Abrasive construction, conditioning assembly, and method of making conditioning assembly

Abstract

The present invention discloses an abrasive construction, a conditioning assembly and a method of making a conditioning assembly.SOLUTION: The abrasive structure includes a metal porous structure 1, a plurality of abrasive particles 2, and a metal brazing material 3. The plurality of polishing particles 2 are dispersedly embedded in the metal porous structure 1 so that each of them is partially exposed. The metal brazing material 3 is filled in the metal porous structure 1 and penetrates into the metal porous structure 1, and is bonded to the metal porous structure 1 and the plurality of abrasive particles 2. The material constituting the metal porous structure 1 and the material constituting the metal brazing material 3 have at least one same constituent element.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a polishing structure, a conditioning assembly, and a method for manufacturing a conditioning assembly, and more particularly to a polishing structure, a conditioning assembly, and a method for manufacturing a conditioning assembly that are suitable for use in conditioning a polishing pad. [Background technology]

[0002] In chemical-mechanical polishing (CMP) and high-precision polishing processes, polishing pads are typically used in conjunction with polishing fluids to polish the surfaces of workpieces such as semiconductor wafers, optical elements, and glass. The surface of the polishing pad is typically conditioned using a conditioner. The conditioner uses its abrasive layer to remove waste materials left on the polishing pad during polishing, restore the roughness of the polishing pad, and maintain consistent polishing quality.

[0003] In conventional polishing layer manufacturing processes, a large number of abrasive particles are fixed to the work surface of a substrate using brazing filler metals through high-temperature brazing. However, the brazing filler metal boils and evaporates at high temperatures (approximately 1000°C), causing the abrasive particles to constantly move and flip due to the boiling of the brazing filler metal. This ultimately leads to uneven heights of the abrasive particles fixed to the work surface, affecting product quality and efficiency. Furthermore, during the cooling process after high-temperature brazing, the different thermal expansion coefficients of the materials (i.e., the abrasive particles, the brazing filler metal, and the substrate) can easily crack, causing the abrasive particles to fall off and accidentally scratch the wafer during the polishing pad conditioning process.

[0004] In addition, in conventional technology, abrasive particles are sometimes bonded to a substrate using a high molecular weight polymer such as epoxy resin. However, the epoxy resin, the substrate (e.g., stainless steel), and the abrasive particles (e.g., diamond) are made of different materials and have low compatibility. This results in a tendency for the abrasive particles to fall off due to insufficient bonding strength during the bonding process or when starting polishing after bonding, affecting the polishing quality and shortening the service life of the conditioner. Summary of the Invention [Problem to be solved by the invention]

[0005] The technical problem to be solved by the present invention is to provide an abrasive structure, a conditioning assembly, and a method for manufacturing a conditioning assembly, which can maintain a constant height of abrasive particles fixed to a working surface and can also enhance structural strength to extend the service life, in consideration of the shortcomings of the prior art. [Means for solving the problem]

[0006] To solve the above technical problems, the technical means adopted by the present invention is to provide an abrasive structure comprising a metal porous structure, a plurality of abrasive particles, and a metal brazing material. The plurality of abrasive particles are dispersed and embedded in the metal porous structure so that each is partially exposed. The metal brazing material fills and infiltrates the metal porous structure, bonding to the metal porous structure and the plurality of abrasive particles. The material constituting the metal porous structure and the material constituting the metal brazing material have at least one identical constituent element.

[0007] In order to solve the above technical problem, another technical means adopted by the present invention is to provide a conditioning assembly including a base and a polishing structure disposed on the base.

[0008] In order to solve the above-mentioned technical problems, the present invention adopts still another technical means to provide a method for manufacturing a conditioning assembly, including: fitting a plurality of abrasive particles into one surface of a metal porous structure so that each abrasive particle is partially exposed on the surface; disposing a metal brazing material on the other surface of the metal porous structure; and performing a brazing process to melt the metal brazing material at a high temperature, thereby infiltrating the metal porous structure and bonding the metal porous structure and the plurality of abrasive particles to form an abrasive structure. [Effects of the Invention]

[0009] One of the advantageous effects of the present invention is that the abrasive structure, conditioning assembly, and manufacturing method of the conditioning assembly according to the present invention not only maintain a constant height of the abrasive particles fixed to the metal porous structure by using the technical means that "the metal brazing material is filled and infiltrated into the metal porous structure, and bonds with the metal porous structure and multiple abrasive particles" and "the material constituting the metal porous structure and the material constituting the metal brazing material have at least one of the same constituent elements," but also prevent cracks from occurring after brazing, and further strengthen the structural strength of the abrasive structure to extend its service life.

