Holding device, exposure device, and measurement device

Abstract

To provide a holding device capable of adjusting the position of an optical element.SOLUTION: A holding device includes: a first holding part that holds a first optical element; a second holding part that is overlaid on the first holding part and holds a second optical element; and a lens barrel that accommodates the first holding part and the second holding part and includes a support surface for supporting the first holding part. The first holding part has a first inclined surface inclined with respect to an optical axis of the first optical element at a position facing the lens barrel, and the second holding part has a second inclined surface inclined with respect to an optical axis of the second optical element at a position facing the lens barrel. The lens barrel is provided with a first through hole positioned corresponding to the first inclined surface and extending in a first direction perpendicular to the optical axis of the first optical element, and a second through hole positioned corresponding to the second inclined surface and extending in a second direction perpendicular to the optical axis of the second optical element.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a holding apparatus, an exposure apparatus, and a measurement apparatus. [Background technology]

[0002] Objective lenses are often used in the manufacturing processes of semiconductor devices, liquid crystal display devices, and the like. These objective lenses are included, for example, in projection optical systems that project light from a light source onto an object, or in measurement optical systems that measure the position of an object. It is preferable that the position of the lens included in the objective lens be adjusted with high precision not only in a direction parallel to the optical axis of the lens, but also in a direction perpendicular to the optical axis.

[0003] Patent document 1 discloses a method for adjusting the position of a lens in a direction perpendicular to the optical axis of the lens by applying force with a tool to a surface of a holding part that holds the lens, which surface is parallel to the optical axis of the lens, in a direction perpendicular to the optical axis of the lens, thereby moving the lens. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2004-219608 Summary of the Invention [Problem to be solved by the invention]

[0005] When a force is applied to a holder that holds an optical element such as a lens using a tool, as in Patent Document 1, the holder may lift up or tilt. If the position of the holder changes unintentionally in this way, it becomes impossible to adjust the position of the optical element.

[0006] SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a holding device that is capable of adjusting the position of an optical element. [Means for solving the problem]

[0007] In order to achieve the above-mentioned object, a holding device as one aspect of the present invention comprises a first holding portion that holds a first optical element, a second holding portion that holds a second optical element and is stacked on the first holding portion, and a lens barrel that houses the first holding portion and the second holding portion and includes a support surface that supports the first holding portion, wherein the first holding portion has a first inclined surface that is inclined with respect to the optical axis of the first optical element at a position facing the lens barrel, and the second holding portion has a second inclined surface that is inclined with respect to the optical axis of the second optical element at a position facing the lens barrel, and the lens barrel is provided with a first through hole that is located at a position corresponding to the first inclined surface and extends along a first direction perpendicular to the optical axis of the first optical element, and a second through hole that is located at a position corresponding to the second inclined surface and extends along a second direction perpendicular to the optical axis of the second optical element.

[0008] Further objects and other aspects of the present invention will become apparent from the following description of the embodiments with reference to the accompanying drawings. [Effects of the Invention]

[0009] According to the present invention, it is possible to provide a holding device capable of adjusting the position of an optical element. [Brief explanation of the drawings]

[0010] [Figure 1] 1 is a schematic view showing a configuration of a substrate processing apparatus according to a first embodiment. [Figure 2] FIG. 3 is a cross-sectional view of an objective lens included in a detection unit in the first embodiment. [Figure 3] 3A to 3C are diagrams illustrating an example of an assembly of an objective lens in the first embodiment. [Figure 4] 10 is a schematic diagram illustrating a state in which a force is applied to a first holding portion by a first adjustment portion. FIG. [Figure 5] 4 is a flowchart of a method for manufacturing an objective lens in the first embodiment. [Figure 6] 10 is a plan view of the first holding portion as viewed from the +Z direction side of the first holding portion. FIG. [Figure 7]FIG. 2 is a diagram illustrating a detection unit according to the first embodiment. [Figure 8] FIG. 1 is a schematic diagram showing the configuration of a measurement device in a first embodiment. [Figure 9] FIG. 10 is a cross-sectional view of an objective lens included in a detection unit in a second embodiment. [Figure 10] FIG. 11 is a cross-sectional view of an objective lens included in a detection unit in a third embodiment. [Figure 11] FIG. 11 is a cross-sectional view of an objective lens included in a detection unit in a fourth embodiment. [Figure 12] FIG. 1 is a flowchart showing a method for manufacturing an article. [Figure 13] FIG. 10 is a cross-sectional view of an objective lens included in a conventional detection unit. [Figure 14] FIG. 1 is a diagram showing an example of a conventional objective lens assembly. DETAILED DESCRIPTION OF THE INVENTION

[0011] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the following embodiments do not limit the scope of the invention claimed. Although multiple features are described in the embodiments, not all of these multiple features are necessarily essential to the invention, and the embodiments may be combined in any manner. Furthermore, in the drawings, the same reference numerals are used to designate the same or similar components, and redundant explanations will be omitted.

[0012] In addition, in this specification and drawings, directions are basically indicated by an XYZ coordinate system in which the vertical direction is the Z-axis direction and the horizontal plane perpendicular to the vertical direction is the XY plane, with each axis being orthogonal to each other. However, if an XYZ coordinate system is shown in each drawing, that coordinate system takes precedence.

[0013] Specific configurations of each embodiment will be described below.

[0014] First Embodiment 1 is a schematic diagram showing the configuration of a substrate processing apparatus 1 according to this embodiment. In this embodiment, the substrate processing apparatus 1 is a projection exposure apparatus that exposes a pattern of an original (mask, reticle) onto a substrate via a projection optical system using a step-and-repeat method or a step-and-scan method.

[0015] The substrate processing apparatus 1 includes an illumination optical system 12 that irradiates light, a projection optical system 15, a reticle stage 14 that can move while holding a reticle 13, a substrate stage 17 that can move while holding a substrate 16, a temperature adjustment device 18, a control unit 11, and a detection unit 21. The reticle 13 is, for example, an original in which a pattern to be transferred (e.g., a circuit pattern) is formed on the surface of quartz glass using chromium. The substrate 16 is, for example, single-crystal silicon, and when the substrate processing apparatus 1 is an exposure apparatus, the substrate 16 transported to the substrate processing apparatus 1 has a photosensitive material (resist) applied to its surface.

[0016] In the substrate processing apparatus 1, exposure light from a light source (not shown) passes through an illumination optical system 12 and illuminates a reticle 13 held on a reticle stage 14. The light that passes through the reticle 13 passes through a projection optical system 15 and is irradiated onto a substrate 16. At this time, light from a pattern formed on the reticle 13 forms an image on the surface of the substrate 16, and a shot area on the substrate 16 (photosensitive material) is exposed to the pattern image. The substrate processing apparatus 1 exposes the shot area on the substrate 16 in this way, and performs similar exposure on each of the multiple shot areas.

[0017] When performing exposure processing on the substrate 16, the control unit 11 controls the detection unit 21 to adjust the relative position between the substrate 16 and the reticle 13 based on the result of detection of the position of at least one of the alignment marks on the substrate 16 and the alignment mark on the substrate stage 17. The detection unit 21 includes, for example, a light source and an objective lens including a plurality of optical elements.

[0018] 13 is a cross-sectional view of objective lens 122 included in a conventional mark detection unit. Objective lens 122 includes first optical element 131, second optical element 132, and third optical element 133 inside lens barrel 123. First optical element 131 is held by first holder 141, second optical element 132 by second holder 142, and third optical element 133 by third holder 143. Lens barrel 23 is provided with first through hole 151 at a position corresponding to first holder 141, second through hole 152 at a position corresponding to second holder 142, and third through hole 153 at a position corresponding to third holder 143.

[0019] 13 shows a state in which the relative positions of first optical element 131, second optical element 132, and third optical element 133 are correctly adjusted, and the position of the optical axis of each optical element coincides with the position of desired optical axis 134 of objective lens 122. A retaining portion group including multiple retaining portions is pressed from above by a retaining ring 124 to prevent the relative positions of first optical element 131, second optical element 132, and third optical element 133 from changing. In other words, the retaining portion group including multiple retaining portions is sandwiched between support surface 123a supporting first retaining portion 141 of barrel 123 and retaining ring 124, thereby fixing the position. Note that the position of the optical axis in this embodiment refers to the position of the optical axis in an XY plane perpendicular to the direction parallel to the optical axis (Z-axis direction) in an XYZ coordinate system.

