Conveying system

Abstract

To provide a conveying system capable of preventing damage of an article and displacement of the article caused by vibration during traveling of an automatic conveying device.SOLUTION: In a conveyance system 2, a travel panel 8 in which a travel path on which an automatic conveyance device 10 travels is formed is arranged on a top plate 6 of a processing device 4 including a plurality of processing devices, and the automatic conveyance device 10 conveys an article by communication with a server 12. The automatic conveying device 10 is provided with a control means and a vibration meter including an acceleration sensor or a gyro sensor, and notifies the server 12 of vibration information corresponding to position information during traveling.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a conveying system in which a traveling panel having a traveling path along which an automatic conveying device travels is arranged on the top plate of a processing device including multiple processing devices, and the automatic conveying device conveys items by communicating with a server. [Background technology]

[0002] A wafer has multiple devices such as ICs and LSIs formed on its surface, separated by planned dividing lines. The back side is ground using a grinding machine to form the wafer to the desired thickness, and then the wafer is divided into individual device chips using a cutting machine and laser processing machine. Each of the divided device chips is used in electrical equipment such as mobile phones and personal computers.

[0003] The present applicant has also developed a transport system in which a travel path is arranged using the top plate of a processing device including processing devices such as grinding devices, cutting devices, and laser processing devices, and a wafer storage device that stores multiple wafers, and an automatic transport device travels between the processing devices to transport wafers from the wafer storage device to each processing device or to transport consumables (see, for example, Patent Document 1).

[0004] The travel path is formed with a guide line for guiding the travel of the automatic transport device, and the automatic transport device is equipped with drive wheels on the left and right sides of the guide line, as well as directional casters on the front and rear, and a reading sensor for reading the guide line. At the center of the bottom of the automatic transport device, a lifting means is provided for raising and lowering cassettes containing articles such as wafers to the article transfer tables of each processing device. The travel path is also formed with a delivery port for raising and lowering the cassette to deliver the articles to the processing device. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Publication No. 2020-013892 Summary of the Invention [Problem to be solved by the invention]

[0006] However, there is a problem that the vibrations, including the shaking, of the automatic conveying device while it is running can damage the articles being conveyed. Also, the vibrations of the automatic conveying device while it is running can cause the articles to shift from their predetermined positions, which can cause problems in the transfer of the articles between the automatic conveying device and the processing equipment.

[0007] An object of the present invention is to provide a conveying system that can prevent damage to articles and displacement of articles caused by vibrations during travel of an automatic conveying device. [Means for solving the problem]

[0008] According to the present invention, there is provided the following transport system that solves the above-mentioned problems: "In a transport system in which a travel panel on which a travel path for an automatic transport device is formed is arranged on the top plate of a processing device including a plurality of processing devices, and the automatic transport device transports items by communicating with a server, The automatic transport device is provided with a control means and a vibration meter including an acceleration sensor or a gyro sensor, and a transport system is provided which notifies the server of vibration information corresponding to position information during travel.

[0009] Preferably, the server includes an information collection unit that collects vibration information corresponding to position information from a plurality of automatic guided vehicles, and a diagnosis unit that diagnoses the state of the travel path and the state of the automatic guided vehicles from the information collected in the information collection unit. It is desirable that the server creates a map of the travel path, and overlays the vibration information collected in the information collection unit on the map to create a heat map and display it on a screen of the server.

[0010] When the diagnostic unit of the server receives vibration information at the same position on the road more than a preset number of times, it is preferable that the diagnostic unit of the server display a warning of danger of driving on a screen of the server or a message urging repair of the road.When the information accumulated in the information accumulation unit is information from a limited number of automatic transport devices, the diagnostic unit of the server may diagnose that there is a problem with the limited automatic transport devices and display this on a screen of the server.

[0011] When there are multiple routes for the automated guided vehicle to reach its destination, the diagnostic unit of the server can set a safe route from the shortest route while avoiding positions with a lot of vibration information based on the information accumulated in the information accumulation unit.When there are positions with a lot of vibration information based on the information accumulated in the information accumulation unit on the route for the automated guided vehicle to reach its destination, the diagnostic unit of the server conveniently instructs the automated guided vehicle to slow down when passing through positions with a lot of vibration information, thereby suppressing vibration.

