Pulse shaping device and pulse shaping method using the same

Abstract

The present invention relates to a pulse shaping device and a pulse shaping method using the same, and more particularly to a pulse shaping device capable of shaping pulses of various shapes and a pulse shaping method using the same. The present invention discloses a pulse shaping device (10) comprising one or more first power supply modules (100) connected to one end (L1) of a load end (L), and one or more second power supply modules (200) connected to the other end (L2) of the load end (L) and connected to the first power supply modules (100), wherein the first power supply modules (100) comprise a plurality of first voltage sources (110) and a plurality of switches (S1 to S4) that are turned on and off independently of each other, and the second power supply modules (200) comprise a plurality of second voltage sources (210) and a plurality of switches (S5 to S8) that are turned on and off independently of each other, and wherein a difference between a first output voltage (V1) from the first power supply modules (100) and a second output voltage (V2) from the second power supply modules (200) is applied as an output voltage (Vo) across the load end (L).

Description

[Technical Field]

[0001] The present invention relates to a pulse shaping device and a pulse shaping method using the same, and more particularly to a pulse shaping device capable of shaping pulses of various shapes and a pulse shaping method using the same. [Background technology]

[0002] In general, a high-voltage pulse generating circuit is a circuit necessary to supply pulse power to a load device that requires a high voltage, such as various test equipment or a plasma generating device (PSII, etc.).

[0003] One of the conventional pulse generating circuits can be configured to apply a pulse having a constant voltage level to a load using a switch element and a charging capacitor.

[0004] However, conventional pulse generating circuits can only apply a positive voltage pulse waveform to a load, and cannot apply a negative voltage pulse waveform to a load. This means that the voltage level of the applied pulse cannot be variably adjusted, and pulse waveforms of various shapes cannot be formed. Summary of the Invention [Problem to be solved by the invention]

[0005] In consideration of the above problems, an object of the present invention is to provide a pulse shaping device capable of shaping negative voltage pulse waveforms and pulse waveforms of various shapes at various voltage levels, and a pulse shaping method using the same. [Means for solving the problem]

[0006] The present invention has been made to achieve the above-mentioned object of the present invention, and discloses a pulse shaping device 10 including one or more first power supply modules 100 connected to one end L1 of a load end L, and one or more second power supply modules 200 connected to the other end L2 of the load end L and connected to the first power supply modules 100.

[0007] The first power supply module 100 may include a plurality of first voltage sources 110 and a plurality of switches S1 to S4 that are turned on and off independently of each other.

[0008] The second power supply module 200 may include a plurality of second voltage sources 210 and a plurality of switches S5 to S8 that are turned on and off independently of each other.

[0009] The difference between the first output voltage V1 from the first power supply module 100 and the second output voltage V2 from the second power supply module 200 may be applied across the load terminal L as an output voltage Vo.

[0010] The first power supply module 100 may be provided in plural.

[0011] The plurality of first power supply modules 100 may be connected in series.

[0012] The second power supply module 200 may be provided in plural.

[0013] The plurality of second power supply modules 200 may be connected in series.

[0014] The first power supply module 100 may include two first voltage sources 110 and four switches, first to fourth, S1 to S4, arranged in each leg LG1 to LG4 of an H-bridge circuit.

[0015] The second power supply module 200 may include two first voltage sources 210 and four fifth to eighth switches S5 to S8 arranged in each leg LG1 to LG4 of an H-bridge circuit.

[0016] The switches S1 to S8 may include MOSFET elements.

[0017] The first voltage source 110 and the second voltage source 210 may be DC voltage sources.

[0018] The first voltage source 110 and the second voltage source 210 may be connected to the load terminal L with opposite polarities.

[0019] The device may further include a control unit for controlling the on / off of the switches S1 to S8.

[0020] The voltages of the first voltage sources 110 and the second voltage sources 210 may be the same in magnitude. [Effects of the Invention]

[0021] The pulse shaping device and pulse shaping method using the same according to the present invention have the advantage that they can shape a negative voltage pulse waveform and pulse waveforms of various shapes at various voltage levels. [Brief explanation of the drawings]

[0022] [Figure 1] 1 illustrates a pulse shaping device according to one embodiment of the present invention.

[0023] [Figure 2] 2 is a graph showing an example of a control method for each switch provided in the pulse shaping device of FIG. 1, and a waveform of an output voltage applied to a load end by the control method.

