sensor

Abstract

To provide a sensor whose characteristics can be improved.SOLUTION: A sensor includes an element section. The element section includes a base, a first fixed portion, a first intermediate connection portion, a first intermediate movable member, a first connection portion, a first movable member, and a first fixed electrode. The first fixed portion is fixed to the base. The first intermediate connection portion is supported by the first fixed portion. The first intermediate movable member is connected to the first intermediate connection portion. The first connection portion is connected to the first intermediate movable member. The first movable member is supported by the first connection portion. The first movable member includes a first movable electrode. The first fixed electrode is fixed to the base and faces the first movable electrode. A first gap is provided between the base and the first intermediate connection portion, between the base and the first intermediate movable member, between the base and the first connection portion, and between the base and the first movable member.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] Embodiments of the present invention relate to sensors.

Background Art

[0002] For example, there are sensors using MEMS (Micro Electro Mechanical Systems) elements and the like. In sensors, improvement in characteristics is desired.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Embodiments provide a sensor capable of improving characteristics.

Means for Solving the Problems

[0005] According to an embodiment, the sensor includes an element portion. The element portion includes a substrate, a first fixing portion, a first intermediate connecting portion, a first intermediate movable member, a first connecting portion, a first movable member, and a first fixed electrode. The first fixing portion is fixed to the substrate. The first intermediate connecting portion is supported by the first fixing portion. The first intermediate movable member is connected to the first intermediate connecting portion. The first connecting portion is connected to the first intermediate movable member. The first movable member is supported by the first connecting portion. The first movable member includes a first movable electrode. The first fixed electrode is fixed to the substrate and faces the first movable electrode. A first gap is provided between the substrate and the first intermediate connecting portion, between the substrate and the first intermediate movable member, between the substrate and the first connecting portion, and between the substrate and the first movable member.

Brief Description of the Drawings

[0006] [Figure 1] Figure 1 is a schematic plan view illustrating a sensor according to the first embodiment. [Figure 2] Figures 2(a) to 2(d) are schematic plan views illustrating a part of the sensor according to the first embodiment. [Figure 3] Figures 3(a) and 3(b) are schematic cross-sectional views illustrating a sensor according to the first embodiment. [Figure 4] Figures 4(a) and 4(b) are schematic cross-sectional views illustrating a sensor according to the first embodiment. [Figure 5] Figure 5 is a schematic plan view illustrating a sensor according to the first embodiment. [Figure 6] Figure 6 is a schematic plan view illustrating a sensor according to the first embodiment. [Figure 7] Figure 7 is a schematic plan view illustrating a sensor according to the first embodiment. [Figure 8] Figure 8 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. [Figure 9] Figure 9 is a schematic diagram illustrating an electronic device according to the second embodiment. [Figure 10] Figures 10(a) to 10(h) are schematic diagrams illustrating applications of electronic devices. [Modes for carrying out the invention]

[0007] The embodiments of the present invention will be described below with reference to the drawings. Drawings are schematic or conceptual, and the relationships between the thickness and width of each part, as well as the ratios of the sizes of different parts, are not necessarily identical to those of reality. Even when representing the same part, the dimensions and ratios may be depicted differently in different drawings. In this specification and in each figure, elements similar to those described above are denoted by the same reference numerals with respect to previously shown figures, and detailed explanations are omitted as appropriate.

[0008] (First Embodiment) Figure 1 is a schematic plan view illustrating a sensor according to the first embodiment. Figures 2(a) to 2(d) are schematic plan views illustrating a part of the sensor according to the first embodiment. Figures 3(a) and 3(b) are schematic cross-sectional views illustrating a sensor according to the first embodiment. Figure 3(a) is a cross-sectional view taken along line A1-A2 in Figure 1. Figure 3(b) is a cross-sectional view taken along line B1-B2 in Figure 1.

[0009] As shown in Figure 1, the sensor 110 according to this embodiment includes an element section 10U. The element section 10U includes a base 10s, a first fixed section 31, a first intermediate connection section 41M, a first intermediate movable member 10M, a first connection section 41A, a first movable member 10A, and a first fixed electrode 51E.

[0010] As shown in Figures 3(a) and 3(b), the first fixing part 31 is fixed to the base body 10s. The first direction D1 from the base body 10s to the first fixing part 31 is defined as the Z-axis direction. One direction perpendicular to the Z-axis direction is defined as the X-axis direction. The direction perpendicular to both the Z-axis direction and the X-axis direction is defined as the Y-axis direction.

[0011] The substrate 10s is aligned with the XY plane. The substrate 10s may be, for example, a silicon substrate. The surface of the substrate 10s may be insulating. An insulating layer may be provided on the surface of the substrate 10s.

[0012] The first intermediate connection part 41M is supported by the first fixed part 31. The first intermediate movable member 10M is connected to the first intermediate connection part 41M. The first movable member 10A is supported by the first connection part 41A.

[0013] For example, a first intermediate connecting portion 41M is provided between the first fixed portion 31 and the first intermediate movable member 10M. A first connecting portion 41A is provided between the first intermediate movable member 10M and the first movable member 10A.

