Member with opening portion and method for manufacturing member with opening portion

Abstract

To provide a member capable of excellently controlling the behavior of a liquid substance in the vicinity of an opening portion through which the liquid substance can flow out or flow in and being formed without a complicated process.SOLUTION: A member having an opening portion through which a liquid substance can flow out to the outside of the member or a liquid substance can flow in from the outside of the member includes a concave-convex structure formed by short-pulse laser irradiation around the opening portion, and d / τ≥0.5 is satisfied, where τ is a concave-convex interval of the concave-convex structure and d is a depth of a concave portion in the concave-convex structure.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a member with an opening and a method for manufacturing a member with an opening. [Background technology]

[0002] Conventionally, attempts have been made to control the behavior of liquids that come into contact with a surface by forming a periodic uneven structure on the surface of a component. For example, Patent Document 1 describes that liquid repellency is exhibited on the surface of a molded body by a surface structure in which concave and convex portions are alternately arranged and further in which a liquid repellent material is arranged around and within holes formed in the tip surfaces of the convex portions. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2022-26796 Summary of the Invention [Problem to be solved by the invention]

[0004] Controlling the behavior of a liquid on the surface of a component as described above is particularly desired for components having openings through which the liquid can flow in or out. For example, in a component intended to allow a liquid to flow out through an opening, if the liquid adheres and remains near the opening, it may be impossible to supply the desired amount of liquid, or the liquid remaining in the opening may later fall and adhere to unintended locations, causing undesirable effects.

[0005] In response to this, there is a technique for using a coating material such as a liquid-repellent material in addition to the concave-convex structure, as described in Patent Document 1. However, depending on the application, there are some components for which the use of a coating material is not possible or is not desirable. Furthermore, the need to apply a coating material can complicate the entire processing process.

[0006] Therefore, an object of one aspect of the present invention is to provide a member that can satisfactorily control the behavior of a liquid material near an opening through which the liquid material can flow or outflow, and that can be formed without any complicated steps. [Means for solving the problem]

[0007] One aspect of the present invention is a member with an opening through which a liquid can flow out of the member or through which a liquid can flow in from the member, and which has a concave-convex structure formed around the opening by irradiating a short pulse laser, wherein τ is the spacing between convex and concave portions of the concave-convex structure and d is the depth of the concave-convex structure, and d / τ≧0.5. [Effects of the Invention]

[0008] According to one aspect of the present invention, it is possible to provide a member that can be formed without complicated processes and that can satisfactorily control the behavior of a liquid material near an opening through which the liquid material can flow in or out. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1(a) is a perspective view of an apertured member according to one embodiment of the present invention, and FIG. 1(b) is a cross-sectional view taken along line II in FIG. 1(a). [Figure 2] FIG. 2 is an enlarged perspective view of a concave-convex structure formed on the member shown in FIG. [Figure 3] FIG. 3 is a cross-sectional view taken along line II-II in FIG. 2. [Figure 4] 4(a) to 4(e) are diagrams showing modified examples of the cross-sectional shape of the concave-convex structure. [Figure 5] FIG. 5(a) is a diagram showing another modified example of the concave-convex structure, and FIG. 5(b) is an enlarged view of the part circled by the dashed dotted line in FIG. 5(a). [Figure 6] FIG. 6(a) is a diagram showing yet another modified example of the concave-convex structure, and FIG. 6(b) is an enlarged view of the part circled by the dashed dotted line in FIG. 6(a). [Figure 7] FIG. 10 is a diagram showing yet another modified example of the concave-convex structure. [Figure 8] FIG. 8(a) is a top view showing yet another modified example of the concave-convex structure, and FIG. 8(b) is a cross-sectional view taken along line III-III in FIG. 8(a). [Figure 9] 9(a) to 9(c) are views corresponding to FIG. 1(b), each showing a modified example of the member with an opening. [Figure 10] 10(a) and 10(b) are combined to form the member shown in FIG. 10(c). [Figure 11] 11(a) and 11(b) are diagrams showing a specific application example, in which FIG. 11(a) is an overall view of an example of the device, and FIG. 11(b) is a side view of the part circled by the dashed dotted line in FIG. 11(a). [Figure 12] 12A and 12B are diagrams showing another example of the embodiment shown in FIG. 11, in which FIG. 12A is a side view of a portion including a member with an opening, and FIG. 12B is a cross-sectional view of the portion circled by the dashed dotted line in FIG. 12A. [Figure 13] 13A and 13B are diagrams showing another example of the embodiment shown in FIG. 11, in which FIG. 13A is a side view of a portion including a member with an opening, and FIG. 13B is a cross-sectional view of the portion circled by the dashed dotted line in FIG. 13A. [Figure 14] 14A and 14B are diagrams showing another example of the embodiment shown in FIG. 11, in which FIG. 14A is a side view of a portion including a member with an opening, and FIG. 14B is a cross-sectional view taken along line IV-IV in FIG. 14A. [Figure 15] 15A and 15B are diagrams showing another example of the embodiment shown in FIG. 11, in which FIG. 15A is a side view of a portion including a member with an opening, and FIG. 15B is a cross-sectional view of the portion circled by the dashed dotted line in FIG. 15A. [Figure 16] FIG. 16(a) is a diagram showing an example of a two-channel type member with openings, and FIG. 16(b) is a diagram showing an example of a four-channel type member with openings. [Figure 17] 10A and 10B are diagrams showing another application example of a member with an opening. [Figure 18]10A and 10B are diagrams showing still another application example of a member with an opening. [Figure 19] 10A and 10B are diagrams showing still another application example of a member with an opening. [Figure 20] 10A and 10B are diagrams showing still another application example of a member with an opening. [Figure 21] 10A and 10B are diagrams showing examples of apertured members having groove-like passages. [Figure 22] FIG. 2 is a schematic view of a laser processing device used to manufacture the opening-equipped member according to the present embodiment. [Figure 23] 1 is a photograph of the end face of a member body (tube) with an opening used in an experimental example. [Figure 24] 1 is a top view enlarged photograph (10x) of the concave-convex structure formed by irradiation with laser light in Example 1. [Figure 25] 1 is a top view enlarged photograph (50x) of the concave-convex structure formed by irradiation with laser light in Example 1. [Figure 26] 1 shows images taken in a liquid ejection test for Example 1 and Comparative Example 1. [Figure 27] 1 is a graph comparing the residual liquid amounts in Example 1 and Comparative Example 1. DETAILED DESCRIPTION OF THE INVENTION

[0010] One embodiment of the present invention relates to a member with openings (hereinafter simply referred to as member) that has openings through which liquid can flow to the outside of the member, or through which liquid can flow from the outside of the member, or both. In this embodiment, the member with openings has a predetermined uneven structure (described below) formed by laser processing around the openings. This allows for good control of the behavior of liquid on the surface of the member near the openings.