[0024] [Figure 3] 10 is a graph showing another embodiment of a control method for each switch provided in the pulse shaping device of FIG. 1, and a waveform of an output voltage applied to a load end by the control method.

[0025] [Figure 4] FIG. 2 is a diagram showing a modification of the pulse shaping device of FIG.

[0026] [Figures 5a-5d] 4 is a graph showing examples of waveforms of an output voltage shaped by the pulse shaping device of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0027] A pulse shaping device according to the present invention will now be described with reference to the accompanying drawings.

[0028] The pulse shaping device 10 of the present invention is a device for shaping the pulse waveform of an output voltage Vo applied to a load terminal L, and includes one or more first power supply modules 100 connected to one end L1 of the load terminal L, and one or more second power supply modules 200 connected to the other end L2 of the load terminal L and connected to the first power supply modules 100.

[0029] An output voltage Vo applied to both ends L1 and L2 of the load terminal L of the pulse shaping device 10 may be formed by the first power supply module 100 and the second power supply module 200.

[0030] The first power supply module 100 is a power supply unit connected to one end L1 of a load end L to apply a first output voltage V1 to both ends L1 and L2 of the load end L, and may have various configurations.

[0031] For example, the first power supply module 100 may include a plurality of first voltage sources 110 and a plurality of switches S1 to S4 that are turned on and off independently of each other, as shown in FIG.

[0032] The plurality of first voltage sources 110 may be DC voltage sources, and the maximum voltage output by the plurality of first voltage sources 110 may be Va.

[0033] When the maximum voltage output by the plurality of first voltage sources 110 is Va, the output voltage of each first voltage source 110 is the same, and the number of first voltage sources 110 is K, the output voltage of each first voltage source 110 may be Va / K.

[0034] For example, as shown in FIG. 1, if the first power supply module 100 includes two first voltage sources 110, the output voltage of each first voltage source 110 may be Va / 2.

[0035] However, the scope of the present invention is not limited to this, and it is of course possible for at least one of the multiple first voltage sources 110 to be configured to have an output voltage different from the other first voltage sources 110.

[0036] The switches S1 to S4 are switching elements that are turned on and off independently of each other and may have various configurations.

[0037] For example, the switches S1 to S4 are power semiconductor elements, and may be various semiconductor elements such as SCR (Thyristor), TRIAC (Triode AC Switch), GTO (Gate turn-off thyristor), IGBT (Insulated Gate Bidirectional Transistor), MOSFET (Metal Oxide Semiconductor Field Effect Transistor), etc., and are not limited to specific elements.

[0038] For example, the switches S1 to S4 are semiconductor switch elements, and are illustrated as MOSFETs in Fig. 1, but are not limited thereto. When the switches S1 to S4 are configured as MOSFET switches, they have the advantage of being able to reduce pulse rise and fall times compared to IGBTs.

[0039] When the switches S1 to S4 are MOSFET elements, the switches S1 to S4 have three terminals, a gate G, a drain D, and a source S, and can be turned on or off by a switch driving signal Vg applied to the gate G.

[0040] As another example, when the switches S1 to S4 are IGBT elements, the switches S1 to S4 are formed with three terminals, namely, a gate G, a collector C, and an emitter E, and can be turned on and off by a switch drive signal Vg applied to the gate G.

[0041] The plurality of switches S1 to S4 may be configured to be controlled to be turned on and off independently of each other.

[0042] Meanwhile, the first power supply module 100 may be configured as an H-bridge circuit structure, that is, the plurality of switches S1 to S4 may be arranged in each leg LG1 to LG4 of the H-bridge circuit.

[0043] Specifically, the first power supply module 100 may include four switches S1 to S4, i.e., first to fourth switches S1 to S4, which may be arranged in four legs LG1 to LG4 of an H-bridge circuit, respectively.

[0044] As shown in FIG. 1 , the first switch S1 may be disposed in the first leg LG1 of the H-bridge circuit, the second switch S2 may be disposed in the second leg LG2 of the H-bridge circuit, the third switch S3 may be disposed in the third leg LG3 of the H-bridge circuit, and the fourth switch S4 may be disposed in the fourth leg LG4 of the H-bridge circuit.

[0045] That is, first to fourth switches S1 to S4 may be arranged in the legs LG1 to LG4 with the common node C of the H-bridge circuit at the center.

