Processing device

Abstract

To provide a processing device capable of preventing contamination of a workpiece or an influence on an environment due to a processing end time.SOLUTION: A processing device 1 includes at least a processing unit 10 for processing a workpiece 100, a power unit 20 for supplying driving power for driving the processing unit 10, a display screen 30 having an input part 35 for inputting processing conditions for processing the workpiece 100, a storage part 40 for storing the processing conditions input by the input part 35, and a control unit 50 for controlling each constituent element of the processing device 1. A processing start time for starting the processing of the workpiece 100 by the processing unit 10 is input by the input part 35 and stored in the storage part 40, and the control unit 50 starts the processing of the workpiece 100 by supplying a driving power to the processing unit 10 by the power unit 20 when the processing start time is reached.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a processing device. [Background technology]

[0002] A silicon wafer (workpiece) having a plurality of devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integration) formed on its surface has its back surface ground by a grinding device or the like to form it to a predetermined thickness, and then is divided into individual devices by a cutting device or the like, which are used in electrical equipment such as mobile phones and personal computers. In this way, a processing device for processing workpieces, such as a grinding device or a cutting device, is used to divide the workpiece into individual devices (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 11-026402 Summary of the Invention [Problem to be solved by the invention]

[0004] Depending on the workpiece, the processing time in the processing equipment may be long. Therefore, depending on the time when the processing is completed, the worker may be absent. As a result, the workpiece may be left in the processing equipment even after processing. If left as is, there is a problem that foreign matter such as dust adheres to the surface of the workpiece, causing contamination of the workpiece. Furthermore, if the processing equipment remains turned on even after processing is completed, electricity consumption increases, which has an impact on the environment.

[0005] The present invention has been made in view of the above problems, and its object is to provide a processing apparatus that can prevent contamination of workpieces and environmental impact due to the processing completion time. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems and achieve the object, the processing device of the present invention is a processing device equipped with a processing unit for processing a workpiece, and is equipped with at least a power unit that supplies driving power to drive the processing unit, a display screen having an input unit for inputting processing conditions for processing the workpiece, a memory unit that stores the processing conditions input by the input unit, and a control unit that controls the processing device, characterized in that a processing start time for starting processing of the workpiece by the processing unit is input by the input unit and stored in the memory unit, and when the processing start time arrives, the control unit supplies the driving power to the processing unit by the power unit to start processing the workpiece.

[0007] In addition, in order to solve the above-mentioned problems and achieve the object, the processing device of the present invention is a processing device equipped with a processing unit for processing a workpiece, and is equipped with at least a power unit that supplies driving power to drive the processing unit, a display screen having an input unit for inputting processing conditions for processing the workpiece, a memory unit that stores the processing conditions input by the input unit, and a control unit that controls the processing device, wherein a processing end time for ending processing of the workpiece by the processing unit is input by the input unit and stored in the memory unit, the memory unit calculates a processing time from the processing conditions stored in the memory unit and stores the time obtained by subtracting the processing time from the processing end time as a processing start time, and when the processing start time arrives, the control unit supplies the driving power to the processing unit by the power unit to start processing the workpiece.

[0008] In addition, in order to solve the above-mentioned problems and achieve the object, the processing device of the present invention is a processing device equipped with a processing unit for processing workpieces, and is equipped with at least a power unit that supplies driving power to drive the processing unit, a display screen having an input unit for inputting processing conditions for processing the workpieces, a memory unit that stores the processing conditions input by the input unit, and a control unit that controls the processing device, characterized in that the memory unit stores in advance an idling time of the processing unit, a processing start time for starting processing of the workpiece by the processing unit is input by the input unit and stored in the memory unit, and the control unit supplies the driving power to the processing unit by the power unit at the idling start time, which is the processing start time minus the idling time, to start idling operation of the processing unit, and when the processing start time arrives, the idling operation is terminated and the processing unit starts processing of the workpiece.

[0009] In addition, in order to solve the above-mentioned problems and achieve the object, the processing apparatus of the present invention is a processing apparatus having a processing unit for processing workpieces, and at least comprises: a power unit that supplies driving power to drive the processing unit; a display screen having an input unit for inputting processing conditions for processing the workpieces; a memory unit that stores the processing conditions input by the input unit; and a control unit that controls the processing apparatus, wherein the memory unit pre-stores an idling time of the processing unit, a processing end time for ending processing of the workpiece by the processing unit is input by the input unit and stored in the memory unit, the memory unit calculates the processing time from the processing conditions stored in the memory unit, and stores the time obtained by subtracting the processing time from the processing end time as the processing start time, and the control unit supplies the driving power to the processing unit by the power unit at the idling start time, which is the time obtained by subtracting the idling time from the processing start time, to start idling operation of the processing unit, and when the processing start time arrives, the idling operation is terminated and the processing unit starts processing of the workpiece. [Effects of the Invention]

