Sealing material with lip seal

Abstract

The sealing member includes a unitary body including a first portion adjacent a second portion. The first portion forms a portion of a circle. The second portion includes first and second lobes. Each lobe adjacent the first portion with a concave surface. In one example, each lobe includes a rounded tip and a convex surface extends from one rounded tip to the other rounded tip.

Description

[Technical field]

[0001] SUMMARY OF THE DISCLOSURE Embodiments of the present disclosure generally relate to a sealing member, such as an O-ring, that is installed in a seal groove formed in a face of a component. [Background technology]

[0002] In some equipment, such as equipment used in the manufacture of electronic chips, a face of one component must sealingly engage with a face of another component. Typically, a sealing member, such as an O-ring, installed in a seal groove formed in the face of one of the components may be several feet long and may follow a complex path, such as a helical path. In some applications, the geometry and manufacturing tolerances of the components require the seal groove and sealing member to be relatively thin, which can result in leakage of the sealing member at one or more discrete locations along the length of the sealing member.

[0003] Therefore, there is a need for an improved sealing member. Summary of the Invention

[0004] The present disclosure generally relates to a sealing member, such as an O-ring, that is installed in a seal groove formed in a surface of a component. In one embodiment, the sealing member includes an elongated unitary body including a first portion adjacent to a second portion. When viewed in a coronal plane perpendicular to the direction of elongation, the first portion forms a portion of a circle. Additionally, the second portion includes a first lobe including a first rounded tip and adjacent to the first portion at a first concave surface, a second lobe including a second rounded tip and adjacent to the first portion at a second concave surface, and a convex surface extending from the first rounded tip to the second rounded tip.

[0005] In another embodiment, the sealing member includes an elongated unitary body including a first portion adjacent to a second portion. When viewed in a coronal plane perpendicular to the direction of elongation, the first portion includes first and second elliptical nodes. Each node includes a first major axis and a first minor axis and extends away from the second portion along the major axis. Additionally, the second portion includes first and second elliptical lobes. Each lobe includes a second major axis and a second minor axis and extends away from the first portion along the major axis. The thickness of each node measured along the first minor axis is greater than the thickness of each lobe measured along the second minor axis.

[0006] In another embodiment, an assembly includes a first component including a face having a seal groove, a sealing member in the seal groove, and a second component attached to the first component and including a ridge. The seal groove includes an opening having a first width, and the ridge includes an end having a second width less than the first width. The sealing member includes a one-piece body elongated in a direction along the seal groove, the one-piece body including a first portion located in the seal groove and an adjacent second portion that projects from the opening of the seal groove and contacts an end of the ridge. The second portion includes first and second lobes. Each lobe contacts the face of the first component at the opening of the seal groove.

[0007] So that the above-mentioned features of the present disclosure can be understood in detail, a more particular description of the present disclosure briefly summarized above can be had by reference to embodiments, some of which are illustrated in the accompanying drawings. It should be noted, however, that since the present disclosure is capable of admitting other equally effective embodiments, the accompanying drawings illustrate only exemplary embodiments and therefore should not be considered as limiting its scope. [Brief description of the drawings]

[0008] [Figure 1A] FIG. 2 is a schematic front view of the components in which the sealing member is installed. [Figure 1B] FIG. 1B is a schematic diagram illustrating some of the components of FIG. 1A in a combined isometric and cross-sectional view. [Figure 2A] FIG. 1B is a schematic diagram of a portion of a combined assembly of the component of FIG. 1A and a second component. [Figure 2B] FIG. 2B is a schematic diagram of a variation of a portion of the combined assembly of FIG. 2A. [Figure 3A] 3A-3C are schematic diagrams illustrating exemplary cross-sectional shapes of sealing members. [Figure 3B] 3A-3C are schematic diagrams illustrating exemplary cross-sectional shapes of sealing members. [Figure 3C] 3A-3C are schematic diagrams illustrating exemplary cross-sectional shapes of sealing members. [Figure 3D] 3A-3C are schematic diagrams illustrating exemplary cross-sectional shapes of sealing members. [Figure 4A] 3B is a schematic diagram of the sealing member of FIG. 3A installed in the assembly of FIG. 2A. [Figure 4B] FIG. 3C is a schematic diagram of the sealing member of FIG. 3B installed in the assembly of FIG. 2A. [Figure 4C] FIG. 3D is a schematic diagram of the sealing member of FIG. 3C installed in the assembly of FIG. 2A. [Figure 4D] FIG. 3E is a schematic diagram of the sealing member of FIG. 3D installed in the assembly of FIG. 2A. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] For ease of understanding, wherever possible, identical reference numerals have been used to designate identical elements common to the figures. It is contemplated that elements and features of one embodiment may be beneficially incorporated in other embodiments without further recitation.

[0010] The present disclosure relates to a sealing member, such as an O-ring, configured for use in a seal groove, such as a seal groove on a face of a component. It is contemplated that the sealing member may be made from any suitable sealing material, such as an elastomer, a thermoplastic, or a metal.

[0011] 1A is a schematic front view of a first component 100 on which a sealing member is disposed. Examples of portions of the first component 100 include, but are not limited to, components of a semiconductor processing chamber such as a chamber lid, components of a gas distribution system, components of a substrate support, or components of a heat transfer system such as components of a cooling circuit. Other examples include equipment associated with fluid distribution and / or heat transfer in other industries such as machines for manufacturing, food processing, chemical processing, etc. A face 102 of the first component 100 is configured to abut or otherwise mate with a second component (not shown in FIG. 1A).