[0020] FIG. 14 is a diagram illustrating an example of the assembly of a conventional objective lens 122. FIG. 14(a) illustrates a first holding unit 141 that holds a first optical element 131 supported by a support surface 123a. At this time, the position of the optical axis 135 of the first optical element 131 is shifted from the position of the desired optical axis 134. FIG. 14(b) illustrates an example in which a first adjustment unit 161 is inserted into a first through-hole 151 and the first adjustment unit 161 applies force to the side surface of the first holding unit 141 to adjust the position of the first optical element 131 in a direction perpendicular to the direction parallel to the optical axis 135 of the first optical element 131. As shown in FIG. 14(b), when a force is applied to the first holding unit 141 by the first adjustment unit 161, the first holding unit 141 may tilt. When the first holding unit 141 tilts, the first optical element 131 also tilts, causing the optical axis 135 to tilt (not coincide with) the desired optical axis 134. Furthermore, when force is applied to first holding portion 141 by first adjustment portion 161, first holding portion 141 may float from support surface 123a. This makes it impossible to correctly adjust the position of first optical element 131. The lighter the optical element and holding portion are, the more likely it is that the optical element will tilt or float.

[0021] FIG. 14(c) is a diagram showing the second holding unit 142 placed on the first holding unit 141 after the first optical element 131 has been correctly positioned. At this time, the position of the optical axis 136 of the second optical element 132 is deviated from the desired position of the optical axis 134. FIG. 14(d) is a diagram showing an example in which the second adjustment unit 162 is inserted into the second through-hole 152 and the second adjustment unit 162 applies force to the second holding unit 142 to adjust the position of the second optical element 132 in a direction perpendicular to the direction parallel to the optical axis 136 of the second optical element 132. As shown in FIG. 14(d), by applying force to the second adjustment unit 162 to move the second holding unit 142, the optical axis 136 of the second optical element 132 can be aligned with the desired position of the optical axis 134. On the other hand, when the optical axis 136 is aligned with the desired optical axis 134, the position of the first holding part 141 in contact with the second holding part 142 may shift, and the optical axis 135 of the first optical element 131 may shift from the position of the desired optical axis 134.

[0022] The misalignment of the first holding part 141 when the second holding part 142 is moved can sometimes be resolved by adjusting the position of the first holding part 141, fixing the position of the first holding part 141 with a press ring, and then placing the second holding part 142 on top of the press ring. However, this method requires time to place the press ring after adjusting the position of each holding part.

[0023] Furthermore, a space is required to provide a press ring between the two upper and lower holders, which increases the size of the objective lens 122. Here, the space in which the mark detection unit is disposed is very narrow due to, for example, the presence of a temperature control device 18 for stabilizing the temperature near the mark detection unit. Therefore, it is preferable that the mark detection unit equipped with the objective lens 122 is small.

[0024] Therefore, in this embodiment, a holding device is provided that reduces tilting and floating of the optical element when the position of the optical element is adjusted, and that can adjust the position of the optical element with high precision.

[0025] FIG. 2 is a cross-sectional view of objective lens 22 included in detection unit 21 in this embodiment. In FIG. 2, objective lens 22 includes first optical element 31, second optical element 32, and third optical element 33 inside lens barrel 23. First optical element 31, second optical element 32, and third optical element 33 are convex lenses (positive lenses) or concave lenses (negative lenses). First optical element 31 is held by first holder 41, second optical element 32 is held by second holder 42, and third optical element 33 is held by third holder 43. In other words, lens barrel 23 houses first optical element 31, second optical element 32, third optical element 33, first holder 41, second holder 42, and third holder 43.

[0026] The center of gravity of the first holding portion 41 is G1, the center of gravity of the second holding portion 42 is G2, and the center of gravity of the third holding portion 43 is G3, all of which are on the optical axis. The relative positions of the optical element and the holding portions are fixed by, for example, an adhesive. If the adhesive has little dimensional change before and after hardening, the amount of distortion of the optical element will be small. The adhesive may also be an ultraviolet-curing type that does not harden until irradiated with ultraviolet light, allowing for precise adjustment of the adhesive position.

[0027] Lens barrel 23 is provided with a plurality of first through holes 51 at positions corresponding to first holding portions 41, a plurality of second through holes 52 at positions corresponding to second holding portions 42, and a plurality of third through holes 53 at positions corresponding to third holding portions 43. First holding portion 41 is provided with first inclined surfaces 41a at positions corresponding to each of the first through holes 51, second holding portion 42 is provided with second inclined surfaces 42a at positions corresponding to each of the second through holes 52, and third holding portion 43 is provided with third inclined surfaces 43a at positions corresponding to each of the third through holes 53.

[0028] In other words, the lens barrel 23 has a first through hole 51 at a position corresponding to the first inclined surface 41a of the first holding portion 41, a second through hole 52 at a position corresponding to the second inclined surface 42a of the second holding portion 42, and a third through hole 53 at a position corresponding to the third inclined surface 43a of the third holding portion 43.

[0029] The first inclined surface 41a, the second inclined surface 42a, and the third inclined surface 43a are located opposite the inner wall of the lens barrel 23. The first through hole 51 is aligned along a first direction that is perpendicular to a direction parallel to the optical axis 35 of the first optical element 31. The second through hole 52 is aligned along a second direction that is perpendicular to a direction parallel to the optical axis 36 of the second optical element 32. The third through hole 53 is aligned along a third direction that is perpendicular to a direction parallel to the optical axis of the third optical element 33.

[0030] In this embodiment, each of the through holes 51 to 53 extends in a direction perpendicular to the direction parallel to the optical axis. However, the extension direction of each through hole may be slightly deviated from the direction perpendicular to the direction parallel to the optical axis, as long as it is along the direction perpendicular to the direction parallel to the optical axis and points toward the corresponding inclined surface. Furthermore, the extension directions of each of the through holes 51 to 53 do not necessarily have to be the same; a configuration in which one extension direction is different from the other two extension directions or a configuration in which all three extension directions are different from each other is also possible.

[0031] The first through-holes 51 are holes into which first adjustment units 61, described later, can be inserted, and are provided on both the +Y and −Y sides of the lens barrel 23. The position of the first holding unit 141 in the Y-axis direction can be adjusted by applying force to the first holding unit 141 with the first adjustment unit 61 inserted into the first through-hole 51. The second through-holes 52 are holes into which second adjustment units 62, described later, can be inserted, and are provided on both the +Y and −Y sides of the lens barrel 23. The position of the second holding unit 142 in the Y-axis direction can be adjusted by applying force to the second holding unit 142 with the second adjustment unit 62 inserted into the second through-hole 52. The third through-holes 53 are holes into which third adjustment units 63, described later, can be inserted, and are provided on both the +Y and −Y sides of the lens barrel 23. The position of the third holding unit 143 in the Y-axis direction can be adjusted by applying force to the third holding unit 143 with the third adjustment unit 63 inserted into the third through-hole 53. In this way, the first adjustment unit 61, the second adjustment unit 62, and the third adjustment unit 63 are components for adjusting the position in a direction perpendicular to the direction parallel to the optical axis of the optical element held by the corresponding optical element holding unit.

[0032] 2 shows a state in which the relative positions of the first optical element 31, the second optical element 32, and the third optical element 33 are correctly adjusted, and the optical axis of each optical element coincides with the desired optical axis 34 of the objective lens 22. The holding portion group including the multiple holding portions is pressed from above by the press ring 24 so that the relative positions of the first optical element 31, the second optical element 32, and the third optical element 33 do not change. In other words, the holding portion group including the multiple holding portions is sandwiched between the press ring 24 and the support surface 23a that supports the first holding portion 41 of the lens barrel 23, and its position is fixed.

