Thermal optical phase shifter array, interferometer array and optical phased array

Abstract

The present invention provides a thermo-optic phase shifter array including at least one first waveguide and at least one second waveguide, wherein the first waveguide extends along a first direction, the second waveguide extends along a second direction, the first waveguide and the second waveguide are alternately arranged in a third direction, the first waveguide includes a first waveguide segment, the second waveguide includes a second waveguide segment, the first waveguide segment and the second waveguide segment are alternately arranged in the third direction, a heater is integrated in the first waveguide segment, and the thermo-optic coefficient of the second waveguide segment is smaller than that of the first waveguide segment. The thermo-optic phase shifter array according to the present invention has relatively low thermal crosstalk and has a compact structure, which is advantageous for high-density integration. The present invention further provides an interferometer array and an optical phased array.

Description

Technical Field

[0001] The present invention relates to the technical field of phase shifters, and particularly to thermo-optic phase shifter arrays, interferometer arrays, and optical phased arrays.

Background Art

[0002] Multiple waveguides are arranged in an array and used for several applications, which are basic building blocks in photonic integrated circuits. When all or some of the waveguides are integrated with heaters, the structure can be used as a thermo-optic phase shifter array. When one waveguide is heated, the thermal energy diffuses to the adjacent waveguides, and such thermal crosstalk is not desirable. In the prior art, in order to ensure that the thermal crosstalk is at a low level, the method used is to separate the waveguides far enough, which causes the overall structure to occupy a large space on the photonic chip, and is disadvantageous for high-density integration, chip miniaturization, and chip cost reduction. Another method is to increase the side trenches or undercuts around each waveguide for thermal isolation, but this increases the complexity of the manufacturing process and also causes some potential reliability problems.

[0003] Therefore, in order to solve some of the above problems existing in the prior art, it is necessary to provide a new type of thermo-optic phase shifter array, interferometer array, and optical phased array.

Summary of the Invention

Problems to be Solved by the Invention

[0004] An object of the present invention is to provide a thermo-optic phase shifter array, an interferometer array, and an optical phased array having relatively low thermal crosstalk and a compact structure.

Means for Solving the Problems

[0005] To achieve the above object, the thermo-optic phase shifter array of the present invention includes at least one first waveguide and at least one second waveguide. The first waveguide extends along a first direction, the second waveguide extends along a second direction, the first waveguide and the second waveguide are alternately arranged in a third direction. The first waveguide includes a first waveguide segment, the second waveguide includes a second waveguide segment, the first waveguide segment and the second waveguide segment are alternately arranged in the third direction. A heater is integrated in the first waveguide segment, and the thermo-optic coefficient of the second waveguide segment is smaller than that of the first waveguide segment.

[0006] The beneficial effect of the thermo-optic phase shifter array is that the first waveguide segment and the second waveguide segment are alternately arranged in the third direction, a heater is integrated in the first waveguide segment, the thermo-optic coefficient of the second waveguide segment is smaller than that of the first waveguide segment, and the sensitivity of the second waveguide segment to temperature change is relatively low. Therefore, the heat dissipation influence of the second waveguide segment by the first waveguide segment is relatively low, it has relatively low thermal crosstalk, and it is not necessary to separate the waveguides far enough to reduce thermal crosstalk. It has a compact structure, improves density integration, and helps to achieve chip miniaturization and low cost.

[0007] Optionally, the first waveguide further includes a third waveguide segment, the second waveguide further includes a fourth waveguide segment. The first waveguide segment and the third waveguide segment are arranged in parallel in the first direction, the second waveguide segment and the fourth waveguide segment are arranged in parallel in the second direction, the third waveguide segment and the fourth waveguide segment are alternately arranged in the third direction. A heater is integrated in the fourth waveguide segment, and the thermo-optic coefficient of the third waveguide segment is smaller than that of the fourth waveguide segment.

[0008] The sensitivity of the third waveguide segment to temperature changes is relatively low, and thereby the heat dissipation effect of the fourth waveguide segment on the third waveguide segment is relatively low. Therefore, even when heaters are integrated on both the first waveguide and the fourth waveguide, the thermo-optic phase shifter array has relatively low thermal crosstalk.

[0009] Optionally, the first direction is parallel to the second direction.

[0010] Optionally, the third direction is perpendicular to the first direction.