[0010] In order to further understand the features and technical contents of the present invention, please refer to the following detailed description of the present invention and the drawings, but the drawings provided are for reference and illustration purposes only and are not used to limit the present invention. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a schematic diagram of an abrasive structure according to an embodiment of the present invention. [Figure 2] 1 is a schematic diagram of a conditioning assembly according to an embodiment of the present invention. [Figure 3] 3 is a schematic diagram illustrating steps S11 to S15 of a method for manufacturing a conditioning assembly according to an embodiment of the present invention. [Figure 4] 3 is a schematic diagram illustrating steps S11 to S15 of a method for manufacturing a conditioning assembly according to an embodiment of the present invention. [Figure 5] 3A to 3C are schematic diagrams illustrating steps S10 to S14 of a method for manufacturing a conditioning assembly according to an embodiment of the present invention. [Figure 6] 3A to 3C are schematic diagrams illustrating steps S10 to S14 of a manufacturing method for a conditioning assembly according to an embodiment of the present invention. [Figure 7] 4 is a flowchart showing steps S1 to S4 of a method for manufacturing a conditioning assembly according to an embodiment of the present invention. [Figure 8] 4 is a flowchart showing steps S11 to S15 of a method for manufacturing a conditioning assembly according to an embodiment of the present invention. [Figure 9] 4 is a flowchart showing steps S10 to S14 of a method for manufacturing a conditioning assembly according to an embodiment of the present invention. [Figure 10] 1 is a partial frontal micrograph of an abrasive structure according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0012] The following specific examples will explain the embodiments of the "polishing structure, conditioning assembly, and method for manufacturing a conditioning assembly" disclosed in the present invention. Those skilled in the art will be able to understand the advantages and effects of the present invention from the disclosed content. The present invention can be implemented or applied through other different specific embodiments, and various detailed descriptions herein can be modified and changed in various ways based on different perspectives and applications without departing from the spirit of the present invention. It should be noted that the drawings in the present invention are merely schematic and are not drawn to actual scale. The following embodiments will further explain the technical content of the present invention in detail, but the disclosed content is not intended to limit the scope of the present invention. Furthermore, although terms such as "first" and "second" may be used to describe various elements in this specification, it should be understood that these elements should not be limited by these terms. These terms are primarily used to distinguish one element from another. The term "or" in this specification should be understood to include any one or more combinations of the relevant listed items, depending on the actual situation.

[0013] [Example] Please refer to Figure 1. Figure 1 is a schematic diagram of an abrasive structure of the present invention. The present invention provides an abrasive structure M comprising a metal porous structure 1, a plurality of abrasive particles 2, and a metal brazing material 3. The plurality of abrasive particles 2 are dispersed and embedded in the metal porous structure 1. Each abrasive particle 2 is partially exposed.

[0014] Examples of materials constituting the metal porous structure 1 include nickel, iron, copper, titanium, stainless steel, nickel alloys, iron alloys, copper alloys, and titanium alloys. Furthermore, the metal porous structure 1 may have a mesh structure, a foam structure, a fiber structure, or a fin structure. In a preferred embodiment, the metal porous structure 1 may be nickel or its alloy having a foam structure such as nickel foam (or foamed nickel). In other embodiments, the metal porous structure 1 may have titanium foam, stainless steel foam, or nickel fiber. It should be noted that the metal porous structure 1 may have a single-layer structure or a multi-layer structure, but this is not a limitation of the present invention.

[0015] The present invention is not limited to a method for producing the metal porous structure 1. The metal porous structure 1 can be produced by, for example, powder metallurgy, hot extrusion, molten metal, electroplating, electrochemical deposition, or casting. The metal porous structure 1 has a plurality of openings 10 on its surface (for example, the first surface 11 and the second surface 12 in FIG. 1 ) and inside, and a plurality of abrasive particles 2 are embedded in the openings 10. The present invention does not limit the number of openings 10. For example, the average pore size of the openings 10 is 50 μm to 500 μm.

[0016] Furthermore, the plurality of openings 10 are located inside the metal porous structure 1 and on the surfaces (first surface 11 and second surface 12) of the metal porous structure 1. At least some of the plurality of openings 10 are connected to each other to form at least one passage. In other words, the passage may extend from the outer surface of the metal porous structure 1 to its interior.

[0017] The brazing filler metal 3 fills and infiltrates the metal porous structure 1 through the openings 10 and passages, bonding to the metal porous structure 1 and the plurality of abrasive particles 2. Examples of materials for the brazing filler metal 3 include metal alloys, such as nickel-based alloys (BNi-2). It should be noted that the brazing filler metal 3 infiltrates the metal porous structure 1 in a molten state and then bonds the abrasive particles 2 to the metal porous structure 1 upon cooling and solidification. For example, the abrasive particles 2 may include single-crystal diamond, polycrystalline diamond, polycrystalline sintered diamond (PCD), CVD diamond, diamond, cubic boron nitride (cBN) particles, silicon carbide particles, or any combination thereof. The brazing filler metal 3 may be in the form of a brazing filler sheet, a brazing filler paste, a brazing filler powder, or a mixture of brazing filler powder and resin, but the present invention does not limit the shape of the brazing filler metal 3.