[0033] 3A and 3B are diagrams showing an example of assembling the objective lens 22 in this embodiment. Fig. 3A shows a state in which the first holding portion 41 that holds the first optical element 31 is supported by the support surface 23a. At this time, the position of the optical axis 35 of the first optical element 31 is shifted from the desired position of the optical axis 34.

[0034] 3(b) is a diagram showing an example in which the first adjustment unit 61 is inserted into the first through-hole 51 and applies force to the first holding unit 41 to adjust the position of the first optical element 31 in a direction perpendicular to the direction parallel to the optical axis 35 of the first optical element 31. The first adjustment unit 61 on the -Y direction side applies a force to move the first holding unit 41 toward the +Y direction. In response to the force applied by the first adjustment unit 61 on the -Y direction side, the first adjustment unit 61 on the +Y direction side is pushed by the first holding unit 41 and moves in the +Y direction.

[0035] In this embodiment, the position of the first holding unit 41 (first optical element 31) is adjusted by the first adjustment unit 61 applying a force to the first inclined surface 41a. When the first adjustment unit 61 applies a force to the first inclined surface 41a, a force acts on the first holding unit 41 not only in a direction (Y-axis direction) perpendicular to a direction parallel to the optical axis 35 of the first optical element 31, but also in the direction of the support surface 23a (-Z direction) parallel to the optical axis 35 of the first optical element 31. In addition, the first adjustment unit 61 on the +Y direction side is in contact with the first inclined surface 41a on the +Y direction side, and the first holding unit 41 also receives a force from the first adjustment unit 61 on the +Y direction side in the direction of the support surface 23a (-Z direction) parallel to the optical axis 35. This reduces the possibility of tilting or floating of the first holding unit 41 when adjusting the decentering of the optical axis of the first optical element 31.

[0036] 3(c) is a diagram showing that the second holding portion 42, which holds the second optical element 32, is supported by the first holding portion 41. At this time, the optical axis 35 of the first optical element 31 has been adjusted by the first adjustment portion 61 and therefore coincides with the position of the desired optical axis 34. On the other hand, the position of the optical axis 36 of the second optical element 32 is deviated from the position of the desired optical axis 34.

[0037] 3(d) is a diagram showing an example in which the second adjustment unit 62 is inserted into the second through-hole 52 and applies force to the second holding unit 42 by the second adjustment unit 62 to adjust the position of the second optical element 32 in a direction perpendicular to the direction parallel to the optical axis 36 of the second optical element 32. The second adjustment unit 62 on the -Y direction side applies a force to move the second holding unit 42 toward the +Y direction. In response to the force applied by the second adjustment unit 62 on the -Y direction side, the second adjustment unit 62 on the +Y direction side is pushed by the second holding unit 42 and moves in the +Y direction.

[0038] In this embodiment, the position of the second holder 42 holding the second optical element 32 is adjusted by the second adjuster 62 applying a force to the second inclined surface 42a. When the second adjuster 62 applies a force to the second inclined surface 42a, a force acts on the second holder 42 not only in the +Y direction perpendicular to the direction parallel to the optical axis 36 of the second optical element 32, but also in the direction toward the first holder 41 (-Z direction) parallel to the optical axis 36 of the second optical element 32. Furthermore, the second adjuster 62 on the +Y direction side is in contact with the second inclined surface 42a on the +Y direction side, and the second holder 42 also receives a force from the second adjuster 62 on the +Y direction side parallel to the optical axis 36 toward the first holder 41 (-Z direction). This reduces the possibility of the second holder 42 becoming tilted or floating. Therefore, it is possible to adjust the position of the second holder 42 without tilting or floating.

[0039] Furthermore, in the past, adjusting the position of the second holding unit 42 could result in the position of the first holding unit 41, whose position has already been adjusted, being shifted. However, in this embodiment, the first holding unit 41 receives a force in the -Z direction from the first adjustment unit 61 and is pressed against the support surface 23a, reducing the possibility that the position of the first holding unit 41 will change when the position of the second holding unit 42 is adjusted. Therefore, it is also possible to adjust the position of the second holding unit 42 so that the position of the first holding unit 41 does not change. This allows the position of the optical axis 35 of the first optical element 31 and the position of the optical axis 36 of the second optical element to coincide with the desired position of the optical axis 34.

[0040] FIG. 4 is a schematic diagram illustrating the application of force to the first holding unit 41 by the first adjustment unit 61. Here, the inclination angle of the first slope 41a of the first holding unit 41 relative to the direction parallel to the optical axis (Z-axis direction) is defined as θ. This inclination angle θ is also the inclination angle relative to the optical axis 35 of the first optical element 31. Furthermore, when the optical axis 35 of the first optical element 31 is parallel to the inner wall of the lens barrel 23, this inclination angle is also the inclination angle relative to the inner wall of the lens barrel 23. When the first adjustment unit 61 on the −Y direction side applies a force F to the first holding unit 41 in the +Y direction, the force F applied to the first slope 41a is dispersed in a direction perpendicular to the direction parallel to the optical axis (Y-axis direction) and a direction parallel to the optical axis (Z-axis direction). Specifically, the force F is dispersed into a force F1 applied in the Y-axis direction to push the first holding unit 41 and a force F2 applied in the Z-axis direction to push the first holding unit 41 in the −Z direction. The magnitude of the force F1 is given by formula (1), and the magnitude of the force F2 is given by formula (2). F1=Fcosθ Equation (1) F2=Fsinθ···Eq. (2)

[0041] In this embodiment, the inclined surfaces are pressed when adjusting the position of the holders, so a force in the -Z direction (force F2 on first holder 41 in the example of FIG. 4) is applied to the holders. This force F2 can reduce tilt or lift of first holder 41. The same applies to second inclined surface 42a and third inclined surface 43a.

[0042] The inclination angle of the slope can be determined based on the relative positions of the adjustment unit and the holding unit when the adjustment unit applies force to the holding unit, the center of gravity of the holding unit, the friction coefficient of the holding unit, and other factors. The inclination angle can be determined between 0°<θ<90°. The larger the inclination angle, the larger the force F2. The inclination angle is preferably 10°<θ<80°. The slope must be designed to reduce tilt or lift of the holding unit, i.e., to apply a force to the holding unit in the -Z direction. Therefore, the adjustment unit should be positioned closer to the optical axis of the optical element as it presses in the +Z direction. In other words, when the lens barrel 23 supports the first holding unit 41 on the support surface 23a, and the first holding unit 41 supports the second holding unit 42, the first slope 41a is designed so that the distance from the support surface 23a decreases as it moves away from the support surface 23a. The second inclined surface 42a is an inclined surface such that the distance from the optical axis 36 of the second optical element 32 decreases as the second inclined surface 42a increases away from the support surface 23a.

[0043] The positions at which the inclined surfaces of the holding parts are provided are preferably positions corresponding to the centers of gravity of the respective holding parts. Specifically, it is preferable that at least a portion of the positions of the inclined surfaces in the Z-axis direction coincide with the positions of the centers of gravity of the respective holding parts in the Z-axis direction. The positions of the centers of gravity of the respective holding parts can be acquired from design information. The tilt of the holding parts can be further reduced by the adjustment part pressing the positions corresponding to the centers of gravity of the holding parts. For example, the tilt of the holding parts can be further reduced by the adjustment part pressing the positions within the inclined surfaces of the holding parts that are located at the same positions in the Z-axis direction as the centers of gravity.

[0044] As described above, in this embodiment, the holding portions include slopes inclined with respect to the optical axes of the optical elements. For example, the first holding portion 41 includes a slope inclined with respect to the optical axis 35 of the first optical element 31, and the second holding portion 42 includes a slope inclined with respect to the optical axis 36 of the second optical element 32.

[0045] The amount of adjustment for the position of the holding portion (optical element) is determined based on, for example, the results of measurements made with a measuring device. The measuring device measures, for example, the focal position of each surface of the optical element, and calculates the deviation of the optical axis of the optical element from the reference position (desired optical axis 34) based on the measurement results. This measuring device is, for example, OptiCentric by TriOptics.

