Inkjet apparatus

Abstract

To provide an ink jet apparatus capable of reducing structural crosstalk generated when ink is ejected.SOLUTION: The ink jet head includes a partition wall for partitioning a pressure chamber for storing ink to be ejected from a nozzle, a diaphragm for pressing the pressure chamber, a first piezoelectric element for pressing a portion of the diaphragm corresponding to the pressure chamber, and a second piezoelectric element for supporting the partition wall in a portion of the diaphragm corresponding to the partition wall, wherein the portion of the diaphragm corresponding to the partition wall has a first cutout portion on a surface perpendicular to a direction in which the first piezoelectric element presses the portion corresponding to the pressure chamber.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present disclosure relates to inkjet devices. [Background technology]

[0002] In recent years, printed electronics, which involves forming electronic devices on demand using inkjet printing, has become increasingly popular.

[0003] The production of electronic devices requires the conversion of a wide variety of materials into inks, and active development is underway to develop piezoelectrically driven inkjet heads that are capable of stably ejecting a wide variety of inks.

[0004] For example, in the inkjet device described in Patent Document 1, a piezoelectric element (PZT: lead zirconate titanate) is deformed when a voltage is applied, which deforms a diaphragm and presses a pressure chamber to eject ink.

[0005] It is known that when an inkjet device ejects ink, pressure fluctuations in a pressure chamber adjacent to a pressure chamber connected to a certain nozzle can cause the partition wall of the flow path of the pressure chamber to deform, affecting the ejection of ink from a certain nozzle, resulting in so-called structural crosstalk. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Laid-Open No. 2012-232290 Summary of the Invention [Problem to be solved by the invention]

[0007] However, a wide variety of inks are used in the production of electronic devices, and some of these inks are highly viscous. When an inkjet device ejects highly viscous ink, the pressure fluctuations in the pressure chambers become large, which can lead to significant structural crosstalk, resulting in poor ink ejection and distorted print patterns, which can degrade print quality.

[0008] Non-limiting examples of the present disclosure contribute to providing an inkjet device capable of reducing structural crosstalk that occurs when ink is ejected. [Means for solving the problem]

[0009] An inkjet device according to one embodiment of the present disclosure includes a partition wall separating pressure chambers that store ink ejected from nozzles, a diaphragm that presses the pressure chambers, a first piezoelectric element that presses a portion of the diaphragm that corresponds to the pressure chambers, and a second piezoelectric element that supports the partition wall at a portion of the diaphragm that corresponds to the partition wall, wherein the portion of the diaphragm that corresponds to the partition wall has a first notch portion on a surface perpendicular to the direction in which the first piezoelectric element presses the portion that corresponds to the pressure chamber.

[0010] An inkjet device according to one embodiment of the present disclosure includes a partition wall separating pressure chambers that store ink ejected from nozzles, a diaphragm that presses the pressure chambers, a first piezoelectric element that presses a portion of the diaphragm that corresponds to the pressure chambers, a second piezoelectric element that supports the partition wall at a portion of the diaphragm that corresponds to the partition wall, and a base that fixes the first piezoelectric element and the second piezoelectric element on the side opposite the diaphragm and has a notch on a surface perpendicular to the direction in which the first piezoelectric element presses the portion that corresponds to the pressure chamber. [Effects of the Invention]

[0011] According to an embodiment of the present disclosure, it is possible to provide an inkjet device capable of reducing structural crosstalk that occurs when ink is ejected.