[0011] Optionally, the first waveguide further includes a first transition region, the first transition region is disposed between the first waveguide segment and the third waveguide segment, and the first transition region is used to connect the first waveguide segment and the third waveguide segment to reduce additional optical loss at the connection.

[0012] Optionally, the second waveguide further includes a second transition region, the second transition region is disposed between the second waveguide segment and the fourth waveguide segment, and the second transition region is used to connect the second waveguide segment and the fourth waveguide segment to reduce additional optical loss at the connection.

[0013] Optionally, the first waveguide segment and the second waveguide segment employ waveguide materials with different thermo-optic coefficients.

[0014] Optionally, the first waveguide segment and the second waveguide segment employ waveguide structures with different thermo-optic coefficients.

[0015] The present invention further provides an interferometer array including the thermo-optic phase shifter array.

[0016] The beneficial effect of the interferometer array is that the first waveguide segment and the second waveguide segment are alternately arranged in the third direction, a heater is integrated in the first waveguide segment, and the thermo-optic coefficient of the second waveguide segment is smaller than that of the first waveguide segment. Therefore, the sensitivity of the second waveguide segment to temperature changes is relatively low, and thereby the heat dissipation effect of the second waveguide segment by the first waveguide segment is relatively low. Thus, the interferometer array of the present invention has relatively low thermal crosstalk. Since the first waveguide segment and the second waveguide segment of adjacent interferometers are also adjacent, there is also relatively low thermal crosstalk between adjacent arrays.

[0017] The present invention further provides an optical phased array including the thermo-optic phase shifter array.

[0018] The beneficial effect of the optical phased array is that the first waveguide segment and the second waveguide segment are alternately arranged in the third direction, a heater is integrated in the first waveguide segment, and the thermo-optic coefficient of the second waveguide segment is smaller than that of the first waveguide segment. Therefore, the sensitivity of the second waveguide segment to temperature changes is relatively low, and thereby the heat dissipation effect of the second waveguide segment by the first waveguide segment is relatively low. Thus, the optical phased array of the present invention has relatively low thermal crosstalk.

Brief Description of the Drawings

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Embodiments for Carrying Out the Invention

[0020] To make the objectives, technical solutions, and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. It is obvious that the described embodiments are only a part of the embodiments of the present invention, not all of them. All other embodiments obtained by those skilled in the art on the premise of not paying creative labor based on the embodiments of the present invention belong to the protection scope of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein have the ordinary meanings understood by those skilled in the art. Similar terms such as "including" used in this specification mean that the elements and things that appear before this term include the elements and things listed after this term and their equivalents, but do not exclude other elements and things.

[0021] In view of the problems existing in the prior art, embodiments of the present invention provide a thermo-optic phase shifter array including at least one first waveguide and at least one second waveguide, wherein the first waveguide extends along a first direction, the second waveguide extends along a second direction, the first waveguide and the second waveguide are alternately arranged in a third direction, the first waveguide includes a first waveguide segment, the second waveguide includes a second waveguide segment, the first waveguide segment and the second waveguide segment are alternately arranged in the third direction, a heater is integrated in the first waveguide segment, and the thermo-optic coefficient of the second waveguide segment is smaller than that of the first waveguide segment.

[0022] FIG. 1 is a plan view of a thermo-optic phase shifter array in some embodiments. Referring to FIG. 1, the thermo-optic phase shifter array includes three first waveguides and three second waveguides, the first waveguides extend along a first direction a, the second waveguides extend along a second direction b, the first waveguides and the second waveguides are alternately arranged in a third direction c, the first waveguides include first waveguide segments 11, the second waveguides include second waveguide segments 21, the first waveguide segments 11 and the second waveguide segments 21 are alternately arranged in the third direction c, a heater 3 is integrated in the first waveguide segments 11, and the thermo-optic coefficient of the second waveguide segments 21 is smaller than that of the first waveguide segments 11.

[0023] The first waveguide segment 11 and the second waveguide segment 21 are alternately arranged in the third direction c. A heater 3 is integrated in the first waveguide segment 11. Since the thermo-optic coefficient of the second waveguide segment 21 is smaller than that of the first waveguide segment 11, the sensitivity of the second waveguide segment 21 to temperature changes is relatively low. Therefore, the heat dissipation effect of the second waveguide segment 21 by the first waveguide segment 11 is relatively low. As a result, the thermo-optic phase shifter array of the present invention has relatively low thermal crosstalk and does not require the waveguides to be separated far enough to reduce thermal crosstalk. It has a compact structure, which is advantageous for high-density integration, miniaturizes the chip, and reduces costs.