[0010] In the present invention, the processing start time for the processing unit to start processing the workpiece is input via an input unit and stored in a memory unit, and when the processing start time arrives, the power unit supplies driving power to the processing unit to start processing the workpiece. Therefore, the present invention makes it possible to set the processing end time while an operator is present, thereby preventing the workpiece from being left in the processing device after processing, thereby preventing contamination of the workpiece due to the processing end time and impact on the environment caused by the continuous supply of driving power to the processing device. [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 1 is a perspective view showing an example of the configuration of a processing apparatus according to the first embodiment. [Figure 2] FIG. 2 is a diagram illustrating an example of the operation process of the processing device shown in FIG. [Figure 3] FIG. 3 is a diagram illustrating an example of operation processing of the processing device according to the second embodiment. [Figure 4] FIG. 4 is a diagram illustrating an example of operation processing of the processing device according to the third embodiment. [Figure 5] FIG. 5 is a diagram illustrating an example of operation processing of the processing device according to the fourth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0012] Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the components described below include those that can be easily imagined by a person skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Furthermore, various omissions, substitutions, or modifications of the configuration can be made within the scope of the gist of the present invention.

[0013] [Embodiment 1] A processing device 1 according to a first embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing an example of the configuration of the processing device 1 according to the first embodiment. As shown in Fig. 1, the processing device 1 includes a processing unit 10, a power unit 20, a display screen 30, a storage unit 40, and a control unit 50.

[0014] The processing apparatus 1 is an apparatus including a processing unit 10 for processing a workpiece 100 shown in FIG. 1 . The workpiece 100, which is the processing target of the processing unit 10 of the processing apparatus 1, is a wafer such as a disk-shaped semiconductor device wafer or an optical device wafer, whose base material is silicon, sapphire, silicon carbide (SiC), gallium arsenide, or the like, as shown in FIG. 1 . The workpiece 100 has a plurality of planned division lines formed in a lattice pattern on a flat surface 101, and a plurality of devices, such as integrated circuits (ICs) and large-scale integrated circuits (LSIs), are formed in the areas defined by the plurality of planned division lines. As shown in FIG. 1 , the workpiece 100 may have a support tape 105 attached to a back surface 104 on the back side of the front surface 101, and an annular frame 106 attached to the outer edge of the support tape 105. That is, the workpiece 100 may be supported and fixed to the opening of the annular frame 106 via the support tape 105. Furthermore, the workpiece 100 is not limited to a wafer, but may also be a circular package substrate having multiple devices sealed with resin, such as a CSP (Chip Size Package) or a QFN (Quad Flat Non-leaded package), a ceramic plate, or a glass plate.

[0015] As shown in FIG. 1 , the processing unit 10 includes a holding unit 110, a processing unit 120, and a moving unit 130. The holding unit 110 holds the workpiece 100. The holding unit 110 is a so-called chuck table that includes a disk-shaped frame with a recess and a disk-shaped suction unit fitted into the recess. The suction unit of the holding unit 110 is formed of porous ceramic or the like with numerous porous holes and is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown). The upper surface of the suction unit of the holding unit 110 is a holding surface 111 on which the workpiece 100 is placed and which suction-holds the placed workpiece 100 by negative pressure introduced from the vacuum suction source. The holding surface 111 and the upper surface of the frame of the holding unit 110 are arranged on the same plane and are parallel to the horizontal XY plane.

[0016] The holding unit 110 is provided so as to be movable along the X-axis direction parallel to the horizontal direction by an X-axis direction moving unit 131 of the moving unit 130. A rotation drive source (not shown) is provided below the frame body and the suction part of the holding unit 110, and the holding unit 110 is provided so as to be rotatable (rotatable) around the central axis of the holding surface 111, which is parallel to the Z-axis direction that passes through the center of the holding surface 111 and is parallel to the vertical direction, by the rotation drive source.

[0017] The processing unit 120 processes the workpiece 100 held by the holding unit 110. In the first embodiment, the processing unit 120 includes a cutting blade 121 and a spindle 122, as shown in Fig. 1. The cutting blade 121 is attached to the tip of the spindle 122, and is rotated by the spindle 122, which serves as a rotation axis, to cut the workpiece 100 held by the holding unit 110.

[0018] The spindle 122 is provided such that the rotation axis direction is parallel to the horizontal direction and parallel to the Y-axis direction that is perpendicular to the X-axis direction. That is, the spindle 122 is provided so as to be rotatable about an axis parallel to the Y-axis direction, and is rotated about the axis by a motor (not shown) connected to the spindle 122. The spindle 122 supports the cutting blade 121 attached to the tip of the spindle 122 so as to be rotatable about the axis parallel to the Y-axis direction.

[0019] The spindle 122 of the processing unit 120 is provided so as to be movable in the Y-axis direction and the Z-axis direction by a Y-axis direction moving unit 132 and a Z-axis direction moving unit 133 of the moving unit 130. In the first embodiment, as shown in Fig. 1, the processing device 1 is provided with two sets of processing units 120 (cutting processing units) that cut the workpiece 100, that is, a two-spindle dicer, a so-called facing dual type cutting device (processing device).

[0020] In the present invention, the processing unit 120 is not limited to such a cutting processing unit, but may be a grinding processing unit having a spindle on which a grinding wheel with a grinding stone arranged thereon is rotatably mounted, and which grinds the workpiece 100 held in the holding unit 110 with the grinding stone, or a laser processing unit having a laser beam irradiator which irradiates the workpiece 100 with a laser beam, and which laser processes the workpiece 100 held in the holding unit 110 with the laser beam, etc.

