Conveying system

Abstract

To provide a conveyance system capable of solving the problem that there are various restrictions in an area where the conveyance system is installed, a communication area is limited, communication from a server does not reach an AGV, the communication is interrupted, and an instruction cannot be issued.SOLUTION: In a conveyance system 2 in which a traveling panel 10 on which an automatic conveyance device travels is disposed on a top plate 6 of a processing device 4 including a plurality of processing devices, and the automatic conveyance device communicates with a server 100 via a wireless LAN, the server 100 communicates with a target automatic conveyance device via another automatic conveyance device when communication with the target automatic conveyance device to communicate with is interrupted.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a transport system in which a travel panel on which an automatic transport device travels is arranged on the top plate of a processing device including multiple processing devices, and the automatic transport device communicates with a server via wireless LAN. [Background technology]

[0002] A wafer has multiple devices such as ICs and LSIs formed on its surface, separated by planned dividing lines. The back side is ground using a grinding machine to form the wafer to the desired thickness, and then the wafer is divided into individual device chips using a cutting machine and laser processing machine. These chips are then used in electrical devices such as mobile phones and personal computers.

[0003] The present applicant has also developed and proposed a transport system in which a travel path is arranged using the top plate of a processing device, including processing devices such as grinding devices, cutting devices, and laser processing devices, and a wafer storage device that stores multiple wafers, and an automatic transport vehicle (hereinafter referred to as an "AGV") travels between the processing devices to transport wafers from the wafer storage device to each processing device and to transport consumables (see Patent Document 1).

[0004] The AGV is configured to include a control means, a reading sensor that reads the guide lines formed on the travel path that guide the AGV's travel, drive wheels arranged on the left and right sides of the guide lines, and a carry-in / out means that is mounted in the center of the frame that constitutes the AGV and that carries cassettes containing articles such as wafers into and out of each processing device.The AGV is controlled by communicating with a server to travel to a predetermined location and perform a predetermined task. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Publication No. 2020-013892 Summary of the Invention [Problem to be solved by the invention]

[0006] However, because the above-mentioned transport system is used within limited facilities such as factories, it uses a fast and economical wireless LAN (local area network), such as a Wi-Fi standard communication network. However, there are various restrictions on the area in which the transport system is installed, which limits the communication area, and depending on the location of the AGV, there is a problem that communication from the server may not reach the AGV, resulting in a situation where communication is cut off and instructions cannot be issued.

[0007] The present invention was developed in consideration of the above facts, and its main technical objective is to provide a transport system that can solve the problem that there are various restrictions on the area in which the transport system is installed, which limits the communication area, resulting in communication from the server not reaching the AGV, resulting in communication being cut off and instructions not being able to be issued. [Means for solving the problem]

[0008] In order to solve the above-mentioned main technical problem, according to the present invention, a traveling panel on which an automatic transport device travels is arranged on the top plate of a processing device including a plurality of processing devices, and the automatic transport device communicates with a server via wireless LAN, and when communication with a target automatic transport device that the server desires to communicate with is lost, the server communicates with the target automatic transport device via another automatic transport device.

[0009] The automated conveying device preferably includes a battery, multiple operating units, and a control means for controlling the multiple operating units, and the server is configured to communicate with other automated conveying devices, and the control means of the other automated conveying devices is configured to be able to communicate with the control means of the target automated conveying device. The operating units preferably include a motor for operating drive wheels disposed on either side of a guide line formed on the travel panel to guide the travel of the automated conveying device, a reading sensor for reading the guide line, and a transport means for transporting cassettes containing articles into and out of each processing device. Furthermore, a master antenna for the server is installed on the ceiling of the space in which the conveying system is installed, and the automated conveying device is equipped with a slave antenna in its control means, so that the automated conveying devices can communicate with the server via the master antenna, and the automated conveying devices can communicate with each other via the slave antenna. [Effects of the Invention]

[0010] In the conveying system of the present invention, a traveling panel on which an automatic conveying device travels is arranged on the top plate of a processing device including multiple processing devices, and the automatic conveying device communicates with a server via wireless LAN.When communication with a target automatic conveying device that the server desires to communicate with is lost, the server communicates with the target automatic conveying device via another automatic conveying device.Therefore, when communication with a target AGV that the server desires to communicate with is lost, the server is configured to communicate with the target AGV via another AGV.Therefore, even if the communication area is limited by the layout of the installation location of the conveying system, communication from the server can be communicated with the target AGV via another AGV, thereby eliminating the problem of communication being lost and not being able to issue an instruction signal to the target AGV. [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 1 is a schematic diagram of a transport system according to an embodiment of the present invention. [Figure 2] FIG. 2 is a perspective view of an automatic conveyance device of the conveyance system shown in FIG. [Figure 3]3 is a perspective view showing a state in which a cover is removed from a frame of the automatic conveying device shown in FIG. 2. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0012] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of a transport system configured based on the present invention will be described in detail with reference to the accompanying drawings.

