Mapping device

Abstract

To more surely suppress an erroneous determination relating to a storage state of a substrate.SOLUTION: A load port 4 comprises a light-emitting section 62 and an imaging and determination section (a plurality of cameras 61 and a controller 66). The light-emitting section 62 includes a first light source (light sources 62A and 62B) capable of emitting first light of which the first wavelength is a peak wavelength and a second light source (light source 62C) capable of emitting second light of which the second wavelength is a peak wavelength. The imaging and determination section includes a first camera 63, a second camera 64, a first filter 71 and a second filter 72. The first camera 63 is provided correspondingly to the first light source. The second camera 64 is provided correspondingly to the second light source. The first filter 71 permeates the light of the first wavelength toward the first camera 63 and blocks the light of the second wavelength toward the first camera 63. The second filter 72 permeates the light of the second wavelength toward the second camera 64 and blocks the light of the first wavelength toward the second camera 64.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a mapping device. [Background technology]

[0002] Patent Document 1 discloses a load port (mapping device) equipped with a mapping sensor that detects substrates in a container. The mapping sensor includes multiple lights (light sources) and multiple cameras. Light emitted by each light source is reflected by the substrates in the container, and each camera detects the reflected light. As a result, each camera captures an image of a predetermined imaging area, and data (information) is acquired for determining the storage state of the substrates in the container. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2024-60329 Summary of the Invention [Problem to be solved by the invention]

[0004] The imaging area includes multiple detection areas (determination areas) for determining the storage status of the substrates. Each of the multiple light sources is provided to illuminate one or more corresponding determination areas (hereinafter referred to as corresponding areas) among the multiple determination areas. However, light emitted from the multiple light sources may be reflected by the side surfaces of the container or the like and may unintentionally illuminate determination areas other than the corresponding areas. Such light may cause an erroneous determination of the storage status of the substrates.

[0005] An object of the present invention is to more reliably prevent erroneous determinations regarding the accommodation state of a substrate. [Means for solving the problem]

[0006] A mapping device of a first invention is a mapping device that detects the storage state of substrates stored in a container, and comprises: a light-emitting unit that emits light toward at least the inside of the container; and an imaging determination unit that captures an image of a predetermined imaging area by sensing reflected light of the light emitted from the light-emitting unit to obtain imaging information and use the imaging information to determine the storage state of the substrates, wherein the light-emitting unit has a first light source capable of emitting first light having a peak wavelength at a predetermined first wavelength, and a second light source capable of emitting second light having a peak wavelength at a second wavelength different from the first wavelength, and the imaging determination unit has a first camera provided corresponding to the first light source, a second camera provided corresponding to the second light source, a first filter that transmits light of the first wavelength toward the first camera and blocks light of the second wavelength toward the first camera, and a second filter that transmits light of the second wavelength toward the second camera and blocks light of the first wavelength toward the second camera.

[0007] In the present invention, the first camera can be made to sense the first light and can be prevented from sensing the second light. Furthermore, the second camera can be made to sense the second light and can be prevented from sensing the first light. In other words, each camera can strongly sense necessary light and can suppress sensing unnecessary light. Therefore, erroneous determinations regarding the storage status of the boards can be more reliably suppressed.

[0008] A mapping device of a second invention is the mapping device of the first invention, characterized in that the second camera is a camera separate from the first camera.

[0009] In the present invention, a large amount of information regarding the storage state of the boards can be obtained by using multiple cameras, and therefore the storage state of the boards can be determined in detail.

[0010] A mapping device of a third invention is a mapping device that detects the storage state of substrates stored in a container, and includes a light-emitting unit that emits light toward at least the inside of the container, and an imaging determination unit that captures an image of a predetermined imaging area by sensing reflected light of the light emitted from the light-emitting unit to obtain imaging information and uses the imaging information to determine the storage state of the substrates, wherein the light-emitting unit has a first light source that can emit first light having a peak wavelength that is a predetermined first wavelength, and a second light source that can emit second light having a peak wavelength that is a second wavelength different from the first wavelength, and the imaging determination unit can acquire color content information that includes information about the color in the imaging area. and a judgment unit that judges the storage state of the board using the color content information, wherein when judging the storage state of the board in a predetermined first area of ​​the image capture area, the judgment unit uses first color content information from the color content information that indicates that the color camera has sensed the first light, and excludes second color content information from the color content information that indicates that the color camera has sensed the second light, and when judging the storage state of the board in a second area of ​​the image capture area that is different from the first area, the judgment unit uses the second color content information and excludes the first color content information from the judgment.

[0011] In the present invention, the influence of the second-color content information can be suppressed when determining the storage status of the board in the first area. Furthermore, the influence of the first-color content information can be suppressed when determining the storage status of the board in the second area. In other words, when determining the storage status of the board, necessary light can be utilized and unnecessary light can be excluded from the determination target. Therefore, similar to the first invention, erroneous determination of the storage status of the board can be more reliably suppressed.

[0012] A mapping device according to a fourth aspect of the present invention is the mapping device according to the third aspect of the present invention, characterized in that the imaging determination unit includes a plurality of the color cameras.

[0013] In the present invention, a large amount of information regarding the storage state of the boards can be obtained by using multiple color cameras, and therefore the storage state of the boards can be determined in detail.

[0014] The mapping device of the fifth invention is characterized in that, in any one of the first to fourth inventions, the imaging judgment unit judges the storage state of the board using the imaging information related to a plurality of judgment areas that are part of the imaging area, the number of a plurality of light sources including the first light source and the second light source is equal to the number of the plurality of judgment areas, and the peak wavelengths of the light emitted by each of the plurality of light sources are different from each other.

[0015] When one light source is assigned to multiple determination areas, it may be difficult to distinguish which of the multiple determination areas the reflected light from the light source corresponds to. This raises the risk of erroneous determination of the board storage status. In this regard, the present invention allows multiple light sources with different peak wavelengths to be assigned one-to-one to multiple determination areas. Therefore, the risk of erroneous determination can be reduced compared to when one light source is assigned to multiple determination areas.

[0016] A mapping method of a sixth invention is a mapping method for detecting the storage state of substrates stored in a container, and includes an emission step of emitting light from a light-emitting unit having a first light source that emits first light having a peak wavelength at a predetermined first wavelength and a second light source that emits second light having a peak wavelength at a second wavelength different from the first wavelength, and an imaging determination step of capturing an image of a predetermined imaging area using a camera that detects reflected light from the light emitted in the emission step to obtain imaging information and determining the storage state of the substrates using the imaging information, wherein the imaging determination step includes a first step of determining the storage state of the substrates in a predetermined first area of ​​the imaging area using first color content information corresponding to the first light in the imaging information, and a second step of determining the storage state of the substrates in a second area of ​​the imaging area different from the first area using second color content information corresponding to the second light in the imaging information.

[0017] According to the present invention, erroneous determinations regarding the accommodation state of the substrate can also be more reliably suppressed. [Brief explanation of the drawings]

[0018] [Figure 1] FIG. 1 is a schematic plan view of an EFEM equipped with a load port according to the present embodiment and its surroundings. [Figure 2] FIG. [Figure 3] FIG. 2 is a diagram schematically illustrating the positional relationship between a substrate and a camera. [Figure 4] 10(a) and 10(b) are diagrams illustrating the operation of the load port. [Figure 5] 10(a) and 10(b) are diagrams illustrating the operation of the load port. [Figure 6] (a) and (b) are graphs showing the wavelength dependence of the intensity of light captured by each camera. [Figure 7] FIG. 2 is a diagram showing an imaging area imaged by a camera. [Figure 8] 10 is a flowchart illustrating the entire mapping process. [Figure 9] 10 is a flowchart showing a determination process for each substrate. [Figure 10] 10(a) to 10(d) are diagrams for explaining the determination of the accommodation state of the substrate. [Figure 11] FIG. 10 is a schematic diagram of a substrate and a camera according to a modified example. [Figure 12] FIG. 10 is a schematic diagram of a substrate and a camera according to another modified example. [Figure 13] 10(a) to 10(d) are diagrams schematically illustrating steps for acquiring a color image. [Figure 14] FIG. 10 is a diagram schematically illustrating an example of pixel values ​​related to the first camera. [Figure 15] FIG. 10 is a diagram schematically illustrating an example of pixel values ​​related to the second camera. [Figure 16] FIG. 10 is a diagram schematically illustrating an example of pixel values ​​when a double state is detected. [Figure 17] FIG. 10 is a diagram schematically illustrating an example of pixel values ​​when a cross state is detected. DETAILED DESCRIPTION OF THE INVENTION

[0019] An embodiment of the present invention (hereinafter referred to as the present embodiment) will be described. For ease of explanation, the directions shown in FIG. 1 are defined as the front-rear and left-right directions. More specifically, the direction in which the EFEM 1 (described later) and the processing device 6 (described later) are arranged is defined as the front-rear direction. In the front-rear direction, the EFEM 1 side is defined as the front side. In the front-rear direction, the processing device 6 side is defined as the rear side. The direction perpendicular to the front-rear direction, in which multiple load ports 4 are arranged, is defined as the left-right direction. The direction perpendicular to both the front-rear direction and the left-right direction is defined as the up-down direction. The up-down direction is a direction parallel to the vertical direction in which gravity acts.

[0020] (Overview of the load port and its surrounding area) The schematic configuration of a load port 4 (mapping device of the present invention) according to this embodiment and its periphery will be described with reference to FIG. 1. FIG. 1 is a schematic diagram of an EFEM 1 equipped with multiple load ports 4 and its periphery. "EFEM" is an abbreviation for "Equipment Front End Module." The EFEM 1 is a device for transporting a substrate S between a FOUP 100 (container of the present invention) described below placed on each load port 4 and a processing device 6. For example, a semiconductor circuit (not shown) is formed on the substrate S. Examples of types of the substrate S include known semiconductor substrates (including wafers), glass substrates, and glass epoxy substrates. The substrate S has, for example, a substantially rectangular shape when viewed from above. The substrate S has, for example, an end surface SE (see FIG. 2) extending along the above-and-below direction.

