Workpiece inspection apparatus

Abstract

To suppress the damage of a work, to reduce the wear of a probe, and to surely bring the work into contact with the probe.SOLUTION: This device is provided with a pair of probes 3132, for performing electric inspection by abutting on a work W stored in a work storage hole 3a of an index table 3. The pair of probes 3132 and have magnet-attached auxiliary magnetic pole plates 31b and 32b, and a vacuum path 35 is formed between the pair of probes 3132 and. A pressing mechanism 50A is provided above the workpiece W.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to a workpiece inspection device that inspects the electrical characteristics of chip-type electronic components (hereinafter also referred to as works). [Background technology]

[0002] 2. Description of the Related Art Workpiece inspection devices that inspect electrical characteristics such as resistance and capacitance of chip-type electronic components (hereinafter also referred to as works) have been known.

[0003] This workpiece inspection device comprises an index table having a workpiece storage hole in which the workpiece is stored, and an inspection unit, and this inspection unit includes a probe that comes into contact with the workpiece in the workpiece storage hole. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2000-105258 Summary of the Invention [Problem to be solved by the invention]

[0005] In the above-mentioned workpiece inspection device, the probe moves up and down to contact the workpiece in the workpiece storage hole of the index table from below, and at this time, the electrical characteristics of the workpiece are inspected by the probe.

[0006] However, when the probe is moved up and down to contact the workpiece, the workpiece may be damaged and the probe may also be subject to friction. In particular, noise is generated when the workpiece and probe come into contact. Therefore, it has been considered to contact the workpiece by vacuuming or magnetically adsorbing it to the probe without moving the probe up and down. However, when the workpiece is vacuumed or magnetically adsorbed to the probe, it is difficult to ensure that the workpiece contacts the probe reliably due to dust and other debris brought in by the workpiece.

[0007] The present disclosure has been made in consideration of these points, and aims to provide a work inspection device that reduces damage to the workpiece, causes relatively little wear on the probe, does not generate noise, and allows the workpiece to be securely abutted against the probe. [Means for solving the problem]

[0008] The present disclosure relates to a work inspection device comprising: a base; an index table rotatably mounted on the base, and having a plurality of work storage holes formed on its outer periphery for storing workpieces; and an inspection unit mounted on the outer periphery of the index table and having an inspection position, the inspection unit having a pair of probes mounted on the base and contacting the work in the work storage hole at the inspection position to perform an electrical inspection of the work; and a vacuum path mounted within the base and sucking the work in the work storage hole at the inspection position to bring it into contact with the pair of probes, the work having a work body and a pair of electrodes, the work body or each electrode being made of a magnetic material, each probe having a probe body and an auxiliary magnetic pole plate with a magnet mounted on the outer surface of the probe body, and each probe being capable of contacting the corresponding electrode, and a pressing mechanism is provided on the opposite side of the pair of probes across the work, for pressing the work against the pair of probes.

[0009] The present disclosure relates to a workpiece inspection device, wherein the pressing mechanism includes an inspection pusher and an air cylinder that presses the inspection pusher against the workpiece.

[0010] The present disclosure relates to a workpiece inspection device in which the air cylinder has a cylinder and a drive piston disposed within the cylinder, the inspection pusher is incorporated within the cylinder, and a damper rubber is interposed between the drive piston and the inspection pusher.

[0011] The present disclosure is a workpiece inspection device, wherein the inspection pusher has inspection pusher portions respectively provided corresponding to the pair of electrodes of the workpiece.

[0012] The present disclosure relates to a workpiece inspection device in which the pair of probes consists of an inner probe located radially inward and an outer probe located radially outward, the pair of probes being arranged in an eight-shape, inclined upward toward the inspection position of the inspection section when viewed from the tangential direction of the index table, and the vacuum path is formed to extend from below to above by the pair of probes arranged in the eight-shape. [Effects of the Invention]

[0013] As described above, according to the present disclosure, when performing electrical testing on a workpiece, damage to the workpiece can be reduced, wear on the probe can be relatively small, noise generation can be reduced, and the workpiece can be reliably brought into contact with the probe. [Brief explanation of the drawings]

[0014] [Figure 1] FIG. 1 is a schematic diagram of an inspection unit of a workpiece inspection device according to this embodiment. [Figure 2] Figure 2 is an enlarged view of the workpiece shown in Figure 1. [Figure 3] 3 is an enlarged side cross-sectional view showing the inspection unit of the workpiece inspection device shown in FIG. 1. FIG. [Figure 4] FIG. 4 is a side view showing the entire workpiece processing system incorporating the workpiece inspection device. [Figure 5] Figure 5 is a schematic diagram showing the entire workpiece processing system incorporating the workpiece inspection device. DETAILED DESCRIPTION OF THE INVENTION

[0015] First, the entire work processing system incorporating the work inspection device 30A will be described with reference to FIGS.