[0014] As shown in FIG. 3(a), a first gap G1 is provided between the base 10s and the first intermediate connection part 41M, between the base 10s and the first intermediate movable member 10M, between the base 10s and the first connection part 41A, and between the base 10s and the first movable member 10A.

[0015] The first movable member 10A includes a first movable electrode 11E. The first fixed electrode 51E is fixed to the base 10s (see FIG. 3(a)). The first fixed electrode 51E faces the first movable electrode 11E. For example, the first movable electrode 11E and the first fixing part 31 are conductive. The first movable electrode 11E is electrically connected to the first fixing part 31. FIG. 2(a) illustrates the first movable electrode 11E and the first fixed electrode 51E.

[0016] For example, a control unit 70 may be provided. The control unit 70 applies a signal between the first movable electrode 11E and the first fixed electrode 51E to vibrate the first movable member 10A. In this example, a signal is applied between the first movable electrode 11E and the first fixed electrode 51E via the first fixing part 31. The signal includes an AC component. The signal of the first movable member 10A based on the signal includes, for example, a component in the X-axis direction.

[0017] When the first movable member 10A is vibrating, an external force (such as an angular velocity) is applied to the element part 10U. As a result, a component in another direction (for example, the Y-axis direction) occurs in the signal of the first movable member 10A. This is based on, for example, the Coriolis force. The vibration state of the first movable member 10A changes according to the external force. In the embodiment, by detecting the change in the vibration state of the first movable member 10A, the external force can be detected. The sensor 110 is, for example, a gyro sensor.

[0018] The first fixing part 31 is, for example, an anchor. The first movable member 10A is a proof mass. The first movable member 10A is connected to the first fixing part 31 by a connection part. Thereby, the first movable member 10A is supported away from the base 10s.

[0019] For example, the first intermediate connector 41M and the first connector 41A have a meander structure. The first intermediate connector 41M and the first connector 41A are, for example, springs.

[0020] In this embodiment, a first intermediate movable member 10M is provided between the first intermediate connection part 41M and the first connection part 41A. This allows for more stable vibration.

[0021] For example, the vibrational force resulting from the vibration of the first movable member 10A is transmitted toward the first fixed part 31. For example, in a reference example where only a spring connection is provided between the first movable member 10A and the first fixed part 31, it was found that the vibration tends to become unstable.

[0022] In contrast, in this embodiment, a first intermediate movable member 10M is provided at the connection portion between the first movable member 10A and the first fixed portion 31. By providing the first intermediate movable member 10M, the vibrational force based on the vibration of the first movable member 10A is mitigated by the first intermediate movable member 10M. The transmission of the vibrational force based on the vibration of the first movable member 10A toward the first fixed portion 31 is suppressed. As a result, more stable vibrations can be obtained. Higher accuracy detection becomes possible. According to this embodiment, a sensor capable of improving characteristics can be provided.

[0023] As will be described later, for example, when the element unit 10U is installed inside a housing or the like, vibrations based on the vibration of the first movable member 10A are easily transmitted to the first fixed part 31 via the walls of the housing or the like. By providing the first intermediate movable member 10M, stable vibrations can be maintained even in such cases. This makes it possible to detect with higher accuracy. According to this embodiment, a sensor capable of improving characteristics can be provided.

[0024] The first plane intersecting the first direction D1 from the base 10s to the first fixed part 31 corresponds to the XY plane. As shown in Figure 1, in this example, in the first plane (XY plane), the first intermediate movable member 10M is provided around the first fixed part 31. In the first plane, the first movable member 10A is provided around the first intermediate movable member 10M.

[0025] In this example, the first intermediate movable member 10M is annular. The first movable member 10A is annular.

[0026] As shown in Figures 1 and 3(b), in this example, the element portion 10U further includes a second intermediate connection portion 42M and a second connection portion 42A. The second intermediate connection portion 42M is connected to the first fixed portion 31. A portion of the first intermediate movable member 10M is connected to the second intermediate connection portion 42M. A portion of the second connection portion 42A is connected to the first intermediate movable member 10M. The other portion of the second connection portion 42A is connected to the first movable member 10A. The first gap G1 is further provided between the base 10s and the second intermediate connection portion 42M, and between the base 10s and the second connection portion 42A.

[0027] As shown in Figures 1 and 3(a), in this example, the element portion 10U further includes a third intermediate connection portion 43M and a third connection portion 43A. The third intermediate connection portion 43M is connected to the first fixed portion 31. A portion of the first intermediate movable member 10M is connected to the third intermediate connection portion 43M. A portion of the third connection portion 43A is connected to the first intermediate movable member 10M. The other portion of the third connection portion 43A is connected to the first movable member 10A. The first gap G1 is further provided between the base 10s and the third intermediate connection portion 43M, and between the base 10s and the third connection portion 43A.

[0028] As shown in Figures 1 and 3(b), in this example, the element portion 10U further includes a fourth intermediate connection portion 44M and a fourth connection portion 44A. The fourth intermediate connection portion 44M is connected to the first fixed portion 31. A portion of the first intermediate movable member 10M is connected to the fourth intermediate connection portion 44M. A portion of the fourth connection portion 44A is connected to the first intermediate movable member 10M. The other portion of the fourth connection portion 44A is connected to the first movable member 10A. The first gap G1 is further provided between the base 10s and the fourth intermediate connection portion 44M, and between the base 10s and the fourth connection portion 44A.