[0021] The moving unit 130 moves the holding unit 110 that holds the workpiece 100 and the processing unit 120 that processes the workpiece 100 relative to each other. The moving unit 130 includes an X-axis moving unit 131, a Y-axis moving unit 132, and a Z-axis moving unit 133. The X-axis moving unit 131 moves the holding unit 110 along the X-axis direction relative to the processing unit 120. The Y-axis moving unit 132 and the Z-axis moving unit 133 move the spindle 122 of the processing unit 120 along the Y-axis direction and the Z-axis direction, respectively, relative to the holding unit 110.

[0022] In the first embodiment, the X-axis direction moving unit 131, the Y-axis direction moving unit 132, and the Z-axis direction moving unit 133 are all known ball screw mechanisms having a motor, a ball screw, and a guide. The X-axis direction moving unit 131, the Y-axis direction moving unit 132, and the Z-axis direction moving unit 133 each include an encoder that reads the rotational position of the motor, and detects the relative positions of the holding unit 110 and the processing unit 120 in the X-axis direction, the Y-axis direction, and the Z-axis direction based on the rotational position of the motor read by the encoder, and outputs the detected relative positions to the control unit 50. Here, the relative positions in the X-axis direction, the Y-axis direction, and the Z-axis direction are determined using an apparatus coordinate system provided in the processing device 1. The X-axis moving unit 131, the Y-axis moving unit 132, and the Z-axis moving unit 133 are not limited to a configuration in which the relative positions of the holding unit 110 and the processing unit 120 are detected by an encoder, but may also be configured with linear scales parallel to the X-axis, Y-axis, and Z-axis directions, respectively, and reading heads that are freely movable in the X-axis, Y-axis, and Z-axis directions by the X-axis moving unit 131, the Y-axis moving unit 132, and the Z-axis moving unit 133, respectively, and that read the graduations of the linear scales.

[0023] The processing unit 10 holds the workpiece 100 in the holding unit 110, and then rotates the cutting blade 121 attached to the tip of the spindle 122 about an axis parallel to the Y-axis direction by rotating the spindle 122, while moving the cutting blade 121 along the X-axis direction relative to the workpiece 100 held by the holding unit 110 by the X-axis direction moving unit 131.The cutting blade 121 cuts the workpiece 100, for example, along the planned division lines, to form cut grooves (machined grooves), thereby dividing the workpiece 100 along the planned division lines.In this way, the processing unit 10 processes the workpiece 100 using the holding unit 110, the machining unit 120, and the moving unit 130, which are the respective components constituting the processing unit 10.The processing unit 10 and each component of the processing unit 10 are controlled by the control unit 50, and process the workpiece 100, start or end processing of the workpiece 100, or stop processing of the workpiece 100, according to the control of the control unit 50.

[0024] The power unit 20 supplies drive power for driving the processing unit 10. The power unit 20 is electrically connected to a power supply source 25 that supplies commercial power, and is electrically connected to each component of the processing unit 10. The power unit 20 supplies the power supplied from the power supply source 25 to each component of the processing unit 10 as drive power for driving the processing unit 10. The power unit 20 has a conversion function that converts commercial AC power to DC as appropriate for each component of the processing unit 10, and a transformation function that changes the voltage of the commercial power as appropriate for each component of the processing unit 10. The power unit 20 is controlled by the control unit 50, and adjusts the supply of drive power from the power supply source 25 to each component of the processing unit 10 in accordance with the control of the control unit 50. In accordance with the control of the control unit 50, the power unit 20 supplies driving power from the power supply source 25 to each component of the processing unit 10, starts or ends the supply of driving power from the power supply source 25 to each component of the processing unit 10, and stops the supply of driving power from the power supply source 25 to each component of the processing unit 10.

[0025] In the first embodiment, the display screen 30 is provided, for example, on a cover (not shown) of the processing apparatus 1 with the display surface facing outward. The display screen 30 is a so-called display unit that displays, in a manner that is visible to an operator, a screen for setting processing conditions 201 (see FIG. 2, etc.) for processing the workpiece 100 by the processing unit 10, a screen for accepting input of a processing start time 202 (see FIG. 2, etc.) for starting processing of the workpiece 100 by the processing unit 10, a screen for accepting input of a processing end time 203 (see FIG. 3, etc.) for ending processing of the workpiece 100 by the processing unit 10, images and data acquired during processing of the workpiece 100 by the processing unit 10, calculation results by the control unit 50, etc. The display screen 30 is configured with a liquid crystal display device, a monitor, etc. The display screen 30 has an input unit 35 that an operator uses to input the processing conditions 201 for processing the workpiece 100 by the processing unit 10. The input unit 35 can also be used by an operator to input the processing start time 202 and the processing end time 203. The input unit 35 acquires information such as input processing conditions 201, processing start time 202, and processing end time 203, and outputs the acquired information to the storage unit 40. The input unit 35 provided on the display screen 30 is composed of at least one of a touch panel provided on the display screen 30, a mouse, a touchpad, a keyboard, etc. Note that the display screen 30 is not fixed to the processing device 1, but may be provided on any communication device, and the any communication device may be connected to the processing device 1 wirelessly or via a wire.

