Microphone chip and microphone

Abstract

The present invention relates to the technical field of condenser microphones, and in particular to microphone chips and microphones. [Solution] The microphone chip includes a base having a front chamber and a capacitor system provided on the base, the capacitor system including a diaphragm located on the top of the base and a backplate provided at a distance from the diaphragm, an air gap being formed between the diaphragm and the backplate, the diaphragm and the backplate being connected to the base via a fixed part, the diaphragm including an inner membrane part, an outer membrane part and a support part, there being a gap between the inner membrane part and the outer membrane part, the support part connecting the fixed part and the inner membrane part or the fixed part and the outer membrane part, the microphone chip further including a support member connected to the backplate and positioned between the backplate and the inner membrane part, when in an operating state, the inner membrane part can be adsorbed to the support member and the support member can divide the inner membrane part into at least two regions.

Description

[Technical field]

[0001] The present invention relates to the technical field of condenser microphones, and in particular to microphone chips and microphones. [Background technology]

[0002] With the development of wireless communication, the number of mobile phone users in the world is increasing, and people's demands for mobile phones are not limited to the realization of phone calls, but also high quality of phone call effect. Especially with the current development of mobile multimedia technology, the phone call quality becomes more and more important. As the mobile phone microphone is the voice pickup device of the mobile phone, its design quality directly affects the phone call quality.

[0003] Currently, the most commonly used microphones are mainly condenser microphones and MEMS (micro-motor system) microphones, which are widely applied to various terminal devices. The condenser microphone includes a diaphragm and a back plate, which together form a MEMS acoustic sensing capacitance, and the MEMS acoustic sensing capacitance is further connected to a processing chip through a connecting disk, which outputs an acoustic sensing signal to the processing chip for signal processing. In the prior art, the movement of the diaphragm is affected by its structure, so the performance of the MEMS microphone chip is poor. Summary of the Invention [Problem to be solved by the invention]

[0004] SUMMARY OF THE PRESENT EMBODIMENT The present invention aims to provide a microphone chip and microphone that effectively increases and adjusts the stiffness of the diaphragm according to demand. [Means for solving the problem]

[0005] The present invention provides a microphone chip, comprising: a base having a front chamber; and a capacitor system provided on the base, the capacitor system including a diaphragm located on the top of the base and a back plate spaced apart from the diaphragm, and an air gap is formed between the diaphragm and the back plate; The microphone chip includes a fixing portion, the diaphragm and the back plate are connected to the base via the fixing portion, the diaphragm includes an inner membrane portion, an outer membrane portion and a supporting portion, there is a gap between the inner membrane portion and the outer membrane portion, the supporting portion connects the fixing portion and the inner membrane portion or connects the fixing portion and the outer membrane portion, The microphone tip further includes a support member connected to the backplate and positioned between the backplate and the inner membrane portion, and when in an operating state, the inner membrane portion can be adsorbed to the support member and the support member can divide the inner membrane portion into at least two regions.

[0006] In a possible design, the support member comprises a closing portion and a partition portion, Along a thickness direction of the microphone chip, the closing portion is provided above the inner membrane portion and close to an outer periphery of the inner membrane portion; The partition portion is connected to an inner periphery of the closure portion.

[0007] In a possible design, the support portion extends outwardly along the edge of the inner membrane portion and is connected to the fixation portion; The adventitia portion is fixedly connected to the anchor portion.

[0008] In a possible design, one or more of the supports are provided.

[0009] In a possible design, the outer membrane portion is provided in at least two portions, At least two of the outer membrane portions extend outwardly along the edge of the inner membrane portion and surround the inner membrane portion; Along the extending direction of the outer membrane portion, one end of the outer membrane portion is connected to the inner membrane portion and the other end is connected to the support portion.

[0010] In a possible design, the support part extends outwardly along the edge of the outer membrane part facing away from the inner membrane part and is connected to the fixing part.

[0011] In a possible design, there is a gap between the adventitia part and the inner circumference of the fixation part.

[0012] In a possible design, the microphone tip further comprises an electrode sheet and an electrode guide; the electrode sheet is provided on a side of the back plate adjacent to the vibration membrane, and the electrode sheet is divided into at least two sheets by the support member; The electrode guide is used to simultaneously draw out at least two of the electrode sheets.

[0013] In a possible design, the back plate has at least two outlet holes, The electrode guide may be connected to a side of the back plate away from the vibration membrane, and a portion of the electrode guide may be connected to each of the electrode sheets through each of the lead-out holes.

