Fluorinated alkoxide and amide-containing precursors

Abstract

The present disclosure relates to the field of precursors, and more particularly to precursors containing at least one fluorinated group. In some embodiments, the precursors are hafnium, zirconium, and titanium bis(cyclopentadienyl) precursors containing fluorinated alkoxides and amides. In some embodiments, the present disclosure relates to the use of the precursors for the deposition of Group 4-containing thin films, such as HfOx, ZrOx, and TiOx film applications. These thin films can be used in a variety of applications, including semiconductor device structures. The disclosed compounds have been developed and synthesized to produce compounds that improve film applications, such as HfOx, ZrOx, and TiOx film applications. The improvements to the disclosed compounds include increased molecular stability at delivery and deposition temperatures, improvements in precursor film impurity levels, molecular volatility, molecular melting points, and step coverage.

Description

[Technical Field]

[0001] The present disclosure relates to the field of precursors, and more particularly to precursors containing at least one fluorinated group. [Background technology]

[0002] The thin films may be used in conjunction with semiconductor device structures. Summary of the Invention

[0003] New precursors are needed for applications related to 3D-NAND, DRAM, and logic. As tungsten is replaced by molybdenum in 3D-NAND, a blocking layer is necessary to protect aluminum oxide (Al2O3). This disclosure relates to the field of precursors, and more specifically, to precursors containing at least one fluorinated group. In some embodiments, the precursors are hafnium, zirconium, and titanium bis(cyclopentadienyl) precursors containing fluorinated alkoxides and amides. In some embodiments, this disclosure relates to using the precursors described herein for the deposition of Group 4-containing thin films, such as HfOx, ZrOx, and TiOx film applications. These thin films can be used in a variety of applications, including semiconductor device structures. Compounds of the present disclosure have been developed and synthesized to produce compounds that improve film applications, such as HfOx, ZrOx, and TiOx film applications. Improvements in the disclosed compounds include increased molecular stability at delivery and deposition temperatures, improvements in precursor film impurity levels, molecular volatility, molecular melting points, and step coverage.

[0004] The precursors of the present disclosure have good stability and volatility. For example, bis(cyclopentadienyl)Hf compounds containing fluorinated ligands can have significantly higher volatility than compounds containing non-fluorinated ligands.

[0005] In some embodiments, the compound is a liquid at room temperature.

[0006] In some aspects, the technology described herein provides a compound of the formula: TIFF2025528932000002.tif37170M is Ti, Zr, or Hf; L1 is C1 to C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, or F; L2 to L4 are each independently C1 to C 15 Alkyl, C2-C 15 Amides, C1-C 15 Alkoxides, C1-C 15 Carboxylate, C5-C 15 Amidinates, C5-C 15 Guanidinate, C5-C 15 β-diketonates, C5-C 15 β-ketoiminate, C5-C 15 β-diketiminate, C1-C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, F, Cl, Br, I, or H.

[0007] In some aspects, the technology described herein provides a compound of the formula: It relates to a compound having TIFF2025528932000003.tif58170.

[0008] In some embodiments, the technology described herein relates to compounds in which L1 to L4 are each independently 1,1,1,3,3,3-hexafluoro-2-propoxide, 2,2,3,3,4,4,4-heptafluoro-1-butoxide, or 2,2,2-trifluoroethoxide.

[0009] In some embodiments, the technology described herein relates to compounds where L1-L4 are trifluoroacetates.

[0010] In some aspects, the technology described herein provides a compound of the formula: TIFF2025528932000004.tif45170 (wherein M is Ti, Zr, or Hf; L1 is C1 to C 15 Fluoroalkyl, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, or F; L2 and L3 are each independently C1 to C 15 Alkyl, C2-C 15 Amides, C1-C 15 Alkoxides, C1-C 15 Carboxylate, C5-C 15 Amidinates, C5-C 15 Guanidinate, C5-C 15 β-diketonates, C5-C 15 β-ketoiminate, C5-C 15 β-diketiminate, C1-C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, F, Cl, Br, I, or H; R1 to R5 are each independently C1 to C 15 Alkyl, C1-C 15 Ether, C2-C 15 Amines, C1-C 15 Fluoroethers, C1-C 15 fluoroalkyl, OH, F, Cl, Br, I, or H).

[0011] In some aspects, the technology described herein provides a compound of the formula: It relates to a compound having TIFF2025528932000005.tif52170.

[0012] In some embodiments, the technology described herein relates to compounds where R1-R5 are H.

[0013] In some embodiments, the technology described herein relates to compounds in which L1 to L3 are 1,1,1,3,3,3-hexafluoro-2-propoxide, 2,2,3,3,4,4,4-heptafluoro-1-butoxide, or 2,2,2-trifluoroethoxide.

[0014] In some embodiments, the technology described herein relates to compounds where L1-L3 are trifluoroacetates.

[0015] In some aspects, the technology described herein provides a compound of the formula: TIFF2025528932000006.tif63170 (wherein M is Ti, Zr, or Hf; L1 is C1 to C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, or F; L2 is C1-C 15 Alkyl, C2-C 15 Amides, C1-C 15 Alkoxides, C1-C 15 Carboxylate, C5-C 15 Amidinates, C5-C 15 Guanidinate, C5-C 15 β-diketonates, C5-C 15 β-ketoiminate, C5-C 15 β-diketiminate, C1-C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15Amides, C2-C containing at least one fluoro group 15 carboxylate, F, Cl, Br, I, or H; R to R 10 are independently C1 to C 15 Alkyl, C1-C 15 Ether, C2-C 15 Amines, C1-C 15 Fluoroethers, C1-C 15 fluoroalkyl, OH, F, Cl, Br, I, or H).

[0016] In some aspects, the technology described herein provides a compound of the formula: It relates to a compound having TIFF2025528932000007.tif43170.

[0017] In some embodiments, the technology described herein provides a method for preparing a compound having a structure comprising: 10 relates to compounds where is H.