[0024] The thermo-optic phase shifter array according to the present invention does not require a side groove or an undercut to separate heat diffusion between adjacent waveguides, thus simplifying the manufacturing process and being advantageous for reducing the cost of processing and fabrication, and also avoiding reliability problems caused by side grooves or undercuts.

[0025] In some embodiments, the first waveguide further includes a third waveguide segment, the second waveguide further includes a fourth waveguide segment, the first waveguide segment and the third waveguide segment are arranged in parallel in the first direction, the second waveguide segment and the fourth waveguide segment are arranged in parallel in the second direction, the third waveguide segment and the fourth waveguide segment are alternately arranged in the third direction, a heater is integrated in the fourth waveguide segment, and the thermo-optic coefficient of the third waveguide segment is smaller than that of the fourth waveguide segment.

[0026] FIG. 2 is a plan view of a thermo-optic phase shifter array in some other embodiments. Referring to FIG. 2, the first waveguide further includes a third waveguide segment 12, the second waveguide further includes a fourth waveguide segment 22, the first waveguide segment 11 and the third waveguide segment 12 are arranged in parallel in the first direction a, and the extending directions of the first waveguide segment 11 and the third waveguide segment 12 are on the same straight line. The second waveguide segment 21 and the fourth waveguide segment 22 are arranged in parallel in the second direction b, and the extending directions of the second waveguide segment 21 and the fourth waveguide segment 22 are on the same straight line. The third waveguide segment 12 and the fourth waveguide segment 22 are alternately arranged in the third direction c. A heater 3 is integrated in the fourth waveguide segment 22, and the thermo-optic coefficient of the third waveguide segment 12 is smaller than that of the fourth waveguide segment 22.

[0027] Since the first waveguide further includes a third waveguide segment 12, the second waveguide further includes a fourth waveguide segment 22, the third waveguide segment 12 and the fourth waveguide segment 22 are alternately arranged in the third direction c, a heater 3 is integrated in the fourth waveguide segment 22, and the thermo-optic coefficient of the third waveguide segment 12 is smaller than that of the fourth waveguide segment 22, the sensitivity of the third waveguide segment 12 to temperature change is relatively low. As a result, the heat dissipation influence of the third waveguide segment 12 by the fourth waveguide segment 22 is relatively low. Therefore, even when heaters are integrated on both the first waveguide and the fourth waveguide, the thermo-optic phase shifter array has relatively low thermal crosstalk.

[0028] In some embodiments, the second waveguide segment is the same as the third waveguide segment, and the first waveguide segment is the same as the fourth waveguide segment.

[0029] In some embodiments, referring to FIGS. 1 and 2, the first direction a is parallel to the second direction b.

[0030] In some embodiments, referring to FIGS. 1 and 2, the first direction a is parallel to the second direction b, and the third direction c is perpendicular to the first direction a.

[0031] In some embodiments, the first waveguide further includes a first transition region, the first transition region is disposed between the first waveguide segment and the third waveguide segment, and the first transition region is used to connect the first waveguide segment and the third waveguide segment to reduce additional optical loss at the connection.

[0032] FIG. 3 is a three-dimensional schematic diagram of the first transition region in some embodiments. Referring to FIGS. 2 and 3, the first waveguide segment 11 and the third waveguide segment 12 are connected by the first transition region 13, the third waveguide segment 12 is a slot waveguide, the right end of the first waveguide segment 11 enters the recessed region of the third waveguide segment 12, the top plane protruding from the right end of the first waveguide segment 11 is triangular, and the left side of the third waveguide segment 12 is recessed.

[0033] In some embodiments, the second waveguide further includes a second transition region, the second transition region is disposed between the second waveguide segment and the fourth waveguide segment, and the second transition region is used to connect the second waveguide segment and the fourth waveguide segment to reduce additional optical loss at the connection.

[0034] Figure 4 is a three-dimensional schematic diagram of a second transition region in some embodiments. Referring to FIGS. 2 and 4, the second waveguide segment 21 and the fourth waveguide segment 22 are connected by the second transition region 23. The second waveguide segment 21 is a slot waveguide. The fourth waveguide segment 22 has a triangular top plane protruding on the left side so that the left end of the fourth waveguide segment 22 enters the recessed region of the second waveguide segment 21. The right side of the second waveguide segment 21 is recessed.