[0046] In this case, the first switch S1 and the third switch S3 may be electrically connected to one end L1 of the load terminal L and the common node C between one end L1 of the load terminal L and the common node C of the H-bridge circuit.

[0047] Similarly, the second switch S2 and the fourth switch S4 may be electrically connected between a common node C of the H-bridge circuit and a second power supply module 200 described later or another first power supply module 100 connected in series, and between the common node C and a second power supply module 200 described later or another first power supply module 100 connected in series.

[0048] Also, the drain D of the first switch S1 is connected to one end L1 of the load end L, but the source S of the third switch S3 may be connected to one end L1 of the load end L, unlike the first switch S1.

[0049] Similarly, the drain D of the second switch S2 is electrically connected to the common node C, but the fourth switch S4 may be connected to the common node C at its source S, unlike the second switch S2.

[0050] On the other hand, when the first power supply module 100 includes two first voltage sources 110, as shown in FIG. 1, one of the two first voltage sources 110 may be disposed between the first switch S1 and the common node C, and the other first voltage source 110 may be disposed between the second switch S2 and the common node C.

[0051] Accordingly, the first switch S1 and the second switch S2 are switches connected in series with the first voltage source 110, and when the first switch S1 and the second switch S2 are turned on, a first output voltage V1 can be applied to the load terminal L.

[0052] The second power supply module 200 is connected to the other end L2 of the load end L and is connected to the first power supply module 100, and may have various configurations.

[0053] The second power supply module 200 is a power supply unit connected to the other end L2 of the load end L and applies a second output voltage V2 to both ends L1 and L2 of the load end L, and may have various configurations.

[0054] For example, the second power supply module 200 may include a plurality of second voltage sources 110 and a plurality of switches S5 to S8 that are turned on and off independently of each other, as shown in FIG.

[0055] The plurality of second voltage sources 210 may be DC voltage sources, and the maximum voltage output by the plurality of second voltage sources 210 may be Vb.

[0056] When the maximum voltage output by the plurality of second voltage sources 210 is Vb, the output voltage of each second voltage source 210 is the same, and the number of second voltage sources 210 is K, the output voltage of each second voltage source 210 may be Vb / K.

[0057] For example, as shown in FIG. 1, if the second power supply module 200 includes two second voltage sources 210, the output voltage of each second voltage source 210 may be Vb / 2.

[0058] However, the scope of the present invention is not limited to this, and it is of course possible for at least one of the multiple second voltage sources 210 to be configured to have an output voltage different from the other second voltage sources 210.

[0059] The maximum voltage Vb of the second power supply module 200 may be the same as the maximum voltage Va of the first power supply module 100, but is not limited thereto, and the maximum voltage Vb of the second power supply module 200 may be different from the maximum voltage Va of the first power supply module 100.

[0060] The switches S5 to S8 are switching elements that are turned on and off independently of each other and may have various configurations.

[0061] For example, the switches S5 to S8 are power semiconductor elements, and may be various semiconductor elements such as SCR (Thyristor), TRIAC (Triode AC Switch), GTO (Gate turn-off thyristor), IGBT (Insulated Gate Bidirectional Transistor), MOSFET (Metal Oxide Semiconductor Field Effect Transistor), etc., and are not limited to specific elements.

[0062] For example, the switches S5 to S8 are semiconductor switch elements and are shown as MOSFETs in Fig. 1, but are not limited thereto. When the switches S1 to S4 are configured as MOSFET switches, this has the advantage of reducing the pulse rise time and fall time compared to IGBTs.

[0063] When the switches S5 to S8 are MOSFET elements, the switches S5 to S8 have three terminals, a gate G, a drain D, and a source S, and can be turned on or off by a switch driving signal Vg applied to the gate G.

[0064] As another example, when the switches S5 to S8 are IGBT elements, the switches S5 to S8 are formed with three terminals, namely, a gate G, a collector C, and an emitter E, and can be turned on and off by a switch drive signal Vg applied to the gate G.

[0065] The plurality of switches S5 to S8 may be configured to be controlled to be turned on and off independently of each other.

[0066] Meanwhile, the second power supply module 200 may be configured as an H-bridge circuit structure, that is, the plurality of switches S5 to S8 may be arranged in each leg LG1 to LG4 of the H-bridge circuit.

[0067] Specifically, the second power module 200 may include four switches S5 to S8, i.e., fifth to eighth switches S5 to S8, which may be arranged in four legs LG1 to LG4 of an H-bridge circuit, respectively.

