Apparatus and method for processing carrier body by differential pressure method using correction jig

Abstract

To provide a method for flattening a carrier body by suppressing warpage of the carrier body and processing a contact surface of a correction tool into a reverse geometric surface to offset thermal stress.SOLUTION: The device comprises an upper carrier pressing device 10 and a lower carrier pressing device 20, wherein the upper carrier pressing device is provided with a first heater 12, a first sealed space 14 and an air bag 13, the lower carrier pressing device is provided with a second heater 23, a second sealed space 24 and a correction jig 23, a carrier body 30 is disposed between the air bag and the correction jig and is kept at an operating temperature and an operating pressure of the air bag and the correction jig, and a pressure difference formed by the air bag and the correction jig is used to effectively suppress warpage and deformation of the carrier body. In addition, through simulation or actual measurement, the first surface 31 of the carrier is a geometric curved surface, and the upper contact surface of the correction jig is processed into an inverse geometric curved surface to offset the thermal stress and flatten and shape the carrier.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to the technical field of electronic packaging, and in particular to a carrier body processing device and processing method using a pressure differential method with a straightening tool, which utilizes the pressure difference between an airbag and the straightening tool to suppress the warpage of the carrier body, and processes the contact surface of the straightening tool into an inverse geometric surface to offset thermal stress and flatten and shape the carrier body. [Background technology]

[0002] In the manufacturing process of an electronic package using a carrier (hereinafter referred to as a carrier), various packaging materials with different thermal expansion coefficients are used. Therefore, during the heat treatment process of the materials, the materials undergo different degrees of thermal expansion or thermal contraction as the temperature changes, causing thermal stress in the carrier and resulting in warping. Furthermore, the higher the temperature during the heat treatment, the greater the warping of the carrier, making it difficult to carry out subsequent processes.

[0003] On the other hand, in the conventional differential pressure method, by applying force to the surface of the packaged carrier, it is possible to suppress the warping phenomenon caused by the non-uniform thermal expansion of the carrier body at high temperatures during the manufacturing process. However, thermal stress still exists in the carrier body and is not completely removed, so even after the manufacturing process is completed and the pressure is removed, the carrier body is deformed by the thermal stress, which needs to be improved.

[0004] Therefore, in view of the problem of warping due to thermal stress in the conventional package structure, the development of a more ideal and practical structure and method for suppressing material warpage while also taking into consideration economic benefits has become the goal and direction for active development and breakthrough in the relevant industries.

[0005] Therefore, the inventors have aimed for the above goal based on their many years of experience in the manufacture, development, and design of related products, and as a result of detailed design and careful evaluation, have finally achieved a truly practical invention. Summary of the Invention

[0006] The main objective of the present invention is to provide a carrier body processing device and processing method using a differential pressure method with a straightening jig, which utilizes the pressure difference between an airbag and a straightening jig to shape the carrier body to prevent warping during the manufacturing process, and processes the upper contact surface of the straightening jig into an inverse geometric curved surface to offset the thermal stress of the carrier after the manufacturing process, and flatten and shape the carrier body.

[0007] To achieve the above object, the present invention provides a carrier body processing device and processing method using a differential pressure method with a straightening jig. The device includes an upper carrier pressing device and a lower carrier pressing device, the upper carrier pressing device is equipped with a first heater, a first sealed space, and an airbag, and the lower carrier pressing device is equipped with a second heater, a second sealed space, and a straightening jig. The carrier body is disposed between the airbag and the straightening jig and maintained at the operating temperature and pressure of the airbag and the straightening jig. The pressure difference formed by the airbag and the straightening jig effectively suppresses warping and deformation of the carrier body. Furthermore, through simulation or actual measurement, it was found that the first surface of the carrier is a geometrically curved surface, and the upper contact surface of the straightening jig is machined into an inverse geometrically curved surface, thereby offsetting thermal stress and flattening the carrier to a stylized shape.

[0008] The techniques, means, and effects employed by the present invention will be described in detail below with reference to preferred embodiments and drawings, so that the above-mentioned objects, structures, and features of the present invention can be more deeply and specifically understood. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a cross-sectional schematic view of an embodiment of the present invention; [Figure 2] 1 is a schematic diagram of a pressing state due to a pressure difference in a preferred embodiment of the present invention; [Figure 3] 2 is a schematic diagram of an embodiment of a portion of a first surface of a carrier body and a portion of an upper contact surface of a straightening tool of the present invention. [Figure 4]10 is a schematic diagram of another embodiment of a portion of a first surface of a carrier body and a portion of an upper contact surface of a straightening tool of the present invention. [Figure 5] 10 is a schematic diagram of another embodiment of a portion of a first surface of a carrier body and a portion of an upper contact surface of a straightening tool of the present invention. FIG. [Figure 6] 10 is a schematic diagram of yet another embodiment of a portion of a first surface of a carrier body and a portion of an upper contact surface of a straightening tool of the present invention. FIG. [Figure 7] FIG. 2 is a block diagram of a method flow according to one embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0010] The present invention provides a processing device and a processing method for a carrier body by a differential pressure method using a correction jig.

