Sensor

Abstract

To provide a sensor capable of improving characteristics.SOLUTION: According to one embodiment, a sensor includes a base body, a first fixed part fixed to the base body, and an element part supported by the first fixed part. The element part includes a first electrode, a second electrode, an element layer, and a first member. The element layer is provided between the base body and the first member. The element layer includes a first region and a second region. The first electrode is provided between the first region and the first member. The second electrode is provided between the second region and the first member. A first gap is provided between the base and the element layer. The element layer includes a central region including an element layer center in a first plane crossing a first direction from the base to the first fixing part. The first electrode has a spiral shape around a first point included in the central region. The second electrode has a spiral shape around a second point included in the central region.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD OF THE INVENTION An embodiment of the present invention relates to a sensor. [Background technology]

[0002] For example, there is a sensor that detects a target such as gas, and it is desirable to improve the characteristics of the sensor. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6896679 Summary of the Invention [Problem to be solved by the invention]

[0004] Embodiments of the present invention provide sensors that allow for improved performance. [Means for solving the problem]

[0005] According to an embodiment of the present invention, a sensor includes a base, a first fixing portion fixed to the base, and an element portion supported by the first fixing portion. The element portion includes a first electrode, a second electrode, an element layer, and a first member. The element layer is provided between the base and the first member. The element layer includes a first region and a second region. The first electrode is provided between the first region and the first member. The second electrode is provided between the second region and the first member. A first gap is provided between the base and the element layer. The element layer includes a central region including a center of the element layer in a first plane intersecting a first direction from the base to the first fixing portion. The first electrode is spiral-shaped with a first point included in the central region as its center. The second electrode is spiral-shaped with a second point included in the central region as its center. [Brief explanation of the drawings]

[0006] [Figure 1] FIG. 1 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 2] FIG. 2 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 3] FIG. 3 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 4] FIG. 4 is a schematic plan view illustrating the sensor according to the second embodiment. [Figure 5] FIG. 5 is a schematic plan view illustrating the sensor according to the second embodiment. [Figure 6] FIG. 6 is a schematic plan view illustrating the sensor according to the second embodiment. [Figure 7] FIG. 7 is a schematic plan view illustrating the sensor according to the third embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios may be different depending on the drawing. In this specification and in each drawing, elements similar to those previously described with reference to the previous drawings are designated by the same reference numerals, and detailed descriptions thereof will be omitted where appropriate.

[0008] (First embodiment) FIG. 1 is a schematic plan view illustrating the sensor according to the first embodiment. FIG. 2 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. FIG. 2 is a cross-sectional view taken along line A1-A2 in FIG. 1 and 2, a sensor 110 according to this embodiment includes a base 50s, a first fixing portion 31F, and an element portion 20E. The first fixing portion 31F is fixed to the base 50s. The element portion 20E is supported by the first fixing portion 31F.

[0009] The element section 20E includes a first electrode 11, a second electrode 12, an element layer 20, and a first member 40. The element layer 20 is provided between the base 50s and the first member 40. The element layer 20 includes a first region 21 and a second region 22. The first electrode 11 is provided between the first region 21 and the first member 40. The second electrode 12 is provided between the second region 22 and the first member 40.

[0010] A first gap g1 is provided between the base 50s and the element layer 20. A first direction D1 from the base 50s to the first fixing portion 31F is defined as the Z-axis direction. A direction perpendicular to the Z-axis direction is defined as the X-axis direction. A direction perpendicular to the Z-axis direction and the X-axis direction is defined as the Y-axis direction. The element layer 20 is substantially aligned along the XY plane.

[0011] In the Z-axis direction (first direction D1), a region overlapping with the first electrode 11 corresponds to the first region 21. In the Z-axis direction, a region overlapping with the second electrode 12 corresponds to the second region 22.

[0012] 1, the element layer 20 includes a central region 20r. The central region 20r includes an element layer center 20c of the element layer 20 in a first plane PL1 that intersects with the first direction D1. As shown in FIG. 1, the first electrode 11 has a spiral shape centered on a first point 11c included in the central region 20r. The second electrode 12 has a spiral shape centered on a second point 12c included in the central region 20r.

[0013] The position of the second point 12c on the first plane PL1 may be substantially the same as the position of the first point 11c on the first plane PL1. The position of the first point 11c may be substantially the same as the element layer center 20c. The position of the second point 12c may be substantially the same as the element layer center 20c.

[0014] In the embodiment, the first electrode 11 is spatially separated from the second electrode 12. A first member 40 may be provided in at least a part of the region between the first electrode 11 and the second electrode 12. The characteristics of the first member 40 change depending on the detection target present around the element unit 20E. In response to the change in the characteristics of the first member 40, the electrical resistance between the first electrode 11 and the second electrode 12 changes depending on the detection target. The detection target can be detected by detecting the change in electrical resistance. The detection target is, for example, a gas or a liquid.

[0015] In this way, the first electrode 11 and the second electrode 12 are configured so that the electrical resistance between the first electrode 11 and the second electrode 12 changes depending on the detection target around the element portion 20E. The detection target may include, for example, hydrogen. The sensor 110 may be, for example, a gas sensor.

