Diffraction preventing jig and transmission inspection apparatus

Abstract

To efficiently reduce an adverse effect due to diffracted light of radiation diffracted at a boundary part of an inspection object when detecting the radiation transmitted through the inspection object by a detection part.SOLUTION: The transmission inspection device includes an X-ray irradiation unit 23 and a detection unit 24, and is a device that performs inspection by installing an inspection object 30 and a diffraction preventing jig 40 between the X-ray irradiation unit 23 and the detection unit 24 and detecting an X-ray R transmitted through the inspection object 30 by the detection unit 24. In the case of imaging an X-ray image of an inspection object 30, a diffraction prevention jig 40 is installed without a gap between the inspection object 30 and a detection part 24 so that X-rays are diffracted on the end face of the inspection object 30 and the diffracted X-rays are not detected by the detection part 24, and a metal structure on the side face of the diffraction prevention jig 40 is formed in the direction of the detection part 24 along a straight line connecting the end part of the inspection object 30 as one end and the light source of the X-ray irradiation part 23.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a diffraction prevention jig and a transmission inspection device that can efficiently reduce the adverse effects of diffracted light from radiation diffracted at the boundary of an inspection object when radiation such as X-rays that has passed through the inspection object is detected by a detection unit. [Background technology]

[0002] Conventionally, when a coating material such as an adhesive or a sealer is applied to the edge or the like of an object to be inspected, there are cases where it is desired to check the state of application of the coating material. For this purpose, an inspection technique is known in which the object to be inspected is placed between an X-ray irradiation unit and a detection unit, and the detection unit detects the amount of X-rays that have passed through the object to be inspected, thereby capturing an image showing the state of application of the coating material.

[0003] However, diffracted light from X-rays diffracted by the object under inspection can adversely affect the amount of light detected by the detection unit. For this reason, Patent Document 1 discloses a technology in which a blocking grating is disposed between the object under inspection and the detector, and this blocking grating blocks diffracted light that is diffracted by the object under inspection in a direction different from the original X-ray direction. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 2023-122568 Summary of the Invention [Problem to be solved by the invention]

[0005] However, the isolating grating in Patent Document 1 has a complex structure, which makes it difficult to manufacture the isolating grating itself.In addition, if the isolating grating is not installed accurately, the transmitted X-ray light that would normally have properly passed through the inspection object is blocked by the isolating grating, which makes it impossible to detect the X-rays in the detection unit.

[0006] For these reasons, when an inspection object is placed between an X-ray irradiation unit and a detection unit, and the detection unit detects the dose of X-rays that have passed through the inspection object, how to reduce the adverse effects of diffracted light from X-rays diffracted at the boundary of the inspection object is an important issue. This issue is not limited to X-rays, but also arises when inspecting an inspection object using radiation that passes through the inspection object.

[0007] The present invention has been made to solve the problems (issues) associated with the above-mentioned conventional technology, and aims to provide a diffraction prevention jig and a transmission inspection device that can efficiently reduce the adverse effects of diffracted light from radiation diffracted at the boundary of an object to be inspected when radiation that has passed through the object to be inspected is detected by a detection unit. [Means for solving the problem]

[0008] In order to solve the above-mentioned problems and achieve the object, the present invention provides an anti-diffraction jig that is installed between an irradiation unit that radially irradiates radiation from a light source that penetrates an inspection object on which multiple substances are overlapped, and a detection unit that has a two-dimensional arrangement of multiple detection elements that detects the radiation that has penetrated the inspection object, the jig having an edge of the inspection object at one end and a side that follows a straight line connecting the light source and the edge of the inspection object, and that prevents the detection unit from detecting radiation diffracted at the edge of the inspection object.

[0009] In addition, the present invention is characterized in that, in the above invention, it comprises a main body consisting of a metal structure having one end at the end of the object to be inspected and a side along a straight line connecting the light source and the end of the object to be inspected, and an adjustment mechanism that can adjust the height and angle of the main body.