[0013] FIG. 1 shows a transport system 2 according to this embodiment. The transport system 2 shown in the figure has a traveling panel 10 mounted on a top panel 6 of a processing device 4, which includes multiple processing devices. It also includes automated transport vehicles (hereinafter referred to as "AGVs") (A)-(E) that travel on the traveling panel 10, and a server 100 that communicates with each AGV to control and manage the travel of each AGV. The server 100 contains a control program for controlling and managing the travel of each AGV. Control signals, including information about the route each AGV should travel and its speed when traveling along that route, are transmitted from a main antenna 110 mounted on the ceiling of the installation location of the transport system 2 to the AGVs (A)-(E) traveling on the traveling panel 10. The server 100 is also provided with a display means (monitor) 102 that an operator can refer to when managing the transport system 2, including the travel of each AGV. The display means 102 is a touch panel type that displays the operating status of the conveying system 2, and allows the operator to give instructions to each AGV via the server 100 by operating the keyboard, buttons, etc. displayed on the screen.

[0014] The processing equipment 4 in this embodiment includes, for example, an article storage device 4a that manages articles, and a first processing device 4b, a second processing device 4c, and a third processing device 4d into which articles are transferred by AGVs (A) to (E). Examples of articles stored in and transferred from the article storage device 4a include workpieces such as semiconductor wafers that are processed by the first to third processing devices 4b to 4d, and processing tools used in processing by the first to third processing devices 4b to 4d. Examples of such processing tools include cutting blades used in cutting workpieces and grinding wheels with grinding stones used in grinding workpieces to thin them. Furthermore, workpieces processed by the first to third processing devices 4b to 4d and used processing tools are also transferred from the first to third processing devices 4b to 4d and transferred into the article storage device 4a by AGVs (A) to (E). In the illustrated embodiment, one article storage device 4a and first to third processing devices 4b to 4d are provided as the processing device 4, but the number of article storage devices and processing devices constituting the processing device 4 can be arbitrarily set. Also, the size of the traveling panel 10 formed on the top board 6 and the number of AGVs traveling on the traveling panel 10 can be arbitrarily set as needed.

[0015] A traveling panel 10 is disposed on the top plate 6 of the processing device 4, and the plurality of processing devices 4 are connected to one another by the traveling panel 10. A transfer opening 10a is formed on the traveling panel 10, through which articles are transferred between the AGVs (A) to (E) and the processing devices 4. Although not shown, a transfer opening corresponding in position and size to the transfer opening 10a is also formed on each top plate 6 of the processing devices 4. Articles such as workpieces and processing tools are transferred between the AGVs (A) to (E) and the processing devices 4 through the transfer opening 10a of the traveling panel 10 and the transfer openings formed on each top plate 6.

[0016] On the upper surface of the traveling panel 10, there are formed travel guide lines 12 that guide the travel of the AGVs (A) to (E). As shown in Fig. 2, the AGVs (A) to (E) travel on the traveling panel 10 along the travel guide lines 12, and are able to transport workpieces and processing tools received from the article storage device 4a to the first to third processing devices 4b to 4d, and to transport workpieces that have been processed in the first to third processing devices 4b to 4d and processing tools that have been removed for replacement to the storage device 4a. The traveling panel 10 is formed with fall prevention walls 14 to prevent the AGVs (A) to (E) from falling off the traveling panel 10 even if they deviate from the travel guide lines 12.

[0017] An outline of AGV (A) will be explained with reference to Figures 2 and 3. Note that AGVs (B) to (E) have the exact same configuration as AGV (A), so explanation of AGVs (B) to (E) will be omitted.

[0018] The AGV (A) shown in FIG. 2 will be described with reference to FIG. 3, which shows a disassembled state of the main body 16 and a cover 18 that covers multiple operating units mounted on the main body 16. As shown in FIG. 3, the AGV (A) includes a battery 32, multiple operating units (described later), and a control unit 54 that controls the operating units. The main body 16 of the AGV (A) includes a frame 20 formed of a single metal plate on which the operating units are mounted. An opening 20a is formed in the center of the frame 20, and the frame 20 includes a front support wall 22 extending upward from the front end of the opening 20a and a rear support wall 24 extending upward from the rear end of the opening 20a. A carry-in / out unit 19 (described later) is disposed in the opening 20a to carry cassettes 42 containing articles into and out of each processing device. The front-rear and left-right directions of the AGV (A) are indicated by arrows in FIGS. 2 and 3.