[0018] In some embodiments, the technology described herein relates to compounds where L1 and L2 are 2,2,3,3,4,4,4-heptafluoro-1-butoxide, 1,1,1,3,3,3-hexafluoro-2-propoxide, 2,2,2-trifluoroethoxide, or a combination thereof.

[0019] In some aspects, the technology described herein provides a compound of the formula: It relates to a compound having TIFF2025528932000008.tif63170.

[0020] In some embodiments, the technology described herein relates to a compound or claim 12, wherein L1 and L2 are 2,2,2-trifluoroethoxide.

[0021] In some aspects, the technology described herein provides a compound of the formula: TIFF2025528932000009.tif53170 (wherein M is Ti, Zr, or Hf; L1 is C1 to C 15Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, or F; L2 is C1-C 15 Alkyl, C2-C 15 Amides, C1-C 15 Alkoxides, C1-C 15 Carboxylate, C5-C 15 Amidinates, C5-C 15 Guanidinate, C5-C 15 β-diketonates, C5-C 15 β-ketoiminate, C5-C 15 β-diketiminate, C1-C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, F, Cl, Br, I, or H; X is each independently C or Si; R1 to R5 are each independently C1 to C 15 Alkyl, C1-C 15 fluoroalkyl, or H).

[0022] In some embodiments, the technology described herein relates to compounds where X is C, R1-R4 are H, and R5 is methyl.

[0023] In some embodiments, the technology described herein relates to compounds in which L1 and L2 are bis(2,2,2-trifluoroethyl)amides.

[0024] In some embodiments, the technology described herein relates to compounds where L1 and L2 are 2,2,3,3,4,4,4-heptafluoro-1-butoxide, 1,1,1,3,3,3-hexafluoro-2-propoxide, 2,2,2-trifluoroethoxide, or a combination thereof.

[0025] In some embodiments, the technology described herein relates to compounds where L1 and L2 are trifluoroacetate.

[0026] In some aspects, the technology described herein provides a compound of the formula: TIFF2025528932000010.tif48170 (wherein M is Ti, Zr, or Hf; L1 is C1 to C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, or F; L2 is C1-C 15 Alkyl, C2-C 15 Amides, C1-C 15 Alkoxides, C1-C 15 Carboxylate, C5-C 15 Amidinates, C5-C 15 Guanidinate, C5-C 15 β-diketonates, C5-C 15 β-ketoiminate, C5-C 15 β-diketiminate, C1-C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, F, Cl, Br, I, or H; X is each independently C or Si; R1 to R4 are each independently C1 to C 15 Alkyl, C1-C 15fluoroalkyl, or H).

[0027] In some embodiments, the technology described herein relates to compounds where X is C, R1-R3 are H, and R4 is methyl.

[0028] In some embodiments, the technology described herein relates to compounds in which L1 and L2 are bis(2,2,2-trifluoroethyl)amides.

[0029] In some embodiments, the technology described herein relates to compounds where L1 and L2 are trifluoroacetate.

[0030] In some embodiments, the technology described herein relates to compounds where L1 and L2 are 2,2,3,3,4,4,4-heptafluoro-1-butoxide, 1,1,1,3,3,3-hexafluoro-2-propoxide, 2,2,2-trifluoroethoxide, or a combination thereof.

[0031] Some embodiments of the present disclosure are described herein, by way of example only, with reference to the accompanying drawings. Referring now in detail and specifically to the drawings, it is emphasized that the illustrated embodiments are by way of example and for illustrative purposes of illustrating embodiments of the present disclosure. In this regard, the description made with the drawings will make apparent to those skilled in the art how embodiments of the present disclosure may be practiced. [Brief explanation of the drawings]

[0032] [Figure 1] 1 illustrates, in accordance with some embodiments, a fluorinated ligand compound according to the present disclosure. [Figure 2] Thermogravimetric analysis (TGA) of the non-fluorinated compound: bis(cyclopentadienyl)Hf(NEtMe)2. [Figure 3] 1 shows the TGA of Bis(cyclopentadienyl)Hf(OCH(CF) according to some embodiments. [Figure 4]1 shows a TGA of bis(cyclopentadienyl)Hf(OCH2CF3)2, according to some embodiments. DETAILED DESCRIPTION OF THE INVENTION

[0033] Among these disclosed benefits and improvements, other objects and advantages of the present disclosure will become apparent from the following description taken in conjunction with the accompanying drawings. While detailed embodiments of the present disclosure are disclosed herein, it should be understood that the disclosed embodiments are merely exemplary of the present disclosure, which may be embodied in various forms. Moreover, each example given of various embodiments of the present disclosure is intended to be illustrative and not limiting.

[0034] All prior patents and publications referenced herein are incorporated by reference in their entirety.

[0035] Throughout the specification and claims, the following terms take on the meanings explicitly associated therewith unless the context clearly dictates otherwise. The phrases "in one embodiment," "in an embodiment," and "in some embodiments," when used herein, do not necessarily refer to the same embodiment, but may. Furthermore, the phrases "in another embodiment" and "in some other embodiments," when used herein, do not necessarily refer to different embodiments, but may refer to different embodiments. It is intended that all embodiments of the present disclosure be combinable without departing from the scope or spirit of the disclosure.

[0036] As used herein, the term "alkyl" refers to a hydrocarbon chain radical having 1 to 30 carbon atoms. An alkyl may be attached through a single bond. An alkyl having n carbon atoms is referred to as "C n For example, "C alkyl" can include n-propyl and isopropyl. Alkyl having a range of carbon atoms, such as 1 to 30 carbon atoms, can be specified as C1-C 30In some embodiments, alkyl is saturated (e.g., single bond). In some embodiments, alkyl is unsaturated (e.g., double and / or triple bond). In some embodiments, alkyl is linear. In some embodiments, alkyl is branched. In some embodiments, alkyl is substituted. In some embodiments, alkyl is unsubstituted. In some embodiments, alkyl is C1-C 12 Alkyl, C1-C 11 Alkyl, C1-C 10 The alkyl may comprise, consist of, consist essentially of, or be selected from the group consisting of at least one of alkyl, C1-C9 alkyl, C1-C8 alkyl, C1-C7 alkyl, C1-C6 alkyl, C1-C4 alkyl, C1-C3 alkyl, or any combination thereof. In some embodiments, the alkyl may comprise, consist essentially of, or be selected from the group consisting of at least one of methyl, ethyl, n-propyl, 1-methylethyl (isopropyl), n-butyl, isobutyl, sec-butyl, n-pentyl, 1,1-dimethylethyl (t-butyl), n-pentyl, isopentyl, n-hexyl, isohexyl, 3-methylhexyl, 2-methylhexyl, octyl, decyl, dodecyl, octadecyl, or any combination thereof.

