Liquid recovery device and liquid recovery method

Abstract

To provide a liquid recovery device and a liquid recovery method capable of improving workability of insertion and extraction work of piping and shortening work time.SOLUTION: The liquid recovery device includes a first pipe, a tank, a second pipe, a second valve, a relief valve, and a controller. The first pipe is provided with a coupler at each end, one of which is connectable to the utility facility, and includes a feed pipe through which the liquid is supplied from the utility facility to a device that is a supply target of the liquid, and a return pipe through which the liquid is returned from the device to the utility facility. The tank collects the liquid from the return pipe when the first valve on the utility facility side is closed. The second pipe branches off from the return pipe to the tank. The second valve is provided in the second pipe. The relief valve is provided in the tank. The controller is configured to control the liquid recovery device to release the pressure in the return piping by opening the second valve and the relief valve when the liquid is recovered.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present disclosure relates to a liquid recovery device and a liquid recovery method. [Background technology]

[0002] Patent Document 1 states that "a cooling liquid circulation device includes a sealed tank for storing a temperature-controlled cooling liquid, a heat load connected to the tank via a feed pipe and a return pipe, a pump for circulating the cooling liquid in the tank to the heat load via the feed pipe and the return pipe, a liquid level adjustment chamber that communicates with the inside of the tank at the bottom, a compressed gas supply source for supplying compressed gas, a pipe connecting the compressed gas supply source and the liquid level adjustment chamber, and a solenoid valve connected to this pipe, and by switching this solenoid valve to supply or discharge compressed gas to the liquid level adjustment chamber, the cooling liquid flows out of the liquid level adjustment chamber into the tank or flows into the liquid level adjustment chamber from the tank, thereby controlling the temperature of the liquid level adjustment chamber. the cooling liquid remaining inside the feed pipe, the heat load, and the return pipe is returned to the tank by switching the solenoid valve to supply compressed gas to the feed pipe; a recovery gas pipe that is connected to the gas phase of the tank and that opens the gas phase to the outside when adjusting the cooling liquid level; a level switch that is provided in the tank and detects the cooling liquid level; a flow meter that is connected to the return pipe and detects the flow rate of the cooling liquid flowing through the return pipe; and a control device that controls the pump and each solenoid valve.

[0003] Patent Document 2 discloses that "the circulation device has a check valve connected in parallel to the primary flow path for sending the cooling liquid to the heat load through an external pipe, to prevent the cooling liquid in the external pipe from flowing back into the circulation device when operation is stopped, and a thermal expansion relief valve that opens when the pressure of the cooling liquid in the external pipe rises too much to return part of the cooling liquid to the circulation device, and a purge check valve connected to the external pipe for blowing compressed gas into the external pipe when recovering the cooling liquid in the external pipe."

[0004] Patent Document 3 discloses a cooling device having: a supply pipe through which a refrigerant to be supplied to an object to be cooled flows; a recovery pipe through which the refrigerant returning from the object to be cooled flows; a pump arranged between the recovery pipe and the supply pipe and sending the refrigerant to the supply pipe; a heat exchanger arranged midway through the supply pipe or the recovery pipe for cooling the refrigerant to be supplied to the object to be cooled to a temperature below the freezing point of water dissolved in the refrigerant; a refrigerator for cooling the heat exchanger; a branch pipe having one end connected to the supply pipe and the other end connected to the recovery pipe, through which a portion of the refrigerant sent from the pump to the supply pipe branches off; a heating unit arranged midway through the branch pipe for heating the refrigerant to a temperature higher than the freezing point of water dissolved in the refrigerant; and a moisture adsorption filter arranged midway through the branch pipe, through which the refrigerant heated by the heating unit passes and which adsorbs moisture mixed in the refrigerant.

[0005] Patent Document 4 discloses a circulating water supply system comprising: a circulating water tank for storing circulating water; a first pipe for sending the circulating water from the circulating water tank to one or more manufacturing devices; a second pipe for returning the circulating water from the one or more manufacturing devices to the circulating water tank; a pressure detector for detecting the pressure of gas in the second pipe; a control valve provided on the pipe between the second pipe and the circulating water tank; and a control unit for controlling the opening degree of the control valve based on the pressure of the gas detected by the pressure detector. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] US Patent Application Publication No. 2002 / 0069932 [Patent Document 2] US Patent Application Publication No. 2002 / 0007932 [Patent Document 3] US Patent Application Publication No. 2007 / 0044504 [Patent Document 4] US Patent Application Publication No. 2016 / 0060848 Summary of the Invention [Problem to be solved by the invention]

[0007] The present disclosure provides a liquid recovery device and a liquid recovery method that can improve the workability of inserting and removing pipes and reduce the work time. [Means for solving the problem]

[0008] A liquid recovery device according to one embodiment of the present disclosure includes a first pipe, a tank, a second pipe, a second valve, a relief valve, and a control unit. The first pipe has couplers at each end, one end connectable to a utility facility, and includes a feed pipe that supplies liquid from the utility facility to a device to be supplied with the liquid, and a return pipe that returns the liquid from the device to the utility facility. The tank recovers liquid from the return pipe when the first valve on the utility facility side is closed. The second pipe branches off from the return pipe to the tank. The second valve is provided on the second pipe. The relief valve is provided on the tank. The control unit is configured to control the liquid recovery device to open the second valve and the relief valve to release pressure in the return pipe when recovering liquid. [Effects of the Invention]

[0009] According to the present disclosure, the workability of inserting and removing pipes can be improved and the work time can be reduced. [Brief explanation of the drawings]