[0010] The present invention is also characterized by comprising an irradiation unit that radially irradiates radiation from a light source that penetrates an inspection object having a plurality of overlapping substances, a detection unit that has a plurality of detection elements arranged two-dimensionally and detects the radiation that has penetrated the inspection object, a diffraction prevention jig that has one end at an edge of the inspection object and a side along a straight line connecting the light source and the edge of the inspection object, and that prevents the detection unit from detecting radiation diffracted at the edge of the inspection object, and an inspection unit that inspects the inspection object based on the detection result by the detection unit.

[0011] In the present invention, the diffraction prevention jig is installed so that no gap is formed between the diffraction prevention jig and the detection unit.

[0012] Furthermore, in the above invention, the present invention is characterized in that the inspection unit extracts information about a specified coating agent applied to the edge of the object to be inspected based on the detection result by the detection unit, and inspects the object to be inspected based on the extracted information about the coating agent.

[0013] Furthermore, in the above invention, the present invention is characterized in that the inspection unit extracts the difference between a reference image of the object to be inspected before the application of the coating agent and a radiological image generated based on the detection results detected by the detection unit as information about the coating agent.

[0014] Furthermore, in the above invention, the present invention is characterized in that the inspection unit extracts information about the application agent using pixel values ​​of pixels forming a radiographic image generated based on the detection results detected by the detection unit and a predetermined threshold value.

[0015] In addition, in the above invention, the present invention is characterized in that the radiation is X-rays. [Effects of the Invention]

[0016] According to the present invention, when the dose of radiation that has passed through an object to be inspected is detected by a detection unit, the adverse effects of diffracted light from radiation diffracted at the boundary of the object to be inspected can be efficiently reduced. [Brief explanation of the drawings]

[0017] [Figure 1] FIG. 1 is a diagram showing an overview of a transmission inspection device according to an embodiment. [Figure 2] FIG. 2 is a diagram showing the structure of a transmission inspection device according to an embodiment. [Figure 3] FIG. 3 is a functional block diagram showing the configuration of the transmission inspection device shown in FIG. [Figure 4] FIG. 4 is a diagram showing an X-ray image detected by a transmission inspection device. [Figure 5] FIG. 5 is a diagram showing an X-ray image when the diffraction prevention jig has a rectangular parallelepiped shape. [Figure 6] FIG. 6 is a flowchart showing the processing procedure of the transmission inspection device shown in FIG. [Figure 7] FIG. 7 is a diagram showing a modified example of the diffraction prevention jig according to this embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0018] Hereinafter, embodiments of a diffraction prevention jig and a transmission inspection device according to the present invention will be described in detail with reference to the drawings. Note that the following embodiments will be described mainly with reference to the case where X-rays are used as an example of radiation.

[0019] <Overview of transmission inspection equipment> First, an overview of the transmission inspection device according to this embodiment will be described. Fig. 1 is a diagram showing an overview of the transmission inspection device according to this embodiment. In a conventional transmission inspection device, as shown in Fig. 1(a), an inspection object 30 is placed between an X-ray irradiation unit 23 (corresponding to the "radiation irradiation unit" in the claims) and a detection unit 24, and the detection unit 24 detects the dose of X-rays R that have been emitted from the X-ray irradiation unit 23 and transmitted through the inspection object 30.

[0020] An application material 31 such as an adhesive or a sealer is applied to the inspection object 30. The detection unit 24 detects the X-rays R that have passed through the inspection object 30, but also detects the diffracted light D of the X-rays R that have been diffracted at the boundary of the inspection object 30. As shown in Fig. 1(b), the diffracted light D also reaches the area of ​​the application material 31 in the X-ray image (corresponding to the "radiation image" in the claims) detected by the detection unit 24, making it difficult to extract the application material 31.

[0021] On the other hand, in the transmission inspection device according to this embodiment, as shown in FIG. 1( c), a diffraction prevention jig 40 is installed between the inspection object 30 and the detection unit 24. The diffraction prevention jig 40 has one end at the end of the inspection object 30 and a side facing the detection unit 24, which is along a straight line connecting the light source of the X-ray irradiation unit 23 and the end of the inspection object 30. This diffraction prevention jig 40 can suppress the generation of diffracted light D of the X-rays R diffracted at the boundary of the inspection object 30. The detection unit 24 and the diffraction prevention jig 40 are installed so that there is no gap between them.

