Apparatus and method for adjusting a light source after an idle period

Abstract

A method and apparatus are provided for optimizing cold start adjustments for a laser having one or more chambers. The method and apparatus invoke a cold start adjustment procedure when restarting a laser having one or more chambers after an idle period. One or more of various parameters, such as chamber age and the duration of the idle period preceding restarting the laser, can be used to determine whether or what type of cold start adjustment should be performed.

Description

[Technical Field]

[0001] (CROSS-REFERENCE TO RELATED APPLICATIONS)

[0001] This application claims priority to U.S. Application No. 63 / 397,046, filed August 11, 2022, which is incorporated herein by reference in its entirety.

[0002]

[0002] The present disclosure relates to a control device and method for a light source, such as a deep ultraviolet light source. [Background technology]

[0003] Photolithography is a process for patterning semiconductor circuits onto a substrate, such as a silicon wafer. A light source generates deep ultraviolet (DUV) light that is used to expose photoresist on the wafer. DUV light can include wavelengths from about 100 nanometers (nm) to about 400 nm, for example. The light source is a laser source (e.g., an excimer laser), and the DUV light is often a pulsed laser beam. The DUV light from the light source interacts with projection optics, which project the beam through a mask onto photoresist on the silicon wafer. In this way, the layers of the chip design are patterned on the photoresist. The photoresist and wafer are then etched and cleaned, and the photolithography process is then repeated as necessary. Summary of the Invention

[0004] The following presents a simplified summary of one or more embodiments in order to provide a basic understanding of the embodiments. This summary is not an extensive overview of all contemplated embodiments. It is not intended to identify any element of the embodiments as key or critical elements or to delineate the scope of any or all embodiments. Its sole purpose is to present some concepts of one or more embodiments in a simplified form as a prelude to the more detailed description that is presented later.

[0005]

[0005] According to one aspect of an embodiment, a method is disclosed for determining whether to perform a cold start adjustment when restarting a laser after a most recent idle period, the laser having a laser chamber, the method comprising: determining an idle duration trigger threshold prior to the most recent idle period based at least in part on a number of shots in the laser chamber; and determining whether to perform a cold start adjustment after the most recent idle period based at least in part on whether the duration of the most recent idle period exceeds the idle duration trigger threshold.

[0006] Determining the idle duration trigger threshold based at least in part on the number of shots can comprise determining the idle duration trigger threshold based at least in part on the number of shots and the measured energy of the beam emitted by the laser after a previous idle period. The cold start adjustment can comprise firing a predetermined number of inoperable pulses.

[0007] According to another aspect of an embodiment, a method is disclosed for determining whether to perform a cold start adjustment when restarting a laser after a most recent idle period, the laser having a laser chamber, the method comprising: making a chamber age determination of whether the chamber has a shot count less than a first predetermined number of shots; and setting an idle duration trigger threshold to a default idle duration trigger threshold if the chamber has a shot count less than the first predetermined number of shots. If the chamber age determination is negative, a beam energy determination is made by recording the duration of the previous idle period and evaluating the energy of a laser beam exiting the laser after the cold start from the previous idle period; and setting the idle duration trigger threshold based at least in part on the duration and beam energy of the previous idle period if the beam energy exceeds a threshold amount. If the beam energy determination is negative, a shot count determination is made based on whether the number of shots in the chamber exceeds a predetermined trigger shot count threshold, and if the idle period exceeds a scheduled adjustable idle duration trigger threshold, set the idle duration trigger threshold equal to the adjustable idle duration trigger threshold, and determine to perform a cold start adjustment based at least in part on whether the duration of the most recent idle period exceeds the idle duration trigger threshold.

[0008]

[0008] Making the beam energy determination may further comprise modifying an adjustable idle duration trigger threshold. The cold start adjustment may comprise firing a predetermined number of disable pulses.

[0009] According to another aspect of an embodiment, a method for determining whether to perform a cold start adjustment when restarting a laser after a most recent idle period is disclosed, wherein the laser has a laser chamber, the method comprising: making a first determination whether the chamber's age is less than a predetermined age and whether the duration of the most recent idle period exceeds a default idle duration trigger threshold, and performing the cold start adjustment if the first determination is affirmative. If the first determination is negative, the method includes making a second determination that the duration of the most recent idle period exceeds a current idle duration trigger threshold and that the energy of a laser beam exiting the laser during the previous idle period is less than a beam energy trigger threshold, and performing the cold start adjustment if the second determination is affirmative. If the second determination is negative, the method includes making a third determination whether the chamber's shot count exceeds a shot count trigger threshold and whether the duration of the most recent idle period exceeds an adjustable idle duration trigger threshold, and performing the cold start adjustment if the third determination is affirmative.

[0010]

[0010] Determining to perform a cold start adjustment when the duration of the most recent idle period exceeds an idle duration trigger threshold and the energy of the laser beam leaving the laser during the previous idle period is less than a beam energy trigger threshold may further comprise setting the idle duration trigger threshold equal to the duration of the most recent idle period.

[0011]

[0011] Determining to perform a cold start adjustment when the duration of the most recent idle period exceeds an idle duration trigger threshold and the energy of the laser beam leaving the laser during the previous idle period is less than a beam energy trigger threshold may further comprise modifying an adjustable idle duration trigger threshold.

[0012]

[0012] The cold start adjustment may comprise firing a predetermined number of disable pulses.

[0013]

[0013] According to another aspect of an embodiment, a system is disclosed for determining whether to perform a cold start adjustment when restarting a laser after an idle period, the laser having a laser chamber, the system comprising: a shot count monitor adapted to monitor a number of shots fired by the laser chamber; an idle period duration monitor adapted to monitor and record the duration of each idle period when the laser is idle; a beam energy monitor adapted to monitor the energy of a beam of laser radiation emitted by the laser; and a controller responsively connected to the shot count monitor, the idle period duration monitor, and the beam energy monitor and adapted to determine whether to perform a cold start adjustment based on at least one of whether the shot count is below a first predetermined number of shots indicating the chamber is new or has been replaced, whether the shot count is above a second predetermined number of shots, the duration of the period the laser was most recently idle, and the energy of the beam of laser radiation emitted by the laser after a previous idle period.

[0014]

[0014] The cold start adjustment may comprise firing a predetermined number of disable pulses.

[0015]

[0015] The controller may be adapted to determine whether to perform a cold start adjustment by comparing the idle period duration with an idle duration trigger threshold, the idle duration trigger threshold being based on at least one of whether the shot count is below a first predetermined shot count indicating the chamber is new or has been replaced, whether the shot count is above a second predetermined shot count, the duration of the period the laser was most recently idle, and the energy of the beam of laser radiation emitted by the laser after the previous idle period.

[0016]

[0016] The controller may be adapted to determine the idle duration trigger threshold by making a chamber age determination of whether the number of shots in the chamber is less than a first predetermined number of shots, and setting the idle duration trigger threshold to a default idle duration trigger threshold if the number of shots in the chamber is less than the first predetermined number of shots.

[0017]

[0017] The controller may be adapted to determine the idle duration trigger threshold by recording the duration of the previous idle period and making a beam energy determination by evaluating the energy of the laser beam exiting the laser after a cold start from the previous idle period, and if the beam energy exceeds a threshold amount, setting the idle duration trigger threshold based at least in part on the duration and beam energy of the previous idle period.

[0018]

[0018] The controller may be adapted to determine the idle duration trigger threshold by making a shot count determination based on whether the shot count in the chamber exceeds a predetermined trigger shot count threshold, and if the idle period exceeds a scheduled adjustable idle duration trigger threshold, setting the idle duration trigger threshold equal to the adjustable idle duration trigger threshold.

[0019]

[0019] Further features and exemplary aspects of the embodiments, as well as the structure and operation of various embodiments, are described in detail below with reference to the accompanying drawings. It should be noted that the scope of all possible embodiments is not limited to the specific embodiments described herein. Such specific embodiments are presented herein for illustrative purposes only. Additional embodiments will be apparent to those skilled in the art based on the teachings contained herein. [Brief explanation of the drawings]

[0020]

[0020] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments and, together with the specification, serve to explain the principles of the embodiments and to enable those skilled in the art to make and use the embodiments.