[0026] In embodiment 1, the processing conditions 201 for processing the workpiece 100 by the processing unit 10 include information such as the properties of the workpiece 100 to be processed, the properties of the processing tool used to process the workpiece 100 in the processing unit 120, the processing area and processing amount to be processed on the workpiece 100, the number of workpieces 100 to be processed, and the processing output during processing.

[0027] The properties of the workpiece 100 include, for example, the material, shape (disc or rectangular plate, etc.), and size (outer diameter and thickness, etc., in the case of a disc-shaped workpiece 100) of the workpiece 100. The properties of the machining tool used to machine the workpiece 100 in the machining unit 120 include, for example, information on the material and size of the machining tool. In the example of embodiment 1 where cutting is performed, this includes information on the material and size of the cutting blade 121. The machining area and amount to be machined on the workpiece 100 include, in the example of embodiment 1 where cutting is performed, the length and number of planned dividing lines to be cut, an index amount indicating the distance between adjacent planned dividing lines, cutting depth, etc. In another example where grinding is performed, this includes the area of ​​the grinding surface to be ground, the grinding amount, etc. The number of workpieces 100 to be machined includes, for example, the number of workpieces 100, the number of cassettes containing multiple workpieces 100, the number of lots of workpieces 100, etc.

[0028] The processing output during processing includes, for example, the rotation speed of the spindle 122 that imparts rotational motion to the processing tool (cutting blade 121 in the example of embodiment 1) during processing, the spindle current value, the feed rate which is the relative movement speed between the workpiece 100 (holding unit 110) and the processing unit 120, the flow rate of processing fluid (cutting fluid, grinding fluid, etc.) supplied toward the area where the processing tool processes the workpiece 100 during processing, and in the example of embodiment 1 where cutting processing is performed, it further includes the cutting depth which is the height from the exposed surface of the workpiece 100 to the lower end of the cutting edge of the cutting blade of the cutting blade 121 during processing, and in another example where grinding processing is performed, it further includes the distance between the rotation axis of the grinding wheel and the rotation axis of the holding unit 110, and the pressing force that presses the grinding wheel against the grinding surface of the workpiece 100 during processing.

[0029] The storage unit 40 receives and stores the processing conditions 201 input by the input unit 35. Furthermore, based on the processing conditions 201 input by the input unit 35, the storage unit 40 can calculate the time required for the holding unit 110 in the processing device 1 to hold and release the workpiece 100, the time required for processing by the processing unit 120, the time required for movement by the moving unit 130 during processing and other times, and the time required for carrying the workpiece 100 into and out of the processing unit 10, and store processing time calculation data used to calculate processing time 204 (see FIG. 3, etc.), which is the time required for processing. The processing time calculation data includes information on a processing time calculation formula and a processing time calculation table used to calculate the processing time 204 based on various information included in the processing conditions 201.

[0030] The storage unit 40 can also receive and store the processing start time 202 and processing end time 203 input by the input unit 35 from the input unit 35. The storage unit 40 can also receive and store the processing start time 202 calculated by the control unit 50 based on the processing conditions 201 (processing time 204) and the processing end time 203 from the control unit 50.

[0031] The storage unit 40 can also store in advance an idling time 205 (see FIG. 4, etc.) of the processing device 1. Here, the idling time 205 refers to the time required for idling operation (warm-up operation), which is a preparatory operation before the processing unit 10 starts processing the workpiece 100, to bring the processing unit 10 (each of its components) into a state affected by processing heat (processing heat) generated during processing (machining) of the workpiece 100 so that the workpiece 100 can be processed with a predetermined accuracy. In other words, the idling time 205 is the time from the start of idling operation until the processing unit 10 (each of its components) is brought into a state affected by processing heat (processing heat) generated during processing (machining) of the workpiece 100 so that the workpiece 100 can be processed with a predetermined accuracy.

[0032] In the first embodiment, the idling operation of the processing device 1 is, for example, an operation in which the spindle 122, which is a driving part of the processing unit 10, and a machining liquid supply part (not shown) are driven to prepare for machining. This idling operation may also include an alignment operation that performs alignment to align the workpiece 100 and the machining unit 120 based on an image of the surface 101 of the workpiece 100 held in the holding unit 110 captured by the imaging unit when the workpiece 100 is processed by the machining unit 120 of the processing unit 10 (before (immediately before) processing), and a hairline alignment operation that performs hairline alignment to align a reference line of the imaging unit with the machining position by the machining unit 120 that processes the workpiece 100 held in the holding unit 110.

[0033] This idling operation further includes a suction confirmation operation to confirm whether the suction holding function of the holding unit 110 of the processing unit 10 is operating normally, an alignment confirmation operation to confirm whether the alignment operation can be performed normally even while the workpiece 100 is being processed by the processing unit 120 of the processing unit 10, and a blade confirmation operation to confirm whether the cutting blade 121 is attached to the tip of the spindle 122 using a non-contact setup (NCS) not shown provided in the processing unit 120 of the processing unit 10, and these confirmation operations may be used to confirm that the processing unit 10 can operate normally when processing the workpiece 100.

[0034] The storage unit 40 can also receive and store from the control unit 50 an idling start time 206 (see FIG. 4, etc.) calculated by the control unit 50 based on the processing start time 202 and the idling time 205. Here, the idling start time 206 is the time at which idling operation starts.