[0068] As shown in FIG. 1 , the fifth switch S5 may be disposed in the first leg LG1 of the H-bridge circuit, the sixth switch S6 may be disposed in the second leg LG2 of the H-bridge circuit, the seventh switch S7 may be disposed in the third leg LG3 of the H-bridge circuit, and the eighth switch S8 may be disposed in the fourth leg LG4 of the H-bridge circuit.

[0069] That is, fifth to eighth switches S1 to S4 may be arranged in the legs LG1 to LG4 with the common node C of the H-bridge circuit at the center.

[0070] In this case, the fifth switch S5 and the seventh switch S7 may be electrically connected between the other end L2 of the load terminal L and the common node C of the H-bridge circuit.

[0071] Similarly, the sixth switch S6 and the eighth switch S8 may be electrically connected between the common node C of the H-bridge circuit and the above-mentioned first power supply module 200 or another second power supply module 100 connected in series, and between the common node C and the above-mentioned second power supply module 200 or another second power supply module 200 connected in series.

[0072] In addition, the drain D of the fifth switch S5 is connected to the other end L2 of the load terminal L, but the seventh switch S7 may be connected to the other end L2 of the load terminal L at its source S, unlike the fifth switch S5.

[0073] Similarly, the drain D of the sixth switch S6 is electrically connected to the common node C, but the eighth switch S8 may be connected to the common node C at its source S, unlike the sixth switch S6.

[0074] On the other hand, when the second power supply module 200 includes two second voltage sources 210, one of the two second voltage sources 210 may be disposed between the fifth switch S5 and the common node C, as shown in FIG. 1, and the other second voltage source 210 may be disposed between the sixth switch S6 and the common node C.

[0075] Accordingly, the fifth switch S5 and the sixth switch S6 are switches connected in series with the second voltage source 210, and when the fifth switch S5 and the sixth switch S6 are turned on, the second output voltage V2 can be applied to the load terminal L.

[0076] Meanwhile, a plurality of the first power supply modules 100 may be provided, and the plurality of first power supply modules 100 may be connected in series as shown in FIG.

[0077] Similarly, a plurality of the second power supply modules 200 may be provided, and the plurality of second power supply modules 200 may be connected in series as shown in FIG.

[0078] When a plurality of the first power supply modules 100 and second power supply modules 200 are provided, the number of the first power supply modules 100 may be the same as the number of the second power supply modules 200.

[0079] Meanwhile, each of the first to eighth switches S1 to S8 may include a parallel-connected capacitor C, which is an energy storage element. Also, each of the first to eighth switches S1 to S8 may include a parallel-connected diode, thereby ensuring reliability of on / off operations.

[0080] In this case, the pulse shaping device 10 may further include a control unit for controlling the on / off of the first to eighth switches S1 to S8, respectively.

[0081] Referring again to FIG. 1, the first voltage source 110 and the second voltage source 210 may be connected to the load terminal L with opposite polarities.

[0082] Therefore, the difference between the first output voltage V1 from the first power supply module 100 and the second output voltage V2 from the second power supply module 200 can be applied across the load terminal L as an output voltage Vo.

[0083] The first output voltage V1 and the second output voltage V2 may be formed at various voltage levels by the on / off operations of the first to eighth switches S1 to S8, and the difference between the first output voltage V1 and the second output voltage V2 is applied to both ends L1 and L2 of the load terminal L. Therefore, the waveform of the negative output voltage Vo or waveforms of various voltage levels may be applied to the load terminal L.

[0084] FIG. 2 is a graph showing the first output voltage V1, the second output voltage V2 output from the pulse shaping device 100 of FIG. 1, and the output voltage Vo applied to the load terminal L over time, and shows the pulse shape of the output voltage Vo applied to the load terminal L.

[0085] In Figure 2, Sg1 indicates a gate signal applied to the first power supply module 100, and shows an example in which a drive signal is applied to the first switch S1 and the second switch S2 of the first power supply module 100 in the first section A1 from t0 to t1, a drive signal is applied to the third switch S3 and the fourth switch S4 of the first power supply module 100 in the second section A2 from t1 to t2, and a drive signal is again applied to the first switch S1 and the second switch S2 of the first power supply module 100 in the third section A3 from t2 to t3.