[0021] [Figures 1A-1C]

[0021] FIG. 1 is a block diagram of a light source at three different times. [Figures 2A-2C]

[0022] FIG. 10 is a block diagram of another light source at three different times. [Figure 2D]

[0023] FIG. 10 is a timing diagram for controlling cold start regulation according to an aspect of an embodiment. [Figure 3A]

[0024] 1 is a flowchart of a process for controlling cold start regulation in accordance with an aspect of an embodiment. [Figure 3B]

[0025] 3B is a flowchart of a portion of a process for controlling the cold start adjustment of FIG. 3A in accordance with an aspect of an embodiment. [Figure 3C]

[0026] 3B is a flowchart of another portion of a process for controlling the cold start adjustment of FIG. 3A in accordance with an aspect of an embodiment. [Figure 3D]

[0027] 3B is a flowchart of another portion of a process for controlling the cold start adjustment of FIG. 3A in accordance with an aspect of an embodiment. [Figure 4]

[0028] FIG. 1 is a functional block diagram of a system for controlling cold start regulation in accordance with an aspect of an embodiment. [Figure 5]

[0029] FIG. 1 is a block diagram of a photolithography system. [Figure 6A]

[0030] FIG. 1 is a block diagram of an optical lithography system. [Figure 6B]

[0031] FIG. 6B is a block diagram of projection optics for the optical lithography system of FIG. 6A. DETAILED DESCRIPTION OF THE INVENTION

[0022]

[0032] 1A through 1C are block diagrams of light source 100 at different times. FIG. 1A shows light source 100 at time t1. FIG. 1B shows light source 100 at time t2. FIG. 1C shows light source 100 at time t3. Time t1 occurs during a first time period, time t2 occurs during a second time period, and time t3 occurs during a third time period. The first time period occurs before the second time period, and the second time period occurs before the third time period. Three time periods are shown for illustrative purposes. However, light source 100 may operate for more than three time periods.

[0023]

[0033] The light source 100 includes a light-generating device 110 and a control system 150 that estimates characteristics of an excitation signal 109. The excitation signal 109 may be generated by the control system 150 or by a separate device (e.g., a voltage source or a current source) controlled by the control system 150. The excitation signal 109 is any type of signal sufficient to cause the light-generating device 110 to generate a light beam 105. For example, the excitation signal 109 may be a signal applied to an excitation mechanism within the light-generating device 110 (e.g., excitation mechanism 211 in FIGS. 2A-2C or electrodes 611A and 611b in FIG. 5). The light beam 105 may be, for example, a pulsed laser beam or a continuous wave laser beam. The light-generating device 110 may be a deep UV optical system that emits a pulsed light beam in the deep UV range. In some embodiments, the light-generating device 110 emits a burst of pulses during each active period. The burst of pulses may include hundreds or thousands of pulses of light.

[0024]

[0034] The excitation signal 109 is applied to the light-generating device 110 or a component of the light-generating device 110 when the light-generating device 110 is in an active state. The light-generating device 110 generates the light beam 105 during the active state. The light-generating device 110 also has an inactive or idle state. During the inactive or idle state, the excitation signal 109 is not applied to the light-generating device 110 or its components, and the light-generating device 110 does not generate the light beam 105. During the idle or inactive state, the light-generating device 110 may, for example, be depowered or turned off, or may be powered but not generating any light. In the example of FIGS. 1A-1C , the light-generating device 110 is in an active state during the first and third time periods and in an idle state during the second time period. The time of the second time period is also referred to as the idle time, and the second time period is also referred to as the idle period.

[0025]

[0035] The control system 150 may estimate a characteristic of the excitation signal 109 to apply to the light-generating device 110 during the third time period based on the duration of the idle period and the value of the characteristic of the excitation signal 109 applied to the light-generating device 110 during the previous active period (e.g., the first time period). This characteristic may be, for example, the energy of the voltage and / or current signal provided to the excitation mechanism within the light-generating device 110.

[0026]

[0036] By determining the characteristic of the excitation signal 109 using the duration of the idle period and the value of the characteristic during the first period, the control system 150 improves the performance of the light source 100. For example, some prior art techniques determine the excitation signal based solely on the duration of the idle time. These prior art techniques, for example, use a predetermined excitation signal if the duration of the idle time is greater than a predetermined threshold and / or cause the light-generating device 110 to enter a cold-start adjustment mode if the idle time is greater than a predetermined idle time threshold.

[0027]

[0037] Alternatively, the control system 150 may implement techniques that estimate updated values ​​for the excitation signal 109 by taking into account previous values ​​of the characteristics of the excitation signal 109. This approach, when used by the control system 150, results in a more accurate determination of the characteristics of the excitation signal 109 applied during the third time period and improves the use of the cold start tuning procedure. For example, the control system 150 may reduce or eliminate unnecessary implementations of the cold start tuning procedure, also referred to as the cold start tuning procedure, while also helping to ensure that the cold start tuning procedure is invoked appropriately, i.e., only when necessary.

[0028]

[0038] The control system 150 may also determine adaptive parameters that take into account changes in one or more characteristics of the light-generating device 110 over time. For example, the energy efficiency of the light-generating device 110 may change over time. Energy efficiency is the relationship between the amount of energy provided to the light-generating device 110 to generate light having a certain amount of energy. For example, in an embodiment in which the excitation signal 109 is a voltage signal applied to electrodes in the light-generating device 110, as the energy efficiency of the light-generating device 110 decreases, a greater amount of voltage is required to generate a light beam 105 having the same amount of energy as before. The energy efficiency of the light-generating device 110 may also decrease during idle times. As described in more detail below, the adaptive parameters may estimate and track changes in the energy efficiency of the light-generating device 110. By taking into account the changing characteristics of the light-generating device 110 over time, the control system 150 improves the accuracy of its estimation of the characteristics of the excitation signal 109.

[0029]

[0039] Referring to Figures 2A-2C, a block diagram of light source 200 is shown. Light source 200 is one embodiment of light source 100. Each of Figures 2A-2C shows light source 200 at a different time. Light source 200 is shown in an active state in Figures 2A and 2C and in an idle state in Figure 2B. Light source 200 includes a light-generating device 210 and a control system 250. Light-generating device 210 includes a pumping mechanism 211 and a gain medium 212.

[0030]

[0040] The light-generating device 210 generates the light beam 205 in an active state. An excitation signal 209 is applied to the light-generating device 210 to excite the excitation mechanism 211 when the light-generating device 210 is in the active state (FIGS. 2A and 2C). The light-generating device 210 also has an inactive or idle state (FIG. 2B). When the light-generating device 210 is in the idle state, the excitation signal 209 is not applied to the light-generating device 210 and does not excite the excitation mechanism 211. In the example of FIGS. 2A-2C, the light source 200 is in an active state during a first time period (including time t1) and a third time period (including time t3). The light source 200 is in an idle state during a second time period (including time t2). The duration of the second time period is also referred to as the idle time. Three time periods are shown for illustrative purposes. However, the light source 200 may operate for more than three time periods.

[0031]

[0041] Pump mechanism 211 pumps gain medium 212 in response to pump signal 209. Gain medium 212 is any medium suitable for producing an optical beam of the wavelength, energy, and bandwidth required for the application. For example, gain medium 212 can be a gas, crystal, glass, semiconductor, or liquid.

[0032]

[0042] Excitation mechanism 211 is any mechanism capable of exciting gain medium 212. For example, excitation mechanism 211 may be a plurality of electrodes that excite a gaseous gain medium. Excitation signal 209 may be, for example, an electrical signal (e.g., a voltage signal) or a command signal that causes an additional element (e.g., a voltage source or a current source) to generate an electrical signal to be provided to excitation mechanism 211. Excitation signal 209 may be a time-varying direct current (DC) electrical signal or an alternating current (AC) electrical signal, such as a sinusoidal voltage signal or a square wave voltage signal, or a combination thereof. In these examples, the characteristic of excitation signal 209 may be a maximum amplitude of the time-varying signal, an average amplitude of the time-varying signal, a minimum amplitude of the time-varying signal, a frequency of the time-varying signal, a duty cycle of the time-varying signal, and / or any other characteristic related to the time-varying signal.