[0019] 3, the operating unit mounted on the main body 16 includes, in addition to the carry-in / out means 19, motors 30 (left motor 30a, right motor 30b) that operate drive wheels 28 (left drive wheel 28a, right drive wheel 28b) that are arranged on the left and right sides of the frame 20 so as to sandwich the travel guide line 12 formed on the travel panel 10 and that guides the travel of the AGV (A), and a front reading sensor 60a that is arranged in the center of the width direction in front of the frame 20 and a rear reading sensor 60b that is arranged in the center of the width direction in the rear of the frame 20. Note that the reading sensors that read the travel guide line 12 are not limited to having both the front reading sensor 60a and the rear reading sensor 60b as described above, and may, for example, have only the front reading sensor 60a.

[0020] The left motor 30a is supported by the left support piece 26 of the frame 20. The right motor 30b is supported by the right support piece (not visible in FIG. 3) of the frame 20. A pair of left and right front wheels 38 (the right one is not visible) are disposed in front of the motor 30, and a pair of left and right rear wheels 40 are disposed behind the motor 30. The front wheels 38 and the rear wheels 40 are both directional casters that are attached to the frame 20 so as to be rotatable about an axis extending in the vertical direction. The rotational speed and rotation direction of the left driving wheel 28a and the right driving wheel 28b are adjusted by the left motor 30a and the right motor 30b, so that the AGV (A) can move forward, backward, turn right, turn left, and turn on the spot.

[0021] The loading / unloading means 19 includes a lift motor 34 that raises and lowers a cassette 42 containing articles to be transported, and a driver 36 that controls the lift motor 34. By operating the lift motor 34, the cassette 42 is raised and lowered via two left belts 44 and two right belts 46. The lift motor 34 in this embodiment is disposed behind the rear support wall 24 of the frame 20, and is fixed to the upper surface of the frame 20 via an appropriate fixture (not shown).

[0022] The cassette 42, which is raised and lowered by the lifting motor 34, is formed in a box shape with a vertical dimension (thickness) that is smaller than the dimensions in the front-rear and left-right directions. The cassette 42 has a storage section 42a that stores articles, and a flip-up cover section 42b that opens and closes an opening (not shown) of the storage section 42a.

[0023] 3, the two left belts 44 extend upward from the upper left surface of the storage section 42a of the cassette 42, spaced apart in the front-to-rear direction. The upper portion of the left belt 44 passes through an opening 20a in the frame 20 and is guided by a left guide roller 48. The left guide roller 48 is rotatably supported by left guide roller support portions 22a, 24a formed on the front support wall 20a and rear support wall 24 of the frame 20.

[0024] The two right belts 46 extend upward from the upper right surface of the storage section 42a of the cassette 42, spaced apart in the front-to-rear direction. The upper portion of the right belt 46 passes through an opening 20a in the frame 20 and is guided by a right guide roller 50. The right guide roller 50 is rotatably supported by right guide roller support portions 22b, 24b formed on the front support wall 20a and rear support wall 24 of the frame 20.

[0025] The upper ends of the left belt 44 and the right belt 46 are each connected to a take-up roller 52. The take-up roller 52 is rotatably supported by take-up roller supports 22c, 24c formed on the front support wall 20 and the rear support wall 24 of the frame 20, and is connected to the lift motor 34. By operating the lift motor 34 and rotating the take-up roller 52 forward or reverse, the left belt 44 and the right belt 46 can be wound up or fed out, and the cassette 42 can be raised or lowered in the direction indicated by arrow R1.

[0026] The driver 36 outputs a drive current to the motor 30 and the lift motor 34. In this embodiment, the driver 36 is disposed adjacent to the lift motor 34 and is fixed to the rear surface of the rear support wall 24 of the frame 20 via an appropriate fixture (not shown). The drive current output by the driver 36 is controlled by a control means 54 mounted on the rear of the frame 20. The control means 54 is constituted by a computer having an appropriate processor and memory, and power is supplied to the control means 54 from the battery 32.

[0027] The control means 54 is provided with a slave antenna 56, which is configured to be able to communicate with the server 100 via the master antenna 110 of the server 100. The AGV (A) receives a control signal transmitted from the server 100 via the slave antenna 56, and information about the AGV (A) managed by the control means 54 is transmitted from the slave antenna 56 to the master antenna 56 of the server 100. Furthermore, each AGV is configured to be able to communicate with another AGV via the slave antenna 56 of the control means 54 mounted on each AGV.

[0028] The battery 32 supplies power to the control means 54, and also supplies power to a plurality of operating parts mounted on the frame 20 of the main body 16, such as the motor 30 that operates the drive wheels 28, the lift motor 34, and the driver 36. In this embodiment, the battery 32 is fixed to the front upper surface of the frame 20.

