Laser-induced breakdown spectroscopic device

Abstract

To save time and effort required for imaging of an analysis place and in turn improve usability of an analyzer.SOLUTION: An analysis observation device A as a laser-induced breakdown spectroscopic device comprises: a first camera 81; an electromagnetic wave emitting unit 71 that irradiates a sample P with laser light; a reflection type objective lens 74 that collects plasma light generated in the sample SP; first and second detectors 77A, 77B that each generate an intensity distribution spectrum; and a processing unit 21a. The processing unit 21a controls the first camera 81 in response to reception of a start trigger signal to create a pre-irradiation image Pb that is an image P before the sample SP is irradiated with the laser light, and after controlling the first camera 81, controls the electromagnetic wave emitting unit 71 to emit the laser light to the sample SP.SELECTED DRAWING: Figure 36B

Description

[Technical Field]

[0001] The technology disclosed herein relates to a laser-induced breakdown spectroscopy apparatus. [Background technology]

[0002] For example, Patent Document 1 discloses an analytical device (spectrometer) for analyzing the components of a sample. Specifically, the spectrometer disclosed in Patent Document 1 includes a focusing lens for focusing a primary electromagnetic wave (ultraviolet laser light) and a collection head for collecting a secondary electromagnetic wave (plasma) generated on the sample surface in response to the primary electromagnetic wave, in order to perform component analysis using Laser Induced Breakdown Spectroscopy (LIBS). According to Patent Document 1, by measuring the spectral peak of the sample from the signal of the secondary electromagnetic wave, it is possible to perform chemical analysis of the sample based on the measured peak. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2020-113569 Summary of the Invention [Problem to be solved by the invention]

[0004] The spectrometer disclosed in Patent Document 1 is configured as a device specialized for analytical functions. When using such a device, in order to image and record the analysis point of the sample, it is necessary to separately capture an image of the analysis target using a digital camera or the like separate from the spectrometer.

[0005] However, taking pictures using a digital camera or the like requires a lot of time and effort from the user, which is inconvenient in terms of usability.

[0006] The technology disclosed herein has been developed in light of these points, and its purpose is to reduce the effort required to image the analysis location, thereby improving the usability of the analysis device. [Means for solving the problem]

[0007] A first aspect of the present disclosure relates to a laser-induced breakdown spectroscopy device that performs component analysis of an analyte by using laser-induced breakdown spectroscopy. This laser-induced breakdown spectroscopy device comprises a processing unit having a mounting stage on which an object to be analyzed is placed, an imaging unit that receives reflected light reflected by the object to be analyzed placed on the mounting stage and detects the amount of reflected light received, a laser light emitting unit that emits laser light to the object to be analyzed, a collection head that collects plasma light generated in the object to be analyzed when the laser light emitted from the laser light emitting unit is irradiated onto the object to be analyzed, a detector that receives the plasma light generated in the object to be analyzed and collected by the collection head and generates an intensity distribution spectrum that is the intensity distribution for each wavelength of the plasma light, an imaging control unit that generates an image of the object to be analyzed based on the amount of reflected light detected by the imaging unit, and a component analysis unit that performs component analysis of the object to be analyzed based on the intensity distribution spectrum generated by the detector by receiving a start trigger signal that starts component analysis of the object to be analyzed.

[0008] According to the first aspect of the present disclosure, in response to receiving the start trigger signal, the processing unit controls the imaging unit to generate a pre-irradiation image, which is the image before the laser light is irradiated onto the object to be analyzed, and after controlling the imaging unit, controls the laser light emitting unit to emit the laser light onto the object to be analyzed.

[0009] According to the first aspect, the processing unit generates a pre-irradiation image via the imaging unit immediately before the laser light is irradiated onto the object to be analyzed. At this time, elements for observing the object to be analyzed, such as the imaging unit, and elements for analyzing the object to be analyzed, such as the laser light emitting unit, are controlled by a common processing unit, thereby seamlessly performing observation and analysis of the object to be analyzed and eliminating the effort required to image the analysis site. As a result, the usability of the laser-induced breakdown spectroscopy apparatus (hereinafter also simply referred to as "analysis apparatus") can be improved.

[0010] According to a second aspect of the present disclosure, the processing unit may generate an image in which the analysis result is superimposed on the pre-irradiation image, and cause the display unit to display the image.

[0011] According to the second aspect, the processing unit superimposes the analysis result on the pre-irradiation image, which allows the user to understand the relationship between the analysis result and the object to be analyzed, and is advantageous in improving the usability of the analysis device.

[0012] Furthermore, according to a third aspect of the present disclosure, the processing unit may control the laser light emitting unit to emit the laser light to the object to be analyzed, and then control the imaging unit to generate a post-irradiation image, which is the image of the object to be analyzed after the laser light is irradiated.

[0013] According to the third aspect, the processing unit generates a post-irradiation image via the imaging unit at a timing after the laser light is irradiated onto the object to be analyzed. For example, by comparing the pre-irradiation image with the post-irradiation image, the user can understand the changes that have occurred in the object to be analyzed by laser-induced breakdown spectroscopy. This is advantageous for improving the usability of the analytical device. Furthermore, since the post-irradiation image can be generated seamlessly, similar to the generation of the pre-irradiation image, the effort required for the generation can be reduced. As a result, this is advantageous for improving the usability of the analytical device.

[0014] Furthermore, according to a fourth aspect of the present disclosure, the laser-induced breakdown spectroscopy device may include a second imaging unit that receives reflected light reflected by the object to be analyzed placed on the mounting table and detects the amount of the received reflected light, and a mode switching unit that switches between the imaging unit and the second imaging unit, wherein the second imaging unit is set to have a magnification of the object to be analyzed that is relatively higher than that of the imaging unit, and the imaging control unit may generate a low-magnification image with the relatively low magnification when the mode switching unit is switched to the imaging unit, and generate a high-magnification image with the relatively high magnification when the mode switching unit is switched to the second imaging unit.

[0015] Furthermore, according to a fifth aspect of the present disclosure, the laser-induced breakdown spectroscopy device may include an observation housing that houses the imaging unit, and an analysis housing that is configured separately from the observation housing and houses the second imaging unit and the detector, and the mode switching unit may switch between the imaging unit and the second imaging unit by moving the observation housing and the analysis housing relative to the mounting table.

[0016] According to a sixth aspect of the present disclosure, the laser-induced breakdown spectroscopy device may include a second imaging unit that receives reflected light reflected by the object to be analyzed placed on the mounting table and detects the amount of the received reflected light, and a magnification change unit that can change the magnification of the object to be analyzed by at least one of the imaging unit and the second imaging unit, and the processing unit may change the magnification by adjusting the magnification change unit, and the imaging unit may detect the amount of the reflected light received at each magnification, thereby generating a low-magnification image with a relatively low magnification and a high-magnification image with a relatively high magnification as the pre-irradiation image of the object to be analyzed.

[0017] According to the sixth aspect, the processing unit generates two types of images with different magnifications. For example, of the two types of images, the low-magnification image is used for user navigation, while the high-magnification image is used for specifying an analysis location, thereby further improving the usability of the analysis device.

[0018] Furthermore, according to a seventh aspect of the present disclosure, the processing unit may cause the display unit to display the low-magnification image, the high-magnification image, the analysis result, and a first user interface that accepts operation input to save at least one of the low-magnification image and the high-magnification image in association with the analysis result.

[0019] According to the seventh aspect, the processing unit provides a first user interface for the user to associate at least one of the two types of images with the analysis results. This makes it possible to meet specific needs, such as wanting to store low-magnification images but not high-magnification images. This is effective in improving the usability of the analysis device.

[0020] Furthermore, according to an eighth aspect of the present disclosure, the processing unit may display a display screen on the display unit for updating the at least one image associated with the analysis result, and accept a save instruction to save the image displayed on the display unit and the analysis result corresponding to the image in a memory unit, and the display screen may be configured with the at least one image and a second user interface that accepts operation input for updating the at least one image.

[0021] According to the eighth aspect, the processing unit provides the user with a second user interface for updating the image. This makes it possible to meet specific needs, such as replacing a pre-irradiation image with a post-irradiation image at a low magnification. This is effective in improving the usability of the analysis device.

[0022] Furthermore, according to a ninth aspect of the present disclosure, the laser-induced breakdown spectroscopy device may include a report output unit that outputs a report displaying at least one of the low-magnification image, the high-magnification image, and the analysis results at each position on a template that is formed by assigning positions for outputting the low-magnification image, the high-magnification image, and the analysis results, and the processing unit may, when outputting the report by the report output unit, display the image associated by the first user interface on the report.

[0023] According to the ninth aspect, the processing unit outputs a report displaying pre-irradiation images and post-irradiation images obtained during the component analysis via the report output unit. This allows the user to understand the irradiation position of the laser light and damage caused by the irradiation of the laser light. This is effective in improving the usability of the analysis device.

[0024] Furthermore, according to a tenth aspect of the present disclosure, the laser-induced breakdown spectroscopy device may include an electric drive unit that moves an imaging position, which indicates the relative position of the mounting table with respect to the imaging unit, along a horizontal direction; the processing unit is configured to be able to accept at least one of a designation of a first analysis location on the high-magnification image and a designation of a second analysis location on the low-magnification image; when the processing unit accepts the designation of the second analysis location, the imaging control unit controls the electric drive unit based on the second analysis location to move the imaging position so that the second analysis location falls within the field of view of the high-magnification image; and when the processing unit accepts the designation of the first analysis location, the imaging control unit controls the electric drive unit based on the first analysis location to move the imaging position so that the first analysis location approaches the center of the field of view of the high-magnification image.

[0025] According to the tenth aspect, the analysis device can move the stage so as to capture an image of a second analysis point specified on a low-magnification image, or move the stage so as to move a first analysis point specified on a high-magnification image closer to the center of the field of view, thereby making it possible to easily and precisely specify the irradiation position of the laser light, which is advantageous in improving the usability of the analysis device.

[0026] Furthermore, according to an eleventh aspect of the present disclosure, when the processing unit receives a designation of the second analysis location, the imaging control unit may regenerate the high-magnification image by using the motorized drive unit to bring the second analysis location within the field of view of the high-magnification image, and when the processing unit receives a designation of the first analysis location, the imaging control unit may regenerate the high-magnification image by using the motorized drive unit to bring the first analysis location closer to the center of the field of view of the high-magnification image.

[0027] According to the eleventh aspect, the analyzer regenerates a high-magnification image each time the stage is moved in response to the designation of the first analysis point or the second analysis point, thereby enabling more appropriate designation of the irradiation position of the laser light, which is advantageous in improving the usability of the analyzer.

[0028] Furthermore, according to a twelfth aspect of the present disclosure, the processing unit may accept designation of the first analysis point on the regenerated high-magnification image, and when the processing unit accepts the designation of the first analysis point, the imaging control unit may control the motorized drive unit based on the first analysis point to move the imaging position so that the first analysis point approaches the center of the field of view of the regenerated high-magnification image, and perform further regeneration of the high-magnification image in a state in which the motorized drive unit has moved the first analysis point closer to the center of the field of view of the regenerated high-magnification image.

[0029] According to the twelfth aspect, the analyzer repeatedly receives a designation of the first analysis location, and moves the stage and regenerates a high-magnification image each time the designation is received, thereby enabling more precise designation of the laser light irradiation position, which is advantageous in improving the usability of the analyzer.

[0030] Furthermore, according to a thirteenth aspect of the present disclosure, the laser-induced breakdown spectroscopy device may include a base and a stand connected to the base and extending in a first direction perpendicular to the base, the mounting table being supported by the base or the stand, the electric drive unit being configured to move the imaging position along the first direction, and the imaging control unit controlling the electric drive unit to move the imaging position along the first direction after the imaging position has been moved along the horizontal direction by the electric drive unit.

[0031] According to the thirteenth aspect, the analysis device can move the image capturing position along the horizontal direction and the first direction, thereby enabling more precise control of the image capturing position.

[0032] Furthermore, according to a fourteenth aspect of the present disclosure, the imaging control unit may be configured to move the imaging position to a plurality of first positions along the first direction using the electric drive unit, generate the high-magnification image at each of the plurality of first positions, and generate an all-in-focus image of the object to be analyzed by combining the high-magnification images generated at each of the plurality of first positions.

[0033] According to the fourteenth aspect, the imaging control unit generates an all-in-focus image of the analysis object, thereby generating a high-magnification image in which almost the entire field of view is in focus, which is effective in improving the usability of the analysis device.

[0034] Furthermore, according to a fifteenth aspect of the present disclosure, the electric drive unit may be configured to change a collection position, which indicates the relative position of the mounting table with respect to the collection head, along the first direction; the imaging control unit may use the electric drive unit to move the collection position to a plurality of first positions along the first direction and generate the image at each of the plurality of first positions; and the component analysis unit may identify a height along the first direction at the first analysis location accepted by the processing unit based on the image generated at each of the plurality of first positions, and control the electric drive unit based on the identified height to move the collection position along the first direction so that the laser light emitted from the laser light emission unit is focused on the first analysis location.

[0035] According to the fifteenth aspect, by performing control according to the identified height, it becomes possible to focus the laser light on the first analysis location, which is effective in improving the usability of the analysis device.

[0036] Furthermore, according to a sixteenth aspect of the present disclosure, the processing unit may be configured to be able to accept designation of the second analysis locations at multiple locations on the low-magnification image, and when the processing unit accepts designation of the second analysis locations at multiple locations, the processing unit may move the imaging position using the electric drive unit so that one of the second analysis locations accepted at multiple locations falls within the field of view of the high-magnification image for each of the second analysis locations accepted at multiple locations, generate the high-magnification image using the imaging control unit while the one second analysis location falls within the field of view of the high-magnification image, and after the high-magnification image is generated by the imaging control unit, cause the laser light emitting unit to emit the laser light to the object to be analyzed, thereby causing the component analysis unit to perform component analysis at the one second analysis location.

[0037] According to the sixteenth aspect, it is possible to emit laser light to each of the plurality of second analysis locations and perform component analysis at each of the second analysis locations, which is effective in improving the usability of the analysis device.

[0038] Furthermore, according to a seventeenth aspect of the present disclosure, the processing unit may be configured to be able to accept the designation of the first analysis location at multiple locations on the high-magnification image, and when the processing unit accepts the designation of the first analysis location at multiple locations, the processing unit may move the imaging position using the electric drive unit for each of the first analysis locations accepted at multiple locations so that one of the first analysis locations accepted at multiple locations is closer to the center of the field of view of the high-magnification image, and generate the high-magnification image using the imaging control unit while the one first analysis location is closer to the center of the field of view of the high-magnification image, and after the high-magnification image is generated by the imaging control unit, the laser light emitting unit may emit the laser light to the object to be analyzed, thereby causing the component analysis unit to perform component analysis at the one first analysis location.

[0039] According to the seventeenth aspect, it is possible to emit laser light to each of the plurality of first analysis locations and perform component analysis at each of the first analysis locations, which is effective in improving the usability of the analysis device. [Effects of the Invention]

[0040] As described above, according to the present disclosure, it is possible to eliminate the effort required to image an analysis location, thereby improving the usability of the analysis device. [Brief explanation of the drawings]

[0041] [Figure 1] FIG. 1 is a schematic diagram illustrating the overall configuration of an analytical observation device. [Figure 2] FIG. 2 is a perspective view illustrating an optical system assembly. [Figure 3] FIG. 3 is a side view illustrating an optical system assembly. [Figure 4] FIG. 4 is a front view illustrating an optical system assembly. [Figure 5] FIG. 5 is an exploded perspective view illustrating an optical system assembly. [Figure 6] FIG. 6 is a side view showing a schematic configuration of the optical system assembly. [Figure 7] FIG. 7 is a perspective view for explaining the layout of the overhead camera. [Figure 8] FIG. 8 is a schematic diagram illustrating the configuration of the analytical optical system. [Figure 9] FIG. 9 is a schematic diagram for explaining the configuration of the slide mechanism. [Figure 10A] FIG. 10A is a diagram for explaining horizontal movement of the head portion. [Figure 10B] FIG. 10B is a diagram for explaining the horizontal movement of the head portion. [Figure 11A] FIG. 11A is a diagram for explaining the operation of the tilting mechanism. [Figure 11B] FIG. 11B is a diagram for explaining the operation of the tilting mechanism. [Figure 12] FIG. 12 is a block diagram illustrating the configuration of the controller main body unit 2. As shown in FIG. [Figure 13] FIG. 13 is a block diagram illustrating the configuration of the control unit. [Figure 14] FIG. 14 is a diagram illustrating an example of a display screen for a live image and a navigation image. [Figure 15] FIG. 15 is a diagram for explaining the process when the designation of the second analysis point is accepted. [Figure 16] FIG. 16 is a diagram for explaining the process when the designation of the first analysis point is accepted. [Figure 17] FIG. 17 is a diagram illustrating an example of a user interface for outputting a start trigger signal. [Figure 18] FIG. 18 is a diagram for explaining generation of an omnifocus image. [Figure 19]FIG. 19 is a diagram illustrating a display screen of a post-irradiation image. [Figure 20] FIG. 20 is a diagram for explaining a process when laser light is irradiated at a plurality of locations. [Figure 21] FIG. 21 is a diagram for explaining a process when the same location is irradiated with laser light. [Figure 22] FIG. 22 is a diagram illustrating an example of a display screen for an overhead image. [Figure 23] FIG. 23 is a diagram illustrating an example of a display screen for an overhead image. [Figure 24] FIG. 24 is a diagram for explaining the association of each image. [Figure 25] FIG. 25 is a diagram for explaining the update of each image. [Figure 26] FIG. 26 is a diagram for explaining optical axis misalignment in the observation unit. [Figure 27] FIG. 27 is a diagram for explaining the field of view shift when switching modes from the observation unit to the analysis unit. [Figure 28] FIG. 28 is a diagram for explaining correction of optical axis deviation and field of view deviation. [Figure 29] FIG. 29 is a diagram illustrating a report template. [Figure 30] FIG. 30 is a diagram showing an example of a report output. [Figure 31] FIG. 31 is a flowchart illustrating the basic operation of the analytical observation device. [Figure 32] FIG. 32 is a flowchart illustrating a procedure for calculating the correction amount for the optical axis misalignment. [Figure 33] FIG. 33 is a flowchart illustrating a procedure for calculating the correction amount of the visual field deviation. [Figure 34] FIG. 34 is a flowchart illustrating a procedure for correcting the optical axis deviation and the field of view deviation. [Figure 35] FIG. 35 is a flowchart illustrating a procedure for setting the illumination conditions by the illumination setting unit. [Figure 36A]FIG. 36A is a flowchart illustrating various processes performed by the analytical observation device. [Figure 36B] FIG. 36B is a flowchart illustrating various processes performed by the analytical observation device. [Figure 36C] FIG. 36C is a flowchart illustrating various processes performed by the analytical observation device. [Figure 37] FIG. 37 is a flowchart illustrating an example of a procedure for performing focus stacking. [Figure 38] FIG. 38 is a diagram illustrating a display screen of the display unit. [Figure 39] FIG. 39 is a diagram illustrating a display screen of the display unit. [Figure 40] FIG. 40 is a diagram illustrating a display screen of the display unit. [Figure 41] FIG. 41 is a diagram illustrating an example of a display screen of the display unit. [Figure 42] FIG. 42 is a diagram illustrating a display screen of the display unit. [Figure 43] FIG. 43 is a diagram illustrating a display screen of the display unit. [Figure 44] FIG. 44 is a diagram illustrating a display screen of the display unit. DETAILED DESCRIPTION OF THE INVENTION

[0042] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. Note that the following description is for illustrative purposes only.

[0043] <Overall configuration of analytical observation device A> 1 is a schematic diagram illustrating the overall configuration of an analytical observation device A as a laser-induced breakdown spectroscopy device according to an embodiment of the present disclosure. The analytical observation device A illustrated in FIG. 1 can perform magnified observation of a sample SP as an observation target and an analysis target, and can also perform component analysis of the sample SP.

[0044] In detail, the analytical observation device A according to this embodiment magnifies and images a sample SP made up of, for example, a specimen such as a minute object, an electronic component, a workpiece, etc., and is thereby able to search for a portion of the sample SP where component analysis is to be performed, and to inspect and measure its appearance, etc. When focusing on its observation function, the analytical observation device A can be called a magnification observation device, or simply a microscope, or a digital microscope.

[0045] The analytical observation device A can also perform techniques called laser induced breakdown spectroscopy (LIBS), laser induced plasma spectroscopy (LIPS), etc., when analyzing the components of the sample SP. When focusing on its analytical function, the analytical observation device A can also be called a component analysis device, simply an analysis device, or a spectroscopic device.

[0046] As shown in FIG. 1, the analytical observation device A according to this embodiment comprises, as main components, an optical system assembly (optical system main body) 1, a controller main body 2, and an operation unit 3.

[0047] Of these, the optical system assembly 1 is capable of capturing and analyzing the sample SP, and outputting electrical signals corresponding to the capturing and analysis results to the outside.

[0048] The controller main body 2 has a control unit 21 for controlling various components that make up the optical system assembly 1, such as the first camera 81. The controller main body 2 can cause the optical system assembly 1 to observe and analyze the sample SP via the control unit 21. The controller main body 2 also has a display unit 22 that can display various information. This display unit 22 can display images captured by the optical system assembly 1, data showing the analysis results of the sample SP, and the like.

[0049] The operation unit 3 has a mouse 31 that accepts operation inputs from the user, a console 32, and a keyboard 33 (the keyboard 33 is only shown in FIG. 12). By operating buttons, adjustment knobs, etc. on the console 32, it is possible to instruct the controller main body 2 to import image data, adjust brightness, focus the first camera 81, etc.

[0050] The operation unit 3 does not need to have all three of the mouse 31, the console 32, and the keyboard 33, and may have any one or two of them. Furthermore, a touch panel input device, a voice input device, or the like may be used in addition to or instead of the mouse 31, the console 32, and the keyboard 33. In the case of a touch panel input device, it can be configured to be able to detect any position on the screen displayed on the display unit 22.

[0051] <Details of Optical Assembly 1> 2 to 4 are respectively a perspective view, a side view, and a front view illustrating the optical system assembly 1. Also, Fig. 5 is an exploded perspective view of the optical system assembly 1, and Fig. 6 is a side view that schematically shows the configuration of the optical system assembly 1. Also, Fig. 7 is a perspective view for explaining the layout of the overhead camera 48.

[0052] As shown in FIGS. 1 to 6, the optical system assembly 1 includes a stage 4 that supports various devices and on which a sample SP is placed, and a head unit 6 that is attached to the stage 4. Here, the head unit 6 is configured by attaching an observation housing 90 that houses an observation optical system 9 to an analysis housing 70 that houses an analysis optical system 7. Here, the analysis optical system 7 is an optical system for analyzing the components of the sample SP. The observation optical system 9 is an optical system for performing magnified observation of the sample SP. The head unit 6 is configured as a group of devices that combine the functions of analyzing the sample SP and magnified observation.

[0053] In the following description, the front-rear direction and left-right direction of the optical system assembly 1 are defined as shown in Figures 1 to 4. That is, the side facing the user is the front side of the optical system assembly 1, and the opposite side is the rear side of the optical system assembly 1. When a user faces the optical system assembly 1, the right side as seen from the user is the right side of the optical system assembly 1, and the left side as seen from the user is the left side of the optical system assembly 1. The definitions of the front-rear direction and left-right direction are intended to facilitate understanding of the description and do not limit the actual state of use. Either direction may be used as the front.

[0054] In the following description, the left-right direction of the optical system assembly 1 is defined as the "X direction," the front-rear direction of the optical system assembly 1 as the "Y direction," the up-down direction of the optical system assembly 1 as the "Z direction," and the direction of rotation around an axis parallel to the Z axis as the "φ direction." The X and Y directions are perpendicular to each other on the same horizontal plane, and the direction along this horizontal plane is defined as the "horizontal direction." The Z axis is the direction of the normal perpendicular to the horizontal plane. These definitions can also be changed as appropriate. The Z direction (up-down direction) is a direction extending along the vertical direction and is an example of the "first direction" in this embodiment.