[0021] 1, the EFEM 1 includes a housing 2, a transfer robot 3, a plurality of load ports 4, and a control device 5. A processing device 6 is disposed behind the EFEM 1.

[0022] The EFEM 1 is installed at a predetermined position in, for example, a semiconductor factory. The EFEM 1 transfers substrates S between a FOUP 100 placed on a load port 4 and a processing device 6 using a transfer robot 3 arranged in a transfer space 9 inside a housing 2. "FOUP" is an abbreviation for "Front-Opening Unified Pod." The FOUP 100 is a container that can accommodate multiple substrates S arranged vertically. The FOUP 100 is transferred, for example, by a FOUP transfer device (not shown). The FOUP 100 is transferred between the FOUP transfer device and the load port 4.

[0023] The housing 2 is a box-shaped member having a transfer space 9 in which the substrate S is transferred. The transfer space 9 is separated from the space outside the housing 2 (external space). A plurality of load ports 4 are connected to the front end of the housing 2. A load lock chamber 7 of a processing device 6 is connected to the rear end of the housing 2. The transfer robot 3 transfers the substrate S between the FOUP 100 and the load lock chamber 7.

[0024] The multiple load ports 4 are arranged, for example, side by side in the left-right direction. The multiple load ports 4 are attached to the front end of the housing 2. Each load port 4 is configured to receive a FOUP 100. Each load port 4 is configured to attach and detach a lid 102 (see FIG. 2) to and from a FOUP body 101 (see FIG. 2) of the FOUP 100. Each load port 4 is configured to be able to perform mapping of the multiple substrates S accommodated in the FOUP body 101.

[0025] The control device 5 is electrically connected to a control unit (not shown) of the transfer robot 3, an LP (load port) control device 46 (described later) of the load port 4, and a control unit (not shown) of the processing device 6. The control device 5 is configured to communicate with these control units. The control device 5 may also be electrically connected to a higher-level host computer HC.

[0026] The processing device 6 is a device that performs predetermined processing such as film formation, etching, packaging, bonding, molding, etc. on the substrate S. The processing device 6 has, for example, a load lock chamber 7 for temporarily waiting the substrate S, and a processing chamber 8 for performing predetermined processing on the substrate S.

[0027] (loading port) The configuration of the load port 4 will be described with reference to Figures 2 and 3. Figure 2 is a right side view of the load port 4. Figure 3 is a diagram schematically showing the positional relationship between the substrate S and a plurality of cameras 61, which will be described later (this positional relationship will be described later).

[0028] The load port 4 is configured to remove the lid 102 of the FOUP 100 from the FOUP body 101 and perform mapping of the multiple substrates S accommodated in the FOUP body 101. As shown in Fig. 2, the load port 4 has, for example, a base 41, a door mechanism 42, a support frame 43, a placement unit 44, a scanner unit 45, and an LP control device 46 (see Fig. 1).

[0029] The base 41 is a substantially flat member. When viewed from the front-to-rear direction, the base 41 has a substantially rectangular shape. The base 41 is arranged to extend in the up-and-down direction. The base 41 is fixed to the EFEM 1. The base 41 is part of a partition wall that separates the transfer space 9 from the external space. The base 41 has a substantially rectangular opening 41a. The opening 41a is arranged in the upper part of the base 41. The opening 41a is large enough to allow the lid 102 of the FOUP 100 to pass through in the front-to-rear direction. The opening 41a is opened and closed by a door main body 50, which will be described later.

[0030] Door mechanism 42 is configured to allow lid 102 to be attached to and detached from FOUP body 101. As shown in FIG. 2 , door mechanism 42 includes, for example, door body 50, door support portion 53, guide rail 54, lifting block 55, guide rail 56, motor 57, and motor 58.

[0031] The door body 50 is a plate-like member. When viewed from the front and rear, the door body 50 has a substantially rectangular shape. The door body 50 is supported by, for example, a door support portion 53. The door body 50 is provided with, for example, a suction holding portion (not shown) and a latch key (not shown). The suction holding portion holds the lid 102 by suction to the front surface of the door body 50. The lid 102 can be fixed to the FOUP body 101 by a locking mechanism (not shown). The latch key operates the locking mechanism to unlock and lock the lid 102 of the FOUP 100.

[0032] The door support portion 53 is a member that supports the door main body 50. The door support portion 53 is supported by a guide rail 54 so as to be movable in the front-rear direction. The door support portion 53 is driven to move in the front-rear direction by a motor 57. The door support portion 53 moves in the front-rear direction to move the door main body 50 between a closed position (see FIG. 4(b)) and an open position (see FIG. 5(a)). The closed position is the position of the door main body 50 when the door main body 50 blocks the opening 41a of the base 41. The open position is a position rearward of the closed position and is the position of the door main body 50 when the door main body 50 opens the opening 41a. The guide rail 54 is a member that guides the door support portion 53 in the front-rear direction. The guide rail 54 is provided on a lifting block 55. The lifting block 55 is a member for moving the door main body 50 up and down. The lifting block 55 supports the door support portion 53 so as to be movable in the front-rear direction. The lifting block 55 is guided in the vertical direction along the guide rail 56. The lifting block 55 is driven to move in the vertical direction by a motor 58. By moving the lifting block 55 in the vertical direction, the door body 50 moves between the open position (see FIG. 5(a)) and a retracted position (see FIG. 5(b)) that is lower than the open position. The guide rail 56 is a member that guides the lifting block 55 in the vertical direction. The guide rail 56 is attached to the base 41, for example. The guide rail 56 extends in the vertical direction.

[0033] The motor 57 is configured to drive the door support portion 53 to move in the front-rear direction. The motor 57 is, for example, a known stepping motor driven by a pulse signal. The motor 57 is configured to be controlled by the LP control device 46 so as to be able to control the position of the door support portion 53 in the front-rear direction.

[0034] The motor 58 is configured to drive the lifting block 55 to move up and down. The motor 58 is, for example, a known stepping motor driven by a pulse signal. The motor 58 is configured to be controlled by the LP control device 46 to control the position of the door support portion 53 in the up and down direction.

[0035] The support frame 43 is a member for supporting the placement unit 44. The support frame 43 is fixed to the base 41. The support frame 43 is disposed so as to protrude forward from a vertical midpoint of the base 41. The placement unit 44 is a platform-shaped member on which the FOUP 100 is placed. The placement unit 44 is supported by the support frame 43. The placement unit 44 is configured to be movable in the front-rear direction relative to the support frame 43. The placement unit 44 is configured to be movable by a drive mechanism (not shown) between a predetermined delivery position (see FIG. 4(a)) and a lid opening / closing position (see FIG. 4(b)) behind the delivery position. The delivery position is the position of the placement unit 44 when the FOUP 100 is ready to be delivered to and from a FOUP conveying device (not shown).

[0036] The scanner unit 45 is for detecting the plurality of substrates S in the FOUP 100. The scanner unit 45 is disposed in, for example, the transfer space 9. The scanner unit 45 may be fixed to, for example, the door body 50. This allows the scanner unit 45 to be driven by a motor 58 to move up and down integrally with the door body 50. As shown in FIG. 3, the scanner unit 45 has a plurality of cameras 61, a light emitting unit 62, a trigger sensor 65, and a controller 66 (the determination unit of the present invention). The combination of the plurality of cameras 61 and the controller 66 corresponds to the imaging determination unit of the present invention. The controller 66 may be provided inside the housing (not shown) of each camera 61.

[0037] Each of the multiple cameras 61 is a device for acquiring imaging data (imaging information of the present invention) of multiple substrates S. Each camera 61 is configured and arranged to be able to image multiple substrates S at once. Here, multiple substrates S refers to, for example, a portion of all substrates S housed in the FOUP 100. Alternatively, each camera 61 may be able to image each of the multiple substrates S one by one. In this embodiment, "imaging" refers to recording (i.e., photographing) an image of an object using each camera 61. Each camera 61 is configured and arranged to image a portion of the substrate S in the left-right direction. Each camera 61 is configured to image at least a portion of the end surface SE of the substrate S (more specifically, the rear end surface of the substrate S). The multiple cameras may be arranged, for example, above the door main body 50, and lined up in the left-right direction. Each camera 61 is electrically connected to the controller 66. Each camera 61 has, for example, a light receiving lens 61a and an imaging element (not shown). The light-receiving lens 61a is a light-collecting member configured to receive light and focus it on the image sensor. The surface of the light-receiving lens 61a faces, for example, the front side (FOUP side). The image sensor is a known device such as a CCD. The image sensor senses light, converts it into an electrical signal, and transmits the electrical signal to the controller 66.

[0038] The light-emitting unit 62 is, for example, a lighting device for illuminating the inside of the FOUP 100. The light-emitting unit 62 has, for example, a plurality of light sources 62A, 62B, and 62C (hereinafter also referred to as light sources 62A to 62C). Each of the light sources 62A to 62C has, for example, an LED element (not shown). Light (irradiation light) is irradiated from the light-emitting unit 62 toward at least the inside of the FOUP 100. More details of the light-emitting unit 62 will be described later.

[0039] A portion of the irradiated light emitted from the light-emitting unit 62 and directed forward is reflected backward (reflected light) by the substrate S or an inner wall surface 113 described below. In particular, the light reflected by the end surface SE (rear end surface) of the substrate S is used to detect the substrate S. A portion of the irradiated light (see the dashed line in FIG. 3) is reflected by the end surface SE and then sensed by one of the multiple cameras 61. The imaging element of each camera 61 senses the reflected light to image a portion of the rear end surface of the substrate S in the left-right direction and the background portion, thereby obtaining imaging data. The imaging data obtained by the imaging element is transferred to the controller 66.