[0011] In order to allow the judges to more deeply understand and appreciate the objects, features, and effects of the present invention, the present invention will be described in detail below with reference to embodiments and drawings.

[0012] As shown in Figures 1 and 2, the present invention provides a carrier body processing device using a differential pressure method with a straightening jig, which includes:

[0013] The upper carrier pressing device 10 is provided with an upper cover 11, and a first heater 12 is provided inside the upper cover 11. The inside of the upper cover 11 forms a first sealed space 14 covered by an airbag 13. As a result, the air in the first sealed space 14 is heated by the first heater 12, and the temperature rises. One end of a first air intake pipe 15 is connected to an air pressure source (not shown) and the other end is connected to the first sealed space 14. A first exhaust pipe 16 is connected to the first sealed space 14. The first air intake pipe 15 and the first exhaust pipe 16 may be a shared pipe or may exist independently.

[0014] The lower carrier pressing device 20 has a bottom plate 21, a second heater 22 is provided above the bottom plate 21, and a correcting jig 23 is provided above the lower carrier pressing device 20. A second sealed space 24 is formed between the bottom plate 21, a support seat 26, and the correcting jig 23. The air in the second sealed space 24 is heated by the second heater 22 to increase its temperature. A second air supply pipe 25 has one end connected to the air pressure source and the other end connected to the second sealed space 24. A second exhaust pipe 27 is also connected to the second sealed space 24. An upper contact surface 231 is provided on the surface of the correcting jig 23, and the correcting jig 23 is designed to be removable. The second air supply pipe 25 and the second exhaust pipe 27 may be a shared pipe or may exist independently.

[0015] The first surface 31 of the carrier body 30 after prior thermal processing is simulated or measured to obtain surface data, and the upper or lower surface of the carrier body 30 facing the upper contact surface 231 is defined as the first surface 31, and the other surface opposite the first surface 31 is defined as the second surface 32. The upper contact surface 231 is processed according to the relevant data of flat surface to flat surface, concave surface to convex surface, and convex surface to concave surface corresponding to the surface data, and the carrier body 30 is arranged corresponding to the air bag 13 at the upper contact surface 231 of the straightening jig 23 so that the first surface 31 of the carrier body abuts against the upper contact surface 231 of the straightening jig 23, and air is injected into the first sealed space 14 and the second sealed space 24 via the air pressure source to pressurize them, and the straightening jig 23 is pressurized through the air bag 13, thereby forming a pressure difference between the first surface 31 of the carrier body 30 and the second surface 32 of the carrier body 30, and pressing the carrier body 30 against the straightening jig 23, thereby offsetting the thermal stress of the carrier body 30 during subsequent thermal processing and flattening the carrier body 30 after thermal processing.

[0016] In the carrier body processing equipment using the differential pressure method with the correcting jig, the air bag 13 is fixed to the upper carrier pressing device 10 via a seal structure 40.

[0017] In the carrier body processing equipment using the differential pressure method with the straightening jig, the air bag 13 is made of polyimide, Teflon or rubber.

[0018] In the carrier body processing equipment using the differential pressure method with the correction jig, the carrier body 30 may be at least one of a printed circuit board, a substrate, a lead frame, a wafer, a silicon interposer, a package, a glass carrier, a metal carrier, and a flat plate with circuit wiring.

[0019] As shown in Figures 3 to 6, in the carrier body processing equipment using the differential pressure method with the correcting jig, if the simulated measurement or actual measurement shows that the first surface 31 of the carrier body 30 after heat treatment without processing is a concave curved surface, the upper contact surface 231 is a convex curved surface; if the simulated measurement or actual measurement shows that the first surface 31 of the carrier body 30 after heat treatment without processing is a convex curved surface, the upper contact surface 231 is a concave curved surface; if the simulated measurement or actual measurement shows that the first surface 31 of the carrier body 30 after heat treatment without processing is a wavy curved surface, the upper contact surface 231 is an inverse wavy curved surface; and if the simulated measurement or actual measurement shows that the first surface 31 of the carrier body 30 after heat treatment without processing is an irregular curved surface, the upper contact surface 231 is an inverse irregular curved surface.

