Method for treating object to be adhered

Abstract

To provide a method for treating an object to be adhered that can prevent a potentially defective portion of a strip-shaped sheet from adhering to the object to be adhered.SOLUTION: A method for treating an object to be adhered includes a preparation step 1001 of preparing a sheet to be adhered to an object to be adhered, and an inspection step 1002 of inspecting the condition of the area of the sheet prepared in the preparation step 1001 that is to be adhered to the object to be adhered in a processing device that includes a sheet preparation unit that prepares the sheet, and an adhesion unit that adheres the sheet prepared by the sheet preparation unit to the object to be adhered.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a method for treating an object to be adhered. [Background technology]

[0002] A processing method is known in which a strip-shaped sheet wound into a roll is attached to a plate-shaped object (hereinafter referred to as the object to be attached) and the strip-shaped sheet is cut into sheets having a size larger than the object to be attached (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2019-110188 Summary of the Invention [Problem to be solved by the invention]

[0004] When adhering such a strip-shaped sheet to an object, there is a demand for preventing portions of the strip-shaped sheet that are in poor condition and may be defective from adhering to the object. However, with conventional methods, it is difficult to prevent portions of the strip-shaped sheet that are in poor condition from adhering to the object.

[0005] The present invention has been made in consideration of such problems, and its purpose is to provide a method for processing an object to be stuck that can prevent parts of a strip-shaped sheet that may be defective from being stuck to the object to be stuck. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems and achieve the objectives, the method of processing an object to be adhered of the present invention is a processing device equipped with a sheet preparation section that prepares a sheet to be adhered to the object to be adhered, and an adhesion section that adheres the sheet to the object to be adhered, and includes a preparation step of preparing the sheet, and an inspection step of inspecting the condition of the area of ​​the sheet that will be adhered to the object to be adhered.

[0007] The sheet may have an adhesive layer laminated on a base layer, and the inspection step may inspect whether the adhesive layer is good or bad.

[0008] If the sheet is judged to be good in the inspection step, an attachment step may be carried out in which the sheet is attached to an object to be attached.

[0009] After the adhering step, an expanding step of expanding the sheet may be provided.

[0010] The object to be adhered may have a division starting point along a planned division line for dividing the object to be adhered into a plurality of chips, and in the expanding step, the object to be adhered may be divided into a plurality of chips along the division starting point.

[0011] The object to be adhered may have at least one of a dividing groove or a dividing starting point along a planned dividing line that divides the object to be adhered into multiple chips, and in the expansion step, the spacing between the chips may be widened along at least one of the dividing groove or the dividing starting point.

[0012] The expansion step may be performed by an expansion mechanism having first clamping sections arranged opposite each other in a first direction sandwiching the object attached to the sheet and each clamping an outer edge of the sheet attached to the object by the attachment step, a second clamping section, third clamping sections arranged opposite each other in a second direction intersecting the first direction sandwiching the object attached to the sheet and each clamping an outer edge of the sheet, a fourth clamping section, and a clamping section moving unit that enables the first clamping section and the second clamping section to move in directions away from each other in the first direction and that enables the third clamping section and the fourth clamping section to move in directions away from each other in the second direction.

[0013] If the sheet is determined to be defective in the inspection step, a frame unit formation step may be carried out in which the sheet is not attached to an object but is fixed to a frame to form a frame unit, and a transport step may be carried out in which the frame unit is transported to an arbitrary destination.

[0014] The processing device may have a disposal section for discarding the sheet, and may further comprise a disposal step of discarding the sheet in the disposal section without attaching it to an object if the sheet is determined to be defective in the inspection step.

[0015] The object to be attached has a second sheet attached to a second surface opposite to the first surface to which the sheet is attached, and the processing device includes a peeling section that peels the second sheet from the object to be attached, and the second sheet peeled from the object to be attached by the peeling section may be discarded in the disposal section that discards the sheet in the disposal step. [Effects of the Invention]

[0016] The present invention includes an inspection step for inspecting the condition of the area of ​​the sheet to be attached to the object, thereby preventing potentially defective parts of the strip-shaped sheet from being attached to the object. [Brief explanation of the drawings]

[0017] [Figure 1] FIG. 1 is a flowchart showing the processing steps of the method for processing an object according to the first embodiment. [Figure 2] FIG. 2 is a perspective view showing an example of an object to be treated by the method for treating an object to be treated according to the first embodiment. [Figure 3] FIG. 3 is a top view showing an example of a sheet to be attached to an object in the method for treating an object according to the first embodiment. [Figure 4] FIG. 4 is a cross-sectional view of the sheet shown in FIG. [Figure 5]FIG. 5 is a perspective view showing an example of a frame used in the method for treating an object according to the first embodiment. [Figure 6] FIG. 6 is a perspective view showing an example of the configuration of a processing apparatus for carrying out the method for processing an object according to the first embodiment. [Figure 7] 7 is a cross-sectional view showing one state of the sheet preparation unit, the inspection unit, and the adhering unit of the processing apparatus shown in FIG. [Figure 8] 8 is a cross-sectional view showing one state of the sheet preparation unit, the inspection unit, and the adhering unit of the processing apparatus shown in FIG. [Figure 9] 9 is a cross-sectional view showing one state of the sheet preparation unit, the inspection unit, and the adhering unit of the processing apparatus shown in FIG. [Figure 10] 10 is a cross-sectional view showing one state of the sheet preparation unit, the inspection unit, and the adhering unit of the processing apparatus shown in FIG. [Figure 11] 11 is a cross-sectional view showing one state of the sheet preparation unit, the inspection unit, and the adhering unit of the processing apparatus shown in FIG. [Figure 12] 12 is a cross-sectional view showing one state of the holding and conveying unit and the peeling unit of the processing apparatus shown in FIG. [Figure 13] 13 is a cross-sectional view showing one state of the holding and conveying unit and the peeling unit of the processing apparatus shown in FIG. [Figure 14] 14 is a cross-sectional view showing one state of the holding and conveying unit, peeling unit, and disposal unit of the processing apparatus shown in FIG. [Figure 15] 15 is a cross-sectional view showing a part of the expansion mechanism of the processing apparatus shown in FIG. [Figure 16] 16 is a cross-sectional view showing one state of a part of the expansion mechanism and the frame fixing portion of the processing apparatus shown in FIG. [Figure 17] 17 is a cross-sectional view showing a state of a part of the expansion mechanism and the frame fixing portion of the processing apparatus shown in FIG. [Figure 18] 18 is a cross-sectional view showing one state of a part of the expansion mechanism and the frame fixing portion of the processing apparatus shown in FIG. [Figure 19]19 is a cross-sectional view showing a state of a part of the expansion mechanism and the frame fixing portion of the processing apparatus shown in FIG. [Figure 20] FIG. 20 is a perspective view showing an example of an object unit formed by the method for treating an object according to the first embodiment. [Figure 21] FIG. 21 is a perspective view showing an example of a frame unit formed by the method for treating an object according to the first embodiment. [Figure 22] FIG. 22 is a perspective view showing an example of the accommodation unit of the processing device shown in FIG. [Figure 23] FIG. 23 is a flowchart showing the procedure of the method for treating an object according to the second embodiment. [Figure 24] FIG. 24 is a cross-sectional view showing one state of the holding and conveying unit and peeling unit of the processing device that performs the method for processing an object according to the second embodiment. [Figure 25] FIG. 25 is a cross-sectional view showing one state of a holding and conveying unit and a peeling unit of a processing device that performs a method for processing an object according to the second embodiment. [Figure 26] FIG. 26 is a cross-sectional view showing one state of the holding and conveying unit, peeling unit, and disposal unit of the processing device that performs the method for processing an object according to the second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0018] Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the components described below include those that can be easily imagined by a person skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Furthermore, various omissions, substitutions, or modifications of the configuration can be made within the scope of the gist of the present invention.

[0019] [Embodiment 1] A method for processing a substrate according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a flowchart showing the processing steps of the method for processing a substrate according to the first embodiment. As shown in FIG. 1, the method for processing a substrate according to the first embodiment comprises a preparation step 1001 and an inspection step 1002. As shown in FIG. 1, if the substrate is determined to be good in the inspection step 1002 (YES in the inspection step 1002), the method for processing a substrate according to the first embodiment also comprises a bonding step 1003, and further comprises an expansion step 1004 after the bonding step 1003. As shown in FIG. 1, if the substrate is determined to be bad in the inspection step 1002 (NO in the inspection step 1002), the method for processing a substrate according to the first embodiment also comprises a frame unit formation step 1005 and a transport step 1006.

[0020] FIG. 2 is a perspective view showing an example of a substrate 100 to be processed by the substrate processing method according to the first embodiment. As shown in FIG. 2, the substrate 100 is, for example, a disk-shaped semiconductor wafer or an optical device wafer made of silicon, sapphire, silicon carbide (SiC), gallium arsenide, glass, or the like as a base material. As shown in FIG. 2, the substrate 100 has a flat surface 101 partitioned by a plurality of planned division lines 102 that intersect with each other (orthogonal in the example of the first embodiment shown in FIG. 2), and chip-shaped devices 103 are formed in each of the areas. The substrate 100 is divided along the planned division lines 102 into a plurality of devices 103 (chips), and the plurality of devices 103 (chips) are manufactured.

[0021] A sheet 200 is attached to a back surface 104 of the substrate 100, which is the reverse side of the front surface 101, by the method for treating a substrate according to embodiment 1. That is, the back surface 104 of the substrate 100 corresponds to a first surface according to the present invention. Before the method for treating a substrate according to embodiment 1 is carried out, a second sheet 250 (see FIGS. 8 to 11, etc.) may be attached to the front surface 101 of the substrate 100. That is, the front surface 101 of the substrate 100 is the surface opposite the back surface 104, and corresponds to a second surface to which the second sheet 250 according to the present invention is attached.

[0022] The substrate 100 may have division starting points 111 (see FIG. 2 ) along the planned division lines 102. Before the substrate processing method according to embodiment 1 is performed, the substrate 100 may be irradiated with a laser beam having a wavelength that is transparent to the substrate 100 along the planned division lines 102, for example, to form a modified layer therein that is the division starting points 111 along the planned division lines 102. Here, the modified layer refers to a region in which the density, refractive index, mechanical strength, or other physical properties are different from those of the surrounding area, and examples of such a modified layer include a melt-treated region, a crack region, a dielectric breakdown region, a refractive index change region, and a region in which these regions are mixed.

[0023] Furthermore, before the method for treating an object to be adhered according to embodiment 1 is carried out, the object to be adhered 100 may be cut along the planned division lines 102 with a cutting blade, or may be irradiated along the planned division lines 102 with a laser beam having a wavelength that is absorbable by the object to be adhered 100, thereby forming half-cut grooves that are division starting points 111 along the planned division lines 102. Here, the half-cut grooves are grooves that are deep enough not to penetrate the object to be adhered 100 in the thickness direction.

[0024] When the object 100 has division starting points 111 such as modified layers or half-cut grooves formed along the intended division lines 102, an elastic sheet 200 is attached to the back surface 104 (first surface) side, and the attached sheet 200 is expanded to divide the object 100 into multiple devices 103 (chips) along the division starting points 111, producing multiple devices 103 (chips), and the spacing between the multiple devices 103 (chips) along the division starting points 111 is widened.

[0025] Furthermore, when the second sheet 250 is attached to the front surface 101, which is the second surface, of the substrate 100, the substrate 100 may have division grooves 112 (see FIG. 2) along the intended division lines 102. Before the method for treating a substrate according to embodiment 1 is carried out, the substrate 100 may be cut along the intended division lines 102 with a cutting blade from the back surface 104 (first surface) side opposite to the side to which the second sheet 250 is attached, or may be irradiated along the intended division lines 102 with a laser beam of a wavelength that is absorbable by the substrate 100, thereby forming the division grooves 112 along the intended division lines 102. Here, the division grooves 112 are so-called full-cut grooves, which are grooves that penetrate the substrate 100 in the thickness direction.

[0026] When such a division groove 112 is formed along the intended division line 102 of the substrate 100, an elastic sheet 200 is attached to the back surface 104 (first surface) side, and the attached sheet 200 is expanded, thereby widening the spacing between multiple devices 103 (chips) along the division groove 112.

[0027] Fig. 3 is a top view showing an example of a sheet 200 attached to a substrate 100 in the method for treating a substrate according to embodiment 1. Fig. 4 is a cross-sectional view showing the sheet 200 shown in Fig. 3. In embodiment 1, as shown in Figs. 3 and 4, the sheet 200 comprises a base layer 201 and an adhesive layer 202 conforming to the shape of the substrate 100. Note that the sheet 200 of the present invention is not limited to the form of embodiment 1 in which the sheet comprises the adhesive layer 202, and does not necessarily have to comprise an adhesive layer 202 conforming to the shape of the substrate 100.

[0028] The sheet 200 has a constant width 211 and is formed in the shape of a long strip sheet along one direction (longitudinal direction 212) perpendicular to the width direction, and is set in a rolled state on the reel 11 of the sheet preparation unit 10 of the processing device 1. After being unwound and prepared in preparation step 1001 of the method for processing an object to be adhered according to embodiment 1, the sheet 200 is cut out to a predetermined length 213. Here, in embodiment 1, the width 211 is set to be longer than the outer diameter of the object to be adhered 100 and longer than the outer diameter of the frame 120. Furthermore, in embodiment 1, the predetermined length 213 is set to be longer than the outer diameter of the object to be adhered 100 and longer than the outer diameter of the frame 120. In embodiment 1, the width 211 and the predetermined length 213 are set to be approximately the same length.

[0029] In the first embodiment, the sheet 200 is identified in advance by identification information (e.g., an identification character string or an identification number) for each predetermined length 213. The identification information may be electronically assigned according to the order in which the sheets are fed from a sheet preparation unit 10 of the processing device 1 described later to the bonding unit 30, or according to the length in the longitudinal direction 212 of the sheets based on the end that is fed first when the sheets are fed from the sheet preparation unit 10 to the bonding unit 30 described later, or the rotation angle and amount of rotation of the reel 11 described later, etc. Furthermore, the identification information may be arbitrarily engraved on one surface 215 of the base layer 201 at a predetermined position relative to a group of adhesive layers 202 described later, in a manner that does not affect the bonding of the object 100 and the frame 120 (position, area), and that is recognizable by an inspection unit 20 of the processing device 1 described later.