[0016] As shown in Figures 4 and 5, the workpiece processing system 1A includes a parts feeder 1 that aligns the supplied workpieces W (see Figure 1) by aligning their orientation, a linear feeder 2 that receives the aligned workpieces from the parts feeder 1 and transports them in a single file, and a circular, horizontally installed index table 3 that receives the workpieces W from the linear feeder 2 and intermittently rotates in the direction of the arrow in Figure 5 about a vertical rotation axis 5 by the action of a power source (not shown). The index table 3 also has workpiece storage holes 3a that open outward on its outer periphery, and the workpieces W transported by the linear feeder 2 are individually stored in these workpiece storage holes 3a (see Figures 1 and 2). A separating and supplying unit 4 is provided between the linear feeder 2 and the index table 3, and this separating and supplying unit 4 has the function of transferring the workpieces W from the linear feeder 2 to the workpiece storage holes 3a of the index table 3.

[0017] Also provided on the outer periphery of the index table 3 are an inspection section 30 that performs electrical inspections on the workpiece W in the workpiece storage hole 3a of the index table 3, and a workpiece insertion section 6 that transfers the workpiece W in the workpiece storage hole 3a of the index table 3 onto a carrier tape 7.

[0018] The carrier tape 7 is made entirely of paper, and cavities (not shown) are formed on the carrier tape 7 by punching the paper carrier tape 7 .

[0019] The carrier tape 7 having such a configuration is supplied from the supply reel 8 and reaches the workpiece insertion section 6. Then, in the workpiece insertion section 6, the workpiece W is transferred and stored in the cavity of the carrier tape 7 as described above. The carrier tape 7 with the workpiece W stored in the cavity is then transported downstream (see Figures 4 and 5).

[0020] Next, a top tape 17 made of synthetic resin is supplied from the top tape supply section 17A via a guide roller 17B to the carrier tape 7 with the workpiece W stored in the cavity, and the top tape 17 is thermocompressed to the carrier tape 7 with the workpiece W stored in the cavity by a carrier tape thermocompression device 20.

[0021] Next, the carrier tape 7 to which the top tape 17 has been thermocompressed by a carrier tape thermocompression bonding device 20 is sent to an ARC (auto reel changer) 10.

[0022] 4 and 5, a tape feed gear 9 that guides the carrier tape 7 is provided directly below the workpiece insertion portion 6.

[0023] 4 and 5, the index table 3 is rotatably provided, and has workpiece storage holes 3a on its outer periphery for storing the workpieces W. In this case, the index table 3 is rotatably disposed on a base 3A.

[0024] The base 3A, the index table 3 arranged on the base 3A, and the inspection unit 30 arranged on the outer periphery of the index table 3 constitute a workpiece inspection device 30A according to this embodiment.

[0025] Next, the workpiece inspection device 30A according to this embodiment will be described in detail with reference to FIGS.

[0026] As described above, the work inspection device 30A comprises a base 3A, an index table 3 rotatably arranged on the base 3A and having a plurality of work storage holes 3a formed on the outer periphery for storing the work W, and an inspection unit 30 provided on the outer periphery of the index table 3 for performing electrical inspections on the work W in the work storage holes 3a.

[0027] As shown in FIG. 1, an index guide 3D is arranged on the outer periphery of the index table 3 so as to surround the index table 3, and this index guide 3D is supported by a base 3A.

[0028] An index cover 3B is disposed above the index table 3 and the index guide 3D so as to cover the index table 3 and the index guide 3D from above.

[0029] 1 is an enlarged cross-sectional side view of the inspection unit 30 provided on the outer periphery of the index table 3, viewed from the tangential direction of the index table 3. In FIG. 1, the left side is the radially inner side of the index table 3, and the right side is the radially outer side of the index table 3.

[0030] The index guide 3D shown in FIG. 1 is ring-shaped and is disposed so as to surround the outer periphery of the index table 3.

[0031] The index cover 3B that covers the index table 3 and the index guide 3D is disk-shaped as a whole.

[0032] The index guide 3D and index cover 3B shown in FIG. 1 have been removed in FIGS. 4 and 5 for convenience.

[0033] As shown in FIG. 1, the index cover 3B is partially removed at the inspection section 30 to form a space 3E, and a support 51 of a pressing mechanism 50A (described later) is fitted into the space 3E of the index cover 3B.

[0034] The center of the inspection unit 30 is the inspection position 30a, and the index table 3 rotates intermittently. When the workpiece storage hole 3a of the index table 3 reaches the inspection position 30a of the inspection unit 30, the rotation of the index table 3 stops.

[0035] Between the index cover 3B and the index table 3, a gap 41 is formed that connects the workpiece storage hole 3a at the inspection position 30a with the outside.

[0036] Next, the inspection unit 30 of the work inspection device 30A will be further described with reference to Figure 1. As described above, the inspection unit 30 has the inspection position 30a. The inspection unit 30 also has a pair of probes 31, 32 that are provided on the base 3A and come into contact with the work W in the work storage hole 3a when it reaches the inspection position 30a to perform electrical inspections such as resistance value inspections on the work W, and a vacuum path 35 that is provided on the base 3A and sucks the work in the work storage hole 3a so that it comes into contact with the pair of probes 31, 32.