[0018] In the present invention, the material (nickel foam) constituting the metal porous structure 1 and the material (nickel-based alloy) constituting the metal brazing filler metal 3 contain at least one of the same constituent elements, are highly compatible with each other, and have good wettability. This improves the bonding effect of the metal brazing filler metal 3 infiltrated into the metal porous structure 1 and also makes the thermal expansion coefficients closer to each other. Furthermore, the metal brazing filler metal 3 generally contains active metal elements such as titanium (Ti), chromium (Cr), vanadium (V), zirconium (Zr), molybdenum (Mo), and tungsten (W). In an embodiment of the present invention, the metal brazing filler metal 3 is a BNi-2 nickel-based brazing filler metal, and its chemical composition includes elements such as nickel (Ni), chromium (Cr), boron (B), and silicon (Si). The metal brazing material 3 chemically reacts with the metal porous structure 1 and the abrasive particles 2 to generate an intermetallic compound (IMC), improving the interfacial bonding strength and thereby strengthening the bond between the material (metal porous structure 1) and the metal brazing material 3, i.e., the chemical bonding.

[0019] It should be noted that in the prior art, a metal brazing material can bond with abrasive particles to form an intermetallic compound. While such intermetallic compounds have high hardness and brittleness, the large difference in thermal expansion coefficients makes them prone to cracking due to thermal expansion and cold contraction during the brazing process. To address the drawbacks of the prior art, the abrasive structure M of the present invention adds a metal porous structure 1 and selects the metal brazing material 3 and the metal porous structure 1 to have at least one identical element (with similar thermal expansion coefficients), thereby creating a chemical bond between the metal brazing material 3 and the metal porous structure 1. This prevents the abrasive particles 2 from peeling off due to cracks in the metal brazing material 3 and strengthens the structural strength of the abrasive structure M.

[0020] Furthermore, nickel-based brazing filler metals have excellent wettability and adhesiveness, and can effectively fix diamond to the metal porous structure 1. They can form a reliable chemical bond between the metal and diamond at high temperatures, achieving a strong bond. Nickel-based brazing filler metals also have excellent corrosion resistance and wear resistance, and can strengthen the bond strength between the diamond and the metal porous structure 1, while maintaining stability over a wide temperature range.

[0021] Furthermore, after the multiple abrasive particles 2 are fitted into the multiple openings 10, they are partially covered by the metal porous structure 1. Specifically, as shown in FIG. 1 , between one abrasive particle 2 and the opening 10 into which it is fitted, the abrasive particle 2 has a maximum cross-sectional area 2A parallel to the first surface 11 of the metal porous structure 1, and the area 10A of the opening 10 is smaller than the maximum cross-sectional area 2A. Specifically, the widest part of the abrasive particle 2 (i.e., the part with the maximum cross-sectional area 2A) bites into the metal porous structure 1, resulting in the effect that the metal porous structure 1 covers the abrasive particle 2. This strengthens the bonding force between the abrasive particle 2 and the metal porous structure 1.

[0022] The metal porous structure 1 of the present invention is actually a compressed metal porous structure having multiple overlapping void regions (not shown) therein. Therefore, the metal porous structure 1 (i.e., the compressed structure) has a compressed porosity, which may be referred to as the compressed porosity. The compressed porosity is defined as the volume ratio of the multiple overlapping void regions to the solid structure (i.e., no voids). In a preferred embodiment of the present invention, the compressed porosity is less than 50%. Designing the metal porous structure 1 so that the compressed porosity is less than 50% allows the metal brazing material 3 to generate capillary action within the metal porous structure 1. The metal brazing material 3 can penetrate into the metal porous structure 1 through the multiple open pores 10 by capillary force and fill the metal porous structure 1. This in turn allows the metal brazing material 3 to bond with the abrasive particles 2, firmly securing the abrasive particles 2 to the metal porous structure 1. This ensures that the abrasive particles 2 do not fall off during use of the abrasive structure M, and also reduces cracks in the metal brazing material 3 due to thermal stress.

[0023] Uncompressed metal porous structures generally have a relatively high porosity. Typically, a metal porous structure with a porosity of 110 PPI (PPI indicates the average number of pores per inch) has a porosity of approximately 80% to 95%. If the porosity is too high, the metal porous structure has too many pores and too large pore diameters, resulting in a sparse internal solid structure. Therefore, when attempting to retain abrasive particles in the metal porous structure, the abrasive particles tend to penetrate directly into the metal porous structure without being retained on the surface. In other words, a metal porous structure with a too high porosity is not suitable for retaining abrasive particles, and the nickel foam must be compressed.

[0024] Take nickel foam as an example of a metal porous structure. Assume that the uncompressed nickel foam has an initial thickness of 2 mm and an initial porosity O of 95%. If a 2 mm thick nickel foam is compressed to a thickness of only 0.2 mm, the compressed porosity O' of the compressed nickel foam can be calculated as follows:

[0025] Initial thickness h=2mm

[0026] Thickness after compression h'=0.2mm

[0027] Assuming that the cross-sectional area A of the foamed nickel does not change before and after compression, the volume compression ratio (volume ratio between uncompressed foamed nickel and compressed foamed nickel) is as follows:

[0028] (V' / V)=(A×h') / (A×h)=(0.2 / 2)=0.1

[0029] Therefore, the total volume after compression is 10% of the original volume.

