Pump

Abstract

To provide a technique capable of conveying a substance to be conveyed without depending on resonance drive.SOLUTION: The pump includes a pair of flat plates disposed to face each other, a plurality of elastic membranes provided side by side along a longitudinal direction of the pair of flat plates on each of facing surfaces of the pair of flat plates and configured to expand and contract in a facing direction of the pair of flat plates, and a drive unit configured to cause the elastic membranes to expand and contract by causing a fluid to flow in and out between the elastic membranes and the facing surfaces on which the elastic membranes are provided. The cross-sectional shape of the elastic membrane in the stretched state along the longitudinal direction and the facing direction has a waveform obtained by extracting a phase portion from adjacent nodes of a standing wave generated at the time of resonance in a beam whose both ends are simply supported, and the plurality of elastic membranes provided on one flat plate and the plurality of elastic membranes provided on the other flat plate are alternately provided in the longitudinal direction.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to pumps. [Background technology]

[0002] Pumps for transporting substances have been known for some time. For example, Patent Document 1 discloses a traveling wave pump that includes two elastic plates with a gap between them, an inlet port at one end of the opposing surfaces and an outlet port at the other end, the end faces of the two elastic plates being sealed except for the inlet and outlet ports, oscillators that vibrate the elastic plates disposed outside both elastic plates, and an excitation device for the oscillator. The two elastic plates are supported under boundary conditions such that the natural vibration mode of the bending vibration is sinusoidal, and the traveling wave pump is a resonant drive type. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2010-196660 Summary of the Invention [Problem to be solved by the invention]

[0004] In the pump described in Patent Document 1, two elastic plates are resonantly driven to move the contact area between the elastic plates in a traveling wave pattern, thereby transporting an object present in the gap between the elastic plates. However, even when subjected to a reaction force from the object being transported, it is necessary to maintain the resonant drive of the two elastic plates and maintain the contact area at all times, making it difficult to drive the pump stably. Therefore, there is a need for another technology that can transport a target substance without relying on resonant drive. [Means for solving the problem]

[0005] The present disclosure can be realized in the following forms.

[0006] (1) According to one aspect of the present disclosure, there is provided a pump comprising: a pair of flat plates arranged opposite each other; a plurality of elastic membranes arranged in a line along the longitudinal direction of the pair of flat plates on each of the opposing surfaces of the pair of flat plates, the elastic membranes stretching in the opposing direction of the pair of flat plates; and a drive unit that expands and contracts the elastic membranes by feeding and discharging a fluid between the elastic membranes and the opposing surfaces on which the elastic membranes are provided, wherein, in a contracted state, the elastic membranes are planar along the opposing surfaces, and, in an expanded state, the cross-sectional shape of the elastic membranes along the longitudinal direction and the opposing direction resembles that of a beam simply supported at both ends. a wave shape obtained by extracting phase portions from adjacent nodes of a standing wave generated during resonance in a pump, the plurality of elastic membranes provided on one of the pair of flat plates and the plurality of elastic membranes provided on the other of the pair of flat plates are alternately arranged in the longitudinal direction, the elastic membranes provided on one adjacent flat plate and the elastic membranes provided on the other adjacent flat plate are arranged at positions with a phase difference of approximately 90° in the longitudinal direction, and are expanded and contracted by the drive unit at timings with a phase difference of approximately 90°. With this type of pump, the contact area between the elastic membranes can be made to move in a traveling wave manner, making it possible to transport a substance to be transported without relying on resonance driving.

[0007] (2) In the pump described in (1) above, the drive unit may supply the fluid discharged from one of the pair of elastic membranes adjacent to each other in the longitudinal direction in at least one of the pair of flat plates to the other of the pair of elastic membranes. With this type of pump, the fluid can be efficiently taken in and out, thereby preventing the pump structure from becoming complicated.

[0008] (3) In the pump described in (1) or (2) above, a tube through which the substance to be transported can flow into the inner hole may be sandwiched between the elastic membrane provided on one of the flat plates and the elastic membrane provided on the other flat plate. According to this form of pump, the contact portion can be made to move in a traveling wave manner via the tube, so that the substance to be transported can be circulated through the inner hole of the tube and transported.

