Substrate storage container, front retainer, substrate transport device, and substrate transport method

Abstract

To provide a technique for safely transporting a thin substrate.SOLUTION: The substrate storage container 10 includes a container body 12 having an opening 16, a lid 14 for closing the opening 16, and a front retainer 24 provided on the lid 14. The container main body 12 has the first holding grooves 32 capable of holding the edge portions of the substrates W stored through the opening portion 16. The front retainer 24 has a second holding groove 34 capable of holding an edge portion of the substrate W. In a state where the opening 16 is closed by the lid body 14, the substrate W is held by the first holding groove 32 and the second holding groove 34 in a state of being displaceable in the thickness direction of the substrate W with respect to at least one of the first holding groove 32 and the second holding groove 34.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a substrate storage container, a front retainer, a substrate transport device, and a substrate transport method. [Background technology]

[0002] In semiconductor manufacturing processes, substrate storage containers called FOSBs (Front Opening Shipping Boxes) are used to transport substrates such as semiconductor wafers. For example, the substrates are transported while being held between a rear retainer provided on the container body and a front retainer provided on a lid that closes the opening of the container body (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2006-120791 Summary of the Invention [Problem to be solved by the invention]

[0004] In recent years, in order to improve the characteristics of semiconductor devices, the backside of a substrate is often ground to thin the substrate during the semiconductor manufacturing process. However, when thinned substrates are transported between factories using conventional substrate storage containers, there is a high risk of the substrates being broken or damaged.

[0005] It is an exemplary object of an embodiment of the present invention to provide a technique for safely transporting thin substrates. [Means for solving the problem]

[0006] A substrate storage container according to one embodiment of the present invention includes a container body having an opening, a lid that closes the opening, and a front retainer attached to the lid. The container body has a first holding groove that can hold the edge of a substrate stored through the opening. The front retainer has a second holding groove that can hold the edge of the substrate. When the opening is closed by the lid, the substrate is held by the first holding groove and the second holding groove in a state in which the substrate can be displaced in the thickness direction of the substrate relative to at least one of the first holding groove and the second holding groove.

[0007] Another aspect of the present invention is a front retainer attached to a lid that closes an opening of a container body. The container body has a first holding groove that can hold the edge of a substrate stored through the opening. The front retainer has a second holding groove that can hold the edge of the substrate. When the opening is closed by the lid, the substrate is held by the first holding groove and the second holding groove in a state where it can be displaced in the thickness direction of the substrate relative to at least one of the first holding groove and the second holding groove.

[0008] Yet another aspect of the present invention is a substrate transport device, the device comprising: a substrate storage container according to an aspect of the present invention; a packaging box for accommodating the substrate storage container; and a buffer structure disposed between the substrate storage container and the packaging box, the buffer structure including a flat foam member and a corrugated foam member that are stacked together.

[0009] Another aspect of the present invention is a substrate transport method. This method includes the steps of storing a substrate in a container body having an opening, closing the opening with a lid body having a front retainer and holding the substrate by a first holding groove in the container body and a second holding groove in the front retainer, and transporting the container body with the opening closed by the lid body. In the transporting step, the substrate is held by the first holding groove and the second holding groove in a state in which it can be displaced in the thickness direction of the substrate relative to at least one of the first holding groove and the second holding groove. [Effects of the Invention]

[0010] According to one aspect of the present invention, a technique for safely transporting thin substrates can be provided. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is an external perspective view showing a substrate storage container according to an embodiment. [Figure 2] 1A and 1B are diagrams schematically showing a configuration of a substrate storage container according to an embodiment. [Figure 3] 1A and 1B are diagrams schematically showing a configuration of a substrate storage container according to an embodiment. [Figure 4] FIG. 4 is a cross-sectional view schematically showing the configuration of a second holding groove. [Figure 5] 10A to 10C are diagrams schematically showing a process of storing substrates in a substrate storage container. [Figure 6] 10A to 10C are diagrams schematically showing a process of storing substrates in a substrate storage container. [Figure 7] 10A to 10C are diagrams schematically showing a process of storing substrates in a substrate storage container. [Figure 8] 10A to 10C are diagrams schematically showing a process of storing substrates in a substrate storage container. [Figure 9] 1 is a diagram schematically illustrating a configuration of a substrate transport device according to an embodiment. [Figure 10] 10A and 10B are diagrams schematically showing the configuration of a substrate storing container according to a modified example. [Figure 11] FIG. 10 is a diagram schematically showing the configuration of a substrate storage container according to another modified example. DETAILED DESCRIPTION OF THE INVENTION

[0012] Hereinafter, embodiments for carrying out the present invention will be described in detail. Note that the configurations described below are examples and do not limit the scope of the present invention in any way. Furthermore, in the description of the drawings, the same elements are given the same reference numerals, and duplicate explanations will be omitted as appropriate. Furthermore, in the drawings referred to in the following description, the size and thickness of each component are for the convenience of explanation and do not necessarily represent the actual dimensions or ratios.