[0033]

[0043] The control system 250 estimates a characteristic of the excitation signal 209. This characteristic may be, for example, the amplitude, frequency, and / or duty cycle of the voltage and / or current signal provided to the excitation mechanism 211 in the light-generating device 210. The control system 250 estimates the characteristic of the excitation signal 209 based on a previous or previous idle time and previous or previous values ​​of the characteristic of the excitation signal 209. To estimate the characteristic of the excitation signal 209, the control system 250 may implement a process such as the process described with respect to FIGS. 3A through 3D. Additionally, the control system 250 may be used with any type of light source. For example, the control system 250 may be used with a photolithography system 600 (FIG. 5).

[0034]

[0044] Control system 250 includes an electronic processing module 251, a computer-readable memory module 252, and an I / O interface 253. Electronic processing module 251 includes one or more processors, such as general-purpose or special-purpose microprocessors, or any one or more processors of any type of digital computer. Typically, an electronic processor receives instructions and data from a read-only memory, a random-access memory (RAM), or both. The one or more electronic processors of electronic processing module 251 execute instructions and access data stored in memory module 252. The one or more electronic processors can also write data to memory module 252.

[0035]

[0045] The memory module 252 may be a volatile memory, such as RAM, or a nonvolatile memory. In some embodiments, the memory module 252 includes both nonvolatile and volatile portions or components. The memory module 252 may store data and information used in the operation of the control system 250. For example, the memory module 252 may store information related to idle periods and information related to values ​​of characteristics of the excitation signal 209 applied to the light-generating device 210 during one or more periods that occurred before the most recent idle period. The memory module 252 may also store one or more values ​​associated with the excitation signal 209 applied during an active period that occurred immediately before the most recent idle period. For example, the excitation signal 209 may be a voltage signal or a signal specifying the voltage to be generated by a voltage source. In this example, the memory module 252 may store the average, minimum, and maximum values ​​of the voltage signal during the most recent active period. The memory module 252 may also store information received from the light source 200 and / or the light-generating device 210.

[0036]

[0046] I / O interface 253 is any type of interface that allows control system 250 to exchange data and signals with an operator, light-generating device 210, and / or an automated process running on another electronic device. For example, in embodiments in which rules or instructions stored in memory module 252 may be edited, the editing may occur through I / O interface 253. In another example, I / O interface 253 receives data from light-generating device 210 and / or from hardware and / or software subsystems of light-generating device 210. For example, light-generating device 210 may provide control system 250 with the duration of idle time and other information about light-generating device 210 through I / O interface 253. I / O interface 253 may include one or more of a visual display device, a keyboard, a communication interface, such as a parallel port, a universal serial bus (USB) connection, and / or any type of network interface, e.g., Ethernet. The I / O interface 253 may also enable communication without physical contact, for example through an IEEE 802.11, Bluetooth, or near field communication (NFC) connection.

[0037]

[0047] The control system 250 is coupled to the light-generating device 210 through a data connection 254. The data connection 254 may be a physical cable or other physical data conduit (such as a cable that supports the transmission of data based on IEEE 802.3), a wireless data connection (such as a data connection that provides data via IEEE 802.11 or Bluetooth), or a combination of wired and wireless data connections. Data provided via the data connection may be configured using any type of protocol or format. The data connection 254 is connected to the light-generating device 210 at a respective communication interface (not shown). The communication interface may be any type of interface capable of sending and receiving data. For example, the data interface may be an Ethernet interface, a serial port, a parallel port, or a USB connection. In some embodiments, the data interface enables data communication via a wireless data connection. For example, the data interface may be an IEEE 811.11 transceiver, Bluetooth, or NFC connection. The control system 250 may be connected to systems and / or components within the light-generating device 210. For example, the control system 250 may be connected to the excitation mechanism 211.

[0038]

[0048] 2A-2C, control system 250 is shown as being separate from light-generating device 210 and connected via data connection 254. However, in some embodiments, control system 250 is implemented as part of light-generating device 210, such that light-generating device 210 and control system 250 are part of a single integrated package (e.g., enclosed within the same housing). In these embodiments, data connection 254 may be a data path that allows communication between software modules, one of which implements aspects of control system 250 and other of which implement other functionality of light-generating device 210.

[0039]

[0049] The control system for the laser may include a computer that interfaces with an overall control system computer. In one control paradigm, the overall control system computer obtains data from the laser computer and then reconfigures the operating parameters of the laser. The overall control computer then writes the reconfigured operating parameters to the laser computer. This provides a configurable control paradigm.

[0040]

[0050] A more pronounced effect in "young" chambers (i.e., chambers that have produced fewer than a given number of pulses) is a "cold start event," whereby gain generation is significantly reduced after an idle period. The magnitude of the effect depends on many things, including but not limited to, the details of the chamber's construction and the number of pulses to which the chamber is exposed. The duration of the idle period can be as short as one minute. In other words, during such idle periods, when the laser is dark and not firing, the laser enters a state where its gain loss becomes significant during the initial pulses of the next burst.

[0041]

[0051] Thus, restarting a laser after being idle can lead to a "cold start event" in which the laser gain is at a reduced level during the initial pulses of the next burst. In other words, immediately after an idle period, the laser may produce a beam that is significantly weaker for a given excitation voltage than the laser would produce for the same excitation voltage when the laser is achieving stable operating conditions. This reduction in beam energy can reduce the yield of a manufacturing process that uses the beam. As previously mentioned, the likelihood of a cold start event, i.e., the onset of cold start instability after a laser has been idled, is a function, among other things, of the age of the laser chamber, typically in terms of shot count, i.e., the number of shots (pulses) fired by the chamber.

[0042]

[0052] As mentioned above, a laser may have one or more laser chambers. In the following description, a master oscillator (MO) chamber will be used as an example, but it will be understood that this description also applies to other types of chambers that may be present, such as a power amplifier (PA) chamber. Newer chambers (e.g., having fewer than about 5 billion pulses) tend to be more susceptible to cold start events than more mature chambers (e.g., having more than about 10 billion pulses). However, this is not an absolute rule, and different lasers may exhibit different age-dependent cold start behavior. For example, some young lasers may not be prone to laser cold start events. For other lasers, the phenomenon may not manifest until the laser has been idle for significantly longer than one minute, e.g., five or ten minutes, or even never. Thus, the probability of experiencing a cold start event varies from laser to laser.

[0043]

[0053] For newer chambers with lower shot counts, one control method that can be used is to measure the duration of any idle period and, if the measured duration of that idle period exceeds a predetermined threshold (e.g., one minute), invoke a cold-start adjustment procedure in which the laser is caused to fire a predetermined number of inoperative shots. The term "inoperative" is used herein to refer to shots or pulses that are not used for device fabrication, e.g., not used to pattern a substrate, but are deflected or blocked before they can reach the substrate. Thus, one way to address cold-start instability is to determine when the chamber is new (low shot count) or has been replaced, which typically involves resetting the chamber's shot count.

[0044]

[0054] The control method as just described establishes a trade-off between machine availability (unavailability when firing non-operational shots) and machine reliability (ability to operate with an acceptably low likelihood of error impairing production).

[0045]

[0055] Generally, this trade-off solution leans towards reliability, but it would be beneficial to be able to achieve greater availability without unduly compromising reliability.

[0046]

[0056] In the method just described, the cold start trim trigger is always static, but the cold start effect itself is not. The magnitude of the cold start effect varies dramatically from part to part and over the life of a part, especially at idle times as short as one minute. Therefore, cold start trim is performed regardless of the need for its protection. This provides the lowest amount of risk for cold start-related errors, while also eliminating a significant amount of availability for some tools. Each instance of cold start trim protection can take on the order of 10 seconds. Because the cold start effect weakens with chamber age, and because the number of tools experiencing critical cold start issues at short idle times is relatively small, a significant portion of this availability can be returned to the user.

[0047]

[0057] That is, a blanket approach to avoiding laser cold start events can result in significant unnecessary laser unavailability, especially when considered as a cumulative loss of availability over an extended period of time, e.g., a year. Thus, for some applications, it may be advantageous to implement a control method that involves fewer trade-offs by adapting the decision to perform a cold start procedure to the specific situation. According to one aspect of an embodiment, an adaptive control method is implemented that adjusts the idle duration trigger based on the observed needs of the system. This is accomplished by checking multiple triggers. The triggers may be checked simultaneously or sequentially. In the following example, three triggers are checked in descending priority order. Each trigger is the first step of a conditional execution branch. In other words, execution along a given branch is conditioned on one or more condition parameters and the execution of a higher priority branch.