[0012] Face 102 includes a seal groove 110 configured to receive a sealing member. Seal groove 110 includes a sidewall 112 and a floor 114. Seal groove 110 is sized and shaped to receive the sealing member to provide a seal at a desired location between component 100 and another component when they are mated together.

[0013] It is contemplated that in some embodiments, the seal groove 110 defines a path only around the periphery of the face 102 of the first component 100. In some embodiments, it is contemplated that the seal groove 110 defines a path around a portion of the face 102 of the first component 100 where a seal with another component is desired. In some embodiments, it is contemplated that the face 102 of the first component 100 includes a second seal groove. In some embodiments, it is contemplated that the second seal groove does not intersect with the seal groove 110. As shown, in some embodiments, the seal groove 110 is arranged as a spiral path.

[0014] 1B shows a schematic representation of a portion of the first component 100 in a combined isometric and cross-sectional view. The sealing member 150 is disposed within and extends along the seal groove 110. The sealing member 150 is an elongated member such that the length of the seal member 150 is much greater than the cross-sectional dimension of the seal member 150. The cross-sectional view is in a coronal plane perpendicular to the seal groove 110 and is therefore also perpendicular to the direction of elongation of the sealing member 150. Although the seal groove 110 is depicted as dovetail shaped, in some embodiments the seal groove 110 can take on different cross-sectional shapes such as half dovetail shaped, rectangular, lobed, or other shapes.

[0015] In some embodiments, the sealing member 150 is in sealing contact with at least one of the sidewalls 112 of the seal groove 110. In some embodiments, the sealing member is in sealing contact with a floor 114 of the seal groove 110 instead of or in addition to contacting one or more of the sidewalls 112 of the seal groove 110. A portion of the sealing member 150 protrudes through the opening 116 of the seal groove 110 and can compress the sealing member 150 when the first component 100 abuts against the other component. In some embodiments, such abutment of the seal against the other component forms a seal therebetween.

[0016] The maximum width 152 of the sealing member 150 at the coronal plane is measured parallel to the face 102 of the first component 100. As shown, in some embodiments, the maximum width 152 of the sealing member 150 in the seal groove 110 is greater than the width 118 of the opening 116 of the seal groove 110. In some embodiments, the maximum width 152 of the sealing member 150 in the seal groove 110 is less than the width 118 of the opening 116 of the seal groove 110. In some embodiments, the maximum width 152 of the sealing member 150 in the seal groove 110 is equal to the width 118 of the opening 116 of the seal groove 110.

[0017] In some embodiments, the sealing member 150 is formed as a closed annular member. In some embodiments, the sealing member 150 is not formed as a closed annular member. In some embodiments, the sealing member 150 is formed as a single piece. In some embodiments, the single piece is made of a metal, such as stainless steel. In some embodiments, the single piece is made of a resilient material, such as an elastomer. In some embodiments, the single piece is made of a plasma resistant material, such as a plasma resistant elastomer. Some non-limiting examples of resilient plasma resistant materials include fluororubber perfluoroelastomers and unfilled perfluoroelastomers, among others.

[0018] FIG. 2A is a schematic cross-sectional view in a coronal plane of the first component 100 attached to the second component 120. FIG. 2A shows a portion of the assembled first and second components 100, 120. The second component 120 includes a ridge 122 that extends toward the seal groove 110. The ridge 122 is aligned with the seal groove 110. An end 126 of the ridge 122 is in sealing contact with a portion of the sealing member 150 that protrudes through the opening 116 of the seal groove 110. As shown, in some embodiments, the width 128 of the end 126 of the ridge 122 is smaller than the width 118 of the opening 116 of the seal groove 110. In some embodiments, the width 128 of the end 126 of the ridge 122 is larger than the width 118 of the opening 116 of the seal groove 110. In some embodiments, the width 128 of the end 126 of the ridge 122 is equal to the width 118 of the opening 116 of the seal groove 110. The sealing contact between the sealing member 150 and the end 126 of the ridge 122 and between the sealing member 150 and the seal groove 110 prevents fluid communication between a first zone 132 on a first side 123 of the ridge 122 and a second zone 134 on an opposite second side 124 of the ridge 122.

[0019] FIG. 2B shows a schematic of a portion of the assembled first and second components 100, 120 of FIG. 2A, but with the ridge 122 of the second component 120 misaligned with the seal groove 110. The ridge 122 is displaced from the position shown in FIG. 2A (represented as a shading line 125). In some examples, the ridge 122 may be displaced due to manufacturing tolerances. In some examples, the ridge 122 may be displaced due to warping. In the example shown in FIG. 2B, the illustrated portion of the ridge 122 is displaced laterally toward the first zone 132 and vertically away from the face 102 of the first component 100, as compared to the position 125 of the ridge 122 in FIG. 2A.

