiver 420 can transmit a signal obtained from the sensor 110, for example, wirelessly or by wire. The sensor 430 is provided, for example, on a slope 410 of a road 400 or the like. The sensor 430 can monitor, for example, the status of a facility (e.g., infrastructure). The sensor 430 may be, for example, a status monitoring device.

[0055] For example, the sensor 430 detects changes in the condition of the slope surface 410 of the road 400 with high accuracy. The changes in the condition of the slope surface 410 include, for example, at least one of a change in the inclination angle and a change in the vibration state. The signal (inspection result) obtained from the sensor 110 is transmitted by the transceiver unit 420. The condition of a facility (e.g., infrastructure) can be monitored, for example, continuously.

[0056] As shown in FIG. 9(b), the sensor 430 is provided, for example, in a part of a bridge 460. The bridge 460 is provided over a river 470. For example, the bridge 460 includes at least one of a main girder 450 and a pier 440. The sensor 430 is provided in at least one of the main girder 450 and the pier 440. For example, the angle of at least one of the main girder 450 and the pier 440 may change due to deterioration or the like. For example, the vibration state of at least one of the main girder 450 and the pier 440 may change. The sensor 430 detects these changes with high accuracy. The detection result can be transmitted to any location by the transmitter / receiver 420. Abnormalities can be effectively detected.

[0057] The embodiments may include the following technical solutions. (Technical proposal 1) a first element portion; a first circuit portion; Equipped with The first element portion is A first substrate; a first fixed portion fixed to the first base; a first movable part supported by the first fixed part, wherein a first gap is provided between the first base and the first movable part, and the first movable part includes a first movable electrode, a second movable electrode, a third movable electrode, and a fourth movable electrode; a first fixed electrode fixed to the first base and facing the first movable electrode; a second fixed electrode fixed to the first base and facing the second movable electrode; a third fixed electrode fixed to the first base and facing the third movable electrode; a fourth fixed electrode fixed to the first base and facing the fourth movable electrode; Including, a second direction from the first fixed electrode to the first fixed portion intersects with a first direction from the first base to the first fixed portion; a third direction from the second fixed electrode to the first fixed portion intersects with the first direction and intersects with the second direction; a direction from the first fixed portion to the third fixed electrode is along the second direction; a direction from the first fixed portion to the fourth fixed electrode is along the third direction; the first circuit unit includes a control unit, the control unit is configured to perform a first operation; The first operation is deriving a first value corresponding to a vibration direction of the first movable part based on a first signal obtained from the first fixed electrode and a second signal obtained from the second fixed electrode; synchronously detecting a first function value of the first value and a second function value of the first value; a sensor.

[0058] (Technical proposal 2) the first function value comprises a sine of the first value; The sensor according to Technical Solution 1, wherein the second function value includes the cosine of the first value.

[0059] (Technical proposal 3) The sensor according to technical proposal 1 or 2, wherein the third direction is substantially perpendicular to the second direction.

[0060] (Technical proposal 4) the first circuit unit further includes a first detection circuit and a second detection circuit; the first detection circuit is electrically connected to the first fixed electrode and configured to output the first signal; The sensor according to any one of Technical Solutions 1 to 3, wherein the second detection circuit is electrically connected to the second fixed electrode and configured to output the second signal.

[0061] (Technical proposal 5) the control unit includes a first processing unit and a second processing unit, the first processing unit is configured to derive the first value based on the first signal and the second signal; The sensor according to any one of Technical Solutions 1 to 4, wherein the second processing unit is configured to synchronously detect the first function value and the second function value.

[0062] (Technical proposal 6) the first operation further includes outputting a reference frequency; The sensor described in any one of Technical Solutions 1 to 5, wherein the reference frequency is obtained based on the difference between a value obtained by the synchronous detection of the first function value and a reference phase, and a value obtained by the synchronous detection of the second function value and a reference phase.

[0063] (Technical proposal 7) The sensor described in Technical Solution 6, wherein the first operation further includes generating the reference phase.

[0064] (Technical proposal 8) the control unit further includes a third processing unit, The sensor according to Technical Solution 6 or 7, wherein the third processing unit includes a PLL controller configured to output the reference frequency.

[0065] (Technical proposal 9) The sensor according to any one of Technical Solutions 6 to 8, wherein the synchronous detection of the first function value and the second function value is performed using the reference phase.