[0055] As will be described in detail later, the head unit 6 can move along and swing around a central axis Ac shown in Figures 2 to 6. As shown in Figure 6 and other figures, the central axis Ac is configured to extend in the horizontal direction, particularly in the front-to-rear direction.

[0056] (Stage 4) The stage 4 has a base 41 that is placed on a workbench or the like, a stand 42 connected to the base 41, and a mounting table 5 that is supported by the base 41 or the stand 42. The stage 4 is a member that determines the relative positional relationship between the mounting table 5 and the head unit 6, and is configured so that at least the observation optical system 9 and the analysis optical system 7 of the head unit 6 can be attached.

[0057] The base 41 constitutes approximately the lower half of the stage 4, and is formed in the shape of a pedestal whose front-to-rear dimension is longer than its left-to-right dimension, as shown in Fig. 2. The base 41 has a bottom surface that is placed on a workbench or the like. A mounting table 5 is attached to the front portion of the base 41.

[0058] 6 and other figures, a first support portion 41a and a second support portion 41b are provided in a rear portion of the base 41 (particularly, a portion located rearward of the mounting table 5) in a state where they are lined up in order from the front side. The first and second support portions 41a, 41b are both provided so as to protrude upward from the base 41. A circular bearing hole (not shown) is formed in the first and second support portions 41a, 41b and is arranged so as to be concentric with the central axis Ac.

[0059] The stand 42 constitutes the upper half of the stage 4, and is formed in a columnar shape extending vertically perpendicular to the base 41 (particularly the bottom surface of the base 41) as shown in Figures 2, 3, 6, etc. The head unit 6 is attached to the front surface of the upper part of the stand 42 via a separate mounting fixture 43.

[0060] 6 and other figures, a first mounting portion 42a and a second mounting portion 42b are provided on the lower portion of the stand 42, lined up in order from the front. The first and second mounting portions 42a, 42b are configured to correspond to the first and second support portions 41a, 41b described above. Specifically, the first and second support portions 41a, 41b and the first and second mounting portions 42a, 42b are laid out so that the first support portion 41a is sandwiched between the first mounting portion 42a and the second mounting portion 42b, and the second mounting portion 42b is sandwiched between the first support portion 41a and the second support portion 41b.

[0061] Additionally, the first and second mounting portions 42a and 42b are formed with circular bearing holes (not shown) that are concentric and have the same diameter as the bearing holes formed in the first and second support portions 41a and 41b. A shaft member 44 is inserted into these bearing holes via bearings (not shown), such as cross roller bearings. The shaft member 44 is positioned so that its axis is concentric with the aforementioned central axis Ac. By inserting the shaft member 44, the base 41 and the stand 42 are connected so as to be able to swing relative to each other. The shaft member 44, together with the first and second support portions 41a and 41b and the first and second mounting portions 42a and 42b, constitute a tilting mechanism 45 in this embodiment.

[0062] By connecting the base 41 and the stand 42 via the tilting mechanism 45, the stand 42 is supported by the base 41 in a state in which it can swing about the central axis Ac. By swinging the stand 42 about the central axis Ac, it tilts left and right with respect to a predetermined reference axis As (see FIGS. 10A and 10B). In the non-tilted state shown in FIG. 4 and other figures, this reference axis As can be an axis extending perpendicular to the upper surface (mounting surface 51 a) of the mounting table 5. Furthermore, the central axis Ac functions as the central axis (center of rotation) of the swing caused by the tilting mechanism 45.

[0063] Specifically, the tilting mechanism 45 according to this embodiment can tilt the stand 42 approximately 90° to the right with respect to the reference axis As, or approximately 60° to the left with respect to the reference axis As. As described above, the head unit 6 is attached to the stand 42, and therefore the head unit 6 can also be tilted left and right with respect to the reference axis As. Tilting the head unit 6 is equivalent to tilting the analysis optical system 7 and the observation optical system 9, and ultimately tilting the analysis optical axis Aa and observation optical axis Ao, which will be described later.

[0064] 6, an overhead camera 48 is built into the shaft member 44 that constitutes the tilting mechanism 45. This overhead camera 48 receives visible light reflected from the sample SP through a through-hole 44a provided in the front surface of the shaft member 44 (see FIG. 7). The overhead camera 48 captures an image of the sample SP by detecting the amount of reflected light received.

[0065] The imaging field of view of overhead camera 48 is wider than the imaging fields of view of first camera 81 and second camera 93, which will be described later. In other words, the magnification of overhead camera 48 is smaller than the magnification of first camera 81 and second camera 93. Therefore, overhead camera 48 can image the sample SP over a wider range than first camera 81 and second camera 93.

[0066] Here, the imaging optical axis of the overhead camera 48 is arranged to be parallel to the central axis Ac of the swing caused by the tilting mechanism 45. In this embodiment, the imaging optical axis of the overhead camera 48 extends forward from the shaft member 44 and is perpendicular to both the analysis optical axis Aa, which is the imaging optical axis of the first camera 81, and the observation optical axis Ao, which is the imaging optical axis of the second camera 93. Therefore, the overhead camera 48 can image the sample SP from an angle different from that of the first camera 81 and the second camera 93.

[0067] Furthermore, the imaging optical axis of the overhead camera 48 does not fluctuate with the operation of the tilt mechanism 45. Therefore, the imaging field of view of the overhead camera 48 is kept constant regardless of the tilt angle of the stand 42 with respect to the reference axis As.

[0068] Specifically, the overhead camera 48 of this embodiment photoelectrically converts the light incident through the through-hole 44a using multiple pixels arranged on its light receiving surface, converting it into an electrical signal corresponding to the optical image of the subject (sample SP).

[0069] The overhead camera 48 may have a plurality of light receiving elements arranged along its light receiving surface. In this case, each light receiving element corresponds to a pixel, and an electrical signal can be generated based on the amount of light received by each light receiving element. Specifically, the overhead camera 48 according to this embodiment is configured with an image sensor made of a CMOS (Complementary Metal Oxide Semiconductor), but is not limited to this configuration. For example, an image sensor made of a CCD (Charged-Coupled Device) can also be used as the overhead camera 48.

[0070] The overhead camera 48 then inputs electrical signals generated by detecting the amount of light received by each light-receiving element to the control unit 21 of the controller main body 2. The control unit 21 generates image data corresponding to an optical image of the subject based on the input electrical signals. The control unit 21 can display the generated image data on the display unit 22 or the like as an image obtained by capturing an image of the subject.

[0071] The above-described configuration of overhead camera 48 is merely an example. The overhead camera 48 only needs to have a wider imaging field of view than at least first camera 81 and second camera 93, and the layout of overhead camera 48, the direction of its imaging optical axis, and the like can be freely changed. For example, overhead camera 48 may be configured as a USB camera connected to optical system assembly 1 or controller main body 2 by wire or wirelessly.

[0072] The mounting fixture 43 has a rail portion 43a that guides the head portion 6 along the longitudinal direction of the stand 42, and a lock lever 43b that locks the relative position of the head portion 6 with respect to the rail portion 43a. Here, the longitudinal direction of the stand 42 coincides with the vertical direction (first direction) in the non-tilted state, and coincides with the direction extending along the analysis optical axis Aa, the observation optical axis Ao, and the reference axis As. In the tilted state, the longitudinal direction of the stand 42 does not coincide with the vertical direction and the direction extending along the reference axis As, but still coincides with the direction extending along the analysis optical axis Aa and the observation optical axis Ao. The longitudinal direction of the stand 42 will also be referred to as the "approximately vertical direction" in the following description.

[0073] The rear portion of the head unit 6 (specifically, the head mounting member 61) is inserted into the rail portion 43a. The rear portion of the rail portion 43a can be moved substantially vertically. Then, with the head unit 6 set at a desired position, the head unit 6 can be fixed at the desired position by operating the lock lever 43b. The position of the head unit 6 can also be adjusted by operating the first operating dial 46 shown in Figures 2 and 3.

[0074] Furthermore, the stage 4 or the head unit 6 incorporates a head driver 47 for moving the head unit 6 in a substantially vertical direction. The head driver 47 includes an actuator (e.g., a stepping motor) (not shown) controlled by the controller main body 2 and a motion conversion mechanism that converts the rotation of the output shaft of the stepping motor into linear motion in a substantially vertical direction, and moves the head unit 6 based on drive pulses input from the controller main body 2. The head driver 47 moves the head unit 6, thereby moving the head unit 6, and therefore the analysis optical axis Aa and the observation optical axis Ao, in a substantially vertical direction. The head driver 47, together with a mounting table driver 53 (described later), constitutes the "electric drive unit" in this embodiment.

[0075] The mounting table 5 is disposed forward of the center of the base 41 in the front-rear direction, and is attached to the upper surface of the base 41. The mounting table 5 is configured as an electrically operated mounting table, and can move the sample SP placed on its mounting surface 51a in the horizontal direction, raise and lower it in the up-down direction, and rotate it in the φ direction.

[0076] Specifically, as shown in Figures 2 to 4, the mounting table 5 of this embodiment has a mounting table main body 51 having a mounting surface 51a for placing a sample SP, a mounting table support part 52 arranged between the base 41 and the mounting table main body 51 and displacing the mounting table main body 51, and a mounting table drive part 53 shown in Figure 12 described below.

[0077] The mounting table main body 51 is configured as a so-called XY stage. The upper surface of the mounting table main body 51 configures a mounting surface 51a on which the sample SP is placed. This mounting surface 51a is formed to extend substantially horizontally. The sample SP is placed on the mounting surface 51a in an open-to-air state, i.e., without being contained in a vacuum chamber or the like.

[0078] The mounting table support part 52 is a member that connects the base 41 and the mounting table main body 51, and is formed in a generally cylindrical shape that extends in the vertical direction. The mounting table support part 52 can accommodate a mounting table drive part 53.

[0079] The mounting table driving unit 53 includes a plurality of actuators (e.g., stepping motors) (not shown) controlled by the controller main body 2, and a motion conversion mechanism that converts the rotation of the output shaft of the stepping motor into linear motion, and moves the mounting table main body 51 based on drive pulses input from the controller main body 2. By moving the mounting table main body 51, the mounting table driving unit 53 can move the mounting table main body 51, and ultimately the sample SP placed on its mounting surface 51a, in the horizontal and vertical directions. The mounting table driving unit 53, together with the head driving unit 47 described above, constitutes the "electric driving unit" in this embodiment.

[0080] Similarly, the mounting table driving unit 53 can rotate the mounting table main body 51 in the φ direction around a predetermined rotation axis based on a driving pulse input from the controller main body 2. By rotating the mounting table main body 51 with the mounting table driving unit 53, the sample SP placed on the mounting surface 51a can also be rotated in the φ direction. Note that the configuration including the mounting table driving unit 53 is not essential. The mounting table main body 51 may also be configured to be rotated manually.

[0081] In particular, the placement surface 51a according to this embodiment is configured to be rotatable around the reference axis As shown in Fig. 6 etc. as the rotation axis. That is, in this embodiment, the reference axis As, which is the reference for tilt, and the rotation axis of the placement surface 51a are coaxial.

[0082] Moreover, the stage main body 51 can be manually moved and rotated by operating the second operation dial 54, etc., as shown in Fig. 2. Details of the second operation dial 54 will be omitted.

[0083] Returning to the explanation of the base 41 and the stand 42, the base 41 described above has a first tilt sensor Sw3 built in. This first tilt sensor Sw3 can detect the tilt of a reference axis As perpendicular to the mounting surface 51a with respect to the direction of gravity. Meanwhile, a second tilt sensor Sw4 is attached to the stand 42. This second tilt sensor Sw4 can detect the tilt of the analysis optical system 7 with respect to the direction of gravity (more specifically, the tilt of the analysis optical axis Aa with respect to the direction of gravity). The detection signals of the first tilt sensor Sw3 and the second tilt sensor Sw4 are both input to the control unit 21.

[0084] (Head part 6) The head section 6 has a head mounting member 61, an analysis unit 62 configured by accommodating the analysis optical system 7 in an analysis housing 70, an observation unit 63 configured by accommodating the observation optical system 9 in an observation housing 90, a housing connector 64, and a slide mechanism (horizontal drive mechanism) 65 (the analysis unit 62 and the observation unit 63 are only shown in FIG. 5 ). The head mounting member 61 is a member for connecting the analysis housing 70 to the stand 42. The analysis unit 62 is a device for analyzing the components of the sample SP using the analysis optical system 7. The observation unit 63 is a device for observing the sample SP using the observation optical system 9. The housing connector 64 is a member for connecting the observation housing 90 to the analysis housing 70. The slide mechanism 65 is a mechanism for sliding the analysis housing 70 relative to the stand 42.

[0085] More specifically, the head mounting member 61 according to this embodiment is disposed on the rear side of the head unit 6, and is configured as a plate-like member for mounting the head unit 6 to the stand 42. As described above, the head mounting member 61 is fixed to the mounting fixture 43 of the stand 42.

[0086] The head mounting member 61 has a plate body 61a extending substantially parallel to the rear surface of the head unit 6, and a cover member 61b protruding forward from the lower end of the plate body 61a. In a first mode (described later) in which the reflective objective lens 74 faces the sample SP, the plate body 61a is in close contact with or close to the rear surface of the head unit 6. In a second mode (described later) in which the objective lens 92 faces the sample SP, the plate body 61a is spaced apart from the rear surface of the head unit 6 in the front-to-rear direction.

[0087] 9, a guide rail 65a constituting a slide mechanism 65 is attached to the left end of the head mounting member 61. The guide rail 65a connects the head mounting member 61 to other elements in the head unit 6 (specifically, the analysis optical system 7, the observation optical system 9, and the housing connector 64) so ​​that they can be displaced relative to each other in the horizontal direction.

[0088] The configurations of the analysis unit 62, observation unit 63, housing connector 64, and slide mechanism 65 will be described in order below.

[0089] -Analysis Unit 62- FIG. 8 is a schematic diagram illustrating the configuration of the analytical optical system 7.

[0090] The analysis unit 62 has an analysis optical system 7 and an analysis housing 70 that houses the analysis optical system 7. The analysis optical system 7 is a collection of components for analyzing a sample SP as an analysis target, and each component is housed in the analysis housing 70. The analysis housing 70 houses a first camera 81 as a second imaging unit and first and second detectors 77A and 77B as detectors. The elements for analyzing the sample SP also include the control unit 21 of the controller main body 2.

[0091] The analytical optical system 7 can perform analysis using, for example, the LIBS method. A communication cable C1 is connected to this analytical optical system 7 for sending and receiving electrical signals between the analytical optical system 7 and the controller main body 2. This communication cable C1 is not essential, and the analytical optical system 7 and the controller main body 2 may be connected via wireless communication.

[0092] The term "optical system" is used in a broad sense. That is, the analytical optical system 7 is defined as a system that includes not only optical elements such as lenses, but also a light source, an image sensor, etc. The same applies to the observation optical system 9.

[0093] As shown in Fig. 8, the analytical optical system 7 according to this embodiment includes an electromagnetic wave emitter 71, an output adjustment means 72, a deflector 73, a reflective objective lens 74 as a collection head, a spectroscopic element 75, a first parabolic mirror 76A, a first detector 77A, a first beam splitter 78A, a second parabolic mirror 76B, a second detector 77B, a second beam splitter 78B, a coaxial illuminator 79, an imaging lens 80, a first camera 81, and a lateral illuminator 84. Some of the components of the analytical optical system 7 are also shown in Fig. 6. The lateral illuminator 84 is only shown in Fig. 11.

[0094] The electromagnetic wave emitting unit 71 emits a primary electromagnetic wave to the sample SP. In particular, the electromagnetic wave emitting unit 71 according to this embodiment is configured by a laser light source that emits laser light as the primary electromagnetic wave to the sample SP. The electromagnetic wave emitting unit 71 is an example of the "laser light emitting unit" in this embodiment.

[0095] Although detailed illustration is omitted, the electromagnetic wave emitting unit 71 according to this embodiment has an excitation light source constituted by a laser diode (LD) or the like, a focusing lens that focuses the laser output from the excitation light source and emits it as laser excitation light, a laser medium that generates a fundamental wave based on the laser excitation light, a Q switch for pulse oscillation of the fundamental wave, a rear mirror and output mirror for resonating the fundamental wave, and a wavelength conversion element that converts the wavelength of the laser light output from the output mirror.

[0096] Here, it is preferable to use, for example, a rod-shaped Nd:YAG as the laser medium in order to obtain high energy per pulse. In this embodiment, the wavelength (so-called fundamental wavelength) of photons emitted from the laser medium by stimulated emission is set to 1064 nm in the infrared region.

[0097] Furthermore, a passive Q-switch can be used as the Q-switch, which increases transmittance when the intensity of the fundamental wave exceeds a predetermined threshold. The passive Q-switch is composed of a saturable absorber such as Cr:YAG. By using a passive Q-switch, it becomes possible to automatically generate pulses when a predetermined amount of energy or more is accumulated in the laser medium. Alternatively, a so-called active Q-switch, whose attenuation rate can be controlled externally, can also be used.

[0098] The wavelength conversion element is configured using two nonlinear optical crystals such as LBO (LiBO). By using two crystals, a third harmonic wave can be generated from the fundamental wave. In this embodiment, the wavelength of the third harmonic wave is set to 355 nm in the ultraviolet range.

[0099] That is, the electromagnetic wave emitting unit 71 according to this embodiment can output laser light consisting of ultraviolet light as the primary electromagnetic wave. This allows analysis by the LIBS method to be performed on optically transparent samples SP such as glass. In addition, the percentage of laser light in the ultraviolet range that reaches the human retina is very low. By configuring the laser light so that it does not form an image on the retina, the safety of the device can be improved.

[0100] The output adjustment means 72 is disposed on the optical path connecting the electromagnetic wave emitting unit 71 and the deflection element 73, and is capable of adjusting the output of the laser light (primary electromagnetic wave). Specifically, the output adjustment means 72 according to this embodiment includes a half-wave plate 72a and a polarizing beam splitter 72b. The half-wave plate 72a is configured to rotate relative to the polarizing beam splitter 72b, and by controlling the angle of rotation, the amount of light passing through the polarizing beam splitter 72b can be adjusted.

[0101] The laser light (primary electromagnetic wave) whose output has been adjusted by the output adjustment means 72 is reflected by a mirror (not shown) and enters the deflection element 73.

[0102] Specifically, deflection element 73 is laid out so as to reflect the laser light output from electromagnetic wave output unit 71 and passed through output adjustment means 72, and direct it to sample SP via reflective objective lens 74, while also passing light generated in sample SP in response to this laser light (light emitted as plasma is generated on the surface of sample SP, hereinafter referred to as "plasma light") and directing it to first detector 77A and second detector 77B. Deflection element 73 is also laid out so as to pass visible light focused for imaging, and direct most of it to first camera 81.

[0103] The ultraviolet laser light reflected by the deflection element 73 propagates as parallel light along the analysis optical axis Aa and reaches the reflective objective lens 74 .

[0104] The reflective objective lens 74 serving as a collection head is configured to collect secondary electromagnetic waves generated in the sample SP when the sample SP is irradiated with the primary electromagnetic waves emitted from the electromagnetic wave emitting unit 71. In particular, the reflective objective lens 74 according to this embodiment is configured to collect laser light as the primary electromagnetic waves and irradiate the sample SP with the laser light (primary electromagnetic waves), and to collect plasma light (secondary electromagnetic waves) generated in the sample SP in response to the laser light (primary electromagnetic waves) irradiated onto the sample SP. In this case, the secondary electromagnetic waves correspond to plasma light emitted in association with plasma generation on the surface of the sample SP.

[0105] The reflective objective lens 74 is configured to coaxially arrange an optical system related to the emission of the primary electromagnetic wave from the electromagnetic wave emission unit 71 and an optical system related to the reception of the reflected light by the first camera 81 and the reception of the secondary electromagnetic wave by the first and second detectors 77A, 77B. In other words, the reflective objective lens 74 is shared by the two types of optical systems.

[0106] The reflective objective lens 74 has an analysis optical axis Aa that extends substantially in the vertical direction. The analysis optical axis Aa is arranged so as to be parallel to the observation optical axis Ao of the objective lens 92 of the observation optical system 9.

[0107] More specifically, the reflective objective lens 74 according to this embodiment is a Schwarzschild-type objective lens consisting of two mirrors. As shown in Fig. 8, the reflective objective lens 74 has a primary mirror 74a that is circular and has a relatively large diameter, and a secondary mirror 74b that is disk-shaped and has a relatively small diameter.

[0108] The primary mirror 74a passes the laser light (primary electromagnetic wave) through an opening provided in its center, while reflecting the plasma light (secondary electromagnetic wave) generated in the sample SP with mirror surfaces provided around it. The latter plasma light is reflected again by the mirror surface of the secondary mirror 74b and passes through the opening of the primary mirror 74a while being coaxial with the laser light.

[0109] Secondary mirror 74b is configured to transmit the laser light that has passed through the opening of primary mirror 74a, while collecting and reflecting the plasma light reflected by primary mirror 74a. The former laser light is irradiated onto sample SP, while the latter plasma light passes through the opening of primary mirror 74a and reaches deflector element 73, as described above.

[0110] Therefore, when laser light is input to the reflective objective lens 74, the laser light passes through the secondary mirror 74b located in the center of the reflective objective lens 74 and reaches the surface of the sample SP. The laser light that reaches the sample SP locally turns the sample SP into plasma, and as a result, plasma light is emitted. This plasma light passes through an opening provided around the secondary mirror 74b and reaches the primary mirror 74a. The plasma light that reaches the primary mirror 74a is reflected by its mirror surface to reach the secondary mirror 74b, where it is reflected again and reaches the deflection element 73 from the reflective objective lens 74. The reflected light that reaches the deflection element 73 passes through the deflection element 73 and reaches the spectroscopic element 75.

[0111] The spectroscopic element 75 is disposed between the deflector element 73 and the first beam splitter 78A in the optical axis direction of the reflective objective lens 74 (the direction along the analytical optical axis Aa), and guides a portion of the plasma light generated in the sample SP to the first detector 77A, while directing the other portion to the second detector 77B, etc. Most of the latter plasma light is directed to the second detector 77B, but the remainder reaches the first camera 81.

[0112] Specifically, the plasma light (secondary electromagnetic waves) returning from the sample SP contains various wavelength components in addition to the wavelength corresponding to the laser light as the primary electromagnetic waves. Therefore, the spectroscopic element 75 according to this embodiment reflects electromagnetic waves in a short wavelength band among the secondary electromagnetic waves returning from the sample SP and guides them to the first detector 77A. The spectroscopic element 75 also transmits electromagnetic waves in other bands and guides them to the second detector 77B, etc.

[0113] The first parabolic mirror 76A is a so-called parabolic mirror, and is disposed between the spectroscopic element 75 and the first detector 77A. The first parabolic mirror 76A collects the secondary electromagnetic waves reflected by the spectroscopic element 75, and causes the collected secondary electromagnetic waves to be incident on the first detector 77A.

[0114] The first detector 77A receives plasma light (secondary electromagnetic waves) generated in the sample SP and collected by the reflective objective lens 74, and generates an intensity distribution spectrum, which is the intensity distribution for each wavelength of the plasma light.

[0115] In particular, when the electromagnetic wave emitting unit 71 is configured using a laser light source and the reflective objective lens 74 is configured to collect plasma light as a secondary electromagnetic wave generated in response to irradiation with laser light as a primary electromagnetic wave, the first detector 77A separates the light by reflecting the light at different angles for each wavelength and causes each of the separated light beams to enter an image sensor having multiple pixels. This allows the wavelength of light received by each pixel to differ and the received light intensity to be obtained for each wavelength. In this case, the intensity distribution spectrum corresponds to the intensity distribution for each wavelength of light.

[0116] The intensity distribution spectrum may be constructed using the received light intensity acquired for each wave number. Because wavelengths and wave numbers correspond uniquely, even when the received light intensity acquired for each wave number is used, the intensity distribution spectrum can be regarded as an intensity distribution for each wavelength. The same applies to the second detector 77B described below.

[0117] The first detector 77A may be, for example, a Czerny-Turner type detector. The entrance slit of the first detector 77A is aligned with the focal position of the first parabolic mirror 76A. The intensity distribution spectrum generated by the first detector 77A is input to the control unit 21 of the controller main body 2.