[0020] In some embodiments, the sealing member 150 makes sealing contact with the end 126 of the ridge 122 even though the ridge 122 is displaced such that at least a portion of the ridge 122 is out of alignment with the seal groove 110. However, in some embodiments, such sealing contact is less effective than the sealing contact provided by the juxtaposition of the ridge 122 and the seal groove 110 shown in FIG. 2A. Such ineffective sealing contact may result from limited load applied to the sealing member 150 by the end 126 of the ridge 122 because the ridge 122 is vertically displaced from the position 125 depicted in FIG. 2A. Additionally or alternatively, such ineffective sealing contact may result from limited contact area between the sealing member 150 and the end 126 of the ridge 122 because the ridge 122 is horizontally displaced from the position 125 depicted in FIG. 2A.

[0021] In some embodiments, when the ridge 122 is displaced such that at least a portion of the ridge 122 is misaligned with the seal groove 110, the sealing member 150 does not make sealing contact with the end 126 of the ridge 122. In the example shown in FIG. 2B, when the first zone 132 is at a higher pressure than the second zone 134, a leak (indicated by arrow 140) may occur between the first zone 132 and the second zone 134. A leak may adversely affect system performance, potentially exacerbated by such a leak causing localized erosion of the ridge 122, such as at the end 126 of the ridge 122.

[0022] In some embodiments, ineffective sealing contact may result from corrosion and / or erosion at the opening 116 and / or sidewall 112 of the seal groove 110 limiting the load applied by the end 126 of the ridge 122 to the sealing member 150. For example, such corrosion and / or erosion may cause the seal groove 110 to expand beyond the original dimensions of the seal groove 110, creating additional space that may displace the sealing member 150.

[0023] 3A-3D are schematic diagrams illustrating exemplary cross-sectional shapes of sealing members 150A-150D, respectively, that may be used as sealing member 150. FIGS. 3A-3D are cross-sectional views in the coronal plane discussed above. The cross-sectional shape of each sealing member 150A-150D is configured to mitigate the above-mentioned adverse effects of the scenario illustrated in FIG. 2B. Each sealing member 150A-150D includes aspects and attributes of sealing member 150 discussed above.

[0024] 3A illustrates a sealing member 150A. The sealing member 150A includes a body 154A with a first portion 160A adjacent to a second portion 180A. In some embodiments, the sealing member 150A is symmetrical about a central axis 155A passing through the first portion 160A and the second portion 180A. The first portion 160A includes a curved convex surface 162A. As illustrated, in some embodiments, the convex surface 162A of the first portion 160A forms a portion of a circle having a radius 163A.

[0025] The second portion 180A includes a lobe 190A. As shown, the second portion 180A includes two lobes 190A. Each lobe 190A includes a curved convex surface 192A. In some embodiments, each lobe 190A is elliptical and has a major axis 197A and a minor axis 198A perpendicular to the major axis 197A. In some such embodiments, each lobe 190A extends away from the first portion 160A along the major axis 197A. As shown, in some embodiments, each lobe 190A forms a portion of a circle. As shown, the radius 193 of each lobe 190A is smaller than the radius 163A of the first portion 160A. In some embodiments, the radius 193 of each lobe 190A is larger than the radius 163A of the first portion 160A. In some embodiments, the radius 193 of each lobe 190A is equal to the radius 163A of the first portion 160A.

[0026] Each lobe 190A includes a tip 194A. As shown, each tip 194A is rounded. In some embodiments, each tip 194A defines an acute angle (when viewed in a coronal plane). In some embodiments, each tip 194A is flat (when viewed in a coronal plane). As shown, a radius 195A of the tip 194A is equal to a radius 193 of the lobe 190A. As shown, the radius 195A of the tip 194A is smaller than a radius 163A of the first portion 160A. In some embodiments, the radius 195A of the tip 194A is larger than a radius 163A of the first portion 160A. In some embodiments, the radius 195A of the tip 194A is equal to a radius 163A of the first portion 160A.

[0027] The maximum width 164A of the first portion 160A in the coronal plane is measured perpendicular to the central axis 155A. As shown, the thickness 196A of each lobe 190A measured along the minor axis 198A is less than the maximum width 164A of the first portion 160A. In some embodiments, the thickness 196A of each lobe 190A is greater than the maximum width 164A of the first portion 160A. In some embodiments, the thickness 196A of each lobe 190A is equal to the maximum width 164A of the first portion 160A.

[0028] The maximum width 184A of the second portion 180A in the coronal plane is measured perpendicular to the central axis 155A. As shown, the maximum width 184A of the second portion 180A is greater than the maximum width 164A of the first portion 160A. In some embodiments, the maximum width 184A of the second portion 180A is less than the maximum width 164A of the first portion 160A. In some embodiments, the maximum width 184A of the second portion 180A is equal to the maximum width 164A of the first portion 160A.

[0029] Each lobe 190A is adjacent to first portion 160A at a concave surface 176A. As shown, radius 177A of concave surface 176A is less than radius 195A of tip 194A. In some embodiments, radius 177A of concave surface 176A is greater than radius 195A of tip 194A. In some embodiments, radius 177A of concave surface 176A is equal to radius 195A of tip 194A.

[0030] As shown, the concave surface 182A of the second portion 180A extends between and is adjacent to the lobes 190A. In some embodiments, the concave surface 182A may be replaced by a flat surface. In some embodiments, the concave surface 182A may be replaced by a curved convex surface. As shown, the radius 183A of the concave surface 182A is greater than the radius 163A of the first portion 160A. In some embodiments, the radius 183A of the concave surface 182A is less than the radius 163A of the first portion 160A. In some embodiments, the radius 183A of the concave surface 182A is equal to the radius 163A of the first portion 160A.

