Switching between vacuum and subatmospheric pressure operation in a materials analysis system

Abstract

The present invention relates to providing an internal space suitable for a subatmospheric pressure mode of operation and a vacuum pressure mode of operation in an inlet section of a material analysis system. The inlet section has a housing configured for vacuum pressure and subatmospheric pressure, the housing having an internal space that can be provided depending on the operation mode of the material analysis system, the internal space being configured to receive charged particles emitted from a sample through an inlet opening at a distal end of the internal space. The inlet section further has an internal space providing device configured to provide the internal space such that, in the subatmospheric pressure mode of operation, the subatmospheric pressure is reduced to vacuum pressure between the distal end and the proximal end of the internal space, and to provide the internal space such that, in the vacuum pressure mode of operation, the solid angle extending within the internal space occupied by charged particles emitted from the sample in the vacuum pressure mode of operation and the distance between the sample and the distal end of the internal space are larger than in the subatmospheric pressure mode of operation. This allows the inlet section to receive more electrons per unit time when the pressure environments of the inlet section are different, enabling improved analysis of the sample.

Description

[Technical Field]

[0001] The present invention relates to an inlet section of a materials analysis system for charged particles emitted from a sample, a materials analysis system for analyzing a sample with a corresponding inlet section for charged particles emitted from the sample, a negative pressure system, a method for selectively operating the inlet section in a vacuum pressure mode or a sub-atmospheric pressure mode of operation, and a corresponding method for analyzing materials in a vacuum pressure mode or a sub-atmospheric pressure mode of operation using the negative pressure system, wherein the inlet section can be used in different pressure environments, for example for photoelectron spectroscopy. [Background technology]

[0002] Cushman et al., "Trends in Advanced XPS Instrumentation. Near-Ambient Pressure XPS," Vac. Technol Coatings, August 2017, describes a near-ambient pressure (NAP) XPS system that can operate photoelectron spectroscopy at pressures near atmospheric pressure. Summary of the Invention [Problem to be solved by the invention]

[0003] The object of the present invention can be seen to be to conceive of an inlet section, a material analysis system, a negative pressure system and a method for analyzing materials that enable better analysis of samples over a wide pressure range, in particular with higher resolution or in a shorter time period at the same resolution. [Means for solving the problem]

[0004] According to a first aspect of the present invention, an inlet section of a materials analysis system for charged particles emitted from a sample is contemplated. The inlet section includes a housing configured for vacuum pressure and subatmospheric pressure and an internal space providing device. The housing has an internal space that can be provided depending on an operating mode of the materials analysis system, and the internal space is configured to receive the charged particles through an inlet opening at a distal end of the internal space. The internal space providing device is configured to provide the internal space such that, in a subatmospheric pressure operating mode, the subatmospheric pressure is reduced to vacuum pressure from the distal end to the proximal end of the internal space. In a vacuum pressure operating mode, the internal space is configured to provide the internal space such that the solid angle extending within the internal space occupied by the charged particles emitted from the sample in the vacuum pressure operating mode and the distance between the sample and the distal end of the internal space are larger than in the subatmospheric pressure operating mode.

[0005] The inlet section for charged particles emitted from the sample has an internal space providing device that can provide an internal space for a vacuum pressure operation mode and an internal space for a subatmospheric pressure operation mode, so that the inlet section can be used in both the vacuum pressure operation mode and the subatmospheric pressure operation mode of the material analysis system. The inlet section further enables switching between the vacuum pressure operation mode and the subatmospheric pressure operation mode, thereby enabling the sample to be analyzed in various pressure environments, particularly over a relatively wide pressure range. The inlet section can further enable an intensity adjusted to the pressure environment, shortening measurement and analysis times.

[0006] The vacuum pressure is herein defined as 10 -1 Less than mbar ~ 10 -8 The vacuum pressure is to be understood as the absolute pressure in the pressure range between 10 mbar and 10 mbar. -3 mbar~10 -6 Sub-atmospheric pressure is to be understood as a pressure close to atmospheric pressure, for example an absolute pressure between 0.1 mbar and 1000 mbar.

[0007] In the subatmospheric pressure operating mode, subatmospheric pressure exists upstream of the distal end of the internal space. This subatmospheric pressure can be reduced to vacuum pressure by the inlet section, thereby reducing collisions between charged particles and gas particles present in the internal space of the inlet section. This allows more charged particles to reach the proximal end of the internal space, thereby increasing the intensity of the charged particles measured by a detector located proximal downstream of the proximal end of the internal space. In the vacuum pressure operating mode, vacuum pressure already exists upstream of the distal end of the internal space. In this case, pressure reduction between the distal and proximal ends of the internal space is not necessary, or does not need to be as significant as in the subatmospheric pressure operating mode. This allows for a larger solid angle to be created, thereby allowing more charged particles to be received into the internal space through the inlet opening in the vacuum pressure operating mode. Furthermore, a larger separation from the sample can be achieved, which allows for easier handling and fewer sample selection restrictions. The inlet section allows the material analysis system to switch between the vacuum pressure operating mode and the subatmospheric pressure operating mode.

[0008] The interior space providing device may, for example, in a sub-atmospheric pressure operating mode, provide a sub-atmospheric pressure upstream of the distal end of the interior space, for example, greater than 0.1 mbar, greater than 1 mbar, greater than 10 mbar, greater than 100 mbar, between 0.1 mbar and 1000 mbar, between 1 mbar and 1000 mbar, between 10 mbar and 1000 mbar, or between 100 mbar and 1000 mbar, between the distal and proximal ends of the interior space, for example, greater than 10 mbar, greater than 10 ... -2 Less than 10 mbar -3 Less than 10 mbar -4 Less than 10 mbar -5 Less than 10 mbar -6 Less than 10 mbar -7 Less than 10 mbar -2 mbar~10 -8 mbar, 10 -3 mbar~10 -8 mbar, 10 -4mbar~10 -8 mbar, 10 -5 mbar~10 -8 mbar, 10 -6 mbar~10 -8 mbar, or 10 -7 mbar~10 -8 The pressure may be reduced to a vacuum of between 1000 and 1000 mbar.

[0009] The charged particles emitted from the sample may be, for example, electrons or ions.

[0010] The material analysis system may be a surface analysis system, such as a photoelectron spectroscopy instrument, especially an XPS system.

[0011] The internal space providing device may be configured to provide an internal space such that in a vacuum pressure operating mode, the pressure at least does not increase, and preferably decreases, from the distal end to the proximal end of the internal space.

[0012] The inlet section may be configured to provide an interior space without changing the position of the sample, which allows for switching back and forth between the respective modes of operation without having to change the position of the sample.

[0013] The cross-section of the interior space in the sub-atmospheric pressure operating mode can expand in a direction from the distal end to the proximal end of the interior space, at least along the pressure reduction portion of the interior space. This allows for a pressure reduction along the pressure reduction portion because the particles have a larger volume in the direction from the distal end to the proximal end of the interior space. For example, the progression of the cross-section along the pressure reduction portion can be calculated by dividing the pressure reduction portion by the absolute pressure of 10 mbar that exists upstream of the distal end of the interior space and the absolute pressure of 10 mbar that exists at the proximal end. -4 mbar or 10 -3 It can be scaled down to mbar.