[0035] In the first embodiment, the storage unit 40 includes a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory). The functions of the storage unit 40 are realized by this storage device.

[0036] The control unit 50 controls the operation of each component of the processing device 1, causing the processing device 1 to perform various processes, including processing of the workpiece 100 by the processing unit 10. The control unit 50 controls the processing unit 10 and each component of the processing unit 10, causing the processing unit 10 and each component of the processing unit 10 to process the workpiece 100, start or end processing of the workpiece 100, and stop processing of the workpiece 100.

[0037] The control unit 50 controls the power unit 20 to adjust the supply of drive power from the power supply source 25 to each component of the processing unit 10 by the power unit 20. The control unit 50 controls the power unit 20 to supply drive power from the power supply source 25 to each component of the processing unit 10 by the power unit 20, start or end the supply of drive power from the power supply source 25 to each component of the processing unit 10, and stop the supply of drive power from the power supply source 25 to each component of the processing unit 10.

[0038] The control unit 50 controls the display screen 30 to display on the display screen 30 a screen for setting the processing conditions 201, a screen for accepting input of the processing start time 202, and a screen for accepting input of the processing end time 203. The control unit 50 can refer to the information on the processing conditions 201, the processing time calculation data, the processing start time 202, the processing end time 203, and the idling time 205 stored in the storage unit 40.

[0039] If the memory unit 40 does not store the processing start time 202, the control unit 50 calculates, based on the processing conditions 201 and processing time calculation data stored in the memory unit 40, the time required for the holding unit 110 in the processing device 1 to hold and release the workpiece 100 under the processing conditions 201, the time required for processing by the processing unit 120, the time required for movement by the moving unit 130 during processing and other times, and the time required for loading and unloading the workpiece 100 into and from the processing unit 10, etc., to calculate a processing time 204, which is the time required for processing under the processing conditions 201, and based on the calculated processing time 204 and the processing end time 203 stored in the memory unit 40, calculates the processing start time 202 by subtracting the processing time 204 from the processing end time 203, and outputs the calculated processing start time 202 to the memory unit 40 for storage.

[0040] When the memory section 40 stores the processing start time 202 and the idling time 205, the control unit 50 calculates the idling start time 206 by subtracting the idling time 205 from the processing start time 202 based on the processing start time 202 and the idling time 205 stored in the memory section 40, and outputs the calculated idling start time 206 to the memory section 40 for storage.

[0041] The control unit 50 has a built-in clock function. When the memory unit 40 stores the processing start time 202, the control unit 50 references the processing start time 202 stored in the memory unit 40, detects the moment when the time indicated by the built-in clock function reaches the processing start time 202 stored in the memory unit 40, and, if the supply of drive power from the power supply source 25 to each component of the processing unit 10 has been stopped according to the detection, controls the power unit 20 to start the supply of drive power from the power supply source 25 to each component of the processing unit 10, thereby starting the processing of the workpiece 100 by the processing unit 10. Furthermore, if the memory section 40 further stores an idling start time 206, the control unit 50 refers to the idling start time 206 stored in the memory section 40, and detects the moment when the time (hour) indicated by the built-in clock function reaches the idling start time 206 stored in the memory section 40. If the supply of drive power from the power supply source 25 to each component of the processing unit 10 has been stopped according to this detection, the control unit 50 controls the power unit 20 to start the supply of drive power from the power supply source 25 to each component of the processing unit 10, thereby starting idling operation, and continues idling until the processing start time 202 arrives, and ends the idling operation when the processing start time 202 arrives.

[0042] In the first embodiment, the control unit 50 includes a computer system. The computer system included in the control unit 50 includes an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit), a storage device having memory such as ROM or RAM, and an input / output interface device. The arithmetic processing device of the control unit 50 performs arithmetic processing in accordance with a computer program stored in the storage device of the control unit 50, and outputs control signals for controlling the processing device 1 to each component of the processing device 1 via the input / output interface device of the control unit 50. The functions of the control unit 50 are realized by the arithmetic processing device of the control unit 50 executing the computer program stored in the storage device.

[0043] The storage unit 40 and the control unit 50 may be integrated into a computer system. In this case, the functions of the storage unit 40 are realized by a storage device included in the integrated computer.

[0044] Next, this specification will explain the operation process of the processing device 1 according to embodiment 1 with reference to the drawings. Fig. 2 is a diagram illustrating an example of the operation process of the processing device 1 shown in Fig. 1. First, the processing device 1 inputs a processing start time 202, at which the processing unit 10 starts processing the workpiece 100, via the input unit 35 and stores the input time in the storage unit 40.

[0045] Specifically, in the processing apparatus 1 according to the first embodiment, when an operator inputs via the input unit 35 an instruction to input processing conditions 201 and processing start time 202, the control unit 50 accepts the input, and based on the input, causes the display screen 30 to display a screen for accepting input of the processing conditions 201 and processing start time 202 as the input unit 35. When the operator inputs the processing conditions 201 and a future processing start time 202 via the screen for accepting input of the processing conditions 201 and processing start time 202 as the input unit 35 as shown in FIG. 2 , the control unit 50 determines that the processing start time 202 is in the future by comparing it with the time indicated by a built-in clock function, and accepts the input processing conditions 201 and processing start time 202 in accordance with the determination, and stores them in the storage unit 40.