[0118] First beam splitter 78A reflects a portion of the light transmitted through spectroscopic element 75 (secondary electromagnetic waves in the infrared region including the visible light band) and guides it to second detector 77B, while transmitting the other portion (part of the visible light band) and directing it to second beam splitter 78B. Of the plasma light belonging to the visible light band, a relatively large amount of plasma light is directed to second detector 77B, and a relatively small amount of plasma light is directed to first camera 81 via second beam splitter 78B.

[0119] The second parabolic mirror 76B is a so-called parabolic mirror, similar to the first parabolic mirror 76A, and is disposed between the first beam splitter 78A and the second detector 77B. The second parabolic mirror 76B collects the secondary electromagnetic waves reflected by the first beam splitter 78A, and causes the collected secondary electromagnetic waves to be incident on the second detector 77B.

[0120] Similar to the first detector 77A, the second detector 77B receives secondary electromagnetic waves generated in the sample SP when the primary electromagnetic waves emitted from the electromagnetic wave emitting section 71 are irradiated onto the sample SP, and generates an intensity distribution spectrum, which is the intensity distribution for each wavelength of the secondary electromagnetic waves.

[0121] In particular, when the electromagnetic wave emitting unit 71 is configured with a laser light source and the reflective objective lens 74 is configured to collect plasma light as a secondary electromagnetic wave generated in response to irradiation with laser light as a primary electromagnetic wave, the second detector 77B separates the light by reflecting the light at different angles for each wavelength and causes each of the separated light beams to enter an image sensor having multiple pixels. This allows the wavelength of light received by each pixel to differ and the received light intensity to be obtained for each wavelength. In this case, the intensity distribution spectrum corresponds to the intensity distribution for each wavelength of light.

[0122] The second detector 77B may be, for example, a Czerny-Turner type detector. The entrance slit of the second detector 77B is aligned with the focal position of the first parabolic mirror 76A. The intensity distribution spectrum generated by the second detector 77B is input to the control unit 21 of the controller main body 2, similar to the intensity distribution spectrum generated by the first detector 77A.

[0123] The control unit 21 receives the ultraviolet intensity distribution spectrum generated by the first detector 77A and the infrared intensity distribution spectrum generated by the second detector 77B. Based on these intensity distribution spectra, the control unit 21 performs a component analysis of the sample SP using the basic principles described below. By using a combination of the ultraviolet intensity distribution spectrum and the infrared intensity distribution spectrum, the control unit 21 can perform a component analysis using a wider frequency range.

[0124] The second beam splitter 78B reflects the illumination light (visible light) emitted from the LED light source 79a and passed through the optical element 79b, and irradiates the sample SP with this light via the first beam splitter 78A, the spectroscopic element 75, the deflection element 73, and the reflective objective lens 74. The reflected light (visible light) reflected by the sample SP returns to the analytical optical system 7 via the reflective objective lens 74.

[0125] The coaxial illuminator 79 includes an LED light source 79a that emits illumination light and an optical element 79b through which the illumination light emitted from the LED light source 79a passes. The coaxial illuminator 79 functions as a so-called "coaxial epi-illuminator." The illumination light emitted from the LED light source 79a propagates coaxially with the laser light (primary electromagnetic wave) output from the electromagnetic wave emitting unit 71 and irradiated onto the sample SP, and with the light (secondary electromagnetic wave) returning from the sample SP.

[0126] More specifically, the coaxial illumination 79 irradiates illumination light via an optical path that is coaxial with the primary electromagnetic wave emitted from the electromagnetic wave emitting unit 71. Specifically, the portion of the optical path of the illumination light that connects the deflection element 73 and the reflective objective lens 74 is coaxial with the optical path of the primary electromagnetic wave. Furthermore, the portion of the optical path of the illumination light that connects the first beam splitter 78A and the reflective objective lens 74 is coaxial with the optical path of the secondary electromagnetic wave.

[0127] The second beam splitter 78B also transmits the reflected light that has returned to the analysis optical system 7 and has passed through the first beam splitter 78A, and the plasma light that has passed through the first beam splitter 78A without reaching the first and second detectors 77A and 77B, and causes them to enter the first camera 81 via the imaging lens 80.

[0128] 8, the coaxial illumination 79 is built into the analysis housing 70, but the present disclosure is not limited to such a configuration. For example, a light source may be laid out outside the analysis housing 70, and the light source may be coupled to the analysis optical system 7 via an optical fiber cable.

[0129] The side illuminator 84 is disposed so as to surround the reflective objective lens 74. Although not shown, the side illuminator 84 irradiates illumination light from the side of the sample SP (in other words, from a direction tilted with respect to the analysis optical axis Aa).

[0130] The first camera 81 receives the light reflected by the sample SP via the reflective objective lens 74. The first camera 81 captures an image of the sample SP by detecting the amount of the received reflected light. The first camera 81 is an example of the "second imaging unit" in this embodiment.

[0131] Specifically, the first camera 81 of this embodiment photoelectrically converts the light incident through the imaging lens 80 using multiple pixels arranged on its light receiving surface, converting it into an electrical signal corresponding to the optical image of the subject (sample SP).

[0132] The first camera 81 may have a plurality of light receiving elements arranged along the light receiving surface. In this case, each light receiving element corresponds to a pixel, and an electrical signal can be generated based on the amount of light received by each light receiving element. Specifically, the first camera 81 according to this embodiment is configured with an image sensor made of a CMOS (Complementary Metal Oxide Semiconductor), but is not limited to this configuration. The first camera 81 may also be configured with an image sensor made of, for example, a CCD (Charged-Coupled Device).

[0133] First camera 81 then inputs electrical signals generated by detecting the amount of light received by each light-receiving element to control unit 21 of controller main body 2. Control unit 21 generates image data corresponding to an optical image of the subject based on the input electrical signals. Control unit 21 can display the generated image data on display unit 22 or the like as an image obtained by capturing an image of the subject.

[0134] The optical components described so far are housed in the aforementioned analysis housing 70. A through-hole 70a is provided in the bottom surface of the analysis housing 70. The reflective objective lens 74 faces the mounting surface 51a via this through-hole 70a.

[0135] A shielding member 83 shown in Fig. 8 may be disposed inside the analyzing housing 70. This shielding member 83 is disposed between the through-hole 70a and the reflective objective lens 74, and can be inserted into the optical path of the laser light based on an electrical signal input from the controller main body 2 (see the dotted line in Fig. 8). The shielding member 83 is configured so as to be impermeable to at least the laser light.

[0136] By inserting the shielding member 83 into the optical path, it is possible to restrict the emission of laser light from the analyzing housing 70. The shielding member 83 may be disposed between the electromagnetic wave emitting part 71 and the output adjusting means 72.

[0137] 9, the analysis housing 70 defines a space for accommodating the analytical optical system 7 as well as a space for accommodating the slide mechanism 65. In this sense, the analysis housing 70 can also be regarded as one element of the slide mechanism 65.

[0138] Specifically, the analyzing casing 70 according to this embodiment is formed in a box shape with a shorter front-rear dimension than its left-right dimension. The left portion of the front surface 70b of the analyzing casing 70 protrudes forward to ensure a movement margin for the guide rail 65a in the front-rear direction. Hereinafter, this protruding portion will be referred to as the "protruding portion" and will be denoted by the reference numeral 70c. This protruding portion 70c is located in the lower half of the front surface 70b in the up-down direction (in other words, only the lower half of the left portion of the front surface 70b protrudes).

[0139] -Basic principles of analysis using analytical optical systems 7- The control unit 21 performs a component analysis of the sample SP based on the intensity distribution spectra input from the first detector 77A and the second detector 77B. As a specific analysis method, the LIBS method can be used, as described above. The LIBS method is a method for analyzing components contained in the sample SP at the elemental level (so-called elemental analysis method).

[0140] Generally, when high energy is applied to a substance, electrons are separated from the atomic nucleus, and the substance enters a plasma state. The electrons that are separated from the atomic nucleus temporarily enter a high-energy and unstable state, but by losing energy from that state, they are captured by the atomic nucleus again and transition to a low-energy and stable state (in other words, they return from a plasma state to a non-plasma state).

[0141] Here, the energy lost from the electrons is emitted as electromagnetic waves, but the magnitude of the energy of these waves is determined by the energy levels based on the shell structure specific to each element. In other words, the energy of the electromagnetic waves emitted when electrons return from plasma to a non-plasma state has a value specific to each element (or more precisely, the orbit of the electron bound to the atomic nucleus). The magnitude of the energy of the electromagnetic waves is determined by their wavelength. Therefore, by analyzing the wavelength distribution of the electromagnetic waves emitted from the electrons, that is, the wavelength distribution of the light emitted from a substance when it becomes plasma, it is possible to analyze the components contained in that substance at the elemental level. This method is generally called atomic emission spectroscopy (AES).

[0142] The LIBS method is an analytical technique that belongs to the AES method. Specifically, in the LIBS method, energy is imparted to a substance (sample SP) by irradiating it with a laser (primary electromagnetic waves). Here, the area irradiated with the laser is locally converted into plasma, and by analyzing the intensity distribution spectrum of the plasma light (secondary electromagnetic waves) emitted as a result of this plasma conversion, it is possible to analyze the components of the substance.

[0143] That is, as described above, the wavelength of each plasma light (secondary electromagnetic wave) has a unique value for each element, so when the intensity distribution spectrum forms a peak at a specific wavelength, the element corresponding to that peak is a component of the sample SP. When the intensity distribution spectrum contains multiple peaks, the component ratio of each element can be calculated by comparing the intensities (amounts of received light) of each peak.

[0144] The LIBS method does not require vacuuming and allows component analysis to be performed in an open-air state. Furthermore, although it is a destructive test of the sample SP, it does not require processing such as dissolving the entire sample SP, and the positional information of the sample SP remains (it is merely a locally destructive test).

[0145] -Observation Unit 63- The observation unit 63 has an observation optical system 9 and an observation housing 90 that houses the observation optical system 9. The observation optical system 9 is a collection of parts for observing a sample SP as an observation target, and each part is housed in the observation housing 90. The observation housing 90 is configured separately from the above-mentioned analysis housing 70, and houses a second camera 93 as an imaging unit. The elements for observing the sample SP also include the control unit 21 of the controller main body 2.

[0146] The observation optical system 9 includes a lens unit 9a having an objective lens 92. As shown in FIG. 3 and other figures, this lens unit 9a corresponds to a cylindrical lens barrel arranged at the lower end side of the observation housing 90. The lens unit 9a is held by the analysis housing 70. The lens unit 9a can be removed from the observation housing 90 as a single unit.

[0147] A communication cable C2 for transmitting and receiving electrical signals to and from the controller main body 2, and an optical fiber cable C3 for guiding illumination light from the outside, are connected to the observation housing 90. Note that the communication cable C2 is not essential, and the observation optical system 9 and the controller main body 2 may be connected via wireless communication.

[0148] Specifically, as shown in FIG. 6, the observation optical system 9 includes a group of mirrors 91, an objective lens 92, a second camera 93 as an imaging unit, a second coaxial illumination 94, a second lateral illumination 95, and a magnification optical system 96 as a magnification change unit.

[0149] The objective lens 92 has an observation optical axis Ao extending substantially vertically, and collects illumination light to illuminate the sample SP placed on the mounting stage main body 51, while also collecting light (reflected light) from the sample SP. The observation optical axis Ao is arranged so as to be parallel to the analysis optical axis Aa of the reflective objective lens 74 of the analysis optical system 7. The reflected light collected by the objective lens 92 is received by the second camera 93.

[0150] The mirror group 91 transmits the reflected light collected by the objective lens 92 and guides it to the second camera 93. The mirror group 91 according to this embodiment can be configured using a total reflection mirror, a beam splitter, and the like, as exemplified in FIG. 6. The mirror group 91 also reflects illumination light emitted from a second coaxial illumination 94 and guides it to the objective lens 92.

[0151] The second camera 93 receives the light reflected by the sample SP via the objective lens 92. The second camera 93 captures an image of the sample SP by detecting the amount of the received reflected light. The second camera 93 is an example of the "imaging unit" in this embodiment.

[0152] Meanwhile, as described above, first camera 81 is an example of the "second imaging unit" in this embodiment. In this specification, a configuration in which second camera 93 is regarded as the imaging unit and first camera 81 is regarded as the second imaging unit will be mainly described, but as will be described later, first camera 81 may be regarded as the imaging unit and second camera 93 may be regarded as the second imaging unit.

[0153] Specifically, the second camera 93 of this embodiment photoelectrically converts light incident from the sample SP through the objective lens 92 using multiple pixels arranged on its light receiving surface, converting it into an electrical signal corresponding to the optical image of the subject (sample SP).

[0154] The second camera 93 may have a plurality of light receiving elements arranged along its light receiving surface. In this case, each light receiving element corresponds to a pixel, and an electrical signal can be generated based on the amount of light received by each light receiving element. The second camera 93 according to this embodiment is configured with a CMOS image sensor, similar to the first camera 81, but a CCD image sensor can also be used.

[0155] Second camera 93 then inputs electrical signals generated by detecting the amount of light received by each light-receiving element to control unit 21 of controller main body 2. Control unit 21 generates image data corresponding to an optical image of the subject based on the input electrical signals. Control unit 21 can display the generated image data on display unit 22 or the like as an image obtained by capturing an image of the subject.

[0156] The second coaxial illuminator 94 emits illumination light guided through the optical fiber cable C3. The second coaxial illuminator 94 emits illumination light through a common optical path with the reflected light collected through the objective lens 92. In other words, the second coaxial illuminator 94 functions as a "coaxial epi-illuminator" that is coaxial with the observation optical axis Ao of the objective lens 92. Note that instead of guiding illumination light from the outside through the optical fiber cable C3, a light source may be built into the lens unit 9a. In this case, the optical fiber cable C3 is not required.

[0157] 6, the second side illumination 95 is configured by a ring illumination arranged to surround the objective lens 92. Similar to the side illumination 84 in the analysis optical system 7, the second side illumination 95 irradiates illumination light from diagonally above the sample SP.

[0158] The magnifying optical system 96 is disposed between the mirror group 91 and the second camera 93, and is configured to be able to change the magnification of the sample SP by the second camera 93. The magnifying optical system 96 according to this embodiment has a variable magnification lens and an actuator configured to move the variable magnification lens along the optical axis of the second camera 93. The actuator moves the variable magnification lens based on a control signal input from the control unit 21, thereby changing the magnification of the sample SP.

[0159] The specific configuration of the magnifying optical system 96 is not limited to a configuration in which a variable magnification lens is moved by an actuator. For example, an operating unit for moving the variable magnification lens may be provided in the magnifying optical system. In this case, the magnification of the sample SP can be changed by the user operating the operating unit.

[0160] Also, a sensor that detects switching of the magnification may be provided in the magnification optical system. Then, when it is detected that the magnification has switched from low to high, the image before the switch (a low-magnification image, described later) may be automatically captured by the second camera 93, and the captured image may be stored in the controller main body 2. In this way, the user can grasp the relative positional relationship of a high-magnification image, described later, with respect to the low-magnification image.

[0161] Such a magnifying optical system 96 may be configured to change not only the magnification of the sample SP by the second camera 93 but also the magnification of the sample SP by the first camera 81. In this case, the magnifying optical system 96 is provided between the spectroscopic element 75 and the first camera 81.

[0162] -Housing connector 64- The housing connector 64 is a member for connecting the observation housing 90 to the analysis housing 70. By connecting the two housings 70, 90 with the housing connector 64, the analysis unit 62 and the observation unit 63 are integrated, and as a result, the analysis optical system 7 and the observation optical system 9 move integrally.

[0163] The housing connector 64 can be attached to the inside or outside of the analytical housing 70, i.e., to the inside or outside of the analytical housing 70, or to the stand 42. In particular, in this embodiment, the housing connector 64 is adapted to be attached to the outer surface of the analytical housing 70.

[0164] Specifically, the housing connector 64 according to this embodiment is configured to be attachable to the aforementioned protrusion 70c of the analyzing housing 70, and is configured to hold the lens unit 9a to the right of the protrusion 70c.

[0165] 3, when the observation housing 90 is connected to the analysis housing 70 by the housing connector 64, the front surface of the protrusion 70c protrudes further forward than the front portions of the housing connector 64 and the observation housing 90. Thus, in this embodiment, when the housing connector 64 holds the observation housing 90, the observation housing 90 and at least a portion of the analysis housing 70 (the protrusion 70c in this embodiment) are laid out so as to overlap each other when viewed from the side (when viewed from a direction perpendicular to the direction of movement of the observation optical system 9 and the analysis optical system 7 by the slide mechanism 65).

[0166] The housing connector 64 according to this embodiment can fix the relative position of the analysis optical axis Aa with respect to the observation optical axis Ao by fixing the observation housing 90 to the analysis housing 70.

[0167] 9, which will be described later, the housing connector 64 holds the observation housing 90, so that the observation optical axis Ao and the analysis optical axis Aa are arranged to be aligned along the direction (front-back direction in this embodiment) in which the observation optical system 9 and the analysis optical system 7 move relatively to the mounting table 5 by the slide mechanism 65. Particularly in this embodiment, the observation optical axis Ao is arranged to be positioned forward of the analysis optical axis Aa.

[0168] Furthermore, as shown in FIG. 9, the housing connector 64 holds the observation housing 90, so that the observation optical axis Ao and the analysis optical axis Aa are positioned so that their positions coincide in a non-moving direction (left-right direction in this embodiment) that is along the horizontal direction and perpendicular to the aforementioned moving direction (front-back direction in this embodiment).

[0169] -Slide mechanism 65- Fig. 9 is a schematic diagram illustrating the configuration of the slide mechanism 65. Fig. 10A and Fig. 10B are diagrams illustrating the horizontal movement of the head unit 6.

[0170] The slide mechanism 65 is configured to move the relative positions of the observation optical system 9 and the analysis optical system 7 with respect to the mounting table main body 51 in the horizontal direction so that imaging of the sample SP by the observation optical system 9 and irradiation of electromagnetic waves (laser light) when generating an intensity distribution spectrum by the analysis optical system 7 (in other words, irradiation of electromagnetic waves by the emission part 71 of the analysis optical system 7) can be performed on the same location on the sample SP as the object to be observed.

[0171] The direction of movement of the relative positions by the slide mechanism 65 can be the direction in which the observation optical axis Ao and the analysis optical axis Aa are aligned. As shown in Fig. 9, the slide mechanism 65 according to this embodiment moves the relative positions of the observation optical system 9 and the analysis optical system 7 with respect to the mounting table main body 51 in the front-rear direction.

[0172] The slide mechanism 65 according to this embodiment displaces the analysis housing 70 relative to the stand 42 and the head mounting member 61. The analysis housing 70 and the lens unit 9a are connected by the housing connector 64, so that displacing the analysis housing 70 displaces the lens unit 9a integrally.

[0173] Specifically, the slide mechanism 65 according to this embodiment has a guide rail 65a and an actuator 65b. Of these, the guide rail 65a is configured to protrude forward from the front surface of the head mounting member 61.

[0174] More specifically, the base end of the guide rail 65a is fixed to the head mounting member 61. Meanwhile, the tip end portion of the guide rail 65a is inserted into a storage space defined within the analysis housing 70, and is attached in a state in which it can be inserted into or removed from the analysis housing 70. The insertion and removal direction of the analysis housing 70 relative to the guide rail 65a is equal to the direction in which the head mounting member 61 and the analysis housing 70 are moved away from or closer to each other (the front-to-rear direction in this embodiment).

[0175] The actuator 65b can be, for example, a linear motor or a stepping motor that operates based on an electrical signal from the control unit 21. By driving this actuator 65b, the analysis housing 70, and therefore the observation optical system 9 and the analysis optical system 7, can be displaced relative to the stand 42 and the head mounting member 61. When a stepping motor is used as the actuator 65b, a motion conversion mechanism that converts the rotational motion of the output shaft of the stepping motor into linear motion in the forward and backward directions is further provided.

[0176] The slide mechanism 65 further has a movement amount sensor Sw2 for detecting the movement amount of the observation optical system 9 and the analysis optical system 7. The movement amount sensor Sw2 can be configured with, for example, a linear scale (linear encoder) or a photointerrupter.

[0177] The movement amount sensor Sw2 detects the relative distance between the analysis casing 70 and the head mounting member 61, and inputs an electrical signal corresponding to the relative distance to the controller main body 2. The controller main body 2 determines the amount of displacement of the observation optical system 9 and the analysis optical system 7 by calculating the amount of change in the relative distance input from the movement amount sensor Sw2.

[0178] 10A and 10B, operation of the slide mechanism 65 causes the head unit 6 to slide horizontally, and the relative positions of the observation optical system 9 and the analysis optical system 7 with respect to the mounting table 5 are moved (horizontally moved). This horizontal movement causes the head unit 6 to switch between a first mode in which the reflective objective lens 74 faces the sample SP, and a second mode in which the objective lens 92 faces the sample SP. The slide mechanism 65 can slide the analysis housing 70 and the observation housing 90 between the first mode and the second mode.

[0179] 10A and 10B, operation of the slide mechanism 65 causes the head unit 6 to slide horizontally, and the relative positions of the observation optical system 9 and the analysis optical system 7 with respect to the mounting table 5 are moved (horizontally moved). This horizontal movement causes the head unit 6 to switch between a first mode in which the reflective objective lens 74 faces the sample SP, and a second mode in which the objective lens 92 faces the sample SP. The slide mechanism 65 can slide the analysis housing 70 and the observation housing 90 between the first mode and the second mode.

[0180] To achieve this configuration, the amount of movement D2 of the head unit 6 when the slide mechanism 65 is actuated is set to be the same as the distance D1 between the observation optical axis Ao and the analysis optical axis Aa (see FIG. 9). In addition, the alignment direction of the observation optical axis Ao and the analysis optical axis Aa is set to be parallel to the movement direction of the head unit 6, as shown in FIG.

[0181] Furthermore, in this embodiment, by adjusting the dimensions of the housing connector 64 in the approximately vertical direction, the distance between the sample SP and the center of the reflective objective lens 74 in the first mode (more specifically, the intersection of the analysis optical axis Aa and the reflective objective lens 74) is set to match the distance between the sample SP and the center of the objective lens 92 in the second mode (second state) (more specifically, the intersection of the observation optical axis Ao and the objective lens 92). This setting can also be performed by determining the in-focus position using autofocus. By setting it in this manner, the working distance (WD) can be matched between the first mode, in which the sample SP is analyzed, and the second mode, in which the sample SP is observed. Matching the WD in both modes makes it possible to maintain a focused state before and after switching modes.

[0182] By configuring as described above, before and after switching between the first mode and the second mode, it becomes possible to perform image generation of the sample SP by the observation optical system 9 and generation of an intensity distribution spectrum by the analysis optical system 7 (specifically, irradiation of a primary electromagnetic wave by the analysis optical system 7 when an intensity distribution spectrum is generated by the analysis optical system 7) on the same location in the sample SP from the same direction.

[0183] Furthermore, as shown in Figure 10B, the aforementioned cover member 61b of the head mounting member 61 is positioned so as to cover (shield) the reflective objective lens 74 that constitutes the analytical optical system 7 in the first mode in which the head portion 6 is relatively retracted, and is positioned so as to be spaced away from (non-shield) the reflective objective lens 74 in the second mode in which the head portion 6 is relatively advanced.

[0184] In the former shielded state, even if a laser beam is unintentionally emitted, the laser beam can be blocked by the cover member 61b, thereby improving the safety of the device.

[0185] (Details of tilt mechanism 45) 11A and 11B are diagrams for explaining the operation of the tilting mechanism 45. Hereinafter, the tilting mechanism 45, including its relationship with the housing connector 64, will be described in detail with reference to FIGS. 10A and 10B.

[0186] The tilting mechanism 45 is a mechanism constituted by the aforementioned shaft member 44 and the like, and is capable of tilting at least the observation optical system 9 out of the analysis optical system 7 and the observation optical system 9 with respect to a reference axis As perpendicular to the mounting surface 51a.