[0037] Here, the workpiece W includes a workpiece body W0 made of a magnetic material and a pair of electrodes W1, W2, and as a whole is a chip-type electronic component with magnetic properties, such as a capacitor or resistor. The pair of probes 31, 32 consists of an inner probe 31 located radially inward and in contact with one electrode W1, and an outer probe 32 located radially outward and in contact with the other electrode W2. The electrodes W1, W2 of the workpiece W are made of nickel and tin plated material.

[0038] The inner probe 31 has a probe body 31a made of high-speed steel or wear-resistant carbide to withstand the friction caused by the workpiece W at the probe tip and the temperature rise caused by current flow, and an auxiliary magnetic pole plate 31b with a neodymium magnet attached to the outer surface of the probe body 31a. The probe body 31a is made entirely of a magnetic material. The inner probe 31 also has a carbide tip 33 at the tip that comes into contact with the electrode W1.

[0039] Similarly, the outer probe 32 has a probe body 32a made of high-speed steel or wear-resistant carbide to withstand friction caused by the workpiece W at the probe tip and temperature rise due to current flow, and an auxiliary magnetic pole plate 32b with a neodymium magnet attached to the outer surface of the probe body 32a. The probe body 32a is also made entirely of a magnetic material. Furthermore, the outer probe 32 has a carbide tip 34 at the tip that abuts against the electrode W2.

[0040] As shown in Figure 1, the pair of probes 31, 32 are each inclined at an angle of approximately 5 to 10 degrees with respect to a vertical line passing through the inspection position 30a of the inspection unit 30, so that the pair of probes 31, 32 are arranged in an eight-shaped pattern when viewed from the tangential direction of the index table 3.

[0041] The carbide tips 33 and 34 provided at the tips of the pair of probes 31 and 32 are tapered toward the workpiece W at a taper angle of 40° to 110°.

[0042] Furthermore, a vacuum path 35 provided in the base 3A is formed between the pair of probes 31, 32, and this vacuum path 35 is connected to a vacuum pump 37 via a connection line 36. When the workpiece storage hole 3a arrives at the inspection position 30a, the workpiece W in the workpiece storage hole 3a is first attracted by the magnetic force from the pair of probes 31, 32, and the electrodes W1, W2 of the workpiece W come into contact with the tips of the probes 31, 32. Next, in addition to the magnetic force from the probes 31, 32, the suction force of the vacuum path 35 presses the workpiece W toward the pair of probes 31, 32, thereby increasing the contact pressure between the workpiece W and the pair of probes 31, 32.

[0043] In FIG. 1, of the pair of probes 31 and 32, the inner probe 31 is an N-pole probe, and the outer probe 32 is an S-pole probe.

[0044] As shown in Figures 1 to 3, a pressing mechanism 50A is arranged on the opposite side of the pair of probes 31, 32 across the workpiece W, i.e., above the pair of probes 31, 32 across the workpiece W, to press the workpiece W against the pair of probes 31, 32.

[0045] The pressing mechanism 50A presses the workpiece W downward from above, pressing the workpiece W against the pair of probes 31 and 32.

[0046] In this embodiment, the workpiece W is evacuated by the vacuum path 35 as described above, and is attracted to the pair of probes 31, 32 by the magnetic action of the pair of probes 31, 32, and comes into contact with the pair of probes 31, 32. However, the workpiece W may bring with it dust or the like when it reaches the inspection section 30, and it is possible that the electrodes W1, W2 of the workpiece W may not be able to reliably come into contact with the pair of probes 31, 32.

[0047] According to this embodiment, by providing a pressing mechanism 50A above the workpiece W that has reached the inspection section 30 to press the workpiece W against a pair of probes 31, 32, the electrodes W1, W2 of the workpiece W can be reliably abutted against the pair of probes 31, 32.

[0048] In this specification, the terms "above" and "below" refer to the "above" and "below" positions when the workpiece inspection device 30A is positioned as shown in FIG.

[0049] Next, the pressing mechanism 50A will be further described. In this embodiment, the pressing mechanism 50A includes an air cylinder 50. However, the pressing mechanism 50A is not limited to including an air cylinder 50, and for example, the pressing mechanism 50A may include a solenoid, a linear motor, or the like.

[0050] As shown in Figures 1 to 3, the air cylinder 50 constituting the pressing mechanism 50A has a support body 51 whose lower part 51a is fitted into the space 3E of the index cover 3B, a cylinder (hereinafter also referred to as a cylindrical main body) 52 arranged on the support body 51 and having a space 53 formed therein, and a drive piston 54 located above the space 53 of the cylindrical main body 52.

[0051] An inspection pusher 60 is disposed below the space 53 of the cylindrical main body 52. ​​This inspection pusher 60 presses the workpiece W from above. The inspection pusher 60 has an inspection pusher portion 61 that presses the electrode W1 of the workpiece W and an inspection pusher portion 62 that presses the electrode W2 of the workpiece W.