[0012] The server preferably manages, as quality information, information on the items being transported by the automatic transport device, as well as the location at which the vibration information from the vibrometer was received, the magnitude of vibration, the time, and the transport process. When the server receives vibration information from the automatic transport device, it may stop the automatic transport device.

[0013] A travel guide line is formed on the travel panel to guide the travel of the automatic conveying device, and the automatic conveying device preferably includes a right tire drive unit and a left tire drive unit arranged on either side of the travel guide line, a reading sensor that reads the travel guide line, an opening formed in the central area surrounded by the right tire drive unit and the left tire drive unit, and a belt winding means that winds a belt attached to a cassette that stores articles through the opening and raises and lowers the cassette. [Effects of the Invention]

[0014] The transport system of the present invention comprises: A conveyance system in which a travel panel having a travel path along which an automatic conveyance device travels is disposed on a top plate of a processing device including a plurality of processing devices, and the automatic conveyance device conveys articles by communicating with a server, The automatic conveying device is equipped with a control means and a vibrometer including an acceleration sensor or a gyro sensor, and notifies the server of vibration information corresponding to position information while the automatic conveying device is traveling, thereby preventing damage to or displacement of articles caused by vibration while the automatic conveying device is traveling. This solves the problems of damage to articles being transported due to vibration while the automatic conveying device is traveling, and of articles being transported being displaced from their predetermined positions due to vibration while the automatic conveying device is traveling, which causes problems in the transfer of articles between the automatic conveying device and processing equipment. [Brief explanation of the drawings]

[0015] [Figure 1] 1 is a schematic diagram of a transport system according to the present invention. [Figure 2] FIG. 2 is a perspective view of the automatic transport device shown in FIG. [Figure 3] FIG. 3 is a perspective view of the main body shown in FIG. 2 (with the belt unwound). [Figure 4] FIG. 2 is a block diagram of the transport system shown in FIG. 1. [Figure 5] 2 is a table showing vibration information notified to a server from the automatic transport device shown in FIG. 1; [Figure 6] Schematic diagram of the map created by the server shown in Figure 1. DETAILED DESCRIPTION OF THE INVENTION

[0016] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a transport system according to the present invention will now be described with reference to the drawings.

[0017] (Transport System 2) 1, in the conveyance system 2, a traveling panel 8 is disposed on a top plate 6 of a processing device 4 including a plurality of processing devices. A traveling path along which an automatic conveyance device 10 travels is formed on the traveling panel 8. In addition, in the conveyance system 2, the automatic conveyance device 10 communicates with a server 12, whereby the automatic conveyance device 10 conveys articles to each processing device 4.

[0018] (Processing device 4 of transport system 2) The processing equipment 4 includes a storage device 4a for storing items and first, second, and third processing devices 4b, 4c, and 4d to which the items in the storage device 4a are transported by an automatic transport device 10. Examples of items stored in the storage device 4a include workpieces such as semiconductor wafers that are processed in the first to third processing devices 4b to 4d, and processing tools used when processing in any of the first to third processing devices 4b to 4d. Examples of processing tools used when processing in any of the first to third processing devices 4b to 4d include cutting blades used when cutting the workpieces, and grinding wheels with grinding stones used when grinding the workpieces to thin them. In this embodiment, one storage device 4a and three processing devices 4b to 4d are provided as the processing equipment 4, but the number and combination of processing equipment 4 can be set as desired.

[0019] (Travel panel 8 of transport system 2) 1, traveling panel 8 is disposed on top plate 6 of processing equipment 4, and multiple processing equipments 4 are connected to each other by traveling panel 8. In this embodiment, the planar shape of traveling panel 8 is formed into an overall rectangular shape, but is not limited to a rectangular shape and can be formed into any planar shape depending on the number and arrangement of processing equipments 4. Fall prevention walls 14 are attached around the periphery of traveling panel 8 to prevent automatic conveying equipment 10 from falling off traveling panel 8.

[0020] An article delivery opening 8a is formed in the traveling panel 8 above the processing device 4. Although not shown, a delivery opening corresponding in position and size to the delivery opening 8a of the traveling panel 8 is also formed in the top plate 6 of the processing device 4. Articles are delivered between the automatic conveying device 10 and the processing device 4 through the delivery opening 8a of the traveling panel 8 and the delivery opening of the top plate 6 of the processing device 4.