[0030] The base material layer 201 is a layer that constitutes the sheet 200, and has a certain width 211, and is formed in the shape of a long strip-like sheet along one direction (longitudinal direction 212) perpendicular to the width direction. In the first embodiment, the base material layer 201 is, for example, an adhesive tape in which a glue layer (adhesive layer) is formed on one surface 215 of a base material sheet formed in the shape of a long strip-like sheet, or a thermoplastic resin sheet in which a base material made of a thermoplastic resin without a glue layer is formed in the shape of a long strip-like sheet.

[0031] The adhesive tape serving as base layer 201 may be an expandable sheet in which the base sheet is made of an elastic resin. The adhesive tape serving as base layer 201 has a base sheet formed of, for example, polyolefin or polyvinyl chloride. The adhesive tape serving as base layer 201 has an adhesive layer 202 laminated on one surface 215, which is the same side as the side on which the glue layer is formed, and a frame 120 (see FIG. 5), which will be described later, is attached and fixed to the same side on which the adhesive layer 202 is laminated.

[0032] The thermoplastic resin sheet serving as base layer 201 is formed of, for example, a polyolefin sheet, a polyethylene sheet, a polypropylene sheet, a polystyrene sheet, etc. The thermoplastic resin sheet serving as base layer 201 has an adhesive layer 202 laminated on one surface 215, and frame 120 is attached and fixed by thermocompression bonding to the same side as the side on which adhesive layer 202 is laminated.

[0033] In the present invention, the base material layer 201 is not limited to the above-described adhesive tape or thermoplastic resin sheet, and may be formed from any material as long as it is formed into a long, strip-like sheet, has an adhesive layer 202 laminated on one surface 215, and the frame 120 is attached and fixed on the same side as the side on which the adhesive layer 202 is laminated. Furthermore, when the sheet 200 does not have the adhesive layer 202, i.e., when the adhesive layer 202 is not laminated on one surface 215, the base material layer 201 may be formed from any material as long as it is formed into a long, strip-like sheet, has the object 100 attached to one surface 215, and the frame 120 is attached and fixed on the same side as the side on which the object 100 is attached.

[0034] In embodiment 1, adhesive layer 202 is laminated on one surface 215 of base layer 201. Adhesive layer 202 is an area whose state is inspected in inspection step 1002 of the method for treating an object to be adhered according to embodiment 1, and is adhered to back surface 104 (first surface) side of object to be adhered 100 in adhesion step 1003 of the method for treating an object to be adhered according to embodiment 1. In embodiment 1, adhesive layer 202 is formed, for example, in the shape of a single disk whose diameter is larger than the outer diameter of object to be adhered 100 and smaller than the inner diameter of opening 121 (see FIG. 5 ) of frame 120, and is laminated in an array at regular intervals 216 along the longitudinal direction 212 on one surface 215 of base layer 201, which is formed in the shape of a strip-like sheet. Here, the constant interval 216 refers to the length between the centers of adjacent adhesive layers 202 along the longitudinal direction 212, and is set to be longer than the outer diameter of the adhesive layer 202, longer than the outer diameter of the frame 120, and the same as the above-mentioned predetermined length 213. Therefore, when the sheet 200 is cut into pieces of the predetermined length 213 as described above, the adhesive layers 202 are individually cut off. Such adhesive layers 202 are identifiable by identification information previously attached to the sheet 200 for each piece of the predetermined length 213.

[0035] In the present invention, the adhesive layers 202 are not limited to the form of embodiment 1 in which they are arranged at regular intervals 216 along the longitudinal direction 212, but may be laminated so as to cover the entire surface of one surface 215 of the base material layer 201 formed in a strip-like sheet. Even in this case, the adhesive layers 202 are identifiable by the identification information previously attached to the sheet 200 at intervals of a predetermined length 213, just like a group of adhesive layers 202.

[0036] In the first embodiment, the adhesive layer 202 is, for example, a DAF (Die Attach Film) formed in a disk shape. The DAF as the adhesive layer 202 is an adhesive film for die bonding to fix the device 103 (chip) to another chip or a substrate, etc. The adhesive layer 202 (DAF) is attached to the back surface 104 (first surface) side of the adherend 100, and the adherend 100 adhered to the adhesive layer 202 is divided into a plurality of devices 103 (chips) along the division starting points 111, or the adherend 100 adhered to the adhesive layer 202 is divided into individual devices 103 (chips) along at least either the division starting points 111 or the division grooves 112 as the intervals between the plurality of devices 103 (chips) are widened. As a result, the adhesive layer 202 (DAF) attached to the back surface 104 (first surface) of the object 100 becomes attached to the back surface 104 (first surface) of each device 103 (chip) in the individual devices 103 (chips) that have been divided and have wider spacing between them.

[0037] The sheet 200 has a release film 203 formed in the shape of a long strip along a longitudinal direction 212 and having a constant width 211 similar to that of the sheet 200, disposed over the entire surface of one surface 215 of the base layer 201. In the first embodiment, the release film 203 covers the entire surface of the adhesive layer 202 laminated on the one surface 215 of the base layer 201 and the entire surface of the one surface 215 of the sheet 200, including the area of ​​the one surface 215 of the base layer 201 to which the frame 120 is attached, thereby reducing the risk of the one surface 215 of the sheet 200 adhering to the other surface 217 (see FIG. 3 ) behind the one surface 215 of the sheet 200 when the sheet is wound in a roll on the reel 11. The release film 203 is peeled off and removed from the unwound sheet 200 in the preparation step 1001 of the method for treating an object according to the first embodiment.

[0038] The second sheet 250 attached to the surface 101 (second surface) of the substrate 100 protects the surface 101 of the substrate 100 and, if the substrate 100 has division grooves 112 along the intended division lines 102, prevents the multiple devices 103 (chips) divided by the division grooves 112 from separating into individual pieces. In the first embodiment, the second sheet 250 is formed in a circular shape with an outer diameter approximately equal to the outer diameter of the substrate 100. The second sheet 250 is formed of, for example, the same material as the adhesive tape or thermoplastic resin sheet of the sheet 200. During the treatment of the substrate according to the first embodiment, the second sheet 250 is peeled from the surface 101 of the substrate 100 by a peeling unit 50 of the treatment device 1, which will be described later, and discarded in a disposal unit 60 of the treatment device 1, which will be described later. The second sheet 250 may be omitted if the object 100 does not have a dividing groove 112 formed along the intended dividing line 102, but has a dividing starting point 111 formed thereon.

[0039] Fig. 5 is a perspective view showing an example of a frame 120 used in the method for treating an object to be adhered according to embodiment 1. As shown in Fig. 5, the frame 120 is a flat plate with flat surfaces on both sides, and is formed in an annular shape with an opening 121 formed in the center. The opening 121 is formed in a circular shape with an inner diameter larger than the outer diameter of the object to be adhered 100. The frame 120 is made of a material that can be attached to the base layer 201 by adhesion or thermocompression bonding, for example. The frame 120 is made of stainless steel, for example.

[0040] In the method for processing an object to be adhered according to embodiment 1, after the expansion step 1004 is performed, the frame 120 is adhered to the base material layer 201 of the sheet 200 adhered to the object to be adhered 100 to form an object to be adhered unit 131 (see Figure 20) described later, or in the frame unit formation step 1005, the base material layer 201 of the sheet 200 that is not adhered to the object to be adhered 100 is adhered to form a frame unit 132 (see Figure 21) described later.

[0041] Fig. 6 is a perspective view showing an example of the configuration of a processing device 1 that performs the method for processing a substrate according to embodiment 1. As shown in Fig. 6, the processing device 1 includes a sheet preparation section 10, an inspection section 20, an adhering section 30, a holding and conveying section 40, a peeling section 50, a disposal section 60, an expansion mechanism 70, a frame fixing section 80, a storage section 90, and a control unit 99. The processing device 1 performs a preparation step 1001, an inspection step 1002, an adhering step 1003, an expansion step 1004, a frame unit formation step 1005, and a conveying step 1006 of the method for processing a substrate according to embodiment 1.

[0042] 7, 8, 9, 10, and 11 are cross-sectional views showing one state of the sheet preparation unit 10, the inspection unit 20, and the adhering unit 30 of the processing device 1 shown in Fig. 6. The sheet preparation unit 10 prepares a sheet 200 to be adhered to an object 100. As shown in Figs. 7 to 11, the sheet preparation unit 10 includes a reel 11, a feed roller 12, a clamping roller 13, a peel plate 14, a guide roller 15, a movable roller 16, a pressure roller 17, a take-up roller 18, and a weight 19.

[0043] Among the components of the sheet preparation unit 10, the reel 11, which are rotating rollers, the feed roller 12, the sandwiching roller 13, the guide roller 15, the movable roller 16, the pressure roller 17, the winding roller 18, and the weight 19, all have rotation axes that are arranged along the Y-axis direction (second direction) shown in Figure 6 etc., which is parallel to the horizontal direction, and rotate around an axis that is along the Y-axis direction. Furthermore, the reel 11, the feed roller 12, the sandwiching roller 13, the guide roller 15, the movable roller 16, the pressure roller 17, the winding roller 18, and the weight 19 all have peripheral surfaces that come into contact with the other surface 217 of the sheet 200 or the release film 203, and the widths of these peripheral surfaces are all set longer than the width 211 of the sheet 200 or the release film 203.

[0044] The reel 11 has a long strip-shaped sheet 200 with a release film 203 disposed thereon wound in a roll and set thereon, and as the reel 11 rotates, it unwinds the wound sheet 200 and release film 203 and sends them out between a feed roller 12 and a sandwich roller 13 arranged above the reel 11. The reel 11 includes a motor that rotates the main body of the reel 11 on which the long strip-shaped sheet 200 is wound in a roll and set thereon, and an encoder that reads the rotation position of the motor. The encoder detects the rotation angle and amount of rotation of the reel 11 based on the rotation position of the motor read, and outputs the detected rotation angle and amount of rotation to the inspection unit 20 and the control unit 99.

[0045] The feed roller 12 is driven to rotate, thereby feeding the sheet 200 and release film 203, which have been unwound and fed from the reel 11, toward the peel plate 14 and the bonding roller 31 of the bonding unit 30, which are disposed above the feed roller 12. The feed roller 12 controls the amount of the sheet 200 and release film 203, which have been unwound and fed from the reel 11, fed out by controlling the rotational drive thereof. The feed roller 12 is configured to be driven to rotate by, for example, a servo motor. The sandwich roller 13 is disposed opposite the feed roller 12, and presses the sheet 200 and release film 203, which have been unwound and fed from the reel 11, against the feed roller 12 to sandwich them, thereby preventing slack from occurring in the sheet 200 and the release film 203.

[0046] The peel plate 14 has a pointed tip, and the pointed tip is arranged toward the path of the sheet 200 and the release film 203 fed from the feed roller 12. As shown in FIG. 7 , the peel plate 14 presses the sheet 200 and the release film 203 from the release film 203 side to form an acute angle, thereby peeling the release film 203 from the sheet 200. The sheet 200 from which the release film 203 has been peeled by the peel plate 14 is fed toward the bonding roller 31 of the bonding unit 30 while being fed from the feed roller 12. The release film 203 peeled from the sheet 200 by the peel plate 14 is fed toward the guide roller 15, which is arranged in the opposite direction from the bonding roller 31 of the bonding unit 30 with respect to the peel plate 14.

[0047] The guide roller 15 is disposed on the opposite side of the peel plate 14 from the direction of the bonding roller 31 of the bonding unit 30, and is disposed between the peel plate 14 and the take-up roller 18. The guide roller 15 guides the release film 203 from below so that the release film 203 peeled off from the sheet 200 by the peel plate 14 is sent out toward the take-up roller 18 through between the movable roller 16 and the pressure roller 17.

[0048] The movable roller 16 and the pressure roller 17 are disposed below the guide roller 15 and between the guide roller 15 and the take-up roller 18. The movable roller 16 and the pressure roller 17 are disposed opposite each other across the path of the release film 203 guided by the guide roller 15. The movable roller 16 is provided so as to be movable in a direction approaching and moving away from the pressure roller 17, while the pressure roller 17 is provided fixedly. The movable roller 16 and the pressure roller 17 sandwich and press down the release film 203 guided by the guide roller 15 by moving the movable roller 16 in a direction approaching the pressure roller 17. By pressing down the release film 203 guided by the guide roller 15, the movable roller 16 and the pressure roller 17 pull the release film 203 to prevent the sheet 200 from twisting after the release film 203 has been peeled off, and also prevent the take-up roller 18 from being pulled toward the weight 19 that presses down the release film 203.

[0049] The take-up roller 18 is disposed below the movable roller 16 and the pressure roller 17. The take-up roller 18 is driven to rotate, thereby winding up the release film 203 that has been fed through between the movable roller 16 and the pressure roller 17. The rotation of the take-up roller 18 is controlled to control the amount of take-up of the release film 203. The take-up roller 18 is configured to be driven to rotate by, for example, a servo motor.

[0050] As shown in Fig. 7, the weight 19 is provided between the peel plate 14 and the take-up roller 18 so as to be movable in the vertical direction across the path of the release film 203 peeled off from the sheet 200 by the peel plate 14. In the first embodiment, the weight 19 is provided between the guide roller 15 and the movable roller 16 and the pressure roller 17. The weight 19 is a roller that presses down from above the release film 203 peeled off from the sheet 200 by the peel plate 14. For example, as shown in Fig. 9, the weight 19 presses down the release film 203 peeled off from the sheet 200 by the peel plate 14, thereby stably applying a constant tension to the release film 203 even when the take-up torque changes due to a change in the roll diameter of the release film 203 taken up by the take-up roller 18.