[0046] The adjustment unit is, for example, a plunger that includes a spring and can be positioned. Alternatively, the adjustment unit may be a rod-shaped member or screw that does not include a spring. The adjustment unit, located opposite the adjustment unit that pushes the holding unit, is pushed by the holding unit. At this time, the holding unit receives a force from the adjustment unit in a direction parallel to the optical axis of the optical element held by the holding unit (the -Z direction). However, if the adjustment unit is a plunger that includes a spring, the holding unit also receives a force in the -Z direction due to the spring force. Therefore, when the adjustment unit is a plunger that includes a spring, tilting or floating of the holding unit can be further reduced. The through-hole into which the adjustment unit is inserted may be female-threaded, and the adjustment unit may be male-threaded. The tip of the adjustment unit may be ball-shaped or pin-shaped, and the shape is not particularly limited. In this embodiment, the adjustment unit applies force to the inclined portion included in the holding unit as shown in FIG. 3, thereby reducing misalignment of the holding unit (optical element) during position adjustment.

[0047] 5 is a flowchart of a manufacturing method of the objective lens (optical device) 22 shown in FIG. 2 in this embodiment. First, the first adjustment unit 61 applies force to the first inclined surface 41a of the first holding unit 41 to adjust the position of the optical axis 35 of the first optical element 31 held by the first holding unit 41 to the desired position of the optical axis 34 (first adjustment step, S110). This position adjustment is an adjustment of the position of the first optical element 31 in a direction perpendicular to the direction parallel to the optical axis 35 of the first optical element 31.

[0048] Next, the second holding unit 42 that holds the second optical element 32 is placed on the first holding unit 41, and the position of the second holding unit 42 is adjusted in a direction perpendicular to the direction parallel to the optical axis 36 (second adjustment step, S120). This adjustment is performed by applying force to the second slope 42a of the second holding unit 42 by the second adjustment unit 62 to adjust the position of the second holding unit 42 (second optical element 32) so that the position of the optical axis 36 of the second optical element 32 held by the second holding unit 42 is aligned with the desired position of the optical axis 34. In other words, this position adjustment is an adjustment of the position of the second optical element 32 in a direction perpendicular to the direction parallel to the optical axis 36 of the second optical element 32.

[0049] Next, the third holding unit 43 that holds the third optical element 33 is placed on the second holding unit 42, and the position of the third holding unit 43 is adjusted in a direction perpendicular to the direction parallel to the optical axis (third adjustment step S130). This adjustment is performed by applying force to the third slope 43a of the third holding unit 43 by the third adjustment unit 63 to adjust the position of the third holding unit 43 (third optical element 33) so that the position of the optical axis of the third optical element 33 held by the third holding unit 43 is the desired position of the optical axis 34. In other words, this position adjustment is an adjustment of the position of the third optical element 33 in a direction perpendicular to the direction parallel to the optical axis of the third optical element 33.

[0050] Next, with the positions of the first optical element 31, the second optical element 32, and the third optical element 33 adjusted, the positions of the first optical element 31, the second optical element 32, and the third optical element 33 are fixed by the press ring 24 (fixing step, S140). After the fixing step is performed, the adjustment units may be removed from the through-holes. The through-holes from which the adjustment units have been removed may or may not be blocked by inserting an object therein.

[0051] In the present embodiment, the objective lens 22 includes three optical elements, and an adjustment process is performed for each optical element, resulting in three adjustment processes (first adjustment process, second adjustment process, and third adjustment process). However, the present invention is not limited to this example. For example, the objective lens 22 may include one or more optical elements and one or more holders, and the number of optical elements and holders may be one, two, three, or four or more. The first holder 41 and the second holder 42 included in the objective lens 22 may include slopes that are inclined with respect to the optical axes of the first optical element 31 and the second optical element 32, respectively.

[0052] In this embodiment, the retaining ring 24 is disposed so as to contact the third optical element 33 (the uppermost optical element). However, an elastic body may be sandwiched between the retaining ring 24 and the uppermost optical element. By sandwiching the elastic body, it is possible to reduce the positional shift of each optical element when the retaining ring 24 presses the optical elements from above. Examples of the elastic body include wave washers and gore sheets. Furthermore, the fixing process does not need to be performed after the adjustment process for all optical elements has been completed. For example, if the first and second adjustment processes are performed and then the third optical element 33 is installed, the third optical element 33 may be installed with high positional accuracy. This is because the third optical element 33 is installed in the upper layer of the lens barrel 23, where installation can be easily performed. In such a case, the fixing process for fixing the positions of the first optical element 31, the second optical element 32, and the third optical element 33 may be performed even if the adjustment process for the third optical element 33 has not been performed. In other words, it is not necessary to perform position adjustment for all holding parts (optical elements), and position adjustment may be performed for specific holding parts (optical elements) included in the objective lens 22, and for example, only the first adjustment step and the second adjustment step may be performed as the adjustment step.

[0053] In the present embodiment, an example has been shown in which the desired optical axis positions of all optical elements included in the objective lens 22 are to be aligned with one another, but this is not intended to be limiting. The desired optical axis positions of the optical elements included in the objective lens 22 may be different from one another. That is, the desired optical axis position of the first optical element 31 and the desired optical axis position of the second optical element 32 may be different from one another. Furthermore, in the present embodiment, an example has been shown in which the optical axis positions of the optical elements are aligned with the desired optical axis positions, but they do not have to be aligned, and the optical axis positions of the optical elements may be adjusted so as to be within an allowable range.

[0054] While the present embodiment illustrates an example in which adjacent holders are in contact with each other, this is not limiting. For example, a member may be present between the first holder 41 and the second holder 42, and the first holder 41 and the second holder 42 may not be in contact with each other. Furthermore, the present embodiment illustrates an example in which the position of the holder (optical element) is adjusted in the Y-axis direction. However, this is not limiting. Position adjustment may be performed in any direction parallel to a plane (XY plane) perpendicular to a direction parallel to the optical axis (Z-axis direction) of the optical element. For example, a pair of through-holes for inserting adjustment units in the X-axis direction may be provided facing each other near the inclined surface of each holder of the lens barrel 23, thereby adjusting the position of each holder (each optical element) in the X-axis direction. Furthermore, through-holes may be provided in the lens barrel 23 at predetermined angles around its central axis (desired optical axis 34), thereby adjusting the position of the holder (optical element) in multiple directions parallel to the XY plane. For example, four through-holes may be provided at 90-degree intervals around the central axis, and the position of the holder (optical element) may be adjusted in the X-axis and Y-axis directions using, for example, four adjustment units. In other words, multiple through-holes may be provided at predetermined angular intervals around the central axis, and the position of the holder (optical element) may be adjusted using adjustment units. That is, barrel 23 may have a fourth through-hole (first through-hole) located at a position corresponding to first slope 41a and extending along a fourth direction (X-axis direction) that is different from the first direction (Y-axis direction) and perpendicular to optical axis 35 of first optical element 31. Furthermore, barrel 23 may have a fifth through-hole (second through-hole) located at a position corresponding to second slope 42a and extending along a fifth direction (X-axis direction) that is different from the second direction (Y-axis direction) and perpendicular to optical axis 36 of second optical element 32.

[0055] In the present embodiment, an example is shown in which the deviation of the optical axis of the optical element is obtained by the above-mentioned measuring device, and the position of the optical axis of the optical element is adjusted to a desired position, but the present invention is not limited to this example. For example, the position of the optical element (holding portion) relative to the position of the lens barrel 23 determined in advance may be used as a reference (target), and the position of the optical element (holding portion) may be adjusted based on the measurement results obtained by measuring the relative position of the optical element (holding portion) relative to the position of the lens barrel 23.

[0056] FIG. 6 is a plan view of the first holding portion 41 as viewed from the +Z direction side of the first holding portion 41. As shown in FIG. 6(a), the first inclined surface 41a may be provided along the entire circumference of the first holding portion 41. Alternatively, as shown in FIG. 6(b), the first inclined surface 41a may be provided only at four locations on the first holding portion 41 corresponding to the four through-holes 51. In the case of the configuration shown in FIG. 6(b), the outer periphery of the first holding portion 41 has four surfaces parallel to the optical axis 35 of the first optical element 31, for example, between each inclined surface. The configuration described above with reference to FIG. 6 also applies to other holding portions (such as the second holding portion 42 and the third holding portion 43). The number of through-holes 51 is not limited to four.

