Multi-Transport Level Tester System

The multi-transport level tester system addresses space inefficiencies and throughput limitations by implementing a multi-level design, significantly reducing floor space and enhancing testing efficiency and capacity.

JP2025539204APending Publication Date: 2025-12-03WOLFSPEED INC
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Patent Information

Application Number
JP2025533173
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Priority Date
2022-12-08
Filing Date
2023-12-06
Publication Date
2025-12-03

AI Technical Summary

Technical Problem

Existing tester systems occupy excessive floor space and are inefficient in throughput and capacity, leading to increased costs and delays in identifying failed units under test (UUTs) due to their linear configuration.

Method used

A multi-transport level tester system with multiple levels and environmental conditioning chambers, including transfer devices and test stations, reduces floor space usage by 30% to 70% while increasing throughput and capacity through a multi-tiered design.

Benefits of technology

The multi-transport level tester system efficiently reduces floor space and enhances throughput and capacity, enabling rapid identification of acceptable and failed UUTs, thereby reducing testing time and costs.

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Abstract

A multi-transport level tester system according to some embodiments includes a first transport level having an entry point, an exit point, a first level, and at least one additional transport level, the first level being different from the at least one additional level. The multi-transport level tester system further includes at least one environmental conditioning chamber configured to perform environmental conditioning on the units under test and at least one test station configured to perform at least one test on the units under test.
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Description

[Technical Field]

[0001] This application claims priority to U.S. Patent Application No. 18 / 077,869, filed December 8, 2022, the entire disclosure of which is incorporated herein by reference.

[0002] The present disclosure relates to a multi-transport level tester system, and more particularly, exemplary embodiments of the present disclosure relate to a multi-transport level tester system configured to test units under test (UUTs), such as, for example, semiconductor-based power modules. [Background technology]

[0003] The tester system includes components for performing various tests on the UUT, for example, tests are performed on semiconductor-based power modules to ensure that the power module functions properly after the manufacturing and production process.

[0004] The components included in a tester system may include several test stations and other components for conducting tests under various conditions to determine whether the performance of each UUT under the test conditions is acceptable or rejected. The test system components may be configured with linear dimensions on a single level, for example, parallel to the floor of a manufacturing facility. As a result, the floor space occupied by such a tester system is typically equal to or greater than the sum of the areas of the components and the interconnections between the tester system components. Summary of the Invention [Means for solving the problem]

[0005] A multi-transport level tester system according to some embodiments includes an entry point, an exit point, a first transport level having a first level, and a second transport level having a second level, the first level being different from the second level. The multi-transport level tester system further includes a first environmental conditioning chamber configured to perform a first environmental conditioning on the UUT, a second environmental conditioning chamber configured to perform a second environmental conditioning on the UUT, and a first test station configured to perform a first test on the UUT.

[0006] The entry point may be adjacent to the exit point. The multi-transport level tester system may further include a first end of the multi-transport level tester system, a second end of the multi-transport level tester system, a first side of the multi-transport level tester system, and a second side of the multi-transport level tester system. The multi-transport level tester is configured between the first end and the second end and between the first side and the second side.

[0007] The entry point and exit point may be configured at one or more of the first end, the second end, the first side, and the second side, and at least one of the first end and the second end of the multi-transport level tester system.

[0008] The first level and the second level may each be a level substantially between a first end and a second end of the multi-transport level tester system.

[0009] The first level may have a variable level within the first transport level.

[0010] The second level may have a variable level within the second transport level.

[0011] The entry point may be configured to receive the UUT and may include a first transport device configured to handle one or more tiers.

[0012] The entry point may be configured to accept the UUT at the second transport level, and the first transport device may be configured to move the UUT between one or more tiers within the second transport level.

[0013] The entry point may be configured to accept the UUT at a first transport level, and the first transport device may be configured to move the UUT between one or more tiers within the first transport level.

[0014] The first transfer device may include a shelving system having one or more tiers of at least one shelf and an end effector configured to move the UUT from the at least one shelf toward the first test station.

[0015] The first test station may be configured to accept and output UUTs at the second transport level.

[0016] The first test station may be configured to accept and output UUTs at a first transport level.

[0017] The first environmental conditioning chamber may be configured to receive and output UUTs at the second transport level.

[0018] The first environmental conditioning chamber may be configured to receive UUTs at the second transport level and output UUTs at the first transport level.

[0019] The first environmental conditioning chamber may be configured to receive UUTs at a first transport level and output UUTs at a second transport level.

[0020] The first environmental conditioning chamber may be configured to receive the UUT and may include a second transfer device having one or more levels, and the second transfer device may be configured to move the UUT between the one or more levels.

[0021] The first environmental conditioning chamber may be configured to receive the UUT at the second transport level, and the second transport device may be configured to output the UUT at the second transport level.

[0022] The first environmental conditioning chamber may be configured to receive the UUT at the second transport level, and the second transport device may be configured to output the UUT at the first transport level.

[0023] The first environmental conditioning chamber may be configured to receive the UUT at a first transport level, and the second transport device may be configured to output the UUT at a second transport level.

[0024] The second transfer device may include at least one of: (i) a belt-driven conveyor, (ii) a chain-driven conveyor, (iii) a cable-driven conveyor, (iv) a two or more axis robot, and (iv) a shelving system having an end effector configured to move each shelf on one level of the one or more levels and the UUT toward an output of the first environmental conditioning chamber.

[0025] The first environmental conditioning chamber may include an environmental controller configured to control at least one of: (i) temperature, (ii) atmospheric conditions, (iii) humidity, (iv) electromagnetic radiation, and (v) pressure.

[0026] The second environmental conditioning chamber may be configured to receive UUTs at the second transport level and output UUTs at the first transport level.

[0027] The second environmental conditioning chamber may be configured to receive UUTs at the first transport level and output UUTs at the second transport level.

[0028] The multi-transport level tester system may further include a third transport level having a third level, and the second environmental conditioning chamber may be configured to receive the UUT at the second transport level and output the UUT at the third transport level.

[0029] The second environmental conditioning chamber may be configured to receive the UUT and may include a third transfer device having one or more levels, and the third transfer device may be configured to move the UUT between the one or more levels.

[0030] A second environmental conditioning chamber may be configured to receive the UUT at the second transport level, and a third transport device may be configured to output the UUT at the first transport level.

[0031] A second environmental conditioning chamber may be configured to receive the UUT at the first transport level, and a third transport device may be configured to output the UUT at the second transport level.

[0032] The multi-transport level tester system may further include a third transport level having a third level, the second environmental conditioning chamber may be configured to receive the UUT at the second transport level, and the third transport device may be configured to output the UUT at the third transport level.

[0033] The third transfer device may include at least one of (i) a belt-driven conveyor, (ii) a chain-driven conveyor, (iii) a cable-driven conveyor, (iv) a two or more axis robot, and (iv) a shelving system having an end effector configured to move each shelf on one of the one or more levels and the UUT at the first transport level toward the output of the second environmental conditioning chamber.

[0034] The third transfer device may include at least one of (i) a belt-driven conveyor, (ii) a chain-driven conveyor, (iii) a cable-driven conveyor, (iv) a two or more axis robot, and (iv) a shelving system having an end effector configured to move each shelf on one of the one or more levels and the UUT at the second transport level toward an output of the second environmental conditioning chamber.

[0035] The third transport device may include at least one of (i) a belt-driven conveyor, (ii) a chain-driven conveyor, (iii) a cable-driven conveyor, (iv) a two or more axis robot, and (iv) a shelving system having an end effector configured to move each shelf on one of the one or more levels and the UUT at the third transport level toward an output of the second environmental conditioning chamber.

[0036] The second environmental conditioning chamber may include an environmental controller configured to control at least one of: (i) temperature, (ii) atmospheric conditions, (iii) humidity, (iv) electromagnetic radiation, and (v) pressure.

[0037] The multi-transport level tester system may further include a second test station that may be configured to accept and output UUTs at a second transport level.

[0038] The multi-transport level tester system may further include a second test station that may be configured to accept and output UUTs at the first transport level.

[0039] The multi-transport level tester system may further include a third test station that may be configured to accept and output UUTs at the first transport level.

[0040] The multi-transport level tester system may further include a third test station that may be configured to accept and output UUTs at the second transport level.

[0041] The multi-transport level tester system may further include a fourth test station that may be configured to accept and output UUTs at the first transport level.

[0042] The multi-transport level tester system may further include a fourth test station that may be configured to accept and output UUTs at the second transport level.

[0043] The multi-transport level tester system may further include a third transport level having a third level and a third test station that may be configured to accept a UUT at the second transport level and output the UUT to the third transport level.

[0044] The exit point may be configured to output the UUT and may include a fourth transport device having one or more tiers.

[0045] The exit point may be configured to accept and output UUTs at the first transport level, and the fourth transport device may be configured to move UUTs between one or more tiers within the first transport level.

[0046] The fourth transfer device may include a shelving system having one or more tiers of at least one shelf and an end effector configured to move the UUT from the at least one shelf toward an output of the exit point.

[0047] The multi-transport level tester system may include a linear footprint that is approximately 30% to 70% smaller than the linear arrangement at one transport level of at least the entry point, the exit point, the first environmental conditioning chamber, the second environmental conditioning chamber, and the first test station.

[0048] The UUT may include a semiconductor-based power module.

[0049] In some embodiments, the multi-transport level tester system includes a first transport level having an entry point, at least one exit point, a first level, and at least one additional transport level having at least one additional level, the first level being different from the at least one additional level. The multi-transport level tester system further includes at least one environmental conditioning chamber configured to perform environmental conditioning on the plurality of units under test and at least one test station configured to perform at least one test on the plurality of units under test.

[0050] The entry point and at least one exit point may be configured at one or more of the first end, the second end, the first side, and the second side, and at least one of the first end and the second end of the multi-transport level tester system.

[0051] The first level and the at least one additional level may each be a level substantially between a first end and a second end of the multi-transport level tester system.

[0052] The first level may have a variable level within the first transport level.

[0053] The at least one additional level may have a variable level within the at least one additional transport level.

[0054] The entry point may be configured to receive a unit under test and may include a first transport device configured to handle one or more tiers.

[0055] The entry point may be configured to accept the unit under test at at least one additional transport level, and the first transport device may be configured to move the unit under test between one or more tiers within the at least one additional transport level.

[0056] The entry point may be configured to accept the unit under test at a first transport level, and the first transport device may be configured to move the unit under test between one or more tiers within the first transport level.

[0057] The first transport device may include a shelving system having one or more tiers of at least one shelf and an end effector configured to move the unit under test from the at least one shelf towards the first test station.

[0058] The first test station may be configured to accept and output units under test at at least one additional transport level.