[0029] As shown in Figures 1 and 3(b), in this example, the element portion 10U further includes a second fixed electrode 52E. The second fixed electrode 52E is fixed to the base 10s. The first movable member 10A includes a second movable electrode 12E. The second fixed electrode 52E faces the second movable electrode 12E. The direction from the first fixed portion 31 to the second fixed electrode 52E intersects the direction from the first fixed portion 31 to the first fixed electrode 51E. Figure 2(b) illustrates the second movable electrode 12E and the second fixed electrode 52E.

[0030] As shown in Figures 1 and 3(a), in this example, the element portion 10U further includes a third fixed electrode 53E. The third fixed electrode 53E is fixed to the base 10s. The first movable member 10A includes a third movable electrode 13E. The third fixed electrode 53E faces the third movable electrode 13E. In this example, the direction from the first fixed portion 31 to the third fixed electrode 53E is along the direction from the first fixed portion 31 to the first fixed electrode 51E. Figure 2(c) illustrates the third movable electrode 13E and the third fixed electrode 53E. It intersects with it.

[0031] As shown in Figures 1 and 3(b), in this example, the element portion 10U further includes a fourth fixed electrode 54E. The fourth fixed electrode 54E is fixed to the base 10s. The first movable member 10A includes a fourth movable electrode 14E. The fourth fixed electrode 54E faces the fourth movable electrode 14E. In this example, the direction from the first fixed portion 31 to the fourth fixed electrode 54E is aligned with the direction from the first fixed portion 31 to the second fixed electrode 52E. Figure 2(d) illustrates the fourth movable electrode 14E and the fourth fixed electrode 54E.

[0032] The first fixed electrode 51E, the second fixed electrode 52E, the third fixed electrode 53E, and the fourth fixed electrode 54E may be electrically connected to the control unit 70. The first movable electrode 11E, the second movable electrode 12E, the third movable electrode 13E, and the fourth movable electrode 14E may be electrically connected to the control unit 70, for example, via the first fixed part 31.

[0033] For example, the first fixed electrode 51E and the first movable electrode 11E form a comb-shaped electrode pair. For example, the second fixed electrode 52E and the second movable electrode 12E form another comb-shaped electrode pair. For example, the third fixed electrode 53E and the third movable electrode 13E form another comb-shaped electrode pair. For example, the fourth fixed electrode 54E and the fourth movable electrode 14E form another comb-shaped electrode pair.

[0034] By applying signals to these electrode pairs, the first movable member 10A can be made to vibrate in any direction. Alternatively, vibration may be generated by one electrode pair, and the state of vibration may be detected by another electrode pair.

[0035] For example, vibrations including a component in the X-axis direction may be obtained using the first fixed electrode 51E and the first movable electrode 11E. For example, vibrations including a component in the Y-axis direction may be obtained using the second fixed electrode 52E and the second movable electrode 12E. For example, a component in the X-axis direction may be detected as the vibration state using the third fixed electrode 53E and the third movable electrode 13E. For example, a component in the Y-axis direction may be detected as the vibration state using the fourth fixed electrode 54E and the fourth movable electrode 14E.

[0036] In the embodiment, the detection of the vibration state is performed by another method law This may be done by means of (for example, a method using light).

[0037] In this embodiment, the mass of the first intermediate movable member 10M is greater than the mass of the connecting part (e.g., a spring). This suppresses the transmission of vibrational forces based on the vibration of the first movable member 10A toward the first fixed part 31. Stable vibration is obtained.

[0038] For example, the first intermediate movable member 10M and the first intermediate connection part 41M satisfy at least one of the first, second, third, and fourth conditions. In the first condition, the mass of the first intermediate movable member 10M is greater than the mass of the first intermediate connection part 41M. In the second condition, the area of ​​the first intermediate movable member 10M is greater than the area of ​​the first intermediate connection part 41M (see Figure 1). In the third condition, the thickness of the first intermediate movable member 10M is greater than the thickness of the first intermediate connection part 41M (see Figure 4(a) described later). In the fourth condition, the density of the first intermediate movable member 10M is higher than the density of the first intermediate connection part 41M. With these conditions, unwanted vibration transmission can be suppressed more reliably.

[0039] For example, the first intermediate movable member 10M and the first connecting portion 41A satisfy at least one of the fifth, sixth, seventh, and eighth conditions. In the fifth condition, the mass of the first intermediate movable member 10M is greater than the mass of the first connecting portion 41A. In the sixth condition, the area of ​​the first intermediate movable member 10M is greater than the area of ​​the first connecting portion 41A. In the seventh condition, the thickness of the first intermediate movable member 10M is greater than the thickness of the first connecting portion 41A (see Figure 4(a) described later). In the eighth condition, the density of the first intermediate movable member 10M is higher than the density of the first connecting portion 41A. With these conditions, unwanted vibration transmission can be suppressed more reliably.