[0014] The cross-section of the interior space in the vacuum pressure mode of operation may also increase in a direction from the distal end toward the proximal end of the interior space, at least along the reduced pressure portion of the interior space.

[0015] At least a portion of the inlet section can have a conical shape. In particular, the pressure reduction section can have a conical shape. A portion of the inlet section can have, for example, a frusto-conical or frusto-conical shape. In particular, the pressure reduction section can have a frusto-conical or frusto-conical shape.

[0016] The inlet section can for example have or be a nozzle.

[0017] In the vacuum pressure operating mode, the cross section of the interior space can be expanded from the distal end to the proximal end so that the solid angle subtended within the interior space by the charged particles emitted from the sample is between 0.1 sr and 1.47 sr, preferably between 0.21 sr and 0.84 sr. This allows the entrance section to receive a large number of charged particles with different properties, in particular different kinetic energies. The more charged particles received at the entrance section, the higher the intensity measured by the detector that detects the charged particles can be.

[0018] The inlet opening area of ​​the inlet opening is dependent on the spacing and solid angle and is larger in the vacuum pressure mode of operation than in the sub-atmospheric pressure mode of operation. The inlet opening area of ​​the inlet opening in the sub-atmospheric pressure mode of operation is 0.0003 mm 2 ~1mm 2 Between, especially 0.07mm 2 ~0.8mm 2 The inlet opening area of ​​the inlet opening in the vacuum pressure operating mode may be between 1 mm 2 Super~1000mm 2 Between, especially 20mm 2 ~300mm 2The spacing between the sample and the distal end of the inner space in the vacuum pressure operating mode may be between 1 mm and 40 mm, in particular between 5 mm and 20 mm.

[0019] The inlet opening can have one or more openings. When multiple openings are present, the opening areas of the openings form a single inlet opening area. When the inlet opening consists of a single opening, the opening area corresponds to the opening of the inlet opening. The one or more openings can be, for example, circular, elliptical, rectangular, or slit-shaped. The inlet opening in the subatmospheric pressure operating mode and the inlet opening in the vacuum pressure operating mode can have the same opening shape or different opening shapes. These inlet openings can be, for example, circular, elliptical, rectangular, or slit-shaped. For example, multiple openings of each inlet opening can form a single shape. For example, a single slit-shaped opening shape of each inlet opening can be created by arranging multiple circular openings adjacent to each other along a line with a respective spacing between them, so that the openings together form a single slit.

[0020] The solid angle extending into the interior space occupied by the charged particles emitted from the sample may be combined from multiple partial solid angles, where one partial solid angle extends from a point on the surface of the sample through each opening of the multiple openings into the interior space from which the charged particles are emitted.

[0021] The inlet opening area in the subatmospheric pressure operating mode can be circular, with a diameter between 0.02 mm and 1 mm, e.g., between 0.02 mm and 0.05 mm, or between 0.3 mm and 1 mm. A smaller diameter allows the subatmospheric pressure operating mode to be operated at higher pressures. A smaller diameter can reduce the number of charged particles that can be received by the inlet section. This can be countered by reducing the spacing between the sample and the inlet opening of the inlet section, since this increases the number of charged particles received at the inlet opening. The intensity required for analysis can be set for a given subatmospheric pressure by setting the spacing and / or the inlet opening area, which in turn depends on the spacing and the inlet opening area. This allows for a given minimum intensity to be obtained for different pressures. For example, the diameter of the inlet opening in the vacuum pressure operating mode can be between more than 1 mm and 100 mm, preferably between 10 mm and 40 mm. The diameter of the inlet opening area in the vacuum pressure operating mode can be the same as the spacing between the sample and the distal end of the internal space, for example. The diameter of the entrance opening area may be, for example, between 1 and 2 times the spacing between the sample and the distal end of the interior space, such as 1.5 or 2 times.

[0022] The inlet section can have at least two interconnectable pieces. The first piece can have an interior space for a vacuum pressure mode of operation. The connected pieces can form an interior space for a sub-atmospheric pressure mode of operation. The inlet section can be configured such that an opening is formed between the interconnected pieces along their connection points, and the gas flow rate through the opening is less than the gas flow rate through the inlet opening, particularly 20% or less, e.g., 10% or less, 5% or less, or 1% or less of the gas flow rate through the inlet opening. This allows for a simple structure of the inlet section to be provided that can switch between a vacuum pressure mode and a sub-atmospheric pressure mode of operation of the material analysis system.

[0023] The connectable pieces may be manufactured to allow very precise positioning of the pieces relative to one another, for example to an accuracy of a few microns. The fit between the connectable pieces may be less than + / - 10 microns, for example less than + / - 5 microns, or between + / - 1 micron and + / - 5 microns.

[0024] The interior space providing device can have one or more sliding mechanisms, such as sliding guides. The sliding guides can be configured to slide a first piece relative to a second piece. For example, the first sliding guide can be configured to slide the pieces relative to each other in the x-direction to connect the pieces to each other. The second sliding guide can be configured to slide the pieces relative to each other in a z-direction perpendicular to the x-direction, thereby allowing the pieces to slide against each other to connect the pieces via the sealing.

[0025] The housing of the inlet section may be made of a heat-resistant material, for example, resistant to temperatures up to 100°C, 120°C, 150°C, or 300°C. The heat-resistant material may, for example, contain or be stainless steel or bronze. The material may have a coating, for example, a carbon coating. This allows the inlet section to be heatable.

[0026] The walls of the interior space may be coated, for example with graphite. The coating may be applied, for example, by physical vapor deposition. The coating may contain, for example, carbon. The coating may have a thickness of, for example, between 2 μm and 10 μm, or between 5 μm and 10 μm. This may make it possible to provide an electrically conductive surface in the vicinity of the charged particles. This may reduce surface charging, thereby improving the electron-optical properties of the entrance section.

[0027] The interior space providing device can have one or more drives, such as stepper motors, gear drives, or pneumatic drives, configured to move, for example, pivot, the two sections relative to one another.

[0028] Each of the segments can have a sealing portion. The sealing portions can be configured to overlap one another when the segments are connected to one another and to create a pressure-tight connection in a sub-atmospheric pressure operating mode such that reduction of the sub-atmospheric pressure to vacuum pressure between the distal end and the proximal end of the interior space is not hindered by particle intrusion between the segments. The overlapping of the segments in the sub-atmospheric pressure operating mode can achieve improved sealing. Furthermore, positioning of the segments relative to one another can be improved when switching between the vacuum pressure operating mode and the sub-atmospheric pressure operating mode.

[0029] The seals can include labyrinth seals, especially smooth-gap labyrinth seals. The sections can be sealed to each other, for example, without contact, via a smooth-gap labyrinth seal in the form of an elongated gap used as a constriction between the surfaces of the sections. Alternatively, the seals can include O-rings. The seals can include fluoroelastomers (FKM) in accordance with DIN ISO 1629, such as Viton. The seals can be vulcanized onto the surfaces of the overlapping sections of the sections, for example.