[0051] The sheet preparation section 10 unwinds a long strip-shaped sheet 200 provided with a release film 203 from a reel 11 on which the sheet 200 is wound in a roll and set, and sends it out toward the adhering roller 31 of the adhering section 30 by a feed roller 12, and also peels off the release film 203 from the sheet 200 by a peel plate 14, thereby preparing the sheet 200 to be adhered to the object 100 so that it can be immediately adhered to the object 100.

[0052] Inspection unit 20 inspects the condition of the area of ​​sheet 200 that will be adhered to substrate 100. In embodiment 1, as shown in Figs. 7 to 11 , inspection unit 20 is disposed between reel 11 and feed roller 12 and sandwich roller 13, and inspects the condition of the area of ​​sheet 200 that will be adhered to substrate 100 from the time it is fed from reel 11 until it reaches between feed roller 12 and sandwich roller 13.

[0053] In the present invention, the inspection unit 20 is not limited to this form, and may be arranged facing the sheet 200 wound on the reel 11 to inspect the condition of the area of ​​the sheet 200 wound on the reel 11 that will be adhered to the substrate 100, or may be arranged between the feed roller 12 and clamping roller 13 and the peel plate 14 to inspect the condition of the area of ​​the sheet 200 that will be adhered to the substrate 100 after it has been fed from the feed roller 12 and before the release film 203 is peeled off by the peel plate 14.

[0054] In addition, the inspection unit 20 may be positioned between the peel plate 14 and the adhesive roller 31 of the adhesive unit 30 to inspect the condition of the area of ​​the sheet 200 that is adhered to the substrate 100 after the release film 203 has been peeled off by the peel plate 14 and before it reaches the adhesive roller 31, or may be positioned toward the area in the adhesive unit 30 beyond the adhesive roller 31 that holds and adheres the sheet 200 to inspect the condition of the area of ​​the sheet 200 that is adhered to the substrate 100 after being held by the adhesive unit 30 and before being adhered.

[0055] In this way, the inspection unit 20 inspects the sheet 200 wound around the reel 11 before being sent out toward the sticking unit 30, the sheet 200 passing through the sheet 200 delivery path until the sheet 200 is sent out from the reel 11 of the sheet preparation unit 10 toward the sticking unit 30, or the sheet 200 held by the sticking unit 30 before being stuck to the object 100. Regardless of the timing at which the inspection unit 20 inspects the sheet 200, the inspection unit 20 links the inspection results of the sheet 200 to the identification information assigned to each predetermined length 213, and outputs the inspection results of the sheet 200 to the control unit 99, etc.

[0056] In the first embodiment, the inspection unit 20 inspects the quality (whether the condition is good or bad) of the adhesive layer 202 formed by laminating on the area of ​​the base layer 201 of the sheet 200 that will be attached to the substrate 100, as the condition of the area of ​​the sheet 200 that will be attached to the substrate 100. Here, the quality of the adhesive layer 202 refers to the presence or absence of defects that adversely affect the adhesion of the adhesive layer 202 to the substrate 100, the defect rate (the ratio of the area of ​​the defective portion to the area of ​​the adhesive layer 202) if there are defects, the defective area (position) if there are defects, etc. Defects that adversely affect the adhesion of the adhesive layer 202 to the substrate 100 include, for example, partial damage to the adhesive layer 202, peeling of the adhesive layer 202 from the base layer 201, adhesion of foreign matter to the adhesive layer 202, etc.

[0057] Inspection unit 20 is not limited to this embodiment in the present invention. When sheet 200 does not include adhesive layer 202, inspection unit 20 inspects the quality (whether the condition is good or bad) of the area of ​​base layer 201 of sheet 200 that is attached to substrate 100 as the condition of the area of ​​sheet 200 that is attached to substrate 100. Here, the quality of the area of ​​base layer 201 that is attached to substrate 100 refers to the presence or absence of defects that adversely affect the adhesion of base layer 201 to substrate 100, the defect rate (the ratio of the area of ​​defective parts to the area of ​​the area of ​​base layer 201), and the defective area (location) if there are defects. For example, when base layer 201 is an adhesive tape with an adhesive layer formed on one surface 215, defects that adversely affect the adhesion of base layer 201 to substrate 100 include partial damage to the adhesive layer, peeling of the adhesive layer from the base sheet, and adhesion of foreign matter to the adhesive layer. Furthermore, defects that adversely affect the adhesion of the base layer 201 to the substrate 100 include, when the base layer 201 is a thermoplastic resin sheet, partial damage to the thermoplastic resin sheet, adhesion of foreign matter to the thermoplastic resin sheet, etc.

[0058] In embodiment 1, inspection unit 20 preferably inspects for defects such as those described above that occur particularly after sheet 200 is manufactured, specifically when the sheet is wound in a roll and set on reel 11 of sheet preparation unit 10 of processing device 1 before preparation step 1001 is performed, and when the sheet is unwound and prepared in preparation step 1001 of the method for processing an object to be adhered according to embodiment 1. However, the present invention is not limited to this, and inspection unit 20 may also inspect for defects that occur during the manufacturing process of sheet 200.

[0059] In the first embodiment, the inspection unit 20 is configured to include an optical sensor or an imaging unit. In the example of the first embodiment shown in FIGS. 7 to 11, the inspection unit 20 is further configured to include a first sensor 21 which is an optical sensor, a second sensor 22 which is also an optical sensor, and a sensor control unit (not shown) that controls the first sensor 21 and the second sensor 22. The functions and operation processes of the sensor control unit may be performed by the control unit 99 instead. The first sensor 21 is disposed adjacent to the second sensor 22 and downstream of the second sensor 22 in the feed path of the sheet 200. The second sensor 22 is disposed adjacent to the first sensor 21 and upstream of the first sensor 21 in the feed path of the sheet 200. Both the first sensor 21 and the second sensor 22 are positioned facing the discharge path of the sheet 200, irradiate light toward the discharge path of the sheet 200, receive reflected light from the discharge path of the sheet 200, and inspect the condition of the sheet 200 passing through the discharge path of the sheet 200 based on the intensity (reflection intensity) of the received reflected light, etc.

[0060] The first sensor 21 irradiates light that can detect the reflection intensity of light reflected by an area of ​​the sheet 200 that has the adhesive layer 202 as it passes through the feed path of the sheet 200 and the reflection intensity of light reflected by an area of ​​the sheet 200 that does not have the adhesive layer 202 as it passes through the feed path of the sheet 200 as different reflection intensities, and detects the leading edge of the adhesive layer 202 on the downstream side in the feed path of the sheet 200. The sensor control unit acquires identification information of the adhesive layer 202 inspected by the second sensor 22 based on detection information of the leading edge of the adhesive layer 202 detected by the first sensor 21 and the rotation angle and rotation amount of the main body part of the reel 11 output from the sheet preparation unit 10 that is communicably connected to each other. In addition, the sensor control unit calculates and acquires information corresponding to the time (inspection time) during which the second sensor 22 inspects the quality of the adhesive layer 202 based on the detection information of the tip of the adhesive layer 202 detected by the first sensor 21 and the feed speed of the sheet 200 calculated from the rotation angle and rotation amount of the main body part of the reel 11 output from the sheet preparation unit 10.

[0061] The second sensor 22 emits light that can detect the reflection intensity of light reflected by the adhesive layer 202 of a non-defective sheet 200 passing through the delivery path of the sheet 200 as different reflection intensities from the reflection intensity of light reflected by the adhesive layer 202 of a defective sheet 200 passing through the delivery path of the sheet 200, and detects the reflection intensity of light reflected from the adhesive layer 202 of the sheet 200 passing through the delivery path of the sheet 200 during the inspection time for inspection by the second sensor 22 for each adhesive layer 202 for which identification information has been obtained by the first sensor 21. Here, defective portions of the adhesive layer 202, such as partial damage to the adhesive layer 202, peeling of the adhesive layer 202 from the base layer 201, or adhesion of foreign matter to the adhesive layer 202, scatter the light used by the second sensor 22 when inspecting the adhesive layer 202 of the sheet 200, and therefore detect a lower reflection intensity of reflected light than that of a non-defective portion.

[0062] The sensor control unit determines the quality of the adhesive layer 202 of the sheet 200 for which the reflection intensity was detected, for each adhesive layer 202 recognized by the identification information, based on the reflection intensity detected by the second sensor 22 and pre-stored information on the reference value of the reflection intensity for determining the quality of the adhesive layer 202 of the sheet 200. In this way, under the control of the sensor control unit, the inspection unit 20 inspects the quality (whether the condition is good or bad) of the adhesive layer 202 of the sheet 200 using the first sensor 21 and the second sensor 22. Note that the first sensor 21 and the second sensor 22 are preferably provided extending in the diameter direction of the adhesive layer 202 and are capable of inspecting a width longer than the diameter direction.

[0063] In another example of the first embodiment, the inspection section 20 is configured to include an imaging unit and an imaging control section (not shown) that controls the imaging unit. The functions and operation processes of the imaging control section may be performed by the control unit 99 instead. The imaging unit serving as the inspection section 20 includes an imaging element that captures an image of an area including the adhesive layer 202 of the sheet 200. The imaging element is, for example, a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary MOS) imaging element. The imaging unit serving as the inspection section 20 is disposed facing the feed path of the sheet 200, and captures an image of an area including the adhesive layer 202 of the sheet 200 as the sheet 200 passes through the feed path, thereby obtaining a captured image including the adhesive layer 202 of the sheet 200. Here, defective parts of the adhesive layer 202, such as partial damage to the adhesive layer 202, peeling of the adhesive layer 202 from the base material layer 201, or foreign matter adhering to the adhesive layer 202, scatter the light used by the imaging unit when capturing images, and are therefore captured in a darker color in the captured image than non-defective parts.

[0064] The imaging control unit acquires identification information of the adhesive layer 202 to be inspected by the imaging unit serving as the inspection unit 20, based on the rotation angle and amount of rotation of the main body of the reel 11 output from the sheet preparation unit 10, which are communicably connected to each other when the imaging unit acquires an image of the sheet 200. For each adhesive layer 202 recognized by the identification information, the imaging control unit performs predetermined image processing on the portion of the adhesive layer 202 in the image of the sheet 200 acquired by the imaging unit, and determines whether the adhesive layer 202 is good or bad based on the results of the image processing.

[0065] Here, the predetermined image processing performed by the imaging control unit includes, for example, a binarization process for the portion of the adhesive layer 202 in the image of the sheet 200 based on a predetermined threshold value stored in advance in the imaging control unit, and a pass / fail determination process based on information on a reference value of the proportion of each binarized area for determining the pass / fail of the adhesive layer 202 of the sheet 200, which is stored in advance in the imaging control unit. The predetermined threshold value in the binarization process is set, for example, so that a pass-quality portion of the adhesive layer 202 is binarized in a light color (white) and a fail-quality portion of the adhesive layer 202, such as partial damage to the adhesive layer 202, peeling of the adhesive layer 202 from the base layer 201, or adhesion of foreign matter to the adhesive layer 202, is binarized in a dark color (black). The reference value for each area proportion in the pass / fail determination process is set, for example, (e.g., 90%, 95%, etc.) so that if the light color (white) is equal to or greater than the reference value, the product is determined to be pass-quality, and if the light color (white) is less than the reference value, the product is determined to be fail-quality. It is preferable that the imaging element provided in the imaging unit is provided extending in the diameter direction of the adhesive layer 202 so as to be able to inspect a width longer than the diameter direction.

[0066] The adhering unit 30 adheres a sheet 200 that has been prepared by the sheet preparing unit 10 and inspected by the inspection unit 20 and determined to be good to an object 100. In the first embodiment, the adhering unit 30 includes an adhering roller 31, a deflection prevention roller 32, a sheet push-up unit 33, an object holding unit 34, a sheet adhering unit 35, and a sheet cutting unit 36, as shown in FIGS. 7 to 11 . In the first embodiment, the adhering unit 30 further includes a first direction movement unit 38 and a vertical direction movement unit 39, as shown in FIG. 6 . Note that the adhering unit 30 is not limited to the embodiment of the first embodiment in which the deflection prevention roller 32 is provided, and may not include the deflection prevention roller 32.

[0067] Among the components of the adhering unit 30, the adhering roller 31 and the flexure prevention roller 32, which are rollers that rotate, both have their rotation axes aligned along the Y-axis direction (second direction), similar to the components that rotate in the sheet preparation unit 10. The adhering roller 31 has a peripheral surface that contacts the other side 217 of the sheet 200 and presses against the other side 217 of the sheet 200. In the first embodiment, the peripheral surface of the adhering roller 31 is formed of an elastic material such as silicone rubber, but the present invention is not limited to this. The flexure prevention roller 32 has a peripheral surface that contacts the peripheral surface of the adhering roller 31. The widths of the peripheral surfaces of the adhering roller 31 and the flexure prevention roller 32 are both set longer than the width 211 of the sheet 200. The width of the peripheral surface of the flexure prevention roller 32 is set equal to or greater than the width of the peripheral surface of the adhering roller 31.

[0068] The adhesion roller 31 is disposed above the delivery roller 12. The adhesion roller 31 delivers the sheet 200 from which the release film 203 has been peeled, via the peel plate 14 from the delivery roller 12 of the sheet preparation unit 10. The adhesion roller 31 holds the sheet 200 delivered from the sheet preparation unit 10, with the portion of its circumferential surface facing upward, in a state in which it can be adhered to the back surface 104 of the object 100 held in the object holding unit 34 or the lower end surface facing downward of the sheet adhesion portion 35.

[0069] In the first embodiment, the bonding roller 31 is fixed so as not to move in any of the X-axis direction (first direction) shown in Fig. 6 etc., which is parallel to the horizontal direction and perpendicular to the rotational axis direction (Y-axis direction) of the bonding roller 31, the rotational axis direction (Y-axis direction) of the bonding roller 31, and the vertical direction (Z-axis direction shown in Fig. 6 etc.). As the bonding roller 31 moves along the Z-axis direction, the bonding roller 31 moves along the Z-axis direction, relative to the bonding roller 34 and the object 100 held by the bonding roller 34, in the direction opposite to the direction of movement of the object holding part 34. As shown in Figures 8 to 10, as the object holding portion 34 and a pair of sheet object parts 35 arranged adjacent to the object holding portion 34 on both sides of the X-axis direction (±X direction sides) move together along the X-axis direction, the adhesion roller 31 moves along the X-axis direction in the opposite direction to the movement direction of the object holding portion 34 and the pair of sheet object parts 35, relative to the object holding portion 34, the pair of sheet object parts 35, and the object 100 held by the object holding portion 34.