[0014] The present invention provides a microphone, which includes a microphone body and the above microphone tip attached to the microphone body. Effect of the Invention

[0015] The effects of the present invention are as follows. By providing a support member, the diaphragm in an operating state is divided into n mutually separated floating regions, improving the rigidity of the diaphragm. Also, by dividing the diaphragm in an operating state into two, three, four, ... or n floating regions, the rigidity of the diaphragm can be adjusted as required. The more the diaphragm is divided into, the stronger its rigidity becomes, making it possible to reduce the thickness of the diaphragm or increase its area, and further improving the feasibility of the design of the diaphragm. [Brief description of the drawings]

[0016] [Figure 1] 1 is a cross-sectional view of a specific embodiment of a microphone chip according to the present invention. [Diagram 2] FIG. 2 is an enlarged schematic view of part A in FIG. [Diagram 3] 2 is a schematic diagram showing the structures of a back plate, a support member, and a diaphragm in FIG. 1. [Figure 4] 2 is a schematic diagram showing the structure of a support member and a vibration membrane in FIG. 1. [Diagram 5] FIG. 2 is a structural schematic diagram of a support member in FIG. [Figure 6] FIG. 2 is a schematic diagram showing the structure of the diaphragm in FIG. [Figure 7] FIG. 2 is a structural schematic diagram of another specific embodiment of the microphone chip according to the present invention; [Figure 8] 8 is a schematic diagram of engagement between the vibration membrane and the fixed portion in FIG. 7. FIG. [Figure 9] FIG. 8 is a schematic diagram showing the structure of the diaphragm in FIG. [Figure 10] 1 is a cross-sectional view of a microphone chip according to the present invention. [Figure 11] FIG. 11 is a schematic diagram of the explosion in FIG. [Figure 12] 11 is a cross-sectional view of the engagement of the electrode guide, back plate, electrode sheet and support member in FIG. 10. [Figure 13] FIG. 11 is a cross-sectional view of the electrode guide in FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0017] The invention will be further explained below with reference to the drawings and embodiments.

[0018] This embodiment provides a microphone applicable to electronic devices, whose role is to receive sound and convert the sound into an electrical signal. The microphone includes a microphone body and a microphone chip 1, and the microphone chip 1 is attached to the microphone body.

[0019] Specifically, as shown in Figures 1, 7 and 11, the microphone chip 1 includes a base 11 having a front chamber 111, a diaphragm 12 provided on the base 11, and a back plate 13 provided at a distance from the diaphragm, the diaphragm 12 is connected between the base 11 and the back plate 13 along its vibration direction, and an air gap is formed between the diaphragm 12 and the back plate 13. The diaphragm 12 and the back plate 13 form a capacitor system, and when an external sound is transmitted to the diaphragm 12 through the front chamber 111, the diaphragm 12 senses the external sound pressure and vibrates, changing the distance between the diaphragm 12 and the back plate 13 to cause a capacitance change, thereby realizing the conversion of the audio signal into an electric signal.

[0020] As shown in FIG. 1, FIG. 7 and FIG. 11, the microphone chip 1 includes a fixing portion 17, and the diaphragm 12 and the back plate 13 are connected to the base 11 via the fixing portion 17. The diaphragm 12 includes an inner membrane portion 121, an outer membrane portion 122 and a support portion 123, and there is a gap between the inner membrane portion 121 and the outer membrane portion 122, and the support portion 123 connects the fixing portion 17 and the inner membrane portion 121, or connects the fixing portion 17 and the outer membrane portion 122. The microphone chip 1 further includes a support member 14, which is connected to the back plate 13 and is located between the back plate 13 and the inner membrane portion 121. When in an operating state, the inner membrane portion 121 can be adsorbed to the support member 14, and the support member 14 can divide the inner membrane portion 121 into at least two regions.

[0021] In this embodiment, the support member 14 has a certain height, and when the microphone is not in operation, the inner membrane portion 121, the back plate 13, and the support member 14 are in a separated state. When the microphone is in operation, the inner membrane portion 121 is attracted by electrostatic force and adsorbed to the support member 14 by the bias voltage, and at this time, the support member 14 divides the inner membrane portion 121 into at least two mutually separated floating regions. The support member 14 divides the inner membrane portion 121 in the operating state into n mutually separated floating regions, thereby improving the rigidity of the inner membrane portion 121. Here, by dividing the vibrating membrane 12 in the operating state into two, three, four, ... or n floating regions, the necessary rigidity of the vibrating membrane 12 can be adjusted, and the more the number of divisions of the vibrating membrane 12, the stronger its rigidity, which makes it possible to reduce the thickness of the vibrating membrane 12 or increase the area of ​​the vibrating membrane 12, and further improves the feasibility of the design of the vibrating membrane 12.