[0009] The present disclosure can be realized in various forms, such as a method for manufacturing a pump, a method for controlling a pump, a blower, a method for manufacturing a blower, a method for controlling a blower, a compressor, a method for manufacturing a compressor, a method for controlling a compressor, etc. [Brief explanation of the drawings]

[0010] [Figure 1] FIG. 2 is a cross-sectional view schematically illustrating the general configuration of a pump. [Figure 2] 10A and 10B are explanatory diagrams showing how an elastic film expands and contracts. [Figure 3] FIG. 4 is an explanatory diagram illustrating the operation of a drive unit. [Figure 4] FIG. 2 is an explanatory diagram showing an example of how the pump is used. DETAILED DESCRIPTION OF THE INVENTION

[0011] A. Embodiment FIG. 1 is a cross-sectional view illustrating a schematic configuration of a pump 100 according to an embodiment of the present disclosure. For ease of explanation, FIG. 1 illustrates the schematic configuration of the pump 100, and the dimensional relationships between the components may differ from the actual configuration. The pump 100 is used to transport a substance. The substance to be transported may be in any form, including, but not limited to, a liquid, a gas, a powder, or a granular material. Examples of liquids include, but are not limited to, blood. Examples of gases include, but are not limited to, air. The pump 100 transports a substance from one end to the other end in a longitudinal direction D1, as indicated by the white arrow in FIG. 1. The dimensions of the pump 100 in the longitudinal direction D1, such as its length, shown in FIG. 1, are merely examples. The pump 100 includes a pair of flat plates 10, multiple elastic membranes 20, and a drive unit 30.

[0012] The pair of flat plates 10 extend along the longitudinal direction D1 and are disposed opposite each other. The pair of flat plates 10 are parallel to each other and face each other at the facing surface S1. In the following description, the direction in which the pair of flat plates 10 face each other is also referred to as the "facing direction D2." FIG. 1 shows a schematic configuration of the pump 100 at a cross section S2 taken along the longitudinal direction D1 and the facing direction D2. The dimension between the pair of flat plates 10 is substantially constant throughout the entire longitudinal direction D1. More specifically, in this embodiment, the dimension between the pair of flat plates 10 is substantially the same as the amplitude of the elastic membrane 20, which will be described later. The material from which the pair of flat plates 10 are formed is not particularly limited, but examples thereof include resin and metal.

[0013] In this embodiment, the pair of flat plates 10 are connected to each other by members (not shown) at both ends in a direction perpendicular to the longitudinal direction D1 and the opposing direction D2. Therefore, the pair of flat plates 10 are connected to each other at the front side and the back side of the paper in FIG. 1 . As a result, a space 11 sandwiched between the pair of flat plates 10 is isolated from the outside of the pump 100. The member connecting the pair of flat plates 10 is not particularly limited, and may be formed, for example, by a plate-shaped member similar to the pair of flat plates 10. In the space 11 sandwiched between the pair of flat plates 10, one end in the longitudinal direction D1 functions as an inlet 12, and the other end in the longitudinal direction D1 functions as an outlet 13. For example, a pipe (not shown) is connected to the inlet 12, and the material to be transported is supplied through this pipe. For example, a pipe (not shown) is connected to the outlet 13, and the material to be transported is discharged through this pipe.

[0014] In this embodiment, the pair of flat plates 10 each have through holes 14 formed at approximately equal intervals along the longitudinal direction D1. In the present disclosure, "through holes 14 formed at approximately equal intervals" means that the respective intervals between the through holes 14 formed side by side along the longitudinal direction D1 are within a range of ±30% of the average interval, preferably within a range of ±20%, more preferably within a range of ±10%, and even more preferably within a range of ±5%. In the following description, one of the pair of flat plates 10 will be referred to as "one flat plate 15," and the other of the pair of flat plates 10 will be referred to as "the other flat plate 16." In FIG. 1 , the flat plate 10 located at the top of the page is referred to as one flat plate 15, and the flat plate 10 located at the bottom of the page is referred to as the other flat plate 16. The through holes 14 formed in one flat plate 15 and the through holes 14 formed in the other flat plate 16 are alternately arranged in the longitudinal direction D1. In this embodiment, in the longitudinal direction D1, each of the through holes 14 formed in one flat plate 15 is provided at a position facing the midpoint of adjacent through holes 14 formed in the other flat plate 16 in the facing direction D2. Note that it is sufficient that each of the through holes 14 is formed corresponding to any position of each elastic membrane 20, and the configuration shown in Fig. 1 is merely an example. Therefore, each of the through holes 14 formed in one flat plate 15 may be provided at a position shifted from the position facing the midpoint of adjacent through holes 14 formed in the other flat plate 16 in the facing direction D2.