[0037] As used herein, the term "based on" is not exclusive and allows for based on additional factors not listed, unless the context clearly dictates otherwise. Furthermore, throughout this specification, the meanings of "a," "an," and "the" include plural referents. The meaning of "in" includes "in" and "on."

[0038] As used herein, the term "between" does not necessarily require being located immediately adjacent to another element. In general, the term refers to a configuration in which something is sandwiched between two or more other things. At the same time, the term "between" can describe something that is immediately adjacent to two opposing things. Thus, in any one or more of the embodiments disclosed herein, a particular structural component that is located between two other structural elements can be: A particular structural component may be placed directly between both of two other structural elements such that it is in direct contact with both of the two other structural elements; A particular structural component may be positioned immediately adjacent to only one of two other structural elements such that it is in direct contact with only one of the two other structural elements; A particular structural element may be positioned indirectly adjacent to only one of the two other structural elements such that the particular structural element is not in direct contact with only one of the two other structural elements, and there is another element that juxtaposes the particular structural element and one of the two other structural elements; A particular structural component may be indirectly located between two other structural elements such that it is not in direct contact with both of the two other structural elements, and other requirements may be located between them; or It can be any combination thereof.

[0039] As used herein, "embedded" means that a first material is distributed throughout a second material.

[0040] New precursors are needed for applications related to 3D-NAND, DRAM, and logic. As tungsten is replaced by molybdenum in 3D-NAND, a blocking layer is necessary to protect aluminum oxide (Al2O3). This disclosure relates to the field of precursors, and more specifically, to precursors containing at least one fluorinated group. In some embodiments, the precursors are hafnium, zirconium, and titanium bis(cyclopentadienyl) precursors containing fluorinated alkoxides and amides. In some embodiments, this disclosure relates to using the precursors described herein for the deposition of Group 4-containing thin films, such as HfOx, ZrOx, and TiOx film applications. These thin films can be used in a variety of applications, including semiconductor device structures. Compounds of the present disclosure have been developed and synthesized to produce compounds that improve film applications, such as HfOx, ZrOx, and TiOx film applications. Improvements in the disclosed compounds include increased molecular stability at delivery and deposition temperatures, improvements in precursor film impurity levels, molecular volatility, molecular melting points, and step coverage.

[0041] The precursors of the present disclosure have good stability and volatility. For example, bis(cyclopentadienyl)Hf compounds containing fluorinated ligands can have significantly higher volatility than compounds containing non-fluorinated ligands.

[0042] In some embodiments, compounds of the present disclosure have the following formula: Contains compounds with TIFF2025528932000011.tif37170.

[0043] In some embodiments, for Formula 1, M is titanium (Ti), zirconium (Zr), or hafnium (Hf).

[0044] In some embodiments, for Formula 1, L1 is C1 to C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, or F.

[0045] In some embodiments, for Formula 1, L2-L4 are each independently alkyl, amide, alkoxide, carboxylate, amidinate, guanidinate, β-diketonate, β-ketoiminate, β-diketiminate, fluoroalkyl, alkoxide containing at least one fluoro group, amide containing at least one fluoro group, carboxylate containing at least one fluoro group, F, Cl, Br, I, or H. In some embodiments, for Formula 1, L2-L4 are each independently C1-C 15 Alkyl, C2-C 15 Amides, C1-C 15 Alkoxides, C1-C 15 Carboxylate, C5-C 15 Amidinates, C5-C 15 Guanidinate, C5-C 15 β-diketonates, C5-C 15 β-ketoiminate, C5-C 15 β-diketiminate, C1-C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, F, Cl, Br, I, or H. For example, L2 to L4 are C1 to C 15 alkyl (e.g., methyl). For example, L2 to L4 are C1 to C 15 L2 is alkyl, L3 is methyl, L4 is ethyl, and L5 is butyl. For example, L2 is C2-C 15 Amide, L3 is C1-C 15 alkoxide, and L4 is C5-C 15 It is an amidinate.

[0046] In some embodiments, L1-L4 are ligands of the same class (e.g., C1-C 15 In some embodiments, L1-L4 are from the same class of ligands (e.g., C1-C alkyl), except for different ligands (e.g., L1 is methyl, L2 is ethyl, L3 is propyl, and L4 is butyl). 15 In some embodiments, L1-L4 are all ligands of different classes (e.g., L1 is C1-C 15 alkyl, and L2 is C2-C 15 Amide, L3 is C1-C 15 carboxylate, and L4 is C1-C 15 In some embodiments, at least one of L1-L4 is a ligand of the same class (e.g., L1 and L2 are C1-C 15 alkyl, and L3 is C1-C 15 carboxylate, and L4 is C1-C 15 alkoxide).

[0047] In some embodiments, for Formula 1, L1-L4 are C2-C6 alkyl groups containing at least one fluoro group. 15 amide (e.g., bis(2,2,2-trifluoroethyl)amide). For example, Formula 2 represents the formula when L1 to L4 in Formula 1 are bis(2,2,2-trifluoroethyl)amide, as shown below: TIFF2025528932000012.tif58170

[0048] In some embodiments, for Formula 1, L1 through L4 are each independently 1,1,1,3,3,3-hexafluoro-2-propoxide, 2,2,3,3,4,4,4-heptafluoro-1-butoxide, or 2,2,2-trifluoroethoxide. For example, in some embodiments, L1 through L4 are 1,1,1,3,3,3-hexafluoro-2-propoxide, and L1 through L4 are 2,2,3,3,4,4,4-heptafluoro-1-butoxide, 2,2,2-trifluoroethoxide, or a combination thereof.