[0187] As described above, in this embodiment, the relative position of the observation optical axis Ao with respect to the analysis optical axis Aa is maintained by integrally connecting the analysis housing 70 and the observation housing 90 with the housing connector 64. Therefore, when the observation optical system 9 having the observation optical axis Ao is tilted, the analysis optical system 7 having the analysis optical axis Aa will tilt integrally with the observation optical system 9, as shown in Figures 11A and 11B.

[0188] In this way, the tilting mechanism 45 according to this embodiment tilts the analytical optical system 7 and the observation optical system 9 together while maintaining the relative position of the observation optical axis Ao with respect to the analytical optical axis Aa.

[0189] Furthermore, the operation of the slide mechanism 65 and the operation of the tilt mechanism 45 are independent of each other, and a combination of the two operations is permitted. Therefore, the slide mechanism 65 can move the relative positions of the observation optical system 9 and the analytical optical system 7 while maintaining at least the tilted attitude of the observation optical system 9 by the tilt mechanism 45. That is, in the analytical observation device A according to this embodiment, the head unit 6 can slide back and forth while the observation optical system 9 remains tilted, as indicated by the double-headed arrow A1 in Fig. 11B.

[0190] In particular, in this embodiment, the analytical optical system 7 and the observation optical system 9 are configured to tilt integrally, and therefore the slide mechanism 65 moves the relative positions of the observation optical system 9 and the analytical optical system 7 while maintaining the tilted state of both the observation optical system 9 and the analytical optical system 7 by the tilt mechanism 45.

[0191] Furthermore, the analytical observation device A is configured to be able to perform eucentric observation. That is, in the analytical observation device A, a three-dimensional coordinate system specific to the device is defined, which is formed by three axes parallel to the X direction, the Y direction, and the Z direction. The secondary storage device 21c of the control unit 21 further stores the coordinates of the intersection position, which will be described later, in the three-dimensional coordinate system of the analytical observation device A. The coordinate information of the intersection position may be stored in the secondary storage device 21c in advance when the analytical observation device A is shipped from the factory. Furthermore, the coordinate information of the intersection position stored in the secondary storage device 21c may be updatable by the user of the magnifying analytical observation device A.

[0192] 11A and 11B, if the angle of the analytical optical axis Aa with respect to the reference axis As is referred to as the "tilt θ," the analytical observation device A is configured to allow the emission of laser light when the tilt θ is below a predetermined first threshold value θmax, for example. To keep the tilt θ below the first threshold value θmax, a hardware constraint can be imposed on the tilt mechanism 45. For example, the operating range of the tilt mechanism 45 may be physically limited by providing a brake mechanism (not shown) in the tilt mechanism 45.

[0193] The observation optical axis Ao, which is the optical axis of the objective lens 92, intersects with the central axis Ac. When the objective lens 92 oscillates around the central axis Ac, the intersection position of the observation optical axis Ao and the central axis Ac is maintained constant, while the angle (tilt θ) of the observation optical axis Ao with respect to the reference axis As changes. In this way, when the user oscillates the objective lens 92 around the central axis Ac using the tilting mechanism 45, for example, if the observation target portion of the sample SP is at the above-mentioned intersection position, even if the objective lens 92 is tilted, a eucentric relationship is maintained in which the center of the field of view of the second camera 93 does not move from the same observation target portion. Therefore, it is possible to prevent the observation target portion of the sample SP from deviating from the field of view of the second camera 93 (the field of view of the objective lens 92).

[0194] In particular, in this embodiment, the analytical optical system 7 and the observation optical system 9 are configured to tilt integrally, so that the analytical optical axis Aa, which is the optical axis of the reflective objective lens 74, intersects with the central axis Ac, just like the observation optical axis Ao. When the reflective objective lens 74 oscillates around the central axis Ac, the angle (tilt θ) of the analytical optical axis Aa with respect to the reference axis As changes while the intersection position between the analytical optical axis Aa and the central axis Ac remains constant.

[0195] As described above, the tilting mechanism 45 can tilt the stand 42 by approximately 90° to the right with respect to the reference axis As, or by approximately 60° to the left with respect to the reference axis As. However, if the analytical optical system 7 and the observation optical system 9 are configured to tilt integrally, tilting the stand 42 excessively may result in the laser light emitted from the analytical optical system 7 being directed toward the user.

[0196] Therefore, if the tilt of the observation optical axis Ao and the analysis optical axis Aa relative to the reference axis As is denoted by θ, it is desirable that the tilt θ be within a range that satisfies a predetermined safety standard, at least under conditions in which laser light can be emitted. Specifically, as described above, the tilt θ according to this embodiment is adjustable within a range below the predetermined first threshold θmax.

[0197] <Controller details> FIG. 12 is a block diagram illustrating an example of the configuration of the controller main body 2. FIG. 13 is a block diagram illustrating an example of the configuration of the control unit 21. In this embodiment, the controller main body 2 and the optical system assembly 1 are configured as separate entities, but the present disclosure is not limited to such a configuration. At least a portion of the controller main body 2 may be provided in the optical system assembly 1. For example, at least a portion of the processing unit 21a that configures the control unit 21 may be built into the optical system assembly 1.

[0198] As described above, the controller main body 2 according to this embodiment includes the control unit 21 that performs various processes and the display unit 22 that displays information related to the processes performed by the control unit 21. The control unit 21 is electrically connected to at least the mouse 31, the console 32, the keyboard 33, the head drive unit 47, the overhead camera 48, the mounting table drive unit 53, the actuator 65b, the electromagnetic wave emitter 71, the output adjustment means 72, the LED light source 79a, the first camera 81, the shielding member 83, the lateral illuminator 84, the second camera 93, the second coaxial illuminator (second coaxial illuminator) 94, the second lateral illuminator (second lateral illuminator) 95, the magnifying optical system 96, the lens sensor Sw1, the movement amount sensor Sw2, the first tilt sensor Sw3, and the second tilt sensor Sw4.

[0199] The control unit 21 electrically controls the head drive unit 47, the overhead camera 48, the mounting table drive unit 53, the actuator 65b, the electromagnetic wave emitter 71, the output adjustment means 72, the LED light source 79a, the first camera 81, the shielding member 83, the lateral light 84, the second camera 93, the second coaxial light 94, the second lateral light 95, and the magnifying optical system 96.

[0200] Furthermore, output signals from the overhead camera 48, first camera 81, second camera 93, lens sensor Sw1, movement amount sensor Sw2, first tilt sensor Sw3, and second tilt sensor Sw are input to the control unit 21. The control unit 21 performs calculations and the like based on the input output signals and executes processing based on the calculation results. As hardware for performing such processing, the control unit 21 according to this embodiment includes a processing unit 21a that executes various processes, a primary storage device 21b and a secondary storage device 21c that store data related to the processes performed by the processing unit 21a, and an input / output bus 21d.

[0201] The processing unit 21a is composed of a CPU, a system LSI, a DSP, etc. The processing unit 21a executes various programs to analyze the sample SP and control each part of the analytical observation device A, such as the display unit 22. In particular, the processing unit 21a according to this embodiment can control the display screen on the display unit 22 based on information indicating the analysis results of the sample SP and image data input from the first camera 81, the second camera 93, and the overhead camera 48.

[0202] The display unit controlled by the processing unit 21a is not limited to the display unit 22 of the controller main body 2. The "display unit" according to the present disclosure also includes a display unit that is not provided in the analytical observation device A. For example, the display of a computer, tablet terminal, or the like connected to the analytical observation device A by wire or wirelessly may be regarded as a display unit, and information showing the analysis results of the sample SP and various image data may be displayed on the display unit. In this way, the present disclosure can also be applied to an analytical system including the analytical observation device A and a display unit connected to the analytical observation device A by wire or wirelessly.

[0203] The processing unit 21a according to this embodiment also includes, as functional elements, a mode switching unit 211, a spectrum acquisition unit 212 and a spectrum analysis unit 213 as component analysis units, an imaging control unit 214, a user interface control unit (hereinafter simply referred to as a "UI control unit") 215, an illumination setting unit 216, an illumination control unit 217, and a report output unit 218. These elements may be realized by logic circuits or by executing software. At least some of these elements may also be provided in the optical system assembly 1, such as the head unit 6.

[0204] The classification of the spectrum acquisition unit 212, the spectrum analysis unit 213, etc. is merely for convenience and can be freely changed. For example, the spectrum acquisition unit 212 may also serve as the spectrum analysis unit 213, or the imaging control unit 214 may be subdivided by function.

[0205] The primary storage device 21b is configured by a volatile memory. The primary storage device 21b according to this embodiment can read various data from the secondary storage device 21c and the like and store the data primarily.

[0206] The secondary storage device 21c is configured with a nonvolatile memory such as a hard disk drive or a solid state drive. The secondary storage device 21c can continuously store various data. Instead of storing the various data in the secondary storage device 21c, the various data may be read from a storage medium such as an optical disk, or may be read from a computer, tablet terminal, or the like connected to the analytical observation device A by wire or wirelessly.

[0207] -Mode switching unit 211- The mode switching unit 211 moves the analysis optical system 7 and the observation optical system 9 forward and backward in the horizontal direction (the front-to-back direction in this embodiment) to switch from the first mode to the second mode or from the second mode to the first mode. For example, the mode switching unit 211 according to this embodiment can switch between the second camera 93 and the first camera 81 by moving the observation housing 90 and the analysis housing 70 relative to the mounting table 5.

[0208] The mode switching unit 211 can switch the imaging unit for capturing an image of the sample SP between the first camera 81 and the second camera 93. For example, in this embodiment, the mode switching unit 211 sets the first camera 81 as the imaging unit in the first mode, and sets the second camera 93 as the imaging unit in the second mode.

[0209] Specifically, the mode switching unit 211 according to this embodiment reads in advance the distance between the observation optical axis Ao and the analysis optical axis Aa, which is stored in advance in the secondary storage device 21 c. Next, the mode switching unit 211 operates the actuator 65 b of the slide mechanism 65 to move the analysis optical system 7 and the observation optical system 9 forward and backward.

[0210] Here, the mode switching unit 211 compares the displacement of the observation optical system 9 and the analytical optical system 7 detected by the movement amount sensor Sw2 with a distance read in advance to determine whether the former displacement amount has reached the latter distance. Then, when the displacement amount reaches a predetermined distance, the mode switching unit 211 stops the advancement and retraction of the analytical optical system 7 and the observation optical system 9. Note that the predetermined distance may be set in advance, or may be configured so that the predetermined distance coincides with the maximum movable range of the actuator 65b.

[0211] The head unit 6 may be tilted after switching to the first mode by the mode switching unit 211, or the head unit 6 may be tilted in the second mode before switching. The timing for operating the tilt mechanism 45 may be either in the first mode or the second mode.

[0212] -Spectrum Acquisition Unit 212- The spectrum acquisition unit 212 controls the electromagnetic wave emission unit 71 to emit a primary electromagnetic wave toward a sample SP as an analysis target, and acquires the intensity distribution spectrum generated by the first and second detectors 77A and 77B as detectors.

[0213] Specifically, in the first mode, spectrum acquiring section 212 according to this embodiment causes a primary electromagnetic wave (e.g., laser light) to be emitted from electromagnetic wave emitting section 71. A secondary electromagnetic wave (e.g., plasma light) generated by emitting the primary electromagnetic wave reaches first detector 77A and second detector 77B.

[0214] The first and second detectors 77A and 77B function as detectors and generate intensity distribution spectra based on the secondary electromagnetic waves that reach them. The intensity distribution spectra thus generated are acquired by the spectrum acquisition unit 212.

[0215] The emission position of the laser light by the spectrum acquisition unit 212 is specified by an operation input on the image P displayed on the display unit 22. The specification of emission positions can be accepted for multiple locations. When multiple emission positions are specified, the spectrum acquisition unit 212 emits laser light to each emission position in turn and performs component analysis for each emission position. The characteristic processing performed in this case will be described in the description of the configurations of the imaging control unit 214 and the UI control unit 215.

[0216] -Spectral Analysis Section 213- The spectrum analysis unit 213 performs a component analysis of the sample SP based on the intensity distribution spectrum generated by the spectrum acquisition unit 212. As already explained, when the LIBS method is used, the surface of the sample SP is locally converted into plasma, and the peak wavelength of the light emitted when the plasma state returns to a gas or the like has a unique value for each element (more precisely, the electron orbital of the electrons bound to the atomic nucleus). Therefore, by identifying the peak position of the intensity distribution spectrum, it is possible to determine that the element corresponding to that peak position is a component contained in the sample SP. Furthermore, by comparing the magnitudes (peak heights) of the peaks, it is possible to determine the component ratio of each element and estimate the composition of the sample SP based on the determined component ratio. The spectrum analysis unit 213, together with the spectrum acquisition unit 212 described above, exemplifies the "component analysis unit" in this embodiment.

[0217] The analysis results from the spectrum analysis unit 213 can be displayed on the display unit 22 or stored in the secondary storage device 21c in a predetermined format.

[0218] -Image capture control unit 214 and UI control unit 215- The following describes the processing performed by the imaging control unit 214. The processing exemplified below is closely related to the processing performed by the UI control unit 215, and therefore the following description also includes a description of the UI control unit 215.

[0219] 1. High-magnification and low-magnification images A high-magnification image is an image P of the sample SP with a relatively high magnification. This high-magnification image may be generated based on a light-receiving signal from the second camera 93 of the observation optical system 9, or may be generated based on a light-receiving signal from the first camera 81 of the analysis optical system 7. Furthermore, the high-magnification image taken by the second camera 93 may be used as an observation-system high-magnification image, and the high-magnification image taken by the first camera 81 of the analysis optical system 7 may be used as an analysis-system high-magnification image, and both an observation-system high-magnification image and an analysis-system high-magnification image may be generated.

[0220] The low-magnification image is an image P having a relatively wider field of view than the above-mentioned high-magnification image. This low-magnification image may be an observation image in which the magnification of the sample SP is relatively lower than the magnification used to capture the high-magnification image. Instead of using such a low-magnification image, multiple high-magnification images may be stitched together to create an image P having a wider field of view than each individual high-magnification image (a wide-area image, so to speak).

[0221] Furthermore, high-magnification and low-magnification images may be generated using both the first camera 81 of the analytical optical system 7 and the second camera 93 of the observation optical system 9. Specifically, the magnification of the second camera 93 of the observation optical system 9 is set relatively low, and the magnification of the first camera 81 of the analytical optical system 7 is set relatively high. In this case, the image P captured by the second camera 93 of the observation optical system 9 may be set as the low-magnification image, and after the low-magnification image is acquired, the mode switching unit 211 may switch from the second mode to the first mode, and then the image P captured by the first camera 81 of the analytical optical system 7 may be set as the high-magnification image.

[0222] In the following description, the low-magnification image can be used as a navigation image Pn to inform the user of the field of view of the high-magnification image or to accept changes to the field of view range of the high-magnification image. In such cases, the low-magnification image may be referred to as the navigation image Pn.

[0223] Furthermore, the high-magnification image can be used as an image P that shows dynamic changes in the sample SP. In such an application, the high-magnification image may be referred to as a live image Pl.

[0224] 2. Processing related to live images Pl and navigation images Pn The imaging control unit 214 generates an image P of the sample SP based on the amount of reflected light detected by the first camera 81 or the second camera 93 serving as the second imaging unit. The image P thus generated is displayed on the display unit 22 by the UI control unit 215. The images P generated by the imaging control unit 214 can be classified from two main perspectives. Here, as the first perspective, classification based on the purpose of the image P and the size of the imaging field of view, and processing related to that classification will be described.

[0225] The following description corresponds to the case in the second mode, that is, the case where the second camera 93 is used as the imaging unit, but the second camera 93 can be appropriately replaced with the first camera 81. For example, the live image Pl and the navigation image Pn may be generated by the first camera 81 instead of or in addition to the second camera 93.

[0226] Fig. 14 is a diagram illustrating an example of a display screen for a live image Pl and a navigation image Pn. Fig. 17 is a diagram illustrating an example of a user interface for outputting a start trigger signal.

[0227] 14, icon Ic11 is a user interface that accepts an instruction to switch from the first mode to the second mode or from the second mode to the first mode, and icon Ic12 is a user interface that accepts an instruction to execute component analysis in the first mode. When icon Ic12 accepts the execution instruction, a dialog W1 as exemplified in FIG. 17 is displayed on the display unit 22. The dialog W1 will be described later.

[0228] As illustrated in Figure 14, the imaging control unit 214 of this embodiment can generate, as the image P, an image of the sample SP (particularly the aforementioned high-magnification image) P based on the amount of reflected light received by the second camera 93, a live image Pl that is updated at regular intervals and shows dynamic changes in the sample SP, and a navigation image Pn as the aforementioned low-magnification image that has a wider imaging range than the live image Pl and shows the position of the live image Pl.

[0229] Here, the live image Pl is generated as a high-magnification image of the sample SP captured by the second camera 93 at a relatively high magnification. On the other hand, the navigation image Pn is generated as a low-magnification image of the sample SP captured by the second camera 93 at a relatively low magnification. As described above, the navigation image Pn may be generated by stitching together multiple high-magnification images. Here, the magnification may be changed by adjusting the magnification optical system 96 using the imaging control unit 214, or by adjusting the magnification optical system 96 by the user. The magnification may also be changed using so-called digital zoom.

[0230] As described above, the image generated based on the light receiving signal from the second camera 93 of the observation optical system 9 may be the navigation image Pn, and the image generated based on the light receiving signal from the first camera 81 of the analysis optical system 7 may be the live image Pl. Alternatively, for example, the navigation image Pn may be generated by the first camera 81. In that case, the navigation image Pn may be generated using a low-magnification image captured by the first camera 81, or the navigation image Pn may be generated by stitching together multiple high-magnification images generated via the first camera 81.

[0231] That is, first, a low-magnification image of the sample SP is acquired by the second camera 93, which has a relatively low magnification, and this is used as the navigation image Pn. After that, the mode switching unit 211 switches the optical system from the observation optical system 9 to the analytical optical system 7. Then, a high-magnification image of the sample SP is acquired by the first camera 81 of the analytical optical system 7, and this may be used as the live image Pl. Note that the image captured by the first camera 81 may also be referred to as a pre-irradiation image Pb or a post-irradiation image Pa depending on the timing of the image capture. The pre-irradiation image Pb refers to the image before the sample SP is irradiated with laser light, and the post-irradiation image Pa refers to the image after the sample SP is irradiated with laser light.

[0232] 14, operating icon Ic11 switches from the second mode to the first mode. In the first mode, a high-magnification image generated by the first camera 81 is displayed as a live image Pl on the display unit 22. In this case, the navigation image Pn may be switched to a low-magnification image captured by the first camera 81, or the low-magnification image captured by the second camera 93 may be used as is.

[0233] The update interval of the live images Pl (the time interval at which the live images Pl are generated) may be set to, for example, several tens of frames per second, or may be set to update every few seconds. This update interval may be set uniquely to the observation unit 63, or may be set to be changeable externally.

[0234] In addition, the navigation image Pn may be generated by the imaging control unit 214 controlling the mounting platform driving unit 53 and the second camera 93 to generate an image P at each XY position (each position on a plane along the front-to-back and left-to-right directions) of the mounting surface 51a, and then synthesizing the images P generated at each XY position.

[0235] 14, the UI control unit 215 causes the display unit 22 to display the live image Pl and the navigation image Pn generated by the imaging control unit 214. At this time, the UI control unit 215 causes the display unit 22 to display the navigation image Pn with position information Ic indicating the current position of the live image Pl superimposed on the navigation image Pn.

[0236] Here, the position information Ic may be a crosshair as exemplified in Fig. 14. In this case, the intersection Cp of the crosshairs may indicate the center of the field of view of the live image Pl when a first analysis point Lo1, which will be described later, is not specified. Furthermore, as the position information Ic, in addition to or instead of the crosshairs, a rectangular frame indicating the field of view range of the live image Pl may be superimposed and displayed, or a point-shaped or circle-shaped figure may be superimposed and displayed.

[0237] Then, the UI control unit 215 accepts the designation of the first analysis point Lo1 on the live image Pl as the irradiation position of the primary electromagnetic wave (e.g., laser light), and displays the navigation image Pn on the display unit 22 with information indicating the position of the first analysis point Lo1 in the navigation image Pn (hereinafter also referred to as the "wide area analysis position") superimposed thereon.

[0238] Here, the first analysis point Lo1 may be specified, for example, by operating a mouse, or by inputting coordinates on the live image P1 using a keyboard or the like.

[0239] 14, a substantially cross-shaped marker is superimposed on the live image Pl as information indicating the specified first analysis location Lo1. Meanwhile, an intersection X is superimposed on the navigation image Pn as the wide-area analysis position. This intersection X indicates the irradiation position of the primary electromagnetic wave on the navigation image Pn. Instead of superimposing the intersection X, the cross may also serve as the wide-area analysis position. In that case, the intersection Cp of the cross indicates the irradiation position of the primary electromagnetic wave on the navigation image Pn.

[0240] The first analysis location Lo1 can be specified at multiple locations. In this case, an intersection X can be displayed on the navigation image Pn at each position corresponding to the first analysis location Lo1.

[0241] Furthermore, the UI control unit 215 can also accept designation of the irradiation position of the primary electromagnetic wave on the navigation image Pn, in addition to designation of the irradiation position of the primary electromagnetic wave (first analysis point Lo1) on the live image Pl.

[0242] Specifically, the UI control unit 215 can accept a second analysis location Lo2 on the navigation image Pn as position information corresponding to the irradiation position of the primary electromagnetic waves. As illustrated in the upper part of Fig. 15, when the UI control unit 215 accepts the designation of the second analysis location Lo2, the imaging control unit 214 controls the mounting table driving unit 53 based on the second analysis location Lo2, thereby moving the relative position (imaging position) of the mounting table 5 with respect to the second camera 93 so that the second analysis location Lo2 falls within the field of view of the live image Pl. In the example illustrated in the lower part of Fig. 15, the imaging position is moved so that the intersection Cp of the position information (crosshairs) Ic coincides with the second analysis location Lo.

[0243] 15, the imaging control unit 214 regenerates the live image Pl in a state where the second analysis point Lo2 is placed within the field of view of the live image Pl by the mounting table driving unit 53 (in the illustrated example, the intersection Cp of the position information is aligned with the second analysis point Lo2). This allows a new live image Pl containing the second analysis point Lo2 to be generated and displayed on the display unit 22.

[0244] The UI control unit 215 can also accept a designation of a first analysis point Lo1 on the newly generated live image Pl. As illustrated in the upper part of Fig. 16, when the UI control unit 215 accepts a new designation of a first analysis point Lo1', the imaging control unit 214 controls the mounting table driving unit 53 based on the newly accepted first analysis point Lo1', thereby moving the imaging position so that the first analysis point Lo1' approaches the center of the field of view of the live image Pl. In the example illustrated in the lower part of Fig. 16, the imaging position is moved so that the first analysis point Lo1' coincides with the center of the field of view of the live image Pl.

[0245] The imaging control unit 214 then regenerates the live image Pl in a state in which the first analysis point Lo1' is moved closer to the center of the field of view of the live image Pl by the mounting table driving unit 53. This allows a new live image Pl to be generated in which the first analysis point Lo1 is moved closer to the center of the field of view, and this can be displayed on the display unit 22.

[0246] The UI control unit 215 can repeatedly accept the designation of the first analysis location Lo1 on the regenerated live image Pl, or can accept the designation of multiple locations. Each time the UI control unit 215 accepts the designation of the first analysis location Lo1 on the regenerated live image Pl, the imaging control unit 214 controls the mounting table driving unit 53 based on the first analysis location Lo1, thereby moving the imaging position so that the first analysis location Lo1 approaches the center of the field of view of the regenerated live image Pl.

[0247] Then, the imaging control unit 214 performs further regeneration of the live image Pl in a state in which the first analysis point Lo1 is moved closer to the center of the field of view of the regenerated live image Pl by the mounting table driving unit 53. By repeatedly performing regeneration of the live image Pl, it becomes possible to obtain the live image Pl that the user desires.

[0248] Thereafter, when a desired live image Pl is acquired and one or more first analysis points Lo1 are designated on the live image Pl, the user operates the aforementioned icon Ic11, and the mode switching unit 211 switches from the second mode to the first mode. In the first mode, the live image Pl generated by the second camera 93 is switched to the live image Pl generated by the first camera 81, but the position of the first analysis point Lo1 on the live image Pl and the position of the intersection point X on the navigation image Pn are maintained.