[0040] In this embodiment, it is preferable that the first intermediate movable member 10M and the first movable member 10A satisfy at least one of the 9th, 10th, 11th, and 12th conditions. In the 9th condition, the mass of the first intermediate movable member 10M is greater than the mass of the first movable member 10A. In the 10th condition, the area of ​​the first intermediate movable member 10M is greater than the area of ​​the first movable member 10A. In the 11th condition, the thickness of the first intermediate movable member 10M is greater than the thickness of the first movable member 10A (see Figure 4(a) described later). In the 12th condition, the density of the first intermediate movable member 10M is higher than the density of the first movable member 10A. These conditions allow for more reliable suppression of unwanted vibration transmission.

[0041] Figures 4(a) and 4(b) are schematic cross-sectional views illustrating a sensor according to the first embodiment. These figures are cross-sectional views along lines A1-A2 and B1-B2 in Figure 1. As shown in these figures, in the sensor 110a according to this embodiment, the thicknesses of at least two structures included in the element portion 10U are different from each other. Aside from this, the configuration of the sensor 110a may be the same as that of the sensor 110.

[0042] As shown in Figure 4(a), in this example, the thickness t10M of the first intermediate movable member 10M is greater than the thickness t41M of the first intermediate connecting part 41M. The thickness t10M of the first intermediate movable member 10M is greater than the thickness t41A of the first connecting part 41A. The thickness t10M of the first intermediate movable member 10M is greater than the thickness t10A of the first movable member 10A.

[0043] As shown in Figure 4(a), in this example, the thickness t10M of the first intermediate movable member 10M is greater than the thickness t43M of the third intermediate connecting portion 43M. The thickness t10M of the first intermediate movable member 10M is greater than the thickness t43A of the third connecting portion 43A.

[0044] As shown in Figure 4(b), in this example, the thickness t10M of the first intermediate movable member 10M is thicker than the thickness t42M of the second intermediate connection 42M. The thickness t10M of the first intermediate movable member 10M is thicker than the thickness t42A of the second connection 42A. In this example, the thickness t10M of the first intermediate movable member 10M is thicker than the thickness t44M of the fourth intermediate connection 44M. The thickness t10M of the first intermediate movable member 10M is thicker than the thickness t44A of the fourth connection 44A.

[0045] Figure 5 is a schematic plan view illustrating a sensor according to the first embodiment. As shown in Figure 5, the configuration of the element section 10U in the sensor 111 according to this embodiment differs from the configuration of the element section 10U in the sensor 110. Except for the parts described below, the configuration of the sensor 110 can be applied to the sensor 111.

[0046] In sensor 111, the first intermediate movable member 10M is annular. In a first plane (XY plane) intersecting the first direction D1, the first intermediate movable member 10M is provided around the first movable member 10A. The first fixed part 31 is provided on the outside of the first intermediate movable member 10M. In sensor 111, the provision of the first intermediate movable member 10M suppresses the transmission of vibrational forces based on the vibration of the first movable member 10A toward the first fixed part 31. Stable vibration is obtained.

[0047] In this example, the element section 10U includes a second fixed section 32, a second intermediate connection section 42M, and a second connection section 42A. The second fixed section 32 is fixed to the base body 10s. The second intermediate connection section 42M is connected to the second fixed section 32. A portion of the first intermediate movable member 10M is connected to the second intermediate connection section 42M. A portion of the second connection section 42A is connected to the first intermediate movable member 10M. The other portion of the second connection section 42A is connected to the first movable member 10A. A first gap G1 is further provided between the base body 10s and the second intermediate connection section 42M, and between the base body 10s and the second connection section 42A (see Figure 3(b)).

[0048] The element section 10U includes a third fixed section 33, a third intermediate connection section 43M, and a third connection section 43A. The third fixed section 33 is fixed to the base body 10s. The third intermediate connection section 43M is connected to the third fixed section 33. A portion of the first intermediate movable member 10M is connected to the third intermediate connection section 43M. A portion of the third connection section 43A is connected to the first intermediate movable member 10M.

[0049] The element section 10U includes a fourth fixed section 34, a fourth intermediate connection section 44M, and a fourth connection section 44A. The fourth fixed section 34 is fixed to the base body 10s. The fourth intermediate connection section 44M is connected to the fourth fixed section 34. A portion of the first intermediate movable member 10M is connected to the fourth intermediate connection section 44M. A portion of the fourth connection section 44A is connected to the first intermediate movable member 10M.

[0050] In the sensor 111, the second fixing part 32, the third fixing part 33, and the fourth fixing part 34 are provided on the outside of the first intermediate movable member 10M.

[0051] In the sensor 111, the element section 10U may further include a second fixed electrode 52E, a third fixed electrode 53E, and a fourth fixed electrode 54E. The second fixed electrode 52E faces the second movable electrode 12E. The third fixed electrode 53E faces the third movable electrode 13E. The fourth fixed electrode 54E faces the fourth movable electrode 14E.