[0021] Furthermore, travel guide lines 16 that guide the travel of the automatic conveying device 10 are formed on the upper surface of the traveling panel 8. Therefore, the automatic conveying device 10 travels on the traveling panel 8 along the travel guide lines 16, and is able to transport the articles received from the storage device 4a to the first to third processing devices 4b to 4d. The shape of the travel guide lines 16 is formed in a lattice pattern in this embodiment, but is not limited to a lattice pattern and can be formed in any shape depending on the arrangement of the processing devices 4, the planar shape of the traveling panel 8, etc.

[0022] (Automatic conveying device 10 of conveying system 2) In this embodiment, as shown in Fig. 1, five automatic transfer devices 10 (first to fifth automatic transfer devices 10a to 10e) are provided, but the number of automatic transfer devices 10 can be set arbitrarily. Referring to Figs. 2 and 3, the automatic transfer device 10 includes a main body 18 and a cover 20 (see Fig. 2) that covers the main body 18. As shown in Fig. 3, the main body 18 is equipped with a control means 22 and a vibration meter 24.

[0023] (Control means 22 of automatic conveying device 10) The control means 22 controls the operation of the automatic guided vehicle 10 and notifies the server 12 of vibration information corresponding to the position information of the automatic guided vehicle 10 while it is traveling. As shown in FIG. 3 , the control means 22 in this embodiment is mounted on the rear side of the frame 28 of the main body 18. The control means 22 includes a computer (not shown) having a processor and memory, and a slave antenna 22a for communicating with the server 12. The control means 22 is also electrically connected to a vibration meter 24, and vibration information of the automatic guided vehicle 10 while it is traveling is sent from the vibration meter 24 to the control means 22 in real time. The control means 22 then associates the vibration information sent from the vibration meter 24 with the position information at the time the vibration information was sent from the vibration meter 24, and notifies the server 12 of the vibration information corresponding to the position information of the automatic guided vehicle 10 while it is traveling via the master antenna 26 shown in FIG. 1 . The forward / backward and left / right directions of the automatic guided vehicle 10 are indicated by arrows in FIGS. 2 and 3 .

[0024] (Vibration meter 24 of automatic conveying device 10) The vibrometer 24 measures vibrations while the automatic transport device 10 is traveling and sends the measured vibration information to the control means 22 in real time. The vibrometer 24 may be configured to include a known acceleration sensor or gyro sensor. In this embodiment, as shown in FIG. 3, the vibrometer 24 is mounted on the rear side of the frame 28 of the main body 18, spaced apart from the control means 22 in the left-right direction.

[0025] Continuing the explanation with reference to Figure 3, the main body 18 of the automatic conveying device 10 includes a right tire drive unit 30 and a left tire drive unit 32 arranged on either side of the travel guide line 16, a reading sensor 34 that reads the travel guide line 16, an opening 36 formed in the central area surrounded by the right tire drive unit 30 and the left tire drive unit 32, and a belt winding means 42 that winds up a belt 40 attached to a cassette 38 that stores articles through the opening 36 and raises and lowers the cassette 38.

[0026] (Right tire drive unit 30 and left tire drive unit 32 of the automatic conveying device 10) The right tire drive unit 30 has a right tire 44 and a right motor 46 that drives the right tire 44. The left tire drive unit 32 has a left tire 48 and a left motor 50 that drives the left tire 48. A pair of front wheels 52 (only one side is shown) are disposed in front of the right tire drive unit 30 and the left tire drive unit 32, spaced apart in the left-right direction. A pair of rear wheels 54 are disposed behind the right tire drive unit 30 and the left tire drive unit 32, spaced apart in the left-right direction. Both the front wheels 52 and the rear wheels 54 are directional casters that are mounted on the frame 28 so as to be rotatable about an axis extending in the vertical direction. In the automatic transport device 10, the rotational speed and direction of the right tire 44 and the left tire 48 are adjusted by the right motor 46 and the left motor 50, allowing the automatic transport device 10 to move forward, backward, turn right, turn left, or spin turn (turn on the spot around the vertical center axis of the automatic transport device 10).

[0027] (Reading sensor 34 of automatic conveying device 10) Although detailed illustration is omitted, the reading sensor 34 has a structure in which a plurality of light-emitting elements and light-receiving elements are arranged across the travel guide line 16, and the light-receiving elements capture the reflected light of light emitted by the light-emitting elements to read the travel guide line 16. The reading sensors 34 are arranged in front of and behind the frame 28. However, FIG. 3 shows the reading sensor 34 arranged behind the frame 28.

