Connection unit

Abstract

To easily exchange different kinds of devices to be tested.SOLUTION: The connection unit 10 includes a connection device 20 to which the device under test can be electrically connected, and an interface device 70 to which the connection device 20 is detachably attached. The connecting apparatus 20 includes a socket 21 to which the device under test can be electrically connected, a socket board 22 to which the socket 21 is attached, a board support 30 that supports the socket board 22, and a first connector 23 provided on the board support 30. The interface apparatus 70 includes an interface board 71 larger than the socket board 22, a second connector 72 provided on the interface board 71 and electrically connectable to the test apparatus, and a latch mechanism 80 used to detachably attach the board support 30 to the interface board 71.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present disclosure relates to a connection unit. [Background technology]

[0002] Patent Document 1 discloses a test device testing apparatus that includes a test handler provided with a test head unit and a tester for testing the electrical characteristics of a test device attached to the test handler. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2010-127740

[0004] [overview] The connection unit is required to be easily replaceable with a different type of device under test.

[0005] A connection unit of one embodiment of the present disclosure is a connection unit that is attached to a test apparatus, and comprises: a connection device to which a device under test can be electrically connected; and an interface device to which the connection device is removably attached, wherein the connection device includes a socket to which the device under test can be electrically connected, a socket board to which the socket is attached, a board support that supports the socket board, and a first connector provided on the board support, and the interface device includes an interface board that is larger than the socket board, a second connector provided on the interface board and electrically connectable to the test apparatus, and a latch mechanism used to removably attach the board support to the interface board, and the first connector is connected to the second connector when the connection device is attached to the interface device. [Brief explanation of the drawings]

[0006] [Figure 1] FIG. 1 is a schematic front view of a test device to which an exemplary connection unit according to a first embodiment is attached. [Figure 2] FIG. 2 is a schematic perspective view of the connection unit. [Figure 3] FIG. 3 is a schematic side view of the connection unit of FIG. [Figure 4] FIG. 4 is a schematic perspective view of a connection device in the connection unit. [Figure 5] FIG. 5 is a schematic perspective view of the connection device as seen from a different direction than that of FIG. [Figure 6] FIG. 6 is a schematic plan view of the socket and socket board in the connection device. [Figure 7] FIG. 7 is a schematic side view of the connection device of FIG. [Figure 8] 8 is an exploded perspective view of the connection device of FIG. 4. FIG. [Figure 9] FIG. 9 is a schematic plan view of the board support of the connection device. [Figure 10] FIG. 10 is a schematic side view of the board support of FIG. [Figure 11] FIG. 11 is a schematic side view of the board support seen from a different direction than FIG. [Figure 12] FIG. 12 is a schematic plan view of a first intermediate plate in the connection device. [Figure 13] FIG. 13 is a schematic plan view of the second plate of the intermediate plate. [Figure 14] FIG. 14 is a schematic plan view of the intermediate plate and the first connecting member. [Figure 15] FIG. 15 is a schematic partial cross-sectional view of a second connecting member in the connecting device. [Figure 16] FIG. 16 is a schematic perspective view of an interface device in a connection unit. [Figure 17] FIG. 17 is a schematic plan view of the interface board and the second connector in the interface device. [Figure 18]FIG. 18 is a schematic perspective view of the second connector and the latch mechanism in the interface device. [Figure 19] FIG. 19 is a schematic side view of a portion of the latch mechanism. [Figure 20] FIG. 20 is a schematic plan view of a portion of the latch mechanism. [Figure 21] FIG. 21 is a schematic front view of a portion of the latch mechanism. [Figure 22] FIG. 22 is a schematic side view of a portion of the latch mechanism showing the rotational movement of the engagement body of the latch mechanism. [Figure 23] FIG. 23 is a schematic side view of a portion of the connection unit with the connection device being attached to the interface device. [Figure 24] FIG. 24 is a schematic side view of a portion of the connection unit with the connection device attached to the interface device. [Figure 25] FIG. 25 is a schematic side view of a portion of the connection unit with the connection device in the process of being detached from the interface device. [Figure 26] FIG. 26 is a schematic side view of the latch mechanism and its surroundings when the connection device is in the process of being removed from the interface device. [Figure 27] FIG. 27 is a schematic plan view of a connection device and a latch mechanism in the connection unit of the second embodiment. [Figure 28] FIG. 28 is a schematic side view of a part of the connection unit of the second embodiment. [Figure 29] FIG. 29 is a schematic side view of a part of the connection unit as viewed from a different direction than that of FIG. [Figure 30] 30 is a schematic exploded perspective view of a connection device in the connection unit of FIG.

[0007] [Detailed explanation] Hereinafter, several embodiments of the connection unit of the present disclosure will be described with reference to the accompanying drawings. Note that for simplicity and clarity of explanation, the components shown in the drawings are not necessarily drawn to scale. Also, for ease of understanding, hatching lines may be omitted in cross-sectional views. The accompanying drawings merely illustrate embodiments of the present disclosure and should not be considered as limiting the present disclosure.

[0008] The following detailed description includes devices, systems, and methods embodying exemplary embodiments of the present disclosure. This detailed description is merely illustrative in nature and is not intended to limit the embodiments of the present disclosure or the application and uses of such embodiments.

[0009] Terms such as "first," "second," and "third" are used in this disclosure merely to label and are not necessarily intended to dictate any ordering of their objects. The phrase "at least one" used in this disclosure means "one or more" of the desired options. As an example, the phrase "at least one" used in this disclosure means "only one option" or "both of two options" when the number of options is two. As another example, the phrase "at least one" used in this disclosure means "only one option" or "any combination of two or more options" when the number of options is three or more.

[0010] As used in this disclosure, "the dimensions (width, length) of A are equal to the dimensions (width, length) of B" or "the dimensions (width, length) of A and the dimensions (width, length) of B are equal to each other" also includes a relationship in which the difference between the dimensions (width, length) of A and the dimensions (width, length) of B is, for example, within 10% of the dimensions (width, length) of A.

[0011] First Embodiment [Test equipment] The configuration of a test apparatus 100 to which the connection unit 10 of the first embodiment is attached will be described with reference to Fig. 1. Fig. 1 shows a schematic front view of the test apparatus 100.

[0012] As shown in Fig. 1, the test apparatus 100 is an apparatus that tests the electrical characteristics of a device under test 200 shown in Fig. 2. The device under test 200 may be a semiconductor chip such as a packaged IC (integrated circuit) or LSI (large scale integration). The test apparatus 100 includes an IC handler 110, a test head 120, and a tester 130.

[0013] The IC handler 110 is a device that transports the device under test 200 to the test head 120. The IC handler 110 includes a supply unit that stores untested devices under test 200, and a device chuck that picks up the device under test 200 from the supply unit. In the IC handler 110, the device under test 200 picked up by the device chuck is transported to the test head 120.

[0014] A connection unit 10 having a socket 21 (see FIG. 2) to which a device under test 200 is electrically connected is attached to the test head 120. The IC handler 110 is configured to press the device under test 200 into the socket 21. The tester 130 is configured to test the electrical characteristics of the device under test 200 pressed into the socket 21.

[0015] In this way, in the test apparatus 100, the tester 130 tests the electrical characteristics of the untested device under test 200 while the device under test 200 is pressed against the socket 21 of the test head 120 by the IC handler 110. After the test, the device under test 200 is sorted by the IC handler 110 according to the test results.

[0016] [Connection unit] The overall configuration of the connection unit 10 will be described with reference to Figures 2 and 3. Figure 2 schematically shows a perspective view of the connection unit 10. Figure 3 schematically shows a side view of the connection unit 10.

[0017] As shown in FIGS. 2 and 3, the connection unit 10 attached to the test head 120 (see FIG. 1) includes a connection device 20 and an interface device 70. The connection apparatus 20 includes a socket 21 and is configured to be electrically connectable to the device under test 200. The device under test 200 is placed on the socket 21. The connection apparatus 20 is provided according to the type of device under test 200. In other words, when testing the electrical characteristics of multiple types of device under test 200, multiple connection apparatuses 20 are prepared according to the types of device under test 200.

[0018] The interface device 70 is configured so that the connection device 20 can be detachably attached. The interface device 70 is attached to the test head 120 shown in FIG. 1 . That is, in the connection unit 10, a connection device 20 corresponding to the type of device under test 200 is attached to the interface device 70. When a different type of device under test 200 is to be tested after a test, the connection device 20 attached to the interface device 70 is removed, and a new connection device 20 corresponding to the type of device under test 200 is attached to the interface device 70.

[0019] [Connection device] The detailed configuration of the connection device 20 will be described with reference to FIGS. FIG. 4 is a schematic diagram showing a perspective view of the connection device 20. FIG. 5 is a schematic diagram showing a perspective view of the connection device 20 viewed from a different direction than the connection device 20 of FIG. 4. FIG. 6 is a schematic diagram showing the planar structure of the socket 21 of the connection device 20 and a socket board 22 (described later). FIG. 7 is a schematic diagram showing the side structure of the connection device 20. FIG. 8 is a schematic diagram showing an exploded perspective view of the connection device 20. FIG. 9 is a schematic diagram showing the planar structure of the board support 30 (described later). FIG. 10 is a schematic diagram showing the side structure of the board support 30. FIG. 11 is a schematic diagram showing the side structure of the board support 30 viewed from a different direction than the board support 30 of FIG. 10. FIG. 12 is a schematic diagram showing the planar structure of a first plate 41 of an intermediate plate 40 (described later). FIG. 13 is a schematic diagram showing the planar structure of a second plate 42 of the intermediate plate 40 (described later). FIG. 14 schematically shows the planar structure of the intermediate plate 40 and the first connecting member 50 described later. FIG. 15 schematically shows the partial cross-sectional structure of the second connecting member 60 described later. Note that hereinafter, the configuration of the connection device 20 will be described using the XYZ axes shown in FIG. 4. The Z-axis direction is the thickness direction of the connection device 20. The X-axis and Y-axis directions are directions perpendicular to the Z-axis direction and are also mutually perpendicular. Furthermore, viewing the connection unit 10 from the Z-axis direction is referred to as a "planar view."