[0070] The application roller 31 is in an application-ready state in which the adhesive layer 202 of the sheet 200 sent out from the sheet preparation unit 10 can be applied to the object 100 held in the object holding unit 34 by positioning the vertical height of the upper end of the peripheral surface of the application roller 31 at the same height as or higher than the height of the back surface 104 of the object 100 held in the object holding unit 34. The application roller 31 is in an application-avoided state in which the adhesive layer 202 of the sheet 200 sent out from the sheet preparation unit 10 cannot be applied to the object 100 held in the object holding unit 34 by positioning the vertical height of the upper end of the peripheral surface of the application roller 31 lower than the height of the back surface 104 of the object 100 held in the object holding unit 34, and application roller 31 can avoid adhesion. 8 to 11 show the adhesion avoidance state in which the vertical height of the upper end of the peripheral surface of the adhesion roller 31 is positioned relatively lower than the height of the back surface 104 of the adhesion target 100 held by the adhesion target holding portion 34.

[0071] When the application roller 31 is in an application-ready state, it moves along the X-axis direction relative to the object 100 held in the object holding unit 34, for example in the -X direction as shown in Figure 8, etc., and rolls from one end (the end on the +X direction side) to the other end (the end on the -X direction side) on the back surface 104 of the object 100 held in the object holding unit 34, via the sheet 200 sent out from the sheet preparation unit 10, and presses the sheet 200 sent out from the sheet preparation unit 10 with its circumferential surface against the back surface 104 of the object 100 held in the object holding unit 34, thereby applying the adhesive layer 202 of the sheet 200 sent out from the sheet preparation unit 10 to the object 100 held in the object holding unit 34. On the other hand, when the application roller 31 is in the adhesion avoidance state, as shown in Figures 8 to 10, even if it moves along the X-axis direction, for example in the -X direction, relative to the object 100 held in the object holding section 34, it does not apply the adhesive layer 202 of the sheet 200 sent out from the sheet preparation section 10 to the object 100 held in the object holding section 34, thereby avoiding adhesion.

[0072] The adhesive roller 31 is positioned so that the vertical height of the upper end of its peripheral surface is the same as or higher than the height of the lower end surface of the sheet receiving portion 35. The adhesive roller 31 moves along the X-axis direction, for example in the -X direction, relative to the sheet receiving portion 35 on the -X direction side, thereby rolling from one end (the end on the +X direction side) to the other end (the end on the -X direction side) on the lower end surface side of the sheet receiving portion 35 on the -X direction side via the sheet 200 sent out from the sheet preparation unit 10, and presses the sheet 200 sent out from the sheet preparation unit 10 with its peripheral surface against the lower end surface side of the sheet receiving portion 35 on the -X direction side, thereby adhesively adhering one surface 215 of the sheet 200 sent out from the sheet preparation unit 10 to the lower end surface of the sheet receiving portion 35 on the -X direction side. In addition, the adhesive roller 31 may have a heating mechanism (not shown) that heats the peripheral surface of the adhesive roller 31, and the peripheral surface of the adhesive roller 31 may be heated by the heating mechanism, and the sheet 200 sent out from the sheet preparation unit 10 may be adhered to the lower end surface of the sheet adhesion portion 35 on the -X direction side by thermal pressing using the heated peripheral surface.

[0073] The flexure prevention roller 32 has a diameter larger than that of the application roller 31, and is disposed adjacent to and below the application roller 31. The flexure prevention roller 32 can rollably press the application roller 31 with the peripheral surface of the flexure prevention roller 32 in contact with the peripheral surface of the application roller 31, thereby preventing the sheet 200 from flexing when the application roller 31 presses the sheet 200 against the object 100 to be applied.

[0074] The sheet push-up portion 33 has an upper end surface at its upper end that comes into contact with the other surface 217 of the sheet 200 and presses against the other surface 217 of the sheet 200. The width of the upper end surface of the sheet push-up portion 33 in the Y-axis direction is set to be longer than the width 211 of the sheet 200. In the first embodiment, the upper end surface of the sheet push-up portion 33 is formed of an elastic member such as silicone rubber, similar to the circumferential surface of the bonding roller 31, but the present invention is not limited to this.

[0075] The sheet push-up unit 33 is disposed adjacent to the bonding roller 31 in the direction in which the sheet 200 is fed by the sheet preparation unit 10 (the +X direction shown in FIG. 8 and other figures). The sheet push-up unit 33 feeds the sheet 200 fed to the bonding roller 31 above its upper end surface. Together with the bonding roller 31, the upper end surface of the sheet push-up unit 33 holds the sheet 200 fed from the sheet preparation unit 10 in a state in which it can be bonded to the back surface 104 of the substrate 100 held by the substrate holding unit 34 or the lower end surface of the sheet substrate 35 facing downward.

[0076] In the first embodiment, the sheet push-up unit 33 is movable vertically and moves between a push-up position where the height of the upper end surface of the sheet push-up unit 33 is approximately the same as the vertical height of the upper end of the circumferential surface of the application roller 31 and a retracted position where the height of the upper end surface of the sheet push-up unit 33 is retracted downward relative to the vertical height of the upper end of the circumferential surface of the application roller 31. In the first embodiment, the sheet push-up unit 33 is fixed so as not to move in either the X-axis direction or the Y-axis direction. As the application roller 31 moves along the Z-axis direction, the sheet push-up unit 33 moves along the Z-axis direction, relative to the application target holding unit 34 and the application target 100 held by the application target holding unit 34, in the direction opposite to the movement of the application target holding unit 34. As the object holding portion 34 and the pair of sheet object portions 35 move together along the X-axis direction, the sheet pushing-up portion 33, together with the adhering roller 31, moves along the X-axis direction in the opposite direction to the movement direction of the object holding portion 34 and the pair of sheet object portions 35, relative to the object holding portion 34, the pair of sheet object portions 35 and the object 100 held by the object holding portion 34.

[0077] 8, the sheet push-up unit 33 holds the sheet 200 delivered from the sheet preparation unit 10 at its upper end surface, is positioned vertically opposite the sheet-receiving portion 35 on the +X direction side, and then moves from the retracted position to the push-up position, thereby pressing one surface 215 of the +X direction end of the sheet 200 delivered from the sheet preparation unit 10 against the lower end surface of the sheet-receiving portion 35 on the +X direction side with its upper end surface to adhere the sheet 200. Note that the sheet push-up unit 33 may have a heating mechanism (not shown) that heats the upper end surface of the sheet push-up unit 33, and may heat the upper end surface of the sheet push-up unit 33 with the heating mechanism, and then thermocompress the sheet 200 delivered from the sheet preparation unit 10 to the lower end surface of the sheet-receiving portion 35 on the +X direction side with the heated upper end surface, thereby adhering the sheet 200.

[0078] The sheet pushing-up section 33 is positioned in a retracted position when the application roller 31 applies the adhesive layer 202 of the sheet 200 sent out from the sheet preparation section 10 to the object 100 held in the object holding section 34, and when it applies one side 215 of the sheet 200 sent out from the sheet preparation section 10 to the lower end surface of the sheet application section 35 on the -X direction side.

[0079] In the first embodiment, the object holding unit 34 is a so-called chuck table that includes a disk-shaped frame body with a recess formed therein and a disk-shaped suction unit fitted into the recess. The suction unit of the object holding unit 34 is formed of a porous ceramic or the like with numerous porous holes and is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown). The lower surface of the object holding unit 34, which is the exposed surface facing downward from the suction unit, is a holding surface 37 (see FIGS. 8 to 11 ) that suction-holds the object 100 from the surface 101 side directly or via a second sheet 250 by negative pressure introduced from the vacuum suction source. The holding surface 37 and the lower surface of the frame body of the object holding unit 34 are arranged on the same plane and are formed parallel to the horizontal XY plane. In the first embodiment, the object holding portion 34 is formed so that, for example, the outer diameter of the holding surface 37 is the same as or slightly smaller than the outer diameter of the object 100, and the outer diameter of the frame is slightly larger than the outer diameter of the object 100. The object holding portion 34 is rotatable about a Z axis that is parallel to the vertical direction and perpendicular to the XY plane by a rotation drive source (not shown).

[0080] The object holding section 34 is movable in the X-axis direction by a first direction movement unit 38 between an upper sticking position in the vertical direction relative to the sticking roller 31 and the sheet push-up section 33 and a transfer position where it retreats in the +X direction relative to the sticking roller 31 and the sheet push-up section 33 and can transfer the object 100 held by the object holding section 34 to the holding and conveying section 40. The object holding unit 34 is movable in the Z-axis direction between an attachment position where the height of the back surface 104 of the object 100 held by the object holding unit 34 is positioned at the same height as or lower than the vertical height of the upper end of the circumferential surface of the application roller 31, thereby putting the application roller 31 in an attachment-enabled state, and an attachment-avoidance position where the height of the back surface 104 of the object 100 held by the object holding unit 34 is positioned higher than the vertical height of the upper end of the circumferential surface of the application roller 31, thereby putting the application roller 31 in an attachment-avoidance state. The object holding unit 34 is positioned at the attachment position when the sheet 200 prepared by the sheet preparation unit 10 is inspected by the inspection unit 20 and judged to be good, and is positioned at the attachment-avoidance position when the sheet 200 prepared by the sheet preparation unit 10 is inspected by the inspection unit 20 and judged to be bad. In the first embodiment, the first direction movement unit 38 and the vertical direction movement unit 39 are both known ball screw mechanisms having a motor, a ball screw, and a guide.

[0081] The sheet receiving portions 35 are disposed adjacent to the object holding portion 34 on the −X direction side and the +X direction side, respectively. Each of the pair of sheet receiving portions 35 disposed on the ±X direction sides of the object holding portion 34 is formed of a rod-shaped member extending along the Y axis direction (second direction), and the length in the Y axis direction is set to be longer than the width 211 of the sheet 200. Each of the pair of sheet receiving portions 35 has a lower end surface at its lower end extending along the Y axis direction to which one surface 215 of the sheet 200 sent out from the sheet preparation portion 10 is adhered. The height of the lower end surfaces of the pair of sheet receiving portions 35 is positioned relatively equal to or lower than the vertical height of the upper end of the circumferential surface of the adhesion roller 31 and the vertical height of the upper end surface of the sheet push-up portion 33. The pair of sheet-receiving portions 35 are provided so as to be movable in the X-axis direction integrally with the object-to-be-attached holding portion 34 by a first-direction moving unit 38 between the adhering position and the delivery position.

[0082] The sheet cutting unit 36 ​​is disposed adjacent to the object-to-be-adhered holding unit 34 and the sheet-adhered portion 35 on the opposite side to the side where the sheet push-up unit 33 is disposed relative to the adhering roller 31. In the first embodiment, the sheet cutting unit 36 ​​is disposed adjacent to the sheet-adhered portion 35 on the -X direction side on the -X direction side. The sheet cutting unit 36 ​​is provided so as to be movable along the vertical direction. The sheet cutting unit 36 ​​is constituted by a cutter whose cutting blade extends linearly along the Y-axis direction (second direction), and the length in the Y-axis direction is set longer than the width 211 of the sheet 200. As shown in Figures 10 and 11, the sheet cutting unit 36 ​​moves vertically to a position below the sheet 200, thereby cutting the sheet 200, which has been attached to the lower end surfaces of at least one pair of sheet attachment portions 35 by the sheet push-up unit 33 and the attachment roller 31, along the width 211 at a position a predetermined length 213 toward the -X direction from one end side (+X direction side) attached to the lower end surface of one of the sheet attachment portions 35 by the sheet push-up unit 33.

[0083] In this way, when the sheet 200 is prepared by the sheet preparation unit 10, the adhesion unit 30 performs a sheet adhesion operation in which the sheet 200 prepared by the sheet preparation unit 10 is pressed against the lower end surface of the sheet adhesion portion 35 on the +X direction side by the sheet push-up unit 33 to adhere it, and the adhesion roller 31 rolls and presses it upward toward the adhesion object holding unit 34, and then presses it against the lower end surface of the sheet adhesion portion 35 on the -X direction side to adhere it. When the sheet 200 prepared by the sheet preparation unit 10 is inspected by the inspection unit 20 and judged to be good, the adhesion unit 30 positions the object holding unit 34 in an adhesion position, sets the adhesion roller 31 to an adhesion-ready state, and performs the sheet adhesion operation using the sheet push-up unit 33 and the adhesion roller 31 to adhere the sheet 200 to the lower end surfaces of the pair of sheet adhesion units 35 and the back surface 104 of the object 100 held by the object holding unit 34. On the other hand, when the sheet 200 prepared by the sheet preparation unit 10 is inspected by the inspection unit 20 and determined to be defective, the adhesion unit 30 positions the object holding unit 34 in the adhesion avoidance position, sets the adhesion roller 31 in the adhesion avoidance state, and performs a sheet adhesion operation using the sheet push-up unit 33 and the adhesion roller 31 to adhere the sheet 200 to the lower end surfaces of the pair of sheet object parts 35 while avoiding adhesion to the back surface 104 of the object 100 held by the object holding unit 34. The sheet 200 is adhered to the lower end surfaces of the pair of sheet object parts 35 and the back surface 104 of the object 100 held by the object holding unit 34. After performing the sheet adhesion operation using the sheet push-up unit 33 and the adhesion roller 31, the adhesion unit 30 cuts off the adhered sheet 200 to a predetermined length 213 using the sheet cutting unit 36.