[0048]

[0058] For example, in one branch, it may be determined whether the chamber is new, i.e., whether it has not been used before, such as when the laser is new or the chamber has been swapped out with a replacement chamber. If so, the logic may only need to determine whether the duration of the idle period exceeds a predetermined trigger duration, based on the assumption that the new chamber is likely to exhibit a cold start event. Note that the determination of whether the chamber is new may be based on the number of active shots associated with that chamber. One function performed by one or both of the computers is to track the number of shots for a given chamber. This shot count is typically reset when the chamber is replaced.

[0049]

[0059] In the second branch of the control logic, if an idle event is detected, a recording of the idle period duration is performed. The magnitude of the cold start laser energy output is then evaluated. It is then determined whether (1) the magnitude of the cold start laser energy output is less than a predetermined trigger magnitude, and (2) whether the duration of the idle period exceeds a predetermined idle trigger amount. If both conditions are true, the idle duration trigger is reset to the recorded idle period duration, and the scheduled trigger adjustment is modified. However, if it is determined that the magnitude of the cold start laser energy output is not less than the given trigger and the duration of the idle period does not exceed the trigger duration, no parameters are changed except that the scheduled trigger adjustment may be adjusted.

[0050]

[0060] In another aspect of an embodiment, in a third branch of the process logic, when the chamber shot count exceeds a predetermined threshold and the idle trigger duration is less than the scheduled idle trigger adjustment, the idle duration trigger is set to the scheduled idle trigger adjustment.

[0051]

[0061] Note that in some embodiments, as described above, there is a possibility of interaction between the second branch of this process and the third branch of this process. The scheduled idle trigger adjustment can be changed in both the second branch of the process and the third branch of the process. This provides robustness and flexibility in the sense that if some external event makes an older chamber prone to a cold start event, the idle trigger adjustment can be reset and the chamber can be treated as if it were a younger chamber until it ceases to exhibit cold start events as if it were a younger chamber. According to one aspect of one embodiment, when a cold start event is clearly detected in the second branch, the second branch supersedes the third branch in the sense that the second branch can also adjust the scheduled adjustment to the idle duration threshold trigger to take into account data related to the detected cold start event.

[0052]

[0062] An aspect of one embodiment is that data on idle events occurring between instances is detected and stored for analysis. For each idle instance, the beam energy of the corresponding cold start behavior is characterized. If the beam energy is less than the trigger and the duration of the idle period is greater than the current value of the idle trigger, the idle trigger will be updated to this longer value. In this way, if the cold start effect is sufficiently small for a given idle time, the idle trigger will be pushed out accordingly. Scheduled adjustments to the idle trigger may also be updated, regardless of whether the idle trigger is updated by an idle event observation.

[0053]

[0063] The initial value of the scheduled idle trigger adjustment can be tuned empirically. However, if during idle event analysis it is found that there is a large cold-start effect in a particular idle event, the scheduled idle trigger adjustment can be adapted to compensate for that observed behavior. In this way, the pre-scheduled increase in the idle trigger can also take into account the actual cold-start risk detected in the system.

[0054]

[0064] The idle event data described above is used to determine parameters for cold start adjustment. One such parameter may be a "go / no-go" parameter, i.e., whether cold start adjustment should be performed at all. Another parameter may be, for example, the length of the cold start adjustment, i.e., whether to perform a complete cold start adjustment by firing a first number of inoperable shots, or whether to perform an incomplete cold start adjustment with fewer than the first number of inoperable shots.

[0055]

[0065] 2D is a timing diagram of a process for controlling cold start regulation according to an aspect of an embodiment. A first idle period 260 occurs when the laser output drops from active to idle. This first idle period has a duration T IDLE During a time interval A after the next burst begins, the idle trigger threshold level rises, for example, for a duration T IDLE , is determined based on the output laser energy immediately after the idle period 260 and the chamber age as determined by the number of shots. Then, in a subsequent idle period 270, the trigger threshold level determined in period A and the actual duration of the idle period 270, i.e., T IDLE A decision is made at time B whether to perform cold start adjustment for duration C based on (ACTUAL). Note that duration A may include zero or more additional idle periods.

[0056]

[0066] In other words, according to one aspect of an embodiment, the laser performs a cold start adjustment after a sufficiently long idle period based on the laser's configuration at the moment following the idle period. Then, asynchronously with the first idle period, i.e., some time later, the control system analyzes data related to the idle period and determines whether the laser's configuration, e.g., the idle duration trigger threshold, needs to be updated in the future. Thus, the decision to update the parameters that trigger the cold start adjustment typically occurs between the idle period used to determine whether the parameters need updating and the idle period to which the parameters are applied in determining whether to perform the cold start adjustment.

[0057]

[0067] In the description below, the following terms have the corresponding meanings:

[0058]

[0068] COUNT(SHOT) is the measured number of shots in the chamber.

[0059]

[0069] T IDLE (ACTUAL) is the actual measured duration of the idle period.

[0060]

[0070] T IDLE (DEFAULT) is the default idle trigger threshold, i.e., the default value for the duration of an idle period that, if exceeded, will trigger a cold start adjustment, if other parameters allow.

[0061]

[0071] T IDLE (TRIGGER) is the current trigger threshold duration of the idle period, i.e., the currently operable value of the idle period duration that, when exceeded, will trigger a cold start adjustment, if other parameters allow.

[0062]

[0072] CSA(ACTUAL) is the measured beam cold start amplitude, i.e., the energy of the beam being generated by the chamber.

[0063]

[0073] CSA(THRESHOLD) is the trigger threshold for evaluating CSA, i.e., the current value of beam energy that, if not equal to or exceeded, will trigger a cold start adjustment, if other parameters allow.

[0064]

[0074] SCHED.T IDLE (TRIGGER)ADJ. is T IDLE Scheduled (e.g., shot count-determined) adjustment to (TRIGGER), i.e., the value of the adjustment to the current trigger threshold duration of the scheduled idle period based on shot count unless specifically modified based, for example, on a determination that the shot count is not functionally indicative of the actual chamber age or condition.

[0065]

[0075] The duration of an idle period is the length of a continuous period during which the light-generating device is idle or inactive. The duration of an idle period may be related to the duration of a previously occurring idle period or may be the duration of the most recent idle period. For example, the duration of an idle period may be the duration of the second period that includes time t2 shown in FIG. 2B.

[0066]

[0076] The idle period duration may be stored in memory module 252. In these embodiments, control system 250 accesses the idle period duration value from memory module 252. The idle period duration value is not necessarily accessed from memory module 252. For example, in some embodiments, the idle period duration is provided by an operator through I / O interface 253. Also, the information related to the idle period duration may be a numeric value representing the idle period duration, or the information may take other forms. For example, the information related to the idle period duration may include a time when the idle period started and a time when the idle period ended. In these embodiments, control system 250 is configured to determine the idle period duration value based on the accessed information.

[0067]

[0077] 3A-3D are flowcharts of a process 300 for controlling cold-start adjustments. Process 300 may be performed by a control system associated with the light-generating device. For example, process 300 may be performed by control system 150 (FIG. 1) or control system 250 (FIGS. 2A-2C). Referring to FIGS. 2A-2C, process 300 may be implemented as a set of instructions (e.g., a computer program or computer software) stored in memory module 252 and executed by one or more electronic processors in electronic processing module 251.

[0068]

[0078] 3A-3D, an instance begins in step S10 in which it is determined whether a cold start adjustment should be performed. Execution then proceeds along a first branch BR1. In BR1 (FIG. 3B), it is determined in step S100 whether the chamber has been reset. In other words, it is determined in step S100 whether the chamber is new or has been replaced during a chamber swap-out. Typically, a field service engineer will set an indication that the chamber has been reset. If it is determined in step S100 that the chamber has been reset, then in step S110, T IDLE (TRIGGER) is the default value T IDLE The instance is then considered complete in step S120, and the determination of whether a cold start adjustment should be performed after the next idle period is determined based on whether the duration of the next idle period is T IDLE T reset to (DEFAULT) IDLE (TRIGGER). It will be appreciated that the determination of whether the chamber has been reset may be static for a period of time, or number of shots, after the reset has occurred.