[0020] As shown in FIGS. 4 and 7, the connection device 20 includes a socket 21, a socket board 22, a first connector 23, a board support 30, an intermediate plate 40, a first connection member 50, and a second connection member 60.

[0021] As shown in FIGS. 4 and 6, the sockets 21 are attached to a socket board 22. In one example, a plurality of sockets 21 (four in the first embodiment) are attached to the socket board 22. The socket board 22 is a flat plate with its thickness direction in the Z-axis direction. The socket board 22 has a rectangular shape with its long sides in the X-axis direction and its short sides in the Y-axis direction in a plan view. The socket board 22 is made of, for example, an insulating material. In one example, the socket board 22 is made of a resin material having insulating properties. The shape of the socket board 22 in a plan view can be changed as desired.

[0022] As shown in FIG. 6 , the multiple sockets 21 are arranged in a matrix on the socket board 22 in a plan view. Each socket 21 has a rectangular shape in a plan view. Each socket 21 is fixed to the socket board 22 with four bolts 24. Each socket 21 includes a device holder 21A that holds the device under test 200 and a guide portion 21C provided between the upper surface of the socket 21 and the device holder 21A. In one example, the device holder 21A is configured as a recess that accommodates the device under test 200. The guide portion 21C widens from the device holder 21A toward the upper surface of the socket 21. In one example, the guide portion 21C includes an inclined surface that slopes from the device holder 21A toward the upper surface of the socket 21. In the first embodiment, the inclined surface includes a pair of first inclined surfaces facing each other in the X-axis direction and a pair of second inclined surfaces facing each other in the Y-axis direction. The pair of first inclined surfaces slope in directions that move away from each other as they extend from the device holder 21A toward the upper surface of the socket 21. The pair of second inclined surfaces are inclined in directions that move away from each other from the device holding portion 21A toward the upper surface of the socket 21.

[0023] In the first embodiment, each socket 21 includes a positioning portion 21B that determines the orientation of the socket 21 relative to the socket board 22. The positioning portion 21B is provided at one of the four corners of the socket 21 in a plan view. The positioning portion 21B is configured by chamfering the corner. The socket 21 is configured so that the device under test 200 shown in FIG. 2 can be electrically connected thereto.

[0024] 4 and 5, the first connector 23 is a component that is electrically connected to the interface device 70 when the connection device 20 is attached to the interface device 70 shown in FIG. 2. The first connector 23 is fixed to the board support 30. Therefore, it can be said that the first connector 23 is provided on the board support 30. The first connector 23 has a rectangular parallelepiped shape extending in the X-axis direction. The first connector 23 includes a plurality of insertion holes 23A into which pins 72A (see FIG. 18) of the second connector 72, which will be described later, are inserted.

[0025] In one example, a plurality of first connectors 23 are provided corresponding to the number of sockets 21. In the first embodiment, four first connectors 23 are provided. The plurality (four) first connectors 23 are arranged side by side in the Y-axis direction. The first connectors 23 and the sockets 21 shown in FIG. 6 are connected by cables (not shown). This electrically connects the first connectors 23 and the sockets 21. When the device under test 200 shown in FIG. 2 is placed on the socket 21, the device under test 200 is electrically connected to the first connectors 23 through the sockets 21 and the cables. The first connectors 23 are electrically connected to the interface apparatus 70, and therefore the device under test 200 is electrically connected to the interface apparatus 70.

[0026] The first connectors 23 may be provided according to the type of device under test 200 placed in the sockets 21. The first connectors 23 are used to electrically connect the device under test 200 to the test head 120 shown in Fig. 1, i.e., the tester 130. Therefore, the number of first connectors 23 is not limited to the number of sockets 21 as long as they can supply voltages and the like required to operate the device under test 200 and send and receive various signals.

[0027] 7 and 8, the board support 30 supports the socket board 22. The board support 30 is connected to the socket board 22 by a first connecting member 50, an intermediate plate 40, and a second connecting member 60.

[0028] The board support body 30 is plate-shaped with its thickness direction in the Z-axis direction. The board support body 30 is formed by pressing a metal plate made of, for example, aluminum (Al), iron (Fe), stainless steel, or the like. As shown in FIG. 9 , the board support body 30 includes a support body portion 31. The support body portion 31 is plate-shaped with its thickness direction in the Z-axis direction. The support body portion 31 has an octagonal shape that is long in the X-axis direction in plan view. The shape of the support body portion 31 in plan view can be changed as desired.

[0029] The support main body 31 includes an opening 31A that exposes the multiple first connectors 23. In one example, the opening 31A is rectangular in plan view. As shown in FIG. 7, the multiple first connectors 23 are arranged on the opposite side of the support main body 31 from the socket board 22 in the Z axis direction. A cable (not shown) is connected to the first connector 23 through the opening 31A shown in FIG. 9.

[0030] The support body 31 includes a plurality of first bolt insertion holes 31B, a plurality of second bolt insertion holes 31C, and a plurality of pin insertion holes 31D. The multiple first bolt insertion holes 31B are distributed and arranged on both sides of the opening 31A in the X-axis direction. The multiple second bolt insertion holes 31C are arranged in a portion closer to the end of the support main body 31 in the X-axis direction than the first bolt insertion holes 31B and on both sides of the opening 31A in the Y-axis direction. The multiple pin insertion holes 31D are arranged at both ends of the support main body 31 in the X-axis direction. In one example, the number of pin insertion holes 31D provided at one of the both ends of the support main body 31 in the X-axis direction is different from the number of pin insertion holes 31D provided at the other end. In the first embodiment, two pin insertion holes 31D are provided at one of the both ends of the support main body 31 in the X-axis direction and one pin insertion hole 31D is provided at the other end.

[0031] 10 and 11, the board support 30 includes a first rising portion 32, a first bent portion 33, and a second rising portion 34 and a second bent portion 35. Here, the first rising portion 32 is an example of a "rising portion," and the first bent portion 33 is an example of a "bent portion."

[0032] Both the first rising portion 32 and the first bent portion 33 are provided at both ends in the X-axis direction of the board support 30 (support main body portion 31). The first rising portion 32 and the first bent portion 33 are formed by bending the X-axis direction of the support main body portion 31 using press working. Both the first rising portion 32 and the first bent portion 33 are positioned outward in the X-axis direction from the socket board 22 in a plan view.

[0033] The length of the first rising portion 32 in the Y-axis direction and the length of the first bent portion 33 in the Y-axis direction are equal to each other. When viewed from the Y-axis direction, the first bent portion 33 has a curved shape that convexly extends outward from the support main body portion 31. The first rising portion 32 extends upward. More specifically, the first rising portion 32 extends upward from the first bent portion 33 along the Z-axis direction. Therefore, it can be said that the first bent portion 33 is provided between the support main body portion 31 and the first rising portion 32.

[0034] Both the second rising portion 34 and the second bent portion 35 are provided at both ends in the Y-axis direction of the support main body 31. The second rising portion 34 and the second bent portion 35 are formed by bending both ends in the Y-axis direction of the support main body 31 using press working. Both the second rising portion 34 and the second bent portion 35 are arranged at positions that overlap with the socket board 22 in a plan view.

[0035] The length in the X-axis direction of the second rising portion 34 and the length in the X-axis direction of the second bent portion 35 are equal to each other. When viewed from the X-axis direction, the second bent portion 35 has a curved shape that convexly extends outward from the support main body 31. In one example, the length in the X-axis direction of the second rising portion 34 and the length in the X-axis direction of the second bent portion 35 are longer than the length in the Y-axis direction of the first rising portion 32 and the length in the Y-axis direction of the first bent portion 33. In one example, the length in the Z-axis direction from the upper surface of the support main body 31 to the upper surface of the second rising portion 34 is equal to the length in the Z-axis direction from the upper surface of the support main body 31 to the upper surface of the first rising portion 32.

[0036] As shown in Figures 4, 5, 7, and 8, the board support body 30 includes a handle 36 configured to grip the connection unit 10. The handle 36 is attached to the support body 31. A plurality of handles 36 (two in the first embodiment) are provided spaced apart in the Y-axis direction. The handles 36 are formed by pressing a metal plate made of Al, Fe, stainless steel, or the like.

[0037] The handle 36 includes a fixed member 36A and a gripping member 36B. The fixed member 36A and the gripping member 36B are provided separately. Two fixed members 36A are provided. Two gripping members 36B are provided. The handle 36 is formed by connecting the two fixed members 36A and the two gripping members 36B to each other.

[0038] Each fixing member 36A is formed into a generally concave shape by, for example, pressing a strip-shaped metal plate. Each fixing member 36A includes a portion that contacts the support main body 31. The two fixing members 36A are disposed on both sides of the opening 31A of the support main body 31 in the X-axis direction. Each fixing member 36A is disposed adjacent to the opening 31A in the X-axis direction.

[0039] The gripping members 36B connect the Y-axis direction ends of the fixing members 36A that are arranged apart in the X-axis direction. One gripping member 36B connects one Y-axis direction end of each fixing member 36A. Another gripping member 36B connects the other Y-axis direction end of each fixing member 36A. Each gripping member 36B is made of a strip-shaped metal plate. Each gripping member 36B extends in the X-axis direction. Each gripping member 36B is fixed to the fixing member 36A by a bolt 36C.

[0040] The handle 36 and each first connector 23 are attached to the support main body 31. More specifically, each fixing member 36A of the handle 36 is fixed to a spacer 38 by a bolt 37 passing through a first bolt insertion hole 31B. The spacer 38 is in contact with the underside of the support main body 31. Each first connector 23 is fixed to the spacer 38 by a bolt 25. More specifically, both ends of the first connector 23 in the X-axis direction are attached to the periphery of the opening 31A of the support main body 31 by the bolt 25 and the spacer 38.

[0041] The intermediate plate 40 is disposed between the socket board 22 and the board support 30 in the Z-axis direction and spaced apart from both the socket board 22 and the board support 30. The first connecting member 50 and the second connecting member 60 maintain the intermediate plate 40 spaced apart from both the socket board 22 and the board support 30.