[0015] A plurality of elastic membranes 20 are provided on the opposing surfaces S1 of the pair of flat plates 10. The elastic membranes 20 are arranged side by side at approximately equal intervals along the longitudinal direction D1 of the pair of flat plates 10. More specifically, the elastic membranes 20 are arranged at positions corresponding to the formation positions of the through holes 14. In the present disclosure, "the elastic membranes 20 are arranged at approximately equal intervals" means that the intervals between the elastic membranes 20 arranged along the longitudinal direction D1 are within a range of ±30% of the average interval between the elastic membranes 20, preferably within a range of ±20%, more preferably within a range of ±10%, and even more preferably within a range of ±5%. The elastic membranes 20 provided on one flat plate 15 and the elastic membranes 20 provided on the other flat plate 16 are arranged alternately in the longitudinal direction D1. In the following description, for convenience, the elastic membrane 20 provided on one flat plate 15 will also be referred to as "one elastic membrane 21," and the elastic membrane 20 provided on the other flat plate 16 will also be referred to as "the other elastic membrane 22." One elastic film 21 is arranged side by side without any gaps in the longitudinal direction D1 on the opposing surface S1 of one flat plate 15. The other elastic film 22 is arranged side by side without any gaps in the longitudinal direction D1 on the opposing surface S1 of the other flat plate 16.

[0016] The elastic membranes 20 expand and contract in the opposing direction D2 due to the pressure of the fluid. Therefore, one elastic membrane 21 expands and contracts toward the other flat plate 16, and the other elastic membrane 22 expands and contracts toward the one flat plate 15. In other words, one elastic membrane 21 expands and contracts toward the opposing surface S1 of the other flat plate 16, and the other elastic membrane 22 expands and contracts toward the opposing surface S1 of the one flat plate 15. The main material forming the elastic membrane 20 is not particularly limited, but examples thereof include natural rubber and synthetic rubber. Examples of synthetic rubber are not particularly limited, but examples thereof include isoprene rubber and chloroprene rubber. The elastic membrane 20 may be formed using any material, such as a rubber material, metal, or resin. In this embodiment, the multiple elastic membranes 20 are each formed from an independent member. Note that the multiple elastic membranes 20 provided on one flat plate 15 may be integrally formed with at least a portion of one of the adjacent elastic membranes 21. Furthermore, the multiple elastic membranes 20 provided on the other flat plate 16 may be formed integrally with the adjacent other elastic membranes 22 at least in part. In the example shown in Fig. 1, eight elastic membranes 20 (one elastic membranes 21) provided on one flat plate 15 and eight elastic membranes 20 (other elastic membranes 22) provided on the other flat plate 16 are shown, including those in a contracted state.

[0017] In a contracted state, the elastic membrane 20 is planar along the opposing surface S1. In a stretched state, the cross section S2 of the elastic membrane 20 taken along the longitudinal direction D1 and the opposing direction D2 has a wave-like shape obtained by extracting the phase portions from adjacent nodes of a standing wave generated during resonance in a beam whose both ends are simply supported. Therefore, in the cross section S2, one elastic membrane 21 expands and contracts in a waveform obtained by extracting the negative phase portion of a standing wave generated during resonance in a beam whose both ends are simply supported, while the other elastic membrane 22 expands and contracts in a waveform obtained by extracting the positive phase portion of a standing wave generated during resonance in a beam whose both ends are simply supported. In the most stretched state, i.e., in the most expanded state, the elastic membrane 20 has a wave-like cross-sectional shape with a maximum amplitude in the cross section S2. In a contracted state, the elastic membrane 20 has a wave-like cross-sectional shape with an amplitude of zero in the cross section S2. The one elastic membrane 21 and the other elastic membrane 22 come into contact with each other at the contact point P. The contact portion P is formed along a direction perpendicular to the longitudinal direction D1 and the opposing direction D2. That is, the contact portion P is formed along the depth direction of the paper in FIG. 1. When the pump 100 is in an operating state, the contact portion P moves in a traveling wave pattern from one end to the other end in the longitudinal direction D1, as will be described later. Note that the contact portion P between one elastic membrane 21 and the other elastic membrane 22 does not need to be maintained at all times, and may be separated at least in part as long as they are close enough to transport the substance to be transported.