[0069]

[0079] However, if branch BR1 determines that the chamber has not been reset, branch BR2 (FIG. 3C) is executed. In step S200, it is determined whether an idle event has occurred. If an idle event has occurred, the actual duration T of the idle event is determined. IDLE (ACTUAL) is recorded in step S210. The cold start amplitude CSA(ACTUAL) of the beam immediately after the idle event is then determined in step S220.

[0070]

[0080] In step S230, it is determined whether CSA(ACTUAL) is less than a predetermined CSA(THRESHOLD) trigger amount.IDLE (ACTUAL) is the idle trigger amount T IDLE If it is determined in step S230 that both of these conditions are met, then T IDLE (TRIGGER) is T IDLE (ACTUAL). At the same time, the scheduled idle trigger adjustment T IDLE (TRIGGER) is modified. The instance is then considered complete in step S260.

[0071]

[0081] However, if it is determined in step S230 that each of the conditions is not satisfied, then in step S250, the scheduled idle trigger adjustment T IDLE (TRIGGER) may be modified and the instance is considered complete in step S260. The determination of whether cold start adjustment should be performed for the next idle period is then made based on whether the duration of the next idle period is T IDLE T reset to (ACTUAL) IDLE This is based on whether the trigger is exceeded.

[0072]

[0082] Thus, branch BR2 is executed when the cold start amplitude indicates that a cold start adjustment should be performed for some idle duration greater than the idle trigger, where the beam amplitude is affected and at the same time the idle trigger is reset to the actual idle duration.

[0073]

[0083] Essentially, if execution of branch BR2 does not indicate the existence of a cold start condition at the idle trigger amount, branch BR3 (FIG. 3D) is executed. In step S300, it is determined whether the shot count exceeds a predetermined shot count trigger threshold. If the shot count exceeds the predetermined threshold, indicating that the chamber is a mature chamber and is unlikely to be in a cold start condition, then in step S310, the idle duration threshold trigger T IDLE(TRIGGER) is the scheduled idle trigger adjustment SCHED.T IDLE It is determined whether the value is less than (TRIGGER)ADJ. If so, T IDLE (TRIGGER) is SCHED.T IDLE (TRIGGER)ADJ. After that, the instance is considered complete and the system starts a new T IDLE (TRIGGER) will be used to determine the need to perform cold start adjustments.

[0074]

[0084] As can be seen from the above, the adjustable SCHED.T IDLE (TRIGGER)ADJ. is not necessarily a static value. For example, if the execution of branch BR2 is IDLE If the value of (TRIGGER) indicates that the actual chamber cold start behavior is out of sync, i.e., that cold start events occur more frequently than would be expected in older chambers, branch BR2 includes SCHED.T. IDLE The amount of adjustment will generally depend on the number of cold start events that are not expected from the assumed maturation chamber. The relatively few occurrences of such events will result in a SCHED.T. IDLE The occurrence of more such events will require a larger adjustment, while a smaller adjustment will require a smaller adjustment. Such deviations can occur, for example, if the shot count is not reset when a new chamber is swapped in.

[0075]

[0085] As already mentioned, the above description relates to determining whether a cold start adjustment should be performed. Methods and systems can also be configured to determine what type of cold start adjustment should be performed. For example, if the cold start adjustment involves firing a given number of inoperable shots, the number of inoperable shots may be adapted according to the parameters described above, such as the age of the chamber in terms of the number of shots and the beam energy. If the cold start adjustment involves other characteristics, such as the frequency and duty cycle of the signal used to fire the inoperable shots, those characteristics may be adapted as well. If the cold start adjustment involves measures other than or in addition to firing inoperable shots, those measures may be adapted as well.

[0076]

[0086] FIG. 4 is a functional block diagram of a system for controlling cold start adjustments according to an aspect of an embodiment. A controller 400, which may correspond to control system 150 (FIG. 1) or control system 250 (FIG. 2), is arranged to receive signals from a shot number monitor 420, an idle period duration monitor 430, and a beam energy monitor 440. The shot number monitor 420 is a pulse counter that counts the number of shots fired by the chamber, which indicates, for example, the age of the chamber, including whether the chamber was recently replaced. As mentioned above, the shot number monitor 420 is typically reset by a field service engineer after the chamber is replaced. The idle period duration monitor records the duration of an idle period, for example, an idle period during which the need for a cold start adjustment is being assessed. The beam energy monitor 440 measures the energy of the beam exiting the laser.

[0077]

[0087] Controller 400 receives signals from these monitors and indicators and processes them, for example, according to the method described above in connection with Figure 3. Controller 400 then generates an indication 450 of whether a cold start adjustment should be performed.

[0078]

[0088] Referring to FIG. 5, a block diagram of a photolithography system 600 is shown. A light source 610 generates a pulsed light beam 605, which is provided to a lithography exposure apparatus 669. The light source 610 may be, for example, an excimer light source that outputs the pulsed light beam 605, which may be a laser beam. As the pulsed light beam 605 enters the lithography exposure apparatus 669, it is guided through projection optics 675 and projected onto a wafer 670 to form one or more microelectronic features in a photoresist on the wafer 670. The photolithography system 600 also includes a control system 250, which, in the example of FIG. 5, is connected to components of the light source 610 and the lithography exposure apparatus 669. In this example, the control system 250 may receive data or other information regarding the pulsed light beam 605 from the lithography exposure apparatus 669 and / or send commands to the lithography exposure apparatus 669. In other examples, the control system 250 is connected only to the light source 610 .

[0079]

[0089] 5, light source 610 is a two-stage laser system and includes a master oscillator 631 that provides a seed light beam 624 to a power amplifier 630. Master oscillator 631 and power amplifier 630 may be considered subsystems of light source 610, or may be considered a system that is part of light source 610. Power amplifier 630 receives seed light beam 624 from master oscillator 631 and amplifies seed light beam 624 to generate light beam 605 for use in lithography exposure tool 669. For example, master oscillator 631 may emit a pulsed seed light beam having a seed pulse energy of approximately 1 millijoule (mJ) per pulse, and these seed pulses may be amplified by power amplifier 630 to approximately 10-15 mJ.

[0080]

[0090] Master oscillator 631 includes a discharge chamber 614 having two elongated electrodes 611A, a gain medium 612 that is a gas mixture, and a blower for circulating the gas between electrodes 611A within discharge chamber 614. A resonator is formed between a line narrowing module 616 on one side of discharge chamber 614 and an output coupler 618 on a second side of discharge chamber 614. Line narrowing module 616 may include a diffractive optical element, such as a grating, to fine-tune the spectral output of discharge chamber 614.

[0081]

[0091] Master oscillator 631 also includes a line center analysis module 620 that receives the output light beam from output coupler 618 and beam combining optics 622 that optionally modify the size and shape of the output light beam to form seed light beam 624. Line center analysis module 620 is a measurement system that can be used to measure or monitor the wavelength of seed light beam 624. Line center analysis module 620 may be located elsewhere within light source 610 or at the output of light source 610.

[0082]

[0092] The gas mixture used in the discharge chamber 614 can be any gas suitable for producing a light beam of the wavelength and bandwidth required for the application. In the case of an excimer light source, the gas mixture may contain a noble gas, such as argon or krypton, a halogen, such as fluorine or chlorine, and a small amount of xenon, excluding helium and / or neon, as a buffer gas. Specific examples of gas mixtures include argon fluoride (ArF), which emits light at a wavelength of approximately 193 nm, krypton fluoride (KrF), which emits light at a wavelength of approximately 248 nm, or xenon chloride (XeCl), which emits light at a wavelength of approximately 351 nm. The excimer gain medium (gas mixture) is pumped with short (e.g., nanosecond) current pulses in a high-voltage discharge by applying a voltage 609 to the elongated electrode 611A.

[0083]

[0093] The power amplifier 630 includes beam combining optics 632 that receive a seed light beam 624 from a master oscillator 631 and direct the light beam through a discharge chamber 640 to beam folding optics 648, which modify or change the direction of the seed light beam 624 so that it is transmitted back into the discharge chamber 640. The discharge chamber 640 includes a pair of elongated electrodes 611B, a gain medium 612 that is a gas mixture, and a blower for circulating the gas mixture between the electrodes 611B.