[0042] The intermediate plate 40 includes a first plate 41 and a second plate 42. The first plate 41 and the second plate 42 are stacked in the Z-axis direction. Both the first plate 41 and the second plate 42 are formed by pressing metal plates such as Al, Fe, and stainless steel.

[0043] 8 and 12, the first plate 41 is a flat plate whose thickness direction is in the Z-axis direction. As shown in Fig. 12, the first plate 41 includes a plurality of openings 41A, a plurality of (two in the first embodiment) first recesses 41B, a plurality of (four in the first embodiment) second recesses 41C, a plurality of (25 in the first embodiment) bolt insertion holes 41D, and a plurality of (four in the first embodiment) bolt fixing holes 41E.

[0044] The plurality of openings 41A are provided in the center of the first plate 41 in the X-axis direction. The plurality of openings 41A are provided at the same positions as one another in the X-axis direction and spaced apart from one another in the Y-axis direction.

[0045] The multiple first recesses 41B are provided at both end portions in the X-axis direction of the first plate 41. The multiple first recesses 41B are provided at the center in the Y-axis direction of the first plate 41. Each first recess 41B is recessed in the X-axis direction from both end surfaces of the first plate 41 in the X-axis direction toward the inside of the first plate 41. Each first recess 41B has a curved concave shape in a plan view.

[0046] The multiple second recesses 41C are provided between the multiple first recesses 41B and the multiple openings 41A in the X-axis direction. Two second recesses 41C are provided at one end of the first plate 41 in the Y-axis direction. These two second recesses 41C are provided dispersedly on both sides of one opening 41A in the X-axis direction. Another two second recesses 41C are provided at the other end of the first plate 41 in the Y-axis direction. These other two second recesses 41C are provided dispersedly on both sides of another opening 41A in the X-axis direction. Each second recess 41C is recessed inward in the Y-axis direction from both end surfaces of the first plate 41 in the Y-axis direction. Each second recess 41C includes a curved bottom surface.

[0047] A plurality of bolt insertion holes 41D are provided around each opening 41A, around each first recess 41B, and around each second recess 41C. The plurality of bolt fixing holes 41E are provided between each opening 41A and the side surface of the first plate 41 in the Y-axis direction, between two second recessed portions 41C facing each other in the Y-axis direction, and between another two second recessed portions 41C facing each other in the Y-axis direction. The plurality of bolt fixing holes 41E are holes for fixing the first plate 41 and the second plate 42 together.

[0048] 8 and 13, the second plate 42 is a flat plate whose thickness direction is in the Z-axis direction. In one example, the thickness of the second plate 42 is thinner than the thickness of the first plate 41. The second plate 42 is provided on the first plate 41. The second plate 42 is attached to the first plate 41. The second plate 42 is in contact with the upper surface of the first plate 41. Note that the thickness of the second plate 42 may be equal to or greater than the thickness of the first plate 41.

[0049] 13, the second plate 42 includes a plurality of (two in the first embodiment) openings 42A, a plurality of (four in the first embodiment) recesses 42B, and a plurality of (six in the first embodiment) insertion holes 42C. The second plate 42 also includes one central insertion hole 42D and a plurality of (four in the first embodiment) bolt fixing holes 42E.

[0050] The plurality of openings 42A are provided in the center of the second plate 42 in the X-axis direction. The plurality of openings 42A are provided at the same positions as each other in the X-axis direction and spaced apart from each other in the Y-axis direction. The plurality of openings 42A are provided corresponding to the plurality of openings 41A of the first plate 41 (see FIG. 11).

[0051] Two of the multiple recesses 42B are provided at one end of the second plate 42 in the Y-axis direction. These two recesses 42B are provided dispersedly on both sides of one opening 42A in the X-axis direction. Another two recesses 42B are provided at the other end of the second plate 42 in the Y-axis direction. These other two recesses 42B are provided dispersedly on both sides of another opening 42A in the X-axis direction. Each recess 42B is recessed inward in the Y-axis direction from both end surfaces of the second plate 42 in the Y-axis direction. Each recess 42B includes a curved bottom surface. The multiple recesses 42B are provided corresponding to the multiple second recesses 41C (see FIG. 11) of the first plate 41.

[0052] The multiple insertion holes 42C are arranged at the same positions in the Y-axis direction and spaced apart from each other in the X-axis direction. Each insertion hole 42C is an elongated hole extending in the Y-axis direction. Of the multiple insertion holes 42C, the length in the Y-axis direction of end insertion holes 42CA provided at both ends in the X-axis direction is longer than the length in the Y-axis direction of the other insertion holes 42C.

[0053] The central insertion hole 42D is provided between the two openings 42A in the Y-axis direction. The central insertion hole 42D is an elongated hole whose longitudinal direction is in the Y-axis direction. The length of the central insertion hole 42D in the Y-axis direction is shorter than the length of each insertion hole 42C in the Y-axis direction. In one example, the length of the central insertion hole 42D in the Y-axis direction is equal to or shorter than the radius of the openings 42A.

[0054] The plurality of bolt fixing holes 42E are provided between each opening 42A and the side surface of the second plate 42 in the Y-axis direction, between two recessed portions 42B facing each other in the Y-axis direction, and between another two recessed portions 42B facing each other in the Y-axis direction. The plurality of bolt fixing holes 42E are holes for fixing the first plate 41 and the second plate 42. The plurality of bolt fixing holes 42E are provided at positions corresponding to the plurality of bolt fixing holes 41E of the first plate 41 (see FIG. 11).

[0055] 14, when the first plate 41 and the second plate 42 are stacked, the openings 41A of the first plate 41 overlap with the openings 42A of the second plate 42, and the second recesses 41C of the first plate 41 overlap with the recesses 42B of the second plate 42. In this manner, it can be said that the intermediate plate 40 is provided with recesses (second recesses 41C, recesses 42B) and openings (openings 41A, 42A). Furthermore, the bolt fixing holes 41E of the first plate 41 (see FIG. 12) overlap with the bolt fixing holes 42E of the second plate 42 (see FIG. 13). Each of the insertion holes 42C exposes a plurality of bolt insertion holes 41D (see FIG. 12) that are spaced apart in the Y-axis direction. The overlapping openings 41A, 42A, the second recesses 41C and the recesses 42B form an insertion section through which a cable connecting the socket 21 and the first connector 23, for example, is inserted.

[0056] As shown in Fig. 8, the first plate 41 and the second plate 42 are fixed together by bolts 43. The bolts 43 are fixed to a plurality of bolt fixing holes 41E of the first plate 41 (see Fig. 12) and a plurality of bolt fixing holes 42E of the second plate 42 (see Fig. 13).

[0057] As shown in FIG. 14, a plurality of first connection members 50 are inserted into each insertion hole 42C. The first connection members 50 are attached to the first plate 41. The first connection members 50 are members for connecting the intermediate plate 40 and the socket board 22. As shown in FIG. 8, the first connection members 50 are columnar and extend in the Z-axis direction. The first connection members 50 include a plurality (20 in the first embodiment) of first spacers 51, a plurality (four in the first embodiment) of second spacers 52, a plurality (20 in the first embodiment) of first bolts 53, and a plurality (four in the first embodiment) of second bolts 54.

[0058] The plurality of first spacers 51 are attached to the socket board 22 and fixed to the intermediate plate 40 by a corresponding plurality of first bolts 53. The plurality of first spacers 51 are fixed to the first plate 41 by the plurality of first bolts 53. Specifically, the plurality of first spacers 51 inserted into each insertion hole 42C are fixed to the first plate 41 by the first bolts 53. Each first spacer 51 includes a through hole. The first bolt 53 is threaded into the through hole through a bolt insertion hole 41D (see FIG. 11) of the first spacer 51.

[0059] The plurality of second spacers 52 are fixed to the socket board 22, and are also fixed to the second connection member 60 through the intermediate plate 40. In other words, it can be said that the second connection member 60 is connected to the first connection member 50.

[0060] A plurality of second spacers 52 are inserted into each end insertion hole 42CA. Each second spacer 52 includes a threaded portion 52A. The second spacer 52 inserted into each end insertion hole 42CA is in contact with the first plate 41 with the threaded portion 52A inserted through a bolt insertion hole 41D (see FIG. 12). The second spacers 52 are fixed to the socket board 22 by second bolts 54.

[0061] Further, a plurality of first spacers 51 are inserted into each of the end insertion holes 42CA. The plurality of first spacers 51 inserted into each of the end insertion holes 42CA, like the plurality of first spacers 51 inserted into the insertion holes 42C, are attached to the socket board 22 and fixed to the first plate 41 by a corresponding plurality of first bolts 53.

[0062] As shown in FIG. 7 , the second connection member 60 is a member that connects the board support 30 and the intermediate plate 40. The second connection member 60 is fixed to the support body 31 of the board support 30 by bolts 64. The second connection member 60 has a columnar shape extending in the Z-axis direction. In one example, the length LB of the second connection member 60 is longer than the length LA of the first connection member 50. The length LB of the second connection member 60 can be defined, for example, by the distance between the support body 31 of the board support 30 and the first plate 41 of the intermediate plate 40 in the Z-axis direction. The length LA of the first connection member 50 can be defined, for example, by the length of the first spacer 51 in the Z-axis direction. In other words, the length LA of the first connection member 50 can be defined by the distance between the socket board 22 and the first plate 41 of the intermediate plate 40 in the Z-axis direction. In this way, it can be said that the intermediate plate 40 is disposed closer to the socket board 22 in the Z-axis direction than the support body 31 of the board support 30.

[0063] 15, the second connecting member 60 includes a first end member 61, a second end member 62, and an intermediate member 63. The first end member 61, the second end member 62, and the intermediate member 63 are provided separately.

[0064] The intermediate member 63 may be cylindrical and include a through hole 63A. The first end member 61 and the second end member 62 are attached to the intermediate member 63 via the through hole 63A. The first end member 61 is attached to one end of the intermediate member 63, and the second end member 62 is attached to the other end. Therefore, the intermediate member 63 can be said to be a member that connects the first end member 61 and the second end member 62. The hardness of the intermediate member 63 is lower than the hardness of the first end member 61 and the second end member 62. In one example, the Vickers hardness of the intermediate member 63 is lower than the Vickers hardness of the first end member 61 and the Vickers hardness of the second end member 62. The intermediate member 63 is made of, for example, silicone resin. Both the first end member 61 and the second end member 62 are made of, for example, stainless steel. The intermediate member 63 may also be columnar and include bottomed holes at both ends. In this case, the first end member 61 is attached to a bottomed hole at one end of the intermediate member 63, and the second end member 62 is attached to the other end of the intermediate member 63.

