Plasma generation module of the high-density direct-down type

Abstract

The present invention discloses a plasma generation module including: a plurality of needle-shaped discharge electrodes arranged in a plurality of cells arranged in the XY plane, with the tips thereof arranged in the Z-axis direction at the centers of the respective cells; a ground electrode formed in one-to-one correspondence with the tips around the cells in the XY plane at the same height as the tips; a guide block having a groove formed therein on the upper part, on which the ground electrode is placed and into which the plurality of needle-shaped discharge electrodes are inserted; and a first terminal electrically connected to the plurality of needle-shaped discharge electrodes and a second terminal electrically connected to the ground electrode. According to the present invention, plasma can be uniformly generated over a large area by using the discharge electrodes and the ground electrodes included in the plurality of cells.

Description

Technical Field

[0001] The present invention relates to a plasma generation module of a direct - under - high - density type, and more particularly, to a large - area plasma generation module.

Background Art

[0002] A plasma generation device is a device that applies a high voltage of several kV to several thousand kV to a positive electrode and a negative electrode to cause partial discharge. A plasma generation device is generally used by being mounted on an electronic device such as an air purifier or an air conditioner. For example, an air purifier blows air together with positive (+) ions and negative (-) ions generated from a plasma generation device provided inside to clean the indoor space, and an air conditioner provided with a plasma generation device blows cold air into the indoor space, and at the same time blows positive ions and negative ions together to clean the indoor space while cooling.

[0003] When a piezoelectric transformer amplifies and outputs a voltage and the output high voltage is applied in a needle shape, plasma is generated in the space around the needle. According to the prior art, in order to sterilize a large space using a plasma generation module configured in a pair of needles, a large number of plasma modules are required. By mounting a large number of plasma modules while maintaining the sterilization power, there is a problem that the amount of ozone generation increases in proportion to the number of plasma modules.

[0004] Also, according to the prior art, the needle - shaped part of the small plasma module attached to the air flow path is smaller than the total area of the air flow volume, that is, the active volume is small, and only a part of the air is sterilized, resulting in a problem of reduced sterilization efficiency.

[0005] As a technology related to the present invention, a plasma generator disclosed in the Korean Registered Patent Publication has a lattice-type discharge structure including a first electrode plate and a second electrode plate. This technology relates to a structure in which the second electrode plate surrounds the entire first electrode plate, there is a risk of ozone generation, and the arrangement positions of the tips of the needle-type electrodes and the ground electrode differ from those of the present invention, so the configurations and effects of the two inventions are distinguished from each other.

Summary of the Invention

Problems to be Solved by the Invention

[0006] One problem to be solved by the present invention is to provide a plasma generation module that generates plasma over a large area using a discharge electrode and a ground electrode in a plurality of cell units.

[0007] One problem to be solved by the present invention is to provide a plasma generation module that can reduce the probability of ozone generation with a smooth air flow.

[0008] One problem to be solved by the present invention is to provide a high-density plasma generation module with high process convenience using modularized electrodes.

[0009] One problem to be solved by the present invention is not limited to the problems described above, and other problems not mentioned will be clearly understood by those skilled in the art from the following description.

Means for Solving the Problems

[0010] A plasma generation module according to an embodiment of the present invention for solving the above technical problem includes a plurality of cells arranged in the XY plane, and a plurality of needle-shaped discharge electrodes with peaks arranged in the Z-axis direction at the centers of the respective cells; ground electrodes formed in a one-to-one correspondence with the peaks around the cells in the XY plane at the same height as the peaks; and a guide block having a groove formed on the upper part for placing the ground electrodes and inserting the plurality of needle-shaped discharge electrodes; a first terminal electrically connected to the plurality of needle-shaped discharge electrodes and a second terminal electrically connected to the ground electrodes.

[0011] Further, the plurality of needle-shaped discharge electrodes are arranged such that the peaks face the direction of the air flow.

[0012] Further, the plurality of needle-shaped discharge electrodes further include a plurality of electrode connectors for electrically connecting the needle-shaped discharge electrodes of the row (m) or the column (n) to each other in the arrangement of the cells of the row (m) and the column (n); and a cross connector for connecting the plurality of electrode connectors to each other, and the first terminal can be configured to be electrically connected to the cross connector.

[0013] Further, the electrode connector includes fitting grooves formed at one end and the other end, and the cross connector can be configured to be inserted into any one of the fitting grooves.

[0014] Further, the ground electrode can be configured in the shape of a ground pad of a conductor in which electrode holes forming a plurality of rows (m) and columns (n) are formed in a circular or polygonal shape having a common center with the peak of the needle-shaped discharge electrode.