[0013] An overview of this embodiment will be described. This embodiment is a substrate storage container for safely transporting thin substrates. In conventional substrate storage containers, substrates are held by a first holding groove provided in a rear retainer or the like of the container body and a second holding groove provided in a front retainer of the lid. The second holding groove is formed in an elastic piece that can swing relative to the lid, and the substrate is pressed and held by the elastic force of the elastic piece. The substrates stored in the substrate storage container are, for example, semiconductor wafers, for example, silicon wafers with a diameter of 300 mm and a thickness of, for example, 775 μm.

[0014] In recent years, in order to improve the characteristics of semiconductor devices, the backside of a substrate is often ground to thin the substrate during semiconductor manufacturing processes. For example, a process is sometimes used in which the thickness of the substrate is reduced to 100 μm or less (e.g., approximately 50 μm) excluding the edge portion (e.g., a width of approximately 3 mm from the edge). This process increases the risk of substrate damage compared to before thinning. The inventors have found that when minute vibrations are applied to the substrate in the thickness direction, the thinned portion (e.g., the central portion) of the substrate resonates, increasing the risk of damage. In conventional substrate storage containers, substrates are held in the container so as not to be displaced in the thickness direction. However, when minute vibrations are applied to the container, the vibrations are transmitted to the substrate, resulting in cracking. Therefore, in this embodiment, in order to prevent vibrations from being transmitted to the substrate in the thickness direction, the substrate is held in a state in which it can be displaced in the thickness direction. This embodiment reduces the risk of damage to the thinned substrate and enables safe transportation of the thinned substrate.

[0015] 1 is an external perspective view showing a substrate storage container 10 according to an embodiment. The substrate storage container 10 includes a container body 12 and a lid 14.

[0016] The container body 12 has an opening 16 through which the substrate W to be stored is inserted and removed. The opening 16 is provided on the front surface of the container body 12. The lid 14 can be attached to the container body 12 so as to close the opening 16. The lid 14 can be fixed so as not to move relative to the container body 12 when the opening 16 is closed. The lid 14 can be removed from the container body 12 in order to remove the substrate W from the container body 12.

[0017] The container body 12 has support portions 18 for supporting the edges of the substrate W. The support portions 18 are provided on the side walls inside the container body 12. While FIG. 1 shows the support portion 18 provided on the right side wall, a similar support portion is also provided on the left side wall opposite the right side wall. The support portion 18 has a plurality of ribs 20 arranged at intervals in a predetermined direction (vertical direction). The plurality of ribs 20 protrude inward from the side wall of the container body 12 in a shelf-like manner. The substrate W can be stored between the plurality of ribs 20 and supported horizontally by a pair of left and right ribs 20. The substrate W can be placed on one of the plurality of ribs 20 (more precisely, one pair of left and right ribs 20).

[0018] 1, the direction from the container body 12 toward the lid body 14 is referred to as the front, and the direction from the lid body 14 toward the container body 12 is referred to as the rear. The thickness direction of the substrates W stored in the substrate storage container 10 is referred to as the up-down direction, and the direction in which the support parts 18 are provided as viewed from the substrates W is referred to as the left-right direction.

[0019] The shape of the substrate W stored in the substrate storage container 10 is not particularly limited and may be circular or rectangular. When the substrate W is circular, the diameter of the substrate W is not particularly limited and may be, for example, 200 mm, 250 mm, or 300 mm. The thickness of the substrate W is also not particularly limited and may be, for example, greater than 500 μm, or 500 μm or less, such as 300 μm or less, 200 μm or less, or 100 μm or less. The substrate W may be a wafer that has been subjected to a thinning process such as grinding, and may have a shape that is thicker at the edge and thinner at the center.

[0020] The container body 12 and the lid 14 can be constructed by combining multiple components molded from, for example, metal or resin materials. Examples of resin materials used for the resin components include thermoplastic resins such as polycarbonate, polyolefin, polyetherimide, polyetherketone, polyetheretherketone, polybutylene terephthalate, polyacetal, and acrylic resins such as polymethyl methacrylate, and acrylonitrile butadiene styrene copolymers, as well as alloys thereof. These resin materials may also contain conductive materials such as carbon powder, carbon nanotubes, and conductive polymers, as well as anionic, cationic, or nonionic antistatic agents, as needed. Furthermore, reinforcing fibers such as glass fiber and carbon fiber may also be added to improve rigidity.