[0022] As shown in Figure 1(d), the X-ray image detected by the detection unit 24 of the transmission inspection device of this embodiment can reduce the influence of diffracted light D of X-rays R generated at the boundary of the inspection object 30, so that the coating material 31 can be extracted efficiently.

[0023] As described above, the transmission inspection device according to the present invention has the X-ray irradiation unit 23 and the detection unit 24, and performs inspection by placing the inspection object 30 and the diffraction prevention jig 40 between the X-ray irradiation unit 23 and the detection unit 24, and detecting the X-rays R that have passed through the inspection object 30 with the detection unit 24. When capturing an X-ray image of the inspection object 30, the X-rays R are diffracted at the end surface of the inspection object 30, and the diffraction prevention jig 40 is placed so that there is no gap between the inspection object 30 and the detection unit 24 so that the diffracted X-rays R are not detected by the detection unit 24. Furthermore, the side of the diffraction prevention jig 40 is formed, with one end at the end of the inspection object 30, toward the detection unit 24 so as to follow the straight line connecting the light source of the X-ray irradiation unit 23 and the end of the inspection object 30. This makes it possible to efficiently reduce the adverse effects of diffracted light D of the X-rays R diffracted at the boundary of the inspection object.

[0024] <Configuration of transmission inspection device 20> Next, the configuration of the transmission inspection device 20 according to this embodiment will be described. Fig. 2 is a diagram showing the configuration of the transmission inspection device according to this embodiment. As shown in Fig. 2, the transmission inspection device 20 has an X-ray irradiation unit 23 and a detection unit 24, and an inspection object 30 is attached to a diffraction prevention jig 40 and placed between the X-ray irradiation unit 23 and the detection unit 24.

[0025] The transmission inspection device 20 is an apparatus that performs processes such as turning on / off the irradiation of X-rays R from the X-ray irradiation unit 23, acquiring an X-ray image detected by the detection unit 24, extracting and inspecting the coating material 31 applied to the inspection object 30 from the X-ray image, and displaying the inspection results. The X-ray irradiation unit 23 is a processing unit that irradiates the inspection object 30 with X-rays R. The detection unit 24 is a processing unit that detects the X-rays R that have passed through the inspection object 30 and generates an X-ray image.

[0026] The diffraction prevention jig 40 is composed of a main body made of a metal structure having one end at the end of the object to be inspected 30 and a side along a straight line connecting the light source of the X-ray irradiation unit 23 and the end of the object to be inspected 30, and an adjustment mechanism that can adjust the height and angle of the main body, and is installed between the X-ray irradiation unit 23 and the detection unit 24.

[0027] <Functional blocks of the transmission inspection device 20> Next, the functional blocks of the transmission inspection device 20 will be described. Fig. 3 is a functional block diagram showing the configuration of the transmission inspection device 20 shown in Fig. 2. The transmission inspection device 20 has a storage unit 25 and a control unit 26, and is connected to a display unit 21, an input unit 22, an X-ray irradiation unit 23, and a detection unit 24. The display unit 21 is a display device such as a liquid crystal display that displays various information. The input unit 22 is an input device such as a mouse or keyboard.

[0028] The X-ray irradiation unit 23 is a device that irradiates the inspection object 30 with X-rays R. Specifically, it is a device that has a cathode and an anode provided in a vacuum container, applies a high voltage between the cathode and the anode, and generates X-rays R when an electron beam generated from the cathode collides with the anode.

[0029] The detection unit 24 is a device that detects the X-rays R irradiated from the X-ray irradiation unit 23. Specifically, detection elements using semiconductors as photoelectric conversion materials are arranged two-dimensionally, and the X-rays R are converted into electric charges in each detection element, and the electric charges are read out to generate an X-ray image.

[0030] The storage unit 25 is a storage device such as a hard disk drive or a nonvolatile memory, and stores reference X-ray image data 25a and X-ray image data 25b. The reference X-ray image data 25a is data of an X-ray image captured in advance of a reference inspection object 30 that is not coated with coating material 31. The X-ray image data 25b is data of an X-ray image detected by the detection unit 24.