[0084] 12 and 13 are cross-sectional views showing one state of the holding and conveying unit 40 and the peeling unit 50 of the processing device 1 shown in FIG. 6. FIG. 14 is a cross-sectional view showing one state of the holding and conveying unit 40, the peeling unit 50, and the disposal unit 60 of the processing device 1 shown in FIG. 6. The holding and conveying unit 40 holds the cut object 100 with the sheet 200 attached to the back surface 104 side or the cut sheet 200, and conveys the held object 100 or sheet 200 toward the peeling unit 50 or the expansion mechanism 70. As shown in FIGS. 12 to 14, the holding and conveying unit 40 includes a delivery holding unit 41 and a sheet clamping unit 42. As shown in FIG. 6, the holding and conveying unit 40 further includes a first direction movement unit 48 and a vertical direction movement unit 49.

[0085] In the first embodiment, the transfer holder 41 is a so-called chuck table including a disk-shaped frame body with a recess formed therein and a disk-shaped suction portion fitted into the recess. The suction portion of the transfer holder 41 is formed of a porous ceramic or the like with numerous porous holes and is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown). The upper surface of the transfer holder 41, which is the exposed surface facing upward from the suction portion, is a holding surface 43 (see FIGS. 6 and 12 to 14 ). The holding surface 43 sucks and holds the cut object 100, with a sheet 200 attached to the back surface 104, via the sheet 200, or directly sucks and holds the cut sheet 200, by applying negative pressure from the vacuum suction source. The holding surface 43 and the upper surface of the frame body of the transfer holder 41 are arranged on the same plane and are parallel to the horizontal XY plane. In the first embodiment, the handover holding unit 41 is formed so that, for example, the outer diameter of the holding surface 43 is the same as or slightly smaller than the outer diameter of the substrate 100, and the outer diameter of the frame body is slightly larger than the outer diameter of the substrate 100 and smaller than the width 211 and predetermined length 213 of the sheet 200. The handover holding unit 41 is provided so as to be rotatable about a Z axis that is parallel to the vertical direction and perpendicular to the XY plane by a rotation drive source (not shown).

[0086] The delivery holding section 41 is positioned by the first direction moving unit 48 between a delivery position where the holding surface 43 faces the holding surface 37 of the object holding section 34 positioned at the delivery position along the Z axis, and a position in the +X direction relative to the delivery position, and is positioned between the delivery position and the extended position below along the vertical direction relative to the expansion mechanism 70, and is freely movable in the X axis direction along the vertical direction relative to the peeling section 50, passing through the lower peeling position.

[0087] The delivery holding section 41 is movable in the Z-axis direction by a vertical movement unit 49. When the delivery holding section 41 is positioned at the receiving position in the X-axis direction, the vertical movement unit 49 moves the delivery holding section 41 upward along the Z-axis direction to approach the substrate holding section 34, thereby positioning the delivery holding section 41 at a receiving position in the Z-axis direction where the substrate 100 held on the holding surface 37 of the substrate holding section 34 can be received by the holding surface 43 from the substrate holding section 34. When the delivery holding section 41 is positioned at the peeling position in the X-axis direction, the vertical movement unit 49 moves the delivery holding section 41 upward along the Z-axis direction to approach the peeling section 50, thereby positioning the delivery holding section 41 at a peeling position in the Z-axis direction where the peeling section 50 can peel off the second sheet 250, if the second sheet 250 is adhered to the surface 101 of the substrate 100 held by the delivery holding section 41. When the delivery holding unit 41 is positioned at the extended position in the X-axis direction, the vertical movement unit 49 moves the delivery holding unit 41 upward along the Z-axis direction to approach the expansion mechanism 70, thereby positioning the delivery holding unit 41 at an expandable position in the Z-axis direction where the sheet 200 attached to the substrate 100 held by the delivery holding unit 41 can be expanded by the expansion mechanism 70. The delivery holding unit 41 can be moved downward along the Z-axis direction by the vertical movement unit 49 to be positioned lower along the Z-axis than the receiving position, peeling position, or expandable position, and can be positioned at a downward retracted position where the delivery holding unit 41 retracts downward along the Z-axis direction relative to the substrate holding unit 34, the peeling unit 50, and the expansion mechanism 70. In the first embodiment, the first direction movement unit 48 and the vertical movement unit 49 are both known ball screw mechanisms having a motor, a ball screw, and a guide.

[0088] 6, a plurality of sheet clamping units 42 (four in the example shown in FIG. 6) are arranged at equal intervals along the circumferential direction on the outer periphery of the frame of the delivery holding unit 41, and clamp the corners of the cut sheet 200 on the holding surface 43 of the delivery holding unit 41. The sheet clamping units 42 are formed integrally with the delivery holding unit 41, and are provided so as to be movable along the X-axis direction and the Z-axis direction, respectively, integrally with the delivery holding unit 41, by a first direction movement unit 48 and a vertical direction movement unit 49.

[0089] When the second sheet 250 is attached to the front surface 101 side of the substrate 100, the peeling unit 50 peels the second sheet 250 from the front surface 101 side of the substrate 100 after the sheet 200 is attached to the back surface 104 side, and discards the second sheet 250 peeled from the substrate 100 in the disposal unit 60. The disposal unit 60 discards the second sheet 250 peeled from the substrate 100 by the peeling unit 50. As shown in Figs. 6 and 14, the disposal unit 60 is a rectangular box with an open top, and is capable of storing second sheets 250 and sheets 200 stacked vertically.

[0090] In the first embodiment, as shown in Figures 12 to 14, the peeling unit 50 includes a peel start point generating unit 51, a release sheet holding unit 52, and a release sheet folding unit 53. The peel start point generating unit 51 includes a tip needle-shaped member 54 and an air nozzle 55. The tip of the tip needle-shaped member 54 is oriented in a diagonal direction between the -X direction and the -Z direction shown in Figures 12 to 14. The peel start point generating unit 51 is provided so as to be movable up and down along the Z-axis direction by a vertical movement unit (not shown). By moving up and down, the tip of the tip needle-shaped member 54 can be positioned at the peel position in the X-axis direction and at the height of the second sheet 250 attached to the surface 101 of the substrate 100 held by the delivery holder 41, which is positioned at a peelable position in the Z-axis direction.

[0091] In this way, the tip needle-shaped member 54 is positioned at the height of the second sheet 250 attached to the surface 101 of the substrate 100 held by the transfer holding portion 41, and after being positioned so that its tip side is in contact with the second sheet 250, the transfer holding portion 41 moves in the +X direction, causing the tip needle-shaped member 54 to move in the -X direction relative to the substrate 100 held by the transfer holding portion 41, generating a peeling starting point for peeling the second sheet 250 from the surface 101 of the substrate 100 along the X-axis direction.

[0092] 12 to 14 , the air nozzle 55 is provided on the opposite side of the tip of the needle-shaped member 54 from the direction in which the tip of the needle-shaped member 54 is oriented, facing the same direction as the tip of the needle-shaped member 54. The air nozzle 55 supplies high-pressure air toward the area between the surface 101 of the substrate 100 and the second sheet 250 at the peel start point formed by the tip of the needle-shaped member 54, thereby promoting peeling of the second sheet 250 from the surface 101 of the substrate 100 based on the peel start point. Note that the present invention is not limited to providing the air nozzle 55 separately from the needle-shaped member 54 as described above, and the air nozzle 55 may be provided as part of the needle-shaped member 54, and may eject high-pressure air from the tip of the needle-shaped member 54.

[0093] The release sheet holding unit 52 includes a release sheet clamping unit 56 and a release sheet suction holding unit 57. The release sheet clamping unit 56 is composed of a pair of clamping pieces arranged along the X-axis direction, which is the direction in which the peeling start points are generated. The pair of clamping pieces clamps the end of the second sheet 250 to be peeled, located on the +X-direction side, where the peeling start points are generated. The release sheet suction holding unit 57 is formed as a hollow plate with numerous micropores formed across the entire lower surface. It is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown). The lower surface of the release sheet suction holding unit 57 suctions and holds the second sheet 250 to be peeled from above, from the side opposite the side that was attached to the surface 101 of the substrate 100, by negative pressure introduced from the vacuum suction source. In this way, the release sheet holding section 52 holds the second sheet 250 that has been peeled off from the surface 101 of the object 100 by clamping the end of the second sheet 250 with the release sheet clamping section 56 and suction-holding the second sheet 250 from above with the release sheet suction-holding section 57.

[0094] The release sheet holding unit 52 is movable up and down along the Z-axis by a vertical movement unit (not shown). The release sheet holding unit 52 is also movable along the Y-axis by a second direction movement unit (not shown) between a release sheet holding position where the release sheet suction and holding unit 57 faces the holding surface 37 of the substrate holding unit 34, which is positioned at the peeling position, along the Z-axis, and a release sheet discarding position where the release sheet holding position is positioned in the -Y direction and vertically below the disposal unit 60. After holding the second sheet 250 peeled from the surface 101 of the substrate 100, the release sheet holding unit 52 is moved from the release sheet holding position to the release sheet discarding position by the second direction movement unit. Once positioned at the release sheet discarding position, the release sheet holding unit 52 releases the clamping of the second sheet 250 by the release sheet clamping unit 56 and the suction and hold of the second sheet 250 by the release sheet suction and holding unit 57, thereby discarding the held second sheet 250 in the disposal unit 60.

[0095] The release sheet folding unit 53 is formed of a cylindrical member extending like a rod along the Y-axis direction (second direction), and the length in the Y-axis direction is set to be at least longer than the outer diameter of the second sheet 250, and preferably set to be longer than the width 211 of the sheet 200. The release sheet folding unit 53 is provided to be rotatable about the Y-axis, and is provided to be movable along the X-axis direction by a first direction movement unit (not shown) between a position in the +X direction relative to the peeling start point generating unit 51 and the release sheet holding unit 52, and a position below the end of the release sheet suction holding unit 57 of the release sheet holding unit 52 in the -X direction.

[0096] As shown in Figure 14, the release sheet folding unit 53 clamps the end of the second sheet 250 to be peeled off by the release sheet clamping unit 56 on the side where the peel start point was generated, and moves the release sheet holding unit 52 upward to move the height of the lower surface of the release sheet suction holding unit 57 to the same height as or slightly higher than the height of the upper end of the release sheet folding unit 53, and then moves the peel start point generating unit 51 upward and then in the -X direction, thereby appropriately folding the second sheet 250 clamped by the release sheet clamping unit 56, and rolling the side of the second sheet 250 that was attached to the surface 101 of the object 100, while promoting the peeling of the second sheet 250 from the surface 101 of the object 100 on the circumferential surface, and promoting the suction holding of the peeling second sheet 250 on the lower surface of the release sheet suction holding unit 57.

[0097] The expansion mechanism 70 expands the sheet 200 attached to the back surface 104 of the substrate 100 by the adhering unit 30, and divides the substrate 100 into multiple devices 103 (chips) along the division origins 111 if the substrate 100 has division origins 111, and widens the gaps between the multiple devices 103 (chips) along the division origins 111 or the division grooves 112 if the substrate 100 has at least one of the division origins 111 or the division grooves 112. As shown in FIG. 6 , the expansion mechanism 70 is configured to have a first clamping unit 71, a second clamping unit 72, a third clamping unit 73, a fourth clamping unit 74, and a clamping unit moving unit 75.

[0098] The first clamping unit 71 and the second clamping unit 72 are arranged opposite each other in a first direction (X-axis direction) across a region (space) where the substrate 100 to which the sheet 200 has been adhered by the adhering unit 30 is transported and placed, and each clamps the outer edge of the sheet 200, and are arranged to be movable (freely) in directions away from each other in the first direction by the clamping unit movement unit 75. The third clamping unit 73 and the fourth clamping unit 74 are arranged opposite each other in a second direction (Y-axis direction) that intersects the first direction, across a region (space) where the substrate 100 to which the sheet 200 has been adhered by the adhering unit 30 is transported and placed, and each clamps the outer edge of the sheet 200, and are arranged to be movable (freely) in directions away from each other in the second direction by the clamping unit movement unit 75.

[0099] The clamping section moving unit 75 can move the first clamping section 71 and the second clamping section 72 in a direction away from each other in the first direction. The clamping section moving unit 75 can move the third clamping section 73 and the fourth clamping section 74 in a direction away from each other in the second direction. In the first embodiment, each of the clamping section moving units 75 is a known ball screw mechanism having a motor, a ball screw, and a guide.

[0100] Fig. 15 is a cross-sectional view showing a part of the expansion mechanism 70 of the processing device 1 shown in Fig. 6. The expansion mechanism 70 uses a first clamping unit 71 and a second clamping unit 72 to clamp the outer edge in the first direction of the sheet 200 adhered to the substrate 100 held by the delivery holder 41, which is positioned at an expanded position in the X-axis direction and at an expandable position in the Z-axis direction, and also uses a third clamping unit 73 and a fourth clamping unit 74 to clamp the outer edge in the second direction of the sheet 200.

[0101] The expansion mechanism 70 expands the sheet 200 along the first direction by moving the first clamping section 71 and the second clamping section 72, which each clamp the outer edge of the sheet 200 in the first direction, in directions away from each other in the first direction, using the clamping section moving unit 75, as shown in Figure 15, and expands the sheet 200 along the second direction by moving the third clamping section 73 and the fourth clamping section 74, which each clamp the outer edge of the sheet 200 in the second direction, in directions away from each other in the second direction, thereby expanding the sheet 200 along the second direction, thereby isotropically expanding the sheet 200 along the approximately horizontal direction.

[0102] As the sheet 200 expands, the adhered object 100 to which the sheet 200 is attached is pulled radially outward from the center of the sheet 200, dividing the adhered object 100 into multiple devices 103 (chips) along the division starting point 111 if the adhered object 100 has a division starting point 111, and widening the spacing between the multiple devices 103 (chips) along at least one of the division starting point 111 or the division groove 112 if the adhered object 100 has at least one of the division starting point 111 or the division groove 112.