[0046] On the other hand, when the worker inputs a past processing start time 202 via the input unit 35 of the processing device 1, the control unit 50 compares the processing start time 202 with the time indicated by the built-in clock function to determine that the processing start time 202 is a past time, and in accordance with this determination, displays on the display screen 30 an error indicating that the processing reservation cannot be registered because the processing start time 202 is a past time.

[0047] In the processing device 1, the control unit 50 receives input of processing conditions 201 and processing start time 202 and stores them in the memory unit 40. Then, when the processing start time 202 arrives, the power unit 20 supplies driving power to the processing unit 10 to start processing the workpiece 100.

[0048] 2, the control unit 50 of the processing device 1 receives an input, and based on the processing conditions 201 and processing start time 202 stored in the memory unit 40, registers a processing reservation to start processing of the workpiece 100 by the processing unit 10 under the input processing conditions 201 at the input processing start time 202. The power unit 20 stops the supply of drive power from the power supply source 25 to each component of the processing unit 10, and switches the processing device 1 itself to a low-power consumption mode in which power consumption is reduced, such as a state in which only the built-in clock function is active. Then, after time has passed, when the control unit 50 recognizes that the processing start time 202 stored in the memory unit 40 has arrived by comparing the time indicated by the built-in clock function, the power unit 20 starts the supply of drive power from the power supply source 25 to each component of the processing unit 10, and the processing device 1 and each component of the processing unit 10 start processing the workpiece 100 under the input processing conditions 201.

[0049] Then, when the control unit 50 has completed all processing of the workpiece 100 by the processing unit 10 in accordance with the processing conditions 201, the processing device 1 terminates the processing of the workpiece 100 by the processing unit 10, and the power unit 20 stops the supply of driving power from the power supply source 25 to each component of the processing unit 10, and switches the processing device 1 itself to a low power consumption mode, such as a state in which only the built-in clock function is activated.

[0050] The processing apparatus 1 according to the first embodiment having the above configuration inputs a processing start time 202 at which the processing unit 10 starts processing the workpiece 100 via the input unit 35 and stores it in the memory unit 40, and when the processing start time 202 arrives, the power unit 20 supplies driving power to the processing unit 10 to start processing the workpiece 100. Therefore, the processing apparatus 1 according to the first embodiment can set the processing end time 203 within the time that an operator is present, thereby preventing the workpiece 100 from being left in the processing apparatus 1 after being processed, thereby achieving the advantageous effect of preventing contamination of the workpiece 100 due to the processing end time 203 and impacts on the environment caused by the continuous supply of driving power to the processing apparatus 1.

[0051] [Embodiment 2] A processing device 1 according to a second embodiment of the present invention will be described. Fig. 3 is a diagram illustrating an example of the operation process of the processing device 1 according to the second embodiment. In Fig. 3, the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted.

[0052] In the processing device 1 of embodiment 2, instead of inputting a processing start time 202 at which the processing unit 10 starts processing the workpiece 100 through the input unit 35 and storing it in the memory unit 40 as in embodiment 1, a processing end time 203 at which the processing unit 10 ends processing the workpiece 100 through the input unit 35 is inputted and stored in the memory unit 40 as shown in FIG. 3, and the memory unit 40 calculates a processing time 204 from the processing conditions 201 stored in the memory unit 40, and stores the time obtained by subtracting the processing time 204 from the processing end time 203 as the processing start time 202; the other configurations are the same as those of embodiment 1.

[0053] Specifically, in the processing apparatus 1 according to the second embodiment, when an operator inputs via the input unit 35 an instruction to input processing conditions 201 and processing end time 203, the control unit 50 accepts the input, and based on the input, causes the display screen 30 to display a screen for accepting input of the processing conditions 201 and processing end time 203 as the input unit 35. When the operator inputs the processing conditions 201 and a future processing end time 203 via the screen for accepting input of the processing conditions 201 and processing end time 203 as the input unit 35 as shown in FIG. 3 , the control unit 50 determines that the processing end time 203 is in the future by comparing it with the time indicated by a built-in clock function, and accepts the input processing conditions 201 and processing end time 203 in accordance with the determination, and stores them in the storage unit 40.

[0054] On the other hand, when the worker inputs a past processing end time 203 via the input unit 35, the control unit 50 of the processing device 1 determines that the processing end time 203 is a past time by comparing it with the time indicated by the built-in clock function, and displays an error on the display screen 30 in accordance with this determination, indicating that the processing reservation cannot be registered because the processing end time 203 is a past time.

[0055] 3, the control unit 50 of the processing device 1 receives input of the processing conditions 201 and the processing end time 203 and stores them in the storage unit 40, then calculates the processing time 204 based on the processing conditions 201 stored in the storage unit 40, and calculates the processing start time 202 by subtracting the processing time 204 from the processing end time 203 based on the calculated processing time 204 and the processing end time 203 stored in the storage unit 40. If the control unit 50 determines that the calculated processing start time 202 is in the future compared to the time indicated by the built-in clock function, the processing device 1 so determines, and outputs the calculated processing start time 202 to the storage unit 40 to store it in accordance with the determination. On the other hand, if the control unit 50 determines that the calculated processing start time 202 is in the past compared to the time indicated by the built-in clock function, the processing device 1 determines this and, in accordance with this determination, displays on the display screen 30 an error indicating that the processing reservation cannot be registered because the calculated processing start time 202 is in the past.