[0031] The control unit 26 is a control unit that controls the entire transmission inspection device 20, and has an irradiation control unit 26a, a detection image acquisition unit 26b, an inspection object inspection processing unit 26c (corresponding to the "inspection unit" in the claims), and a display control unit 26d. In practice, by loading these programs into a CPU and executing them, the irradiation control unit 26a, the detection image acquisition unit 26b, the inspection object inspection processing unit 26c, and the display control unit 26d execute the processes corresponding to them, respectively.

[0032] The irradiation control unit 26a is a processing unit that controls ON / OFF of the irradiation of X-rays R by the X-ray irradiation unit 23. The detected image acquisition unit 26b is a processing unit that acquires the X-ray image generated by the detection unit 24.

[0033] The inspection object inspection processing unit 26c is a processing unit that extracts detection objects such as the coating material 31 applied to the inspection object 30 from the X-ray image acquired by the detection image acquisition unit 26b, and performs inspection based on information on the extracted coating material 31. Specifically, it calculates the difference between a reference X-ray image of the reference inspection object 30 and the X-ray image acquired by the detection image acquisition unit 26b, extracts the coating material 31 superimposed on the reference detection object as the inspection object, and performs inspection. The inspection determines, for example, whether the extracted coating material 31 has a predetermined shape.

[0034] The display control unit 26d is a processing unit that controls the display on a predetermined display unit 21 of the image of the inspection object and the inspection results extracted by the inspection object inspection processing unit 26c.

[0035] Next, an X-ray image detected by the transmission inspection device 20 shown in Fig. 2 will be described. Fig. 4 is a diagram showing an X-ray image detected by the transmission inspection device 20. As shown in Fig. 4(a), the inspection object 30 is placed at one end of the diffraction prevention jig 40 so that no gap is created between the inspection object 30 and the diffraction prevention jig 40.

[0036] The other end of the diffraction prevention jig 40 is installed on the detection unit 24 so that no gap is formed between the diffraction prevention jig 40 and the detection unit 24. X-rays R are emitted from the X-ray irradiation unit 23, and the X-rays R that have passed through the inspection object 30 reach the detection unit 24. An X-ray image P is generated by the detection unit 24 and captured by the transmission inspection device 20.

[0037] 4(b), the X-ray image P captured by the transmission inspection device 20 captures the diffraction prevention jig 40, the inspection object 30, and the coating material 31 applied to the inspection object 30. The side surface of the diffraction prevention jig 40 is formed in the direction of the detection unit 24 so that one end of the side surface forms the edge of the inspection object 30 and the other end is along a straight line connecting the light source of the X-ray irradiation unit 23 and the edge of the inspection object 30, and therefore the shape of the frame of the diffraction prevention jig 40 is captured in the X-ray image P.

[0038] Furthermore, since the coating material 31 applied to the object to be inspected 30 is formed so as to overlap the object to be inspected 30, the X-rays R that pass through the object to be inspected 30 are absorbed by the coating material 31, and the portion of the coating material 31 is displayed with lower brightness than the portion of the object to be inspected 30.

[0039] Here, a case where the shape of the anti-diffraction jig 40 is a rectangular parallelepiped will be described. FIG. 5 is a diagram showing an X-ray image when the shape of the anti-diffraction jig is a rectangular parallelepiped. As shown in FIG. 5( a), the inspection object 30 is attached to one end of the anti-diffraction jig 41, which has a rectangular parallelepiped shape, so that there is no gap between the inspection object 30 and the anti-diffraction jig 41. The other end of the anti-diffraction jig 41 is installed on the detection unit 24 so that there is no gap between the anti-diffraction jig 41 and the detection unit 24. X-rays R are emitted from the X-ray irradiation unit 23, and the X-rays R that have passed through the inspection object 30 reach the detection unit 24. The detection unit 24 generates an X-ray image P, which is then captured by the transmission inspection device 20.