[0030] Furthermore, the total volume V of the foamed nickel includes the void volume Vp and the volume Vs of the solid portion.

[0031] Vp=0×V=0.95×V

[0032] Vs=V-Vp=V-0.95V=0.05V

[0033] As can be seen from the above, the total volume after compression is 10% of the original volume.

[0034] That is, V'=0.1V

[0035] During the compression process, the volume Vs of the solid part of the foamed nickel does not change, and the pore volume Vp' after compression is as follows:

[0036] Vp'=V' -Vs'=0.1V-0.05V=0.05V

[0037] Therefore, the compressed porosity O' of the foamed nickel after compression is as follows:

[0038] O'=Vp' / V'=0.05V / 0.1V=0.5

[0039] Therefore, when the thickness of the nickel foam is compressed from 2 mm to 0.2 mm, the porosity decreases to 50%.

[0040] Due to the structural design of the metal porous structure 1, when a plurality of abrasive particles 2 are locked into the openings 10 of the metal porous structure 1, the height of the exposed portions of the plurality of abrasive particles 2 can be maintained constant, thereby making the height of the polishing surface of the metal porous structure 1 uniform. More specifically, the portions of these abrasive particles 2 exposed to the outside of the metal porous structure 1 together form the polished surface, and each abrasive particle 2 has a cutting edge 2T, with the difference in vertical height between any two cutting edges 2T not exceeding 20 μm.

[0041] Furthermore, in the present invention, the flatness of the surface of the metal porous structure 1 must be less than 50 μm. The flatness of the metal porous structure 1 is defined as the average height difference between the 10 highest points on the surface of the metal porous structure 1. If the flatness exceeds 50 μm, the area covered by the metal porous structure 1 after the abrasive particles 2 are inserted into the openings 10 will vary too much, making it difficult to control the height of the exposed parts of the abrasive particles 2, which will affect the quality of the abrasive structure M.

[0042] Please refer to FIG. 2. FIG. 2 is a schematic diagram of a conditioning assembly of the present invention. The present invention provides a conditioning assembly D including a base 4 and a polishing structure M disposed on the base 4. The base 4 may be made of stainless steel, a metal alloy, a ceramic material, or an engineering plastic (e.g., polyimide (PI) or polypropylene (PP)). In a preferred embodiment of the present invention, the base 4 is made of stainless steel, such as SUS316 or SUS304, which contains a predetermined percentage of nickel. In other words, in the present invention, the material constituting the base 4 (stainless steel) and the material constituting the metal porous structure 1 (foamed nickel) and the metal brazing material 3 (nickel-based alloy) contain at least one identical element, and therefore have similar thermal expansion coefficients. In this way, the structural stability of the conditioning assembly D is enhanced, and the probability that the metal porous structure 1 will fall off the base 4 is reduced. The conditioning assembly D also includes an adhesive 5. The adhesive 5 is disposed between the base 4 and the polishing structure M and is used to bond the base 4 and the polishing structure M together.

[0043] The present invention is not limited to a specific size or embodiment of the conditioning assembly D. For example, the conditioning assembly D may be a single unit that functions as a conditioner. Alternatively, in another embodiment, multiple conditioning assemblies D may be distributed and arranged on a base (not shown) to form a combination conditioner. Alternatively, in another embodiment, multiple conditioning assemblies D may be arranged around the center of a base to form a combination conditioner. Alternatively, in another embodiment, multiple conditioning assemblies D may be arranged in a matrix and arranged on a base to form a combination conditioner.

[0044] The adhesive 5 may be, for example, a metal brazing material or a polymer adhesive (e.g., epoxy resin). When the adhesive 5 is a metal brazing material 3, when the metal brazing material 3 melts, part of it penetrates into the metal porous structure 1 by capillary force, and another part bonds the base 4 and the polishing structure M. Furthermore, since the base 4, the metal porous structure 1, and the metal brazing material 3 have the same constituent elements, the following advantages and effects are obtained.

[0045] (1) The same constituent elements ensure excellent compatibility between the brazing metal material 3 and the base 4, thus achieving more uniform welding and a better brazing effect, and contributing to reducing the possibility of cracking and crystallization after brazing.

[0046] (2) The same constituent elements can promote atomic diffusion at the brazing surface between the metallic brazing material 3 and the base 4, thereby improving the brazing strength and stability.

[0047] On the other hand, if the adhesive 5 is a polymer adhesive, when external pressure is applied to bond the polishing structure M to the base 4 via the adhesive 5, the occurrence of thermal deformation of the base 4 in the process using the polymer adhesive can be reduced, further enhancing the structural stability of the conditioning assembly D. It should be noted that the melting point of the metal porous structure 1 must be at least 100°C higher than the melting point of the metal brazing material 3. This prevents changes in the composition ratio when the metal brazing material 3 penetrates the metal porous structure 1, ensures that the metal porous structure 1 maintains its original rigidity during the brazing process, and also prevents cracks from occurring.