[0059] The first test station may be configured to accept and output units under test at a first transport level.

[0060] At least one environmental conditioning chamber may be configured to receive and output units under test at at least one additional transport level.

[0061] At least one environmental conditioning chamber may be configured to receive units under test at at least one additional transport level and to output units under test at the first transport level.

[0062] At least one environmental conditioning chamber may be configured to receive units under test at a first transport level and to output units under test at at least one additional transport level.

[0063] The at least one environmental conditioning chamber may be configured to receive the unit under test and may include a second transport device having one or more levels, the second transport device being configured to move the unit under test between the one or more levels.

[0064] The at least one environmental conditioning chamber may be configured to receive units under test at at least one additional transport level, and the second transport device may be configured to output units under test at the at least one additional transport level.

[0065] At least one environmental conditioning chamber may be configured to receive units under test at at least one additional transport level, and a second transport device may be configured to output units under test at the first transport level.

[0066] At least one environmental conditioning chamber may be configured to receive units under test at a first transport level, and a second transport device may be configured to output units under test at at least one additional transport level.

[0067] The second transport device may include at least one of: (i) a belt-driven conveyor, (ii) a chain-driven conveyor, (iii) a cable-driven conveyor, (iv) a two or more axis robot, and (v) a shelving system having an end effector configured to move each shelf on one level of the one or more levels and the unit under test toward the output of the at least one environmental conditioning chamber.

[0068] The at least one environmental conditioning chamber may include an environmental controller configured to control at least one of: (i) temperature, (ii) atmospheric conditions, (iii) humidity, (iv) electromagnetic radiation, and (v) pressure.

[0069] At least one exit point may be configured to accept and output units under test at the first transport level, and a fourth transport device may be configured to move units under test between one or more tiers within the first transport level.

[0070] The fourth transport device may include a shelving system having one or more tiers of at least one shelf and an end effector configured to move the unit under test from the at least one shelf toward an output of the exit point.

[0071] The multi-transport level tester system may include at least one entry point, at least one exit point, at least one environmental conditioning chamber, and a linear footprint that is approximately 30% to 70% smaller than the linear arrangement at one transport level of the first test station.

[0072] Additional features, advantages, and aspects of the present disclosure may be set forth in or become apparent from a consideration of the following detailed description, drawings, and claims. Moreover, it is to be understood that both the foregoing summary of the disclosure and the following detailed description are illustrative and intended to provide further explanation without limiting the scope of the present disclosure as claimed.

[0073] The accompanying drawings, which are included to provide a further understanding of the present disclosure and are incorporated in and constitute a part of this specification, illustrate aspects of the disclosure and, together with the detailed description, serve to explain the principles of the disclosure. No attempt is made to show structural details of the disclosure beyond what may be necessary for a basic understanding of the disclosure and various ways in which it may be practiced. [Brief explanation of the drawings]

[0074] [Figure 1] FIG. 1 is a block diagram illustrating a multi-transport level tester system 100 according to some embodiments of the present disclosure. [Figure 2A] 1 is a schematic diagram illustrating an example embodiment of a first environmental conditioning chamber including a transfer device according to some embodiments of the present disclosure. [Figure 2B] 1 is a schematic diagram illustrating an example embodiment of a first environmental conditioning chamber including a transfer device according to some embodiments of the present disclosure. [Figure 2C] 10 is a schematic diagram illustrating another exemplary embodiment of a transfer device of a first environmental conditioning chamber according to some embodiments of the present disclosure. [Figure 2D] 10 is a schematic diagram illustrating another exemplary embodiment of a transfer device of a first environmental conditioning chamber according to some embodiments of the present disclosure. [Figure 3A] 1 is a schematic diagram illustrating an example embodiment of a second environmental conditioning chamber including a transfer device according to some embodiments of the present disclosure. [Figure 3B] 1 is a schematic diagram illustrating an example embodiment of a second environmental conditioning chamber including a transfer device according to some embodiments of the present disclosure. [Figure 3C] 10 is a schematic diagram illustrating another exemplary embodiment of a transfer device for a second environmental conditioning chamber according to some embodiments of the present disclosure. [Figure 3D] 10 is a schematic diagram illustrating another exemplary embodiment of a transfer device for a second environmental conditioning chamber according to some embodiments of the present disclosure. [Figure 4A] 10A-10C are schematic diagrams illustrating further exemplary embodiments of conveyor configurations of the transfer devices of the first and / or second environmental conditioning chambers according to some embodiments of the present disclosure. [Figure 4B] 10A-10C are schematic diagrams illustrating further exemplary embodiments of conveyor configurations of the transfer devices of the first and / or second environmental conditioning chambers according to some embodiments of the present disclosure. [Figure 4C]10A-10C are schematic diagrams illustrating further exemplary embodiments of conveyor configurations of the transfer devices of the first and / or second environmental conditioning chambers according to some embodiments of the present disclosure. [Figure 5A] 10 illustrates another exemplary embodiment of a transfer device for a first environmental conditioning chamber according to some embodiments of the present disclosure. [Figure 5B] 10 illustrates another exemplary embodiment of a transfer device for a first environmental conditioning chamber according to some embodiments of the present disclosure. [Figure 5C] 10 illustrates another exemplary embodiment of a transfer device for a first environmental conditioning chamber according to some embodiments of the present disclosure. [Figure 6A] 10 illustrates another exemplary embodiment of a transfer device for a second environmental conditioning chamber according to some embodiments of the present disclosure. [Figure 6B] 10 illustrates another exemplary embodiment of a transfer device for a second environmental conditioning chamber according to some embodiments of the present disclosure. [Figure 6C] 10 illustrates another exemplary embodiment of a transfer device for a second environmental conditioning chamber according to some embodiments of the present disclosure. [Figure 7] 1A-1C illustrate exemplary embodiments of entry and / or exit point transport devices according to some embodiments of the present disclosure. [Figure 8] FIG. 10 is a block diagram of another example embodiment of a multi-transport level tester system according to some embodiments of the present disclosure. [Figure 9] FIG. 10 is a block diagram of another example embodiment of a multi-transport level tester system according to some embodiments of the present disclosure. [Figure 10] FIG. 10 is a block diagram of another example embodiment of a multi-transport level tester system according to some embodiments of the present disclosure. [Figure 11] FIG. 10 is a block diagram of another example embodiment of a multi-transport level tester system according to some embodiments of the present disclosure. [Figure 12]FIG. 10 is a block diagram of another example embodiment of a multi-transport level tester system according to some embodiments of the present disclosure. [Figure 13] FIG. 1 is a block diagram illustrating a top view of an exemplary embodiment of a multi-transport level tester system according to some embodiments of the present disclosure. [Figure 14A] 14 is a block diagram illustrating a top view of an example embodiment of an entry point and an exit point of the multi-transport level tester system of FIG. 13 in accordance with some embodiments of the present disclosure. [Figure 14B] 14 is a block diagram illustrating a top view of an example embodiment of an entry point and an exit point of the multi-transport level tester system of FIG. 13 in accordance with some embodiments of the present disclosure. [Figure 14C] 14 is a block diagram illustrating a top view of an example embodiment of an entry point and an exit point of the multi-transport level tester system of FIG. 13 in accordance with some embodiments of the present disclosure. [Figure 14D] 14 is a block diagram illustrating a top view of an example embodiment of an entry point and an exit point of the multi-transport level tester system of FIG. 13 in accordance with some embodiments of the present disclosure. [Figure 14E] 14 is a block diagram illustrating a top view of an example embodiment of an entry point and an exit point of the multi-transport level tester system of FIG. 13 in accordance with some embodiments of the present disclosure. [Figure 14F] 14 is a block diagram illustrating a top view of an example embodiment of an entry point and an exit point of the multi-transport level tester system of FIG. 13 in accordance with some embodiments of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0075] Embodiments of the inventive concept will be more fully described with reference to non-limiting embodiments and examples. Such embodiments and examples are described and / or illustrated in the accompanying drawings and detailed in the following description. It should be noted that features shown in the drawings are not necessarily drawn to scale. Additionally, features of some embodiments may be utilized by other embodiments, even if not explicitly described herein, as will be understood by those skilled in the art. Descriptions of well-known components and processing techniques may be omitted so as not to unnecessarily obscure aspects of the present disclosure. The examples used herein are intended only to facilitate an understanding of how the present disclosure may be practiced and to enable those skilled in the art to practice aspects of the present disclosure. Therefore, the examples and embodiments herein should not be construed as limiting the scope of the present disclosure, which is defined solely by the appended claims and applicable law. Furthermore, it should be noted that like reference numerals represent like parts throughout the several views of the drawings.

[0076] Although terms such as "first," "second," and the like are used herein to describe various elements, it should be understood that these elements are not limited by these terms. These terms are used only to distinguish one element from another. For example, a first element, a first transport level, or a first level may be referred to as a second element, a second transport level, or a second level, and similarly, a second element, a second transport level, or a second level may be referred to as a first element, a first transport level, or a first level, without departing from the scope of this disclosure. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0077] When an element, such as a component, region, layer, tier, or level, is referred to as being "in" or "on" another element, it will be understood that it may be directly on or extend directly into the other element, or that intervening elements may be present. In contrast, when an element is referred to as being "directly" "on" or "directly" "on" another element, there are no intervening elements. Similarly, when an element, such as a component, region, layer, tier, or level, is referred to as being "on" or extending "on" another element, it will be understood that it may be directly on or extend directly onto the other element, or that intervening elements may be present. In contrast, when an element is referred to as being "directly" "on" or extending "directly" "on" another element, there are no intervening elements. When an element is referred to as being "connected" or "coupled" to another element, it will be understood that this can be directly connected or coupled to the other element, or that intervening elements may be present. In contrast, when an element is referred to as being "directly connected" or "directly coupled" to another element, there are no intervening elements present.

[0078] Relative terms such as "lower" or "above" or "upper" or "bottom" or "horizontal" or "vertical" may be used herein to describe the relationship of one component, element, layer, region, tier, or level to another component, element, layer, region, tier, or level, as shown in the figures. It will be understood that these terms, and those described above, are intended to encompass different orientations of the device in addition to the orientation depicted in the figures.

[0079] The terminology used herein is for the purpose of describing particular aspects only and is not intended to limit the disclosure. As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly dictates otherwise. It will be further understood that the terms "comprises," "comprising," "includes," and / or "including," when used herein, specify the presence of stated features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof.

[0080] Unless otherwise specified, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs. It will be further understood that the terms used herein should be interpreted as having a meaning consistent with their meaning in the context of the present specification and related art, and should not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

[0081] Using floor space for a tester system is inefficient and expensive. Additionally, throughput time and capacity for the number of UUTs handled may also be limited. The capacity for UUTs handled by a tester system is based, in part, on the number of UUTs that fit within the tester system. Such limitations on floor space, throughput, and / or capacity can result in increased costs and delays both in ensuring an acceptable number of UUTs are reliable and meet test requirements and in identifying the number of UUTs that fail to meet test requirements and whether there are manufacturing issues for which corrective action may be desired.