[0065] The first end member 61 is an end of the second connecting member 60 that is connected to the intermediate plate 40. The first end member 61 contacts the intermediate plate 40. More specifically, the first end member 61 contacts the first plate 41 of the intermediate plate 40. The second end member 62 is an end of the second connecting member 60 that is connected to the board support 30. The second end member 62 contacts the board support 30. More specifically, the second end member 62 contacts the support body portion 31 of the board support 30. The first end member 61 and the second end member 62 have the same configuration. The first end member 61 and the second end member 62 include fixing pins 61A and 62A. The first end member 61 is attached to the intermediate member 63 by press-fitting the fixing pin 61A into a through-hole 63A of the intermediate member 63. The second end member 62 is attached to the intermediate member 63 by press-fitting the fixing pin 62A into the through-hole 63A of the intermediate member 63. The attachment structure of the first end member 61 and the second end member 62 to the intermediate member 63 can be changed as desired.

[0066] The intermediate member 63 of the second connection member 60 is deformed in the X, Y, and Z directions by an external force. Therefore, the intermediate plate 40 attached to the second connection member 60 becomes movable in the X, Y, and Z directions relative to the board support body 30 due to the deformation of the intermediate member 63. The socket board 22 connected to the intermediate plate 40 by the first connection member 50 becomes movable in the X, Y, and Z directions relative to the board support body 30 together with the intermediate plate 40.

[0067] [Interface Device] The detailed configuration of the interface device 70 will be described with reference to FIGS. 16 to 22. FIG. 16 schematically shows a perspective view of the interface device 70. FIG. 17 schematically shows a plan view of an interface board 71 of the interface device 70, which will be described later. FIG. 18 schematically shows a perspective view of a second connector 72 of the interface device 70 and a latch mechanism 80, which will be described later. FIG. 19 schematically shows a side view of a portion of the latch mechanism 80. FIG. 20 schematically shows a plan view of a portion of the latch mechanism 80. FIG. 21 schematically shows a front view of a portion of the latch mechanism 80. FIG. 22 schematically shows a plan view of a portion of the latch mechanism 80. In FIG. 22, the operation of the latch mechanism 80 is indicated by a two-dot chain line.

[0068] As shown in FIGS. 16 and 17, the interface device 70 includes an interface board 71, a second connector 72, a board cover 73, and a latch mechanism 80. The interface board 71 is attached to the test head 120 shown in FIG. 1. The interface board 71 is flat and has a thickness in the Z-axis direction. The interface board 71 is larger than the connection unit 10 in a plan view. That is, the interface board 71 is larger than the socket board 22 (see FIG. 2) in a plan view. The interface board 71 is provided with handles 74 for carrying the interface device 70. In one example, the handles 74 are provided at both ends of the interface board 71 in the X-axis direction.

[0069] The second connector 72 is fixed to the interface board 71. A plurality of second connectors 72 are provided spaced apart from each other in the Y-axis direction. Each of the plurality of second connectors 72 is exposed from the lower surface of the interface board 71. Each second connector 72 is electrically connected to the test head 120. The plurality of second connectors 72 are connected to the first connector 23 (see FIG. 5) of the connection device 20. Each second connector 72 includes a plurality of pins 72A for electrically connecting to the first connector 23. The plurality of second connectors 72 are configured to be electrically connectable to the test apparatus 100 shown in FIG. 1. In one example, the plurality of second connectors 72 are configured to be electrically connectable to the test head 120.

[0070] As shown in Fig. 17, the interface board 71 includes a plurality of first bolt insertion holes 71A and a plurality of second bolt insertion holes 71B. A pedestal 75 (see Fig. 16) is attached to the interface board 71. The pedestal 75 is a component that is attached to the test head 120. The pedestal 75 is fixed to the underside of the interface board 71 by bolts 76 (see Fig. 18) that pass through the first bolt insertion holes 71A.

[0071] As shown in FIG. 16 , the board cover 73 is box-shaped and opens on the interface board 71 side. The board cover 73 is provided on the interface board 71. The board cover 73 is attached to the interface board 71. More specifically, the board cover 73 is attached to the interface board 71 by a plurality of first bolts 77, a plurality of spacers 78, and a plurality of second bolts (not shown). The plurality of spacers 78 are fixed to the interface board 71 by the plurality of first bolts 77. The plurality of first bolts 77 are attached to the plurality of spacers 78 through a plurality of second bolt insertion holes 71B. The plurality of second bolts are attached to the plurality of spacers 78 by passing through the board cover 73.

[0072] The board cover 73 includes an opening 73A provided in its center. The opening 73A is provided so that the connection device 20 can be inserted therethrough. The opening 73A is provided in the center of the board cover 73 in a plan view. The opening 73A also exposes the latch mechanism 80. In other words, the latch mechanism 80 can be said to be disposed within the opening 73A in a plan view. In one example, the opening 73A has an octagonal shape elongated in the X-axis direction in a plan view. In one example, the opening 73A is provided so as to have a shape similar to the shape of the support body 31 (see FIG. 9 ) of the board support member 30. As a result, if the connection device 20 is inserted into the opening 73A with the support body 31 rotated 90° relative to the opening 73A in a plan view, the support body 31 cannot be inserted into the opening 73A. This makes it possible to limit the orientation in which the connection device 20 is attached to the interface device 70. The shape of the opening 73A in a plan view can be changed as desired.

[0073] 18, the latch mechanism 80 is fixed to the interface board 71. A plurality of latch mechanisms 80 (two in the first embodiment) are provided spaced apart in the X-axis direction in a plan view. That is, the plurality of latch mechanisms 80 are arranged spaced apart in a direction perpendicular to the arrangement direction of the plurality of second connectors 72 in a plan view. In the first embodiment, the two latch mechanisms 80 are provided dispersedly on both sides of the plurality of second connectors 72 in the X-axis direction.

[0074] Each latch mechanism 80 is used to detachably attach the board support 30 to the interface board 71. That is, in the connection unit 10, each latch mechanism 80 allows the connection device 20 to be detachably attached to the interface device 70.

[0075] Each latch mechanism 80 includes an engagement body 81, a latch support body 85, an elastic member 86, and a regulating member 87. The engagement body 81, the latch support body 85, the elastic member 86, and the regulating member 87 are provided individually.

[0076] As shown in FIGS. 19 to 21, the engagement body 81 is a member that engages with the connection device 20 when the connection device 20 is attached to the interface device 70. The engagement body 81 is rotatably attached to the latch support member 85. The engagement body 81 includes a hook portion 82, a bearing portion 83, and a pressing portion 84. The hook portion 82, the bearing portion 83, and the pressing portion 84 are integrated. The engagement body 81 is substantially L-shaped when viewed from the Y-axis direction.

[0077] The hook portion 82 is provided on an upper portion including the upper end portion of the engaging body 81. The hook portion 82 is provided, for example, higher than the elastic member 86. The hook portion 82 includes a first guide surface 82A that slopes outward toward the upper end surface of the engaging body 81, and a second guide surface 82B that forms the lower end portion of the hook portion 82 and extends along the Z-axis direction. The hook portion 82 includes a lower end surface 82C that extends from the second guide surface 82B in a direction perpendicular to the Z-axis direction. The first guide surface 82A, the second guide surface 82B, and the lower end surface 82C form a hook shape.

[0078] The bearing portion 83 is provided at the lower end of the engaging body 81. The bearing portion 83 is a component that receives the rotating shaft body 85AA, which will be described later, when the engaging body 81 rotates. In other words, the engaging body 81 is configured to rotate around the rotating shaft body 85AA relative to the latch support body 85. The bearing portion 83 opens downward and penetrates the engaging body 81 in the Y-axis direction.

[0079] The pressing portion 84 is provided so as to protrude in the X-axis direction from the lower end of the engaging body 81. The pressing portion 84 is configured to press the board support body 30 upward when the hook portion 82 rotates around the rotating shaft body 85AA in the direction to remove the board support body 30. In other words, the pressing portion 84 is a portion that presses the connection device 20 upward when the connection device 20 is removed from the interface device 70. The pressing portion 84 includes a pressing surface 84A. The pressing surface 84A is configured as a flat surface that is perpendicular to the Z-axis direction when the connection device 20 is not attached to the interface device 70.

[0080] 18, the latch support 85 includes an attachment portion 85A to which the engaging body 81 is rotatably attached, a support portion 85B that supports the attachment portion 85A, and a latch handle 85C attached to the support portion 85B. The attachment portion 85A, the support portion 85B, and the latch handle 85C are provided separately.

[0081] As shown in FIGS. 18 to 21, the mounting portion 85A includes a rotating shaft 85AA inserted through the bearing portion 83 of the engagement body 81, shaft support portions 85AB that support both sides of the rotating shaft 85AA in the Y-axis direction, and a back portion 85AC that restricts rotation of the engagement body 81. The shaft support portions 85AB are provided to face both sides of the engagement body 81 in the Y-axis direction. Therefore, the shaft support portions 85AB are configured to restrict movement of the engagement body 81 to both sides in the X-axis direction. The rotating shaft 85AA is attached to the shaft support portions 85AB. The rotating shaft 85AA has, for example, a cylindrical shape extending in the Y-axis direction. The rotating shaft 85AA is inserted through the bearing portion 83 of the engagement body 81. The bearing portion 83 is supported rotatably relative to the rotating shaft 85AA around the axis of the rotating shaft 85AA. This means that the engagement body 81 is rotatably attached to the rotating shaft 85AA. The engagement body 81 is configured to be rotatable about the axis of the rotary shaft body 85AA.

[0082] The rear surface portion 85AC is disposed on the rear side (outside) of the engaging body 81. When the engaging body 81 rotates outward through a predetermined angle, the rear surface portion 85AC comes into contact with the engaging body 81, thereby restricting the rotation of the engaging body 81. The rear surface portion 85AC is configured to restrict the movement of the engaging body 81 to one side in the Y-axis direction.