[0030] The interior space providing device may be configured to press one section against another section such that at least a portion of the sealing portions of the sections directly overlap when forming a pressure-tight connection between the sections, thereby improving sealing.

[0031] The surfaces of the pieces, especially the surfaces facing each other, can be polished, for example, according to DIN 8589 T15. Polishing can smooth the surfaces and thus reduce the surface roughness, which can make it possible to produce a better seal.

[0032] The internal space providing device may have at least one bearing, and the partial pieces may be pivotally connected to one another via the at least one bearing. The internal space providing device may be configured to pivot the partial pieces relative to one another so as to provide an internal space for a subatmospheric pressure operating mode or an internal space for a vacuum pressure operating mode. By providing fewer moving parts, it is possible to limit the degrees of freedom of movement. This reduces imprecision, and the partial pieces can be automatically positioned relative to one another in a predetermined direction based on the limited degrees of freedom. This makes it possible to provide a simple and reliable entrance section that can achieve high positioning accuracy between the partial pieces relative to one another. Furthermore, it is possible to provide a compact entrance section, thereby making it possible to provide a compact material analysis system.

[0033] The interior space providing device can have, for example, two bearings, both of which are configured to rotate the sub-pieces relative to one another. The first bearing can be configured to rotate one sub-piece around the other sub-piece about a first pivot axis. The second bearing can be configured to rotate one sub-piece around itself about a second pivot axis. The second bearing can be configured, in particular, to position one sub-piece with a kinematically limited degree of freedom relative to the other sub-piece.

[0034] The sections can overlap concentrically via the sealing sections, which can allow for improved sealing, for example due to improved positioning accuracy of the sections relative to one another.

[0035] One or each of the two pieces may have a hollow truncated cone. The two pieces may have an opening at each of their distal and proximal ends. The openings of the pieces may be centered relative to each other, which allows for high positioning accuracy of the pieces when connected.

[0036] The entrance section may be an aperture device for receiving the charged particles. The entrance section may be connected to a lens or an analyzer. The lens may be configured to guide the charged particles from the entrance section to the analyzer. Alternatively, the entrance section may be part of a lens. The entrance section may be configured to guide the charged particles from a distal end to a proximal end of the entrance section. The proximal end of the entrance section may be connected to a lens or an analyzer and may emit the charged particles to the lens or the analyzer. The analyzer may be a hemispherical energy analyzer. The analyzer may be connected to a detector. Alternatively, the entrance section may be part of an aperture device, such as a front cap electrode of the aperture device. The aperture device may have one or more electron-optical lenses, astigmatism correctors, deflectors, and / or slits.

[0037] The inlet section may be a flap-type revolvable inlet section or may be a slidable inlet section.

[0038] The entrance section can have a solid angle setting device. The solid angle setting device can be configured to set a solid angle. The solid angle setting device can have an entrance opening angle setting device configured to set an entrance opening angle. The solid angle setting device can have a spacing setting device that can be configured to set a spacing between the sample and a distal end of the provided interior space. Additionally or alternatively, the solid angle setting device can have an entrance opening area setting device that can be configured to set an entrance opening area. The solid angle setting device allows for setting the solid angle.

[0039] Alternatively or additionally, the inlet section can have a diaphragm. The diaphragm can be, for example, an iris diaphragm, in particular a conical iris diaphragm. The iris diaphragm can be continuously or stepwise movable to change the inlet opening area and to change the distance between the sample and the distal end of the provided internal space. This allows different inlet opening areas to be set and different distances between the sample and the distal end of the provided internal space to be set. This can ensure sufficient strength for analysis, for example, when pressure conditions change.

[0040] According to a further aspect of the invention, a material analysis system configured to analyze a sample is envisaged, the material analysis system comprising a detector for detecting charged particles emitted from the sample and an inlet section according to at least one of claims 1 to 9 or any embodiment of the inlet section connected to the detector.

[0041] The material analysis system may be a photoelectron spectrometer. The photoelectron spectrometer may have a lens and an analyzer. The entrance section may be part of the lens or may be connected to the lens. The analyzer may be connected to the entrance section or the lens. The analyzer may be a hemispherical energy analyzer. The analyzer may be connected to a detector. The material analysis system may be a surface analysis system for analyzing surface and / or material properties.

[0042] According to a further aspect of the present invention, a negative pressure system is contemplated. The negative pressure system includes a negative pressure housing configured for vacuum pressure and subatmospheric pressure for airtightly enclosing a hollow space for placing a sample, an illumination system for illuminating the sample, and a material analysis system according to claim 10 or any embodiment of the material analysis system for analyzing the sample. The negative pressure system can enable the sample to be analyzed by the material analysis system under different pressures. The illumination system can be an X-ray radiation source, for example, an X-ray radiation source for illuminating the sample with monochromatic X-rays. The illumination system can include a monochromator configured to monochromatize the X-rays. The monochromator can be arranged between the X-ray radiation source and the sample to enable emission of monochromatic X-rays at the sample. This allows the sample to be illuminated with monochromatic X-rays to dissociate photoelectrons from the sample. The negative pressure system can be used, for example, to generate an X-ray photoemission spectrum and analyze the sample based thereon.

[0043] The negative pressure system can contain a sample holder and / or a sample storage unit. The sample holder or sample storage unit can be movable and / or rotatable. The sample holder or sample storage unit can be part of a materials analysis system.

[0044] According to a further aspect of the present invention, a method is envisaged for selectively operating an inlet section according to any one of claims 1 to 9 or any embodiment of the inlet section in a vacuum pressure mode or a sub-atmospheric pressure mode of operation, the method comprising: selecting a sub-atmospheric pressure or a vacuum pressure operating mode; providing an internal space depending on the selected operating mode, such that in the sub-atmospheric pressure operating mode, the internal space is provided such that the sub-atmospheric pressure is reduced to vacuum pressure from the distal end to the proximal end of the internal space, and in the vacuum pressure operating mode, the solid angle extending within the internal space occupied by charged particles emitted from the sample in the vacuum pressure operating mode and the distance between the sample and the distal end of the internal space are greater than in the sub-atmospheric pressure operating mode; Includes.

[0045] The selection of the subatmospheric pressure or vacuum pressure operating mode may be performed manually, for example, by a user, or automatically, for example, based on a pressure measurement upstream of the distal end of the internal space. For this purpose, the inlet section may have a pressure sensor. Alternatively, the negative pressure system may be provided with a pressure sensor. Depending on the pressure upstream of the distal end of the internal space, a corresponding internal space may be provided that ensures sufficient robust operation. This may enable improved reliable operation under different pressure conditions. Furthermore, samples may be analyzed under different pressures, and in particular, the effects of different pressures on the sample and its properties may be analyzed.

[0046] According to a further aspect of the present invention, a method is envisaged for selectively analyzing materials using a negative pressure system according to claim 11, or any embodiment of the negative pressure system, in a vacuum pressure or sub-atmospheric pressure mode of operation, the method comprising: providing a sample in a negative pressure housing of a negative pressure system; operating the inlet section according to the method of claim 12; setting a pressure upstream of the distal end of the interior space of the inlet section depending on the operating mode such that in a sub-atmospheric pressure operating mode, sub-atmospheric pressure exists upstream of the distal end of the interior space, and such that in a vacuum pressure operating mode, vacuum pressure exists upstream of the distal end of the interior space; illuminating the sample with an illumination system; detecting the charged particles emitted from the sample in a detector; Includes.