[0052] In the first plane (XY plane), the direction from the center 10Ac of the first movable member 10A to the second fixed electrode 52E intersects with the direction from the center 10Ac to the first fixed electrode 51E. In the first plane (XY plane), the direction from the center 10Ac of the first movable member 10A to the third fixed electrode 53E follows the direction from the center 10Ac to the first fixed electrode 51E. In the first plane (XY plane), the direction from the center 10Ac of the first movable member 10A to the fourth fixed electrode 54E follows the direction from the center 10Ac to the second fixed electrode 52E.

[0053] Figure 6 is a schematic plan view illustrating a sensor according to the first embodiment. As shown in Figure 6, in the sensor 112 according to this embodiment, the configuration of the element section 10U differs from the configuration of the element section 10U in the sensor 110. Except for the parts described below, the configuration of the sensor 110 can be applied to the sensor 112.

[0054] In sensor 112, the first intermediate movable member 10M is annular. In a first plane (XY plane) intersecting the first direction D1, the first intermediate movable member 10M is provided around the first movable member 10A. The first fixed part 31 is provided inside the first intermediate movable member 10M. In sensor 112, the provision of the first intermediate movable member 10M suppresses the transmission of vibrational forces based on the vibration of the first movable member 10A toward the first fixed part 31. Stable vibration is obtained.

[0055] In the sensor 112, the element portion 10U includes a second fixed portion 32, a second intermediate connection portion 42M, and a second connection portion 42A. The second fixed portion 32 is fixed to the base body 10s. The second intermediate connection portion 42M is connected to the second fixed portion 32. A portion of the first intermediate movable member 10M is connected to the second intermediate connection portion 42M. A portion of the second connection portion 42A is connected to the first intermediate movable member 10M. The other portion of the second connection portion 42A is connected to the first movable member 10A. A first gap G1 is further provided between the base body 10s and the second intermediate connection portion 42M, and between the base body 10s and the second connection portion 42A (see Figure 3(b)).

[0056] Sensor 112 may be provided with a second fixing portion 32, a third fixing portion 33, and a fourth fixing portion 34. In sensor 112, the second fixing portion 32, the third fixing portion 33, and the fourth fixing portion 34 are provided inside the first intermediate movable member 10M.

[0057] Figure 7 is a schematic plan view illustrating a sensor according to the first embodiment. As shown in Figure 7, the configuration of the element section 10U in the sensor 113 according to this embodiment differs from the configuration of the element section 10U in the sensor 110. Except for the parts described below, the configuration of the sensor 110 can be applied to the sensor 113.

[0058] In sensor 113, the first movable member 10A is annular. In a first plane (XY plane) intersecting the first direction D1, the first movable member 10A is positioned around the first intermediate movable member 10M. The first fixed part 31 is positioned inside the first movable member 10A. In sensor 113, the presence of the first intermediate movable member 10M suppresses the transmission of vibrational forces based on the vibration of the first movable member 10A toward the first fixed part 31. Stable vibration is obtained.

[0059] In the sensor 113, the element portion includes a second fixed portion 32, a second intermediate connection portion 42M, and a second connection portion 42A. The second fixed portion 32 is fixed to the base body 10s. The second intermediate connection portion 42M is connected to the second fixed portion 32. A portion of the first intermediate movable member 10M is connected to the second intermediate connection portion 42M. A portion of the second connection portion 42A is connected to the first intermediate movable member 10M. The other portion of the second connection portion 42A is connected to the first movable member 10A. The first gap G1 is further provided between the base body 10s and the second intermediate connection portion 42M, and between the base body 10s and the second connection portion 42A (see Figure 3(b)).

[0060] In the sensor 113, the element section 10U may further include a second fixed electrode 52E, a third fixed electrode 53E, and a fourth fixed electrode 54E. The second fixed electrode 52E faces the third movable electrode 13E. The third fixed electrode 53E faces the third movable electrode 13E. The fourth fixed electrode 54E faces the fourth movable electrode 14E.

[0061] In the first plane (XY plane), the direction from the center 10Mc of the first intermediate movable member 10M to the second fixed electrode 52E intersects with the direction from the center 10Mc to the first fixed electrode 51E. In the first plane (XY plane), the direction from the center 10Mc of the first intermediate movable member 10M to the third fixed electrode 53E follows the direction from the center 10Mc to the first fixed electrode 51E. In the first plane (XY plane), the direction from the center 10Mc of the first intermediate movable member 10M to the fourth fixed electrode 54E follows the direction from the center 10Mc to the second fixed electrode 52E.

[0062] Figure 8 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. As shown in Figure 8, the sensor 120 according to this embodiment further includes a housing 60 in addition to the element unit 10U. The element unit 10U is provided inside the housing 60. The inside of the housing 60 may be depressurized. The atmospheric pressure in the space inside the housing 60 is lower than 1 atmosphere.

[0063] In this example, the housing 60 includes a circuit board 62 and a case 61. The element unit 10U is provided between the circuit board 62 and the lid of the case 61. The circuit board 62 may include at least a portion of the control unit 70.