[0083] 18, the support portion 85B includes a first portion 85BA provided in a flat plate shape with its thickness direction in the Z-axis direction, and a second portion 85BB rising from the first portion 85BA. In one example, the first portion 85BA and the second portion 85BB are integrated. The second portions 85BB are spaced apart in the Y-axis direction. When the engagement body 81 is attached to the latch support body 85, the pressing portion 84 of the engagement body 81 is disposed between the two second portions 85BB in the Y-axis direction.

[0084] The latch handle 85C is attached to the support part 85B so as to be positioned outward from the engaging body 81. The latch handle 85C is fixed to the support part 85B with a bolt 88. The latch handle 85C is provided so as to incline outward as it extends upward from the support part 85B.

[0085] As shown in Fig. 18, bolt 88 secures support portion 85B to spacer 89, which is secured to interface board 71. In other words, bolt 88 and spacer 89 sandwich support portion 85B and part of latch handle 85C between them. Spacer 89 is secured to interface board 71 by bolt 89A (see Fig. 23). Bolt 89A secures spacer 89 to interface board 71 from the side opposite to spacer 89 relative to interface board 71.

[0086] The support portion 85B includes a positioning pin 85BC. The positioning pin 85BC is provided on at least one of the two second portions 85BB of the support portion 85B. The positioning pin 85BC is inserted into the pin insertion hole 31D (see FIG. 9) of the board support 30 when the connection device 20 is attached to the interface device 70. This determines the position of the board support 30 relative to the multiple latch mechanisms 80.

[0087] The number of positioning pins 85BC in the multiple latch mechanisms 80 is different. Specifically, one latch mechanism 80 has two positioning pins 85BC, while the other latch mechanism 80 has one positioning pin 85BC. Therefore, a positioning pin 85BC is provided in each of the two second portions 85BB of the support portion 85B in one latch mechanism 80. A positioning pin 85BC is provided in only one of the two second portions 85BB of the support portion 85B in the other latch mechanism 80 (not shown in FIG. 18). Furthermore, the pin insertion holes 31D in the board support 30 are provided corresponding to the positioning pins 85BC of the multiple latch mechanisms 80. In other words, two pin insertion holes 31D are provided on one side of the board support 30 in the X-axis direction, i.e., two pin insertion holes 31D corresponding to the positioning pins 85BC of one latch mechanism 80. The board support body 30 has one pin insertion hole 31D on the other side in the X-axis direction, i.e., one pin insertion hole 31D corresponding to the positioning pin 85BC of the other latch mechanism 80. As a result, when the orientation of the connection device 20 relative to the interface device 70 matches the preset orientation, the three positioning pins 85BC are inserted into the pin insertion holes 31D of the board support body 30, and the connection device 20 is attached to the interface device 70. On the other hand, when the orientation of the connection device 20 relative to the interface device 70 is opposite to the preset orientation, the positioning pin 85BC is not inserted into the pin insertion hole 31D of the board support body 30 and comes into contact with the support main body 31, and the connection device 20 is not attached to the interface device 70.

[0088] As shown in Figs. 19 to 22, the elastic member 86 is configured to bias the engaging body 81. In the first embodiment, the elastic member 86 is configured to press the engaging body 81 inward. For example, a coil spring, a rubber member, or the like can be used as the elastic member 86. The elastic member 86 is provided so as to press the vicinity of the center of the engaging body 81 in the Z-axis direction. The elastic member 86 is provided at the upper end of the back surface portion 85AC of the mounting portion 85A.

[0089] The restricting member 87 is configured to restrict rotation of the engaging body 81 caused by the elastic member 86. In the first embodiment, the restricting member 87 is configured to restrict inward rotation of the hook portion 82 of the engaging body 81 pressed by the elastic member 86. The restricting member 87 is provided at the lower end of the back surface portion 85AC of the mounting portion 85A. In one example, the restricting member 87 is configured by a bolt provided to penetrate the back surface portion 85AC in the X-axis direction. The restricting member 87 restricts inward rotation of the hook portion 82 of the engaging body 81 by contacting the lower end of the engaging body 81.

[0090] The engagement body 81 is rotatable within a rotation range between an initial state indicated by a solid line in FIG. 22 and a rotated state indicated by a two-dot chain line in FIG. 22. Here, the initial state is a state in which the engagement body 81 is in contact with the regulating member 87. In the initial state, the engagement body 81 is separated from the rear surface portion 85AC. The rotated state is a state in which the engagement body 81 is in contact with the rear surface portion 85AC. On the other hand, in the rotated state, the engagement body 81 is separated from the regulating member 87. As shown in FIG. 22, when the engagement body 81 changes from the initial state to the rotated state, the elastic member 86 is elastically deformed. Then, the restoring force of the elastic member 86 returns the engagement body 81 from the rotated state to the initial state.

[0091] [Attaching and detaching the connection unit] The operation of attaching and detaching the interface device 70 and the connection device 20 will be described. (Attaching the connection device) 23 and 24, the operation of attaching the connection device 20 to the interface device 70 will be described.

[0092] As shown in FIG. 23 , for example, an operator holds the handle 36 of the connection device 20 and inserts the connection device 20 into the opening 73A (see FIG. 16 ) of the board cover 73 of the interface device 70. In this case, the first bent portion 33 of the board support 30 of the connection device 20 comes into contact with the first guide surface 82A of the hook portion 82 of the engagement body 81 of the latch mechanism 80. Then, as the connection device 20 moves further toward the interface board 71, the first bent portion 33 presses the hook portion 82, causing the engagement body 81 to rotate outward. Then, as the connection device 20 moves further toward the interface board 71, the first bent portion 33 comes into contact with the second guide surface 82B of the hook portion 82 and then moves closer to the interface board 71 than the hook portion 82. At this time, after the first bent portion 33 passes the second guide surface 82B, the elastic member 86 of the latch mechanism 80 causes the engagement body 81 to rotate the hook portion 82 inward. When the board support body 30 is placed on the second portion 85BB of the support portion 85B of the latch mechanism 80, the restoring force of the elastic member 86 returns the engaging body 81 to its initial state, as shown in FIG. 24 . At this time, the upper end surface of the first rising portion 32 of the board support body 30 faces the lower end surface 82C of the hook portion 82 in the Z-axis direction. That is, the support portion 85B and the hook portion 82 are arranged so that the board support body 30 is sandwiched between the support portion 85B and the hook portion 82 when the connection device 20 is attached to the interface device 70. More specifically, the first rising portion 32 is sandwiched between the support portion 85B and the hook portion 82 when the connection device 20 is attached to the interface device 70. This restricts movement of the connection device 20 in the Z-axis direction.

[0093] Furthermore, when the board support 30 is placed on the second portion 85BB of the support portion 85B of the latch mechanism 80, the first connector 23 of the connection device 20 is connected to the second connector 72 of the interface device 70. This electrically connects the connection device 20 and the interface device 70. In other words, the device under test 200 shown in FIG. 2 is electrically connected to the test head 120 shown in FIG.

[0094] 2 and 3, when the connection device 20 is attached to the interface device 70, a portion of the hook portion 82 of the latch mechanism 80 protrudes upward from the opening 73A of the board cover 73. Furthermore, the gripping member 36B of the handle 36 of the connection device 20 protrudes upward from the opening 73A of the board cover 73. The gripping member 36B is located above the board cover 73 in the Z-axis direction. Furthermore, the gripping member 36B is located outward from the opening 73A of the board cover 73 in a plan view.

[0095] (Removing connected devices) Next, the operation of removing the connection device 20 from the interface device 70 will be described with reference to FIGS.

[0096] As shown in FIG. 25 , first, for example, an operator rotates the engagement body 81 of the latch mechanism 80 outward. As a result, as shown in FIG. 26 , the hook portion 82 moves outward and is positioned outward of the first rising portion 32 of the board support body 30. In other words, the hook portion 82 no longer faces the first rising portion 32 in the Z-axis direction, allowing the board support body 30 to move upward. Meanwhile, as the engagement body 81 rotates outward, the pressing portion 84 of the engagement body 81 pushes the board support body 30 upward. As a result, the first connector 23 is detached from the second connector 72 shown in FIG. 25 , and the connection device 20 moves upward. Then, the operator grasps the handle 36 shown in FIG. 25 to lift the connection device 20 and move it outward through the opening 73A of the board cover 73 shown in FIG. 16 . As a result, the connection device 20 is removed from the interface device 70.

[0097] [Operation of the first embodiment] The operation of the connection unit 10 of the first embodiment will be described. The package configuration, such as the configuration of external electrodes, of the device under test 200 varies depending on the type of device under test 200. Therefore, a socket is required that corresponds to the type of device under test 200. If the entire connection unit is replaced in order to replace the socket according to the type of device under test 200, the replacement work becomes complicated and space is required to arrange the connection unit for each type of device under test 200.

[0098] In this regard, the connection unit 10 of the first embodiment is configured such that the connection device 20 including the socket 21 is detachably attached to the interface device 70 by the latch mechanism 80. Therefore, instead of replacing the connection unit 10, the connection device 20 can be replaced depending on the type of device under test 200. In other words, the interface device 70 can be used as a common device for all types of device under test 200. In addition, because the connection device 20 can be attached and detached to and from the interface device 70 by the latch mechanism 80, the replacement of the connection device 20 can be performed more easily than when, for example, the connection device 20 and the interface device 70 are attached and detached using bolts. Furthermore, because the interface device 70 is not replaced for each type of device under test 200, the space required to arrange the connection device 20 for each type of device under test 200 can be reduced compared to when the connection unit is replaced for each type of device under test 200.

[0099] [Effects of the first embodiment] According to the connection unit 10 of the first embodiment, the following effects can be obtained. (1-1) The connection unit 10 includes a connection device 20 to which the device under test 200 can be electrically connected, and an interface device 70 to which the connection device 20 is detachably attached. The connection device 20 includes a socket 21 to which the device under test 200 can be electrically connected, a socket board 22 to which the socket 21 is attached, a board support 30 that supports the socket board 22, and a first connector 23 provided on the board support 30. The interface device 70 includes an interface board 71 that is larger than the socket board 22, a second connector 72 provided on the interface board 71 and electrically connectable to the test apparatus 100, and a latch mechanism 80 used to detachably attach the board support 30 to the interface board 71. The first connector 23 is connected to the second connector 72 when the connection device 20 is attached to the interface device 70.