[0052] The inspection pusher portion 61 has an inspection pusher body 61a, a flange portion 61b provided on the upper part of the inspection pusher body 61a, and a tip portion 61c provided on the lower part of the inspection pusher body 61a and abutting against one electrode W1.

[0053] The inspection pusher portion 62 has an inspection pusher body 62a, a flange portion 62b provided on the upper part of the inspection pusher body 62a, and a tip portion 62c provided on the lower part of the inspection pusher body 62a and abutting against the other electrode W2.

[0054] In this embodiment, the inspection pusher portion 61 and the inspection pusher portion 62 are movable up and down within the space 53 of the cylindrical main body 52 independently of each other.

[0055] The tip 61c of the inspection pusher portion 61 and the tip 62c of the inspection pusher portion 62 are fixed to the lower part of the inspection pusher body 61a and the inspection pusher body 62a, respectively, and are made of an insulating material such as zirconia ceramics or hard plastic.

[0056] The inspection pusher body 61a and flange portion 61b of the inspection pusher portion 61 are integrally formed and, like the tip portion 61c, are made of an insulating material such as zirconia ceramics or hard plastic.

[0057] The inspection pusher body 62a and flange portion 62b of the inspection pusher portion 62 are integrally formed and, like the tip portion 62c, are made of an insulating material such as zirconia ceramics or hard plastic.

[0058] 1 and 3, the flange portion 61b of the inspection pusher portion 61 is disposed within the space 53 of the cylindrical main body 52, and the inspection pusher main body 61a extends downward from the space 53 and penetrates the support body 51. The tip portion 61c also penetrates the support body 51 and further protrudes outward from the lower end of the support body 51 toward the workpiece W.

[0059] The flange portion 62b of the inspection pusher portion 62 is disposed within the space 53 of the cylindrical main body 52, and the inspection pusher main body 62a extends downward from the space 53 and penetrates the support body 51. The tip portion 62c penetrates the support body 51 and further protrudes outward from the lower end of the support body 51 toward the workpiece W.

[0060] As shown in Figures 1 and 3, a ring-shaped damper rubber 55 is interposed within the space 53 of the cylindrical body 52 between the drive piston 54 and the flange portion 61b of the inspection pusher portion 61 and the flange portion 62b of the inspection pusher portion 62.

[0061] As will be described later, when air is supplied from the air passage 70 into the space 53 of the cylindrical body 52, the drive piston 54 moves downward. In this case, by providing the damper rubber 55, the downward movement of the drive piston 54 can be elastically transmitted to the flange portions 61b of the inspection pusher portion 61 and the flange portions 62b of the inspection pusher portion 62 via the damper rubber 55, without being transmitted directly to the inspection pusher portion 61 and the flange portions 62b of the inspection pusher portion 62.

[0062] Furthermore, an air passage 70 is connected to the space 53a above the drive piston 54 within the space 53 of the cylindrical body 52, and an air passage 71 is connected to the space 53b below the flange portions 61b and 62b.

[0063] Furthermore, within the space 53 of the cylindrical body 52, the above-mentioned damper rubber 55 is disposed in the space 53c between the drive piston 54 and the flange portions 61b, 62b, and this space 53c is always open to the atmosphere via the ventilation path 72.

[0064] Since the space 53c between the drive piston 54 and the flange portions 61b, 62b is open to the atmosphere in this way, the damper rubber 55 arranged in this space 53c can exert its inherent expansion and contraction function without being affected by pressure changes within the space 53c.

[0065] The air passage 70 and the air passage 71 are both connected to an air supply source 76 via a switching valve 75 .

[0066] 1, a ring-shaped seal rubber 56 that seals between the drive piston 54 and the wall surface of the space 53a is disposed in the space 53a above the drive piston 54 within the space 53 of the cylindrical main body 52. ​​An additional drive piston 54A that abuts against the flange portions 61b and 62b and drives the flange portions 61b and 62b is disposed in the space 53b below the flange portions 61b and 62b within the space 53 and is movable up and down. Further, ring-shaped seal rubbers 57 and 58 that seal between the additional drive piston 54A and the wall surface of the space 53b are disposed within the space 53b.

[0067] Next, the operation of this embodiment having such a configuration will be described.

[0068] As shown in Figures 4 and 5, the workpieces W supplied to the parts feeder 1 are aligned in the same direction by the action of the parts feeder 1 and then transferred to the linear feeder 2. The works W are then transported in a line by the action of the linear feeder 2 and reach the index table 3. Furthermore, the works W are individually stored in the workpiece storage holes 3a provided in the index table 3 by the action of the separating and supplying unit 4.