[0022] As shown in FIG. 3 to FIG. 5, the support member 14 includes a closing portion 141 and a partition portion 142. The closing portion 141 is provided above the inner membrane portion 121 along the thickness direction of the microphone chip 1 and is provided close to the outer periphery of the inner membrane portion 121. When the microphone operates, the inner membrane portion 121 is attracted to the closing portion 141 by electrostatic force, and the closing portion 141 supports the inner membrane portion 121 to reach the operating state, and the occurrence of the low attenuation phenomenon is avoided, and the reliability of the microphone is improved. The partition portion 142 is connected to the inner periphery of the closing portion 141, and the microphone is partitioned by the partition portion 142 in the operating state. The partition portion 142 can be a rod structure, and both ends of the partition portion 142 are connected to the inner periphery of the closing portion 141, and the partition portion 142 partitions the closing portion 141 into two parts, thereby partitioning the inner membrane portion 121 into two floating regions. As shown in Figs. 3 and 4, the partition portion 142 is two connecting rods arranged crosswise, and can divide the inner membrane portion 121 into four separated floating regions during operation.

[0023] As shown in Figures 4 and 6, in a specific embodiment, the support portion 123 extends outward along the edge of the inner membrane portion 121 and is connected to the fixing portion 17, and the outer membrane portion 122 is fixedly connected to the fixing portion 17.

[0024] In this embodiment, by processing the diaphragm 12, the diaphragm 12 forms an inner membrane portion 121, an outer membrane portion 122, and a support portion 123 as shown in Fig. 6. There is a gap between the inner membrane portion 121 and the outer membrane portion 122, and the support portion 123 fixes the inner membrane portion 121 by connecting the inner membrane portion 121 and the fixing portion 17, so that the inner membrane portion 121 is in a cantilever state, which ensures that the stress of the diaphragm material is sufficiently released and improves the adaptability of the diaphragm.

[0025] 4 and 6, one support portion 123 is provided. That is, the vibrating membrane 12 can be connected and fixed by a single arm, which further ensures that the stress of the vibrating membrane 12 is released. Alternatively, the vibrating membrane 12 may be provided with a plurality of support portions 123, such as two, three, etc.

[0026] In another specific embodiment, as shown in Fig. 7 to Fig. 9, the outer membrane portion 122 is provided surrounding the inner membrane portion 121, and there is a gap between a part of the outer membrane portion 122 and the inner membrane portion 121, and a part of the outer membrane portion 122 is connected to the inner membrane portion 121, and the support portion 123 connects the outer membrane portion 122 and the fixing portion 17, and by reducing the constraint on the inner membrane portion 121, the stress of the vibration membrane 12 is effectively released. As shown in Fig. 8, there is a gap between the outer membrane portion 122 and the inner circumference of the fixing portion 17, which can effectively improve the sensitivity, reduce the constraint force of the vibration membrane, and effectively release the stress.

[0027] 8, at least two outer membrane parts 122 are provided, and the at least two outer membrane parts 122 extend outward along the edge of the inner membrane part 121 and incorporate the inner membrane part 121. Along the direction in which the outer membrane part 122 extends, one end of the outer membrane part 122 is connected to the inner membrane part 121 and the other end is connected to the support part 123, so that a gap is formed between the middle part of the outer membrane part 122 and the inner membrane part, which makes it easy to release stress and helps to extend the service life of the vibration membrane.

[0028] As shown in FIG. 9, four outer membrane portions 122 are provided, and correspondingly, four support portions 123 are also provided.

[0029] 10 to 13, the microphone chip 1 further includes an electrode sheet 15, which is provided on the side of the back plate 13 close to the diaphragm 12. In order to provide a support member 14 on the back plate 13, it is necessary to divide the electrode sheet 15. The electrode sheet 15 is divided into at least two sheets by the support member 14. Each electrode sheet 15 is provided in an area partitioned by a partition portion 142. In order to realize the simultaneous drawing of each electrode sheet 15, the microphone chip 1 further includes an electrode guide 16, which can simultaneously draw out at least two electrode sheets 15, thereby solving the problem that each electrode sheet 15 needs to be drawn out individually.