[0040] As shown in Fig. 5(b), the X-ray image P captured by the transmission inspection device 20 captures the diffraction prevention jig 41, the inspection object 30, and the coating material 31 applied to the inspection object 30. Since the X-rays R irradiated from the X-ray irradiator 23 are irradiated radially from the X-ray irradiator 23, the X-rays R that have passed through the inspection object 30 further pass through the diffraction prevention jig 41 and are detected by the detector 24. Therefore, as shown in Fig. 4(b), the rectangular parallelepiped diffraction prevention jig 41 is captured in the X-ray image P as a shadow on the outer periphery of the inspection object 30.

[0041] Therefore, the X-ray image of the coating material 31 applied to the inspection object 30 overlaps with the area where the rectangular parallelepiped anti-diffraction jig 41 is imaged, so when the X-ray image is captured by the transmission inspection device 20 and an inspection object such as the coating material 31 is extracted, there may not be enough difference in brightness with the image of the anti-diffraction jig 41, making it impossible to detect.

[0042] Next, a processing procedure of the transmission inspection device 20 shown in Fig. 3 will be described. Fig. 6 is a flowchart showing the processing procedure of the transmission inspection device 20 shown in Fig. 3. As shown in Fig. 6, the transmission inspection device 20 turns on the X-ray irradiation unit 23 (step S101). Then, the transmission inspection device 20 acquires an X-ray image from the detection unit 24 (step S102).

[0043] Thereafter, the transmission inspection device 20 extracts an inspection object based on the X-ray image and performs inspection (step S103).The transmission inspection device 20 then controls the display of the extracted inspection object and the inspection results on a predetermined display unit 21 (step S104).

[0044] As described above, in this embodiment, the transmission inspection device 20 is an apparatus that is connected to the X-ray irradiation unit 23 and the detection unit 24, and performs inspection by placing the inspection object 30 and the diffraction prevention jig 40 between the X-ray irradiation unit 23 and the detection unit 24, and detecting the X-rays R that have passed through the inspection object 30 with the detection unit 24. When capturing a transmission image (X-ray image) of the object under inspection 30, X-rays R are diffracted at the end surface of the object under inspection 30, and the diffraction prevention jig 40 is installed so that there is no gap between it and the object under inspection 30 and the detection unit 24 so that the diffracted light D is not detected by the detection unit 24.In addition, the metal structure of the diffraction prevention jig 40 has one end at the end of the object under inspection 30 and is shaped toward the detection unit 24 so as to follow the straight line connecting the light source of the X-ray irradiation unit 23 and the end of the object under inspection 30.The coating material 31 applied to the object under inspection 30 is extracted from the acquired X-ray image and inspected.Therefore, when the detection unit detects radiation that has passed through the object under inspection, the adverse effects of diffracted light from radiation diffracted at the boundary of the object under inspection can be efficiently reduced.

[0045] In the above embodiment, the transmission inspection device 20 captures an image of a reference inspection object that has not been coated with the coating material 31 or the like in advance to prepare a reference X-ray image, and then calculates the difference between the X-ray image coated with the coating material 31 or the like and the reference X-ray image to extract the detected object. However, extraction of the coating material 31 or the like may also be performed based on the pixel values ​​of the pixels that form the captured X-ray image and a predetermined threshold value.

[0046] Furthermore, in the above embodiment, a case has been described in which a metal structure is used as the diffraction prevention jig 40, but the diffraction prevention jig 40 may also be configured using another structure that blocks X-rays R. For example, the diffraction prevention jig 40 may also be configured by applying multiple layers of paint containing lead, iron, and titanium to wood.

[0047] <Modification> In the above embodiment, the case where the shape of the inspection object 30 is rectangular has been described, but in this modified example, the case where the shape of the inspection object 30 is circular will be described. Fig. 7 is a diagram showing an outline of a modified example of the diffraction prevention jig.

[0048] 7, the transmission inspection device 20 is connected to an X-ray irradiation unit 23 and a detection unit 24. The diffraction prevention jig 42 has a conical shape with a portion of the apex removed. The cone has its apex at the light source of the X-ray irradiation unit 23 and its generating line defined by the trajectory of the X-rays R that travel from the light source of the X-ray irradiation unit 23 through the circumferential portion of the circular inspection object 32 to reach the detection unit 24, and a metal structure on the side is formed on the generating line.