[0049] In some embodiments, for Formula 1, L1-L4 are C2-C6 alkyl groups containing at least one fluoro group. 15 Carboxylate (eg, trifluoroacetate).

[0050] In some embodiments, compounds of the present disclosure have the following formula: Contains compounds with TIFF2025528932000013.tif45170.

[0051] In some embodiments, for Formula 3, M is titanium (Ti), zirconium (Zr), or hafnium (Hf).

[0052] In some embodiments, for Formula 3, L1 is C1 to C 15 Fluoroalkyl, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, or F.

[0053] In some embodiments, for Formula 3, L2 and L3 are each independently an alkyl, amide, alkoxide, carboxylate, amidinate, guanidinate, β-diketonate, β-ketoiminate, β-diketiminate, fluoroalkyl, alkoxide containing at least one fluoro group, amide containing at least one fluoro group, carboxylate containing at least one fluoro group, F, Cl, Br, I, or H. In some embodiments, for Formula 3, L2 and L3 are each independently a C1-C 15 Alkyl, C2-C 15 Amides, C1-C 15 Alkoxides, C1-C 15 Carboxylate, C5-C 15 Amidinates, C5-C 15 Guanidinate, C5-C 15 β-diketonates, C5-C 15 β-ketoiminate, C5-C 15 β-diketiminate, C1-C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, F, Cl, Br, I, or H.

[0054] In some embodiments, for Formula 3, L1-L3 are ligands of the same class (e.g., C1-C 15 In some embodiments, L1-L3 are from the same class of ligands (e.g., C1-C alkyl), except for different ligands (e.g., L1 is methyl, L2 is ethyl, and L3 is propyl). 15 In some embodiments, L1-L3 are all ligands of different classes (e.g., L1 is C1-C 15 alkyl, and L2 is C2-C 15 amide, and L3 is C1-C 15In some embodiments, at least one of L1-L3 is a ligand of the same class (e.g., L1 and L2 are C1-C 15 alkyl, and L3 is C1-C 15 carboxylate).

[0055] In some embodiments, for Formula 3, R1-R5 are each independently C1-C 15 Alkyl, C1-C 15 Ether, C2-C 15 Amines, C1-C 15 Fluoroethers, C1-C 15 fluoroalkyl, OH, F, Cl, Br, I, or H.

[0056] In some embodiments, R1-R5 are functional groups of the same class (e.g., C1-C 15 In some embodiments, R1-R5 are the same class of functional groups (e.g., C1-C alkyl) or the same functional group (e.g., methyl), except for different functional groups (e.g., R1 is methyl, R2 is ethyl, R3 is propyl, R4 is butyl, and R5 is pentyl). 15 In some embodiments, R1-R5 are all different classes of functional groups (e.g., R1 is C1-C 15 alkyl, and R2 is C2-C 15 amine, R3 is C1-C 15 ether, R4 is C1-C 15 In some embodiments, at least one of R1-R5 is a functional group of the same class (e.g., R1 and R2 are C1-C 15 alkyl, and R3 to R5 are C1 to C 15 fluoroalkyl).

[0057] In some embodiments, for Formula 3, L1-L3 are C2-C6 alkyl groups containing at least one fluoro group. 15amides (e.g., bis(2,2,2-trifluoroethyl)amides). For example, Formula 4 represents a compound of Formula 3 where R1 to R5 are H and L1 to L3 are bis(2,2,2-trifluoroethyl)amides, as shown below: TIFF2025528932000014.tif52170

[0058] In some embodiments, for Formula 3, R1-R5 are H.

[0059] In some embodiments, for Formula 3, L1-L3 are C1-C6 alkyl groups containing at least one fluoro group. 15 alkoxide (e.g., 1,1,1,3,3,3-hexafluoro-2-propoxide, 2,2,3,3,4,4,4-heptafluoro-1-butoxide, or 2,2,2-trifluoroethoxide). In some embodiments, for Formula 3, R1 through R5 are H and L1 through L3 are 1,1,1,3,3,3-hexafluoro-2-propoxide. In some embodiments, for Formula 3, R1 through R5 are H and L1 through L3 are 2,2,3,3,4,4,4-heptafluoro-1-butoxide.

[0060] In some embodiments, for Formula 3, R1-R5 are H and L1-L3 are 2,2,2-trifluoroethoxide.

[0061] In some embodiments, for Formula 3, L1-L3 are C2-C6 alkyl groups containing at least one fluoro group. 15 carboxylate (e.g., trifluoroacetate). In some embodiments, for Formula 3, R1-R5 are H and L1-L3 are trifluoroacetate.

[0062] In some embodiments, compounds of the present disclosure have the following formula: Contains compounds with TIFF2025528932000015.tif63170.

[0063] In some embodiments, for Formula 5, M is titanium (Ti), zirconium (Zr), or hafnium (Hf).

[0064] In some embodiments, for Formula 5, L1 is C1 to C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, or F.

[0065] In some embodiments, for Formula 5, L2 is an alkyl, amide, alkoxide, carboxylate, amidinate, guanidinate, β-diketonate, β-ketoiminate, β-diketiminate, fluoroalkyl, alkoxide containing at least one fluoro group, amide containing at least one fluoro group, carboxylate containing at least one fluoro group, F, Cl, Br, I, or H. In some embodiments, for Formula 5, L2 is a C1-C 15 Alkyl, C2-C 15 Amides, C1-C 15 Alkoxides, C1-C 15 Carboxylate, C5-C 15 Amidinates, C5-C 15 Guanidinate, C5-C 15 β-diketonates, C5-C 15 β-ketoiminate, C5-C 15 β-diketiminate, C1-C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, F, Cl, Br, I, or H.