[0082] The present disclosure relates to a multi-transport level tester system configured to perform testing of UUTs and test conditions that reduces the floor space occupied by the tester system. Additionally, some embodiments increase throughput and capacity for the amount of UUTs that can be tested, thereby reducing the amount of time required to determine whether a UUT passes or fails a test performed in the multi-transport level tester system.

[0083] Existing tester systems include a variety of tests used to determine the performance or characteristics of UUTs. Tests may include, but are not limited to, high-temperature tests, ambient temperature tests, alternating current (AC) / direct current (DC) test capabilities at high and / or ambient temperatures, switching tests, high-potential (HiPot) tests, weight control tests, optical inspection tests, International Organization for Standardization (ISO) tests, etc. A UUT may fail to meet one or more of the test criteria and therefore be identified as a failed UUT. Existing tester systems, which are configured linearly within a single level, do not efficiently use the floor space they occupy. Additionally, such systems do not facilitate rapid identification and quantity of acceptable and failed UUTs.

[0084] In some embodiments, based on the inclusion of the multi-transport level tester system of the present disclosure, the multi-transport level tester system can reduce the amount of floor space occupied by the components of the multi-transport level tester system by about 30% to about 70% (or more). Moreover, in some embodiments, the inclusion of a multi-tiered transfer device within the entry point and exit point, first environmental conditioning chamber, and / or second environmental conditioning chamber of the multi-transport level tester system can reduce throughput time and increase UUT processing capacity.

[0085] Some embodiments of the present disclosure provide a multi-transport level tester system including a first transport level having an entry point, an exit point, a first level, and a second transport level having a second level, the first level being different from the second level, and further including a first environmental conditioning chamber configured to perform a first environmental conditioning on the UUT, a second environmental conditioning chamber configured to perform a second environmental conditioning on the UUT, and a first test station configured to perform a first test on the UUT.

[0086] In some embodiments, the multi-transport level tester system further includes a first end of the multi-transport level tester system, a second end of the multi-transport level tester system, a first side of the multi-transport level tester system, and a second side of the multi-transport level tester system, and the multi-transport level tester is configured between the first end and the second end and between the first side and the second side.

[0087] The multi-transport level tester system may further include vision-based components, laser marking components, weigh stations, etc., either incorporated inside the transport levels or as part of configurable implementations of the entry and exit points.

[0088] FIG. 1 is a block diagram illustrating an example multi-transport level tester system 100 according to some embodiments of the present disclosure. For ease of discussion, the example embodiments herein are discussed with reference to a multi-transport level tester system configured to test UUTs including semiconductor-based power modules (e.g., silicon carbide (SiC) power modules). However, the present disclosure is not so limited. Instead, the multi-transport level tester system may be configured to test the following additional examples of UUTs, including, but not limited to, medical components / devices, electronic components, computer components, consumer products, other semiconductor devices, etc. Moreover, while certain example embodiments are discussed herein with reference to a first environmental conditioning chamber being a heating chamber and a second environmental conditioning chamber being a cooling chamber, the present disclosure is not so limited. Alternatively, the first environmental conditioning chamber may be a cooling or other temperature conditioning chamber, and the second environmental conditioning chamber may be a heating chamber of another temperature conditioning chamber.

[0089] Although exemplary example test stations capable of performing specific tests on UUTs at multiple different temperatures (e.g., room temperature and elevated temperature) are discussed herein, other test stations and components may be included. For example, test stations may be included that perform other tests, including, but not limited to, the following additional examples of tests: gravitational testing of the UUT, optical testing, other tests of electrical or other performance characteristics, etc.

[0090] It should also be noted that multi-transport level tester system 100 is illustrative only and may be modified consistent with various aspects disclosed herein. For example, the positioning of components of multi-transport level tester system 100 may be modified at multiple different transport levels and / or at various different locations within different levels within the transport levels, as shown, for example, in the non-limiting illustrative examples of Figures 1 and 8-12 discussed further herein. Moreover, the components and number of components of multi-transport level tester system 100 may be modified to have more or fewer components than those shown in the example of Figure 1 and to have components that perform different test conditions, procedures, and / or different tests consistent with various aspects disclosed herein. For example, a multi-transport level tester system can have any number N of transport levels greater than two and any number N of components greater than one (e.g., one environmental conditioning chamber, three environmental conditioning chambers, one test station, five test stations, one weighing station, etc.) that can be configured according to the particular tests and procedures to be performed by the multi-transport level tester system.

[0091] The multi-transport level tester system 100 depicted in the example of Figure 1 includes components configured within a first transport level and a second transport level, as shown. In the exemplary embodiment of Figure 1, the first transport level includes an input to a system input 102, an entry point 106 within the first transport level, an input and output of a portion of a first environmental conditioning chamber 114 (e.g., a heating chamber), an input and output of a third test station 120, an output of a second environmental conditioning chamber 118 (e.g., a cooling chamber), an output of a system output 104, and an input to a failed UUT 108b. The second transport level includes an output of the entry point 106, an input and output of a first test station 112, an input and output of a first environmental conditioning chamber 114, an input and output of a second test station 116, and an input to the second environmental conditioning chamber 118.

[0092] As shown in the example of Figure 1, in the y-direction of Figure 1, a first transport level extends from approximately floor level to a level corresponding approximately to the height of the person shown, and a second transport level extends from approximately the height of the person shown to a level corresponding to the height of the tallest component within the second transport level. Although the heights of the components shown within the second transport level in Figure 1 are approximately the same, in practice the heights of the components included within the transport layer may vary at different levels within the transport levels.

[0093] 1 and discussed further herein, the inputs / outputs of the various components within the transport level can be at substantially the same level, as indicated by the arrows within the second transport level depicting the flow of UUTs entering entry point 106, entering and exiting first test station 112, entering and exiting first environmental conditioning chamber 114, entering and exiting second test station 116, and entering second environmental conditioning chamber 118. As further shown in FIG. 1, the inputs / outputs of the various components within the transport level can be at different levels, as indicated by the arrows within the first transport level depicting the flow of UUTs exiting second environmental conditioning chamber 118, entering / exiting third test station 120 and fourth test station 122, and exiting exit point 108a, failed UUTs 108b, and system output 104.

[0094] In some embodiments, the first level of the first transport level and the second level of the second transport level are each substantially levels between the first end and the second end of the multi-transport level tester system.

[0095] In some embodiments, the first level of the first transport level has a variable level within the first transport level, and the second level of the second transport level has a variable level within the second transport level.

[0096] An exemplary embodiment of a multi-transport level tester system 100 of FIG. 1 is discussed, where the multi-transport level tester system 100 is configured to perform various tests on semiconductor-based power modules at multiple different temperatures. A UUT, including a semiconductor-based power module, is input to a system input 102 via a transport mechanism, such as a conveyor. The system input 102 is connected to an entry point 106, which may also include components for identifying the UUT. As discussed further herein, in some embodiments, the entry point includes a first transport device configured to accept the UUT and having one or more levels. The entry point 106 is configured to accept the UUT at a first transport level and output the UUT at a second transport level, as shown in this example of FIG. 1. The entry point 106 is further configured to output the UUT to a transport mechanism (e.g., a conveyor (which may include any mechanism for transport, such as a conveyor belt, a Ferris wheel-style conveyor, etc.) or a multi-axis end effector), which inputs the UUT to a first test station 112 located within a second transport level. In an exemplary embodiment, the entry point is configured to accept the UUT at the second transport level, and the first transport device is configured to move the UUT between one or more levels within the second transport level.

[0097] It should also be noted that the entry and exit points to the multi-transport level tester system 100 in the various figures herein are merely illustrative and may be modified consistent with various aspects disclosed herein. For example, FIG. 13 is a block diagram illustrating a top view of an exemplary embodiment of a multi-transport level tester system in accordance with some embodiments of the present disclosure. As shown in FIG. 13, there may be a "merged" entry and exit point 1300 (e.g., instead of the system input 102, system output 104, entry point 106, exit point 108a, and failed UUT 108b shown in the various figures in FIGS. 1-12). The merged entry and exit point 1300 may include, for example, a single entry / exit point component, as shown in FIG. 13, or separate components for the entry and exit points at approximately the same location within the multi-transport level tester system 100. A robot 1302 may be positioned inside the entry and exit points 1300 to route UUTs into and out of the multi-transport level tester system 100, which may also include routing failed UUTs out of the multi-transport level tester system 100.

[0098] 14A-14F are block diagrams illustrating top views of example embodiments of entry and exit points of the multi-transport level tester system of FIG. 13 in accordance with some embodiments of the present disclosure. As shown in FIG. 14A, the entry and exit point 1300 can include an input on a first side of the entry and exit point 1300 and an output on a second side of the entry and exit point 1300 opposite the first side (which can include an output for a failed UUT).

[0099] As shown in FIG. 14B, the entry and exit point 1300 may include an input on a first end of the entry and exit point 1300 and an output on the first end of the entry and exit point 1300 (which may include an output for a failed UUT).

[0100] In another example, as shown in FIG. 14C, the entry and exit point 1300 may include an input on a first side of the entry and exit point 1300 and an output on a first end of the entry and exit point 1300 (which may include an output for a failed UUT).

[0101] In yet another example, as shown in FIG. 14D, the entry and exit point 1300 may include an input on a first end of the entry and exit point 1300 and an output on a second side of the entry and exit point 1300 (which may include an output for a failed UUT).

[0102] As shown in FIG. 14E, the entry and exit point 1300 may include a first side input proximate a first end of the entry and exit point 1300 and a first side output (which may include an output for a failed UUT) proximate a second end of the entry and exit point 1300.

[0103] In another example, as shown in FIG. 14F, the entry and exit point 1300 may include an input on a first side proximate a first end of the entry and exit point 1300 and an output on a first side proximate the input of the entry and exit point 1300 (which may include an output for a failed UUT).

[0104] In some instances, the entry point and exit point may also be configured on any one of multiple transport levels, including on the same transport level, or the entry point may be on one transport level and the exit point may be on another transport level.

[0105] In some instances, the egress point may include multiple egress points for routing the UUT to different locations based on test results throughout a multi-transport level system.

[0106] In some embodiments, the exit point includes a conveyor that moves the passed and failed UUTs to different locations within the multi-transport level tester system, where the next component in the transport picks up / accepts the UUT.