[0064] As shown in the example in Figure 8, when the element unit 10U is installed inside a housing or the like, vibrations based on the vibration of the first movable member 10A may be transmitted to the housing via the first fixed part 31. Some of the transmitted vibrations may be reflected by the housing and transmitted again to the first movable member 10A via the first fixed part 31. By providing the first intermediate movable member 10M, stable vibrations can be maintained even in such cases. This makes it possible to provide a sensor with improved characteristics.

[0065] (Second Embodiment) The second embodiment relates to an electronic device. Figure 9 is a schematic diagram illustrating an electronic device according to the second embodiment. As shown in Figure 9, the electronic device 310 according to the embodiment includes a sensor according to the embodiment and a circuit control unit 170. In the example in Figure 9, a sensor 110 (or sensor device 210) is depicted as the sensor. The circuit control unit 170 can control a circuit 180 based on a signal S1 obtained from the sensor. The circuit 180 is, for example, a control circuit for a drive device 185. According to the embodiment, the circuit 180 for controlling the drive device 185 can be controlled with high precision based on high-precision detection results.

[0066] Figures 10(a) to 10(h) are schematic diagrams illustrating applications of electronic devices. As shown in Figure 10(a), the electronic device 310 may be at least part of a robot. As shown in Figure 10(b), the electronic device 310 may be at least part of a machine robot installed in a manufacturing plant or the like. As shown in Figure 10(c), the electronic device 310 may be at least part of an automated guided vehicle in a factory or the like. As shown in Figure 10(d), the electronic device 310 may be at least part of a drone (unmanned aerial vehicle). As shown in Figure 10(e), the electronic device 310 may be at least part of an airplane. As shown in Figure 10(f), the electronic device 310 may be at least part of a ship. As shown in Figure 10(g), the electronic device 310 may be at least part of a submarine. As shown in Figure 10(h), the electronic device 310 may be at least part of an automobile. The electronic device 310 may include, for example, at least one of a robot and a mobile body.

[0067] The embodiment may include the following configuration (e.g., proposed technical details). (Composition 1) Substrate and, A first fixing part fixed to the base, The first intermediate connecting portion is supported by the first fixed portion, The first intermediate movable member connected to the first intermediate connection portion, The first connecting portion connected to the first intermediate movable member, A first movable member supported by the first connection portion, the first movable member includes a first movable electrode, and A first fixed electrode is fixed to the substrate and faces the first movable electrode, It comprises an element section including, A sensor having a first gap provided between the base and the first intermediate connecting portion, between the base and the first intermediate movable member, between the base and the first connecting portion, and between the base and the first movable member.

[0068] (Configuration 2) The first intermediate movable member and the first intermediate connecting portion satisfy at least one of the first, second, third, and fourth conditions. In the first condition, the mass of the first intermediate movable member is greater than the mass of the first intermediate connection. In the second condition, the area of ​​the first intermediate movable member is larger than the area of ​​the first intermediate connection portion. In the third condition described above, the thickness of the first intermediate movable member is greater than the thickness of the first intermediate connecting portion. In the fourth condition described above, the density of the first intermediate movable member is higher than the density of the first intermediate connection portion, as described in Configuration 1 of the sensor.

[0069] (Composition 3) The first intermediate movable member and the first connecting portion satisfy at least one of the fifth, sixth, seventh, and eighth conditions. In the fifth condition described above, the mass of the first intermediate movable member is greater than the mass of the first connecting portion. In the sixth condition described above, the area of ​​the first intermediate movable member is greater than the area of ​​the first connection portion. In the seventh condition described above, the thickness of the first intermediate movable member is greater than the thickness of the first connecting portion. In the eighth condition described above, the density of the first intermediate movable member is higher than the density of the first connection portion, as described in configuration 2 of the sensor.

[0070] (Composition 4) The first intermediate movable member and the first movable member satisfy at least one of the 9th, 10th, 11th, and 12th conditions. In the ninth condition described above, the mass of the first intermediate movable member is greater than the mass of the first movable member. In the tenth condition, the area of ​​the first intermediate movable member is greater than the area of ​​the first movable member. In the 11th condition described above, the thickness of the first intermediate movable member is greater than the thickness of the first movable member. The sensor according to configuration 2 or 3, wherein, in the 12th condition, the density of the first intermediate movable member is higher than the density of the first movable member.

[0071] (Composition 5) In a first plane intersecting the first direction from the base to the first fixed portion, the first intermediate movable member is provided around the first fixed portion. In the first plane, the first movable member is a sensor according to any one of configurations 1 to 4, provided around the first intermediate movable member.

[0072] (Composition 6) The first intermediate movable member is annular, The sensor according to configuration 5, wherein the first movable member is annular.

[0073] (Composition 7) The aforementioned element section is The second intermediate connection section, The second connection section, It further includes, The second intermediate connection part is connected to the first fixed part, A portion of the first intermediate movable member is connected to the second intermediate connecting portion, A portion of the second connecting portion is connected to the first intermediate movable member, The other part of the second connection is connected to the first movable member, The sensor according to configuration 6, wherein the first gap is further provided between the base and the second intermediate connection part, and between the base and the second connection part.