[0066] In some embodiments, for Formula 5, L1 and L2 are the same class of functional groups (e.g., C1-C 15 In some embodiments, L1 and L2 are the same class of ligands (e.g., C1-C alkyl) or the same functional group (e.g., methyl), except for different ligands (e.g., L1 is methyl and L2 is ethyl). 15 In some embodiments, L1 and L2 are all ligands of different classes (e.g., L1 is C1-C 15 alkyl, and L2 is C2-C 15 amide).

[0067] In some embodiments, for Formula 5, R1 to R 10 are independently C1 to C 15 Alkyl, C1-C 15 Ether, C2-C 15 Amines, C1-C 15 Fluoroethers, C1-C 15 fluoroalkyl, OH, F, Cl, Br, I, or H.

[0068] In some embodiments, R to R 10 are functional groups of the same class (e.g., C1-C 15 alkyl) or the same functional group (e.g., methyl). In some embodiments, R-R 10 are the same class of functional groups (e.g., C1-C5), except for different functional groups (e.g., R1 is methyl, R2 is ethyl, R3 is propyl, R4 is butyl, and R5 is pentyl). 15 alkyl). In some embodiments, R to R 10 are all functional groups of different classes (e.g., R1 is C1-C 15 alkyl, and R2 is C2-C 15 amine, R3 is C1-C 15 ether, R4 is C1-C 15 In some embodiments, R1 through R5 are fluoroethers, R6 are fluoroethers, R7 are fluoroethers, R8 are fluoroethers, R9 are fluoroethers, R10 are fluoroethers, R11 are fluoroethers, R12 are fluoroethers, R13 are fluoroethers, R14 are fluoroethers, R15 are fluoroethers, R16 are fluoroethers, R17 are fluoroethers, R18 are fluoroethers 10At least one of the functional groups is the same class (e.g., R1 to R5 are C1 to C 15 alkyl, and R to R 10 is C1~C 15 fluoroalkyl).

[0069] In some embodiments, for Formula 5, L1 and L2 are C2-C arylsulfonyl groups containing at least one fluoro group. 15 For example, Formula 6 can be represented by the R1 to R2 groups represented by Structural Formula 5, as shown below. 10 is H and L1 and L2 are bis(2,2,2-trifluoroethyl)amide: TIFF2025528932000016.tif43170

[0070] In some embodiments, for Formula 5, R1 to R 10 is H.

[0071] In some embodiments, for Formula 5, L1 and L2 are C1-C arylsulfonyl groups containing at least one fluoro group. 15 alkoxide (e.g., 2,2,3,3,4,4,4-heptafluoro-1-butoxide, 1,1,1,3,3,3-hexafluoro-2-propoxide, or 2,2,2-trifluoroethoxide). In some embodiments, for Formula 5, R1 through R 10 is H, and L1 and L2 are 2,2,3,3,4,4,4-heptafluoro-1-butoxide. In some embodiments, for Formula 5, R1 to R 10 is H, and L1 and L2 are 1,1,1,3,3,3-hexafluoro-2-propoxide. In some embodiments, for Formula 5, R1 through R 10 is H, and L1 and L2 are 2,2,2-trifluoroethoxide.

[0072] For example, Formula 7 can be obtained by combining R1 to R2 represented by Structural Formula 7 with respect to Formula 5 as shown below. 10is H and L1 and L2 are 2,2,3,3,4,4,4-heptafluoro-1-butoxide: TIFF2025528932000017.tif63170

[0073] In some embodiments, for Formula 5, L1 and L2 are C2-C arylsulfonyl groups containing at least one fluoro group. 15 Carboxylate (eg, trifluoroacetate).

[0074] In some embodiments, compounds of the present disclosure have the following formula: Contains compounds with TIFF2025528932000018.tif53170.

[0075] In some embodiments, for Formula 8, M is titanium (Ti), zirconium (Zr), or hafnium (Hf).

[0076] In some embodiments, for Formula 8, L1 is C1 to C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, or F.

[0077] In some embodiments, for Formula 8, L2 is an alkyl, amide, alkoxide, carboxylate, amidinate, guanidinate, β-diketonate, β-ketoiminate, β-diketiminate, fluoroalkyl, alkoxide containing at least one fluoro group, amide containing at least one fluoro group, carboxylate containing at least one fluoro group, F, Cl, Br, I, or H. In some embodiments, for Formula 8, L2 is a C1-C 15 Alkyl, C2-C 15 Amides, C1-C 15 Alkoxides, C1-C 15Carboxylate, C5-C 15 Amidinates, C5-C 15 Guanidinate, C5-C 15 β-diketonates, C5-C 15 β-ketoiminate, C5-C 15 β-diketiminate, C1-C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, F, Cl, Br, I, or H.

[0078] In some embodiments, for Formula 8, L1 and L2 are ligands of the same class (e.g., C1-C 15 In some embodiments, L1 and L2 are the same class of ligands (e.g., C1-C alkyl) or the same ligand (e.g., methyl). In some embodiments, L1 and L2 are different ligands (e.g., L1 is methyl and L2 is ethyl). 15 In some embodiments, L1 and L2 are all ligands of different classes (e.g., L1 is C1-C 15 alkyl, and L2 is C2-C 15 amide).

[0079] In some embodiments, for Formula 8, each X is independently C or Si. In some embodiments, for Formula 8, both X are C or Si. In some embodiments, for Formula 8, one X is C and one X is Si.

[0080] In some embodiments, for Formula 8, R1-R5 are each independently C1-C 15 Alkyl, C1-C 15 fluoroalkyl, or H.