[0048] Please refer to Figures 1, 2 and 7. Figure 7 is a flowchart of steps S1 to S4 of the method for manufacturing a conditioning assembly of the present invention. The present invention provides a method for manufacturing a conditioning assembly including at least steps S1, S2, S3 and S4.

[0049] In step S1, a plurality of abrasive particles 2 are fitted into one surface of the metal porous structure 1, and each abrasive particle 2 is partially exposed on the surface (ie, the first surface 11).

[0050] In step S2, the metal brazing material 3 is placed on the other surface of the metal porous structure 1 (ie, the second surface 12).

[0051] In step S3, a brazing process is carried out to melt the metal brazing material 3, allowing the metal brazing material 3 to penetrate into the metal porous structure 1 and bond with the metal porous structure 1 and multiple abrasive particles 2 to form the abrasive structure M.

[0052] In step S4, a base 4 and an adhesive 5 for bonding the base 4 and the abrasive structure M are provided.

[0053] Next, reference will be made to Figures 3, 4, and 8. Figures 3 and 4 are schematic diagrams of steps S11 to S15 of the method for manufacturing a conditioning assembly of the present invention. Figure 8 is a flowchart of steps S11 to S15 of the method for manufacturing a conditioning assembly of the present invention. Step S1, in which a plurality of abrasive particles 2 are fitted into the surface of the metal porous structure 1, further includes steps S11, S13, and S15.

[0054] In step S11, a plurality of abrasive particles 2 are placed on the surface of the metal porous structure 1.

[0055] In step S13, a rigid platform 6 having a plurality of grooves 60 is provided to cover the plurality of abrasive particles 2 so that the plurality of abrasive particles 2 are disposed in the plurality of grooves 60, respectively.

[0056] In step S15, the rigid platform 6 and the metal porous structure 1 are pressed against each other, so that the abrasive particles 2 are pressed into the metal porous structure 1, and the metal porous structure 1 is deformed by the pressure.

[0057] Specifically, in FIG. 3, a plurality of abrasive particles 2 are first laid on the first surface 11 of the metal porous structure 1 (see part K1 in FIG. 3). At this time, the metal porous structure 1 has a deformable porous network structure (or foam structure). The details of the material, structure, and configuration of the metal porous structure 1 have been described above, so they will not be repeated here. Next, a rigid platform 6 is provided to cover the abrasive particles 2 (see parts K2 and K3 in FIG. 3), and the abrasive particles 2 are placed on a carrier P. The rigid platform 6 has a plurality of protrusions 61 on its surface, and a plurality of grooves 60 are formed between the protrusions 61, with the number of grooves 60 corresponding to the number of abrasive particles 2. The material of the protrusions 61 may be, for example, a metal, a ceramic, or a deformable polymer material, but is not limited thereto in the present invention.

[0058] It should be noted that the present invention is not limited to the molding method of the grooves 60 and the protrusions 61. For example, the protrusions 61 may be formed by adding a gasket to the surface of the rigid platform 6, with the grooves 60 being formed by cavities formed through the gasket. Alternatively, the protrusions 61 may be formed by machining the grooves 60 directly from the surface of the rigid platform 6, with the protrusions 61 formed from protruding portions on both sides of the grooves 60. When the rigid platform 6 covers multiple abrasive particles 2, the multiple abrasive particles 2 are respectively arranged in multiple grooves 60 (each groove 60 can accommodate only one abrasive particle 2).

[0059] In another embodiment, a planar structure (not shown) made of a deformable polymer material may be first placed on the surface of the rigid platform 6. The planar structure faces the plurality of abrasive particles 2. When the rigid platform 6 presses the plurality of abrasive particles 2 into the plurality of openings 10 of the metal porous structure 1, the protrusions 61 come into contact with the plurality of abrasive particles 2 and are compressed. During compression, the cutting ends 2T of the abrasive particles 2 press and deform the planar structure, forming a plurality of grooves 60, and protrusions 61 are formed from the protruding portions on both sides of each groove 60.

[0060] Next, in FIG. 4, the rigid platform 6 is pressed down to compress the metal porous structure 1, forcing some of the abrasive particles 2 into the openings 10 of the metal porous structure 1, while leaving other portions of the abrasive particles 2 exposed. In other words, the metal porous structure 1 can be used to lock the abrasive particles 2 through the openings 10. After compression, the metal porous structure 1 has an overlapping porosity of less than 50% and a thickness of less than 2 mm. Furthermore, the difference in height between any two abrasive particles 2 among the abrasive particles 2 does not exceed 20 μm, meaning that the abrasive particles 2 are approximately the same height.

[0061] Furthermore, the present invention allows the depth of the grooves 60 to be adjusted by adjusting the height of the protrusions 61, and the depth of the grooves 60 is the exposed portion of the plurality of abrasive particles 2, which is the polishing surface of the conditioning assembly. After the plurality of abrasive particles 2 are arranged on the first surface 11 of the compressed metal porous structure 1, a layer of metal brazing material 3 is arranged on the second surface 12 of the compressed metal porous structure 1, and then the metal porous structure 1 is placed in a vacuum furnace for the brazing process (i.e., in FIG. 4, the brazing material 3 is arranged facing downward and sintered).