[0084]

[0094] The output light beam 605 is directed through a bandwidth analysis module 662, where various parameters of the beam 605 (such as bandwidth or wavelength) may be measured. The output light beam 605 may also be directed through a beam preparation system 663. The beam preparation system 663 may include, for example, a pulse stretcher, where each pulse of the output light beam 605 is stretched in time, for example, in an optical delay unit, to adjust the performance characteristics of the light beam impinging on the lithography exposure tool 669. The beam preparation system 663 may also include other components that can act on the beam 605, such as reflective and / or refractive optical elements (such as lenses and mirrors), filters, and optical apertures (including automatic shutters).

[0085]

[0095] Light beam 605 is a pulsed light beam and may include one or more bursts of pulses separated in time from one another. Each burst may include one or more pulses of light. In some embodiments, a burst may include hundreds of pulses, e.g., 100-400 pulses.

[0086]

[0096] As described above, when gain medium 612 is pumped by applying voltage 609 to electrode 611A, gain medium 612 emits light. When voltage 609 is applied to electrode 611A in pulses, the light emitted from medium 612 is also pulsed. Thus, the repetition rate of pulsed light beam 605 is determined by the rate at which voltage 609 is applied to electrode 611A, with each application of voltage 609 producing a pulse of light. The pulses of light propagate through gain medium 612 and exit chamber 614 via output coupler 618. In this manner, a train of pulses is created by the periodically repeated application of voltage 609 to electrode 611A. The repetition rate of the pulses can range from approximately 500 Hz to 6,000 Hz. In some embodiments, the repetition rate may be greater than 6,000 Hz, e.g., 12,000 Hz or greater.

[0087]

[0097] Signals from control system 250 may also be used to control electrodes 611A, 611B in master oscillator 631 and power amplifier 630, respectively, to control the pulse energy of master oscillator 631 and power amplifier 630, respectively, and thus the energy of light beam 605. There may be a delay between the signal provided to electrode 611A and the signal provided to electrode 611B. The amount of delay may affect the properties of pulsed light beam 605, such as the amount of coherence of pulsed light beam 605. Pulsed light beam 605 may have an average output power of tens of watts, for example, in the range of about 50 W to about 130 W. The irradiance (i.e., average power per unit area) of light beam 605 at the output may be greater than 60 W / cm. 2 ~80W / cm 2 The range may be:

[0088]

[0098] 6A, a block diagram of an optical lithography system 700 is shown. The optical lithography system 700 includes a light source system 710 that generates an exposure beam 705 that is provided to a scanner device 780. The scanner device 780 exposes a wafer 770 with the exposure beam 705. In the illustrated example, the control system 250 is connected to the light source system 710 and the scanner device 780. In other examples, the control system 250 is connected only to the light source system 710.

[0089]

[0099] The scanner device 780 exposes the wafer 770 with a shaped exposure light beam 705', which is formed by passing the exposure beam 705 through a projection optical system 781.

[0090]

[0100] Light source system 710 includes optical oscillators 740-1 through 740-N, where N is an integer greater than 1. Each optical oscillator 740-1 through 740-N generates a respective optical beam 704-1 through 704-N. Optical oscillator 740-1 is described in more detail below. The other N-1 optical oscillators of light source system 710 include the same or similar features.

[0091]

[0101] Optical oscillator 740-1 includes a discharge chamber 715-1 enclosing cathode 711-1a and anode 711-1b. Discharge chamber 715-1 also contains gaseous gain medium 712-1. A potential difference between cathode 711-1a and anode 711-1b creates an electric field in gaseous gain medium 712-1. The potential difference can be generated by controlling voltage source 797, coupled to control system 250, to apply voltage 709 to cathode 711-1a and / or anode 711-1b. The electric field provides sufficient energy in gain medium 712-1 to cause population inversion and enable the generation of pulses of light via stimulated emission. Repeatedly creating this potential difference generates a train of light pulses that create light beam 704-1. The repetition rate of pulsed light beam 704-1 is determined by the rate at which voltage 709 is applied to electrodes 711-1a and 711-1b. The duration of the pulses in pulsed light beam 704-1 is determined by the duration of application of voltage 709 to electrodes 711-1a and 711-1b. The repetition rate of the pulses may range, for example, from about 500 Hz to 6,000 Hz. In some embodiments, the repetition rate may be greater than 6,000 Hz, such as 12,000 Hz or greater. Each pulse emitted from optical oscillator 740-1 may have, for example, a pulse energy of approximately 1 millijoule (mJ).

[0092]

[0102] The gaseous gain medium 712-1 can be any gas suitable for producing a light beam of the wavelength, energy, and bandwidth required for the application. In the case of an excimer light source, the gaseous gain medium 712-1 may contain a noble gas, such as argon or krypton, a halogen, such as fluorine or chlorine, and a small amount of xenon, excluding a buffer gas, such as helium. Examples of gaseous gain medium 712-1 include argon fluoride (ArF), which emits light at a wavelength of approximately 193 nm, krypton fluoride (KrF), which emits light at a wavelength of approximately 248 nm, or xenon chloride (XeCl), which emits light at a wavelength of approximately 351 nm. The gain medium 712-1 is pumped with short (e.g., nanosecond) current pulses in a high-voltage discharge by application of a voltage 709 to electrodes 711-1a and 711-1b.

[0093]

[0103] A resonator is formed between line narrowing module 716-1 on one side of discharge chamber 715-1 and output coupler 718-1 on the second side of discharge chamber 715-1. Line narrowing module 716-1 may include a diffractive optical element, such as a grating and / or a prism, to fine-tune the spectral output of discharge chamber 715-1. In some embodiments, line narrowing module 716-1 includes multiple diffractive optical elements. For example, line narrowing module 716-1 may include four prisms, some of which are configured to control the center wavelength of light beam 704-1 and others of which are configured to control the spectral bandwidth of light beam 704-1.

[0094]

[0104] Optical oscillator 740-1 also includes a line center analysis module 720 that receives the output light beam from output coupler 718-1. Line center analysis module 720-1 is a measurement system that can be used to measure or monitor the wavelength of light beam 704-1. Line center analysis module 720-1 can provide data to control system 250, which can determine metrics related to light beam 704-1 based on the data from line center analysis module 720-1. For example, control system 250 can determine beam quality metrics or spectral bandwidth based on the data measured by line center analysis module 720-1.

[0095]

[0105] The light source system 710 also includes a gas supply system 790 fluidly coupled to the interior of the discharge chamber 715-1 via a fluid conduit 789. The fluid conduit 789 is any conduit capable of transporting a gas or other fluid with no or minimal loss of the fluid. For example, the fluid conduit 789 can be a pipe made of or coated with a material that does not react with the fluid or fluids transported in the conduit 789. The gas supply system 790 includes a chamber 791 configured to contain and / or receive a supply of one or more gases used in the gain medium 712-1. The gas supply system 790 also includes devices (such as pumps, valves, and / or fluidic switches) that allow the gas supply system 790 to remove gas from or inject gas into the discharge chamber 715-1. The gas supply system 790 is coupled to the control system 250. The gas supply system 790 can be controlled by the control system 250, for example, to perform a refill procedure.

[0096]

[0106] The other N-1 optical oscillators are similar to optical oscillator 740-1 and have similar or identical components and subsystems. For example, each of optical oscillators 740-1 through 740-N includes electrodes similar to electrodes 711-1a and 711-1b, a line narrowing module similar to line narrowing module 716-1, and an output coupler similar to output coupler 718-1. Optical oscillators 740-1 through 740-N may be tuned or configured so that all of optical beams 704-1 through 704-N have the same characteristics, or optical oscillators 740-1 through 740-N may be tuned or configured so that at least some of the optical oscillators have at least some characteristics that are different from the other optical oscillators. For example, optical beams 704-1 through 704-N may all have the same center wavelength, or the center wavelength of each optical beam 704-1 through 704-N may be different. The center wavelength generated by a particular one of optical oscillators 740-1 through 740-N may be set using a respective line narrowing module.

[0097]

[0107] Additionally, voltage source 797 may be electrically connected to the electrodes of each of optical oscillators 740-1 to 740-N, or voltage source 797 may be implemented as a voltage system including N individual voltage sources, each of which is electrically connected to the electrodes of one of optical oscillators 740-1 to 740-N.