[0081] In some embodiments, R1-R5 are functional groups of the same class (e.g., C1-C15 In some embodiments, R1-R5 are the same class of functional groups (e.g., C1-C alkyl) or the same functional group (e.g., methyl), except for different functional groups (e.g., R1 is methyl, R2 is ethyl, R3 is propyl, R4 is butyl, and R5 is pentyl). 15 In some embodiments, R1-R5 are all different classes of functional groups (e.g., R1 is C1-C 15 alkyl, and R2 is C2-C 15 amine, R3 is C1-C 15 ether, R4 is C1-C 15 In some embodiments, at least one of R1-R5 is a functional group of the same class (e.g., R1 and R2 are C1-C 15 alkyl, and R3 to R5 are C1 to C 15 fluoroalkyl).

[0082] In some embodiments, for Formula 8, X is C, R1-R4 is H, and R5 is methyl.

[0083] In some embodiments, for Formula 8, L1 and L2 are C2-C arylsulfonyl groups containing at least one fluoro group. 15 amide (e.g., bis(2,2,2-trifluoroethyl)amide). In some embodiments, for Formula 8, X is C, R1-R4 are H, R5 is methyl, and L1 and L2 are bis(2,2,2-trifluoroethyl)amide.

[0084] In some embodiments, for Formula 8, L1 and L2 are C1-C arylsulfonyl groups containing at least one fluoro group. 15 Alkoxides (e.g., 2,2,3,3,4,4,4-heptafluoro-1-butoxide, 1,1,1,3,3,3-hexafluoro-2-propoxide, or 2,2,2-trifluoroethoxide).

[0085] In some embodiments, for Formula 8, L1 and L2 are C2-C arylsulfonyl groups containing at least one fluoro group. 15 Carboxylate (eg, trifluoroacetate).

[0086] In some embodiments, compounds of the present disclosure have the following formula: Contains compounds with TIFF2025528932000019.tif48170.

[0087] In some embodiments, for Formula 9, M is titanium (Ti), zirconium (Zr), or hafnium (Hf).

[0088] In some embodiments, for Formula 9, L1 is C1 to C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, or F.

[0089] In some embodiments, for Formula 9, L2 is an alkyl, amide, alkoxide, carboxylate, amidinate, guanidinate, β-diketonate, β-ketoiminate, β-diketiminate, fluoroalkyl, alkoxide containing at least one fluoro group, amide containing at least one fluoro group, carboxylate containing at least one fluoro group, F, Cl, Br, I, or H. In some embodiments, for Formula 9, L2 is a C1-C 15 Alkyl, C2-C 15 Amides, C1-C 15 Alkoxides, C1-C 15 Carboxylate, C5-C 15 Amidinates, C5-C 15 Guanidinate, C5-C 15 β-diketonates, C5-C 15 β-ketoiminate, C5-C 15β-diketiminate, C1-C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, F, Cl, Br, I, or H.

[0090] In some embodiments, for Formula 9, L1 and L2 are ligands of the same class (e.g., C1-C 15 In some embodiments, L1 and L2 are the same class of ligands (e.g., C1-C alkyl) or the same ligand (e.g., methyl). In some embodiments, L1 and L2 are different ligands (e.g., L1 is methyl and L2 is ethyl). 15 In some embodiments, L1 and L2 are all ligands of different classes (e.g., L1 is C1-C 15 alkyl, and L2 is C2-C 15 amide).

[0091] In some embodiments, for Formula 9, each X is independently C or Si. In some embodiments, for Formula 9, both X are C or Si. In some embodiments, for Formula 8, one X is C and one X is Si.

[0092] In some embodiments, for Formula 9, R1-R4 are each independently C1-C 15 Alkyl, C1-C 15 fluoroalkyl, or H.

[0093] In some embodiments, for formula 9, X is C, R1-R3 are H, and R4 is methyl.

[0094] In some embodiments, for Formula 9, L1 and L2 are C2-C arylsulfonyl groups containing at least one fluoro group. 15amide (e.g., bis(2,2,2-trifluoroethyl)amide). In some embodiments, for Formula 9, X is C, R1-R3 are H, R4 is methyl, and L1 and L2 are bis(2,2,2-trifluoroethyl)amide.

[0095] In some embodiments, for Formula 9, L1 and L2 are C2-C arylsulfonyl groups containing at least one fluoro group. 15 carboxylate (e.g., trifluoroacetate). In some embodiments, for Formula 9, X is C, R1-R3 are H, R4 is methyl, and L1 and L2 are trifluoroacetate.

[0096] In some embodiments, for Formula 9, L1 and L2 are C1-C aryl groups containing at least one fluoro group. 15 alkoxide (e.g., 2,2,3,3,4,4,4-heptafluoro-1-butoxide, 1,1,1,3,3,3-hexafluoro-2-propoxide, or 2,2,2-trifluoroethoxide). In some embodiments, for Formula 9, X is C, R1-R3 are H, R4 is methyl, and L1 and L2 are 2,2,3,3,4,4,4-heptafluoro-1-butoxide, 1,1,1,3,3,3-hexafluoro-2-propoxide, or 2,2,2-trifluoroethoxide.

[0097] FIG. 1 illustrates fluorinated ligand compounds (fluorinated L groups (eg, L1, L2, L3, and L4) of Formulas 1-9) according to the present disclosure, according to some embodiments.

[0098] As a comparative example of fluorinated and non-fluorinated compounds, FIG. 2 shows the thermogravimetric analysis (TGA) of the non-fluorinated compound: bis(cyclopentadienyl)Hf(NEtMe) 2 .

[0099] FIG. 3 shows a TGA of bis(cyclopentadienyl)Hf(OCH(CF) according to some embodiments.

[0100] FIG. 4 shows a TGA of bis(cyclopentadienyl)Hf(OCH2CF3)2, according to some embodiments.

[0101] Aspects

[0102] Various embodiments are described below. It should be understood that any one or more of the features described in the following embodiments can be combined with any one or more of the other embodiments.

[0103] Aspect 1. The following formula: TIFF2025528932000020.tif37170 (wherein M is Ti, Zr, or Hf; L1 is C1 to C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, or F; L2 to L4 are each independently C1 to C 15 Alkyl, C2-C 15 Amides, C1-C 15 Alkoxides, C1-C 15 Carboxylate, C5-C 15 Amidinates, C5-C 15 Guanidinate, C5-C 15 β-diketonates, C5-C 15 β-ketoiminate, C5-C 15 β-diketiminate, C1-C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, F, Cl, Br, I, or H).