[0056] In the processing device 1, the control unit 50 accepts input of processing conditions 201 and processing end time 203, stores them in the memory unit 40, calculates processing time 204 from the processing conditions 201 stored in the memory unit 40, and stores the time obtained by subtracting the processing time 204 from the processing end time 203 as the processing start time 202 in the memory unit 40.Then, as in embodiment 1, it registers a processing reservation and switches to a low power consumption mode, such as a state in which only the built-in clock function is activated.After time has passed and the processing start time 202 arrives, the power unit 20 starts supplying driving power to the processing unit 10, and processing of the workpiece 100 begins.

[0057] In the processing apparatus 1 according to the second embodiment having the above configuration, a processing end time 203 at which processing of the workpiece 100 by the processing unit 10 is to be ended is input by the input unit 35 and stored in the memory unit 40, the memory unit 40 calculates a processing time 204 from the processing conditions 201 stored in the memory unit 40, and stores the time obtained by subtracting the processing time 204 from the processing end time 203 as the processing start time 202, and when the processing start time 202 arrives, the power unit 20 supplies driving power to the processing unit 10 to start processing of the workpiece 100. Therefore, like the first embodiment, the processing apparatus 1 according to the second embodiment can set the processing end time 203 within the time when an operator is present, thereby achieving the same effects as the first embodiment. The processing device 1 of embodiment 2 further allows the processing end time 203 to be set more accurately by directly inputting it, thereby more reliably preventing the workpiece 100 from being left in the processing device 1 after processing, thereby achieving the advantageous effect of more reliably preventing contamination of the workpiece 100 due to the processing end time 203 and the impact on the environment caused by the continued supply of driving power to the processing device 1.

[0058] [Embodiment 3] A processing device 1 according to a third embodiment of the present invention will be described. Fig. 4 is a diagram illustrating an example of the operation process of the processing device 1 according to the third embodiment. In Fig. 4, the same parts as those in the first and second embodiments are denoted by the same reference numerals, and the description thereof will be omitted.

[0059] As shown in FIG. 4, the processing apparatus 1 of the third embodiment is a modification of the first embodiment, in which the idling time 205 of the processing unit 10 is stored in advance in the memory unit 40, and the control unit 50 supplies driving power to the processing apparatus 1 by the power unit 20 at the idling start time 206, which is the processing start time 202 minus the idling time 205, to start the idling operation of the processing unit 10, and when the processing start time 202 arrives, the idling operation is ended and the processing unit 10 starts processing the workpiece 100; the other configurations are the same as those of the first embodiment.

[0060] When the memory unit 40 stores the processing start time 202, the control unit 50 of the processing device 1 calculates an idling start time 206 by subtracting the idling time 205 from the processing start time 202 based on the processing start time 202 and the idling time 205 stored in the memory unit 40, as shown in Fig. 4. If the calculated idling start time 206 is in the future relative to the time indicated by the built-in clock function, the control unit 50 determines this fact and, in accordance with this determination, outputs the calculated idling start time 206 to the memory unit 40 for storage. On the other hand, if the calculated idling start time 206 is in the past relative to the time indicated by the built-in clock function, the processing device 1 determines this fact and, in accordance with this determination, displays on the display screen 30 an error indicating that the calculated idling start time 206 is in the past and therefore the processing reservation cannot be registered.

[0061] When the control unit 50 calculates the idling start time 206 and stores it in the memory unit 40, the processing device 1 then starts idling operation at the idling start time 206 stored in the memory unit 40 based on the processing conditions 201, processing start time 202, and idling start time 206 stored in the memory unit 40, as shown in Figure 4, and performs idling operation for the idling time 205 previously stored in the memory unit 40.At the processing start time 202 stored in the memory unit 40, a processing reservation is registered to start processing of the workpiece 100 by the processing unit 10 under the processing conditions 201 stored in the memory unit 40, and the power unit 20 stops the supply of driving power from the power supply source 25 to each component of the processing unit 10, and switches the processing device 1 itself to a low power consumption mode, such as a state in which only the built-in clock function is activated.

[0062] As time passes, when the control unit 50 of the processing device 1 recognizes that the idling start time 206 stored in the memory unit 40 has arrived, as compared with the time indicated by the built-in clock function, the power unit 20 starts supplying drive power from the power supply source 25 to each component of the processing unit 10, thereby starting idling operation; when the control unit 50 recognizes that the idling start time 206 has arrived, as compared with the time indicated by the built-in clock function, the power unit 20 continues supplying drive power from the power supply source 25 to each component of the processing unit 10, while ending idling operation; and the processing unit 10 and each component of the processing unit 10 start processing the workpiece 100 under the input processing conditions 201.