[0040] The trigger sensor 65 is a sensor used to determine the timing at which the multiple cameras 61 start capturing images. More specifically, the trigger sensor 65 is configured to detect the movement of the door support portion 53, for example, when a portion of the door support portion 53 moves up or down. The trigger sensor 65 may be, for example, a known photointerrupter. The photointerrupter has a light-emitting portion and a light-receiving portion (not shown), and the light-receiving portion detects light (transmitted light) emitted from the light-emitting portion. As shown in FIG. 2 , the trigger sensor 65 is disposed, for example, inside the support frame 43 and immediately in front of the base 41. That is, when the door main body 50 is at least in the open position, the trigger sensor 65 is located near the door support portion 53 and is configured to detect, for example, the door support portion 53. The door support portion 53 includes, for example, a light-blocking portion (not shown) that is movable between a position that blocks and a position that does not block light emitted from the light-emitting portion of the trigger sensor 65. For example, when the transmitted light is blocked by the light-blocking portion, the trigger sensor 65 may send a signal (trigger signal) indicating that the door support portion 53 has been detected to the controller 66. For example, when the trigger sensor 65 detects that the transmitted light is no longer blocked as the door support portion 53 moves downward, the trigger sensor 65 may send a signal indicating that the door support portion 53 is no longer detected to the controller 66.

[0041] The trigger sensor 65 may have, for example, a photoreflector (reflective optical sensor) instead of a photointerrupter. Alternatively, the trigger sensor 65 may not be provided. In this case, the timing to start imaging may be determined by the LP control device 46 based on, for example, the number of pulse signals (number of steps) sent from the LP control device 46 to the motor 58.

[0042] The controller 66 is for executing the mapping process described below. The controller 66 includes a CPU, ROM, and RAM (memory), none of which are shown. The controller 66 performs calculations for the mapping process using the CPU in accordance with a program stored in the ROM. The controller 66 is electrically connected to the LP control device 46, the multiple cameras 61, and the trigger sensor 65. The controller 66 may include a known internal storage, such as a known NAND flash memory, HDD, or SSD, none of which are shown.

[0043] The LP control device 46 includes a CPU, ROM, and RAM (memory), none of which are shown. The LP control device 46 controls each mechanism of the load port 4 using the CPU in accordance with a program stored in the ROM. The LP control device 46 also communicates with the control device 5 of the EFEM 1 and the host computer HC, etc. The LP control device 46 also sends information related to the mapping process to the controller 66 (described below).

[0044] (FOUP) Next, a more specific example of the configuration of the FOUP 100 will be described with reference to Figures 2 and 3. The front, rear, left, and right directions shown in Figure 3 are directions for the sake of convenience when an opening 114, which will be described later, faces rearward.

[0045] The FOUP 100 is a container having a generally rectangular parallelepiped shape. The FOUP 100 is configured to be able to accommodate a plurality of substrates S arranged vertically. As shown in FIGS. 2 and 3, the FOUP 100 has a FOUP body 101 and a lid 102. The FOUP body 101 is a member having a generally rectangular parallelepiped shape. The FOUP body 101 can be supported by the placement portion 44. The FOUP body 101 has, for example, a wall portion 111, an opening 112, and a plurality of poles P.

[0046] The wall 111 is a substantially rectangular parallelepiped member arranged to surround the internal space of the FOUP 100. The wall 111 is formed, for example, by a plurality of substantially flat plate-shaped members (made of aluminum or other metals, or acrylic or other resins) fixed to one another with fasteners (not shown). The wall 111 has a plurality of inner wall surfaces 113 (see FIGS. 2 and 3). The opening 112 is arranged, for example, at the rear end of the FOUP body 101. The opening 112 has an opening 114 that is substantially rectangular when viewed from the front-to-rear direction.

[0047] Each of the multiple inner wall surfaces 113 is disposed to face the inside of the FOUP 100. Each inner wall surface 113 has, for example, a substantially rectangular shape. The multiple inner wall surfaces 113 include a back surface 113B, an upper surface 113U (see FIG. 2), a lower surface 113D (see FIG. 2), a left side surface 113L (see FIG. 3), and a right side surface 113R (see FIG. 3). The back surface 113B is the inner wall surface 113 disposed at the front-to-back side of the multiple inner wall surfaces 113. In FIG. 3, the back surface 113B faces the rear side (i.e., toward the opening 114 in the front-to-rear direction). The back surface 113B extends in the up-down and left-to-right directions. The back surface 113B is disposed on the opposite side of the opening 114 across the center of the FOUP body 101 in the front-to-rear direction. The top surface 113U is connected to the top end of the back surface 113B and extends to the rear end of the FOUP body 101 in the front-to-rear direction. The top surface 113U faces downward. The bottom surface 113D is connected to the bottom end of the back surface 113B and extends to the rear end of the FOUP body 101 in the front-to-rear direction. The bottom surface 113D faces upward. The left side surface 113L is connected to the left end of the back surface 113B, the left end of the top surface 113U, and the left end of the bottom surface 113D, respectively, and extends to the rear end of the FOUP body 101 in the front-to-rear direction. The left side surface 113L faces right. The right side surface 113R is connected to the right end of the back surface 113B, the right end of the top surface 113U, and the right end of the bottom surface 113D, respectively, and extends to the rear end of the FOUP body 101 in the front-to-rear direction. The right side 113R faces left.

[0048] The multiple poles P are for supporting multiple substrates S in a substantially horizontal position. The multiple poles P are arranged in a substantially rectangular parallelepiped space surrounded by the FOUP body 101. Each of the multiple poles P is, for example, a substantially rod-shaped member extending in the front-rear direction. Each of the multiple poles P is fixed, for example, to the rear surface 113B. A portion of a substrate S is placed on one of the poles P. As shown in FIG. 2, the multiple poles P are arranged vertically in correspondence with the multiple substrates S. As shown in FIG. 3, the multiple poles P are arranged horizontally. In other words, the multiple poles P include multiple first poles P1, multiple second poles P2, and multiple third poles P3. The multiple first poles P1 are arranged, for example, immediately to the left of the right side surface 113R and arranged vertically. The multiple second poles P2 are arranged, for example, at approximately the center of the FOUP body 101 in the left-right direction and arranged vertically. The multiple third poles P3 are arranged, for example, near the left side surface 113L, and are aligned in the vertical direction. The numbers of first poles P1, second poles P2, and third poles P3 are the same. One first pole P1, one second pole P2, and one third pole P3 are provided corresponding to one substrate S. A set of first pole P1, second pole P2, and third pole P3 are arranged at approximately the same positions in the vertical direction to support one substrate S. The space for supporting one substrate S is called a slot or pocket (hereinafter, for convenience of explanation, referred to as a slot). The FOUP 100 has multiple slots aligned in the vertical direction.

[0049] The lid 102 is configured to open and close the opening 114. The lid 102 is attached to and detached from the FOUP body 101 by the load port 4. The lid 102 has a locking mechanism (not shown) that can change the state of the lid 102 between a state where it is fixed to the FOUP body 101 and a state where it is released from the FOUP body 101. The locking mechanism is unlocked and locked by a latch key (not shown).

[0050] (Basic operation of the load port) The basic operation of the load port 4 will be described with reference to Figures 4(a) to 5(b). Figures 4(a) to 5(b) are right side views of the load port 4 in operation.

[0051] First, the FOUP 100 is placed on the placement unit 44 (see FIG. 4(a)). The LP control unit 46 moves the placement unit 44 from the delivery position (see FIG. 4(a)) to the lid opening / closing position (see FIG. 4(b)). Next, the LP control unit 46 adsorbs and holds the lid 102 on the adsorption holding unit of the door body 50, and causes the latch key to unlock the lock mechanism of the lid 102. Furthermore, the LP control unit 46 controls the motor 57 to move the door support unit 53 rearward (see the rightward arrow in FIG. 5(a)). This moves the door body 50 from the predetermined closed position (see FIG. 4(b)) to the open position (see FIG. 5(a)). As a result, the lid 102 is removed from the FOUP body 101.

[0052] Next, the LP control device 46 controls the motor 58 to move the door main body 50 from the open position (see FIG. 5(a)) to the retracted position (see FIG. 5(b)). Accordingly, the multiple cameras 61 and the like of the scanner unit 45 move downward integrally with the door main body 50. In response to a command from the controller 66, the multiple cameras 61 capture an image of a predetermined imaging area 200 (see FIG. 7), which will be described later, at a predetermined position in the vertical direction to obtain imaging data. The controller 66 performs a mapping process based on the imaging data obtained by the multiple cameras 61. The mapping process is a process that includes a determination regarding the storage state of each of the multiple boards S. The mapping process will be described in detail later.

[0053] After the mapping process is completed, the transfer robot 3 starts transferring the substrates S between the FOUP 100 and the processing device 6. The processing device 6 sequentially performs predetermined processes on some or all of the substrates S. The processed substrates S are returned to the FOUP 100 by the transfer robot 3. After all of the substrates S have been returned to the FOUP 100, the LP control device 46 causes the door mechanism 42 and the like to perform the reverse operation of opening the lid 102, thereby attaching the lid 102 to the FOUP 101 body. In this manner, a series of processes are performed from when the FOUP 100 is transferred to the load port 4 until it is ready to be removed.

[0054] Here, the imaging area 200 includes a plurality of determination areas 210 (see FIG. 7; details will be described later) for determining the storage state of the substrates S. Each of the plurality of light sources 62A to 62C is provided to illuminate one or more corresponding determination areas 210 (hereinafter referred to as a corresponding area) among the plurality of determination areas 210. However, light emitted from the light sources 62A to 62C may be reflected by the back surface 113B, the left side surface 113L, or the right side surface 113R of the FOUP 100, and may unintentionally illuminate a determination area 210 other than the corresponding area. Such light may cause an erroneous determination of the storage state of the substrates S. To minimize the possibility of an erroneous determination, a measure involving adjusting the position of the camera 61 has been considered. However, in reality, there is a limit to how much the rate of erroneous determination can be reduced by adjusting the position of the camera. Therefore, in order to more reliably prevent erroneous determination of the storage state of the substrates S, the load port 4 has the following configuration.