[0069] The workpiece W accommodated in the workpiece storage hole 3a is sent to the inspection section 30 by the intermittent rotation of the index table 3 in the direction of the arrow in Figure 5, and when the workpiece storage hole 3a reaches the inspection position 30a of the inspection section 30, the workpiece W in the workpiece storage hole 3a comes into contact with probes 31 and 32, and an electrical inspection of the workpiece W is performed. A workpiece W that is determined to be defective as a result of the electrical inspection is ejected from the workpiece storage hole 3a by an ejection function not shown. A workpiece W that is determined to be non-defective as a result of the electrical inspection reaches the workpiece insertion section 6 by the intermittent rotation of the index table 3 while remaining accommodated in the workpiece storage hole 3a.

[0070] During this time, the carrier tape 7 wound around the supply reel 8 is fed from a tape feed gear 9 installed directly below the workpiece insertion section 6 to the ARC 10 side.

[0071] As the tape feed gear 9 rotates intermittently, the carrier tape 7 reaches the work insertion section 6 and stops, and when the work can be transferred, the work W in the work storage hole 3a of the index table 3 is transferred to a cavity in the carrier tape 7 (not shown).

[0072] Next, the top tape 17 is supplied to the carrier tape 7, and the top tape 17 is thermocompression bonded to the carrier tape 7 by a carrier tape thermocompression bonding device 20. The carrier tape 7 to which the top tape 17 is thermocompression bonded is then sent to the ARC 10 side.

[0073] The electrical inspection method performed on the workpiece W in the inspection section 30 during this period will be described in detail below.

[0074] A pair of probes 31, 32 mounted on the base 3A each have auxiliary magnetic pole plates 31b, 32b with neodymium magnets, with the inner probe 31 being an N-pole probe and the outer probe 32 being an S-pole probe. The workpiece W is made of a magnetic material as a whole. As shown in FIG. 1, when the workpiece W in the workpiece storage hole 3a provided on the outer periphery of the index table 3 reaches the inspection position 30a of the inspection unit 30, a magnetic circuit is formed by the pair of probes 31, 32 and the workpiece W. The workpiece W is then attracted to the pair of probes 31, 32 by the magnetic force of the pair of probes 31, 32, and the electrodes W1, W2 of the workpiece W come into contact with the tips of the pair of probes 31, 32.

[0075] During this time, the workpiece W in the workpiece storage hole 3a is sucked toward the pair of probes 31, 32 provided on the base 3A through a vacuum path 35 that is maintained in a vacuum state by a vacuum pump 37. In this case, the vacuum path 35 is constantly maintained in a vacuum state by the vacuum pump 37. Furthermore, a gap 41 that connects the workpiece storage hole 3a at the inspection position 30a to the outside is formed between the index table 3 and the index cover 3B, so that the workpiece W in the workpiece storage hole 3a at the inspection position 30a can be reliably sucked by the vacuum path 35 and sucked toward the pair of probes 31, 32. Therefore, in addition to the suction due to the magnetic force from the probes 31, 32, the vacuum suction force of the vacuum path 35 presses the workpiece W toward the pair of probes 31, 32, thereby increasing the contact pressure between the workpiece W and the pair of probes 31, 32.

[0076] In this embodiment, the inner probe 31 contacts the electrode W1 of the workpiece W, and the outer probe 32 contacts the electrode W2 of the workpiece W, and the pair of probes 31, 32 measure (inspect) the electrical characteristics of the workpiece W, such as resistance value, capacitance, etc.

[0077] During this time, in addition to the magnetic attraction from the pair of probes 31, 32 and the vacuum suction force from the vacuum path 35, the workpiece W is pressed against the pair of probes 31, 32 by a pressing mechanism 50A having an air cylinder 50. As a result, even if the workpiece W reaches the inspection position 30a of the inspection unit 30 while carrying dust or the like, the pressing mechanism 50A consisting of the air cylinder 50 can reliably abut the electrodes W1, W2 of the workpiece W against the pair of probes 31, 32.

[0078] In this case, an inspection pusher 60 having a pair of inspection pusher portions 61, 62 is installed in the space 53 of the cylinder (also called the cylindrical body) 52 of the pressing mechanism 50A, and one of the inspection pusher portions 61 presses the electrode W1 of the work W downward, and the other inspection pusher portion 62 presses the electrode W2 of the work W downward.

[0079] The operation of the pressing mechanism 50A will be further explained.

[0080] First, when the workpiece W reaches the inspection position 30a of the inspection unit 30, the tip ends 61c, 62c of the pair of inspection pusher portions 61, 62 are already positioned slightly above the workpiece W (see FIG. 1). In this case, air is supplied from the air passage 71 into the space 53b of the cylindrical main body 52, and the additional drive piston 54A disposed in the space 53b and the flange portions 61b, 62b of the pair of inspection pusher portions 61, 62 move upward. Furthermore, as the flange portions 61b, 62b rise, the damper rubber 55 provided in the space 53c between the drive piston 54 and the flange portions 61b, 62b is compressed, and the drive piston 54 also rises.

[0081] Next, after the workpiece W reaches the inspection position 30a of the inspection unit 30, the electrodes W1 and W2 of the workpiece W are pressed downward by the inspection pusher portion 61 and the inspection pusher portion 62 of the pressing mechanism 50A.