[0028] (Opening 36 of automatic conveying device 10) The opening 36 is rectangular and formed in the central region of the frame 28. A front support wall 56 extending upward is provided at the front end of the opening 36, and a rear support wall 58 extending upward is provided at the rear end of the opening 36.

[0029] (Cassette 38 of automatic conveying device 10) Cassette 38 is formed in a box shape with a vertical dimension (thickness) that is smaller than the dimensions in the front-rear and left-right directions. Cassette 38 has a storage section 38a that stores articles and a flip-up cover section 38b that opens and closes an opening (not shown) of storage section 38a.

[0030] (Belt 40 of automatic conveying device 10) The belt 40 has two right-side belts 40a spaced apart in the front-to-rear direction and extending upward from the upper right surface of the storage section 38a of the cassette 38, and two left-side belts 40b spaced apart in the front-to-rear direction and extending upward from the upper left surface of the storage section 38a of the cassette 38.

[0031] (Belt winding means 42 of automatic conveying device 10) The belt winding means 42 includes a right guide roller 60 that guides the two right belts 40a, a left guide roller 62 that guides the two left belts 40b, a winding roller 64 that winds up the right belt 40a and the left belt 40b, and a winding motor 66 that rotates the winding roller 64. The right guide roller 60, the left guide roller 62, and the winding roller 64 are rotatably supported by the front support wall 56 and the rear support wall 58 of the frame 28. The right guide roller 60 is disposed on the right side of the frame 28, and the left guide roller 62 is disposed on the left side of the frame 28. The winding roller 64 is disposed between the right guide roller 60 and the left guide roller 62, and the winding motor 66 is mounted on the upper surface of the rear part of the frame 28.

[0032] In the belt winding means 42, the winding motor 66 is operated in the winding direction to wind the right belt 40a and the left belt 40b onto the winding roller 64, thereby lifting the cassette 38. In addition, the belt winding means 42 is configured to operate the winding motor 66 in the unwinding direction to unwind the right belt 40a and the left belt 40b from the winding roller 64, thereby lowering the cassette 38.

[0033] 3, a battery 68 is mounted on the front side of the frame 28 of the automatic conveying device 10. The battery 68 supplies power to the control means 22, the vibration meter 24, the right motor 46 of the right tire drive unit 30, the left motor 50 of the left tire drive unit 32, the reading sensor 34, the take-up motor 66 of the belt take-up means 42, etc.

[0034] (Cover 20 of automatic conveying device 10) As shown in Fig. 2, the cover 20 that covers the main body 18 of the automatic conveying device 10 has a top plate 70 and side walls 72. The top plate 70 is formed in a rectangular shape with rounded corners. A pair of circular openings 70a are provided in the top plate 70. The side walls 72 are formed in a rectangular cylindrical shape that extends downward from the outer periphery of the top plate 70.

[0035] (Server 12 of transport system 2) 1, the server 12 includes a housing 74, a screen 76 attached to the exterior of the housing 74, and a computer (not shown) housed within the housing 74 and having a processor and memory. As shown in FIG. 4, the server 12 of this embodiment includes an information accumulation unit 78 and a diagnosis unit 80.

[0036] (Information accumulation unit 78 of server 12) The information accumulating unit 78 accumulates vibration information corresponding to position information from multiple automatic guided vehicles 10. In this embodiment, vibration information corresponding to the position information is sent to the server 12 from five automatic guided vehicles 10 (first to fifth automatic guided vehicles 10a to 10e) via the parent antenna 26 shown in FIG. 1, and the information accumulating unit 78 accumulates the information sent to the server 12 from the automatic guided vehicles 10. For example, as shown in FIG. 5, the information accumulating unit 78 accumulates coordinates (position information) at which vibrations are measured by the vibrometer 24 while the automatic guided vehicle 10 is traveling, and the seismic intensity (vibration information) measured by the vibrometer 24, and counts the number of times vibration information is notified from the automatic guided vehicle 10 regarding the same coordinates.