[0249] Thereafter, after the first analysis point Lo1 is re-designated as necessary, when the user operates the above-mentioned icon Ic12, the UI control unit 215 displays a dialog W1, as illustrated in Fig. 17, on the display unit 22. As illustrated in Fig. 17, the dialog W1 is configured with a check box Ic21 for designating the laser power at three levels, a check box Ic22 for setting whether or not to perform focus stacking during irradiation, a check box Ic23 for setting whether or not to perform autofocus (AF) during irradiation, an icon Ic24 for outputting a start trigger signal, an icon Ic25 for setting averaging, and an icon Ic26 for closing the dialog W1.

[0250] When icon Ic24 is clicked in dialog W1, UI control unit 215 outputs a start trigger signal to spectrum acquisition unit 212. Upon receiving the start trigger signal, spectrum acquisition unit 212 causes stage driver 53 to move first analysis location Lo1 closer to the center of the field of view of live image Pl (for example, a fixed point in live image Pl), and irradiates primary electromagnetic waves onto first analysis location Lo1. This causes component analysis to be performed at first analysis location Lo1.

[0251] Immediately before the component analysis is performed, a pre-irradiation image Pb composed of at least one of the live image Pl and the navigation image Pn is generated, and immediately after the component analysis is performed, a post-irradiation image Pa composed of at least one of the live image Pl and the navigation image Pn is generated.

[0252] Furthermore, the imaging control unit 214 can also display the all-in-focus image Pc as a live image (high-magnification image) Pl in both the first mode and the second mode. Specifically, as illustrated in Fig. 18 , the imaging control unit 214 according to this embodiment moves the imaging position to a plurality of first positions along the first direction (Z direction) using the mounting table driving unit 53, and generates an image P at each of the plurality of first positions.

[0253] In the illustrated example, n height positions z1, z2, ..., zn and n images P1, P2, ..., Pn captured at each height position are illustrated as the multiple first positions. The squares of the images P1, 2, ..., Pn conceptually represent pixels, and "OK" attached to each pixel conceptually indicates that the pixel is in focus. As illustrated in FIG. 18, in-focus pixels and out-of-focus pixels differ for each height position.

[0254] Therefore, the imaging control unit 214 generates an all-in-focus image Pc of the sample by combining high-magnification images (images P) generated at each of the multiple first positions. As shown in the figure, the imaging control unit 214 extracts in-focus pixels from each of n live images P1, P2, ..., Pn and combines these pixels to generate a single all-in-focus image Pc. The generated all-in-focus image Pc is displayed on the display unit 22 as a navigation image Pn and stored in the memory unit as a pre-irradiation image Pb. This brings the entire live image Pl into focus, making it possible to more appropriately specify the first analysis location Lo1.

[0255] The all-in-focus image Pc may be generated during observation by the second camera 93 of the observation unit 63 (i.e., during the second mode), during observation by the first camera 81 of the analysis unit 62 (i.e., during the first mode), or in both modes. Whether or not to generate the all-in-focus image Pc can also be appropriately set and changed based on operational input by the user.

[0256] The magnification of the image P generated by the second camera 93 can be adjusted by the magnification optical system 96. For example, as shown in Fig. 26, the size of the reference marker Ma that appears in a low-magnification image Pj, whose magnification is set to a predetermined magnification (first magnification) on the low magnification side, is smaller than the size of the reference marker Ma that appears in a high-magnification image Pi, whose magnification is set to a reference magnification (second magnification) that is relatively higher than the predetermined magnification.

[0257] At this time, due to physical distortion of the magnifying optical system 96 or the like, a misalignment (hereinafter referred to as "optical axis misalignment") may occur between the position where the observation optical axis Ao intersects with the placement surface 51a at the standard magnification and the position where the observation optical axis Ao intersects with the placement surface 51a at a predetermined magnification. If such an optical axis misalignment occurs, as shown in Fig. 26, for example, although the vertex of the reference marker Ma and the intersection point Cp of the position information (crosshairs) Ic coincide with each other at the standard magnification, they may not coincide with each other at the predetermined magnification.

[0258] To eliminate the influence of such optical axis misalignment, the imaging control unit 214 according to this embodiment controls the magnifying optical system 96 to first generate the low-magnification image Pj and the high-magnification image Pi as an image P belonging to one of the live image Pl and the navigation image Pn, and then detects a reference marker Ma included in both the low-magnification image Pj and the high-magnification image Pi. Here, the reference marker Ma may be a scale that can be placed on the mounting surface 51a, or a pattern or the like displayed on the mounting surface 51a. Next, the imaging control unit 214 acquires a first position difference ΔD1 indicating the difference between the position of the reference marker Ma detected in the low-magnification image Pj and the position of the reference marker Ma detected in the high-magnification image Pi, and also acquires a magnification difference indicating the difference between the magnification used in generating the low-magnification image Pj and the magnification used in generating the high-magnification image Pi.

[0259] The method for obtaining the position difference ΔD1 is not limited to this. For example, a high-magnification image and a low-magnification image of an arbitrary measurement object may be obtained, and the difference between the position of a predetermined point of the arbitrary measurement object in the high-magnification image and the position of a predetermined point in the low-magnification image may be detected. Furthermore, if the position difference is known based on low-magnification and high-magnification images captured in advance, the configuration may be such that the position difference is input as ΔD1.

[0260] Then, based on the first position difference ΔD1 and the magnification difference, the imaging control unit 214 calculates the positional fluctuation of the center of the field of view of the image P when the enlargement magnification is set to a predetermined third magnification. Here, when the third magnification is located midway between the predetermined magnification and the reference magnification, the magnitude of the positional fluctuation is a value smaller than the first positional difference ΔD1. Also, when the third magnification is an enlargement magnification even lower than the predetermined magnification, the magnitude of the positional fluctuation is a value larger than the first positional difference ΔD1.

[0261] Meanwhile, the UI control unit 215 detects a change in the enlargement magnification of the live image Pl, for example, based on a detection signal from the lens sensor Sw1. When the UI control unit 215 detects a change in the enlargement magnification of the live image Pl, it updates the superimposition position of the position information Ic on the navigation image Pn based on the position variation calculated by the imaging control unit 214. Here, the position information Ic is updated by calculating a correction amount for the optical axis deviation that offsets the position variation, and moving the intersection point Cp of the position information Ic according to the correction amount so that the positions of the intersection point Cp and the reference marker Ma coincide with each other.

[0262] Note that the method for eliminating the influence of optical axis misalignment is not limited to the method described above. For example, the control unit 21 detects a change in the magnification of the live image Pl based on a detection signal from the lens sensor Sw1. Then, based on the positional variation calculated by the imaging control unit 214, the control unit 21 may drive at least one of the head drive unit 47 and the mounting table drive unit 53 to control the center of the field of view to coincide before and after the change in magnification. Alternatively, the movement of the intersection point Cp described above and the drive of at least one of the head drive unit 47 and the mounting table drive unit 53 may be combined to control the center of the field of view of the live image Pl to coincide with the intersection point Cp.

[0263] The processing unit 21a according to this embodiment can automatically correct the optical axis deviation when, for example, the magnification ratio of the magnifying optical system 96 is changed.

[0264] Furthermore, when switching from the second mode to the first mode, a misalignment (hereinafter referred to as a "field of view misalignment") may occur between the position where the observation optical axis Ao intersects with the placement surface 51a in the second mode and the position where the analysis optical axis Aa intersects with the placement surface 51a in the first mode due to, for example, a misalignment in the assembly of the observation unit 63 relative to the analysis unit 62. If such a field of view misalignment occurs, as shown in Fig. 27, for example, although the vertex of the reference marker Ma and the intersection Cp of the position information (crosshairs) Ic coincide in the second mode (particularly at the reference magnification), they may not coincide in the first mode.

[0265] To eliminate the influence of such field of view misalignment, the imaging control unit 214 according to this embodiment controls the magnifying optical system 96 to first prepare an image Pi generated by the second camera 93 adjusted to the reference magnification and an image Pk generated by the first camera 81, and detects the reference marker Ma included in both the images Pi and Pk. Next, the imaging control unit 214 acquires a second position difference ΔD2 indicating the difference between the position of the reference marker Ma detected in the image Pi generated by the second camera 93 and the position of the reference marker Ma detected in the image Pk generated by the first camera 81.

[0266] Then, the imaging control unit 214 regards the second position difference ΔD2 as a positional change of the center of the field of view of the image P that occurs when switching from the second mode to the first mode (particularly, a positional change when switching from the standard magnification).

[0267] Meanwhile, the processing unit 21a detects the magnification of the second camera 93 used when switching from the second mode to the first mode, for example, based on the detection signal of the lens sensor Sw1. Then, the processing unit 21a acquires a positional variation (for example, a first positional difference ΔD1) when the detected magnification is regarded as the third magnification, and by adding up the positional variation and the second positional difference ΔD2, determines a correction amount for the field of view deviation that occurs when switching from a state in which the second camera 93 is set to an arbitrary magnification to the first mode. Then, by moving the intersection point Cp of the position information Ic or moving the mounting table 5 or the head unit 6 according to the correction amount for the field of view deviation, correction for the field of view deviation is performed so that the positions of the intersection point Cp and the reference marker Ma coincide with each other.

[0268] In other words, as shown in Figure 28, if the magnification of the observation optical system 9 can be changed in multiple ways from 20x to 200x, in order to correct the field of view shift that occurs when switching from one of these magnification settings to the first mode, it would normally seem necessary to calculate the second position difference ΔD2 for all magnifications.

[0269] However, in the observation optical system 9, as long as the first position difference ΔD1 that occurs between a preset reference magnification (e.g., 200x) and a specified magnification (e.g., 30x) and the second position difference ΔD2 that occurs when switching from the state set to that reference magnification to the first mode are calculated, the amount of correction for field of view shift at all magnifications can be calculated by combining the magnitude of the positional fluctuation calculated based on the first position difference ΔD1 and the magnification difference with the second position difference ΔD2.

[0270] The processing unit 21a according to this embodiment can automatically correct the field of view deviation when, for example, the mode switching unit 211 switches from the second mode to the first mode.

[0271] 3. Processing related to pre-irradiation images Pb and post-irradiation images Pa Here, as a second viewpoint, classification based on the viewpoint of the timing of generation of the image P and processing related to this classification will be described.

[0272] The following description corresponds to the case in the first mode, that is, the case where the first camera 81 is used as the imaging unit, but the first camera 81 can be appropriately replaced with the second camera 93. For example, the pre-irradiation image Pb and the post-irradiation image Pa may be generated by the second camera 93 instead of or in addition to the first camera 81.

[0273] That is, after generating a pre-irradiation image Pb based on the light reception signal by the first camera 81, the sample SP may be analyzed, and after the analysis, a post-irradiation image Pa may be generated based on the light reception signal by the first camera 81. Alternatively, after generating a pre-irradiation image Pb based on the light reception signal by the second camera 93, the mode switching unit 211 may switch from the observation optical system 9 to the analysis optical system 7, and then the sample SP may be analyzed, and after the analysis, a post-irradiation image Pa of the sample SP may be generated by the first camera 81.

[0274] Furthermore, after generating a pre-irradiation image Pb based on the light receiving signal from the second camera 93, the mode switching unit 211 may switch from the observation optical system 9 to the analysis optical system 7, and then analyze the sample SP.After analyzing the sample SP, the mode switching unit 211 may switch back to the observation optical system 9, and then a post-irradiation image Pa may be generated based on the light receiving signal from the second camera 93.

[0275] The UI control unit 215 of this embodiment receives a start trigger signal to start the component analysis of the sample SP, and can display the image P and the analysis results Vd1 (see dialog Wr in Figure 19) by the spectral analysis unit 213 as a component analysis unit on the display unit 22.

[0276] In this case, the image P and the analysis results may be displayed in separate windows, or may be displayed in a common window. Furthermore, the image P and the analysis results may be displayed one by one in order through a click operation or the like performed on a predetermined window (the display screen may be transitioned from the image P to the analysis results, or from the analysis results to the image P). As shown in FIG. 19, the UI control unit 215 can generate an image P in which the analysis results (for example, the names of substances estimated by component analysis as shown in the text data Vd100 in FIG. 19) are superimposed on the pre-irradiation image Pb, and can display this on the display unit 22.

[0277] Here, the UI control unit 215 receives a start trigger signal when, for example, a click operation is input on the icon Ic24 in the dialog W1 as illustrated in FIG.

[0278] In the processing unit 21a according to this embodiment, the imaging control unit 214 controls the second camera 93 in response to reception of a start trigger signal by the UI control unit 215, thereby generating a pre-irradiation image Pb, which is an image P before the sample SP is irradiated with laser light as a primary electromagnetic wave. The generated pre-irradiation image Pb can be displayed on the display unit 22 as exemplified in FIG. 14, or stored in the primary storage device 21b or the secondary storage device 21c.

[0279] In response to the reception of the start trigger signal, the imaging control unit 214 can control the first camera 81 to generate a pre-irradiation image Pb, which is an image taken before the sample SP is irradiated with laser light as a primary electromagnetic wave. Furthermore, in response to the reception of the start trigger signal, a dialog box such as "Do you want to take a pre-irradiation image?" may be displayed to the user, and the pre-irradiation image Pb may be generated by receiving an input operation from the user in response to the dialog box. In this case, the pre-irradiation image Pb can be saved only at the timing desired by the user.

[0280] Thereafter, in the processing unit 21a, the imaging control unit 214 controls the second camera 93, and then the spectrum acquisition unit 212 controls the electromagnetic wave emitting unit 71, thereby emitting laser light to the sample SP.

[0281] Here, the image P that can be used as the pre-irradiation image Pb includes an image acquired by the first camera 81 or the second camera 93 before the analysis of the sample SP in response to the reception of the start trigger signal described above. Note that at least one of the live image Pl and the navigation image Pn acquired before the reception of the start trigger signal may be used as the pre-irradiation image Pb.

[0282] In the example shown in FIG. 14, the processing unit 21a is configured to store both the live image Pl and the navigation image Pn in a state where the first analysis point Lo1 is designated as a pre-irradiation image Pb.

[0283] When the sample SP is irradiated with laser light, as illustrated in FIG. 19, destruction occurs at the first analysis point Lo1, which is the irradiation position, according to the laser power, the number of times the laser is emitted, and the like.

[0284] In this case, the processing unit 21a according to this embodiment generates a post-irradiation image Pa, which is an image P after the sample SP is irradiated with laser light, by having the spectrum acquisition unit 212 control the electromagnetic wave emitting unit 71 to emit laser light to the sample SP, and then having the imaging control unit 214 control the first camera 81 or the second camera 93. The generated post-irradiation image Pa is displayed on the display unit 22 as shown in FIG. 19 or stored in the primary storage device 21b or the secondary storage device 21c.

[0285] Here, the image P that can be used as the post-irradiation image Pa includes an image obtained by the imaging control unit 214 controlling the first camera 81 or the second camera 93 after emitting laser light to the sample SP. Specifically, it may include an image of the sample SP obtained by controlling the first camera 81 of the analysis optical system 7 without changing the position of the analysis optical system 7 after emitting laser light to the sample SP. It may also include an image of the sample SP obtained by switching from the analysis optical system 7 to the observation optical system 9 by the mode switching unit and controlling the second camera 93 of the observation optical system 9 after emitting laser light to the sample SP.

[0286] The processing unit 21a according to this embodiment is configured to automatically generate and store a pre-irradiation image Pb and a post-irradiation image Pa. Note that the post-irradiation image Pa may include at least one of a live image Pl and a navigation image Pn, similar to the pre-irradiation image Pb. As the navigation image included in the post-irradiation image Pa, a low-magnification image re-acquired by the imaging control unit 214 after laser light is emitted to the sample SP can be used. The processing unit 21a according to this embodiment is configured to automatically generate and store the live image Pl and navigation image Pn as the pre-irradiation image Pb, and generate and store the live image Pl and navigation image Pn as the post-irradiation image Pa.

[0287] The pre-irradiation image Pb and the post-irradiation image Pa are managed in association with the analysis results obtained by the spectrum analysis unit 213. Therefore, when the analysis results are displayed on the display unit 22 as described below, the pre-irradiation image Pb and the post-irradiation image Pa corresponding to the analysis results can be switched and displayed as appropriate.

[0288] In addition to linking the analysis results with the pre-irradiation image Pb and the post-irradiation image Pa, the system may be configured to be able to associate and save the scale of the acquired image P and comments on the acquired image P.

[0289] The scale used at this time can be switched by accepting a user selection. Switchable settings include, for example, "None," which hides the scale, "Mesh," which displays a mesh-like scale, "Cross," which displays a cross-shaped scale, "Bar," which displays a bar-shaped scale aligned in a predetermined direction, and "XY Bar," which displays two L-shaped scales aligned in the X and Y directions. In addition to the scale type, the scale width can also be set. When the analysis results and image P are saved with the scale type and width set in this way superimposed on the image P displayed on the display unit 22, the image P can be saved with the analysis results and scale superimposed.

[0290] Furthermore, when a specific icon on the display unit 22 is selected, a window is displayed on the display unit 22, and by operating the window, it is possible to superimpose a figure on the image P, to superimpose the date, time, etc. on the image P, or to superimpose any user-defined comment on the image P. When the analysis results and the image P are saved, such superimposed information such as figures and comments can be saved in association with the analysis results and the image P. Both the scale and the information such as figures and comments may be saved, or only one of them may be saved.

[0291] In the examples shown in FIGS. 14 and 19, the image to be displayed on the display unit 22 can be switched to at least one of the pre-irradiation image Pb and the post-irradiation image Pa by operating the icon Ic13.

[0292] As described above, the UI control unit 215 can change the imaging positions of the live image Pl and navigation image Pn used as the pre-irradiation image Pb by accepting designation of the first analysis point Lo1 and the second analysis point Lo2 corresponding to the irradiation position of the laser light. With the imaging positions changed, the processing unit 21a can cause the spectrum acquisition unit 212 to emit laser light.

[0293] As described above, these designations can be made for multiple locations. Possible methods for designating multiple locations include designating within the same field of view using one live image Pl, and designating within multiple fields of view using multiple live images Pl or one or more navigation images Pn. The UI control unit 215 according to this embodiment can accept both of these types of designations.

[0294] When a plurality of irradiation positions of the laser light are specified, the processing unit 21a according to this embodiment is configured to generate a pre-irradiation image Pb for each irradiation position in turn.

[0295] Specifically, the UI control unit 215 is configured to be able to accept designation of multiple first analysis positions Lo1 on the live image Pl. When the UI control unit 215 accepts designation of multiple first analysis positions Lo1, the processing unit 21a causes the mounting table driving unit 53 to move the imaging position for each of the multiple first analysis positions Lo1 accepted so that one of the multiple first analysis positions Lo1 accepted approaches the center of the field of view of the live image Pl.

[0296] Then, the processing unit 21a generates a pre-irradiation image Pb using the imaging control unit 214 while bringing one of the first analysis locations Lo1 close to the field of view range of the live image Pl, and after the pre-irradiation image Pb has been generated by the imaging control unit 214, causes the electromagnetic wave emitting unit 71 to emit laser light onto the sample SP, thereby causing the spectral analysis unit 213 to perform component analysis at one of the first analysis locations Lo1.

[0297] In this way, when multiple first analysis points Lo1 are specified within the same field of view that fits within one live image Pl, a pre-irradiation image Pb can be generated from the live image Pl at each first analysis point Lo1, and laser light can be irradiated onto each first analysis point Lo1 to perform component analysis.

[0298] A similar process can also be performed when specifying the second analysis position Lo2 on the navigation image Pn. Specifically, the UI control unit 215 is configured to be able to accept the specification of the second analysis position Lo2 at multiple locations on the navigation image Pn. When the UI control unit 215 accepts the specification of the second analysis position Lo2 at multiple locations, the processing unit 21a causes the mounting table driving unit 53 to move the imaging position for each of the second analysis positions Lo2 accepted at multiple locations so that one of the second analysis positions Lo2 accepted at multiple locations falls within the field of view of the live image Pl.

[0299] Then, the processing unit 21a generates a pre-irradiation image Pb using the imaging control unit 214 while keeping one second analysis location Lo2 within the field of view of the live image Pl, and after the pre-irradiation image Pb has been generated by the imaging control unit 214, causes the electromagnetic wave emitting unit 71 to emit laser light onto the sample SP, thereby causing the spectrum acquisition unit 212 to perform component analysis at the one second analysis location.

[0300] For example, consider a case where at least one of a first analysis location Lo1 and a second analysis location Lo2 is specified at multiple locations on at least one of the live image P1 and the navigation image Pn, as shown in Fig. 20. In this case, if at least one of the first analysis location Lo1 and the second analysis location Lo2 is collectively referred to simply as an "analysis location" and two analysis locations X1 and X2 are specified on the surface of the sample SP, the imaging control unit 214 first generates a pre-irradiation image Pb at the initial position (the imaging position at the time when the analysis locations X1 and X2 are specified) without moving the imaging position from that initial position (see the upper diagram on the left side of Fig. 20).

[0301] Thereafter, the imaging control unit 214 moves the mounting table 5 so that one of the two analysis points X1, X2 (first analysis position) X1 approaches the center of the field of view, and while the mounting table 5 is moved, generates a pre-irradiation image Pb corresponding to the first analysis position X1 (see the central diagram in the left part of Figure 20).

[0302] Thereafter, after spectrum acquisition unit 212 irradiates first analysis position X1 with laser light, imaging control unit 214 generates a post-irradiation image Pa corresponding to first analysis position X1 (see the lower diagram on the left in FIG. 20). Before or after generation of post-irradiation image Pa, or simultaneously with generation of post-irradiation image Pa, spectrum analysis unit 213 performs component analysis at first analysis position X1.

[0303] Thereafter, the imaging control unit 214 moves the mounting table 5 so that the other of the two analysis points X1, X2 (second analysis position) X2 approaches the center of the field of view, and while the mounting table 5 is moved, generates a pre-irradiation image Pb corresponding to the second analysis position X2 (see the upper right diagram in Figure 20).

[0304] Thereafter, after the spectrum acquisition unit 212 irradiates the second analysis position X2 with laser light, the imaging control unit 214 generates a post-irradiation image Pa corresponding to the second analysis position X2 (see the center diagram on the left of FIG. 20). Before or after the generation of the post-irradiation image Pa, or simultaneously with the generation of the post-irradiation image Pa, the spectrum analysis unit 213 performs component analysis at the first analysis position X1.

[0305] Thereafter, the imaging control unit 214 moves the imaging position to the initial position and generates a post-irradiation image Pa at the initial position (see the lower right diagram in FIG. 20).

[0306] In this way, the imaging control unit 214 according to this embodiment is configured to generate a pre-irradiation image Pb and a post-irradiation image Pa at each of the plurality of analysis locations X1, X2, generate a pre-irradiation image Pb of the entire sample SP before the analysis starts (before each of the plurality of analysis locations X1, X2 is irradiated with laser light), and generate a post-irradiation image Pa of the entire sample SP after the analysis is completed (after all of the plurality of analysis locations X1, X2 have been irradiated with laser light). Furthermore, by having the spectrum analysis unit 213 perform component analysis for each of the plurality of analysis locations X1, X2, component analysis can be performed at various locations on the surface of the sample SP.

[0307] It is not necessary to generate a pre-irradiation image Pb before starting analysis for each of the multiple analysis locations X1 and X2. For example, if the multiple analysis locations X1 and X2 are set on different samples SP, it is possible to generate both a pre-irradiation image Pb before the laser light is irradiated onto the analysis location X1 and a pre-irradiation image Pb before the laser light is irradiated onto the analysis location X2. On the other hand, if the multiple analysis locations X1 and X2 are on the same sample SP, it is possible to generate only a pre-irradiation image Pb before the laser light is irradiated onto the analysis location X1, which is the initial position.