[0082] In this case, the switching valve 75 is switched to stop the air supply from the air passage 71, and at the same time, air is supplied from the air passage 70 into the space 53a of the cylindrical body 52. ​​At this time, the seal rubber 56 is compressed to seal the gap between the drive piston 54 and the wall surface of the space 53a.

[0083] At this time, the damper rubber 55 in the space 53c between the drive piston 54 and the flange portions 61b, 62b returns from its compressed state to its original state, causing the flange portions 61b, 62b and the additional drive piston 54A to descend. In this way, the tip portion 61c of the inspection pusher portion 61 and the tip portion 62c of the inspection pusher portion 62 reach directly above the electrodes W1, W2 of the workpiece W. Alternatively, the tip portion 61c of the inspection pusher portion 61 and the tip portion 62c of the inspection pusher portion 62 come into contact with the electrodes W1, W2 of the workpiece W.

[0084] Thereafter, the space 53a above the drive piston 54 is gradually pressurized, and the drive piston 54 descends. As the drive piston 54 descends in this manner, the damper rubber 55 is compressed, and the inspection pusher portions 61, 62 and the additional drive piston 54A gradually descend, so that the tip ends 61c, 62c of the inspection pusher portions 61, 62 slowly come into contact with the electrodes W1, W2 of the workpiece W, and the tip ends 61c, 62c of the inspection pusher portions 61, 62 can gradually press the electrodes W1, W2 of the workpiece W downward.

[0085] Alternatively, when the damper rubber 55 returns to its original state, the tip 61c of the inspection pusher portion 61 and the tip 62c of the inspection pusher portion 62 may come into contact with the electrodes W1, W2 of the workpiece W. In this case, the damper rubber 55 is compressed as the drive piston 54 descends, and the tip portions 61c, 62c of the inspection pusher portions 61, 62 can gradually press the electrodes W1, W2 of the workpiece W downward.

[0086] During this time, if the shapes of the electrodes W1 and W2 of the workpiece W are different from each other, the inspection pusher portions 61 and 62 are independent from each other, so the inspection pusher portions 61 and 62 can press the electrodes W1 and W2 of the workpiece W with the same pressure while changing the downward movement distance.

[0087] In this embodiment, a damper rubber 55 is provided in the space 53c between the drive piston 54 and the flange portions 61b, 62b, so even if the downward movement distances of the inspection pusher portions 61, 62 differ, the damper rubber 55 can absorb the different movement distances between the inspection pusher portions 61, 62.

[0088] When the switching valve 75 is switched to stop the air supply from the air passage 71 and simultaneously supply air from the air passage 70 into the space 53a in the cylindrical body 52, the pressure in the space 53b drops, and the seal rubbers 57 and 58 that seal the additional drive piston 54A provided in the space 53b against the wall of the space 53b return to their original state without being compressed. This releases the seal between the additional drive piston 54A and the wall of the space 53b. This allows the flanges 61b and 62b and the additional drive piston 54A to smoothly descend in both cases: when the damper rubber 55 returns to its original state to lower the flanges 61b and 62b and the additional drive piston 54A; and when air is supplied into the space 53a to lower the flanges 61b and 62b and the additional drive piston 54A.

[0089] In this way, the electrodes W1, W2 of the workpiece W are pressed downward by the tip portions 61c, 62c of the inspection pusher portions 61, 62, while inspecting the electrical characteristics of the workpiece W. Next, after the inspection of the electrical characteristics of the workpiece W is completed, the pressing operation by the pressing mechanism 50A is released.

[0090] In this case, first, the switching valve 75 is switched to stop the air supply from the air passage 70, and at the same time, air is supplied from the air passage 71 into the space 53b of the cylindrical main body 52. ​​At this time, the damper rubber 55 in the space 53c between the drive piston 54 and the flange portions 61b, 62b returns from its compressed state to its original state, and the drive piston 54 rises. At the same time, the seal rubbers 57, 58 are compressed to seal the space between the additional drive piston 54A and the wall surface of the space 53b.

[0091] Thereafter, pressure is applied to the space 53b of the cylindrical main body 52, and the additional drive piston 54A and the flange portions 61b, 62b of the inspection pusher portions 61, 62 gradually rise. As the additional drive piston 54A and the flange portions 61b, 62b rise, the damper rubber 55 is compressed again.

[0092] During this time, the pressure in the space 53a of the cylindrical body 52 decreases, and the seal rubber 56 provided in the space 53a to seal the gap between the drive piston 54 and the wall surface of the space 53a returns to its original state without being compressed. As a result, the seal between the drive piston 54 and the wall surface of the space 53a is released. As a result, when the damper rubber 55 returns to its original state and the drive piston 54 rises, and when air is supplied into the space 53b and the drive piston 54 is raised via the damper rubber 55 by the flange portions 61b, 62b and the additional drive piston 54A, the drive piston 54 can be raised smoothly.