[0100] According to this configuration, the latch mechanism 80 allows the connection device 20 to be attached and detached to the interface device 70, so that it is possible to respond to each type of device under test 200 by simply replacing the connection device 20 rather than replacing the connection unit 10 itself. Because the socket board 22 of the connection device 20 is smaller than the interface board 71, even if the connection device 20 is replaced for each device under test 200, the installation space for the connection device 20 can be reduced. In addition, the latch mechanism 80 allows the connection device 20 to be easily attached and detached to and from the interface device 70, so the task of replacing the connection device 20 according to the type of device under test 200 can be easily performed.

[0101] (1-2) The latch mechanism 80 includes a latch support body 85 including a rotating shaft body 85AA, an engaging body 81 including a hook portion 82 and rotatably attached to the rotating shaft body 85AA, an elastic member 86 that biases the engaging body 81, and a regulating member 87 that regulates the rotation of the engaging body 81 by the elastic member 86.

[0102] According to this configuration, when the connection device 20 comes into contact with the hook portion 82 and the engaging body 81 rotates, the hook portion 82 guides the connection device 20 to the interface device 70. This makes it easier to attach the connection device 20 to the interface device 70. In addition, the restricting member 87 restricts the rotation of the engaging body 81, which reduces deviation in position of the connection device 20 with respect to the interface device 70. The rotated engaging body 81 is then urged by the elastic member 86 toward the position before the rotation of the engaging body 81. This allows the hook portion 82 to be positioned so as to cover the connection device 20, which prevents the connection device 20 from being unintentionally detached from the interface device 70.

[0103] (1-3) The engagement body 81 includes a pressing portion 84 that presses the board support body 30 upward when the hook portion 82 rotates around the rotation shaft body 85AA in the direction of removing the board support body 30. According to this configuration, the connection device 20 can be easily removed from the interface device 70 by operating the hook portion 82. Therefore, the operation of replacing the connection device 20 can be easily performed.

[0104] (1-4) The interface device 70 includes a board cover 73 provided on the interface board 71. The board cover 73 includes an opening 73A through which the connection device 20 is inserted. The latch mechanism 80 is disposed within the opening 73A in a plan view. In the Z-axis direction, the hook portion 82 of the latch mechanism 80 protrudes upward from the board cover 73.

[0105] According to this configuration, the hook portion 82 protrudes upward from the board cover 73, so that the hook portion 82 can be easily operated when the connection device 20 is attached to the interface device 70. This allows the connection device 20 to be easily removed from the interface device 70, facilitating the replacement of the connection device 20.

[0106] (1-5) The latch support 85 includes a support portion 85B that is located below the hook portion 82 and supports the board support 30. The support portion 85B and the hook portion 82 are arranged so that the board support 30 is sandwiched between the support portion 85B and the hook portion 82 when the connection device 20 is attached to the interface device 70.

[0107] According to this configuration, movement of the board support body 30 in the Z-axis direction is restricted by the support portion 85B and the hook portion 82. This makes it possible to prevent the connection device 20 from being unintentionally detached from the interface device 70.

[0108] (1-6) The board support 30 is plate-shaped. First rising portions 32 extending upward are provided at both ends of the board support 30 in the X-axis direction. The first rising portions 32 are sandwiched between the support portions 85B and the hook portions 82 when the connection device 20 is attached to the interface device 70.

[0109] According to this configuration, movement of the board support body 30 in the Z-axis direction is restricted by the support portion 85B and the hook portion 82. This makes it possible to prevent the connection device 20 from being unintentionally detached from the interface device 70.

[0110] (1-7) The board support 30 includes a plate-shaped support body 31. Between the support body 31 and the first rising portion 32, a first bent portion 33 is provided. According to this configuration, when connection device 20 is attached to interface device 70, first bent portion 33 comes into contact with hook portion 82. This allows first bent portion 33 to move smoothly relative to hook portion 82, so that connection device 20 can be smoothly attached to interface device 70.

[0111] (1-8) A plurality of latch mechanisms 80 are provided spaced apart in the X-axis direction in a plan view. This configuration can further prevent the connection device 20 from unintentionally coming off the interface device 70 compared to when there is only one latch mechanism 80.

[0112] (1-9) The support portion 85B in each of the plurality of latch mechanisms 80 includes a positioning pin 85BC. The board support body 30 includes a pin insertion hole 31D through which the positioning pin 85BC can be inserted.

[0113] According to this configuration, when the connection device 20 is attached to the interface device 70, the positioning pin 85BC is inserted into the pin insertion hole 31D, thereby restricting movement of the connection device 20 in a direction perpendicular to the Z-axis direction. Therefore, since movement of the connection device 20 is restricted when the connection device 20 is attached to the interface device 70, it becomes easier to test the device under test 200.

[0114] (1-10) The number of positioning pins 85BC differs among the plurality of latch mechanisms 80. The pin insertion holes 31D of the board support 30 are provided to correspond to the positioning pins 85BC of the plurality of latch mechanisms 80.

[0115] According to this configuration, if the connection device 20 is attached to the interface device 70 in the wrong orientation, the positioning pin 85BC comes into contact with a location where the pin insertion hole 31D is not provided. This makes it impossible to attach the connection device 20 to the interface device 70. Therefore, it is possible to prevent the connection device 20 from being attached to the interface device 70 in the wrong orientation.

[0116] (1-11) The board support 30 includes a handle 36. The handle 36 protrudes upward from the board cover 73 when the connection device 20 is attached to the interface device 70.

[0117] According to this configuration, the connection device 20 can be easily attached to the interface device 70 by using the handle 36 to attach the connection device 20 to the interface device 70. In addition, when removing the connection device 20 from the interface device 70, because the handle 36 protrudes upward from the board cover 73, the connection device 20 can be easily moved upward using the handle 36. In this way, the replacement work of the connection device 20 can be easily performed.

[0118] (1-12) The handles 36 are provided in a plurality of positions spaced apart from one another in the Y-axis direction, which is perpendicular to the X-axis direction in a plan view. According to this configuration, since multiple handles 36 are arranged in places where latch mechanisms 80 are not arranged, the replacement work of the connection device 20 can be easily performed using the multiple handles 36.

[0119] (1-13) The connection device 20 includes an intermediate plate 40 disposed between the socket board 22 and the board support body 30 and spaced apart from both the socket board 22 and the board support body 30, a columnar first connection member 50 connecting the socket board 22 and the intermediate plate 40, and a columnar second connection member 60 connecting the intermediate plate 40 and the board support body 30. The intermediate plate 40 is provided with second recesses 41C, recesses 42B, and openings 41A and 42A.

[0120] According to this configuration, by providing second recess 41C and recess 42B and openings 41A and 42A in intermediate plate 40, a cable electrically connected to socket 21 can be inserted through intermediate plate 40. Therefore, the cable can be connected to interface device 70 without having to route the cable outside connection device 20.

[0121] (1-14) The second connecting member 60 includes a first end member 61 that contacts the intermediate plate 40, a second end member 62 that connects to the board support 30, and an intermediate member 63 that connects the first end member 61 and the second end member 62. The hardness of the intermediate member 63 is lower than the hardness of the first end member 61 and the second end member 62.

[0122] According to this configuration, the second connecting member 60 allows the intermediate plate 40 to move relative to the board support 30 in the X and Y axis directions and the intermediate plate 40 to move in the Z axis direction (movement toward the board support 30) by the intermediate member 63. In the test apparatus 100, even if the position of the device under test 200 shifts with respect to the socket 21, the intermediate member 63 deforms, making it easier to insert the device under test 200 into the socket 21.

[0123] (1-15) The length LB of the second connecting member 60 is longer than the length LA of the first connecting member 50. According to this configuration, the intermediate member 63 of the second connecting member 60 is easily deformed, so even if the position of the device under test 200 shifts relative to the socket 21, the deformation of the intermediate member 63 makes it easier for the device under test 200 to be inserted into the socket 21.

[0124] In addition, when the test apparatus 100 presses the device under test 200 against the socket 21, the intermediate member 63 of the second connection member 60 deforms in the Z-axis direction. At this time, the socket 21 is pressed toward the device under test 200 by the restoring force of the intermediate member 63. This makes it possible to more reliably establish an electrical connection between the socket 21 and the device under test 200.

[0125] (1-16) The socket 21 includes a device holding portion 21A into which the device under test 200 is inserted, and a guide portion 21C that is provided between the top surface of the socket 21 and the device holding portion 21A and that widens as it approaches the top surface of the socket 21.

[0126] According to this configuration, even if the position of the device under test 200 deviates with respect to the device holding section 21A of the socket 21 in the test apparatus 100, the device under test 200 comes into contact with the guide section 21C when the device under test 200 is inserted into the socket 21. As a result, the force acting on the guide section 21C deforms the intermediate member 63 of the second connection member 60. In other words, the intermediate plate 40 moves in the X and Y axes relative to the board support 30. Accordingly, the socket board 22 moves in the X and Y axes, and the position of the socket 21 with respect to the device under test 200 is adjusted so that the device under test 200 is inserted into the device holding section 21A. As a result, the device under test 200 can be reliably inserted into the device holding section 21A.

[0127] Second Embodiment A connection unit 10 according to the second embodiment will be described with reference to Figures 27 to 30. The connection unit 10 according to the second embodiment differs from the connection unit 10 according to the first embodiment mainly in the configuration of the connection device 20. In the following, components common to the first embodiment will be assigned the same reference numerals, and descriptions thereof will be omitted.

[0128] Fig. 27 schematically shows the planar structure of the connection device 20 and its surroundings in the connection unit 10 of the second embodiment. Fig. 28 schematically shows the side structure of the connection device 20 and its surroundings in Fig. 27. Fig. 29 schematically shows the side structure of the connection device 20 and its surroundings viewed from a different direction than Fig. 28. Fig. 30 schematically shows an exploded perspective structure of the connection device 20.