[0098]

[0108] Light source system 710 also includes beam controller 787 and beam combiner 788. Beam controller 787 is located between the gaseous gain media of optical oscillators 740-1 through 740-N and beam combiner 788. Beam controller 787 determines which of optical beams 704-1 through 704-N are incident on beam combiner 788. Beam combiner 788 forms exposure beam 705 from one or more optical beams incident on beam combiner 788. In the illustrated example, beam controller 787 is depicted as a single element. However, beam controller 787 may also be implemented as a collection of individual beam controllers. For example, beam controller 787 may include a collection of shutters, one shutter associated with each optical oscillator 740-1 through 740-N.

[0099]

[0109] Light source system 710 may include other components and systems. For example, light source system 710 may include a beam preparation system 763 that includes a bandwidth analysis module that measures various characteristics (e.g., bandwidth or wavelength) of the light beam. Beam preparation system 763 may also include a pulse stretcher (not shown), which stretches each pulse that interacts with the pulse stretcher in time. Beam preparation system 763 may also include other components that can act on light, such as reflective and / or refractive optical elements (e.g., lenses and mirrors) and / or filters. In the illustrated example, beam preparation system 763 is located in the path of exposure beam 705. However, beam preparation system 763 may be located elsewhere in optical lithography system 700. Other implementations are also possible. For example, light source system 710 may include N instances of beam preparation system 763, each positioned to interact with one of light beams 704-1 through 704-N. In another example, light source system 810 may include optical elements (such as mirrors) that direct light beams 704-1 through 704-N toward beam combiner 788.

[0100]

[0110] The scanner apparatus 780 can be an immersion system or a dry system. The scanner apparatus 780 includes a projection optical system 781 through which the exposure beam 705 passes before reaching the wafer 770, and a sensor system or metrology system 799. The wafer 770 is held or received on a wafer holder 783. Referring also to FIG. 6B , the projection optical system 781 includes a slit 784, a mask 785, and a projection objective including a lens system 786. The lens system 786 includes one or more optical elements. The exposure beam 705 enters the scanner apparatus 780 and impinges on the slit 784, and at least some of the beam 705 passes through the slit 784 to form a shaped exposure beam 705′. In the example of FIGS. 6A and 6B , the slit 784 is rectangular and shapes the exposure beam 705 into an elongated, rectangular-shaped light beam. This is the shaped exposure beam 705′. Mask 785 contains a pattern that determines which portions of the shaped light beam are transmitted and which portions are blocked by mask 785. Microelectronic features are formed on wafer 770 by exposing a layer of radiation-sensitive photoresist material on wafer 770 to exposure beam 705'. The design of the pattern on the mask is determined by the particular microelectronic circuit features desired.

[0101]

[0111] Metrology system 799 includes sensor 771. Sensor 771 may be configured to measure characteristics of shaped exposure beam 705′, such as bandwidth, energy, pulse length, and / or wavelength. Sensor 771 may be, for example, a camera or other device capable of capturing an image of shaped exposure beam 705′ at wafer 770, or an energy detector capable of capturing data describing the amount of light energy in the xy plane at wafer 770.

[0102]

[0112] While particular reference may have been made above to the use of embodiments in the context of optical lithography, it will be understood that embodiments may be used in other applications, for example, imprint lithography, and are not limited to optical lithography where the context so permits. It is to be understood that the phraseology or terminology herein is for the purpose of description and not of limitation, and accordingly should be interpreted by one of ordinary skill in the art in light of the teachings herein.

[0103]

[0113] It is to be understood that the "Detailed Description" section, and not the "Summary" and "Abstract" sections, are intended to be used to interpret the claims. The "Summary" and "Abstract" sections may describe one or more, but not all, example embodiments contemplated by the inventors, and are therefore not intended to limit the scope of the embodiments and appended claims in any way.

[0104]

[0114] The embodiments have been described above using functional building blocks that illustrate examples of specific functions and relationships thereof. The boundaries of these functional building blocks have been arbitrarily defined herein for the convenience of description. Alternative boundaries may be defined as long as the specific functions and relationships thereof are appropriately performed.

[0105]

[0115] The foregoing description of the specific embodiments sufficiently reveals the general nature of the present embodiments so that others, by applying knowledge of the art, can readily modify and / or adapt such specific embodiments to various applications without undue experimentation and without departing from the general concept of the embodiments. Accordingly, such adaptations and modifications are intended to be within the meaning and range of equivalents of the disclosed embodiments, based on the teaching and guidance presented herein.

[0106]

[0116] The breadth and scope of embodiments should not be limited by any of the above-described exemplary embodiments, but should be defined only in accordance with the following claims and their equivalents.

[0107]

[0117] The embodiments can be further described using the following clauses. 1. A method for determining whether to perform a cold start adjustment when restarting a laser after a recent idle period, the laser having a laser chamber; determining an idle duration trigger threshold based at least in part on a number of shots in the laser chamber prior to a most recent idle period; determining whether to perform a cold start adjustment after a most recent idle period based at least in part on whether a duration of the most recent idle period exceeds an idle duration trigger threshold; A method comprising: 2. The method of clause 1, wherein determining the idle duration trigger threshold based at least in part on the number of shots comprises determining the idle duration trigger threshold based at least in part on the number of shots and the measured energy of the beam emitted by the laser after a previous idle period. 3. The method of clause 1, wherein the cold start adjustment comprises firing a predetermined number of disable pulses. 4. A method for determining whether to perform a cold start adjustment when restarting a laser after a recent idle period, the laser having a laser chamber; performing a chamber aging determination as to whether the number of shots in the chamber is less than a first predetermined number of shots, and if the number of shots in the chamber is less than the first predetermined number of shots, setting the idle duration trigger threshold to a default idle duration trigger threshold; if the chamber age determination is negative, making a beam energy determination by recording the duration of the previous idle period and evaluating the energy of the laser beam exiting the laser after a cold start from the previous idle period, and if the beam energy exceeds a threshold amount, setting an idle duration trigger threshold based at least in part on the duration and beam energy of the previous idle period; if the beam energy determination is negative, making a shot count determination based on whether the chamber shot count exceeds a predetermined trigger shot count threshold, and if the idle period exceeds a scheduled adjustable idle duration trigger threshold, setting the idle duration trigger threshold equal to the adjustable idle duration trigger threshold; determining to perform a cold start adjustment based at least in part on whether a duration of a most recent idle period exceeds an idle duration trigger threshold; A method comprising: 5. The method of clause 4, wherein making the beam energy determination further comprises modifying an adjustable idle duration trigger threshold. 6. The method of clause 4, wherein the cold start adjustment comprises firing a predetermined number of disable pulses. 7. A method for determining whether to perform a cold start adjustment when restarting a laser after a recent idle period, the laser having a laser chamber; making a first determination whether the chamber age is less than a predetermined age and whether the duration of a most recent idle period exceeds a default idle duration trigger threshold, and performing a cold start adjustment if the first determination is affirmative; if the first determination is negative, making a second determination that the duration of the most recent idle period exceeds a current idle duration trigger threshold and the energy of the laser beam exiting the laser during the previous idle period is less than a beam energy trigger threshold, and performing a cold start adjustment if the second determination is positive; if the second determination is negative, making a third determination of whether the shot count in the chamber exceeds a shot count trigger threshold and whether the duration of the most recent idle period exceeds an adjustable idle duration trigger threshold, and performing a cold start adjustment if the third determination is positive; A method comprising: 8. The method of clause 7, wherein determining to perform a cold start adjustment if the duration of the most recent idle period exceeds an idle duration trigger threshold and the energy of the laser beam exiting the laser during the previous idle period is less than a beam energy trigger threshold further comprises setting the idle duration trigger threshold equal to the duration of the most recent idle period. 9. The method of clause 7, wherein determining to perform a cold start adjustment if the duration of the most recent idle period exceeds an idle duration trigger threshold and the energy of the laser beam exiting the laser during the previous idle period is less than a beam energy trigger threshold further comprises modifying an adjustable idle duration trigger threshold. 10. The method of clause 7, wherein the cold start adjustment comprises firing a predetermined number of disable pulses. 11. A system for determining whether to perform a cold start adjustment when restarting a laser after an idle period, the laser having a laser chamber; a shot number monitor adapted to monitor the number of shots fired by the laser chamber; an idle period duration monitor adapted to monitor and record the duration of each idle period when the laser is idle; a beam energy monitor adapted to monitor the energy of the beam of laser radiation emitted by the laser; a controller responsively connected to the shot count monitor, the idle period duration monitor, and the beam energy monitor, adapted to determine whether to perform a cold start adjustment based on at least one of whether the shot count is below a first predetermined number of shots indicating that the chamber is new or has been replaced, whether the shot count is above a second predetermined number of shots, the duration of the most recent period that the laser was idle, and the energy of the beam of laser radiation emitted by the laser after the previous idle period; A system comprising: 12. The system of clause 11, wherein the cold start adjustment comprises firing a predetermined number of inoperable pulses. 13. The controller is adapted to determine whether to perform a cold start adjustment by comparing the idle period duration with an idle duration trigger threshold, the idle duration trigger threshold being: whether the number of shots falls below a first predetermined number of shots, indicating that the chamber is new or has been replaced; whether the number of shots exceeds a second predetermined number of shots; the duration of the most recent period the laser was idle, and the energy of the beam of laser radiation emitted by the laser after the previous idle period, A system of clause 11 based on at least one of the following: 14. The system of clause 13, wherein the controller is adapted to determine the idle duration trigger threshold by: making a chamber age determination of whether the number of shots in the chamber is less than a first predetermined number of shots; and if the number of shots in the chamber is less than the first predetermined number of shots, setting the idle duration trigger threshold to a default idle duration trigger threshold. 15. The system of clause 13, wherein the controller is adapted to determine an idle duration trigger threshold by: recording the duration of a previous idle period and making a beam energy determination by evaluating the energy of the laser beam exiting the laser after a cold start from the previous idle period; and if the beam energy exceeds a threshold amount, setting the idle duration trigger threshold based at least in part on the duration and beam energy of the previous idle period. 16. The system of clause 13, wherein the controller is adapted to determine an idle duration trigger threshold by making a shot count determination based on whether the number of shots in the chamber exceeds a predetermined trigger shot count threshold, and if the idle period exceeds a scheduled adjustable idle duration trigger threshold, setting the idle duration trigger threshold equal to the adjustable idle duration trigger threshold.