[0057] FIG. 7 is a diagram showing the detection unit 21 of this embodiment. The detection unit 21 is generally broadly divided into two types: an off-axis alignment (OA) detection system and a TTL (Through the Lens Alignment) detection system. The OA detection system optically detects the alignment mark 319 formed on the substrate 16 using light (non-exposure light) with a wavelength different from that of the exposure light, without going through a projection optical system. In the example of FIG. 7, the detection unit 21 is an OA detection system, but this does not limit the alignment detection method.

[0058] The detection unit 21 includes a light source 320, a first relay optical system 321, a wavelength filter plate 322, a second relay optical system 323, an aperture stop 324, a first illumination system 325, a second illumination system 327, and a polarizing beam splitter 328. The detection unit 21 further includes a stop 326, a λ / 4 plate 329, the objective lens 22 described in this embodiment, a relay lens 331, a first imaging system 332, an optical member for adjusting coma aberration 335, a second imaging system 333, a photoelectric conversion element 334, and a processing unit 345. Light from the light source 320 passes through the first relay optical system 321, the wavelength filter plate 322, and the second relay optical system 323 and reaches the aperture stop 324. The light that reaches the aperture stop 324 is guided to the polarizing beam splitter 328 via the first illumination system 325 and the second illumination system 327. Of the light guided to the polarizing beam splitter 328, the S-polarized light perpendicular to the paper surface is reflected by the polarizing beam splitter 328, and is converted into circularly polarized light after passing through the aperture 326 and the λ / 4 plate 329. The light that has passed through the λ / 4 plate 329 passes through the objective lens 22 and illuminates the front-side mark 319 formed on the substrate 16.

[0059] The reflected light, diffracted light, and scattered light from the front-side mark 319 pass through the objective lens 22, pass through the λ / 4 plate 329, and are converted into P-polarized light parallel to the paper surface. Then, the light passes through the aperture 326 and the polarizing beam splitter 328. The light that passed through the polarizing beam splitter 328 passes through the relay lens 331, the first imaging system 332, the coma aberration adjustment optical member 335, and the second imaging system 333 to form an image of the front-side mark 319 on a photoelectric conversion element (e.g., a sensor such as a CCD) 334. The photoelectric conversion element 334 captures (detects) the image of the front-side mark 319 and acquires a detection signal. The processing unit 345 performs processing to determine the position of the mark based on the image of the mark captured by the photoelectric conversion element 334. The functions of the processing unit 345 may be performed by a control device external to the detection unit 21.

[0060] When the objective lens (optical device) 22 is manufactured using the holding device of this embodiment, the misalignment of the optical axis of the optical element with respect to the desired optical axis can be reduced to 3 μm or less, and the tilt of the optical axis of the optical element with respect to the desired optical axis can be reduced to 10 arcseconds or less. By using the objective lens 22 with reduced misalignment of the optical element as described above, it is possible to reduce errors when detecting (measuring) the position of a mark (alignment mark) in an exposure device. By using this objective lens 22, errors when detecting (measuring) the position of a mark (alignment mark) can be reduced by about 30% compared to the conventional objective lens 122.

[0061] In this embodiment, an exposure apparatus equipped with a detection unit 21 including an objective lens (optical device) 22 has been described as an example, but this embodiment can also be applied to an optical device configured as a part of another apparatus. For example, this embodiment may be applied to the objective lens (optical device) 22 included in a detection unit 71 configured as a part of a measurement apparatus 70 shown in FIG. 8.

[0062] The measurement device 70 includes a detection unit 71 including an objective lens 22, a substrate stage 72 that can move while holding a substrate 73, and a control unit 74. The detection unit 71 has the same configuration and function as the above-mentioned detection unit 21, and the substrate stage 72 has the same configuration and function as the above-mentioned substrate stage 17, so their explanation will be omitted. The measurement device 70 is a device that measures the position of at least one of marks (alignment marks) in multiple shot areas of a substrate 73 such as a semiconductor wafer and a mark (alignment mark) on the substrate stage 72.

[0063] The position information of the alignment marks measured by the measuring device 70 may be transmitted by the control unit 74 to the substrate processing apparatus (e.g., an exposure device), an external information processing apparatus, or a server. Furthermore, the measuring device 70 or the control unit 74 may calculate at least one of arrangement information of multiple shots, shot magnification information, and wafer magnification information based on the position information of the alignment marks. Furthermore, the calculation results (information) may be transmitted to the substrate processing apparatus, an external information processing apparatus, a server, or the like.

[0064] Other apparatuses including an optical device to which the present embodiment can be applied include a drawing apparatus that draws on a substrate using an electron beam, an ion beam, or the like to form a pattern on the substrate, and an imprinting apparatus that forms a pattern on the substrate by molding an imprint material on the substrate using a mold. Alternatively, the present embodiment may be applied to an optical device configured as part of other apparatus for processing substrates such as semiconductor wafers and glass plates, such as an ion implantation apparatus, a development apparatus, an etching apparatus, a film formation apparatus, an annealing apparatus, a sputtering apparatus, or a deposition apparatus. Alternatively, the present embodiment may be applied to an optical device configured as part of a planarization apparatus that uses a flat plate to planarize a composition on a substrate.

[0065] As described above, according to this embodiment, tilting and floating of the holding portion (optical element) can be reduced when adjusting the position of the holding portion (optical element), and therefore the position of the optical element can be adjusted with high precision.

[0066] Second Embodiment In the first embodiment, the inclination angles of the first inclined surface 41a, the second inclined surface 42a, and the third inclined surface 43a are the same. In this embodiment, the inclination angles of the first inclined surface 41b, the second inclined surface 42b, and the third inclined surface 43b are made different from one another.

[0067] For example, in an objective lens 22 with a high magnification, the optical elements located at the bottom (negative Z direction) may be smaller. When adjusting the position of a holder that holds such a small optical element, tilting or floating of the holder is likely to occur because the small optical element is lighter than a large optical element. Furthermore, the holder located at the bottom (negative Z direction) of the objective lens 22 is more affected by the position adjustment of each of the multiple holders stacked on top of each other. Specifically, the first holder 41 at the bottom may be affected by the position adjustment of the second holder 42 and the third holder 43 above it, resulting in positional deviation.

[0068] To reduce this possibility, in this embodiment, the inclination angles of the slopes included in each of the multiple holders are made different from one another. Figure 9 is a cross-sectional view of the objective lens 22 included in the detection unit 21 in this embodiment. The slope angle of the first slope 41b is the first slope angle θa, the slope angle of the second slope 42b is the second slope angle θb, and the slope angle of the third slope 43b is the third slope angle θc, with the relationship of the slope angles being θa > θb > θc. The larger the slope angle, the greater the force acting on the lower side (-Z direction) of the holder. Therefore, when a force of the same magnitude is applied by the adjustment unit, the first holder 41, the second holder 42, and the third holder 43 receive the greater force on the lower side (-Z direction) in this order. Specifically, when a force F in the Y-axis direction, which is orthogonal to a direction parallel to the optical axis (Z-axis direction), is applied to each holding part, the force in the -Z direction applied to first holding part 41 is Fa, the force in the -Z direction applied to second holding part 42 is Fb, and the force in the -Z direction applied to third holding part 43 is Fc. In this case, the force magnitudes have the relationship Fa>Fb>Fc.

[0069] Therefore, even when adjusting the position of the holder that holds a small optical element, tilting or floating of the holder (optical element) can be reduced by increasing the inclination angle of the slope of the holder. Also, by adjusting the position of the stacked holders, it is possible to reduce misalignment of the lower (-Z direction) holder.