[0062] It should be noted that the present invention does not limit whether the brazing material 3 is disposed in the upper or lower layer of the metal porous structure 1 during the brazing process. For example, in FIG. 4, the brazing material 3 is disposed in the lower layer of the metal porous structure 1 (or the abrasive particles 2), but in other embodiments, the brazing material 3 may be disposed in the upper layer of the metal porous structure 1 (or the abrasive particles 2) (for example, in FIG. 6, the brazing material 3 is disposed facing upward during sintering). Whether in the upper or lower layer, the metal porous structure 1 is in a vacuum environment in the vacuum furnace, and therefore the brazing material 3 can penetrate into the metal porous structure 1 through the multiple openings 10 due to capillary force after melting.

[0063] The present invention is not limited by the positions of the abrasive particles 2 and the protrusions 61. For example, a modified example will be described using part K2 in FIG. 3. The positions of the abrasive particles 2 and the protrusions 61 may be interchanged. That is, the abrasive particles 2 may be placed on the rigid platform 6 in advance (an adhesive material such as a spray adhesive or double-sided tape may be provided on the surface of the rigid platform 6 so that the abrasive particles 2 can adhere to the surface of the rigid platform 6), the protrusions 61 may be placed on the first surface 11 of the metal porous structure 1, and the grooves 60 may be formed between the protrusions 61 of the metal porous structure 1.

[0064] Furthermore, the abrasive particles 2 and the protrusions 61 may be provided on the same carrier. For example, a modified example will be described using part K2 in Fig. 3. The protrusions 61 are disposed on the rigid platform 6, and the abrasive particles 2 are disposed in the grooves 60 between the protrusions 61 (an adhesive material such as a spray adhesive or double-sided tape may be provided in the grooves 60 so that the abrasive particles 2 can adhere to the grooves 60). Alternatively, for example, the protrusions 61 are disposed on the first surface 11 of the metal porous structure 1, and the abrasive particles 2 are disposed in the grooves 60 between the protrusions 61 (an adhesive material may be provided in the grooves 60).

[0065] It should be noted that the present invention does not limit the order of forward and backward movement of the rigid platform 6 and the metal porous structure 1. For example, the present invention may move the rigid platform 6 downward to press the metal porous structure 1, or may leave the rigid platform 6 stationary and move the metal porous structure 1 upward, thereby pressing the multiple abrasive particles 2 toward the multiple grooves 60 of the rigid platform 6, forcing the multiple abrasive particles 2 into the metal porous structure 1 and deforming the metal porous structure 1. Furthermore, the present invention does not limit the vertical positional relationship between the rigid platform 6 and the metal porous structure 1. For example, the positions of the rigid platform 6 and the metal porous structure 1 may be reversed.

[0066] 1 and 2, in the brazing process, the metal porous structure 1 is placed in a vacuum environment and compressed so that the overlapping porosity of the metal porous structure 1 is less than 50%. Therefore, after melting, the metal brazing material 3 can penetrate into the metal porous structure 1 through the multiple openings 10 by capillary force, filling the metal porous structure 1 and bonding with the abrasive particles 2, thereby firmly securing the abrasive particles 2 to the metal porous structure 1. This ensures that the abrasive particles 2 do not fall off during subsequent use of the abrasive structure M, and also reduces cracks in the metal brazing material 3 due to thermal stress.

[0067] The above-mentioned steps S11 to S15 are merely one possible example of embedding the abrasive particles 2 into the metal porous structure 1, and do not limit the present invention.

[0068] Next, reference is made to Figures 5, 6, and 9. Figures 5 and 6 are schematic diagrams of steps S10 to S14 of the method for manufacturing a conditioning assembly of the present invention. Figure 9 is a flowchart of steps S10 to S14 of the method for manufacturing a conditioning assembly of the present invention. Step S1, in which a plurality of abrasive particles 2 are fitted into the surface of the metal porous structure 1, further includes steps S10, S12, and S14.

[0069] In step S10, a rigid platform 6 having a plurality of grooves 60 is provided, and a plurality of abrasive particles 2 are placed in the plurality of grooves 60, respectively.

[0070] In step S12, the metal porous structure 1 is placed on a plurality of abrasive particles 2.

[0071] In step S14, the rigid platform 6 and the metal porous structure 1 are pressed against each other, so that the abrasive particles 2 are fitted into the metal porous structure 1, and the metal porous structure 1 is deformed by the pressure.

[0072] Specifically, in FIG. 5, a plurality of abrasive particles 2 are first placed in a plurality of grooves 60 of a rigid platform 6 (see part R1 in FIG. 5). An adhesive material, such as a spray adhesive or double-sided tape, may be applied to the grooves 60 so that the abrasive particles 2 can adhere to the grooves 60. Next, a metal porous structure 1 is placed on the plurality of abrasive particles 2 (see parts R2 and R3 in FIG. 5). Next, as shown in FIG. 6, a carrier P is used to press down the rigid platform 6 to compress the metal porous structure 1, so that the metal porous structure 1 is compressed and deformed, and the plurality of abrasive particles 2 are fitted into the plurality of openings 10 of the metal porous structure 1. Similarly, the difference in height between any two abrasive particles 2 among the plurality of abrasive particles 2 does not exceed 20 μm, i.e., the plurality of abrasive particles 2 have approximately the same height.