[0030] 11 and 12, at least two lead holes 133 are formed in the back plate 13, and the at least two lead holes 133 are provided in the middle part of the back plate 13, and the position of each lead hole 133 corresponds to the position of each electrode sheet 15, and the electrode sheet 15 corresponding to the position of the lead hole 133 is not subjected to hole opening processing. The electrode guide 16 is connected to the side of the back plate 13 away from the vibration membrane 12, and some of the electrode guides 16 can be connected to each electrode sheet 15 through each lead hole 133.

[0031] 12 and 13, the electrode guide 16 includes a collecting portion 161 and at least two guide portions 162 connected to each other, the collecting portion 161 being located on the side of the back plate 13 away from the diaphragm 12, and each guide portion 162 being connected to a corresponding electrode sheet 15 through an outlet hole 133. The electrode sheet 15 does not have an opening at a position corresponding to the electrode guide 16. The back plate 13 is further provided with a sound hole 134 that conducts sound to balance the sound pressure, and the sound hole 134 is located on the outer periphery of the outlet hole 133.

[0032] As shown in FIG. 13, the electrode sheet 15 is divided into four parts by the support member 14, and correspondingly, the electrode guide 16 is provided with four guide portions 162, and the back plate 13 is provided with four drawing holes 133.

[0033] Here, the material of the electrode guide 16 may be a metal material or other conductive material.

[0034] The above is merely an embodiment of the present invention, and those skilled in the art may make modifications without departing from the spirit of the present invention, all of which are within the scope of protection of the present invention. [Explanation of symbols]

[0035] 1 Microphone Chip 11. Base 111 Front chamber 12 Diaphragm 121 Endometrium 122 Adventitial part 123 Support part 13 Backplate 131 Drawer hole 132 sound hole 14 Support member 141 Closing part 142 Partition 15 Electrode sheet 16 Electrode Guide 161 Consolidation Department 162 Guide part 17 Fixed part

Claims

1. A microphone chip including a base having a front chamber and a capacitor system provided on the base, the capacitor system including a diaphragm located on an upper portion of the base and a back plate provided at a distance from the diaphragm, and an air gap is formed between the diaphragm and the back plate, the microphone chip includes a fixing portion, the diaphragm and the back plate are connected to the base via the fixing portion; The vibration membrane includes an inner membrane portion, an outer membrane portion, and a support portion, and there is a gap between the inner membrane portion and the outer membrane portion. The support portion connects the fixing portion and the inner membrane portion, or connects the fixing portion and the outer membrane portion. The microphone chip further includes a support member connected to the backplate and positioned between the backplate and the inner membrane portion, and when in an operating state, the inner membrane portion can be adsorbed to the support member and the support member can divide the inner membrane portion into at least two regions.

2. The support member includes a closure portion and a partition portion, Along a thickness direction of the microphone chip, the closing portion is provided above the inner membrane portion and adjacent to an outer periphery of the inner membrane portion; 2. The microphone tip of claim 1, wherein the partition portion is connected to an inner periphery of the closure portion.

3. The support portion extends outward along an edge of the inner membrane portion and is connected to the fixing portion; 2. The microphone chip of claim 1, wherein the outer membrane portion is fixedly connected to the fixed portion.

4. The microphone chip according to claim 3 , wherein one or more of the support portions are provided.

5. At least two outer membrane portions are provided, At least two of the outer membrane portions extend outwardly along the edge of the inner membrane portion and surround the inner membrane portion; The microphone chip according to claim 1 , wherein along the extension direction of the outer membrane portion, one end of the outer membrane portion is connected to the inner membrane portion and the other end is connected to the support portion.

6. The microphone chip according to claim 5 , wherein the support portion extends outwardly along an edge portion of the outer membrane portion away from the inner membrane portion and is connected to the fixing portion.

7. The microphone chip according to claim 5, wherein there is a gap between the outer membrane portion and an inner periphery of the fixing portion.

8. The microphone chip further includes an electrode sheet and an electrode guide; the electrode sheet is provided on a side of the back plate adjacent to the vibration membrane, and the electrode sheet is divided into at least two sheets by the support member; 8. The microphone chip according to claim 1, wherein the electrode guide is used to pull out at least two of the electrode sheets simultaneously.

9. The back plate has at least two outlet holes, The microphone chip described in claim 8, characterized in that the electrode guide is connected to the side of the back plate away from the vibration membrane, and a portion of the electrode guide can be connected to each of the electrode sheets through each of the drawing holes.

10. The microphone body, A microphone comprising: a microphone chip according to any one of claims 1 to 9 attached to the microphone body.

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