[0070] In the present embodiment, the inclination angles of the slopes of the three optical elements are different from one another, but this is not limiting. The number of optical elements may be two or more. For example, when there are four optical elements, the inclination angles of the slopes of the respective holding portions may be different from one another so that the slopes of the holding portions in the lower layers (in the −Z direction in this embodiment) have larger inclination angles. Furthermore, not all of the inclined surfaces of the holding portions included in the objective lens 22 need to be different from one another. For example, the inclination angle of the first inclined surface 41b of the first holding portion 41 may be larger than the inclination angle of the second inclined surface 42b of the second holding portion 42, and the inclination angle of the second inclined surface 42b of the second holding portion 42 may be the same as the inclination angle of the third inclined surface 43b of the third holding portion 43. In other words, it is sufficient that the inclination angles of the slopes included in at least two of the multiple holding portions included in the objective lens 22 are different from one another. In this embodiment, the inclination angle is larger for the slopes included in the lower (-Z direction) holding portion, but the inclination angle may also be larger for the slopes included in the upper (+Z direction) holding portion.

[0071] <Third embodiment> This embodiment differs from the first and second embodiments in the shape of the holder. The holder of this embodiment includes a V-shaped groove with two slopes inclined with respect to the optical axis of the optical element held by the holder, and a portion of the V-shaped groove is the slope to which force is applied by the adjustment unit. FIG. 10 is a cross-sectional view of the objective lens 22 included in the detection unit 21 of this embodiment. The first holder 41 includes a first slope 41c at a position corresponding to the first through-hole 51 and a first slope 41d on the +Z direction side of the first slope 41c that is inclined in a direction different from the inclination direction of the first slope 41c. The second holder 42 includes a second slope 42c at a position corresponding to the second through-hole 52 and a second slope 42d on the +Z direction side of the second slope 42c that is inclined in a direction different from the inclination direction of the second slope 42c. The third retaining portion 43 includes a third inclined surface 43c at a position corresponding to the third through hole 53, and includes a third inclined surface 43d on the +Z direction side of the third inclined surface 43c that is inclined in a direction different from the inclination direction of the third inclined surface 43c.

[0072] The positions of the through holes into which the adjustment units are inserted correspond to the first inclined surface 41c, the second inclined surface 42c, and the third inclined surface 43c, respectively. As in the previous embodiment, a force in the -Z direction acts on the holding unit. This reduces tilting or lifting of the holding unit when a force is applied to the holding unit for position adjustment. Furthermore, by providing the first inclined surface 41d, the area of ​​the surface on which the first holding unit 41 supports the second holding unit 42 can be increased, thereby stably supporting the second holding unit 42. Similarly to the first inclined surface 41d, the second inclined surface 42d and the third inclined surface 43d also have the effect of stably supporting the upper holding unit and the press ring. Note that the inclination angles of the first inclined surface 41c and the second inclined surface 42c in this embodiment may be different from each other. Furthermore, in this embodiment, an example in which V-shaped grooves are provided in both the first holding unit 41 and the second holding unit 42 is illustrated, but this example is not limiting. For example, a V-shaped groove may be provided in one of the first holding portion 41 and the second holding portion 42, and the other holding portion, which does not have a V-shaped groove, may be provided with a single slope as described in the first embodiment. In other words, it is sufficient that at least one of the first slope of the first holding portion 41 and the second slope of the second holding portion 42 is part of the V-shaped groove.

[0073] <Fourth embodiment> In the objective lens 22 of this embodiment, the optical element holder does not have a slope inclined with respect to a direction parallel to the desired optical axis 34, and the through-holes of the lens barrel 23 are aligned in a direction inclined with respect to a direction perpendicular to the direction parallel to the desired optical axis 34. FIG. 11 is a cross-sectional view of the objective lens 22 included in the detection unit of this embodiment, and FIG. 11(a) is a cross-sectional view of the objective lens 22 of this embodiment. The first through-hole 251, the second through-hole 252, and the third through-hole 253 formed in the lens barrel 23 of this embodiment are aligned in a direction inclined with respect to a direction perpendicular to the direction parallel to the desired optical axis 34. Furthermore, the first through-hole 251 is aligned in a direction inclined with respect to a direction perpendicular to the direction parallel to the optical axis 35 (see FIG. 3) of the first optical element 31. The second through-hole 252 is aligned in a direction inclined with respect to a direction perpendicular to the direction parallel to the optical axis 36 (see FIG. 3) of the second optical element 32. The third through-hole 253 extends in a direction inclined with respect to a direction perpendicular to a direction parallel to the optical axis of the third optical element 33 .

[0074] FIG. 11(b) is a schematic diagram illustrating the application of force to the first holding unit 41 by the first adjustment unit 61. The first adjustment unit 61 is inserted into the first through-hole 251, which is aligned along a direction tilted by an angle θ with respect to a direction perpendicular to the direction parallel to the desired optical axis 34. By pressing the first holding unit 41 along this tilted direction, a force F1 in the +Y direction is applied to the first holding unit 41, adjusting its position in the Y-axis direction, and a force in the -Z direction (force F2 applied to the first holding unit 41 in the example of FIG. 11) is also applied. This force F2 reduces tilting or floating of the first holding unit 41 when adjusting its position in the Y-axis direction. This effect is similar when adjusting the position of the second holding unit 42 and the third holding unit 43 by inserting the corresponding adjustment unit into the corresponding through-hole.

[0075] Fifth Embodiment This embodiment relates to a method for manufacturing an article, characterized in that the article is manufactured using an exposure apparatus including the objective lens (optical device) 22 described above.

[0076] 12 is a flowchart showing a method for manufacturing an article using the exposure apparatus 1 shown in FIG. 1. First, the detection unit 21 detects the position of a mark provided on the substrate 16 (detection step, S210). Next, the substrate 16 is aligned based on the detection result of the detection step (alignment step, S220). Next, a pattern is formed on the substrate 16 aligned in the alignment step (formation step, S230). Then, an article is manufactured from the substrate 16 on which the pattern has been formed in the formation step (manufacturing step, S240).

[0077] The exposure apparatus 1 has a substrate stage 17 that holds a substrate 16, a detection unit 21, and an illumination optical system 12 that irradiates light onto the substrate 16. The detection unit 21 includes a first holding unit 41 that holds a first optical element 31, a second holding unit 42 that holds a second optical element 32 and is placed on the first holding unit 41, and a lens barrel 23 that houses the first holding unit 41 and the second holding unit 42 and includes a support surface 23a that supports the first holding unit 41. The first holding unit 41 has a first inclined surface that is inclined with respect to the optical axis of the first optical element 31 at a position facing the lens barrel 23. The second holding unit 42 has a second inclined surface that is inclined with respect to the optical axis of the second optical element 32 at a position facing the lens barrel 23. The lens barrel 23 has a first through hole 51 located at a position corresponding to the first inclined surface and extending along a first direction perpendicular to the optical axis 35 of the first optical element 31, and a second through hole 52 located at a position corresponding to the second inclined surface and extending along a second direction perpendicular to the optical axis 36 of the second optical element 32.

[0078] Products manufactured by this manufacturing method include, for example, semiconductor IC elements, liquid crystal display elements, color filters, MEMS, and the like.

[0079] In the forming step, for example, a substrate (silicon wafer, glass plate, etc.) coated with a photosensitive material is exposed by an exposure apparatus (lithography apparatus) to form a pattern on the substrate.

[0080] The manufacturing process includes, for example, developing a substrate (photosensitive material) on which a pattern is formed, etching the developed substrate, removing the resist, dicing, bonding, and packaging. The detection unit 21 included in the exposure apparatus 1 of this embodiment is manufactured in a state where tilting and floating of the holding unit (optical element) are reduced when adjusting the position of the holding unit (optical element), so it is possible to manufacture a detection unit 21 in which the optical element is positioned with high precision. This improves the detection accuracy of the detection unit 21, making it possible to manufacture high-quality products with higher alignment accuracy than conventional products.

[0081] The disclosure of this specification includes the following holding device, optical device manufacturing method, exposure apparatus, article manufacturing method, and measurement apparatus.