[0104] Aspect 2. The following formula: The compound of embodiment 1 having TIFF2025528932000021.tif58170.

[0105] Aspect 3. The compound of aspect 1, wherein L1 through L4 are each independently 1,1,1,3,3,3-hexafluoro-2-propoxide, 2,2,3,3,4,4,4-heptafluoro-1-butoxide, or 2,2,2-trifluoroethoxide.

[0106] Aspect 4. The compound of Aspect 1, wherein L1-L4 are trifluoroacetates.

[0107] Aspect 5. A compound of the formula: TIFF2025528932000022.tif45170 (wherein M is Ti, Zr, or Hf; L1 is C1 to C 15 Fluoroalkyl, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, or F; L2 and L3 are each independently C1 to C 15 Alkyl, C2-C 15 Amides, C1-C 15 Alkoxides, C1-C 15 Carboxylate, C5-C 15 Amidinates, C5-C 15 Guanidinate, C5-C 15 β-diketonates, C5-C 15 β-ketoiminate, C5-C 15 β-diketiminate, C1-C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, F, Cl, Br, I, or H; R1 to R5 are each independently C1 to C 15 Alkyl, C1-C 15 Ether, C2-C 15 Amines, C1-C15 Fluoroethers, C1-C 15 fluoroalkyl, OH, F, Cl, Br, I, or H).

[0108] Aspect 6. A compound of the formula: The compound of claim 5 having TIFF2025528932000023.tif52170.

[0109] Aspect 7. The compound according to aspect 5, wherein R1-R5 are H.

[0110] Aspect 8. The compound of aspect 5 or aspect 6, wherein L1 to L3 are 1,1,1,3,3,3-hexafluoro-2-propoxide, 2,2,3,3,4,4,4-heptafluoro-1-butoxide, or 2,2,2-trifluoroethoxide.

[0111] Aspect 9. The compound of aspect 5 or aspect 6, wherein L1-L3 are trifluoroacetates.

[0112] Aspect 10. A compound of the formula: TIFF2025528932000024.tif63170 (wherein M is Ti, Zr, or Hf; L1 is C1 to C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, or F; L2 is C1-C 15 Alkyl, C2-C 15 Amides, C1-C 15 Alkoxides, C1-C 15 Carboxylate, C5-C 15 Amidinates, C5-C 15 Guanidinate, C5-C 15 β-diketonates, C5-C 15 β-ketoiminate, C5-C 15 β-diketiminate, C1-C 15Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, F, Cl, Br, I, or H; R to R 10 are independently C1 to C 15 Alkyl, C1-C 15 Ether, C2-C 15 Amines, C1-C 15 Fluoroethers, C1-C 15 fluoroalkyl, OH, F, Cl, Br, I, or H).

[0113] Aspect 11. A compound of the formula: 11. The compound of embodiment 10, having TIFF2025528932000025.tif43170.

[0114] Aspect 12.R1 to R 10 is H.

[0115] Embodiment 13. The compound of embodiment 10 or embodiment 12, wherein L1 and L2 are 2,2,3,3,4,4,4-heptafluoro-1-butoxide, 1,1,1,3,3,3-hexafluoro-2-propoxide, 2,2,2-trifluoroethoxide, or a combination thereof.

[0116] Aspect 14. A compound of the formula: 11. The compound of embodiment 10, having TIFF2025528932000026.tif63170.

[0117] Aspect 15. A compound according to aspect 10 or aspect 12, wherein L1 and L2 are 2,2,2-trifluoroethoxide.

[0118] Aspect 16. A compound of the formula: TIFF2025528932000027.tif53170 (wherein M is Ti, Zr, or Hf; L1 is C1 to C15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, or F; L2 is C1-C 15 Alkyl, C2-C 15 Amides, C1-C 15 Alkoxides, C1-C 15 Carboxylate, C5-C 15 Amidinates, C5-C 15 Guanidinate, C5-C 15 β-diketonates, C5-C 15 β-ketoiminate, C5-C 15 β-diketiminate, C1-C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, F, Cl, Br, I, or H; X is each independently C or Si; R1 to R5 are each independently C1 to C 15 Alkyl, C1-C 15 fluoroalkyl, or H).

[0119] Embodiment 17. A compound according to embodiment 16, wherein X is C, R1-R4 are H, and R5 is methyl.

[0120] Embodiment 18. A compound according to embodiment 16 or embodiment 17, wherein L1 and L2 are bis(2,2,2-trifluoroethyl)amide.

[0121] Embodiment 19. The compound of embodiment 16 or embodiment 17, wherein L1 and L2 are 2,2,3,3,4,4,4-heptafluoro-1-butoxide, 1,1,1,3,3,3-hexafluoro-2-propoxide, 2,2,2-trifluoroethoxide, or a combination thereof.

[0122] Embodiment 20. A compound according to embodiment 16 or embodiment 17, wherein L1 and L2 are trifluoroacetates.

[0123] Aspect 21. A compound of the formula: TIFF2025528932000028.tif48170 (wherein M is Ti, Zr, or Hf; L1 is C1 to C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, or F; L2 is C1-C 15 Alkyl, C2-C 15 Amides, C1-C 15 Alkoxides, C1-C 15 Carboxylate, C5-C 15 Amidinates, C5-C 15 Guanidinate, C5-C 15 β-diketonates, C5-C 15 β-ketoiminate, C5-C 15 β-diketiminate, C1-C 15 Fluoroalkyl, C1-C containing at least one fluoro group 15 Alkoxides, C2-C containing at least one fluoro group 15 Amides, C2-C containing at least one fluoro group 15 carboxylate, F, Cl, Br, I, or H; X is each independently C or Si; R1 to R4 are each independently C1 to C 15 Alkyl, C1-C 15 fluoroalkyl, or H).