[0011] The opening in the member with an opening is formed on the surface of the member. Also, a passage through which a liquid material flows is formed within the member, and the opening is the end of such a passage. In other words, the passage is capable of communicating with the outside through the opening. The passage may or may not communicate with another opening formed in the member. Also, the shape of the passage within the member is not particularly limited as long as it allows the liquid material to flow through it, and may be tubular, hole-like, groove-like, or the like. The passage may branch within the member.

[0012] The shape of the opening is not particularly limited, as long as it corresponds to the shape of the passage and allows liquid to flow out of and / or into the component through the opening. When the opening is the end of a tubular or hole-shaped passage, the opening is entirely surrounded by the material of the component when viewed from the outside toward the surface of the component where the opening is formed. When the opening is the end of a groove-shaped passage, the passage itself opens to the outside at its side, so the opening is partially surrounded by the material of the component when viewed from the outside toward the surface of the component where the opening is formed. The size of the opening is determined depending on the application of the component with an opening and is not particularly limited. However, the equivalent circle diameter of the opening (the diameter of a circle having an area equal to the area of ​​the opening) may be, for example, 0.1 mm to 100 mm, and may be 0.1 mm to 20 mm when used to allow liquid to flow through the passage. In the case of a component with an opening through which a groove-shaped passage is connected, the size of the opening is the area enclosed by a straight line closing the open portion of the opening.

[0013] In this specification, controlling the behavior of a liquid may mean, for example, guiding the liquid so that when a liquid passing through an opening comes into contact with a nearby surface of a component, it quickly slides off the surface of the component, or guiding the liquid so that it remains attached to the surface of the component for an appropriate period of time. The function that enables the former type of control is also called a liquid-repellent function, and the function that enables the latter type of control is also called a lyophilic function. The member with openings according to this embodiment is particularly preferably a member that can control the behavior of the liquid using a liquid-repellent function. Controlling the behavior of the liquid portion can also be said to control the wettability of the liquid on the surface of the component.

[0014] The liquid substance in this embodiment is not particularly limited as long as it is a substance in a liquid state that can flow out of the component through an opening and / or into the component. The liquid substance may be a liquid consisting of one substance, or a liquid mixture consisting of two or more substances. The liquid substance may be aqueous or oil-based. Examples of liquid mixtures include solutions, systems in which solid particles are dispersed in a liquid, i.e., suspensions, and systems in which particulate liquids are dispersed in another liquid, i.e., emulsions. Furthermore, mixtures consisting of two or more of the liquid substances listed above may also be used. Specifically, the liquid substance may be water, an organic solvent, a mixture thereof, or a solution, suspension, emulsion, etc. prepared using these as a solvent.

[0015] The surface tension of the liquid may be preferably 10 to 500 mN / m, more preferably 20 to 100 mN / m. In this specification, the surface tension is measured at 20°C.

[0016] The member with an opening according to this embodiment may be a member used in fields such as medicine, semiconductors, precision machinery, chemical equipment, food processing, and cosmetics. Regardless of its shape, the member with an opening is suitable for use as a component required to accurately discharge a predetermined amount of liquid at a predetermined timing, such as a liquid transfer tube, a nozzle, a syringe needle, a discharge or inlet port attached to a container, or an orifice plate. It is also suitable for use as a component having a shape that allows a liquid to flow into a passage through the opening, but where the inflow of the liquid must be minimized, such as an exterior or housing for electrical / electronic equipment, physical / chemical equipment, etc. In such cases, a separate component may be attached to the opening.

[0017] <Description of the embodiment> Specific embodiments of the member with an opening will be described below with reference to the drawings. Note that the drawings are merely illustrative of the embodiments, and the scale of each part may differ from the actual scale to facilitate understanding. Furthermore, in the drawings, unless otherwise specified, the same or corresponding components may be designated by the same reference numerals, and their description may be omitted.

[0018] (Parts with openings) Fig. 1(a) shows a perspective view of an opening-equipped member 1 according to one embodiment of the present invention. Fig. 1(b) shows a cross-sectional view taken along line II in Fig. 1(a). Fig. 2 shows the three-dimensional shape of the concave-convex structure.

[0019] The member with an opening 1 has an uneven structure 20 formed by laser irradiation around an opening 15a of an opening-equipped member main body 10 (also simply referred to as the member main body). In the example shown in FIGS. 1(a) and 1(b), the member main body 10 with an opening is a tubular member (tube), and the hollow portion of the member main body 10 forms a tubular passage 15 through which a liquid flows. The passage 15 opens at an opening 15a on the outer surface of the member main body 10. In other words, the passage 15 communicates with the outside of the member main body 10 at the opening 15a. In this example, the passage 15 has an elongated shape similar to the member main body 10 and is formed axially with the member main body 10, but the shape and arrangement of the passage 15 can be any shape regardless of the shape of the member main body 10. For example, in the example shown in Figures 1(a) and (b), the opening 15a is formed at the end of the elongated member body 10, but for example, the passage may be curved within the member body 10 and communicate with the outside through an opening formed on the side (outer surface) of the elongated member body 10.

[0020] The member 1 with an opening shown in FIGS. 1(a) and 1(b) is suitable for use as, for example, a liquid transfer tube or a nozzle, in an application in which a liquid flowing through a passage 15 is discharged to the outside of the member 1 through the opening 15a. However, the liquid can also flow into the inside of the member body 10 through the opening 15a. Therefore, even in a configuration in which the liquid is flowed into the passage, the direction in which the liquid flows through the opening 15a, i.e., whether it flows out to the outside of the member body 10 or the member 1 or flows in from the outside of the member body 10 or the member 1, can be determined appropriately depending on the application of the member 1. Furthermore, although this embodiment allows the liquid to flow in or out through the opening 15a, the opening 15a may be formed for a purpose other than the flow in or out of the liquid, and may be used in an application in which it is desired to prevent the liquid from flowing in or out through the opening 15a.