[0047] The charged particles can be energy resolved and detected in a detector, for which purpose, for example, an analyzer, preferably an energy analyzer, in particular a hemispherical energy analyzer, can be arranged upstream of the detector and connected to it.

[0048] The method can include, for example, a step for setting the spacing from the entrance opening to the sample to 1 to 2 times, preferably 1.5 times, the entrance opening area of ​​the entrance opening.

[0049] According to a further aspect of the invention, the use of the negative pressure system of claim 11, or any embodiment of the negative pressure system, is envisaged for surface analysis, surface reaction measurements, liquid-solid reaction measurements, liquid-gas reaction measurements, liquid measurements, thin film measurements, foreign matter detection in liquids, optical emission measurements, photoelectron spectroscopy measurements at near atmospheric pressure, X-ray photoelectron spectroscopy measurements at near atmospheric pressure, electrochemical measurements, battery analysis, oxidation measurements, electrolyte measurements, electrode measurements, sample measurements through liquids, quality control, corrosion measurements, catalyst measurements, pressure dependent measurements, biological sample measurements, potentiometric measurements, measurements of supersaturated liquids or analysis of microelectronic devices.

[0050] According to a further aspect of the invention, the use of the method of claim 13, or any embodiment of the method, is envisaged for surface analysis, surface reaction measurements, liquid-solid reaction measurements, liquid-gas reaction measurements, liquid measurements, thin film measurements, detection of foreign matter in liquids, optical emission measurements, photoelectron spectroscopy measurements at near atmospheric pressure, X-ray photoelectron spectroscopy measurements at near atmospheric pressure, electrochemical measurements, battery analysis, oxidation measurements, electrolyte measurements, electrode measurements, sample measurements through liquids, quality control, corrosion measurements, catalyst measurements, pressure dependent measurements, biological sample measurements, potentiometric measurements, measurements of supersaturated liquids or analysis of microelectronic devices.

[0051] According to a further aspect of the present invention, a computer program product is envisaged for selectively operating an inlet section according to any one of claims 1 to 9 in a vacuum pressure mode or a sub-atmospheric pressure mode of operation. The computer program product contains computer program code means for causing a processor to perform the method according to claim 12 or any embodiment of the method when the computer program product is executed on the processor.

[0052] According to a further aspect, a computer-readable medium having stored thereon a computer program product for selectively operating the inlet section is contemplated. Alternatively or additionally, the computer-readable medium may have stored thereon a computer program product according to one or more embodiments of the computer program product.

[0053] According to a further aspect of the present invention, a computer program product is envisaged for selectively analysing materials in a vacuum pressure mode or a sub-atmospheric pressure mode of operation using the negative pressure system according to claim 11, or any embodiment of the negative pressure system, the computer program product containing computer program code means for causing a processor to carry out the method according to claim 13, or any embodiment of the method, when the computer program product is executed on a processor.

[0054] According to a further aspect, a computer-readable medium having stored thereon a computer program product for selectively analyzing materials is contemplated. Alternatively or additionally, the computer-readable medium may have stored thereon a computer program product according to one or more embodiments of the computer program product.

[0055] The inlet section according to claim 1, the material analysis system according to claim 10, the negative pressure system according to claim 11, the method according to claim 12, the method according to claim 13, the use according to claim 14, the use according to claim 15, the computer program product and the computer readable medium may have preferred embodiments similar and / or identical to those defined in particular in the dependent claims.

[0056] Furthermore, preferred embodiments of the present invention may also be any combination of the features of the dependent claims or the above embodiments bound to the corresponding independent claim.

[0057] These and further aspects of the invention will now be explained in more detail with reference to the examples shown in the drawings. [Brief explanation of the drawings]

[0058] [Figure 1A] 1 shows a schematic and exemplary view of a first embodiment of an inlet section in the form of a flap-type retractable nozzle arrangement in a sub-atmospheric pressure operating mode; FIG. [Figure 1B] 1A and 1B show a schematic and exemplary view of the first embodiment during a flap-type turning away operation. [Figure 1C] FIG. 2 shows a schematic and exemplary view of the first embodiment in a vacuum pressure mode of operation. [Figure 2A] 1 shows a schematic and exemplary diagram of an embodiment of a negative pressure system with a material analysis system containing a second embodiment of an inlet section in the form of a photoelectron spectroscopy device in a vacuum pressure mode of operation. [Figure 2B] FIG. 1 illustrates a schematic and exemplary embodiment of a negative pressure system in a sub-atmospheric pressure mode of operation. [Figure 3A] FIG. 10 shows a schematic and exemplary diagram of a third embodiment of an inlet section in the form of a slidable nozzle in a sub-atmospheric pressure mode of operation. [Figure 3B] 10 shows a schematic and exemplary diagram of a third embodiment of an inlet section in the form of a slidable nozzle in a vacuum pressure mode of operation; FIG. [Figure 4A] FIG. 10 is a schematic, exemplary illustration of a fourth embodiment of the inlet section in cross-sectional view in a sub-atmospheric pressure mode of operation. [Figure 4B] FIG. 10 is a schematic, exemplary illustration of a fourth embodiment of the inlet section in a vacuum pressure mode of operation. [Figure 5] 1 is an exemplary flow chart of one embodiment of a method for selectively operating an inlet section in a vacuum pressure mode or a sub-atmospheric pressure mode of operation. [Figure 6] 1 is an exemplary flow chart of one embodiment of a method for selectively analyzing materials using a negative pressure system in a vacuum pressure or sub-atmospheric pressure mode of operation. DETAILED DESCRIPTION OF THE INVENTION

[0059] FIG. 1A illustrates a first embodiment of an inlet section 10 of a material analysis system. In this embodiment, the material analysis system is a photoelectron spectroscopy device that receives photoelectrons from a sample and generates an energy-resolved optical emission spectrum. The optical emission spectrum can be used for material analysis. In this first embodiment, the inlet section 10 is a nozzle device that can be rotated back and forth in a flap-like manner. The inlet section 10 is configured to receive photoelectrons emitted from the sample. In other embodiments, the inlet section may be configured to receive other types of charged particles, such as ions, emitted from the sample. The inlet section 10 can be operated in a sub-atmospheric pressure operating mode (see FIG. 1A) or a vacuum pressure operating mode (see FIG. 1C).