[0055] As described above, the scanner unit 45 has a plurality of cameras 61 and a light-emitting unit 62. As shown in Fig. 3, the plurality of cameras 61 includes, for example, a first camera 63 and a second camera 64 separate from the first camera 63.

[0056] (Light emitting part) The light-emitting unit 62 will be described in more detail. As described above, the light-emitting unit 62 has light sources 62A to 62C (see FIG. 3). Each of the light sources 62A to 62C is preferably, for example, a spot light. Spot light refers to a light source that emits light with a small beam angle (the angle at which light is emitted). The beam angle is generally defined as a planar angle. The beam angle is preferably, for example, 45 degrees or less. The beam angle is more preferably, for example, 10 degrees or less. In particular, for large substrates such as 510 mm x 515 mm or 600 mm x 600 mm, a beam angle of 0 to 26 degrees is preferable. In addition, in this embodiment, the thickness of the substrate S is assumed to be approximately 0.2 to 4.0 mm. The spot light can illuminate a specific area or object. Each of the light sources 62A to 62C is configured to be able to change (adjust) the direction in which light is emitted. Note that each of the light sources 62A to 62C may be a light source other than a spot light. Each of the light sources 62A to 62C may be, for example, a known bar light. Furthermore, one or more of the light sources 62A to 62C may have a diffusion plate (not shown). In this case, the one or more light sources are diffused lights that emit light approximately uniformly.

[0057] The light source 62A and the light source 62B are light sources provided corresponding to the first camera 63. The light source 62A and the light source 62B correspond to the first light source of the present invention. The light source 62A and the light source 62B are capable of emitting first light, for example, having a predetermined first wavelength as its peak wavelength (wavelength with the highest intensity). In this embodiment, for convenience of explanation, the first wavelength is assumed to be approximately 850 nm. In other words, the first light is near-infrared light (see the solid line in FIG. 6(a) and the dashed line in FIG. 6(b)). However, the first wavelength is not limited to this. The peak wavelength of the first light may be another wavelength falling within the near-infrared range of 780 nm to 1000 nm.

[0058] The light source 62C is a light source provided corresponding to the second camera 64. The light source 62C corresponds to the second light source of the present invention. The light source 62C is capable of emitting second light, for example, having a peak wavelength that is a second wavelength different from the first wavelength. In this embodiment, for convenience of explanation, the second wavelength is assumed to be approximately 640 nm. In other words, the second light is red light (see the dashed line in FIG. 6(a) and the solid line in FIG. 6(b)). However, the second wavelength is not limited to this. The peak wavelength of the second light may be another wavelength in the range of 625 nm to 780 nm.

[0059] (Camera specifications) Next, examples of the specifications of each camera 61 will be described with reference to Figures 6(a) and 6(b). Figures 6(a) and 6(b) are graphs showing the wavelength dependence of the intensity of light captured by each camera 61. Figure 6(a) shows the wavelength dependence of the intensity of light captured by the first camera 63. Figure 6(b) shows the wavelength dependence of the intensity of light captured by the second camera 64.

[0060] The first camera 63 is, for example, a low-magnification camera with a large horizontal angle of view. The first camera 63 is provided corresponding to the first light source. In this embodiment, the first camera 63 may be either a monochrome camera or a color camera. The horizontal angle of view of the first camera 63 is such that the vicinity of the first pole P1 and the vicinity of the second pole P2 are within the field of view. As a specific example, when mapping a substrate S measuring, for example, 510 mm x 515 mm, the horizontal angle of view is preferably 100° or more. More specifically, the horizontal angle of view is preferably 100° or more and 150° or less. The resolution of the first camera 63 is, for example, 1.2 million pixels. The imaging axis of the first camera 63 is, for example, approximately parallel to the front-to-rear direction (in other words, approximately horizontal). The horizontal angle of view, resolution, and orientation of the imaging axis of the first camera 63 are not limited to these.

[0061] The second camera 64 is, for example, a high-magnification camera with a smaller horizontal angle of view than the first camera 63. The second camera 64 is provided corresponding to the second light source. In this embodiment, the second camera 64 may be either a monochrome camera or a color camera. The horizontal angle of view of the second camera 64 is preferably, for example, between 30° and 35°. The horizontal angle of view is particularly preferably 34° or greater. The resolution of the second camera 64 is, for example, 1.2 million pixels. The imaging axis of the second camera 64 is, for example, approximately parallel to the front-to-rear direction (in other words, approximately horizontal). The horizontal angle of view, resolution, and orientation of the imaging axis of the second camera 64 are not limited to these.

[0062] Furthermore, a first filter 71 (see FIG. 3 ) is provided, for example, immediately in front of the light receiving lens 61 a (light receiving lens 63 a) of the first camera 63. The first filter 71 is configured to transmit light of a first wavelength directed toward the first camera 63 and block light of a second wavelength directed toward the first camera 63. The first filter 71 is, for example, a known bandpass filter that transmits only light of the first wavelength and its neighboring wavelengths (see the range indicated by the arrow in FIG. 6( a)). This allows the first camera 63 to mainly capture only the first light (see the solid line in FIG. 6( a)). Alternatively, the first filter 71 may be, for example, a known bandstop filter (notch filter) that blocks light of the second wavelength and its neighboring wavelengths. Alternatively, the first filter 71 may be, for example, a known high-pass filter. Furthermore, a second filter 72 (see FIG. 3 ) is provided, for example, immediately in front of the light receiving lens 61 a (light receiving lens 64 a) of the second camera 64. The second filter 72 is configured to transmit light of the second wavelength directed toward the second camera 64 and block light of the first wavelength directed toward the second camera 64. The second filter 72 is, for example, a known bandpass filter that transmits only light of the second wavelength and wavelengths nearby thereto. This allows the second camera 64 to mainly capture only the second light (see the solid line in FIG. 6(b)). Alternatively, the second filter 72 may be, for example, a known bandstop filter (notch filter) that blocks light of the first wavelength and wavelengths nearby thereto (see the range indicated by the arrow in FIG. 6(b)). Alternatively, the second filter 72 may be, for example, a known lowpass filter.

[0063] (Outline of camera placement) The layout of the cameras 61 will be outlined with reference to Fig. 3 and Fig. 7. Fig. 3 shows the positional relationship between the multiple cameras 61 and the FOUP 100 when the multiple cameras 61 are capturing an image of the substrate S. Fig. 7 is a diagram showing multiple imaging areas 200 (first imaging area 201 and second imaging area 202).

[0064] As shown in FIG. 3, the first camera 63 is disposed, for example, between the first pole P1 and the second pole P2 in the left-right direction. The first camera 63 is disposed at an appropriate position so that reflected light specularly reflected by the end face SE near the first pole P1 and reflected light specularly reflected by the end face SE near the second pole P2 travels toward the first camera 63. The distance between the first camera 63 and the first pole P1 in the left-right direction is preferably shorter than the distance between the first camera 63 and the second pole P2 in the left-right direction. The first camera 63 is configured and disposed to capture an image of a first imaging region 201 (see FIG. 7), which is one of the imaging regions 200. As shown in FIG. 7, the first imaging region 201 is longer in the up-down direction than the length obtained by, for example, adding up the diameter of the pole P and the thickness of the substrate S. The first imaging region 201 extends in the left-right direction, for example, from a position to the right of the first pole P1 to a position to the left of the second pole P2.

[0065] Data related to the determination region 210 (first determination region 211 and second determination region 212), which is a part of the first imaging region 201, is used as determination data to determine the accommodation state of the substrate S. The first determination region 211 is a region near the first pole P1. The second determination region 212 is a region near the second pole P2. For ease of explanation, the determination data related to the first determination region 211 will be referred to as first determination data. The determination data related to the second determination region 212 will be referred to as second determination data. In this embodiment, the first determination data and second determination data will also be collectively referred to as low-magnification data.

[0066] As shown in FIG. 3, the second camera 64 is disposed, for example, between the second pole P2 and the third pole P3 in the left-right direction. The second camera 64 is disposed at an appropriate position so that light specularly reflected by the end face SE located near the third pole P3 travels toward the second camera 64. The distance between the second camera 64 and the third pole P3 in the left-right direction is preferably shorter than the distance between the second camera 64 and the second pole P2 in the left-right direction. The second camera 64 is configured and disposed to capture an image of a second imaging region 202 (see FIG. 7), which is one of the imaging regions 200. As shown in FIG. 7, the second imaging region 202 is longer in the up-down direction than the length obtained by, for example, adding up the diameter of the pole P and the thickness of the substrate S. More specifically, the second imaging region 202 is longer in the up-down direction than the length obtained by, for example, adding up the diameter of the pole P and the thickness of two substrates S. The second imaging region 202 is set in advance, taking into account, for example, the design tolerance of the size of the pole P. The second imaging region 202 extends in the left-right direction, for example, from a position to the right of the third pole P3 to a position to the left of the third pole P3. However, this is not limited to this. The third pole P3 does not have to be included in the horizontal angle of view of the second camera 64.

[0067] Data relating to the determination area 210 (third determination area 213), which is part of the second imaging area 202, is used as determination data to determine the accommodation state of the substrate S. The third determination area 213 is an area in the vicinity of the third pole P3. For ease of explanation, the determination data relating to the third determination area 213 will be referred to as third determination data hereinafter. In addition, in this embodiment, the third determination data will also be referred to as high-magnification data.