[0020] As shown in FIGS. 1 and 2, in the processing equipment for the carrier body by the differential pressure method using the correcting jig, the support seat 26 and the bottom plate 21 are fixed by welding or are integrally formed.

[0021] As shown in Figure 7, the present invention provides a method for processing a carrier body by a differential pressure method using a corrective jig, which includes the steps of: A step 1 (50) of preparing an upper carrier pressing device provided with a first sealed space and an airbag, and a lower carrier pressing device provided with a second sealed space; A step 2A (51) of thermally processing the carrier to deform it, and then measuring the surface data of the first surface of the carrier body after deformation; or a step 2B (52) of deforming the carrier by simulated thermal processing and then calculating surface data of the first surface of the carrier body after deformation; Step 3 (53) of preparing a detachable corrective tool, the corrective tool having an upper contact surface; Step 4 (54) of processing the surface data at the upper contact surface according to corresponding relational data of flat to flat, concave to convex, and convex to concave by a processing device; Step 5 (55) of attaching the correcting jig with the carrier body installed thereon above the second sealed space and pressing the outside of the airbag against the second surface of the carrier body; a step 6 (56) of injecting air into the first sealed space and the second sealed space via an air pressure source to pressurize them, heating the first sealed space and the second sealed space via a first heater and a second heater, pressurizing the correcting jig via the air bag, creating a pressure difference between the first surface of the carrier body and the second surface of the carrier body, and pressing the carrier body against the correcting jig; After the carrier has been thermally processed, the thermal stress of the carrier can be offset, and step 7 (57) includes flattening the carrier, where the upper or lower surface of the carrier body facing the upper contact surface is defined as a first surface, and the other surface opposite the first surface is defined as a second surface.

[0022]

[0023] As can be seen from the above, the carrier body processing equipment and processing method using a pressure differential method with a straightening jig of the present invention are the first in the industry, satisfying the novelty requirement of an invention patent, and its comprehensive innovative design satisfies the inventive step requirement of an invention patent. By utilizing the pressure difference between the airbag 13 and the straightening jig 23, the carrier body 30 is prevented from warping during the manufacturing process, and the upper contact surface 231 of the straightening jig 23 is processed into an inverse geometric curved surface, which can offset the thermal stress of the carrier body 30 after the manufacturing process and enable the carrier body 30 to be formed flat, thereby achieving better industrial applicability.

[0023] Although the above has specifically described the technical features of the present invention in combination with the preferred embodiments of the present invention, those skilled in the art may make changes and modifications to the present invention without departing from the spirit and principles of the present invention, and all such changes and modifications should be included in the scope defined by the scope of the following patent applications.

[0024] As described above, the present invention provides a carrier body processing device and processing method using a differential pressure method with a straightening jig, which achieves all of the objectives of the present invention. Furthermore, the spatial shape of the combined structure is not found in similar products, was not disclosed before the application, complies with the provisions of the Patent Act, and has therefore been applied for in accordance with the law. [Explanation of symbols]

[0025] 10 Upper carrier pressing device 11 Top cover 12 First heater 13 Airbag 14 First enclosed space 15 First air supply line 16 First exhaust pipe 20 Lower carrier pressing device 21 Bottom plate 22 Second Heater 23 Correction Jig 231 Upper contact surface 24 Second Closed Space 25 Second air supply line 26 Support seat 27 Second exhaust line 30 Carrier body 31 First Side 32 Second Side 40 Seal structure 50. A step of preparing an upper carrier pressing device provided with a first sealed space and an airbag, and a lower carrier pressing device provided with a second sealed space. 51. A step of thermally processing and deforming the carrier body, and then measuring the surface data of the first surface of the carrier body after deformation. 52. A step of deforming the carrier body by simulated thermal processing and then calculating the surface data of the first surface of the carrier body after deformation. 53. A step of preparing a corrective jig designed to be removable, the corrective jig being provided with an upper contact surface. 54. Processing the surface data by the processing equipment at the upper contact surface according to the corresponding relational data of flat to flat, concave to convex, and convex to concave. 55. A process of attaching the correcting jig with the carrier body installed thereon above the second sealed space and pressing the outside of the airbag against the second surface of the carrier body. 56. A process of injecting air into the first sealed space and the second sealed space via an air pressure source to pressurize them, heating the first sealed space and the second sealed space via a first heater and a second heater, pressurizing the correcting jig via the air bag, creating a pressure difference between the first surface of the carrier body and the second surface of the carrier body, and pressing the carrier body against the correcting jig. 57. After the carrier body is thermally processed, the thermal stress of the carrier body can be offset and the carrier body is flattened.