[0010] [Figure 1] FIG. 1 is a diagram showing an example of connections of a liquid recovery device according to a first embodiment of the present disclosure. [Figure 2] FIG. 2 is a diagram showing an example of the configuration of the liquid recovery apparatus in the first embodiment. [Figure 3] FIG. 3 is a diagram showing an example of the configuration of an electrical component panel of the liquid recovery apparatus in the first embodiment. [Figure 4]FIG. 4 is a diagram showing an example of piping of the liquid recovery apparatus in the first embodiment. [Figure 5] FIG. 5 is a diagram showing an example of the state of the liquid recovery device when recovering cooling water. [Figure 6] FIG. 6 is a diagram showing an example of a state when the liquid recovery device is being refilled with cooling water. [Figure 7] FIG. 7 is a diagram showing an example of a state when the liquid recovery device has been completely refilled with cooling water. [Figure 8] FIG. 8 is a flowchart showing an example of a liquid recovery method in the first embodiment. [Figure 9] FIG. 9 is a flowchart showing an example of a liquid refilling method according to the first embodiment. [Figure 10] FIG. 10 is a diagram showing an example of connection of a liquid recovery device in the second embodiment. [Figure 11] FIG. 11 is a flowchart showing an example of a liquid recovery method in the second embodiment. [Figure 12] FIG. 12 is a flowchart showing an example of a liquid refilling method according to the second embodiment. [Figure 13] FIG. 13 is a diagram showing an example of connection of a liquid recovery device in the third embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0011] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The following describes in detail embodiments of a liquid recovery device and a liquid recovery method, with reference to the accompanying drawings. However, the disclosed technology is not limited to the following embodiments.

[0012] For equipment requiring cooling, a cooling water hose is connected to a utility facility's piping, for example, to receive cooling water from the utility facility and cool the equipment. The cooling water hose is equipped with a coupler, such as a one-touch coupler, which can be manually inserted and removed. This type of coupler is easy to use when the cooling water hose is empty. However, once cooling water is flowing, a certain amount of pressure is applied to the cooling water hose, making it difficult to manually remove the coupler, even though it can be manually removed. Therefore, once cooling water is flowing, the pressure inside the cooling water hose must be released in order to reattach the removed cooling water hose, which increases the time required for connecting the cooling water hose. Conventionally, to release the pressure inside the cooling water hose, the coupler's joints must be loosened to remove the cooling water from the hose. In other words, manually connecting pressurized cooling water hoses is difficult. Furthermore, loosening the joints requires the laborious task of reassembling the coupler and risks water leaks. Furthermore, workers are required to have a certain level of knowledge about opening and assembling joints, making it difficult to standardize the work. Therefore, it is expected that the workability of inserting and removing piping (cooling water hoses) can be improved and the work time can be reduced.

[0013] (First embodiment) [Example of connection to a liquid recovery device] FIG. 1 is a diagram showing an example of a connection of a liquid recovery apparatus in a first embodiment of the present disclosure. As shown in FIG. 1, in connection example 1 of the first embodiment, a liquid recovery apparatus 100 is connected between equipment 10 to be cooled and utility equipment 20. The equipment 10 is, for example, a plasma processing apparatus. The utility equipment 20 is, for example, factory equipment (utility) in which the equipment 10 is installed. The equipment 10 and the liquid recovery apparatus 100 are connected by piping 30. The utility equipment 20 and the liquid recovery apparatus 100 are connected by piping 40. The piping 30, 40 each includes a feed pipe that supplies cooling water from the utility equipment 20 to the equipment 10, and a return pipe that returns cooling water from the equipment 10 to the utility equipment 20. Furthermore, the piping 30, 40 is, for example, configured of a flexible hose near the side connected to the liquid recovery apparatus 100. The pipes 30 and 40 may be hard pipes made of, for example, stainless steel or polyvinyl chloride (PVC), or may be a combination of hard pipes and hoses. Cooling water is an example of a liquid. The liquid may also be fluorine-based brine, which is an example of a temperature control medium.

[0014] [Configuration of liquid recovery device] FIG. 2 is a diagram showing an example of the configuration of the liquid recovery apparatus according to the first embodiment. As shown in FIG. 2, the liquid recovery apparatus 100 includes a drain pan 101, casters 102, a water leak detection band 103, an electrical component panel 110, a tank 120, a pump 130, and piping 140. Note that FIG. 2 shows the piping of each component only diagrammatically, and details will be described later. The drain pan 101 is, for example, rectangular when viewed from above, and has casters 102 on its bottom surface, forming a base of the liquid recovery apparatus 100. The casters 102 are, for example, provided at the four corners of the drain pan 101, and each have an adjuster function that allows the height to be adjusted. In other words, the liquid recovery apparatus 100 is movable by the casters 102. Note that the liquid recovery apparatus 100 can not only recover cooling water from the device 10, but also circulate cooling water between the device 10 and the drain pan 101, as described below.

[0015] The water leak detection band 103 detects water leaks from the tank 120, the pump 130, and the piping 140. The water leak detection band 103 is connected to a water leak detector provided on the electrical component panel 110. The electrical component panel 110 is provided on one side of the drain pan 101 in a direction perpendicular to the drain pan 101 (height direction). The tank 120 and the pump 130 are also disposed in the drain pan 101. Although not shown, the drain pan 101 is also provided with a support member for the piping 140.

[0016] The electrical component panel 110 is provided with a control unit and the like that controls each part of the liquid recovery apparatus 100. Figure 3 is a diagram showing an example of the configuration of the electrical component panel of the liquid recovery apparatus in the first embodiment. As shown in Figure 3, the electrical component panel 110 has a DIN (Deutsches Institutfur Normung) rail 111, a circuit protector (CP) 112, a DC (Direct Current) power supply 113, a control unit 114, and a terminal block 115.