[0037] The server 12 of this embodiment creates a map of the travel route, and also creates a heat map by overlaying the vibration information accumulated in the information accumulation unit 78 on the map, and displays the heat map on the screen 76 of the server 12. This allows the operator to recognize locations on the travel panel 8 where there is a lot of vibration information, allowing for early inspection and repair of travel panels 8 where there is a lot of vibration information. In the heat map displayed on the screen 76, the color intensity and pattern of the coordinates can be changed depending on the cumulative number of vibration information notifications received from the vibration meter 24, as shown in FIG. 6. Alternatively, different colors may be used depending on the cumulative number of vibration information notifications.

[0038] (Diagnosis unit 80 of server 12) The diagnosing unit 80 diagnoses the condition of the travel path and the condition of the automated guided vehicle 10 based on the information accumulated in the information accumulation unit 78. For example, the diagnosing unit 80 diagnoses a location where vibrations are measured more than a predetermined number of times as dangerous for the automated guided vehicle 10 to travel or as requiring repair. Therefore, when the diagnosing unit 80 receives vibration information at the same location on the travel path more than a predetermined number of times (e.g., 10 times), it is preferable for the diagnosing unit 80 to display a warning of danger to travel or a message urging the operator to repair the travel path on the screen 76 of the server 12. This allows the operator to promptly inspect and repair the travel panel 8 that receives a lot of vibration information. In the example shown in FIG. 5, the cumulative number of notifications at the coordinates (X3, Y5)·(X7, Y4) exceeds 10, so the diagnosing unit 80 can display a warning that the coordinates (X3, Y5)·(X7, Y4) are dangerous or a message urging the operator to repair the travel panel 8 at the coordinates (X3, Y5)·(X7, Y4).

[0039] If the information accumulated in the information accumulation unit 78 is information from only a limited number of automatic conveyance devices 10, the diagnosing unit 80 may diagnose that only the limited number of automatic conveyance devices 10 have a malfunction and display this on the screen 76 of the server 12. This allows the operator to quickly inspect and repair the automatic conveyance devices 10 that are most likely to have a malfunction. In the example shown in FIG. 5, since the vibration information at coordinates (X8, Y3) and (X2, Y8) is only information from the third automatic conveyance device 10c, the diagnosing unit 80 diagnoses that the third automatic conveyance device 10c has a malfunction and displays this information.

[0040] When there are multiple travel routes for the automated guided vehicle 10 to reach its destination, the diagnosing unit 80 may be configured to set a safe route from the shortest route, avoiding locations with a high level of vibration information based on the information accumulated in the information accumulation unit 78. The server 12 normally sets the shortest route as the travel route for the automated guided vehicle 10 to reach its destination. However, if a location with a high level of vibration information is located on the shortest route, the diagnosing unit 80 sets a safe route that does not pass through that location. This reduces vibrations while the automated guided vehicle 10 is traveling. In the example shown in FIG. 5 , the cumulative number of notifications of vibration information at coordinates (X3, Y5) and (X7, Y4) is high. Therefore, if coordinates (X3, Y5) or (X7, Y4) are located on the shortest route, the diagnosing unit 80 sets a safe route that does not pass through coordinates (X3, Y5) and (X7, Y4). The safe route may include coordinates from which vibration information has been notified, as long as the cumulative number of notifications is less than the cumulative number of notifications of vibration information at coordinates (X3, Y5) or (X7, Y4). That is, the diagnosis unit 80 selects coordinates for which the cumulative number of notifications of vibration information is relatively small, and sets a safe route.

[0041] If the information collected by the information collecting unit 78 indicates a location with a high level of vibration information along the route the automated guided vehicle 10 takes to reach its destination, the diagnosing unit 80 can conveniently instruct the automated guided vehicle 10 to slow down when passing through the location with a high level of vibration information, thereby suppressing vibration of the automated guided vehicle 10. Regarding whether a location with a high level of vibration information is present, the diagnosing unit 80 can determine that a location with a high level of vibration information is a coordinate where the cumulative number of notifications of vibration information exceeds a predetermined number (e.g., 10 times) or a coordinate where the number of automated guided vehicles 10 that have sent vibration information exceeds a predetermined number (e.g., 3). In the example shown in FIG. 5 , the cumulative number of notifications of vibration information at the coordinates (X3, Y5)·(X7, Y4) exceeds 10, so the diagnosing unit 80 determines that the coordinates (X3, Y5)·(X7, Y4) are a location with a high level of vibration information. Furthermore, since the number of automated guided vehicles 10 that have sent vibration information at the coordinates (X3, Y5)·(X7, Y4) exceeds three, the coordinates can also be determined to be a location with a high level of vibration information. If the travel path of the automatic conveying device 10 includes at least one of the coordinates (X3, Y5) and (X7, Y4), the diagnosis unit 80 instructs the automatic conveying device 10 to slow down when passing through the coordinates (X3, Y5) and (X7, Y4), thereby suppressing vibration.