[0012] Further advantages and benefits of an embodiment of the present disclosure will become apparent from the specification and drawings. Such advantages and / or benefits may be provided by some of the embodiments and features described in the specification and drawings, respectively, but not necessarily all of them may be provided to obtain one or more identical features. [Brief explanation of the drawings]

[0013] [Figure 1] 1 is a schematic diagram showing the appearance of an inkjet device according to a first embodiment; [Figure 2] FIG. 1 is an exploded perspective view showing the appearance of an inkjet head according to a first embodiment; [Figure 3] FIG. 1 is a diagram illustrating an example of the configuration of a discharge head according to a first embodiment. [Figure 4] FIG. 1 is a diagram showing an example of an XZ cross section of a discharge head according to a first embodiment. [Figure 5] FIG. 10 is a diagram showing a triangular cutout portion according to the first embodiment. [Figure 6] FIG. 10 is a diagram showing an R-shaped notch according to the first embodiment. [Figure 7] 1 is a view of a discharge head according to a first embodiment, viewed from the nozzle side; [Figure 8] FIG. 10 is a diagram showing a cutout portion according to a first modified example. [Figure 9] FIG. 10 is a diagram showing a cutout portion according to a second modified example. [Figure 10] FIG. 10 is a diagram showing an example of an XZ cross section of a discharge head according to a second embodiment. [Figure 11] FIG. 10 is a diagram showing a triangular cutout portion according to a second embodiment. [Figure 12] FIG. 10 is a diagram showing an R-shaped notch according to a second embodiment. [Figure 13] FIG. 10 is a view of a discharge head according to a second embodiment, viewed from the base side; DETAILED DESCRIPTION OF THE INVENTION

[0014] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings as appropriate. However, more detailed explanation than necessary may be omitted. For example, detailed explanation of already well-known matters or redundant explanation of substantially identical configurations may be omitted. This is to avoid unnecessary redundancy in the following explanation and to facilitate understanding by those skilled in the art.

[0015] The accompanying drawings and the following description are provided to enable those skilled in the art to fully understand the present disclosure, and are not intended to limit the subject matter described in the claims.

[0016] First Embodiment The inkjet device 1 will be described with reference to Fig. 1. Fig. 1 is a plan view of the inkjet device 1 according to the first embodiment. As shown in Fig. 1, the widthwise direction of the inkjet device 1 is the X direction, the lengthwise direction is the Y direction, and the direction perpendicular to the X and Y directions is the Z direction.

[0017] The inkjet device 1 includes a base 2, a guide 3, a conveying table 4, a gate-shaped gantry 5 as an example of a support member, a line head 6, and a drive unit 8.

[0018] The base 2 is configured as a rectangular parallelepiped having a rectangular planar shape that is long in the scanning direction.

[0019] The guide 3 is fixed to the upper surface of the base 2 along the longitudinal direction (Y direction) of the base 2, i.e., along the scanning direction. As an example, the guide 3 is made of a member having a rectangular parallelepiped shape with a rectangular cross section along a direction perpendicular to the scanning direction.

[0020] The conveying table 4 has a rectangular shape, and its lower surface (the surface on the -Z side) contacts the guide 3. The conveying table 4 is guided by the guide 3 and conveyed in the scanning direction of the base 2. A printing object 7 such as a substrate is placed on the conveying table 4.

[0021] The gantry 5 has a gate-like shape and is fixed to a predetermined position, for example, a middle position, of the base 2 so as to straddle the base 2 in the short direction in a plan view (when viewed from the +Z side).

[0022] The line head 6 is an example of an ejection head, and is supported by the gantry 5. The line head 6 ejects ink toward the conveying table 4 in synchronization with the timing at which the conveying table 4 passes under the line head 6. The ink is applied to an application area of ​​a printing target 7 placed on the conveying table 4.

[0023] 1, two types of line heads 6 are arranged on each side of the gantry 5, but only one line head 6 may be arranged on the gantry 5, or two gantries 5 may be arranged with a total of four line heads 6 arranged on each side of each gantry 5. The number and arrangement of the line heads 6 may be changed depending on the processing to be performed by the line heads 6 on the printing object 7.

[0024] In addition, in order to drive the conveying table 4 in the scanning direction, at least one driving unit 8 is arranged on the base 2 along the scanning direction and connected to the conveying table 4, making it possible to drive and convey the conveying table 4 in the scanning direction.