[0018] The adjacent elastic membranes 21 and 22 are arranged at positions with a phase difference of approximately 90° in the longitudinal direction D1, and are expanded and contracted at timings with a phase difference of approximately 90° by the driving unit 30. The expansion and contraction of the elastic membrane 20 will be described in detail later.

[0019] The drive unit 30 expands and contracts the elastic membrane 20. More specifically, the drive unit 30 expands and contracts the elastic membrane 20 by introducing and discharging a fluid between the elastic membrane 20 and the opposing surface S1 on which the elastic membrane 20 is provided. The fluid is introduced and discharged through the through-holes 14. Examples of the fluid include, but are not limited to, gas and liquid. Examples of the gas include, but are not limited to, compressed air. Examples of the liquid include, but are not limited to, hydraulic oil. The elastic membrane 20 expands when a fluid is supplied through the through-holes 14 and pressure is applied to the elastic membrane 20, and contracts when a fluid is discharged through the through-holes 14 and pressure is reduced.

[0020] In this embodiment, one drive unit 30 is provided for each pair of elastic membranes 20 adjacent to each other in the longitudinal direction D1 on one flat plate 15. Similarly, one drive unit 30 is provided for each pair of elastic membranes 20 adjacent to each other in the longitudinal direction D1 on the other flat plate 16. In other words, one drive unit 30 is provided for each pair of elastic membranes 21 adjacent to each other in the longitudinal direction D1, and one drive unit 30 is provided for each pair of elastic membranes 22 adjacent to each other in the longitudinal direction D1. Each drive unit 30 supplies fluid discharged from one of the pair of elastic membranes 20 adjacent to each other in the longitudinal direction D1 to the other of the pair of elastic membranes 20. This configuration allows fluid to be efficiently pumped in and out, thereby preventing the pump 100 from becoming complicated in structure.

[0021] The operation of the drive unit 30 is controlled by a control device (not shown). The specific configuration of the drive unit 30 is not particularly limited, and examples include a rotary actuator, a linear actuator, etc. In this embodiment, the drive unit 30 is configured to include a rotary actuator. More specifically, the drive unit 30 converts rotational motion into reciprocating motion using an eccentric cam (not shown), and moves the fluid in the cylinder 32 by the reciprocating motion of the cylinder piston 31. The drive unit 30 supplies fluid to and discharges fluid from between the elastic membrane 20 and the opposing surface S1 via a through-hole 14 connected to a port 33.

[0022] 2 and 3 are explanatory diagrams showing the state of expansion and contraction of the elastic membrane 20. In Fig. 2 and Fig. 3, the state of the cross section S2 similar to Fig. 1 is shown in chronological order from (A) to (L) with a phase difference of about 30°. Note that Fig. 2 and Fig. 3 omit illustration of the driving unit 30.

[0023] As described above, one elastic membrane 21 and the other elastic membrane 22 adjacent to each other are arranged at positions with a phase difference of approximately 90° in the longitudinal direction D1 and are expanded and contracted by the drive unit 30 at a timing with a phase difference of approximately 90°. Therefore, one elastic membrane 21 adjacent to each other in the longitudinal direction D1 is arranged at a position with a phase difference of approximately 180° and is expanded and contracted by the drive unit 30 at a timing with a phase difference of approximately 180°. Similarly, the other elastic membrane 22 adjacent to each other in the longitudinal direction D1 is arranged at a position with a phase difference of approximately 180° and is expanded and contracted by the drive unit 30 at a timing with a phase difference of approximately 180°. Therefore, one elastic membrane 21 expands and contracts at the same timing every other elastic membrane 21, and the other elastic membrane 22 expands and contracts at the same timing every other elastic membrane 22. Note that in the present disclosure, "a position with a phase difference of approximately 90°" means a position that is shifted by approximately ¼ of a period when the cross-sectional shape of the multiple elastic membranes 20 in a stretched state is considered to be a sine wave on the cross section S2. Furthermore, "timing at a phase difference of approximately 90°" means timing that is shifted by approximately ¼ wavelength when the cross-sectional shape of the multiple elastic membranes 20 in a stretched state at cross section S2 is considered to be a sine wave. Furthermore, in the present disclosure, "phase difference of approximately 90°" means a phase difference of 60° to 120°, preferably 70° to 110°, more preferably 80° to 100°, even more preferably 85° to 95°, and particularly preferably 90°. The multiple elastic membranes 20 repeatedly expand and contract in sequence from one end to the other end in the longitudinal direction D1.