[0016] As described above, in the embodiment, the first electrode 11 and the second electrode 12 are spiral-shaped. This makes it easier to uniformize the characteristics of the element unit 20E including these electrodes in the circumferential direction around the element layer center 20c. For example, compared to the first reference example in which the first electrode 11 and the second electrode 12 are linear and extend in one direction, the characteristics of the element unit 20E are easier to uniformize. For example, the temperature distribution in the element unit 20E is easier to uniformize. This stabilizes the electrical resistance. Stable, highly accurate detection results are easier to obtain. Highly sensitive detection results are easier to obtain. In the embodiment, it is possible to provide a sensor whose characteristics can be improved.

[0017] 1, in the sensor 110, the element layer 20 includes an outer edge 20R. The outer edge 20R is an edge of the element layer 20 on the first plane PL1. In a first axis direction Da1 from the first point 11c to a portion of the outer edge 20R, a portion of the first electrode 11 is between a portion of the second electrode 12 and another portion of the second electrode 12. In the first axis direction Da1, a portion of the second electrode 12 is between a portion of the first electrode 11 and another portion of the first electrode 11.

[0018] As described above, the first gap g1 is provided between the base body 50s and the element layer 20. This can prevent heat from dissipating from the element layer 20. For example, the characteristics of the change in electrical resistance are stabilized. The sensor 110 may have, for example, a MEMS (Micro Electro Mechanical Systems) structure.

[0019] The first member 40 may be formed by, for example, a coating method. This allows the first member 40 to be easily formed on the element layer 20 of the MEMS structure. In the coating method, a liquid that will become the first member 40 is applied onto the element layer 20 and the electrodes. The liquid tends to spread evenly over the element layer 20 along the spiral shape of the first electrode 11 and the second electrode 12.

[0020] On the other hand, in the first reference example in which the first electrode 11 and the second electrode 12 are linear and extend in one direction, the liquid tends to spread anisotropically due to the direction in which the electrodes extend. Therefore, the planar shape of the resulting first member 40 tends to be anisotropic, making it difficult to obtain the desired shape. It is also difficult to stably obtain the desired electrical resistance.

[0021] In contrast, in an embodiment in which the first electrode 11 and the second electrode 12 are provided in a spiral shape, the liquid that becomes the first member 40 tends to spread uniformly. This makes it easier to obtain a first member 40 with a stable shape. This allows stable, highly accurate detection results to be obtained.

[0022] FIG. 3 is a schematic plan view illustrating the sensor according to the first embodiment. 3, in the sensor 110, the element layer 20 has a first length L1 and a second length L2. The first length L1 is the length of the element layer 20 along a first axis direction Da1. The second length L2 is the length of the element layer 20 along a second axis direction Da2. The second axis direction Da2 is along a first plane PL1, passes through a first point 11c, and is perpendicular to the first axis direction Da1.

[0023] The first member 40 has a third length L3 and a fourth length L4. The third length L3 is the length of the first member 40 along the first axis direction Da1. The fourth length L4 is the length of the element layer 20 along the second axis direction Da2. In the embodiment, the first ratio is preferably 0.8 to 1.2 times the second ratio. The first ratio is the ratio of a first absolute value of a first difference between the first length L1 and the second length L2 to the first length L1. The second ratio is the ratio of a second absolute value of a second difference between the third length L3 and the fourth length L4 to the third length L3. In the embodiment, the second ratio may be substantially the same as the first ratio.

[0024] For example, the planar shape of the first member 40 may be substantially the same as the planar shape of the element layer 20. The first member 40 is formed to extend in accordance with the planar shape of the element layer 20. This makes it easier to obtain stable, highly accurate detection results.

[0025] 2, the element layer 20 may further include a third region 23. In the first direction D1, the third region 23 does not overlap with the first electrode 11 and does not overlap with the second electrode 12. The third region 23 may include a first hole 20h. The first hole 20h penetrates the third region 23 in the first direction D1. For example, a sacrificial layer for forming a first gap g1 between the base 50s and the element layer 20 may be removed through the first hole 20h. For example, the first hole 20h does not overlap with the first electrode 11 and the second electrode 12 in the first direction D1.

[0026] 1 and 2, the sensor 110 may further include a first connecting portion 31c. The first connecting portion 31c is supported by a first fixing portion 31F. The first connecting portion 31c supports the element portion 20E.

[0027] 1 , the sensor 110 may further include a plurality of fixing portions 30F. The plurality of fixing portions 30F may include, for example, a first fixing portion 31F, a second fixing portion 32F, a third fixing portion 33F, a fourth fixing portion 34F, a fifth fixing portion 35F, a sixth fixing portion 36F, a seventh fixing portion 37F, and an eighth fixing portion 38F. The sensor 110 may further include a plurality of connecting portions 30c. The plurality of connecting portions 30c may include, for example, a first connecting portion 31c, a second connecting portion 32c, a third connecting portion 33c, a fourth connecting portion 34c, a fifth connecting portion 35c, a sixth connecting portion 36c, a seventh connecting portion 37c, and an eighth connecting portion 38c.

[0028] One of the plurality of connecting portions 30c is supported by one of the plurality of fixing portions 30F. One of the plurality of connecting portions 30c supports the element portion 20E. The position of the element portion 20E on the first plane PL1 is between the position of one of the plurality of connecting portions 30c on the first plane PL1 and the position of another of the plurality of connecting portions 30c on the first plane PL1.