[0129] As shown in FIGS. 27 to 30, the connection device 20 of the second embodiment differs mainly in the configuration of the socket 90 and the mounting structure of the socket 90 and the socket board 22. 27, the socket 90 has a rectangular shape having long and short sides in a plan view. In the second embodiment, the socket 90 is attached to the socket board 22 so that the long sides are aligned along the Y-axis direction and the short sides are aligned along the X-axis direction. The socket 90 has a convex shape when viewed from the X-axis direction.

[0130] The socket 90 includes a device mounting portion 91 and an attachment portion 92. In one example, the device mounting portion 91 and the attachment portion 92 are integrated. The device mounting portion 91 is a portion on which the device under test 200 is mounted. The device mounting portion 91 is provided in the center of the socket 90 in the Y-axis direction. The attachment portions 92 are provided dispersedly on both sides of the device mounting portion 91 in the Y-axis direction. The attachment portions 92 are portions for attaching the socket 90 to the socket board 22.

[0131] 28 to 30, in the connection device 20 of the second embodiment, the second plate 42 (see FIG. 8) is omitted from the intermediate plate 40. The connection device 20 also includes a spacer 93, a socket support 94, a first bolt 95, and a second bolt 96.

[0132] The spacer 93 is fixed to the first plate 41 of the intermediate plate 40 by a second bolt 96. The spacer 93 supports a socket support 94. The socket support 94 is fixed to the socket board 22 by a first bolt 95 while in contact with the underside of the socket board 22. More specifically, the first bolt 95 is fixed to the socket support 94 through the mounting portion 92 of the socket 90. In this way, the socket 90 is fixed to the socket board 22.

[0133] As shown in FIGS. 28 to 30 , the socket support 94 includes a flat base portion 94A and a support column portion 94B rising from the base portion 94A. In one example, the base portion 94A and the support column portion 94B are integrated. The base portion 94A is a portion that comes into contact with the spacer 93. In other words, the base portion 94A is a portion that is supported by the spacer 93. The spacer 93 comes into contact with the center of the base portion 94A in the X-axis direction and the Y-axis direction. The support column portions 94B are provided at both ends of the base portion 94A in the Y-axis direction. The support column portions 94B are portions that come into contact with the socket board 22 and are portions to which the first bolts 95 are fixed. The support column portions 94B of the socket support 94 form a space between the base portion 94A and the socket board 22 in the Z-axis direction. A cable (not shown) that connects the first connector 23 and the socket 90 is connected to the first connector 23 through the space.

[0134] In the second embodiment, the configuration for supporting the socket 90 is different from that in the first embodiment, and therefore the number of first connecting members 50 is less than the number of first connecting members 50 in the first embodiment. In other words, in the second embodiment, the first connecting members 50 for supporting the socket 21 in the first embodiment are omitted.

[0135] Of the multiple second connection members 60, two second connection members 60 arranged in the center in the X-axis direction are fixed to the first plate 41 of the intermediate plate 40 by bolts 65. According to the second embodiment, the same effects as those of the first embodiment can be obtained.

[0136] <Example of change> The above-described embodiments can be modified, for example, as follows: The above-described embodiments and the following modified examples can be combined with each other as long as no technical contradiction occurs. In the following modified examples, parts common to the above-described embodiments are designated by the same reference numerals as the above-described embodiments, and their description will be omitted.

[0137] In the first embodiment, the configuration of the intermediate plate 40 can be changed as desired. For example, the second plate 42 may be omitted from the intermediate plate 40. In the second embodiment, the configuration of the intermediate plate 40 can be changed as desired. In one example, the intermediate plate 40 may be made up of a first plate 41 and a second plate 42.

[0138] In the first embodiment, the configurations of the first plate 41 and the second plate 42 of the intermediate plate 40 can be changed as desired. For example, the openings 41A and 42A may be omitted from the first plate 41 and the second plate 42. For another example, the first recess 41B and the second recess 41C may be omitted from the first plate 41. The recess 42B may be omitted from the second plate 42.

[0139] In the second embodiment, the configuration of the first plate 41 of the intermediate plate 40 can be changed as desired. For example, the opening 41A may be omitted from the first plate 41. For another example, the first recess 41B and the second recess 41C may be omitted from the first plate 41.

[0140] In each embodiment, the position of the handle 36 of the board support 30 relative to the support body 31 can be changed as desired. The handle 36 may be positioned so as not to interfere with the latch mechanism 80 when the connection device 20 is attached to the interface device 70.

[0141] In each embodiment, when the connection device 20 is attached to the interface device 70, the handle 36 may be located within the opening 73A of the board cover 73 in a plan view. In this case, when the connection device 20 is attached to the interface device 70, the handle 36 does not need to protrude from the board cover 73.

[0142] In each embodiment, the configuration of the board support 30 can be changed as desired. In one example, the first bent portion 33 may be omitted from between the support main body portion 31 and the first rising portion 32. In one example, the second bent portion 35 may be omitted from between the support main body portion 31 and the second rising portion 34. In another example, the second rising portion 34 and the second bent portion 35 may be omitted from the board support 30. In another example, the first rising portion 32 and the first bent portion 33 may be omitted from the board support 30.

[0143] In each embodiment, the number of handles 36 of the board support 30 can be changed arbitrarily. In one example, the number of handles 36 may be one. In each embodiment, the handle 36 may be omitted from the board support 30.

[0144] In each embodiment, the number of sockets 21, 90 can be changed as desired. The number of sockets 21, 90 may be one to three, or may be five or more. The arrangement of sockets 21, 90 is not limited to a matrix, and can be changed as desired.

[0145] In each embodiment, the intermediate plate 40 may be omitted. In this case, for example, the second connection member 60 may connect the board support 30 and the socket board 22. In each embodiment, the second connecting member 60 may be disposed at a position different from the position where it overlaps with the first connecting member 50 in a plan view. In this case, the second connecting member 60 may be connected to the intermediate plate 40 instead of the first connecting member 50.

[0146] In each embodiment, the length LB of the second connecting member 60 may be equal to the length LA of the first connecting member 50. Alternatively, the length LB of the second connecting member 60 may be shorter than the length LA of the first connecting member 50.

[0147] In each embodiment, the configuration of the second connecting member 60 can be changed as desired. For example, the hardness of the intermediate member 63 of the second connecting member 60 may be equal to the hardness of the first end member 61 and the second end member 62. In other words, the intermediate member 63 may be made of the same material as the first end member 61 and the second end member 62. In this case, the first end member 61, the second end member 62, and the intermediate member 63 may be integrated into one piece. Furthermore, the hardness of the intermediate member 63 may be greater than the hardness of the first end member 61 and the second end member 62.

[0148] In each embodiment, the board cover 73 may be omitted. In each embodiment, the arrangement of the multiple latch mechanisms 80 can be changed as desired. For example, the engaging body 81 may include a rotating shaft body 85AA. In this case, the latch support body 85 may include a bearing portion 83. In short, the latch mechanism 80 may be configured such that the engaging body 81 is rotatably supported relative to the latch support body 85.

[0149] In each embodiment, the number of latch mechanisms 80 can be changed as desired. In one example, four latch mechanisms 80 may be provided. In this case, the four latch mechanisms 80 may be disposed at equal 90° intervals in a plan view.

[0150] In each embodiment, the number of positioning pins 85BC in the multiple latch mechanisms 80 may be equal to one another. In each embodiment, the configuration of the latch mechanism 80 can be changed as desired. The latch mechanism 80 may be configured to allow the connection device 20 to be detachably attached to the interface device 70. In one example, the latch mechanism 80 may be configured to move the engagement body 81 horizontally in the X-axis direction instead of rotating the engagement body 81. In another example, the pressing portion 84 may be omitted from the engagement body 81.

[0151] One or more of the various examples described herein may be combined to the extent that they are not technically inconsistent. The term "on" as used in this disclosure includes the meanings of "on" and "above" unless the context clearly indicates otherwise. Thus, for example, the expression "a first element is disposed on a second element" means that in some embodiments, the first element may be disposed directly on the second element in contact with the second element, while in other embodiments, the first element may be disposed above the second element without contacting the second element. In other words, the term "on" does not exclude a structure in which another element is formed between the first element and the second element.

[0152] The Z-axis direction used in this disclosure does not necessarily have to be the vertical direction, nor does it have to completely coincide with the vertical direction. Therefore, various structures according to this disclosure are not limited to the "up" and "down" in the Z-axis direction described in this specification being "up" and "down" in the vertical direction. For example, the X-axis direction may be the vertical direction, or the Y-axis direction may be the vertical direction.

[0153] <Additional Notes> The technical ideas that can be understood from the above-described embodiments and modifications are described below. The reference numerals of the components of the embodiments corresponding to the components described in each appendix are shown in parentheses. The reference numerals are shown as examples to aid understanding, and the components described in each appendix should not be limited to the components indicated by the reference numerals.

[0154] [Appendix 1] A connection unit (10) attached to a test device (100), a connection device (20) to which a device under test (200) can be electrically connected; an interface device (70) to which the connection device (20) is detachably attached; Equipped with The connection device (20) a socket (21) to which the device under test (200) can be electrically connected; a socket board (22) on which the socket (21) is mounted; a board support (30) supporting the socket board (22); a first connector (23) provided on the board support (30); Including, The interface device (70) an interface board (71) larger than the socket board (22); a second connector (72) provided on the interface board (71) and electrically connectable to the test device (100); a latch mechanism (80) used to removably attach the board support (30) to the interface board (71); Including, The first connector (23) is connected to the second connector (72) when the connection device (20) is attached to the interface device (70). Connection unit (10).

[0155] [Appendix 2] The latch mechanism (80) a latch support (85) including a rotating shaft (85AA); an engaging body (81) including a hook portion (82) and rotatably attached to the rotating shaft body (85AA); an elastic member (86) that biases the engaging body (81); a restricting member (87) that restricts the rotation of the engaging body (81) by the elastic member (86); Contains 10. A connection unit as described in Appendix 1.