[0017] DIN rail 111 is a metal rail for installing circuit protector 112, DC power supply 113, control unit 114, terminal block 115, etc. on electrical component panel 110. DIN rail 111 is fixed to electrical component panel 110 with screws or the like. Circuit protector 112, DC power supply 113, control unit 114, terminal block 115, etc. are attached to DIN rail 111 with screws or the like.

[0018] The circuit protector 112 protects the DC power supply 113, the control unit 114, the terminal block 115, and the like, which are provided in the electrical component panel 110, from overcurrent.

[0019] The DC power supply 113 supplies power to the control unit 114, the devices on the terminal block 115, the pump 130, etc. When the pump 130 is operated using a commercial power source, the commercial power source may be supplied to the pump 130.

[0020] The control unit 114 processes computer-executable instructions that cause the liquid recovery apparatus 100 to perform the various steps described in this disclosure. The control unit 114 may be configured to control each element of the liquid recovery apparatus 100 to perform the various steps described herein. In one embodiment, part or all of the control unit 114 may be included in the liquid recovery apparatus 100. The control unit 114 may include a processing unit 114a1, a storage unit 114a2, and a communication interface 114a3. The control unit 114 may be realized by, for example, the computer 114a. The processing unit 114a1 may be configured to read a program from the storage unit 114a2 and execute the read program to perform various control operations. This program may be stored in the storage unit 114a2 in advance or may be acquired via a medium when needed. The acquired program is stored in the storage unit 114a2 and is read from the storage unit 114a2 and executed by the processing unit 114a1. The medium may be various storage media readable by the computer 114a, or may be a communication line connected to the communication interface 114a3. The processing unit 114a1 may be a CPU (Central Processing Unit). The storage unit 114a2 may include a RAM (Random Access Memory), a ROM (Read Only Memory), an HDD (Hard Disk Drive), an SSD (Solid State Drive), or a combination thereof. The communication interface 114a3 may communicate with the liquid recovery apparatus 100 via a communication line such as a LAN (Local Area Network). The control unit 114 may also be, for example, a PLC (Programmable Logic Controller) or the like.

[0021] The terminal block 115 relays wiring to the DC power supply 113, the control unit 114, the pump 130, and valves and the like provided in the piping 140. Furthermore, the terminal block 115 is also equipped with, for example, a water leak detector (not shown).

[0022] Returning to the explanation of Figure 2, the tank 120 collects and stores cooling water from a return pipe 142 (described later) of the pipe 140 via a pipe 122 (described later). That is, the tank 120 is configured to store a liquid at room temperature and normal pressure. The tank 120 is, for example, an airtight reserve tank. A pipe 123 (described later) extending to the vicinity of the bottom surface inside the tank 120 is connected to the tank 120. The pipe 123 is connected to a feed pipe 141 (described later) via a pump 130.

[0023] The pump 130 is provided in the pipe 123 described below, and sends the cooling water stored in the tank 120 to the feed pipe 141 to replenish the tank 120. That is, the pump 130 is provided in the pipe 123 (fourth pipe), and replenishes the cooling water (liquid) collected in the tank 120 into the pipe 140 (first pipe).

[0024] The piping 140 includes a feed pipe 141 and a return pipe 142. The feed pipe 141 and the return pipe 142 are, for example, hard pipes. Couplers 151 and 152 are provided at the ends of the feed pipe 141 and the return pipe 142 that are connected to the power utility facility 20. The couplers 151 and 152 may be collectively referred to as coupler 150. Furthermore, couplers 154 and 155 are provided at the ends of the feed pipe 141 and the return pipe 142 that are connected to the equipment 10. The couplers 154 and 155 may be collectively referred to as coupler 153.

[0025] The couplers 150 and 153 are, for example, one-touch couplers that can be manually inserted and removed. For example, the couplers 151 and 155 on the side where the cooling water is input (the IN side in FIG. 4) are plugs, and the couplers 152 and 154 on the side where the cooling water is output (the OUT side in FIG. 4) are sockets.

[0026] [Cooling water flow path] Next, the piping of liquid recovery apparatus 100, which is the cooling water flow path, will be described using Figure 4. Figure 4 is a diagram showing an example of the piping of the liquid recovery apparatus in the first embodiment. As shown in Figure 4, a coupler 150 and a valve 131 are provided on the side of piping 140 that is connected to utility equipment 20. That is, a coupler 151 and a valve 131a are provided on the side of feed piping 141 that is connected to utility equipment 20. Furthermore, a coupler 152 and a valve 131b are provided on the side of return piping 142 that is connected to utility equipment 20. The valve 131 is an example of a first valve.

[0027] On the other hand, a coupler 153 and a valve 136 are provided on the side of the pipe 140 that is connected to the device 10. That is, a coupler 154 and a valve 136a are provided on the side of the feed pipe 141 that is connected to the device 10. Also, a coupler 155 and a valve 136b are provided on the side of the return pipe 142 that is connected to the device 10.

[0028] That is, the piping 140 is an example of a first piping having couplers 150, 153 at each end, one end of which is connectable to the utility facility 20, a feed piping 141 that supplies liquid from the utility facility 20 to the equipment 10 that is the liquid supply target, and a return piping 142 that returns the liquid from the equipment 10 to the utility facility 20. The piping 140 (first piping) is a piping that connects the utility facility 20 and the equipment 10. The valve 131 (first valve) is provided on the piping 140 (first piping) closer to the equipment 10 than the coupler 150 on the utility facility 20 side.