[0073] More specifically, in steps S10 to S14, a plurality of abrasive particles 2 are first placed in a plurality of grooves 60 of the rigid platform 6, and then pressed. Furthermore, the plurality of abrasive particles 2 are placed on the second surface 12 of the metal porous structure 1. Thereafter, a layer of metal brazing material 3 is placed on the first surface 11 of the metal porous structure 1, and the metal porous structure 1 is placed in a vacuum furnace to perform the brazing process.

[0074] Similarly, the present invention is not limited by the positions of the abrasive particles 2 and the protrusions 61. For example, a modified example will be described using part R2 in Fig. 5. The abrasive particles 2 and the protrusions 61 may be disposed on the second surface 12 of the metal porous structure 1. That is, the protrusions 61 are disposed on the second surface 12 of the metal porous structure 1, and the abrasive particles 2 are disposed in the grooves 60 between the protrusions 61 (an adhesive material may be disposed in the grooves 60).

[0075] Alternatively, the abrasive particles 2 and the protrusions 61 may be provided on different carriers. For example, a modified example will be described using part R2 in FIG. 5 . The abrasive particles 2 may be pre-arranged on the rigid platform 6 (the surface of the rigid platform 6 may be provided with an adhesive material, such as a spray adhesive or double-sided tape, so that the abrasive particles 2 can adhere to the surface of the rigid platform 6), the protrusions 61 may be placed on the second surface 12 of the metal porous structure 1, and the grooves 60 may be formed in the metal porous structure 1. Alternatively, for example, the abrasive particles 2 may be pre-arranged on the second surface 12 of the metal porous structure 1 (the second surface 12 may be provided with an adhesive material), the protrusions 61 may be placed on the rigid platform 6, and the grooves 60 may be formed between the protrusions 61 of the rigid platform 6.

[0076] It should be noted that in many of the above-mentioned modified embodiments, if the heads of the abrasive particles 2 (i.e., the cutting ends 2T of the abrasive particles 2 in FIG. 2) are first brought into contact with the same plane and then the subsequent pressing step is performed, this method can also be called a head-aligned contour method. Also, if the bottoms of the abrasive particles 2 are first brought into contact with the same plane (i.e., as in the R1 portion of FIG. 5, when the cutting ends 2T are not initially at the same height) and then the subsequent pressing step is performed, this method can also be called a bottom-aligned contour method.

[0077] 1 and 2, in the brazing process, the metal porous structure 1 is in a vacuum environment and compressed so that the overlapping porosity of the metal porous structure 1 is less than 50%. Therefore, after melting, the metal brazing material 3 can penetrate into the metal porous structure 1 through the multiple openings 10 by capillary force and fill the metal porous structure 1. In turn, the metal brazing material 3 bonds with the abrasive particles 2, thereby firmly securing the abrasive particles 2 to the metal porous structure 1.

[0078] In the present invention, by forcing the abrasive particles 2 into the deformable metal porous structure 1, when the abrasive particles 2 are locked in the multiple openings 10 of the metal porous structure 1, the metal porous structure 1 can further produce the effect of covering the abrasive particles 2. Furthermore, the present invention adjusts the height of the exposed portions of the multiple abrasive particles 2 using a rigid platform 6 provided with protrusions 61 and grooves 60 so that the height of the exposed portions of the multiple abrasive particles 2 can be kept constant, i.e., the difference in vertical height between any two cutting edges 2T does not exceed 20 μm.

[0079] Furthermore, during the high-temperature brazing process, the molten metal brazing material 3 combines with the metal porous structure 1 and the plurality of abrasive particles 2 to form the abrasive structure M. The structural design of the metal porous structure 1 prevents the plurality of abrasive particles 2 from moving or flipping over due to the boiling of the metal brazing material 3 during the high-temperature brazing process of the metal brazing material 3, which in turn prevents the heights of the plurality of abrasive particles 2 from becoming uneven, i.e., prevents the height difference between the exposed portions of the plurality of abrasive particles 2 from becoming too large.

[0080] It is also worth noting that in all of the above examples, the abrasive particles 2 are first placed on the uncompressed metal porous structure 1 and then pressed together, but the present invention is not limited to this. In other embodiments, the deformable metal porous structure 1 may be compressed first, and then the abrasive particles 2 may be fitted onto it. However, in this case, since the metal porous structure 1 is compressed and no longer elastic, the abrasive particles 2 are inserted into the metal porous structure 1, and the porous structure can deform to cover the abrasive particles.