[0015] Further, the guide block can be configured to be cylindrical with a center common to the tip of the needle-shaped discharge electrode and to include a flow channel arranged corresponding to the cell.

[0016] Also, the diameter of the tunnel of the guide block can be formed such that it is the longest at the bottom surface and gradually becomes shorter as it approaches the ground electrode in the direction of the air flow.

[0017] Further, the plasma generation module further includes a top block that fixes the ground electrode above the guide block. The top block includes a discharge passage connected to the tunnel downstream of the air flow, and the diameter of the discharge passage can be formed to gradually become longer in the direction of the air flow.

[0018] Also, the top block can be formed such that the diameter of the discharge passage at the height of the ground electrode is longer than the diameter of the electrode hole because the region of the hole edge of the ground electrode in contact with the electrode hole is exposed in the line-of-sight direction parallel to the z-axis.

[0019] Further, the plasma generation module further includes a bottom block arranged below the guide block. The bottom block can be formed with an inflow passage connected to the tunnel upstream of the air flow.

[0020] Specific matters of other embodiments are included in the "Specific Content for Implementing the Invention" and the attached "Drawings".

[0021] The advantages and / or features of the present invention, and the methods for achieving them, will become clear by referring to the various embodiments described in detail hereinafter together with the attached drawings.

[0022] However, the present invention is not limited only to the configurations of the embodiments disclosed below, and may be embodied in various different forms. Merely, each of the embodiments disclosed herein is provided to complete the disclosure of the present invention and to fully inform those skilled in the art of the scope of the present invention. It should be understood that the present invention is defined only by the scope of each claim of the claims.

Advantages of the Invention

[0023] According to the present invention, plasma can be uniformly generated over a large area by using a discharge electrode and a ground electrode included in a plurality of cells.

[0024] Also, the probability of ozone generation can be reduced by a smooth air flow.

[0025] Also, the process convenience of the plasma generation module is increased by using modularized electrodes.

Brief Description of the Drawings

[0026]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Modes for Carrying Out the Invention

[0027] Before explaining the present invention in detail, terms and words used in this specification should not be construed unconditionally as having their ordinary or dictionary meanings. The inventors of the present invention can appropriately define and use the concepts of various terms in order to explain their invention in the best way. Furthermore, it must be known that these terms and words should be construed as meanings and concepts that conform to the technical idea of the present invention.

[0028] That is, the terms used in this specification are used to explain the desirable embodiments of the present invention and are not used with the intention of specifically limiting the content of the present invention. It must be known that these terms are defined in consideration of various possibilities of the present invention.

[0029] Also, in this specification, a singular expression can include plural expressions unless the context clearly indicates a different meaning, and similarly, even if it is expressed as plural, it can include a singular meaning.

[0030] Throughout this specification, when a certain component is described as "including" another component, it means that, unless otherwise indicated to the contrary, it does not exclude any other component and can further include any other component.

[0031] Furthermore, when a certain component is described as "existing inside or connected in series with" another component, this component may be directly connected to or in contact with the other component, or may be provided at a certain distance apart. In the case of being provided at a certain distance apart, there can be a third component or means for fixing or connecting the said component to the other component, and it must be known that the description of this third component or means may be omitted.

[0032] If, on the one hand, it is described that a certain component is "directly connected" or "directly coupled" to another component, it must be understood that there is no third component or means.

[0033] Similarly, other expressions for explaining the relationship between components, namely, "between", "immediately between", or "adjacent to", "directly adjacent to", etc. must also be interpreted to have the same meaning.

[0034] Also, in this specification, terms such as "one aspect", "the other aspect", "one side", "the other side", "first", "second", etc., if used, are used to clearly distinguish one component from other components, and it must be known that the meaning of the component is not restrictively used by such terms.

[0035] Also, in this specification, terms related to positions such as "above", "below", "left", "right", etc., if used, must be understood to indicate the relative position in the drawing with respect to the component, and these position-related terms should not be understood to refer to absolute positions unless absolute positions are specified for these positions.

[0036] Also, in this specification, when specifying the reference numerals for each component in each drawing, for the same component, even if it is shown in other drawings, it should have the same reference numeral, that is, the same reference numeral throughout the specification indicates the same component.

[0037] The sizes, positions, connection relationships, etc. of the components constituting the present invention in the attached drawings of this specification may be described with some exaggeration, reduction, or omission in order to fully and clearly convey the idea of the present invention or for convenience of explanation. Therefore, the proportions and scales are not strict.