[0035] In some embodiments, the types of the first transition region and the second transition region include interlayer transition and waveguide type transition.

[0036] Figure 5 is a plan view of a second transition region in some other embodiments. Figure 6 is a front view of a second transition region in some other embodiments. Referring to FIGS. 5 and 6, the third waveguide segment 12 and the fourth waveguide segment 22 are installed in layers with different heights in the fourth direction d.

[0037] In some other embodiments, the plan view of the first transition region may be shown in FIG. 5, and the front view of the first transition region may be shown in FIG. 6.

[0038] In some embodiments, the first waveguide segment 11, the second waveguide segment 21, the third waveguide segment 12, and the fourth waveguide segment 22 are installed in layers with the same height in the fourth direction d.

[0039] In some embodiments, the first waveguide segment and the second waveguide segment employ waveguide materials with different thermo-optic coefficients. In some specific embodiments, the material of the first waveguide segment includes silicon, and the material of the second waveguide segment includes silicon nitride.

[0040] In some embodiments, the third waveguide segment and the fourth waveguide segment employ waveguide materials with different thermo-optic coefficients. In some specific embodiments, the material of the third waveguide segment includes silicon nitride, and the material of the fourth waveguide segment includes silicon.

[0041] In some embodiments, the first waveguide segment and the second waveguide segment employ waveguide structures with different thermo-optic coefficients.

[0042] In some embodiments, the third waveguide segment and the fourth waveguide segment employ waveguide structures with different thermo-optic coefficients.

[0043] The present invention further provides an interferometer array including the thermo-optic phase shifter array.

[0044] FIG. 7 is a schematic diagram of an interferometer array in some embodiments. Referring to FIG. 7, the interferometer array includes three interferometers. Each interferometer includes two optical waveguide arms, an input optical waveguide segment 10, and an output optical waveguide segment 18. The input optical waveguide segment 10 is split into a first optical waveguide arm and a second optical waveguide arm via a splitter 16. The first optical waveguide arm is parallel to the second optical waveguide arm. The first optical waveguide arm and the second optical waveguide arm are combined into the output optical waveguide segment 18 via an optical combiner 17. The first optical waveguide arm includes the first waveguide segment 11. The second optical waveguide arm includes the second waveguide segment 21 and two third transition regions 14. The directions of the two third transition regions 14 in the second direction b are opposite. The first waveguide segment 11 and the second waveguide segment 21 are alternately arranged in the third direction c. The two third transition regions 14 are installed at both ends of the second waveguide segment 21. A heater 3 is integrated in the first waveguide segment 11. The thermo-optic coefficient of the second waveguide segment 21 is smaller than that of the first waveguide segment 11.

[0045] In some embodiments, the interferometer includes N of the optical waveguide arms, where N is an integer greater than 2.

[0046] In some embodiments, the N optical waveguide arms are parallel or non - parallel to each other.

[0047] In some embodiments, the optical waveguide arms are straight, curved, or spiral.

[0048] In some embodiments, the arm lengths of the optical waveguide arms can be modified to achieve the same optical path length or a specific optical path length difference.

[0049] In the interferometer array according to the present invention, the first waveguide segment 11 and the second waveguide segment 21 are alternately arranged in the third direction c. A heater 3 is integrated in the first waveguide segment 11. Since the thermo - optic coefficient of the second waveguide segment 21 is smaller than that of the first waveguide segment 11, the sensitivity of the second waveguide segment 21 to temperature changes is relatively low. As a result, the heat dissipation effect of the second waveguide segment 21 by the first waveguide segment 11 is relatively low. Therefore, the interferometer array of the present invention has relatively low thermal crosstalk and does not need to separate the waveguides far enough to reduce thermal crosstalk. It has a compact structure, is advantageous for high - density integration, miniaturizes the chip, and reduces costs. Since the first waveguide segment and the second waveguide segment of adjacent interferometers are also adjacent, there is also relatively low thermal crosstalk between adjacent arrays.

[0050] FIG. 8 is a schematic diagram of an interferometer array in some other embodiments. Referring to FIG. 8, the first optical waveguide arm further includes the third waveguide segment 12, the second optical waveguide arm further includes the fourth waveguide segment 22, the first waveguide segment 11 and the third waveguide segment 12 are connected by the first transition region 13, the second waveguide segment 21 and the fourth waveguide segment 22 are connected by the second transition region 23, the third waveguide segment 12 and the fourth waveguide segment 22 are alternately arranged in the third direction c, and the thermo-optic coefficient of the third waveguide segment 12 is smaller than that of the fourth waveguide segment 22.