[0093] In this embodiment, the pair of probes 31, 32 of the inspection unit 30 are fixed and do not move up and down, and only the workpiece W is attracted toward the pair of probes 31, 32 by the magnetic action of the pair of probes 31, 32 and the vacuum suction action of the vacuum path 35, and moves downward. In this case, the pair of probes 31, 32 each abut against the electrodes W1, W2 of the workpiece W. Then, the tips of the pair of probes 31, 32 move laterally (horizontally) relative to the workpiece W in the workpiece storage hole 3a, breaking the oxide coating of each electrode W1, W2, making it easier for them to conduct, and the pair of probes 31, 32 come into normal contact with each electrode W1, W2.

[0094] When the electrical inspection in the inspection section 30 is completed, the index table 3 rotates, and the workpiece W stored in the workpiece storage hole 3a of the index table 3 is sent to the workpiece insertion section 6 for the next process, where it is transferred into the cavity of the carrier tape 7 as described above.

[0095] As described above, according to this embodiment, in the inspection unit 30, the pair of probes 31, 32 are fixed and do not move up and down, and only the workpiece W is attracted to and comes into contact with the pair of probes 31, 32.

[0096] Therefore, the contact pressure between the probes 31, 32 and the workpiece W can be reduced compared to when the probes 31, 32 move up and down to contact the workpiece W. As a result, the workpiece W is not damaged, the probes are subject to relatively little wear, and no noise is generated. This allows the maintenance intervals of the probes to be extended.

[0097] Furthermore, when the probes 31, 32 move up and down to contact the workpiece W, in addition to the time required for the probes 31, 32 to move upward, the probes 31, 32 contact the workpiece W, causing the workpiece W to move uncontrollably, and therefore time is required for the workpiece W to stabilize before the electrical characteristics of the workpiece W can be inspected. However, according to this embodiment, the probes 31, 32 do not move up and down, and the inspection time can be shortened.

[0098] Furthermore, according to this embodiment, there is no need to provide a mechanism for moving the probes 31 and 32 up and down, and there is also no need to connect flexible transmission lines to the probes 31 and 32, so that high-frequency components can be measured while taking their characteristic impedance into consideration.

[0099] Furthermore, because there is no need to move the probes 31, 32 up and down, the contact force applied to the workpiece W from the probes 31, 32 can be reduced, and the measurement marks formed on the electrodes W1, W2 of the workpiece W can be made smaller. As a result, measurement marks will not be formed on the electrodes W1, W2 of the workpiece W, and the nickel inside the electrodes W1, W2 will not be oxidized, and when soldering is performed on the workpiece W in a later process, this will not interfere with the soldering action.

[0100] Furthermore, even if the workpiece W reaches the inspection section 30 while carrying, for example, dust or the like, a pressing mechanism 50A including an air cylinder 50 is provided from above the workpiece W, and an inspection pusher 60 is incorporated into this air cylinder 50, so that this inspection pusher 60 can reliably abut the electrodes W1 and W2 of the workpiece W against the pair of probes 31 and 32.

[0101] Furthermore, the inspection pusher 60 of the pressing mechanism 50A has a pair of inspection pusher portions 61, 62, and the inspection pusher portions 61, 62 press the electrodes W1, W2, respectively, so that the electrodes W1, W2 of the workpiece W can be more reliably brought into contact with the pair of probes 31, 32. Furthermore, since the inspection pusher portions 61, 62 are independent of each other, even if the shapes of the electrodes W1, W2 of the workpiece W are different from each other, by adjusting the movement distance of the inspection pusher portions 61, 62, the electrodes W1, W2 of the workpiece W can be reliably pressed with the same pressure.

[0102] In this case, since the damper rubber 55 is provided in the space 53c between the drive piston 54 and the flange portions 61b, 62b, the difference in the downward movement distance of the inspection pusher portions 61, 62 can be absorbed by this damper rubber 55.

[0103] Furthermore, when the switching valve 75 is switched to stop the air supply from the air passage 71 and air is supplied from the air passage 70 into the space 53a of the cylindrical main body 52 to move the inspection pusher portion 61 and the inspection pusher portion 62 downward, the downward movement stroke of the inspection pusher portion 61 and the inspection pusher portion 62 is made substantially equal to the amount of extension when the damper rubber 55 returns from the compressed state to its original state. As a result, the tip ends 61c, 62c of the inspection pusher portions 61, 62 can be brought into contact with the electrodes W1, W2 of the workpiece W simply by returning the damper rubber 55 from the compressed state to its original state.

[0104] Therefore, when air is supplied into the space 53a of the cylindrical main body 52 to pressurize the space 53a, the tip ends 61c, 62c of the inspection pusher portions 61, 62 are already in contact with the electrodes W1, W2 of the workpiece W. This makes it possible to shorten the movement stroke of the inspection pusher portions 61, 62 as much as possible, thereby significantly improving work efficiency.

[0105] Furthermore, when air is supplied into the space 53a of the cylindrical main body 52 to pressurize the space 53a and cause the inspection pusher portions 61, 62 to move downward, even if the inspection pusher portions 61, 62 accidentally move significantly, the lower end of the additional drive piston 54A abuts against the support body 51, so the inspection pusher portions 61, 62 will not descend excessively.