[0082] [Item 1] a first holding portion that holds the first optical element; a second holding portion that holds a second optical element and is placed on the first holding portion; a lens barrel that houses the first holding portion and the second holding portion and includes a support surface that supports the first holding portion, the first holding portion has a first inclined surface inclined with respect to the optical axis of the first optical element at a position facing the lens barrel, the second holding portion has a second inclined surface inclined with respect to the optical axis of the second optical element at a position facing the lens barrel, The lens barrel includes: a first through hole located at a position corresponding to the first inclined surface and extending along a first direction perpendicular to the optical axis of the first optical element; a second through hole located at a position corresponding to the second inclined surface and extending along a second direction perpendicular to the optical axis of the second optical element; A holding device characterized in that

[0083] [Item 2] The holding device described in item 1, characterized in that the angle at which the first inclined surface is inclined with respect to the optical axis of the first optical element and the angle at which the second inclined surface is inclined with respect to the optical axis of the second optical element are different from each other.

[0084] [Item 3] The holding device described in item 2, characterized in that the angle of inclination of the first inclined surface with respect to the optical axis of the first optical element is greater than the angle of inclination of the second inclined surface with respect to the optical axis of the second optical element.

[0085] [Item 4] the first inclined surface is a surface to which a force is applied in order to adjust the position of the first optical element in the first direction, the second inclined surface is a surface to which a force is applied in order to adjust the position of the second optical element in the second direction. 4. The holding device according to any one of items 1 to 3, wherein:

[0086] [Item 5] the first inclined surface has a distance from the optical axis of the first optical element that is smaller as the first inclined surface is farther from the support surface, 5. The holding device according to any one of items 1 to 4, wherein the second inclined surface has a distance from the optical axis of the second optical element that decreases as the second inclined surface moves away from the support surface.

[0087] [Item 6] 6. The holding device according to any one of items 1 to 5, wherein the first holding portion and the second holding portion are in contact with each other.

[0088] [Item 7] 7. The holding device according to any one of items 1 to 6, wherein the first inclined surface is provided on the entire periphery of the first holding portion.

[0089] [Item 8] 7. The holding device according to any one of items 1 to 6, wherein the first inclined surface is provided on a part of the entire circumference of the first holding portion.

[0090] [Item 9] 9. The holding device according to any one of items 1 to 8, wherein the first inclined surface is provided at a position corresponding to the center of gravity of the first holding portion.

[0091] [Item 10] 10. The holding device according to any one of items 1 to 9, wherein at least one of the first inclined surface and the second inclined surface is a part of a V-shaped groove.

[0092] [Item 11] 11. The holding device according to any one of items 1 to 10, wherein the position of the optical axis of the first optical element and the position of the optical axis of the second optical element are aligned.

[0093] [Item 12] the lens barrel accommodates a third holding portion that holds a third optical element so as to overlap the second holding portion; the third holding portion has a third inclined surface inclined with respect to the optical axis of the third optical element at a position facing the lens barrel, The holding device described in any one of items 1 to 11, characterized in that the barrel is provided with a third through hole that is located at a position corresponding to the third inclined surface and that is aligned along a third direction perpendicular to the optical axis of the third optical element.

[0094] [Item 13] The lens barrel includes: a fourth through hole that is located at a position corresponding to the first inclined surface and that is aligned along a fourth direction that is different from the first direction and perpendicular to the optical axis of the first optical element; a fifth through hole located at a position corresponding to the second inclined surface and extending along a fifth direction different from the second direction and perpendicular to the optical axis of the second optical element; 13. The holding device according to any one of items 1 to 12, wherein:

[0095] [Item 14] The holding device according to any one of items 1 to 13, characterized in that it has a plurality of the first through holes, and the plurality of first through holes are provided in the barrel at intervals of a predetermined angle around the optical axis of the first optical element.

[0096] [Item 15] a first holding portion that holds the first optical element; a second holding portion that holds a second optical element and is placed on the first holding portion; a lens barrel that houses the first holding portion and the second holding portion and includes a support surface that supports the first holding portion, The lens barrel includes: a first through hole that is located at a position corresponding to the first holding portion and that extends in a direction inclined with respect to a first direction that is orthogonal to a direction parallel to the optical axis of the first optical element; a second through hole that is located at a position corresponding to the second holding portion and that extends in a direction inclined with respect to a second direction that is perpendicular to a direction parallel to the optical axis of the second optical element; A holding device characterized in that

[0097] [Item 16] a first adjustment step of applying a force to a first inclined surface included in a first holding unit in a first direction perpendicular to a direction parallel to an optical axis of a first optical element held by the first holding unit, thereby adjusting a position of the first optical element in the first direction; a second adjustment step of applying a force to a second inclined surface included in a second holding part superimposed on the first holding part from a second direction perpendicular to a direction parallel to an optical axis of the second optical element held by the second holding part, thereby adjusting a position of the second optical element in the second direction; a fixing step of fixing the relative positions of the first optical element and the second optical element; A method for manufacturing an optical device, comprising:

[0098] [Item 17] Item 17. The method for manufacturing an optical device according to item 16, wherein an elastic body is placed on the second holding portion when the fixing step is performed.

[0099] [Item 18] Item 18. The method for manufacturing an optical device according to item 16 or 17, wherein in the fixing step, the relative positions of the first optical element and the second optical element are fixed by a pressing ring.

[0100] [Item 19] a first adjustment step of applying a force from a direction inclined with respect to a first direction orthogonal to a direction parallel to an optical axis of a first optical element held by a first holding unit, thereby adjusting a position of the first optical element in the first direction; a second adjustment step of applying a force from a direction inclined with respect to a second direction orthogonal to a direction parallel to an optical axis of a second optical element held by a second holding part superposed on the first holding part, thereby adjusting a position of the second optical element in the second direction; a fixing step of fixing the relative positions of the first optical element and the second optical element; A method for manufacturing an optical device, comprising:

[0101] [Item 20] An exposure apparatus for exposing a substrate, a substrate stage for holding the substrate; a detection unit that detects the position of at least one of the mark on the substrate and the mark on the substrate stage; an illumination optical system that irradiates the substrate with light, The detection unit a first holding portion that holds the first optical element; a second holding portion that holds a second optical element and is placed on the first holding portion; a lens barrel that houses the first holding portion and the second holding portion and includes a support surface that supports the first holding portion, the first holding portion has a first inclined surface inclined with respect to the optical axis of the first optical element at a position facing the lens barrel, the second holding portion has a second inclined surface inclined with respect to the optical axis of the second optical element at a position facing the lens barrel, The lens barrel includes: a first through hole located at a position corresponding to the first inclined surface and extending along a first direction perpendicular to a direction parallel to the optical axis of the first optical element; a second through hole that is located at a position corresponding to the second inclined surface and that extends along a second direction perpendicular to a direction parallel to the optical axis of the second optical element, irradiating the light from the illumination optical system onto the substrate held by the substrate stage, which is positioned based on the detection result of the detection unit; An exposure apparatus characterized by:

[0102] [Item 21] Item 20. A method for manufacturing an article using the exposure apparatus according to item 20, a detection step of detecting the position of the mark on the substrate by a detection unit; an alignment step of aligning the substrate based on the detection result of the detection step; a forming step of forming a pattern on the substrate aligned in the alignment step; a manufacturing process for manufacturing an article from the substrate on which the pattern is formed in the forming process; A method for manufacturing an article, comprising:

[0103] [Item 22] A measuring device for measuring the position of a mark, a substrate stage for holding the substrate; a detection unit that detects the position of at least one of a mark on the substrate held by the substrate stage and a mark on the substrate stage, The detection unit a first holding portion that holds the first optical element; a second holding portion that holds a second optical element and is placed on the first holding portion; a lens barrel that houses the first holding portion and the second holding portion and includes a support surface that supports the first holding portion, the first holding portion has a first inclined surface inclined with respect to the optical axis of the first optical element at a position facing the lens barrel, the second holding portion has a second inclined surface inclined with respect to the optical axis of the second optical element at a position facing the lens barrel, The lens barrel includes: a first through hole located at a position corresponding to the first inclined surface and extending along a first direction perpendicular to a direction parallel to the optical axis of the first optical element; a second through hole located at a position corresponding to the second inclined surface and extending along a second direction perpendicular to a direction parallel to the optical axis of the second optical element; A measuring device characterized in that

[0104] The invention is not limited to the above-described embodiments, and various changes and modifications can be made without departing from the spirit and scope of the invention. Accordingly, the following claims are appended to apprise the public of the scope of the invention.