[0063] The processing apparatus 1 according to the third embodiment having the above configuration is a modification of the processing apparatus 1 according to the first embodiment, in which the storage unit 40 stores an idle time 205 of the processing unit 10 in advance, and the control unit 50 supplies drive power to the processing apparatus 1 via the power unit 20 to start the idling operation of the processing unit 10 at an idle start time 206, which is the processing start time 202 minus the idle time 205. At the processing start time 202, the idling operation is terminated and the processing unit 10 starts processing the workpiece 100. Therefore, the processing apparatus 1 according to the third embodiment can set the processing end time 203 within the time during which an operator is present, as in the first embodiment, thereby achieving the same advantageous effects as the first embodiment. The processing apparatus 1 according to the third embodiment further incorporates the idling operation of the processing unit 10 into the reservation before the processing of the workpiece 100 by the processing unit 10, thereby achieving the advantageous effect of enabling the processing of the workpiece 100 to be performed with a predetermined accuracy when the registered processing reservation is executed.

[0064] [Embodiment 4] A processing device 1 according to a fourth embodiment of the present invention will be described. Fig. 5 is a diagram illustrating an example of the operation process of the processing device 1 according to the fourth embodiment. In Fig. 5, the same parts as those in the first, second, and third embodiments are denoted by the same reference numerals, and the description thereof will be omitted.

[0065] 5, the processing apparatus 1 according to the fourth embodiment is a modification of the second embodiment, in which an idling time 205 of the processing unit 10 is stored in advance in the storage unit 40, and the control unit 50 supplies driving power to the processing apparatus 1 from the power unit 20 at an idling start time 206, which is the processing start time 202 minus the idling time 205, to start the idling operation of the processing unit 10, and when the processing start time 202 arrives, the idling operation is ended and the processing unit 10 starts processing the workpiece 100, but the other configurations are the same as those of the second embodiment. That is, the processing apparatus 1 according to the fourth embodiment is a combination of the second embodiment and the third embodiment.

[0066] The processing apparatus 1 according to the fourth embodiment having the above-described configuration is a combination of the second embodiment and the third embodiment. Therefore, similar to the first embodiment, the processing apparatus 1 according to the fourth embodiment can set the processing end time 203 within the time when the worker is present, and therefore has the same effects as the first embodiment, the second embodiment, and the third embodiment.

[0067] The present invention is not limited to the above-described embodiment, and can be implemented in various modifications without departing from the gist of the present invention. [Explanation of symbols]

[0068] 1 Processing equipment 10 Processing Unit 20 Power Unit 30 display screen 35 Input section 40 Storage section 50 Control Unit 100 Workpiece 201 Processing Conditions 202 Processing Start Time 203 Processing end time 204 Processing Time 205 Idling Time 206 Idling start time

Claims

1. A processing device including a processing unit for processing a workpiece, a power unit that supplies driving power for driving the processing unit; a display screen having an input section for inputting processing conditions for processing the workpiece; a storage unit that stores the processing conditions input by the input unit; a control unit for controlling the processing device; At least a processing start time for starting processing of the workpiece by the processing unit is inputted through the input unit and stored in the storage unit; When the processing start time arrives, the control unit supplies the driving power to the processing unit via the power unit to start processing the workpiece. A processing device characterized by:

2. A processing device including a processing unit for processing a workpiece, a power unit that supplies driving power for driving the processing unit; a display screen having an input section for inputting processing conditions for processing the workpiece; a storage unit that stores the processing conditions input by the input unit; a control unit for controlling the processing device; At least a processing end time for ending processing of the workpiece by the processing unit is input by the input unit and stored in the storage unit; the storage unit calculates a processing time from the processing conditions stored in the storage unit, and stores the time obtained by subtracting the processing time from the processing end time as a processing start time; When the processing start time arrives, the control unit supplies the driving power to the processing unit via the power unit to start processing the workpiece. A processing device characterized by:

3. A processing device including a processing unit for processing a workpiece, a power unit that supplies driving power for driving the processing unit; a display screen having an input section for inputting processing conditions for processing the workpiece; a storage unit that stores the processing conditions input by the input unit; a control unit for controlling the processing device; At least storing the idling time of the processing unit in advance in a storage unit; a processing start time for starting processing of the workpiece by the processing unit is inputted through the input unit and stored in the storage unit; the control unit supplies the driving power to the processing unit by the power unit at an idling start time, which is the time obtained by subtracting the idling time from the processing start time, to start idling operation of the processing unit, and when the processing start time arrives, ends the idling operation and starts processing the workpiece by the processing unit; A processing device characterized by:

4. A processing device including a processing unit for processing a workpiece, a power unit that supplies driving power for driving the processing unit; a display screen having an input section for inputting processing conditions for processing the workpiece; a storage unit that stores the processing conditions input by the input unit; a control unit for controlling the processing device; At least storing the idling time of the processing unit in advance in a storage unit; a processing end time for ending processing of the workpiece by the processing unit is input by the input unit and stored in the storage unit; the storage unit calculates a processing time from the processing conditions stored in the storage unit, and stores the time obtained by subtracting the processing time from the processing end time as a processing start time; the control unit supplies the driving power to the processing unit by the power unit at an idling start time, which is the time obtained by subtracting the idling time from the processing start time, to start idling operation of the processing unit, and when the processing start time arrives, ends the idling operation and starts processing the workpiece by the processing unit; A processing device characterized by:

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