[0106] Furthermore, air is supplied into space 53a, and the air supply to space 53b is stopped, thereby returning the compressed damper rubber 55 to its original state, and then pressure is applied inside space 53a to lower the drive piston 54. As the drive piston 54 moves downward, the downward movement of the drive piston 54 is transmitted to flange portions 61b, 62b by damper rubber 55, lowering the inspection pusher portions 61, 62 and additional drive piston 54A, and the tip portions 61c, 62c of the inspection pusher portions 61, 62 press against the electrodes W1, W2 of the workpiece W. As a result, the tip portions 61c, 62c of the inspection pusher portions 61, 62 can gradually pressurize the electrodes W1, W2 without generating any impact.

[0107] Furthermore, when air is supplied into space 53a and the air supply to space 53b is stopped, seal rubbers 57 and 58 provided in space 53b return from their compressed state to their original state, and seal rubbers 57 and 58 release the seal between additional drive piston 54A and the wall surface of space 53b. Therefore, when drive piston 54 descends due to the air supplied into space 53a, flange portions 61b and 62b and additional drive piston 54A can move smoothly within space 53b.

[0108] Similarly, when the air supply to space 53a is stopped and air is supplied to space 53b, seal rubber 56 provided in space 53a returns from its compressed state to its original state, and seal rubber 56 releases the seal between drive piston 54 and the wall surface of space 53a. Therefore, when additional drive piston 54A and flange portions 61b, 62b rise due to the air supplied to space 53b, drive piston 54 can move smoothly within space 53a.

[0109] In the above embodiment, an example has been shown in which the pressing mechanism 50A includes the air cylinder 50, and the inspection pusher portions 61, 62 are incorporated into the space 53 of the cylindrical main body 52 of this air cylinder 50. However, this is not limiting, and the inspection pusher portions 61, 62 may be provided separately from the air cylinder 50, and the inspection pusher portions 61, 62 may be connected to the air cylinder 50 via a connecting mechanism (not shown). [Explanation of symbols]

[0110] 1A Work Processing System 3 Index Table 3a Work storage hole 3A base 3B index cover 3D Index Guide 30 Inspection Department 30A Workpiece Inspection Device 30a Inspection position 31 Inner probe 31a Probe body 31b Auxiliary magnetic pole plate with neodymium magnet 32 outer probe 32a Probe body 32b Auxiliary magnetic pole plate with neodymium magnet 35 Vacuum path 36 connection lines 37 Vacuum Pump 41 Gap 50 Air Cylinder 50A pressing mechanism 51 Support 52 Cylindrical body 53 Space 53a,53b,53c space 55 Damper rubber 56 Seal rubber 57 Seal rubber 58 Seal rubber 60 Inspection Pusher 61 Inspection pusher part 62 Inspection pusher part 61a Inspection pusher body 61b Flange part 61c Tip 62a Inspection pusher body 62b Flange part 62c tip 70 Airway 71 Airway 75 Switching valve 76 Air supply source double work W0 Workpiece body W1 electrode W2 electrode

Claims

1. The base and an index table rotatably provided on the base and having a plurality of workpiece storage holes formed on its outer periphery for storing workpieces; an inspection unit provided on the outer periphery of the index table and having an inspection position; The inspection unit is provided on the base and includes a pair of probes that come into contact with the work in the work storage hole at the inspection position to perform an electrical inspection of the work, and a vacuum path that is provided within the base and sucks the work in the work storage hole at the inspection position and brings it into contact with the pair of probes, the workpiece has a workpiece body and a pair of electrodes, the workpiece body or each electrode is made of a magnetic material, each probe has a probe body and an auxiliary magnetic pole plate with a magnet provided on the outer surface of the probe body, and each probe can abut against the corresponding electrode, A workpiece inspection device, wherein a pressing mechanism for pressing the workpiece against the pair of probes is provided on the opposite side of the pair of probes with the workpiece sandwiched therebetween.

2. 2. The workpiece inspection device according to claim 1, wherein the pressing mechanism comprises an inspection pusher and an air cylinder for pressing the inspection pusher against the workpiece.

3. 3. The workpiece inspection device according to claim 2, wherein the air cylinder has a cylinder and a drive piston disposed within the cylinder, the inspection pusher is incorporated within the cylinder, and a damper rubber is interposed between the drive piston and the inspection pusher.

4. 4. The workpiece inspection device according to claim 3, wherein the inspection pusher has inspection pusher portions respectively provided in correspondence with the pair of electrodes of the workpiece.

5. the pair of probes comprises an inner probe positioned radially inward and an outer probe positioned radially outward; the pair of probes are arranged in an eight-shape inclined upward toward the inspection position of the inspection unit when viewed from a tangential direction of the index table, 2. The workpiece inspection device according to claim 1, wherein said vacuum path is formed by said pair of probes arranged in an eight-shape so as to extend from below to above.

Images