[0156] [Appendix 3] The engaging body (81) includes a pressing portion (84) that presses the board support (30) upward when the hook portion (82) rotates around the rotating shaft body (85AA) in a direction to remove the board support (30). 10. A connection unit as described in Appendix 2.

[0157] [Appendix 4] The interface device (70) includes a board cover (73) provided on the interface board (71), The board cover (73) includes an opening (73A) through which the connection device (20) is inserted, the latch mechanism (80) is disposed within the opening (73A) in a plan view, In the thickness direction (Z) of the interface board (71), the hook portion (82) protrudes upward from the board cover (73). 4. A connection unit according to claim 2 or 3.

[0158] [Appendix 5] The latch support (85) includes a support portion (85B) that is located below the hook portion (82) and supports the board support (30), The support portion (85B) and the hook portion (82) are provided so that the board support (30) is sandwiched between the support portion (85B) and the hook portion (82) when the connection device (20) is attached to the interface device (70). 5. A connection unit as described in Appendix 4.

[0159] [Appendix 6] The board support (30) is plate-shaped, The board support (30) has rising portions (32) extending upward at both ends in the first direction (X), The rising portion (32) is sandwiched between the support portion (85B) and the hook portion (82) when the connection device (20) is attached to the interface device (70). 6. A connection unit as described in Appendix 5.

[0160] [Appendix 7] The board support (30) includes a plate-shaped support body portion (31), A bent portion (33) is provided between the support body portion (31) and the rising portion (32). 6. A connection unit as described in Appendix 6.

[0161] [Appendix 8] The latch mechanisms (80) are provided in plurality and spaced apart from one another in the first direction (X) in a plan view. 8. A connection unit according to claim 6 or 7.

[0162] [Appendix 9] the support portion (85B) of each of the plurality of latch mechanisms (80) includes a positioning pin (85BC); The board support (30) includes a pin insertion hole (31D) through which the positioning pin (85BC) can be inserted. 10. A connection unit as described in Appendix 8.

[0163] [Appendix 10] The number of the positioning pins (85BC) in the plurality of latch mechanisms (80) is different, The pin insertion holes (31D) of the board support (30) are provided to correspond to the positioning pins (85BC) of the plurality of latch mechanisms (80). 10. The connection unit according to claim 9.

[0164] [Appendix 11] The board support (30) includes a handle (36); The handle (36) protrudes upward from the board cover (73) when the connection device (20) is attached to the interface device (70). 11. The connection unit according to any one of appendices 8 to 10.

[0165] [Appendix 12] The handles (36) are provided in a plurality at intervals in a second direction (Y) perpendicular to the first direction (X) in a plan view. 12. The connection unit according to claim 11.

[0166] [Appendix 13] The connection device (20) an intermediate plate (40) disposed between the socket board (22) and the board support (30) and spaced apart from both the socket board (22) and the board support (30); a columnar first connecting member (50) that connects the socket board (22) and the intermediate plate (40); a columnar second connecting member (60) that connects the intermediate plate (40) and the board support (30); Including, The intermediate plate (40) is provided with at least one of recesses (41C, 42B) and openings (41A, 42A). 13. The connection unit according to any one of appendices 1 to 12.

[0167] [Appendix 14] The second connecting member (60) is a first end member (61) in contact with the intermediate plate (40); a second end member (62) connected to the board support (30); an intermediate member (63) connecting the first end member (61) and the second end member (62); Including, The hardness of the intermediate member (63) is lower than the hardness of the first end member (61) and the second end member (62). 14. The connection unit according to claim 13.

[0168] [Appendix 15] The intermediate plate (40) is The first plate (41) and a second plate (42) attached onto the first plate (41); Including, The second plate (42) is provided with an insertion hole (42C) through which the first connecting member (50) is inserted, The first connecting member (50) is attached to the first plate (41). 14. The connection unit according to claim 13.

[0169] [Appendix 16] The second connecting member (60) is connected to the first connecting member (50). 14. The connection unit according to claim 13.

[0170] [Appendix 17] The length (LB) of the second connecting member (60) is longer than the length (LA) of the first connecting member (50). 17. The connection unit according to any one of appendices 13 to 16.

[0171] The above description is merely illustrative. Those skilled in the art will recognize that many more possible combinations and permutations are possible other than the components and methods (manufacturing processes) listed for the purpose of illustrating the technology of the present disclosure. The present disclosure is intended to embrace all alternatives, modifications, and variations that fall within the scope of the present disclosure, including the claims. [Explanation of symbols]

[0172] 10...Connection unit 20...Connection device 21...Socket 21A...Device holder 21B... Positioning part 21C...Guide section 22...Socket board 23...First connector 23A...insertion hole 24,25...volts 30...Board support 31...Support body part 31A…Opening 31B...First bolt insertion hole 31C...Second bolt insertion hole 31D...Pin insertion hole 32...First rising section 33...First bending part 34...Second rising section 35…Second bending part 36...Handle 36A...Fixing member 36B...gripping member 36C...Bolt 37...Volts 38...Spacer 40...Intermediate plate 41...1st board 41A…Opening 41B...First recess 41C...Second recess 41D...Bolt insertion hole 41E...Bolt fixing hole 42…Second board 42A…Opening 42B...recess 42C...Through hole 42CA...End insertion hole 42D...Central insertion hole 42E...Bolt fixing hole 43...Bolt 50...First connecting member 51...First bolt 52...Second bolt 52A...Threaded section 53...First bolt 54...Second bolt 60...Second connecting member 61...First end member 61A...Fixing pin 62...Second end member 62A...Fixed pin 63...Intermediate member 63A…Through hole 64,65...volts 70...Interface device 71...Interface board 71A...First bolt insertion hole 71B...Second bolt insertion hole 72...Second connector 72A...pin 73...Board cover 73A…Opening 74...Handle 75...Pedestal 76...volts 77...First bolt 78...Spacer 80...Latch mechanism 81...Engagement body 82...Hook part 82A...First guide surface 82B...Second guide surface 82C…Lower end surface 83...Bearing part 84...Pressing part 84A...Pressing surface 85...Latch support 85A...Mounting part 85AA...Rotating shaft 85AB…Shaft support part 85AC…Back part 85B…Support part 85BA…1st part 85BB…Second part 85BC...locating pin 85C...Latch handle 86...Elastic member 87...Regulatory member 88...Bolt 89...Spacer 89A...Bolt 90...Socket 91...Device placement section 92...Mounting part 93...Spacer 94...Socket support 94A...Base part 94B…Strut part 95...First bolt 96...Second bolt 100...Test equipment 110...IC handler 120...Test head 130...Tester 200...Device under test LA: Length of the first connecting member LB: Length of the second connecting member

Claims

1. A connection unit attached to a test device, comprising: a connection device to which a device under test can be electrically connected; an interface device to which the connection device is detachably attached; Equipped with The connection device is a socket to which the device under test can be electrically connected; a socket board on which the socket is mounted; a board support supporting the socket board; a first connector provided on the board support; Including, The interface device comprises: an interface board that is larger than the socket board; a second connector provided on the interface board and electrically connectable to the test device; a latch mechanism used to removably attach the board support to the interface board; Including, The first connector is connected to the second connector when the connection device is attached to the interface device. Connection unit.

2. The latch mechanism includes: a latch support including a rotating shaft; an engaging body including a hook portion and rotatably attached to the rotating shaft body; an elastic member that biases the engaging body; a restricting member that restricts rotation of the engaging body by the elastic member; Contains The connection unit according to claim 1 .

3. The engagement body includes a pressing portion that presses the board support upward when the hook portion rotates around the rotation shaft body in a direction to remove the board support. The connection unit according to claim 2 .

4. the interface device includes a board cover provided on the interface board; the board cover includes an opening through which the connection device is inserted; the latch mechanism is disposed within the opening in a plan view, The hook portion protrudes upward from the board cover in the thickness direction of the interface board. The connection unit according to claim 2 .

5. the latch support includes a support portion that is located below the hook portion and supports the board support; The support portion and the hook portion are provided so that the board support is sandwiched between the support portion and the hook portion when the connection device is attached to the interface device. The connection unit according to claim 4 .

6. The board support is plate-shaped, The board support has raised portions extending upward at both ends in the first direction, The rising portion is sandwiched between the support portion and the hook portion when the connection device is attached to the interface device. The connection unit according to claim 5 .

7. The board support includes a plate-shaped support body portion, A bent portion is provided between the support body portion and the rising portion. The connection unit according to claim 6.

8. The latch mechanism is provided in plurality and spaced apart from one another in the first direction in a plan view. The connection unit according to claim 6.

9. the support portion of each of the plurality of latch mechanisms includes a positioning pin; The board support includes a pin insertion hole through which the positioning pin can be inserted. The connection unit according to claim 8.

10. the number of positioning pins in the plurality of latch mechanisms is different; The pin insertion holes of the board support are provided to correspond to the positioning pins of the plurality of latch mechanisms. The connection unit according to claim 9.

11. the board support includes a handle; The handle protrudes upward from the board cover when the connection device is attached to the interface device. The connection unit according to claim 8.

12. The handles are provided in a plurality of positions spaced apart from one another in a second direction perpendicular to the first direction in a plan view. The connection unit according to claim 11.

13. The connection device is an intermediate plate disposed between the socket board and the board support and spaced apart from both the socket board and the board support; a columnar first connecting member that connects the socket board and the intermediate plate; a columnar second connecting member that connects the intermediate plate and the board support; Including, The intermediate plate is provided with at least one of a recess and an opening. The connection unit according to claim 1 .

14. The second connecting member is a first end member in contact with the intermediate plate; a second end member connecting to the board support; an intermediate member connecting the first end member and the second end member; Including, The hardness of the intermediate member is lower than the hardness of the first end member and the second end member.

14. A connection unit according to claim 13.

15. The intermediate plate is The first board and a second plate attached onto the first plate; Including, The second plate is provided with an insertion hole through which the first connection member is inserted, The first connecting member is attached to the first plate.

14. A connection unit according to claim 13.

16. The second connection member is connected to the first connection member.

14. A connection unit according to claim 13.

17. The length of the second connecting member is longer than the length of the first connecting member. A connection unit according to any one of claims 13 to 16.

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