[0081] Please refer to Figure 10. Figure 10 is a micrograph of a partial front view of an abrasive structure according to one embodiment of the present invention. The micrograph in Figure 10 was taken at 200x magnification using a Keyence digital microscope (VHX-2000 model). The image in Figure 10 shows the result of taking a front view after the fabrication of the conditioning assembly was completed. As can be seen from Figure 10, the metal porous structure 1 itself has a plurality of interconnected open pores 10, and a plurality of abrasive particles 2 are embedded and fixed in the open pores 10.

[0082] [Beneficial effects of the embodiment] The abrasive structure M, conditioning assembly D and manufacturing method of the conditioning assembly D according to the present invention not only maintain a constant height of the abrasive particles 2 fixed to the metal porous structure 1 by using the technical means that "the metal brazing material 3 is filled and penetrates into the metal porous structure 1 and bonds with the metal porous structure 1 and multiple abrasive particles 2" and "the material constituting the metal porous structure 1 and the material constituting the metal brazing material 3 have at least one of the same constituent elements," but also strengthen the structural strength of the abrasive structure M and extend its service life.

[0083] In the present invention, the metallic brazing material 3 can form a chemical bond with the abrasive particles 2. The material (stainless steel) constituting the base 4 and the material (nickel-based alloy) constituting the metallic porous structure 1 (foamed nickel) and the metallic brazing material 3 have at least one identical constituent element, and therefore have similar thermal expansion coefficients. In this way, the structural stability of the conditioning assembly D is strengthened, and the probability that the metallic porous structure 1 will fall off the base 4 is reduced.

[0084] Furthermore, since the compressed porosity of the metal porous structure 1 in the present invention is less than 50%, the metal brazing filler material 3 can generate capillary action inside the metal porous structure 1, and the metal brazing filler material 3 can penetrate into the metal porous structure 1 through the multiple openings 10 due to capillary force, filling the metal porous structure 1 and ultimately bonding with the abrasive particles 2, thereby firmly locking the abrasive particles 2 to the metal porous structure 1. This then ensures that the abrasive particles 2 do not fall off during use of the abrasive structure M, and also reduces cracks in the metal brazing filler material 3 due to thermal stress.

[0085] Furthermore, during the high-temperature brazing process, the molten metal brazing material 3 bonds with the metal porous structure 1 and the plurality of abrasive particles 2 to form the abrasive structure M. The structural design of the metal porous structure 1 in the present invention allows the height of the exposed portions of the plurality of abrasive particles 2 to be kept constant, thereby making the height of the polishing surface of the metal porous structure 1 uniform. Therefore, the metal porous structure 1 prevents the plurality of abrasive particles 2 from moving or flipping over due to the boiling of the metal brazing material 3 during the high-temperature brazing process of the metal brazing material 3, resulting in uneven heights of the plurality of abrasive particles 2.

[0086] The above disclosure is merely a preferred embodiment of the present invention and does not limit the scope of the claims of the present invention. Therefore, all equivalent technical modifications made using the specification and drawings of the present invention are included in the scope of the claims of the present invention. [Explanation of symbols]

[0087] D: Conditioning Assembly M: Polished structure 1: Metal porous structure 10: Open hole 10A:Area 101: 1st hole 102:Second hole 11: 1st surface 12:Second surface 2: Abrasive particles 2A: Maximum cross-sectional area 2T: Cutting end 3: Metal brazing material 4: Base 5: Adhesive 6: Rigid platform 60: Groove 61:Protrusion P: Career S1, S2, S3, S4, S10, S11, S12, S13, S14, S15: Steps K1, K2, K3, R1, R2, R3: Partial

Claims

1. a metal porous structure; a plurality of abrasive particles dispersed and fitted in the metal porous structure so that each particle is partially exposed; a metal brazing material that is filled and infiltrated into the metal porous structure and bonds with the metal porous structure and the plurality of abrasive particles; Equipped with The material constituting the metal porous structure and the material constituting the metal brazing material have at least one identical constituent element.

1. An abrasive structure comprising:

2. An intermetallic compound is generated between the metal brazing material, the metal porous structure, and the plurality of abrasive particles.

10. The abrasive structure of claim 1.

3. The constituent material of the metal porous structure is nickel, iron, copper, a nickel alloy, an iron alloy, a copper alloy, a titanium alloy, foamed nickel, foamed titanium, or foamed stainless steel.

10. The abrasive structure of claim 1.

4. The metal porous structure is a compressed structure and has a compressed porosity of less than 50%.

10. The abrasive structure of claim 1.

5. The melting point of the metal porous structure is higher than the melting point of the metal brazing material by 100°C or more.

10. The abrasive structure of claim 1.

6. The flatness of the metal porous structure is less than 50 μm; 10. The abrasive structure of claim 1.

7. The base and The abrasive structure according to any one of claims 1 to 6, which is placed on the base; Equipped with A conditioning assembly comprising:

8. The material of the base includes stainless steel, metal alloy, ceramic material, or engineering plastic; 8. The conditioning assembly of claim 7.

9. further comprising an adhesive disposed between the base and the abrasive structure to bond the base and the abrasive structure together; 8. The conditioning assembly of claim 7.

10. The adhesive is a metal brazing material or a polymer adhesive.

10. The conditioning assembly of claim 9.

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