[0038] In the following description of the present invention, detailed descriptions of configurations that may obscure the gist of the present invention, for example, well-known technologies including prior arts, may be omitted.

[0039] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0040] The plasma generation module 100 according to an embodiment of the present invention corresponds to a module including an electrode where atmospheric pressure plasma that can constitute a plasma generator together with a high voltage generator is generated.

[0041] The longitudinal direction of the plasma generation module 100 is defined as the y-axis direction, the width direction is defined as the x-axis direction, and the height direction is defined as the z-axis direction, respectively.

[0042] FIG. 1 is a perspective view of a plasma generation module according to an embodiment of the present invention.

[0043] FIG. 2 is an exploded perspective view of a plasma generation module according to an embodiment of the present invention.

[0044] Referring to FIG. 1, the plasma generation module 100 can be configured to include a plurality of rows (m) and a plurality of columns (n), for example, 13 rows and 9 columns in FIG. 1, and a plurality of cells arranged to generate a large-area plasma.

[0045] Although the shape of the cross-section of the cell is depicted as a circle in FIG. 1, it is not limited thereto, and it is at least one of a circle, an ellipse, and a polygon for each cell. Referring to FIG. 2, similar to the cell, the holes 151, 121, 132, and 136 formed in the stacked blocks 130, 150, and the ground electrode 120 are also at least one of a circle, an ellipse, and a polygon.

[0046] Referring to FIG. 2, the hole formed in the upper block 150 is referred to as the discharge passage 151, the hole formed in the ground electrode 120 is referred to as the electrode hole 121, the hole formed in the upper guide block 131 is referred to as the tunnel 132, and the hole formed in the bottom block 135 is referred to as the inflow passage 136.

[0047] Referring again to FIGS. 1 and 2, the plasma generation module 100 can be configured to include the needle-shaped discharge electrode 110, the ground electrode 120, the guide block 130, the terminal 140, and the upper block 150. The ground electrode 120, the guide block 130, and the upper block 150 can be coupled by coupling means 150, for example, by screws.

[0048] The needle-shaped discharge electrodes 110 are a plurality of cells arranged in the XY plane, and at the center of each cell, the tip 111a is arranged in the Z-axis direction. The plurality of needle-shaped discharge electrodes 110 are arranged such that the tips face in the direction of the air flow. That is, the needle-shaped discharge electrodes 110 are arranged such that at the center of each cell, the needle-shaped tip faces downstream of the air flow. Such an arrangement corresponds to an arrangement for minimizing the resistance of the air flow. When the air does not circulate smoothly, that is, when air accumulates around the needle-shaped discharge electrodes 110, the probability of ozone generation increases.

[0049] The plurality of needle-shaped discharge electrodes 110 are electrically connected to a high-voltage generator (not shown) through the first terminal 141. The connection method between the plurality of needle-shaped discharge electrodes 110 will be described later.

[0050] The ground electrode 120 can be configured in the shape of a ground pad of a conductor in which electrode holes 121 forming a plurality of rows (m) and columns (n) are formed in a circle or polygon having the same center as the tip of the needle-shaped discharge electrode 110. Referring to FIG. 2 again, the plurality of ground electrodes 120 can be embodied in the shape of a ground pad connected together. When electrode holes 121 are formed in a plate-shaped conductor in combination with rows and columns, the ground electrode 120 is completed. The plurality of electrode holes 121 are at least one of a circular or polygonal shape.

[0051] The ground electrode 120 can be formed corresponding one-to-one with the tip around the cell in the XY plane at the same height as the tip of the needle-shaped discharge electrode 110. The height of the ground electrode 120 will be described later.

[0052] The guide block 130 has a function of fixing the needle-shaped discharge electrode 110 and the ground electrode 120. That is, the ground electrode 120 is placed on the upper part of the guide block 130. Then, a plurality of needle-shaped discharge electrodes 110 are inserted into grooves formed in the guide block 130. The plurality of needle-shaped discharge electrodes 110 are fixed to the grooves formed in the guide block 130 individually or after being braided in groups. The shape of the needle-shaped discharge electrode 110 will be described later.

[0053] Referring to FIG. 2, the guide block 130 can be configured to be cylindrical having the same center as the tip of the needle-shaped discharge electrode 110 and include tunnels 132 arranged corresponding to the cells. The tunnels 132 will be described later.