[0107] The first test station 112, in this example, is a room temperature HiPot test station that tests the semiconductor-based power modules at approximately room temperature and high voltage to determine whether the semiconductor-based power modules pass electrical safety tests (e.g., withstand voltage and insulation resistance tests). Upon completion of testing at the first test station 112, a transport mechanism (e.g., a conveyor) moves the semiconductor-based power modules to the input of the first environmental conditioning chamber 114, which in this example is a heating chamber. In the exemplary embodiment, the first test station is configured to accept and output UUTs at the second transport level.

[0108] As shown in the exemplary embodiment of FIG. 1 , the first environmental conditioning chamber 114 is configured to accept and output a UUT at a second transport level. The first environmental conditioning chamber 114 (e.g., a heating chamber) is a sealed or partially sealed chamber (e.g., an insulated chamber) configured to be maintained at a desired temperature. When the first environmental conditioning chamber 114 is a heating chamber, it can be configured to provide the desired temperature through a heated surface and / or radiant and / or conductive heating. The first environmental conditioning chamber 114 can further include a second transport device having multiple levels configured to move the UUT between multiple levels during environmental conditioning. In an exemplary embodiment, the first environmental conditioning chamber is configured to accept a UUT and includes a second transport device having one or more levels, the second transport device configured to move the UUT between the one or more levels. In some examples, the first environmental conditioning chamber is configured to accept a UUT at a second transport level, and the second transport device is configured to output the UUT at the second transport level.

[0109] Once the UUT has been heated to approximately the desired elevated temperature in the example of FIG. 1, the UUT is moved on a transport mechanism (e.g., a conveyor) having independent environmental control and monitoring devices (for fine tuning) from the output of the first environmental conditioning chamber in the second transport level to the input of the second test station 116 in the second transport level.

[0110] The second test station 116, in this example, is a high-temperature DC test station that tests the semiconductor-based power module at high temperature to measure various characteristics of the semiconductor-based power module at high voltage / high current at high temperature. Once testing at the second test station 116 is complete, a transport mechanism (e.g., a conveyor) moves the semiconductor-based power module to an input within a second transport level of the second environmental conditioning chamber 118, which in this example is a cooling chamber. For example, in some embodiments, the multi-transport level tester system further includes a second test station configured to accept and output UUTs at the second transport level.

[0111] 1 , the second environmental conditioning chamber 118 is configured to receive the UUT at the second transport level and output the UUT at the first transport level. The second environmental conditioning chamber 118, in this example, is a sealed or partially sealed environment configured to provide a cooling surface and / or airflow for providing radiative and / or conductive cooling, and includes a third transport device having multiple levels configured to move the UUT between levels during environmental conditioning (e.g., cooling in this example). In some embodiments, the second environmental conditioning chamber is configured to receive the UUT at the second transport level, and the third transport device is configured to output the UUT at the first transport level.

[0112] Once the UUT has cooled, in this example to approximately the desired ambient temperature (as discussed further herein), the UUT is moved on a transport mechanism (e.g., a conveyor) from the output of the second environmental conditioning chamber in the first transport level to a third test station 120, which is configured to receive the UUT within the first transport level but at a level within the first transport level different from the level of the output of the second environmental conditioning chamber 118. In some embodiments, the multi-transport level tester system further includes a third test station configured to receive and output the UUT at the first transport level.

[0113] The third test station 120, in this example, is an ambient temperature AC test station that tests the semiconductor-based power module at ambient temperature to measure various characteristics of the semiconductor-based power module at high voltage / high current at ambient temperature. Upon completion of testing at the third test station 120, a transport mechanism (e.g., a conveyor) moves the semiconductor-based power module to the input of a fourth test station 122 in the first transport level. In some embodiments, the multi-transport level tester system further includes a fourth test station configured to accept and output UUTs at the first transport level.

[0114] The fourth test station 122, in this example, is an ambient temperature DC test station that tests the semiconductor-based power modules at ambient temperature to measure various characteristics of the semiconductor-based power modules at high voltage / high current at ambient temperature. Upon completion of testing at the fourth test station 122, a transport mechanism (e.g., a conveyor) moves the semiconductor-based power modules that passed the various tests to an exit point 108a configured to accept and output UUTs within the first transport level (but at a different level as shown in FIG. 1 ) and moves the semiconductor-based power modules that failed one or more of the various tests to a failed UUT component 108b configured to accept UUTs at yet another level within the first transport level.

[0115] As discussed further herein, the exit point 108a can include a fourth transport device with multiple tiers of UUTs inside the exit point 108a. The UUTs are output from the exit point 108a to another transport mechanism (e.g., a conveyor) that provides the UUTs to the system output 104, which is configured to accept and output UUTs at a first transport level.

[0116] In some embodiments, the exit point includes a fourth transport device configured to output the UUT and having one or more tiers. The exit point in some embodiments is configured to accept and output the UUT at a first transport level, and the fourth transport device is configured to move the UUT between one or more tiers within the first transport level.

[0117] 1, entry point 106 can be adjacent to point 108a. In some embodiments, the entry point is adjacent to the exit point. In other embodiments, the entry point and the exit point are at one of a first end and a second end of the multi-transport level tester system.

[0118] In some embodiments, the first and second environmental conditioning chambers each include an environmental controller configured to control at least one of: (i) temperature, (ii) atmospheric conditions, (iii) humidity, (iv) electromagnetic radiation, and (v) pressure. For example, the environmental conditioning chamber may have an environmental controller that controls the temperature (e.g., heating or cooling) and inert gas environment (e.g., nitrogen) inside the chamber.

[0119] In some embodiments, the first environmental conditioning chamber and / or the second environmental conditioning chamber comprises a heating chamber. In some embodiments, the first environmental conditioning chamber and / or the second environmental conditioning chamber comprises a cooling chamber.

[0120] In some embodiments, the multi-transport level tester system includes a first transport level having an entry point, an exit point, a first level, and at least one additional transport level having at least one additional level, the first level being different from the at least one additional level. The multi-transport level tester system further includes at least one environmental conditioning chamber configured to perform environmental conditioning on the plurality of units under test, and at least one test station configured to perform at least one test on the plurality of units under test on the environmental conditioning chamber.

[0121] 2A and 2B are schematic diagrams illustrating an exemplary embodiment of a first environmental conditioning chamber 114 including a second transfer device 200. FIG. 2A illustrates an example in which the input 202 and output 204 of the first environmental conditioning chamber are on the same side of the first environmental conditioning chamber 114 but at different levels within the transport level. FIG. 2B illustrates an example in which the input 202 and output 204 are on opposite sides of the first environmental conditioning chamber 114 but at approximately the same level within the transport level. The direction and / or level at which the UUTs 208a...208n exit the interior of the first environmental conditioning chamber 114 can be adjusted by selecting the location at which the UUTs 208a...208n will exit the second transfer device 200.

[0122] 1 , a transport mechanism (e.g., a conveyor) moves UUTs 208a...208n from the output of the first test station 112 to the input 202 of the first environmental conditioning chamber 114 before reaching the interior of the first environmental conditioning chamber 114. Optionally, the input 202 to the first environmental conditioning chamber 114 may include an airlock 210a. The first environmental conditioning chamber 114 may also include first environmental conditioning elements (e.g., heating elements) 206a, 206bm (e.g., proximate the input 202 and output 204 of the first environmental conditioning chamber 114, respectively), for example, to raise and / or maintain the interior of the heating elements to approximately a desired temperature. A temperature probe 212 may be included, for example, to ensure that the UUTs 208a...208n proximate the output 204 of the first environmental conditioning chamber 114 are at approximately the correct temperature (e.g., the substrate temperature of a semiconductor-based power module). Optionally, output 204 may also include airlock 210b.

[0123] 2A and 2B, the second transport device 200 inside the first environmental conditioning chamber 114 is a conveyor, which may be implemented using, for example, a belt and motorized rollers. As shown in FIGS. 2A and 2B, the second transport device 200 has multiple levels configured to transport the UUTs 208a...208n between the levels, for example, during heating. In the example of FIG. 1, once the UUTs have been heated to approximately the desired temperature, they are moved on a transport mechanism (e.g., a conveyor) from the output 204 of the first environmental conditioning chamber to the second test station 116.

[0124] 2C and 2D are schematic diagrams illustrating another exemplary embodiment of a second transfer device 200 of the first environmentally conditioned chamber 114. Features similar to those described above in FIGS. 2A and 2B are not repeated here. In the example of FIGS. 2C and 2D, the second transfer device 200 inside the first environmentally conditioned chamber 114 is a conveyor that includes an initial conveyor belt length adjacent an input 202, transitions to a conveyor chain drive with a "chair lift" platform, and then transitions to another length of conveyor belt adjacent an output 204. Near the top level of the transfer device 200, a pusher 212 configured to move UUTs 208a...208n outward from their respective platforms and onto the final length of the conveyor may be included. As depicted in FIGS. 2C and 2D, the second transfer device 200 has multiple levels and is configured to move UUTs 208a...208n between the multiple levels, for example, during heating. In the example of FIG. 1, once the UUT is heated to approximately the desired temperature, the UUT is moved on a transfer mechanism (eg, a conveyor) from the output 204 of the first environmental conditioning chamber 114 to the second test station 116.

[0125] 3A and 3B are schematic diagrams illustrating an exemplary embodiment of the second environmental conditioning chamber 118 including a third transfer device 300. FIG. 3A illustrates an example in which the input 302 and output 304 of the second environmental conditioning chamber are on the same side of the second environmental conditioning chamber 118 but at different levels within the transport level. FIG. 3B illustrates an example in which the input 302 and output 304 are on opposite sides of the second environmental conditioning chamber 118 but at approximately the same level within the transport level. The direction and / or level at which the UUTs 208a...208n exit the interior of the second environmental conditioning chamber 118 can be adjusted by selecting the location at which the UUTs 208a...208n will exit the third transfer device 300.

[0126] 1 , a transport mechanism (e.g., a conveyor) moves the UUTs 208a...208n from the output of the second test station 116 to the input 302 of the second environmental conditioning chamber 118 before reaching the interior of the second environmental conditioning chamber 118. Optionally, the input 302 to the second environmental conditioning chamber 118 may include an airlock 310a. The second environmental conditioning chamber 118 may also include second environmental conditioning elements (e.g., cooling elements) 306a, 306b (e.g., proximate the input 302 and output 304 of the second environmental conditioning chamber 118, respectively), for example, to reduce and / or maintain the interior of the second environmental conditioning chamber 118 to approximately a desired temperature. A temperature probe 312 may be included to ensure that the UUTs 208a...208n proximate the output 304 of the second environmental conditioning chamber 118 are at approximately the correct temperature (e.g., the substrate temperature of a semiconductor-based power module). Optionally, output 304 may also include airlock 310b.