[0308] Furthermore, the analysis results can be superimposed on at least one of the pre-irradiation image Pb and the post-irradiation image Pa. In this case, if multiple analysis locations are set, the analysis results, such as the text data Vd100 in FIG. 19, can be superimposed for each analysis location. For example, when a component analysis of a sample SP is performed by irradiating the sample SP with laser light, a change occurs in the sample SP as a result of the irradiation with the laser light. Superimposing the analysis results on the pre-irradiation image Pb allows the state of the sample SP before the change and the results of analyzing that sample SP to be displayed, which is convenient for the user.

[0309] As described above, the imaging control unit 214 can generate an all-in-focus image Pc by combining images P generated at different Z positions. In this case, the processing unit 21a can acquire height data of the surface of the sample SP by taking advantage of the fact that the focus quality differs at each Z position, and can use the height data to perform focusing appropriate for each of the multiple analysis locations X1 and X2.

[0310] That is, the imaging control unit 214 according to this embodiment generates images P at each of a plurality of height positions by utilizing the fact that the head driving unit 47, which serves as an electric driving unit, is configured to move the collection position, which indicates the relative position of the mounting table 5 with respect to the reflective objective lens 74, along the Z direction. Based on each generated image P, the spectrum acquisition unit 213 identifies the height along the Z direction at the first analysis location Lo1 accepted by the UI control unit 215 and stores this as height data in the primary storage device 21b or the like. The spectrum acquisition unit 213 also controls the head driving unit 47 or the mounting table driving unit 53 based on the identified height, thereby moving the collection position along the first direction so that the laser light emitted from the electromagnetic wave emission unit 71 is focused on the first analysis location Lo1.

[0311] In the example shown in Fig. 20, the multiple analysis points are set to be at different positions from one another, but the multiple analysis points may be set to the same position, as shown in Fig. 21. In this case, the analytical observation device A will irradiate the specific analysis point X3 with laser light multiple times (n times in the example shown).

[0312] In the example shown in Figure 21, the imaging control unit 214 first generates a pre-irradiation image Pb at the initial position (the imaging position at the time when the analysis point X3 is specified) without moving the imaging position from that initial position (see the upper diagram in Figure 21).

[0313] Thereafter, after the spectrum acquisition unit 212 irradiates the analysis position X3 with laser light, the imaging control unit 214 generates a post-irradiation image Pa corresponding to the analysis position X3 (see the center diagram in FIG. 21). Before or after the generation of the post-irradiation image Pa, or simultaneously with the generation of the post-irradiation image Pa, the spectrum analysis unit 213 performs component analysis at the analysis position X3.

[0314] Thereafter, the imaging control unit 214 generates a post-irradiation image Pa corresponding to the analysis position X3 every time the spectrum acquisition unit 212 irradiates the analysis position X3 with laser light. The spectrum analysis unit 213 performs component analysis at the analysis position X3 every time laser light is irradiated, either before or after the generation of the post-irradiation image Pa, or simultaneously with the generation of the post-irradiation image Pa.

[0315] After all n laser light irradiations have been completed, one pre-irradiation image Pa and n post-irradiation images Pb are generated, and the results of the component analysis performed n times are obtained.

[0316] In this way, the imaging control unit 214 according to this embodiment generates a post-irradiation image Pa each time a specific analysis location X3 is irradiated with laser light. By comparing the multiple post-irradiation images Pa thus generated with the pre-irradiation image Pa generated in advance, the user can grasp the changes in the sample SP caused by irradiation with laser light as primary electromagnetic waves. Furthermore, by repeatedly performing component analysis at the specific analysis location X3 by the spectrum analysis unit 213, it becomes possible to excavate the surface of the sample SP and obtain component information inside the sample SP.

[0317] Furthermore, when laser light is repeatedly irradiated onto a specific analysis location X3, component analysis can be performed each time the laser light is irradiated, and the analysis results can be superimposed and displayed on the display unit 22. In this case, the user can intuitively grasp the relationship between the excavation depth of the sample SP and the analysis results at that depth.

[0318] 4. Processing related to the overhead camera 48 The imaging control unit 214 also generates an overhead image Pf of the sample SP based on the amount of reflected light detected by the overhead camera 48. The overhead image Pf thus generated is displayed on the display unit 22 by the UI control unit 215.

[0319] 22 and 23 are diagrams illustrating an example of a display screen for the overhead image Pf. As illustrated in Fig. 22, the imaging control unit 214 displays a window W2 showing the overhead image Pf on the display unit 22. The overhead image Pf corresponds to an image of the sample SP viewed from the side.

[0320] 6, the analysis housing 70 of the analysis unit 62 is interposed between the overhead camera 48 and the objective lens 92 of the observation unit 63. Therefore, depending on the dimensions of the analysis housing 70, the objective lens 92 may be hidden by the analysis housing 70. This is inconvenient for grasping the relative positional relationship between the objective lens 92 and the sample SP through the overhead image Pf.

[0321] Therefore, the UI control unit 215 according to this embodiment generates a schematic shape St indicating the outline of the objective lens 92 and displays the schematic shape St superimposed on the overhead image Pf, thereby allowing the user to grasp the relative positional relationship between the objective lens 92 and the sample SP through the overhead image Pf.

[0322] 23, the UI control unit 215 is configured to tilt the schematic shape St superimposed on the overhead image Pf in accordance with the tilting of the observation unit 63 by the tilting mechanism 45. This allows the user to intuitively grasp the tilt θ of the observation optical axis Ao with respect to the reference axis As.

[0323] 22 and 23, a figure Di corresponding to the visible light emitted from the objective lens 92 is also superimposed on the overhead image Pf. This figure Di is displayed as an isosceles triangle with its vertex Ve pointing downward. The vertex Ve of the figure Di indicates the focal position formed by the objective lens 92. Therefore, the state in which the vertex Ve is located on the surface of the sample SP corresponds to the state in which the visible light is focused on the surface of the sample SP (the state in which the visible light is in focus). The figure Di functions as a guide when moving the objective lens 92 in the Z direction.

[0324] Also displayed in the window W2 displaying the overhead image Pf is a graph G1 showing the magnitude of the focus value of visible light versus the height position of the objective lens 92 (more precisely, a graph in which the vertical axis indicates the height position of the objective lens 92 and the horizontal axis indicates the magnitude of the focus value). Here, the "height position" refers to the relative position of the objective lens 92 with respect to the mounting surface 51a in the Z direction (first direction). For components other than the objective lens 92, the relative position in the Z direction with respect to the mounting surface 51a is similarly indicated.

[0325] A bar Ba indicating the current height position of the objective lens 92 is superimposed on this graph G1, and the visible light can be focused by adjusting the height position of the objective lens 92 so that the bar Ba is positioned at the peak position of the focus value and then allowing icon Ic31 to accept operational input.

[0326] Furthermore, when the objective lens 92 and the sample SP are brought close to each other, the icon Ic32 accepts an operation input, thereby setting a lower limit for the height position of the objective lens 92. The lower limit thus set is used when generating the above-mentioned omnifocal image, etc.

[0327] Here, the tilting mechanism 45 and the mounting table driving unit 53 are configured to maintain a eucentric relationship, so even if the observation optical axis Ao is tilted by the tilting mechanism 45 or the mounting table 5 is rotated by the mounting table driving unit 53, the vertex Ve of the figure Di can remain positioned on the surface of the sample SP. For example, as shown in Fig. 23, when the observation optical axis Ao is tilted with respect to the reference axis As, the vertex Ve of the figure Di does not move from the surface of the sample SP but maintains the position it had before the tilt.

[0328] The overhead image Pf generated by the imaging control unit 214 can be displayed in a report Re output by the report output unit 218. To be used for such purposes, the imaging control unit 214 can capture an image of the sample SP to generate the overhead image Pf after the component analysis of the sample SP by the spectrum acquisition unit 212 and the spectrum analysis unit 213 is completed, or before the component analysis of the sample SP is performed. The settings of whether to generate the overhead image Pf and the timing of generating the overhead image Pf can be changed as appropriate, for example, based on an operation input to the operation unit 3.

[0329] Furthermore, when generating the overhead image Pf after the component analysis of the sample SP is completed or before the component analysis of the sample SP is performed, the imaging control unit 214 retracts at least one of the mounting table 5 and the head unit 6 before generating the overhead image Pf. Specifically, the imaging control unit 214 can retract the mounting table 5 and the head unit 6 by operating at least one of the mounting table 5 and the head unit 6 so that the head unit 6 and the mounting table 5 are spaced apart in the Z direction. Retracting the mounting table 5 can prevent the analysis housing 70, the objective lens 92, and the like from appearing in the overhead image Pf.

[0330] Furthermore, depending on the shape of the sample SP, it may not be possible to obtain an overhead view of the entire sample SP simply by capturing an image of the sample SP with the overhead camera 48. For this reason, for example, the mounting table 5 may be configured to be partially tilted so that the sample SP can be oriented in a direction directly facing the overhead camera 48.

[0331] Specifically, a rotation axis provided in the left-right direction of the mounting surface 51a and a substantially semicircular stage member that rotates around the rotation axis may be provided on the mounting table 5, and the stage member may be tilted so as to face the overhead camera 48 only when it is necessary to image the sample SP with the overhead camera 48. Note that instead of a configuration in which a tilting mechanism is provided on the mounting table 5, a fitting groove that fits with a tilting plate may be provided on the mounting table 5, and the tilting plate engaged with the fitting groove may form an inclined surface that is inclined relative to the mounting table 5.

[0332] The overhead image Pf generated by the imaging control unit 214, and the schematic shape St and figure Di superimposed on the overhead image Pf, are input to a report output unit 218, which will be described later, and are used to generate a report.

[0333] 5. Associating each image P with the analysis results The UI control unit 215 can display on the display unit 22 a navigation image Pn as a low-magnification image, a live image Pl as a high-magnification image, an overhead image Pf, and a dialog Wr showing the analysis result Vd1, as well as a first interface W3 on the display unit 22 that accepts operation input to save at least one image P of the navigation image Pn and the live image Pl in association with the analysis result.

[0334] 24. The first interface W3 displays a check box Ic44 that accepts an operation input for saving a live image Pl, which is a high-magnification image, in association with the analysis results; a check box Ic45 that accepts an operation input for saving a navigation image Pn, which is a schematic image, in association with the analysis results; and a check box Ic46 that accepts an operation input for saving an overhead image Pf in association with the analysis results. For example, checking the check box Ic44 saves the live image Pl and the analysis results in association with each other, whereas unchecking the check box does not save the live image Pl in association with the analysis results. The live image Pl associated with the analysis results is output to a report Re by the report output unit 218.

[0335] The same applies to the other check boxes Ic45 to Ic47. For example, if check box Ic47 is unchecked, the live image Pl, navigation image Pn, and overhead image Pf will be saved in association with each other, but the analysis results will not be saved. When report output unit 218 outputs report Rep, first interface W3 functions as a selection screen for individually selecting whether or not to display each of the navigation image Pn as a low-magnification image, the live image Pl as a high-magnification image, and the analysis results on the report Rep.

[0336] Furthermore, icon Ic41 on the first interface W3 is a button for updating at least one image P of the navigation image Pn used as the low-magnification image and the live image Pl used to generate the high-magnification image and, ultimately, the pre-irradiation image Pb. That is, this button is for changing the image to be saved when saving the analysis results in at least one of the primary storage device 21b and the secondary storage device 21c as storage units, from the image displayed on the first interface W3 to a newly acquired image or an image selected from other previously acquired images. In response to receiving the change instruction, the UI control unit 215 displays a display screen W4 for updating the at least one image P on the display unit 22.

[0337] Icon Ic42 is a button for closing the display of first interface W3. When an operation input corresponding to icon Ic42 is received, first interface W3 for updating the image is closed and the screen returns to the screen shown in FIG. 14, etc. On the other hand, when an operation input corresponding to icon Ic43 is received on first interface W1, image P displayed in the display area is saved, as will be described later. Note that it is not essential to display icon Ic43 on first interface W1, and it may be displayed on the screen shown in FIG. 14, etc.

[0338] As illustrated in FIG. 25 , the display screen W4 is updated with at least one of the images P (both the navigation image Pn and the live image Pl in the illustrated example) and icons Ic51 and Ic52 as a second interface for updating the image P. For example, upon receiving an operation input via icon Ic51, the UI control unit 215 updates the live image Pl to be associated with the analysis result using the image P displayed on the display unit 22 at the time of receiving the operation input. In this case, the live image Pl may be updated using the post-irradiation image Pa displayed on the display unit 22 at the time of receiving the operation input, or the live image Pl may be replaced with a pre-irradiation image Pb generated before the analysis result was obtained. The same applies to the navigation image Pn. Furthermore, upon receiving an operation input via icon Ic53 marked “OK,” the UI control unit 215 completes updating the live image Pl and the navigation image Pn. Furthermore, upon receiving an operation input via icon Ic54 marked “Cancel,” the UI control unit 215 cancels updating the live image Pl and the navigation image Pn.

[0339] Furthermore, when the icon Ic43 on the first interface W3 receives an operation input, the UI control unit 215 can complete the association of the live image Pl, the navigation image Pn, the overhead image Pf, the analysis results, etc., and store them in the secondary storage device 21c.

[0340] -Lighting Settings Section 216- When switching from the first mode to the second mode or from the second mode to the first mode, the illumination setting unit 216 stores the illumination conditions before the mode switching, and sets the illumination conditions after the mode switching based on the stored illumination conditions.

[0341] In detail, the illumination setting unit 216 according to this embodiment sets the illumination conditions after switching between the first mode and the second mode so as to reproduce the illumination conditions referred to before switching, among the illumination conditions related to the coaxial illumination 79 and the lateral illumination 84 in the first mode and the illumination conditions related to the second coaxial illumination 94 and the second lateral illumination 95 in the second mode.

[0342] Here, the lighting conditions refer to the control parameters related to the first camera 81, coaxial lighting 79, and lateral lighting 84, and the control parameters related to the second camera 93, second coaxial lighting 94, and second lateral lighting 95. The lighting conditions include the light intensity of each lighting, the lighting state of each lighting, etc. The lighting conditions consist of multiple items that can be changed.

[0343] The control parameters related to the light intensity of each lighting include the magnitude of the current flowing through the LED light source 79a, the timing of current flow, the duration of current flow, etc. For example, the light intensity of the coaxial lighting 79 can be controlled by the magnitude of the current flowing through the LED light source 79a. The control parameters also include the exposure times of the first camera 81, the second camera 93, etc.

[0344] The lighting setting unit 216 compares the current lighting conditions, which are made up of a plurality of setting items, i.e., the items that were referenced before the mode switching, with the items that can be set after the mode switching, and extracts common items.

[0345] The illumination setting unit 216 sets the illumination conditions for the extracted common items so that the settings before the mode switch are reused, and stores the settings in the primary storage device 21b or the secondary storage device 21c. For example, when switching from the second mode to the first mode, consider a case where the second side illumination 95 was used in the second mode before the switch, and the side illumination 84 is used in the first mode after the switch. In this case, the illumination setting unit 216 stores, for example, the light intensity of the second side illumination 95. The illumination setting unit 216 sets the illumination conditions, including the light intensity, and stores the settings in the primary storage device 21b or the secondary storage device 21c.

[0346] If there is a unique item in either the lighting conditions before or after switching, the lighting setting unit 216 can set the current lighting condition by reading the initial lighting condition setting or the lighting condition used in the previous use. That is, the primary storage device 21b or the secondary storage device 21c stores the lighting conditions referred to in the previous use in the order of use, and the lighting setting unit 216 can set the lighting condition item that cannot be reused based on the stored contents.

[0347] Furthermore, after switching modes, the lighting conditions can be manually changed via the operation unit 3.

[0348] In addition, when initially setting and adjusting the lighting conditions, consideration may be given to the visible light transmittance of the optical elements of the analysis optical system 7, such as the spectroscopic element 75 and the imaging lens 80, through which light reflected by the sample SP passes before returning to the first camera 81, the light sensitivity of the image sensor that constitutes the first camera 81, the visible light transmittance of the optical elements that constitute the observation optical system 9, such as the mirror group 91, and the light sensitivity of the image sensor that constitutes the second camera 93.

[0349] In addition, when switching from the first mode to the second mode or from the second mode to the first mode, by keeping the brightness of the image data displayed on the display unit 22 constant, the exposure time of the first camera 81 and the second camera 93 can be made the same.

[0350] This allows the first camera 81 and the second camera 93 to have the same frame rate. Note that the brightness of the image data can be kept constant, for example, by controlling the product of the visible light transmittance and the light sensitivity associated with each of the first camera 81 and the second camera 93 to be constant.

[0351] -Lighting control unit 217- The illumination control unit 217 reads the illumination conditions set by the illumination setting unit 216 from the primary storage device 21b or the secondary storage device 21c, and controls the coaxial illuminator 79, the side illuminator 84, the second coaxial illuminator 94, or the second side illuminator 95 so as to reflect the read illumination conditions. Through this control, it is possible to turn on one or both of the coaxial illuminator 79 and the side illuminator 84, or to turn on one or both of the second coaxial illuminator 94 and the second side illuminator 95.

[0352] When emitting laser light in the first mode, the illumination control unit 217 also temporarily turns off all of the coaxial illumination 79 and the side illumination 84 regardless of the illumination conditions.

[0353] Before turning off the coaxial illuminator 79 or the lateral illuminator 84, the illumination control unit 217 also stores the illumination conditions that were being referenced at the time of turning off the illuminator 79 or the lateral illuminator 84 in the primary storage device 21b or the secondary storage device 21c.

[0354] The illumination control unit 217 resumes the extinguishing of the coaxial illumination 79 and the side illumination 84 at a timing after the completion of the emission of the laser light (for example, at a timing before or after the analysis by the spectrum analysis unit 213). At this time, the illumination control unit 217 reads the illumination conditions stored in the primary storage device 21b or the secondary storage device 21c before turning off the lights, and reflects them in the turning on of the coaxial illumination 79 or the side illumination 84.

[0355] -Report Output Section 218- Fig. 29 is a diagram illustrating a template Ds of the report Rep, and Fig. 30 is a diagram illustrating an output example of the report Rep. The report output unit 218 is configured to output a report Rep that compiles the live image Pl, the navigation image Pn, and information indicating the analysis results (first information Vd1) after the analysis of the sample SP by the spectrum analysis unit 213 is completed.

[0356] In detail, the report output unit 218 of this embodiment can output a report Rep that displays at least one of the navigation image Pn as a low-magnification image, the live image Pl as a high-magnification image used to generate the pre-irradiation image Pb and the post-irradiation image Pa, and the analysis results at each position on a template Ds that is assigned to the position where the analysis results are output, the navigation image Pn and the live image Pl (more specifically, the pre-irradiation image Pb generated using the live image Pl, or the pre-irradiation image Pb and the post-irradiation image Pa).

[0357] The pre-irradiation image Pb may be at least one of the pre-irradiation image Pb acquired by the second camera 93 of the observation optical system 9 and the pre-irradiation image Pb acquired by the first camera 81 of the analysis optical system 7. When the report output unit 218 outputs the report Rep, the UI control unit 215 can display, on the report Rep, an image P associated by the first interface W2, for example, a live image Pl with a check mark in the check box Ic44 (more specifically, a pre-irradiation image Pb, or a pre-irradiation image Pb and a post-irradiation image Pa), a navigation image Pn with a check mark in the check box Ic45, or the like.

[0358] In this case, the live image Pl used to generate the pre-irradiation image Pb can be at least one of the live image Pl generated by the second camera (observation camera) 93 in the second mode and the live image Pl generated by the first camera (analysis camera) 81 in the first mode.

[0359] Furthermore, the template Ds to which the output positions of the live image Pl and the like are assigned may be, for example, a spreadsheet such as that shown in Fig. 29. The spreadsheet may be a data sheet for software installed on a computer as a so-called office suite. Alternatively, a text file for word processing software may be used.

[0360] As illustrated in Figure 29, the template Ds can be arranged with a first tag Tg1 displayed as [Bird's-eye view image], a second tag Tg2 displayed as [Navigation image], a third tag Tg3 displayed as [Live image (observation camera)], a fourth tag Tg4 displayed as [Live image (analysis camera)], a fifth tag Tg5 displayed as [Estimation result], a sixth tag Tg6 displayed as [Tilt], a seventh tag Tg7 displayed as [Lighting conditions], an eighth tag Tg8 displayed as [Lens], and a ninth tag Tg9 displayed as [Detected element].

[0361] 30, the report output unit 218 outputs information corresponding to each tag to each position of the first tag Tg1 to the ninth tag Tg9 arranged on the template Ds. For example, an overhead image Pf is output to the first tag Tg1, a navigation image Pn is output to the second tag Tg2, a live image Pl generated by the second camera 93 in the second mode is output to the third tag Tg3, a live image Pl generated by the first camera 81 in the first mode is output to the fourth tag Tg4, information Vd9 (corresponding to fifth information Vd5 described later) indicating the estimation result of the sample SP acquired by the spectrum analysis unit 213 is output to the fifth tag Tg5, and information Vd9 is output to the sixth tag Tg6. , information Vd10 indicating the tilt θ detected by the first tilt sensor Sw3 and the second tilt sensor Sw4 is output, the seventh tag Tg7 outputs information Vd11 indicating the lighting conditions set by the lighting setting unit 216, the eighth tag Tg8 outputs information Vd12 related to the lens unit 9a detected by the lens sensor Sw1, and the ninth tag Tg9 outputs information indicating the detected elements of the sample SP obtained by the spectrum analysis unit 213 (corresponding to the first information Vd1 and fourth information Vd described below).

[0362] By changing the arrangement of the first tag Tg1 to the ninth tag Tg9, the output position of each piece of information can be changed. Also, by deleting any tag from the template Ds, the information corresponding to that tag can be removed from the report Rep. For example, if the sixth tag Tg is deleted from the template Ds, the information Vd10 indicating the slope θ will be removed from the report Rep.

[0363] <Specific example of control flow> FIG. 31 is a flowchart illustrating the basic operation of the analytical observation device A. FIG. 32 is a flowchart illustrating the procedure for calculating the correction amount D1 for optical axis misalignment, and FIG. 33 is a flowchart illustrating the procedure for calculating the correction amount D2 for field of view misalignment. FIG. 34 is a flowchart illustrating the procedure for correcting optical axis misalignment and field of view misalignment. FIG. 35 is a flowchart illustrating the procedure for setting illumination conditions by the illumination setting unit 216. FIGS. 36A to 36C are flowcharts illustrating various processes by the analytical observation device A. FIG. 37 is a flowchart illustrating the procedure for performing depth stacking.

[0364] 31, in the second mode, a search for an analysis target is executed by the observation optical system 9. In this step S1, based on an operational input by the user, the control unit 21 searches for a portion (analysis target) to be analyzed by the analysis optical system 7 among the portions of the sample SP while adjusting conditions such as the exposure time of the second camera 93, the illumination light guided by the optical fiber cable C3, and the brightness of the live image Pl and navigation image Pn generated by the second camera 93.

[0365] The adjustment of the exposure time of the second camera 93 and the adjustment of the brightness of the illumination light can also be configured to be performed automatically by the control unit 21 based on the detection signal of the lens sensor Sw1, without requiring any operational input by the user.

[0366] In step S1, a screen such as that shown in Fig. 14 is displayed on the display unit 22. By referring to the live image Pl and navigation image Pn on the screen, the analysis target can be smoothly searched for. At this time, the live image Pl is dynamically updated by specifying a first analysis location Lo1 on the live image Pl or a second analysis location Lo2 on the navigation image Pn.

[0367] Furthermore, when the observation optical system 9 searches for an analysis target, the magnification factor of the magnification optical system 96 is changed as needed. As described above, changing the magnification factor can cause optical axis misalignment. Therefore, the control unit 21 corrects the optical misalignment based on the first correction amount D1 each time the magnification factor is changed. This allows the magnification factor to be changed without the user being aware of the effects of optical axis misalignment.

[0368] The calculation of the first correction amount D1 can be performed in advance at the timing of setting up the analytical observation device A. A specific example of the calculation procedure of the first correction amount D1 and the details of the correction procedure will be described later.

[0369] In the following step S2, the control unit 21 receives an instruction to switch from the second mode to the first mode based on an operation input by the user. This switching instruction is received by the UI control unit 215, for example, by a click operation on the icon Ic11 shown in Fig. 14. Note that when step S2 is executed, the operation of the slide mechanism 65 by the mode switching unit 211 has not yet been executed.