[0029] Between valve 131b and valve 136b of return pipe 142, pipe 122 and pipe 125 are provided in this order from the valve 131b side. Pipe 122 is a pipe that branches off from return pipe 142 to tank 120, and has valve 132. In other words, pipe 122 is an example of a second pipe that branches off from return pipe 142 to tank 120. Valve 132 is an example of a second valve provided on the second pipe. Tank 120 is an example of a tank that recovers liquid from return pipe 142 when valve 131 (first valve) on the power utility facility 20 side is closed.

[0030] A pipe 123 is connected between the valve 131a and the valve 136a of the feed pipe 141. The pipe 123 connects the tank 120 and the feed pipe 141 via the pump 130. The pipe 123 is provided with a valve 133, a pump 130, and a valve 134, in this order from the tank 120 side. The pipe 123 is an example of a fourth pipe, and the valve 133 is an example of a third valve. That is, the valve 133 (third valve) is provided in the pipe 123 (fourth pipe) between the tank 120 and the pump 130. A pipe 125 is connected between the valve 133 and the pump 130 of the pipe 123. That is, the pipe 125 connects the return pipe 142 and the pipe 123 (fourth pipe) between the valve 133 (third valve) and the pump 130. The valve 135 is provided in the pipe 125. The pipe 125 is an example of a fifth pipe, and the valve 135 is an example of a fourth valve. Furthermore, a level sensor 124 for measuring the liquid level in the tank 120 is provided at the tip of the pipe 123 inside the tank 120.

[0031] A relief valve 121 is provided on the top of the tank 120. When cooling water is collected from the return pipe 142 through the pipe 122 into the tank 120, the relief valve 121 releases gas (air) inside the tank 120 to the outside to reduce the pressure inside the tank 120. In this embodiment, the relief valve 121 can be controlled to open and close by the control unit 114.

[0032] [Liquid recovery device operation] Next, the operation of liquid recovery apparatus 100 will be described with reference to Figures 5 to 7. In Figures 5 to 7, valves in the open state are shown in white, and valves in the closed state are shown in black. In connection example 1 of Figure 1, in which liquid recovery apparatus 100 is connected between equipment 10 and utility facility 20, valves 131 and 136 are open, and valves 132 to 135 are closed, in the initial state before cooling water is recovered. The pressure of the cooling water in pipe 30 is assumed to be, for example, approximately 0.1 to 0.5 MPa.

[0033] Fig. 5 is a diagram showing an example of the state of the liquid recovery device when recovering cooling water. When cooling water is recovered from the piping 30 connecting the device 10 and the liquid recovery device 100, as shown in Fig. 5, the valve 131 is controlled to be closed. Next, the valve 132 and the relief valve 121 are controlled to be open. The cooling water in the piping 140 and the piping 30 on the device 10 side from the liquid recovery device 100 flows out from the coupler 154 through the piping 30 to the device 10, as shown by arrows 143a and 143b, starting from the feed piping 141 side. Note that a dry air supply piping (not shown) may be connected to the feed piping 141 so that the cooling water is purged with dry air.

[0034] Furthermore, cooling water from equipment 10 flows through coupler 155 into return pipe 142 via pipe 30, and is recovered into tank 120 via pipe 122 as indicated by arrows 143c to 143e. Note that, as cooling water is recovered, gas (air) in tank 120 is released into the atmosphere from relief valve 121 as indicated by arrow 144. When the recovery of cooling water into tank 120 is complete, pipe 30 connected to coupler 153 is depressurized and can be manually removed. That is, when cooling water (liquid) is recovered, the pressure inside return pipe 142 after the pressure is released becomes atmospheric pressure.

[0035] Fig. 6 is a diagram showing an example of the state of the liquid recovery device when refilling with cooling water. Fig. 7 is a diagram showing an example of the state of the liquid recovery device when refilling with cooling water is completed. Figs. 6 and 7 explain the case where the cooling water recovered in tank 120 in Fig. 5 is refilled into pipe 30. Note that pipe 30 can be connected to coupler 153 manually because the pressure inside pipe 30 is released. Furthermore, the states of valves 131 to 136 and relief valve 121 are set to the initial states after cooling water recovery in Fig. 5.

[0036] After connecting the pipe 30 to the coupler 153, the valve 132 and the relief valve 121 are controlled to be closed. Next, the valves 133 and 134 are controlled to be open. The pump 130 is controlled to refill the pipe 30 on the device 10 side with cooling water from the tank 120. Note that the valve 132 and the relief valve 121 may be controlled to be temporarily opened at the start of refilling in order to exhaust gas (air) remaining inside the return pipe 142. In other words, the valve 132 and the relief valve 121 may be controlled to be closed with a delay after the start of the pump 130. The cooling water from the tank 120 is supplied to the feed pipe 141 sequentially from the tank 120 side, as indicated by arrows 145a to 145c. The cooling water supplied to the feed pipe 141 is supplied from the coupler 154 through the pipe 30 to the device 10, as indicated by arrow 145d. Furthermore, the cooling water from the equipment 10 flows through the pipe 30 and the coupler 155 into the return pipe 142 as shown by the arrow 145e.

[0037] As shown in FIG. 7, when a drop in the liquid level of the cooling water in the tank 120 (lower limit of the liquid level) is measured by the level sensor 124, the valve 133 is controlled to be closed, and the valve 135 is controlled to be open. In other words, when the completion of refilling of the cooling water is detected, the cooling water path is switched from the refilling path to the circulation path. Note that the lower limit of the liquid level (height) measured by the level sensor 124 (lower limit of the liquid level) can be, for example, the height of the end of the pipe 123. When the path is switched to the circulation path, the cooling water in the device 10, the pipe 30, and the pipe 140 returns to the pipe 123 via the return pipe 142 and the pipe 125, and is supplied to the feed pipe 141 by the pump 130. In other words, the cooling water starts circulating between the liquid recovery device 100 and the device 10, as indicated by arrows 146a to 146e. Furthermore, after valves 132 and 133 are controlled to be in a closed state and valve 135 is controlled to be in an open state, that is, after transition to a circulation state, pump 130 is stopped. Thereafter, valve 131 is controlled to be in an open state and valves 134 and 135 are controlled to be in a closed state, thereby forming a cooling water flow path that travels back and forth between utility facility 20, piping 40, piping 140 of liquid recovery device 100, piping 30, and equipment 10. As a result, cooling water is again supplied to equipment 10 from utility facility 20.