[0074] (Composition 8) The first intermediate movable member is annular, In a first plane intersecting the first direction from the base to the first fixed portion, the first intermediate movable member is provided around the first movable member, The first fixed portion is a sensor according to any one of configurations 1 to 4, provided on the outside of the first intermediate movable member.

[0075] (Composition 9) The aforementioned element section is The second fixing portion provided on the base, A second intermediate connection part connected to the second fixed part, The second connection section, It further includes, A portion of the first intermediate movable member is connected to the second intermediate connecting portion, A portion of the second connecting portion is connected to the first intermediate movable member, The other part of the second connection is connected to the first movable member, The sensor according to configuration 8, wherein the first gap is further provided between the base and the second intermediate connection part, and between the base and the second connection part.

[0076] (Composition 10) The first intermediate movable member is annular, In a first plane intersecting the first direction from the base to the first fixed portion, the first intermediate movable member is provided around the first movable member, The first fixed portion is a sensor according to any one of configurations 1 to 4, provided inside the first intermediate movable member.

[0077] (Composition 11) The aforementioned element section is The second fixing portion provided on the base, A second intermediate connection part connected to the second fixed part, The second connection section, It further includes, A portion of the first intermediate movable member is connected to the second intermediate connecting portion, A portion of the second connecting portion is connected to the first intermediate movable member, The other part of the second connection is connected to the first movable member, The sensor according to configuration 10, wherein the first gap is further provided between the base and the second intermediate connection part, and between the base and the second connection part.

[0078] (Composition 12) The first movable member described above is annular, In a first plane intersecting the first direction from the base to the first fixed portion, the first movable member is provided around the first intermediate movable member, The first fixed portion is a sensor according to any one of configurations 1 to 4, provided inside the first movable member.

[0079] (Composition 13) The aforementioned element section is The second fixing portion provided on the base, A second intermediate connection part connected to the second fixed part, The second connection section, It further includes, A portion of the first intermediate movable member is connected to the second intermediate connecting portion, A portion of the second connecting portion is connected to the first intermediate movable member, The other part of the second connection is connected to the first movable member, The sensor according to configuration 12, wherein the first gap is further provided between the base and the second intermediate connection part, and between the base and the second connection part.

[0080] (Composition 14) The element portion further includes a third fixed electrode fixed to the substrate, The first movable member includes a third movable electrode, The third fixed electrode faces the third movable electrode, The sensor according to any one of configurations 1 to 6, wherein the direction from the first fixed part to the third fixed electrode is along the direction from the first fixed part to the first fixed electrode.

[0081] (Composition 15) The element portion further includes a third fixed electrode fixed to the substrate, The first movable member includes a third movable electrode, The third fixed electrode faces the third movable electrode, The sensor according to any one of configurations 8 to 11, wherein the direction from the center of the first movable member to the third fixed electrode in the first plane is along the direction from the center to the first fixed electrode.

[0082] (Composition 16) The element portion further includes a third fixed electrode fixed to the substrate, The first movable member includes a third movable electrode, The third fixed electrode faces the third movable electrode, The sensor according to configuration 12 or 13, wherein the direction from the center of the first intermediate movable member to the third fixed electrode in the first plane is along the direction from the center to the first fixed electrode.

[0083] (Composition 17) The sensor according to any one of configurations 1 to 16, wherein the first intermediate connection part and the first connection part have a meander structure.

[0084] (Composition 18) With an additional enclosure, The element portion is a sensor according to any one of configurations 1 to 17, provided inside the housing.

[0085] (Composition 19) A sensor described in any one of configurations 1 to 18, A circuit control unit capable of controlling the circuit based on the signal obtained from the sensor, An electronic device equipped with [a specific feature / feature].

[0086] (Composition 20) The electronic device according to configuration 19, wherein the electronic device includes at least one of a robot and a mobile body.

[0087] According to the embodiment, a sensor capable of improving its characteristics can be provided.

[0088] The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configuration of each element included in the sensor, such as the substrate, element part, substrate, fixing part, connecting part, movable member, and control unit, is included within the scope of the present invention as long as those skilled in the art can appropriately select from the known range to implement the present invention in the same way and obtain the same effects.

[0089] Furthermore, combinations of two or more elements from any of the specific examples, to the extent technically feasible, are also included within the scope of the present invention, insofar as they encompass the gist of the invention.

[0090] Furthermore, all sensors that a person skilled in the art can implement by appropriately modifying the design based on the sensors described above as embodiments of the present invention also fall within the scope of the present invention, insofar as they encompass the gist of the present invention.

[0091] Furthermore, within the scope of the concept of the present invention, a person skilled in the art could conceive of various modifications and alterations, and it is understood that such modifications and alterations also fall within the scope of the present invention.