[0031] The maximum height 165A of the first portion 160A to the concave surface 176A and the maximum height 185A of the second portion 180A from the concave surface 176A are measured in a coronal plane parallel to the central axis 155A. As shown, the maximum height 165A of the first portion 160A is greater than the maximum height 185A of the second portion 180A. In some embodiments, the maximum height 165A of the first portion 160A is less than the maximum height 185A of the second portion 180A. In some embodiments, the maximum height 165A of the first portion 160A is equal to the maximum height 185A of the second portion 180A.

[0032] 3B illustrates a sealing member 150B. The sealing member 150B includes a body 154B with a first portion 160B adjacent to a second portion 180B. In some embodiments, the sealing member 150B is symmetrical about a central axis 155B passing through the first portion 160B and the second portion 180B. The first portion 160B includes a curved convex surface 162B. As illustrated, in some embodiments, the convex surface 162B of the first portion 160B forms a portion of a circle having a radius 163B.

[0033] The second portion 180B includes a lobe 190B. As shown, the second portion 180B includes two lobes 190B. Each lobe 190B includes a curved convex surface 192B. In some embodiments, each lobe 190B forms a portion of a circle. As shown, in some embodiments, each lobe 190B is elliptical and has a major axis 197B and a minor axis 198B perpendicular to the major axis 197B. Each lobe 190B extends away from the first portion 160B along the major axis 197B.

[0034] Each lobe 190B includes a tip 194B. As shown, each tip 194B is rounded. In some embodiments, each tip 194B defines an acute angle (when viewed in a coronal plane). In some embodiments, each tip 194B is flat (when viewed in a coronal plane). As shown, a radius 195B of tip 194B is smaller than a radius 163B of first portion 160B. In some embodiments, a radius 195B of tip 194B is larger than a radius 163B of first portion 160B. In some embodiments, a radius 195B of tip 194B is equal to a radius 163B of first portion 160B.

[0035] The maximum width 164B of the first portion 160B in the coronal plane is measured perpendicular to the central axis 155B. As shown, the thickness 196B of each lobe 190B measured along the minor axis 198B is less than the maximum width 164B of the first portion 160B. In some embodiments, the thickness 196B of each lobe 190B is greater than the maximum width 164B of the first portion 160B. In some embodiments, the thickness 196B of each lobe 190B is equal to the maximum width 164B of the first portion 160B.

[0036] The maximum width 184B of the second portion 180B in the coronal plane is measured perpendicular to the central axis 155B. As shown, the maximum width 184B of the second portion 180B is greater than the maximum width 164B of the first portion 160B. In some embodiments, the maximum width 184B of the second portion 180B is less than the maximum width 164B of the first portion 160B. In some embodiments, the maximum width 184B of the second portion 180B is equal to the maximum width 164B of the first portion 160B.

[0037] Each lobe 190B is adjacent to first portion 160B at a concave surface 176B. As shown, radius 177B of concave surface 176B is equal to radius 195B of tip 194B. In some embodiments, radius 177B of concave surface 176B is greater than radius 195B of tip 194B. In some embodiments, radius 177B of concave surface 176B is less than radius 195B of tip 194B.

[0038] As shown, the curved convex surface 182B of the second portion 180B extends between and adjacent to the lobes 190B. Additionally, the convex surface 182B of the second portion 180B extends between and adjacent to the tips 194B of the lobes 190B. In some embodiments, the convex surface 182B may be replaced by a flat surface. In some embodiments, the convex surface 182B may be replaced by a concave surface, such as the concave surface 182A. As shown, the radius 183B of the convex surface 182B is greater than the radius 163B of the first portion 160B. In some embodiments, the radius 183B of the convex surface 182B is less than the radius 163B of the first portion 160B. In some embodiments, the radius 183B of the convex surface 182B is equal to the radius 163B of the first portion 160B.

[0039] The maximum height 165B of the first portion 160B to the concave surface 176B and the maximum height 185B of the second portion 180B from the concave surface 176B are measured in a coronal plane parallel to the central axis 155B. As shown, the maximum height 165B of the first portion 160B is greater than the maximum height 185B of the second portion 180B. In some embodiments, the maximum height 165B of the first portion 160B is less than the maximum height 185B of the second portion 180B. In some embodiments, the maximum height 165B of the first portion 160B is equal to the maximum height 185B of the second portion 180B.

[0040] 3C illustrates a sealing member 150C. The sealing member 150C includes a body 154C with a first portion 160C adjacent to a second portion 180C. In some embodiments, the sealing member 150C is symmetrical about a central axis 155C passing through the first portion 160C and the second portion 180C. The first portion 160C includes a curved convex surface 162C. As illustrated, in some embodiments, the convex surface 162C of the first portion 160C forms a portion of a circle having a radius 163C.

[0041] The second portion 180C includes a lobe 190C. As shown, the second portion 180C includes two lobes 190C. Each lobe 190C includes a curved convex surface 192C. In some embodiments, each lobe 190C forms a portion of a circle. As shown, in some embodiments, each lobe 190C is elliptical and has a major axis 197C and a minor axis 198C perpendicular to the major axis 197C. Each lobe 190C extends away from the first portion 160C along the major axis 197C.