[0025] 1, as an example of the drive unit 8, two drive units 8 are arranged on the base 2 along the scanning direction near both ends of the inkjet device 1 in the short side direction. Each drive unit 8 may be a linear motor, or may be a ball screw connected to a rotary motor, etc. In this configuration, a drive unit 8 using a linear motor is shown as an example.

[0026] The discharge head 20 will be described with reference to Fig. 2. Fig. 2 is an exploded perspective view showing the appearance of the discharge head 20 according to the first embodiment. As shown in Fig. 2, the longitudinal direction of the discharge head 20 is the X direction, the lateral direction is the Y direction, and the direction perpendicular to the X direction and Y direction is the Z direction.

[0027] As shown in FIG. 2, the ejection head 20 includes a nozzle plate 21, a flow path plate 22, a diaphragm 23, a housing 24, and a pressure fluctuation unit 25.

[0028] The nozzle plate 21 is disposed so that its plate surface is perpendicular to the Z direction. The nozzle plate 21 is made of a stainless steel plate formed by, for example, etching or press working. The thickness of the stainless steel plate is, for example, 100 micrometers. Nozzles 34 that eject ink are formed in the nozzle plate 21 along the Y direction.

[0029] The flow path plate 22 has a rectangular parallelepiped shape and is disposed on the +Z side of the nozzle plate 21 so that its plate surface is perpendicular to the Z direction. The flow path plate 22 is sandwiched between the diaphragm 23 and the nozzle plate 21. The flow path plate 22 is a laminate of stainless steel plates formed by, for example, etching or press working. The thickness of each stainless steel plate is, for example, 10 to 100 micrometers, and the number of laminated layers is, for example, 3 to 10.

[0030] The diaphragm 23 is disposed on the +Z side of the flow path plate 22 so that its plate surface is perpendicular to the Z direction. The diaphragm 23 is sandwiched between the housing 24 and the flow path plate 22. The diaphragm 23 is, for example, a thin film having a thickness of 5 to 50 micrometers, and is produced by, for example, electroplating a nickel alloy.

[0031] The housing 24 has a rectangular parallelepiped shape and is disposed on the +Z side of the diaphragm 23. The housing 24 has a thickness of 1 centimeter in the Z direction, for example. The housing 24 is produced by cutting an alloy steel such as stainless steel.

[0032] The pressure fluctuation unit 25 is housed in the housing 24, and generates pressure fluctuations by pressurizing the ink stored in the pressure chamber 33. The pressure fluctuation unit 25 has, for example, a control board on which a control IC or the like is mounted, and the control board individually controls the voltages applied to the piezoelectric elements 38a and 38b shown in FIG.

[0033] The nozzle plate 21 and the flow path plate 22, the flow path plate 22 and the diaphragm 23, the diaphragm 23 and the housing 24, and the diaphragm 23 and the pressure fluctuation unit 25 are each bonded and fixed with an adhesive. For example, an epoxy adhesive having thermosetting properties is used as the adhesive. The adhesives used to bond the respective components may be the same adhesive or different adhesives. For example, a rubber adhesive and an epoxy adhesive may be used in combination.

[0034] The schematic configuration of the ejection head 20 will be described with reference to Fig. 3. Fig. 3 is a diagram showing an example of the configuration of the ejection head 20 according to the first embodiment.

[0035] The ejection head 20 has an ink supply channel 31 , an ink discharge channel 32 , a pressure chamber 33 , a nozzle 34 , a partition wall 35 , an ink inlet channel 36 , and an ink outlet channel 37 .

[0036] The ink supply flow path 31 and the ink discharge flow path 32 are arranged along the X direction of the ejection head 20. The ink supply flow path 31 and the ink discharge flow path 32 are also arranged to face each other in the Y direction of the ejection head 20.

[0037] The pressure chamber 33 is disposed between the ink supply channel 31 and the ink discharge channel 32. A plurality of pressure chambers 33 are disposed in the X direction.