[0068] (Details of camera and light source placement) A more detailed example of the arrangement of the cameras 61 and light sources 62A to 62C will be described with reference to FIGS. 3 and 7. As shown in FIG. 3, when the camera 61 captures an image of the imaging area 200, the camera 61 focuses reflected light using the light-receiving lens 61a. Generally, the principal points (front principal point and rear principal point), foci (front focal point and rear focal point), and nodal points (front nodal point and rear nodal point) of the lens are predetermined according to the lens specifications. Although not shown, in this embodiment, for convenience of explanation, the front nodal point of the light-receiving lens 61a (the center point of the surface of the light-receiving lens 61a on the substrate S side) is defined as the light-receiving point RP. The light-receiving point RP associated with the first camera 63 is referred to as the first light-receiving point RP1. The light-receiving point RP associated with the second camera 64 is referred to as the second light-receiving point RP2.

[0069] 7, a predetermined point included in each determination region 210 and included in the end surface SE is referred to as a detection target point SP (see FIGS. 3 and 7) for ease of explanation. The position of the detection target point SP in the left-right and front-rear directions is set in advance depending on, for example, the specifications of the FOUP 100, the specifications of the substrate S, the arrangement of the light-emitting unit 62, and the configuration and arrangement of the camera 61. The detection target point SP included in the first determination region 211 is referred to as a first detection target point SP1. As shown in FIG. 3, the first detection target point SP1 may be located, for example, to the left of the first pole P1 (i.e., inside the first pole P1 in the left-right direction). The detection target point SP included in the second determination region 212 is referred to as a second detection target point SP2. As shown in FIG. 3, the second detection target point SP2 may be located, for example, at approximately the same position as the center position of the second pole P2 in the left-right direction. The detection target point SP included in the third determination region 213 is referred to as a third detection target point SP3. 3, the third detection target point SP3 may be located, for example, to the right of the third pole P3 (i.e., inside the third pole P3 in the left-right direction). The positions of the detection target points SP are not limited to those described above. For example, one or more detection target points SP may be set directly above the corresponding pole P.

[0070] The first camera 63 captures an image of an imaging area 200 (first imaging area 201; see FIG. 7) including the first detection target point SP1 and the second detection target point SP2. The second camera 64 captures an image of an imaging area 200 (second imaging area 202; see FIG. 7) including the third detection target point SP3. In this way, the multiple (two) cameras 61 capture images of an area including multiple (three in total) detection target points SP on each board S.

[0071] As shown in FIG. 3, for convenience of explanation, a virtual line passing through a predetermined light receiving point RP and a predetermined detection target point SP is referred to as a virtual line VL. More specifically, the virtual line VL passing through the first light receiving point RP1 and the first detection target point SP1 is referred to as a first virtual line VL1. The virtual line VL passing through the first light receiving point RP1 and the second detection target point SP2 is referred to as a second virtual line VL2. The virtual line VL passing through the second light receiving point RP2 and the third detection target point SP3 is referred to as a third virtual line VL3. The first virtual line VL1 intersects with, for example, the right side surface 113R of the FOUP 100. The second virtual line VL2 and the third virtual line VL3 intersect with, for example, the left side surface 113L of the FOUP 100. The right side surface 113R and the left side surface 113L are side surfaces of the inner wall surface 113 that are different from the back surface 113B. For convenience of explanation, the back surface 113B is also referred to as the opposing surface. For convenience of explanation, the right side surface 113R and the left side surface 113L (that is, the side surfaces other than the facing surfaces) are also collectively referred to as non-facing surfaces.

[0072] When the light source 62A is a spot light or a bar light, it is preferable that the optical axis of the light source 62A extends toward the first detection target point SP1 (see dashed line). The light source 62B is installed so as to illuminate the second detection target point SP2 (see dashed line). The light source 62B is, for example, a diffuse light. Alternatively, the light source 62B may be a spot light or a bar light. When the light source 62C is a spot light or a bar light, it is preferable that the optical axis of the light source 62C extends toward the third detection target point SP3 (see dashed line).

[0073] Each camera 61 mainly senses light emitted from a light source (corresponding light source) provided corresponding to the camera, and blocks light emitted from light sources other than the corresponding light source. The first filter 71 and the second filter 72 can minimize the inclusion of light that may cause erroneous detection of the substrate S in the image data related to the determination region 210.

[0074] Furthermore, when at least one of the light sources 62A, 62B, and 62C is a spot light, the spot light provides the following effect. That is, the spot light can irradiate a narrow range of light toward a target location (a part of the end face SE) of the substrate S, thereby strengthening the light reflected by the end face SE. This increases the brightness difference between the end face SE and the background. This prevents the background from being mistakenly detected as the substrate S.

[0075] (Mapping process) Next, an example of the mapping process (mapping method) executed by the load port 4 will be described mainly with reference to Fig. 8. Fig. 8 is a flowchart showing the entire mapping process.

[0076] The initial state is as follows: A FOUP 100 containing multiple substrates S is placed on the placement section 44. The placement section 44 is located in the lid open / close position. The lid 102 of the FOUP 100 is opened by the door mechanism 42. The door body 50 is located in the open position (see FIG. 5(a)).

[0077] First, the LP control device 46 transmits information (schedule information) related to the schedule for imaging by the camera 61 to the controller 66. The information related to the imaging schedule includes, for example, the specifications of the FOUP 100, the number of substrates S that can be stored in the FOUP 100, the position of the uppermost slot among the multiple slots in the FOUP 100, and the set value for the lowering speed of the door body 50. The schedule information is transmitted in advance to the LP control device 46 from, for example, a control unit (not shown) of the processing device 6. In addition to the schedule information, for example, a set value for the thickness of the substrates S (information for performing double determination, described later) is also transmitted in advance from the control unit of the processing device 6 to the LP control device 46. The controller 66 receives the schedule information from the LP control device 46 (step S101 shown in FIG. 8). The controller 66 calculates an imaging schedule based on the schedule information (step S102). The imaging schedule is a schedule of timing for causing the camera 61 to capture an image after a certain time has elapsed since the controller 66 received a predetermined trigger signal.

[0078] Next, the LP control device 46 controls the motor 58 of the door mechanism 42 to start lowering the scanner unit 45 together with the door main body 50 (and the door support portion 53) (step S103). At this time, the trigger sensor 65 detects the start of movement of the door support portion 53 and sends a detection signal to the controller 66. The controller 66 receives the detection signal as the trigger signal (step S104). Thereafter, the controller 66 causes each camera 61 to capture an image based on the imaging schedule, for example, in the following procedure. The controller 66 causes the light sources 62A to 62C to emit light at least while each camera 61 is capturing an image (light emitting step).

[0079] The controller 66 sets to an initial value a counter for counting (determining) the substrates S accommodated in the FOUP 100 one by one from the top. More specifically, the controller 66 inputs, for example, 1 into a predetermined variable N (step S105).

[0080] Next, the controller 66 determines whether the timing for imaging the Nth substrate S has arrived based on the imaging schedule (step S106). If the timing for imaging the Nth substrate S has not arrived (step S106: No), the LP control device 46 continues to lower the scanner unit 45. If the timing for imaging the Nth substrate S has arrived (step S106: Yes), the controller 66 controls the multiple cameras 61 to image the imaging area 200 related to the Nth substrate S and acquire imaging data related to the substrate S (step S107). More specifically, the controller 66 causes the first camera 63 to image the first imaging area 201 and the second camera 64 to image the second imaging area 202. The controller 66 temporarily stores the imaging data acquired by these cameras 61 in, for example, a memory. The controller 66 may further store the imaging data in, for example, the internal storage (not shown) described above.

[0081] Next, the controller 66 determines the accommodation state of the Nth substrate S based on the determination data included in the imaging data (determination process, step S108). Details will be described later. The combination of the imaging step and the determination process step corresponds to the imaging determination step of the present invention.

[0082] Next, the controller 66 determines whether the determination process for all substrates S has been completed (step S109). If the controller 66 determines that there are still substrates S for which the determination process has not been performed (step S109: No), the controller 66 adds 1 to the variable N (step S110), for example, and returns to step S106. If the determination process for all substrates S has been completed (step S109: Yes), the controller 66 ends the mapping process.

[0083] (Determination process) An example of the process for determining the storage state of each substrate S will be described with reference to Figures 9 to 10(d). Figure 9 is a flowchart showing the determination process for each substrate S. Figures 10(a) to 10(d) are diagrams for explaining the determination of the storage state of a substrate S. In summary, the controller 66 determines whether the storage state of the Nth substrate S is a double state or a cross state, whether the Nth substrate S is not present, or whether the Nth substrate S is stored normally.

[0084] In the following determination process, the controller 66 uses data relating to the determination area 210 in the imaging area 200 as determination data. Note that, when at least one of the light sources 62A, 62B, and 62C is a spotlight, the spotlight can intensify the reflected light from the end face SE, as described above. This increases the brightness difference between the end face SE and the background.

[0085] First, the controller 66 determines whether the accommodation state of the Nth substrate S is a double state (double determination; step S201 shown in FIG. 9). The double state is a state in which two (or more) substrates S are accommodated in one slot, stacked one on top of the other, as shown in FIG. 10(a). The controller 66 detects the thickness of the Nth substrate S, for example, based on the third determination data. If the detected thickness exceeds the set value for the thickness of one substrate S, the controller 66 determines that the accommodation state of the Nth substrate S is a double state (i.e., a double state is detected). If the detected thickness is approximately the same as the set value for the thickness of one substrate S, the controller 66 determines that the accommodation state of the Nth substrate S is not a double state.

[0086] When the double state is detected (step S202: Yes), the controller 66 stores information indicating that the accommodation state of the Nth substrate S is the double state in the memory (step S203). Then, the controller 66 ends the determination regarding the Nth substrate S.