[0103] 16, 17, 18, and 19 are cross-sectional views showing one state of a portion of the expansion mechanism 70 and the frame fixing unit 80 of the processing device 1 shown in Fig. 6. The frame fixing unit 80 fixes the sheet 200, which has been adhered to the substrate 100, to the frame 120 to form a substrate unit 131. The frame fixing unit 80 also fixes the sheet 200, which is not adhered to the substrate 100 (avoiding adhesion to the substrate 100), to the frame 120 to form a frame unit 132. Note that Figs. 16 to 19 show the state in which the frame fixing unit 80 fixes the sheet 200, which is not adhered to the substrate 100 (avoiding adhesion to the substrate 100), to the frame 120 to form the frame unit 132. As shown in FIGS. 6 and 16 to 19, the frame fixing section 80 includes a frame holding section 81, a frame adhering roller 82, and a cutting section 83. As shown in FIGS.

[0104] The frame holding unit 81 is formed with a plate-like member formed to fit the size and shape of the frame 120 and a plurality of pads provided on the downward-facing surface of the plate-like member. As shown in FIGS. 16 and 17 , the frame holding unit 81 suction-holds the upper surface of the frame 120 from above using the plurality of pads. The frame holding unit 81 is equipped with a movement unit (not shown), which transports the suction-held frame 120 from a storage unit that stores the frame 120 toward the upper side of the area (space) surrounded by the first clamping unit 71, the second clamping unit 72, the third clamping unit 73, and the fourth clamping unit 74 of the expansion mechanism 70. As shown in FIGS. 16 and 17 , the frame holding unit 81 transports and places the suction-held frame 120 on one surface 215 facing upward of the base layer 201 of the sheet 200 expanded by the expansion mechanism 70, and supports the frame 120 facing downward in this state.

[0105] 6, the frame sticking roller 82 and the cutting unit 83 are both provided at positions on the outer periphery of the delivery holding unit 41 of the holding and conveying unit 40, and are provided so as to be movable along the X-axis direction integrally with the delivery holding unit 41 and the sheet clamping unit 42 by the first direction movement unit 48. The frame sticking roller 82 and the cutting unit 83 are also provided so as to be movable along the Z-axis direction, independently of the delivery holding unit 41 and the sheet clamping unit 42. The frame sticking roller 82 and the cutting unit 83 are also provided so as to be rotatable along the circumferential direction around the central axis of the delivery holding unit 41.

[0106] 17 , frame adhering roller 82 conveys and places frame 120 on one surface 215 of base layer 201 of sheet 200 by frame holding unit 81, and then moves upward to press one surface 215 of base layer 201 of sheet 200 toward frame 120 from the other surface 217 side, and further rotates around the central axis of delivery holding unit 41 in the circumferential direction to adhere one surface 215 of base layer 201 of sheet 200 to frame 120 over the entire circumference of frame 120, thereby fixing sheet 200 to frame 120. As a result, the region of sheet 200 fixed to frame 120 inside frame 120 is fixed in an expanded state by expansion mechanism 70.

[0107] 18, cutting unit 83 adheres one surface 215 of base layer 201 of sheet 200 to frame 120 all around the frame 120 by frame adhering roller 82, and then moves upward to cut sheet 200 from the other surface 217 at (or near) the radial position where sheet 200 was adhered to frame 120 by frame adhering roller 82. In the state where cutting unit 83 has cut sheet 200 as shown in FIG. 18, cutting unit 83 further rotates around the central axis of delivery holding unit 41 in the circumferential direction, thereby cutting sheet 200 all around the frame 120 as shown in FIG. 19, and cuts out sheet 200 fixed to frame 120 in a state where it can be held by frame holding unit 81 and transported. At this time, if the sheet 200 is attached to the substrate 100, a substrate unit 131 is formed and cut out, and if the sheet 200 is not attached to the substrate 100, a frame unit 132 is formed and cut out as shown in Fig. 19. The formed and cut substrate unit 131 or frame unit 132 is transported by the frame holding section 81 towards the storage section 90, which is the destination.

[0108] Fig. 20 is a perspective view showing an example of a substrate unit 131 formed by the substrate processing method according to embodiment 1. Fig. 21 is a perspective view showing an example of a frame unit 132 formed by the substrate processing method according to embodiment 1. As shown in Fig. 20, substrate unit 131 includes substrate 100, sheet 200 attached to the back surface 104 of substrate 100, and frame 120 to which the outer periphery of sheet 200 is attached. Substrate 100 is supported by sheet 200 in substrate unit 131. As shown in Fig. 21, frame unit 132 does not include substrate 100, and includes sheet 200 that is not attached to the back surface 104 of substrate 100, and frame 120 to which the outer periphery of sheet 200 is attached. The frame unit 132 is the object unit 131 from which the object 100 to which the sheet 200 is attached has been omitted.

[0109] FIG. 22 is a perspective view showing an example of the storage unit 90 of the processing device 1 shown in FIG. 6. The storage unit 90 is a container for storing a plurality of substrates 100, substrate units 131, or frame units 132, and is an example of a destination for the substrate units 131 or frame units 132 in this embodiment. As shown in FIG. 22, the storage unit 90 has a plurality of storage spaces 91 arranged in the Z-axis direction, and each storage space 91 stores one substrate unit 131 or frame unit 132. A transport unit (not shown) removes the substrate 100 from the +X direction shown in FIG. 6 and stores the substrate unit 131 or frame unit 132 in the storage unit 90. In the example of embodiment 1 shown in FIG. 6, two storage units 90 are installed, but one or three or more storage units 90 may be installed. Furthermore, the object 100 may be taken out from the accommodation space 91 of any (arbitrary) accommodation section 90, and the object unit 131 or the frame unit 132 may be accommodated in the accommodation space 91 of any (arbitrary) accommodation section 90.

[0110] The control unit 99 controls the operation of each component of the processing device 1, causing the processing device 1 to perform various processes, including various processes in the method for processing a substrate according to embodiment 1. The control unit 99 controls the inspection section 20 to inspect the sheet 200 at predetermined lengths 213, and acquires from the inspection section 20 the inspection results of the sheet 200 linked to the identification information assigned to each predetermined length 213. In accordance with the inspection results of the sheet 200 acquired from the inspection section 20, the control unit 99 controls (determines) the position of the substrate holding section 34 when the sheet pushing-up section 33 and the bonding roller 31 perform the sheet bonding operation at each predetermined length 213. For each predetermined length 213 of the sheet 200, if the inspection result of the sheet 200 obtained from the inspection section 20 is good, the control unit 99 positions the object holding section 34 at a position where adhesion is possible and performs the sheet adhesion operation using the sheet push-up section 33 and the adhesion roller 31, and if the inspection result of the sheet 200 obtained is bad, the control unit 99 positions the object holding section 34 at a position where adhesion is avoided and performs the sheet adhesion operation using the sheet push-up section 33 and the adhesion roller 31.

[0111] In the first embodiment, the control unit 99 includes a computer system. The computer system included in the control unit 99 includes an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit), a storage device having memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device. The arithmetic processing device of the control unit 99 performs arithmetic processing in accordance with a computer program stored in the storage device of the control unit 99, and outputs control signals for controlling the processing device 1 to each component of the processing device 1 via the input / output interface device of the control unit 99.

[0112] Next, this specification will explain a method for treating a substrate according to embodiment 1 with reference to the drawings. Preparation step 1001 is a step of preparing a sheet 200 to be adhered to substrate 100. Specifically, in preparation step 1001, a sheet preparation section 10 controlled by a control unit 99 unwinds a long, strip-shaped sheet 200 provided with a release film 203 from a reel 11 on which the sheet 200 is wound and set in a roll, as shown in FIG. 7 , and delivers the sheet 200 toward an attachment roller 31 of an attachment section 30 by a delivery roller 12. At the same time, a peel plate 14 peels off the release film 203 from the sheet 200, thereby preparing the sheet 200 to be adhered to substrate 100 so that it can be immediately attached to substrate 100.

[0113] Inspection step 1002 is a step of inspecting the condition of the area of ​​sheet 200 to be adhered to substrate 100. Specifically, in inspection step 1002, inspection section 20 controlled by control unit 99 inspects sheet 200 wound around reel 11 before being fed toward adhering section 30, sheet 200 passing through the sheet 200 feed path from reel 11 of sheet preparation section 10 to be fed toward adhering section 30, or sheet 200 held by adhering section 30 before being adhered to substrate 100, as shown in Fig. 7 , and outputs the inspection results of sheet 200 to control unit 99 or the like, linking the inspection results of sheet 200 to identification information assigned to each predetermined length 213.

[0114] In the case of the first embodiment in which the sheet 200 is formed by laminating the adhesive layer 202 on the base material layer 201, the inspection step 1002 inspects the quality of the adhesive layer 202 of the sheet 200. Specifically, in the inspection step 1002, the inspection unit 20 controlled by the control unit 99 inspects the quality of the adhesive layer 202 of the sheet 200, and for each predetermined length 213, the inspection result of the quality of the adhesive layer 202 is linked to the identification information assigned to each predetermined length 213 as the inspection result of the sheet 200, and the control unit 99 etc. acquires the inspection result of the quality of the adhesive layer 202.

[0115] If the sheet 200 is determined to be good in the inspection step 1002 (YES in the inspection step 1002), the adhering step 1003 is a step of adhering the sheet 200 to the substrate 100. Specifically, in the adhering step 1003, if the control unit 99 inspects the sheet 200 prepared by the sheet preparation unit 10 using the inspection unit 20 and determines that the sheet 200 is good, the control unit 99 controls the adhering unit 30 based on this determination of good, positions the substrate holding unit 34 at the adhering position in the X-axis direction and at the adhering possible position in the Z-axis direction, sets the adhering roller 31 to an adhering possible state, and performs a sheet adhering operation using the sheet push-up unit 33 and the adhering roller 31 to adhering the sheet 200 to the lower end surfaces of the pair of sheet substrates 35 and the back surface 104 of the substrate 100 held by the substrate holding units 34, and then cuts off the adhered sheet 200 to a predetermined length 213 using the sheet cutting unit 36.

[0116] In the method for processing the object to be adhered according to embodiment 1, after performing the adhering step 1003, the control unit 99 moves the object to be adhered holding portion 34 and the sheet object to be adhered portion 35 in the X-axis direction from the adhering position to the delivery position, and moves the delivery holding portion 41 of the holding and conveying portion 40, which is not holding anything, to the receiving position in the X-axis direction and to the receiving position in the Z-axis direction, so that the object to be adhered 100, which has the sheet 200 adhered to its back surface 104, is sandwiched in the Z-axis direction between the holding surface 37 of the object to be adhered holding portion 34 and the holding surface 43 of the delivery holding portion 41. In the method for processing an object according to the first embodiment, the control unit 99 then cancels the suction hold on the holding surface 37 of the object holding unit 34 and activates the suction hold on the holding surface 43 of the delivery holding unit 41, thereby transitioning the object 100, having the sheet 200 attached to its back surface 104, from a state in which it is suction-held on the holding surface 37 of the object holding unit 34 to a state in which it is suction-held on the holding surface 43 of the delivery holding unit 41, and causes the sheet clamping unit 42 to clamp the corners of the sheet 200 attached to the back surface 104 of the object 100 on the holding surface 43 of the delivery holding unit 41. In the method for processing an object according to the first embodiment, the control unit 99 then moves the delivery holding unit 41 downward to position it at the lower retracted position in the Z-axis direction, moves it from the receiving position to the extended position along the X-axis, and moves it upward to position it at the extendable position in the Z-axis direction, thereby making it possible to perform the extension step 1004.

[0117] Here, when the second sheet 250 is attached to the surface 101 of the object to be adhered 100 on the holding surface 43 of the delivery holding section 41, the control unit 99 may move the delivery holding section 41 to the peeling position, move it up to a peelable position in the Z-axis direction, before moving it to the extended position along the X-axis direction, i.e., before performing the extension step 1004 described below, and control the peeling section 50 to peel the second sheet 250 from the surface 101 side of the object to be adhered 100, and perform a second sheet peeling step in which the second sheet 250 peeled from the object to be adhered 100 is disposed of in the disposal section 60.

[0118] In the second sheet peeling step, specifically, the control unit 99 controls the peeling section 50 to generate a peel start point by the peel start point generating section 51 for peeling the second sheet 250 from the surface 101 side of the substrate 100, as shown in Fig. 12. In the second sheet peeling step, the control unit 99 then clamps the end of the second sheet 250 to be peeled, on the side where the peel start point has been generated, by the release sheet clamping section 56 of the release sheet holding section 52, as shown in Fig. 13. In the second sheet peeling step, the control unit 99 then moves the release sheet holding portion 52 upward, as shown in Figure 14, to move the height of the underside of the release sheet suction holding portion 57 to the same height as or slightly higher than the height of the upper end of the release sheet folding portion 53, and then retracts the peel start point generating portion 51 upward, and then moves the release sheet folding portion 53 in the -X direction to appropriately fold the second sheet 250 clamped by the release sheet clamping portion 56, thereby progressing the peeling of the second sheet 250 from the surface 101 of the object 100 and promoting suction and retention of the peeling second sheet 250 on the underside of the release sheet suction holding portion 57. In the second sheet peeling step, once second sheet 250 has been completely peeled from surface 101 of substrate 100 in this manner, control unit 99 suction-holds second sheet 250 peeled from surface 101 of substrate 100 with the lower surface of release sheet suction-holding unit 57 while maintaining clamping of the end of second sheet 250 on the side where the peel start point was generated by release sheet clamping unit 56, thereby causing release sheet holding unit 52 to movably hold second sheet 250. In the second sheet peeling step, control unit 99 finally moves delivery holding unit 41 downward to position it at a downward retracted position in the Z-axis direction, moves release sheet holding unit 52, which movably holds the peeled second sheet 250, along the Y-axis from the release sheet holding position to the release sheet discarding position, releases release sheet holding unit 52 at the release sheet discarding position, thereby discarding the peeled second sheet 250 in discarding unit 60, and moves delivery holding unit 41 upward to return it to the peeling position in the Z-axis direction.