[0054] The guide block 130 can be composed of one piece or two pieces depending on the direction in which the needle-shaped discharge electrode 110 is inserted. For example, when the needle-shaped discharge electrode 110 is inserted into a groove formed in the upper part of the guide block 130, the guide block 130 can be composed of one piece. At this time, the upper part of the guide block 130 is finished by the upper block 150. If the groove into which the needle-shaped discharge electrode 110 is inserted is formed in the lower part of the guide block 130, a bottom block 135 for finishing the lower part is required.

[0055] That is, the guide block 130 can be configured to include an upper guide block 131 disposed below the ground electrode 120 and a bottom block 135 disposed below the upper guide block 131. The tunnel formed in the bottom block 135 corresponds to an inflow passage 136 through which air flows in upstream of the air flow.

[0056] Referring to FIG. 2, the terminal 140 can be configured to include a first terminal 141 electrically connected to a plurality of needle-shaped discharge electrodes 110 and a second terminal 142 electrically connected to the ground electrode 120. The terminal 140 is preferably formed as a pair as shown in FIG. 2 rather than being individually formed on a plurality of electrodes. Therefore, there is a medium that assists the electrical connection between the electrode and the terminal.

[0057] Referring to FIG. 2 again, the plasma generation module 100 can be configured to include an upper block 150 that fixes the ground electrode 120 above the guide block 130. The ground electrode 120 is disposed between the upper block 150 and the upper guide block 131.

[0058] The upper block 150 can be configured to include a discharge passage 151 connected to the tunnel 132 downstream of the air flow. And the diameter of the discharge passage 151 can be formed to gradually increase in the direction of the air flow. The diameter of the discharge passage 151 will be described later.

[0059] FIG. 3 is an exemplary view showing a cross section parallel to the y-axis of the plasma generation module of FIG. 1. Referring to FIG. 3, a longitudinal cross section of the plasma generation module 100 formed by bisecting the needle-shaped discharge electrode 111 is depicted. The plurality of needle-shaped discharge electrodes 110 can be configured to include individual needle-shaped discharge electrodes 111 and electrode connectors 112.

[0060] FIG. 4 is an exemplary view showing a cross section parallel to the x-axis of the plasma generation module of FIG. 1. Referring to FIG. 4, a cross section in the width direction of the plasma generation module 100 formed by bisecting the tip 111a of the needle-shaped discharge electrode 111 is depicted. W 1 or W 3 indicates the air flow.

[0061] Referring to FIGS. 3 and 4, W 1 or W 3 indicates the air flow. When viewed along the Z-axis direction, an upper block 150 is arranged at the upper end, and the ground electrode 120 is arranged to contact the upper block 150. Below the ground electrode 120, an upper guide block 131 and a bottom block 135 are arranged in sequence.

[0062] W 1 depicts the air flow in the inflow passage 136, and W 2 depicts the air flow in the tunnel 132, and then, W 3 depicts the air flow in the discharge passage 151.

[0063] The guide block 130 can be formed such that the diameter of the tunnel 126 is the longest at the bottom surface and gradually shortens as it approaches the ground electrode 120 in the direction of the air flow. According to Bernoulli's principle, the velocity of a fluid is inversely proportional to the cross-sectional area. Therefore, since the diameter of the tunnel 126 gradually narrows along the direction of the air flow, the velocity of the air flow in the tunnel 126 gradually increases, enabling smooth air discharge.

[0064] Referring again to FIGS. 3 and 4, the ground electrode 120 can be formed in the XY plane at the same height as the tip of the needle-shaped discharge electrode 110, corresponding one-to-one with the tip 111a around the cell. That is, the electrode hole 121 formed in the ground electrode 120 can be formed at the same height as the tip 111a of the needle-shaped discharge electrode 110. That is, the tip 111a of the needle-shaped discharge electrode 111 can be formed between the upper and lower surfaces of the pad forming the ground electrode 120. The position and shape of the needle-shaped discharge electrode 111 and the ground electrode 120 are related to plasma variables.

[0065] FIG. 5 is an exemplary view of a plurality of needle-shaped discharge electrodes of the plasma generation module of FIG. 1.

[0066] Referring to FIG. 5, the plurality of needle-shaped discharge electrodes 110 can be configured to further include, in the cell arrangement of rows (m) and columns (n), the needle-shaped discharge electrodes 111 of the rows (m) or columns (n), that is, a plurality of electrode connectors 112 for electrically connecting the respective needle-shaped discharge electrodes 111 to each other and a cross-connector 115 for connecting the plurality of electrode connectors 112 to each other.

[0067] The electrode connector 112 can be configured to include insertion grooves 113 formed at one end and the other end. And the cross-connector 115 can be configured to be inserted into any one of the insertion grooves 113. The insertion grooves 113 can be provided at both ends for assembly convenience in the process.