[0066] (Technical proposal 10) The sensor according to any one of Technical Solutions 6 to 9, wherein the first operation further includes outputting an angular velocity applied to the first element portion based on the reference frequency.

[0067] (Technical proposal 11) the control unit further includes a fourth processing unit, The sensor according to Technical Solution 10, wherein the fourth processing unit is configured to output the angular velocity.

[0068] (Technical proposal 12) the control unit further includes a notch filter; The sensor described in any one of Technical Solutions 6 to 11, wherein the notch filter is configured to filter the first detection value obtained by the synchronous detection of the first function value and the second detection value obtained by the synchronous detection of the second function value based on the reference frequency.

[0069] (Technical proposal 13) the first circuit unit further includes a first drive circuit and a second drive circuit; the first drive circuit is configured to supply a first drive signal to the third fixed electrode; the second drive circuit is configured to supply a second drive signal to the fourth fixed electrode; The sensor according to any one of Technical Schemes 1 to 12, wherein the first movable part is configured to vibrate in response to the first drive signal and the second drive signal.

[0070] (Technical proposal 14) The sensor described in Technical Solution 13, wherein the vibration direction of the first movable part changes over time.

[0071] (Technical proposal 15) The sensor described in Technical Solution 14, wherein the deviation in the temporal change in the angle of the vibration direction of the first movable part due to the first drive signal and the second drive signal is corrected by the first operation.

[0072] (Technical proposal 16) the first element portion further includes a first connection portion, a second connection portion, a third connection portion, and a fourth connection portion; the first connection portion is supported by the first fixed portion and supports the first movable portion; the second connection portion is supported by the first fixed portion and supports the first movable portion; the third connection portion is supported by the first fixed portion and supports the first movable portion; the fourth connection portion is supported by the first fixed portion and supports the first movable portion; the first connection portion is located between the first fixed portion and the first movable portion in the second direction, the second connection portion is located between the first fixed portion and the first movable portion in the third direction, the third connection portion is located between the first fixed portion and the first movable portion in the second direction, The sensor according to any one of Technical Schemes 1 to 15, wherein the fourth connection portion is located between the first fixed portion and the first movable portion in the third direction.

[0073] (Technical proposal 17) Further comprising a second element portion, The second element portion is A second substrate; a second fixing portion fixed to the second base; a second movable portion supported by the second fixed portion; a second element fixing electrode fixed to the second base; Including, The sensor described in any one of Technical Schemes 1 to 16, wherein a second element portion signal generated between the second movable portion and the second element fixing electrode changes according to acceleration applied to the second element portion.

[0074] (Technical proposal 18) The sensor described in Technical Proposal 17, wherein the second element portion is an acceleration sensor.

[0075] (Technical proposal 19) A plurality of the second element portions are provided, A sensor described in Technical Proposal 17 or 18, wherein the direction from the second movable part to the second element fixing electrode in one of the plurality of second element parts intersects with the direction from the second movable part to the second element fixing electrode in another of the plurality of second element parts.

[0076] (Technical proposal 20) A sensor according to any one of technical proposals 1 to 19; a circuit control unit capable of controlling a circuit based on a signal obtained from the sensor; Equipped with electronic devices.

[0077] According to the embodiment, it is possible to provide a sensor and an electronic device that can improve detection accuracy.

[0078] The above describes embodiments of the present invention with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of each element included in the sensor, such as the element unit, base, fixed unit, movable unit, fixed electrode, circuit unit, and control unit, are within the scope of the present invention as long as a person skilled in the art can implement the present invention in a similar manner and obtain similar effects by appropriately selecting them from known ranges.

[0079] Furthermore, any combination of two or more elements of each specific example within the scope of technical feasibility is also included within the scope of the present invention as long as it includes the gist of the present invention.

[0080] In addition, all sensors and electronic devices that can be implemented by a person skilled in the art by appropriately modifying the design based on the sensors and electronic devices described above as embodiments of the present invention also fall within the scope of the present invention, as long as they include the gist of the present invention.

[0081] In addition, within the scope of the concept of the present invention, a person skilled in the art may come up with various modifications and alterations, and it will be understood that these modifications and alterations also fall within the scope of the present invention.