[0042] Each lobe 190C includes a tip 194C. As shown, each tip 194C is rounded. In some embodiments, each tip 194C defines an acute angle (when viewed in a coronal plane). In some embodiments, each tip 194C is flat (when viewed in a coronal plane). As shown, a radius 195C of the tip 194C is smaller than a radius 163C of the first portion 160C. In some embodiments, the radius 195C of the tip 194C is larger than a radius 163C of the first portion 160C. In some embodiments, the radius 195C of the tip 194C is equal to a radius 163C of the first portion 160C.

[0043] The maximum width 164C of the first portion 160C in the coronal plane is measured perpendicular to the central axis 155C. As shown, the thickness 196C of each lobe 190C measured along the minor axis 198C is less than the maximum width 164C of the first portion 160C. In some embodiments, the thickness 196C of each lobe 190C is greater than the maximum width 164C of the first portion 160C. In some embodiments, the thickness 196C of each lobe 190C is equal to the maximum width 164C of the first portion 160C.

[0044] The maximum width 184C of the second portion 180C in the coronal plane is measured perpendicular to the central axis 155C. As shown, the maximum width 184C of the second portion 180C is greater than the maximum width 164C of the first portion 160C. In some embodiments, the maximum width 184C of the second portion 180C is less than the maximum width 164C of the first portion 160C. In some embodiments, the maximum width 184C of the second portion 180C is equal to the maximum width 164C of the first portion 160C.

[0045] Each lobe 190C is adjacent to first portion 160C at a concave surface 176C. As shown, radius 177C of concave surface 176C is less than radius 195C of tip 194C. In some embodiments, radius 177C of concave surface 176C is greater than radius 195C of tip 194C. In some embodiments, radius 177C of concave surface 176C is equal to radius 195C of tip 194C.

[0046] As shown, the curved convex surface 182C of the second portion 180C extends between and is adjacent to the lobes 190C. In some embodiments, the convex surface 182C may be replaced by a flat surface. In some embodiments, the convex surface 182C may be replaced by a concave surface, such as the concave surface 182A. As shown, the radius 183C of the convex surface 182C is equal to the radius 163C of the first portion 160C. In some embodiments, the radius 183C of the convex surface 182C is smaller than the radius 163C of the first portion 160C. In some embodiments, the radius 183C of the convex surface 182C is larger than the radius 163C of the first portion 160C.

[0047] The maximum height 165C of the first portion 160C to the concave surface 176C and the maximum height 185C of the second portion 180C from the concave surface 176C are measured in a coronal plane parallel to the central axis 155C. As shown, the maximum height 165C of the first portion 160C is greater than the maximum height 185C of the second portion 180C. In some embodiments, the maximum height 165C of the first portion 160C is less than the maximum height 185C of the second portion 180C. In some embodiments, the maximum height 165C of the first portion 160C is equal to the maximum height 185C of the second portion 180C.

[0048] 3D illustrates a sealing member 150D. The sealing member 150D includes a body 154D having a first portion 160D adjacent to a second portion 180D. In some embodiments, the sealing member 150D is symmetrical about a central axis 155D that passes through the first portion 160D and the second portion 180D.

[0049] First portion 160D includes a node 166. As shown, first portion 160D includes two nodes 166. Each node 166 includes a curved convex surface 167. In some embodiments, each node 166 forms a portion of a circle. As shown, in some embodiments, each node 166 is elliptical and has a major axis 172 and a minor axis 173 perpendicular to the major axis 172. Each node 166 extends away from second portion 180D along major axis 172. In some embodiments, each node 166 may not be elliptical in shape. Each node 166 includes a tip 168. As shown, each tip 168 is rounded. In some embodiments, each tip 168 defines an acute angle (when viewed in a coronal plane). In some embodiments, each tip 168 is flat (when viewed in a coronal plane).

[0050] As shown, the curved convex surface 162D of the first portion 160D extends between and adjacent to the nodes 166. As shown, in some embodiments, the convex surface 162D forms a portion of a circle having a radius 163D. In some embodiments, the convex surface 162D may be replaced by a flat surface. In some embodiments, the convex surface 162D may be replaced by a concave surface.

[0051] The second portion 180D includes a lobe 190D. As shown, the second portion 180D includes two lobes 190D. Each lobe 190D includes a curved convex surface 192D. In some embodiments, each lobe 190D forms a portion of a circle. As shown, in some embodiments, each lobe 190D is elliptical and has a major axis 197D and a minor axis 198D perpendicular to the major axis 197D. Each lobe 190D extends away from the first portion 160D along the major axis 197D.

[0052] Each lobe 190D includes a tip 194D. As shown, each tip 194D is rounded. In some embodiments, each tip 194D defines an acute angle (when viewed in a coronal plane). In some embodiments, each tip 194D is flat (when viewed in a coronal plane). As shown, in each lobe 190D, a radius 195D of the tip 194D is smaller than a radius 169 of the tip 168 of each node 166. In some embodiments, the radius 195D of the tip 194D is larger than a radius 169 of the tip 168 of each node 166. In some embodiments, the radius 195D of the tip 194D is equal to the radius 169 of the tip 168 of each node 166.