[0370] In the following step S3, an image of the sample SP is captured by the second camera 93. The image P generated in step S3 can be output as a pre-irradiation image Pb generated by the second camera 93 to a report Rep.

[0371] Next, in step S4, before the mode is switched, the illumination setting unit 216 sets the illumination conditions. The processing performed in step S4 is as shown in Fig. 35. That is, step S4 in Fig. 31 is made up of steps S401 to S410 in Fig. 35.

[0372] First, in step S401 of FIG. 35, the illumination setting unit 216 acquires each item that constitutes the current illumination conditions (illumination conditions being referred to in the second mode).

[0373] In the following step S402, the illumination setting unit 216 acquires items that can be used in the first mode from among the items that make up the illumination conditions to be referred to in the first mode.

[0374] In the following step S403, the illumination setting unit 216 compares each item of the current illumination conditions acquired in step S401 with the usable items acquired in step S402, and extracts items that are common to both.

[0375] In the following step S404, the lighting setting unit 216 determines whether or not a common item was extracted in step S403 (whether or not a common item exists), and if the determination is YES, the process proceeds to step S405, whereas if the determination is NO, the process proceeds to step S406.

[0376] In step S405, the illumination setting unit 216 reuses the current illumination conditions for the common items extracted in step S403 (items that can be used in both the first and second modes, such as the irradiation modes of the side illumination 84 and the second side illumination 95) among the illumination conditions consisting of multiple items. On the other hand, for items not extracted in step S403 (for example, setting items specific to the first mode related to the configuration of the analytical optical system 7), the illumination setting unit 216 reads the previously used settings, initial settings, etc. After completing the setting of each item, the illumination setting unit 216 advances the control process to step S39 and stores the illumination conditions for the first mode in at least one of the primary storage device 21b and the secondary storage device 21c.

[0377] On the other hand, in step S406, the illumination setting unit 216 determines whether or not the previously used settings exist, and if this determination is YES, the process proceeds to step S407, whereas if this determination is NO, the process proceeds to step S408. In step S407, the illumination setting unit 216 reads the previously used settings as the illumination conditions and proceeds to step S409, where the read illumination conditions are stored in at least one of the primary storage device 21b and the secondary storage device 21c as the illumination conditions for the first mode. Also, in step S408, the illumination setting unit 216 reads the initial settings as the illumination conditions and proceeds to step S409, where the read illumination conditions are stored in at least one of the primary storage device 21b and the secondary storage device 21c as the illumination conditions for the first mode.

[0378] In step S410 following step S409, the illumination control unit 217 turns off the illumination for observation (the second coaxial illumination 94 or the second lateral illumination 95) and ends the flow shown in Fig. 35. Thereafter, the control process proceeds from step S4 to step S5 in Fig. 31.

[0379] In step S5, the mode switching unit 211 activates the slide mechanism 65 to slide the observation optical system 9 and the analysis optical system 7 together, thereby switching from the second mode to the first mode.

[0380] When switching to the first mode is complete, the image P generated by the first camera 81 is displayed as a live image Pl on the display unit 22, instead of the image P generated by the second camera 93. The navigation image Pn can also be replaced with the image P generated by the first camera 81, similar to the live image Pl. In the first mode, a display screen similar to that in the second mode, as exemplified in FIG. 14, is also provided to the user.

[0381] In the first mode, the user designates the irradiation position of the laser light with reference to the live image Pl generated by the first camera 81. This designation is accepted by the UI control unit 215 and is used in processing by the spectrum acquisition unit 212.

[0382] Furthermore, switching from the second mode to the first mode causes a misalignment of the field of view, as described above, so that the control unit 21 corrects the misalignment of the field of view based on the second correction amount D2 every time the mode is switched from the second mode to the first mode. This allows the user to switch from observation using the second camera 93 to observation using the first camera 81 without feeling the effects of the misalignment of the field of view.

[0383] The calculation of the second correction amount D2 can be performed in advance at the timing of setting up the analytical observation device A. A specific example of the calculation procedure of the second correction amount D2 and the details of the correction procedure will be described later.

[0384] In the following step S6, after the mode switching is completed, illumination control is performed by illumination control unit 217, and component analysis of sample SP is performed by spectrum acquisition unit 212 and spectrum analysis unit 213. The processing performed in step S6 is as shown in Figures 36A, 36B, and 36C. That is, step S6 in Figure 31 is made up of steps S601 to S607 in Figure 36A and steps S608 to S615 in Figure 36B.

[0385] First, in step S601, the illumination control unit 217 reads the illumination conditions set by the illumination setting unit 216 from the primary storage device 21b or the secondary storage device 21c. In the following step S602, the illumination control unit 217 turns on the analysis illumination (coaxial illumination 79 or lateral illumination 84) so ​​as to reflect the illumination conditions read in step S601. As a result, each control parameter related to the analysis illumination, such as the exposure time of the first camera 81 and the amount of illumination light emitted from the LED light source 79a, reproduces the control parameters in the second mode as much as possible.

[0386] In this embodiment, the reflective objective lens 74 for component analysis has a shallower depth of field during observation than the objective lens 92 for observation. Therefore, in step S603, which follows step S602, the illumination control unit 217 may perform autofocus at each point in the second image data I2 to generate an all-in-focus image. Specifically, in step S603, the processing shown in FIG. 37 is performed, for example. Note that in step S603, the processing unit 21a may receive a command to generate an all-in-focus image, and generate the all-in-focus image only when the processing unit 21a receives a command to generate the all-in-focus image. By configuring the processing unit 21a to generate the all-in-focus image only when required by the user, processing efficiency can be improved.

[0387] Specifically, in step S651 of Fig. 37, the processing unit 21a receives an instruction to combine all-in-focus images. This instruction to combine images may be configured to be automatically output as soon as the control step proceeds to step S602.

[0388] In the following step S652, the processing unit 21a sets an upper limit position (see height position zn in FIG. 18) and a lower limit position (see height position z1 in FIG. 18) of the mounting table 5 or the head unit 6. The upper limit position and the lower limit position may be set automatically by the processing unit 21a, or may read values ​​input in advance by the user.

[0389] In the following step S653, the processing unit 21a moves the mounting table 5 or the head unit 6 in the Z direction within a range between the upper limit position and the lower limit position described above, and generates an image P by the first camera 81 at each Z position (Z coordinate).

[0390] In the following step S654, the processing unit 21a generates an all-in-focus image Pc as shown in FIG. 18 based on the image P generated at each Z position. The generated all-in-focus image Pc is displayed on the display unit 22 as at least one of a live image Pl and a navigation image Pn. Here, if it has been set in advance to acquire the three-dimensional shape of the sample SP, the control process proceeds from step S654 to step S655. In step S655, height data of the surface of the sample SP is calculated based on the image P generated at each Z position. The calculated height data can be displayed on the display unit 22 as the three-dimensional shape of the sample SP.

[0391] When the processing shown in step S654 is completed, or when the processing shown in step S655 that follows step S654 according to the pre-settings is completed, the control step returns from the flow shown in FIG. 37 to the flow shown in FIG. 36A, and proceeds from step S603 to step S604.

[0392] In step S604, the UI control unit 215 accepts the designation of first analysis points Lo1 as analysis positions on the live image Pl. At that time, as exemplified in Fig. 14, the UI control unit 215 superimposes and displays information indicating the position of each first analysis point Lo1 (intersection X) on the navigation image Pn.

[0393] In the next step S605, the UI control unit 215 determines whether or not the acceptance of the analysis position has been completed, and if the judgment is YES, the control process proceeds to step S606, whereas if the judgment is NO, the control process returns to step S604. This judgment can be made, for example, based on whether or not the icon IC12 in FIG. 14 has accepted a click operation.

[0394] In the next step S606, the UI control unit 215 determines whether or not a start trigger signal has been received, and if the determination is YES, the control process proceeds to step S607, whereas if the determination is NO, the determination of step S606 is repeated. This determination can be made based on, for example, whether or not the icon IC24 in FIG. 17 has received a click operation.

[0395] In the following step S607, the imaging control unit 214 stores the coordinates (e.g., the relative coordinates of the reflective objective lens 73 with respect to the mounting table 5) at the start of the analysis (more specifically, at the time the start trigger signal is received) in the primary memory device 21b or the secondary memory device 21c and temporarily saves them.

[0396] Next, in step S608 shown in Fig. 36B, the imaging control unit 214 generates an entire pre-irradiation image Pb as described using the upper diagram on the left side of Fig. 20. If there is one first analysis point Lo1, step S608 may be omitted.

[0397] In the next step S609, the imaging control unit 214 acquires coordinates corresponding to one of the first analysis points Lo1 and moves the head unit 6 to those coordinates. Instead of moving the head unit 6, the mounting table 5 may be moved. When the movement of the head unit 6 or the mounting table 5 is completed, the coordinates intersect with the analysis optical axis Aa.

[0398] In the following step S610, the imaging control unit 214 generates a pre-irradiation image Pb corresponding to the one first analysis point Lo1, as described using the central diagram on the left side of FIG.

[0399] In the following step S611, the illumination control unit 217 stores the illumination state (illumination conditions at the timing immediately before emission of the laser light) at that time (the time when the pre-irradiation image Pb is generated in step S610) in the primary storage device 21 b or the secondary storage device 21 c. In the following step S612, the illumination control unit 217 turns off the illumination for analysis (coaxial illumination 79 or lateral illumination 84).

[0400] Then, in step S613, the spectrum acquisition unit 212 irradiates the laser light onto the first analysis point Lo1, which serves as the analysis position. In this step S613, the first and second detectors 77A and 77B receive light (secondary electromagnetic waves) emitted as a result of the sample SP becoming plasma. At this time, the light reception timings of the first and second detectors 77A and 77B are set to be synchronized with the emission timings of the laser light.

[0401] In the following step S614, the spectrum acquisition unit 212 acquires an intensity distribution spectrum in synchronization with the emission timing of the laser light. During the period from step S614 to step S618 (described later), the spectrum analysis unit 213 performs component analysis of the sample SP at the one first analysis location Lo1. The result of the component analysis is stored in the primary storage device 21b or the secondary storage device 21c in association with the coordinates of the one first analysis location Lo1.

[0402] In the following step S615, the illumination control unit 217 turns on the illumination for analysis (the coaxial illumination 79 or the lateral illumination 84). Then, in step S616 of Fig. 36C, the illumination control unit 217 reads the illumination conditions stored in the primary storage device 21b or the secondary storage device 21c, and controls the illumination for analysis to reflect the illumination conditions. This reproduces the lighting state immediately before the emission of the laser light.

[0403] In the following step S617, the imaging control unit 214 generates a post-irradiation image Pa corresponding to the one first analysis point Lo1, as described using the lower diagram on the left side of FIG.

[0404] In the following step S618, the spectrum acquisition unit 212 determines whether or not component analysis at all first analysis locations Lo1 (in other words, emission of laser light to all first analysis locations Lo1) is complete, and if the determination is YES, the control process proceeds to step S619, whereas if the determination is NO, the control process returns to step S609 in Fig. 36B. This determination can be made not only when the positions of the first analysis locations Lo1 are different from each other, but also when the positions of the first analysis locations Lo1 are the same.

[0405] In addition, if height data of the sample SP has been acquired, the relative height position of the analysis unit 62 with respect to the mounting table 5 may be adjusted for each first analysis location Lo1, and laser light may be irradiated with the focal position optimized at each first analysis location Lo1.

[0406] In the following step S619, the imaging control unit 214 moves the head unit 6 to the coordinates saved in step S607. Instead of moving the head unit 6, the mounting table 5 may be moved. When the movement of the head unit 6 or the mounting table 5 is completed, the saved coordinates intersect with the analysis optical axis Aa.

[0407] In the following step S620, the imaging control unit 214 generates an entire post-irradiation image Pa as described using the lower right diagram in Fig. 20. If there is one first analysis point Lo1, step S620 may be omitted.

[0408] In the following step S621, the imaging control unit 214 retracts at least one of the mounting table 5 and the head unit 6 along the Z direction so as to move away from the head unit 6, particularly the analyzing housing .

[0409] In the following step S622, the imaging control unit 214 activates the overhead camera 48 to generate an overhead image Pf. Note that in step S622, the processing unit 21a may receive an instruction as to whether or not to generate the overhead image Pf, and may generate the overhead image Pf only when an instruction to generate the overhead image Pf is received. By configuring the generation of the overhead image Pf to be executed only when required by the user, it is possible to improve the efficiency of the processing.

[0410] During the period from step S614 to step S622, the UI control unit 215 accepts various instructions in the dialogues W3 and W4 to associate the pre-irradiation image Pa, the post-irradiation image Pb, and the overhead image Pf with the results of the component analysis. This association may be performed for each first analysis location Lo1, or may be performed collectively for multiple first analysis locations Lo1.

[0411] Thereafter, the processing unit 21a ends the flow shown in Figures 36A to 36C, and advances the control process from step S6 to step S7 in Figure 31. Then, in step S7, the report output unit 218 outputs the live image Pl and the like at each position set on the template Ds, thereby outputting the report Rep as electronic data.

[0412] - Correcting optical axis and field of view misalignment - Fig. 32 is a flowchart illustrating a procedure for calculating the correction amount for optical axis misalignment, Fig. 33 is a flowchart illustrating a procedure for calculating the correction amount for field of view misalignment, and Fig. 34 is a flowchart illustrating a procedure for correcting optical axis misalignment and field of view misalignment.

[0413] 32, the UI control unit 215 receives an instruction to calculate the amount of correction for the optical axis misalignment. In the following step S12, the magnification of the magnifying optical system 96 is set to the reference magnification.

[0414] In the following step S13, for example, as shown in the upper diagram of FIG. 26, the mounting table 5 or the head unit 6 is moved so that the reference marker Ma falls within the field of view of the second camera 93.

[0415] In the following step S14, the focus of the observation optical system 9 is adjusted.

[0416] In the next step S15, the second camera 93 detects the reference marker Ma. This detection can be performed based on whether or not a specific part of the reference marker Ma (for example, if the reference marker Ma is a triangle, this can be a vertex, or if the reference marker Ma is an arrow-shaped figure, this can be the tip of the arrow) is included in the image P generated by the second camera 93. The coordinates of the detected specific part are stored in the primary storage device 21b or the like.

[0417] In the following step S16, the magnification of the magnifying optical system 96 is set to a predetermined magnification on the low magnification side.

[0418] In the following step S17, detection of the reference marker Ma is again executed by the second camera 93. As in step S15, the coordinates of the detected specific part are stored in the primary storage device 21b or the like.

[0419] In the following step S18, the difference between the detected position (coordinates of a specific part) of the reference marker Ma detected in step S15 and the detected position of the reference marker Ma detected in step S17 is detected. This difference is stored in the primary storage device 21b or the like as the above-mentioned first position difference ΔD1.

[0420] In the following step S19, the correction amount for optical axis misalignment at each magnification magnification that can be achieved by the magnifying optical system 96 is calculated based on the first position difference ΔD1 obtained in step S18 and the difference (magnification difference) between the reference magnification and the predetermined magnification used in the calculation. The correction amount calculated in this way may be continuously stored in the primary storage device 21b, the secondary storage device 21c, or the like, and read out each time the lens sensor Sw1, or the like, detects an adjustment of the magnification magnification by the magnifying optical system 96. The imaging control unit 214 may correct the optical axis misalignment each time based on the correction amount read out in this way.

[0421] 33, the UI control unit 215 receives an instruction to calculate the correction amount for the field of view shift. In the following step S32, the mode switching unit 211 sets the second mode, and the magnification optical system 96 changes the magnification of the second camera 93 to the reference magnification.

[0422] In the following step S33, the mounting table 5 or the head unit 6 is moved so that the reference marker Ma falls within the field of view of the second camera 93.

[0423] In the following step S34, the focus of the observation optical system 9 is adjusted.

[0424] In the next step S35, detection of the reference marker Ma is performed by the second camera 93. This detection can be performed based on whether or not a specific part of the reference marker Ma is included in the image P generated by the second camera 93. The coordinates of the detected specific part are stored in the primary storage device 21b or the like.

[0425] In the following step S36, the mode switching unit 211 changes from the second mode to the first mode, and causes the first camera 81 to capture an image (generate an image P).

[0426] In the following step S37, the mounting table 5 or the head unit 6 is moved so that the reference marker Ma falls within the field of view of the first camera 81.

[0427] In the following step S38, the focus of the analytical optical system 7, particularly the first camera 81, is adjusted.

[0428] In the following step S39, detection of the reference marker Ma is executed by the first camera 81. As in step S35, the coordinates of the detected specific part are stored in the primary storage device 21b or the like.

[0429] In the following step S40, the difference between the detected position of the reference marker Ma (coordinates of a specific part) detected in step S35 and the detected position of the reference marker Ma detected in step S39 is detected. This difference is stored in the primary storage device 21b or the like as the above-mentioned second position difference ΔD2. At the same time, the movement amount of the mounting table 5 in the X and Y directions executed to bring the reference marker Ma into the field of view and the movement amount of the mounting table 5 in the Z direction executed to adjust the focus of the first camera 81 or the like are continuously stored in the primary storage device 21b, the secondary storage device 21c, or the like in a state linked to the second position difference ΔD2.

[0430] When correcting the field of view deviation that occurs when switching from the second mode to the first mode, for example, a control process illustrated in Fig. 34 can be executed. This control process can be executed automatically or manually when switching to the first mode.

[0431] First, in step S51 of FIG. 34, generation (acquisition) of image P by second camera 93 in the second mode is executed.

[0432] In the following step S52, the magnification ratio (the third magnification ratio described above) of the observation optical system 9 set by the magnification optical system 96 is acquired based on, for example, the detection signal of the lens sensor Sw1.

[0433] In the next step S53, a position specification within the image P is accepted. The position specified here may be, for example, the analysis position X described with reference to Fig. 14. Alternatively, instead of accepting a position specification, the position of the intersection point Cp may be stored.

[0434] In the following step S54, mode switching unit 211 switches from the second mode to the first mode, and first camera 81 generates (acquires) image P. This switching causes the position specified in step S53 to change within image P.

[0435] In the next step S55, the correction amount for the optical axis deviation corresponding to the third magnification is read out. The correction amount for the optical axis deviation may be calculated in advance by the control process illustrated in FIG.

[0436] In the next step S56, the second position difference ΔD2 described above is acquired as the correction amount for the field of view deviation. The correction amount for the field of view deviation may be calculated in advance by the control process illustrated in FIG.

[0437] In the following step S57, the correction amount read out in step S55 and the correction amount read out in step S56 are added together to determine the movement amounts of the mounting table 5 in the X, Y, and Z directions.

[0438] In the following step S58, the mounting table 5 is moved in the X, Y, and Z directions based on the movement amounts in each direction determined in step S57, thereby eliminating any fluctuation in the position specified in step S53.

[0439] -Example of user interface- 38 to 44 are diagrams illustrating examples of display screens of the display unit 22. At any timing from step S614 in FIG. 36B to step S618 in FIG. 36C, the UI control unit 215 causes the display unit 22 to display, as shown in FIG. 38, first information Vd1 indicating a characteristic Ch of a substance thought to be contained in the sample SP, second information Vd2 indicating the type of the substance, and third information Vd3 indicating the hierarchical structure of the substance. The first information Vd1, second information Vd2, and third information Vd3 are all configured to be acquired by the spectrum analysis unit 213. For example, when the LIBS method is used as the analysis method, the characteristic Ch of the substance includes information that compiles a set of the constituent elements of the sample SP and the amounts (or content rates) of the constituent elements.

[0440] In the following description, "higher classification" refers to a general term for substances that are thought to be contained in the sample SP. Furthermore, "lower classification" refers to the type of substance that belongs to the higher classification. A higher classification can be configured to have at least one or more lower classifications. Furthermore, one or more intermediate classifications may be set up between the higher classification and the lower classification. These intermediate classifications represent multiple systems that belong to the higher classification.

[0441] 38, the first information Vd1 displays numerical data indicating that the sample SP contains iron, chromium, and nickel, and that the iron content is 74%, the chromium content is 17%, and the nickel content is 9%. Below the first information Vd1, a first icon Ic1 is displayed that accepts clicks or the like using the mouse 31. As will be described in detail later, by clicking the first icon Ic1 labeled "Detection Settings...", settings related to the processing performed by the spectrum analysis unit 213 can be changed.

[0442] Further below the first icon Ic1, a second icon Ic2 is displayed, which accepts clicks or other operations using the mouse 31. By operating the second icon Ic2 labeled "Spectrum," the display unit 22 can display fourth information Vd4 indicating the intensity distribution spectrum acquired by the spectrum acquisition unit 212 and the features Ch extracted from the intensity distribution spectrum, as shown in FIG. 40. In the illustrated example, dashed lines indicating the peak positions of a wavelength λ1 corresponding to iron, a wavelength λ2 corresponding to chromium, and a wavelength λ3 corresponding to nickel are superimposed on the intensity distribution spectrum. It can be seen that the intensity distribution spectrum has peaks at each wavelength.

[0443] Returning to FIG. 38, to the left of the first information Vd1, the second information Vd2 indicates that the higher-level material classification is "stainless steel." Below the second information Vd2, the third information Vd3 displays the intermediate classifications belonging to the higher-level classifications, in the order "austenitic," "precipitation hardening," and "austenitic." This order corresponds to the order of accuracy of the lower-level classifications belonging to each intermediate classification. In this example, it is suggested that the austenitic classification includes both lower-level classifications with higher accuracy than the precipitation hardening classifications and lower-level classifications with lower accuracy than the precipitation hardening classifications. In the illustrated example, the lower-level classifications with relatively higher accuracy include SUS302, etc., the intermediate classifications include SUS631, etc., and the lower-level classifications with relatively lower accuracy include SUS304, SUS321, SUS305, etc. (not shown).

[0444] To find out more about the subclassification, the user simply clicks on the fifth icon Ic5 displayed to the left of the intermediate classification such as "austenitic." Although not shown in detail, the fifth icon Ic5 belongs to the intermediate classification and is an icon for switching between displaying and hiding the "second intermediate classification" to which the subclassification belongs, and is displayed by the UI control unit 215 on the display unit 22, particularly in the display field for the third information Vd3.

[0445] The second intermediate classification is a classification obtained by subdividing the intermediate classification. By further subdividing this second intermediate classification, the lower classification in this example can be obtained. Note that the second intermediate classification is not essential. Also, a third intermediate classification belonging to the second intermediate classification may be set, or a further intermediate classification belonging to the third intermediate classification may be set. The lower classification may be associated with the lowest level of the intermediate classification set in this way.

[0446] Here, by operating the fifth icon Ic5 located to the left of "Austenitic" located at the top in Fig. 38, the second intermediate classification belonging to "Austenitic" can be displayed on the display unit 22, particularly in the display field for the third information Vd3. Although not shown in the figures, the second intermediate classification can be displayed as, for example, "SUS300 series."

[0447] In addition, below the third information Vd3, a third icon Ic3 is displayed, which accepts click operations, etc., using the mouse 31. By operating the third icon Ic3, which is labeled "Display Description," text data describing the substances contained in the sample SP can be displayed on the display unit 22.

[0448] Here, Fig. 39 shows an example of the display screen when the third icon Ic3 is operated from the state shown in Fig. 38. This display screen shows fifth information Vd5 indicating text data formed by combining one or more of text data describing the higher classification of substances contained in the sample SP, text data describing the intermediate classification thereof, and text data describing the lower classification thereof.

[0449] Furthermore, a fourth icon Ic4 that accepts click operations, etc., using the mouse 31 is displayed to the right of the third icon Ic3. When an operation on the fourth icon Ic4 is accepted, the UI control unit 215 can display an interface for selecting classification standards from higher to lower classifications on the display unit 22. Classification standards that can be selected via this interface can include, for example, one or more of the Japanese Industrial Standards (JIS), standards based on the International Organization for Standardization (ISO), EN standards established by the European Committee for Standardization, standards established by the American National Standards Institute (ANSI), and standards independently set by the user. Alternatively, commercial standards or similar databases can be used.