[0051] In the interferometer array according to the present invention, the third waveguide segment 12 and the fourth waveguide segment 22 are alternately arranged in the third direction c, a heater 3 is integrated in the fourth waveguide segment 22, and the thermo-optic coefficient of the third waveguide segment 12 is smaller than that of the fourth waveguide segment 22. Therefore, the sensitivity of the third waveguide segment 12 to temperature change is relatively low, and thus the heat dissipation influence of the fourth waveguide segment 22 on the third waveguide segment 12 is relatively low. Therefore, the interferometer array of the present invention has relatively low thermal crosstalk, and it is not necessary to separate the waveguides far enough to reduce the thermal crosstalk. It has a compact structure, which is advantageous for high-density integration, miniaturizes the chip, and reduces the cost. Since the third waveguide segments and the fourth waveguide segments of adjacent interferometers are also adjacent, there is also relatively low thermal crosstalk between adjacent arrays.

[0052] The present invention further provides an optical phased array including the thermo-optic phase shifter array.

[0053] FIG. 9 is a schematic diagram of an optical phased array in some embodiments. Referring to FIG. 9, the first input optical waveguide segment 10 is split into two input optical waveguide segments via a splitter 16, and each of the input optical waveguide segments is also split into two sets of waveguides via two splittings of the splitter 16. The optical phased array includes four sets of waveguides, and each set of the waveguides includes a first waveguide and a second waveguide. The first waveguide is parallel to the second waveguide. The first waveguide includes the first waveguide segment 11, and the second waveguide includes the second waveguide segment 21. The first waveguide segment 11 and the second waveguide segment 21 are alternately arranged in the third direction c. A heater 3 is integrated on the first waveguide segment 11, and the thermo-optic coefficient of the second waveguide segment 21 is smaller than the thermo-optic coefficient of the first waveguide segment 11.

[0054] FIG. 10 is a schematic diagram of an optical phased array in some other embodiments. Referring to FIG. 10, the first input optical waveguide segment 10 is split into two input optical waveguide segments via a splitter 16, and each of the input optical waveguide segments is also split into two sets of waveguides via two splits of the splitter 16. The optical phased array includes four sets of waveguides, and each set of the waveguides includes a first waveguide and a second waveguide, and the first waveguide is parallel to the second waveguide. The first waveguide includes the first waveguide segment 11 and the third waveguide segment 12, and the first waveguide segment 11 and the third waveguide segment 12 are connected by the first transition region 13. The second waveguide includes the second waveguide segment 21 and the fourth waveguide segment 22, and the second waveguide segment 21 and the fourth waveguide segment 22 are connected by the second transition region 23. The first waveguide segment 11 and the second waveguide segment 21 are alternately arranged in the third direction c, and the third waveguide segment 12 and the fourth waveguide segment 22 are alternately arranged in the third direction c. A heater 3 is integrated on the first waveguide segment 11 and the fourth waveguide segment 22, the thermo-optic coefficient of the second waveguide segment 21 is smaller than the thermo-optic coefficient of the first waveguide segment 11, and the thermo-optic coefficient of the third waveguide segment 12 is smaller than the thermo-optic coefficient of the fourth waveguide segment 22.

[0055] In the optical phased array according to the present invention, the first waveguide segment 11 and the second waveguide segment 21 are alternately arranged in the third direction c, the third waveguide segment 12 and the fourth waveguide segment 22 are alternately arranged in the third direction c, a heater 3 is integrated in the first waveguide segment 11 and the fourth waveguide segment 22, the thermo-optic coefficient of the second waveguide segment 21 is smaller than the thermo-optic coefficient of the first waveguide segment 11, and the thermo-optic coefficient of the third waveguide segment 12 is smaller than the thermo-optic coefficient of the fourth waveguide segment 22. Therefore, the sensitivity of the second waveguide segment 21 to temperature changes is relatively low, so that the heat dissipation effect of the second waveguide segment 21 by the first waveguide segment 11 is relatively low, and the sensitivity of the third waveguide segment 12 to temperature changes is relatively low, so that the heat dissipation effect of the second waveguide segment 12 by the fourth waveguide segment 22 is relatively low. Therefore, the optical phased array of the present invention has relatively low thermal crosstalk, and it is not necessary to separate the waveguides far enough to reduce the thermal crosstalk. It has a compact structure, is advantageous for high-density integration, miniaturizes the chip, and reduces costs.