[0053] The maximum width 164D of the first portion 160D in the coronal plane is measured perpendicular to the central axis 155D. As shown, the thickness 196D of each lobe 190D measured along the minor axis 198D is less than the maximum width 164D of the first portion 160D. In some embodiments, the thickness 196D of each lobe 190D is greater than the maximum width 164D of the first portion 160D. In some embodiments, the thickness 196D of each lobe 190D is equal to the maximum width 164D of the first portion 160D.

[0054] As shown, the thickness 196D of each lobe 190D is less than the thickness 170 of each node 166 measured along the minor axis 173. In some embodiments, the thickness 196D of each lobe 190D is greater than the thickness 170 of each node 166. In some embodiments, the thickness 196D of each lobe 190D is equal to the thickness 170 of each node 166.

[0055] The maximum width 184D of the second portion 180D in the coronal plane is measured perpendicular to the central axis 155D. As shown, the maximum width 184D of the second portion 180D is greater than the maximum width 164D of the first portion 160D. In some embodiments, the maximum width 184D of the second portion 180D is less than the maximum width 164D of the first portion 160D. In some embodiments, the maximum width 184D of the second portion 180D is equal to the maximum width 164D of the first portion 160D.

[0056] Each lobe 190D is adjacent to first portion 160D at a concave surface 176D. As shown, radius 177D of concave surface 176D is less than radius 195D of tip 194D. In some embodiments, radius 177D of concave surface 176D is greater than radius 195D of tip 194D. In some embodiments, radius 177D of concave surface 176D is equal to radius 195D of tip 194D.

[0057] As shown, the curved convex surface 182D of the second portion 180D extends between and is adjacent to the lobes 190D. As shown, in some embodiments, the convex surface 182D forms a portion of a circle having a radius 183D. As shown, in some embodiments, the radius 183D of the convex surface 182D is equal to the radius 163D of the convex surface 162D. In some embodiments, the radius 183D of the convex surface 182D is greater than the radius 163D of the convex surface 162D. In some embodiments, the radius 183D of the convex surface 182D is less than the radius 163D of the convex surface 162D. In some embodiments, the convex surface 182D may be replaced by a flat surface. In some embodiments, the convex surface 182D may be replaced by a concave surface, such as the concave surface 182A.

[0058] The maximum height 165D of the first portion 160D to the concave surface 176D and the maximum height 185D of the second portion 180D from the concave surface 176D are measured in a coronal plane parallel to the central axis 155D. As shown, the maximum height 165D of the first portion 160D is greater than the maximum height 185D of the second portion 180D. In some embodiments, the maximum height 165D of the first portion 160D is less than the maximum height 185D of the second portion 180D. In some embodiments, the maximum height 165D of the first portion 160D is equal to the maximum height 185D of the second portion 180D.

[0059] Figures 4A-4D show schematic views of sealing members 150A-150D, respectively, installed in an assembly in which a first component 100 is attached to a second component 120. These figures show, in a coronal plane, a portion of the assembled first and second components 100, 120 as shown in Figure 2A.

[0060] In FIG. 4A, the sealing member 150 is represented by sealing member 150A. A first portion 160A of the sealing member 150A is disposed within the seal groove 110 and is in sealing contact with the sidewall 112 and floor 114 of the seal groove 110. A second portion 180A of the sealing member 150A protrudes from the opening 116 of the seal groove 110. A lobe 190A protrudes between the second component 120 and the face 102 of the first component 100. In some embodiments, the lobe 190A is in sealing contact with the face 102 of the first component 100. In one example, each lobe 190A provides a lip seal against the face 102 of the first component 100.

[0061] In some embodiments, each lobe 190A and each concave surface 176A adjacent to the first portion 160A is in sealing contact with a corresponding edge 104 of the face 102 of the first component 100 at the opening 116 of the seal groove 110. In some embodiments, each edge 104 is rounded. As shown, in some such embodiments, the radius 106 of each edge 104 is equal to the radius 177A of the corresponding concave surface 176A. In some embodiments, the radius 106 of each edge 104 is greater than the radius 177A of the corresponding concave surface 176A. In some embodiments, the radius 106 of each edge 104 is less than the radius 177A of the corresponding concave surface 176A.

[0062] The ridge 122 is shown aligned with the seal groove 110. The end 126 of the ridge 122 is in sealing contact with the second portion 180A of the sealing member 150A. As shown, in some embodiments, the end 126 of the ridge 122 is in sealing contact with the surface 182A between the lobes 190A. In some embodiments, the end 126 of the ridge 122 is not in sealing contact with the surface 182A between the lobes 190A. As shown, in some embodiments, the end 126 of the ridge 122 is in sealing contact with both lobes 190A. In one example, each lobe 190A provides a lip seal against the end 126 of the ridge 122. In some embodiments, the end 126 of the ridge 122 is in sealing contact with only one lobe 190A. In some embodiments, end 126 of ridge 122 does not make sealing contact with either lobe 190A.

[0063] In FIG. 4B, the sealing member 150 is represented by sealing member 150B. A first portion 160B of the sealing member 150B is disposed within the seal groove 110 and is in sealing contact with the sidewall 112 and floor 114 of the seal groove 110. A second portion 180B of the sealing member 150B protrudes from the opening 116 of the seal groove 110. A lobe 190B protrudes between the second component 120 and the face 102 of the first component 100. In some embodiments, the lobe 190B is in sealing contact with the face 102 of the first component 100. In one example, each lobe 190B provides a lip seal against the face 102 of the first component 100.