[0060] The inlet section 10 has a housing 12 configured to withstand vacuum and sub-atmospheric pressures. In a first embodiment, the housing 12 is formed by two interconnected, pressure-tightly connectable sections 14 and 16 that enclose an interior space 18 extending from a distal end 20 to a proximal end 22. The distal end 20 faces a sample (not shown) during operation of the photoelectron spectroscopy apparatus. The proximal end 22 faces an energy analyzer (not shown) during operation. An entrance opening 24 to the interior space 18 is located at the distal end 20 and receives photoelectrons. An exit opening 26 is located at the proximal end 22 and ejects photoelectrons from the inlet section 10. A seal 28 in the form of an O-ring is located between the interconnectable sections 14 and 16. The interior space 18 can be accommodated by an interior space providing device 30 including a drive device 32 and a bearing in the form of a radial bearing 34 driven by the drive device 32. To this end, the segments 14 can be rotated apart in a flap-like manner about the radial bearing 34, as shown in FIG. 1B, so that the provided interior space 18' extends only from the distal end 20' to the proximal end 22. Thus, the segments 16 form the interior space 18' for the vacuum pressure operating mode, and the connected segments 14 and 16 form the interior space 18 for the sub-atmospheric pressure operating mode. The segments 14 can be rotated apart in a flap-like manner so that they do not interfere with the operation of the inlet section 10. To this end, the segments 14 are rotated apart in a flap-like manner further away from the inlet opening 24', as shown in FIG. 1C. In FIG. 1C, the inlet section 10 is operable in the vacuum pressure operating mode. The sub-pieces 14 can also be flapped away so that the sample (not shown) does not have to be repositioned for the flap-away rotation process.

[0061] The internal space providing device 30 can provide the internal space 18 or 18' depending on the operating mode of the material analysis system. In another embodiment, the internal space providing device can have multiple bearings through which the sections are pivotally connected to one another, and the internal space providing device can be configured to pivot relative to one another to provide an internal space for a subatmospheric pressure operating mode or an internal space for a vacuum pressure operating mode. In the subatmospheric pressure operating mode, the internal space providing device 30 provides the internal space 18 such that the subatmospheric pressure is reduced to vacuum pressure between the distal end 20 and the proximal end 22. To achieve this, the cross-section of the internal space 18 expands along the pressure reduction portion 36 in a direction from the distal end 20 to the proximal end 22 of the internal space 18. The reduction in pressure between the distal end 20 and the proximal end 22 increases the mean free path length of photoelectrons, thereby allowing more photoelectrons to reach the proximal end 22 without colliding with gas molecules. In a sub-atmospheric pressure mode of operation, there is an absolute pressure upstream of the distal end 20, for example 100 mbar, and at the proximal end 22 there is a vacuum pressure, for example about 10 -3 The absolute pressure is then reduced by a further vacuum pump to, for example, 10 mbar on the way to the energy analyzer. -6 The absolute pressure upstream of the distal end 20 may be between 0.1 mbar and 1000 mbar in a sub-atmospheric mode of operation.

[0062] In the vacuum pressure operating mode, upstream of the distal end 20', e.g., 10 -1 mbar~10 -8 mbar, e.g. 10 -3 mbar~10 -6A pressure between 1000 and 1000 mbar is present. The internal space providing device 30 provides the internal space 18' (not shown) such that, in the vacuum pressure operating mode, the solid angle extending within the internal space 18' occupied by photoelectrons emitted from the sample is larger than the solid angle extending within the internal space 18 occupied by photoelectrons emitted from the sample. In this case, the solid angle in the vacuum pressure operating mode is 0.84 sr, and the solid angle in the subatmospheric pressure operating mode is 0.46 sr. In this case, the entrance opening area of ​​the entrance opening 24' of the internal space 18' is also larger than the entrance opening area of ​​the entrance opening 24 of the internal space 18. Furthermore, the distance between the sample and the distal end 20' of the internal space 18' is larger than the distance between the sample and the distal end 20 of the internal space 18 (not shown). Further, in this embodiment, the cross-section of the interior space 18' in the vacuum pressure operating mode expands from the distal end 20' to the proximal end 22' such that the interior space 18' in the vacuum pressure operating mode can receive a solid angle of 0.84 sr. This corresponds to a cone of photoelectrons emitted from the sample during operation of the photoelectron spectroscopy device, having a half angle of 30°. In another embodiment, the cross-section of the interior space in the vacuum pressure operating mode can expand from the distal end to the proximal end such that the solid angle extending within the interior space occupied by charged particles emitted from the sample is between 0.1 sr and 1.47 sr. This corresponds to a cone of charged particles emitted from the sample, having a half angle of between 10° and 40°. In other embodiments, the interior space can receive a cone of charged particles emitted from the sample, having a half angle of, for example, between 0.1° and 40°, between 3° and 40°, or between 20° and 40°.

[0063] The cross section of the interior space 18 in the sub-atmospheric pressure operating mode further expands in this embodiment from the distal end 20 to the proximal end 22 such that the interior space 18 in the sub-atmospheric pressure operating mode subtends a solid angle of 0.46 sr.

[0064] In this embodiment, in the sub-atmospheric pressure operating mode, the inlet opening shape of the inlet opening 24 is circular and has a width of 0.1 mm 2In other embodiments, the inlet opening shape can have other shapes, such as rectangular, oval, or other shapes. Additionally, the inlet opening area in the sub-atmospheric pressure mode of operation can have other sizes, such as 0.0003 mm. 2 ~1mm 2 Between, for example, 0.03 mm 2 ~0.8mm 2 Between, especially 0.07mm 2 ~0.8mm 2 It may be a size between.

[0065] In this embodiment, the inlet opening shape of the inlet opening 24' in the vacuum pressure operating mode is circular and has a width of 100 mm 2 In other embodiments, the inlet opening shape can have other shapes, such as rectangular, oval, or other shapes. Additionally, the inlet opening area in the vacuum pressure mode of operation can have other sizes, such as 1 mm 2 Super~1000mm 2 Between, especially 20mm 2 ~300mm 2 It may be a size between.

[0066] In this embodiment, the spacing between the sample and the distal end 20' of the interior space 18' in the vacuum pressure operating mode is 10 mm. In other embodiments, the spacing between the sample and the distal end 20' of the interior space 18' in the vacuum pressure operating mode may be between 1 mm and 40 mm, particularly between 5 mm and 20 mm.

[0067] In the following examples, the same reference numerals are used for the same features, and a further description of the features is omitted where such a description is not necessary for understanding.

[0068] 2A illustrates one embodiment of a negative pressure system 100. The negative pressure system 100 can be used for, for example, surface analysis, surface reaction measurements, liquid-solid reaction measurements, liquid-gas reaction measurements, liquid measurements, thin film measurements, detection of foreign matter in liquids, optical emission measurements, photoelectron spectroscopy measurements at near atmospheric pressure, X-ray photoelectron spectroscopy measurements at near atmospheric pressure, electrochemical measurements, battery analysis, oxidation measurements, electrolyte measurements, electrode measurements, through-liquid sample measurements, quality control, corrosion measurements, catalyst measurements, pressure-dependent measurements, biological sample measurements, potentiometric measurements, supersaturated liquid measurements, or microelectronic device analysis.

[0069] The negative pressure system 100 contains a negative pressure housing 102 configured for vacuum and sub-atmospheric pressures, an illumination system 40 for illuminating a sample 42, and a material analysis system in the form of a photoelectron spectroscopy instrument 50 for analyzing the sample 42.

[0070] The negative pressure housing 102 airtightly encloses a hollow space 104. The negative pressure housing 102 has an X-ray transparent window 108, an airtightly closable transfer opening 110 for placing a sample 42 on a sample holder 44 arranged in the hollow space 104, and a connection opening 111 for connection to the photoelectron spectrometer 50. In this case, the sample holder 44 is a tiltable and movable platform for placing the sample 42 below the photoelectron spectrometer 50. The hollow space 104 is set to a predetermined absolute pressure by a vacuum pump 112.