[0038] The ink supplied to the ink supply flow path 31 is supplied to the pressure chamber 33 via the ink inlet flow path 36 that communicates with the pressure chamber 33 by the negative pressure that is generated in the pressure chamber 33 when the piezoelectric elements 38a and 38b contract from their expanded state. Some of the ink supplied to the pressure chamber 33 is ejected from the nozzle 34 by the pressure applied to the pressure chamber 33 due to the expansion of the piezoelectric elements 38a and 38b, and the remainder is discharged to the ink discharge flow path 32 via the ink outlet flow path 37 that communicates with the pressure chamber 33. The ink in the ink discharge flow path 32 is supplied again to the ink supply flow path 31.

[0039] The nozzles 34 are through holes provided in the nozzle plate 21, and communicate the inside and outside of the pressure chambers 33. The nozzles 34 are provided corresponding to the pressure chambers 33. Furthermore, ink is ejected from the nozzles 34 in the −Z direction.

[0040] Furthermore, in the Y direction, the nozzle 34 is provided on the ink outlet flow path 37 side (+Y side) of the pressure chamber 33. This configuration is effective for smoothly ejecting ink from the nozzle 34 and discharging ink to the ink outlet flow path 37.

[0041] A plurality of partition walls 35 are arranged in the X direction. The partition walls 35 separate the pressure chambers 33 that store the ink ejected from the nozzles 34.

[0042] The schematic configuration of the discharge head 20 in an XZ cross section will be described with reference to Fig. 4. Fig. 4 is a diagram showing an example of an XZ cross section of the discharge head 20 according to the first embodiment (for example, a cross section taken along line AA in Fig. 3).

[0043] The pressure chamber 33 is composed of a nozzle plate 21, a partition wall 35, and a diaphragm 23. The nozzle plate 21 constitutes the lower (-Z side) wall of the pressure chamber 33. The partition wall 35 constitutes the left (+X side) and right (-X side) walls of the pressure chamber 33. The diaphragm 23 constitutes the upper (+Z side) wall of the pressure chamber 33.

[0044] A plurality of piezoelectric elements 38a and 38b are arranged alternately in the X direction. Piezoelectric element 38a (first piezoelectric element) is arranged in a portion of diaphragm 23 corresponding to pressure chamber 33. Piezoelectric element 38a presses the portion corresponding to pressure chamber 33 via diaphragm 23.

[0045] The piezoelectric element 38b (second piezoelectric element) is disposed in a portion of the diaphragm 23 that corresponds to the partition wall 35. The piezoelectric element 38b supports the portion that corresponds to the partition wall 35 via the diaphragm 23.

[0046] The base 39 fixes a plurality of piezoelectric elements 38a and 38b arranged in the X direction on the side opposite to the diaphragm 23. For example, the base 39 has the same composition as the piezoelectric elements 38a and 38b, and is molded integrally with the piezoelectric elements 38a and 38b.

[0047] The notch 50 (first notch) is provided on the partition wall 35 side (-Z side) of the diaphragm 23. The notch 50 is arranged in a portion corresponding to a joint 51 that joins the diaphragm 23 to a plurality of partition walls 35 arranged in the X direction. For example, the notch 50 has a rectangular shape, and a cavity is formed between the diaphragm 23 and the joint 51. The notch 50 forms a cavity in the portion of the diaphragm 23 that corresponds to the partition wall 35.

[0048] For example, the notches 50 are arranged at equal intervals in the X direction so that their centers in the X direction, the centers of the partition walls 35 in the X direction, and the centers of the piezoelectric elements 38b in the X direction coincide with each other. The notches 50 may also be called grooves or recesses.

[0049] The notch 50 may be provided on the piezoelectric element 38b side (+Z side) of the diaphragm 23. The notch 50 may also be provided on both the partition wall 35 side and the piezoelectric element 38b side of the diaphragm 23.