[0087] When a double state is not detected (step S202: No), the controller 66 determines whether the storage state of the Nth substrate S is a cross state (cross determination). A cross state is a state in which part of the substrate S is placed on one of a pair of poles P lined up in the left-right direction, and another part of the substrate S is located below the pair of poles P, as shown in Fig. 10(b) or 10(c), for example.

[0088] As a procedure for cross determination, first, the controller 66 determines whether the accommodation state of the Nth substrate S is a cross state based on, for example, low-magnification data (step S204). More specifically, the controller 66 compares the vertical position of the substrate S detected based on the first determination data (hereinafter referred to as the first substrate position) with the vertical set position of the first pole P1 corresponding to the substrate S (hereinafter referred to as the first set position). The vertical set position of each pole P is pre-stored in the memory of the controller 66. Note that, since a design tolerance is allowed for the position of each pole P, there may be a difference between the designed vertical position of each pole P and its actual position. In this case, the controller 66 may detect the actual position of each pole P by, for example, pattern matching. For example, when the first substrate position is lower than the first set position, the controller 66 determines that the accommodation state of the Nth substrate S is a cross state (i.e., the cross state is detected).

[0089] Furthermore, the controller 66 compares the vertical position of the substrate S detected based on the second determination data (hereinafter referred to as the second substrate position) with the vertical set position of the second pole P2 corresponding to the substrate S (hereinafter referred to as the second set position). The second set position may be set as, for example, the same position as the first set position in the vertical direction, or may be set independently of the first set position. For example, when the second substrate position is lower than the second set position, the controller 66 determines that the accommodation state of the Nth substrate S is a cross state (i.e., a cross state is detected). When a cross state is detected (step S205: Yes), the controller 66 stores information indicating that the accommodation state of the Nth substrate S is a cross state in memory (step S206). Then, the controller 66 ends the determination regarding the Nth substrate S.

[0090] When a cross state is not detected based on the low-magnification data (step S205: No), the controller 66 performs a cross determination taking into account the high-magnification data (step S207). The controller 66 compares the vertical position of the substrate S detected based on the third determination data (hereinafter referred to as the third substrate position) with the vertical set position of the third pole P3 corresponding to the substrate S (hereinafter referred to as the third set position). The third set position may be the same as the first set position and / or the second set position in the vertical direction, or may be set independently of the first set position and the second set position. For example, when the third substrate position is lower than the third set position, the controller 66 determines that the accommodation state of the Nth substrate S is a cross state (i.e., a cross state is detected). When a cross state is detected (step S208: Yes), the controller 66 executes step S206 and ends the determination for the Nth substrate S.

[0091] When a cross state is not detected even taking into consideration the high-magnification data (step S208: No), the controller 66 determines whether or not a substrate S is present (step S209). More specifically, the controller 66 determines whether or not a substrate S is detected in any of the first judgment area 211, the second judgment area 212, and the third judgment area 213 based on the judgment data. When a substrate S is not detected in any of the judgment areas 210 (see FIG. 10(d)), the controller 66 determines that the Nth substrate S does not exist (step S210: No). In this case, the controller 66 stores information indicating that the Nth substrate S does not exist in memory (step S211). Then, the controller 66 ends the determination regarding the Nth substrate S. When a substrate S is detected in any of the judgment areas 210, the controller 66 determines that the Nth substrate S exists (i.e., is correctly stored) (step S211: No). In this case, the controller 66 ends the determination regarding the Nth substrate S. In this way, the determination process for the Nth substrate S is completed.

[0092] As described above, the first camera 63 can be made to sense the first light, and the first camera 63 can be prevented from sensing the second light. Furthermore, the second camera 64 can be made to sense the second light, and the second camera 64 can be prevented from sensing the first light. In other words, each camera 61 can strongly sense necessary light and suppress detection of unnecessary light. Therefore, erroneous determination of the storage state of the substrate S can be more reliably suppressed.

[0093] Next, a modified example of the embodiment will be described, with the same reference numerals being used to designate components having the same configuration as the embodiment, and the description thereof will be omitted as appropriate.

[0094] (1) The controller 66 may be capable of determining a cross state other than the cross state described in the above embodiment. That is, the controller 66 may determine that the storage state of the substrate S is a cross state even when the substrate S is not detected in some (any one or two) of the first determination area 211, the second determination area 212, and the third determination area 213. This situation is likely to occur, for example, when a substrate S that is easily bent because it is very thin or the like is stored in the FOUP 100, and when part of the substrate S is unintentionally placed below the pole P, the part sags significantly due to gravity.

[0095] (2) In the above-described embodiment, the first camera 63 is provided corresponding to the first light source (light sources 62A and 62B). The second camera 64 is provided corresponding to the second light source (light source 63C). The first camera 63 includes the first filter 71, and the second camera 64 includes the second filter 72. However, this is not limited to this. For example, the light source 62B may be configured to emit light (e.g., general green light) having a peak wavelength different from that of both the light source 62A and the light source 62C. In this case, it is preferable that a third camera (not shown) is further provided corresponding to the light source 62B. It is preferable that the third camera has a third filter (not shown) that transmits green light and blocks light other than green light. Alternatively, the light source 62B may be capable of emitting infrared light. In this case, it is preferable that the third filter transmits infrared light and blocks light other than infrared light. That is, the third camera may be a known infrared camera.

[0096] (3) In the above-described embodiments, light sources 62A and 62B correspond to the first light source of the present invention, and light source 62C corresponds to the second light source of the present invention. However, this is not limited to this. For example, as shown in FIG. 11 , instead of first filter 71, filter 73 (first filter of the present invention) and filter 74 (second filter of the present invention) may be provided in front of first camera 63. Filter 73 may transmit only reflected light of light emitted by light source 62A. Filter 74 may transmit only reflected light of light emitted by light source 62B. In this case, light source 62A corresponds to the first light source of the present invention. Light source 62B corresponds to the second light source of the present invention. Furthermore, first camera 63 corresponds to both the first camera and the second camera of the present invention. In other words, the first camera and the second camera of the present invention may be the same camera.

[0097] (4) In the above-described embodiment, each camera 61 is provided with a different type of filter, thereby suppressing the detection of unnecessary light by each camera 61. However, this is not limited to this. The effects of unnecessary light may be suppressed by other means. A more specific description will be given with reference to FIGS. 12 to 15. FIG. 12 is a schematic diagram of a substrate S and a camera 61 according to a modified example. FIG. 13(a) is a schematic diagram showing a small portion of an image sensor IS (described later). FIGS. 13(b) to 13(d) are schematic diagrams showing a small portion of digital data (pixel values) (described later). More specifically, FIG. 13(b) is a schematic diagram showing a portion of pixel values ​​of each color channel (described later). FIG. 13(c) is a schematic diagram showing a portion of pixel values ​​after interpolation (described later). FIG. 13(d) is a schematic diagram showing a portion of color image data. FIG. 14 is a schematic diagram showing pixel values ​​of a color image related to the first camera 63. FIG. 15 is a diagram schematically showing pixel values ​​of a color image from the second camera 64. FIG. 16 is a diagram schematically showing an example of pixel values ​​when a double state is detected. FIG. 17 is a diagram schematically showing an example of pixel values ​​when a cross state is detected. The up-down direction on the paper of FIGS. 12 to 17 corresponds to the up-down direction in this embodiment. The left-right direction on the paper of FIGS. 12 to 17 corresponds to the left-right direction in this embodiment. The up-down direction on the paper of FIGS. 13(b) to 13(d) is also called the vertical direction, and the left-right direction on the paper of FIGS. 13(b) to 13(d) is also called the horizontal direction.

[0098] Light source 62A (see FIG. 12) may be capable of emitting, for example, the above-mentioned near-infrared light. Light source 62B may be capable of emitting, for example, the above-mentioned green light. Light source 62C may be capable of emitting, for example, the above-mentioned red light. Light source 62A is provided corresponding to first detection target point SP1. Light source 62B is provided corresponding to second detection target point SP2. Light source 62C is provided corresponding to third detection target point SP3.

[0099] As shown in FIG. 12, in this modified example, the first camera 63 may not have the first filter 71 (see FIG. 3). Also, the second camera 64 may not have the second filter 72 (see FIG. 3). However, in this modified example, each camera 61 is a color camera such as a known RGB camera. The following description will be given assuming that each camera 61 is an RGB camera. Also, for the sake of convenience, each camera 61 is assumed to be a known single-chip color camera. However, the type of color camera is not limited to this.

[0100] The image sensor IS (see FIG. 13(a)) included in each camera 61 has a plurality of pixels PX arranged in a matrix. Each of the plurality of pixels PX has one optical sensor (e.g., a photodiode) and one of red (R), green (G), and blue (B) color filters (not shown). For ease of explanation, a pixel PX having a red color filter will be referred to as an R pixel PXR. A pixel PX having a green color filter will be referred to as a G pixel PXG. A pixel PX having multiple blue color filters will be referred to as a B pixel PXB. The red color filter mainly transmits light in the red wavelength region. The green color filter mainly transmits light in the green wavelength region. The blue color filter mainly transmits light in the blue wavelength region. However, in this embodiment, the three types of color filters transmit a portion of the near-infrared light described above. The transmittance of near-infrared light is, for example, approximately the same among the three types of color filters. The reason for this will be described later.

[0101] As shown in Fig. 13(a), multiple R pixels PXR are arranged spaced apart vertically and horizontally. The same is true for multiple G pixels PXG and B pixels PXB. In Fig. 13(a), for ease of viewing, the R pixels PXR, G pixels PXG, and B pixels PXB are hatched with different patterns. In Fig. 13(b), reference numerals are omitted, but image data acquired using each of the R pixels PXR, G pixels PXG, and B pixels PXB is shown. The hatching patterns in Figs. 13(b) to 13(d) correspond to the hatching patterns in Fig. 13(a).