[0021] 2 is a diagram schematically illustrating the configuration of a substrate storage container 10 according to an embodiment, as viewed in the thickness direction (i.e., the vertical direction) of the stored substrates W. In Fig. 2, an opening 16 of the container body 12 is closed by a lid 14. The positions of the stored substrates W are indicated by dashed lines.

[0022] The container body 12 has a rear retainer 22 provided at the rear portion opposite the opening 16. The rear retainer 22 has a first holding groove for holding the edge of the substrate W. The container body 12 can have a pair of rear retainers 22 provided, for example, at left and right positions at the rear portion of the container body 12. The rear retainer 22 is, for example, a member that is detachable from the container body 12. The rear retainer 22 may be formed integrally with the container body 12. Note that the position of the rear retainer 22 is not limited to the position shown in FIG. 2. The rear retainer 22 may be provided at a side of the container body rather than at the rear portion of the container body 12. The rear retainer 22 may be formed integrally with the rib 20, or the rear end of the rib 20 may be formed as the rear retainer 22.

[0023] The substrate storage container 10 further includes a front retainer 24. The front retainer 24 is provided on the inner surface of the lid 14, near the center of the lid 14 in the left-right direction. The front retainer 24 has a base 26 and a protrusion 28. The base 26 is a plate-shaped member, and is attached to a locking portion 30 provided on the inner surface of the lid 14. The protrusion 28 is a member that protrudes inward (rearward) from the base 26. The protrusion 28 has a second holding groove for holding the edge of the substrate W. The front retainer 24 is a member that is detachable from the lid 14. The front retainer 24 may be formed integrally with the lid 14.

[0024] The rear retainer 22 and the front retainer 24 can be molded from the same resin material as the container body 12. Examples of such materials include polycarbonate, polyolefin, polyetherimide, polyetherketone, polyetheretherketone, polybutylene terephthalate, polyacetal, acrylic resins such as polymethyl methacrylate, thermoplastic resins such as acrylonitrile butadiene styrene copolymer, fluorine-based resins such as polytetrafluoroethylene and perfluoroalkoxyalkane, and alloys thereof. The rear retainer 22 and the front retainer 24 may contain a sliding agent such as silicon particles added to these resin materials. The surfaces of the rear retainer 22 and the front retainer 24 may be coated with a low-friction material. Examples of low-friction materials include resin materials containing the above-mentioned sliding agents, fluorine-based resins, polyacetal, polyamide, etc. The rear retainer 22 and the front retainer 24 may each be integrally formed from the above-mentioned low-friction material. This reduces friction between the rear retainer 22 and the front retainer 24 and the substrate W. Furthermore, the rear retainer 22 and the front retainer 24 can be easily manufactured by additive manufacturing using a 3D printer or the like or injection molding.

[0025] 3 is a diagram schematically illustrating the configuration of a substrate storage container 10 according to an embodiment, showing the stored substrates W as viewed from the side (left-right direction). In FIG. 3, an opening 16 of a container body 12 is closed by a lid 14.

[0026] The support portion 18 has, for example, 26 ribs 20. The pitch p of the ribs 20 is, for example, 10 mm. The thickness t of the ribs 20 is, for example, 2 mm. The spacing d between the ribs 20 is, for example, 8 mm. The substrate W can be placed in the storage spaces 36 between the ribs 20. The number of storage spaces 36 is, for example, 25.

[0027] The rear retainer 22 has a plurality of first retaining grooves 32 arranged in a predetermined direction (vertical direction). The first retaining grooves 32 have a tapered shape in which the opening width in the predetermined direction (vertical direction) narrows toward the rear of the container body 12. The first retaining grooves 32 are provided at positions corresponding to the storage spaces 36 between two adjacent ribs 20. The number of first retaining grooves 32 is the same as the number of storage spaces 36, for example, 25. The pitch p1 of the first retaining grooves 32 is the same as the pitch p of the plurality of ribs 20 of the support portion 18.