[0049] In the transmission inspection device 20, the diffraction prevention jig 42 is installed so that no gap is created between the diffraction prevention jig 42 and the inspection object 32. Furthermore, the diffraction prevention jig 42 is installed so that no gap is created between the detection unit 24 and the diffraction prevention jig 42. Note that, although the modified example has been described in which the inspection object 32 is circular, the inspection object 32 may have any shape. In this case, the diffraction prevention jig 42 is created to match the shape of the inspection object 32. Furthermore, a device such as a 3D printer may be used to create the diffraction prevention jig 42.

[0050] In the above embodiment, the case where X-rays R are used as an example of radiation is described, but the present invention can also be applied to the case where radiation such as gamma rays that penetrate an inspection object is used.

[0051] Furthermore, in the above embodiment, the case where the detector 24 and the diffraction prevention jig 40 are separate structures has been described, but the detector 24 and the diffraction prevention jig 40 may also be integrated.

[0052] The configurations illustrated in the above embodiments are merely functional schematics and are not necessarily physically configured as shown. In other words, the distribution and integration of each device is not limited to the illustrated configuration, and all or part of the devices can be functionally or physically distributed and integrated in any unit depending on various loads, usage conditions, etc. [Industrial Applicability]

[0053] The diffraction prevention jig and transmission inspection device of the present invention are suitable for efficiently reducing the adverse effects of diffracted light from radiation diffracted at the boundary of an object to be inspected when radiation that has passed through the object to be inspected is detected by a detection unit. [Explanation of symbols]

[0054] 20 Transmission inspection equipment 21 Display section 22 Input section 23 X-ray irradiation section 24 Detection unit 25 Memory section 25a Reference X-ray image data 25b X-ray image data 26 Control Unit 26a Irradiation control unit 26b Detected image acquisition unit 26c Inspection item inspection processing section 26d Display control unit 30, 32 Inspection object 31 Liniment 40, 41, 42 Diffraction prevention jig

Claims

1. a diffraction prevention jig disposed between an irradiation unit that radially irradiates radiation from a light source that penetrates an inspection object having a plurality of overlapping substances, and a detection unit that detects the radiation that has penetrated the inspection object and has a plurality of detection elements that are two-dimensionally arranged, A diffraction prevention jig having an end of the object to be inspected as one end and a side along a straight line connecting the light source and the end of the object to be inspected, characterized in that it prevents radiation diffracted at the end of the object to be inspected from being detected by the detection unit.

2. a main body made of a metal structure having an end of the inspection object at one end and a side surface along a straight line connecting the light source and the end of the inspection object; an adjustment mechanism that can adjust the height and angle of the main body; The diffraction prevention jig according to claim 1, further comprising:

3. an irradiation unit that radiates radiation from a light source that penetrates an inspection object having a plurality of overlapping substances; a detection unit in which a plurality of detection elements are two-dimensionally arranged to detect radiation that has passed through the inspection object; a diffraction prevention jig having an end of the inspection object as one end and a side along a straight line connecting the light source and the end of the inspection object, the diffraction prevention jig preventing the detection unit from detecting radiation diffracted at the end of the inspection object; an inspection unit that inspects the inspection object based on the detection result by the detection unit; A transmission inspection device comprising:

4. The diffraction prevention jig is 4. The transmission inspection device according to claim 3, wherein the transmission inspection device is installed so as not to create a gap between the detection unit and the detection section.

5. The inspection unit The transmission inspection device described in claim 3, characterized in that information about a specified coating agent applied to the edge of the object to be inspected is extracted based on the detection results by the detection unit, and the object to be inspected is inspected based on the extracted information about the coating agent.

6. The inspection unit The transmission inspection device according to claim 5, characterized in that the difference between a reference image of the object to be inspected before the application of the coating material and a radiographic image generated based on the detection results detected by the detection unit is extracted as information about the coating material.

7. The inspection unit 6. The transmission inspection device according to claim 5, wherein information about the coating material is extracted using pixel values ​​of pixels forming a radiographic image generated based on the detection results detected by the detection unit and a predetermined threshold value.

8. The radiation is 8. The transmission inspection device according to claim 3, wherein the transmission inspection device is an X-ray inspection device.

Images