[0024] The material to be transported is supplied from the suction port 12 into the space 11 sandwiched between the pair of flat plates 10. Figures 2 and 3 show a contact point P between one elastic film 21 and the other elastic film 22. The contact point P progresses over time in a traveling wave-like manner from one end to the other in the longitudinal direction D1. As a result, the material to be transported supplied to the space 11 is transported from one end to the other in the longitudinal direction D1. For convenience, in Figures 2 and 3, the space from a certain contact point P to the adjacent contact point P is hatched with diagonal lines to show how the material to be transported is transported from one end to the other in the longitudinal direction D1. The material to be transported reaches the discharge port 13 and is discharged from the space 11 sandwiched between the pair of flat plates 10 through the discharge port 13.

[0025] FIG. 4 is an explanatory diagram showing an example of how the pump 100 is used. As shown in FIG. 4 , the pump 100 may be used with a tube 50 sandwiched between an elastic membrane 20 provided on one flat plate 15 and an elastic membrane 20 provided on the other flat plate 16, through which a substance to be transported can flow through an inner bore 51. In this manner of use, the contact point P can be advanced in a traveling wave manner via the tube 50, allowing the substance to flow through the inner bore 51 of the tube 50 and be transported. In a sandwiched configuration in which the tube 50 is used, the dimension between the pair of flat plates 10 may be designed to be larger than the amplitude of the elastic membrane 20. In other words, taking into account the thickness of the sandwiched tube 50, the amplitude of the sine half wave formed by the elastic membrane 20 may be designed to be smaller than the dimension between the pair of flat plates 10. The tube 50 is sandwiched and fixed between the elastic membranes 20, which are relatively soft, and therefore can be easily replaced. As a result, a decrease in convenience for users of the pump 100 is suppressed. Furthermore, because the substance is transported by circulating it through the inner hole 51 of the tube 50, it is possible to omit cleaning the inside of the pump 100 for each substance to be transported. This type of usage is suitable for a medical pump for transporting blood, etc. In this type of usage, the pair of flat plates 10 do not need to be connected to each other, and the space 11 sandwiched between the pair of flat plates 10 does not need to be isolated from the outside of the pump 100.

[0026] According to the pump 100 of the present embodiment described above, one elastic membrane 21 provided on one adjacent flat plate 15 and the other elastic membrane 22 provided on the other adjacent flat plate 16 are positioned at positions with a phase difference of approximately 90° in the longitudinal direction D1 and expand and contract at timings with a phase difference of approximately 90°. With this configuration, the contact point P between the adjacent elastic membranes 20 in the longitudinal direction D1 progresses in a traveling wave pattern, thereby transporting the target substance. With this configuration, the contact point P is formed by the adjacent elastic membranes 20, which prevents the contact point P from being unable to be maintained. As a result, a lack of suction negative pressure and a lack of discharge positive pressure can be prevented. As a result, the pump 100 can be stably driven. Furthermore, since the pump 100 of the present embodiment does not utilize resonance, it is easy to control. Furthermore, phase shifts can be prevented, allowing the pump 100 to be stably driven. Furthermore, since the expansion and contraction of the elastic membranes 20 are utilized to transport the substance, the driving noise of the pump 100 can be reduced.

[0027] Unlike the present application, in a peristaltic pump (tube pump) that conveys a tube while compressing it with rollers attached to a rotating part, the conveying path is not linear but bent. Furthermore, in a peristaltic pump, the tube is excessively compressed by the rollers, which results in a problem that the tube is prone to wear. Furthermore, the peristaltic pump has a complicated configuration, which makes tube replacement a cumbersome process.

[0028] In contrast, according to the pump 100 of this embodiment, a transport path is formed along the longitudinal direction D1 of the pair of flat plates 10, so that the substance can be transported in a substantially linear manner. Furthermore, in a usage mode in which the tube 50 is sandwiched between the elastic membranes 20, excessive crushing of the tube 50 can be prevented, thereby suppressing wear of the tube 50. Furthermore, since excessive crushing of the tube 50 can be prevented, excessive pressure can be prevented from being applied to the substance to be transported. As a result, for example, when the substance to be transported is blood or the like, destruction of cells due to pressure can be prevented. Furthermore, because the configuration is simple, the task of replacing the tube 50 can be prevented from becoming complicated.