[0021] (Uneven structure) As shown in FIGS. 1(a) and 1(b), the member body 10 with an opening in this embodiment has a concave-convex structure 20 formed on a portion of its surface, more specifically, around the opening 15a. The concave-convex structure 20 is a fine surface structure that includes convex portions and concave portions that are alternately arranged in at least one direction along the surface. The arrangement of the convex portions and concave portions may be formed at a regular interval or at an irregular interval. In the example shown in FIGS. 1(a) and 1(b), the concave-convex structure 20 is formed on the peripheral surface 12a of the outer surface of the member body 10 that surrounds the opening 15a. The concave-convex structure 20 is shown in gray in FIG. 1(a) and in black in FIG. 1(b).

[0022] 1(a) and 1(b) is tubular, the peripheral surface (or peripheral portion) 12a surrounding the opening 15a is the end surface at the end of the member body 10. As shown in FIGS. 1(a) and 1(b), the uneven structure 20 is formed over the entire peripheral surface 12a, but may be formed over only a part of the peripheral surface 12a.

[0023] The location where the concave-convex structure 20 is formed is not limited to the peripheral surface 12a, as long as it is the periphery of the opening 15a. Here, the periphery of the opening 15a refers to the surface of the member body 10 near the opening 15a, and may be a location where liquid that flows in or out through the opening 15a can adhere. Furthermore, the periphery of the opening 15a may be, for example, a region up to a position 10 mm or less away from the outline of the opening 15a.

[0024] FIG. 2 shows an enlarged perspective view of the concave-convex structure 20. FIG. 3 shows a cross-sectional view taken along line II-II in FIG. 2. In the example shown in FIG. 2, the concave-convex structure 20 has a two-dimensional structure (e.g., a structure arranged on the xy plane) on the surface of the component body 10, including an arrangement of convex portions 21 and concave portions 22 that are alternately arranged in one direction along the surface, and an arrangement of convex portions 21 and concave portions 22 that are alternately arranged in another direction perpendicular to the one direction. In the example shown in FIG. 3, the concave portions 22 are formed as grooves that extend along each of the one direction and the other direction (e.g., each of the x direction and the y direction), and the convex portions 21 formed between adjacent grooves are arranged in a lattice pattern.

[0025] The uneven structure 20 may be a uneven structure formed by irradiating with laser light. The uneven structure 20 shown in Fig. 2 and Fig. 3 can be formed, for example, by scanning with laser light. The irradiated laser light may preferably be pulsed laser light, more preferably short pulse laser light, and even more preferably ultrashort pulse laser light. The conditions for laser irradiation will be described later together with the manufacturing method.

[0026] As shown in FIG. 2, the concave-convex structure 20 includes alternating convex portions 21 and concave portions 22. The convex-convex spacing τ is preferably 1 μm to 50 μm, more preferably 5 μm to 30 μm, and even more preferably 10 μm to 20 μm. In this specification, the "convex-convex spacing" may refer to, for example, the distance from the front end of a convex portion to the front end of an adjacent convex portion along a predetermined direction along the surface, or the distance from the front end of a concave portion to the front end of an adjacent concave portion. Setting the convex-convex spacing τ to 1 μm to 50 μm can effectively control the behavior of liquid around the opening 15a. In particular, a convex-convex spacing τ of 1 μm or more can exhibit high liquid-repellent properties. The convex-convex spacing may also be referred to as the pitch of the convex portions, the pitch of the convex portions 21, or the pitch of the concave portions 22.

[0027] Furthermore, in this embodiment, the ratio (d / τ) of the depth d of the recesses 22 to the unevenness spacing τ may be 0.5 or greater, i.e., d / τ > 0.5. d / τ may be preferably 0.7 or greater, more preferably 1 or greater, and even more preferably 1.2 or greater. d / τ may be preferably 3 or less, more preferably 2 or less, and even more preferably 1.5 or less. The depth d of the recesses 22 may be the height of the protrusions 21. When d / τ is within the above range, the behavior of liquid in the uneven structure 20 can be well controlled, and in particular, the uneven structure 20 can exhibit high liquid-repellent properties.

[0028] The width f1 (also referred to as tooth width) of the protrusions 21 may be preferably 0.1 μm or more and 100 μm or less, more preferably 0.5 μm or more and 8 μm or less, and even more preferably 1 μm or more and 5 μm or less. The width f1 of the protrusions 21 may be the width at the top of the concave-convex structure 20, i.e., the width at the top of the convexities 21. When the width of the protrusions 21 is within the above range, the behavior of the liquid material in the concave-convex structure 20 can be well controlled, and in particular, the concave-convex structure 20 can exhibit high liquid-repellent properties.

[0029] The width f2 (also referred to as groove width) of the recesses 22 may be preferably 0.1 μm or more and 500 μm or less, more preferably 0.5 μm or more and 8 μm or less, and even more preferably 1 μm or more and 5 μm or less. The width f2 of the recesses 22 may be the width at the top of the concave-convex structure 20. When the width f2 of the recesses 22 is within the above range, the behavior of the liquid material in the concave-convex structure 20 can be well controlled, and in particular, the concave-convex structure 20 can exhibit high liquid-repellent properties.

[0030] Furthermore, it is preferable that the ratio (f2 / f1) of the width f2 of the recessed portion 22 to the width f1 of the protruding portion 21 is greater than 1, i.e., f2 / f1>1. f2 / f1 may be more preferably 2 or more, and even more preferably 2.5 or more. Furthermore, f2 / f1 may be preferably 10 or less, more preferably 8 or less, and even more preferably 5 or less.

[0031] One or more shape parameters of the unevenness interval τ, the depth of the recesses 22 (or the height of the protrusions 21) d, the width f1 of the protrusions 21, and the width f2 of the recesses 22 may be constant throughout the uneven structure 20 or may vary depending on the location. For example, the parameters may be constant along one direction along the surface and not constant along another direction perpendicular to the one direction. If the parameters are not uniform, they are averaged over the entire uneven structure 20. Furthermore, if the uneven structure 20 is a two-dimensional structure, the shape parameters may be the same or different in two mutually perpendicular directions (e.g., the x direction and the y direction).

[0032] 2 and 3, the width of the convex portions 21 is constant when viewed in a direction perpendicular to the surface of the component body 10, and the width of the concave portions 22 is also constant. That is, the cross-sectional shape of the convex portions 21 is rectangular. However, the concave-convex structure 20 has a structure in which the convex portions 21 and the concave portions 22 are arranged alternately, and the cross-sectional shape is not limited as long as the structure can satisfactorily control the behavior of a liquid when it comes into contact with the liquid, and in particular as long as the structure can exhibit liquid-repellent properties.