[0029] In the embodiment, the number of the multiple connecting portions 30c is preferably four or more. The element unit 20E is stably supported. The number may be six or more. The number may be eight or more. More stably supported. By stably supporting the element unit 20E, for example, when forming the first member 40, a liquid that will become the first member 40 can be stably applied onto the element layer 20. As shown in FIG. 2, the sensor 110 may include an insulating member 50L. The insulating member 50L is provided between the base 50s and the fixing portion 30F. The element layer 20 may be insulating. The conductive member connected to the first electrode 11 may pass through one of the multiple connecting portions 30c. The conductive member connected to the second electrode 12 may pass through another of the multiple connecting portions 30c.

[0030] (Second embodiment) FIG. 4 is a schematic plan view illustrating the sensor according to the second embodiment. 4, the electrode pattern in the sensor 120 according to the embodiment is different from that in the sensor 110. Except for this, the configuration of the sensor 120 may be the same as the configuration of the sensor 110.

[0031] 4, the sensor 120 also includes a base 50s, a first fixing portion 31F fixed to the base 50s, and an element portion 20E supported by the first fixing portion 31F. The element portion 20E includes a first electrode 11, a second electrode 12, an element layer 20, and a first member 40. The element layer 20 is provided between the base 50s and the first member 40.

[0032] In the sensor 120, the element layer 20 includes a first region 21 and a second region 22. The first electrode 11 is provided between the first region 21 and the first member 40 (see FIG. 2). The second electrode 12 is provided between the second region 22 and the first member 40 (see FIG. 2). A first gap g1 is provided between the base 50s and the element layer 20 (see FIG. 2).

[0033] 4, in the sensor 120, the element layer 20 includes a central region 20r and an outer edge 20R. The central region 20r includes an element layer center 20c of the element layer 20 in a first plane PL1 that intersects with a first direction D1 from the base 50s to the first fixed portion 31F. The outer edge 20R is located around the central region 20r in the first plane PL1.

[0034] As shown in FIG. 4, the first electrode 11 includes a plurality of first radiating portions 11x. The plurality of first radiating portions 11x extend radially along the first plane PL1, passing through the central region 20r. The second electrode 12 includes a plurality of second radiating portions 12x and arc portions 12y. In the circumferential direction centered on the central region 20r, one of the plurality of second radiating portions 12x is located between one of the plurality of first radiating portions 11x and another of the plurality of first radiating portions 11x. The arc portions 12y are connected to the plurality of second radiating portions 12x. The arc portions 12y extend along the circumferential direction.

[0035] In the sensor 120, the multiple first radiation portions 11x included in the first electrode 11 extend in the radial direction. On the other hand, the arc portion 12y included in the second electrode 12 is provided in the circumferential direction along the outer edge 20R. The multiple second radiation portions 12x connected to the arc portion 12y are interdigitated with the multiple first radiation portions 11x.

[0036] In the sensor 120 as well, the characteristics of the element portion 20E tend to be uniform in the circumferential direction around the element layer center 20c. For example, the temperature distribution in the element portion 20E tends to be uniform. This stabilizes the electrical resistance. Stable, highly accurate detection results tend to be obtained. For example, when the first member 40 is formed by a coating method, the liquid that becomes the first member 40 tends to spread uniformly. A first member 40 with a stable shape is easily obtained. Stable, highly accurate detection results tend to be obtained. Highly sensitive detection results tend to be obtained. In the sensor 120 as well, a sensor whose characteristics can be improved can be provided.

[0037] In the sensor 120, one of the multiple first radiating portions 11x is located between one of the multiple second radiating portions 12x and another of the multiple second radiating portions 12x in the circumferential direction. One of the multiple first radiating portions 11x is located between a part of the arc portion 12y and another part of the arc portion 12y in the radial direction. At least some of the multiple first radiating portions 11x are located between the element layer center 20c and the arc portion 12y.

[0038] In the sensor 120, for example, the radial direction of one of the plurality of first radiating portions 11x may be substantially perpendicular to a corresponding part of the arc portion 12y.

[0039] In the sensor 120, the outer edge 20R may include a plurality of sides 20s. In the sensor 120, the number of the plurality of second radiating portions 12x may be the same as the number of the plurality of sides 20s. This makes it easy to obtain a high degree of symmetry.

[0040] As shown in FIG. 4, the element layer 20 has a first length L1 along a first axis direction Da1 from the element layer center 20c to a portion of the outer edge 20R, and a second length L2 along a second axis direction Da2. The second axis direction Da2 is aligned with a first plane PL1, passes through the element layer center 20c, and is perpendicular to the first axis direction Da1. The first member 40 has a third length L3 along the first axis direction Da1 and a fourth length L4 along the second axis direction Da2. In the sensor 120, the first ratio is, for example, 0.8 to 1.2 times the second ratio. The first ratio is the ratio of a first absolute value of a first difference between the first length L1 and the second length L2 to the first length L1. The second ratio is the ratio of a second absolute value of a second difference between the third length L3 and the fourth length L4 to the third length L3.