[0028] The front retainer 24 has a plurality of second retaining grooves 34 arranged in a predetermined direction (vertical direction). The second retaining grooves 34 have a tapered shape in which the opening width in the predetermined direction (vertical direction) narrows toward the front of the container body 12 (i.e., toward the lid 14). The second retaining grooves 34 are provided at positions corresponding to the storage spaces 36 between two adjacent ribs 20. The second retaining grooves 34 are not arranged corresponding to each of the storage spaces 36, but are arranged every other storage space 36. For example, the second retaining grooves 34 are arranged corresponding to odd-numbered storage spaces 36, but are not arranged corresponding to even-numbered storage spaces 36. The pitch p2 of the second retaining grooves 34 is twice the pitch p of the ribs 20 of the support portion 18, e.g., 20 mm. The number of the second retaining grooves 34 is half the number of the ribs 20, e.g., 13.

[0029] The front retainer 24 does not have to have a mechanism that allows the plurality of second holding grooves 34 to swing. The front retainer 24 does not have to have, for example, a deformable elastic piece or the like that allows each of the plurality of second holding grooves 34 to swing. The plurality of second holding grooves 34 may be formed, for example, directly on the protrusion 28 of the front retainer 24, and configured to be engaged with the lid body 14 in a state that does not allow them to swing relative to the lid body 14.

[0030] The first holding groove 32 and the second holding groove 34 are configured to hold a substrate W located in the corresponding storage space 36 when the opening 16 is closed by the lid 14. The substrate W is held, for example, so as to be located near a reference line 38 connecting the bottom of the first holding groove 32 and the bottom of the second holding groove 34. The substrate W held by the first holding groove 32 and the second holding groove 34 is spaced apart from both of the two adjacent ribs 20. The substrate W held by the first holding groove 32 and the second holding groove 34 is held so as to be displaceable relative to at least one of the first holding groove 32 and the second holding groove 34. Therefore, when the opening 16 is closed by the lid 14, the substrate W is not pressed down and completely fixed by the rear retainer 22 and the front retainer 24, but is held so as to be movable up and down and back and forth within a certain range. The substrate W is not necessarily held so as to be perfectly aligned with the reference line 38 connecting the bottom of the first holding groove 32 and the bottom of the second holding groove 34, but can also be held at a position displaced in the thickness direction of the substrate W relative to the reference line 38.

[0031] A reference line 38 connecting the bottom of the first holding groove 32 and the bottom of the second holding groove 34 is parallel to the mounting surface of the rib 20 (the surface that comes into contact with the substrate W). In other words, the bottom of the second holding groove 34 is aligned in the vertical direction with the bottom of the corresponding first holding groove 32. Note that the reference line 38 connecting the bottom of the first holding groove 32 and the bottom of the second holding groove 34 may be inclined with respect to the mounting surface of the rib 20. In other words, the bottom of the second holding groove 34 may be offset in the vertical direction from the bottom of the corresponding first holding groove 32. For example, the bottom of the second holding groove 34 may be positioned lower than the bottom of the corresponding first holding groove 32.

[0032] FIG. 4 is a cross-sectional view schematically illustrating the configuration of the second holding groove 34. The second holding groove 34 has a first tapered surface 40 and a second tapered surface 42. The first tapered surface 40 is located on the bottom side of the second holding groove 34, and the second tapered surface 42 is located on the inlet side of the second holding groove 34. The first inclination angle α of the first tapered surface 40 relative to the reference line 38 is smaller than the second inclination angle β of the second tapered surface 42 relative to the reference line 38. The first inclination angle α is 40 degrees or less, for example, 15 degrees or more or 20 degrees or more, and for example, 35 degrees or less or 30 degrees or less. The second inclination angle β is 40 degrees or more, for example, 45 degrees or more or 50 degrees or more, and for example, 75 degrees or less or 60 degrees or less. Each of the first tapered surface 40 and the second tapered surface 42 may have an inclination angle that does not remain constant but varies depending on the depth position. Each of the first tapered surface 40 and the second tapered surface 42 may be configured so that the inclination angle decreases as the surface approaches the bottom of the second retaining groove 34 .

[0033] The first tapered surface 40 is a portion that comes into contact with and holds the edge of the substrate W when the opening 16 is closed by the lid 14. By reducing the first inclination angle α of the first tapered surface 40, it is possible to limit the maximum amount of displacement of the substrate W in the thickness direction when the opening 16 is closed by the lid 14. The second tapered surface 42 functions to guide the edge of the substrate W toward the first tapered surface 40 when the lid 14 is attached to the opening 16. By increasing the second inclination angle β of the second tapered surface 42, it is possible to appropriately guide the edge of the substrate W toward the first tapered surface 40 even when the edge of the substrate W is located away from the reference line 38.