[0450] For example, when the "JIS" standard is selected, as shown in FIG. 38 and other figures, identification information indicating that "JIS" has been selected can be superimposed on the fourth icon Ic4.

[0451] Returning to the display screen illustrated in FIG. 40, the UI control unit 215 according to this embodiment can extract and display spectra near the peaks of each element, as shown in FIG. 41, by accepting an operation input for the ninth icon Ic9 located near the intensity distribution spectrum. In the illustrated example, only the spectrum Vd5 corresponding to iron and the spectrum Vd6 corresponding to nickel are displayed. However, a spectrum corresponding to chromium, which was also detected as an element contained in the sample SP, may also be displayed. Furthermore, in addition to these elements, spectra indicating elements not detected as elements contained in the sample SP (elements other than iron, nickel, and chromium) may also be displayed. Since each element generally has multiple peaks, spectra indicating these multiple peaks may be displayed side by side.

[0452] In addition, when the UI control unit 215 receives an operation input for the sixth icon Ic6 labeled "Back" on the display screen illustrated in FIG. 41, it can return the display screen illustrated in FIG. 41 to the display screen illustrated in FIG. 40.

[0453] Furthermore, the UI control unit 215 can accept an operation to select a spectrum extracted for each element, thereby enlarging and displaying a portion of the fourth information Vd4 corresponding to the selected spectrum. For example, as shown in Fig. 42, when a spectrum Vd5 corresponding to iron is selected, the UI control unit 215 can display seventh information Vd7, which is an enlarged view of the intensity distribution near iron, instead of the fourth information Vd4.

[0454] 38, when the UI control unit 215 receives an operation input for the first icon Ic1 labeled "Detection settings...", it causes the display unit 22 to display a dialog W5 as illustrated in Fig. 43. As illustrated, this dialog W5 can display eighth information Vd8 displaying a periodic table (in the illustrated example, only a part of the periodic table is shown), a seventh icon Ic7 labeled "Select from list", and an eighth icon Ic8 labeled "Recalculate".

[0455] Here, the UI control unit 215 is configured to accept operational input for each element in the periodic table displayed as the eighth information Vd. Based on the operational input for each element, as illustrated in FIG. 43, each element can be classified into one of three categories: "Standard," in which the element name is displayed in black, "Required," in which the element name is displayed in white, and "Excluded," in which polka dots are superimposed on the element name. When an operational input is made to the eighth icon Ic8 after the classification for each element has been set, the UI control unit 215, which has accepted the operational input, recalculates the first information Vd1 together with the spectrum analysis unit 213 and resets the peak positions (dashed lines corresponding to wavelengths λ1 to λ3) superimposed on the intensity distribution spectrum by dashed lines.

[0456] Of these, elements classified as "standard" are extracted as detected elements by the spectrum analysis unit 213 only when a peak is found in the intensity distribution spectrum. Elements extracted as detected elements are displayed in the first information Vd1, etc., like iron, nickel, and chromium in FIG.

[0457] Furthermore, elements classified as "essential" are extracted as detected elements regardless of whether or not a peak is present in the intensity distribution spectrum. In the example shown in FIG. 44, manganese is classified as "essential." In this case, the UI control unit 215 can superimpose the position of the wavelength λ4 corresponding to manganese on the fourth information Vd4. For example, if the sample SP does not contain manganese, a dashed line indicating the wavelength λ4 is superimposed on a position where no peak appears in the intensity distribution spectrum, as shown in information Vd4' in FIG. 44.

[0458] Furthermore, elements classified as "excluded" are excluded from the detected elements regardless of whether or not a peak exists in the intensity distribution spectrum. In the example shown in FIG. 44, nickel is classified as "excluded." In this case, unlike the fourth information Vd4 illustrated in FIG. 40, the dashed line indicating wavelength λ3 is not displayed at the peak position corresponding to nickel, regardless of the magnitude of the intensity distribution spectrum. Although not shown, if nickel is classified as "excluded," nickel is also not displayed in the first information Vd1 shown in FIG. 39, etc.

[0459] Furthermore, when the mouse cursor is placed over one element in the eighth information Vd8, the UI control unit 215 can also display the peak position corresponding to that element superimposed on the intensity distribution spectrum.

[0460] Furthermore, when an operation input to the seventh icon Ic7 is received, the UI control unit 215 displays a list (not shown) in which each element is itemized on the display unit 22. In this case, each element in the list can be individually classified as "standard," "essential," or "excluded," as described above.

[0461] <Features that contribute to improved usability> As described above, the processing unit 21a according to this embodiment generates a pre-irradiation image Pb via the first camera 81 immediately before the sample SP is irradiated with laser light, as illustrated in, for example, Figures 14 and 20, and steps S608 and S610 in Figure 36B. At this time, elements for observing the sample SP, such as the first camera 81 and the second camera 93, and elements for analyzing the sample SP, such as the electromagnetic wave emitter 71, are controlled by the common processing unit 21a, so that the observation and analysis of the sample SP can be performed seamlessly, and the effort required to image the analysis location X can be saved. As a result, the usability of the analytical observation device A can be improved.

[0462] 19 and 21, and steps S617 and S620 in FIG. 36C, the processing unit 21a generates a post-irradiation image Pa via the first camera 81 at the timing after the sample SP is irradiated with laser light. For example, by comparing the pre-irradiation image Pb with the post-irradiation image Pa, the user can grasp the changes that have occurred in the sample SP due to laser-induced breakdown spectroscopy. This advantageously improves the usability of the analytical observation device A. Furthermore, since the post-irradiation image Pa can be generated seamlessly, similar to the generation of the pre-irradiation image Pb, the effort required for its generation can be reduced. As a result, this is advantageous in improving the usability of the analytical observation device A.

[0463] 14 and 19, the processing unit 21a generates two types of images P with different magnifications. For example, of the two types of images P, the low-magnification image is used for user navigation, while the high-magnification image is used to specify the analysis location X, thereby further improving the usability of the analytical observation device A.

[0464] 24, the UI control unit 215 provides the user with a first user interface W3 for associating at least one of the two types of images with the analysis results. This makes it possible to meet specific needs, such as wanting to store low-magnification images but not high-magnification images. This is effective in improving the usability of the analytical observation device A.

[0465] 24, the UI control unit 215 provides the user with icons Ic51 and Ic52 for updating images. This makes it possible to meet specific needs, such as replacing a pre-irradiation image Pb with a post-irradiation image Pa at a low magnification. This is effective in improving the usability of the analytical observation device A.

[0466] 29 and 30, the UI control unit 215 outputs a report Rep displaying a pre-irradiation image Pb and a post-irradiation image Pa obtained during the component analysis via the report output unit 218. This allows the user to understand the irradiation position of the laser light and damage caused by the irradiation of the laser light. This is effective in improving the usability of the analytical observation device A.

[0467] 15 and 16, the analytical observation device A can move the mounting table 5 so as to capture an image of a second analysis point Lo2 specified on a navigation image Pn as a low-magnification image, or can move the mounting table 5 so as to bring a first analysis point Lo1 specified on a live image Pl as a high-magnification image closer to the center of the field of view. This makes it possible to specify the irradiation position of the laser light easily and precisely, which is advantageous in improving the usability of the analytical observation device A.

[0468] 15 and 16, the analytical observation device A regenerates the live image Pl every time the mounting table 5 is moved in accordance with the designation of the first analysis point Lo1 or the second analysis point Lo2. This makes it possible to more appropriately designate the irradiation position of the laser light, which is advantageous in improving the usability of the analytical observation device A.

[0469] 16, the analytical observation apparatus A repeatedly receives the designation of the first analysis points Lo1 and Lo1', and each time it receives the designation, it moves the mounting table 5 and regenerates a high-magnification image. This allows the irradiation position of the laser light to be specified more precisely, which is advantageous in improving the usability of the analytical observation apparatus A.

[0470] 18, the imaging control unit 214 generates an all-in-focus image Pc of the sample SP, which makes it possible to generate a live image Pl that is focused over substantially the entire field of view. This is effective in improving the usability of the analytical observation device A.

[0471] 20, laser light can be emitted to each of the multiple analysis points X1 and X2, and component analysis can be performed at each of the analysis points X1 and X2. This is effective in improving the usability of the analytical observation device A.

[0472] 14, by superimposing position information Ic on the navigation image Pn, the user can grasp the relative positional relationship between the live image Pl and the navigation image Pn via the position information Ic. In addition, by superimposing information X indicating the position of the first analysis point Lo1 on the live image Pl on the navigation image Pn, the user can grasp the irradiation position of the laser light as the primary electromagnetic wave via the information X. This makes it possible to improve the usability of the analytical observation device A.

[0473] 26 and 31, the first position difference D1 and the magnification difference can be used to calculate the positional fluctuation of the field of view center that accompanies changes in the magnification. This makes it possible to move the mounting table 5 so as to correct the positional fluctuation of the field of view center, and to update the position information Ic in accordance with this positional fluctuation. This is effective in improving the usability of the analytical observation apparatus A.

[0474] Other Embodiments In the above embodiment, the second camera 93 in the observation optical system 9 is exemplified as the imaging unit, and the first camera 81 in the analysis optical system 7 is exemplified as the second imaging unit, but the present disclosure is not limited to such a configuration. The first camera 81 may be used as the imaging unit, and the second camera 93 may be used as the second imaging unit.

[0475] For example, if the first camera 81 is considered to be an imaging unit, the generation of the pre-irradiation image Pb, the post-irradiation image Pa, the live image Pl, and the navigation image Pn will be performed by the first camera 81 as an imaging unit, as already explained.

[0476] Furthermore, if the first camera 81 is considered to be an imaging unit, the magnification change unit according to the present disclosure changes the magnification of the first camera 81. In other words, the magnification change unit according to the present disclosure may be capable of changing the magnification of the sample SP by at least one of the first camera 81 and the second camera 93. [Explanation of symbols]

[0477] A. Analysis and observation equipment SP sample (analyte) 1 Optical Assembly 4 Stages 41 Base 42 Stand 47 Head drive unit (electric drive unit) 5. Mounting table 53 Mounting table drive unit (electric drive unit) 6 Head 62 Analysis Units 63 Observation Unit 7 Analytical optical system 71 Electromagnetic wave emitting part (laser light emitting part) 74 Reflective Objective Lens (Collecting Head) 77A First detection unit (detection unit) 77B Second detection unit (detection unit) 81 First camera (second imaging unit) 9 Observation optical system 93 Second camera (imaging unit) 96 Magnification optical system (magnification change part) 2 Controller body 21a Processing section 212 Spectrum acquisition unit (component analysis unit) 213 Spectral Analysis Unit (Component Analysis Unit) 214 Imaging control unit 215 User Interface Control Unit 22 Display section IC location information Lo1 First analysis point Lo2 Second analysis point Ma fiducial marker P Image PC all-focus image Pl Live image (high magnification image) Pn Navigation image (low magnification image) Image before Pb irradiation Pa post-irradiation image

Claims

1. A laser-induced breakdown spectroscopy device that performs component analysis of an analyte by using laser-induced breakdown spectroscopy, a laser light emitting unit that emits laser light to the object to be analyzed; a collection head configured to collect plasma light generated in the object to be analyzed when the object to be analyzed is irradiated with the laser light emitted from the laser light emitting unit; a detector that receives the plasma light generated in the object to be analyzed and collected by the collection head, and generates an intensity distribution spectrum that is an intensity distribution for each wavelength of the plasma light; an illumination unit that irradiates the analysis target with illumination light; an imaging unit that receives light reflected by the object to be analyzed and detects the amount of the received reflected light; a processing unit including an imaging control unit that generates an image of the object to be analyzed based on the amount of received reflected light detected by the imaging unit; a component analysis unit that acquires the intensity distribution spectrum generated by the detector by receiving a start trigger signal that starts component analysis of the object to be analyzed, and performs component analysis of the object to be analyzed based on the intensity distribution spectrum; and an illumination control unit that controls the operation of the illumination unit, In response to reception of the start trigger signal, the processing unit: generating a pre-irradiation image, which is the image before the analysis object is irradiated with the laser light, by controlling the imaging unit while the illumination unit is turned on; After generating the pre-irradiation image, the illumination unit is turned off; controlling the imaging unit and then controlling the laser light emitting unit to emit the laser light to the analysis object while the illumination unit is turned off; The plasma light generated in the object to be analyzed by the emission of the laser light and collected by the collection head is received, and an intensity distribution spectrum, which is an intensity distribution for each wavelength of the plasma light generated by the detector, is obtained. A laser-induced breakdown spectroscopy apparatus characterized by:

2. 2. The laser-induced breakdown spectroscopy apparatus according to claim 1, The processing unit generates an image in which the analysis result is superimposed on the pre-irradiation image, and causes the display unit to display the image. A laser-induced breakdown spectroscopy apparatus characterized by:

3. 3. The laser-induced breakdown spectroscopy apparatus according to claim 1, The processing unit controls the laser light emitting unit to emit the laser light to the analysis target, and then controls the imaging unit to generate a post-irradiation image, which is the image after the analysis target is irradiated with the laser light. A laser-induced breakdown spectroscopy apparatus characterized by:

4. 4. The laser-induced breakdown spectroscopy apparatus according to claim 3, the processing unit includes an illumination setting unit that sets illumination conditions that are control parameters related to the illumination unit, a storage unit that stores the lighting conditions of the lighting unit set by the lighting setting unit, The processing unit further performs, in response to reception of the start trigger signal, generating a pre-irradiation image, which is an image of the analysis object before the laser light is irradiated, by controlling the imaging unit while the illumination unit is turned on; After generating the pre-irradiation image, the illumination unit is temporarily turned off in a state in which the illumination conditions of the illumination unit set by the illumination setting unit are stored in the storage unit; controlling the imaging unit and then controlling the laser light emitting unit to emit the laser light to the analysis object while the illumination unit is turned off; After the irradiation of the laser light, the illumination unit is turned off, and the illumination unit is turned on based on the illumination conditions read from the storage unit, thereby reproducing the lighting state when the pre-irradiation image was generated; By controlling the imaging unit, a post-irradiation image is generated, which is the image after the analysis object is irradiated with the laser light while the illumination unit is turned on. A laser-induced breakdown spectroscopy apparatus characterized by:

5. 3. The laser-induced breakdown spectroscopy apparatus according to claim 1, the illumination unit includes a coaxial illumination unit that irradiates the analysis subject with illumination light via an optical path that is coaxial with an optical path of the laser light, and a lateral illumination unit that irradiates the analysis subject with illumination light from a direction that is inclined with respect to the optical axis of the laser light, In response to reception of the start trigger signal, the processing unit: generating a pre-irradiation image, which is an image of the analysis object before the laser light is irradiated, by controlling the imaging unit while at least one of the coaxial illumination and the lateral illumination is turned on; After generating the pre-illumination image, the coaxial illumination and the lateral illumination are turned off; by controlling the laser light emitting unit after controlling the imaging unit, the laser light is emitted to the analysis object in a state where the coaxial illumination and the lateral illumination are turned off; The plasma light generated in the object to be analyzed by the emission of the laser light and collected by the collection head is received, and an intensity distribution spectrum, which is an intensity distribution for each wavelength of the plasma light generated by the detector, is obtained. A laser-induced breakdown spectroscopy apparatus characterized by:

6. 6. The laser-induced breakdown spectroscopy apparatus according to claim 5, the processing unit includes an illumination setting unit that sets illumination conditions that are control parameters related to the coaxial illumination and the lateral illumination, a storage unit that stores the lighting conditions of the lighting unit set by the lighting setting unit, The processing unit further performs, in response to reception of the start trigger signal, generating a pre-irradiation image, which is an image of the analysis object before the laser light is irradiated, by controlling the imaging unit while at least one of the coaxial illumination and the lateral illumination is turned on; After generating the pre-irradiation image, the coaxial illumination and the lateral illumination are temporarily turned off in a state in which the illumination conditions of the illumination unit set by the illumination setting unit are stored in the storage unit; controlling the imaging unit and then controlling the laser light emitting unit to emit the laser light to the analysis object in a state where the coaxial illumination and the lateral illumination are turned off; after the irradiation of the laser light, turning off the coaxial illumination and the lateral illumination is resumed, and at least one of the coaxial illumination and the lateral illumination is turned on based on the illumination conditions read out from the storage unit, thereby reproducing the illumination state when the pre-irradiation image was generated; By controlling the imaging unit, a post-irradiation image is generated, which is an image after the analysis object is irradiated with the laser light while at least one of the coaxial illumination and the lateral illumination is turned on. A laser-induced breakdown spectroscopy apparatus characterized by:

7. 7. The laser-induced breakdown spectroscopy apparatus according to claim 1, a mounting table on which the object to be analyzed is placed; a second imaging unit that receives light reflected by the object to be analyzed placed on the placement table and detects the amount of the received reflected light; a mode switching unit that switches between the imaging unit and the second imaging unit, The second imaging unit is set to have a magnification ratio of the object to be analyzed that is relatively higher than that of the imaging unit, The imaging control unit When the mode switching unit has switched to the imaging unit, a low-magnification image having a relatively low magnification is generated; In a state where the mode switching unit has switched to the second imaging unit, a high-magnification image having a relatively high magnification is generated. A laser-induced breakdown spectroscopy apparatus characterized by:

8. 8. The laser-induced breakdown spectroscopy apparatus according to claim 7, an observation housing that houses the imaging unit; an analysis housing configured separately from the observation housing and accommodating the second imaging unit and the detector, The mode switching unit switches between the imaging unit and the second imaging unit by moving the observation housing and the analysis housing relative to the stage. A laser-induced breakdown spectroscopy apparatus characterized by:

9. 7. The laser-induced breakdown spectroscopy apparatus according to claim 1, a mounting table on which the object to be analyzed is placed; a second imaging unit that receives light reflected by the object to be analyzed placed on the placement table and detects the amount of the received reflected light; a magnification change unit that can change the magnification of the object to be analyzed by at least one of the imaging unit and the second imaging unit, The processing unit The magnification change unit is adjusted to change the magnification, and the imaging unit detects the amount of received reflected light at each magnification, thereby obtaining the pre-irradiation image of the analysis object, a low-magnification image having a relatively low magnification; and generating a high-magnification image having a relatively high magnification. A laser-induced breakdown spectroscopy apparatus characterized by:

10. 10. The laser-induced breakdown spectroscopy apparatus according to claim 7, The processing unit the low-magnification image; The high-magnification image; The analysis results; a first user interface that accepts an operation input for storing at least one of the low-magnification image and the high-magnification image in association with the analysis result; and A laser-induced breakdown spectroscopy apparatus characterized by:

11. 11. The laser-induced breakdown spectroscopy apparatus according to claim 10, The processing unit displaying a display screen for updating the at least one image associated with the analysis result on the display unit; receiving a save instruction to save the image displayed on the display unit and the analysis results associated with the image in a storage unit; The display screen includes: the at least one image; and a second user interface that accepts an operation input for updating the at least one image; A laser-induced breakdown spectroscopy apparatus characterized by:

12. 12. The laser-induced breakdown spectroscopy apparatus according to claim 10 or 11, a report output unit that outputs a report displaying at least one of the low-magnification image, the high-magnification image, and the analysis result at each position on a template that is assigned to output the low-magnification image, the high-magnification image, and the analysis result; The processing unit causes the image associated by the first user interface to be displayed on the report when the report output unit outputs the report. A laser-induced breakdown spectroscopy apparatus characterized by:

13. 10. The laser-induced breakdown spectroscopy apparatus according to claim 9, an electric drive unit that moves an imaging position, which indicates a relative position of the stage with respect to the imaging unit, along a horizontal direction; the processing unit is configured to be able to accept at least one of designation of a first analysis point on the high-magnification image and designation of a second analysis point on the low-magnification image; The imaging control unit When the processing unit receives the designation of the second analysis location, the processing unit controls the motorized driving unit based on the second analysis location, thereby moving the imaging position so that the second analysis location falls within the field of view of the high-magnification image; When the processing unit receives the designation of the first analysis location, the processing unit controls the motorized driving unit based on the first analysis location, thereby moving the imaging position so that the first analysis location approaches the center of the field of view of the high-magnification image. A laser-induced breakdown spectroscopy apparatus characterized by:

14. 14. The laser-induced breakdown spectroscopy apparatus according to claim 13, The imaging control unit When the processing unit receives the designation of the second analysis point, the motorized driving unit regenerates the high-magnification image in a state where the second analysis point is within the field of view of the high-magnification image, When the processing unit receives the designation of the first analysis point, the processing unit moves the first analysis point closer to the center of the field of view of the high-magnification image by the motorized driving unit, and then reproduces the high-magnification image. A laser-induced breakdown spectroscopy apparatus characterized by:

15. 15. The laser-induced breakdown spectroscopy apparatus according to claim 14, the processing unit accepts designation of the first analysis location on the regenerated high-magnification image; The imaging control unit When the processing unit receives the designation of the first analysis point, the processing unit controls the motorized driving unit based on the first analysis point, thereby moving the imaging position so that the first analysis point approaches the center of the field of view of the regenerated high-magnification image; The motorized drive unit moves the first analysis point closer to the center of the field of view of the regenerated high-magnification image, and the regenerated high-magnification image is further regenerated. A laser-induced breakdown spectroscopy apparatus characterized by:

16. 16. The laser-induced breakdown spectroscopy apparatus according to claim 13, With the base, a stand connected to the base and extending in a first direction perpendicular to the base; the mounting table is supported by the base or the stand, the motorized drive unit is configured to move the imaging position along the first direction, The imaging control unit After the imaging position is moved along the horizontal direction by the electric drive unit, the electric drive unit is controlled to move the imaging position along the first direction. A laser-induced breakdown spectroscopy apparatus characterized by:

17. 17. The laser-induced breakdown spectroscopy apparatus according to claim 16, The imaging control unit moving the imaging position to a plurality of first positions along the first direction by the electric drive unit, and generating the high-magnification image at each of the plurality of first positions; generating an all-in-focus image of the object to be analyzed by combining the high-magnification images generated at each of the plurality of first positions; A laser-induced breakdown spectroscopy apparatus characterized by:

18. 17. The laser-induced breakdown spectroscopy apparatus according to claim 16, The electric drive unit is a collection position indicating a relative position of the stage with respect to the collection head is changed along the first direction; The imaging control unit moving the collection position to a plurality of first positions along the first direction by the motorized drive unit, and generating the image at each of the plurality of first positions; The component analysis unit determining a height along the first direction at the first analysis point received by the processing unit based on the images generated at each of the plurality of first positions; The electric drive unit is controlled based on the specified height, thereby moving the collection position along the first direction so that the laser light emitted from the laser light emission unit is focused on the first analysis location. A laser-induced breakdown spectroscopy apparatus characterized by:

19. 19. The laser-induced breakdown spectroscopy apparatus according to claim 13, the processing unit is configured to be able to accept designation of the second analysis portion across a plurality of portions on the low-magnification image, When the processing unit receives a plurality of designations of the second analysis locations, the processing unit performs the following for each of the second analysis locations received at the plurality of locations: moving the imaging position by the motorized driving unit so that one second analysis point among the second analysis points received across a plurality of points falls within a field of view of the high-magnification image; generating the high-magnification image by the imaging control unit while the one second analysis location is within the field of view of the high-magnification image; After the high-magnification image is generated by the imaging control unit, the laser light emitting unit emits the laser light to the analysis target, thereby causing the component analysis unit to perform component analysis at the one second analysis location. A laser-induced breakdown spectroscopy apparatus characterized by:

20. 19. The laser-induced breakdown spectroscopy apparatus according to claim 13, the processing unit is configured to be able to accept designation of the first analysis portion across a plurality of portions on the high-magnification image, When the processing unit receives a plurality of designations of the first analysis locations, the processing unit performs the following for each of the first analysis locations received across the plurality of locations: moving the imaging position by the motorized driving unit so that one of the first analysis points received across a plurality of points approaches the center of the field of view of the high-magnification image; generating the high-magnification image by the imaging control unit while bringing the one first analysis point close to the center of the field of view of the high-magnification image; After the imaging control unit generates the high-magnification image, the laser light emitting unit emits the laser light to the analysis target, thereby causing the component analysis unit to perform component analysis at the one first analysis location. A laser-induced breakdown spectroscopy apparatus characterized by:

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