[0050] That is, the diaphragm 23 may have a notch 50 in the surface of the portion corresponding to the partition wall 35 that is perpendicular to the direction in which the piezoelectric element 38 a presses the portion corresponding to the pressure chamber 33 .

[0051] The bonding portion 51 is bonded to the diaphragm 23 and the partition wall 35 with an adhesive. The bonding portion 51 is an elastic member made of an organic material such as a fluorine compound, a silicon compound, urethane, or epoxy. The bonding portion 51 may be produced using a printing method such as screen printing or transfer printing. As an example of the characteristics, the Young's modulus of the material constituting the bonding portion 51 is 10 GPa or less.

[0052] 4, the width in the X direction of the partition wall 35 is W, the width in the X direction of the cutout portion 50 is Wd, the height in the Z direction of the diaphragm 23 is H, and the height in the Z direction of the cutout portion 50 is Hd.

[0053] It is preferable that the ratio of the width Wd of the cutout portion 50 to the width W of the partition wall 35 is 0.1 or more and 0.8 or less, and the ratio of the height Hd of the cutout portion 50 to the height H of the diaphragm 23 is 0.2 or more and 0.6 or less.

[0054] As shown in Fig. 5, the diaphragm 23 may have a notch 50a whose XZ cross section is triangular. Also, as shown in Fig. 6, the diaphragm 23 may have a notch 50b whose XZ cross section is arc-shaped.

[0055] The notches 50a and 50b may be provided on the piezoelectric element 38b side of the diaphragm 23. The notches 50a and 50b may also be provided on both the partition wall 35 side of the diaphragm 23 and the piezoelectric element 38b side.

[0056] The length of the cutout portion 50 in the Y direction will be described with reference to Fig. 7. Fig. 7 is a plan view of the ejection head 20 according to the first embodiment, as viewed from the nozzle 34 side.

[0057] The piezoelectric elements 38a and the piezoelectric elements 38b are arranged alternately in the X direction. In a plan view from the nozzle 34 side (-Z side) of the ejection head 20, the cutout portion 50 preferably has a portion that overlaps with the piezoelectric element 38b that supports the partition wall 35, and has a portion that protrudes beyond the piezoelectric element 38b in the +Y direction and the -Y direction.

[0058] That is, it is preferable that the length Li of the notch 50 in the Y direction, in which the ink supply flow path 31 that supplies the ink to the pressure chamber 33 and the ink discharge flow path 32 that discharges the ink from the pressure chamber 33 face each other, is longer than the length Lp of the piezoelectric element 38b (Li>Lp).

[0059] Let the overhang length with respect to the piezoelectric element 38b on the ink inlet channel 36 side of the notch 50 be Ldin, and the overhang length with respect to the piezoelectric element 38b on the ink outlet channel 37 side of the notch 50 be Ldout.

[0060] The overhang length Ldin on the ink inlet channel 36 side is preferably 50 micrometers or more and 200 micrometers or less. Also, the overhang length Ldout on the ink outlet channel 37 side is preferably 50 micrometers or more and 200 micrometers or less.

[0061] Also, the ratio (Ldout / Ldin) of the overhang length Ldout on the ink outlet channel 37 side to the overhang length Ldin on the ink inlet channel 36 side is preferably 1 or more and 10 or less.

[0062] In the first embodiment, a notch 50 is provided in a portion corresponding to the partition wall 35 of the diaphragm 23, and a cavity is formed between the partition wall 35 and the diaphragm 23. For this reason, in the inkjet device 1, the stress due to the deformation of the diaphragm 23 during ink ejection is dispersed, and the vibration transmitted to the partition wall 35 can be reduced. Therefore, the inkjet device 1 can reduce structural crosstalk and can achieve high printing quality even when using high-viscosity ink.