[0119] The expanding step 1004 is a step of expanding the sheet 200 attached to the substrate 100 after the adhering step 1003. In the first embodiment, the expanding step 1004 is performed by the expanding mechanism 70, i.e., the sheet 200 attached to the substrate 100 is expanded by the expanding mechanism 70. In the expanding step 1004, specifically, the control unit 99 controls the expanding mechanism 70 to first clamp the outer edge in the first direction of the sheet 200 attached to the substrate 100 held by the delivery holder 41, which is positioned at an expanded position in the X-axis direction and at an expandable position in the Z-axis direction, with the first clamping unit 71 and the second clamping unit 72, respectively, and also clamp the outer edge in the second direction of the sheet 200 with the third clamping unit 73 and the fourth clamping unit 74, respectively. In the expansion step 1004, the control unit 99 then causes the clamping unit moving unit 75 to move the first clamping unit 71 and the second clamping unit 72, which each clamp the outer edge of the sheet 200 in the first direction, in a direction away from each other in the first direction, as shown in Figure 15, thereby expanding the sheet 200 along the first direction, and moves the third clamping unit 73 and the fourth clamping unit 74, which each clamp the outer edge of the sheet 200 in the second direction, in a direction away from each other in the second direction, thereby expanding the sheet 200 along the second direction, thereby expanding the sheet 200 isotropically along a generally horizontal direction. In the expansion step 1004, by expanding the sheet 200 isotropically in this manner generally horizontally, the sheet 200 is pulled from the center radially outward, thereby dividing the adhered object 100 along the division starting point 111 into multiple devices 103 (chips) if the adhered object 100 has a division starting point 111, and widening the spacing between the multiple devices 103 (chips) along at least one of the division starting point 111 or the division groove 112 if the adhered object 100 has at least one of the division starting point 111 or the division groove 112.

[0120] In the method for processing an object to be adhered according to embodiment 1, after performing the expansion step 1004, the control unit 99 may control the frame fixing section 80 to perform an object to be adhered unit formation step in which the sheet 200 that has been adhered to the object to be adhered and expanded is fixed to the frame 120 to form an object to be adhered unit 131.

[0121] Specifically, in the adherend unit formation step, the control unit 99 controls the frame fixing section 80, and first, the frame holding section 81 transports and places the frame 120, which has been adsorbed and held in a storage section (not shown), on one surface 215 of the base layer 201 of the sheet 200 in the expanded state in the expansion step 1004, and supports it downward in this positioned state. In the adhered object unit formation step, the control unit 99 next moves the frame adhering roller 82 upward, causing the frame adhering roller 82 to press one side 215 of the base material layer 201 of the sheet 200 from the other side 217 side toward the frame 120 supported downward by the frame holding portion 81, and further rotates the frame adhering roller 82 circumferentially around the central axis of the transfer holding portion 41, thereby adhering one side 215 of the base material layer 201 of the sheet 200 to the frame 120 by sandwiching it from above and below between the frame holding portion 81 and the frame adhering roller 82 around the entire circumference of the frame 120. In the adhered object unit forming step, the control unit 99 then retracts the frame adhering roller 82 and then moves the cutting section 83 upward, so that the cutting section 83 cuts the sheet 200 from the other surface 217 side at (near) the radial position where the frame adhering roller 82 adhered the sheet 200 to the frame 120, and then rotates the cutting section 83, which has cut the sheet 200, around the central axis of the delivery holding section 41 in the circumferential direction, thereby cutting the sheet 200 around the entire circumference of the frame 120 and cutting out the sheet 200 fixed to the frame 120, thereby forming an adhered object unit 131 in a state that can be held and transported by the frame holding section 81.

[0122] In the substrate processing method according to the first embodiment, after the substrate unit forming step, the control unit 99 may perform a substrate unit transport step of transporting the substrate unit 131 formed in the substrate unit forming step to a desired destination, that is, the storage section 90. Specifically, in the substrate unit transport step, the frame holding section 81 transports the substrate unit 131 formed in the substrate unit forming step toward the desired destination (storage section 90) and stores it therein. Furthermore, in the substrate unit transport step, the control unit 99 generates and stores a database linking identification information of the sheet 200 constituting the substrate unit 131 with specific information that specifies the storage space 91 of the storage section 90 that stores the substrate unit 131, thereby enabling easy later reference to the identification information and inspection results of the sheet 200 constituting the substrate unit 131 based on the specific information for the storage space 91. In the method for processing the substrate according to embodiment 1, if the sheet 200 having a predetermined length 213 is judged to be good in the inspection step 1002 (YES in the inspection step 1002), the substrate unit 131 is transported (stored) to an arbitrary destination (storage section 90), and the series of processes is terminated.

[0123] In the frame unit forming step 1005, if the sheet 200 is judged to be defective in the inspection step 1002 (NO in the inspection step 1002), the sheet 200 is not adhered to the substrate 100, but is fixed to the frame 120 to form the frame unit 132. Specifically, in the frame unit forming step 1005, if the sheet 200 is judged to be defective in the inspection step 1002 (NO in the inspection step 1002), the control unit 99 first carries out an adhesion avoidance step to prevent the sheet 200, which was prepared in the preparation step 1001 and inspected in the inspection step 1002 and judged to be good, from being adhered to the substrate 100 by the adhering section 30, as shown in FIGS.

[0124] Specifically, in the adhesion avoidance step, when the control unit 99 inspects the sheet 200 prepared by the sheet preparation unit 10 using the inspection unit 20 and determines that it is defective, it controls the adhesion unit 30 based on this determination of defect to position the object holding unit 34 at the adhesion position in the X-axis direction and at the adhesion avoidance position in the Z-axis direction, set the adhesion roller 31 in the adhesion avoidance state, and perform the sheet adhesion operation using the sheet push-up unit 33 and the adhesion roller 31 to adhere the sheet 200 to the lower end surfaces of the pair of sheet adhesion units 35 while avoiding adhesion to the back surface 104 of the object 100 held by the object holding unit 34, and then cuts off the adhered sheet 200 to a predetermined length 213 using the sheet cutting unit 36.

[0125] In the frame unit formation step 1005, after performing the adhesion avoidance step, the control unit 99 moves the object holding portion 34 and the sheet object holding portion 35 from the adhesion position to the delivery position in the X-axis direction, and moves the delivery holding portion 41 of the holding and conveying portion 40, which is not holding anything, to the receiving position in the X-axis direction and to the receiving position in the Z-axis direction, so that the sheet 200, which has avoided adhesion to the back surface 104 of the object 100, is sandwiched in the Z-axis direction between the lower end surfaces of the pair of sheet object holding portions 35 and the holding surfaces 43 of the delivery holding portions 41. In frame unit formation step 1005, control unit 99 then operates suction holding on holding surface 43 of delivery holding portion 41, thereby transitioning sheet 200, which has avoided adhering to back surface 104 of substrate 100, from a state where it is adhered to the lower end surfaces of the pair of sheet-receiving portions 35 to a state where it is adhering by suction on holding surface 43 of delivery holding portion 41, and causes sheet clamping portion 42 to clamp corners of sheet 200, which has avoided adhering to back surface 104 of substrate 100, on holding surface 43 of delivery holding portion 41. In frame unit formation step 1005, control unit 99 then moves delivery holding portion 41 downward to position it at a downward retracted position in the Z axis direction, moves it along the X axis direction from the receiving position past the peeling position to the expanded position, and moves it upward to position it at an expandable position in the Z axis direction, thereby making it expandable by expansion mechanism 70.

[0126] In the frame unit forming step 1005, the adhesion avoidance step is performed, and the sheet 200 that has avoided adhesion to the back surface 104 of the adherend 100 is made expandable by the expansion mechanism 70. Then, the control unit 99 controls the expansion mechanism 70 to first clamp the outer edge of the sheet 200 in the first direction held by the delivery holding unit 41 with the first clamping unit 71 and the second clamping unit 72, and then clamp the outer edge of the sheet 200 in the second direction with the third clamping unit 73 and the fourth clamping unit 74. As shown in FIG. 15, the clamping unit moving unit 75 moves the first clamping unit 71 and the second clamping unit 72, which respectively clamp the outer edge of the sheet 200 in the first direction, in directions away from each other in the first direction, thereby expanding the sheet 200 along the first direction, and moves the third clamping unit 73 and the fourth clamping unit 74, which respectively clamp the outer edge of the sheet 200 in the second direction, in directions away from each other in the second direction, thereby expanding the sheet 200 along the second direction.

[0127] In the frame unit forming step 1005, after expanding the sheet 200 in this manner, the control unit 99 controls the frame fixing section 80 to first transport and position the frame 120 on one surface 215 of the base layer 201 of the expanded sheet 200 by the frame holding section 81, as shown in Figure 16, and support it downward in this positioned state. In the frame unit formation step 1005, the control unit 99 then moves the frame adhering roller 82 upward as shown in FIG. 17, so that the frame adhering roller 82 presses one side 215 of the base layer 201 of the sheet 200 from the other side 217 side toward the frame 120 supported downward by the frame holding portion 81, and further rotates the frame adhering roller 82 in the circumferential direction around the central axis of the transfer holding portion 41, so that the frame 120 is sandwiched from above and below by the frame holding portion 81 and the frame adhering roller 82, respectively, around the entire circumference of the frame 120, thereby adhering one side 215 of the base layer 201 of the sheet 200 to the frame 120. In the frame unit forming step 1005, the control unit 99 then retracts the frame adhering roller 82, and then moves the cutting section 83 upward as shown in Figure 18, so that the cutting section 83 cuts the sheet 200 from the other surface 217 side at (near) the radial position where the frame adhering roller 82 adhered the sheet 200 to the frame 120.Furthermore, by rotating the cutting section 83 in the state in which the sheet 200 has been cut into the sheet 200 around the central axis of the delivery holding section 41 in the circumferential direction, the sheet 200 is cut around the entire circumference of the frame 120 as shown in Figure 19, and the sheet 200 fixed to the frame 120 is cut out, thereby forming a frame unit 132 in a state that can be held and transported by the frame holding section 81.

[0128] The transporting step 1006 is a step of transporting the frame unit 132 formed in the frame unit forming step 1005 to the storage section 90, which is an arbitrary destination, after the frame unit forming step 1005 is performed. Specifically, in the transporting step 1006, the control unit 99 controls the frame holding section 81 to transport the frame unit 132 formed in the frame unit forming step 1005 toward the arbitrary destination (storage section 90) and store it therein. Also, in the transporting step 1006, the control unit 99 generates and stores a database linking the identification information of the sheet 200 constituting the frame unit 132 with specific information that specifies the storage space 91 of the storage section 90 that stores the frame unit 132, thereby making it possible to easily refer to the identification information and inspection results of the sheet 200 constituting the frame unit 132 later based on the specific information for the storage space 91. In the method for processing the substrate according to embodiment 1, if a sheet 200 of a predetermined length 213 is judged to be defective in inspection step 1002 (NO in inspection step 1002), transport step 1006 is carried out to transport (store) the frame unit 132 to an arbitrary destination (storage section 90), thereby completing the series of processes.

[0129] In the first embodiment, a series of processes (steps) of the method for processing an object according to the first embodiment is repeatedly performed for a long strip-shaped sheet 200 every predetermined length 213. If the result of inspection step 1002 in the immediately preceding series of processes is YES, the sheet 200 is attached to the object 100 held by the object holding unit 34, and the object 100 is finally transported (stored) as an object unit 131 to an arbitrary destination (storage unit 90). In the next series of processes, a new transport unit (not shown) transports and supplies the object 100 to below the holding surface 37 of the object holding unit 34, and the object 100 is sucked and held by the holding surface 37 of the object holding unit 34. On the other hand, if the result of inspection step 1002 in the immediately preceding series of processes is NO, the sheet 200 is not attached to the substrate 100 held by the substrate holding portion 34, and the substrate 100 continues to be held by suction on the holding surface 37 of the substrate holding portion 34. Therefore, the next series of processes are also carried out with the substrate 100 still being held by suction on the holding surface 37 of the substrate holding portion 34.

[0130] The method for processing an object to be adhered according to embodiment 1 having the above-described configuration includes an inspection step 1002 for inspecting the condition of the area of ​​the sheet 200 to be adhered to the object to be adhered 100, and therefore has the advantageous effect of preventing potentially defective parts of the strip-shaped sheet 200 from being adhered to the object to be adhered 100.

[0131] In addition, in the method for processing an object to be adhered according to embodiment 1, the sheet 200 has an adhesive layer 202 laminated on a base material layer 201, and in the inspection step 1002, the adhesive layer 202 is inspected for quality (whether the condition is good or defective) in the area of ​​the sheet 200 that will be adhered to the object to be adhered 100. This allows for more efficient inspection of potentially defective parts of the adhesive layer 202 of the strip-shaped sheet 200, preventing potentially defective parts of the adhesive layer 202 of the strip-shaped sheet 200 from being adhered to the object to be adhered 100, and by transporting the defective sheet 200 to an arbitrary destination, the operator does not need to spend time manually collecting the defective sheet 200, and the defective sheet 200 can be discharged from the processing unit (sheet preparation unit 10, inspection unit 20, adhesion unit 30, holding and conveying unit 40, peeling unit 50, expansion mechanism 70 and frame fixing unit 80) of the processing device 1 that will subsequently process another sheet 200.

[0132] Furthermore, in the method for processing a substrate according to the first embodiment, if the inspection step 1002 judges the substrate to be passable, a sticking step 1003 is carried out in which the portion of the sheet 200 judged to be passable is stuck to the substrate 100, so that the passable portion of the strip-shaped sheet 200 can be selectively stuck to the substrate 100. The method for processing a substrate according to the first embodiment further includes an expansion step 1004 after the sticking step 1003 in which the sheet 200 stuck to the substrate 100 is expanded, so that the substrate 100 to which the portion of the sheet 200 judged to be passable has been stuck can be subjected to good processing.

[0133] Furthermore, in the method for treating an object according to the first embodiment, the object 100 has division starting points 111 along planned division lines 102 that divide the object 100 into a plurality of devices 103 (chips), and in the expanding step 1004, the object 100 is divided into the plurality of devices 103 (chips) along the division starting points 111. Alternatively, in the method for treating an object according to the first embodiment, the object 100 has at least one of division starting points 111 or division grooves 112 along planned division lines 102 that divide the object 100 into a plurality of devices 103 (chips), and in the expanding step 1004, the spacing between the devices 103 (chips) is widened. In this way, the method for treating an object according to the first embodiment can perform appropriate treatment according to the division starting points 111 or division grooves 112 formed on the object 100 by expanding the sheet 200.