[0071] The illumination system 40 includes an electron gun 45, a target anode 46, and an X-ray monochromator 48. The illumination system 40 generates X-rays by firing electrons from the electron gun 45 onto the target anode 46. The target anode 46 is made of a material, such as Al, Ag, or Cr, that generates characteristic X-rays with a predetermined energy. The X-ray monochromator 48 generates monochromatic X-rays 106 from the X-rays. The sample 42 is illuminated by the monochromatic X-rays 106 to excite photoelectrons 114. The photoelectrons 114 are emitted from the sample 42 and received by the photoelectron spectrometer 50.

[0072] The photoelectron spectrometer 50 contains a second embodiment of the entrance section 10' with a conical iris diaphragm 15, an electron optical lens 52, an analyzer 54 in the form of a hemispherical energy analyzer, and a detector 56 in the form of a CMOS detector. In alternative embodiments, any other embodiment of the entrance section can also be used with a material analysis system and / or in a negative pressure system.

[0073] A detector 56 is connected to the entrance section 10' via the lens 52 and the analyzer 54 and is capable of detecting photoelectrons emitted from the sample 42. In alternative embodiments, the detector may be configured to detect other types of charged particles emitted from the sample.

[0074] In this embodiment, the conical iris diaphragm 15 of the entrance section 10' is formed of a thin metal film. The film has a wall thickness of 5 μm. In another embodiment, the wall thickness may be, for example, between 1 μm and 50 μm. The film is suspended within the housing 12 of the entrance section 10' and rolled into a funnel shape. Therefore, by sliding the film at one or more points of application of the film using the interior space providing device 30, the distance d between the sample 42 and the distal end of the interior space 18' (see FIG. 2A) or 18 (see FIG. 2B) is changed. This additionally changes the entrance shape of the solid angle extending into the interior space 18' or 18 occupied by the photoelectrons 114 emitted from the sample 42 and the entrance opening area of ​​the entrance opening of the entrance section 10'. The entrance shape can be changed between a circular shape and an elliptical shape. As the distance d increases, the entrance opening area and the solid angle also increase. That is, this enables the internal space providing device 30 to provide an internal space 18 for a sub-atmospheric pressure operating mode (see FIG. 2B) and an internal space 18' for a vacuum pressure operating mode (see FIG. 2A).

[0075] In this embodiment, the lens 52 has a number of pressure stages, in which the absolute pressure is gradually reduced. For this purpose, vacuum pumps 58 and 59 are provided, which pump the internal spaces of the pressure stages of the lens 52. This allows for a further reduction in the pressure upstream of the analyzer 54. The lens 52 is used to guide the photoelectrons 114 from the proximal end of the inlet section 10' to the analyzer 54. In another embodiment, the inlet section 10' may be part of the lens.

[0076] In the analyzer 54 , the photoelectrons 114 are spatially separated based on their kinetic energy and directed to a detector 56 .

[0077] Detector 56 receives and detects photoelectrons 114, thereby generating an energy-resolved photoemission spectrum of sample 42, allowing analysis of the sample 42. Upstream of detector 56, in this embodiment, -6 An absolute pressure of mbar is set. For this purpose, the material analysis system may be provided with additional vacuum pumps (not shown) in addition to the vacuum pumps 58 and 59. In other embodiments, other vacuum pressures may be set.

[0078] 3A and 3B show a third embodiment of the inlet section 10″ in the form of a slidable nozzle. Unlike the first embodiment, the nozzle in the third embodiment is not rotated away from the flaps in a flap-like manner, but is instead slid linearly. For this purpose, the interior space providing device 30 has a sliding guide 35 driven by a drive device 32, which slides the sub-piece 14 of the inlet section 10″ between a position connected to the sub-piece 16 for a subatmospheric pressure operating mode (see FIG. 3A) and a position separated from the sub-piece 16 for a vacuum pressure operating mode (see FIG. 3B).

[0079] FIG. 4A shows a fourth embodiment of the inlet section 10''' in a cross-sectional view in a sub-atmospheric pressure operating mode. The fourth embodiment of the inlet section 10''' is similar to the first embodiment of the inlet section 10. However, unlike the first embodiment of the inlet section 10, the fourth embodiment of the inlet section 10''' has, among other things, a gap seal between the sections 14 and 16 instead of an O-ring.

[0080] Each of the segments 14 and 16 has one sealing portion 64 or 66. The sealing portions 64 and 66 overlap each other when the segments 14 and 16 are interconnected, thus creating a pressure-tight connection such that, in a subatmospheric pressure operating mode, reducing the subatmospheric pressure to a vacuum pressure between the distal end 20 and the proximal end 22 of the interior space 18 is not hindered by the intrusion of particles, particularly gas particles, between the segments 14 and 16. In this embodiment, the gas flow rate through the sealing portions 64 and 66 is less than 5% of the gas flow rate through the inlet opening 24. In other embodiments, different sealing rates can be achieved by the sealing portions 64 and 66, for example, a lower sealing rate with a gas flow rate of, for example, up to 20% of the gas flow rate through the inlet opening, or a higher sealing rate with a gas flow rate of, for example, less than 1% of the gas flow rate through the inlet opening.

[0081] In the fourth embodiment of the inlet section 10''', the internal space providing device 30 has two radial bearings 34' and 34'' (see FIG. 4B). The first radial bearing 34' allows the sub-piece 14 to pivot around the sub-piece 16. The second radial bearing 34'' allows the sub-piece 14 to pivot around an additional axis, thereby enabling an improved pressure-tight connection to be formed between the sub-pieces 14 and 16. To this end, the internal space providing device 30 can press one sub-piece 14 against the other sub-piece 16 when forming the pressure-tight connection between the sub-pieces 14 and 16, such that parts of the sealing portions 64 and 66 of the sub-pieces 14 and 16 directly overlap. Furthermore, in this embodiment, the sub-pieces 14 and 16 concentrically overlap via the sealing portion 68 (see FIG. 4A).

[0082] Like the other embodiments, the fourth embodiment of the inlet section 10''' is operable in a sub-atmospheric pressure mode of operation (see FIG. 4A) and a vacuum pressure mode of operation (see FIG. 4B). In the vacuum pressure mode of operation, the solid angle α' extending into the interior space 18' occupied by the photoelectrons 114 emitted from the sample 42 is larger than the solid angle α extending into the interior space 18 occupied by the photoelectrons 114 emitted from the sample 42 in the sub-atmospheric pressure mode of operation.

[0083] The distal end 20 or 20' is positioned adjacent to a sample 42 disposed on a sample holder 44. Preferably, the sample 42 is spaced between 1 and 2 times the diameter of the circular entrance opening. In this embodiment, the sample is centered relative to the optical axis 70 of the entrance section 10''', which is the same as the optical axis of a lens (not shown) disposed at the proximal end 22 of the entrance section 10''' that directs the photoelectrons 114 to an analyzer. The analyzer again resolves the photoelectrons into energy and directs them to a detector so that they can be detected.