[0034] The opening width w1 of the first tapered surface 40 in a predetermined direction (vertical direction) is smaller than the pitch p between two adjacent ribs 20. The opening width w1 of the first tapered surface 40 may be smaller than the distance d between two adjacent ribs 20 (i.e., the distance d between the storage spaces 36). The opening width w1 of the first tapered surface 40 is, for example, less than 10 mm, such as 9 mm or less, 8 mm or less, or 7 mm or less. The opening width w1 of the first tapered surface 40 is, for example, 1 mm or more, 3 mm or more, or 5 mm or more. The opening width w2 of the second tapered surface 42 in a predetermined direction (vertical direction) is larger than the pitch p between two adjacent ribs 20. The opening width w2 of the second tapered surface 42 is larger than 10 mm, such as 12 mm or more, 14 mm or more, or 16 mm or more. The opening width w2 of the second tapered surface 42 is smaller than the pitch p2 of the second holding grooves 34, and is, for example, less than 20 mm, for example, 19 mm or less, 18 mm or less, or 17 mm or less.

[0035] The first tapered surface 40 and the second tapered surface 42 are preferably made of a material that is slippery when in contact with the edge of the substrate W. The first tapered surface 40 and the second tapered surface 42 may be made of, for example, a fluororesin. For example, the entire front retainer 24 may be made of a fluororesin, or only the surfaces of the first tapered surface 40 and the second tapered surface 42 may be coated with a fluororesin.

[0036] In this embodiment, the same container bodies 12 and lid bodies 14 as those of existing substrate storage containers can be used. For example, the substrate storage container 10 according to the embodiment can be constructed by replacing the front retainer used in the existing substrate storage container with the front retainer 24 according to this embodiment. For example, the existing front retainer can be removed from the locking portion 30 of the existing lid, and the front retainer 24 according to the embodiment can be attached to the locking portion 30 for use.

[0037] Next, a description will be given of the process of storing the substrates W inside the substrate storage container 10. For ease of explanation, Figs. 5 to 8 schematically show the arrangement of the ribs 20, rear retainer 22, and front retainer 24 provided on the substrate storage container 10.

[0038] Fig. 5 shows a state in which the lid 14 has been removed from the opening 16 of the container body 12. In Fig. 5, first, a robot hand or the like is used to carry the substrate W into the storage space 36 between two adjacent ribs 20, and the substrate W is placed on the ribs 20 of the support part 18. If the thickness of the substrate W placed on the ribs 20 is small, the front end 46 of the substrate W may hang down below the ribs 20 due to gravity.

[0039] FIG. 6 shows a state in which the lid 14 is placed on the opening 16 of the container body 12, and shows a state in which the opening 16 is not completely blocked by the lid 14. When the lid 14 is placed on the opening 16, the front retainer 24 comes close to the front end 46 of the substrate W, as shown in FIG. 6. When the front retainer 24 is moved rearward as indicated by arrow A, the front end 46 of the substrate W is inserted inside the second holding groove 34 and comes into contact with the second tapered surface 42. Because the opening width w2 at the entrance of the second tapered surface 42 is larger than the spacing d of the storage space and the rib 20 is positioned inside the opening width w2 at the entrance of the second tapered surface 42, the front end 46 of the substrate W can be properly inserted inside the second holding groove 34 even if the front end 46 of the substrate W hangs below the rib 20.

[0040] 6, when the front retainer 24 is further moved in the direction indicated by arrow A, the front end 46 of the substrate W is pushed by the second tapered surface 42 and moves upward, approaching the first tapered surface 40. Furthermore, as the front end 46 of the substrate W is pushed by the second tapered surface 42, the entire substrate W moves rearward. As a result, the rear end 48 of the substrate W comes into contact with the tapered surface 44 of the first holding groove 32.

[0041] FIG. 7 shows a state in which the opening 16 of the container body 12 is closed and fixed with the lid 14. At this time, the front end 46 of the substrate W is in contact with the first tapered surface 40 of the second holding groove 34 and is pushed upward by the first tapered surface 40 so as to approach the bottom of the second holding groove 34. The rear end 48 of the substrate W is in contact with the tapered surface 44 of the first holding groove 32 and is pushed upward by the tapered surface 44 so as to approach the bottom of the first holding groove 32. As a result, the entire substrate W is pushed upward so as to approach the reference line 38. Because the opening width w1 of the entrance of the first tapered surface 40 is smaller than the spacing d of the storage spaces and the rib 20 is positioned outside the opening width w1 of the entrance of the first tapered surface 40, the entire substrate W held by the first tapered surface 40 is separated from the rib 20 of the support portion 18. In this manner, the substrate W is held by the first holding groove 32 and the second holding groove 34.