[0041] 4, the element layer 20 may further include a third region 23. In the first direction D1, the third region 23 does not overlap with the first electrode 11 and does not overlap with the second electrode 12. The third region 23 may include a first hole 20h that penetrates the third region 23 in the first direction D1.

[0042] FIG. 5 is a schematic plan view illustrating the sensor according to the second embodiment. 5, the electrode pattern in the sensor 121 according to the embodiment is different from that in the sensor 120. Except for this, the configuration of the sensor 121 may be the same as the configuration of the sensor 120.

[0043] In the sensor 121, the first electrode 11 includes an annular portion 11R around the element layer center 20c. A plurality of first radiating portions 11x are connected to the annular portion 11R. The sensor 121 also achieves stable characteristics. In the sensor 121, the first ratio may be 0.8 to 1.2 times the second ratio. The third region 23 may include a first hole 20h.

[0044] FIG. 6 is a schematic plan view illustrating the sensor according to the second embodiment. 6, the electrode pattern in the sensor 122 according to the embodiment is different from that in the sensor 120. Except for this, the configuration of the sensor 122 may be the same as the configuration of the sensor 120 or the sensor 121.

[0045] In the sensor 122, the second electrode 12 includes a center portion 12Z. The center portion 12Z overlaps with the element layer center 20c in the first direction D1. The sensor 122 also achieves stable characteristics. In the sensor 122, the first ratio may be 0.8 to 1.2 times the second ratio. The third region 23 may include a first hole 20h.

[0046] The sensors 120, 121, and 122 may include a plurality of fixing portions 30F. The plurality of fixing portions 30F may include, for example, a first fixing portion 31F, a second fixing portion 32F, a third fixing portion 33F, a fourth fixing portion 34F, a fifth fixing portion 35F, a sixth fixing portion 36F, a seventh fixing portion 37F, and an eighth fixing portion 38F. The sensors 120, 121, and 122 may further include a plurality of connecting portions 30c. The plurality of connecting portions 30c may include, for example, a first connecting portion 31c, a second connecting portion 32c, a third connecting portion 33c, a fourth connecting portion 34c, a fifth connecting portion 35c, a sixth connecting portion 36c, a seventh connecting portion 37c, and an eighth connecting portion 38c.

[0047] In sensors 120, 121, and 122, one of the plurality of connecting portions 30c is supported by one of the plurality of fixing portions 30F. One of the plurality of connecting portions 30c supports an element portion 20E. The position of the element portion 20E on the first plane PL1 is between the position of one of the plurality of connecting portions 30c on the first plane PL1 and the position of another of the plurality of connecting portions 30c on the first plane PL1.

[0048] In the sensors 120, 121, and 122, the number of the multiple connecting portions 30c is preferably four or more. The element unit 20E is stably supported. The number may be six or more. The number may be eight or more. The element unit 20E is supported more stably. By stably supporting the element unit 20E, for example, when forming the first member 40, the liquid that will become the first member 40 can be stably applied onto the element layer 20.

[0049] In the sensors 120, 121, and 122, the first electrode 11 and the second electrode 12 are configured so that the electrical resistance between the first electrode 11 and the second electrode 12 changes depending on the detection target around the element portion 20E.

[0050] In the sensors 110, 120, 121, and 122, the first member 40 may include a plurality of first particles 41 containing an oxide (see FIG. 2). The oxide includes at least one selected from the group consisting of tin, zinc, tungsten, molybdenum, and indium, and oxygen. The oxide may be, for example, an oxide semiconductor. The electrical resistance of the oxide changes depending on the object to be detected.

[0051] At least one of the first electrode 11 and the second electrode 12 may include at least one selected from the group consisting of platinum, gold, silver, copper, aluminum, and titanium nitride. These materials may function as a catalyst for, for example, the change in the properties of the oxides described above due to the detection target.

[0052] As shown in FIG. 2, in the various sensors described above, the element unit 20E may further include a conductive member 20M. Power may be supplied to the conductive member 20M, causing the temperature of the element unit 20E to rise. The conductive member 20M may be, for example, a heater. In one example, the detection target may be detected in a state in which the temperature of the element unit 20E has risen. In another example, the detection target adsorbed to the first member 40 may be separated from the first member 40 by raising the temperature of the first member 40. For example, initialization may be performed. The rise in temperature may remove adsorbed water, for example.

[0053] (Third embodiment) FIG. 7 is a schematic plan view illustrating the sensor according to the third embodiment. 7, in the sensor 130 according to the embodiment, the electrode pattern is different from that in the sensor 110. Except for this, the configuration of the sensor 130 may be the same as the configuration of the sensor 110.

[0054] The sensor 130 includes a base 50s, a first fixing portion 31F fixed to the base 50s, and an element portion 20E supported by the first fixing portion 31F. The element portion 20E includes a first electrode 11, a second electrode 12, an element layer 20, and a first member 40. The element layer 20 is provided between the base 50s and the first member 40.

[0055] The element layer 20 includes a first region 21 and a second region 22. The first electrode 11 is provided between the first region 21 and the first member 40. The second electrode 12 is provided between the second region 22 and the first member 40. A first gap g1 is provided between the base 50s and the element layer 20.