[0084] FIG. 5 illustrates one embodiment of a method 500 for selectively operating an inlet section, such as one of the inlet section embodiments of FIGS. 1-4, in a vacuum pressure mode or a sub-atmospheric pressure mode of operation.

[0085] A sub-atmospheric pressure or vacuum pressure mode of operation is selected in step 502. The mode of operation may be selected automatically, for example, based on a pressure measurement upstream of the distal end of the interior space of the inlet section, or may be selected manually by a user.

[0086] In step 504, an internal space is provided depending on the selected operating mode. If a subatmospheric pressure operating mode is selected, the internal space is provided such that the subatmospheric pressure is reduced to vacuum pressure from the distal end to the proximal end of the internal space. If a vacuum pressure operating mode is selected, the internal space is provided such that the solid angle occupied by charged particles emitted from the sample within the internal space is larger than in the subatmospheric pressure operating mode, and the distance between the sample and the distal end of the internal space is larger than in the subatmospheric pressure operating mode. Furthermore, the inlet opening area of ​​the inlet opening is also larger. The internal space can be provided in various ways depending on the type of inlet section. For example, two interconnected sections can be rotated apart in a flap-like manner by rotating one section away from the other in an opposing manner. This can increase the inlet opening area and simultaneously increase the distance between the sample and the distal end of the internal space provided herein.

[0087] FIG. 6 illustrates one embodiment of a method 600 for selectively analyzing materials using a negative pressure system, such as the negative pressure system shown in FIGS. 2A and 2B, in a vacuum pressure or sub-atmospheric pressure mode of operation.

[0088] In step 602, a sample is provided in a vacuum housing of a vacuum system.

[0089] In step 604, the inlet section of the negative pressure system is operated according to method 500. To this end, first, in step 502, a sub-atmospheric pressure or vacuum pressure operating mode is selected, and then, in step 504, an interior space is provided depending on the selected operating mode.

[0090] In step 606, the pressure upstream of the distal end of the interior space of the inlet section is set depending on the operating mode. For this purpose, the pressure in the negative pressure housing can be set, for example. Alternatively, the pressure in the region of the sample can be set only locally. In a subatmospheric pressure operating mode, the pressure is set so that subatmospheric pressure exists upstream of the distal end of the interior space, and in a vacuum pressure operating mode, vacuum pressure exists upstream of the distal end of the interior space. Steps 604 and 606 can also be performed in the reverse order. For example, if the operating mode is selected automatically, for example based on a pressure measurement, the pressure can be set first in step 606, which then leads to the automatic selection of the operating mode in step 502.

[0091] In step 608, the sample is illuminated by an illumination system, for example by irradiating the surface of the sample with monochromatic X-rays of a predetermined wavelength or energy.

[0092] In step 610, charged particles emitted from the sample are detected in a detector. For example, photoelectrons emitted from the sample, excited by monochromatic X-rays, can be detected in the detector. Before the photoelectrons are detected, they can be guided through an energy analyzer, for example in the form of a hemispherical energy analyzer, so that their kinetic energy can be resolved.

[0093] The method for selective analysis can be used for, for example, surface analysis, surface reaction measurements, liquid-solid reaction measurements, liquid-gas reaction measurements, liquid measurements, thin film measurements, detection of foreign matter in liquids, optical emission measurements, photoelectron spectroscopy measurements at near atmospheric pressure, X-ray photoelectron spectroscopy measurements at near atmospheric pressure, electrochemical measurements, battery analysis, oxidation measurements, electrolyte measurements, electrode measurements, through-liquid sample measurements, quality control, corrosion measurements, catalyst measurements, pressure-dependent measurements, biological sample measurements, potentiometric measurements, measurements of supersaturated liquids, or analysis of microelectronic devices.

[0094] The above description of the present invention in conjunction with the drawings is used to exemplarily explain the features of the present invention in the form of embodiments. However, the features described in the embodiments are merely exemplary and should not be understood as limiting. In particular, the present invention is not limited to the embodiments or to the combination of features of the individual embodiments. For example, in one embodiment, the present invention can be operated in conjunction with another material analysis system that analyzes other charged particles, such as ions.

[0095] Other variations and modifications of the examples provided can be conceived and effected by those skilled in the art by modifying the claimed invention in light of the drawings, the specification and the claims.

[0096] The words "contain", "have" and "include" do not exclude further elements, components or steps and the indefinite article "a" or "an" does not exclude a plurality.

[0097] A unit, processor or device may, for example, fulfill several functions of different objects recited in the claims. The mere fact that certain means are recited in mutually different claims does not indicate that a combination of these means cannot be used to advantage.

[0098] Method steps, such as selecting a sub-atmospheric pressure or a vacuum pressure operating mode, providing an interior space depending on the selected operating mode, etc., performed by one or more units, components or devices, may also be performed by a different number of units, components or devices. These method steps and / or methods may be implemented or envisioned, for example, as computer program code or computer program code means and / or as predetermined hardware.

[0099] The computer program product may be stored or provided on a suitable medium, such as, for example, an optical storage medium or a solid-state medium. The computer program product may also be provided together with or as part of other hardware. Furthermore, the computer program product may be provided in other ways, such as, for example, over the Internet, Ethernet, or other wired or wireless communication systems.

[0100] Reference signs used in the claims should not be understood as limiting features of the embodiments, but are merely illustrative for features of the claims.

[0101] The present invention relates to providing an internal space suitable for a subatmospheric pressure mode of operation and a vacuum pressure mode of operation in an inlet section of a material analysis system. The inlet section has a housing configured for vacuum pressure and subatmospheric pressure, the housing having an internal space that can be provided depending on the operation mode of the material analysis system, the internal space being configured to receive charged particles emitted from a sample through an inlet opening at a distal end of the internal space. The inlet section further has an internal space providing device configured to provide the internal space such that, in the subatmospheric pressure mode of operation, the subatmospheric pressure is reduced to vacuum pressure between the distal end and the proximal end of the internal space, and to provide the internal space such that, in the vacuum pressure mode of operation, the solid angle extending within the internal space occupied by charged particles emitted from the sample in the vacuum pressure mode of operation and the distance between the sample and the distal end of the internal space are larger than in the subatmospheric pressure mode of operation. This allows the inlet section to receive more electrons per unit time when the pressure environments of the inlet section are different, enabling improved analysis of the sample.

Claims

1. An inlet section (10; 10'; 10"; 10'") of a material analysis system (50) for charged particles (114) emitted from a sample (42), comprising: the inlet section (10; ...; 10''') has a housing (12) configured for vacuum pressure and sub-atmospheric pressure, the housing (12) having an internal space (18; 18') that can be provided depending on an operation mode of the material analysis system (50), the internal space (18; 18') being configured to receive the charged particles (114) through an inlet opening (24) at a distal end (20; 20') of the internal space (18; 18'); the inlet section (10; ...; 10''') has an interior space providing device (30), the interior space providing device (30) configured to provide the interior space (18; 18') such that in a sub-atmospheric pressure operating mode, the sub-atmospheric pressure is reduced to a vacuum pressure between the distal end (20) and the proximal end (22) of the interior space (18); configured to provide the interior space (18') such that in a vacuum pressure mode of operation, the solid angle (α, α') subtended within the interior space (18') by the charged particles (114) emitted from the sample (42) and the distance (d) between the sample (42) and the distal end (20') of the interior space (18') are greater than in the subatmospheric pressure mode of operation. Entrance section (10; 10'; 10''; 10''').