[0033] FIG. 4 shows a modified example of the concave-convex structure 20. In the examples shown in FIGS. 2 and 3, the cross-sectional shape of the convex portions 21 is rectangular, but the cross-sectional shape of the convex portions 21 is not limited to rectangular, as described below. For example, the convex portions 21 included in the concave-convex structure 20 may have a tapered shape, as shown in FIGS. 4(a) to 4(d). In this specification, a tapered shape refers to a shape in which the width gradually changes with increasing distance from the surface of the component body 10 in a direction perpendicular to the surface of the component body 10. Therefore, the tapered shape of the convex portions 21 includes a shape in which the width of the convex portions 21 gradually decreases with increasing distance from the surface in a direction perpendicular to the surface of the component body 10, i.e., toward the apex of the convex portions 21, and a shape in which the width of the convex portions 21 gradually increases.

[0034] The concave-convex structure 20 in the example shown in FIG. 4(a) includes convex portions 21 that have a shape (also called a forward tapered shape) that gradually decreases in width with increasing distance from the surface.

[0035] The convex portions 21 in the concave-convex structure 20 shown in FIG. 4(b) are also included in the forward tapered shape. However, in this example, the tops of the convex portions 21 are pointed. If the concave-convex structure 20 shown in FIG. 4(b) is a two-dimensional structure in which the convex portions 21 and the concave portions 22 are alternately arranged not only in the direction in which the convex portions 21 and the concave portions are arranged on the drawing but also in a direction perpendicular to that direction, the convex portions 21 will have a quadrangular pyramid shape with an apex at the top. The concave-convex structure 20 in which the convex portions 21 have pointed tops as shown in FIG. 4(b) is also preferred in that it has good sliding properties.

[0036] In the uneven structure 20 shown in Fig. 4(c), the cross-sectional shape of the convex portions 21 is a partial circle. The convex portions 21 in this example also have a tapered shape because the width decreases with increasing distance from the surface of the member body 10. As shown in Fig. 4(c), rounding the tops of the convex portions 21 is advantageous in that it improves durability, and is therefore preferable.

[0037] 4(d) includes protrusions 21 that gradually increase in width with increasing distance from the surface (also referred to as an inverse tapered shape). In the case of a protrusion structure 20 including protrusions 21 with such an inverse tapered shape, the structure is a reentrant structure that effectively prevents liquid from penetrating from the top of the protrusions 21, and is therefore preferable in terms of having a high liquid-repellent function.

[0038] Furthermore, as shown in Fig. 4(e), the cross-sectional shape of the convex portion 21 may be T-shaped. In this example, the width of the convex portion 21 is wide only at the top, and the width of the portion below the top is significantly reduced compared to the width of the top. The concave-convex structure 20 shown in Fig. 4(e) exhibits high liquid-repellent properties because liquid is particularly unlikely to enter from the top side.

[0039] 4(a) to 4(e), the concave-convex structure 20 can have various shapes. The concave-convex structure 20 shown in FIG. 4(a) to 4(e) can be formed by appropriately adjusting the angle of the irradiated laser light.

[0040] Next, further specific examples of the concave-convex structure 20 will be described with reference to FIGS. 5 to 8. FIG. 5 shows a configuration in which, in addition to the concave-convex structure 20, minute concave-convex portions 30 having a concave-convex spacing smaller than the concave-convex spacing τ of the concave-convex structure 20 are further formed on the member body 10. As shown in FIG. 5(a), the minute concave-convex portions 30 may be formed at least on the apex of the convex portions 21 of the concave-convex structure (sometimes referred to as a large concave-convex structure) 20. FIG. 5(b) shows an enlarged view of the area circled by the dashed-dotted line in FIG. 5(a). As shown in FIG. 5(b), the minute concave-convex portions 30 may have a shape in which minute convex portions 31 and minute concave portions 32 are alternately arranged in one direction along the surface. Although a perspective view or a plan view is not shown, the minute concave-convex portions 30 may have a structure in which minute convex portions 31 are surrounded by groove-like minute concave portions 32. The irregularity interval τs of the minute irregularities 30 may be 100 nm or more and 100 μm or less, and preferably 500 nm or more and 10 μm or less.

[0041] In this way, the member 1 in this embodiment may have a structure (hierarchical structure) around the opening, in which a smaller uneven structure is further provided on the surface of a relatively large uneven structure. As shown in Fig. 5, by forming minute unevenness in addition to the relatively large uneven structure 20, the behavior of the liquid around the opening can be more effectively controlled, and in particular, the liquid-repellent function provided by the uneven structure 20 can be improved.

[0042] Similar to the example shown in FIGS. 5(a) and (b), FIG. 6(a) shows another example of a component 1 in which minute asperities 30 are formed on the component body 10 in addition to the concave-convex structure 20. FIG. 6(b) shows an enlarged view of the area circled by the dashed-dotted line in FIG. 6(a). In this example, the minute asperities 30 have a structure with an asperity spacing smaller than that of the concave-convex structure 20, as shown in FIG. 6(a), and may be formed on the apex of the convex portion 21. Furthermore, as shown in FIGS. 6(a) and (b), the minute asperities 30 may have a structure in which minute convex portions 31 and minute concave portions 32 are arranged alternately. However, in this example, the apex of the minute convex portion 31 is pointed.

[0043] In this way, the tops of the minute protrusions 31 of the minute unevenness may be flat or pointed, or may have any shape. Note that the number of minute protrusions 31 formed in one direction along the surface of the member body 10 in one protrusion 21 of the uneven structure 20 may be two or more, and although it depends on the shape and size of the top of the protrusions 21, it may be preferably three or more, and more preferably four or more. The unevenness spacing τs of the minute unevenness 30 shown in FIG. 6 may be the same as that described with reference to FIG. 5.

[0044] The minute irregularities 30 as shown in FIGS. 5 and 6 can be formed in one step together with the irregular structure 20 during irradiation with laser light.

[0045] Furthermore, as shown in Fig. 7, the surface structure formed on the surface of the member body 10, which includes the uneven structure 20 and the minute unevenness 30, may have a fractal shape as a whole. In the example shown in Fig. 7, the minute unevenness 30 is formed not only on the surface of the convex portions 21 but also on the surface of the concave portions (grooves) 22.