Claims

1. An apparatus for processing a carrier body by a differential pressure method using a correction jig, an upper carrier pressing device provided with an upper cover, the interior of which forms a first sealed space covered by an air bag, a first air supply pipe having one end connected to an air pressure source and the other end connected to the first sealed space, and a first exhaust pipe connected to the first sealed space; A lower carrier pressing device provided with a bottom plate, a correcting jig mounted above the lower carrier pressing device, a second sealed space formed between a support seat of the bottom plate and the correcting jig, a second air supply pipe line having one end connected to the air pressure source and the other end connected to the second sealed space, a second exhaust pipe line connected to the second sealed space, an upper contact surface provided on a surface of the correcting jig, a first surface of a carrier body previously subjected to thermal processing is simulated or actually measured to obtain surface data, and a flat-to-flat, concave-to-convex, or convex-to-concave surface corresponding to the surface data is obtained. a lower carrier pressing device for processing the upper contact surface according to related data, and placing the carrier body on the upper contact surface of the straightening jig corresponding to the air bag so that the first surface of the carrier body abuts against the upper contact surface of the straightening jig, thereby injecting air into the first sealed space and the second sealed space via the air pressure source to pressurize the straightening jig through the air bag, pressing the carrier body against the straightening jig, offsetting thermal stress of the carrier body during subsequent thermal processing, and flattening the carrier body after thermal processing. A processing device for a carrier body by a differential pressure method using a corrective jig characterized by the above.

2. 2. The processing equipment for a carrier body by a differential pressure method using a correcting jig according to claim 1, wherein the air bag is fixed to the upper carrier pressing device via a sealing structure.

3. 2. The processing equipment for a carrier body by a differential pressure method using a corrective jig as claimed in claim 1, wherein the air bag is made of polyimide, Teflon or rubber.

4. 2. The processing device for a carrier body using a differential pressure method with a corrective jig according to claim 1, wherein the carrier body may be at least one of a printed circuit board, a substrate, a conductive bracket, a wafer, a silicon interposer, a package body, a metal carrier, a glass carrier, and a flat plate with circuit wiring.

5. 2. The processing equipment for a carrier body using a differential pressure method with a correcting jig according to claim 1, wherein, when simulated or actual measurement shows that the first surface of the carrier body after heat treatment without processing is a concave surface, the upper contact surface is a convex surface; when simulated or actual measurement shows that the first surface of the carrier body after heat treatment without processing is a convex surface, the upper contact surface is a concave surface; when simulated or actual measurement shows that the first surface of the carrier body after heat treatment without processing is a wavy surface, the upper contact surface is an inverse wavy surface; and when simulated or actual measurement shows that the first surface of the carrier body after heat treatment without processing is an irregular surface, the upper contact surface is an inverse irregular surface.

6. 2. A processing device for a carrier body using a differential pressure method with a corrective jig as described in claim 1, characterized in that a first heater is provided inside the upper cover, whereby the air in the first sealed space is heated by the first heater, thereby increasing its temperature.

7. A processing device for a carrier body using a differential pressure method with a corrective jig as described in claim 1, characterized in that a second heater is provided above the bottom plate, whereby the air in the second sealed space is heated by the second heater and the temperature is increased.

8. A method for processing a carrier body by a differential pressure method using a corrective jig, comprising: A step of preparing an upper carrier pressing device provided with a first sealed space and an airbag, and a lower carrier pressing device provided with a second sealed space; a step of deforming the carrier body by thermal processing, and then actually measuring surface data of the first surface of the deformed carrier body, or deforming the carrier body by simulated thermal processing, and then calculating surface data of the first surface of the deformed carrier body; providing a straightening tool designed to be removable, the straightening tool being provided with an upper contact surface; machining the upper contact surface with a machining device in accordance with flat-to-flat, concave-to-convex, or convex-to-concave association data corresponding to the surface data; a step of attaching the correcting jig with the carrier body installed thereon above the second sealed space and pressing the outside of the airbag against the second surface of the carrier body; a step of injecting air into the first sealed space and the second sealed space via an air pressure source to pressurize the first sealed space and the second sealed space, pressurizing the correcting tool with the air bag, and creating a pressure difference between the first surface of the carrier body and the second surface of the carrier body, thereby pressing the carrier body against the correcting tool; and after thermal processing the carrier body, planarizing the carrier body, which can offset thermal stress in the carrier body.

10. A method for processing a carrier body by a differential pressure method using a corrective jig.

9. 9. The method for processing a carrier body by a differential pressure method using a corrective jig according to claim 8, wherein the first sealed space and the second sealed space are heated by a first heater and a second heater.

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