[0127] 3A and 3B, the third transport device 300 inside the second environmental conditioning chamber 118 is a conveyor, which may be implemented using, for example, a belt and motorized rollers. As depicted in FIGS. 3A and 3B, the third transport device 300 has multiple levels and is configured to transport the UUTs 208a...208n between the multiple levels, for example, during cooling. In the example of FIG. 1, once the UUTs have cooled to approximately the desired temperature, they are moved on a transport mechanism (e.g., a conveyor) from the output 304 of the second environmental conditioning chamber to the third test station 120.

[0128] 3C and 3D are schematic diagrams illustrating another exemplary embodiment of a third transfer device 300 of the second environmentally conditioned chamber 118. Features similar to those described above in FIGS. 3A and 3B are not repeated. In the example of FIGS. 3C and 3D, the third transfer device 300 inside the second environmentally conditioned chamber 118 is a conveyor that includes an initial conveyor belt length adjacent an input 302, transitions to a conveyor chain drive with a "chair lift" platform, and then transitions to another length of conveyor belt adjacent an output 304. Near the top level of the third transfer device 300, a pusher 312 configured to move the UUTs 208a...208n outward from their respective platforms and onto the final length of the conveyor may be included. As depicted in FIGS. 3C and 3D, the third transfer device 300 has multiple levels and is configured to move the UUTs 208a...208n between the multiple levels, for example, during cooling. In the example of FIG. 1, once the UUT has cooled to approximately the desired temperature, the UUT is moved on a transfer mechanism (eg, a conveyor) from the output 304 of the second environmental conditioning chamber 118 to the fourth test station 120.

[0129] 4A-4C show three exemplary embodiments of conveyor configurations for the second transport device 200 and / or the third transport device 300, respectively. In FIG. 4A, UUTs 208a...208n are shown on a conveyor having a front-to-back conveyor configuration (e.g., a spiral configuration). FIG. 4B shows one example of UUTs 208a...208n on a conveyor spiral configured around a central axis. FIG. 4C shows another example of UUTs 208a...208n on a conveyor spiral configured around a central axis. Regardless of the number of multiple tiers of the conveyor configurations of FIGS. 4A-4C, respectively, these conveyor configurations can be configured to occupy approximately the same floor space as a single tier of an existing linearly configured tester system. As a result, various embodiments of the present disclosure increase the total capacity of UUTs processed.

[0130] 5A-5C illustrate another exemplary embodiment of a second transfer device 200 for the first environmental conditioning chamber 114. FIG. 5A is a side view of the second transfer device 200 including multiple levels of shelves that hold UUTs 208a...208n inside the first environmental conditioning chamber 114. FIG. 5B is an end view of the second transfer device 200 including (1) multiple levels of shelves configured to hold UUTs 208a...208n and (2) an end effector 500. FIG. 5C is a top view of the second transfer device 200 including (1) the top shelf of the multiple levels of shelves that hold UUTs 208a...208n and (2) the end effector 500. The end effector 500 can be attached to a robot and configured to grasp the UUTs 208 from the end of the shelf (e.g., as shown by a YZ gantry with the end effector 500 in FIG. 5B). End effector 500 can be any suitable end effector, including, but not limited to, a gripper, suction, etc. In some embodiments, a multi-axis robotic arm with an end effector is used (e.g., can include three or more axes (e.g., including a rotational axis), as opposed to the YZ gantry with end effector 500 shown in FIG. 5B). As best shown in FIG. 5C, regardless of the number of multiple tiers of second transfer device 200 in FIGS. 5A-5C, respectively, such second transfer device configurations can be configured to occupy approximately the same floor area as a single tier of an existing linearly configured tester system plus the area occupied by the gantry / robot. As a result, various embodiments of the present disclosure increase the total capacity of UUTs processed.

[0131] In certain embodiments, the second transfer device includes at least one of: (i) a belt-driven conveyor, (ii) a chain-driven conveyor, (iii) a cable-driven conveyor, (iv) a two or more axis robot, and (iv) a shelving system having an end effector configured to move each shelf on one of the one or more levels and the UUT toward the output of the first environmental conditioning chamber.

[0132] 6A-6C illustrate another exemplary embodiment of a third transfer device 300 for the second environmentally conditioned chamber 118. FIG. 6A is a side view of the third transfer device 300 including multiple levels of shelves that hold UUTs 208a...208n inside the second environmentally conditioned chamber 118. FIG. 6B is an end view of the third transfer device 300 including (1) multiple levels of shelves configured to hold UUTs 208a...208n and (2) an end effector 600. FIG. 6C is a top view of the third transfer device 300 including (1) the top shelf of the multiple levels of shelves that hold UUTs 208a...208n and (2) the end effector 600. The end effector 600 can be attached to a robot and configured to grasp the UUTs 208 from the end of the shelf (e.g., as shown by a YZ gantry with the end effector 600 in FIG. 6B). End effector 600 can be any suitable end effector, including, but not limited to, a gripper, suction, etc. In some embodiments, a multi-axis robotic arm with an end effector is used (e.g., can include three or more axes (e.g., including a rotational axis), as opposed to the YZ gantry with end effector 600 shown in FIG. 6B). As best shown in FIG. 6C, regardless of the number of multiple tiers of third transfer device 300 in FIGS. 6A-6C, respectively, such third transfer device configurations can be configured to occupy approximately the same floor area as a single tier of an existing linearly configured tester system plus the area occupied by the gantry / robot. As a result, various embodiments of the present disclosure increase the total capacity of UUTs processed.

[0133] In certain embodiments, the third transfer device includes at least one of: (i) a belt-driven conveyor, (ii) a chain-driven conveyor, (iii) a cable-driven conveyor, (iv) a two or more axis robot, and (iv) a shelving system having an end effector configured to move each shelf on one level of the one or more levels and the UUT at the first transport level toward the output of the second environmental conditioning chamber.

[0134] 7 shows an exemplary embodiment of a first transfer device at entry point 106 and / or exit point 108a. UUTs can be moved between multiple levels inside entry point 106 and / or exit point 108a on trays holding UUTs that are fed upward from one level to another, and a robotic end effector can pick and place each UUT. For example, FIG. 7 shows a side view of first transfer device 700. The first transfer device 700 includes (1) a conveyor 706 entering the entry point 106 or the exit point 108a, (2) multiple tiers of shelves / trays 702 holding the UUTs 208a...208n inside the entry point 106 and / or the exit point 108a, (3) a robot end effector 704 that can be used to place the UUTs 208a...208n into and / or out of packages, and (4) a conveyor 708 outward from the entry point 106 and the exit point 108a. The end effector 704 can be attached to a robot and configured to grab the UUT 208 from the shelf / tray on the top level of the multi-level shelf / tray location. The end effector 704 can be any suitable end effector, including, but not limited to, a gripper, suction, etc. In some embodiments, a multi-axis robotic arm with an end effector is used (e.g., it can include movement in any of three or more axes). 7 illustrates, regardless of the number of tiers of the third transport device 700, such a third transport device configuration can be configured to occupy approximately the same floor area as a single tier of an existing linearly configured tester system plus the area occupied by the gantry / robot. As a result, the total capacity of UUTs processed is increased according to various embodiments of the present disclosure.

[0135] In some embodiments, the input to the entry point may be supplied from a previous production step by a conveyor without the use of an end effector or tray.

[0136] In some embodiments, the first transport device is a multi-axis robot and / or an inspection system (eg, for identifying the UUT) during transport of the UUT on its way to the test station.

[0137] Although not shown in FIG. 7, the entry point may include a conveyor, gantry, and / or multi-axis robot that transports the UUT (e.g., under the supervision of an optional camera system to the first test station 112).

[0138] In certain embodiments, the first transfer device includes a shelving system having one or more levels of at least one shelf, and an end effector configured to move the UUT from the at least one shelf toward the first test station.

[0139] In certain embodiments, the fourth transfer device includes a shelving system having one or more tiers of at least one shelf and an end effector configured to move the UUT from the at least one shelf toward an output of the exit point.

[0140] Figures 8-12 are block diagrams of other exemplary embodiments of multi-transport level tester system 100, whose components are located in alternative locations within the multi-transport level tester system as compared to the example of Figure 1. Therefore, for ease of discussion, features of components described above with respect to Figure 1 that are similar throughout the multi-transport level tester system and have the same reference numbers and / or UUT flow will not be repeated here with respect to Figures 8-12.

[0141] Referring now to FIG. 8, FIG. 8 shows another exemplary illustration of a multi-transport level tester system 100 including at least two transport levels, i.e., a first transport level and a second transport level.

[0142] 8, the multi-transport level tester system 100 includes components organized within a first transport level and a second transport level, as shown. In the exemplary embodiment of FIG. 8, the first transport level includes inputs to the system input 102 and entry point 106, inputs and outputs to the fourth test station 122, inputs and outputs to the third test station 120, outputs from the second environmental conditioning unit 118, inputs and outputs to the exit point 108a, inputs to the system output 104, and inputs to the failed UUT 108b. The second transport level includes outputs to the entry point 106, inputs and outputs to the first test station 112, inputs to the first environmental conditioning chamber 114, inputs and outputs to the second test station 116, and inputs to the second environmental conditioning chamber 118.

[0143] As shown in the example of Figure 8, in the y direction of Figure 8, the first transport level extends from approximately floor level to a level corresponding approximately to the height of the person shown, and the second transport level extends from approximately the height of the person shown to a level corresponding to the height of the tallest component within the second transport level.

[0144] 8, the flow of UUTs 208a...208n through multi-transport level tester system 100 is as follows: UUTs 208a...208n enter system input 102 via a transport mechanism, such as a conveyor. System input 102 is connected to entry point 106, which may also include components for identifying the UUTs. As discussed herein, entry point 106 may include multiple tiers of UUTs within entry point 106. In this example, UUTs 208a...208n exit entry point 106 to another transport mechanism (e.g., a conveyor), which enters UUTs 208a...208n into first test station 112.

[0145] Once testing at the first test station 112 is complete, a transport mechanism (eg, a conveyor) moves the UUTs 208a...208n to the first environmental conditioning chamber 114 (which contains the second transport device 200 therein).

[0146] Once the UUTs have been heated, for example, to approximately a desired elevated temperature, the UUTs 208a...208n are moved from the first environmental conditioning chamber to the second test station 116 on a transport mechanism (eg, a conveyor).

[0147] Once testing at the second test station 116 is complete, a transfer mechanism (eg, a conveyor) moves the UUTs 208a...208n to the second environmental conditioning chamber 118 (which contains the third transfer device 300 therein).

[0148] Once the UUTs have cooled, for example, to approximately a desired temperature, the UUTs 208a...208n are moved from the second environmental conditioning chamber 118 to the third test station 120 on a transfer mechanism (eg, a conveyor).