[0056] The element layer 20 includes an outer edge 20R in a first plane PL1 that intersects with a first direction D1 from the base 50s to the first fixed portion 31F. The first electrode 11 includes a first portion 11a, a plurality of first elongated portions 11e, a first arc portion 11ac, and a plurality of first other elongated portions 11f. The plurality of first elongated portions 11e are connected to the first portion 11a. The first arc portion 11ac is connected to the first portion 11a. The plurality of first other elongated portions 11f are connected to the first arc portion 11ac.

[0057] The second electrode 12 includes a second portion 12a, a plurality of second elongated portions 12e, a second arc portion 12ac, and a plurality of second other elongated portions 12f. The plurality of second elongated portions 12e are connected to the second portion 12a. The second arc portion 12ac is connected to the second portion 12a. The second other elongated portion 12f is connected to the second arc portion 12ac.

[0058] The first arc portion 11ac extends along a portion of the outer edge 20R. In the first plane PL1, the plurality of first other extended portions 11f are located between the first arc portion 11ac and the first portion 11a. The plurality of first other extended portions 11f extend along the second direction D2. The second direction D2 extends along the first plane PL1. The plurality of first extended portions 11e extend along the second direction D2.

[0059] The second portion 12a is located between the plurality of second elongated portions 12e and the first portion 11a in the second direction D2. The plurality of second elongated portions 12e are located between the first arc portion 11ac and the second portion 12a in the second direction D2. The plurality of second elongated portions 12e extend along the second direction D2. One of the plurality of second elongated portions 12e is located between one of the plurality of first other elongated portions 11f and another of the plurality of first other elongated portions 11f in the third direction D3. The third direction D3 is along the first plane PL1 and intersects with the second direction D2.

[0060] The second arc portion 12ac extends along another portion of the outer edge 20R. The multiple first elongated portions 11e are located between the first portion 11a and the second arc portion 12ac in the second direction D2. The multiple second other elongated portions 12f are located between the first portion 11a and the second arc portion 12ac in the second direction D2. The multiple second other elongated portions 12f extend along the second direction D2. One of the multiple second other elongated portions 12f is located between one of the multiple first elongated portions 11e and another of the multiple first elongated portions 11e in the third direction D3.

[0061] In the sensor 130, a high degree of symmetry can also be achieved in the element unit 20E. For example, the characteristics of the element unit 20E are likely to be uniform in the circumferential direction around the element layer center 20c. For example, the temperature distribution in the element unit 20E is likely to be uniform. This stabilizes the electrical resistance. Stable, highly accurate detection results are likely to be obtained. For example, when the first member 40 is formed by a coating method, the liquid that becomes the first member 40 is likely to spread uniformly. A first member 40 with a stable shape is likely to be obtained. Stable, highly accurate detection results are likely to be obtained. Highly sensitive detection results are likely to be obtained. In the sensor 130, a sensor whose characteristics can be improved can be provided.

[0062] In the sensor 130, the first electrode 11 and the second electrode 12 may be configured so that the electrical resistance between the first electrode 11 and the second electrode 12 changes depending on the detection target around the element portion 20E.

[0063] In the sensor 130, the first member 40 may include a plurality of first particles 41 containing an oxide (see FIG. 2). The oxide includes at least one selected from the group consisting of tin, zinc, tungsten, molybdenum, and indium, and oxygen. The oxide may be, for example, an oxide semiconductor. The electrical resistance of the oxide changes depending on the detection target.

[0064] At least one of the first electrode 11 and the second electrode 12 may include at least one selected from the group consisting of platinum, gold, silver, copper, aluminum, and titanium nitride. These materials may function as a catalyst for the change in the properties of the oxides described above due to the detection target.

[0065] In the sensor 130, the number of the multiple connecting portions 30c is preferably four or more. The element unit 20E is stably supported. The number may be six or more. The number may be eight or more. The element unit 20E is supported more stably. By stably supporting the element unit 20E, for example, when forming the first member 40, the liquid that will become the first member 40 can be stably applied onto the element layer 20.

[0066] 7, in the sensor 130, the element layer 20 may further include a third region 23. In the first direction D1, the third region 23 does not overlap with the first electrode 11 and does not overlap with the second electrode 12. The third region 23 may include a first hole 20h that penetrates the third region 23 in the first direction D1.

[0067] In the sensor 130, for example, the first ratio is 0.8 to 1.2 times the second ratio. The first ratio is the ratio of a first absolute value of a first difference between the first length L1 and the second length L2 to the first length L1. The second ratio is the ratio of a second absolute value of a second difference between the third length L3 and the fourth length L4 to the third length L3.

[0068] The embodiments may include the following technical solutions. (Technical proposal 1) a substrate; a first fixed portion fixed to the base; an element portion supported by the first fixing portion; Equipped with the element portion includes a first electrode, a second electrode, an element layer, and a first member; the element layer is provided between the base and the first member, the device layer includes a first region and a second region; the first electrode is provided between the first region and the first member, the second electrode is provided between the second region and the first member, a first gap is provided between the base and the element layer; the element layer includes a central region including a center of the element layer in a first plane intersecting a first direction from the base to the first fixing portion, the first electrode has a spiral shape centered on a first point included in the central region, The sensor, wherein the second electrode is spiral-shaped about a second point included in the central region.