[0046] FIG. 8(a) shows a partial top view of a concave-convex structure 20 according to another example. FIG. 8(b) shows a cross-sectional view taken along line III-III in FIG. 8(a). The example shown in FIG. 8 differs from the examples described with reference to, for example, FIGS. 2 and 3 in that the convex portions 21 are continuous ridges (mountains), and the concave portions 22 are surrounded by the convex portions 21. Even with such a structure in which the concave portions 22 are discontinuously formed, the behavior of the adhering liquid can be well controlled, and in particular, liquid-repellent properties can be exhibited.

[0047] 5 to 8 can also be formed by appropriately adjusting the angle of the irradiated laser light, the irradiation timing, etc. Note that the uneven structure 20 in which the convex portions 21 are in the form of continuous ridges as shown in Fig. 8 can be formed by a laser drilling method by appropriately selecting the fluence and the number of shots.

[0048] Figures 9 and 10 show modified examples of the member 1 shown in Figure 1. Figures 9 and 10 are cross-sectional views of the member 1 in which a concave-convex structure 20 is formed on a tubular member main body 10 similar to that shown in Figure 1, and correspond to Figure 1(b). In the example shown in Figures 9 and 10, the location where the concave-convex structure 20 is formed is different from that shown in Figure 1(b).

[0049] In the example shown in FIG. 1, the uneven structure 20 is formed only on the peripheral surface 12a surrounding the opening 15a. However, the uneven structure 20 may be formed anywhere around the opening 15a, for example, anywhere on the surface of the component body 10 that may come into contact with a liquid flowing in or out through the opening 15a. For example, as shown in FIG. 9(a), the uneven structure 20 may be formed on the inner peripheral surface 12b of the passage 15, or as shown in FIG. 9(b), the uneven structure 20 may be formed on the outer peripheral surface 12c of the component body 10. Alternatively, as shown in FIG. 9(c), the uneven structure 20 may be formed over the peripheral surface (end face) 12a of the opening 15a, the inner peripheral surface 12b of the passage 15, and the outer peripheral surface 12c of the component body 10.

[0050] In this way, when the component body 10 is tubular and is used, for example, to dispense a liquid material from the opening 15a, the uneven structure 20 is formed not only on the end face of the tube but also on the inner and / or outer circumferential surfaces of the end, making it difficult for the liquid material to remain attached to the end. This prevents the attached liquid material from unintentionally falling off after a period of time or preventing the correct amount of liquid material from being dispensed.

[0051] FIG. 10 shows an example of a member formed by combining two members according to this embodiment. FIG. 10(a) shows member 1A, which is formed by forming a concave-convex structure 20 on a tubular member main body 10A having a step on the inside of its end. In member 1A, the concave-convex structure 20 is formed on the peripheral surface (end surface) surrounding the opening 15aA of member main body 10A and the inner peripheral surface. FIG. 10(b) shows member 1B, which is formed by forming a tubular member main body 10B having a step on the outside of its end and the concave-convex structure 20 on member 1B. In member 1B, the concave-convex structure 20 is formed on the peripheral surface (end surface) surrounding the opening 15aB of member main body 10B and the outer peripheral surface. These members 1A and 1B can be used individually, but can also be combined to form a tubular member 1 with a flush outer peripheral surface, as shown in FIG. 1(c). When members 1A and 1B are combined, a gap 16 is formed between member 1A and member 1B. Although not shown, a spacer or the like for maintaining the gap 16 may be provided between the member 1A and the member 1B.

[0052] As shown in FIG. 10(c), in the member 1 formed by combining the member 1A and the member 1B, a concave-convex structure 20 is formed on the surface surrounding the gap 16. Therefore, such a member 1 is suitable for use, for example, in applications where liquid should not be allowed to adhere to the gap 16. This is because the configuration shown in FIG. 10(c) makes it difficult for liquid to enter the gap 16, even if it adheres to the outer peripheral surface of the member 1. Therefore, for example, when the member 1 is used in a manner in which a portion of the gas passing through the member 1 is ejected through the gap 16, even if water droplets resulting from water vapor, rain, or the like adhere to the outer peripheral surface of the member 1, they can be prevented from entering the gap 16, thereby preventing deterioration of the member 1. Thus, the member with an opening according to this embodiment is suitable not only for applications in which liquid is to be discharged or ejected from the member, but also for applications requiring liquid-proof, waterproof, or stain-resistant properties.

[0053] (Material of the body of the component with opening) The material of the apertured member body 10 is not particularly limited and may be an organic material or an inorganic material. The material may be natural or synthetic. Examples of organic materials include resin, rubber, elastomer, etc. Examples of resins include fluororesin, acrylic (PMMA) resin, polyethylene terephthalate (PET) resin, polycarbonate (PC) resin, polyvinyl chloride (PVC) resin, and polyethylene (PE) resin. Examples of fluororesin include polytetrafluoroethylene (PTFE), FEP, PFA, and ETF. Examples of inorganic materials include metals, alloys, and metal oxides (including materials known as glass and ceramics). Examples of metals or alloys include stainless steel, copper, aluminum, gold, platinum, silver, iron, lead, zinc, tin, titanium, vanadium, chromium, nickel, tungsten, magnesium, solder, brass, steel, carbon steel, stainless steel, and duralumin. These materials may be used alone or in combination. The conditions for irradiating the laser light can be changed appropriately depending on the material.

[0054] <Application examples of components with openings> Specific application examples of the apertured member 1 are shown below. FIG. 11 illustrates an example in which the apertured member 1 according to this embodiment is a component of an instrument 100. In the example shown in FIG. 11(a), the apertured member 1 is used as a needle constituting the tip of an instrument (syringe) 100. The syringe 100 may be, for example, a syringe for medical or chemical use. FIG. 11(a) shows an overall view of the instrument 100, and FIG. 11(b) shows an enlarged view of the area circled by a dashed dotted line in FIG. 11(b). The apertured member main body (needle main body) 10 shown in FIG. 11(b) is a tubular apertured member having an aperture 15a at its tip. Liquid that passes through a passage within the needle main body 10 can flow out through the aperture 15a to the outside, or liquid can flow into the passage within the needle main body 10 through the aperture 15a. 1(a) and (b), the needle 1 shown in Fig. 11(b) has a concave-convex structure formed around the opening 15a of the needle body 10. Although not shown in Fig. 11, the concave-convex structure may be formed on the peripheral surface surrounding the opening 15a, as shown in Figs. 1(a) and (b). Note that the location where the concave-convex structure is formed is not limited to the peripheral surface surrounding the opening 15a, and various locations are possible, as described with reference to Fig. 9.