[0042] Furthermore, it is desirable that the server 12 manages, as quality information, information on the items being transported by the automatic transport device 10, such as the location where the vibration information from the vibrometer 24 was received, the magnitude of the vibration, the time, and the transport process (for example, the process of transporting an item from the first processing device 4b to the second processing device 4c). That is, it is desirable that the server 12 manages the item information in association with the above-mentioned quality information. This makes it possible to utilize the above-mentioned quality information to identify the cause of the malfunction, for example, if a defect occurs in an item transported by the automatic transport device 10.

[0043] Furthermore, when the server 12 receives vibration information from the automatic transport device 10, it may stop the automatic transport device 10. For example, when the server 12 receives vibration information from the automatic transport device 10 regarding vibrations exceeding a predetermined value, the server 12 may stop the automatic transport device 10 that sent the vibration information. Alternatively, it may also stop automatic transport devices 10 that exist within a predetermined range of the automatic transport device 10 that sent the vibration information, or it may stop all automatic transport devices 10.

[0044] Next, an example of transporting a workpiece such as a semiconductor wafer in the transport system 2 will be described.

[0045] In the conveyance system 2, first, a workpiece is transferred from the storage device 4a to the automatic conveyance device 10. At this time, the automatic conveyance device 10 stops at the transfer opening 8a of the traveling panel 8 installed above the storage device 4a. Next, the winding motor 66 of the belt winding means 42 operates in the feed direction, and the right belt 40a and the left belt 40b are fed from the winding roller 64. As a result, the cassette 38 is lowered from the automatic conveyance device 10 through the transfer opening 8a of the traveling panel 8 and the transfer opening of the top plate 6 of the storage device 4a, and the cassette 38 is fed into the storage device 4a. When the cassette 38 is positioned at a predetermined position in the storage device 4a, the workpiece is stored in the cassette 38 by the conveyance means (e.g., a robot hand) of the storage device 4a. Next, the winding motor 66 of the belt winding means 42 operates in the winding direction, and the right belt 40a and the left belt 40b are wound around the winding roller 64. As a result, the cassette 38 containing the workpieces is raised and the cassette 38 is removed from the storage device 4a. In this manner, the workpieces are transferred from the storage device 4a to the automatic transfer device 10.

[0046] After the workpiece is handed over from the storage device 4a to the automatic transfer device 10, the automatic transfer device 10 transfers the workpiece to the first processing device 4b. At this time, the automatic transfer device 10 receives information about the travel route set by the server 12 through communication with the server 12. Then, the automatic transfer device 10 travels along the travel route set by the server 12 while reading the travel guide lines 16 on the travel panel 8 with the reading sensor 34, and moves from the storage device 4a to the first processing device 4b.

[0047] When the automatic conveying device 10 arrives at a predetermined position above the first processing device 4b (where the transfer opening 8a of the traveling panel 8 is formed), the cassette 38 is lowered by the belt winding means 42 and fed into the first processing device 4b through the transfer opening 8a of the traveling panel 8 and the transfer opening of the top plate 6 of the first processing device 4b. Once the cassette 38 is positioned at a predetermined position within the first processing device 4b, the workpiece is removed from the cassette 38 by the transport means (e.g., a robot hand) of the first processing device 4b. Then, after the required processing is performed on the workpiece in the first processing device 4b, the transport means places the processed workpiece in a cassette 38 of the same automatic conveying device 10 or a different automatic conveying device 10. Once the processed workpiece is placed in the cassette 38, the cassette 38 is raised by the belt winding means 42 and removed from the first processing device 4b.

[0048] After the workpiece is subjected to the required processing in the first processing device 4b, the workpiece is transported by the automatic transport device 10 to the second processing device 4c, where the workpiece is subjected to the required processing. The steps for transporting the workpiece to the second processing device 4c are substantially the same as the steps for transporting the workpiece to the first processing device 4b, and therefore a description thereof will be omitted.