[0064] In some embodiments, each lobe 190B and each concave surface 176B adjacent to the first portion 160B make sealing contact with a corresponding edge 104 of the face 102 of the first component 100 at the opening 116 of the seal groove 110. As described above, in some embodiments, each edge 104 is rounded. As illustrated, in some such embodiments, the radius 106 of each edge 104 is equal to the radius 177B of the corresponding concave surface 176B. In some embodiments, the radius 106 of each edge 104 is greater than the radius 177B of the corresponding concave surface 176B. In some embodiments, the radius 106 of each edge 104 is less than the radius 177B of the corresponding concave surface 176B.

[0065] The ridge 122 is shown aligned with the seal groove 110. The end 126 of the ridge 122 is in sealing contact with the second portion 180B of the sealing member 150B. As shown, in some embodiments, the end 126 of the ridge 122 is in sealing contact with the surface 182B between the lobes 190B. In some embodiments, the end 126 of the ridge 122 is not in sealing contact with the surface 182B between the lobes 190B. As shown, in some embodiments, the end 126 of the ridge 122 is in sealing contact with both lobes 190B. In one example, each lobe 190B provides a lip seal against the end 126 of the ridge 122. In some embodiments, the end 126 of the ridge 122 is in sealing contact with only one lobe 190B. In some embodiments, end 126 of ridge 122 does not make sealing contact with either lobe 190B.

[0066] In FIG. 4C, the sealing member 150 is represented by sealing member 150C. A first portion 160C of the sealing member 150C is disposed within the seal groove 110 and is in sealing contact with the sidewall 112 and floor 114 of the seal groove 110. A second portion 180C of the sealing member 150C protrudes from the opening 116 of the seal groove 110. A lobe 190C protrudes between the second component 120 and the face 102 of the first component 100. In some embodiments, the lobe 190C is in sealing contact with the face 102 of the first component 100. In one example, each lobe 190C provides a lip seal against the face 102 of the first component 100.

[0067] In some embodiments, each lobe 190C and each concave surface 176C adjacent to the first portion 160C is in sealing contact with a corresponding edge 104 of the face 102 of the first component 100 at the opening 116 of the seal groove 110. As described above, in some embodiments, each edge 104 is rounded. In some such embodiments, the radius 106 of each edge 104 is equal to the radius 177C of the corresponding concave surface 176C. In some embodiments, the radius 106 of each edge 104 is greater than the radius 177C of the corresponding concave surface 176C. In some embodiments, the radius 106 of each edge 104 is less than the radius 177C of the corresponding concave surface 176C.

[0068] The ridge 122 is shown aligned with the seal groove 110. The end 126 of the ridge 122 is in sealing contact with the second portion 180C of the sealing member 150C. As shown, in some embodiments, the end 126 of the ridge 122 is in sealing contact with the surface 182C between the lobes 190C. In some embodiments, the end 126 of the ridge 122 is not in sealing contact with the surface 182C between the lobes 190C. As shown, in some embodiments, the end 126 of the ridge 122 is in sealing contact with both lobes 190C. In one example, each lobe 190C provides a lip seal against the end 126 of the ridge 122. In some embodiments, the end 126 of the ridge 122 is in sealing contact with only one lobe 190C. In some embodiments, end 126 of ridge 122 does not make sealing contact with either lobe 190C.

[0069] In FIG. 4D, the sealing member 150 is represented by sealing member 150D and the seal groove 110 is represented by seal groove 110'. The seal groove 110' is of the same configuration as the seal groove 110, except that the floor 114 includes a raised ridge 113 between two recesses 115. It is contemplated that the raised ridge 113 and the recesses 115 extend along the length of the seal groove 110'. A first portion 160D of the sealing member 150D is disposed within the seal groove 110' and makes sealing contact with the sidewall 112 and floor 114 of the seal groove 110'. Each node 166 of the first portion 160D is located within a corresponding recess 115. As shown, in some embodiments, each node 166 makes sealing contact with a corresponding sidewall 112 of the seal groove 110'.

[0070] A second portion 180D of the sealing member 150D protrudes from the opening 116 of the seal groove 110'. A lobe 190D protrudes between the second component 120 and the face 102 of the first component 100. In some embodiments, the lobe 190D is in sealing contact with the face 102 of the first component 100. In one example, each lobe 190D provides a lip seal against the face 102 of the first component 100.

[0071] In some embodiments, each lobe 190D and each concave surface 176D adjacent to the first portion 160D is in sealing contact with a corresponding edge 104 of the face 102 of the first component 100 at the opening 116 of the seal groove 110'. As described above, in some embodiments, each edge 104 is rounded. In some such embodiments, the radius 106 of each edge 104 is equal to the radius 177D of the corresponding concave surface 176D. In some embodiments, the radius 106 of each edge 104 is greater than the radius 177D of the corresponding concave surface 176D. In some embodiments, the radius 106 of each edge 104 is less than the radius 177D of the corresponding concave surface 176D.