[0055] 12 to 15 show modified examples of the member with an opening (needle) 1 used in the syringe 100 shown in FIG. 11. The needle 1 shown in FIGS. 12 to 15 has a different tip shape from that shown in FIG. 11. The needle 1 shown in FIGS. 12 to 15 may also have an uneven structure formed around the opening 15a. This allows for good control of the behavior of the liquid around the opening 15a, and in particular, allows for the liquid-repellent function to be exhibited.

[0056] 12 to 15 each show both a side view of the tip portion of the syringe 100 including the needle 1 (i.e., a view corresponding to FIG. 11(b)) and a cross-sectional view of the needle 1 cut along the longitudinal direction of the needle 1. In FIG. 14, the cutting direction of the needle 1 in FIG. 14(a) is indicated by line IV-IV.

[0057] The tip of the needle 1 shown in Fig. 11 has an end face along a direction perpendicular to the longitudinal or axial direction of the needle 1, but in the example shown in Fig. 12, the needle 1 is tapered, that is, the diameter becomes smaller toward the tip. Even in such a needle 1 shown in Fig. 12, an uneven structure 20 may be formed over the peripheral surface (end face) of the opening 15a and the inner peripheral surface of the needle 1 (periphery of the passage), for example, as shown in Fig. 12(b).

[0058] In the example shown in Fig. 13, the tip of the needle 1 is rounded and has an opening 15a formed at the tip. In the example shown in Fig. 13, for example, as shown in Fig. 13(b), an uneven structure 20 may be formed on the peripheral surface surrounding the opening 15a and the inner peripheral surface of the tip.

[0059] 14, an opening 15a is formed on the outer peripheral surface (side surface) of the needle 1, rather than on the tip edge of the needle 1. An uneven structure 20 is formed on the peripheral surface surrounding the opening 15a and on the inner peripheral surface of the passage leading to the opening 15a.

[0060] 15, the tip of the needle 1 is cut obliquely with respect to the longitudinal direction of the needle 1, forming an elliptical opening 15a. In this example, the concave-convex structure 20 is formed on the peripheral surface surrounding the opening 15a.

[0061] Various configurations have been shown as examples of syringe needle 1, but in all configurations, the uneven structure 20 is formed around the opening 15a at the tip of needle 1, thereby preventing liquid material dispensed from needle 1 or collected through needle 1 from remaining attached near opening 15a. Syringe needles (injection needles) typically have an inner diameter of approximately 0.1 mm to 4 mm and an end face width of approximately 0.1 mm to 0.5 mm. Since the uneven structure 20 according to this embodiment is formed by irradiation with laser light, accurate surface processing can be performed even on a minute area at the tip of the syringe needle.

[0062] FIG. 16 shows a further modified example of the needle 1 of the syringe 100 shown in FIG. 11 from a different perspective. Both of the examples in FIGS. 16(a) and (b) show a multi-channel needle 1. The multi-channel needle 1 has a configuration in which two or more small tubes 110 with smaller diameters are housed inside one large tube (main body) 10. FIG. 16(a) shows a type with two small tubes 110, while FIG. 16(b) shows a type with four small tubes 110. In both FIGS. 16(a) and (b), the concave-convex structure 20 (gray portion) is formed not only on the peripheral end surface 12a of the opening 15a of the large tube 10 but also on the peripheral end surface 112a of the opening 115a of the small tube 110. This prevents the liquid from unintentionally remaining on the tip of each small tube 110, even when the liquid is being discharged from each small tube 110. Such a configuration of the multi-channel needle 1 is applicable to any of the needles 1 described above with reference to FIGS.

[0063] (Another application example) Furthermore, Fig. 17 shows another application example of the tubular member with an opening 1. For example, as shown in Fig. 17(a), the member with an opening 1 can be used as a discharge port provided in a predetermined portion of a pouch bag containing liquid food, daily hygiene products, detergent, etc. As shown in Fig. 17(b), the member with an opening 1 can also be used as a discharge port of a container containing liquid food, paint, etc. As shown in Fig. 17(c), the member with an opening 1 can also be used as a nozzle provided at the tip of a discharge mechanism provided at the top of a bottle.

[0064] 18 to 20 show yet another application example of an apertured member 1, in which a concave-convex structure 20 is formed on an apertured member main body 10 having hole-like apertures 15a. FIG. 18 shows an example in which the apertured member main body 10 is a nozzle plate of an inkjet cartridge CR. The nozzle plate 10 has a plurality of apertures 15a, which are ink orifices, spaced apart from one another. In the example shown in FIG. 18, the concave-convex structure 20 is formed on the entire surface of the nozzle plate on which the apertures 15a are formed. This improves the liquid repellency of the nozzle plate around the apertures 15a. This prevents, for example, ink ejected from the apertures 15a from remaining attached to the nozzle plate, which can cause problems (such as burnt marks in the case of a thermal inkjet system). In the example shown in FIG. 18, the concave-convex structure 20 is formed on the entire surface of the nozzle plate 10. However, the area in which the concave-convex structure 20 is formed is not limited to the illustrated area and may be only the periphery surrounding each aperture 15a.

[0065] In this way, the member with an opening 1 may be a plate-like member with a through-hole formed therein.

[0066] Fig. 19 shows an example in which the opening-equipped member main body 10 is the exterior body or housing of a display device, such as a smartphone SP. In the example shown in Fig. 19, an opening 15a is formed in the exterior body 10 to which a connector of a charger cable is connected, and an uneven structure 20 is formed on the peripheral surface of the opening 15a. This makes it possible to prevent the intrusion of liquids, such as water droplets and raindrops.

[0067] 20 shows an example in which the opening-equipped member main body 10 is the exterior body of a photographic device such as a camera CM. An opening 15a is formed in the portion of the exterior body 10 of the camera CM where the lens is connected, and an uneven surface 20 is formed on the periphery of the opening 15a. This prevents liquids, such as water droplets and raindrops, from entering the connection portion.

[0068] (Variations in the shape of passages and openings) The above examples relate to examples in which the passage leading to the opening 15a is hole-shaped or tubular, but the passage is not limited to being hole-shaped or tubular, and may be groove-shaped. FIG. 21 shows an example in which the passage 15 leading to the opening 15a is groove-shaped. A groove-shaped passage 15 refers to a passage that is open on the side in the flow direction of the liquid. FIGS. 21(a) to 21(c) show examples in which the cross section of the passage 15 taken in a direction perpendicular to the flow direction is semicircular, triangular, and rectangular, respectively. Therefore, the shapes of the opening 15a in FIGS. 21(a) to 21(c) are semicircular, triangular, and rectangular, respectively. Note that the opening 15a may have any shape other than the shape shown in FIG. 21.