[0063] As shown in FIG. 7, the length Li in the Y direction of the notch 50 is preferably longer than the length Lp in the Y direction of the piezoelectric element 38b (Li > Lp), but even if the length Li in the Y direction of the notch 50 is shorter than the length Lp in the Y direction of the piezoelectric element 38b (Li < Lp), the above-described effects can be obtained. Regardless of the size and shape, the inkjet device 1 including the diaphragm 23 provided with the notch 50 can obtain the above-described effects.

[0064] (First Modified Example) Referring to FIG. 8, the first modified example will be described. FIG. 8 is a diagram showing a notch 501 according to the first modified example.

[0065] Unlike the notch 50 of the first embodiment, the notch 501 is filled with the same material as that of the joint 51. For example, the joint 51 is made of the first elastic member.

[0066] In the first modified example, the notch 501 is filled with the same material as the joint 51, and may therefore be molded integrally with the joint 51. The notch 501 is filled with a first elastic member that constitutes the joint 51 in a portion of the diaphragm 23 that corresponds to the partition wall 35. The first elastic member is a member that is softer and more easily deformed than, for example, the material (e.g., nickel alloy) that constitutes the diaphragm 23.

[0067] In the first modified example, a notch 501 filled with a first elastic member is provided in a portion of the diaphragm 23 corresponding to the partition wall 35. Therefore, the notch 501 has a structure that is softer and more easily deformed than the diaphragm 23. This allows the inkjet device 1 to distribute stress caused by deformation of the diaphragm 23 during ink ejection, reducing vibrations transmitted to the partition wall 35 and reducing structural crosstalk.

[0068] Furthermore, in the first modified example, the notch portion 501 and the joint portion 51 can be integrally molded, which can increase the strength and durability of the joint portion between the notch portion 501 and the joint portion 51. As a result, the inkjet device 1 can maintain the strength of the portion of the diaphragm 23 that corresponds to the partition wall 35, while dispersing stress caused by deformation of the diaphragm 23 during ink ejection, thereby reducing vibration transmitted to the partition wall 35. As a result, the inkjet device 1 can reduce structural crosstalk.

[0069] (Second Modification) A second modified example will be described with reference to Fig. 9. Fig. 9 is a diagram showing a notch 502 according to the second modified example. For example, the joint 51 is made of a first elastic member.

[0070] Unlike the notch 501 of the first modified example, the notch 502 is filled with a material different from the material that constitutes the joint 51.

[0071] In the second modified example, the cutout portion 502 is filled with a second elastic member different from the first elastic member constituting the joint portion 51 in a portion of the diaphragm 23 corresponding to the partition wall 35. The second elastic member is, for example, a member that is softer and more easily deformed than the first elastic member. For example, the cutout portion 502 is adhered and fixed to the joint portion 51 with an adhesive.

[0072] In the second modified example, a notch 502 filled with a second elastic member that is softer and more easily deformed than the first elastic member is provided in a portion of the diaphragm 23 that corresponds to the partition wall 35. As a result, the notch 502 has a structure that is softer and more easily deformed than the joint 51 and the diaphragm 23. This allows the inkjet device 1 to distribute stress caused by deformation of the diaphragm 23 during ink ejection, reducing vibrations transmitted to the partition wall 35 and reducing structural crosstalk.

[0073] Furthermore, in the second modified example, the notch 502 is filled with the second elastic member, and therefore, unlike the first embodiment, no cavity is formed between the partition wall 35 and the diaphragm 23. This makes it possible to increase the strength and durability of the joint between the notch 502 and the joint 51. As a result, the inkjet device 1 can maintain the strength and durability of the portion of the diaphragm 23 that corresponds to the partition wall 35, while dispersing stress caused by deformation of the diaphragm 23 during ink ejection and reducing vibration transmitted to the partition wall 35. This makes it possible for the inkjet device 1 to reduce structural crosstalk.

[0074] <Second embodiment> A schematic configuration of the discharge head 20 according to the second embodiment in an XZ cross section will be described with reference to Fig. 10. Fig. 10 is a diagram showing an example of the XZ cross section of the discharge head 20 according to the second embodiment (for example, a cross section taken along line AA in Fig. 3).