[0069] (Technical proposal 2) the device layer includes an outer edge; a portion of the first electrode is located between a portion of the second electrode and another portion of the second electrode in a first axis direction from the first point to a portion of the outer edge, The sensor described in Technical Solution 1, wherein in the first axial direction, the portion of the second electrode is between the portion of the first electrode and another portion of the first electrode.

[0070] (Technical proposal 3) the element layer has a first length along the first axis direction and a second length along a second axis direction; the second axis direction is along the first plane, passes through the first point, and is perpendicular to the first axis direction; the first member has a third length along the first axial direction and a fourth length along the second axial direction; The first ratio is between 0.8 and 1.2 times the second ratio, the first ratio is a ratio of a first absolute value of a first difference between the first length and the second length to the first length; The sensor described in Technical Solution 2, wherein the second ratio is a ratio of a second absolute value of a second difference between the third length and the fourth length to the third length.

[0071] (Technical proposal 4) The sensor according to Technical Solution 1 or 2, wherein the position of the second point in the first plane is substantially the same as the position of the first point in the first plane.

[0072] (Technical proposal 5) the device layer further includes a third region; In the first direction, the third region does not overlap with the first electrode and does not overlap with the second electrode; The sensor according to any one of Technical Solutions 1 to 4, wherein the third region includes a first hole penetrating the third region in the first direction.

[0073] (Technical proposal 6) a plurality of fixing portions fixed to the base; the plurality of connection portions; Furthermore, one of the plurality of connection portions is supported by one of the plurality of fixing portions; the one of the plurality of connection portions supports the element portion; A sensor described in any one of technical proposals 1 to 5, wherein the position of the element part in the first plane is between the position of one of the multiple connection parts in the first plane and the position of another of the multiple connection parts in the first plane.

[0074] (Technical proposal 7) The sensor according to Technical Solution 6, wherein the number of the plurality of connection parts is four or more.

[0075] (Technical proposal 8) a substrate; a first fixed portion fixed to the base; an element portion supported by the first fixing portion; Equipped with the element portion includes a first electrode, a second electrode, an element layer, and a first member; the element layer is provided between the base and the first member, the device layer includes a first region and a second region; the first electrode is provided between the first region and the first member, the second electrode is provided between the second region and the first member, a first gap is provided between the base and the element layer; the element layer includes a central region including a center of the element layer in a first plane intersecting a first direction from the base to the first fixing portion, and an outer edge around the central region; the first electrode includes a plurality of first radiating portions; the plurality of first radiating portions each extend in a radial direction along the first plane through the central region; the second electrode includes a plurality of second radiating portions and an arc portion; one of the plurality of second radiation portions is located between one of the plurality of first radiation portions and another of the plurality of first radiation portions in a circumferential direction centered on the central region; the arc portion is connected to the plurality of second radiating portions; The arc portion extends along the circumferential direction.

[0076] (Technical proposal 9) The sensor described in Technical Solution 8, wherein in the circumferential direction, the one of the plurality of first radiating portions is located between the one of the plurality of second radiating portions and another one of the plurality of second radiating portions.

[0077] (Technical proposal 10) The sensor according to Technical Solution 8 or 9, wherein the one of the plurality of first radiating portions is located between a part of the arc portion and another part of the arc portion in the radial direction.

[0078] (Technical proposal 11) The sensor described in Technical Solution 10, wherein the radial direction of the one of the plurality of first radiating portions is substantially perpendicular to the part of the arc portion.

[0079] (Technical proposal 12) the outer edge includes a plurality of sides, The sensor according to any one of Technical Schemes 8 to 11, wherein the number of the second radiating portions is the same as the number of the sides.

[0080] (Technical proposal 13) the element layer has a first length along a first axis direction from a center of the element layer to a portion of the outer edge, and a second length along a second axis direction; the second axis direction is along the first plane, passes through the center of the element layer, and is perpendicular to the first axis direction; the first member has a third length along the first axial direction and a fourth length along the second axial direction; The first ratio is between 0.8 and 1.2 times the second ratio, the first ratio is a ratio of a first absolute value of a first difference between the first length and the second length to the first length; The sensor according to any one of Technical Schemes 8 to 12, wherein the second ratio is a ratio of a second absolute value of a second difference between the third length and the fourth length to the third length.

[0081] (Technical proposal 14) the device layer further includes a third region; In the first direction, the third region does not overlap with the first electrode and does not overlap with the second electrode; The sensor according to any one of Technical Solutions 8 to 13, wherein the third region includes a first hole that penetrates the third region in the first direction.

[0082] (Technical proposal 15) a plurality of fixing portions fixed to the base; the plurality of connection portions; Furthermore, one of the plurality of connection portions is supported by the plurality of fixing portions; the one of the plurality of connection portions supports the element portion; A sensor described in any one of technical proposals 8 to 14, wherein the position of the element portion in the first plane is between the position of one of the plurality of connection portions in the first plane and the position of another of the plurality of connection portions in the first plane.

[0083] (Technical proposal 16) The sensor according to Technical Solution 15, wherein the number of the plurality of connection parts is four or more.