[0086] Therefore, the first switch S1 and the second switch S2 may be simultaneously turned on in the first section A1, and the third switch S3 and the fourth switch S4 may be simultaneously turned on in the second section A2. The first section A1 and the second section A2 may also be repeated (i.e., the gate signal Sg1 in the first section A1 and the gate signal Sg1 in the third section A3 may be the same), and in this case, the repeating period may be Ts.

[0087] The first to fourth switches S1 to S4 are turned on or off by a gate signal Sg1 applied to the first power supply module 100, and a first output voltage V1 may be output. Referring to FIG. 2, since the first switch S1 and the second switch S2 are both turned on in the first section A1, the first output voltage V1 may be Va, which is the maximum voltage.

[0088] On the other hand, in the second section A2, the third switch S3 and the fourth switch S4 are turned on, so the first output voltage V1 may be zero.

[0089] The third section A3 is a repeat section identical to the first section A1, and since the first switch S1 and the second switch S2 are both turned on in the third section A3, the first output voltage V1 may be Va, which is the maximum voltage.

[0090] Similarly, in Figure 2, Sg2 indicates a gate signal applied to the second power supply module 200, and shows an example in which a drive signal is applied to the fifth switch S5 and the sixth switch S6 of the second power supply module 200 in the first section A1 from t0 to t1, a drive signal is applied to the seventh switch S7 and the eighth switch S8 of the second power supply module 200 in the second section A2 from t1 to t2, and again a drive signal is applied to the fifth switch S5 and the sixth switch S6 of the second power supply module 200 in the third section A3 from t2 to t3.

[0091] Therefore, the fifth switch S5 and the sixth switch S6 may be simultaneously turned on in the first section A1, and the seventh switch S7 and the eighth switch S8 may be simultaneously turned on in the second section A2. The first section A1 and the second section A2 may also be repeated (i.e., the gate signal Sg2 in the first section A1 and the gate signal Sg2 in the third section A3 may be the same), and in this case, the repeating period may be Ts.

[0092] The fifth to eighth switches S5 to S8 are turned on or off by a gate signal Sg2 applied to the second power supply module 200, and a second output voltage V2 may be output. Referring to FIG. 2, since the fifth switch S5 and the sixth switch S6 are both turned on in the first section A1, the second output voltage V2 may be the maximum voltage Vb.

[0093] On the other hand, in the second section A2, the seventh switch S7 and the eighth switch S8 are turned on, so the second output voltage V2 may be zero.

[0094] The third section A3 is a repeat section identical to the first section A1, and since the fifth switch S5 and the sixth switch S6 are both turned on in the third section A3, the second output voltage V2 may be a maximum voltage Vb. Here, the maximum voltage Vb of the second output voltage V2 may be the same as the maximum voltage Va of the first output voltage V1.

[0095] 1, since the first output voltage V1 is equal to the sum of the second output voltage V2 and the output voltage Vo applied to the load terminal L, the output voltage Vo applied to both ends L1, L2 of the load terminal L may be the first output voltage V1 minus the second output voltage V2. In other words, the difference between the first output voltage V1 from the first power supply module 100 and the second output voltage V2 from the second power supply module 200 may be applied to both ends of the load terminal L as the output voltage Vo.

[0096] 2, the final output voltage Vo is the first output voltage V1 minus the second output voltage V2, and may be Va in the first section A1, −Vb in the second section A2, and Va again in the third section A3. The pulse shaping device 10 according to the present invention may be configured to combine the first power supply module 100 and the second power supply module 200 so that a negative output voltage Vo can be applied to the load terminal L.

[0097] Next, FIG. 3 is a graph showing the first output voltage V1, the second output voltage V2 output from the pulse shaping device 100 of FIG. 1, and the output voltage Vo applied to the load terminal L over time, and shows another example of the pulse shape of the output voltage Vo applied to the load terminal L.

[0098] In Figure 3, Sg1 indicates a gate signal applied to the first power supply module 100, and shows an example in which a drive signal is applied to the first switch S1 of the first power supply module 100 in the first section A1 from t0 to t1, a drive signal is applied to the first switch S1 and the second switch S2 of the first power supply module 100 in the second section A2 from t1 to t2, a drive signal is applied to the third switch S3 and the fourth switch S4 of the first power supply module 100 in the third and fourth sections A3 and A4 from t2 to t4, a drive signal is again applied to the first switch S1 of the first power supply module 100 in the fifth section A5 from t4 to t5, and a drive signal is applied to the first switch S1 and the second switch S2 of the first power supply module 100 in the sixth section A6 from t5 to t6.