[0075] In the second embodiment, the notch 60 (second notch) is provided on the opposite side (+Z side) of the base 39 to where the piezoelectric element 38b is arranged. The notch 60 is arranged in a portion corresponding to the plurality of piezoelectric elements 38b arranged in the X direction.

[0076] Furthermore, for example, the notches 60 have a rectangular groove shape and are arranged at equal intervals in the X direction so that their centers in the X direction coincide with the centers of the piezoelectric elements 38b in the X direction and the centers of the partition walls 35 in the X direction. The notches 60 may also be called grooves or recesses.

[0077] The notch 60 may be provided on the piezoelectric element 38b side (-Z side) of the base 39. The notch 60 may also be provided on both the piezoelectric element 38b side of the base 39 and the opposite side where the piezoelectric element 38b is disposed.

[0078] That is, the base 39 may have a notch 60 in the portion corresponding to the piezoelectric element 38b on the surface perpendicular to the direction in which the piezoelectric element 38a presses the portion corresponding to the pressure chamber 33.

[0079] The width of piezoelectric element 38b in the X direction is W0, the height of base 39 in the Z direction is H0, the width of notch 60 in the X direction is Wp, and the height of notch 60 in the Z direction is Hp.

[0080] The ratio of the width Wp of the cutout 60 to the width W0 of the piezoelectric element is preferably 0.1 or more and 0.8 or less. Also, the ratio of the height Hp of the cutout 60 to the height H0 of the piezoelectric element is preferably 0.2 or more and 0.8 or less.

[0081] 11, the base 39 may have a notch 60a whose XZ cross section is triangular. Also, as shown in Fig. 12, the base 39 may have a notch 60b whose XZ cross section is arc-shaped.

[0082] The length of the cutout portion 60 in the Y direction will be described with reference to Fig. 13. Fig. 13 is a plan view of the ejection head 20 according to the second embodiment, as viewed from the base portion 39 side.

[0083] The piezoelectric elements 38a and the piezoelectric elements 38b are arranged alternately in the X direction. The notch 60 has a portion that overlaps with the piezoelectric element 38b that supports the partition wall 35 in the Z direction. In a plan view from the base 39 side of the ejection head 20, the notch 60 has the same length in the Y direction as the piezoelectric element 38b. The notch 60 is constructed on the +Z side surface of the base 39 over the entire Y direction.

[0084] If the length of the piezoelectric element 38b in the Y direction is Lp and the length of the notch 60 in the Y direction is Lj, the length Lj of the notch 60 in the Y direction is equal to the length Lp of the piezoelectric element 38b in the Y direction (Lj=Lp). The maximum value of Lj is Lp.

[0085] In the second embodiment, the groove-shaped cutout portion 60 disperses stress caused by deformation of the diaphragm 23 during ink ejection, thereby reducing vibration transmitted to the partition wall 35. This configuration allows the inkjet device 1 to reduce structural crosstalk.

[0086] 13, it is preferable that the length Lj of the cutout 60 in the Y direction is equal to the length Lp of the piezoelectric element 38b in the Y direction, but even if the length Lj of the cutout 60 in the Y direction is shorter than the length Lp of the piezoelectric element 38b in the Y direction, the inkjet device 1 can reduce structural crosstalk. Regardless of the size or shape, the inkjet device 1 including the base 39 provided with the cutout 60 can obtain the above-mentioned effects.

[0087] <Summary of the embodiment> As described above, the inkjet device of this embodiment comprises a partition wall separating pressure chambers that store ink ejected from nozzles, a diaphragm that presses the pressure chamber, a first piezoelectric element that presses the portion of the diaphragm that corresponds to the pressure chamber, and a second piezoelectric element that supports the partition wall at the portion of the diaphragm that corresponds to the partition wall, and the portion of the diaphragm that corresponds to the partition wall has a first notch portion on a surface perpendicular to the direction in which the first piezoelectric element presses the portion that corresponds to the pressure chamber.