[0049] After the required processing is performed on the workpiece in the second processing device 4c, the workpiece is transported by the automatic transport device 10 to the third processing device 4d, where the required processing is performed on the workpiece. After that, the automatic transport device 10 transports the workpiece to the storage device 4a, where the processed workpiece is stored.

[0050] If the vibrometer 24 measures vibrations during the transport of such workpieces (while the automatic transport device 10 is traveling), the vibrometer 24 sends vibration information to the control means 22, and then the control means 22 sends the vibration information to the server 12. As a result, vibration information corresponding to the position information is accumulated in the information accumulation unit 78 of the server 12. Furthermore, the diagnosis unit 80 of the server 12 diagnoses the state of the travel path and the state of the automatic transport device 10 from the information accumulated in the information accumulation unit 78. Therefore, the transport system 2 of this embodiment can prevent damage to or displacement of articles due to vibrations while the automatic transport device 10 is traveling. This solves the problems of damage to articles during transport due to vibrations while the automatic transport device 10 is traveling, and of articles being displaced from their predetermined positions due to vibrations while the automatic transport device 10 is traveling, which causes problems in the transfer of articles between the automatic transport device 10 and the processing device 4. [Explanation of symbols]

[0051] 2:Transport system 4: Processing equipment 6: Top plate 8: Travel panel 10: Automatic transport device 12: Server 22: Control means 24: Vibration meter 76: Screen 78: Information Collection Department 80: Diagnostic Department

Claims

1. A conveyance system in which a travel panel having a travel path along which an automatic conveyance device travels is disposed on a top plate of a processing device including a plurality of processing devices, and the automatic conveyance device conveys articles by communicating with a server, The automatic transport device is a transport system that includes a control means and a vibration meter including an acceleration sensor or a gyro sensor, and notifies the server of vibration information corresponding to position information while traveling.

2. 2. The conveying system according to claim 1, wherein the server comprises an information collection unit that collects vibration information corresponding to position information from a plurality of automatic conveying devices, and a diagnosis unit that diagnoses the state of the traveling path and the state of the automatic conveying devices from the information collected in the information collection unit.

3. 3. The conveyance system according to claim 2, wherein the server creates a map of the travel path, and overlays the vibration information accumulated in the information accumulation unit on the map to create a heat map, which is displayed on a screen of the server.

4. The conveying system according to claim 2, wherein the diagnostic unit of the server, when receiving vibration information at the same position on the traveling path more than a preset number of times, displays a warning of danger of traveling on the screen of the server or displays a message urging repair of the traveling path.

5. A transportation system as described in claim 2, wherein, when the information accumulated in the information accumulation unit is information from a limited number of automatic transportation devices, the diagnostic unit of the server diagnoses that there is a malfunction in the limited automatic transportation devices and displays this on the screen of the server.

6. The conveying system according to claim 2, wherein when there are multiple routes for the automatic conveying device to reach its destination, the diagnosing unit of the server sets the shortest route as the safe route, avoiding locations with a lot of vibration information from the information accumulated in the information accumulation unit.

7. The conveying system according to claim 2, wherein, when there is a position with a lot of vibration information based on the information accumulated in the information accumulation unit on the route along which the automatic conveying device travels until it reaches its destination, the diagnosis unit of the server instructs the automatic conveying device to slow down when passing through the position with a lot of vibration information, thereby suppressing vibration.

8. 2. The transport system according to claim 1, wherein the server manages, as quality information, information on the items being transported by the automatic transport device, including the location where vibration information from the vibrometer was received, the magnitude of vibration, the time, and the transport process.

9. 2. The transport system according to claim 1, wherein the server stops the automatic transport device when it receives vibration information from the automatic transport device.

10. A guide line for guiding the travel of the automatic conveying device is formed on the travel panel, The automatic transport device a right tire driving unit and a left tire driving unit disposed on opposite sides of the travel guide line; a reading sensor that reads the travel guide line; an opening formed in a central region surrounded by the right tire driving portion and the left tire driving portion; 2. The conveying system according to claim 1, further comprising a belt winding means for winding a belt attached to a cassette containing articles through said opening to raise and lower said cassette.

Images