[0038] [Liquid recovery method] Next, a liquid recovery method according to the first embodiment will be described. Fig. 8 is a flowchart showing an example of the liquid recovery method according to the first embodiment. In the liquid recovery method of Fig. 8, similar to the state when recovering cooling water in Fig. 5, in the initial state before the recovery of cooling water, valves 131 and 136 are open and valves 132 to 135 are closed.

[0039] When recovering cooling water in Connection Example 1, control unit 114 controls valve 131, which is the valve on the power utility facility 20 side, to close (step S1). Next, control unit 114 controls valve 132 of piping 122 connecting return piping 142 and tank 120 to open, and relief valve 121 (step S2). That is, when recovering liquid, control unit 114 controls liquid recovery device 100 to open valve 132 (second valve) and relief valve 121 to release the pressure in return piping 142. As a result, the cooling water in piping 30 on the device 10 side is recovered from liquid recovery device 100 to tank 120.

[0040] When the worker confirms that the recovery of the cooling water into the tank 120 is complete, he or she removes the pipe 30 (hose) connected to the coupler 153 on the device 10 side (step S3). In this way, by using the liquid recovery device 100, the workability of the piping removal work can be improved and the work time for the piping removal work can be reduced.

[0041] Fig. 9 is a flowchart showing an example of a liquid refilling method according to the first embodiment. In the liquid refilling method of Fig. 9, the states of the valves 131 to 136 and the relief valve 121 after the cooling water has been collected are set as initial states, similar to the state during cooling water refilling in Fig. 6.

[0042] When refilling the cooling water in Connection Example 1, after an operator connects the piping 30 (hose) to the coupler 153 on the device 10 side, the control unit 114 controls the valve 132 and the relief valve 121 to close. Next, the control unit 114 controls the valves 133 and 134 of the piping 123 that connects the tank 120 and the feed piping 141 via the pump 130 to open (step S11). The control unit 114 controls the pump 130 to operate (step S12) and starts refilling the cooling water in the tank 120 to the piping 30 on the device 10 side.

[0043] Based on the measurement result of level sensor 124, control unit 114 detects the completion of refilling of pipe 140 (first pipe) with cooling water (liquid). When control unit 114 detects the completion of refilling of cooling water, it controls valve 133 between tank 120 and pump 130 to close, and controls valve 135 of pipe 125 connecting return pipe 142 and pump 130 to open (step S13). Thereafter, control unit 114 controls pump 130 to stop. Thereafter, control unit 114 controls valve 131, which is the valve on the utility facility 20 side, to open (step S14), and controls valves 134 and 135 to close. In this way, by using liquid recovery device 100, the workability of pipe connection work can be improved and the work time for pipe connection work can be shortened. In other words, the liquid recovery method and the liquid refilling method can improve the workability of pipe insertion and removal work and shorten the work time. Furthermore, the work of inserting and removing pipes can be standardized.

[0044] (Second embodiment) In the first embodiment described above, the liquid recovery apparatus 100 was connected between the equipment 10 to be cooled and the utility facility 20, but the liquid recovery apparatus 100 may also be connected to a port branching off from the pipe connecting the equipment 10 and the utility facility 20. This embodiment will be described as the second embodiment. In the second embodiment, the liquid recovery apparatus 100 is the same as in the first embodiment described above, so a description of the overlapping configuration and operation will be omitted.

[0045] FIG. 10 is a diagram showing an example of connections in a liquid recovery device according to the second embodiment. As shown in FIG. 10 , in connection example 2 of the second embodiment, a port 44 is provided branching from a pipe 41 connecting the equipment 10 to be cooled and the utility facility 20. The pipe 41 includes a feed pipe 41a that supplies cooling water from the utility facility 20 to the equipment 10 and a return pipe 41b that returns cooling water from the equipment 10 to the utility facility 20. The port 44 includes ports 44a and 44b that are connected to the feed pipe 41a and the return pipe 41b, respectively. Valves 42 and 43 are provided on the feed pipe 41a and the return pipe 41b on the utility facility 20 side, respectively. Valves 45 and 46 are provided between the ports 44a and 44b and the branch points from the feed pipe 41a and the return pipe 41b, respectively. The valves 42 and 43 are an example of a first valve, and the pipe 41 is an example of a third pipe.

[0046] That is, pipe 140 (first pipe) of liquid recovery apparatus 100 is connected to port 44 branching from pipe 41 (third pipe) between power utility facility 20 and device 10. Valves 42 and 43 (first valves) are provided on pipe 41 (third pipe).

[0047] Port 44 is configured, for example, from the branch point with pipe 41 and one or more portions of valves 45 and 46 to the port 44 side, by, for example, a flexible hose. The end of port 44 has a coupler (not shown) that can be connected to coupler 153. Pipe 41 and port 44 may be hard pipes made of, for example, stainless steel or polyvinyl chloride, or may be a combination of hard pipes and hoses. Valves 42, 43, 45, and 46 have control lines connected to control unit 114 of liquid recovery device 100, allowing them to be controlled by control unit 114. Valves 42, 43, 45, and 46 may be manually operated by an operator.