[0082] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the scope of the invention and its equivalents as defined in the claims. [Explanation of symbols]

[0083] 10E, 20E: first and second element portions, 10F, 20F: first and second fixed portions, 10M, 20M: first and second movable portions, 10s, 20s: first and second bases, 11-14: first to fourth movable electrodes, 11c-14c: first to fourth connection portions, 51-54: first to fourth fixed electrodes, 62: second element fixed electrode, 62A: second element opposing fixed electrode, 70: control portion, 70C: first circuit portion, 71-74: first to fourth processing portions, 75a, 75b: first and second detection circuits, 76a, 76b: first and second drive circuits, 78: notch filter, 81: detection target member, 110, 111, 120: sensor, 170: circuit control portion, 180: Circuit, 185: Drive unit, 210: Sensor system, 310: Electronic device, 400: Road, 410: Slope surface, 420: Transmitter / receiver, 430: Sensor, 440: Pier, 450: Main girder, 460: Bridge, 470: River, Av1: Angular velocity, C1, C2: First and second capacitance, CH1, CH2: First and second characteristics, D1 to D3: First to third directions, OP1: First operation, S1: Signal, SD2: Second element signal, Sg1, Sg2: First and second signals, Sv1, Sv2: First and second drive signals, f PLL : Reference frequency, g1, g2: First and second gaps, tm: Time, v1: First value, Φr: Reference phase, δφ: Phase difference, θ: Angle

Claims

1. a first element portion; a first circuit portion; Equipped with The first element portion is A first substrate; a first fixed portion fixed to the first base; a first movable part supported by the first fixed part, wherein a first gap is provided between the first base and the first movable part, and the first movable part includes a first movable electrode, a second movable electrode, a third movable electrode, and a fourth movable electrode; a first fixed electrode fixed to the first base and facing the first movable electrode; a second fixed electrode fixed to the first base and facing the second movable electrode; a third fixed electrode fixed to the first base and facing the third movable electrode; a fourth fixed electrode fixed to the first base and facing the fourth movable electrode; Including, a second direction from the first fixed electrode to the first fixed portion intersects with a first direction from the first base to the first fixed portion; a third direction from the second fixed electrode to the first fixed portion intersects with the first direction and intersects with the second direction; a direction from the first fixed portion to the third fixed electrode is along the second direction; a direction from the first fixed portion to the fourth fixed electrode is along the third direction; the first circuit unit includes a control unit, the control unit is configured to perform a first operation; The first operation includes: deriving a first value corresponding to a vibration direction of the first movable part based on a first signal obtained from the first fixed electrode and a second signal obtained from the second fixed electrode; synchronously detecting a first function value of the first value and a second function value of the first value; a sensor.

2. the first function value comprises a sine of the first value; The sensor of claim 1 , wherein the second function value comprises a cosine of the first value.

3. The sensor of claim 1 , wherein the third direction is substantially perpendicular to the second direction.

4. the first circuit unit further includes a first detection circuit and a second detection circuit; the first detection circuit is electrically connected to the first fixed electrode and configured to output the first signal; The sensor of claim 1 , wherein the second detection circuit is electrically connected to the second fixed electrode and configured to output the second signal.

5. the first operation further includes outputting a reference frequency; The sensor of any one of claims 1 to 4, wherein the reference frequency is obtained based on the difference between a value obtained by a first detection value obtained by the synchronous detection of the first function value and a reference phase, and a value obtained by a second detection value obtained by the synchronous detection of the second function value and the reference phase.

6. The sensor of claim 5 , wherein the synchronous detection of the first function value and the second function value is performed using the reference phase.

7. The sensor according to claim 5 , wherein the first operation further includes outputting an angular velocity applied to the first element portion based on the reference frequency.

8. the control unit further includes a notch filter; 6. The sensor according to claim 5, wherein the notch filter is configured to filter the first detected value obtained by the synchronous detection of the first function value and the second detected value obtained by the synchronous detection of the second function value based on the reference frequency.

9. Further comprising a second element portion, The second element portion is A second substrate; a second fixing portion fixed to the second base; a second movable portion supported by the second fixed portion; a second element fixing electrode fixed to the second base; Including, The sensor according to claim 1 , wherein a second element signal generated between the second movable portion and the second element fixing electrode changes in accordance with acceleration applied to the second element portion.

10. The sensor of claim 1; a circuit control unit capable of controlling a circuit based on a signal obtained from the sensor; Equipped with electronic devices.

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