[0042] FIG. 8 shows the substrate storage container 10 turned so that the substrate W is in an upright position. When the substrate storage container 10 is transported between factories, for example, the lid 14 is oriented vertically above the container body 12. As shown in FIG. 8, when the substrate W is in an upright position (vertical orientation), the rear end 48 of the substrate W is held in a state where it is recessed into the bottom of the first holding groove 32. At this time, the front end 46 of the substrate W is located further back than the entrance of the first tapered surface 40 and is held by the second holding groove 34 in a state where it is in contact with the first tapered surface 40. The front end 46 of the substrate W is held by the second holding groove 34 in a state where it is separated from the bottom of the second holding groove. The front end 46 of the substrate W may be temporarily separated from the first tapered surface 40. As a result, the substrate W is held by the first holding groove 32 and the second holding groove 34 in a state where it can be displaced in the thickness direction of the substrate W near the reference line 38.

[0043] In the state shown in Figure 8, the maximum displacement of the front end 46 of the substrate W in the thickness direction is smaller than the opening width w1 of the inlet of the first tapered surface 40. The maximum displacement of the front end 46 of the substrate W in the thickness direction is, for example, 1 mm or more, 2 mm or more, or 3 mm or more, and for example, 8 mm or less, 7 mm or less, or 5 mm or less. The maximum displacement of the front end 46 of the substrate W in the thickness direction is equal to or less than the distance d between two adjacent ribs 20. This prevents the substrate W from colliding with the ribs 20, and allows the substrate W to be held by the first holding groove 32 and the second holding groove 34 in a state where it can be displaced in the thickness direction.

[0044] 8, the maximum displacement amount h of the front end 46 of the substrate W in the height direction is, for example, 1 mm or more, 2 mm or more, or 3 mm or more, and for example, 6 mm or less, 5 mm or less, or 4 mm or less. By limiting the maximum displacement amount h of the front end 46 of the substrate W in the height direction, the risk of damage to the substrate W due to vertical movement of the substrate W can be reduced.

[0045] 9 is a diagram schematically showing the configuration of a substrate transport apparatus 70 according to an embodiment. The substrate transport apparatus 70 includes a substrate storage container 10, a packaging box 72, and a buffer structure 74. The substrate transport apparatus 70 is an apparatus for transporting the substrate storage container 10 according to the above-described embodiment between factories, and is configured by packaging the substrate storage container 10 using the packaging box 72 and the buffer structure 74.

[0046] The substrate storage container 10 is housed inside the packaging box 72 with the lid 14 facing vertically upward relative to the container body 12, i.e., with the substrates W facing upright. The packaging box 72 is made of a cardboard box or the like with cushioning properties. The cushioning structure 74 is disposed between the substrate storage container 10 and the packaging box 72, and fills the gap between the substrate storage container 10 and the packaging box 72. The cushioning structure 74 can include an upper cushioning structure 76 and a lower cushioning structure 78.

[0047] The upper buffer structure 76 is disposed vertically above the substrate storage container 10. The upper buffer structure 76 may include, for example, a first buffer member 80 and a second buffer member 82 that are stacked together. The first buffer member 80 and the second buffer member 82 are made of, for example, a foam member having an open-cell structure or a closed-cell structure, such as a sponge-like member such as urethane foam. The first buffer member 80 and the second buffer member 82 are, for example, flat foam members having flat surfaces.

[0048] The lower buffer structure 78 is disposed vertically below the substrate storage container 10. The lower buffer structure 78 may include, for example, a stacked third buffer member 84, a fourth buffer member 86, a fifth buffer member 88, a sixth buffer member 90, and a seventh buffer member 92. The third buffer member 84, the fourth buffer member 86, the fifth buffer member 88, and the sixth buffer member 90 are formed of, for example, a foam member having an open-cell structure or a closed-cell structure, such as a sponge-like member such as urethane foam. The third buffer member 84, the fourth buffer member 86, and the fifth buffer member 88 are, for example, flat foam members having flat surfaces. The third buffer member 84 and the fourth buffer member 86 may have openings, notches, recesses, etc. formed therein to accommodate the bottom of the substrate storage container 10. The sixth buffer member 90 is, for example, a corrugated foam member having a corrugated surface. The seventh buffer member 92 is formed of a shock-absorbing member, such as a gel-like member such as urethane gel or silicone gel.

[0049] 9, some of the cushioning members may be omitted or other cushioning members may be added. For example, only one of the first cushioning member 80 and the second cushioning member 82 may be used as the upper cushioning structure 76, or a corrugated foam member or a gel-like shock-absorbing member may be added. Furthermore, at least one of the third cushioning member 84, the fourth cushioning member 86, the fifth cushioning member 88, the sixth cushioning member 90, and the seventh cushioning member 92 may be used as the lower cushioning structure 78, or a corrugated foam member or a gel-like shock-absorbing member may be added.