[0048] [Liquid recovery method] Next, a liquid recovery method according to the second embodiment will be described. Fig. 11 is a flowchart showing an example of the liquid recovery method according to the second embodiment. In the liquid recovery method of Fig. 11, no piping is connected to the coupler 150 side, so in the initial state before the cooling water is recovered, valves 42, 43, and 136 are open, and valves 45, 46, and 131 to 135 are closed. In the description of the liquid recovery method according to the second embodiment, although the connection destinations are different from those in the first embodiment, steps that operate in the same manner are given the same reference numerals as in the first embodiment.

[0049] When collecting cooling water in connection example 2, the control unit 114 controls the valves 42 and 43, which are valves on the power utility facility 20 side of the feed pipe 41a and the return pipe 41b, to close (step S1).

[0050] The worker connects coupler 153 of liquid recovery apparatus 100 to port 44 (step S21). That is, the worker connects coupler 154 to port 44a and coupler 155 to port 44b. Note that because valves 45 and 46 are closed, ports 44a and 44b are not subjected to pressure from the cooling water on the pipe 41 side, and couplers 154 and 155 can be connected manually.

[0051] Next, the control unit 114 controls the valves 45 and 46 of the ports 44a and 44b to open (step S22). The control unit 114 also controls the valve 132 of the pipe 122 connecting the return pipe 142 and the tank 120 and the relief valve 121 to open (step S2). Note that the order of steps S22 and S2 may be reversed. As a result, the cooling water in the pipe 41 (the supply pipe 41a and the return pipe 41b) on the device 10 side of the valves 42 and 43 is collected into the tank 120.

[0052] When the worker confirms that the recovery of the cooling water into tank 120 is complete, he or she removes port 44 (hose) connected to coupler 153 on the device 10 side of liquid recovery apparatus 100 (step S3). The worker also removes piping 41 from device 10. In this way, even in connection example 2 in which port 44 branching off from piping 41 is provided, by using liquid recovery apparatus 100, the workability of the work of removing piping 41 from device 10 can be improved and the work time for the work of removing piping 41 can be shortened.

[0053] Fig. 12 is a flowchart showing an example of a liquid refilling method in Embodiment 2. In the liquid refilling method of Fig. 12, the states of the valves 42, 43, 45, 46, and 131 to 136 are set to the initial states after the cooling water is recovered.

[0054] When refilling the cooling water in Connection Example 2, after an operator connects the pipe 41 to the device 10 and connects the port 44 (hose) to the coupler 153, the control unit 114 controls the valve 132 and the relief valve 121 to close. Next, the control unit 114 controls the valves 133 and 134 of the pipe 123 that connects the tank 120 and the feed pipe 141 via the pump 130 to open (step S11). The control unit 114 controls the pump 130 to operate (step S12) and starts refilling the cooling water in the tank 120 into the pipe 41.

[0055] When control unit 114 detects the completion of refilling of the cooling water, it controls valve 133 between tank 120 and pump 130 to close, and controls valve 135 of pipe 125 connecting return pipe 142 and pump 130 to open (step S13). Thereafter, control unit 114 controls valves 45 and 46 of port 44 to close, pump 130 to stop, and valves 42 and 43 on the power utility facility 20 side to open (step S31). Thereafter, control unit 114 controls valves 134 and 135 to close and valves 132 and 133 to open, thereby recovering the cooling water remaining in pipe 140 into tank 120 and releasing the pressure in pipe 140.

[0056] The worker removes coupler 153 of liquid recovery apparatus 100 from port 44 (step S32). That is, the worker removes coupler 154 from port 44a and coupler 155 from port 44b. Note that, since valves 45 and 46 are closed for ports 44a and 44b and the cooling water in pipe 140 is also recovered to tank 120, no pressure is applied to the cooling water on the pipe 41 side, and couplers 154 and 155 can be manually removed. Thus, even in connection example 2 in which port 44 branched from pipe 41 is provided, use of liquid recovery apparatus 100 can improve the efficiency of the work of connecting pipe 41 to device 10 and shorten the work time for the work of connecting pipe 41. That is, even in the second embodiment, the efficiency of the work of inserting and removing pipes can be improved and the work time can be shortened. Furthermore, the work of inserting and removing pipes can be standardized.

[0057] (Third embodiment) In the first embodiment described above, replacement or maintenance of the device 10 was envisioned for the device 10 to which the cooling water pipes are already connected, but the present invention may also be applied to a water flow test in which cooling water is supplied to the device during an inspection process for assembled devices. An embodiment in this case will be described as a third embodiment. In the third embodiment, the liquid recovery device 100 is the same as in the first embodiment described above, and therefore a description of the overlapping configuration and operation will be omitted.

[0058] FIG. 13 is a diagram showing an example of connections of a liquid recovery apparatus in the third embodiment. As shown in FIG. 13, in connection example 3 of the third embodiment, a liquid recovery apparatus 100 already connected to utility equipment 20 via piping 40 is connected to equipment 11 to be inspected. Note that the equipment 11 may be the equipment 10 in the inspection process. In the liquid recovery apparatus 100, piping 31 is connected to coupler 153. The piping 31 is connected to coupler 32 of the equipment 11. Like the piping 30 in the first embodiment, the piping 31 has a feed piping that supplies cooling water from the utility equipment 20 to the equipment 11 and a return piping that returns the cooling water from the equipment 11 to the utility equipment 20. The piping 31 is formed, for example, of a flexible hose. Note that the piping 31 may be hard piping made of, for example, stainless steel, polyvinyl chloride, or the like, or a combination of hard piping and a hose.