[0084] (Technical proposal 17) The sensor described in Technical Solution 6 or 15, wherein the first fixing portion is one of the plurality of fixing portions.

[0085] (Technical proposal 18) a substrate; a first fixed portion fixed to the base; an element portion supported by the first fixing portion; Equipped with the element portion includes a first electrode, a second electrode, an element layer, and a first member; the element layer is provided between the base and the first member, the device layer includes a first region and a second region; the first electrode is provided between the first region and the first member, the second electrode is provided between the second region and the first member, a first gap is provided between the base and the element layer; the element layer includes an outer edge in a first plane intersecting a first direction from the base to the first fixing portion, the first electrode includes a first portion, a plurality of first elongated portions connected to the first portion, a first arc portion connected to the first portion, and a plurality of first other elongated portions connected to the first arc portion; the second electrode includes a second portion, a plurality of second elongated portions connected to the second portion, a second arc portion connected to the second portion, and a plurality of second other elongated portions connected to the second arc portion; the first arc portion is along a portion of the outer edge; In the first plane, the plurality of first other elongated portions are located between the first arc portion and the first portion, The plurality of first elongated portions extend along a second direction, the second direction being aligned with the first plane; the plurality of first elongate portions extend along the second direction; the second portion is located between the plurality of second elongated portions and the first portion in the second direction; the plurality of second elongated portions are located between the first arc portion and the second portion in the second direction; the plurality of second elongate portions extend along the second direction; one of the plurality of second elongated portions is between one of the plurality of first other elongated portions and another of the plurality of first other elongated portions in a third direction, the third direction being along the first plane and intersecting the second direction; the second arc portion is along another part of the outer edge, the plurality of first elongate portions are located between the first portion and the second arc portion in the second direction; the plurality of second other elongated portions are located between the first portion and the second arc portion in the second direction; The plurality of second elongated portions extend along the second direction, A sensor, wherein one of the plurality of second other elongated portions is between one of the plurality of first elongated portions and another of the plurality of first elongated portions in the third direction.

[0086] (Technical proposal 19) the first component includes a plurality of first particles including an oxide; the oxide contains at least one selected from the group consisting of tin, zinc, tungsten, molybdenum, and indium, and oxygen; A sensor described in any one of technical proposals 1 to 18, wherein at least one of the first electrode and the second electrode includes at least one selected from the group consisting of platinum, gold, silver, copper, aluminum, and titanium nitride.

[0087] (Technical proposal 20) A sensor described in any one of Technical Proposals 1 to 19, wherein the first electrode and the second electrode are configured so that the electrical resistance between the first electrode and the second electrode changes depending on the detection target around the element portion.

[0088] According to the embodiment, a sensor capable of improving characteristics is provided.

[0089] In this specification, "electrically connected" includes a state in which multiple conductors are physically in contact with each other and a current flows between these multiple conductors. "Electrically connected" also includes a state in which multiple conductors are connected to each other and a current flows between these multiple conductors.

[0090] The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of each element included in the sensor, such as the element layer, electrodes, first member, base, fixing portion, and connecting portion, are within the scope of the present invention as long as a person skilled in the art can implement the present invention in a similar manner and obtain similar effects by appropriately selecting them from known ranges.

[0091] Furthermore, any combination of two or more elements of each specific example within the scope of technical feasibility is also included within the scope of the present invention as long as it includes the gist of the present invention.

[0092] In addition, all sensors that can be implemented by a person skilled in the art by appropriately modifying the design based on the sensors described above as embodiments of the present invention also fall within the scope of the present invention as long as they include the gist of the present invention.

[0093] In addition, within the scope of the concept of the present invention, a person skilled in the art may come up with various modifications and alterations, and these modifications and alterations are also considered to fall within the scope of the present invention.

[0094] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the scope of the invention and its equivalents as defined in the claims. [Explanation of symbols]

[0095] 11, 12: first and second electrodes, 11R: annular portion, 11a, 12a: first and second portions, 11ac, 12ac: first and second arc portions, 11c, 12c: first and second points, 11e, 12e: first and second elongated portions, 11f, 12f: first and second elongated portions, 11x, 12x: first and second radiating portions, 12Z: center portion, 12y: arc portion, 20: element layer, 20E: element portion, 20M: conductive member, 20R: outer edge, 20c: element layer center, 20h: first hole, 20r: central region, 20s: side, 21-23: first to third regions, 30F: fixed portion, 30c: connecting portion, 31F to 38F: 1st to 8th fixing portions, 31c to 38c: 1st to 8th connecting portions, 40: 1st member, 41: 1st particle, 50L: insulating member, 50s: base, 110, 120 to 122, 130: sensor, D1 to D3: 1st to 3rd directions, Da1, Da2: 1st and 2nd axis directions, L1 to L4: 1st to 4th lengths, PL1: 1st plane, g1: 1st gap

Claims

1. a substrate; a first fixed portion fixed to the base; an element portion supported by the first fixing portion; Equipped with the element portion includes a first electrode, a second electrode, an element layer, and a first member; the element layer is provided between the base and the first member, the device layer includes a first region and a second region; the first electrode is provided between the first region and the first member, the second electrode is provided between the second region and the first member, a first gap is provided between the substrate and the element layer; the element layer includes a central region including a center of the element layer in a first plane intersecting a first direction from the base to the first fixing portion; the first electrode has a spiral shape centered on a first point included in the central region, The sensor, wherein the second electrode is spiral-shaped about a second point included in the central region.