[0134] In addition, in the method for processing an object to be adhered according to embodiment 1, the expansion step 1004 is performed by an expansion mechanism 70 having a first clamping unit 71 and a second clamping unit 72, which are arranged opposite each other in a first direction sandwiching the object to be adhered 100 adhered to the sheet 200 and each clamp the outer edge of the sheet 200 adhered to the object to be adhered 100 by the adhering step 1003, a third clamping unit 73 and a fourth clamping unit 74, which are arranged opposite each other in a second direction intersecting the first direction sandwiching the object to be adhered 100 adhered to the sheet 200 and each clamp the outer edge of the sheet 200, and a clamping unit moving unit 75 which enables the first clamping unit 71 and the second clamping unit 72 to move in directions away from each other in the first direction and the third clamping unit 73 and the fourth clamping unit 74 to move in directions away from each other in the second direction, thereby expanding the sheet 200. Therefore, the method for processing an object according to embodiment 1 can expand the sheet 200 isotropically along a generally horizontal direction, and can provide better processing to the object 100 to which the sheet 200 judged to be good is attached.

[0135] Furthermore, in the method for processing a substrate according to the first embodiment, if the portion of the sheet 200 determined to be defective in the inspection step 1002 is determined to be defective, the portion of the sheet 200 determined to be defective is not attached to the substrate 100 (attachment is intentionally avoided), and the portion of the sheet 200 determined to be defective is fixed to the frame 120 to form a frame unit 132, and a transport step 1006 is carried out to transport (store) the frame unit 132 formed in the frame unit formation step 1005 to an arbitrary destination (storage section 90). Therefore, the method for processing a substrate according to the first embodiment avoids attaching the portion of the sheet 200 determined to be defective to the substrate 100, separates it from the good portion of the strip-shaped sheet 200, processes it separately, and transports (stores) it to an arbitrary destination (storage section 90), so that the good portion of the strip-shaped sheet 200 can be selectively attached to the substrate 100.

[0136] In particular, the method for processing the substrate in embodiment 1 is performed by the control unit 99 essentially changing the position of the substrate holding portion 34 when the sheet pressing portion 33 and the sticking roller 31 perform the sheet sticking operation to a sticking position or a sticking avoidance position depending on the inspection result of whether the sheet 200 is good or bad in the inspection step 1002. Specifically, by changing the position to a sticking position when the inspection result is good, or to a sticking avoidance position when the inspection result is bad, it controls whether a portion of the sheet 200 is stuck to the substrate 100 or avoided, so that good portions of the strip-shaped sheet 200 can be selectively stuck to the substrate 100, and bad portions of the strip-shaped sheet 200 can be selectively avoided from sticking to the substrate 100 and separated.

[0137] [Embodiment 2] A method for treating a substrate according to a second embodiment of the present invention will be described. Fig. 23 is a flowchart showing the processing steps of the method for treating a substrate according to the second embodiment. Figs. 24 and 25 are both cross-sectional views showing one state of the holding and conveying unit 40 and the peeling unit 50 of the processing device 1 that performs the method for treating a substrate according to the second embodiment. Fig. 26 is a cross-sectional view showing one state of the holding and conveying unit 40, the peeling unit 50 and the disposal unit 60 of the processing device 1 that performs the method for treating a substrate according to the second embodiment. In Figs. 23 to 26, the same parts as those in the first embodiment are designated by the same reference numerals, and their description will be omitted.

[0138] As shown in FIG. 23, the method for processing an object to be adhered according to the second embodiment is the same as the method for processing an object to be adhered according to the first embodiment except that the frame unit forming step 1005 and the transporting step 1006 are replaced by a disposal step 1007, and the other configurations are the same as those of the first embodiment.

[0139] In the processing device 1 that performs the method for processing a substrate according to the second embodiment, the peeling unit 50, which is the same unit that peels the second sheet 250 from the substrate 100, discards the sheet 200 that has avoided adhering to the substrate 100 into the disposal unit 60, which is the same unit that discards the second sheet 250 when the second sheet 250 is attached to the substrate 100. Specifically, as shown in Figures 24 and 25 , the peeling unit 50 scoops up the sheet 200, which has avoided adhering to the substrate 100 and is held on the holding surface 43 of the delivery holding unit 41, from above the holding surface 43 using the needle-shaped tip member 54 and air nozzle 55 of the peeling start point generating unit 51. As shown in FIG. 26 , the peeling unit 50 uses the release sheet clamping unit 56 of the release sheet holding unit 52 to clamp the end of the sheet 200 on the +X direction side, which is the side scooped up by the peel start point generating unit 51, and the release sheet folding unit 53 appropriately folds the sheet 200 clamped by the release sheet clamping unit 56, and while rolling the other side 217 of the sheet 200, encourages the suction and holding of the sheet 200 on the underside of the release sheet suction and holding unit 57 at the circumferential surface, and the sheet 200 is suction-held by the release sheet suction and holding unit 57 of the release sheet holding unit 52.

[0140] The peeling unit 50 clamps the sheet 200 with the release sheet clamping unit 56 and suction-holds the sheet 200 with the release sheet suction-holding unit 57, and then moves the release sheet holding unit 52, which includes the release sheet clamping unit 56 and the release sheet suction-holding unit 57, from the release sheet holding position to the release sheet disposal position, and by releasing the clamping of the sheet 200 by the release sheet clamping unit 56 and the suction-holding of the sheet 200 by the release sheet suction-holding unit 57, the held sheet 200 is discarded in the same disposal unit 60 that discards the second sheet 250.

[0141] Next, this specification will explain, with reference to the drawings, a method for treating an object according to embodiment 2. Disposal step 1007 is a step in which, if the sheet 200 is determined to be defective in inspection step 1002 (NO in inspection step 1002), the sheet 200 is not attached to object 100 and is discarded in disposal section 60.

[0142] In discarding step 1007, specifically, when the control unit 99 determines that the sheet is defective in inspection step 1002 (NO in inspection step 1002), first, it performs the same adhesion avoidance step as in embodiment 1. In discarding step 1007, after performing the adhesion avoidance step, the control unit 99 causes the sheet 200 that has avoided being stuck to the back surface 104 of the object 100 to be sucked and held by the holding surface 43 of the delivery and holding unit 41, in the same manner as in frame unit formation step 1005 in embodiment 1, and also causes the sheet clamping unit 42 to clamp the corners of the sheet 200 that has avoided being stuck to the back surface 104 of the object 100 on the holding surface 43 of the delivery and holding unit 41. In the disposal step 1007, the control unit 99 moves the delivery holding section 41 downward to position it in a downward retracted position in the Z-axis direction, moves it from the receiving position to the peeling position along the X-axis direction, and moves it upward to position it in a peelable position in the Z-axis direction, thereby making the sheet 200, which has avoided sticking to the back surface 104 of the object 100 on the holding surface 43 of the delivery holding section 41, into a state where it can be disposed of in the disposal section 60 by the peeling section 50.

[0143] In the disposal step 1007, the control unit 99 prepares the sheet 200, which has avoided sticking to the back surface 104 of the substrate 100 on the holding surface 43 of the transfer holding section 41, in a state where it can be disposed of in the disposal section 60 by the peeling section 50, and then controls the peeling section 50 to scoop up the sheet 200 upward from the holding surface 43 using the tip needle-shaped member 54 and air nozzle 55 of the peeling start point generating section 51, as shown in Figures 24 and 25. In the disposal step 1007, the control unit 99 then clamps the end of the sheet 200 on the +X direction side, which is the side scooped up by the peel start point generation unit 51, using the release sheet clamping unit 56 of the release sheet holding unit 52, as shown in Figure 26, and causes the release sheet folding unit 53 to appropriately fold the sheet 200 clamped by the release sheet clamping unit 56, and while rolling the other side 217 of the sheet 200, encourages the suction and holding of the sheet 200 on the underside of the release sheet suction and holding unit 57 with the circumferential surface, and the sheet 200 is suction and held by the release sheet suction and holding unit 57 of the release sheet holding unit 52. In disposal step 1007, control unit 99 clamps sheet 200 with release sheet clamping section 56, suction-holds sheet 200 with release sheet suction-holding section 57, and then moves release sheet holding section 52, including release sheet clamping section 56 and release sheet suction-holding section 57, from the release sheet holding position to the release sheet disposal position, and releases clamping of sheet 200 by release sheet clamping section 56 and suction-holding of sheet 200 by release sheet suction-holding section 57, thereby disposing of the held sheet 200 in the same disposal section 60 as disposing of second sheet 250. In the method for treating an object according to the second embodiment, when sheet 200 of predetermined length 213 is determined to be defective in inspection step 1002 (NO in inspection step 1002), disposal step 1007 is performed in this manner, and sheet 200 determined to be defective is disposed of in disposal section 60, thereby ending the series of processes.

[0144] That is, in the method for processing the substrate according to embodiment 2, the processing device 1 is provided with a peeling section 50 that peels the second sheet 250 from the substrate 100, and in a disposal step 1007, the second sheet 250 peeled from the substrate 100 by the peeling section 50 is disposed of in a disposal section 60 that discards sheets 200 determined to be defective in the inspection step 1002.

[0145] The method for processing a substrate according to the second embodiment having the above-described configuration, like the method for processing a substrate according to the first embodiment, includes an inspection step 1002 for inspecting the condition of the area of ​​the sheet 200 to be attached to the substrate 100, and essentially, depending on the inspection result of whether the sheet 200 is good or bad in the inspection step 1002, the position of the substrate holding portion 34 when the sheet attaching operation is performed by the sheet push-up portion 33 and the attachment roller 31 is changed to a position where attachment is possible or a position where attachment is avoided. Specifically, if the inspection result is good, the position is changed to a position where attachment is possible, and if the inspection result is bad, the position is changed to a position where attachment is avoided, thereby controlling whether the portion of the sheet 200 is attached to the substrate 100 or avoided, thereby achieving the same effect as in the first embodiment.

[0146] In addition, the method for processing an object to be adhered according to embodiment 2 is the same as the method for processing an object to be adhered according to embodiment 1, except that the frame unit formation step 1005 and the conveying step 1006 are replaced by a disposal step 1007. This makes it possible to avoid fixing the portion of the sheet 200 determined to be defective in the inspection step 1002 to the frame 120, and also allows the portion to be disposed of in the same disposal section 60 as the second sheet 250, thereby enabling more efficient processing of the object to be carried out.

[0147] The present invention is not limited to the above-described embodiment, and can be implemented in various modifications without departing from the gist of the present invention. [Explanation of symbols]

[0148] 1 Processing equipment 10. Sheet preparation section 20 Inspection Department 30 Adhesive part 50 Peeling section 60 Disposal Department 70 Expansion Mechanism 71 First clamping part 72 Second clamping part 73 Third clamping part 74 4th clamping part 75 Clamping unit movement unit 90 Storage section 100 Kimono to be attached 102 Planned division line 103 Devices (chips) 111 Split starting point 112 Dividing groove 131 Adhesive Kimono Unit 132 Frame Unit 200 sheets 201 Base material layer 202 Adhesive layer 250 Second seat 1001 Preparation Steps 1002 Inspection Steps 1003 Adhesion step 1004 Extended Step 1005 Frame unit forming step 1006 Transport Step 1007 Disposal Step

Claims

1. a sheet preparation unit that prepares a sheet to be attached to an object; an attachment part for attaching the sheet to an object; In a processing device comprising: a preparation step of preparing the sheet; an inspection step of inspecting the state of the area of ​​the sheet to be attached to the object; A method for treating an object to be adhered, comprising:

2. The sheet has an adhesive layer laminated on a base layer, 2. The method for treating an object to be adhered according to claim 1, wherein the inspection step inspects whether the adhesive layer is good or bad.

3. 2. The method for treating an object to be adhered according to claim 1, further comprising the step of adhering the sheet to an object to be adhered, if the sheet is judged to be good in the inspection step.

4. 4. The method for treating an object to be stuck according to claim 3, further comprising the step of expanding the sheet after the sticking step.

5. the substrate has a division starting point along a division line along which the substrate is to be divided into a plurality of chips; 5. The method for treating an object to be adhered according to claim 4, wherein the expanding step divides the object to be adhered along the dividing starting points into a plurality of chips.

6. the substrate has at least one of a dividing groove or a dividing starting point along a dividing line for dividing the substrate into a plurality of chips; 5. The method for treating an object to be stuck according to claim 4, wherein the expanding step widens the gap between the chips along at least one of the dividing grooves and the dividing starting points.

7. The expansion step comprises: a first clamping unit and a second clamping unit that are arranged opposite to each other in a first direction with an object adhered to the sheet therebetween, and that clamp an outer edge of the sheet adhered to the object in the adhering step; a third clamping section and a fourth clamping section that are arranged opposite to each other across an object attached to the sheet in a second direction intersecting the first direction, and that clamp an outer edge of the sheet, respectively; a clamping section moving unit that allows the first clamping section and the second clamping section to move in directions away from each other in the first direction and that allows the third clamping section and the fourth clamping section to move in directions away from each other in the second direction; 5. The method for treating an object to be stuck according to claim 4, wherein the object is expanded by an expansion mechanism having an expansion mechanism.

8. If the product is determined to be defective in the inspection step, a frame unit forming step of fixing the sheet to a frame without attaching the sheet to an object to be attached; a transport step of transporting the frame unit to an arbitrary destination; 2. The method for treating an object to be stuck according to claim 1, wherein the following steps are carried out:

9. the processing device has a disposal unit that discards the sheet; If the product is determined to be defective in the inspection step, a discarding step of discarding the sheet in the discard section without attaching the sheet to an object; The method for treating an object to be adhered according to claim 1, comprising:

10. the object has a second sheet attached to a second surface opposite to the first surface to which the sheet is attached, The processing device comprises: a peeling section that peels the second sheet from the object to be attached, 10. The method for treating an object to be adhered according to claim 9, wherein the second sheet peeled off from the object to be adhered by the peeling section is discarded in the discarding section that discards the sheet in the discarding step.

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