Claims

1. a first holding portion that holds the first optical element; a second holding portion that holds a second optical element and is superimposed on the first holding portion; a lens barrel that houses the first holding portion and the second holding portion and includes a support surface that supports the first holding portion, the first holding portion has a first inclined surface inclined with respect to the optical axis of the first optical element at a position facing the lens barrel, the second holding portion has a second inclined surface inclined with respect to the optical axis of the second optical element at a position facing the lens barrel, The lens barrel includes: a first through hole located at a position corresponding to the first inclined surface and extending along a first direction perpendicular to the optical axis of the first optical element; a second through hole located at a position corresponding to the second inclined surface and extending along a second direction perpendicular to the optical axis of the second optical element; A holding device characterized in that

2. 2. The holding device according to claim 1, wherein the angle of inclination of the first inclined surface relative to the optical axis of the first optical element and the angle of inclination of the second inclined surface relative to the optical axis of the second optical element are different from each other.

3. 3. The holding device according to claim 2, wherein the angle of inclination of the first inclined surface relative to the optical axis of the first optical element is greater than the angle of inclination of the second inclined surface relative to the optical axis of the second optical element.

4. the first inclined surface is a surface to which a force is applied in order to adjust the position of the first optical element in the first direction, the second inclined surface is a surface to which a force is applied in order to adjust the position of the second optical element in the second direction.

2. The holding device according to claim 1.

5. the first inclined surface has a distance from the optical axis of the first optical element that is smaller as the first inclined surface is farther from the support surface, The holding device according to claim 1 , wherein the distance between the second inclined surface and the optical axis of the second optical element decreases as the second inclined surface moves away from the support surface.

6. The holding device according to claim 1 , wherein the first holding portion and the second holding portion are in contact with each other.

7. The holding device according to claim 1 , wherein the first inclined surface is provided on the entire periphery of the first holding portion.

8. The holding device according to claim 1 , wherein the first inclined surface is provided on a part of the entire circumference of the first holding portion.

9. 2. The holding device according to claim 1, wherein the first inclined surface is provided at a position corresponding to the center of gravity of the first holding portion.

10. 2. The retaining device of claim 1, wherein at least one of the first and second slopes is part of a V-shaped groove.

11. 2. The holding device according to claim 1, wherein the position of the optical axis of the first optical element and the position of the optical axis of the second optical element are aligned.

12. the lens barrel accommodates a third holding portion that holds a third optical element so as to overlap the second holding portion; the third holding portion has a third inclined surface inclined with respect to the optical axis of the third optical element at a position facing the lens barrel, The holding device according to claim 1, characterized in that the lens barrel has a third through hole located at a position corresponding to the third inclined surface and extending along a third direction perpendicular to the optical axis of the third optical element.

13. The lens barrel includes: a fourth through hole that is located at a position corresponding to the first inclined surface and that is aligned along a fourth direction that is different from the first direction and perpendicular to the optical axis of the first optical element; a fifth through hole that is located at a position corresponding to the second inclined surface and that is aligned along a fifth direction that is different from the second direction and perpendicular to the optical axis of the second optical element; 2. The holding device according to claim 1, further comprising:

14. 2. The holding device according to claim 1, wherein the holding device has a plurality of first through holes, the plurality of first through holes being provided in the lens barrel at predetermined angular intervals around the optical axis of the first optical element.

15. a first holding portion that holds the first optical element; a second holding portion that holds a second optical element and is superimposed on the first holding portion; a lens barrel that houses the first holding portion and the second holding portion and includes a support surface that supports the first holding portion, The lens barrel includes: a first through hole that is located at a position corresponding to the first holding portion and that extends in a direction inclined with respect to a first direction that is orthogonal to a direction parallel to the optical axis of the first optical element; a second through hole that is located at a position corresponding to the second holding portion and extends in a direction inclined with respect to a second direction that is orthogonal to a direction parallel to the optical axis of the second optical element; A holding device characterized in that

16. a first adjustment step of applying a force to a first inclined surface included in a first holding unit from a first direction perpendicular to a direction parallel to an optical axis of a first optical element held by the first holding unit, thereby adjusting a position of the first optical element in the first direction; a second adjustment step of applying a force to a second inclined surface included in a second holding part superposed on the first holding part from a second direction perpendicular to a direction parallel to an optical axis of the second optical element held by the second holding part, thereby adjusting a position of the second optical element in the second direction; a fixing step of fixing the relative positions of the first optical element and the second optical element; A method for manufacturing an optical device, comprising:

17. 17. The method for manufacturing an optical device according to claim 16, wherein an elastic body is placed on the second holding portion when the fixing step is performed.

18. 17. The method for manufacturing an optical device according to claim 16, wherein in the fixing step, the relative positions of the first optical element and the second optical element are fixed by a press ring.

19. a first adjustment step of applying a force from a direction inclined with respect to a first direction orthogonal to a direction parallel to an optical axis of a first optical element held by a first holding unit, thereby adjusting a position of the first optical element in the first direction; a second adjustment step of applying a force from a direction inclined with respect to a second direction orthogonal to a direction parallel to an optical axis of a second optical element held by a second holding part superposed on the first holding part, thereby adjusting a position of the second optical element in the second direction; a fixing step of fixing the relative positions of the first optical element and the second optical element; A method for manufacturing an optical device, comprising:

20. An exposure apparatus for exposing a substrate, a substrate stage for holding the substrate; a detection unit that detects the position of at least one of the mark on the substrate and the mark on the substrate stage; an illumination optical system that irradiates the substrate with light, The detection unit a first holding portion that holds the first optical element; a second holding portion that holds a second optical element and is superimposed on the first holding portion; a lens barrel that houses the first holding portion and the second holding portion and includes a support surface that supports the first holding portion, the first holding portion has a first inclined surface inclined with respect to the optical axis of the first optical element at a position facing the lens barrel, the second holding portion has a second inclined surface inclined with respect to the optical axis of the second optical element at a position facing the lens barrel, The lens barrel includes: a first through hole located at a position corresponding to the first inclined surface and extending along a first direction perpendicular to a direction parallel to the optical axis of the first optical element; a second through hole that is located at a position corresponding to the second inclined surface and extends along a second direction that is perpendicular to a direction parallel to the optical axis of the second optical element, irradiating the light from the illumination optical system onto the substrate held by the substrate stage, which is positioned based on the detection result of the detection unit; An exposure apparatus characterized by:

21. A method for manufacturing an article using the exposure apparatus according to claim 20, comprising: a detection step of detecting the position of the mark on the substrate by a detection unit; an alignment step of aligning the substrate based on the detection result of the detection step; a forming step of forming a pattern on the substrate aligned in the alignment step; a manufacturing process for manufacturing an article from the substrate on which the pattern is formed in the forming process; A method for manufacturing an article, comprising:

22. A measuring device for measuring the position of a mark, a substrate stage for holding the substrate; a detection unit that detects the position of at least one of a mark on the substrate held by the substrate stage and a mark on the substrate stage, The detection unit a first holding portion that holds the first optical element; a second holding portion that holds a second optical element and is superimposed on the first holding portion; a lens barrel that houses the first holding portion and the second holding portion and includes a support surface that supports the first holding portion, the first holding portion has a first inclined surface inclined with respect to the optical axis of the first optical element at a position facing the lens barrel, the second holding portion has a second inclined surface inclined with respect to the optical axis of the second optical element at a position facing the lens barrel, The lens barrel includes: a first through hole located at a position corresponding to the first inclined surface and extending along a first direction perpendicular to a direction parallel to the optical axis of the first optical element; a second through hole located at a position corresponding to the second inclined surface and extending along a second direction perpendicular to a direction parallel to the optical axis of the second optical element; A measuring device characterized in that

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