[0108]

[0118] These and other embodiments are within the scope of the following claims.

Claims

1. 1. A method for determining whether to perform a cold start adjustment when restarting a laser after a recent idle period, the laser having a laser chamber; determining an idle duration trigger threshold based at least in part on a number of shots in the laser chamber prior to the most recent idle period; determining whether to perform a cold start adjustment after the most recent idle period based at least in part on whether a duration of the most recent idle period exceeds the idle duration trigger threshold; A method comprising:

2. 10. The method of claim 1, wherein determining an idle duration trigger threshold based at least in part on a shot count comprises determining an idle duration trigger threshold based at least in part on the shot count and a measured energy of a beam emitted by the laser after a previous idle period.

3. The method of claim 1 , wherein the cold start adjustment comprises firing a predetermined number of disable pulses.

4. 1. A method for determining whether to perform a cold start adjustment when restarting a laser after a recent idle period, the laser having a laser chamber; performing a chamber aging determination as to whether the number of shots in the chamber is less than a first predetermined number of shots, and if the number of shots in the chamber is less than the first predetermined number of shots, setting an idle duration trigger threshold to a default idle duration trigger threshold; if the chamber age determination is negative, making a beam energy determination by recording a duration of a previous idle period and evaluating an energy of a laser beam exiting the laser after a cold start from the previous idle period, and if the beam energy exceeds a threshold amount, setting the idle duration trigger threshold based at least in part on the duration and beam energy of the previous idle period; if the beam energy determination is negative, making a shot count determination based on whether the number of shots in the chamber exceeds a predetermined trigger shot count threshold, and if an idle period exceeds a scheduled adjustable idle duration trigger threshold, setting the idle duration trigger threshold equal to an adjustable idle duration trigger threshold; determining to perform a cold start adjustment based at least in part on whether the duration of the most recent idle period exceeds the idle duration trigger threshold; A method comprising:

5. The method of claim 4 , wherein making a beam energy determination further comprises modifying the adjustable idle duration trigger threshold.

6. The method of claim 4 , wherein the cold start adjustment comprises firing a predetermined number of disable pulses.

7. 1. A method for determining whether to perform a cold start adjustment when restarting a laser after a recent idle period, the laser having a laser chamber; making a first determination whether the chamber's age is less than a predetermined age and whether the duration of the most recent idle period exceeds a default idle duration trigger threshold, and performing a cold start adjustment if the first determination is affirmative; if the first determination is negative, making a second determination that the duration of the most recent idle period exceeds a current idle duration trigger threshold and the energy of a laser beam exiting the laser during the previous idle period is less than a beam energy trigger threshold, and performing a cold start adjustment if the second determination is positive; if the second determination is negative, making a third determination of whether the shot count for the chamber exceeds a shot count trigger threshold and whether the duration of the most recent idle period exceeds an adjustable idle duration trigger threshold, and performing a cold start adjustment if the third determination is positive; A method comprising:

8. 8. The method of claim 7, wherein determining to perform a cold start adjustment if the duration of the most recent idle period exceeds an idle duration trigger threshold and energy of a laser beam exiting the laser during the previous idle period is less than a beam energy trigger threshold further comprises setting the idle duration trigger threshold equal to the duration of the most recent idle period.

9. 8. The method of claim 7, wherein determining to perform a cold start adjustment when the duration of the most recent idle period exceeds an idle duration trigger threshold and the energy of a laser beam exiting the laser during a previous idle period is less than a beam energy trigger threshold further comprises modifying the adjustable idle duration trigger threshold.

10. The method of claim 7 , wherein the cold start adjustment comprises firing a predetermined number of disable pulses.

11. 1. A system for determining whether to perform a cold start adjustment when restarting a laser after an idle period, the laser having a laser chamber; a shot count monitor adapted to monitor a number of shots fired by the laser chamber; an idle period duration monitor adapted to monitor and record the duration of each idle period when the laser is idle; a beam energy monitor adapted to monitor the energy of the beam of laser radiation emitted by said laser; a controller responsively connected to the shot number monitor, the idle period duration monitor, and the beam energy monitor, adapted to determine whether to perform a cold start adjustment based on at least one of whether the shot number is below a first predetermined number of shots indicating that the chamber is new or has been replaced, whether the shot number is above a second predetermined number of shots, the duration of a period during which the laser was most recently idle, and the energy of a beam of laser radiation emitted by the laser after a previous idle period; A system comprising:

12. The system of claim 11 , wherein the cold start adjustment comprises firing a predetermined number of disable pulses.

13. the controller is adapted to determine whether to perform a cold start adjustment by comparing the idle period duration with an idle duration trigger threshold; The idle duration trigger threshold is: whether the number of shots is below a first predetermined number of shots, indicating that the chamber is new or has been replaced; whether the number of shots exceeds a second predetermined number of shots; the duration of the most recent period the laser was idle; and the energy of the beam of laser radiation emitted by said laser after a previous idle period; The system of claim 11 , based on at least one of:

14. 14. The system of claim 13, wherein the controller is adapted to determine the idle duration trigger threshold by: performing a chamber age determination of whether a number of shots in the chamber is less than a first predetermined number of shots; and, if the number of shots in the chamber is less than the first predetermined number of shots, setting an idle duration trigger threshold to a default idle duration trigger threshold.

15. 14. The system of claim 13, wherein the controller is adapted to determine the idle duration trigger threshold by: making a beam energy determination by recording a duration of a previous idle period and evaluating an energy of a laser beam exiting the laser after a cold start from the previous idle period; and if the beam energy exceeds a threshold amount, setting the idle duration trigger threshold based at least in part on the duration and the beam energy of the previous idle period.

16. 14. The system of claim 13, wherein the controller is adapted to determine the idle duration trigger threshold by making a shot count determination based on whether a shot count in the chamber exceeds a predetermined trigger shot count threshold, and if an idle period exceeds a scheduled adjustable idle duration trigger threshold, setting the idle duration trigger threshold equal to an adjustable idle duration trigger threshold.

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