[0099] Therefore, the first switch S1 may be turned on in the first interval A1, the first switch S1 and the second switch S2 may be turned on simultaneously in the second interval A2, the third switch S3 and the fourth switch S4 may be turned on simultaneously in the third and fourth intervals A3 and A4, the first switch S1 may be turned on in the fifth interval A5, and the first switch S1 and the second switch S2 may be turned on simultaneously in the sixth interval A6. Also, the first interval A1 to the fourth interval A4 may be repeated (i.e., the gate signal Sg1 in the first interval A1 and the second interval A2 is the same as the gate signal Sg1 in the fifth interval A5 and the sixth interval A6), and in this case, the repeating period may be Ts.

[0100] The first to fourth switches S1 to S4 may be turned on or off in response to a gate signal Sg1 applied to the first power supply module 100, thereby outputting a first output voltage V1. Referring to FIG. 3, since the first switch S1 is turned on in a first section A1, the first output voltage V1 may be Va2 (here, Va2 is the output voltage of the first voltage source 110 connected in series with the first switch S1), and since both the first switch S1 and the second switch S2 are turned on in a second section A2, the first output voltage V1 may be Va1 (here, Va1 is the sum of the output voltages of the first voltage source 110 connected in series with the first and second switches S1 and S2), where Va1 may be the maximum voltage of the first output voltage V1.

[0101] On the other hand, in the third and fourth sections A3 and A4, the third switch S3 and the fourth switch S4 are turned on, so the first output voltage V1 may be zero.

[0102] The fifth and sixth sections A5 and A6 are the same repeated sections as the first and second sections A1 and A2. In the fifth section A5, the first switch S1 is turned on, so the first output voltage V1 is Va2. In the sixth section A6, both the first switch S1 and the second switch S2 are turned on, so the first output voltage V1 may be Va1, which is the maximum voltage.

[0103] Similarly, in Figure 3, Sg2 indicates a gate signal applied to the second power supply module 200, and shows an example in which a drive signal is applied to the seventh switch S7 and the eighth switch S8 of the second power supply module 200 in the first and second sections A1 and A2 from t0 to t2, a drive signal is applied to the fifth switch S5 of the second power supply module 200 in the third section A3 from t2 to t3, a drive signal is applied to the fifth switch S5 and the sixth switch S6 in the fourth section A4 from t3 to t4, and again a drive signal is applied to the seventh switch S7 and the eighth switch S8 in the fifth and sixth sections A6 from t4 to t6.

[0104] Therefore, the seventh switch S7 and the eighth switch S8 may be simultaneously turned on in the first and second sections A1 and A2, the fifth switch S7 may be simultaneously turned on in the third section A3, and the fifth switch S5 and the sixth switch S6 may be simultaneously turned on in the fourth section A4. Also, the first section A1 to the fourth section A4 may be repeated (i.e., the gate signal Sg2 in the first and second sections A1 and A2 is the same as the gate signal Sg2 in the fifth and sixth sections A5 and A6), and in this case, the repeating period may be Ts.

[0105] The fifth to eighth switches S5 to S8 are turned on or off by a gate signal Sg2 applied to the second power supply module 200, and a second output voltage V2 may be output. Referring to FIG. 3, since the seventh switch S7 and the eighth switch S8 are both turned on in the first and second sections A1 and A2, the second output voltage V2 may be zero.

[0106] Meanwhile, in the third section A3, the fifth switch S5 is turned on, so the second output voltage V2 may be the voltage Vb2 of the second voltage source 210 connected in series with the fifth switch S5. In the fourth section A4, the fifth switch S5 and the sixth switch S6 are turned on simultaneously, so the second output voltage V2 may be the sum Vb1 of the voltages of the second voltage source 210 connected in series with the fifth switch S5 and the sixth switch S6. Here, Vb1 may be the maximum voltage of the second output voltage V2.

[0107] The fifth and sixth sections A5 and A6 are the same repeated sections as the first and second sections A1 and A2, and since the seventh switch S7 and the eighth switch S8 are both turned on in the fifth and sixth sections A5 and A6, the second output voltage V2 may be 0.