[0072] The ridge 122 is shown aligned with the seal groove 110. The end 126 of the ridge 122 is in sealing contact with the second portion 180D of the sealing member 150D. As shown, in some embodiments, the end 126 of the ridge 122 is in sealing contact with the surface 182D between the lobes 190D. In some embodiments, the end 126 of the ridge 122 is not in sealing contact with the surface 182D between the lobes 190D. As shown, in some embodiments, the end 126 of the ridge 122 is in sealing contact with both lobes 190D. In one example, each lobe 190D provides a lip seal against the end 126 of the ridge 122. In some embodiments, the end 126 of the ridge 122 is in sealing contact with only one lobe 190D. In some embodiments, end 126 of ridge 122 does not make sealing contact with either lobe 190D.

[0073] It is contemplated that the configuration of each sealing member 150A-150D facilitates the establishment of sealing contact between the ridge 122 and the respective sealing member 150A-150D, and between the respective sealing member 150A-150D and the first component 100. It is contemplated that sealing contact between the ridge 122 and the respective sealing member 150A-150D, and between the respective sealing member 150A-150D and the first component 100 may be established even when the ridge 122 is in a displaced position, as shown in FIG. 2B. It is contemplated that sealing contact between the ridge 122 and the respective sealing member 150A-150D, and between the respective sealing member 150A-150D and the first component 100 may be established even when the seal groove 110, 110′ in the first component 100 has been enlarged due to corrosion and / or erosion.

[0074] It is contemplated that elements and features of any one disclosed embodiment may be beneficially incorporated in one or more other embodiments. While the above is directed to embodiments of the present disclosure, other and further embodiments of the disclosure may be devised without departing from the basic scope thereof, the scope of which is determined by the following claims.

Claims

1. an elongated unitary body including a first portion adjacent to a second portion; When viewed in the coronal plane perpendicular to the direction of elongation, the first portion forms a portion of a circle; The second portion is a first lobe including a first rounded tip and adjacent the first portion with a first concave surface; a second lobe including a second rounded tip and adjacent the first portion with a second concave surface; a convex surface extending from the first rounded tip to the second rounded tip; A sealing member comprising:

2. The sealing member of claim 1 , wherein the first and second portions are symmetrical in the coronal plane about a central axis passing through the first and second portions.

3. The sealing member of claim 1 , wherein the radius of the first portion is smaller than the radius of the convex surface.

4. 4. The sealing member of claim 3, wherein a width of said second portion from said first rounded tip to said second rounded tip is greater than a maximum width of said first portion when viewed in said coronal plane.

5. The sealing member of claim 1 , wherein the single piece is made of a resilient plasma resistant material.

6. an elongated unitary body including a first portion adjacent to a second portion; When viewed in the coronal plane perpendicular to the direction of elongation, the first portion includes first and second elliptical nodes; each node includes a first major axis and a first minor axis and extends along the first major axis away from the second portion; the second portion includes first and second elliptical lobes; each lobe includes a second major axis and a second minor axis and extends away from the first portion along the second major axis; a thickness of each node measured along the first minor axis is greater than a thickness of each lobe measured along the second minor axis; Sealing material.

7. The sealing member of claim 6 , wherein the first and second portions are symmetrical in the coronal plane about a central axis passing through the first and second portions.

8. 8. The sealing member of claim 7, wherein a maximum width of the second portion measured perpendicular to the central axis is greater than a maximum width of the first portion measured perpendicular to the central axis.

9. The sealing member of claim 6 , wherein the second portion further comprises a convex surface extending between the first node and the second node.

10. a first component including a surface having a seal groove therein; a sealing member in the seal groove; a second component attached to the first component and including a ridge; and Equipped with the seal groove includes an opening having a first width; the ridge includes an end having a second width less than the first width; The sealing member is An integral molding that is elongated in a direction along the seal groove, a first portion located within the seal groove; a second portion protruding from an opening of the seal groove and contacting the end of the ridge adjacent the seal groove; Including, the second portion includes first and second lobes, each lobe contacting the face of the first component at the opening of the seal groove; An assembly comprising a single piece molded body.

11. The assembly of claim 10 , wherein the first and second portions are symmetrical in the coronal plane about a central axis passing through the first and second portions.

12. The assembly of claim 10 , wherein each lobe contacts the end of the ridge of the second component.

13. The assembly of claim 10 , wherein said ends of said ridges contact concave surfaces of said second portion adjacent said first lobe and said second lobe.

14. The assembly of claim 10 , wherein said ends of said ridges contact convex surfaces of said second portion adjacent said first and second lobes.

15. The assembly of claim 14 , wherein the convex surface extends from a rounded tip of the first lobe to a rounded tip of the second lobe.

16. The assembly of claim 15 , wherein the radius of the first portion is less than the radius of the convex surface.

17. 11. The assembly of claim 10, wherein the seal groove further includes a base extending between a first sidewall and a second sidewall, the base including a first recess and a second recess separated by a raised ridge, the first and second recesses extending along the seal groove.

18. 18. The assembly of claim 17, wherein the first portion of the seal member body further includes first and second nodes, the first node extending into the first recess and the second node extending into the second recess.

19. 20. The assembly of claim 18, wherein the first node seals against the first sidewall and the second node seals against the second sidewall.

20. 20. The assembly of claim 18, wherein when viewed in a coronal plane perpendicular to the direction along the seal groove, a thickness of the first node and a thickness of the second node are greater than a thickness of the first lobe and a thickness of the second lobe.

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