[0102] The controller 66 (or camera) generates image data (RGB color image data) based on the light detected by the image sensor IS, using the following procedure: Each pixel PX generates an analog signal corresponding to the intensity of the input light. The analog signal is converted into a discrete numerical value (digital data, hereinafter referred to as pixel value) between 0 and 255, for example, by a known analog-to-digital converter (ADC). At this point, the pixel value is data representing a grayscale image in which each pixel PX has a different color channel. A color channel is information indicating the color attribute assigned to each pixel PX according to the arrangement of the pixels PX.

[0103] First, the controller 66 (or the camera 61) separates pixel values ​​for each color channel and handles them separately. The pixel values ​​of each color channel separated in this way are missing in both the vertical and horizontal directions (see FIG. 13(b)). Next, the controller 66 (or the camera 61) interpolates these missing pixel values ​​using a well-known color demosaicing process (see FIG. 13(c)). Examples of interpolation methods include well-known bilinear interpolation and edge sensing interpolation (details will not be described here). A plurality of pixel values ​​including the interpolated data are handled as information for a single RGB color image (see FIG. 13(d)).

[0104] In principle, the larger the R, G, and B pixel values ​​are, the stronger the light is. In Figs. 14 to 17, three types of pixel values ​​corresponding to each coordinate of the color image are shown. More specifically, at each coordinate, the three types of pixel values ​​are written in parentheses and separated by commas. The information relating the coordinates and pixel values ​​corresponds to the color content information of the present invention.

[0105] 14 to 17, the first pixel value (hereinafter also referred to as the R pixel value) written at the left end of the parentheses generally indicates the intensity of red light. The second pixel value (hereinafter also referred to as the G pixel value) written at the center of the parentheses generally indicates the intensity of green light. The third pixel value (hereinafter also referred to as the B pixel value) written at the right end of the parentheses generally indicates the intensity of blue light. The symbols written in FIGS. 14 to 17 indicate coordinates. For convenience of explanation, coordinates P123, P124, and P125 (see FIG. 14) are assumed to be coordinates related to the first determination region 211 (see FIG. 7) described above. Furthermore, coordinates P173, P174, and P175 (see FIG. 14) are assumed to be coordinates related to the second determination region 212 (see FIG. 7) described above. Furthermore, coordinates P243, P244, and P245 (see FIG. 15) are assumed to be coordinates related to the above-mentioned third determination region 213 (see FIG. 7).

[0106] For example, at coordinate P111, all three pixel values ​​are 0. This indicates that none of the R, G, or B light was detected at coordinate P111. The same is true for coordinates P118, P181, and P188 shown in Fig. 12, and coordinates P211, P218, P281, and P288 shown in Fig. 15.

[0107] As shown in FIG. 14, for example, at coordinates P123 and P124, the pixel value for R is 150, and the other pixel values ​​are 0. This indicates that a somewhat strong red light (reflected light of light emitted from light source 62C) was unintentionally detected at coordinates P123 and P124. The same is true for coordinates P174 and P175. For example, at coordinate P175, the pixel value for G is 200, and the other pixel values ​​are 0. This indicates that a strong green light (reflected light of light emitted from light source 62B) was detected as intended at coordinate P175.

[0108] Exceptionally, in this embodiment, when the above-described near-infrared light (reflected light of light emitted from light source 62A) is detected, pixel values ​​with R, G, and B intensities that are approximately equal are acquired. This is due to the wavelength of light transmitted by the color filter (not shown) of pixel PX, as described above. As shown in FIG. 14, for example, assume that at coordinate P125, all three pixel values ​​are 90. Such results are obtained both when weak white light with approximately equal R, G, and B intensities is input to pixel PX and when near-infrared light is input to pixel PX. In this modified example, by not providing a light source of so-called white light (light having various wavelength components), it can be assumed that such pixel values ​​are obtained as intended due to near-infrared light rather than white light.

[0109] As shown in FIG. 15, for example, assume that at coordinates P243 and P244, all three pixel values ​​are 70. This means that near-infrared light (reflected light emitted from light source 62A) has been unintentionally detected. Also, for example, at coordinate P245, the R pixel value is 200, and the other pixel values ​​are 0. This means that strong red light (reflected light emitted from light source 62C) has been detected as intended at coordinate P245.

[0110] When making a determination regarding each determination region 210, the controller 66 takes into consideration one or more types of pixel values ​​associated with the light source corresponding to the detection target point SP included in each determination region 210. The controller 66 sets a threshold value for each of the one or more types of pixel values. For example, if all of the one or more types of pixel values ​​at a certain coordinate are equal to or greater than their respective threshold values, it can be determined that reflected light of light emitted from the corresponding light source has been detected at the coordinate.

[0111] For example, when making a determination regarding the first determination region 211 including the first detection target point SP1, the controller 66 uses three types of pixel values ​​associated with the light source 62A that emits near-infrared light. More specifically, the controller 66 determines that light from the light source 62A has been detected if all three types of pixel values ​​are equal to or greater than the respective thresholds for each coordinate. Note that for pixels where only light from the other light sources 62B (green light) and 62C (red light) is detected, the third type of pixel value is below the threshold. Therefore, it can be assumed that reflected light from the substrate S has not been detected at this coordinate. Furthermore, when making a determination regarding the second determination region 212 including the second detection target point SP2, the controller 66 uses the G pixel value associated with the light source 62B that emits green light. The controller 66 determines that light from the light source 62B has been detected if the G pixel value is equal to or greater than the threshold for each coordinate. When making a determination regarding the third determination region 213 including the third detection target point SP3, the controller 66 takes into account the pixel value of R associated with the light source 62C that emits red light. For each coordinate, the controller 66 determines that light from the light source 62C has been detected if the pixel value of R is equal to or greater than a threshold value.

[0112] In other words, when determining the storage state of the substrate S in the first judgment area 211, for example, the controller 66 uses first color inclusion information (i.e., comprehensive information on R, G, and B pixel values) indicating that the first camera 63 has sensed near-infrared light among the color inclusion information. Furthermore, even if second color inclusion information (information on the G pixel value alone) acquired by the first camera 63 sensing green light is equal to or greater than a threshold, the controller 66 does not determine the storage state of the substrate S in the first judgment area 211 based on that fact. In other words, when determining the storage state of the substrate S in the first judgment area 211, the controller 66 excludes the second color inclusion information from the determination target. This process corresponds to the first step of the present invention. Furthermore, when determining the storage state of the substrate S in the second judgment area 212, which is different from the first judgment area 211 in the imaging area 200, the controller 66 takes the second color inclusion information into consideration and excludes the first color inclusion information from the determination target. This process corresponds to the second step of the present invention. In this modified example, light source 62A corresponds to the first light source of the present invention. The near-infrared light corresponds to the first light of the present invention. First determination region 211 corresponds to the first region of the present invention. Light source 62B corresponds to the second light source of the present invention. The green light corresponds to the second light. Second determination region 212 corresponds to the second region of the present invention.

[0113] A case where the accommodation state of the substrate S is normal will be described more specifically. As shown in FIG. 14, the pixel value at coordinate P125 is a pixel value indicating that near-infrared light has been detected as intended. The controller 66 compares the pixel value at coordinate P125 with a threshold value. As a result, the controller 66 takes the comparison result into consideration when determining the accommodation state of the substrate S in the first judgment area 211. The pixel values ​​at coordinates P123 and P124 are pixel values ​​indicating that red light has been unintentionally detected. The controller 66 compares the pixel values ​​at coordinates P123 and P124 with a threshold value. As a result, the controller 66 excludes the comparison result from the determination target when determining the accommodation state of the substrate S in the first judgment area 211. Furthermore, the pixel value at coordinate P175 is a pixel value indicating that green light has been detected as intended. The controller 66 compares the pixel value at coordinate P175 with a threshold value. As a result, the controller 66 takes the comparison result into consideration when determining the accommodation state of the substrate S in the second judgment area 212. The pixel values ​​at the coordinates P173 and P174 are pixel values ​​indicating that red light has been unintentionally detected. The controller 66 compares the pixel values ​​at the coordinates P173 and P174 with a threshold value. As a result, the controller 66 excludes the comparison result from the determination target when determining the accommodation state of the substrate S in the second judgment area 212. Also, as shown in FIG. 15 , the pixel value at the coordinate P245 is pixel values ​​indicating that red light has been detected as intended. The controller 66 compares the pixel value at the coordinate P245 with the threshold value. As a result, the controller 66 uses the comparison result when determining the accommodation state of the substrate S in the third judgment area 213. The pixel values ​​at the coordinates P243 and P244 are pixel values ​​indicating that red light has been unintentionally detected. The controller 66 compares the pixel values ​​of the coordinates P243 and P244 with the threshold value. As a result, the controller 66 excludes the comparison result from the determination of the accommodation state of the substrate S in the third determination area 213.

[0114] By the controller 66 making the above-described determination, light emitted from light sources other than the light sources corresponding to each determination area 210 is excluded from the determination target (i.e., ignored) when determining the accommodation state of the substrate S.

[0115] With reference to Figure 16, an example of pixel values ​​when a double state is detected will be described. For example, the pixel value of R at coordinate P244 shown in Figure 16 is 200, which is different from the pixel value of R at coordinate P244 shown in Figure 15. This pixel value is high, just like the pixel value of R at coordinate P245. In other words, the number of pixels with high R pixel values ​​in the vertical direction is greater than in Figure 15. In such a case, the controller 66 detects a double state.

[0116] An example of pixel values ​​when a cross state is detected will be described with reference to Figure 17. For example, the R, G, and B pixel values ​​of coordinate P125 shown in Figure 17 are all 0, which are different from the R, G, and B pixel values ​​of coordinate P125 shown in Figure 14. Also, the R, G, and B pixel values ​​of coordinate P127 shown in Figure 17 are all 90. In other words, the position of substrate S shown in Figure 17 is different from the position of substrate S when it is properly accommodated in FOUP 100. In such a case, controller 66 detects a cross state.