[0029] The AGV (A) is operated based on a control signal transmitted by the server 100. When transporting items such as workpieces or processing tools from the item storage device 4a, the AGV (A) is positioned directly above the delivery opening 10a of the item storage device 4a, and the lift motor 34 is activated to lower the cassette 42 from the delivery opening 10a into the item storage device 4a. Once the workpieces or processing tools are stored in the cassette 42 in the item storage device 4a, the lift motor 34 is activated to raise the cassette 42 and store it in the main body 16 of the AGV (A). The AGV (A) then travels to one of the processing devices 4b to 4d. During this travel, the AGV (A) uses the forward reading sensor 60a and the rearward reading sensor 60b to read the travel guide line 12 on the travel panel 10, as instructed by the control signal from the server 100. The position of AGV(A) is determined by reading barcodes (not shown) indicating position information that are placed at predetermined intervals on the travel guide line 12, and by sending the number of rotations and rotation angle of the left drive wheel 28a and right drive wheel 28b rotated by the motor 30 from the control means 54 to the server 100. Note that AGVs(B) to (E) are also operated based on control signals transmitted from the main antenna 110 of the server 100, just like AGV(A).

[0030] Here, there are various restrictions on the area in which the conveying system 2 is installed, and communication between the parent antenna 110 of the server 100 and the child antennas 56 of the AGVs (A) to (E) is limited. Depending on the location of the AGV, communication from the server 100 may not reach it, and the AGV may lose communication and have difficulty in traveling.

[0031] To address this, for example, as shown by the dashed line (a) in Figure 1, if the server 100 determines that communication between the server 100 and the target AGV (C) to be controlled has been interrupted, that control signals from the parent antenna 110 of the server 100 are not being transmitted to the AGV (C), and that information about the AGV (C) from the child antenna 56 of the AGV (C) is not being transmitted to the server 100, the server 100 checks whether communication with the AGV (C) is possible for AGVs other than the AGV (C) that are communicating with the server 100 without any problems. Then, for example, if it is determined that communication is possible between the AGV (C) and the AGV (D), the AGV (D) is made to function as a wireless LAN repeater, and the control signal for the AGV (C) from the server 100 is temporarily sent to the AGV (D) as shown by the dashed line (b) in the figure. The control signal received by AGV(D) is then transmitted to the target AGV(C) via the sub-antenna 56 of the control means 54 mounted on AGV(D), as shown by the dashed line (c). This allows the server 100 to transmit information regarding the route to the next target position to which AGV(C) should head, as well as the work details at that target position. Furthermore, by using the above-mentioned AGV(D) as a wireless LAN repeater, information about AGV(C) can be transmitted to the server 100 via the dashed lines (c) and (b).

[0032] According to the above-described embodiment, when communication with a target AGV that the server 100 wants to communicate with is lost, the server 100 is configured to communicate with the target AGV via another AGV. Therefore, even if the communication area is limited due to the layout of the installation location of the conveying system 2, communication from the server 100 can be communicated with the target AGV via another AGV, eliminating the problem of communication being lost and not being able to issue an instruction signal to the target AGV. [Explanation of symbols]

[0033] 2:Transport system 4: Processing equipment 4a: Goods storage device 4b to 4d: First to third processing devices 6: Top plate 10: Travel panel 10a: Delivery point 12: Driving guidance line 16: Main body 18: Cover 19: Carrying in / out means 20: Frame 20a: opening 22: Front support wall 24: Rear support wall 26:Left side support piece 28: Drive wheel 30: Motor 32: Battery 34: Lifting motor 36: Driver 38: Front wheel 40: Rear wheel 42: Cassette 44: Left belt 46: Right belt 48: Left guide roller 50: Right guide roller 52: Winding roller 54: Control means 56: Sub antenna 60a: Front reading sensor 60b: Rear reading sensor 100: Server 102:Display means 110: Main antenna

Claims

1. A transport system in which a travel panel on which an automatic transport device travels is disposed on a top plate of a processing device including a plurality of processing devices, and the automatic transport device communicates with a server via a wireless LAN, When communication with a target automatic transport device is lost, the server communicates with the target automatic transport device via another automatic transport device.

2. The automatic transport device includes a battery, a plurality of operating units, and a control means for controlling the plurality of operating units; 2. The transport system according to claim 1, wherein the server communicates with other automatic transport devices, and the control means of the other automatic transport devices are configured to be able to communicate with the control means of the target automatic transport device.

3. The actuation unit comprises:

3. The conveying system according to claim 2, further comprising: a motor for operating drive wheels arranged on either side of a guide line formed on the traveling panel to guide the movement of the automatic conveying device; a reading sensor for reading the guide line; and a transport means for transporting cassettes containing articles into and out of each processing device.

4. A transportation system as described in claim 2, wherein a parent antenna of the server is installed on the ceiling of the space in which the transportation system is installed, and the automatic transportation device has a child antenna in the control means, and communicates with the server via the parent antenna, and the automatic transportation devices communicate with each other via the child antenna.

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