[0088] With this configuration, the inkjet device 1 can disperse stress caused by deformation of the diaphragm 23 when ink is ejected, and reduce vibrations transmitted to the partition wall 35. This reduces structural crosstalk that occurs when ink is ejected. The inkjet device 1 can reduce structural crosstalk that occurs when ejecting a wide variety of inks (for example, high-viscosity inks) used in the manufacture of electronic devices, and can achieve high print quality.

[0089] In the above-described embodiments, the notation "... part" used for each component may be replaced with other notations such as "... assembly," "... device," "... unit," or "... module."

[0090] Although the embodiments have been described above with reference to the drawings, the present disclosure is not limited to such examples. It is clear that a person skilled in the art can conceive of various modifications or alterations within the scope of the claims. It is understood that such modifications or alterations also fall within the technical scope of the present disclosure. Furthermore, the components of the embodiments may be combined in any manner without departing from the spirit of the present disclosure. [Industrial Applicability]

[0091] The present disclosure is useful as an inkjet device. [Explanation of symbols]

[0092] 1. Inkjet device 2 bases 3 Guide 4 Transport table 5 Gantry 6 Line Head 7 Printing material 8 Drive unit 20 Discharge head 21 Nozzle plate 22 Flow path plate 23 Diaphragm 24 Housing 25 Pressure fluctuation section 31 Ink supply channel 32 Ink discharge channel 33 Pressure Chamber 34 nozzles 35 Bulkhead 36 Ink inlet channel 37 Ink outlet channel 38a Piezoelectric element 38b Piezoelectric element 39 Base 50 Notch 50a Notch 50b Notch 51 Joint 60 Notch 60a Notch 60b Notch 501 Notch 502 Notch

Claims

1. a partition wall separating pressure chambers that store ink to be ejected from the nozzles; a diaphragm that presses the pressure chamber; a first piezoelectric element that presses a portion of the diaphragm that corresponds to the pressure chamber; a second piezoelectric element supporting the partition wall at a portion of the diaphragm corresponding to the partition wall; Equipped with a portion of the diaphragm corresponding to the partition wall has a first notch on a surface perpendicular to a direction in which the first piezoelectric element presses the portion corresponding to the pressure chamber; Inkjet device.

2. the partition wall and the diaphragm are joined by a joint, The first notch is filled with the same material as the material constituting the joint. The inkjet device according to claim 1 .

3. the partition wall and the diaphragm are joined by a joint, The first cutout portion is filled with a material different from the material constituting the joint portion. The inkjet device according to claim 1 .

4. a length of the first cutout portion in a first direction in which an ink supply flow path that supplies the ink to the pressure chamber and an ink discharge flow path that discharges the ink from the pressure chamber face each other is longer than a length of the first piezoelectric element; The inkjet device according to claim 1 .

5. a base portion that fixes the first piezoelectric element and the second piezoelectric element on the side opposite to the diaphragm, the base portion has a second notch portion on a surface perpendicular to a second direction in which the first piezoelectric element presses the portion corresponding to the pressure chamber; The inkjet device according to claim 4 .

6. The length of the second cutout portion in the first direction is equal to the length of the second piezoelectric element. The inkjet device according to claim 5 .

7. a partition wall separating pressure chambers that store ink to be ejected from the nozzles; a diaphragm that presses the pressure chamber; a first piezoelectric element that presses a portion of the diaphragm that corresponds to the pressure chamber; a second piezoelectric element supporting the partition wall at a portion of the diaphragm corresponding to the partition wall; a base portion that fixes the first piezoelectric element and the second piezoelectric element on the side opposite to the diaphragm, and that has a notch portion on a surface perpendicular to a direction in which the first piezoelectric element presses a portion corresponding to the pressure chamber; Equipped with Inkjet device.

8. a length of the notch in the direction is equal to a length of the second piezoelectric element; The inkjet device according to claim 7 .

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