[0069] In all of the examples shown in Fig. 21, the uneven structure 20 is provided on the end surface of the component body 10 where the opening 15a is formed. The location where the uneven structure 20 is provided is not limited to the end surface of the component body 10 as long as it is around the opening 15a, and as explained with reference to Fig. 9, it may be provided on the inner circumferential surface of the passage 15, the outer circumferential surface of the component body 10, or the like, instead of or in addition to the end surface. The uneven structure 20 effectively controls the behavior of the liquid flowing through the passage 15 near the opening 15a.

[0070] 21 can be used alone or in combination with another member, for example, a member that covers the passage 15. The member 1 can be used, for example, as a flow path portion in a medical indwelling needle or the like.

[0071] <Method for manufacturing member with opening, and method for processing member with opening> Another embodiment of the present invention may be the method for manufacturing the above-mentioned member with an opening, which includes preparing a member with an opening through which a liquid can flow to the outside of the member or through which a liquid can flow from the outside of the member, and irradiating a periphery of the opening of the member with an opening with a short pulse laser to form a concave-convex structure, wherein τ is a spacing between convex and concave portions of the concave-convex structure and d is a depth of concave-convex portions in the concave-convex structure, and d / τ>0.5.

[0072] Yet another embodiment of the present invention may be a method for processing the above-described member with an opening, which includes preparing a member with an opening, which is a member main body having an opening through which a liquid can flow to the outside of the member or through which a liquid can flow from the outside of the member, and irradiating a periphery of the opening of the member with an opening with a short pulse laser to form a concave-convex structure, wherein τ is a spacing between convex and concave portions of the concave-convex structure and d is a depth of concave-convex portions in the concave-convex structure, and d / τ>0.5.

[0073] In this embodiment, the uneven structure is formed by directly processing the surface of the member body by irradiating it with a short pulse laser (direct processing). Therefore, for example, a surface structure that enables control of the behavior of a liquid material can be formed at an industrially feasible cost within 1 m without the need for complex processing steps involving multiple stages such as coating and drying of a coating material. 2 This allows for ultra-high speed formation, exceeding 1000 times per minute. Laser processing is also advantageous in that it consumes less energy than other common processing devices and allows for a compact manufacturing system. Furthermore, when using a coating material such as a liquid-repellent material, as in conventional technology, some materials of the component body are incompatible with the coating material and cannot be used with the coating material. However, this embodiment, which uses laser light irradiation, eliminates such concerns.

[0074] The apertured member 1 obtained by this embodiment may have no coating layer or material layer, or no liquid-repellent coating layer, on at least the surface on which the concave-convex structure 20 is formed. In other words, the configuration may be such that the liquid material directly contacts the material of the apertured member body. However, this embodiment does not exclude the use of chemical liquid-repellency improving means, including a coating material such as a liquid-repellent material. Depending on the purpose and application, chemical liquid-repellency improving means may also be used in combination.

[0075] The short-pulse laser light irradiated around the opening is laser light composed of a pulse train including multiple pulses with a constant peak intensity. In this specification, a short-pulse laser refers to a laser with a pulse width on the order of nanoseconds or less. In this embodiment, the irradiated light is preferably an ultrashort-pulse laser. An ultrashort-pulse laser refers to a laser with a pulse width on the order of picoseconds or less. Specifically, the short-pulse laser is a nanosecond laser, a picosecond laser, or a femtosecond laser, and of these, a femtosecond laser is preferred. In other words, a pulse width of less than 1 ps is preferred.

[0076] 22 shows a schematic diagram of a laser processing apparatus 50 that can be used in the manufacturing method and processing method according to this embodiment. The laser processing apparatus 50 may mainly include a laser light generating unit 51, a scanning unit 52, and a condenser lens 53. The laser light source in the laser light generating unit 51 is not particularly limited and can be appropriately selected depending on the purpose. Specific examples of laser light sources include an excimer laser, an Nd:YAG laser, an Nd:YVO4 laser, and a semiconductor laser. The oscillation wavelength of the laser light can be 100 nm or more and 1100 nm or less.

[0077] The laser light LB generated by the laser light generator 51 can be scanned or swept over the surface of the opening-equipped member body 10 by using the scanner 52. The scanner 52 may be, for example, a galvanometer scanner using a galvanometer mirror or a polygon scanner using a polygon mirror. The laser light LB can be irradiated along one direction along the surface of the member body 10 (for example, the x or y direction on the surface), more specifically, so as to form linear grooves spaced apart from one another. Alternatively, the laser light LB can be irradiated along two mutually orthogonal directions (for example, the x and y directions on the surface), more specifically, so as to form linear grooves spaced apart from one another in one direction intersecting with spaced apart grooves perpendicular to the one direction.

[0078] The recesses (grooves) 22 of the concave-convex structure 20 (FIGS. 2 and 3, etc.) can be formed by scanning the short-pulse laser light LB on the member body 10. The laser light scanning required to obtain the recesses 22 may be performed once or multiple times.

[0079] It is preferable to use a condenser lens 53 having a focal length of f10 or more and f2000 or less, and having telecentric specifications, etc. Although not shown in the figure, optimal irradiation conditions can be obtained by appropriately using additional components, such as adjusting the spot diameter of the laser light using a beam expander.