[0108] 3 again, the final output voltage Vo is the first output voltage V1 minus the second output voltage V2, and may be Va2 in the first section A1, Va1 (maximum positive voltage) in the second section A2, −Vb2 in the third section A3, and −Vb1 (maximum negative voltage) in the fourth section V4. The pulse shaping device 10 according to the present invention can be configured to combine the first power supply module 100 and the second power supply module 200 so that a negative output voltage Vo can be applied to the load terminal L, and the on / off of each switch S1 to S8 can be individually controlled to form output voltage Vo waveforms of various voltage levels.

[0109] 2 and 3, the on / off control sequence of switches S1 to S8 is merely an example, and it is obvious that it can be variously changed as needed to obtain a waveform of a desired shape. Furthermore, the on / off control method of switches S1 to S8 to obtain the same waveform can also be variously changed. That is, the output waveform of FIG. 2 or 3 can be identically implemented by controlling the on / off of switches S1 to S8 in a different manner.

[0110] Next, FIG. 4 shows an embodiment in which a plurality of first power supply modules 100 and a plurality of second power supply modules 200 are provided, and an output voltage Vo having a higher voltage and a variety of voltage levels can be applied to the load terminal L compared to FIG. 1.

[0111] For example, various waveforms of the output voltage Vo that can be shaped by the pulse shaping device 10 shown in Fig. 4 are shown in Fig. 5a to Fig. 5d. The pulse shaping device 10 according to the present invention can be configured so that various waveforms of the output voltage Vo can be applied to the load terminal L, such as a waveform in which the output voltage Vo increases or decreases (see Fig. 5a, the output voltage Vo can increase or decrease in a stepped manner by turning on and off a switch), a square pulse waveform, or a combination of waveforms such as a DC offset.

[0112] The present invention also discloses a pulse shaping method using the above-mentioned pulse shaping device, which includes a switching control step of controlling on / off operations of a plurality of switches S1 to S4 included in a first power supply module 100 and a plurality of switches S5 to S8 included in a second power supply module 200 of the pulse shaping device, and an output step of outputting a difference between a first output voltage V1 from the first power supply module 100 and a second output voltage V2 from the second power supply module 200 as an output voltage Vo to be applied to a load terminal L.

[0113] The above content has only described some of the preferred embodiments that can be embodied by the present invention, and as is well known, the scope of the present invention should not be interpreted as being limited to the above embodiments, and it can be said that any technical idea that shares the same fundamental principle as the technical idea of ​​the present invention described above is included in the scope of the present invention.

Claims

1. One or more first power supply modules (100) connected to one end (L1) of a load end (L), and one or more second power supply modules (200) connected to the other end (L2) of the load end (L) and connected to the first power supply modules (100), The first power supply module (100) includes a plurality of first voltage sources (110) and a plurality of switches (S1 to S4) that are turned on and off independently of each other; The second power supply module (200) includes a plurality of second voltage sources (210) and a plurality of switches (S5 to S8) that are turned on and off independently of each other; A pulse shaping device (10), characterized in that the difference between a first output voltage (V1) from the first power supply module (100) and a second output voltage (V2) from the second power supply module (200) is applied as an output voltage (Vo) across the load terminal (L).

2. The first power supply module (100) is provided in plurality, 2. The pulse shaping device (10) of claim 1, wherein the plurality of first power supply modules (100) are connected in series.

3. The second power supply module (200) is provided in plurality, 2. The pulse shaping device (10) of claim 1, wherein the plurality of second power supply modules (200) are connected in series.

4. 2. The pulse shaping device (10) of claim 1, wherein the first power supply module (100) includes two first voltage sources (110) and four first to fourth switches (S1 to S4) arranged in each leg (LG1 to LG4) of an H-bridge circuit.

5. 2. The pulse shaping device of claim 1, wherein the second power supply module includes two first voltage sources and four fifth through eighth switches arranged in each leg of an H-bridge circuit.

6. The pulse shaping device (10) of claim 1, wherein the switches (S1-S8) comprise MOSFET devices.

7. The first voltage source (110) and the second voltage source (210) are DC voltage sources, 2. The pulse shaping device (10) of claim 1, wherein the first voltage source (110) and the second voltage source (210) are coupled to the load end (L) with opposite polarities.

8. The pulse shaping device (10) of claim 1, further comprising a control unit that controls the on / off of the switches (S1 to S8).

9. The pulse shaping device (10) of claim 1, wherein the voltage magnitudes of the first plurality of voltage sources (110) and the second plurality of voltage sources (210) are the same as each other.

10. A method for pulse shaping using a pulse shaping device (10) according to any one of claims 1 to 10.

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