[0050] According to this embodiment, by combining a flat foam member and a corrugated foam member as the buffer structure 74, it is possible to significantly reduce the value of the impact applied to the substrate storage container 10 when the substrate transport device 70 is dropped, and to significantly reduce the risk of damage to the transported substrates W. Furthermore, by further combining a shock-absorbing member made of a gel-like material or the like as the buffer structure 74, it is possible to further reduce the risk of damage to the transported substrates W.

[0051] In the above-described embodiment, the second retaining grooves 34 are disposed every other storage space 36. In a modified example, the second retaining grooves 34 may be disposed every third storage space 36. In a further modified example, the second retaining grooves 34 may be disposed corresponding to each storage space 36. In other words, the pitch p2 of the multiple second retaining grooves 34 may be the same as the pitch p of the multiple storage spaces 36.

[0052] Fig. 10 is a diagram schematically showing the configuration of a substrate storage container 10A according to a modified example. The modified example shown in Fig. 10 differs from the above-described embodiment in that multiple second holding grooves 34A provided in the front retainer 24A are arranged to correspond to each of the storage spaces 36. In the modified example, the number of second holding grooves 34A is the same as the number of storage spaces 36, for example, 25. Therefore, the substrate storage container 10A according to the modified example can store, for example, a maximum of 25 substrates W.

[0053] FIG. 10 shows the state in which the lid 14 is placed on the opening 16 of the container body 12, and corresponds to FIG. 6 in the above-described embodiment. The reference line 38A connecting the bottom of the first holding groove 32 and the bottom of the second holding groove 34A is not parallel to the mounting surface of the rib 20 but is inclined relative to the mounting surface of the rib 20. Specifically, the bottom of the second holding groove 34A is located lower than the bottom of the corresponding first holding groove 32. The opening width w2 of the entrance of the second holding groove 34A is located lower than the distance d between the corresponding two ribs 20. The rib 20 supporting the substrate is located inside the opening width w2 of the entrance of the second holding groove 34A. Therefore, even if the front end 46 of the substrate W hangs below the rib 20, the front end 46 of the substrate W can be properly inserted inside the second holding groove 34A. Furthermore, the rib 20 supporting the substrate is located outside the opening width w1 of the entrance of the first tapered surface 40 of the second holding groove 34A. 7, when the opening 16 is closed by the lid 14, the entire substrate W held by the first tapered surface 40 is separated from the ribs 20. As shown in FIG.

[0054] 8, in the modified example shown in Fig. 10, when the opening 16 is closed by the lid 14, the substrate W can be positioned near the reference line 38. Furthermore, when the opening 16 is closed by the lid 14, the front end 46 of the substrate W is held by the second holding groove 34 while being spaced apart from the bottom of the second holding groove. As a result, the substrate W is held by the first holding groove 32 and the second holding groove 34A while being displaceable in the thickness direction of the substrate W near the reference line 38.

[0055] Fig. 11 is a diagram schematically showing the configuration of a substrate storage container 10B according to another modified example. In the modified example shown in Fig. 11, similar to Fig. 10, multiple second holding grooves 34B provided in a front retainer 24B are arranged corresponding to each of the storage spaces 36. The modified example shown in Fig. 11 differs from the modified example shown in Fig. 10 in the position and shape of the second holding grooves 34B.

[0056] FIG. 11 shows the state in which the lid 14 is placed on the opening 16 of the container body 12, and corresponds to FIG. 6 in the above-described embodiment. A reference line 38B connecting the bottom of the first holding groove 32 and the bottom of the second holding groove 34B is parallel to the mounting surface of the rib 20. The opening width w2 of the entrance of the second holding groove 34B is shifted downward with respect to the reference line 38B. The opening width w2 of the entrance of the second holding groove 34B is narrower above the bottom of the second holding groove 34B and wider below the bottom of the second holding groove 34B. As a result, the rib 20 supporting the substrate W is positioned inside the opening width w2 of the entrance of the second holding groove 34B. Therefore, even if the front end 46 of the substrate W hangs below the rib 20, the front end 46 of the substrate W can be properly inserted inside the second holding groove 34B.