[0080] The conditions for irradiating the laser beam can be adjusted so that the ratio (d / τ) of the depth d of the recesses to the unevenness interval τ of the uneven structure is at least 0.5. Specific conditions depend on the intended use of the member 1 with openings, the shape of the uneven structure 20 appropriate for the intended use, the material of the member body 10, and the like, but are generally set to a pulse width of 100 fs to 500 ns, a repetition frequency of 1 kHz to 10 MHz, and a fluence of 10 mJ / mm. 2 More than 1J / mm 2 It can be as follows:

[0081] When irradiating with laser light, a mask or the like may be used as appropriate to avoid irradiating areas where laser light irradiation is not desired. [Example]

[0082] <Production of components> Example 1 A tube (tubular member) made of polytetrafluoroethylene (PTFE) with an outer diameter of 3.17 mm and an inner diameter of 1.59 mm was prepared. The tip surface of the tube was cut with a tube cutter in a direction perpendicular to the longitudinal direction of the tube, resulting in a flat surface with almost no irregularities (Figure 23). A femtosecond pulse laser was irradiated onto the entire annular end surface of the tube using a laser processing system consisting of the following components (i) to (iii), while being operated, to form multiple spaced linear grooves (recesses) in two perpendicular directions. The detailed configuration of the laser system and the processing conditions were as follows: (i) Laser light generator: Femtosecond pulse laser generator (CARBIDE CB5, Light Conversion UAB, Republic of Lithuania), oscillation wavelength 515 nm, pulse width 222 fs, repetition frequency 60 kHz, fluence 64.2 mJ / mm 2 (ii) Scanning unit: xy galvanometer mirror (CUA32-MST-AC, Newson NV, Belgium), scanning speed 150 mm / s (iii) Condenser lens: Telecentric fθ lens (TSL-532-15-67Q-D15, Weavelength Opto-Electronics(S) Pte. Ltd., Republic of Singapore), focal length f = 67

[0083] (Comparative Example 1) Comparative Example 1 was the tube before laser processing described in Example 1 above.

[0084] <Evaluation> (observation) After laser processing, the tip surface was photographed using a laser microscope (OLS4100, manufactured by Olympus Corporation). Figure 24 shows a 10x planar image of the tip surface of Example 1, and Figure 25 shows a 50x planar image. Furthermore, when the surface shape of the tip surface of Example 1 was analyzed using the same laser microscope, the unevenness interval τ of the uneven structure of the tip surface was 14.0 μm, the width (tooth width) f of the convex portion was 3.4 μm, the width (groove width) of the concave portion was 10.6 μm, and the depth d of the concave portion (groove) was 17.3 μm. All of these values ​​are average values ​​measured within the analysis area. The ratio of the groove depth d to the unevenness interval τ (d / τ) was 1.24. Figure 25 also shows the analysis results of the undulations along two orthogonal directions in Figure 25 (the vertical and horizontal directions of the convex portions formed in a grid pattern).

[0085] (Liquid discharge test) Each tube in Example 1 and Comparative Example 1 was positioned with the tip surface facing downward and the tube's longitudinal direction aligned vertically. A 70% aqueous ethanol solution (surface tension: 26.3 mN / m) was pumped into the tube and ejected from the tip surface at a constant rate of 2.75 mL / min. The ejection process was photographed from the side of the tube using a high-speed camera (MEMERCAM HX, 500 fps, manufactured by NAC Image Technology, Inc.). Figure 26(a) shows an image of the ejection process from the tube in Example 1, which has a textured tip surface, and Figure 26(b) shows an image of the ejection process from the tube in Comparative Example 1, which does not have a textured tip surface. Based on the photographed images, the amount of liquid remaining at the tip immediately after a single droplet fell was calculated as the residual liquid volume (μL). The residual liquid volume in Comparative Example 1 was 5.9 μL, while the residual liquid volume in Example 1 was 1.6 μL, showing a reduction in the residual liquid volume of Example 1 by approximately 73% compared to Comparative Example 1. Figure 27 shows a graph comparing the residual liquid volumes (μL) in Example 1 and Comparative Example 1.

[0086] The photographs in Figures 24 and 25 reveal that an uneven structure with convex portions arranged in a grid pattern was formed on the tube tip surface. Furthermore, analysis of the undulations shown in Figure 25 revealed that the ratio (d / τ) of the depth d of the concave portions (grooves) to the spacing τ between the convex and concave portions was greater than 0.5. Furthermore, Figure 26 reveals that in Example 1, the adhesion of liquid to the tip surface was reduced from the time when the liquid began to be visible from the tube until the droplet separated from the tube and fell. Furthermore, Figures 26 and 27 reveal that the amount of liquid remaining at the tip of the tube immediately after the droplet fell was significantly reduced.

[0087] Although the present invention has been described above based on specific embodiments and examples, the present invention is not limited to these embodiments, etc. Furthermore, the above-described embodiments can be variously changed, modified, substituted, added, deleted, and combined within the scope of the claims, and these also fall within the technical scope of the present invention. [Explanation of symbols]

[0088] 1. Parts with openings 10. Main body of component with opening 12a Peripheral surface 12b Inner surface 12c Outer surface 15 aisle 15a opening 20 Uneven structure 21 Convex part 22 recess (groove) 30 Microscopic irregularities 31 Micro-protrusions 32 Micro recesses 50 Laser processing equipment 51 Laser light generating unit 52 Scanning unit 53 Condenser Lens

Claims

1. A member having an opening, A liquid material can flow out of the member or can flow in from the member through the opening, a concave-convex structure formed by short-pulse laser irradiation around the opening, A member with openings, wherein τ is the spacing between recesses in the recessed / protruding structure, and d is the depth of recesses in the recessed / protruding structure, satisfies d / τ≧0.

5.

2. The member with an opening according to claim 1 , wherein the passage that communicates with the opening and through which the liquid flows is in the form of a hole or a groove.

3. The member with an opening according to claim 1 or 2, wherein f2 / f1>1 is satisfied, where f1 is a width of a convex portion in the concave-convex structure and f2 is a width of a concave portion.

4. The member with an opening according to claim 1 or 2, wherein minute projections and depressions are formed on the tops of the projections in the projection and depression structure, the minute projections and depressions having a projection-projection spacing smaller than the projection-projection spacing of the projection and depression structure.

5. The member with an opening according to claim 1 or 2, wherein the convex portions of the concave-convex structure have a tapered shape.

6. The member with an opening according to claim 5 , wherein the tapered shape has a width that decreases toward the apex of the convex portion.

7. The member with an opening according to claim 5 , wherein the tapered shape has a width that increases toward the apex of the convex portion.

8. The member with an opening according to claim 1 or 2, wherein the uneven structure is formed on a peripheral surface surrounding the opening.

9. The member with an opening according to claim 1 or 2, wherein at least the surface of the concave-convex structure is not provided with a coating layer.

10. The member with an opening according to claim 1 or 2, wherein the unevenness interval τ is greater than 1 μm.

11. a member having an opening through which a liquid material can flow out to the outside of the member or into which a liquid material can flow from the outside of the member; irradiating a short pulse laser onto a periphery of the opening of the opening-formed member to form a concave-convex structure; A method for producing a member with an opening, wherein d / τ>0.5 is satisfied, where τ is the uneven spacing of the uneven structure and d is the depth of the recesses in the uneven structure.

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