2. a cross-section of the interior space (18) in the sub-atmospheric pressure operating mode expanding in a direction from the distal end (20) toward the proximal end (22) of the interior space (18) at least along a pressure reduction portion (36) of the interior space (18); 2. The inlet section (10; ...; 10'') according to claim 1.

3. the cross section of the interior space (18') in the vacuum pressure operating mode expands from the distal end (20') to the proximal end (22) such that the solid angle (α, α') subtended within the interior space (18') by the charged particles (114) emitted from the sample (42) is between 0.1 sr and 1.47 sr, preferably between 0.21 sr and 0.84 sr; 3. An inlet section (10; ...; 10''') according to claim 1 or 2.

4. The inlet opening area of ​​the inlet opening (24) in the sub-atmospheric pressure operating mode is 0.0003 mm ２ ~1mm ２ Between, especially 0.07 mm ２ ~0.8mm ２ The size is between The inlet opening area of ​​the inlet opening (24) in the vacuum pressure operating mode is 1 mm ２ Super ~1000mm ２ Between 20mm and 30mm, ２ ~300mm ２ The size is between the distance (d) between the sample (42) and the distal end (20') of the internal space (18') in the vacuum pressure operating mode is between 1 mm and 40 mm, in particular between 5 mm and 20 mm; An inlet section (10; . . . 10''') according to at least one of claims 1 to 3.

5. the inlet section (10; 10''; 10''') has at least two interconnectable pieces (14; 16), a first piece (16) having said interior space (18') for said vacuum pressure mode of operation; The connected pieces (14, 16) define the interior space (18) for the sub-atmospheric pressure operating mode. An inlet section (10; 10''; 10''') according to at least one of claims 1 to 4.

6. The pieces (14, 16) each have one sealing portion (64, 66); The sealing portions (64, 66) are The pieces (14, 16) are configured to overlap each other when connected to each other, In the sub-atmospheric pressure operating mode, reducing the sub-atmospheric pressure to a vacuum pressure between the distal end (20) and the proximal end (22) of the interior space (18) is configured to create a pressure-tight connection between the pieces (14, 16) that is not disturbed by particle ingress. The inlet section (10'') according to claim 5.

7. the interior space providing device (30) is configured to press one of the partial pieces (14) against the other partial piece (16) so that at least a portion of the sealing portions (64, 66) of the partial pieces (14, 16) directly overlap when forming the pressure-tight connection between the partial pieces (14, 16). The inlet section (10'') according to claim 6.

8. the interior space providing device (30) has at least one bearing (34; 34', 34''), and the partial pieces (14, 16) are pivotally connected to each other via the at least one bearing (34; 34', 34''); the internal space providing device (30) is configured to pivot the sub-pieces (14, 16) relative to one another so as to provide the internal space (18) for the sub-atmospheric pressure operating mode or the internal space (18') for the vacuum pressure operating mode. An inlet section (10; 10''; 10''') according to at least one of claims 5 to 7.

9. The pieces (14, 16) are concentrically overlapping each other via a sealing section (68). An inlet section (10''') according to at least one of claims 5 to 8.

10. a material analysis system (50) configured to analyze the sample, the material analysis system (50) comprising: a detector (56) for detecting charged particles emitted from the sample (42); an inlet section (10') according to at least one of claims 1 to 9, connected to said detector (56); A materials analysis system (50) having:

11. A negative pressure system (100), comprising: a negative pressure housing (102) configured for vacuum and sub-atmospheric pressures for hermetically enclosing a hollow space (104) for placing the sample (42); an illumination system (40) for illuminating said sample (42); a material analysis system (50) according to claim 10 for analyzing the sample (42); A negative pressure system (100) having:

12. 10. A method (500) for selectively operating an inlet section according to any one of claims 1 to 9 in a vacuum pressure mode or a sub-atmospheric pressure mode of operation, said method (500) comprising: selecting the sub-atmospheric pressure mode of operation or the vacuum pressure mode of operation; - depending on the selected operating mode, providing an internal space such that in the sub-atmospheric pressure operating mode, the internal space is provided such that the sub-atmospheric pressure is reduced to a vacuum pressure from a distal end to a proximal end of the internal space, and in the vacuum pressure operating mode, the solid angle (α, α') subtended in the internal space (18') by the charged particles (114) emitted from the sample (42) in the vacuum pressure operating mode and the distance between the sample and the distal end of the internal space are larger than in the sub-atmospheric pressure operating mode; A method (500) comprising:

13. 12. A method (600) for selectively analyzing materials in a vacuum pressure or sub-atmospheric pressure mode of operation using a negative pressure system according to claim 11, said method (600) comprising: - providing a sample in a vacuum housing of the vacuum system; - operating the inlet section according to the method of claim 12; setting a pressure upstream of a distal end of an interior space of the inlet section depending on an operating mode such that in a sub-atmospheric pressure operating mode, sub-atmospheric pressure exists upstream of the distal end of the interior space, and in a vacuum pressure operating mode, vacuum pressure exists upstream of the distal end of the interior space; - illuminating the sample by an illumination system; - detecting the charged particles emitted from the sample in a detector; A method (600) comprising:

14. 12. A method of using the negative pressure system (100) of claim 11, comprising: ・Surface analysis, - Measurement of surface reactions, - Measurement of liquid and solid reactions, - Measurement of liquid and gas reactions, - Liquid measurement, - Thin film measurements, -Detection of foreign objects in liquids, ・Light emission measurement, - Photoelectron spectroscopy measurements at near atmospheric pressure, - X-ray photoelectron spectroscopy measurements at near atmospheric pressure, electrochemical measurements, Battery analysis, - Oxidation measurement, ・Electrolyte measurement, ・Electrode measurement, - Sample measurement through liquid, ・Quality control, - Corrosion measurement, ・Catalysis measurement, Pressure-dependent measurements, - Measurement of biological samples, Potential difference measurement, - Measurement of supersaturated liquids, - Analysis of microelectronic devices, How to use:

15. 14. A method of using the method (600) of claim 13, comprising: ・Surface analysis, - Measurement of surface reactions, - Measurement of liquid and solid reactions, - Measurement of liquid and gas reactions, - Liquid measurement, - Thin film measurements, -Detection of foreign objects in liquids, ・Light emission measurement, - Photoelectron spectroscopy measurements at near atmospheric pressure, - X-ray photoelectron spectroscopy measurements at near atmospheric pressure, electrochemical measurements, Battery analysis, - Oxidation measurement, ・Electrolyte measurement, ・Electrode measurement, - Sample measurement through liquid, ・Quality control, - Corrosion measurement, ・Catalysis measurement, Pressure-dependent measurements, - Measurement of biological samples, Potential difference measurement, - Measurement of supersaturated liquids, - Analysis of microelectronic devices, How to use:

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