[0056] In some embodiments, the first waveguide and the second waveguide are straight, curved, or spiral.

[0057] In some embodiments, the first waveguide is not parallel to the second waveguide.

[0058] In some embodiments, the first waveguide segment, the second waveguide segment, the third waveguide segment, or the fourth waveguide segment further includes side trenches and undercuts to further improve thermal isolation.

[0059] In some embodiments, the material of the heater includes titanium nitride, doped silicon, or tungsten.

[0060] In some embodiments, the integrated material platform of the thermo-optic phase shifter array includes bulk silicon, silicon-on-insulator, silicon-on-sapphire, silica, alumina, indium phosphide, lithium niobate, and polymers.

[0061] In some embodiments, the waveguide types of the thermo-optic phase shifter array include channel waveguides, ridge waveguides, slot waveguides, diffused waveguides, and photonic crystal waveguides.

[0062] In some embodiments, the operating wavelength range of the thermo-optic phase shifter array includes the visible light band, O band, E band, S band, C band, L band, U band, and mid-infrared band.

[0063] In some embodiments, the application fields of the thermo-optic phase shifter array include optical sensing, beam control, lidar, optical interconnection, and optical computing.

[0064] As described above, the embodiments of the present invention have been described in detail. However, it is obvious to those skilled in the art that various modifications and changes can be made to these embodiments. Nevertheless, it should be understood that such modifications and changes fall within the scope and spirit of the present invention described in the claims. In addition, the present invention described in this specification may have other embodiments and may be implemented or realized in multiple ways.

Claims

1. A thermo-optic phase shifter array including at least one first waveguide and at least one second waveguide, wherein the first waveguide extends along a first direction, the second waveguide extends along a second direction, the first waveguide and the second waveguide are alternately arranged in a third direction, the first waveguide includes a first waveguide segment, the second waveguide includes a second waveguide segment, the first waveguide segment and the second waveguide segment are alternately arranged in the third direction, a heater is integrated in the first waveguide segment, and the thermo-optic coefficient of the second waveguide segment is smaller than that of the first waveguide segment. A thermo-optic phase shifter array characterized by this.

2. The first waveguide further includes a third waveguide segment, the second waveguide further includes a fourth waveguide segment, the first waveguide segment and the third waveguide segment are arranged in parallel in the first direction, the second waveguide segment and the fourth waveguide segment are arranged in parallel in the second direction, the third waveguide segment and the fourth waveguide segment are alternately arranged in the third direction, a heater is integrated in the fourth waveguide segment, and the thermo-optic coefficient of the third waveguide segment is smaller than that of the fourth waveguide segment. The thermo-optic phase shifter array according to claim 1, characterized by this.

3. The first direction is parallel to the second direction. The thermo-optic phase shifter array according to claim 1, characterized by this.

4. The third direction is perpendicular to the first direction. The thermo-optic phase shifter array according to claim 3, characterized by this.

5. The first waveguide further includes a first transition region, the first transition region is installed between the first waveguide segment and the third waveguide segment, and the first transition region is used to connect the first waveguide segment and the third waveguide segment to reduce additional optical loss at the connection part. The thermo-optic phase shifter array according to claim 2, characterized by this.

6. The second waveguide further includes a second transition region, the second transition region is disposed between the second waveguide segment and the fourth waveguide segment, and the second transition region is used to connect the second waveguide segment and the fourth waveguide segment to reduce additional optical loss at the connection portion. The thermo-optic phase shifter array according to claim 5, characterized in that.

7. The thermo-optic phase shifter array according to claim 1, characterized in that the first waveguide segment and the second waveguide segment employ waveguide materials with different thermo-optic coefficients.

8. The thermo-optic phase shifter array according to claim 1, characterized in that the first waveguide segment and the second waveguide segment employ waveguide structures with different thermo-optic coefficients.

9. An interferometer array, characterized by including the thermo-optic phase shifter array according to any one of claims 1 to 8.

10. An optical phased array, characterized by including the thermo-optic phase shifter array according to any one of claims 1 to 8.

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