[0124] Aspect 22. A compound according to aspect 21, wherein X is C, R1-R3 are H, and R4 is methyl.

[0125] Aspect 23. A compound according to aspect 21 or aspect 22, wherein L1 and L2 are bis(2,2,2-trifluoroethyl)amide.

[0126] Embodiment 24. A compound according to embodiment 21 or embodiment 22, wherein L1 and L2 are trifluoroacetates.

[0127] Embodiment 25. The compound of embodiment 21 or embodiment 22, wherein L1 and L2 are 2,2,3,3,4,4,4-heptafluoro-1-butoxide, 1,1,1,3,3,3-hexafluoro-2-propoxide, 2,2,2-trifluoroethoxide, or a combination thereof.

[0128] It is to be understood that changes may be made in details, particularly with respect to the construction materials used and the shape, size and arrangement of the parts, without departing from the scope of the present disclosure. The specification and described embodiments are examples, with the true scope and spirit of the present disclosure being indicated by the appended claims.

Claims

1. The following formula: (In the formula, M is Ti, Zr, or Hf; L １ is C １ ~C １５ Fluoroalkyl, C containing at least one fluoro group １ ~C １５ Alkoxides, C containing at least one fluoro group ２ ~C １５ Amide, C containing at least one fluoro group ２ ~C １５ carboxylate, or F; L ２ ~L ４ are each independently C １ ~C １５ Alkyl, C ２ ~C １５ Amide, C １ ~C １５ Alkoxide, C １ ~C １５ Carboxylate, C ５ ~C １５ Amidinate, C ５ ~C １５ Guanidinate, C ５ ~C １５ β-diketonate, C ５ ~C １５ β-ketoiminate, C ５ ~C １５ β-diketiminate, C １ ~C １５ Fluoroalkyl, C containing at least one fluoro group １ ~C １５ Alkoxides, C containing at least one fluoro group ２ ~C １５ Amide, C containing at least one fluoro group ２ ~C １５ carboxylate, F, Cl, Br, I, or H) A compound comprising:

2. The following formula:

2. The compound of claim 1 having the formula:

3. L １ ~L ４ is each independently 1,1,1,3,3,3-hexafluoro-2-propoxide, 2,2,3,3,4,4,4-heptafluoro-1-butoxide, or 2,2,2-trifluoroethoxide.

4. L １ ~L ４ The compound of claim 1 , wherein is trifluoroacetate.

5. The following formula: (In the formula, M is Ti, Zr, or Hf; L １ is C １ ~C １５ Fluoroalkyl, C containing at least one fluoro group ２ ~C １５ Amide, C containing at least one fluoro group ２ ~C １５ carboxylate, or F; L ２ and L ３ are each independently C １ ~C １５ Alkyl, C ２ ~C １５ Amide, C １ ~C １５ Alkoxide, C １ ~C １５ Carboxylate, C ５ ~C １５ Amidinate, C ５ ~C １５ Guanidinate, C ５ ~C １５ β-diketonate, C ５ ~C １５ β-ketoiminate, C ５ ~C １５ β-diketiminate, C １ ~C １５ Fluoroalkyl, C containing at least one fluoro group １ ~C １５ Alkoxides, C containing at least one fluoro group ２ ~C １５ Amide, C containing at least one fluoro group ２ ~C １５ carboxylate, F, Cl, Br, I, or H; R １ ~R ５ are each independently C １ ~C １５ Alkyl, C １ ~C １５ Ether, C ２ ~C １５ Amine, C １ ~C １５ Fluoroether, C １ ~C １５ fluoroalkyl, OH, F, Cl, Br, I, or H) A compound comprising:

6. The following formula:

6. The compound of claim 5 having the formula:

7. R １ ~R ５ The compound of claim 5 , wherein is H.

8. L １ ~L ３ The compound according to claim 5 or 6, wherein is 1,1,1,3,3,3-hexafluoro-2-propoxide, 2,2,3,3,4,4,4-heptafluoro-1-butoxide, or 2,2,2-trifluoroethoxide.

9. L １ ~L ３ The compound of claim 5 , wherein is trifluoroacetate.

10. The following formula: (In the formula, M is Ti, Zr, or Hf; L １ is C １ ~C １５ Fluoroalkyl, C containing at least one fluoro group １ ~C １５ Alkoxides, C containing at least one fluoro group ２ ~C １５ Amide, C containing at least one fluoro group ２ ~C １５ carboxylate, or F; L ２ is C １ ~C １５ Alkyl, C ２ ~C １５ Amide, C １ ~C １５ Alkoxide, C １ ~C １５ Carboxylate, C ５ ~C １５ Amidinate, C ５ ~C １５ Guanidinate, C ５ ~C １５ β-diketonate, C ５ ~C １５ β-ketoiminate, C ５ ~C １５ β-diketiminate, C １ ~C １５ Fluoroalkyl, C containing at least one fluoro group １ ~C １５ Alkoxides, C containing at least one fluoro group ２ ~C １５ Amide, C containing at least one fluoro group ２ ~C １５ carboxylate, F, Cl, Br, I, or H; R １ ~R １０ are each independently C １ ~C １５ Alkyl, C １ ~C １５ Ether, C ２ ~C １５ Amine, C １ ~C １５ Fluoroether, C １ ~C １５ fluoroalkyl, OH, F, Cl, Br, I, or H) A compound comprising:

11. The following formula:

11. The compound of claim 10, having the formula:

12. R １ ~R １０ The compound of claim 10, wherein is H.

13. L １ and L ２ The compound of claim 10 or claim 12, wherein is 2,2,3,3,4,4,4-heptafluoro-1-butoxide, 1,1,1,3,3,3-hexafluoro-2-propoxide, 2,2,2-trifluoroethoxide, or a combination thereof.

14. The following formula:

11. The compound of claim 10, having the formula:

15. L １ and L ２ The compound according to claim 10 or claim 12, wherein is 2,2,2-trifluoroethoxide.

Images