2. the device layer includes an outer edge; a portion of the first electrode is located between a portion of the second electrode and another portion of the second electrode in a first axis direction from the first point to a portion of the outer edge, In the first axial direction, the portion of the second electrode is located between the portion of the first electrode and another portion of the first electrode, the element layer has a first length along the first axis direction and a second length along a second axis direction; the second axis direction is along the first plane, passes through the first point, and is perpendicular to the first axis direction; the first member has a third length along the first axial direction and a fourth length along the second axial direction; the first ratio is 0.8 to 1.2 times the second ratio, the first ratio is a ratio of a first absolute value of a first difference between the first length and the second length to the first length; The sensor of claim 1 , wherein the second ratio is a ratio of a second absolute value of a second difference between the third length and the fourth length to the third length.

3. the device layer further includes a third region; In the first direction, the third region does not overlap with the first electrode and does not overlap with the second electrode; The sensor of claim 1 , wherein the third region includes a first hole that penetrates the third region in the first direction.

4. a substrate; a first fixed portion fixed to the base; an element portion supported by the first fixing portion; Equipped with the element portion includes a first electrode, a second electrode, an element layer, and a first member; the element layer is provided between the base and the first member, the device layer includes a first region and a second region; the first electrode is provided between the first region and the first member, the second electrode is provided between the second region and the first member, a first gap is provided between the substrate and the element layer; the element layer includes a central region including a center of the element layer in a first plane intersecting a first direction from the base to the first fixing portion, and an outer edge around the central region; the first electrode includes a plurality of first radiating portions; the plurality of first radiating portions each extend in a radial direction along the first plane through the central region; the second electrode includes a plurality of second radiating portions and an arc portion; one of the plurality of second radiation portions is located between one of the plurality of first radiation portions and another of the plurality of first radiation portions in a circumferential direction centered on the central region, the arc portion is connected to the plurality of second radiating portions; The arc portion extends along the circumferential direction.

5. The sensor of claim 4 , wherein the one of the plurality of first radiating portions is located between the one of the plurality of second radiating portions and another one of the plurality of second radiating portions in the circumferential direction.

6. The sensor of claim 4 , wherein the one of the plurality of first radiating portions is located between a portion of the arc portion and another portion of the arc portion in the radial direction.

7. the outer edge includes a plurality of sides, The sensor of claim 4 , wherein the number of the plurality of second radiating portions is the same as the number of the plurality of sides.

8. the element layer has a first length along a first axis direction from a center of the element layer to a portion of the outer edge, and a second length along a second axis direction; the second axis direction is along the first plane, passes through the center of the device layer, and is perpendicular to the first axis direction; the first member has a third length along the first axial direction and a fourth length along the second axial direction; the first ratio is 0.8 to 1.2 times the second ratio, the first ratio is a ratio of a first absolute value of a first difference between the first length and the second length to the first length; The sensor of claim 4 , wherein the second ratio is a ratio of a second absolute value of a second difference between the third length and the fourth length to the third length.

9. a substrate; a first fixed portion fixed to the base; an element portion supported by the first fixing portion; Equipped with the element portion includes a first electrode, a second electrode, an element layer, and a first member; the element layer is provided between the base and the first member, the device layer includes a first region and a second region; the first electrode is provided between the first region and the first member, the second electrode is provided between the second region and the first member, a first gap is provided between the substrate and the element layer; the element layer includes an outer edge in a first plane intersecting a first direction from the base to the first fixing portion, the first electrode includes a first portion, a plurality of first elongated portions connected to the first portion, a first arc portion connected to the first portion, and a plurality of first other elongated portions connected to the first arc portion; the second electrode includes a second portion, a plurality of second elongated portions connected to the second portion, a second arc portion connected to the second portion, and a plurality of second other elongated portions connected to the second arc portion; the first arc portion is along a portion of the outer edge; In the first plane, the plurality of first other elongated portions are located between the first arc portion and the first portion, The plurality of first elongated portions extend along a second direction, the second direction being aligned with the first plane; The plurality of first elongate portions extend along the second direction, the second portion is located between the plurality of second elongated portions and the first portion in the second direction; the plurality of second elongated portions are located between the first arc portion and the second portion in the second direction; The plurality of second elongate portions extend along the second direction, one of the plurality of second elongated portions is between one of the plurality of first other elongated portions and another of the plurality of first other elongated portions in a third direction, the third direction being along the first plane and intersecting the second direction; the second arc portion is along another part of the outer edge, the plurality of first elongate portions are located between the first portion and the second arc portion in the second direction; the plurality of second other elongated portions are located between the first portion and the second arc portion in the second direction; The plurality of second elongated portions extend along the second direction, A sensor wherein one of the plurality of second other elongated portions is between one of the plurality of first elongated portions and another of the plurality of first elongated portions in the third direction.

10. The sensor according to any one of claims 1 to 9, wherein the first electrode and the second electrode are configured such that the electrical resistance between the first electrode and the second electrode changes depending on the detection target around the element portion.

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