[0149] Once testing at the third test station 120 is complete, a transport mechanism (eg, a conveyor) moves the UUTs 208a...208n to the fourth test station 122.

[0150] Once testing at the fourth test station 122 is complete, a transport mechanism (e.g., a conveyor) moves UUTs 208a...208(n) that have passed the various tests to the exit point 108a and moves UUTs 208a...208n that have failed one or more of the various tests to the failed UUT component 108b.

[0151] As discussed further herein, the exit point 108a may include multiple tiers for UUTs inside the exit point 108a. In Figure 8, the UUTs 208a...208n are output from the exit point 108a to another transport mechanism (e.g., a conveyor), which provides the UUTs 208a...208n to the system output 104.

[0152] 9, the multi-transport level tester system 100 includes components configured within a first transport level and a second transport level as shown. In the exemplary embodiment of FIG. 9, the first transport level includes an input to the entry point 106, an input and output to the fourth test station 122, an input and output to the third test station 120, an output from the second environmental conditioning unit 118, an input and output to the exit point 108a, and an input to the failed UUT 108b. The second transport level includes an output to the entry point 106, an input and output to the first test station 112, an input and output to the first environmental conditioning chamber 114, an input and output to the second test station 116, and an input to the second environmental conditioning chamber 118.

[0153] As shown in the example of Figure 9, in the y direction of Figure 9, the first transport level extends from approximately floor level to a level corresponding approximately to the height of the person shown, and the second transport level extends from approximately the height of the person shown to a level corresponding to the height of the tallest component within the second transport level.

[0154] 8, the flow of UUTs 208a...208n through multi-transport level tester system 100 is as follows: UUTs 208a...208n enter entry point 106, which may also include components for identifying the UUTs. As discussed herein, entry point 106 may include multiple tiers of UUTs inside entry point 106. In this example, UUTs 208a...208n exit entry point 106 onto another transport mechanism (e.g., a conveyor), which enters UUTs 208a...208n into first test station 112.

[0155] Once testing at the first test station 112 is complete, a transport mechanism (eg, a conveyor) moves the UUTs 208a...208n to the first environmental conditioning chamber 114 (which contains the second transport device 200 therein).

[0156] Once the UUTs have been heated, for example, to approximately a desired elevated temperature, the UUTs 208a...208n are moved from the first environmental conditioning chamber to the second test station 116 on a transport mechanism (eg, a conveyor).

[0157] Once testing at the second test station 116 is complete, a transfer mechanism (eg, a conveyor) moves the UUTs 208a...208n to the second environmental conditioning chamber 118 (which contains the third transfer device 300 therein).

[0158] Once the UUTs have cooled, for example, to approximately a desired temperature, the UUTs 208a...208n are moved from the second environmental conditioning chamber 118 to the third test station 120 on a transfer mechanism (eg, a conveyor).

[0159] Once testing at the third test station 120 is complete, a transport mechanism (eg, a conveyor) moves the UUTs 208a...208n to the fourth test station 122.

[0160] Once testing at the fourth test station 122 is complete, a transport mechanism (e.g., a conveyor) moves UUTs 208a...208(n) that have passed the various tests to the exit point 108a and moves UUTs 208a...208n that have failed one or more of the various tests to the failed UUT component 108b.

[0161] As discussed further herein, the exit point 108a may include multiple tiers for UUTs inside the exit point 108a. In Figure 9, UUTs 208a...208n may be output from the exit point 108a to another transport mechanism (e.g., a conveyor) outside the system.

[0162] Referring now to FIG. 10, FIG. 10 shows another exemplary illustration of a multi-transport level tester system 100 including at least two transport levels, i.e., a first transport level and a second transport level.

[0163] 10, the multi-transport level tester system 100 includes components organized within a first transport level and a second transport level, as shown. In the exemplary embodiment of FIG. 10, the first transport level includes inputs to the system input 102 and entry point 106, inputs and outputs to the fourth test station 122, inputs and outputs to the third test station 120, outputs from the second environmental conditioning unit 118, inputs and outputs to the exit point 108a, inputs to the system output 104, and inputs to the failed UUT 108b. The second transport level includes outputs to the entry point 106, inputs and outputs to the first test station 112, inputs and outputs to the first environmental conditioning chamber 114, inputs and outputs to the second test station 116, and inputs to the second environmental conditioning chamber 118.

[0164] As shown in the example of Figure 10, in the y direction of Figure 8, the first transport level extends from approximately floor level to a level corresponding approximately to the height of the person shown, and the second transport level extends from approximately the height of the person shown to a level corresponding to the height of the tallest component within the second transport level.

[0165] 10, the flow of UUTs 208a...208n through multi-transport level tester system 100 is as follows: UUTs 208a...208n enter system input 102 via a transport mechanism, such as a conveyor. System input 102 is connected to entry point 106, which may also include components for identifying the UUTs. As discussed herein, entry point 106 may include multiple tiers of UUTs within entry point 106. In this example, UUTs 208a...208n exit entry point 106 to another transport mechanism (e.g., a conveyor), which enters UUTs 208a...208n into first test station 112.

[0166] Once testing at the first test station 112 is complete, a transport mechanism (eg, a conveyor) moves the UUTs 208a...208n to the first environmental conditioning chamber 114 (which contains the second transport device 200 therein).

[0167] Once the UUTs have been heated, for example, to approximately a desired elevated temperature, the UUTs 208a...208n are moved from the first environmental conditioning chamber to the second test station 116 on a transport mechanism (eg, a conveyor).

[0168] Once testing at the second test station 116 is complete, a transfer mechanism (eg, a conveyor) moves the UUTs 208a...208n to the second environmental conditioning chamber 118 (which contains the third transfer device 300 therein).

[0169] Once the UUTs have cooled, for example, to approximately a desired temperature, the UUTs 208a...208n are moved from the second environmental conditioning chamber 118 to the third test station 120 on a transfer mechanism (eg, a conveyor).

[0170] Once testing at the third test station 120 is complete, a transport mechanism (eg, a conveyor) moves the UUTs 208a...208n to the fourth test station 122.

[0171] Once testing at the fourth test station 122 is complete, a transport mechanism (e.g., a conveyor) moves UUTs 208a...208(n) that have passed the various tests to the exit point 108a and moves UUTs 208a...208n that have failed one or more of the various tests to the failed UUT component 108b.

[0172] As discussed further herein, the exit point 108a may include multiple tiers for UUTs inside the exit point 108a. In Figure 10, the UUTs 208a...208n are output from the exit point 108a to another transport mechanism (e.g., a conveyor), which provides the UUTs 208a...208n to the system output 104.

[0173] Referring now to FIG. 11, FIG. 11 shows an exemplary illustration of a multi-transport level tester system 100 including two transport levels, namely, a first transport level and a second transport level.

[0174] 11, the multi-transport level tester system 100 includes components configured within a first transport level and a second transport level, as shown. In the exemplary embodiment of FIG. 11, the first transport level includes an input to the system input 102 and an input to the entry point 106, an output of the first environmental conditioning chamber 114, an input to the second test station 116, an output of the second test station 116, an input to the second environmental conditioning chamber 118, an input and output of the exit point 108a, and an output of the system output 104. The second transport level includes an output of the entry point 106, an input and output of the first test station 112, an input to the first environmental conditioning chamber 114, an output from the third test station 120, an input and output of the fourth test station 122, and an input to the failed UUT component 108b.

[0175] As shown in the example of Figure 11, in the y direction of Figure 11, the first transport level extends from approximately floor level to a level corresponding approximately to the height of the person shown, and the second transport level extends from approximately the height of the person shown to a level corresponding to the height of the tallest component within the second transport level.

[0176] 11, the flow of UUTs 208a...208n through multi-transport level tester system 100 is as follows: UUTs 208a...208n enter system input 102 via a transport mechanism, such as a conveyor. System input 102 is connected to entry point 106, which may also include components for identifying the UUTs. As discussed herein, entry point 106 may include multiple tiers of UUTs within entry point 106. In this example, UUTs 208a...208n exit entry point 106 to another transport mechanism (e.g., a conveyor), which enters UUTs 208a...208n into first test station 112.

[0177] Once testing at the first test station 112 is complete, a transport mechanism (eg, a conveyor) moves the UUTs 208a...208n to the first environmental conditioning chamber 114 (which contains the second transport device 200 therein).

[0178] Once the UUTs have been heated, for example, to approximately a desired elevated temperature, the UUTs 208a...208n are moved from the first environmental conditioning chamber to the second test station 116 on a transport mechanism (eg, a conveyor).

[0179] Once testing at the second test station 116 is complete, a transfer mechanism (eg, a conveyor) moves the UUTs 208a...208n to the second environmental conditioning chamber 118 (which contains the third transfer device 300 therein).

[0180] Once the UUTs have cooled, for example, to approximately a desired temperature, the UUTs 208a...208n are moved from the second environmental conditioning chamber 118 to the third test station 120 on a transfer mechanism (eg, a conveyor).

[0181] Once testing at the third test station 120 is complete, a transport mechanism (eg, a conveyor) moves the UUTs 208a...208n to the fourth test station 122.

[0182] Once testing at the fourth test station 122 is complete, a transport mechanism (e.g., a conveyor) moves UUTs 208a...208(n) that have passed the various tests to the exit point 108a and moves UUTs 208a...208n that have failed one or more of the various tests to the positioned failed UUT component 108b.

[0183] As discussed further herein, the exit point 108a may include multiple tiers for UUTs inside the exit point 108a. In Figure 11, the UUTs 208a...208n are output from the exit point 108a to another transport mechanism (e.g., a conveyor), which provides the UUTs 208a...208n to the system output 104.

[0184] Thus, in an exemplary embodiment, the first environmental conditioning chamber is configured to receive UUTs at the second transport level and output UUTs at the first transport level.

[0185] In certain embodiments, the first environmental conditioning chamber is configured to receive the UUT at the second transport level, and the second transport device is configured to output the UUT at the first transport level.

[0186] In certain embodiments, the second environmental conditioning chamber is configured to receive UUTs at the first transport level and output UUTs at the second transport level.

[0187] In certain embodiments, the second environmental conditioning chamber is configured to receive the UUT at the first transport level, and the third transport device is configured to output the UUT at the second transport level.

[0188] In certain embodiments, the third transfer device includes at least one of: (i) a belt-driven conveyor, (ii) a chain-driven conveyor, (iii) a cable-driven conveyor, (iv) a two or more axis robot, and (iv) a shelving system having an end effector configured to move each shelf on one of the one or more levels and the UUT at the second transport level toward the output of the second environmental conditioning chamber.