[0057] The opening width w1 of the entrance of the first tapered surface 40 of the second holding groove 34B is symmetrical in the vertical direction with respect to the reference line 38B. The opening width w1 of the entrance of the first tapered surface 40 of the second holding groove 34B is approximately the same above and below the bottom of the second holding groove 34B. In yet another modification, the opening width w1 of the entrance of the first tapered surface 40 of the second holding groove 34B may be narrower above the bottom of the second holding groove 34B and wider below the bottom of the second holding groove 34B. The rib 20 that supports the substrate W is positioned outside the opening width w1 of the entrance of the first tapered surface 40 of the second holding groove 34B. As a result, as in FIG. 7 , when the opening 16 is closed by the lid 14, the entire substrate W held by the first tapered surface 40 is separated from the rib 20.

[0058] In the modified example shown in Fig. 11, as in the embodiment shown in Fig. 8, the substrate W can be positioned near the reference line 38B when the opening 16 is closed by the lid 14. Also, as in Fig. 8, when the opening 16 is closed by the lid 14, the front end 46 of the substrate W is held by the second holding groove 34B in a state away from the bottom of the second holding groove. As a result, the substrate W is held by the first holding groove 32 and the second holding groove 34B in a state where it can be displaced in the thickness direction of the substrate W near the reference line 38B.

[0059] The present invention has been described above based on the embodiments. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that various design changes and modifications are possible, and that such modifications are also within the scope of the present invention. [Explanation of symbols]

[0060] 10, 10A, 10B...substrate storage container, 12...container body, 14...lid body, 16...opening, 18...support portion, 20...rib, 22...rear retainer, 24, 24A, 24B...front retainer, 32...first retaining groove, 34, 34A, 34B...second retaining groove, 36...storage space, 40...first tapered surface, 42...second tapered surface, 70...substrate transport device, 72...packaging box, 74...buffer structure.

Claims

1. The container includes a container body having an opening, a lid body that closes the opening, and a front retainer that is provided on the lid body, the container body has a first holding groove capable of holding an edge of a substrate accommodated through the opening, the front retainer has a second holding groove capable of holding an edge portion of the substrate; the substrate is held by the first holding groove and the second holding groove in a state in which the substrate can be displaced in a thickness direction of the substrate relative to at least one of the first holding groove and the second holding groove when the opening is closed by the lid body; Substrate storage container.

2. The substrate storage container according to claim 1 , wherein the substrate is held so as to be spaced apart from at least one of a bottom of the first holding groove and a bottom of the second holding groove when the opening is closed by the lid.

3. the container body further includes a support portion capable of supporting an edge portion of the substrate when the lid body is removed from the opening, The substrate storage container according to claim 1 , wherein the substrate is held by the first holding groove and the second holding groove in a state separated from the support portion when the opening is closed by the lid.

4. The support portion has a plurality of ribs arranged at intervals in a predetermined direction, the substrate is placed on one of the plurality of ribs in a state where the lid is removed from the opening, the second holding groove has a tapered shape in which an opening width in the predetermined direction decreases toward a bottom of the second holding groove, The substrate storage container according to claim 3 , wherein the one rib is located inside an opening width in the predetermined direction at an entrance of the second holding groove when the opening is closed by the lid.

5. The substrate storage container according to claim 4 , wherein the one rib is located outside the opening width in the specified direction at the point where the second holding groove contacts the substrate when the opening is closed by the lid.

6. The substrate storage container according to claim 1 , wherein the front retainer is made of a low-friction material.

7. A front retainer attached to a lid that closes an opening of a container body, the container body has a first holding groove capable of holding an edge of a substrate accommodated through the opening, the front retainer has a second holding groove capable of holding an edge portion of the substrate; A front retainer in which the substrate is held by the first retaining groove and the second retaining groove in a state in which the substrate can be displaced in the thickness direction of the substrate relative to at least one of the first retaining groove and the second retaining groove when the opening is blocked by the lid body.

8. A substrate storage container according to any one of claims 1 to 5; a packaging box that houses the substrate storage container; a buffer structure disposed between the substrate storage container and the packaging box, The substrate transport device, wherein the cushioning structure includes a flat foam member and a corrugated foam member that are stacked together.

9. The substrate transport apparatus of claim 8 , wherein the buffer structure further includes a laminated gel-like member.

10. a step of storing a substrate in a container body having an opening; a step of closing the opening with a lid provided with a front retainer and holding the substrate by a first holding groove of the container body and a second holding groove of the front retainer; and transporting the container body with the opening closed by the lid body, A substrate transporting method, wherein in the transporting step, the substrate is held by the first holding groove and the second holding groove in a state in which the substrate can be displaced in the thickness direction of the substrate relative to at least one of the first holding groove and the second holding groove.

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