[0117] Although not shown in the figure, a case where the substrate S is not present will be described. Even when the substrate S is not present, the pixel values ​​of R may be high at coordinates P123, P124, P173, and P174 (see FIG. 14) due to the influence of reflected light from the FOUP 100. However, as described above, these pixel values ​​are not taken into consideration. Therefore, false detection of the substrate S can be suppressed.

[0118] As a result, the influence of the second color content information can be suppressed when determining the storage state of the substrate S in the first determination area 211. Also, the influence of the first color content information can be suppressed when determining the storage state of the substrate S in the second determination area 212. In other words, when determining the storage state of the substrate S, necessary light can be taken into consideration and unnecessary light can be excluded from consideration. Therefore, erroneous determinations regarding the storage state of the substrate S can be more reliably suppressed.

[0119] Furthermore, in this modified example, a plurality of color cameras are provided, which makes it possible to obtain a large amount of information regarding the storage state of the substrates S. Therefore, the storage state of the substrates S can be determined in detail.

[0120] In the above-described modified examples (2) and (3), the number of the light sources 62A to 62C is three, which is the same as the number of determination regions 210. Furthermore, the peak wavelengths of the light emitted by the light sources 62A to 62C are different from each other. This reduces the risk of erroneous determination compared to when one light source is assigned to multiple determination regions 210.

[0121] (5) In the modified example of (4) above, the number of cameras 61 is two. However, this is not limited to this. The number of cameras 61 may be three or more. Alternatively, the number of cameras 61 may be one.

[0122] (6) In the above-described embodiments, a light source emitting blue light is not provided. The main reason for this is that problems can occur when the substrate S is irradiated with blue light, which has a short wavelength. More specifically, the process of processing the substrate S may include a photolithography process. In this process, a predetermined pattern of a photosensitive agent is formed on the substrate S. If blue light is irradiated onto such a substrate S, the photosensitive agent may react to the light, and at least a portion of the pattern may be lost from the substrate S. For this reason, if the processing device 6 described above is used, for example, in a process subsequent to photolithography (e.g., etching), it is not permitted to perform mapping processing in a load port (not shown) equipped with a light source emitting blue light. For this reason, it is preferable that the light-emitting unit 62 does not have a light source emitting blue light. However, a light source emitting blue light may be provided in a load port 4 corresponding to a process other than the process subsequent to photolithography.

[0123] (7) In the above-described embodiments, the imaging axis of each camera 61 is substantially horizontal, and each camera 61 is positioned to capture an image of the end surface SE of the substrate S. However, this is not limited to this. The camera 61 may be configured to capture an image of the substrate S from, for example, a diagonally downward rear or diagonally upward rear. For example, if the substrate S is a glass epoxy substrate, the substrate S diffusely reflects irradiated light. Therefore, there is a high probability that the substrate S can be detected even if the camera 61 is positioned as described above.

[0124] (8) In the above-described embodiments, the multiple cameras 61 include a first camera 63 and a second camera 64 having different performance (for example, at least one of resolution, magnification, and viewing angle). However, this is not limited to this. The multiple cameras 61 may be two cameras (not shown) having the same performance. One camera may capture images for cross determination. The other camera or both cameras may capture images for double determination. When double determination is performed based on image data acquired by both cameras, the accuracy of double determination can be further improved.

[0125] (9) In the above-described embodiments, the front nodal point of the light receiving lens 61a of the camera 61 is defined as the light receiving point RP. However, this is not limited to this. The front principal point of the light receiving lens 61a or a predetermined point on the front surface of the light receiving lens 61a may be defined as the light receiving point RP. Alternatively, for example, if the front focal point of the light receiving lens 61a is located inside the light receiving lens 61a, the front focal point may be defined as the light receiving point RP. Alternatively, the rear principal point, the rear nodal point, etc. may be defined as the light receiving point RP.

[0126] (10) The number of poles P supporting each substrate S is not limited to three. The substrate S may be supported by a support member (not shown) separate from the poles P. Alternatively, both left and right ends of the substrate S may be supported by support portions (not shown) formed by cutting out the inner surface of the FOUP body 101, for example. The type of container is not limited to the FOUP 100. The present invention can also be applied to containers (not shown) other than the FOUP 100.

[0127] (11) The shape of the substrate S may be a shape other than a substantially rectangular shape when viewed from above. For example, the substrate S may be a substantially disk-like shape.

[0128] (12) In the above-described embodiments, the scanner unit 45 is fixed to, for example, the door body 50 (i.e., driven by the motor 58 to move up and down integrally with the door body 50). However, this is not limited to this. The scanner unit 45 may be configured to be movable, for example, in the front-to-rear direction relative to the door body 50. Alternatively, the scanner unit 45 may be driven to move up and down independently of the door body 50 by a drive source (not shown) separate from the motor 58. Alternatively, the scanner unit 45 may be attached to the transport robot 3 or other structures within the EFEM 1.

[0129] (13) In the above-described embodiments, the controller 66 causes each camera 61 to capture an image based on an image capture schedule. However, this is not limited to this. The controller 66 may cause each camera 61 to capture an image while determining the vertical position of the scanner unit 45, for example. The vertical storage position of each board S may be stored in advance in the memory (RAM) of the controller 66, for example. The vertical position of the scanner unit 45 may be determined based on the number of steps of the motor 58, which is a stepping motor, for example. The controller 66 may cause each camera 61 to capture an image when it determines that the vertical position of the scanner unit 45 has reached the vertical storage position of any board S.

[0130] (14) In the above-described embodiments, the LP control device 46 and the controller 66 are provided separately. However, this is not limited to this. For example, the LP control device 46 may be equipped with the controller 66. Alternatively, the LP control device 46 may have the function of controlling each camera 61 instead of the controller 66. When the LP control device 46 has such a function, the LP control device 46 corresponds to the determination unit of the present invention. Alternatively, for example, the control device 5 of the EFEM 1 may control the load port 4. In this case, the control device 5 corresponds to the determination unit of the present invention.

[0131] (15) The load port 4 may be mounted on equipment other than the EFEM 1.

[0132] (16) The present invention may be applied to mapping devices other than the load port 4.

[0133] (17) The size and / or thickness of the substrate S may be different from those described above. [Explanation of symbols]

[0134] 4 Load port (mapping device) 61 Camera (imaging determination unit) 62 Light-emitting part 62A light source (1st light source) 62B Light source (1st light source, 2nd light source) 62C light source (second light source) 63 Camera 1 64 Second Camera 66 Controller (judgment unit, image capture judgment unit) 71 First filter 72 Second Filter 100 FOUP (container) 200 imaging area 210 Judgment area S board

Claims

1. A mapping device that detects the accommodation state of a substrate accommodated in a container, a light emitting unit that emits light toward at least the inside of the container; an imaging determination unit that senses reflected light of light emitted from the light emitting unit to capture an image of a predetermined imaging area, acquires imaging information, and determines the accommodation state of the board using the imaging information; The light emitting unit a first light source that emits first light having a peak wavelength that is a predetermined first wavelength; a second light source that emits second light having a peak wavelength that is a second wavelength different from the first wavelength, The imaging determination unit a first camera provided corresponding to the first light source; a second camera provided corresponding to the second light source; a first filter that transmits light of the first wavelength directed toward the first camera and blocks light of the second wavelength directed toward the first camera; a second filter that transmits light of the second wavelength directed toward the second camera and blocks light of the first wavelength directed toward the second camera.

2. The mapping device according to claim 1 , wherein the second camera is a camera separate from the first camera.

3. A mapping device that detects the accommodation state of a substrate accommodated in a container, a light emitting unit that emits light toward at least the inside of the container; an imaging determination unit that senses reflected light of light emitted from the light emitting unit to capture an image of a predetermined imaging area, acquires imaging information, and determines the accommodation state of the board using the imaging information; The light emitting unit a first light source that emits first light having a peak wavelength that is a predetermined first wavelength; a second light source that emits second light having a peak wavelength that is a second wavelength different from the first wavelength, The imaging determination unit a color camera for acquiring color content information including color information in the imaging area; a determination unit that determines the storage state of the board using the color content information, The determination unit When determining the storage state of the board in a predetermined first area of ​​the imaging area, first color inclusion information indicating that the color camera has sensed the first light is used from among the color inclusion information, and second color inclusion information indicating that the color camera has sensed the second light is excluded from the determination target, A mapping device characterized in that when determining the storage status of the substrate in a second area of ​​the imaging area that is different from the first area, the second color content information is used and the first color content information is excluded from the determination target.

4. 4. The mapping device according to claim 3, wherein the image capture determination unit includes a plurality of the color cameras.

5. the imaging determination unit determines the accommodation state of the board by using the imaging information related to a plurality of determination areas that are part of the imaging area; the number of the plurality of light sources including the first light source and the second light source is equal to the number of the plurality of determination regions; 5. The mapping device according to claim 1, wherein the peak wavelengths of the light emitted from the plurality of light sources are different from each other.

6. A mapping method for detecting a storage state of a substrate stored in a container, comprising: a light emitting step of emitting light from a light emitting unit having a first light source that emits first light having a peak wavelength that is a predetermined first wavelength and a second light source that emits second light having a peak wavelength that is a second wavelength different from the first wavelength; an imaging determination step of acquiring imaging information by imaging a predetermined imaging area using a camera that senses reflected light of the light emitted in the light emission step, and determining the accommodation state of the substrate using the imaging information; The imaging determination step includes: a first step of determining a storage state of the board in a predetermined first area of ​​the imaging area by using first color content information corresponding to the first light in the imaging information; and a second step of determining the accommodation state of the substrate in a second area of ​​the imaging area, which is different from the first area, by using second color content information corresponding to the second light in the imaging information.

Images