[0189] In some embodiments, a second test station is included and configured to accept and output UUTs at the first transport level, and in some embodiments, a third test station is included and configured to accept and output UUTs at the second transport level.

[0190] In some embodiments, the multi-transport level tester system further includes a fourth test station configured to accept and output UUTs at the second transport level.

[0191] Referring now to Figure 12, Figure 12 shows an exemplary illustration of a multi-transport level tester system 100 including three transport levels: a first transport level, a second transport level, and a third transport level.

[0192] 12, the multi-transport level tester system 100 includes components organized in a first transport level, a second transport level, and a third transport level, as shown. In the example embodiment of FIG. 12, the first transport level includes an input to the system input 102, an input and output from the entry point 106, an input and output from the first test station 112, an input and output to the first environmental conditioning chamber 114, an input to the second test station 116, an input to the system output 104, and an input and output to the failed UUT 108b. The second transport level includes an output from the second test station 116, an input to the second environmental conditioning chamber 118, and an input and output to the third test station 120. The third transport level includes an output from the second environmental conditioning chamber 118 and an input and output to the fourth test station 122.

[0193] 12, in the y-direction of FIG. 12, the first transport level extends from approximately floor level to approximately a level corresponding to the height of the top of the second test station 116, which is above person height as shown, and the second transport level extends from approximately the level of the height of the top of the second test station 116 to approximately the level of the top of the second environmental conditioning chamber 118 and the top of the third test station 120. The third transport level extends from approximately the level of the top of the second environmental conditioning chamber 118 and the top of the third test station 120 to approximately the level of the top of the fourth test station 122.

[0194] In the example of FIG. 12 , the flow of UUTs 208a...208n through the multi-transport level tester system 100 is as follows: UUTs 208a...208n are input to the system input 102 via a transport mechanism, such as a conveyor. The system input 102 is connected to an entry point 106, which may also include components for identifying the UUTs. As discussed herein, the entry point 106 can include multiple levels for UUTs within the entry point 106. In some embodiments, the entry point is configured to accept the UUTs at a first transport level, and a first transport device is configured to move the UUTs between one or more levels within the first transport level. In this example, the UUTs 208a...208n are output from the entry point 106 to another transport mechanism (e.g., a conveyor), which inputs the UUTs 208a...208n to the first test station 112.

[0195] Once testing at the first test station 112 is complete, a transfer mechanism (e.g., a conveyor) moves the UUTs 208a...208n to the first environmental conditioning chamber 114 (containing the second transport device 200). Once the UUTs have been heated, for example, to approximately a desired elevated temperature, the UUTs 208a...208n are moved on the transfer mechanism (e.g., a conveyor) from the first environmental conditioning chamber to the second test station 116.

[0196] In an exemplary embodiment, the first environmental conditioning chamber is configured to receive the UUT at the first transport level and output the UUT at the second transport level. In some embodiments, the first environmental conditioning chamber is configured to receive the UUT at the first transport level and the second transport device is configured to output the UUT at the second transport level.

[0197] Once testing at the second test station 116 is complete, a transfer mechanism (e.g., a conveyor) moves the UUTs 208a...208n to the second environmental conditioning chamber 118 (which includes the third transfer device 300). Once the UUTs have cooled, for example, to approximately a desired temperature, the UUTs 208a...208n are moved on the transfer mechanism (e.g., a conveyor) from the second environmental conditioning chamber 118 to the third test station 120.

[0198] In exemplary embodiments, the second environmental conditioning chamber is configured to accept UUTs at the second transport level and to output UUTs at the third transport level. In some embodiments, the second environmental conditioning chamber is configured to accept UUT testing and includes a third transport device having one or more levels, the third transport device being configured to move UUTs between the one or more levels. In some embodiments, the second environmental conditioning chamber is configured to accept UUTs at the second transport level and the third transport device is configured to output UUTs at the third transport level.

[0199] In certain embodiments, the third transport device includes at least one of: (i) a belt-driven conveyor; (ii) a chain-driven conveyor; (iii) a cable-driven conveyor; (iv) a two or more axis robot; and (iv) a shelving system having an end effector configured to move each shelf on one of the one or more levels and the UUT at the third transport level toward the output of the second environmental conditioning chamber.

[0200] Once testing at the third test station 120 is complete, a transport mechanism (eg, a conveyor) moves the UUTs 208a...208n to the fourth test station 122.

[0201] In an exemplary embodiment, a third test station is included and configured to accept UUTs at the second transport level and output UUTs to the third transport level.

[0202] Upon completion of testing at the test station 122, a transport mechanism (e.g., a conveyor) moves the UUTs 208a...208(n) that passed the various tests to the exit point 108a located within the first transport level, and moves the UUTs 208a...208n that failed one or more of the various tests to the failed UUT component 108b located below the first transport level. For example, the transport mechanism (e.g., a conveyor) can be external to the test station 122 extending to and through the exit point 108a and the failed UUTs 108b.

[0203] In some embodiments, the multi-transport level tester system includes a linear footprint that is approximately 30% to 70% smaller than a linear arrangement of at least the entry point, the exit point, the first environmental conditioning chamber, the second environmental conditioning chamber, and the first test station at one transport level. In some embodiments, the linear footprint is approximately 30% to 70% smaller than a linear arrangement of at least the entry point, the exit point, the first environmental conditioning chamber, the second environmental conditioning chamber, and the first test station at one transport level. In other embodiments, the linear footprint is approximately 40% to 60% smaller than a linear arrangement of at least the entry point, the exit point, the first environmental conditioning chamber, the second environmental conditioning chamber, and the first test station at one transport level. In some embodiments, the linear footprint is approximately 45% to 55% smaller than a linear arrangement of at least the entry point, the exit point, the first environmental conditioning chamber, the second environmental conditioning chamber, and the first test station at one transport level.

[0204] In some embodiments, the UUT includes a semiconductor-based power module.

[0205] Some embodiments described herein may reduce the cost, floor space, and / or time required to test a UUT and determine whether the UUT meets test requirements by providing a multi-transport level tester system configured to perform test conditions and tests on the UUT.

[0206] Although an embodiment of the inventive concept has been described in considerable detail with reference to a particular configuration thereof, other versions are possible. A multi-transport level tester system can have many different configurations and different numbers of components. Thus, the spirit and scope of the present invention should not be limited to the particular embodiment described above.

Claims

1. 1. A multi-transport level tester system, comprising: The entry point and The exit point and a first transport level having a first level; a second transport level having a second level; wherein the first level is different from the second level; a first environmental conditioning chamber configured to perform a first environmental conditioning on the unit under test; a second environmental conditioning chamber configured to perform a second environmental conditioning on the unit under test; a first test station configured to perform a first test on the unit under test; A multi-transport level tester system comprising:

2. 2. The multi-transport level tester system of claim 1, wherein the entry point is adjacent to the exit point.

3. a first end of the multi-transport level tester system; a second end of the multi-transport level tester system; and a first side of the multi-transport level tester system; 10. The multi-transport level tester system of claim 1, further comprising a second side of the multi-transport level tester system, wherein the multi-transport level tester is configured between the first end and the second end and between the first side and the second side.

4. 4. The multi-transport level tester system of claim 3, wherein the entry point and the exit point are configured at one or more of the first end, the second end, the first side, and the second side, and at least one of the first end and the second end of the multi-transport level tester system.

5. 4. The multi-transport level tester system of claim 3, wherein the first level and the second level are each substantially levels between the first end and the second end of the multi-transport level tester system.

6. 4. The multi-transport level tester system of claim 3, wherein the first level has a variable level within the first transport level.

7. 4. The multi-transport level tester system of claim 3, wherein the second level has a variable level within the second transport level.

8. 2. The multi-transport level tester system of claim 1, wherein the entry point comprises a first transport device configured to accept the unit under test and configured to handle one or more hierarchies.

9. 9. The multi-transport level tester system of claim 8, wherein the entry point is configured to accept the unit under test at the second transport level, and the first transport device is configured to move the unit under test between the one or more tiers within the second transport level.

10. 9. The multi-transport level tester system of claim 8, wherein the entry point is configured to accept the unit under test at the first transport level, and the first transport device is configured to move the unit under test between the one or more tiers within the first transport level.

11. 9. The multi-transport level tester system of claim 8, wherein the first transport device comprises a shelving system having the one or more levels of at least one shelf, and an end effector configured to move a unit under test from the at least one shelf toward the first test station.

12. 11. The multi-transport level tester system of claim 10, wherein the first test station is configured to receive and output the unit under test at the second transport level.

13. 11. The multi-transport level tester system of claim 10, wherein the first test station is configured to receive and output the unit under test at the first transport level.

14. 2. The multi-transport level tester system of claim 1, wherein the first environmental conditioning chamber is configured to receive and output the unit under test at the second transport level.

15. 2. The multi-transport level tester system of claim 1, wherein the first environmental conditioning chamber is configured to receive the unit under test at the second transport level and output the unit under test at the first transport level.

16. 2. The multi-transport level tester system of claim 1, wherein the first environmental conditioning chamber is configured to receive the unit under test at the first transport level and output the unit under test at the second transport level.

17. 2. The multi-transport level tester system of claim 1, wherein the first environmental conditioning chamber is configured to receive the unit under test and includes a second transport device having one or more levels, the second transport device being configured to move the unit under test between the one or more levels.

18. 20. The multi-transport level tester system of claim 17, wherein the first environmental conditioning chamber is configured to receive the unit under test at the second transport level, and the second transport device is configured to output the unit under test at the second transport level.

19. 20. The multi-transport level tester system of claim 17, wherein the first environmental conditioning chamber is configured to receive the unit under test at the second transport level, and the second transport device is configured to output the unit under test at the first transport level.

20. 20. The multi-transport level tester system of claim 17, wherein the first environmental conditioning chamber is configured to receive the unit under test at the first transport level, and the second transport device is configured to output the unit under test at the second transport level.

21. 20. The multi-transport level tester system of claim 17, wherein the second transport device comprises at least one of: (i) a belt-driven conveyor; (ii) a chain-driven conveyor; (iii) a cable-driven conveyor; (iv) a two or more axis robot; and (v) a shelving system having an end effector configured to move each shelf on one level of the one or more levels and the unit under test toward an output of the first environmental conditioning chamber.

22. 10. The multi-transport level tester system of claim 1, wherein the first environmental conditioning chamber comprises an environmental controller configured to control at least one of: (i) temperature; (ii) atmospheric conditions; (iii) humidity; (iv) electromagnetic radiation; and (v) pressure.

23. 2. The multi-transport level tester system of claim 1, wherein the second environmental conditioning chamber is configured to receive the unit under test at the second transport level and output the unit under test at the first transport level.

24. 2. The multi-transport level tester system of claim 1, wherein the second environmental conditioning chamber is configured to receive the unit under test at the first transport level and output the unit under test at the second transport level.