[0059] In the third embodiment, before the start of the water flow test, valves 131 to 135 of liquid recovery apparatus 100 are closed, and valve 136 is open. In this state, an operator connects pipe 31 to device 11. Next, control unit 114 of liquid recovery apparatus 100 controls valve 131 to open. This allows cooling water to be supplied from utility facility 20 to device 11, allowing the water flow test to be carried out.

[0060] After the water flow test is completed, the cooling water in the device 11 and the piping 31 is recovered into the tank 120, similar to the liquid recovery method of the first embodiment (see FIG. 8). When the worker confirms that the cooling water has been completely recovered into the tank 120, he or she removes the piping 31 (hose) connected to the coupler 153 on the device 11 side. In this way, by using the liquid recovery device 100, the workability of the piping removal work can be improved and the time required for the piping removal work can be reduced, even in the water flow test. Furthermore, the cooling water can be easily recovered from the device 11 during the water flow test, allowing for a smooth transition to the subsequent process. Furthermore, the insertion and removal work of the piping during the water flow test can be standardized.

[0061] The cooling water collected in the tank 120 can be returned to the utility facility 20 side in the same manner as in the liquid refilling method of the first embodiment (see FIG. 9) by directly connecting the coupler 154 and the coupler 155 with, for example, a hose. When the cooling water in the tank 120 has been returned to the utility facility 20 side, the control unit 114 controls the valve 131 to close and the pump 130 to stop.

[0062] According to each embodiment described above, liquid recovery apparatus 100 includes a first pipe (pipe 140), tank 120, a second pipe (pipe 122), a second valve (valve 132), a relief valve 121, and control unit 114. The first pipe is provided with couplers 150, 153 at each end, one end of which is connectable to utility facility 20, and includes a feed pipe 141 that supplies liquid from utility facility 20 to devices (devices 10, 11) that are to receive the liquid, and a return pipe 142 that returns liquid from the devices to utility facility 20. Tank 120 recovers liquid from return pipe 142 when the first valves (valve 131, valves 42, 43) on the utility facility 20 side are closed. The second pipe branches off from return pipe 142 to tank 120. A second valve is provided on the second pipe. Relief valve 121 is provided in tank 120. Control unit 114 is configured to control liquid recovery device 100 so as to open the second valve and relief valve 121 and release the pressure in return pipe 142 when recovering liquid. As a result, the workability of inserting and removing pipes on the equipment side can be improved and the work time can be shortened. Furthermore, the work of inserting and removing pipes can be standardized.

[0063] Furthermore, according to the first and third embodiments, the first pipe is a pipe that connects the utility facility 20 and the equipment. As a result, even if the pipe 40 on the utility facility 20 side is under liquid pressure, the pressure in the pipes on the equipment side (pipes 30, 31) can be released.

[0064] Furthermore, according to the first and third embodiments, the first valve (valve 131) is provided on the first piping closer to the equipment side than the coupler 150 on the utility facility 20 side. As a result, pressure can be released from the equipment side piping (pipes 30, 31) without providing a valve on the piping 40 on the utility facility 20 side.

[0065] Furthermore, according to the second embodiment, the first pipe is connected to a port 44 branching off from a third pipe (pipe 41) between the utility facility 20 and the device 10, and the first valves (valves 42 and 43) are provided on the third pipe. As a result, in a configuration in which the liquid recovery device 100 is connected to the port 44 branching off from the pipe 41, the workability of inserting and removing the pipe 41 on the device 10 side can be improved and the work time can be reduced.

[0066] Furthermore, according to each embodiment, when recovering the liquid, the pressure in the return pipe 142 after the pressure is released is atmospheric pressure. As a result, the pipes on the device side (pipes 30, 31, 41) can be inserted and removed manually.

[0067] Furthermore, according to each embodiment, liquid recovery apparatus 100 further includes a fourth pipe (pipe 123) that connects tank 120 and feed pipe 141, and pump 130 that is provided on the fourth pipe and refills the first pipe with the liquid recovered in tank 120. As a result, the liquid (cooling water) in tank 120 can be refilled into the equipment-side pipes (pipes 30, 31, 41).

[0068] Moreover, according to each embodiment, the fourth pipe further includes a third valve (valve 133) provided between the tank 120 and the pump 130. The control unit 114 controls the third valve to open when refilling the first pipe with liquid. As a result, the liquid (cooling water) in the tank 120 can be refilled into the pipes on the equipment side (pipes 30, 31, 41).

[0069] Moreover, according to each embodiment, the liquid recovery device 100 further includes a fifth pipe (pipe 125) connecting the return pipe 142 and the fourth pipe between the third valve and the pump 130, a fourth valve (valve 135) provided on the fifth pipe, and a level sensor 124 that measures the liquid level in the tank 120. When the control unit 114 detects, based on the measurement result of the level sensor 124, that the first pipe has been refilled with liquid, the control unit 114 controls the third valve and the fourth valve to close the third valve and open the fourth valve. As a result, the liquid (cooling water) can be circulated between the devices 10, 11 and the liquid recovery device 100.

[0070] According to each embodiment, the liquid is water or brine. As a result, when water or brine is used to cool the devices 10 and 11, the workability of inserting and removing piping on the device side can be improved and the work time can be reduced.

[0071] The embodiments disclosed herein should be considered to be illustrative in all respects and not restrictive, and various omissions, substitutions, and modifications may be made to the above-described embodiments without departing from the spirit and scope of the appended claims.

[0072] In addition, in the above-described embodiments, the devices 10 and 11 are described as plasma processing devices by way of example, but are not limited to this. For example, the liquid recovery device 100 may be connected to a modification device that performs annealing or the like, a cleaning device that cleans substrates, or the like, as long as the device has a member to be cooled.