[0029] B. Variations The configuration of the pump 100 in the above embodiment is merely an example and can be modified in various ways. For example, an elastic member connected to the elastic membrane 20 and made of the same material as the elastic membrane 20 may be provided on the surface of the opposing surface S1 of the pair of flat plates 10. That is, the elastic member and the elastic membrane 20 may form a balloon-like closed space. Even in such a configuration, fluid flows between the opposing surface S1 having the elastic member provided on its surface and the elastic membrane 20, causing the elastic membrane 20 to expand and contract, thereby causing the contact area P to move in a traveling wave pattern, thereby transporting the target substance. Furthermore, the number of elastic membranes 20 is not particularly limited as long as the substance can be transported from the suction port 12 to the discharge port 13. However, it is preferable that the total number of elastic membranes 20 provided on one flat plate 15 and the other flat plate 16 be five or more. More specifically, for example, the number of elastic membranes 21 on one side may be two and the number of elastic membranes 22 on the other side may be three, or the number of elastic membranes 21 on one side may be three and the number of elastic membranes 22 on the other side may be two. Also, for example, one drive section 30 may be provided for each elastic membrane 20.

[0030] The present disclosure is not limited to the above-described embodiments and can be realized in various configurations without departing from the spirit thereof. For example, the technical features in each embodiment corresponding to the technical features in each aspect described in the Summary of the Invention section can be appropriately replaced or combined to solve some or all of the above-described problems or achieve some or all of the above-described effects. Furthermore, if a technical feature is not described as essential in this specification, it can be appropriately deleted. [Industrial Applicability]

[0031] The pump 100 of the present disclosure can stably transport various substances such as liquids and gases. Therefore, the pump 100 of the present disclosure can be applied to, for example, positive displacement pumps, positive displacement blowers, compressors, etc. More specifically, the pump 100 can be applied to, for example, medical pumps for transporting liquids such as blood, cooling devices for cooling computers, etc. [Explanation of symbols]

[0032] 10...pair of flat plates, 11...space, 12...suction port, 13...discharge port, 14...through hole, 15...one flat plate, 16...other flat plate, 20...elastic membrane, 21...one elastic membrane, 22...other elastic membrane, 30...drive part, 31...cylinder piston, 32...cylinder, 33...port, 50...tube, 51...inner hole, 100...pump, D1...longitudinal direction, D2...opposing direction, P...contact part, S1...opposing surface, S2...cross section

Claims

1. A pump, A pair of flat plates arranged opposite each other; a plurality of elastic membranes arranged side by side along the longitudinal direction of the pair of flat plates on each of the opposing surfaces of the pair of flat plates, and stretching in the opposing direction of the pair of flat plates; a driving unit that expands and contracts the elastic membrane by feeding and discharging a fluid between the elastic membrane and the opposing surface on which the elastic membrane is provided; Equipped with The elastic membrane is In a contracted state, the flat surface is along the opposing surface, In a stretched state, the cross-sectional shape along the longitudinal direction and the opposing direction is a wave shape obtained by extracting phase portions from adjacent nodes of a standing wave generated at resonance in a beam whose both ends are simply supported, In the longitudinal direction, the plurality of elastic membranes provided on one of the pair of flat plates and the plurality of elastic membranes provided on the other of the pair of flat plates are alternately provided, The elastic membrane provided on one of the adjacent flat plates and the elastic membrane provided on the other flat plate are arranged at positions with a phase difference of approximately 90° in the longitudinal direction, and are expanded and contracted by the drive unit at a timing with a phase difference of approximately 90°. pump.

2. 2. The pump of claim 1, The drive unit is In at least one of the pair of flat plates, the fluid discharged from one of the pair of elastic membranes adjacent to each other in the longitudinal direction is supplied to the other of the pair of elastic membranes. pump.

3. 3. The pump according to claim 1 or 2, a tube that allows a substance to be transported to flow through an inner hole is sandwiched between the elastic membrane provided on one of the flat plates and the elastic membrane provided on the other flat plate; pump.

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