25. 2. The multi-transport level tester system of claim 1, further comprising a third transport level having a third level, wherein the second environmental conditioning chamber is configured to receive the unit under test at the second transport level and output the unit under test at the third transport level.

26. 2. The multi-transport level tester system of claim 1, wherein the second environmental conditioning chamber is configured to receive the unit under test and includes a third transport device having one or more levels, the third transport device being configured to move the unit under test between the one or more levels.

27. 24. The multi-transport level tester system of claim 23, wherein the second environmental conditioning chamber is configured to receive the unit under test at the second transport level, and the third transport device is configured to output the unit under test at the first transport level.

28. 24. The multi-transport level tester system of claim 23, wherein the second environmental conditioning chamber is configured to receive the unit under test at the first transport level, and the third transport device is configured to output the unit under test at the second transport level.

29. 24. The multi-transport level tester system of claim 23, further comprising a third transport level having a third level, wherein the second environmental conditioning chamber is configured to receive the unit under test at the second transport level, and the third transport device is configured to output the unit under test at the third transport level.

30. 25. The multi-transport level tester system of claim 24, wherein the third transport device comprises at least one of: (i) a belt-driven conveyor; (ii) a chain-driven conveyor; (iii) a cable-driven conveyor; (iv) a two or more axis robot; and (v) a shelving system having respective shelves on one level of the one or more levels and end effectors configured to move the units under test at the first transport level toward an output of the second environmental conditioning chamber.

31. 26. The multi-transport level tester system of claim 25, wherein the third transport device comprises at least one of: (i) a belt-driven conveyor; (ii) a chain-driven conveyor; (iii) a cable-driven conveyor; (iv) a two or more axis robot; and (iv) a shelving system having an end effector configured to move each shelf on one level of the one or more levels and the unit under test at the second transport level toward an output of the second environmental conditioning chamber.

32. 27. The multi-transport level tester system of claim 26, wherein the third transport device comprises at least one of: (i) a belt-driven conveyor; (ii) a chain-driven conveyor; (iii) a cable-driven conveyor; (iv) a two or more axis robot; and (iv) a shelving system having respective shelves on one level of the one or more levels and end effectors configured to move the units under test at the third transport level toward an output of the second environmental conditioning chamber.

33. 10. The multi-transport level tester system of claim 1, wherein the second environmental conditioning chamber comprises an environmental controller configured to control at least one of: (i) temperature; (ii) atmospheric conditions; (iii) humidity; (iv) electromagnetic radiation; and (v) pressure.

34. 10. The multi-transport level tester system of claim 1, further comprising a second test station configured to receive and output the unit under test at the second transport level.

35. 10. The multi-transport level tester system of claim 1, further comprising a second test station configured to receive and output the unit under test at the first transport level.

36. 10. The multi-transport level tester system of claim 1, further comprising a third test station configured to receive and output the unit under test at the first transport level.

37. 10. The multi-transport level tester system of claim 1, further comprising a third test station configured to receive and output the unit under test at the second transport level.

38. 10. The multi-transport level tester system of claim 1, further comprising a fourth test station configured to receive and output the unit under test at the first transport level.

39. 10. The multi-transport level tester system of claim 1, further comprising a fourth test station configured to receive and output the unit under test at the second transport level.

40. a third transport level having a third level; a third test station configured to receive the unit under test at the second transport level and output the unit under test to the third transport level; 10. The multi-transport level tester system of claim 1, further comprising:

41. 2. The multi-transport level tester system of claim 1, wherein the exit point comprises a fourth transport device configured to output the unit under test and having one or more tiers.

42. 42. The multi-transport level tester system of claim 41, wherein the exit point is configured to accept and output the unit under test at the first transport level, and the fourth transport device is configured to move the unit under test between the one or more tiers within the first transport level.

43. 42. The multi-transport level tester system of claim 41, wherein the fourth transport device comprises a shelving system having the one or more levels of at least one shelf, and an end effector configured to move a unit under test from the at least one shelf toward the output of the exit point.

44. 2. The multi-transport level tester system of claim 1, wherein the multi-transport level tester system comprises a linear footprint that is approximately 30% to 70% smaller than a linear arrangement at one transport level of at least the entry point, the exit point, the first environmental conditioning chamber, the second environmental conditioning chamber, and the first test station.

45. 10. The multi-transport level tester system of claim 1, wherein the unit under test comprises a semiconductor-based power module.

46. 1. A multi-transport level tester system, comprising: The entry point and at least one exit point; Rejection points and wherein the at least one exit point has a different location than the rejection point; a first transport level having a first level; at least one additional transport level having at least one additional level; wherein the first level is different from the at least one additional level; at least one environmental conditioning chamber configured to provide environmental conditioning to a plurality of units under test; at least one test station configured to perform at least one test on the plurality of units under test; A multi-transport level tester system comprising:

47. 47. The multi-transport level tester system of claim 46, wherein the entry point is adjacent to the at least one exit point.

48. a first end of the multi-transport level tester system; a second end of the multi-transport level tester system; and a first side of the multi-transport level tester system; 47. The multi-transport level tester system of claim 46, further comprising a second side of the multi-transport level tester system, the multi-transport level tester being configured between the first end and the second end and between the first side and the second side.

49. 49. The multi-transport level tester system of claim 48, wherein the entry point and the at least one exit point are configured at one or more of the first end, the second end, the first side, and the second side and at least one of the first end and the second end of the multi-transport level tester system.

50. 49. The multi-transport level tester system of claim 48, wherein the first level and the at least one additional level are each substantially levels between the first end and the second end of the multi-transport level tester system.

51. 47. The multi-transport level tester system of claim 46, wherein the first level has a variable level within the first transport level.

52. 47. The multi-transport level tester system of claim 46, wherein the at least one additional level has a variable level within the at least one additional level.

53. 47. The multi-transport level tester system of claim 46, wherein the entry point comprises a first transport device configured to accept the unit under test and configured to handle one or more tiers.

54. 54. The multi-transport level tester system of claim 53, wherein the entry point is configured to accept the unit under test at the at least one additional transport level, and the first transport device is configured to move the unit under test between the one or more tiers within the at least one additional transport level.

55. 54. The multi-transport level tester system of claim 53, wherein the entry point is configured to accept the unit under test at the first transport level, and the first transport device is configured to move the unit under test between the one or more tiers within the first transport level.

56. 54. The multi-transport level tester system of claim 53, wherein the first transport device comprises a shelving system having the one or more levels of at least one shelf, and an end effector configured to move a unit under test from the at least one shelf toward the first test station.

57. 56. The multi-transport level tester system of claim 55, wherein the first test station is configured to accept and output the unit under test at the at least one additional transport level.

58. 56. The multi-transport level tester system of claim 55, wherein the first test station is configured to accept and output the unit under test at the first transport level.

59. 47. The multi-transport level tester system of claim 46, wherein the at least one environmental conditioning chamber is configured to receive and output the unit under test at the at least one additional transport level.

60. 47. The multi-transport level tester system of claim 46, wherein the at least one environmental conditioning chamber is configured to receive the unit under test at the at least one additional transport level and to output the unit under test at the first transport level.

61. 47. The multi-transport level tester system of claim 46, wherein the at least one environmental conditioning chamber is configured to receive the unit under test at the first transport level and output the unit under test at the at least one additional transport level.

62. 47. The multi-transport level tester system of claim 46, wherein the at least one environmental conditioning chamber is configured to receive the unit under test and comprises a second transport device having one or more levels, the second transport device being configured to move the unit under test between the one or more levels.

63. 63. The multi-transport level tester system of claim 62, wherein the at least one environmental conditioning chamber is configured to receive the unit under test at the at least one additional transport level, and the second transport device is configured to output the unit under test at the at least one additional transport level.

64. 63. The multi-transport level tester system of claim 62, wherein the at least one environmental conditioning chamber is configured to receive the unit under test at the at least one additional transport level, and the second transport device is configured to output the unit under test at the first transport level.

65. 63. The multi-transport level tester system of claim 62, wherein the at least one environmental conditioning chamber is configured to receive the unit under test at the first transport level, and the second transport device is configured to output the unit under test at the at least one additional transport level.

66. 63. The multi-transport level tester system of claim 62, wherein the second transport device comprises at least one of: (i) a belt-driven conveyor; (ii) a chain-driven conveyor; (iii) a cable-driven conveyor; (iv) a two or more axis robot; and (v) a shelving system having an end effector configured to move each shelf on one level of the one or more levels and the unit under test toward an output of the at least one environmental conditioning chamber.

67. 47. The multi-transport level tester system of claim 46, wherein the at least one environmental conditioning chamber comprises an environmental controller configured to control at least one of: (i) temperature, (ii) atmospheric conditions, (iii) humidity, (iv) electromagnetic radiation, and (v) pressure.

68. 47. The multi-transport level tester system of claim 46, further comprising a second test station configured to receive and output the unit under test at the at least one additional transport level.

69. 47. The multi-transport level tester system of claim 46, further comprising a second test station configured to receive and output the unit under test at the first transport level.

70. 47. The multi-transport level tester system of claim 46, further comprising a third test station configured to receive and output the unit under test at the first transport level.

71. 47. The multi-transport level tester system of claim 46, further comprising a third test station configured to receive and output the unit under test at the at least one additional transport level.

72. 47. The multi-transport level tester system of claim 46, further comprising a fourth test station configured to receive and output the unit under test at the first transport level.

73. 47. The multi-transport level tester system of claim 46, further comprising a fourth test station configured to receive and output the unit under test at the at least one additional transport level.

74. a third transport level having a third level; a third test station configured to receive the unit under test at the at least one additional transport level and to output the unit under test to the third transport level; 47. The multi-transport level tester system of claim 46, further comprising:

75. 47. The multi-transport level tester system of claim 46, wherein the at least one exit point comprises a fourth transport device configured to output the unit under test and having one or more tiers.

76. 76. The multi-transport level tester system of claim 75, wherein the at least one exit point is configured to accept and output the unit under test at the first transport level, and the fourth transport device is configured to move the unit under test between the one or more tiers within the first transport level.

77. 76. The multi-transport level tester system of claim 75, wherein the fourth transport device comprises a shelving system having the one or more levels of at least one shelf, and an end effector configured to move a unit under test from the at least one shelf toward the output of the exit point.

78. 47. The multi-transport level tester system of claim 46, wherein the multi-transport level tester system comprises a linear footprint that is approximately 30% to 70% smaller than a linear arrangement at one transport level of at least the entry point, the at least one exit point, the at least one environmental conditioning chamber, and the first test station.

79. 47. The multi-transport level tester system of claim 46, wherein the unit under test includes a semiconductor-based power module.

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