[0068] The first terminal 141 can be configured to be electrically connected to the cross-connector 115. And the second terminal 142 can be configured to be electrically connected to the ground electrode 120.

[0069] FIG. 6 is an exemplary diagram for explaining a hole edge on a ground electrode of the plasma generation module of FIG. 1. Referring to FIG. 6, in the upper block 150, since the region of the hole edge 122 of the ground electrode 120 in contact with the electrode hole 121 is exposed in the line-of-sight direction parallel to the z-axis, the diameter of the discharge passage 151 at the height of the ground electrode 120 can be formed longer than the diameter of the electrode hole 121. That is, the hole edge 122 of the ground electrode 120 is exposed between the discharge passage 151 of the upper guide block 131 and the upper block 150, that is, between the vertical wall surfaces. Specifically, the wall surface corresponding to the thickness of the horizontal hole edge 122 and the vertical ground electrode 120 is exposed to the air, and this region is related to discharge in relation to the individual needle-shaped discharge electrode 111.

[0070] Thus, according to an embodiment of the present invention, plasma can be uniformly generated over a large area using the discharge electrodes and ground electrodes included in a plurality of cells. In addition, the ozone generation probability can be reduced with a smooth air flow. Further, the process convenience of the plasma generation module is enhanced by using modularized electrodes.

[0071] As described above, the present invention has been described mainly with respect to its preferred embodiments. Those skilled in the art will understand that the present invention can be embodied in a modified form without departing from the essential characteristics of the present invention. Therefore, the disclosed embodiments should be considered from an illustrative rather than a limiting perspective. The scope of the present invention is shown not in the foregoing description but in the scope of claims for utility model registration, and any differences within the equivalent scope thereof should be construed as being included in the present invention.

Industrial Applicability

[0072] The present invention is used in the field of manufacturing plasma generation devices.

Claims

1. A plurality of cell arrays arranged in the XY plane, a plurality of needle-shaped discharge electrodes with tips arranged in the Z-axis direction at the centers of the respective cells, On the XY plane at the same height as the tip, a ground electrode formed in one-to-one correspondence with the tip around the cell, On the upper part, a guide block on which the ground electrode is placed and a groove into which the plurality of needle-shaped discharge electrodes are inserted is formed, A plasma generation module configured to include a first terminal electrically connected to the plurality of needle-shaped discharge electrodes and a second terminal electrically connected to the ground electrode.

2. The plurality of needle-shaped discharge electrodes are Arranged so that the tip faces the direction of the air flow, the plasma generation module according to claim 1.

3. The plurality of needle-shaped discharge electrodes are In the arrangement of the cells in rows (m) and columns (n), a plurality of electrode connectors for electrically connecting the needle-shaped discharge electrodes in the row (m) or the column (n) to each other, Further including a cross-connector for connecting the plurality of electrode connectors to each other, The first terminal is configured to be electrically connected to the cross-connector, the plasma generation module according to claim 1.

4. The electrode connector is Including insertion grooves formed at one end and the other end, The cross-connector is configured to be inserted into any one of the insertion grooves, the plasma generation module according to claim 3.

5. The ground electrode is Configured in the shape of a ground pad of a conductor in which electrode holes forming a plurality of rows (m) and columns (n) are formed in a circular or polygonal shape having a common center with the tip of the needle-shaped discharge electrode, the plasma generation module according to claim 1.

6. The guide block is Cylindrical having a common center with the tip of the needle-shaped discharge electrode, and configured to include a tunnel arranged corresponding to the cell, the plasma generation module according to claim 5.

7. The guide block is The diameter of the tunnel is the longest at the bottom surface and gradually shortens as it approaches the ground electrode depending on the direction of the air flow, the plasma generation module according to claim 6.

8. The plasma generation module Further includes an upper block for fixing the ground electrode above the guide block, The plasma generation module according to claim 6, wherein the upper block includes a discharge passage connected to the tunnel downstream of the air flow, and the diameter of the discharge passage is formed to gradually increase in the direction of the air flow.

9. The upper block is The plasma generation module according to claim 8, wherein the diameter of the discharge passage at the height of the ground electrode is formed to be longer than the diameter of the electrode hole because the region of the hole edge of the ground electrode in contact with the electrode hole is exposed in the line-of-sight direction parallel to the z-axis.

10. The guide block is an upper guide block disposed below the ground electrode, and a bottom block disposed below the upper guide block, and includes The plasma generation module according to claim 6, wherein the tunnel formed in the bottom block corresponds to an inflow passage through which air flows in upstream of the air flow.

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