[0073] The present disclosure can also be configured as follows. (1) A liquid recovery device, a first pipe having a coupler at each end, one end of which is connectable to a utility facility, the first pipe including a feed pipe for supplying the liquid from the utility facility to an appliance to be supplied with the liquid, and a return pipe for returning the liquid from the appliance to the utility facility; a tank that recovers the liquid from the return pipe when the first valve on the utility facility side is closed; a second pipe branching from the return pipe to the tank; a second valve provided in the second pipe; a relief valve provided in the tank; A control unit; and the control unit is configured to control the liquid recovery device to open the second valve and the relief valve to release pressure from the return pipe when recovering the liquid. Liquid recovery device. (2) The first piping is a piping connecting the power utility facility and the equipment. The liquid recovery device according to (1) above. (3) The first valve is provided on the first piping closer to the equipment than the coupler on the power utility facility side. The liquid recovery device according to (2) above. (4) the first pipe is connected to a port branched from a third pipe between the utility facility and the equipment; The first valve is provided in the third pipe. The liquid recovery device according to (1) above. (5) When recovering the liquid, the pressure in the return line after the pressure is released is atmospheric pressure. The liquid recovery device according to any one of (1) to (4) above. (6) a fourth pipe connecting the tank and the feed pipe; a pump provided in the fourth pipe for refilling the liquid recovered in the tank into the first pipe, The liquid recovery device according to any one of (1) to (5) above. (7) The fourth pipe further includes a third valve provided between the tank and the pump, the control unit controls the third valve to open when the first pipe is refilled with the liquid. The liquid recovery device according to (6) above. (8) a fifth pipe connecting the return pipe and the fourth pipe between the third valve and the pump; a fourth valve provided in the fifth pipe; a level sensor for measuring the liquid level in the tank; when the control unit detects completion of refilling of the first pipe with the liquid based on the measurement result of the level sensor, the control unit controls the third valve and the fourth valve to close the third valve and open the fourth valve. The liquid recovery device according to (7) above. (9) The liquid is water or brine. The liquid recovery device according to any one of (1) to (8) above. (10) A liquid recovery method for a liquid recovery device, comprising: The liquid recovery device is a first pipe having a coupler at each end, one end of which is connectable to a utility facility, the first pipe including a feed pipe for supplying the liquid from the utility facility to an appliance to be supplied with the liquid, and a return pipe for returning the liquid from the appliance to the utility facility; a tank that recovers the liquid from the return pipe when the first valve on the utility facility side is closed; a second pipe branching from the return pipe to the tank; a second valve provided in the second pipe; a relief valve provided in the tank, when recovering the liquid, the liquid recovery device is controlled to open the second valve and the relief valve to release pressure from the return pipe. Liquid recovery method. [Explanation of symbols]

[0074] 10,11 equipment 20 Utility equipment 30, 31, 40, 41, 122, 123, 125, 140 Piping 42,43,131,132,133,135 Valves 44 ports 100 Liquid recovery device 110 Electrical equipment panel 114 Control Unit 120 Tank 121 Relief valve 124 Level Sensor 130 Pump 141 Feed piping 142 Return piping 150,153 Coupler

Claims

1. A liquid recovery device, a first pipe having a coupler at each end, one end of which is connectable to a utility facility, the first pipe including a feed pipe for supplying the liquid from the utility facility to an appliance to be supplied with the liquid, and a return pipe for returning the liquid from the appliance to the utility facility; a tank that recovers the liquid from the return pipe when the first valve on the utility facility side is closed; a second pipe branching from the return pipe to the tank; a second valve provided in the second pipe; a relief valve provided in the tank; A control unit; and the control unit is configured to control the liquid recovery device to open the second valve and the relief valve to release pressure from the return pipe when recovering the liquid. Liquid recovery device.

2. The first piping is a piping connecting the power utility facility and the equipment. The liquid recovery device according to claim 1 .

3. the first valve is provided on the first piping closer to the equipment than the coupler on the power utility facility side; The liquid recovery device according to claim 2 .

4. the first pipe is connected to a port branched from a third pipe between the utility facility and the equipment; The first valve is provided in the third pipe. The liquid recovery device according to claim 1 .

5. When recovering the liquid, the pressure in the return line after depressurization is atmospheric pressure. The liquid recovery device according to any one of claims 1 to 4.

6. a fourth pipe connecting the tank and the feed pipe; a pump provided in the fourth pipe for refilling the liquid recovered in the tank into the first pipe. The liquid recovery device according to any one of claims 1 to 4.

7. a third valve provided in the fourth pipe between the tank and the pump, the control unit controls the third valve to open when the first pipe is refilled with the liquid. The liquid recovery device according to claim 6.

8. a fifth pipe connecting the return pipe and the fourth pipe between the third valve and the pump; a fourth valve provided in the fifth pipe; a level sensor for measuring the liquid level in the tank; when the control unit detects completion of refilling of the first pipe with the liquid based on the measurement result of the level sensor, the control unit controls the third valve and the fourth valve to close the third valve and open the fourth valve. The liquid recovery device according to claim 7 .

9. The liquid is water or brine. The liquid recovery device according to any one of claims 1 to 4.

10. A liquid recovery method for a liquid recovery device, comprising: The liquid recovery device is a first pipe having a coupler at each end, one end of which is connectable to a utility facility, the first pipe including a feed pipe for supplying the liquid from the utility facility to an appliance to be supplied with the liquid, and a return pipe for returning the liquid from the appliance to the utility facility; a tank that recovers the liquid from the return pipe when the first valve on the utility facility side is closed; a second pipe branching from the return pipe to the tank; a second valve provided in the second pipe; a relief valve provided in the tank, when recovering the liquid, the liquid recovery device is controlled to open the second valve and the relief valve to release pressure from the return pipe. Liquid recovery method.

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