[0092] While several embodiments of the present invention have been described, these embodiments are presented as examples only and are not intended to limit the scope of the invention. These novel embodiments can be carried out in a variety of other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included in the scope and spirit of the invention, as well as in the claims of the invention and its equivalents. [Explanation of symbols]

[0093] 10A: First movable member, 10Ac: Center, 10M: First intermediate movable member, 10Mc: Center, 10U: Element part, 10s: Base, 11E~14E: First to fourth movable electrodes, 31~34: First to fourth fixed parts, 41A~44A: First to fourth connection parts, 41M~44M: First to fourth intermediate connection parts, 51E~54E: First to fourth fixed electrodes, 60: Housing, 61: Case, 62: Circuit board, 70: Control unit, 110, 110a, 111~113, 120: Sensor, 170: Circuit control unit, 180: Circuit, 185: Drive unit, 210: Sensor device, 310: Electronic device, D1: First direction, G1: First gap, S1: Signal, t10A, t10M, t41~t44A, t41M~t44M: Thickness

Claims

1. Substrate and, A first fixing part fixed to the base, The first intermediate connecting portion is supported by the first fixed portion, The first intermediate movable member connected to the first intermediate connection portion, The first connecting portion connected to the first intermediate movable member, A first movable member supported by the first connection portion, the first movable member includes a first movable electrode, and A first fixed electrode is fixed to the substrate and faces the first movable electrode, It comprises an element section including, A first gap is provided between the base body and the first intermediate connecting portion, between the base body and the first intermediate movable member, between the base body and the first connecting portion, and between the base body and the first movable member. The first intermediate movable member is annular, In a first plane intersecting the first direction from the base to the first fixed portion, the first intermediate movable member is provided around the first movable member, The first fixed portion is a sensor provided on the outside of the first intermediate movable member.

2. Substrate and, A first fixing part fixed to the base, The first intermediate connecting portion is supported by the first fixed portion, The first intermediate movable member connected to the first intermediate connection portion, The first connecting portion connected to the first intermediate movable member, A first movable member supported by the first connection portion, the first movable member includes a first movable electrode, and A first fixed electrode is fixed to the substrate and faces the first movable electrode, It comprises an element section including, A first gap is provided between the base body and the first intermediate connecting portion, between the base body and the first intermediate movable member, between the base body and the first connecting portion, and between the base body and the first movable member. The first intermediate movable member is annular, In a first plane intersecting the first direction from the base to the first fixed portion, the first intermediate movable member is provided around the first movable member, The first fixed portion is a sensor provided inside the first intermediate movable member.

3. Substrate and, A first fixing part fixed to the base, The first intermediate connecting portion is supported by the first fixed portion, The first intermediate movable member connected to the first intermediate connection portion, The first connecting portion connected to the first intermediate movable member, A first movable member supported by the first connection portion, the first movable member includes a first movable electrode, and A first fixed electrode is fixed to the substrate and faces the first movable electrode, It comprises an element section including, A first gap is provided between the base body and the first intermediate connecting portion, between the base body and the first intermediate movable member, between the base body and the first connecting portion, and between the base body and the first movable member. The first movable member is a sensor that is not directly connected to other connecting parts supported by other fixed parts fixed to the base body.

4. In a first plane intersecting the first direction from the base to the first fixed portion, the first intermediate movable member is provided around the first fixed portion. The sensor according to claim 3, wherein in the first plane, the first movable member is provided around the first intermediate movable member.

5. The first intermediate movable member is annular, The sensor according to claim 4, wherein the first movable member is annular.

6. The first movable member is annular, In a first plane intersecting the first direction from the base to the first fixed portion, the first movable member is provided around the first intermediate movable member. The sensor according to claim 3, wherein the first fixed portion is provided inside the first movable member.

7. The first intermediate movable member and the first intermediate connecting portion satisfy at least one of the first, second, third, and fourth conditions. In the first condition, the mass of the first intermediate movable member is greater than the mass of the first intermediate connecting portion. In the second condition, the area of ​​the first intermediate movable member is larger than the area of ​​the first intermediate connection portion. In the third condition, the thickness of the first intermediate movable member is greater than the thickness of the first intermediate connecting portion. The sensor according to any one of claims 1 to 3, wherein, in the fourth condition, the density of the first intermediate movable member is higher than the density of the first intermediate connection portion.

8. The first intermediate movable member and the first connecting portion satisfy at least one of the fifth, sixth, seventh, and eighth conditions. In the fifth condition, the mass of the first intermediate movable member is greater than the mass of the first connecting portion. In the sixth condition, the area of ​​the first intermediate movable member is larger than the area of ​​the first connection portion. In the seventh condition, the thickness of the first intermediate movable member is greater than the thickness of the first connecting portion. The sensor according to claim 7, wherein, in the eighth condition, the density of the first intermediate movable member is higher than the density of the first connection portion.

9. The first intermediate movable member and the first movable member satisfy at least one of the 9th, 10th, 11th, and 12th conditions. In the ninth condition, the mass of the first intermediate movable member is greater than the mass of the first movable member. In the tenth condition, the area of ​​the first intermediate movable member is greater than the area of ​​the first movable member. In the 11th condition, the thickness of the first intermediate movable member is greater than the thickness of the first movable member. The sensor according to claim 7, wherein, in the twelfth condition, the density of the first intermediate movable member is higher than the density of the first movable member.

10. A sensor according to any one of claims 1 to 3, A circuit control unit capable of controlling the circuit based on the signal obtained from the sensor, An electronic device equipped with [a specific feature / feature].

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